TWI742407B - Holding device - Google Patents

Holding device Download PDF

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Publication number
TWI742407B
TWI742407B TW108125903A TW108125903A TWI742407B TW I742407 B TWI742407 B TW I742407B TW 108125903 A TW108125903 A TW 108125903A TW 108125903 A TW108125903 A TW 108125903A TW I742407 B TWI742407 B TW I742407B
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Taiwan
Prior art keywords
sensor
hole
top cover
piston
holding device
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TW108125903A
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Chinese (zh)
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TW202012132A (en
Inventor
伊藤秀和
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日商喜開理股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00Controls for manipulators
    • B25J13/08Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/088Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/02Gripping heads and other end effectors servo-actuated
    • B25J15/0253Gripping heads and other end effectors servo-actuated comprising parallel grippers
    • B25J15/0266Gripping heads and other end effectors servo-actuated comprising parallel grippers actuated by articulated links
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/02Gripping heads and other end effectors servo-actuated
    • B25J15/0253Gripping heads and other end effectors servo-actuated comprising parallel grippers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/08Gripping heads and other end effectors having finger members
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075Means for protecting the manipulator from its environment or vice versa
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02Sensing devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/10Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B25J9/101Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means using limit-switches, -stops
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2291Linear or rotary variable differential transformers (LVDTs/RVDTs) having a single primary coil and two secondary coils

Abstract

保持裝置具備筒狀的機身、活塞、頂蓋、一對卡爪座、LVDT感測器以及施力構件。LVDT感測器具有筒狀的感測器箱體、捲繞在該感測器箱體的一次線圈和兩個二次線圈以及與活塞一體地進行往復運動並且能夠相對於感測器箱體出沒的芯軸。施力構件繞著感測器箱體的軸線與感測器箱體抵接並且朝向頂蓋對感測器箱體施力,從而與頂蓋協作來夾入感測器箱體。The holding device includes a cylindrical body, a piston, a top cover, a pair of jaw seats, an LVDT sensor, and a force applying member. The LVDT sensor has a cylindrical sensor box, a primary coil and two secondary coils wound around the sensor box, and a piston that reciprocates integrally and can appear and disappear relative to the sensor box. Mandrel. The force applying member abuts against the sensor box around the axis of the sensor box and applies force to the sensor box toward the top cover, thereby cooperating with the top cover to clamp the sensor box.

Description

保持裝置Holding device

本發明是關於一種保持裝置。The invention relates to a holding device.

例如日本特開平11-320474號公報公開如圖7所示的先前的保持裝置100。保持裝置100具備筒狀的機身102、活塞103以及一對卡爪座(master jaw)104。機身102具有流體被供給和排出的缸體室101。活塞103收納在缸體室101並且藉由被供給和排出缸體室101的流體來進行往復運動。卡爪座104伴隨活塞103的往復運動來進行開閉動作。For example, Japanese Patent Application Laid-Open No. 11-320474 discloses a conventional holding device 100 as shown in FIG. 7. The holding device 100 includes a cylindrical body 102, a piston 103, and a pair of master jaws 104. The body 102 has a cylinder chamber 101 into which fluid is supplied and discharged. The piston 103 is housed in the cylinder chamber 101 and reciprocates by the fluid supplied and discharged from the cylinder chamber 101. The pawl holder 104 performs opening and closing operations in accordance with the reciprocating movement of the piston 103.

此外,上述保持裝置100為了檢測一對卡爪座104的位置而使用LVDT感測器105(差動變壓器)。LVDT感測器105具有:筒狀的感測器箱體106;捲繞在感測器箱體106的一次線圈107和兩個二次線圈108;以及芯軸109,與活塞103一體地進行往復運動,並且能夠相對於感測器箱體106出沒。對一次線圈107施加交流電壓。並且,芯軸109伴隨活塞103的往復運動進行往復運動,從而在兩個二次線圈108產生的感應電壓之間產生壓差。該感應電壓的差根據芯軸109的位置變化。此外,一對卡爪座104的移動量與活塞103的移動量之間存在比例關係。因此,能夠藉由該感應電壓的差的變化量檢測芯軸109的移動量、即活塞103的移動量,其結果,能夠檢測一對卡爪座104的移動量。由此,能夠線性地檢測一對卡爪座104的位置,高精度地檢測一對卡爪座104的位置。In addition, the above-mentioned holding device 100 uses an LVDT sensor 105 (differential transformer) in order to detect the position of the pair of jaw holders 104. The LVDT sensor 105 has: a cylindrical sensor housing 106; a primary coil 107 and two secondary coils 108 wound around the sensor housing 106; and a mandrel 109 that reciprocates integrally with the piston 103 It moves and can appear and disappear relative to the sensor box 106. AC voltage is applied to the primary coil 107. In addition, the mandrel 109 reciprocates in accordance with the reciprocating movement of the piston 103, thereby generating a pressure difference between the induced voltages generated by the two secondary coils 108. The difference in the induced voltage varies according to the position of the core shaft 109. In addition, there is a proportional relationship between the movement amount of the pair of jaw seats 104 and the movement amount of the piston 103. Therefore, the amount of movement of the mandrel 109, that is, the amount of movement of the piston 103 can be detected by the amount of change in the difference of the induced voltage, and as a result, the amount of movement of the pair of jaw holders 104 can be detected. Thereby, it is possible to linearly detect the position of the pair of pawl holders 104, and to detect the position of the pair of pawl holders 104 with high accuracy.

在保持裝置100中,在機身102中的軸線方向的端部安裝有第一頂蓋111和第二頂蓋112。在第一頂蓋111形成有感測器箱體106貫通的貫通孔111a。感測器箱體106在貫通第一頂蓋111的貫通孔111a的狀態下,其一部分藉由第一頂蓋111和第二頂蓋112被夾入,從而固定在第一頂蓋111和第二頂蓋112。並且,第一頂蓋111和第二頂蓋112安裝在機身102的端部,從而感測器箱體106以與活塞103同軸配置的狀態位於機身102內。In the holding device 100, a first top cover 111 and a second top cover 112 are attached to the end of the body 102 in the axial direction. The first top cover 111 is formed with a through hole 111 a through which the sensor box 106 penetrates. The sensor box 106 penetrates the through hole 111a of the first top cover 111, and a part of it is sandwiched by the first top cover 111 and the second top cover 112, thereby being fixed to the first top cover 111 and the second top cover 111.二顶盖112。 Two top cover 112. In addition, the first top cover 111 and the second top cover 112 are installed at the end of the main body 102 so that the sensor box 106 is located in the main body 102 in a state where it is coaxially arranged with the piston 103.

此時,感測器箱體106以被第一頂蓋111和第二頂蓋112懸挑支承的狀態位於機身102內。因此,根據第一頂蓋111和第二頂蓋112在機身102上的安裝狀態,感測器箱體106有時以相對於芯軸109的軸線傾斜的狀態配置於機身102內。於是,有可能芯軸109相對於感測器箱體106的出沒動作難以進行,從而不能夠高精度地檢測一對卡爪座104的位置。At this time, the sensor box 106 is located in the body 102 in a state of being cantilevered and supported by the first top cover 111 and the second top cover 112. Therefore, depending on the installation state of the first top cover 111 and the second top cover 112 on the main body 102, the sensor case 106 may be arranged in the main body 102 in a state inclined with respect to the axis of the mandrel 109. Therefore, it may be difficult for the mandrel 109 to come and go with respect to the sensor case 106, so that the position of the pair of jaw holders 104 cannot be detected with high accuracy.

本公開的目的在於,提供能夠順利地進行芯軸相對於感測器箱體的出沒動作的保持裝置。The purpose of the present disclosure is to provide a holding device capable of smoothly performing the movement of the mandrel with respect to the sensor case.

