CH502597A - Elektronenstrahl-Mikrosonde - Google Patents
Elektronenstrahl-MikrosondeInfo
- Publication number
- CH502597A CH502597A CH1568668A CH1568668A CH502597A CH 502597 A CH502597 A CH 502597A CH 1568668 A CH1568668 A CH 1568668A CH 1568668 A CH1568668 A CH 1568668A CH 502597 A CH502597 A CH 502597A
- Authority
- CH
- Switzerland
- Prior art keywords
- electron beam
- beam microprobe
- microprobe
- electron
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/29—Reflection microscopes
- H01J37/292—Reflection microscopes using scanning ray
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH147170A CH504684A (de) | 1967-10-25 | 1968-10-21 | Elektronenstrahl-Mikrosonde |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB48468/67A GB1194355A (en) | 1967-10-25 | 1967-10-25 | Improvements in or relating to Scanning Electron Microscopes. |
Publications (1)
Publication Number | Publication Date |
---|---|
CH502597A true CH502597A (de) | 1971-01-31 |
Family
ID=10448716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1568668A CH502597A (de) | 1967-10-25 | 1968-10-21 | Elektronenstrahl-Mikrosonde |
Country Status (5)
Country | Link |
---|---|
US (1) | US3558885A (de) |
CH (1) | CH502597A (de) |
DE (1) | DE1803119A1 (de) |
GB (1) | GB1194355A (de) |
NL (1) | NL6815264A (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7416756A (nl) * | 1974-12-23 | 1976-06-25 | Philips Nv | Aftastend rontgenonderzoekapparaat. |
JPS5221763A (en) * | 1975-08-13 | 1977-02-18 | Hitachi Ltd | Electronic microscope |
US4117323A (en) * | 1977-03-07 | 1978-09-26 | Iowa State University Research Foundation | Electron microscopes |
US4288696A (en) * | 1979-06-29 | 1981-09-08 | Halliburton Company | Well logging neutron generator control system |
US4665313A (en) * | 1985-06-28 | 1987-05-12 | International Business Machines Corporation | Apparatus and method for displaying hole-electron pair distributions induced by electron bombardment |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2418228A (en) * | 1943-10-08 | 1947-04-01 | Rca Corp | Electronic microanalyzer |
CH391912A (de) * | 1961-11-09 | 1965-05-15 | Trueb Taeuber & Co Ag | Verfahren zur Sichtbarmachung und Aufnahme von elektronenoptischen Bildern |
US3351755A (en) * | 1964-09-25 | 1967-11-07 | Applied Res Lab Inc | Method of and apparatus for spectroscopic analysis having compensating means for uncontrollable variables |
US3404271A (en) * | 1966-11-02 | 1968-10-01 | Sprague Electric Co | Method for inspecting semiconductor devices using electron mirror microscopy |
-
1967
- 1967-10-25 GB GB48468/67A patent/GB1194355A/en not_active Expired
-
1968
- 1968-10-08 US US765925A patent/US3558885A/en not_active Expired - Lifetime
- 1968-10-15 DE DE19681803119 patent/DE1803119A1/de active Pending
- 1968-10-21 CH CH1568668A patent/CH502597A/de not_active IP Right Cessation
- 1968-10-25 NL NL6815264A patent/NL6815264A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
NL6815264A (de) | 1969-04-29 |
GB1194355A (en) | 1970-06-10 |
DE1803119A1 (de) | 1969-04-30 |
US3558885A (en) | 1971-01-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |