WO2023092869A1

WO2023092869A1 - Magnetron device and semiconductor processing apparatus

Info

Publication number: WO2023092869A1
Application number: PCT/CN2022/076783
Authority: WO
Inventors: 任西鹏; 李冰; 赵康宁
Original assignee: 北京北方华创微电子装备有限公司
Priority date: 2021-11-25
Filing date: 2022-02-18
Publication date: 2023-06-01
Also published as: CN114156149A; TWI806436B; CN114156149B; TW202322183A

Abstract

Disclosed in the present application are a magnetron device and a semiconductor processing apparatus. The magnetron device comprises a rotary seat, a driving shaft, a transposition rotary shaft, a crank rocker assembly, a mounting seat, a magnetron, and a limiting structure. In conditions where the driving shaft rotates in a first direction and drives the crank rocker assembly to be limited to the limiting structure, the driving shaft drives the rotary seat to rotate in the first direction, and a distance between a connection of the magnetron to the mounting seat and the driving shaft is a first distance; and in conditions where the driving shaft rotates in a second direction and drives the crank rocker assembly to be limited to the limiting structure, the driving shaft drives the rotary seat to rotate in the second direction, and a distance between the connection of the magnetron to the mounting seat and the driving shaft is a second distance, the second distance being greater than the first distance, and the second direction and the first direction being opposite to each other. The magnetron device disclosed in the above technical solution has the capability of switching a position of the magnetron.

Description

Magnetron devices and semiconductor process equipment

technical field

The application belongs to the technical field of semiconductor processing, and in particular relates to a magnetron device and semiconductor process equipment.

Background technique

In the process of semiconductor processing, the sputtering process is a common thin film preparation process. By bombarding the target, the particles in the target are sputtered and deposited on the surface of the substrate to form a thin film. At present, metals or metal compounds are usually used as sputtering targets, and the trajectory of secondary electrons generated when ions bombard the target is assisted by a magnetron to form a thin film on the surface of a semiconductor such as a wafer.

In the copper interconnection system of integrated circuits, metals such as tantalum (Ta) or metal compounds such as tantalum nitride (TaN) can prevent the diffusion of copper elements into silicon on the one hand, and on the other hand, they are compatible with silicon and copper. It has good adhesion, so metals such as tantalum (Ta) or metal compounds such as tantalum nitride (TaN) are often used as barrier layers in copper interconnection systems.

The deposition process of the metal barrier layer usually includes a deposition process and an etching process. The deposition process is used to form a deposition layer on the surface of the semiconductor, and the etching process is used to remove the metal nitride formed on the surface of the target during the deposition process, reducing the Probability of generation of impurities in the process chamber. In the above-mentioned deposition process, the magnetron needs to be rotated in the annular region corresponding to the target near the edge; while in the etching process, the magnetron needs to be rotated in the annular region corresponding to the target near the center, Therefore, it is necessary to provide a magnetron assembly, which has the ability to switch the position of the magnetron, so as to assist the deposition process and the etching process.

Contents of the invention

The application discloses a magnetron device and semiconductor process equipment, which have the ability to switch the position of the magnetron.

In order to solve the above problems, the embodiment of this application is implemented as follows:

In the first aspect, the embodiment of the present application provides a magnetron device, which includes a rotating seat, a drive shaft, a transposition shaft, a crank rocker assembly, a mounting seat, a magnetron and a limiting structure, wherein,

Both the drive shaft and the transposition shaft are rotatably connected to the rotating seat; the drive shaft is used to connect with a drive source;

The mounting base is located on one side of the rotating base and is fixedly connected to the transposition shaft, the magnetron is fixed on the side of the mounting base away from the rotating base, and the magnetron and The connection of the mounting seat is located outside the axis of the transposition shaft;

The position-limiting structure is connected to the rotating base, and is used to limit the range of rotation angle of the transposition shaft relative to the rotating base by limiting the range of motion of the crank-rocker assembly;

When the drive shaft is driven by the drive source to rotate in the first direction, and the crank rocker assembly is driven to be limited in the position-limiting structure, the drive shaft drives the rotating seat along the Rotate in the first direction, and the distance between the connection between the magnetron and the mounting seat and the drive shaft is the first distance;

When the drive shaft is driven by the drive source to rotate in the second direction, and the crank rocker assembly is driven to be limited in the position-limiting structure, the drive shaft drives the rotating seat along the Rotate in the second direction, and the distance between the connection between the magnetron and the mounting seat and the drive shaft is a second distance, the second distance is greater than the first distance, and the second The direction is opposite to the first direction.

In a second aspect, the embodiment of the present application provides a semiconductor process equipment, which includes a process chamber and the above-mentioned magnetron device, and a rotating base of the magnetron device is fixed to the process chamber.

An embodiment of the present application provides a magnetron device, which includes a magnetron. In the magnetron device, both the drive shaft and the transposition shaft are rotatably connected to the rotating base, and the drive shaft and the transposition shaft pass through The crank rocker assembly forms a transmission connection relationship, and then can transmit the driving force of the drive shaft to the transposition shaft, so that the mounting seat fixed on the transposition shaft can rotate around the transposition shaft relative to the rotating seat. Moreover, the magnetron is installed on the mounting seat, and the mounting seat can drive the magnetron to rotate around the transposition shaft during the rotation process, thereby changing the distance between the magnetron and the driving shaft. At the same time, the rotating base is also connected with a limit structure, which is used to limit the range of rotation angle of the transposition shaft relative to the rotating base by limiting the range of motion of the crank rocker assembly. When the position is limited, the drive shaft can drive the rotating base to rotate, thereby driving the components installed on the rotating base (including the transposition shaft, the magnetron, etc.) to rotate around the driving shaft, which enables the magnetron to have The ability to rotate on the circumference, so that during the sputtering process, the magnetron can be controlled to rotate along circles with different diameters according to the different processes to be performed, so as to ensure that the corresponding processes can be carried out normally.

The embodiment of the present application also provides a semiconductor process equipment. By using the above-mentioned magnetron device provided in the embodiment of the present application, during the sputtering process, the magnetron can be controlled to The rotation of circles with different diameters ensures that the corresponding processes can be carried out normally.

Description of drawings

The drawings described here are used to provide a further understanding of the application and constitute a part of the application. The schematic embodiments and descriptions of the application are used to explain the application and do not constitute an improper limitation to the application. In the attached picture:

Fig. 1 is a schematic structural view of a magnetron device disclosed in an embodiment of the present application;

2 is a schematic cross-sectional view of a magnetron device disclosed in an embodiment of the present application;

Fig. 3 is a schematic diagram of a magnetron device disclosed in an embodiment of the present application in a state;

Fig. 4 is a schematic diagram of the magnetron device disclosed in the embodiment of the present application in another state.

Explanation of reference signs:

110-rotary seat, 120-installation seat, 130-magnetron, 131-rotary shaft,

210-drive shaft, 220-transposition shaft, 231-first bearing, 232-second bearing, 240-sleeve, 250-expansion sleeve, 260-flat key,

310-crank, 320-connecting rod, 330-rocker, 340-pin,

410-the first limiter, 420-the second limiter,

510-retaining ring, 520-end cover, 530-nut,

610-the first equalizing part, 620-the second equalizing part.

Detailed ways

In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in conjunction with specific embodiments of the present application and corresponding drawings. Apparently, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

The technical solutions disclosed in various embodiments of the present application will be described in detail below with reference to the accompanying drawings.

As shown in Figures 1 to 4, the embodiment of the present application discloses a magnetron device, which includes a rotating base 110, a drive shaft 210, a transposition shaft 220, a crank rocker assembly, a mounting base 120, a magnetron 130, limit structure.

Wherein, the rotating base 110 is the basic structure in the magnetron device, and other components can be directly or indirectly connected to the rotating base 110 . In order to ensure that the swivel base 110 has high structural strength and bearing capacity, the swivel base 110 can be made of metal materials, and parameters such as the shape and size of the swivel base 110 can be determined according to actual conditions, and are not limited here. When the magnetron device is installed on the process chamber of the semiconductor process equipment, the entire magnetron device can be fixed above the process chamber by means of the rotating base 110, and the rotating base 110 can rotate relative to the process chamber, For example, the rotating base 110 can be rotatably fixed above the process chamber by using a bracket.

The drive shaft 210 is a part used to transmit the driving force in the magnetron device, and it is used to connect with the drive source. source, so that the rotating motor is used to provide power for the entire magnetron device to drive the magnetron 130 to move. The transposition rotating shaft 220 is the part that assists the magnetron 130 to switch positions in the magnetron device, and both the drive shaft 210 and the transposition rotating shaft 220 can be metal shafts, as shown in Figure 2, both are rotatably connected with the rotating seat 110 Specifically, by using components such as bearings, both the drive shaft 210 and the transposition shaft 220 can form a rotatable assembly relationship with the rotating base 110 . As mentioned above, there is a connection relationship between the transposition shaft 220 and the magnetron 130 that can assist the magnetron 130 to switch positions. Furthermore, in order to ensure that the drive shaft 210 has the ability to drive the magnetron 130 to rotate around the drive shaft 210, When the driving shaft 210 and the transposition rotating shaft 220 are arranged on the rotating base 110, it is necessary to make the driving shaft 210 and the transposition rotating shaft 220 spaced from each other in the direction perpendicular to the axial direction of the driving shaft 210, that is, when the rotating base 110 is opposite to the driving shaft. When the 210 rotates, the transposition shaft 220 can rotate around the drive shaft 210 together with the rotating base 110 . More specifically, the distance between the drive shaft 210 and the transposition shaft 220 can be determined according to parameters such as the size and shape of other components in the magnetron device, which is not limited here.

The above-mentioned limiting structure is connected with the rotating base 110, and is used to limit the range of rotation angle of the transposition rotating shaft 220 relative to the rotating base 110 by limiting the range of motion of the above-mentioned crank rocker assembly; In the case of rotating in the first direction and driving the above-mentioned crank rocker assembly to be limited in the above-mentioned limiting structure, the drive shaft 210 drives the rotating base 110 to rotate in the above-mentioned first direction, and the connection between the magnetron 130 and the mounting base 120 and the drive The distance between the shafts 210 is the first distance; when the driving shaft 210 is driven by the driving source to rotate in the second direction, and the above-mentioned crank rocker assembly is driven to be limited to the above-mentioned limiting structure, the driving shaft 210 drives the rotating seat 110 rotates along the above-mentioned second direction, and the distance between the joint of the magnetron 130 and 2 and the driving shaft 210 is the second distance, the second distance is greater than the above-mentioned first distance, and the second direction is mutually opposite to the first direction. for the opposite direction.

Specifically, under the drive of the driving source, the above-mentioned drive shaft 210 can rotate in the first direction or the second direction. During this process, the above-mentioned limiting structure can shift the displacement The rotating shaft 220 is limited to rotate within a range of rotation angles, that is, when the above-mentioned crank rocker assembly and the above-mentioned limiting structure are mutually limited, the transposition rotating shaft 22 cannot continue to rotate in the current rotation direction relative to the rotating seat 110, and at this time, the transposition The rotating shaft 22 is fixed relative to the rotating base 110 and rotates along with the rotating base 110 around the driving shaft 210 along the first direction or the second direction. Moreover, when the above-mentioned transposition rotating shaft 22 is fixed relative to the rotating base 110, the mounting base 120 fixedly connected with the transposition rotating shaft 22 and the magnetron 130 fixed on the mounting base 120 will also be fixed relative to the rotating base 110. , so that the magnetron 130 can be limited to a position corresponding to the above-mentioned first distance or the second distance, and rotate around the driving shaft 210 along with the rotating base 110 in the first direction or the second direction. In this way, the magnetron 130 can have the ability to rotate on circles with different diameters, so that during the sputtering process, the magnetron 130 can be controlled to rotate along circles with different diameters according to the different processes to be performed, ensuring The corresponding process can be performed normally.

In addition, the embodiment of the present application adopts the above-mentioned crank rocker assembly as the transmission structure. Compared with other existing transmission structures (such as synchronous belt transmission structure), it can reduce the machining accuracy and installation accuracy of parts, thereby reducing the processing and installation. At the same time, the movement trajectory of the crank rocker assembly is relatively simple, and it is more stable and easier to control than the synchronous belt transmission structure under the impact load caused by the frequent positive and negative rotation of the motor, and has higher reliability and longer service life. for magnetrons of different shapes.

The structure of the above-mentioned crank rocker assembly can be various. For example, as shown in FIG. 3 and FIG. The crank 310 is in transmission connection with the rocker 330 through the connecting rod 320 , and the rocker 330 is in transmission connection with the transposition shaft 220 so as to transmit the rotational driving force of the drive shaft 210 to the transposition shaft 220 . Specifically, between the crank 310 and the drive shaft 210, and between the rocker 330 and the transposition shaft 220, a reliable transmission relationship can be formed through the cooperation of the key and the shaft, or can also be formed through a fixed connection. The transmission relationship ensures the reliable transmission of the driving force. Wherein, as shown in Figure 1, between the crank 310 and the connecting rod 320, and between the connecting rod 320 and the rocking bar 330 can be connected to each other through rotating connectors such as a pin shaft 340, so that the crank 310 and the rocking bar 330 can be connected with each other. The link 320 forms a reliable rotational connection. More specifically, the crank 310 , the connecting rod 320 and the rocker 330 can also be made of materials such as metal, so as to ensure that all the three can provide transmission and limit effects that meet requirements.

In order to ensure that the transposition rotating shaft 220 has the ability to change the position of the magnetron 130, as shown in FIG. 120 is away from the side of the rotating base 110, and the connection between the magnetron 130 and the mounting base 120 is located outside the axis of the transposition rotating shaft 220, so that when the transposition rotating shaft 220 rotates relative to the rotating base 110, the transposition rotating shaft 220 can drive Mounting seat 120 rotates together, because the joint between magnetron 130 and mounting seat 120 is located outside the axis of transposition rotating shaft 220, thereby in the process that transposition rotating shaft 220 rotates, magnetron 130 can be made around the transposition rotating shaft 220 produces a rotation action similar to "revolution", and then when the drive shaft 210 drives the transposition shaft 220 to rotate together, since the relative position of the drive shaft 210 and the transposition shaft 220 does not change, the magnetron 130 rotates around the transposition After the rotating shaft 220 rotates, the relative position between it and the driving shaft 210 will inevitably change. Wherein, as shown in FIG. 1 , the connection between the magnetron 130 and the mounting seat 120 may specifically be the rotating shaft 131 of the magnetron 130 .

In more detail, if the distance between the drive shaft 210 and the transposition shaft 220 is a, the distance between the magnetron 130 and the transposition shaft 220 is b, that is, the connection between the magnetron 130 and the mounting base 120 The distance between the position and the transposition shaft 220 is b, then in the absence of interference from other factors, as shown in Figure 3 and Figure 4, as the drive shaft 210 drives the transposition shaft 220 to rotate, the magnetic control The distance between the joint between the tube 130 and the mounting base 120 and the driving shaft 210 should be (the difference between a and b) ~ (the sum of a and b), that is, as the driving shaft 210 drives the transposition shaft 220 rotates, and the magnetron 130 cycles between two processes of gradually approaching the drive shaft 210 and gradually moving away from the drive shaft 210 .

Of course, in order to ensure that the magnetron device has the ability to make the magnetron 130 form a magnetic field that meets requirements, the magnetron device also needs to have the ability to make the magnetron 130 rotate around the driving shaft 210 . Based on this, the above-mentioned limiting structure can be used to limit the movement range of the rocker 330 . In this case, during the rotation of the drive shaft 210 in the above-mentioned first direction, the crank 310 and the connecting rod 320 drive the rocker 330 to move until the rocker 330 moves relative to the rotating seat 110 under the action of the above-mentioned limiting structure. Fixed, at this time, the transposition rotating shaft 22 cannot continue to rotate in the current rotation direction relative to the rotating base 110, and then the drive shaft 210 continues to rotate along the above-mentioned first direction, and drives the rotating base 110 and the parts on it (comprising the transposition rotating shaft 22. The mounting base 120 and the magnetron 130) rotate around the driving shaft 210 along the above-mentioned first direction. During the rotation of the drive shaft 210 in the second direction, the crank 310 and the connecting rod 320 drive the rocker 330 to move until the rocker 330 is fixed relative to the rotating seat 110 under the action of the above-mentioned limiting structure. The transposition rotating shaft 22 cannot continue to rotate along the current rotation direction relative to the rotating base 110, and then the drive shaft 210 continues to rotate along the above-mentioned second direction, and drives the rotating base 110 and the parts thereon (comprising the transposition rotating shaft 22, the mounting base 120 and The magnetrons 130) rotate together around the drive shaft 210 in the second direction.

