DE3777310D1 - Verfahren zur messung der temperatur eines koerpers durch optische detektion und modulierte erwaermung. - Google Patents
Verfahren zur messung der temperatur eines koerpers durch optische detektion und modulierte erwaermung.Info
- Publication number
- DE3777310D1 DE3777310D1 DE8787401843T DE3777310T DE3777310D1 DE 3777310 D1 DE3777310 D1 DE 3777310D1 DE 8787401843 T DE8787401843 T DE 8787401843T DE 3777310 T DE3777310 T DE 3777310T DE 3777310 D1 DE3777310 D1 DE 3777310D1
- Authority
- DE
- Germany
- Prior art keywords
- temperature
- modulated
- measuring
- optical detection
- warming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 230000003287 optical effect Effects 0.000 title abstract 2
- 238000010792 warming Methods 0.000 title 1
- 230000005855 radiation Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0044—Furnaces, ovens, kilns
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
- G01J5/0804—Shutters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
- G01J5/0805—Means for chopping radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
- G01J5/602—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using selective, monochromatic or bandpass filtering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/80—Calibration
- G01J5/802—Calibration by correcting for emissivity
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8611542A FR2602590B1 (fr) | 1986-08-08 | 1986-08-08 | Procede de mesure de la temperature d'un corps par detection optique et echauffement module |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3777310D1 true DE3777310D1 (de) | 1992-04-16 |
Family
ID=9338170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787401843T Expired - Lifetime DE3777310D1 (de) | 1986-08-08 | 1987-08-07 | Verfahren zur messung der temperatur eines koerpers durch optische detektion und modulierte erwaermung. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4799788A (de) |
EP (1) | EP0262996B1 (de) |
AT (1) | ATE73544T1 (de) |
CA (1) | CA1289379C (de) |
DE (1) | DE3777310D1 (de) |
ES (1) | ES2029482T3 (de) |
FR (1) | FR2602590B1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5167452A (en) * | 1988-02-17 | 1992-12-01 | Itt Corporation | Transmission method to determine and control the temperature of wafers or thin layers with special application to semiconductors |
US5098199A (en) * | 1988-02-17 | 1992-03-24 | Itt Corporation | Reflectance method to determine and control the temperature of thin layers or wafers and their surfaces with special application to semiconductors |
US5029117A (en) * | 1989-04-24 | 1991-07-02 | Tektronix, Inc. | Method and apparatus for active pyrometry |
US4985858A (en) * | 1989-05-23 | 1991-01-15 | Advanced Fuel Research, Inc. | Method and apparatus for temperature determination |
US5769540A (en) * | 1990-04-10 | 1998-06-23 | Luxtron Corporation | Non-contact optical techniques for measuring surface conditions |
US5310260A (en) * | 1990-04-10 | 1994-05-10 | Luxtron Corporation | Non-contact optical techniques for measuring surface conditions |
US5239488A (en) * | 1990-04-23 | 1993-08-24 | On-Line Technologies, Inc. | Apparatus and method for determining high temperature surface emissivity through reflectance and radiance measurements |
NL9100018A (nl) * | 1991-01-08 | 1992-08-03 | Imec Inter Uni Micro Electr | Werkwijze en inrichting voor het meten van de temperatuur van een voorwerp, alsmede verwarmingswerkwijze. |
GB9124797D0 (en) * | 1991-11-22 | 1992-01-15 | Secretary Trade Ind Brit | Temperature measuring apparatus |
US5316385A (en) * | 1993-03-30 | 1994-05-31 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Correction-free pyrometry in radiant wall furnaces |
GB2300476A (en) * | 1995-04-12 | 1996-11-06 | Otter Controls Ltd | Pyrometer with laser emissivity measurement |
JP2002303553A (ja) * | 2001-04-04 | 2002-10-18 | Noritake Co Ltd | 温度分布測定方法および装置 |
US20220034719A1 (en) * | 2016-08-12 | 2022-02-03 | Thermowand Technologies, Inc. | Temperature Measurement by Infrared Analysis |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH537009A (de) * | 1971-10-11 | 1973-05-15 | Bbc Brown Boveri & Cie | Verfahren zur berührungslosen Messung der Oberflächentemperatur an einem Objekt |
CH557528A (de) * | 1973-04-30 | 1974-12-31 | Bbc Brown Boveri & Cie | Vorrichtung zur beruehrungslosen temperaturmessung an der oberflaeche duenner, langegestreckter objekte. |
JPS6049246B2 (ja) * | 1980-03-04 | 1985-10-31 | 秀夫 高田 | 赤外線による温度測定方法における測定値補償方法 |
US4708493A (en) * | 1986-05-19 | 1987-11-24 | Quantum Logic Corporation | Apparatus for remote measurement of temperatures |
-
1986
- 1986-08-08 FR FR8611542A patent/FR2602590B1/fr not_active Expired
-
1987
- 1987-08-03 CA CA000543613A patent/CA1289379C/fr not_active Expired - Lifetime
- 1987-08-07 EP EP87401843A patent/EP0262996B1/de not_active Expired - Lifetime
- 1987-08-07 AT AT87401843T patent/ATE73544T1/de not_active IP Right Cessation
- 1987-08-07 ES ES198787401843T patent/ES2029482T3/es not_active Expired - Lifetime
- 1987-08-07 US US07/082,549 patent/US4799788A/en not_active Expired - Lifetime
- 1987-08-07 DE DE8787401843T patent/DE3777310D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
FR2602590A1 (fr) | 1988-02-12 |
US4799788A (en) | 1989-01-24 |
FR2602590B1 (fr) | 1989-11-10 |
ATE73544T1 (de) | 1992-03-15 |
CA1289379C (fr) | 1991-09-24 |
ES2029482T3 (es) | 1992-08-16 |
EP0262996A1 (de) | 1988-04-06 |
EP0262996B1 (de) | 1992-03-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |