ATE233397T1 - Vorrichtung zur feststellung einer relativen bewegung - Google Patents

Vorrichtung zur feststellung einer relativen bewegung

Info

Publication number
ATE233397T1
ATE233397T1 AT95922098T AT95922098T ATE233397T1 AT E233397 T1 ATE233397 T1 AT E233397T1 AT 95922098 T AT95922098 T AT 95922098T AT 95922098 T AT95922098 T AT 95922098T AT E233397 T1 ATE233397 T1 AT E233397T1
Authority
AT
Austria
Prior art keywords
grating
detector
phase
orders
poly
Prior art date
Application number
AT95922098T
Other languages
English (en)
Inventor
Donald K Mitchell
William G Thorburn
Original Assignee
Microe Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26941047&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE233397(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Microe Inc filed Critical Microe Inc
Application granted granted Critical
Publication of ATE233397T1 publication Critical patent/ATE233397T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Vehicle Body Suspensions (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
AT95922098T 1994-05-27 1995-05-25 Vorrichtung zur feststellung einer relativen bewegung ATE233397T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US25066694A 1994-05-27 1994-05-27
US08/394,224 US5486923A (en) 1992-05-05 1995-02-24 Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference
PCT/US1995/006415 WO1995033179A1 (en) 1994-05-27 1995-05-25 Apparatus for detecting relative movement

Publications (1)

Publication Number Publication Date
ATE233397T1 true ATE233397T1 (de) 2003-03-15

Family

ID=26941047

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95922098T ATE233397T1 (de) 1994-05-27 1995-05-25 Vorrichtung zur feststellung einer relativen bewegung

Country Status (7)

Country Link
US (2) US5486923A (de)
EP (1) EP0760932B2 (de)
JP (1) JP4037903B2 (de)
AT (1) ATE233397T1 (de)
CA (1) CA2191329C (de)
DE (1) DE69529745T3 (de)
WO (1) WO1995033179A1 (de)

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JP3312086B2 (ja) * 1994-05-19 2002-08-05 株式会社リコー エンコーダ装置
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AU2003247899A1 (en) * 2002-07-08 2004-01-23 Microe Systems Corporation Multi-track optical encoder employing beam divider
DE10333772A1 (de) * 2002-08-07 2004-02-26 Dr. Johannes Heidenhain Gmbh Interferenzielle Positionsmesseinrichtung
US6992764B1 (en) 2002-09-30 2006-01-31 Nanometrics Incorporated Measuring an alignment target with a single polarization state
US7299991B2 (en) * 2003-04-08 2007-11-27 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Reflective members for use in encoder systems
DE10319609A1 (de) * 2003-05-02 2004-11-18 Dr. Johannes Heidenhain Gmbh Optoelektronische Detektoranordnung
DE10323088A1 (de) * 2003-05-16 2004-12-02 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7242481B2 (en) * 2003-09-22 2007-07-10 Celight, Inc. Laser vibrometry with coherent detection
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US7422211B2 (en) * 2005-01-21 2008-09-09 Xerox Corporation Lateral and skew registration using closed loop feedback on the paper edge position
DE102005009043A1 (de) * 2005-02-22 2006-08-31 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine Positionsmesseinrichtung
US20070024865A1 (en) * 2005-07-26 2007-02-01 Mitchell Donald K Optical encoder having slanted optical detector elements for harmonic suppression
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US7469839B2 (en) * 2005-09-14 2008-12-30 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Reflective optical encoder
US8233154B2 (en) 2005-12-22 2012-07-31 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College High precision code plates and geophones
WO2008030681A2 (en) * 2006-09-08 2008-03-13 Gsi Group Corporation Interferometric position encoder employing spatial filtering of diffraction orders
KR101025627B1 (ko) * 2007-08-06 2011-03-30 광주과학기술원 리모콘 마우스
SG152147A1 (en) * 2007-10-09 2009-05-29 Asml Netherlands Bv Alignment method and apparatus, lithographic apparatus, metrology apparatus and device manufacturing method
KR20110018332A (ko) * 2008-04-30 2011-02-23 가부시키가이샤 니콘 스테이지 장치, 패턴 형성 장치, 노광 장치, 스테이지 구동 방법, 노광 방법, 그리고 디바이스 제조 방법
US20100057392A1 (en) * 2008-08-28 2010-03-04 Faro Technologies, Inc. Indexed optical encoder, method for indexing an optical encoder, and method for dynamically adjusting gain and offset in an optical encoder
JP5391115B2 (ja) * 2010-03-18 2014-01-15 株式会社ミツトヨ 光電式エンコーダ
EP2372302A1 (de) 2010-03-26 2011-10-05 Leica Geosystems AG Messverfahren für eine oberflächenvermessende Messmaschine
US8537377B2 (en) * 2011-04-27 2013-09-17 Raytheon Company Absolute position encoder
US9534934B2 (en) 2011-09-06 2017-01-03 Nikon Corporation High resolution encoder head
ES2811533T3 (es) 2012-03-05 2021-03-12 Novanta Corp Método de estimación de fase y aparato para el mismo
CA3030495A1 (en) * 2014-03-04 2015-09-11 Novadaq Technologies ULC Spatial and spectral filtering apertures and optical imaging systems including the same
JP6386337B2 (ja) 2014-10-23 2018-09-05 株式会社ミツトヨ 光学式エンコーダ
JP2018513385A (ja) 2015-04-22 2018-05-24 ファロ テクノロジーズ インコーポレーテッド 指標付き光学エンコーダ
CN108369087B (zh) * 2015-12-08 2021-04-30 科磊股份有限公司 使用偏振目标及偏振照明以控制衍射级的振幅及相位
DE102016107715A1 (de) * 2016-04-26 2017-10-26 Osram Opto Semiconductors Gmbh Lasermodul mit einem optischen Bauteil
US10241244B2 (en) 2016-07-29 2019-03-26 Lumentum Operations Llc Thin film total internal reflection diffraction grating for single polarization or dual polarization
US10226657B2 (en) 2016-12-30 2019-03-12 Nautilus, Inc. Stationary exercise machine with a power measurement apparatus
DE102019206937A1 (de) * 2019-05-14 2020-11-19 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

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Also Published As

Publication number Publication date
WO1995033179A1 (en) 1995-12-07
EP0760932B2 (de) 2009-08-26
EP0760932A4 (de) 1997-11-05
US5646730A (en) 1997-07-08
DE69529745D1 (de) 2003-04-03
JPH10501334A (ja) 1998-02-03
DE69529745T2 (de) 2004-02-05
US5486923A (en) 1996-01-23
DE69529745T3 (de) 2010-04-01
EP0760932B1 (de) 2003-02-26
CA2191329C (en) 2004-12-07
EP0760932A1 (de) 1997-03-12
JP4037903B2 (ja) 2008-01-23
CA2191329A1 (en) 1995-12-07

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