AT270751B - Method for producing a semiconductor arrangement from germanium by the planar technique - Google Patents

Method for producing a semiconductor arrangement from germanium by the planar technique

Info

Publication number
AT270751B
AT270751B AT554167A AT554167A AT270751B AT 270751 B AT270751 B AT 270751B AT 554167 A AT554167 A AT 554167A AT 554167 A AT554167 A AT 554167A AT 270751 B AT270751 B AT 270751B
Authority
AT
Austria
Prior art keywords
germanium
producing
semiconductor arrangement
planar technique
planar
Prior art date
Application number
AT554167A
Other languages
German (de)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of AT270751B publication Critical patent/AT270751B/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C28/00—Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
AT554167A 1966-06-16 1967-06-14 Method for producing a semiconductor arrangement from germanium by the planar technique AT270751B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0104306 1966-06-16

Publications (1)

Publication Number Publication Date
AT270751B true AT270751B (en) 1969-05-12

Family

ID=7525770

Family Applications (1)

Application Number Title Priority Date Filing Date
AT554167A AT270751B (en) 1966-06-16 1967-06-14 Method for producing a semiconductor arrangement from germanium by the planar technique

Country Status (6)

Country Link
AT (1) AT270751B (en)
CH (1) CH489907A (en)
DE (1) DE1544293A1 (en)
GB (1) GB1133812A (en)
NL (1) NL6708430A (en)
SE (1) SE325339B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3640242A (en) * 1970-11-04 1972-02-08 Frank Guinn Signal flag

Also Published As

Publication number Publication date
DE1544293A1 (en) 1971-01-21
GB1133812A (en) 1968-11-20
CH489907A (en) 1970-04-30
SE325339B (en) 1970-06-29
NL6708430A (en) 1967-12-18

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