AT291194B - Verfahren zur Herstellung von Siliziumcarbidkristallen - Google Patents

Verfahren zur Herstellung von Siliziumcarbidkristallen

Info

Publication number
AT291194B
AT291194B AT970069A AT970069A AT291194B AT 291194 B AT291194 B AT 291194B AT 970069 A AT970069 A AT 970069A AT 970069 A AT970069 A AT 970069A AT 291194 B AT291194 B AT 291194B
Authority
AT
Austria
Prior art keywords
production
silicon carbide
carbide crystals
crystals
silicon
Prior art date
Application number
AT970069A
Other languages
German (de)
English (en)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of AT291194B publication Critical patent/AT291194B/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/90Carbides
    • C01B32/914Carbides of single elements
    • C01B32/956Silicon carbide
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/20Particle morphology extending in two dimensions, e.g. plate-like
    • C01P2004/22Particle morphology extending in two dimensions, e.g. plate-like with a polygonal circumferential shape

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
AT970069A 1968-10-18 1969-10-15 Verfahren zur Herstellung von Siliziumcarbidkristallen AT291194B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6814915A NL6814915A (enrdf_load_stackoverflow) 1968-10-18 1968-10-18

Publications (1)

Publication Number Publication Date
AT291194B true AT291194B (de) 1971-07-12

Family

ID=19804954

Family Applications (1)

Application Number Title Priority Date Filing Date
AT970069A AT291194B (de) 1968-10-18 1969-10-15 Verfahren zur Herstellung von Siliziumcarbidkristallen

Country Status (10)

Country Link
AT (1) AT291194B (enrdf_load_stackoverflow)
BE (1) BE740395A (enrdf_load_stackoverflow)
BR (1) BR6913398D0 (enrdf_load_stackoverflow)
CA (1) CA918043A (enrdf_load_stackoverflow)
CH (1) CH521288A (enrdf_load_stackoverflow)
DE (1) DE1951971A1 (enrdf_load_stackoverflow)
ES (1) ES372598A1 (enrdf_load_stackoverflow)
FR (1) FR2022288A1 (enrdf_load_stackoverflow)
GB (1) GB1278840A (enrdf_load_stackoverflow)
NL (1) NL6814915A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145992A (ja) * 1983-12-29 1985-08-01 Sharp Corp 炭化珪素単結晶基板の製造方法
CN117051478A (zh) * 2023-10-09 2023-11-14 山东天岳先进科技股份有限公司 一种高均匀性的碳化硅衬底及半导体器件
CN117848047B (zh) * 2024-03-07 2024-05-07 山西科福能源科技有限公司 一种石墨制备用加压焙烧炉
CN118387866B (zh) * 2024-04-22 2025-06-20 中南大学 一种天然微晶石墨基SiC/C复合吸波材料及其制备方法

Also Published As

Publication number Publication date
BE740395A (enrdf_load_stackoverflow) 1970-04-16
FR2022288A1 (enrdf_load_stackoverflow) 1970-07-31
BR6913398D0 (pt) 1973-03-08
NL6814915A (enrdf_load_stackoverflow) 1970-04-21
ES372598A1 (es) 1972-02-16
CA918043A (en) 1973-01-02
CH521288A (de) 1972-04-15
DE1951971A1 (de) 1970-04-23
GB1278840A (en) 1972-06-21

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee