AT328509B - Anordnung zum eindiffundieren von dotierungsstoffen in ein halbleitermaterial - Google Patents
Anordnung zum eindiffundieren von dotierungsstoffen in ein halbleitermaterialInfo
- Publication number
- AT328509B AT328509B AT583270A AT583270A AT328509B AT 328509 B AT328509 B AT 328509B AT 583270 A AT583270 A AT 583270A AT 583270 A AT583270 A AT 583270A AT 328509 B AT328509 B AT 328509B
- Authority
- AT
- Austria
- Prior art keywords
- dopening
- diffusing
- substances
- arrangement
- semiconductor material
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/12—Heating of the reaction chamber
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19691933128 DE1933128C3 (de) | 1969-06-30 | 1969-06-30 | Rohr zum Eindiffundieren von Dotierungsstoffen in Halbleiterkörper |
Publications (2)
Publication Number | Publication Date |
---|---|
ATA583270A ATA583270A (de) | 1975-06-15 |
AT328509B true AT328509B (de) | 1976-03-25 |
Family
ID=5738424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT583270A AT328509B (de) | 1969-06-30 | 1970-06-29 | Anordnung zum eindiffundieren von dotierungsstoffen in ein halbleitermaterial |
Country Status (8)
Country | Link |
---|---|
JP (1) | JPS4823710B1 (de) |
AT (1) | AT328509B (de) |
CH (1) | CH518622A (de) |
DE (1) | DE1933128C3 (de) |
FR (1) | FR2051429A5 (de) |
GB (1) | GB1282363A (de) |
NL (1) | NL165795C (de) |
SE (1) | SE358667B (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2135115A (en) * | 1983-02-09 | 1984-08-22 | Heraeus Schott Quarzschmelze | Improvements in or relating to support systems |
GB2126417A (en) * | 1982-08-26 | 1984-03-21 | Heraeus Schott Quarzschmelze | Support systems for conveying semiconductor devices into hostile environments during manufacture |
US4738272A (en) * | 1984-05-21 | 1988-04-19 | Mcconnell Christopher F | Vessel and system for treating wafers with fluids |
US4856544A (en) * | 1984-05-21 | 1989-08-15 | Cfm Technologies, Inc. | Vessel and system for treating wafers with fluids |
US4633893A (en) * | 1984-05-21 | 1987-01-06 | Cfm Technologies Limited Partnership | Apparatus for treating semiconductor wafers |
US4577650A (en) * | 1984-05-21 | 1986-03-25 | Mcconnell Christopher F | Vessel and system for treating wafers with fluids |
US4740249A (en) * | 1984-05-21 | 1988-04-26 | Christopher F. McConnell | Method of treating wafers with fluid |
US6136724A (en) * | 1997-02-18 | 2000-10-24 | Scp Global Technologies | Multiple stage wet processing chamber |
-
1969
- 1969-06-30 DE DE19691933128 patent/DE1933128C3/de not_active Expired
-
1970
- 1970-05-22 NL NL7007490A patent/NL165795C/xx not_active IP Right Cessation
- 1970-06-29 GB GB3136770A patent/GB1282363A/en not_active Expired
- 1970-06-29 AT AT583270A patent/AT328509B/de not_active IP Right Cessation
- 1970-06-29 CH CH978770A patent/CH518622A/de not_active IP Right Cessation
- 1970-06-29 FR FR7023997A patent/FR2051429A5/fr not_active Expired
- 1970-06-29 SE SE900270A patent/SE358667B/xx unknown
- 1970-06-30 JP JP5659670A patent/JPS4823710B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
SE358667B (de) | 1973-08-06 |
ATA583270A (de) | 1975-06-15 |
GB1282363A (en) | 1972-07-19 |
JPS4823710B1 (de) | 1973-07-16 |
NL7007490A (de) | 1971-01-04 |
DE1933128A1 (de) | 1971-01-21 |
NL165795C (nl) | 1981-05-15 |
NL165795B (nl) | 1980-12-15 |
DE1933128B2 (de) | 1977-12-08 |
CH518622A (de) | 1972-01-31 |
FR2051429A5 (de) | 1971-04-02 |
DE1933128C3 (de) | 1978-08-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee |