AT280648B - Verfahren zur Herstellung einer Photolackmaske für Halbleiterzwecke - Google Patents

Verfahren zur Herstellung einer Photolackmaske für Halbleiterzwecke

Info

Publication number
AT280648B
AT280648B AT1261568A AT1261568A AT280648B AT 280648 B AT280648 B AT 280648B AT 1261568 A AT1261568 A AT 1261568A AT 1261568 A AT1261568 A AT 1261568A AT 280648 B AT280648 B AT 280648B
Authority
AT
Austria
Prior art keywords
production
photoresist mask
semiconductor purposes
semiconductor
purposes
Prior art date
Application number
AT1261568A
Other languages
English (en)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of AT280648B publication Critical patent/AT280648B/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/001—Slide projectors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/44—Projection printing apparatus, e.g. enlarger, copying camera for multiple copying of the same original at the same time

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Holo Graphy (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lenses (AREA)
AT1261568A 1967-01-17 1968-01-15 Verfahren zur Herstellung einer Photolackmaske für Halbleiterzwecke AT280648B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0107872 1967-01-17

Publications (1)

Publication Number Publication Date
AT280648B true AT280648B (de) 1970-04-27

Family

ID=7528422

Family Applications (1)

Application Number Title Priority Date Filing Date
AT1261568A AT280648B (de) 1967-01-17 1968-01-15 Verfahren zur Herstellung einer Photolackmaske für Halbleiterzwecke

Country Status (6)

Country Link
AT (1) AT280648B (de)
CH (1) CH475574A (de)
DE (1) DE1547450A1 (de)
FR (1) FR1569650A (de)
GB (1) GB1203115A (de)
NL (1) NL6713565A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8514261D0 (en) * 1985-06-06 1985-07-10 Davis G M Production of high resolution images
GB8615908D0 (en) * 1986-06-30 1986-08-06 Hugle W B Integrated circuits

Also Published As

Publication number Publication date
GB1203115A (en) 1970-08-26
FR1569650A (de) 1969-06-06
NL6713565A (de) 1968-07-18
DE1547450A1 (de) 1969-12-04
CH475574A (de) 1969-07-15

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee