AT289428B - Einrichtung zur automatischen Fokussierung von Röntgenspektrometern für Elektronenstrahl-Mikrosonden - Google Patents
Einrichtung zur automatischen Fokussierung von Röntgenspektrometern für Elektronenstrahl-MikrosondenInfo
- Publication number
- AT289428B AT289428B AT958367A AT958367A AT289428B AT 289428 B AT289428 B AT 289428B AT 958367 A AT958367 A AT 958367A AT 958367 A AT958367 A AT 958367A AT 289428 B AT289428 B AT 289428B
- Authority
- AT
- Austria
- Prior art keywords
- electron beam
- automatic focusing
- ray spectrometers
- microprobes
- beam microprobes
- Prior art date
Links
- 238000010894 electron beam technology Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
- G01N23/2076—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Dispersion Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT958367A AT289428B (de) | 1967-10-24 | 1967-10-24 | Einrichtung zur automatischen Fokussierung von Röntgenspektrometern für Elektronenstrahl-Mikrosonden |
| CH1383568A CH485217A (de) | 1967-10-24 | 1968-09-16 | Verfahren für eine automatische Fokussierung von Röntgenspektrometern |
| DE19681801656 DE1801656A1 (de) | 1967-10-24 | 1968-10-07 | Verfahren fuer eine automatische Refokussierung von Roentgenspektrometern |
| US769511A US3612861A (en) | 1967-10-24 | 1968-10-22 | Method of and apparatus for the automatic refocusing of x-ray spectrometers |
| FR1589853D FR1589853A (de) | 1967-10-24 | 1968-10-23 | |
| NL6815217A NL6815217A (de) | 1967-10-24 | 1968-10-24 | |
| GB50619/68A GB1236987A (en) | 1967-10-24 | 1968-10-24 | Focussing x-ray spectrometers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT958367A AT289428B (de) | 1967-10-24 | 1967-10-24 | Einrichtung zur automatischen Fokussierung von Röntgenspektrometern für Elektronenstrahl-Mikrosonden |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AT289428B true AT289428B (de) | 1971-04-26 |
Family
ID=3615445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT958367A AT289428B (de) | 1967-10-24 | 1967-10-24 | Einrichtung zur automatischen Fokussierung von Röntgenspektrometern für Elektronenstrahl-Mikrosonden |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3612861A (de) |
| AT (1) | AT289428B (de) |
| CH (1) | CH485217A (de) |
| DE (1) | DE1801656A1 (de) |
| FR (1) | FR1589853A (de) |
| GB (1) | GB1236987A (de) |
| NL (1) | NL6815217A (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3898455A (en) * | 1973-11-12 | 1975-08-05 | Jr Thomas C Furnas | X-ray monochromatic and focusing system |
| US4028547A (en) * | 1975-06-30 | 1977-06-07 | Bell Telephone Laboratories, Incorporated | X-ray photolithography |
| US4697080A (en) * | 1986-01-06 | 1987-09-29 | The United States Of America As Represented By The United States Department Of Energy | Analysis with electron microscope of multielement samples using pure element standards |
| RU2419088C1 (ru) * | 2010-02-01 | 2011-05-20 | Учреждение Российской академии наук Физический институт им. П.Н. Лебедева РАН (ФИАН) | Рентгеновский спектрометр |
| WO2025006670A1 (en) * | 2023-06-27 | 2025-01-02 | University Of Washington | Method of operating a spectrometer |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1366011A (fr) * | 1963-04-25 | 1964-07-10 | Cie D Applic Mecaniques A L El | Perfectionnements aux dispositifs de balayage du microanalyseur à sonde électronique |
-
1967
- 1967-10-24 AT AT958367A patent/AT289428B/de not_active IP Right Cessation
-
1968
- 1968-09-16 CH CH1383568A patent/CH485217A/de not_active IP Right Cessation
- 1968-10-07 DE DE19681801656 patent/DE1801656A1/de active Pending
- 1968-10-22 US US769511A patent/US3612861A/en not_active Expired - Lifetime
- 1968-10-23 FR FR1589853D patent/FR1589853A/fr not_active Expired
- 1968-10-24 NL NL6815217A patent/NL6815217A/xx unknown
- 1968-10-24 GB GB50619/68A patent/GB1236987A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1801656B2 (de) | 1970-09-17 |
| NL6815217A (de) | 1969-04-28 |
| FR1589853A (de) | 1970-04-06 |
| US3612861A (en) | 1971-10-12 |
| DE1801656A1 (de) | 1969-06-26 |
| GB1236987A (en) | 1971-06-23 |
| CH485217A (de) | 1970-01-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ELJ | Ceased due to non-payment of the annual fee |