It can be seen from the above that during the process of the drive shaft 210 rotating in the above-mentioned first direction or the second direction, before the rocker 330 moves to the position mutually limited by the above-mentioned limiting structure, the transposition shaft 22 is in a state of autorotation. The magnetron 130 rotates around the transposition shaft 22 to change the distance between it and the drive shaft 210. When the rocker 330 moves to a position where it is mutually limited with the above-mentioned limiting structure, the transposition shaft 22 stops rotating. At this time The distance between the magnetron 130 and the driving shaft 210 is the above-mentioned first distance or the second distance; after that, when the driving shaft 210 continues to rotate in the current direction, the rocker 330 is always mutually limited by the above-mentioned limiting structure, Thereby, the distance between the magnetron 130 and the drive shaft 210 is kept at the above-mentioned first distance or the second distance; at the same time, the rocker 330 drives the rotating base 110 and the parts thereon (comprising the transposition rotating shaft 22) through the above-mentioned limiting structure. , the mounting seat 120 and the magnetron 130) rotate together around the drive shaft 210 in the first direction or the second direction.

The above-mentioned limiting structure can have various structures. For example, as shown in FIG. 3 and FIG. One side of the seat 120, and arranged at intervals along the circumference of the transposition shaft 22, the above-mentioned rocker 330 is located between the first limiting member 410 and the second limiting member 420, and can move between the two to utilize The first limiter 410 and the second limiter 420 limit the rocker 330 within a certain range of motion, thereby indirectly limiting the angular range of the rotation of the transposition rotating shaft 22 , thereby realizing the alignment between the magnetron 130 and the drive shaft 210 . The spacing size is limited. Specifically, when the rocker 330 is in contact with the first limiting member 410, the transposition shaft 22 is fixed relative to the rotating base 110, so that the connection between the magnetron 130 and the mounting base 120 and the driving shaft 110 The spacing is kept at the above-mentioned first spacing; when the rocker 330 is in contact with the second stopper 420, the transposition rotating shaft 22 is fixed relative to the rotating base 110, so that the connection between the magnetron 130 and the mounting base 120 is in contact with the drive. The spacing between the shafts 210 is maintained at the above-mentioned second spacing. Since the magnetron 130 is installed on the side of the mounting base 120 away from the rotating base 110 , the rocker 33 can be restricted by the first limiting member 410 and the second limiting member 420 , which can more conveniently limit the range of motion of the magnetron 130 .

Intuitively speaking, in the circumferential direction of the transposition shaft 220, the rocker 330 is located between the first limiter 410 and the second limiter 420, and the drive shaft 210 can drive the rocker 330 between the first limiter 410 and the second limiter 420. The movement between the second limiting members 420 . That is, the space clamped by the first limiter 410 and the second limiter 420 in the circumferential direction of the transposition shaft 220 is larger than the size of the rocker 330 in the corresponding direction, so that when the drive shaft 210 moves, The rocker 330 can still move in the space clamped by the first limiter 410 and the second limiter 420 , and correspondingly, when the rocker 330 moves, the transposition shaft 220 correspondingly rotates. And when the rocker 330 rotates with the drive shaft 210 and rotates to the mutual limit with the first limiter 410 (or the second limiter 420), if the drive shaft 210 still continues to rotate along the initial direction, because the rocker 330 is affected by limited, it is impossible to continue to transmit the rotational driving force to the transposition shaft 220, and then the driven part is converted into the rotating base 110 that is rotatably connected with the driving shaft 210. When the rotating base 110 rotates, it can drive the magnetron device to rotate The components on the seat 110 except the drive shaft 210 rotate around the axial direction of the drive shaft 210 together.

It should be noted that the crank-rocker assembly is not limited to the structure composed of the above-mentioned crank 310, connecting rod 320 and rocker 330. In practical applications, it can also be any crank-rocker structure that can realize the above-mentioned functions. For example, it can be The above-mentioned connecting rod 320 is omitted, and the rocker structure with an eccentric profile is directly hinged to the crank 310, or corresponding transmission components can be added to realize the above-mentioned functions of the crank-rocker assembly, which is not particularly limited in the embodiment of the present application .

In summary, the magnetron assembly disclosed in the embodiment of the present application has the ability to control the magnetron 130 away from the drive shaft 210 and the ability to control the magnetron 130 close to the drive shaft 210, and has the ability to drive the magnetron 130 to rotate around the drive shaft 210. ability, and then, when the above-mentioned magnetron device is installed on the process chamber, by making the axis of the drive shaft 210 coincide with the axis of the process chamber, the magnetron 130 can be equipped with a side wall in the process chamber The ability to rotate about the drive shaft 210 at a location in the process chamber and the ability to rotate about the drive shaft 210 at a position in the process chamber that is close to the axis of the process chamber.

In detail, when the drive shaft 210 rotates along the first direction and the drive rocker 330 is limited to the first limit member 410, the drive shaft 210 drives the rotating base 110 to rotate along the first direction, and the magnetron 130 and The distance between the connection of the mounting seat 120 and the drive shaft 210 is the first distance; when the drive shaft 210 rotates in the second direction and the drive rocker 330 is limited to the second limiter 420, the drive shaft 210 drives The rotating base 110 rotates along the second direction, and the distance between the joint of the magnetron 130 and the mounting base 120 and the drive shaft 210 is the second distance, the second distance is greater than the first distance, and the second direction is the same as the first direction. in opposite directions.

As mentioned above, the drive shaft 210 can drive the rocker 330 to move in the space between the first limiter 410 and the second limiter 420. When the drive shaft 210 always rotates in the same direction, regardless of the rocker 330 What is the initial position of , as time goes by, the rocker 330 will inevitably be blocked by the first limiter 410 or the second limiter 420 , in this case, when the drive shaft 210 continues to rotate along the initial direction, then The driven part is switched from the rocker 330 to the rotating base 110. When the rotating base 110 rotates around the drive shaft 210, all the parts installed on the rotating base 110 except the driving shaft 210 will be driven around with the rotating base 110. Shaft 210 rotates. The first direction may be one of the clockwise direction and the counterclockwise direction, and the second direction is correspondingly the other of the clockwise direction and the counterclockwise direction.

By setting the setting positions of the first limiter 410 and the second limiter 420, and the relative positions of the rocker 330 and the magnetron 130 and other parameters, it can be ensured that the rocker 330 is limited to the position of the first limiter. 410 , and when the rocker 330 is limited to the second limiter 420 , the distance between the magnetron 130 and the drive shaft 210 can be changed. Specific values of the first distance and the second distance can be determined according to actual parameters such as the size of the process chamber and the distribution of the required magnetic field.

The embodiment of the present application provides a magnetron device, which includes a magnetron 130. In the magnetron device, the drive shaft 210 and the transposition shaft 220 are both rotatably connected to the rotating seat 110, and the drive shaft 210 and the transposition shaft 220 and the crank rocker assembly form a transmission connection between the two, and then the driving force of the drive shaft 210 can be transmitted to the transposition shaft 220, so that the mounting seat 120 fixed on the transposition shaft 220 can surround the transposition shaft 220 rotates relative to the rotating base 110 . Moreover, the magnetron 130 is installed on the mounting base 120 , and the mounting base 120 can drive the magnetron 130 to rotate around the transposition shaft 220 during the rotation process, thereby changing the distance between the magnetron 130 and the driving shaft 210 . At the same time, the rotating base 110 is also connected with a limiting structure, which is used to limit the range of rotation angle of the transposition shaft relative to the rotating base by limiting the range of motion of the crank rocker assembly. When the crank rocker assembly and the limiting structure When mutually limited, the drive shaft 210 can drive the rotating base 110 to rotate, thereby driving the components installed on the rotating base 110 (including the transposition shaft, the magnetron, etc.) to rotate around the driving shaft 210, which makes the magnetron 130 It has the ability to rotate on circles with different diameters, so that during the sputtering process, the magnetron 130 can be controlled to rotate along circles with different diameters according to the different processes to be carried out, so as to ensure that the corresponding processes can be carried out normally. conduct.

Certainly, in the process that the magnetron 130 rotates with the drive shaft 210 and rotates around the drive shaft 210, in order to ensure that the distance between the magnetron 130 and the rotating seat 110 in the axial direction of the drive shaft 210 does not change substantially, it is necessary to make the drive The axial directions of the shaft 210 and the transposition shaft 220 are parallel. As mentioned above, both the drive shaft 210 and the transposition shaft 220 can form a rotatable connection with the rotating base 110 through bearings and other components. Optionally, as shown in FIG. 2 , the drive shaft 210 is rotatably connected to the rotating base 110 through a plurality of first bearings 231, and the plurality of first bearings 231 are distributed along the axial direction of the drive shaft 210. Under the combined action of the bearing 231, it is basically possible to prevent the drive shaft 210 and the rotating base 110 from producing relative motions other than the relative rotation along the circumferential direction of the drive shaft 210, which can further ensure the driving stability of the drive shaft 210, thereby further improving the magnetic field. Stability of the position of the control tube 130 in the axial direction of the drive shaft 210 . Of course, in order to improve the reliability of the connection between the drive shaft 210 and the rotating base 110, in the axial direction of the driving shaft 210, the respective positions of the driving shaft 210 and the rotating base 110 must form a relatively fixed relationship with each of the first bearings 231, It is ensured that each first bearing 231 will not come out from between the driving shaft 210 and the rotating seat 110 .

Specifically, the number of first bearings 231 between the drive shaft 210 and the rotating seat 110 may be two, and in this case, both the driving stability and assembly difficulty of the drive shaft 210 can be considered. In the process of arranging a plurality of first bearings 231, as shown in FIG. Assembly stability between seats 110. In the case of different types of the first bearing 231, the manner in which the driving shaft 210 and the rotating seat 110 form a relatively fixed relationship with the first bearing 231 in the axial direction of the driving shaft 210 is also different. For this, the following Let me introduce in detail. Of course, in practical applications, the number of the first bearing 231 may also be one according to specific needs.

Similarly, in order to further prevent the transposition shaft 220 from shaking relative to the rotating base 110 with the bearing as the hinge point, optionally, as shown in FIG. The rotating base 110 is rotatably connected, and a plurality of second bearings 232 are distributed along the axial direction of the transposition shaft 220. Under the action of the plurality of second bearings 232, it is basically possible to prevent the transposition shaft 220 from being separated from the rotation base 110. Other relative movements of the circumferential relative rotation of the transposition shaft 220 can further ensure the assembly stability of the transposition shaft 220 , so as to further improve the stability of the position of the magnetron 130 in the axial direction of the drive shaft 210 . Similarly, in order to improve the connection reliability between the transposition shaft 220 and the rotation base 110, in the axial direction of the transposition shaft 220, the respective positions of the transposition shaft 220 and the rotation base 110 must be formed with each second bearing 232. The relatively fixed relationship ensures that each second bearing 232 will not come out from between the transposition shaft 220 and the rotating base 110 . Moreover, the specific structure and assembly method of the second bearing 232 between the transposition rotating shaft 220 and the rotating seat 110, and the position limiting method of each second bearing 232 in the axial direction of the transposition rotating shaft 220, can refer to the above-mentioned drive shaft. The embodiments of 210 and the first bearing 231 are not repeated here in consideration of the brevity of the text. Of course, in practical applications, the number of the second bearing 232 may also be one according to specific requirements.

As mentioned above, the first bearing 231 can be used to form a rotational fit relationship between the drive shaft 210 and the rotating base 110, and the crank 310 can form a transmission connection relationship with the drive shaft 210 by means of a key connection. In another embodiment of the present application, as shown in FIG. 2 , the magnetron device further includes a sleeve 240 and an expansion sleeve 250, wherein the sleeve 240 is sleeved on the drive shaft 210, and the sleeve 240 is connected to the drive shaft There is an annular space between 210 , and the expansion sleeve 250 is arranged around the annular space for fixing the sleeve 240 and the drive shaft 210 , the sleeve 240 is rotatably connected to the rotating seat 110 , and the crank 330 is fixed to the sleeve 240 . The above-mentioned expansion sleeve 250 is squeezed by the sleeve 240 between the sleeve 240 and the drive shaft 210 to generate a clamping force capable of clamping the sleeve 240, so as to fix the sleeve 240 and the drive shaft 210 together. During the rotation of the driving shaft 210 , the sleeve 240 can rotate together with the driving shaft 210 . In this case, the sleeve 240 is rotatably connected to the rotating base 110 , thereby ensuring that the rotating base 110 has the ability to rotate relative to the driving shaft 210 . Specifically, the sleeve 240 and the rotating seat 110 may form a rotational fit relationship through the first bearing 231 . Of course, the transposition shaft 220 and the rotating seat 110 can also be connected with each other by means of a sleeve and an expansion sleeve. Considering that the load of the transposition shaft 220 is relatively small, the second bearing 232 can also be directly used to rotate the transposition shaft 220. on the swivel seat 110.

At the same time, in the above-mentioned embodiment, as shown in FIG. 2, the crank 310 is fixed on the sleeve 240. In the case of adopting this technical solution, on the one hand, it can prevent the key structure from adversely affecting the structural strength of the drive shaft 210. On the other hand, the reliability of the transmission connection relationship between the crank 310 and the drive shaft 210 can also be improved. Specifically, the crank 310 can be detachably fixedly connected to the sleeve 240 through a connecting piece such as a screw. Further, in order to improve the compact structure of the magnetron device, the crank 310 can be provided with a through hole, and the crank 310 can be used The through hole is sleeved on the drive shaft 210 . In this case, the crank 310 and the sleeve 240 can basically fit together, which can further improve the reliability of the fixed connection between the crank 310 and the sleeve 240 . As mentioned above, the transposition shaft 220 can be directly connected to the rotating seat 110 through the second bearing 232. In this case, the rocker 330 and the transposition shaft 220 can be connected to each other through the flat key 260, or, use a spline It is also possible to form a reliable transmission connection relationship between the rocker 330 and the transposition shaft 220 .

As mentioned above, the first bearing 231 can be used to form a rotational connection between the drive shaft 210 and the rotating base 110. Optionally, the first bearing 231 is a sliding bearing. In another embodiment of the present application, each first bearing 231 is a rolling bearing, in this case, the friction resistance and friction loss of the first bearing 231 can be reduced, on the one hand, the service life of the first bearing 231 can be improved, On the other hand, the driving power required for the rotation of the driving shaft 210 can also be reduced to reduce energy consumption. Similarly, each second bearing 232 between the transposition shaft 220 and the rotating base 110 can also be a rolling bearing.

When a rolling bearing is arranged between the drive shaft 210 and the swivel base 110, both the drive shaft 210 and the swivel base 110 can be connected to the first bearing 231 by making the drive shaft 210 and the swivel base 110 form an interference fit with the first bearing 231. A bearing 231 forms a relatively fixed relationship in the axial direction of the drive shaft 210 . In order to further improve the positional stability of the first bearing 231, optionally, as shown in FIG. In the case of indirect rotatable connection with the rotating base 110, the outer wall of the sleeve 240 is provided with a sinking groove. By setting the sinking groove on the sleeve 240, it is possible to prevent the sinking groove from adversely affecting the structural strength of the drive shaft 210, and then The reliability of the driving shaft 210 can be improved. Moreover, by making a part of the retaining ring 510 extend into the sinking groove, and making the other part of the retaining ring 510 limited to the end surface of the inner ring of the first bearing 231, the retaining ring 510 can be used to provide the inner ring of the first bearing 231 with More reliable limit effect. Of course, the retaining ring 510 may be an open ring structure, so as to ensure that the retaining ring 510 can be installed in the sinker by being sleeved on the drive shaft 210 (or the sleeve 240 ).

Optionally, retaining rings 510 may be provided at both ends of the first bearing 231 diverging from each other to ensure that the relative fixed relationship between the inner ring of the first bearing 231 and the drive shaft 210 in the axial direction of the drive shaft 210 is more reliable. . In another embodiment of the present application, among the two ends of the first bearing 231 that diverge from each other, only one end may be provided with the retaining ring 510 , and the other end of the first bearing 231 may be limited by the rotating seat 110 . Specifically, the through hole used to install the drive shaft 210 on the rotating base 110 can be an irregular cylindrical hole, that is, the inner diameter of one end of the through hole is relatively small, which can only be used for the drive shaft 210 to pass through. The outer diameter of the inner ring of the first bearing 231 outside the drive shaft 210 is larger than the inner diameter of the aforementioned through hole, so that the inner ring of the first bearing 231 can be confined at the end wall of the aforementioned through hole. Alternatively, the crank 310 can also be used to provide a limiting effect on one end surface of the inner ring of the first bearing 231 . The principle of the limiting is similar to that of the through hole on the rotating seat 110 , and will not be repeated here.

As for the outer ring of the first bearing 231, the end cap 520 can be used to provide a strengthened limiting effect, the end cap 520 is attached to the end face of the outer ring of the first bearing 231, and the end cap 520 is fixed to the rotating base 110, This can ensure that the end cover 520 can reliably limit the outer ring of the first bearing 231 . Specifically, the end cover 520 is an annular structural member, which can be installed on the end surface of the outer ring of the first bearing 231 by being sleeved on the outside of the drive shaft 210 (or the sleeve 240), and can be connected by screws or other connecting parts. The end cover 520 is detachably fixed on the rotating base 110 to provide convenience for maintenance and replacement of the first bearing 231 . Similarly, the opposite sides of the outer ring of the first bearing 231 can use the end cover 520 to provide a strengthened limiting effect. Alternatively, the end wall of the through hole on the rotating base 110 mentioned in the above technical solution may also be used to provide a limiting function for the outer ring of the first bearing 231 .

In terms of comprehensive reliability and convenience, optionally, one end of the inner ring of the first bearing 231 can use the retaining ring 510 to provide a limiting effect, and one end of the outer ring of the first bearing 231 can use the end cover 520 to provide a limiting effect At the same time, the other end of the inner ring of the first bearing 231 can be provided with a limiting effect by increasing the outer circumference of the crank 310, and the inner diameter of one end of the through hole for installing the drive shaft 210 on the rotating seat 110 can be reduced , providing a limiting function for the other end of the outer ring of the first bearing 231 .

Similarly, the position-limiting method of the first bearing 231 on the transposition shaft 220 can also be used in the above-mentioned embodiments, considering that the transposition shaft 220 may be directly connected to the first bearing 231, and then, as shown in FIG. 2 , the transposition shaft The 220 can also use the nut 530 to provide a limiting function for the bearing sleeved outside the transposition shaft 220 .

In order to further improve the position stability of the magnetron 130 in the axial direction of the drive shaft 210 when it moves with the drive shaft 210, optionally, as shown in Figures 1 and 2, the magnetron device disclosed in the embodiment of the present application It also includes a first weight equalizing member 610, the first weight equalizing member 610 is fixed on the mounting base 120, and the first weight equalizing member 610 is located on the side of the transposition shaft 220 away from the magnetron 130, so that the mounting base 120 can change The weights on the opposite sides of the rotating shaft 220 are closer to improve the balance performance of the mounting base 120, so that when the mounting base 120 rotates with the rotating shaft 220, it is guaranteed that the mounting base 120 will not shake relative to the rotating shaft 220. situation, so as to further improve the positional stability of the magnetron 130 in the axial direction of the drive shaft 210 . Specifically, the first weight equalizing member 610 can be fixed on the installation seat 120 through bolts and other connecting parts, or, in the case that the first weight equalizing member 610 and the installation seat 120 are both made of metal, they can also be welded. The first weight equalizing member 610 is fixedly connected to the mounting base 120 . In addition, according to the actual parameters such as the weight and center of gravity of the magnetron 130, the weight and installation position of the first weight equalizing member 610 can be determined correspondingly, so as to maximize the weight of the opposite sides of the transposition shaft 220 in the installation seat 120 uniformity.

Optionally, as shown in FIG. 2 , the magnetron device may also include a second equalizing member 620, the second equalizing member 620 is fixed to the rotating seat 110, and the second equalizing member 620 is located at the drive shaft 210 away from the mounting seat 120, so that the weights on the opposite sides of the rotating shaft in the rotating base 110 are also closer, and the balance performance of the rotating base 110 is improved, which can further prevent the magnetron 130 from generating an axis along the drive shaft 210 during the motion process. directional movement. Correspondingly, the first weight equalizing member 610 can be fixed on the rotating base 110 through connection or welding, and can be based on the total weight of the parts on the side of the rotating base 110 including the magnetron 130 and the theory Actual parameters such as the center of gravity correspond to determining the weight and installation position of the second weight equalizing member 620 .

As mentioned above, the rocker 330 can be limited to the first limiter 410 or the second limiter 420 with the rotation of the drive shaft 210 , in order to ensure that both the first limiter 410 and the second limiter 420 The limiting effect provided has high reliability, and both the first limiting member 410 and the second limiting member 420 can be made of metal structural parts, and in the case that the rotating seat 110 is made of metal, it can be welded , the first limiting member 410 and the second limiting member 420 are fixedly connected to the rotating base 110 . Correspondingly, the rocker 330 can also be made of metal and other materials. In this case, when the rocker 330 contacts the first limiting member 410 and when the rocking bar 330 contacts the second limiting member 420, a Larger collision effect, based on this, in order to reduce the vibration caused by the impact load generated when the first limiter 410 and the second limiter 420 are in contact with the rocker 330, optionally, the first limiter 410 and the second limiter 420 At least one side of the second limiting member 420 facing the rocker 330 is provided with an elastic buffer, so as to use the buffer to provide cushioning effect for contact between components.

Further, the side of the first limiting member 410 facing the rocker 330 and the side of the second limiting member 420 facing the rocking bar 330 can be provided with elastic buffers, or, the rocking bar 330 can be arranged on the side facing the first Both the limiter 410 and the rocker 330 are provided with elastic buffers on the side facing the second limiter 420 , so whether the rocker 330 is in contact with the first limiter 410 or the rocker 330 is in contact with the second limiter 420 During the time, there will be basically no large collision and vibration, and the reliability and control accuracy of the sputtering mechanism will be improved. Specifically, the elastic buffer can be an elastic buffer formed of elastic materials such as rubber or resin, which can be fixed and installed by bonding or other methods. The parameters such as the thickness of the elastic buffer can be determined according to actual needs, and are not limited here.

Based on the magnetron device disclosed in any of the above-mentioned embodiments, the present application also discloses a semiconductor process equipment, which includes a process chamber and the above-mentioned magnetron device, and the rotating seat of the magnetron device is fixed on the process chamber to The entire magnetron device and the process chamber form a reliable assembly relationship.

The above-mentioned embodiments of this application focus on the differences between the various embodiments. As long as the different optimization features of the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, here No longer.

The above descriptions are only examples of the present application, and are not intended to limit the present application. For those skilled in the art, various modifications and changes may occur in this application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the scope of the claims of the present application.

Claims

A magnetron device is characterized in that it includes a rotating base, a drive shaft, a transposition shaft, a crank rocker assembly, a mounting seat, a magnetron and a limiting structure, wherein,

Both the drive shaft and the transposition shaft are rotatably connected to the rotating seat; the drive shaft is used to connect with a drive source;

The mounting base is located on one side of the rotating base and is fixedly connected to the transposition shaft, the magnetron is fixed on the side of the mounting base away from the rotating base, and the magnetron and The connection of the mounting seat is located outside the axis of the transposition shaft;

The position-limiting structure is connected to the rotating base, and is used to limit the range of rotation angle of the transposition shaft relative to the rotating base by limiting the range of motion of the crank-rocker assembly;

When the drive shaft is driven by the drive source to rotate in the first direction, and the crank rocker assembly is driven to be limited in the position-limiting structure, the drive shaft drives the rotating seat along the Rotate in the first direction, and the distance between the connection between the magnetron and the mounting seat and the drive shaft is the first distance;

When the drive shaft is driven by the drive source to rotate in the second direction, and the crank rocker assembly is driven to be limited in the position-limiting structure, the drive shaft drives the rotating seat along the Rotate in the second direction, and the distance between the connection between the magnetron and the mounting seat and the drive shaft is a second distance, the second distance is greater than the first distance, and the second The direction is opposite to the first direction.
The magnetron device according to claim 1, wherein the crank and rocker assembly includes a crank, a connecting rod and a rocker, wherein the crank is in transmission connection with the drive shaft, and the crank passes through the The connecting rod is in transmission connection with the rocker, and the rocker is in transmission connection with the transposition shaft; the limit structure is used to limit the movement range of the rocker;

During the rotation of the drive shaft in the first direction, the crank and the connecting rod drive the rocker to move until the rocker moves relative to the rotating seat under the action of the limiting structure. fixed, and then the drive shaft drives the rotating base to rotate in the first direction;

During the rotation of the drive shaft in the second direction, the crank and the connecting rod drive the rocker to move until the rocker moves relative to the rotating seat under the action of the limiting structure. After being fixed, the drive shaft drives the rotating seat to rotate in the second direction.
The magnetron device according to claim 2, wherein the limiting structure comprises a first limiting member and a second limiting member, and both the first limiting member and the second limiting member are fixed on the side of the rotating seat facing the mounting seat, and arranged at intervals along the circumference of the transposition shaft, the rocker is located between the first limiting member and the second limiting member , and can move between the first limiting member and the second limiting member;

When the rocker is in contact with the first stopper, the transposition shaft is fixed relative to the rotating seat, so that the connection between the magnetron and the mounting seat is in contact with the drive the spacing between the axes is maintained at said first spacing;

When the rocker is in contact with the second limiter, the transposition shaft is fixed relative to the rotating seat, so that the connection between the magnetron and the mounting seat is in contact with the drive The spacing between the shafts is maintained at said second spacing.
The magnetron device according to any one of claims 1-3, wherein the drive shaft is rotatably connected to the rotating base through a plurality of first bearings, and the plurality of first bearings are along the The axial distribution of the driving shaft, and in the axial direction of the driving shaft, the respective positions of the driving shaft and the rotating seat are fixed relative to each of the first bearings.
The magnetron device according to claim 4, wherein each of the first bearings is a rolling bearing.
The magnetron device according to claim 4, wherein the magnetron device further comprises a sleeve and an expansion sleeve, the sleeve is sleeved on the drive shaft, and the sleeve and the There is an annular space between the drive shafts, the expansion sleeve is arranged around the annular space for fixing the sleeve and the drive shaft, the sleeve is rotatably connected with the rotating seat, the A crank is fixed to the sleeve.
The magnetron device according to claim 6, characterized in that, the magnetron device also includes a retaining ring and an end cover, the outer wall of the sleeve is provided with a sinking groove, and a part of the retaining ring extends into the The sinking groove, and the other part of the retaining ring is limited to the end surface of the inner ring of the first bearing, the end cover is attached to the end surface of the outer ring of the first bearing, and the end cover is fixed on The swivel seat.
The magnetron device according to any one of claims 1-3, wherein the transposition shaft is rotatably connected to the rotating base through a plurality of second bearings, and the plurality of second bearings are along the The axial distribution of the transposition shaft, and in the axial direction of the transposition shaft, the respective positions of the transposition shaft and the rotating seat are fixed relative to each of the second bearings.
The magnetron device according to claim 8, wherein each of the second bearings is a rolling bearing.
The magnetron device according to claim 1, wherein the magnetron device further comprises a first equalizing member, the first equalizing member is fixed on the mounting base, and the first equalizing member The weight is located on the side of the transposition shaft away from the magnetron.
The magnetron device according to claim 1, characterized in that, the magnetron device further comprises a second equalizing member, the second equalizing member is fixed on the rotating seat, and the second equalizing member is The heavy part is located on the side of the drive shaft away from the mounting seat.
The magnetron device according to claim 3, wherein at least one of the first limiting member and the second limiting member is provided with an elastic buffer on a side facing the rocker.
A semiconductor process equipment, characterized in that it comprises a process chamber and the magnetron device according to any one of claims 1-12, the rotating seat of the magnetron device is fixed in the process chamber.