實現上述目的的保持裝置,具備:筒狀的機身,具有流體被供給和排出的缸體室;活塞,收納在所述缸體室並且藉由被供給和排出所述缸體室的流體來進行往復運動;頂蓋,安裝在所述機身上的軸線方向的端部;一對卡爪座,伴隨所述活塞的往復運動來進行開閉動作;以及LVDT感測器,以與所述活塞同軸配置的狀態內置於所述機身,並且檢測所述一對卡爪座的位置。所述LVDT感測器具有:筒狀的感測器箱體;一次線圈和兩個二次線圈,捲繞在所述感測器箱體;以及芯軸,與所述活塞一體地進行往復運動,並且能夠相對於所述感測器箱體出沒。保持裝置具備施力構件,該施力構件繞所述感測器箱體的軸線與所述感測器箱體抵接,並且朝向所述頂蓋對所述感測器箱體施力,從而與所述頂蓋協作來夾持所述感測器箱體。The holding device that achieves the above-mentioned object is provided with: a cylindrical body with a cylinder chamber in which fluid is supplied and discharged; Reciprocating movement; a top cover, which is mounted on the end of the body in the axial direction; a pair of claw seats, which open and close with the reciprocating movement of the piston; and an LVDT sensor to be coaxial with the piston The configured state is built into the body, and the position of the pair of claw holders is detected. The LVDT sensor has: a cylindrical sensor case; a primary coil and two secondary coils wound around the sensor case; and a mandrel that reciprocates integrally with the piston , And can appear and disappear relative to the sensor box. The holding device includes an urging member that abuts against the sensor case around the axis of the sensor case, and urges the sensor case toward the top cover, thereby interacting with The top cover cooperates to clamp the sensor box.

在上述保持裝置中,較佳在所述感測器箱體的外周面設置有環狀的密封構件,該密封構件對所述感測器箱體的外周面與所述機身的內周面之間進行密封,抑制流體從所述缸體室洩漏。In the above-mentioned holding device, it is preferable that a ring-shaped sealing member is provided on the outer peripheral surface of the sensor box, and the sealing member interacts with the outer peripheral surface of the sensor box and the inner peripheral surface of the body. Sealing is performed between them to prevent fluid from leaking from the cylinder chamber.

在上述保持裝置中,較佳所述頂蓋具有擰入到所述機身的外螺紋部,所述保持裝置還具備旋轉阻止機構,該旋轉阻止機構防止所述感測器箱體相對於所述機身旋轉。In the above-mentioned holding device, it is preferable that the top cover has an external thread portion screwed into the body, and the holding device further includes a rotation preventing mechanism that prevents the sensor case from being relative to the body. The fuselage rotates.

以下,根據圖1~圖5對具體化保持裝置的一實施方式進行說明。Hereinafter, an embodiment of the actualized holding device will be described based on FIGS. 1 to 5.

如圖1所示,保持裝置10具備方筒狀的機身11。在機身11形成有在機身11的軸線方向上貫通的圓孔狀的貫通孔12。貫通孔12由內螺紋孔13、感測器收納孔14、缸體孔15、桿插通孔16以及收納孔17形成。內螺紋孔13、感測器收納孔14、缸體孔15、桿插通孔16以及收納孔17以從機身11的軸線方向的第一端部到第二端部按照該順序排列的方式形成於機身11。由此,內螺紋孔13在機身11的第一端面11a開口。收納孔17在機身11的第二端面11b開口。As shown in FIG. 1, the holding device 10 includes a body 11 having a square tube shape. The body 11 is formed with a circular hole-shaped through hole 12 penetrating in the axial direction of the body 11. The through hole 12 is formed by the female screw hole 13, the sensor housing hole 14, the cylinder hole 15, the rod insertion hole 16, and the housing hole 17. The internally threaded hole 13, the sensor housing hole 14, the cylinder hole 15, the rod insertion hole 16, and the housing hole 17 are arranged in this order from the first end to the second end in the axial direction of the body 11 Formed in the body 11. As a result, the female screw hole 13 opens on the first end surface 11 a of the body 11. The receiving hole 17 is opened on the second end surface 11 b of the body 11.

內螺紋孔13中的與機身11的第一端面11a相反的一側的端部與感測器收納孔14連通。感測器收納孔14中的與內螺紋孔13相反的一側的端部與缸體孔15連通。缸體孔15中的與感測器收納孔14相反的一側的端部與桿插通孔16連通。桿插通孔16中的與缸體孔15相反的一側的端部與收納孔17連通。The end portion of the internally threaded hole 13 on the side opposite to the first end surface 11 a of the body 11 communicates with the sensor housing hole 14. The end of the sensor accommodating hole 14 on the side opposite to the female screw hole 13 communicates with the cylinder hole 15. The end of the cylinder hole 15 on the side opposite to the sensor housing hole 14 communicates with the rod insertion hole 16. The end of the rod insertion hole 16 on the side opposite to the cylinder hole 15 communicates with the housing hole 17.

內螺紋孔13的孔徑比感測器收納孔14的孔徑大。此外,感測器收納孔14的孔徑比缸體孔15的孔徑大。由此,機身11具有環狀的第一台階面18,該第一台階面18將感測器收納孔14的內周面與缸體孔15的內周面連接,並且在與機身11的軸線方向正交的方向上延伸。此外,缸體孔15的孔徑比桿插通孔16的孔徑大。由此,機身11具有環狀的第二台階面19,該第二台階面19將缸體孔15的內周面與桿插通孔16的內周面連接,並且在與機身11的軸線方向正交的方向上延伸。The hole diameter of the internally threaded hole 13 is larger than the hole diameter of the sensor receiving hole 14. In addition, the hole diameter of the sensor housing hole 14 is larger than the hole diameter of the cylinder hole 15. Thus, the body 11 has an annular first step surface 18 that connects the inner circumferential surface of the sensor housing hole 14 with the inner circumferential surface of the cylinder hole 15 and is connected to the body 11 The axis direction extends in a direction orthogonal to the axis. In addition, the hole diameter of the cylinder hole 15 is larger than the hole diameter of the rod insertion hole 16. Thus, the body 11 has an annular second step surface 19 that connects the inner circumferential surface of the cylinder hole 15 with the inner circumferential surface of the rod insertion hole 16 and is connected to the inner circumferential surface of the body 11 It extends in a direction orthogonal to the axial direction.

桿插通孔16的孔徑比收納孔17的孔徑小。由此,機身11具有環狀的第三台階面20,該第三台階面20將桿插通孔16的內周面與收納孔17的內周面連接,並且在與機身11的軸線方向正交的方向上延伸。在桿插通孔16的內周面形成有環狀的密封件裝配槽16a。密封件裝配槽16a在第三台階面20開口。The diameter of the rod insertion hole 16 is smaller than the diameter of the housing hole 17. Thus, the body 11 has an annular third stepped surface 20 that connects the inner circumferential surface of the rod insertion hole 16 with the inner circumferential surface of the receiving hole 17 and is aligned with the axis of the body 11 Extend in the direction orthogonal to the direction. An annular seal fitting groove 16 a is formed on the inner peripheral surface of the rod insertion hole 16. The seal assembly groove 16 a opens on the third step surface 20.

如圖2所示,感測器收納孔14由小徑孔14a以及具有比小徑孔14a大的孔徑的大徑孔14b形成。與大徑孔14b相比小徑孔14a位於靠近缸體孔15的位置並與缸體孔15連通。大徑孔14b與內螺紋孔13連通。小徑孔14a的內周面與大徑孔14b的內周面藉由圓錐狀的錐形面14c連接。錐形面14c的直徑隨著從大徑孔14b朝向小徑孔14a而縮小。As shown in FIG. 2, the sensor housing hole 14 is formed of a small-diameter hole 14a and a large-diameter hole 14b having a larger diameter than the small-diameter hole 14a. The small-diameter hole 14a is located closer to the cylinder hole 15 than the large-diameter hole 14b and communicates with the cylinder hole 15. The large-diameter hole 14b communicates with the internally threaded hole 13. The inner circumferential surface of the small-diameter hole 14a and the inner circumferential surface of the large-diameter hole 14b are connected by a conical tapered surface 14c. The diameter of the tapered surface 14c decreases from the large-diameter hole 14b toward the small-diameter hole 14a.

如圖1所示,在機身11的第二端面11b突出有平板狀的一對支承部21。在圖1中,為了便於繪圖,僅示出兩個支承部21中的一個。一對支承部21從機身11的第二端面11b向機身11的軸線方向突出。兩個支承部21彼此平行地延伸。貫通孔12在兩個支承部21之間開口。As shown in FIG. 1, a pair of flat support portions 21 protrude from the second end surface 11 b of the body 11. In FIG. 1, for ease of drawing, only one of the two supporting parts 21 is shown. The pair of support portions 21 protrude from the second end surface 11 b of the fuselage 11 in the axial direction of the fuselage 11. The two support portions 21 extend parallel to each other. The through hole 12 opens between the two support parts 21.

在貫通孔12內收納有圓板狀的彈簧座構件22。彈簧座構件22的外徑比缸體孔15的孔徑大且比感測器收納孔14的小徑孔14a的孔徑稍小。彈簧座構件22的第一端面22a的外周部抵接在第一台階面18。在彈簧座構件22的第二端面22b形成有圓環狀的彈簧收納槽22c。在彈簧座構件22的中央部形成有圓孔狀的插通孔22h。A disc-shaped spring seat member 22 is housed in the through hole 12. The outer diameter of the spring seat member 22 is larger than the diameter of the cylinder hole 15 and slightly smaller than the diameter of the small diameter hole 14 a of the sensor housing hole 14. The outer peripheral portion of the first end surface 22 a of the spring seat member 22 abuts on the first step surface 18. An annular spring receiving groove 22c is formed on the second end surface 22b of the spring seat member 22. A circular hole-shaped insertion hole 22h is formed in the center of the spring seat member 22.

並且,在貫通孔12內藉由彈簧座構件22的第一端面22a、缸體孔15的內周面以及第二台階面19來劃定缸體室23。由此,機身11具有缸體室23。在缸體室23收納有圓環狀的活塞24。在活塞24的外周面安裝有圓環狀的活塞密封件25。活塞密封件25對活塞24的外周面與缸體孔15的內周面之間進行密封。In addition, the cylinder chamber 23 is defined by the first end surface 22 a of the spring seat member 22, the inner peripheral surface of the cylinder hole 15, and the second step surface 19 in the through hole 12. Thus, the body 11 has a cylinder chamber 23. An annular piston 24 is housed in the cylinder chamber 23. An annular piston seal 25 is attached to the outer peripheral surface of the piston 24. The piston seal 25 seals between the outer circumferential surface of the piston 24 and the inner circumferential surface of the cylinder bore 15.

活塞24將缸體室23區劃為與彈簧座構件22相鄰的第一壓力作用室26和與第二台階面19相鄰的第二壓力作用室27。在機身11的外周壁中的彈簧座構件22附近形成有與第一壓力作用室26連通的第一流體給排口28。並且,在第一壓力作用室26,藉由第一流體給排口28選擇性地供給和排出流體。此外,在機身11的外周壁中的第二台階面19附近,形成有與第二壓力作用室27連通的第二流體給排口29。並且,在第二壓力作用室27,藉由第二流體給排口29選擇性地供給和排出流體。因此,向缸體室23供給和排出流體。對第一壓力作用室26和第二壓力作用室27進行流體的供給和排出,從而活塞24在缸體室23內進行往復運動。因此,活塞24藉由被供給和排出缸體室23的流體而在缸體室23進行往復運動。The piston 24 partitions the cylinder chamber 23 into a first pressure application chamber 26 adjacent to the spring seat member 22 and a second pressure application chamber 27 adjacent to the second step surface 19. A first fluid supply and discharge port 28 communicating with the first pressure application chamber 26 is formed in the vicinity of the spring seat member 22 in the outer peripheral wall of the body 11. In addition, in the first pressure application chamber 26, the fluid is selectively supplied and discharged through the first fluid supply and discharge port 28. In addition, in the vicinity of the second step surface 19 in the outer peripheral wall of the fuselage 11, a second fluid supply and discharge port 29 communicating with the second pressure application chamber 27 is formed. In addition, in the second pressure application chamber 27, the fluid is selectively supplied and discharged through the second fluid supply and discharge port 29. Therefore, the fluid is supplied to and discharged from the cylinder chamber 23. The first pressure application chamber 26 and the second pressure application chamber 27 are supplied with and discharged fluid, so that the piston 24 reciprocates in the cylinder chamber 23. Therefore, the piston 24 reciprocates in the cylinder chamber 23 by being supplied and discharged from the fluid in the cylinder chamber 23.

在活塞24一體化有活塞桿30,該活塞桿30從活塞24中的與彈簧座構件22相反的一側的端面向機身11的軸線方向延伸。由此,活塞桿30與活塞24一體地移動。活塞桿30穿過桿插通孔16和收納孔17從機身11的第二端面11b突出。活塞桿30中的與活塞24相反的一側的頂端部位於兩個支承部21之間。由此,活塞桿30構成為,能夠在兩個支承部21之間相對於機身11出沒。The piston 24 is integrated with a piston rod 30, and the piston rod 30 extends from the end face of the piston 24 on the opposite side to the spring seat member 22 in the axial direction of the body 11. As a result, the piston rod 30 and the piston 24 move integrally. The piston rod 30 passes through the rod insertion hole 16 and the receiving hole 17 to protrude from the second end surface 11 b of the body 11. The top end portion of the piston rod 30 on the side opposite to the piston 24 is located between the two support portions 21. Thereby, the piston rod 30 is configured to be able to come and go with respect to the body 11 between the two support parts 21.

在密封件裝配槽16a內安裝有桿密封件31。桿密封件31對桿插通孔16的內周面與活塞桿30的外周面之間進行密封。此外,在收納孔17內配置有防脫構件32。防脫構件32防止桿密封件31從密封件裝配槽16a脫出。A rod seal 31 is installed in the seal assembly groove 16a. The rod seal 31 seals between the inner peripheral surface of the rod insertion hole 16 and the outer peripheral surface of the piston rod 30. In addition, a detachment prevention member 32 is arranged in the storage hole 17. The detachment preventing member 32 prevents the rod seal 31 from escaping from the seal fitting groove 16a.

保持裝置10具備伴隨活塞24的往復運動來進行開閉動作的一對卡爪座33。此外,保持裝置10具備向彼此靠近或分開的方向引導兩個卡爪座33的導板34。導板34安裝在一對支承部21中的與機身11的第二端面11b相反的一側的端部。在導板34中的與一對支承部21相反的一側的端面形成有向彼此靠近或分開的方向引導兩個卡爪座33的導向凹部34a。此外,在導板34形成有一對操作柄用貫通孔34h。The holding device 10 includes a pair of claw seats 33 that perform opening and closing operations in accordance with the reciprocating movement of the piston 24. In addition, the holding device 10 is provided with a guide plate 34 that guides the two claw seats 33 in a direction to approach or separate from each other. The guide plate 34 is attached to an end portion of the pair of support portions 21 on the side opposite to the second end surface 11 b of the body 11. An end surface of the guide plate 34 on the side opposite to the pair of support portions 21 is formed with a guide recess 34a that guides the two claw seats 33 in a direction toward or apart from each other. In addition, the guide plate 34 is formed with a pair of through holes 34h for operating handles.

保持裝置10具備一對操作柄35。各操作柄35為大致L字板狀。各操作柄35的一部分配置在兩個支承部21之間。在各操作柄35的第一端部形成有U字形狀的卡合槽35a。各操作柄35的卡合槽35a與設置在活塞桿30的頂端部的卡合軸36卡合。此外,在各操作柄35的L字彎曲部分分別貫通有支承軸37。各支承軸37以被一對支承部21橋接的狀態固定在一對支承部21。並且,活塞桿30藉由相對於機身11進行出沒動作,從而以各操作柄35對應的支承軸37為轉動中心進行轉動。The holding device 10 includes a pair of operating handles 35. Each operation handle 35 has a substantially L-shaped plate shape. A part of each operating lever 35 is arranged between the two supporting parts 21. A U-shaped engagement groove 35a is formed at the first end of each operating handle 35. The engaging groove 35 a of each operating lever 35 engages with an engaging shaft 36 provided at the tip portion of the piston rod 30. In addition, a support shaft 37 penetrates through the L-shaped curved portion of each operating lever 35, respectively. Each support shaft 37 is fixed to the pair of support portions 21 in a state of being bridged by the pair of support portions 21. In addition, the piston rod 30 rotates with the support shaft 37 corresponding to each operating handle 35 as the center of rotation by moving in and out of the body 11.

各操作柄35的第二端部穿過對應的操作柄用貫通孔34h而從導板34中的與一對支承部21相反的一側的端面突出。在各操作柄35的另一端部設置有卡合件38。並且,各操作柄35的卡合件38插入到形成於對應的卡爪座33的收納凹部33h。由此,各卡合件38與對應的收納凹部33h彼此掛扣。藉由該各卡合件38與對應的收納凹部33h的掛扣,與各操作柄35的頂端部對應的卡爪座33被連結。The second end of each operation lever 35 passes through the corresponding operation lever through-hole 34 h and protrudes from the end surface of the guide plate 34 on the opposite side to the pair of support portions 21. An engaging piece 38 is provided at the other end of each operating handle 35. In addition, the engaging member 38 of each operating lever 35 is inserted into the receiving recess 33 h formed in the corresponding claw seat 33. Thereby, each engaging member 38 and the corresponding storage recess 33h are hooked to each other. By the hooks of each engaging member 38 and the corresponding storage recess 33h, the claw seat 33 corresponding to the tip portion of each operating handle 35 is connected.

如圖3所示,當從第二流體給排口29向第二壓力作用室27供給流體時,活塞24開始向彈簧座構件22移動。由此,第一壓力作用室26的流體經由第一流體給排口28排出到外部,活塞24向彈簧座構件22移動。由此,活塞桿30相對於機身11向沒入方向移動。伴隨該活塞桿30相對於機身11向沒入方向的移動,一對操作柄35的第一端部經由卡合軸36被活塞桿30拉入,卡合件38以各操作柄35對應的支承軸37為轉動中心向彼此靠近的方向轉動。藉由卡合件38向彼此靠近的方向移動,兩個卡爪座33向彼此靠近的方向移動,保持工件W1。As shown in FIG. 3, when fluid is supplied from the second fluid supply and discharge port 29 to the second pressure application chamber 27, the piston 24 starts to move to the spring seat member 22. As a result, the fluid in the first pressure application chamber 26 is discharged to the outside through the first fluid supply and discharge port 28, and the piston 24 moves toward the spring seat member 22. As a result, the piston rod 30 moves in the sinking direction with respect to the body 11. Along with the movement of the piston rod 30 in the sinking direction relative to the body 11, the first ends of the pair of operating handles 35 are pulled in by the piston rod 30 via the engaging shaft 36, and the engaging piece 38 corresponds to each operating handle 35 The support shaft 37 rotates in a direction in which the rotation center approaches each other. As the engaging member 38 moves in a direction approaching each other, the two jaw holders 33 move in a direction approaching each other, and the workpiece W1 is held.

如圖1所示,當流體從第一流體給排口28供給到第一壓力作用室26時,活塞24開始向第二台階面19移動。由此,第二壓力作用室27的流體經由第二流體給排口29排出到外部,活塞24向第二台階面19移動。由此,活塞桿30相對於機身11向突出方向移動。伴隨該活塞桿30相對於機身11向突出方向移動,一對操作柄35的第一端部經由卡合軸36被活塞桿30推壓,卡合件38以各操作柄35對應的支承軸37為轉動中心向彼此分開的方向轉動。藉由卡合件38向彼此分開的方向移動,兩個卡爪座33向彼此分開的方向移動,工件W1的保持狀態被解除。As shown in FIG. 1, when the fluid is supplied from the first fluid supply and discharge port 28 to the first pressure application chamber 26, the piston 24 starts to move to the second step surface 19. As a result, the fluid in the second pressure application chamber 27 is discharged to the outside through the second fluid supply and discharge port 29, and the piston 24 moves to the second step surface 19. As a result, the piston rod 30 moves in the protruding direction with respect to the body 11. As the piston rod 30 moves in the protruding direction with respect to the body 11, the first ends of the pair of operating handles 35 are pushed by the piston rod 30 via the engaging shaft 36, and the engaging member 38 is provided with a support shaft corresponding to each operating handle 35 37 is the rotation center of rotation in the direction apart from each other. As the engaging member 38 moves in a direction apart from each other, the two jaw holders 33 move in a direction apart from each other, and the holding state of the workpiece W1 is released.

如圖2所示,在內螺紋孔13安裝有圓板狀的頂蓋39。由此,頂蓋39安裝在機身11中的軸線方向的第一端部。在頂蓋39的外周面形成有擰入到內螺紋孔13的外螺紋部39a。由此,頂蓋39具有擰入到機身11的外螺紋部39a。並且,在貫通孔12內,藉由頂蓋39、感測器收納孔14的內周面以及彈簧座構件22的第二端面22b來區劃感測器收納室40。由此,機身11具有感測器收納室40。As shown in FIG. 2, a disk-shaped top cover 39 is attached to the internal threaded hole 13. Thereby, the top cover 39 is attached to the first end in the axial direction of the body 11. On the outer peripheral surface of the top cover 39, a male screw part 39a screwed into the female screw hole 13 is formed. Thereby, the top cover 39 has an external screw portion 39a screwed into the body 11. In the through hole 12, the sensor storage chamber 40 is divided by the top cover 39, the inner peripheral surface of the sensor storage hole 14, and the second end surface 22 b of the spring seat member 22. Thus, the body 11 has a sensor storage chamber 40.

保持裝置10具備對一對卡爪座33的位置進行檢測的LVDT感測器50。LVDT感測器50具有:圓筒狀的感測器箱體51;捲繞在感測器箱體51的一次線圈61和兩個二次線圈62;以及芯軸63,與活塞24一體地進行往復運動,並且能夠相對於感測器箱體51出沒。The holding device 10 includes an LVDT sensor 50 that detects the position of the pair of pawl holders 33. The LVDT sensor 50 has: a cylindrical sensor case 51; a primary coil 61 and two secondary coils 62 wound around the sensor case 51; and a mandrel 63, which is integrated with the piston 24 It reciprocates and can appear and disappear relative to the sensor box 51.

感測器箱體51具有圓筒狀的主體部52,該主體部52具有樹脂製的底。主體部52具有圓板狀的底壁52a以及從底壁52a的外周部延伸的圓筒狀的周壁52b。周壁52b的內徑與彈簧座構件22的插通孔22h的孔徑相同。此外,主體部52具有環狀的凸緣52c,該凸緣52c從周壁52b中的與底壁52a相反的一側的端部向外方突出。在感測器箱體51中,一次線圈61和兩個二次線圈62藉由樹脂模塑方式設置於主體部52。一次線圈61和兩個二次線圈62被埋設在主體部52的周壁52b。一次線圈61和兩個二次線圈62在主體部52的軸線方向上排列配置。在主體部52的軸線方向上,一次線圈61配置在兩個二次線圈62之間。The sensor case 51 has a cylindrical main body 52 having a bottom made of resin. The main body 52 has a disc-shaped bottom wall 52a and a cylindrical peripheral wall 52b extending from the outer periphery of the bottom wall 52a. The inner diameter of the peripheral wall 52b is the same as the diameter of the insertion hole 22h of the spring seat member 22. In addition, the main body portion 52 has an annular flange 52c that protrudes outward from an end of the peripheral wall 52b on the opposite side to the bottom wall 52a. In the sensor case 51, the primary coil 61 and the two secondary coils 62 are provided on the main body 52 by resin molding. The primary coil 61 and the two secondary coils 62 are embedded in the peripheral wall 52 b of the main body 52. The primary coil 61 and the two secondary coils 62 are arranged side by side in the axial direction of the main body 52. In the axial direction of the main body 52, the primary coil 61 is arranged between the two secondary coils 62.

此外,感測器箱體51具有覆蓋主體部52的周壁52b的外周面的圓筒狀的包覆構件53。包覆構件53例如為鐵製。而且,感測器箱體51具有將包覆構件53的外周面覆蓋的圓筒狀的殼體構件54。殼體構件54例如為鋁製。殼體構件54的外徑與凸緣52c的外徑大致相同。殼體構件54中的與凸緣52c相對的端面與凸緣52c接觸。此外,殼體構件54中的與頂蓋39相對的端面抵接到頂蓋39。In addition, the sensor case 51 has a cylindrical covering member 53 covering the outer peripheral surface of the peripheral wall 52 b of the main body portion 52. The covering member 53 is made of iron, for example. In addition, the sensor box 51 has a cylindrical case member 54 covering the outer peripheral surface of the covering member 53. The case member 54 is made of aluminum, for example. The outer diameter of the housing member 54 is substantially the same as the outer diameter of the flange 52c. The end surface of the housing member 54 opposite to the flange 52c is in contact with the flange 52c. In addition, the end surface of the housing member 54 opposite to the top cover 39 abuts against the top cover 39.

凸緣52c的外徑和殼體構件54的外徑比感測器收納孔14的小徑孔14a的孔徑稍小。感測器箱體51被收納在感測器收納室40。凸緣52c配置在小徑孔14a的內側。主體部52的周壁52b的軸心與彈簧座構件22的插通孔22h的軸心一致。The outer diameter of the flange 52 c and the outer diameter of the housing member 54 are slightly smaller than the diameter of the small diameter hole 14 a of the sensor housing hole 14. The sensor box 51 is stored in the sensor storage room 40. The flange 52c is arranged inside the small diameter hole 14a. The axial center of the peripheral wall 52 b of the main body portion 52 coincides with the axial center of the insertion hole 22 h of the spring seat member 22.

芯軸63具有外螺紋63a。活塞24在與彈簧座構件22相對的端面具有內螺紋孔24h。芯軸63的外螺紋63a與活塞24的內螺紋孔24h螺合。並且,外螺紋63a與內螺紋孔24h螺合,從而芯軸63以從活塞24中的與彈簧座構件22相對的端面向機身11的軸線方向延伸的狀態與活塞24成為一體化。另外,在外螺紋63a螺合有螺母64,抑制外螺紋63a相對於內螺紋孔24h的螺合鬆動。The mandrel 63 has an external thread 63a. The piston 24 has an internally threaded hole 24h on an end surface opposite to the spring seat member 22. The external thread 63a of the mandrel 63 is threadedly engaged with the internal thread hole 24h of the piston 24. In addition, the male screw 63a is screwed into the female screw hole 24h, and the core shaft 63 is integrated with the piston 24 in a state extending from the end face of the piston 24 opposite to the spring seat member 22 in the axial direction of the body 11. In addition, a nut 64 is screwed to the external thread 63a, and loosening of the external thread 63a with respect to the internal threaded hole 24h is suppressed.

芯軸63從缸體室23穿過彈簧座構件22的插通孔22h插入到主體部52的周壁52b的內側。芯軸63的外徑比周壁52b的內徑和彈簧座構件22的插通孔22h的孔徑小。LVDT感測器50以與活塞24同軸配置的狀態內置於機身11。The core shaft 63 is inserted from the cylinder chamber 23 through the insertion hole 22 h of the spring seat member 22 to the inner side of the peripheral wall 52 b of the main body portion 52. The outer diameter of the core shaft 63 is smaller than the inner diameter of the peripheral wall 52b and the diameter of the insertion hole 22h of the spring seat member 22. The LVDT sensor 50 is built in the body 11 in a state where it is arranged coaxially with the piston 24.

對一次線圈61施加交流電壓。芯軸63伴隨活塞24的往復運動在各二次線圈62的內側進行往復運動,從而在各二次線圈62產生感應電壓。An AC voltage is applied to the primary coil 61. The mandrel 63 reciprocates inside each secondary coil 62 in accordance with the reciprocating movement of the piston 24 to generate an induced voltage in each secondary coil 62.

在彈簧座構件22的彈簧收納槽22c內收納有施力構件65。施力構件65例如為波形墊圈。施力構件65抵接到主體部52中的與底壁52a相反的一側的端面。由此,施力構件65繞感測器箱體51的軸線與感測器箱體51抵接並且朝向頂蓋39對感測器箱體51施力。並且,施力構件65與頂蓋39協作來夾入感測器箱體51。The urging member 65 is accommodated in the spring accommodating groove 22c of the spring seat member 22. The urging member 65 is, for example, a wave washer. The urging member 65 abuts on the end surface of the main body 52 on the side opposite to the bottom wall 52a. Thereby, the urging member 65 abuts against the sensor case 51 around the axis of the sensor case 51 and urges the sensor case 51 toward the top cover 39. In addition, the urging member 65 cooperates with the top cover 39 to sandwich the sensor case 51.

在凸緣52c的外周面安裝有圓環狀的密封構件66。密封構件66對凸緣52c的外周面與小徑孔14a的內周面之間進行密封。由此,在感測器箱體51的外周面設置有密封構件66,該密封構件66對感測器箱體51的外周面與機身11的內周面進行密封,抑制流體從缸體室23洩漏。An annular sealing member 66 is attached to the outer peripheral surface of the flange 52c. The sealing member 66 seals between the outer peripheral surface of the flange 52c and the inner peripheral surface of the small diameter hole 14a. As a result, a sealing member 66 is provided on the outer peripheral surface of the sensor box 51. The sealing member 66 seals the outer peripheral surface of the sensor box 51 and the inner peripheral surface of the body 11 to prevent fluid from flowing from the cylinder chamber. 23 Leakage.

保持裝置10還具備旋轉阻止機構70,該旋轉阻止機構70防止感測器箱體51相對於機身11旋轉。旋轉阻止機構70由擰入在殼體構件54的外周面的螺栓71以及形成於機身11的孔72構成,螺栓71的頭部71a配置於孔72的內側。The holding device 10 further includes a rotation preventing mechanism 70 that prevents the sensor case 51 from rotating relative to the body 11. The rotation preventing mechanism 70 is composed of a bolt 71 screwed into the outer peripheral surface of the housing member 54 and a hole 72 formed in the body 11, and the head 71 a of the bolt 71 is arranged inside the hole 72.

如圖4所示,在機身11的外周壁的外側面形成有凹部11c。並且,孔72形成在凹部11c的底面11d。孔72與感測器收納孔14的大徑孔14b連通。俯視時,孔72為橢圓孔形狀。孔72的長度方向與機身11的軸線方向一致。孔72的內周緣由一對長側緣72a、第一彎曲緣72b以及第二彎曲緣72c形成。兩個長側緣72a在孔72的長度方向上彼此平行地延伸。第一彎曲緣72b以弧狀彎曲,將兩個長側緣72a中的第一端部彼此連接。第二彎曲緣72c以弧狀彎曲,將兩個長側緣72a中的第二端部彼此連接。As shown in FIG. 4, a recess 11c is formed on the outer surface of the outer peripheral wall of the body 11. In addition, the hole 72 is formed in the bottom surface 11d of the recess 11c. The hole 72 communicates with the large-diameter hole 14 b of the sensor housing hole 14. In a plan view, the hole 72 has an elliptical hole shape. The longitudinal direction of the hole 72 coincides with the axial direction of the fuselage 11. The inner peripheral edge of the hole 72 is formed by a pair of long side edges 72a, a first curved edge 72b, and a second curved edge 72c. The two long side edges 72 a extend parallel to each other in the length direction of the hole 72. The first curved edge 72b is curved in an arc shape, and connects the first ends of the two long side edges 72a to each other. The second curved edge 72c is curved in an arc shape, and connects the second ends of the two long side edges 72a to each other.

如圖2所示,凸緣52c配置在小徑孔14a的內側,在感測器箱體51被施力構件65和頂蓋39夾持的狀態下,螺栓71的頭部71a位於孔72的第一彎曲緣72b附近。此時,在機身11的軸線方向上,螺栓71的頭部71a與孔72的第二彎曲緣72c之間的距離L1,比從錐形面14c到密封構件66的距離L2大。As shown in FIG. 2, the flange 52c is arranged inside the small diameter hole 14a, and the head 71a of the bolt 71 is located in the hole 72 in the state where the sensor case 51 is clamped by the urging member 65 and the top cover 39 Near the first curved edge 72b. At this time, in the axial direction of the body 11, the distance L1 between the head 71a of the bolt 71 and the second curved edge 72c of the hole 72 is greater than the distance L2 from the tapered surface 14c to the sealing member 66.

如圖4所示,在凹部11c的底面11d形成有配線用插通孔11h。如圖2所示,配線用插通孔11h相比孔72靠近頂蓋39配置,並且與感測器收納孔14的大徑孔14b連通。此外,在殼體構件54形成有切口54k。配線用插通孔11h與切口54k在與機身11的軸線方向正交的方向上重疊。並且,從一次線圈61和兩個二次線圈62拉出的電配線73,穿過切口54k和配線用插通孔11h朝向凹部11c內延伸。As shown in FIG. 4, the insertion hole 11h for wiring is formed in the bottom surface 11d of the recessed part 11c. As shown in FIG. 2, the wiring insertion hole 11 h is arranged closer to the top cover 39 than the hole 72, and communicates with the large-diameter hole 14 b of the sensor housing hole 14. In addition, a cutout 54k is formed in the case member 54. The wiring insertion hole 11h and the cutout 54k overlap in a direction orthogonal to the axial direction of the body 11. In addition, the electrical wiring 73 drawn from the primary coil 61 and the two secondary coils 62 extends toward the recess 11c through the cutout 54k and the wiring insertion hole 11h.

如圖1所示,在機身11的外周壁的外側面搭載有放大器74。由此,放大器74與保持裝置10成為一體化。放大器74以擋住凹部11c的狀態安裝在機身11的外周壁的外側面。電配線73中的與一次線圈61和兩個二次線圈62相反的一側的端部與放大器74電連接。放大器74藉由連接器74a與外部控制設備75電連接。放大器74對從各二次線圈62輸出的感應電壓進行放大。並且,藉由放大器74放大的電壓,經由連接器74a向外部控制設備75供給。As shown in FIG. 1, an amplifier 74 is mounted on the outer surface of the outer peripheral wall of the body 11. As a result, the amplifier 74 and the holding device 10 are integrated. The amplifier 74 is mounted on the outer surface of the outer peripheral wall of the body 11 in a state of blocking the recess 11c. The end of the electrical wiring 73 on the opposite side to the primary coil 61 and the two secondary coils 62 is electrically connected to the amplifier 74. The amplifier 74 is electrically connected to the external control device 75 through the connector 74a. The amplifier 74 amplifies the induced voltage output from each secondary coil 62. In addition, the voltage amplified by the amplifier 74 is supplied to the external control device 75 via the connector 74a.

接著,對本實施方式的作用進行說明。Next, the effect of this embodiment will be described.

芯軸63伴隨活塞24的往復運動進行往復運動,從而在兩個二次線圈62產生的感應電壓上產生壓差。該感應電壓的差根據芯軸63的位置變化。此外,一對卡爪座33的移動量與活塞24的移動量存在比例關係。因此,外部控制設備75對從兩個二次線圈62經由電配線73和放大器74供給的感應電壓的差的變化量進行檢測,從而能夠檢測芯軸63的移動量、即活塞24的移動量。其結果,能夠檢測一對卡爪座33的移動量。由此,能夠線性地檢測一對卡爪座33的位置,高精度地進行一對卡爪座33的位置檢測。The mandrel 63 reciprocates along with the reciprocating movement of the piston 24, thereby generating a pressure difference between the induced voltages generated by the two secondary coils 62. The difference in the induced voltage changes according to the position of the core shaft 63. In addition, there is a proportional relationship between the movement amount of the pair of claw seats 33 and the movement amount of the piston 24. Therefore, the external control device 75 detects the amount of change in the difference between the induced voltages supplied from the two secondary coils 62 via the electric wiring 73 and the amplifier 74, and can detect the amount of movement of the mandrel 63, that is, the amount of movement of the piston 24. As a result, the amount of movement of the pair of claw holders 33 can be detected. Thereby, the position of the pair of jaw holders 33 can be detected linearly, and the position of the pair of jaw holders 33 can be detected with high accuracy.

此外,在一對卡爪座33正在保持工件W1時,外部控制設備75對一對卡爪座33的位置進行檢測,從而還能夠根據一對卡爪座33的位置資訊,測定工件W1的尺寸。因此,本實施方式的LVDT感測器50還作為用於測定工件W1的尺寸的測長感測器來發揮功能。In addition, when the pair of jaw holders 33 are holding the workpiece W1, the external control device 75 detects the position of the pair of jaw holders 33, so that the size of the workpiece W1 can be measured based on the position information of the pair of jaw holders 33. . Therefore, the LVDT sensor 50 of this embodiment also functions as a length measuring sensor for measuring the size of the workpiece W1.

如圖5所示,例如,在維護時等,進行頂蓋39對於機身11的組裝和拆卸。此時,當在殼體構件54中的與頂蓋39相對的端面和頂蓋39抵接的狀態下,進行頂蓋39的外螺紋部39a相對於內螺紋孔13的螺進或螺出時,感測器箱體51會與頂蓋39一起轉動。此時,螺栓71的頭部71a與孔72的兩個長側緣72a中的一個接觸,從而防止感測器箱體51相對於機身11旋轉。As shown in FIG. 5, for example, during maintenance, assembly and disassembly of the top cover 39 to the body 11 are performed. At this time, when the end surface of the housing member 54 opposite to the top cover 39 is in contact with the top cover 39, when the male screw portion 39a of the top cover 39 is screwed in or out of the female screw hole 13 , The sensor box 51 and the top cover 39 rotate together. At this time, the head 71 a of the bolt 71 is in contact with one of the two long side edges 72 a of the hole 72, thereby preventing the sensor box 51 from rotating relative to the body 11.

例如,在維護時等,在從機身11拆卸感測器箱體51時,首先,從機身11拆卸頂蓋39,並且從機身11的外周壁的外側面拆卸放大器74。並且,到螺栓71的頭部71a抵接到孔72的第二彎曲緣72c為止,螺栓71的頭部71a朝向第二彎曲緣72c移動。於是,感測器箱體51朝向內螺紋孔13移動,凸緣52c從小徑孔14a起經由錐形面14c位於大徑孔14b的內側。由此,密封構件66對凸緣52c的外周面與小徑孔14a的內周面之間的密封被解除,密封構件66與機身11之間的滑動阻抗降低。其結果,順利地進行感測器箱體51在機身11內的向軸線方向的移動,容易從機身11拆卸感測器箱體51。並且,藉由從殼體構件54拆卸螺栓71並從貫通孔12拔出感測器箱體51,從而從機身11拆卸感測器箱體51。For example, at the time of maintenance, etc., when the sensor case 51 is removed from the main body 11, first, the top cover 39 is removed from the main body 11, and the amplifier 74 is removed from the outer surface of the outer peripheral wall of the main body 11. And, until the head 71a of the bolt 71 abuts on the second curved edge 72c of the hole 72, the head 71a of the bolt 71 moves toward the second curved edge 72c. Then, the sensor case 51 moves toward the female threaded hole 13, and the flange 52c is located inside the large-diameter hole 14b via the tapered surface 14c from the small-diameter hole 14a. Thereby, the sealing between the outer peripheral surface of the flange 52c and the inner peripheral surface of the small-diameter hole 14a by the sealing member 66 is released, and the sliding resistance between the sealing member 66 and the body 11 is reduced. As a result, the movement of the sensor box 51 in the axial direction within the body 11 is smoothly performed, and the sensor box 51 is easily detached from the body 11. In addition, by removing the bolt 71 from the housing member 54 and pulling out the sensor case 51 from the through hole 12, the sensor case 51 is detached from the main body 11.

在上述實施方式中能夠得到以下的效果。In the above-mentioned embodiment, the following effects can be obtained.

(1)保持裝置10具備施力構件65,該施力構件65繞感測器箱體51的軸線與感測器箱體51抵接並且朝向頂蓋39對感測器箱體51施力,從而與頂蓋39協作來夾持感測器箱體51。由此,感測器箱體51被繞該感測器箱體51的軸線抵接的施力構件65與頂蓋39夾持,因此能夠抑制感測器箱體51以相對於芯軸63的軸線傾斜的狀態配置在機身11內。因此,能夠順利地進行芯軸63相對於感測器箱體51的出沒動作。(1) The holding device 10 includes an urging member 65 that abuts against the sensor case 51 around the axis of the sensor case 51 and urges the sensor case 51 toward the top cover 39, thereby It cooperates with the top cover 39 to clamp the sensor box 51. As a result, the sensor box 51 is clamped by the urging member 65 and the top cover 39 that abut on the axis of the sensor box 51. Therefore, it is possible to suppress the sensor box 51 from moving relative to the core shaft 63. It is arranged in the fuselage 11 in a state where the axis is inclined. Therefore, the mandrel 63 can be smoothly moved into and out of the sensor case 51.

(2)在感測器箱體51的外周面設置有環狀的密封構件66,該密封構件66對感測器箱體51的外周面與機身11的內周面之間進行密封,從而抑制流體從缸體室23的洩漏。由此,在與感測器箱體51的軸線正交的方向上,能夠利用抑制流體從缸體室23洩漏的環狀的密封構件66的彈性力來對機身11內的感測器箱體51的位置進行定位。因此,由於能夠抑制感測器箱體51的軸線相對於芯軸63的軸線偏移,因此能夠進一步順利地進行芯軸63相對於感測器箱體51的出沒動作。(2) An annular sealing member 66 is provided on the outer peripheral surface of the sensor box 51, and the sealing member 66 seals between the outer peripheral surface of the sensor box 51 and the inner peripheral surface of the body 11, thereby The leakage of fluid from the cylinder chamber 23 is suppressed. Thereby, in the direction orthogonal to the axis of the sensor box 51, the elastic force of the ring-shaped sealing member 66 that suppresses the leakage of fluid from the cylinder chamber 23 can be used to affect the sensor box in the body 11 The position of the body 51 is positioned. Therefore, since the axis of the sensor case 51 can be restrained from shifting with respect to the axis of the core shaft 63, the movement of the core shaft 63 with respect to the sensor case 51 can be performed more smoothly.

(3)頂蓋39具有擰入到機身11的外螺紋部39a。此外,保持裝置10還具備旋轉阻止機構70,該旋轉阻止機構70防止感測器箱體51相對於機身11旋轉。由此,例如,當與頂蓋39藉由壓入來安裝到機身11的情況相比時,能夠提高頂蓋39組裝到機身11的組裝性。此外,例如,在維護時等,需要從機身11拆卸頂蓋39時,也與頂蓋39藉由壓入來安裝到機身11的情況相比時,能夠容易從機身11拆卸頂蓋39。而且,在進行頂蓋39對於機身11的組裝和拆卸時,能夠藉由旋轉阻止機構70防止感測器箱體51與頂蓋39一起轉動。由此,能夠避免產生隨著感測器箱體51旋轉,與一次線圈61和二次線圈62分別連接的電配線73被拉伸而損傷等問題。(3) The top cover 39 has an external threaded portion 39a screwed into the body 11. In addition, the holding device 10 further includes a rotation preventing mechanism 70 that prevents the sensor case 51 from rotating relative to the body 11. Thereby, for example, when compared with the case where the top cover 39 is attached to the body 11 by press-fitting, the assemblability of the top cover 39 to the body 11 can be improved. In addition, for example, when the top cover 39 needs to be detached from the body 11 during maintenance, etc., the top cover can be easily detached from the body 11 when compared with the case where the top cover 39 is attached to the body 11 by press-fitting. 39. Moreover, when the top cover 39 is assembled and disassembled to the body 11, the rotation preventing mechanism 70 can prevent the sensor case 51 and the top cover 39 from rotating together. As a result, it is possible to avoid problems such as the electrical wiring 73 respectively connected to the primary coil 61 and the secondary coil 62 being stretched and damaged as the sensor housing 51 rotates.

(4)在維護時等,從機身11拆卸感測器箱體51時,直至螺栓71的頭部71a抵接到孔72的第二彎曲緣72c,螺栓71的頭部71a朝向第二彎曲緣72c移動。由此,感測器箱體51朝向內螺紋孔13移動,從而能夠使凸緣52c從小徑孔14a起經由錐形面14c位於大徑孔14b的內側。其結果,密封構件66中的凸緣52c的外周面與小徑孔14a的內周面之間的密封被解除,能夠使密封構件66與機身11之間的滑動阻抗降低,順利地進行感測器箱體51在機身11內的向軸線方向的移動,能夠容易地從機身11拆卸感測器箱體51。(4) During maintenance, etc., when the sensor case 51 is removed from the body 11, until the head 71a of the bolt 71 abuts the second curved edge 72c of the hole 72, the head 71a of the bolt 71 is bent toward the second The edge 72c moves. Thereby, the sensor case 51 moves toward the female threaded hole 13, and the flange 52c can be positioned inside the large-diameter hole 14b from the small-diameter hole 14a via the tapered surface 14c. As a result, the seal between the outer peripheral surface of the flange 52c in the sealing member 66 and the inner peripheral surface of the small-diameter hole 14a is released, and the sliding resistance between the sealing member 66 and the body 11 can be reduced, and smooth performance can be achieved. The movement of the sensor box 51 in the axial direction in the body 11 allows the sensor box 51 to be easily detached from the body 11.

(5)根據本實施方式,由於順利地進行芯軸63相對於感測器箱體51的出沒動作,因此能夠藉由外部控制設備7高精度地檢測一對卡爪座33的位置。(5) According to this embodiment, since the mandrel 63 moves smoothly with respect to the sensor housing 51, the position of the pair of jaw holders 33 can be detected with high accuracy by the external control device 7.

另外,能夠如下所述變更實施上述實施方式。能夠在技術上不矛盾的範圍內彼此組合上述實施方式和以下的變更例來實施In addition, the above-mentioned embodiment can be modified and implemented as follows. The above embodiments and the following modified examples can be combined with each other within the scope of technically not contradictory.

如圖6所示,旋轉阻止機構70也可以由擰入到機身11的螺栓81以及形成在感測器箱體51且內側配置有螺栓81的軸部81a的孔82構成。在凹部11c的底面11d形成有螺栓81的軸部81a擰入的內螺紋孔11e。在包覆構件53形成有供螺栓81的軸部81a插通的槽53e。孔82、槽53e以及內螺紋孔11e在與機身11的軸線方向正交的方向上重疊。並且,穿過了內螺紋孔11e和槽53e的螺栓81的軸部81a的頂端部插入到孔82。由此,當感測器箱體51想要與頂蓋39一起轉動時,孔82的內周面與螺栓81的軸部81a的頂端部接觸,從而防止感測器箱體51相對於機身11旋轉。另外,在圖6所示的實施方式中,為了實現保持裝置10的小型化,使活塞24的外徑比上述實施方式小。伴隨於此,感測器箱體51的外徑也變小。具體地講,圖6所示的實施方式的感測器箱體51具有省略了在上述實施方式中說明的殼體構件54的結構。As shown in FIG. 6, the rotation preventing mechanism 70 may be composed of a bolt 81 screwed into the body 11 and a hole 82 formed in the sensor case 51 and having a shaft portion 81 a of the bolt 81 arranged inside. A female screw hole 11e into which the shaft portion 81a of the bolt 81 is screwed is formed in the bottom surface 11d of the recess 11c. The covering member 53 is formed with a groove 53 e through which the shaft portion 81 a of the bolt 81 is inserted. The hole 82, the groove 53e, and the female screw hole 11e overlap in a direction orthogonal to the axial direction of the body 11. In addition, the tip portion of the shaft portion 81a of the bolt 81 that has passed through the female screw hole 11e and the groove 53e is inserted into the hole 82. Thus, when the sensor box 51 wants to rotate together with the top cover 39, the inner peripheral surface of the hole 82 contacts the tip of the shaft portion 81a of the bolt 81, thereby preventing the sensor box 51 from relative to the body. 11 rotation. In addition, in the embodiment shown in FIG. 6, in order to reduce the size of the holding device 10, the outer diameter of the piston 24 is made smaller than that of the above-mentioned embodiment. Along with this, the outer diameter of the sensor case 51 also becomes smaller. Specifically, the sensor case 51 of the embodiment shown in FIG. 6 has a structure in which the housing member 54 explained in the above-mentioned embodiment is omitted.

在實施方式中,抑制流體從缸體室23洩漏的環狀的密封構件66,也可以不設置在感測器箱體51的外周面,例如,分別設置在彈簧座構件22的外周面和彈簧座構件22的第二端面22b與感測器箱體51之間。In the embodiment, the ring-shaped sealing member 66 that prevents fluid from leaking from the cylinder chamber 23 may not be provided on the outer peripheral surface of the sensor case 51. For example, they may be provided on the outer peripheral surface of the spring seat member 22 and the spring, respectively. Between the second end surface 22b of the seat member 22 and the sensor box 51.

在實施方式中,頂蓋39也可以藉由壓入安裝到機身11。In the embodiment, the top cover 39 may also be installed to the body 11 by press-fitting.

在實施方式中,施力構件65也可以例如是盤簧。In the embodiment, the urging member 65 may be, for example, a coil spring.

在實施方式中,LVDT感測器50也可以不是一次線圈61和兩個二次線圈62在主體部52的軸線方向上排列配置的結構,例如,也可以是在兩個二次線圈62的內周側配置一次線圈61的結構。In the embodiment, the LVDT sensor 50 may not be a structure in which the primary coil 61 and the two secondary coils 62 are arranged side by side in the axial direction of the main body 52. For example, it may be in the two secondary coils 62. The structure in which the primary coil 61 is arranged on the circumferential side.

在實施方式中,放大器74也可以不搭載於機身11的外周壁的外側面。關鍵是,放大器74也可以不與保持裝置10成為一體化。In the embodiment, the amplifier 74 may not be mounted on the outer surface of the outer peripheral wall of the body 11. The key point is that the amplifier 74 may not be integrated with the holding device 10.

在實施方式中,機身11不限於方筒狀,例如也可以是圓筒狀。In the embodiment, the body 11 is not limited to a square tube shape, and may be, for example, a cylindrical shape.

10:保持裝置 11:機身(body) 23:缸體室 24:活塞 33:卡爪座(master jaw) 39:頂蓋(head cover) 39a:外螺紋部 50:LVDT感測器 51:感測器箱體 61:一次線圈 62:二次線圈 63:芯軸 65:施力構件 66:密封構件 70:旋轉阻止機構10: Holding device 11: body 23: Cylinder chamber 24: Piston 33: Master jaw 39: head cover 39a: External thread 50: LVDT sensor 51: Sensor box 61: Primary coil 62: Secondary coil 63: Mandrel 65: force component 66: Sealing member 70: Rotation prevention mechanism

圖1是一實施方式中的保持裝置的截面圖。 圖2是放大示出保持裝置的截面圖。 圖3是示出保持了工件的狀態的保持裝置的截面圖。 圖4是機身的俯視圖。 圖5是保持裝置的分解截面圖。 圖6是放大示出另一實施方式中的保持裝置的截面圖。 圖7是先前的保持裝置的截面圖。Fig. 1 is a cross-sectional view of a holding device in an embodiment. Fig. 2 is an enlarged cross-sectional view showing the holding device. Fig. 3 is a cross-sectional view of the holding device showing a state in which the workpiece is held. Figure 4 is a top view of the fuselage. Fig. 5 is an exploded cross-sectional view of the holding device. Fig. 6 is an enlarged cross-sectional view showing a holding device in another embodiment. Fig. 7 is a cross-sectional view of a conventional holding device.

10:保持裝置 10: Holding device

11:機身(body) 11: body

11a:第一端面 11a: The first end face

11c:凹部 11c: recess

11d:底面 11d: bottom surface

11h:配線用插通孔 11h: Through hole for wiring

12:貫通孔 12: Through hole

13:內螺紋孔 13: Internal threaded hole

14:感測器收納孔 14: Sensor storage hole

14a:小徑孔 14a: Small diameter hole

14b:大徑孔 14b: Large diameter hole

14c:錐形面 14c: tapered surface

15:缸體孔 15: Cylinder hole

16:密封件裝配槽 16: Seal assembly groove

18:第一台階面 18: The first step surface

19:第二台階面 19: The second step surface

22:彈簧座構件 22: Spring seat member

22a:第一端面 22a: first end face

22b:第二端面 22b: second end face

22c:彈簧收納槽 22c: Spring storage slot

22h:插通孔 22h: Through hole

23:缸體室 23: Cylinder chamber

24:活塞 24: Piston

24h:內螺紋孔 24h: internal threaded hole

25:活塞密封件 25: Piston seal

26:第一壓力作用室 26: The first pressure chamber

27:第二壓力作用室 27: The second pressure chamber

28:第一流體給排口 28: First fluid supply and discharge port

29:第二流體給排口 29: Second fluid supply and discharge port

30:活塞桿 30: Piston rod

39:頂蓋 39: top cover

39a:外螺紋部 39a: External thread

40:感測器收納室 40: Sensor storage room

50:LVDT感測器 50: LVDT sensor

51:感測器箱體 51: Sensor box

52:主體部 52: main body

52a:底壁 52a: bottom wall

52b:周壁 52b: peripheral wall

52c:凸緣 52c: flange

53:包覆構件53 53: Covering member 53

54:殼體構件 54: Shell member

54k:切口 54k: notch

61:一次線圈 61: Primary coil

62:二次線圈 62: Secondary coil

63:芯軸 63: Mandrel

63a:外螺紋 63a: external thread

64:螺母 64: Nut

65:施力構件 65: force component

66:密封構件 66: Sealing member

70:旋轉阻止機構 70: Rotation prevention mechanism

71:螺栓 71: Bolt

71a:頭部 71a: head

72:孔 72: Hole

72a:長側緣 72a: Long side edge

72b:第一彎曲緣 72b: First bending edge

72c:第二彎曲緣 72c: second bending edge

73:電配線 73: electrical wiring

74:放大器 74: Amplifier

74a:連接器 74a: Connector

L1:螺栓71的頭部71a與孔72的第二彎曲緣72c之間的距離 L1: The distance between the head 71a of the bolt 71 and the second curved edge 72c of the hole 72

L2:從錐形面14c到密封構件66的距離 L2: The distance from the tapered surface 14c to the sealing member 66

Claims (3)

一種保持裝置,其特徵在於,具備: 筒狀的機身,具有流體被供給和排出的缸體室; 活塞,收納在該缸體室並且藉由被供給和排出該缸體室的流體來進行往復運動; 頂蓋,安裝在該機身上的軸線方向的端部; 一對卡爪座,伴隨該活塞的往復運動來進行開閉動作;以及 LVDT感測器,以與該活塞同軸配置的狀態內置於該機身,並且對該一對卡爪座的位置進行檢測, 該LVDT感測器具有: 筒狀的感測器箱體; 一次線圈和兩個二次線圈,捲繞在該感測器箱體;以及 芯軸,與該活塞一體地進行往復運動,並且能夠相對於該感測器箱體出沒, 該保持裝置具備施力構件,該施力構件繞該感測器箱體的軸線與該感測器箱體抵接,並且朝向該頂蓋對該感測器箱體施力,從而與該頂蓋協作來夾持該感測器箱體。A holding device, characterized in that it has: A cylindrical body with a cylinder chamber where fluid is supplied and discharged; The piston is housed in the cylinder chamber and reciprocates by the fluid supplied and discharged from the cylinder chamber; The top cover is installed on the end of the fuselage in the axial direction; A pair of pawl seats, which open and close with the reciprocating movement of the piston; and The LVDT sensor is built into the body in a state coaxially arranged with the piston, and detects the position of the pair of jaw holders, The LVDT sensor has: Cylindrical sensor box; A primary coil and two secondary coils are wound around the sensor box; and The mandrel reciprocates integrally with the piston, and can appear and disappear relative to the sensor box, The holding device is provided with an urging member, the urging member abuts against the sensor case around the axis of the sensor case, and urges the sensor case toward the top cover, thereby interacting with the top cover Collaborate to hold the sensor box. 如請求項1記載的保持裝置,其中, 在該感測器箱體的外周面設置有環狀的密封構件,該密封構件對該感測器箱體的外周面與該機身的內周面之間進行密封,抑制流體從該缸體室洩漏。Such as the holding device described in claim 1, wherein: An annular sealing member is provided on the outer peripheral surface of the sensor box, and the sealing member seals between the outer peripheral surface of the sensor box and the inner peripheral surface of the body to prevent fluid from flowing from the cylinder. Room leaks. 如請求項1或2記載的保持裝置,其中, 該頂蓋具有擰入到該機身的外螺紋部, 該保持裝置還具備旋轉阻止機構,該旋轉阻止機構防止該感測器箱體相對於該機身旋轉。Such as the holding device described in claim 1 or 2, wherein: The top cover has an external threaded part screwed into the body, The holding device further includes a rotation preventing mechanism that prevents the sensor case from rotating relative to the main body.
TW108125903A 2018-08-08 2019-07-23 Holding device TWI742407B (en)

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JP2018149479A JP6867340B2 (en) 2018-08-08 2018-08-08 Gripping device
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CN (1) CN110815264B (en)
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JPH11320474A (en) * 1998-05-12 1999-11-24 Kondo Seisakusho:Kk Holding device with claw position detecting mechanism
CN101390027A (en) * 2006-02-23 2009-03-18 Abb公司 A system for controlling the position and orientation of an object in dependence on received forces and torques from a user
TW201703920A (en) * 2015-06-30 2017-02-01 Smc股份有限公司 Chuck apparatus

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JP2020023031A (en) 2020-02-13
KR102344563B1 (en) 2021-12-29
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CN110815264A (en) 2020-02-21
JP6867340B2 (en) 2021-04-28

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