ATE121563T1 - Herstellungsverfahren und vorrichtung für ionenquelle. - Google Patents

Herstellungsverfahren und vorrichtung für ionenquelle.

Info

Publication number
ATE121563T1
ATE121563T1 AT90109369T AT90109369T ATE121563T1 AT E121563 T1 ATE121563 T1 AT E121563T1 AT 90109369 T AT90109369 T AT 90109369T AT 90109369 T AT90109369 T AT 90109369T AT E121563 T1 ATE121563 T1 AT E121563T1
Authority
AT
Austria
Prior art keywords
ion source
generating element
production method
ion
ion generating
Prior art date
Application number
AT90109369T
Other languages
English (en)
Inventor
Billy W Ward
Randall G Percival
Original Assignee
Micrion Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micrion Corp filed Critical Micrion Corp
Application granted granted Critical
Publication of ATE121563T1 publication Critical patent/ATE121563T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
AT90109369T 1989-05-26 1990-05-17 Herstellungsverfahren und vorrichtung für ionenquelle. ATE121563T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US35840389A 1989-05-26 1989-05-26

Publications (1)

Publication Number Publication Date
ATE121563T1 true ATE121563T1 (de) 1995-05-15

Family

ID=23409520

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90109369T ATE121563T1 (de) 1989-05-26 1990-05-17 Herstellungsverfahren und vorrichtung für ionenquelle.

Country Status (4)

Country Link
EP (1) EP0399374B1 (de)
JP (1) JP2952508B2 (de)
AT (1) ATE121563T1 (de)
DE (1) DE69018697T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5895923A (en) * 1996-02-16 1999-04-20 Eaton Corporation Ion beam shield for implantation systems
US6977384B2 (en) * 2003-08-27 2005-12-20 Fei Company Shaped sputter shields for improved ion column operation
JP4359131B2 (ja) 2003-12-08 2009-11-04 株式会社日立ハイテクノロジーズ 液体金属イオン銃、及びイオンビーム装置
WO2013043794A2 (en) * 2011-09-22 2013-03-28 Carl Zeiss Nts, Llc Liquid metal ion source, system and method
US9218935B2 (en) 2013-07-08 2015-12-22 Carl Zeiss Microscopy, Llc Charged particle beam system and method of operating a charged particle beam system
JP6972693B2 (ja) * 2017-06-19 2021-11-24 ユナイテッド・セミコンダクター・ジャパン株式会社 イオン生成装置及びイオン生成方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56112058A (en) * 1980-02-08 1981-09-04 Hitachi Ltd High brightness ion source
JPH0685309B2 (ja) * 1985-12-13 1994-10-26 株式会社日立製作所 液体金属イオン源
FR2618604B1 (fr) * 1987-07-22 1989-11-24 Realisations Nucleaires Et Source d'ions de metaux liquides a arc sous vide

Also Published As

Publication number Publication date
JPH03149732A (ja) 1991-06-26
EP0399374B1 (de) 1995-04-19
DE69018697D1 (de) 1995-05-24
DE69018697T2 (de) 1996-01-04
JP2952508B2 (ja) 1999-09-27
EP0399374A1 (de) 1990-11-28

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties