ATE107413T1 - Verfahren und vorrichtung zur messung der temperatur eines fernen gegenstandes. - Google Patents

Verfahren und vorrichtung zur messung der temperatur eines fernen gegenstandes.

Info

Publication number
ATE107413T1
ATE107413T1 AT89107019T AT89107019T ATE107413T1 AT E107413 T1 ATE107413 T1 AT E107413T1 AT 89107019 T AT89107019 T AT 89107019T AT 89107019 T AT89107019 T AT 89107019T AT E107413 T1 ATE107413 T1 AT E107413T1
Authority
AT
Austria
Prior art keywords
remote object
temperature
radiation
remote
detectors
Prior art date
Application number
AT89107019T
Other languages
English (en)
Inventor
Thomas E Thompson
Eugene R Westerberg
Original Assignee
Processing Technologies Inc Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Processing Technologies Inc Ag filed Critical Processing Technologies Inc Ag
Application granted granted Critical
Publication of ATE107413T1 publication Critical patent/ATE107413T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G01J5/602—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using selective, monochromatic or bandpass filtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G01J2005/607—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature on two separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
AT89107019T 1988-04-27 1989-04-19 Verfahren und vorrichtung zur messung der temperatur eines fernen gegenstandes. ATE107413T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US18655688A 1988-04-27 1988-04-27

Publications (1)

Publication Number Publication Date
ATE107413T1 true ATE107413T1 (de) 1994-07-15

Family

ID=22685407

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89107019T ATE107413T1 (de) 1988-04-27 1989-04-19 Verfahren und vorrichtung zur messung der temperatur eines fernen gegenstandes.

Country Status (3)

Country Link
EP (1) EP0339458B1 (de)
AT (1) ATE107413T1 (de)
DE (1) DE68916102T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4039007A1 (de) * 1989-12-06 1991-06-13 Hitachi Ltd Infrarottemperaturmessgeraet, eichverfahren fuer das geraet, infrarottemperaturbildmessmethode, geraet zur messung desselben, heizgeraet mit messgeraet, verfahren zur steuerung der erwaermungstemperatur, und vakuumbedampfungsgeraet mit infrarotem temperaturmessgeraet
US5180226A (en) * 1991-10-30 1993-01-19 Texas Instruments Incorporated Method and apparatus for precise temperature measurement
NL9201155A (nl) * 1992-06-29 1994-01-17 Imec Inter Uni Micro Electr Inrichting en werkwijze voor het verwarmen van voorwerpen waarbij de temperatuur van het voorwerp wordt gemeten.

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4435092A (en) * 1980-07-25 1984-03-06 Nippon Steel Corporation Surface temperature measuring apparatus for object within furnace
JPS57160029A (en) * 1981-03-27 1982-10-02 Kawasaki Steel Corp Surface temperature measuring method of body within furance
JPS60131430A (ja) * 1983-12-19 1985-07-13 Dainippon Screen Mfg Co Ltd 半導体基板の温度測定装置
JPS60253939A (ja) * 1984-05-31 1985-12-14 Fujitsu Ltd 基板温度の測定方法

Also Published As

Publication number Publication date
DE68916102D1 (de) 1994-07-21
EP0339458A2 (de) 1989-11-02
EP0339458B1 (de) 1994-06-15
EP0339458A3 (en) 1990-10-31
DE68916102T2 (de) 1995-01-26

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties