CH502597A - Elektronenstrahl-Mikrosonde - Google Patents

Elektronenstrahl-Mikrosonde

Info

Publication number
CH502597A
CH502597A CH1568668A CH1568668A CH502597A CH 502597 A CH502597 A CH 502597A CH 1568668 A CH1568668 A CH 1568668A CH 1568668 A CH1568668 A CH 1568668A CH 502597 A CH502597 A CH 502597A
Authority
CH
Switzerland
Prior art keywords
electron beam
beam microprobe
microprobe
electron
Prior art date
Application number
CH1568668A
Other languages
English (en)
Inventor
Wilfred Flemming John Peter
Original Assignee
Int Standard Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Int Standard Electric Corp filed Critical Int Standard Electric Corp
Priority to CH147170A priority Critical patent/CH504684A/de
Publication of CH502597A publication Critical patent/CH502597A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/29—Reflection microscopes
    • H01J37/292—Reflection microscopes using scanning ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
CH1568668A 1967-10-25 1968-10-21 Elektronenstrahl-Mikrosonde CH502597A (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CH147170A CH504684A (de) 1967-10-25 1968-10-21 Elektronenstrahl-Mikrosonde

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB48468/67A GB1194355A (en) 1967-10-25 1967-10-25 Improvements in or relating to Scanning Electron Microscopes.

Publications (1)

Publication Number Publication Date
CH502597A true CH502597A (de) 1971-01-31

Family

ID=10448716

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1568668A CH502597A (de) 1967-10-25 1968-10-21 Elektronenstrahl-Mikrosonde

Country Status (5)

Country Link
US (1) US3558885A (de)
CH (1) CH502597A (de)
DE (1) DE1803119A1 (de)
GB (1) GB1194355A (de)
NL (1) NL6815264A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7416756A (nl) * 1974-12-23 1976-06-25 Philips Nv Aftastend rontgenonderzoekapparaat.
JPS5221763A (en) * 1975-08-13 1977-02-18 Hitachi Ltd Electronic microscope
US4117323A (en) * 1977-03-07 1978-09-26 Iowa State University Research Foundation Electron microscopes
US4288696A (en) * 1979-06-29 1981-09-08 Halliburton Company Well logging neutron generator control system
US4665313A (en) * 1985-06-28 1987-05-12 International Business Machines Corporation Apparatus and method for displaying hole-electron pair distributions induced by electron bombardment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2418228A (en) * 1943-10-08 1947-04-01 Rca Corp Electronic microanalyzer
CH391912A (de) * 1961-11-09 1965-05-15 Trueb Taeuber & Co Ag Verfahren zur Sichtbarmachung und Aufnahme von elektronenoptischen Bildern
US3351755A (en) * 1964-09-25 1967-11-07 Applied Res Lab Inc Method of and apparatus for spectroscopic analysis having compensating means for uncontrollable variables
US3404271A (en) * 1966-11-02 1968-10-01 Sprague Electric Co Method for inspecting semiconductor devices using electron mirror microscopy

Also Published As

Publication number Publication date
DE1803119A1 (de) 1969-04-30
NL6815264A (de) 1969-04-29
GB1194355A (en) 1970-06-10
US3558885A (en) 1971-01-26

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Legal Events

Date Code Title Description
PL Patent ceased