ATE232660T1 - Doppelkonfiguration zur erhöhung der lebensdauer eines elektrostatischen schalters - Google Patents

Doppelkonfiguration zur erhöhung der lebensdauer eines elektrostatischen schalters

Info

Publication number
ATE232660T1
ATE232660T1 AT99960627T AT99960627T ATE232660T1 AT E232660 T1 ATE232660 T1 AT E232660T1 AT 99960627 T AT99960627 T AT 99960627T AT 99960627 T AT99960627 T AT 99960627T AT E232660 T1 ATE232660 T1 AT E232660T1
Authority
AT
Austria
Prior art keywords
actuator
electrostatic
state
actuators
activation
Prior art date
Application number
AT99960627T
Other languages
English (en)
Inventor
Cleopatra Cabuz
Eugen L Cabuz
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of ATE232660T1 publication Critical patent/ATE232660T1/de

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0018—Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H47/00—Circuit arrangements not adapted to a particular application of the relay and designed to obtain desired operating characteristics or to provide energising current
    • H01H47/002—Monitoring or fail-safe circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Micromachines (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Push-Button Switches (AREA)
  • Electronic Switches (AREA)
  • Shutters For Cameras (AREA)
AT99960627T 1998-12-29 1999-11-30 Doppelkonfiguration zur erhöhung der lebensdauer eines elektrostatischen schalters ATE232660T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/222,096 US6211580B1 (en) 1998-12-29 1998-12-29 Twin configuration for increased life time in touch mode electrostatic actuators
PCT/US1999/028325 WO2000039915A1 (en) 1998-12-29 1999-11-30 Twin configuration for increased life time in touch mode electrostatic actuators

Publications (1)

Publication Number Publication Date
ATE232660T1 true ATE232660T1 (de) 2003-02-15

Family

ID=22830807

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99960627T ATE232660T1 (de) 1998-12-29 1999-11-30 Doppelkonfiguration zur erhöhung der lebensdauer eines elektrostatischen schalters

Country Status (7)

Country Link
US (1) US6211580B1 (de)
EP (1) EP1145418B1 (de)
JP (1) JP2002534764A (de)
AT (1) ATE232660T1 (de)
CA (1) CA2358775C (de)
DE (1) DE69905403T2 (de)
WO (1) WO2000039915A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6496612B1 (en) * 1999-09-23 2002-12-17 Arizona State University Electronically latching micro-magnetic switches and method of operating same
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US7061595B2 (en) * 2000-08-02 2006-06-13 Honeywell International Inc. Miniaturized flow controller with closed loop regulation
US7038824B2 (en) * 2003-11-18 2006-05-02 Honeywell International Inc. Dynamic reflector array and method of making the same
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US7168675B2 (en) * 2004-12-21 2007-01-30 Honeywell International Inc. Media isolated electrostatically actuated valve
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
KR100986966B1 (ko) * 2007-06-27 2010-10-11 가부시키가이샤 엔.티.티.도코모 가변 회로, 통신 장치, 이동 통신 장치, 통신 시스템
US7808764B2 (en) * 2007-10-31 2010-10-05 General Electric Company System and method for avoiding contact stiction in micro-electromechanical system based switch
US20090230765A1 (en) * 2008-03-14 2009-09-17 Ford Global Technologies, Llc System and method for delivering power to an electric motor of an automotive vehicle

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2931954A (en) * 1956-03-14 1960-04-05 Erdco Inc Electrostatic controls and memory systems
FR2296297A1 (fr) * 1974-12-27 1976-07-23 Thomson Csf Dispositif commutateur a commande electrique de deplacement
CH670914A5 (de) * 1986-09-10 1989-07-14 Landis & Gyr Ag
US5062689A (en) * 1990-08-21 1991-11-05 Koehler Dale R Electrostatically actuatable light modulating device
US5176358A (en) 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
GB9309327D0 (en) * 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
JP2700991B2 (ja) 1993-10-20 1998-01-21 日本メクトロン株式会社 静電マイクロアクチュエ−タ−
US5542295A (en) 1994-12-01 1996-08-06 Analog Devices, Inc. Apparatus to minimize stiction in micromachined structures
US5658636A (en) 1995-01-27 1997-08-19 Carnegie Mellon University Method to prevent adhesion of micromechanical structures
JPH08330266A (ja) 1995-05-31 1996-12-13 Texas Instr Inc <Ti> 半導体装置等の表面を浄化し、処理する方法
US5771116A (en) 1996-10-21 1998-06-23 Texas Instruments Incorporated Multiple bias level reset waveform for enhanced DMD control
US5822170A (en) * 1997-10-09 1998-10-13 Honeywell Inc. Hydrophobic coating for reducing humidity effect in electrostatic actuators

Also Published As

Publication number Publication date
EP1145418A1 (de) 2001-10-17
WO2000039915A1 (en) 2000-07-06
EP1145418B1 (de) 2003-02-12
US6211580B1 (en) 2001-04-03
DE69905403D1 (de) 2003-03-20
CA2358775A1 (en) 2000-07-06
DE69905403T2 (de) 2003-10-23
CA2358775C (en) 2007-09-11
JP2002534764A (ja) 2002-10-15

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties