ATE134776T1 - Telezentrisch abbildendes system - Google Patents

Telezentrisch abbildendes system

Info

Publication number
ATE134776T1
ATE134776T1 AT89302766T AT89302766T ATE134776T1 AT E134776 T1 ATE134776 T1 AT E134776T1 AT 89302766 T AT89302766 T AT 89302766T AT 89302766 T AT89302766 T AT 89302766T AT E134776 T1 ATE134776 T1 AT E134776T1
Authority
AT
Austria
Prior art keywords
imaging system
telecentric imaging
fresnel lens
telecentric
mountable
Prior art date
Application number
AT89302766T
Other languages
English (en)
Inventor
Joseph Kochba
Yigal Katzir
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Application granted granted Critical
Publication of ATE134776T1 publication Critical patent/ATE134776T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
  • Studio Devices (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AT89302766T 1988-03-24 1989-03-21 Telezentrisch abbildendes system ATE134776T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL85862A IL85862A (en) 1988-03-24 1988-03-24 Telecentric imaging system

Publications (1)

Publication Number Publication Date
ATE134776T1 true ATE134776T1 (de) 1996-03-15

Family

ID=11058704

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89302766T ATE134776T1 (de) 1988-03-24 1989-03-21 Telezentrisch abbildendes system

Country Status (5)

Country Link
US (1) US5008743A (de)
EP (1) EP0335559B1 (de)
AT (1) ATE134776T1 (de)
DE (1) DE68925744T2 (de)
IL (1) IL85862A (de)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH679428A5 (de) * 1990-02-02 1992-02-14 Peyer Ag Siegfried
IL99823A0 (en) * 1990-11-16 1992-08-18 Orbot Instr Ltd Optical inspection method and apparatus
DE4208635C1 (en) * 1992-03-18 1993-07-22 Jenoptik Gmbh, O-6900 Jena, De Telecentric objective lens with double Gaussian objective - couples lens contents into image conducting fibres with higher illuminating strength at picture edges
US5517234A (en) * 1993-10-26 1996-05-14 Gerber Systems Corporation Automatic optical inspection system having a weighted transition database
US5461228A (en) * 1994-04-07 1995-10-24 Owens-Brockway Glass Container Inc. Optical inspection of container dimensional parameters using a telecentric lens
US5610391A (en) * 1994-08-25 1997-03-11 Owens-Brockway Glass Container Inc. Optical inspection of container finish dimensional parameters
US5880772A (en) * 1994-10-11 1999-03-09 Daimlerchrysler Corporation Machine vision image data acquisition system
JP3753758B2 (ja) * 1995-05-24 2006-03-08 フジノン株式会社 液晶ビデオプロジェクタ
DE29510334U1 (de) * 1995-06-26 1995-10-26 AQS Dimensionale Meßtechnik GmbH, Hallein/Salzburg System zur zweidimensionalen Vermessung planer Objekte
DE59611281D1 (de) * 1995-09-29 2005-11-17 Wincor Nixdorf Int Gmbh Vorrichtung zur Vermessung von Poststücken
US5610710A (en) * 1996-05-28 1997-03-11 International Business Machines Corporation Dual mode illumination system for optical inspection
US5805277A (en) * 1997-08-06 1998-09-08 Coherent, Inc. Portable laser power measuring apparatus
US6072898A (en) 1998-01-16 2000-06-06 Beaty; Elwin M. Method and apparatus for three dimensional inspection of electronic components
US6151117A (en) * 1999-08-30 2000-11-21 Xerox Corporation Optical sensor with telecentric optics
FI114743B (fi) 1999-09-28 2004-12-15 Ekspansio Engineering Ltd Oy Telesentrisellä periaatteella toimiva laitteisto ja menetelmä
US6256095B1 (en) 2000-01-21 2001-07-03 Owens-Brockway Glass Container Inc. Container sealing surface area inspection
IL135419A0 (en) 2000-04-02 2001-05-20 Orbotech Ltd Post-etch inspection system
DE10019486A1 (de) 2000-04-19 2001-10-31 Siemens Ag Anordnung zur Inspektion von Objektoberflächen
US6552783B1 (en) 2000-06-28 2003-04-22 Teradyne, Inc. Optical system
US7167583B1 (en) 2000-06-28 2007-01-23 Landrex Technologies Co., Ltd. Image processing system for use with inspection systems
EP1213568B1 (de) * 2000-12-08 2005-12-28 Gretag-Macbeth AG Vorrichtung zur bildelementweisen Ausmessung eines flächigen Messobjekts
EP1213569B1 (de) 2000-12-08 2006-05-17 Gretag-Macbeth AG Vorrichtung zur bildelementweisen Ausmessung eines flächigen Messobjekts
EP1220596A1 (de) 2000-12-29 2002-07-03 Icos Vision Systems N.V. Verfahren und Einrichtung zur Lageerfassung der Anschlusskontakte elektronischer Bauelemente
US6700658B2 (en) 2001-10-05 2004-03-02 Electro Scientific Industries, Inc. Method and apparatus for circuit pattern inspection
US7486861B2 (en) * 2003-01-15 2009-02-03 Negevtech Ltd. Fiber optical illumination system
US7525659B2 (en) * 2003-01-15 2009-04-28 Negevtech Ltd. System for detection of water defects
US6892013B2 (en) * 2003-01-15 2005-05-10 Negevtech Ltd. Fiber optical illumination system
TWI258583B (en) * 2003-01-30 2006-07-21 Test Research Inc Device and method for optical detection of printed circuit board
ATE406850T1 (de) 2004-06-17 2008-09-15 Cadent Ltd Verfahren und gerät zur farbbildformung einer dreidimensionalen struktur
EP1766363A2 (de) * 2004-07-12 2007-03-28 Negevtech Ltd. Mehrfachmodus-inspektionsverfahren und vorrichtung
US20060012781A1 (en) * 2004-07-14 2006-01-19 Negevtech Ltd. Programmable spatial filter for wafer inspection
US7804993B2 (en) * 2005-02-28 2010-09-28 Applied Materials South East Asia Pte. Ltd. Method and apparatus for detecting defects in wafers including alignment of the wafer images so as to induce the same smear in all images
US7813541B2 (en) * 2005-02-28 2010-10-12 Applied Materials South East Asia Pte. Ltd. Method and apparatus for detecting defects in wafers
DE102005043112A1 (de) * 2005-09-10 2007-03-15 E. Zoller GmbH & Co. KG Einstell- und Messgeräte Werkzeugmess- und/oder Werkzeugeinstellgerät
US8031931B2 (en) * 2006-04-24 2011-10-04 Applied Materials South East Asia Pte. Ltd. Printed fourier filtering in optical inspection tools
US7719674B2 (en) * 2006-11-28 2010-05-18 Applied Materials South East Asia Pte. Ltd. Image splitting in optical inspection systems
US7714998B2 (en) * 2006-11-28 2010-05-11 Applied Materials South East Asia Pte. Ltd. Image splitting in optical inspection systems
US20130120557A1 (en) * 2011-11-14 2013-05-16 Microscan Systems, Inc. Part inspection system
EP3002549B1 (de) 2012-06-08 2017-05-03 VICI & C.- S.p.A. Maschine und verfahren zur optischen messung
US9257030B2 (en) * 2013-07-16 2016-02-09 Leeo, Inc. Electronic device with environmental monitoring
US9675430B2 (en) 2014-08-15 2017-06-13 Align Technology, Inc. Confocal imaging apparatus with curved focal surface
CN110568598A (zh) * 2019-08-29 2019-12-13 深圳市灿锐科技有限公司 一种低成本超大口径的物方远心光学系统
CN115931869B (zh) * 2022-11-22 2025-07-11 凌云光技术股份有限公司 一种用于极片检测的高速前馈系统及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3637282A (en) * 1970-02-21 1972-01-25 Olympus Optical Co Elongated variable magnification optical system having selectively interchangeable lenses
US3761184A (en) * 1972-02-07 1973-09-25 Itek Corp Wide angle, narrow bandwidth laser detection system
US3994583A (en) * 1974-02-25 1976-11-30 Hutchins Iv Thomas B Noncontacting method and apparatus for monitoring the speed and travel of a moving article
US4582393A (en) * 1984-05-04 1986-04-15 Bright & Morning Star, Ca. Polarizing optical stereoscopic system and eyepiece using triangular prisms
US4695892A (en) * 1986-06-27 1987-09-22 The United States Of America As Represented By The Secretary Of The Army Method for determining the angular dimensions of a scene recorded by a video system
DE3641258A1 (de) * 1986-12-03 1988-06-16 Sick Optik Elektronik Erwin Bildaufnahmevorrichtung

Also Published As

Publication number Publication date
US5008743A (en) 1991-04-16
EP0335559B1 (de) 1996-02-28
DE68925744D1 (de) 1996-04-04
IL85862A (en) 1993-01-14
EP0335559A3 (de) 1991-08-28
DE68925744T2 (de) 1996-09-19
IL85862A0 (en) 1988-09-30
EP0335559A2 (de) 1989-10-04

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties