ATE101186T1 - Ueberkritische mizellentrennung in der fluessigumkehrphase. - Google Patents
Ueberkritische mizellentrennung in der fluessigumkehrphase.Info
- Publication number
- ATE101186T1 ATE101186T1 AT89900727T AT89900727T ATE101186T1 AT E101186 T1 ATE101186 T1 AT E101186T1 AT 89900727 T AT89900727 T AT 89900727T AT 89900727 T AT89900727 T AT 89900727T AT E101186 T1 ATE101186 T1 AT E101186T1
- Authority
- AT
- Austria
- Prior art keywords
- reactant
- fluid
- reverse
- polar
- reverse micelle
- Prior art date
Links
- 239000007788 liquid Substances 0.000 title 1
- 238000000926 separation method Methods 0.000 title 1
- 239000012530 fluid Substances 0.000 abstract 7
- 239000000693 micelle Substances 0.000 abstract 7
- 239000000376 reactant Substances 0.000 abstract 5
- 238000006243 chemical reaction Methods 0.000 abstract 3
- 239000004530 micro-emulsion Substances 0.000 abstract 3
- 239000000047 product Substances 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000007795 chemical reaction product Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000004094 surface-active agent Substances 0.000 abstract 1
Classifications
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K9/00—Medicinal preparations characterised by special physical form
- A61K9/10—Dispersions; Emulsions
- A61K9/107—Emulsions ; Emulsion preconcentrates; Micelles
- A61K9/1075—Microemulsions or submicron emulsions; Preconcentrates or solids thereof; Micelles, e.g. made of phospholipids or block copolymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D11/00—Solvent extraction
- B01D11/02—Solvent extraction of solids
- B01D11/0203—Solvent extraction of solids with a supercritical fluid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/04—Specific aggregation state of one or more of the phases to be mixed
- B01F23/043—Mixing fluids or with fluids in a supercritical state, in supercritical conditions or variable density fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/41—Emulsifying
- B01F23/4105—Methods of emulsifying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/41—Emulsifying
- B01F23/414—Emulsifying characterised by the internal structure of the emulsion
- B01F23/4143—Microemulsions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J10/00—Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor
- B01J10/002—Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor carried out in foam, aerosol or bubbles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/008—Processes carried out under supercritical conditions
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/14—Methods for preparing oxides or hydroxides in general
- C01B13/32—Methods for preparing oxides or hydroxides in general by oxidation or hydrolysis of elements or compounds in the liquid or solid state or in non-aqueous solution, e.g. sol-gel process
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/14—Methods for preparing oxides or hydroxides in general
- C01B13/32—Methods for preparing oxides or hydroxides in general by oxidation or hydrolysis of elements or compounds in the liquid or solid state or in non-aqueous solution, e.g. sol-gel process
- C01B13/328—Methods for preparing oxides or hydroxides in general by oxidation or hydrolysis of elements or compounds in the liquid or solid state or in non-aqueous solution, e.g. sol-gel process by processes making use of emulsions, e.g. the kerosine process
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/16—Preparation of silica xerogels
- C01B33/163—Preparation of silica xerogels by hydrolysis of organosilicon compounds, e.g. ethyl orthosilicate
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
- C01F7/34—Preparation of aluminium hydroxide by precipitation from solutions containing aluminium salts
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G3/00—Compounds of copper
- C01G3/02—Oxides; Hydroxides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G5/00—Compounds of silver
- C01G5/02—Halides
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/32—Polymerisation in water-in-oil emulsions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K23/00—Use of substances as emulsifying, wetting, dispersing, or foam-producing agents
- C09K23/02—Alkyl sulfonates or sulfuric acid ester salts derived from monohydric alcohols
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00054—Controlling or regulating the heat exchange system
- B01J2219/00056—Controlling or regulating the heat exchange system involving measured parameters
- B01J2219/00058—Temperature measurement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00054—Controlling or regulating the heat exchange system
- B01J2219/00056—Controlling or regulating the heat exchange system involving measured parameters
- B01J2219/00065—Pressure measurement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00191—Control algorithm
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/01—Particle morphology depicted by an image
- C01P2004/03—Particle morphology depicted by an image obtained by SEM
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
- Y02P20/54—Improvements relating to the production of bulk chemicals using solvents, e.g. supercritical solvents or ionic liquids
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S516/00—Colloid systems and wetting agents; subcombinations thereof; processes of
- Y10S516/924—Significant dispersive or manipulative operation or step in making or stabilizing colloid system
- Y10S516/925—Phase inversion
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Medicinal Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Biophysics (AREA)
- Pharmacology & Pharmacy (AREA)
- Epidemiology (AREA)
- Animal Behavior & Ethology (AREA)
- Geology (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Molecular Biology (AREA)
- Polymers & Plastics (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Extraction Or Liquid Replacement (AREA)
- Colloid Chemistry (AREA)
- Polymerisation Methods In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Micro-Organisms Or Cultivation Processes Thereof (AREA)
- Medicines Containing Plant Substances (AREA)
- Coloring Foods And Improving Nutritive Qualities (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12584287A | 1987-11-24 | 1987-11-24 | |
| US15225688A | 1988-02-04 | 1988-02-04 | |
| PCT/US1988/004171 WO1989004858A1 (en) | 1987-11-27 | 1988-11-22 | Supercritical fluid reverse micelle separation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE101186T1 true ATE101186T1 (de) | 1994-02-15 |
Family
ID=26824009
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT89903542T ATE191739T1 (de) | 1987-11-27 | 1988-11-23 | Chemische reaktionen in umkehr-micellen-systemen |
| AT89900727T ATE101186T1 (de) | 1987-11-27 | 1989-06-06 | Ueberkritische mizellentrennung in der fluessigumkehrphase. |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT89903542T ATE191739T1 (de) | 1987-11-27 | 1988-11-23 | Chemische reaktionen in umkehr-micellen-systemen |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5238671A (de) |
| EP (3) | EP0343233B1 (de) |
| JP (1) | JPH03503180A (de) |
| AT (2) | ATE191739T1 (de) |
| CA (3) | CA1337750C (de) |
| DE (2) | DE3887681T2 (de) |
| WO (3) | WO1989004858A1 (de) |
Families Citing this family (67)
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|---|---|---|---|---|
| EP0529201B1 (de) * | 1991-08-26 | 1997-09-24 | Hewlett-Packard Company | Chromatographisches Verfahren mit micellarer Anreicherung in der Säule |
| WO1993014022A1 (en) * | 1992-01-15 | 1993-07-22 | Battelle Memorial Institute | Process of forming metal compounds using reverse micelle or reverse microemulsion systems |
| US5427764A (en) * | 1992-10-09 | 1995-06-27 | Rpc Waste Management Services, Inc. | Methods of controlling flow of fluids reacting at supercritical conditions |
| TW261619B (de) * | 1993-08-12 | 1995-11-01 | Cytec Tech Corp | |
| PL314294A1 (en) * | 1993-11-08 | 1996-09-02 | Gillette Co | Method of producing particles using a hypercritical fluid, aerogel particles obtained thereby and antiperspirants containing such particles |
| IT1270200B (it) * | 1994-06-09 | 1997-04-29 | Ausimont Spa | Preparazione di particelle ultra fini da microemulsioni di acqua in olio |
| IT1270199B (it) * | 1994-06-09 | 1997-04-29 | Ausimont Spa | Preparazione di particelle miste ultrafini da microemulsioni di pepe |
| US5755974A (en) | 1994-08-01 | 1998-05-26 | Rpc Waste Management Services, Inc. | Method and apparatus for reacting oxidizable matter with a salt |
| US5620606A (en) | 1994-08-01 | 1997-04-15 | Rpc Waste Management Services, Inc. | Method and apparatus for reacting oxidizable matter with particles |
| US5551472A (en) | 1994-08-01 | 1996-09-03 | Rpc Waste Management Services, Inc. | Pressure reduction system and method |
| US5783082A (en) * | 1995-11-03 | 1998-07-21 | University Of North Carolina | Cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants |
| US5709910A (en) * | 1995-11-06 | 1998-01-20 | Lockheed Idaho Technologies Company | Method and apparatus for the application of textile treatment compositions to textile materials |
| US6017460A (en) | 1996-06-07 | 2000-01-25 | Chematur Engineering Ab | Heating and reaction system and method using recycle reactor |
| US20010012700A1 (en) * | 1998-12-15 | 2001-08-09 | Klaus F. Schuegraf | Semiconductor processing methods of chemical vapor depositing sio2 on a substrate |
| TW539918B (en) | 1997-05-27 | 2003-07-01 | Tokyo Electron Ltd | Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process |
| US6306564B1 (en) | 1997-05-27 | 2001-10-23 | Tokyo Electron Limited | Removal of resist or residue from semiconductors using supercritical carbon dioxide |
| US6500605B1 (en) | 1997-05-27 | 2002-12-31 | Tokyo Electron Limited | Removal of photoresist and residue from substrate using supercritical carbon dioxide process |
| US5789505A (en) * | 1997-08-14 | 1998-08-04 | Air Products And Chemicals, Inc. | Surfactants for use in liquid/supercritical CO2 |
| US7064070B2 (en) * | 1998-09-28 | 2006-06-20 | Tokyo Electron Limited | Removal of CMP and post-CMP residue from semiconductors using supercritical carbon dioxide process |
| US6277753B1 (en) | 1998-09-28 | 2001-08-21 | Supercritical Systems Inc. | Removal of CMP residue from semiconductors using supercritical carbon dioxide process |
| SE518803C2 (sv) | 1999-09-03 | 2002-11-26 | Chematur Eng Ab | Metod och reaktionssystem med högt tryck och hög temperatur som är lämpat för superkritisk vattenoxidation |
| US6748960B1 (en) | 1999-11-02 | 2004-06-15 | Tokyo Electron Limited | Apparatus for supercritical processing of multiple workpieces |
| WO2001033615A2 (en) | 1999-11-02 | 2001-05-10 | Tokyo Electron Limited | Method and apparatus for supercritical processing of multiple workpieces |
| CN1216415C (zh) * | 2000-04-25 | 2005-08-24 | 东京毅力科创株式会社 | 沉积金属薄膜的方法和包括超临界干燥/清洁组件的金属沉积组合工具 |
| GB0026046D0 (en) * | 2000-10-24 | 2000-12-13 | Wilde Peter F | Improvements to polymerisation processes |
| US6632531B2 (en) * | 2001-02-15 | 2003-10-14 | Rohm And Haas Company | Porous particles, their aqueous dispersions, and method of preparation |
| US6896905B2 (en) * | 2001-02-15 | 2005-05-24 | Rohm And Haas Company | Porous particles, their aqueous dispersions, and method of preparation |
| EP1425355A1 (de) | 2001-07-12 | 2004-06-09 | Eastman Kodak Company | Eine komprimierte flüssige zusammensetzung |
| EP1298092A1 (de) * | 2001-09-28 | 2003-04-02 | Spiess -Urania Chemicals GmbH | Kontrollierte Morphogenese von Kupfersalzen |
| JP2005516405A (ja) * | 2002-01-25 | 2005-06-02 | 東京エレクトロン株式会社 | 超臨界二酸化炭素プロセス中の汚染物の形成を低減する方法 |
| EP1474723A2 (de) * | 2002-02-15 | 2004-11-10 | Supercritical Systems Inc. | Resisttrocknung mit einem lösungsbad und superkritischem co sb 2 /sb |
| US6924086B1 (en) | 2002-02-15 | 2005-08-02 | Tokyo Electron Limited | Developing photoresist with supercritical fluid and developer |
| US7387868B2 (en) | 2002-03-04 | 2008-06-17 | Tokyo Electron Limited | Treatment of a dielectric layer using supercritical CO2 |
| EP1481284A4 (de) * | 2002-03-04 | 2006-10-25 | Tokyo Electron Ltd | Verfahren zur passivierung von materialien mit niedrigem dielektrikum bei der waferverarbeitung |
| US20050227187A1 (en) * | 2002-03-04 | 2005-10-13 | Supercritical Systems Inc. | Ionic fluid in supercritical fluid for semiconductor processing |
| JP4031440B2 (ja) * | 2002-03-22 | 2008-01-09 | 東京エレクトロン株式会社 | 超臨界処理を用いる汚染物の除去 |
| US7169540B2 (en) * | 2002-04-12 | 2007-01-30 | Tokyo Electron Limited | Method of treatment of porous dielectric films to reduce damage during cleaning |
| DE10236491B4 (de) * | 2002-08-09 | 2012-05-03 | Air Liquide Deutschland Gmbh | Reinigung mittels CO2 und N2O |
| US7002044B2 (en) * | 2002-08-15 | 2006-02-21 | The University Of Connecticut | Catalysis by water-soluble organometallic complexes in water-in-densified fluid microemulsions |
| WO2004038752A2 (en) * | 2002-10-21 | 2004-05-06 | The Government Of The United States Of America, As Represented By The Secretary, Department Of Health And Human Services | Contiguous capillary electrospray sources and analytical device |
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| US20040231707A1 (en) * | 2003-05-20 | 2004-11-25 | Paul Schilling | Decontamination of supercritical wafer processing equipment |
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| US20090062407A1 (en) * | 2004-01-22 | 2009-03-05 | Scf Technologies A/S | Method and apparatus for producing micro emulsions |
| US7307019B2 (en) | 2004-09-29 | 2007-12-11 | Tokyo Electron Limited | Method for supercritical carbon dioxide processing of fluoro-carbon films |
| US7491036B2 (en) | 2004-11-12 | 2009-02-17 | Tokyo Electron Limited | Method and system for cooling a pump |
| US7504130B1 (en) | 2005-02-04 | 2009-03-17 | University Of Louisiana At Lafayette | Preparation of titania coated nickel ferrite nanoparticles |
| US7635518B1 (en) * | 2005-02-04 | 2009-12-22 | University Of Louisiana At Lafayette | Dendritic magnetic nanostructures and method for making same |
| US7291565B2 (en) | 2005-02-15 | 2007-11-06 | Tokyo Electron Limited | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid |
| US20060185694A1 (en) * | 2005-02-23 | 2006-08-24 | Richard Brown | Rinsing step in supercritical processing |
| US20060185693A1 (en) * | 2005-02-23 | 2006-08-24 | Richard Brown | Cleaning step in supercritical processing |
| US20060186088A1 (en) * | 2005-02-23 | 2006-08-24 | Gunilla Jacobson | Etching and cleaning BPSG material using supercritical processing |
| US7550075B2 (en) | 2005-03-23 | 2009-06-23 | Tokyo Electron Ltd. | Removal of contaminants from a fluid |
| US20060223899A1 (en) * | 2005-03-30 | 2006-10-05 | Hillman Joseph T | Removal of porogens and porogen residues using supercritical CO2 |
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| US7442636B2 (en) * | 2005-03-30 | 2008-10-28 | Tokyo Electron Limited | Method of inhibiting copper corrosion during supercritical CO2 cleaning |
| US7789971B2 (en) | 2005-05-13 | 2010-09-07 | Tokyo Electron Limited | Treatment of substrate using functionalizing agent in supercritical carbon dioxide |
| US20070000519A1 (en) * | 2005-06-30 | 2007-01-04 | Gunilla Jacobson | Removal of residues for low-k dielectric materials in wafer processing |
| DE102008026658A1 (de) | 2007-11-13 | 2009-05-14 | Council Of Scientific & Industrial Research | Verfahren zur Herstellung von Nanodrähten aus Metalloxiden mit Dotiermitteln in niedrigem Valenzzustand |
| CA2638240C (en) | 2008-08-29 | 2010-02-02 | Alexander Macgregor | Method of treating dysglycemia and glucose excursions |
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| US9159872B2 (en) | 2011-11-09 | 2015-10-13 | Pacific Light Technologies Corp. | Semiconductor structure having nanocrystalline core and nanocrystalline shell |
| US20130112942A1 (en) | 2011-11-09 | 2013-05-09 | Juanita Kurtin | Composite having semiconductor structures embedded in a matrix |
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| US8889457B2 (en) | 2012-12-13 | 2014-11-18 | Pacific Light Technologies Corp. | Composition having dispersion of nano-particles therein and methods of fabricating same |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE503708A (de) * | 1950-06-03 | |||
| US2982749A (en) * | 1957-07-15 | 1961-05-02 | Dow Chemical Co | Inverse suspension polymerization of water soluble unsaturated monomers |
| US3284393A (en) * | 1959-11-04 | 1966-11-08 | Dow Chemical Co | Water-in-oil emulsion polymerization process for polymerizing watersoluble monomers |
| US3265642A (en) * | 1962-01-23 | 1966-08-09 | Kanegafuchi Chemical Ind | Method of manufacturing expandable synthetic resins |
| US3522228A (en) * | 1966-05-19 | 1970-07-28 | Sumitomo Chemical Co | Novel method for polymerizing a vinyl compound in the presence of a carbon dioxide medium |
| US3836512A (en) * | 1970-10-21 | 1974-09-17 | Union Carbide Corp | Copolymerization of olefinically unsaturated monomers |
| US3915921A (en) * | 1974-07-02 | 1975-10-28 | Goodrich Co B F | Unsaturated carboxylic acid-long chain alkyl ester copolymers and tri-polymers water thickening agents and emulsifiers |
| US3957739A (en) * | 1974-11-27 | 1976-05-18 | Nobel Hoechst Chimie | Process of production of water-soluble linear polymers of very high molecular weight |
-
1988
- 1988-11-22 CA CA000583781A patent/CA1337750C/en not_active Expired - Lifetime
- 1988-11-22 DE DE89900727T patent/DE3887681T2/de not_active Expired - Lifetime
- 1988-11-22 EP EP89900727A patent/EP0343233B1/de not_active Expired - Lifetime
- 1988-11-22 US US07/274,558 patent/US5238671A/en not_active Expired - Lifetime
- 1988-11-22 WO PCT/US1988/004171 patent/WO1989004858A1/en not_active Ceased
- 1988-11-23 AT AT89903542T patent/ATE191739T1/de not_active IP Right Cessation
- 1988-11-23 DE DE3856403T patent/DE3856403T2/de not_active Expired - Lifetime
- 1988-11-23 WO PCT/US1988/004230 patent/WO1989005336A1/en not_active Ceased
- 1988-11-23 WO PCT/US1988/004226 patent/WO1989004844A1/en not_active Ceased
- 1988-11-23 EP EP89903542A patent/EP0387307B1/de not_active Expired - Lifetime
- 1988-11-23 EP EP19890901167 patent/EP0395714A4/en not_active Withdrawn
- 1988-11-23 JP JP1501093A patent/JPH03503180A/ja active Pending
- 1988-11-24 CA CA000584081A patent/CA1337235C/en not_active Expired - Fee Related
- 1988-11-24 CA CA000584080A patent/CA1333316C/en not_active Expired - Fee Related
-
1989
- 1989-06-06 AT AT89900727T patent/ATE101186T1/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE3887681T2 (de) | 1994-05-11 |
| EP0343233A1 (de) | 1989-11-29 |
| EP0387307B1 (de) | 2000-04-12 |
| WO1989004858A1 (en) | 1989-06-01 |
| JPH03503180A (ja) | 1991-07-18 |
| DE3887681D1 (de) | 1994-03-17 |
| EP0387307A4 (en) | 1991-01-02 |
| EP0343233B1 (de) | 1994-02-02 |
| EP0395714A4 (en) | 1991-01-09 |
| DE3856403T2 (de) | 2000-10-26 |
| CA1337235C (en) | 1995-10-10 |
| ATE191739T1 (de) | 2000-04-15 |
| WO1989004844A1 (en) | 1989-06-01 |
| US5238671A (en) | 1993-08-24 |
| CA1333316C (en) | 1994-11-29 |
| EP0395714A1 (de) | 1990-11-07 |
| EP0387307A1 (de) | 1990-09-19 |
| CA1337750C (en) | 1995-12-19 |
| WO1989005336A1 (en) | 1989-06-15 |
| EP0343233A4 (de) | 1990-01-11 |
| DE3856403D1 (de) | 2000-05-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |