TWI719184B - Polyimide resin laminate, its manufacturing method, and polyimide film with functional layer - Google Patents

Polyimide resin laminate, its manufacturing method, and polyimide film with functional layer Download PDF

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TWI719184B
TWI719184B TW106110944A TW106110944A TWI719184B TW I719184 B TWI719184 B TW I719184B TW 106110944 A TW106110944 A TW 106110944A TW 106110944 A TW106110944 A TW 106110944A TW I719184 B TWI719184 B TW I719184B
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resin laminate
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TW201736139A (en
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林信行
平石克文
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日商日鐵化學材料股份有限公司
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    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
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    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0046Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
    • B32B37/0053Constructional details of laminating machines comprising rollers; Constructional features of the rollers
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B32B38/00Ancillary operations in connection with laminating processes
    • B32B38/10Removing layers, or parts of layers, mechanically or chemically
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    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02Physical, chemical or physicochemical properties
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/086Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/30Properties of the layers or laminate having particular thermal properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties

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Abstract

本發明的聚醯亞胺樹脂層疊體的特徵在於:在包含聚醯亞胺樹脂的載體層的一面側具有包含聚醯亞胺樹脂的卷曲抑制層,進而具有以可剝離的方式黏合於卷曲抑制層的包含聚醯亞胺樹脂的基材層,卷曲抑制層的熱膨脹係數小於或大於支持層及基材層的熱膨脹係數的任一個。The polyimide resin laminate of the present invention is characterized by having a curl suppressing layer including a polyimide resin on one side of a carrier layer including a polyimide resin, and further having a curl suppressing layer that is releasably adhered to a curl suppressing layer. The thermal expansion coefficient of the curl-inhibiting layer of the base layer containing the polyimide resin of the layer is less than or greater than either of the thermal expansion coefficients of the support layer and the base layer.

Description

聚醯亞胺樹脂層疊體與其製造方法以及帶有功能層的聚醯亞胺膜Polyimide resin laminate, its manufacturing method, and polyimide film with functional layer

本發明是有關於一種在聚醯亞胺基板上形成有液晶顯示裝置、有機電致發光(Electroluminescence,EL)顯示器、有機EL照明、電子紙、觸控面板(touch panel)、彩色濾光片(color filter)等功能層的聚醯亞胺樹脂層疊體及其製造方法。The present invention relates to a liquid crystal display device, organic electroluminescence (EL) display, organic EL lighting, electronic paper, touch panel, and color filter formed on a polyimide substrate ( Color filter) and other functional layers of polyimide resin laminate and its manufacturing method.

液晶顯示裝置或有機EL顯示裝置等顯示裝置被廣泛地用於電視那樣的大型顯示器至手機、個人電腦(personal computer)、智慧手機(smart phone)等的小型顯示器。例如有機EL顯示裝置是在玻璃基板上形成薄膜電晶體(Thin Film Transistor,TFT),依序形成電極、發光層、電極等,最後另外用玻璃基板或多層薄膜等進行氣密密封而製作。Display devices such as liquid crystal display devices and organic EL display devices are widely used from large displays such as televisions to small displays such as mobile phones, personal computers, and smart phones. For example, an organic EL display device is manufactured by forming a thin film transistor (TFT) on a glass substrate, sequentially forming electrodes, light-emitting layers, electrodes, etc., and finally using a glass substrate or a multilayer film for airtight sealing.

這裡,顯示裝置的種類並無特別限制,也包含以液晶顯示裝置、有機EL顯示裝置、電子紙為代表的顯示裝置及彩色濾光片等顯示裝置的構成零件。另外,也包含隨附於所述顯示裝置而使用的各種功能裝置,其中包括有機EL照明裝置、觸控面板裝置、層疊有氧化銦錫(Indium Tin Oxide,ITO)等的導電性膜、防止水分或氧等的滲透的阻氣膜、柔性電路基板的構成零件等。即,本發明中所謂柔性元件,不僅包含液晶顯示裝置、有機EL顯示裝置及彩色濾光片等構成零件,而且也包含有機EL照明裝置、觸控面板裝置、有機EL顯示裝置的電極層或發光層、阻氣膜、黏合膜、薄膜電晶體(TFT)、液晶顯示裝置的佈線層或透明導電層等的一種或兩種以上的組合。Here, the type of the display device is not particularly limited, and includes display devices represented by liquid crystal display devices, organic EL display devices, electronic paper, and display device components such as color filters. In addition, it also includes various functional devices used with the display device, including organic EL lighting devices, touch panel devices, conductive films laminated with indium tin oxide (ITO), etc., to prevent moisture Or a gas barrier film that permeates oxygen, etc., a component part of a flexible circuit board, etc. That is, the so-called flexible element in the present invention includes not only constituent parts such as liquid crystal display devices, organic EL display devices, and color filters, but also organic EL lighting devices, touch panel devices, and electrode layers or light-emitting devices of organic EL display devices. One or a combination of two or more of layers, gas barrier films, adhesive films, thin film transistors (TFT), wiring layers of liquid crystal display devices, or transparent conductive layers.

通過將玻璃基板替換成樹脂基材,可實現薄型化、輕量化、柔性化,從而可進一步擴大顯示裝置的用途。但是,與玻璃相比,樹脂有尺寸穩定性、透明性、耐熱性、耐濕性、阻氣性等差等問題。By replacing the glass substrate with a resin base material, thickness reduction, weight reduction, and flexibility can be achieved, and the use of the display device can be further expanded. However, compared with glass, resin has problems such as poor dimensional stability, transparency, heat resistance, moisture resistance, and gas barrier properties.

例如,專利文獻1是有關於一種與作為柔性顯示器用塑膠基板而有用的聚醯亞胺及其前驅物有關的發明,已公開:使用環己基苯基四甲酸等那樣的含有脂環式結構的四羧酸類與各種二胺反應而成的聚醯亞胺的透明性優異。除此以外,也嘗試了使用柔性的樹脂基材代替玻璃基板來實現輕量化,例如非專利文獻1及非專利文獻2中提出了利用透明性高的聚醯亞胺的有機EL顯示裝置。For example, Patent Document 1 relates to an invention related to polyimide and its precursors useful as plastic substrates for flexible displays. It has been disclosed: the use of cyclohexyl phenyl tetracarboxylic acid, etc., containing an alicyclic structure Polyimides formed by reacting tetracarboxylic acids with various diamines are excellent in transparency. In addition, attempts have also been made to use flexible resin substrates instead of glass substrates to achieve weight reduction. For example, Non-Patent Document 1 and Non-Patent Document 2 propose organic EL display devices using highly transparent polyimide.

像這樣,已知聚醯亞胺等的樹脂膜作為柔性顯示器用的支持基材而有用,但顯示裝置的製造步驟已使用玻璃基板而進行,其生產設備大半是以使用玻璃基板為前提而設計。因此,理想的是可有效運用現有的生產設備並且生產顯示裝置。In this way, it is known that resin films such as polyimide are useful as supporting substrates for flexible displays, but the manufacturing steps of display devices have been performed using glass substrates, and most of the production equipment is designed on the premise of using glass substrates. . Therefore, it is ideal to effectively use existing production equipment and produce display devices.

作為其研究例之一,有以下方法:以在玻璃基板上層疊有樹脂的狀態完成既定的顯示裝置的製造步驟,然後去掉玻璃基板,由此製造在樹脂基材上具備顯示部的顯示裝置(參照專利文獻2~專利文獻3、非專利文獻3~非專利文獻4)。這種方法的情況下,重要的是不對形成在樹脂基材上的顯示部造成損傷而將樹脂基材與玻璃分離。As one of its research examples, there is the following method: a predetermined manufacturing process of a display device is completed in a state where a resin is laminated on a glass substrate, and then the glass substrate is removed, thereby manufacturing a display device having a display portion on a resin substrate ( Refer to Patent Document 2 to Patent Document 3, and Non-Patent Document 3 to Non-Patent Document 4). In the case of this method, it is important to separate the resin substrate from the glass without causing damage to the display portion formed on the resin substrate.

即,專利文獻3或非專利文獻3中,對塗布在玻璃基板上並經固著的樹脂基材形成既定的顯示部後,通過被稱為塑膠電子雷射釋放(Electronics on Plastic by Laser Release,EPLaR)製程的方法從玻璃側照射雷射,將具備顯示部的樹脂基材從玻璃基板強制分離。另外,專利文獻2或非專利文獻4中,在玻璃基板上形成剝離層後,塗布比剝離層大一圈的聚醯亞胺樹脂而形成聚醯亞胺層,刻入到達剝離層的切斷線,將小一圈的聚醯亞胺膜從剝離層剝離。That is, in Patent Document 3 or Non-Patent Document 3, after a predetermined display portion is formed on a resin substrate coated on a glass substrate and fixed, it is called a plastic electronic laser release (Electronics on Plastic by Laser Release, The EPLaR process method irradiates a laser from the glass side to forcibly separate the resin substrate with the display part from the glass substrate. In addition, in Patent Document 2 or Non-Patent Document 4, after a release layer is formed on a glass substrate, a polyimide resin that is slightly larger than the release layer is applied to form a polyimide layer, and the cut that reaches the release layer is engraved. Thread, peel a small circle of polyimide film from the peeling layer.

另一方面,在使樹脂層疊在玻璃基板上的情況下,翹曲成為大問題。即,玻璃基板的熱膨脹係數為幾ppm/K,相對於此,通常樹脂具有幾十ppm/K以上的熱膨脹係數,因此例如若將樹脂溶液塗布在玻璃基板上,通過加熱處理等使其硬化而形成樹脂層,並放置冷卻至室溫,則會產生翹曲。若無法抑制這種翹曲,則會對隨後的顯示部的形成等造成不良影響。On the other hand, when resin is laminated on a glass substrate, warpage becomes a big problem. That is, the coefficient of thermal expansion of the glass substrate is several ppm/K. In contrast, the resin generally has a coefficient of thermal expansion of several tens of ppm/K or more. Therefore, for example, if a resin solution is applied to a glass substrate and cured by heat treatment, etc. Form a resin layer and leave it to cool to room temperature, it will warp. If such warpage cannot be suppressed, it will adversely affect the formation of the subsequent display portion, etc.

在使用聚醯亞胺層疊體的步驟中,柔性顯示器TFT基板步驟通常使用In-Ga-Zn-O半導體(銦鎵鋅氧化物(Indium Gallium Zinc Oxide,IGZO))或低溫多晶矽(Low Temperature Poly-silicon,LTPS)工法,受到350℃以上的熱。此時,玻璃基板的熱膨脹係數為幾ppm/K,相對於此,通常樹脂具有幾十ppm/K以上的熱膨脹係數,因此可能層疊體產生翹曲,無法實現顯示部的微細化。In the step of using the polyimide laminate, the flexible display TFT substrate step usually uses In-Ga-Zn-O semiconductor (Indium Gallium Zinc Oxide (IGZO)) or low temperature polysilicon (Low Temperature Poly-Si). silicon, LTPS) construction method, subject to heat above 350°C. At this time, the thermal expansion coefficient of the glass substrate is several ppm/K. In contrast, the resin generally has a thermal expansion coefficient of several tens of ppm/K or more. Therefore, the laminate may be warped and the display portion may not be miniaturized.

關於此方面,專利文獻3中公開了在支持基板與樹脂膜(a)之間設置熱膨脹係數在支持基板與樹脂膜(a)之間那樣的樹脂層(b),但翹曲的抑制效果不充分。In this regard, Patent Document 3 discloses that a resin layer (b) having a thermal expansion coefficient between the support substrate and the resin film (a) is provided between the support substrate and the resin film (a), but the effect of suppressing warpage is not full.

此外,在以卷對卷(Roll to Roll;以下也稱為「RTR」)方式製造顯示器或觸控面板等的情況下,成為支援基材的膜在製程中可耐受超過300℃的高溫處理,因此必須為耐熱性優異的材料。另外,若考慮到光透過率則優選薄膜。但是,薄膜的操作困難,製造也困難,現狀下透明膜是使用50 μm以上的厚度。In addition, when a roll to roll (Roll to Roll; also referred to as “RTR” hereinafter) method is used to manufacture displays, touch panels, etc., the film that becomes the supporting substrate can withstand high temperature processing exceeding 300°C during the manufacturing process. , So it must be a material with excellent heat resistance. In addition, in consideration of light transmittance, a thin film is preferable. However, the handling of the film is difficult, and the production is also difficult. Currently, a transparent film with a thickness of 50 μm or more is used.

另外,作為兼具操作或製造的容易性與薄度的方法,提出了帶有載體的透明膜。該帶有載體的層疊膜是不使用黏合劑將載體膜與透明基材膜層疊而成,在透明基材上形成薄膜電晶體等功能層後,進而與前面板貼合,然後將載體膜剝離,由此可兼具製造步驟中的操作性、與作為顯示器或觸控面板中的透明支持基材的薄度。In addition, as a method that combines ease of handling or manufacturing with thinness, a transparent film with a carrier has been proposed. The laminated film with a carrier is formed by laminating a carrier film and a transparent substrate film without using an adhesive. After a functional layer such as a thin film transistor is formed on the transparent substrate, it is then laminated to the front panel, and then the carrier film is peeled off Therefore, it is possible to combine the operability in the manufacturing process and the thinness as a transparent support substrate in a display or a touch panel.

然而,以前的帶有載體的層疊膜容易產生翹曲(卷曲),製造步驟中的操作性非常差。However, the conventional laminated film with a carrier tends to warp (curl), and the operability in the manufacturing step is very poor.

專利文獻4中公開了為了抑制翹曲的產生而對玻璃基板等支持體設置熱膨脹係數較其小的第一聚醯亞胺層,於其上設置熱膨脹係數大於支持體的第二聚醯亞胺層,但並未公開與並非玻璃基板的包含耐熱性樹脂的支持體有關的研究。 [現有技術文獻]Patent Document 4 discloses that in order to suppress the occurrence of warpage, a first polyimide layer having a smaller thermal expansion coefficient is provided on a support such as a glass substrate, and a second polyimide layer having a larger thermal expansion coefficient than the support is provided on the support. However, it does not disclose research related to a support containing a heat-resistant resin that is not a glass substrate. [Prior Art Literature]

[專利文獻] [專利文獻1]日本專利特開2008-231327號公報 [專利文獻2]日本專利4834758號公報 [專利文獻3]日本專利5408848號公報 [專利文獻4]日本專利特開2015-182393號公報[Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. 2008-231327 [Patent Document 2] Japanese Patent No. 4834758 [Patent Document 3] Japanese Patent No. 5408848 [Patent Document 4] Japanese Patent Laid-Open 2015-182393 Bulletin

[非專利文獻] [非專利文獻1]S.安(S. An)等人,《塑膠基板上的使用高效能低溫多晶矽薄膜電晶體的2.8英寸WQVGA柔性AMOLED(2.8-inch WQVGA Flexible AMOLED Using High Performance Low Temperature Polysilicon TFT on Plastic Substrates)》,資訊顯示協會2010摘要(SID2010 DIGEST),p706(2010) [非專利文獻2]大石(Oishi)等人,《用於柔性顯示器的透明PI(Transparent PI for flexible display)》,國際顯示研習會(International DisplayWorkshops,IDW)'11 FLX2/FMC4-1 [非專利文獻3]E.I.哈斯卡(E.I. Haskal)等人,《使用EPLaR製程製造的柔性OLED顯示器(Flexible OLED Displays Made with the EPLaR Process)》,歐洲顯示文獻(Proc. Eurodisplay)'07,pp.36~39(2007) [非專利文獻4]李正中(Cheng-Chung Lee)等人,《製造柔性主動矩陣顯示器的新方法(A Novel Approach to Make Flexible Active Matrix Displays)》,資訊顯示協會10摘要(SID10 Digest),pp.810~813(2010)[Non-Patent Document] [Non-Patent Document 1] S. An et al., "2.8-inch WQVGA Flexible AMOLED (2.8-inch WQVGA Flexible AMOLED) Using High-performance Low-Temperature Polycrystalline Silicon Thin Film Transistors on Plastic Substrates Performance Low Temperature Polysilicon TFT on Plastic Substrates", Information Display Association 2010 Abstract (SID2010 DIGEST), p706 (2010) [Non-Patent Document 2] Oishi et al., "Transparent PI for Flexible Display flexible display", International Display Workshops (IDW)'11 FLX2/FMC4-1 [Non-Patent Document 3] EI Haskal and others, "Flexible OLED displays manufactured using EPLaR process OLED Displays Made with the EPLaR Process", Proc. Eurodisplay'07, pp.36~39 (2007) [Non-Patent Document 4] Cheng-Chung Lee et al., "Manufacturing Flexible Initiative A Novel Approach to Make Flexible Active Matrix Displays", SID10 Digest, pp.810~813 (2010)

[發明所要解決的問題] 因此,本發明之目的在於提供一種聚醯亞胺樹脂層疊體及其製造方法,所述聚醯亞胺樹脂層疊體為在顯示器或觸控面板中被用作代替玻璃的基板的帶有載體的聚醯亞胺樹脂層疊體,並且即便在使用可應用在RTR製程中的耐熱性樹脂作為載體材料的情況下,也可維持製造步驟中的操作性與作為顯示器或觸控面板中的支持基材的薄度,且儘量抑制翹曲(卷曲),並且可容易且簡便地將支持基材從載體材料分離。 [解決問題的技術手段][Problems to be Solved by the Invention] Therefore, the object of the present invention is to provide a polyimide resin laminate and a method of manufacturing the same, which is used as a substitute for glass in displays or touch panels. The polyimide resin laminate with a carrier of the substrate, and even when the heat-resistant resin that can be applied in the RTR process is used as the carrier material, it can maintain the operability in the manufacturing process and the display or touch Control the thickness of the support substrate in the panel, and minimize warpage (curl), and the support substrate can be easily and simply separated from the carrier material. [Technical means to solve the problem]

因此,本發明者等人為了解決這些問題而努力研究,結果令人驚訝地發現,通過在既定的包含聚醯亞胺樹脂的基材層的一面側層疊既定的包含聚醯亞胺樹脂的卷曲抑制層及既定的包含聚醯亞胺樹脂的載體層,可維持操作性或作為基材的薄度,並且改善翹曲(卷曲),從而完成本發明。Therefore, the inventors of the present invention made diligent studies to solve these problems. As a result, it was surprisingly discovered that a predetermined polyimide resin-containing crimp was laminated on one side of a predetermined polyimide resin-containing substrate layer. The suppression layer and the predetermined carrier layer containing the polyimide resin can maintain the workability or the thinness of the substrate, and improve the warpage (curling), thereby completing the present invention.

即,本發明是一種聚醯亞胺樹脂層疊體,其為包含聚醯亞胺樹脂的卷曲抑制層、包含聚醯亞胺樹脂的載體層及包含聚醯亞胺樹脂的基材層的層疊體,並且其特徵在於:在該基材層的一面側以可剝離的方式黏合有卷曲抑制層及載體層,與該基材層接觸的層的熱膨脹係數(Coefficient of thermal expansion,CTE)小於或大於其他層的CTE的任一個。That is, the present invention is a polyimide resin laminate, which is a laminate of a curl suppression layer containing a polyimide resin, a carrier layer containing a polyimide resin, and a base layer containing a polyimide resin And it is characterized in that: a curl-inhibiting layer and a carrier layer are adhered in a peelable manner on one side of the substrate layer, and the coefficient of thermal expansion (CTE) of the layer in contact with the substrate layer is less than or greater than Any of the CTEs of other layers.

本發明的聚醯亞胺樹脂層疊體優選的是在包含聚醯亞胺樹脂的載體層的一面側具有包含聚醯亞胺樹脂的卷曲抑制層,進而具有以可剝離的方式黏合於該卷曲抑制層的包含聚醯亞胺樹脂的基材層,卷曲抑制層的熱膨脹係數(CTE)小於或大於支持層及基材層的熱膨脹係數(CTE)的任一個;或者,在包含聚醯亞胺樹脂的載體層的一面側具有以可剝離的方式黏合的包含聚醯亞胺樹脂的基材層,在所述載體層的相反面側具有包含聚醯亞胺樹脂的卷曲抑制層,載體層的熱膨脹係數(CTE)小於或大於基材層及卷曲抑制層的熱膨脹係數(CTE)的任一個。The polyimide resin laminate of the present invention preferably has a curl suppressing layer including a polyimide resin on one side of a carrier layer including a polyimide resin, and further has a curl suppressing layer adhered to the curl suppressing layer in a peelable manner. The base material layer containing polyimide resin of the layer, the coefficient of thermal expansion (CTE) of the curl-inhibiting layer is less than or greater than any one of the coefficient of thermal expansion (CTE) of the support layer and the base material layer; or, when the polyimide resin is contained One side of the carrier layer has a substrate layer containing polyimide resin bonded in a peelable manner, and the opposite side of the carrier layer has a curl suppression layer containing polyimide resin, and the thermal expansion of the carrier layer The coefficient (CTE) is less than or greater than any one of the coefficient of thermal expansion (CTE) of the base layer and the curl suppression layer.

本發明的聚醯亞胺樹脂層疊體優選的是基材層與載體層的熱膨脹係數(CTE)差、或基材層與卷曲抑制層的熱膨脹係數(CTE)差為±40ppm/K以下。The polyimide resin laminate of the present invention preferably has a difference in coefficient of thermal expansion (CTE) between the base layer and the carrier layer, or a difference in coefficient of thermal expansion (CTE) between the base layer and the curl suppression layer of ±40 ppm/K or less.

本發明的聚醯亞胺樹脂層疊體可優選地用作在載體層的一面側隔著卷曲抑制層及基材層進而形成功能層而成的聚醯亞胺樹脂層疊體、或在載體層的一面側隔著基材層進而形成功能層而成的帶有功能層的聚醯亞胺樹脂層疊體。The polyimide resin laminate of the present invention can be preferably used as a polyimide resin laminate in which a curl suppression layer and a substrate layer are formed on one side of a carrier layer to form a functional layer, or as a polyimide resin laminate in a carrier layer. A functional layer-equipped polyimide resin laminate in which a functional layer is further formed on one side with a base layer interposed therebetween.

另外,本發明的聚醯亞胺樹脂層疊體優選的是基材層的全光線透過率為80%以上,且厚度為50 μm以下,並且優選的是形成基材層的聚醯亞胺樹脂的Tg為300℃以上。In addition, the polyimide resin laminate of the present invention preferably has a base layer with a total light transmittance of 80% or more and a thickness of 50 μm or less, and is preferably made of polyimide resin forming the base layer. Tg is 300°C or higher.

本發明的其他實施方式為一種帶有功能層的聚醯亞胺膜,其是使用所述帶有功能層的聚醯亞胺樹脂層疊體,在卷曲抑制層與基材層的界面、或載體層與基材層的界面處進行剝離,將載體層及卷曲抑制層除去而成。Another embodiment of the present invention is a polyimide film with a functional layer, which uses the polyimide resin laminate with a functional layer, at the interface between the curl suppression layer and the substrate layer, or the carrier The interface between the layer and the base layer is peeled off, and the carrier layer and the curl suppression layer are removed.

另外,本發明是一種聚醯亞胺樹脂層疊體的製造方法,其為製造所述聚醯亞胺樹脂層疊體的方法,並且其特徵在於利用澆注法在載體層上形成卷曲抑制層及基材層。In addition, the present invention is a method of manufacturing a polyimide resin laminate, which is a method of manufacturing the polyimide resin laminate, and is characterized by forming a curl suppression layer and a base material on a carrier layer by a casting method Floor.

該製造方法優選的是使塗敷在載體層上的卷曲抑制層及基材層一體硬化,並且優選的是澆注法為利用多層模頭或連續模頭的塗敷。 [發明的效果]In this manufacturing method, it is preferable to integrally harden the curl suppression layer and the base material layer coated on the carrier layer, and it is preferable that the casting method is coating using a multilayer die or a continuous die. [Effects of the invention]

根據本發明,可維持製造步驟中的操作性與作為顯示器或觸控面板中的支持基材的薄度,並且盡力抑制翹曲(卷曲),可滿足顯示器或觸控面板用途中的聚醯亞胺樹脂層疊體的要求特性。According to the present invention, it is possible to maintain the operability in the manufacturing process and the thinness as a supporting substrate in a display or touch panel, and to suppress warpage (curling) as much as possible, which can meet the requirements of polyamide in the use of a display or touch panel. Required characteristics of amine resin laminates.

首先,本發明的聚醯亞胺樹脂層疊體具備包含聚醯亞胺樹脂的載體層。載體層在RTR製程中將薄膜的基材層維持於既定形狀,並且是在隔著基材層而形成ITO膜等功能層後,從基材層剝離除去。因此,為了適應RTR製程,要求柔性、及增強基材層而維持強度,但未必需要透明性。因此,載體層的厚度大於薄膜的基材層,優選10 μm~100 μm,更優選30 μm~75 μm。另外,由於要求可應用於RTR的高溫製程的耐熱性,因此玻璃轉移溫度(Tg)優選300℃以上,更優選300℃~450℃。First, the polyimide resin laminate of the present invention includes a carrier layer containing a polyimide resin. The carrier layer maintains the base layer of the film in a predetermined shape during the RTR process, and after forming a functional layer such as an ITO film via the base layer, it is peeled and removed from the base layer. Therefore, in order to adapt to the RTR process, flexibility and strengthening of the substrate layer are required to maintain strength, but transparency is not necessarily required. Therefore, the thickness of the carrier layer is larger than the base layer of the film, preferably 10 μm to 100 μm, more preferably 30 μm to 75 μm. In addition, the glass transition temperature (Tg) is preferably 300°C or higher, more preferably 300°C to 450°C, due to the requirement of heat resistance applicable to the high temperature process of RTR.

本發明的聚醯亞胺樹脂層疊體為包含聚醯亞胺樹脂的卷曲抑制層(以下也簡稱為「卷曲抑制層」)、包含聚醯亞胺樹脂的載體層(以下也簡稱為「載體層」)、及包含聚醯亞胺樹脂的基材層(以下也簡稱為「基材層」)的層疊體,並且其特徵在於:在基材層的一面側以可剝離的方式黏合有卷曲抑制層及載體層的層疊體。進而,所述聚醯亞胺樹脂層疊體的特徵在於:與基材層接觸的層的熱膨脹係數(CTE)小於或大於其他層的CTE的任一個。The polyimide resin laminate of the present invention is a curl suppression layer containing polyimide resin (hereinafter also referred to as "crimp suppression layer"), and a carrier layer containing polyimide resin (hereinafter also referred to as "carrier layer"). "), and a laminate of a polyimide resin-containing base layer (hereinafter also referred to as "base layer"), and is characterized in that curl suppression is adhered to one side of the base layer in a peelable manner Layer and carrier layer laminate. Furthermore, the polyimide resin laminate is characterized in that the coefficient of thermal expansion (CTE) of the layer in contact with the base layer is less than or greater than any of the CTEs of the other layers.

此處,所謂與基材層接觸的層,是指卷曲抑制層或載體層的任一個等兩種態樣。所謂其他層,在與基材層接觸的層為卷曲抑制層的情況下,是指基材層及載體層,在與基材層接觸的層為載體層的情況下,是指基材層及卷曲抑制層。Here, the layer that is in contact with the base layer refers to either the curl suppression layer or the carrier layer. The other layer refers to the substrate layer and the carrier layer when the layer in contact with the substrate layer is the curl suppression layer, and the substrate layer and the carrier layer when the layer in contact with the substrate layer is the carrier layer. Curl suppression layer.

此外,所述聚醯亞胺樹脂層疊體的形態有兩種(形態一及形態二)。以下,對各形態進行具體說明。In addition, there are two forms of the polyimide resin laminate (form one and form two). Hereinafter, each form will be described in detail.

[形態一] 形態一的聚醯亞胺樹脂層疊體在載體層的一面側具有卷曲抑制層,進而具有以可剝離的方式黏合於該卷曲抑制層的基材層,卷曲抑制層的CTE小於或大於載體層及基材層的CTE的任一個。[Form 1] The polyimide resin laminate of form 1 has a curl suppressing layer on one side of the carrier layer, and further has a base layer that is peelably bonded to the curl suppressing layer, and the CTE of the curl suppressing layer is less than or It is greater than any of the CTE of the carrier layer and the substrate layer.

另外,從抑制翹曲的觀點來看,載體層的CTE以近似於基材層的CTE為宜,兩者的熱膨脹係數差(也稱為ΔCTE、「CTE差」)優選±15 ppm/K以內,更優選的是與載體層的CTE相比而基材層的CTE差+15 ppm/K以內,即CTE差為0 ppm/K~+15 ppm/K。此外,例如載體層的CTE優選10 ppm/K~85 ppm/K。這裡所謂CTE差為「±15 ppm/K以內」,是指與載體層的CTE相比而基材層的CTE差-15 ppm/K~+15 ppm/K。In addition, from the viewpoint of suppressing warpage, the CTE of the carrier layer is preferably close to the CTE of the substrate layer, and the difference in thermal expansion coefficient between the two (also called ΔCTE, "CTE difference") is preferably within ±15 ppm/K It is more preferable that the CTE difference of the substrate layer is within +15 ppm/K compared with the CTE of the carrier layer, that is, the CTE difference is 0 ppm/K to +15 ppm/K. In addition, for example, the CTE of the carrier layer is preferably 10 ppm/K to 85 ppm/K. The CTE difference here is "within ±15 ppm/K", which means that the CTE difference of the substrate layer is -15 ppm/K to +15 ppm/K compared with the CTE of the carrier layer.

在載體層的一面側隔著後述卷曲抑制層而具有基材層。基材層成為代替玻璃的透明基材,且是在其上形成ITO膜等功能層並完成RTR製程後,將載體層剝離除去後支援功能層。因此,基材層的全光線透過率優選80%以上,更優選90%以上。從薄型化、輕量化、柔性化的要求特性來看,基材層的厚度以儘量薄為宜,優選50 μm以下,更優選5 μm~25 μm。像上文所述那樣,基材層的CTE以與載體層的CTE近似為宜,優選10 ppm/K~80 ppm/K。另外,由於要求可應用於RTR的高溫製程的耐熱性,因此基材層的玻璃轉移溫度(Tg)優選300℃以上,更優選300℃~450℃。由於用作代替玻璃的樹脂基材,因此基材層的彈性模數例如以2 GPa~15 GPa為宜。A substrate layer is provided on one side of the carrier layer via a curl suppression layer described later. The substrate layer becomes a transparent substrate instead of glass, and after forming a functional layer such as an ITO film on it and completing the RTR process, the carrier layer is peeled and removed to support the functional layer. Therefore, the total light transmittance of the substrate layer is preferably 80% or more, and more preferably 90% or more. In view of the required characteristics of thinning, weight reduction, and flexibility, the thickness of the substrate layer is preferably as thin as possible, preferably 50 μm or less, and more preferably 5 μm to 25 μm. As described above, the CTE of the substrate layer is preferably similar to the CTE of the carrier layer, preferably 10 ppm/K to 80 ppm/K. In addition, since heat resistance that can be applied to the high-temperature process of RTR is required, the glass transition temperature (Tg) of the substrate layer is preferably 300°C or higher, and more preferably 300°C to 450°C. Since it is used as a resin substrate instead of glass, the elastic modulus of the substrate layer is preferably 2 GPa to 15 GPa, for example.

在載體層的一面側,在載體層與基材層之間具有包含聚醯亞胺樹脂的卷曲抑制層。從適應RTR製程的觀點來看,卷曲抑制層是為了盡力抑制帶有載體的基材層的翹曲而形成在載體層與基材層之間,在載體層及卷曲抑制層上隔著基材層而形成ITO膜等功能層並完成RTR製程後,在將載體層剝離除去時,與載體層一起被除去。因此,為了在RTR製程中盡力抑制翹曲(卷曲)而選擇厚度或熱膨脹係數。因此,卷曲抑制層的厚度優選50 μm以下,更優選5 μm~30 μm。另外,由於要求可應用於RTR的高溫製程的耐熱性,因此玻璃轉移溫度(Tg)優選300℃以上,更優選300℃~450℃。On one side of the carrier layer, there is a curl suppression layer containing a polyimide resin between the carrier layer and the base layer. From the viewpoint of adapting to the RTR process, the curl suppression layer is formed between the carrier layer and the substrate layer in order to suppress the warpage of the substrate layer with the carrier as much as possible, and the substrate is interposed between the carrier layer and the curl suppression layer. After forming functional layers such as ITO film and completing the RTR process, when the carrier layer is peeled off and removed, it is removed together with the carrier layer. Therefore, in order to try to suppress warpage (curling) in the RTR process, the thickness or thermal expansion coefficient is selected. Therefore, the thickness of the curl suppression layer is preferably 50 μm or less, and more preferably 5 μm to 30 μm. In addition, the glass transition temperature (Tg) is preferably 300°C or higher, more preferably 300°C to 450°C, due to the requirement of heat resistance applicable to the high temperature process of RTR.

卷曲抑制層的CTE是以與載體層及基材層的CTE差相對較大的方式選定。例如載體層及基材層的CTE也可未必相同,但以卷曲抑制層的CTE相對於載體層及基材層兩者的CTE而具有一定以上的差的方式選定為宜。The CTE of the curl suppression layer is selected in such a way that the difference between the CTE of the carrier layer and the substrate layer is relatively large. For example, the CTE of the carrier layer and the base material layer may not necessarily be the same, but it is preferable to select such that the CTE of the curl suppression layer has a difference of a certain level or more relative to the CTE of both the carrier layer and the base material layer.

因此,關於卷曲抑制層的CTE,與載體層的CTE差及與基材層的CTE差優選±15 ppm/K以上,更優選-15 ppm/K~-60 ppm/K的範圍的CTE差。此外,卷曲抑制層的CTE優選-10 ppm/K~20 ppm/K。這裡,所謂CTE差為「±15 ppm/K以上」,是指與載體層的CTE及基材層的CTE相比而卷曲抑制層的CTE差大於-15 ppm/K,或差大於+15 ppm/K。Therefore, regarding the CTE of the curl suppression layer, the CTE difference from the carrier layer and the CTE difference from the substrate layer are preferably ±15 ppm/K or more, and more preferably a CTE difference in the range of -15 ppm/K to -60 ppm/K. In addition, the CTE of the curl suppression layer is preferably -10 ppm/K to 20 ppm/K. Here, the so-called CTE difference of "±15 ppm/K or more" means that the CTE difference of the curl suppression layer is greater than -15 ppm/K or the difference is greater than +15 ppm compared with the CTE of the carrier layer and the CTE of the substrate layer. /K.

對於由載體層及基材層所形成的帶有載體的基材來說,即便在通過使卷曲抑制層存在於載體層及基材層之間,而特別製成相當於所謂玻璃基板的第四代(680 mm×880 mm~730 mm×920 mm)以後的相對較大的層疊體的情況下,也可充分獲得翹曲的抑制效果。此外,可通過存在卷曲抑制層而提高基材層的設計自由度。進而,附著於載體層的異物不易混入到基材層中。另外,載體層的表面狀態不易影響基材層,因此可選擇價廉的聚醯亞胺膜等,可提高載體層的設計自由度。For a substrate with a carrier formed of a carrier layer and a substrate layer, even when the curl suppression layer is present between the carrier layer and the substrate layer, it is particularly made into a fourth glass substrate equivalent to the so-called glass substrate. In the case of relatively large laminates after the generation (680 mm×880 mm to 730 mm×920 mm), the effect of suppressing warpage can be sufficiently obtained. In addition, the presence of the curl suppression layer can increase the degree of freedom in design of the base material layer. Furthermore, the foreign matter adhering to the carrier layer is not easily mixed into the base material layer. In addition, the surface condition of the carrier layer is unlikely to affect the substrate layer, so a cheap polyimide film or the like can be selected, which can increase the design freedom of the carrier layer.

[形態二] 形態二的聚醯亞胺樹脂層疊體在載體層的一面側具有以可剝離的方式黏合的基材層,進而在該載體層的相反面側具有卷曲抑制層,該載體層的CTE小於或大於該基材層及該卷曲抑制層的CTE的任一個。[Form 2] The polyimide resin laminate of form 2 has a base layer that is peelably bonded on one side of the carrier layer, and further has a curl suppression layer on the opposite side of the carrier layer. The CTE is less than or greater than any one of the CTE of the substrate layer and the curl suppression layer.

即,載體層位於基材層與卷曲抑制層之間。若為該構成,則從抑制翹曲的觀點來看優選。此外,例如載體層的CTE優選10 ppm/K~70 ppm/K。That is, the carrier layer is located between the base layer and the curl suppression layer. With this structure, it is preferable from the viewpoint of suppressing warpage. In addition, for example, the CTE of the carrier layer is preferably 10 ppm/K to 70 ppm/K.

基材層成為代替玻璃的透明基材,且是在其上形成ITO膜等功能層並完成RTR製程後,將載體層剝離除去後支援功能層的透明基材。因此,基材層的全光線透過率優選80%以上,更優選90%以上。從薄型化、輕量化、柔性化的要求特性來看,基材層的厚度在不損及加工性的範圍內越薄越好,優選50 μm以下,更優選5 μm~25 μm。基材層的CTE優選1 ppm/K~80 ppm/K。The substrate layer becomes a transparent substrate instead of glass, and is a transparent substrate that supports the functional layer after the carrier layer is peeled off and removed after a functional layer such as an ITO film is formed on it and the RTR process is completed. Therefore, the total light transmittance of the substrate layer is preferably 80% or more, and more preferably 90% or more. In view of the required characteristics of thinning, weight reduction, and flexibility, the thickness of the substrate layer is as thin as possible within a range that does not impair processability, and is preferably 50 μm or less, and more preferably 5 μm to 25 μm. The CTE of the substrate layer is preferably 1 ppm/K to 80 ppm/K.

另外,由於要求可應用於RTR的高溫製程的耐熱性,因此玻璃轉移溫度(Tg)優選300℃以上,更優選300℃~450℃。由於用作代替玻璃的樹脂基材,因此基材層的彈性模數例如以2 GPa~15 GPa為宜。In addition, the glass transition temperature (Tg) is preferably 300°C or higher, more preferably 300°C to 450°C, due to the requirement of heat resistance applicable to the high temperature process of RTR. Since it is used as a resin substrate instead of glass, the elastic modulus of the substrate layer is preferably 2 GPa to 15 GPa, for example.

在載體層的相反面側具有包含聚醯亞胺樹脂的卷曲抑制層。從適應RTR製程的觀點來看,卷曲抑制層是為了盡力抑制帶有載體的基材層的翹曲而形成在與基材層相反的一側,在載體層上隔著基材層形成ITO膜等功能層並完成RTR製程後,在將載體層剝離除去時,與載體層一起被除去。因此,為了在RTR製程中盡力抑制翹曲(卷曲)而選擇厚度或熱膨脹係數。因此,卷曲抑制層的厚度優選50 μm以下,更優選6 μm~30 μm。另外,由於要求可應用於RTR的高溫製程的耐熱性,因此玻璃轉移溫度(Tg)優選300℃以上,更優選300℃~450℃。On the opposite side of the carrier layer, there is a curl suppressing layer containing a polyimide resin. From the viewpoint of adapting to the RTR process, the curl suppression layer is formed on the opposite side of the substrate layer in order to suppress the warpage of the substrate layer with the carrier, and the ITO film is formed on the carrier layer through the substrate layer. After waiting for the functional layer and completing the RTR process, when the carrier layer is peeled off and removed, it is removed together with the carrier layer. Therefore, in order to try to suppress warpage (curling) in the RTR process, the thickness or thermal expansion coefficient is selected. Therefore, the thickness of the curl suppression layer is preferably 50 μm or less, and more preferably 6 μm to 30 μm. In addition, the glass transition temperature (Tg) is preferably 300°C or higher, more preferably 300°C to 450°C, due to the requirement of heat resistance applicable to the high temperature process of RTR.

卷曲抑制層的CTE以與基材層的CTE近似為宜,且以消除載體層與基材層的CTE差的方式選定為宜。因此,與基材層的CTE差為±40 ppm/K以內,優選±15 ppm/K以內。例如卷曲抑制層的CTE優選1 ppm/K~90 ppm/K。The CTE of the curl suppression layer is preferably similar to the CTE of the substrate layer, and it is preferably selected in a manner that eliminates the difference in CTE between the carrier layer and the substrate layer. Therefore, the difference in CTE from the substrate layer is within ±40 ppm/K, preferably within ±15 ppm/K. For example, the CTE of the curl suppression layer is preferably 1 ppm/K to 90 ppm/K.

對於由載體層及基材層所形成的帶有載體的基材來說,即便在通過使卷曲抑制層存在於與基材相反的一側,而特別製成相當於所謂玻璃基板的第四代(680 mm×880 mm~730 mm×920 mm)以後的相對較大的層疊體的情況下,也可充分獲得翹曲的抑制效果。此外,可通過存在卷曲抑制層而提高基材層的設計自由度。For a substrate with a carrier formed of a carrier layer and a substrate layer, even when the curl suppression layer is present on the side opposite to the substrate, the fourth generation equivalent to the so-called glass substrate is specially made In the case of relatively large laminates (680 mm×880 mm to 730 mm×920 mm) and later, the effect of suppressing warpage can be sufficiently obtained. In addition, the presence of the curl suppression layer can increase the degree of freedom in design of the base material layer.

以下,對形態1及形態2中共同的內容進行具體說明。Hereinafter, the common content in the form 1 and form 2 will be described in detail.

用作卷曲抑制層的聚醯亞胺樹脂只要滿足所述特性,則並無特別限制,例如可舉出藉由具有下述通式(1)所表示的結構單元的聚醯亞胺所形成。優選的是以含有50莫耳%以上的下述通式(1)所表示的結構單元的聚醯亞胺為宜。The polyimide resin used as the curl suppressing layer is not particularly limited as long as it satisfies the above-mentioned characteristics. For example, it may be formed by polyimide having a structural unit represented by the following general formula (1). Preferably, it is a polyimide containing 50 mol% or more of a structural unit represented by the following general formula (1).

[化1]

Figure 02_image001
(1)[化1]
Figure 02_image001
(1)

這裡,所述通式(1)中的X為芳香族基或脂環式基,且為具有一個以上的芳香環或脂環的四價有機基,R為碳數1~6的取代基。其中,成為用於形成基團X的原料的合適具體例例如可舉出:均苯四甲酸二酐(Pyromellitic dianhydride,PMDA)、萘-2,3,6,7-四甲酸二酐(Naphthalene tetracarboxylic dianhydride,NTCDA)、3,3',4,4'-聯苯四甲酸二酐(Biphenyl tetracarboxylic dianhydride,BPDA)等。另外,R的合適具體例例如可舉出-CH3 、-CF3 等。Here, X in the general formula (1) is an aromatic group or an alicyclic group, and is a tetravalent organic group having one or more aromatic rings or alicyclic rings, and R is a substituent having 1 to 6 carbons. Among them, suitable specific examples of raw materials used to form the group X include: pyromellitic dianhydride (PMDA), naphthalene-2,3,6,7-tetracarboxylic dianhydride (Naphthalene tetracarboxylic dianhydride) dianhydride, NTCDA), 3,3',4,4'-biphenyl tetracarboxylic dianhydride (BPDA), etc. In addition, suitable specific examples of R include -CH 3 , -CF 3 and the like.

其中,若R為-CF3 ,則可提高與基材層的界面處的剝離性,可容易地將這些層分離。Among them, if R is -CF 3 , the releasability at the interface with the base layer can be improved, and these layers can be easily separated.

此外,關於除了所述通式(1)所表示的結構單元以外可含有、且合適的是最大可含有小於50莫耳%的結構單元,可舉出使用通常的酸酐及二胺的結構單元。其中,可合適地使用的酸酐為均苯四甲酸二酐(PMDA)、萘-2,3,6,7-四甲酸二酐(NTCDA)、3,3',4,4'-聯苯四甲酸二酐(BPDA)、環己烷四甲酸二酐、伸苯基雙(偏苯三甲酸單酯酐)、4,4'-氧雙鄰苯二甲酸二酐、二苯甲酮-3,4,3',4'-四甲酸二酐、二苯基碸-3,4,3',4'-四甲酸二酐、2,3,6,7-萘四甲酸二酐、4,4'-(2,2'-六氟異亞丙基)雙鄰苯二甲酸二酐等。另一方面,二胺有間苯二胺、對苯二胺、2,4-二胺基甲苯、4,4'-二胺基二苯基醚、1,3-雙(4-胺基苯氧基)苯、4,4'-二胺基二苯基碸、2,2-雙(4-胺基苄氧基苯基)丙烷、雙[4-(4-胺基苯氧基)苯基]碸、4,4'-二胺基苯甲醯苯胺、9,9-雙(4-胺基苯基)茀等。In addition, the structural unit may be contained in addition to the structural unit represented by the general formula (1), and it is suitable that the structural unit may be contained at a maximum of less than 50 mol%. Examples of the structural unit using common acid anhydrides and diamines are mentioned. Among them, the acid anhydrides that can be suitably used are pyromellitic dianhydride (PMDA), naphthalene-2,3,6,7-tetracarboxylic dianhydride (NTCDA), 3,3',4,4'-biphenyltetracarboxylic acid dianhydride Formic acid dianhydride (BPDA), cyclohexane tetracarboxylic dianhydride, phenylene bis (trimellitic acid monoester anhydride), 4,4'-oxybisphthalic dianhydride, benzophenone-3, 4,3',4'-tetracarboxylic dianhydride, diphenylsulfonium-3,4,3',4'-tetracarboxylic dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 4,4 '-(2,2'-hexafluoroisopropylene) bisphthalic dianhydride, etc. On the other hand, diamines include meta-phenylenediamine, p-phenylenediamine, 2,4-diaminotoluene, 4,4'-diaminodiphenyl ether, 1,3-bis(4-aminobenzene Oxy)benzene, 4,4'-diaminodiphenyl sulfide, 2,2-bis(4-aminobenzyloxyphenyl)propane, bis[4-(4-aminophenoxy)benzene Group] chrysanthemum, 4,4'-diaminobenzaniline, 9,9-bis(4-aminophenyl)sulfonate, etc.

通常若聚醯亞胺的熱膨脹係數變小則透明性降低,並且厚度方向的延遲(retardation)(由雙折射之差所致的相位差)變高。因此不適於以下情況:在完成RTR製程後,將從載體層分離的基材層用作例如顯示裝置的樹脂基材,或用於阻氣膜、觸控面板基板。相對於此,本發明中,通過存在相反側的卷曲抑制層,而容許使用具有大於載體層的熱膨脹係數的基材層。Generally, when the thermal expansion coefficient of polyimide becomes small, transparency decreases, and retardation in the thickness direction (retardation due to a difference in birefringence) increases. Therefore, it is not suitable for the following situations: after the RTR process is completed, the substrate layer separated from the carrier layer is used as a resin substrate of, for example, a display device, or used as a gas barrier film or a touch panel substrate. In contrast, in the present invention, the presence of the curl suppression layer on the opposite side allows the use of a base material layer having a larger thermal expansion coefficient than the carrier layer.

形成基材層的聚醯亞胺可根據聚醯亞胺樹脂層疊體的用途而適當選擇。其中,在用於液晶顯示裝置、有機EL顯示裝置、電子紙、彩色濾光片、觸控面板等顯示裝置中的具有可撓性的樹脂基材的情況下,可舉出具有下述通式(2)所表示的結構單元的聚醯亞胺,優選含有50莫耳%以上的該通式(2)所表示的結構單元的聚醯亞胺。此外,關於除了該通式(2)所表示的結構單元以外可含有的結構單元(合適的是最大可含有小於50莫耳%的結構單元),只要不損及透明性,則可舉出與通式(1)中說明的結構單元相同的結構單元。可合適地使用的酸酐為均苯四甲酸二酐(PMDA)、萘-2,3,6,7-四甲酸二酐(NTCDA)、3,3',4,4'-聯苯四甲酸二酐(BPDA)、環己烷四甲酸二酐、伸苯基雙(偏苯三甲酸單酯酐)、4,4'-氧雙鄰苯二甲酸二酐、二苯甲酮-3,4,3',4'-四甲酸二酐、二苯基碸-3,4,3',4'-四甲酸二酐、2,3,6,7-萘四甲酸二酐、4,4'-(2,2'-六氟異亞丙基)雙鄰苯二甲酸二酐等。另一方面,二胺為間苯二胺、對苯二胺、2,4-二胺基甲苯、4,4'-二胺基二苯基醚、1,3-雙(4-胺基苯氧基)苯、4,4'-二胺基二苯基碸、2,2-雙(4-胺基苄氧基苯基)丙烷、雙[4-(4-胺基苯氧基)苯基]碸、4,4'-二胺基苯甲醯苯胺、9,9-雙(4-胺基苯基)茀等。 [化2]

Figure 02_image003
(2)The polyimide forming the base layer can be appropriately selected according to the use of the polyimide resin laminate. Among them, in the case of flexible resin substrates used in display devices such as liquid crystal display devices, organic EL display devices, electronic paper, color filters, touch panels, etc., the following general formula can be mentioned The polyimide of the structural unit represented by (2) preferably contains 50 mol% or more of the polyimide of the structural unit represented by the general formula (2). In addition, with regard to the structural units that can be contained in addition to the structural unit represented by the general formula (2) (it is suitable that the structural unit can be contained at a maximum of less than 50 mol%), as long as the transparency is not impaired, there may be mentioned and The same structural unit described in the general formula (1). Suitable anhydrides that can be used are pyromellitic dianhydride (PMDA), naphthalene-2,3,6,7-tetracarboxylic dianhydride (NTCDA), 3,3',4,4'-biphenyltetracarboxylic dianhydride Anhydride (BPDA), cyclohexanetetracarboxylic dianhydride, phenylene bis(trimellitic acid monoester anhydride), 4,4'-oxydiphthalic dianhydride, benzophenone-3,4, 3',4'-tetracarboxylic dianhydride, diphenyl sulfide-3,4,3',4'-tetracarboxylic dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 4,4'- (2,2'-hexafluoroisopropylene) bisphthalic dianhydride, etc. On the other hand, the diamine is m-phenylenediamine, p-phenylenediamine, 2,4-diaminotoluene, 4,4'-diaminodiphenyl ether, 1,3-bis(4-aminobenzene Oxy)benzene, 4,4'-diaminodiphenyl sulfide, 2,2-bis(4-aminobenzyloxyphenyl)propane, bis[4-(4-aminophenoxy)benzene Group] chrysanthemum, 4,4'-diaminobenzaniline, 9,9-bis(4-aminophenyl)sulfonate, etc. [化2]
Figure 02_image003
(2)

所述通式(2)中,Y為芳香族或脂環式的四價有機基,優選下述式(3)所表示的任一基團。 [化3]

Figure 02_image005
Figure 02_image007
Figure 02_image009
Figure 02_image011
Figure 02_image013
Figure 02_image015
Figure 02_image017
(3)   其中,從獲得440 nm~780 nm的波長範圍內的500 nm下的透過率為80%以上,且厚度方向的延遲為200 nm以下的聚醯亞胺樹脂作為基材層的觀點來看,更優選以下的任一個。 [化4]
Figure 02_image005
Figure 02_image007
Figure 02_image013
In the general formula (2), Y is an aromatic or alicyclic tetravalent organic group, preferably any group represented by the following formula (3). [化3]
Figure 02_image005
,
Figure 02_image007
,
Figure 02_image009
,
Figure 02_image011
,
Figure 02_image013
,
Figure 02_image015
,
Figure 02_image017
(3) Among them, from the viewpoint of obtaining a polyimide resin having a transmittance of 80% or more at 500 nm in the wavelength range of 440 nm to 780 nm and a retardation in the thickness direction of 200 nm or less as a base layer Obviously, any of the following is more preferable. [化4]
Figure 02_image005
,
Figure 02_image007
,
Figure 02_image013

最合適的是下述式(4)所表示的聚醯亞胺樹脂。 [化5]

Figure 02_image019
(4)The most suitable is a polyimide resin represented by the following formula (4). [化5]
Figure 02_image019
(4)

用作載體層的聚醯亞胺樹脂只要滿足上文所述的特性,則並無特別限制,例如作為通常可獲取的聚醯亞胺樹脂,可使用卡普頓(Kapton)(東麗杜邦(Toray-Dupont)公司製造)、優匹萊克斯(Upilex)(宇部興產公司製造)、阿比卡(Apical)(鐘化(Kaneka)公司製造)或具有與這些聚醯亞胺樹脂類似的結構的市售的聚醯亞胺,也可像以下將詳述那樣由二胺與酸二酐合成而獲得。The polyimide resin used as the carrier layer is not particularly limited as long as it satisfies the above-mentioned characteristics. For example, as a generally available polyimide resin, Kapton (Toray DuPont ( Toray-Dupont), Upilex (manufactured by Ube Industries Co., Ltd.), Apical (manufactured by Kaneka), or have a similar structure to these polyimide resins The commercially available polyimide of, can also be obtained by synthesizing diamine and acid dianhydride as described in detail below.

上文所述的各種聚醯亞胺是將聚醯亞胺前驅物(以下也稱為「聚醯胺酸」)加以醯亞胺化而獲得,聚醯胺酸的樹脂溶液可通過使用實質上為等莫耳的作為原料的二胺與酸二酐在有機溶劑中反應而獲得。詳細來說,例如可通過以下方式獲得:在氮氣流下使二胺溶解於N,N-二甲基乙醯胺等有機極性溶劑中後,添加四甲酸二酐,在室溫下反應5小時左右。這裡,從塗敷時的膜厚均勻化、或所得的聚醯亞胺的機械強度的觀點來看,聚醯胺酸的重量平均分子量(Mw)優選1萬~30萬左右。聚醯亞胺樹脂的合適的分子量範圍為與聚醯胺酸相同的分子量範圍。The various polyimides mentioned above are obtained by imidizing polyimine precursors (hereinafter also referred to as "polyamide acid"). The resin solution of polyimide acid can be obtained by using essentially It is obtained by reacting isomolar diamine as a raw material with acid dianhydride in an organic solvent. Specifically, it can be obtained, for example, by dissolving diamine in an organic polar solvent such as N,N-dimethylacetamide under nitrogen flow, adding tetracarboxylic dianhydride, and reacting at room temperature for about 5 hours . Here, the weight average molecular weight (Mw) of the polyamide acid is preferably about 10,000 to 300,000 from the viewpoint of uniformity of the film thickness at the time of coating or the mechanical strength of the obtained polyimide. The suitable molecular weight range of the polyimide resin is the same molecular weight range as that of the polyimide acid.

本發明的基材層及卷曲抑制層優選的是以分別通過所謂澆注法而獲得為宜,所述澆注法是塗布聚醯亞胺或聚醯亞胺前驅物的樹脂溶液並加以乾燥,進行加熱處理。即,獲得本發明的聚醯亞胺樹脂層疊體時,合適的是在載體層的一面側或兩面分別塗布聚醯亞胺或聚醯亞胺前驅物的樹脂溶液並加以乾燥,進行加熱處理,由此可形成基材層及卷曲抑制層。例如優選的是為了進行乾燥等而在90℃~130℃下進行5分鐘~30分鐘左右的預加熱處理後,進而為了進行醯亞胺化而在130℃~360℃下進行10分鐘~240分鐘左右的高溫加熱處理。The base material layer and the curl suppression layer of the present invention are preferably obtained separately by a so-called casting method, which is to coat a resin solution of a polyimide or a polyimide precursor, dry it, and heat it. deal with. That is, when obtaining the polyimide resin laminate of the present invention, it is suitable to apply a resin solution of polyimide or a polyimide precursor to one or both sides of the carrier layer, dry, and heat-treat. Thereby, a base material layer and a curl suppression layer can be formed. For example, it is preferable to perform preheating treatment at 90°C to 130°C for about 5 minutes to 30 minutes for drying, etc., and then to perform imidization at 130°C to 360°C for 10 minutes to 240 minutes. High temperature heat treatment around.

像這樣而獲得的聚醯亞胺樹脂層疊體可在基材層與和該基材層接觸的層(載體層或卷曲抑制層)的界面處分離,但為了容易地進行這些層的界面處的分離,優選的是以基材層是由在聚醯亞胺結構中具有氟原子的含氟聚醯亞胺所形成為宜。通過使用這種含氟聚醯亞胺,可使基材層與和該基材層接觸的層的剝離強度成為合適的是1 N/m~200 N/m、更合適的是1 N/m~100 N/m,因此例如具有可用人手容易地剝離的程度的分離性。另外,基材層的分離面直接維持通過澆注法所得的表面粗糙度(通常表面粗糙度Ra=1 nm~80 nm左右),因此也不會對顯示裝置的可視性等造成不良影響。The polyimide resin laminate obtained in this way can be separated at the interface between the substrate layer and the layer (carrier layer or curl suppression layer) in contact with the substrate layer. However, in order to facilitate the separation at the interface of these layers For separation, it is preferable that the substrate layer is formed of a fluorine-containing polyimide having a fluorine atom in the polyimide structure. By using this fluorine-containing polyimide, the peel strength of the substrate layer and the layer in contact with the substrate layer can be suitably 1 N/m to 200 N/m, more suitably 1 N/m ~100 N/m, so it has separability to the extent that it can be easily peeled off by hand, for example. In addition, the separation surface of the substrate layer directly maintains the surface roughness obtained by the casting method (usually the surface roughness Ra=1 nm to 80 nm), so it does not adversely affect the visibility of the display device.

本發明中,對於將不同材料層疊而成的聚醯亞胺樹脂層疊體,可根據如下想法通過計算而求出翹曲變形(翹曲量),實現聚醯亞胺樹脂層疊體的最適化。即,以基於引用文獻4的想法的簡便的材料力學計算為基礎,通過三維材料力學計算而算出自重的影響後,加上翹曲變形(翹曲量)而求出最終的翹曲量。使用有限單元法(finite element method)作為計算方法,即,對於熱變形及自重均衡的狀態的最終翹曲變形,使用層疊殼單元(shell element)進行離散化,以數值計算方式利用電腦實施運算(參照圖3)。In the present invention, for the polyimide resin laminate formed by laminating different materials, the warpage deformation (warpage amount) can be calculated by calculation based on the following idea, and the optimization of the polyimide resin laminate can be realized. That is, based on the simple material mechanics calculation based on the idea of Citation 4, the influence of the dead weight is calculated by the three-dimensional material mechanics calculation, and the warpage deformation (warpage amount) is added to obtain the final warpage amount. The finite element method is used as the calculation method, that is, the final warpage deformation in the state of thermal deformation and self-weight balance is discretized using a shell element, and the calculation is performed by a computer in a numerical calculation method ( Refer to Figure 3).

像上文所述那樣,本發明的聚醯亞胺樹脂層疊體可合適地用於獲得在基材層上具備功能構件的顯示裝置。即,只要在基材層上形成既定的功能層後,在卷曲抑制層與基材層的界面處、或基材層與載體層的界面處進行分離即可。這裡,載體層發揮在基材層側形成顯示部時的底座的作用,在顯示部的製造過程中確保基材層的處理性或尺寸穩定性等,但最終被除去而並未構成顯示裝置。同樣地,卷曲抑制層也是與載體層一同被分離,同樣地最終被除去而並未構成顯示裝置,即便透明性差也無妨。通過利用這種聚醯亞胺樹脂層疊體,能以良好的精度且可靠地在基材層上形成既定的功能層,並且可獲得實現了薄型、輕量、柔性化的顯示裝置。As described above, the polyimide resin laminate of the present invention can be suitably used to obtain a display device having a functional member on a base layer. That is, after forming a predetermined functional layer on the base layer, it is sufficient to separate at the interface between the curl suppression layer and the base layer, or at the interface between the base layer and the carrier layer. Here, the carrier layer functions as a base when the display portion is formed on the base layer side, ensuring the handleability and dimensional stability of the base layer during the manufacturing process of the display portion, but is finally removed and does not constitute a display device. Similarly, the curl suppression layer is separated together with the carrier layer, and similarly, it is finally removed without constituting a display device, even if the transparency is poor. By using such a polyimide resin laminate, a predetermined functional layer can be reliably formed on the base layer with good accuracy, and a thin, lightweight, and flexible display device can be obtained.

關於形成在基材層上的功能層,並無特別限制。例如有機EL顯示裝置的情況下,具代表性的是包含TFT、電極、發光層的有機EL元件等相當於顯示部。另外,液晶顯示裝置的情況下,所述功能層為TFT、驅動電路、視需要為彩色濾光片等。除了這些以外,包括電子紙或微機電系統(Micro-Electro-Mechanical System,MEMS)顯示器等那樣的各種顯示裝置,作為以前形成在玻璃基板上的各種功能層且放映出既定的影像(動畫或圖像)所必需的零件相當於顯示部。其中,例如在形成TFT時通常需要400℃左右的退火步驟,但本發明的聚醯亞胺樹脂層疊體具有也可耐受這種退火步驟的耐熱性。 [實施例]There are no particular restrictions on the functional layer formed on the base layer. For example, in the case of an organic EL display device, organic EL elements including TFTs, electrodes, and light-emitting layers are typically equivalent to the display portion. In addition, in the case of a liquid crystal display device, the functional layer is a TFT, a driving circuit, a color filter, etc. as necessary. In addition to these, various display devices such as electronic paper or micro-electro-mechanical system (Micro-Electro-Mechanical System, MEMS) displays are used as various functional layers previously formed on glass substrates and project predetermined images (animations or pictures). The parts necessary for the image are equivalent to the display section. Among them, for example, an annealing step of about 400° C. is generally required when forming a TFT. However, the polyimide resin laminate of the present invention has heat resistance that can withstand such an annealing step. [Example]

以下,根據實施例及比較例對本發明進行具體說明。此外,本發明不受這些內容的限定。Hereinafter, the present invention will be specifically described based on Examples and Comparative Examples. In addition, the present invention is not limited by these contents.

1. 各種物性測定及性能試驗方法 [剝離強度]1. Various physical properties and performance test methods [Peel strength]

關於基材層-(卷曲抑制層)-載體層間的剝離強度,將層疊體加工成寬度為1 mm~10 mm、長度為10 mm~25 mm的短條狀,使用東洋精機股份有限公司製造的拉伸試驗機(斯托羅格拉芙(Strograph)-M1)將載體層朝180°方向剝離,測定剝離強度。此外,將剝離強度牢固而難以剝離的情況視為「無法剝離」。 [透過率]Regarding the peeling strength between the base layer-(curl suppression layer)-carrier layer, the laminate was processed into a short strip with a width of 1 mm to 10 mm and a length of 10 mm to 25 mm, using Toyo Seiki Co., Ltd. A tensile testing machine (Strograph-M1) peeled off the carrier layer in the 180° direction, and measured the peel strength. In addition, the case where the peel strength is strong and it is difficult to peel is regarded as "unpeelable". [Transmittance]

將20 μm厚的基材層以5 cm見方切出,對其使用日本電色工業製造的霧度計(HAZE METER)NDH-5000進行380 nm~780 nm的透過率的測定。 [Ra]A 20 μm thick substrate layer was cut out in a 5 cm square, and the transmittance of 380 nm to 780 nm was measured using a Haze Meter NDH-5000 manufactured by Nippon Denshoku Industry Co., Ltd. [Ra]

將基材層、載體層及卷曲抑制層分別單獨以3 cm見方切出,對其使用布魯克元素分析(Bruker AXS)製造的原子力顯微鏡(AFM)進行Ra的測定。 [CTE]The base material layer, the carrier layer, and the curl suppression layer were individually cut out in a 3 cm square, and their Ra was measured using an atomic force microscope (AFM) manufactured by Bruker AXS. [CTE]

關於基材層、載體層及卷曲抑制層的CTE,將各層以3 mm×15 mm見方切出,對其使用精工儀器(Seiko Instruments)製造的熱機械分析(Thermomechanical analysis,TMA)裝置,一面施加5.0 g的負重一面以一定的升溫速度(10℃/min)在30℃~260℃的溫度範圍內進行拉伸試驗,根據100℃~250℃下的相對於溫度的聚醯亞胺膜的伸長量而測定CTE(×10-6 /K)。 [翹曲]Regarding the CTE of the substrate layer, carrier layer, and curl suppression layer, each layer was cut out in a 3 mm×15 mm square, and a thermomechanical analysis (TMA) device manufactured by Seiko Instruments was used while applying The tensile test is carried out on the load side of 5.0 g at a certain heating rate (10°C/min) in the temperature range of 30°C to 260°C, based on the elongation of the polyimide film relative to the temperature at 100°C to 250°C Measure CTE (×10 -6 /K). [Warpage]

利用切割刀(cutter knife)從層疊膜切出一邊為100 mm的正方形樣本,以23℃、50%的條件調濕24小時後載置在定盤上,利用遊標卡尺(vernier caliper)測定四角的翹起高度,將其平均值作為翹曲(卷曲)。A square sample with a side of 100 mm was cut out from the laminated film with a cutter knife, and the humidity was adjusted at 23°C and 50% for 24 hours, and then placed on a fixed plate. The four corners were measured with a vernier caliper. The average value of the lift height is regarded as warpage (curl).

2. 聚醯胺酸(聚醯亞胺前驅物)溶液的合成 將以下的合成例或實施例等中所用的原料示於以下。2. Synthesis of polyamide acid (polyimide precursor) solution The raw materials used in the following synthesis examples or examples are shown below.

[芳香族二胺基化合物] ·4,4'-二胺基-2,2'-雙(三氟甲基)聯苯(TFMB) ·2,2'-二甲基-4,4'-二胺基聯苯(m-TB) ·1,3-雙(4-胺基苯氧基)苯(TPE-R) ·2,2-雙[4-(4-胺基苯氧基)苯基]丙烷(BAPP) ·1,4-伸苯基二胺(PPD)[Aromatic diamino compound] ·4,4'-Diamino-2,2'-bis(trifluoromethyl)biphenyl (TFMB) ·2,2'-Dimethyl-4,4'- Diaminobiphenyl (m-TB) ·1,3-bis(4-aminophenoxy)benzene (TPE-R) ·2,2-bis[4-(4-aminophenoxy)benzene Base] Propane (BAPP) · 1,4-Phenylene diamine (PPD)

[芳香族四甲酸的酸酐] ·均苯四甲酸酐(PMDA) ·2,2-雙(3,4-脫水二羧基苯基)六氟丙烷(6FDA) ·2,3,2',3'-聯苯四甲酸二酐(BPDA)[Anhydride of aromatic tetracarboxylic acid] ·Pyromellitic anhydride (PMDA) ·2,2-bis(3,4-dehydrated dicarboxyphenyl)hexafluoropropane (6FDA) ·2,3,2',3' -Biphenyltetracarboxylic dianhydride (BPDA)

[溶劑] ·N,N-二甲基乙醯胺(DMAc) 合成例1[Solvent] ·N,N-Dimethylacetamide (DMAc) Synthesis Example 1

在氮氣流下,在300 ml的可分離式燒瓶中一面攪拌一面將TFMB(9.4 g、0.03 mol)添加到127.5 g的溶劑DMAc中並進行加溫,在50℃下溶解。繼而添加6FDA(13.09 g、0.03 mol)。使二胺與酸酐的莫耳比實質上成為1:1。然後,在室溫下將溶液繼續攪拌3小時而進行聚合反應,獲得200 g的淡黃色的黏稠的聚醯胺酸清漆A。此外,在後述加熱條件下使該聚醯胺酸清漆A硬化,由此獲得聚醯亞胺樹脂A。Under nitrogen flow, TFMB (9.4 g, 0.03 mol) was added to 127.5 g of solvent DMAc in a 300 ml separable flask while stirring and heated, and dissolved at 50°C. Then add 6FDA (13.09 g, 0.03 mol). The molar ratio of diamine and acid anhydride is substantially 1:1. Then, the solution was continuously stirred at room temperature for 3 hours to perform polymerization reaction, and 200 g of pale yellow viscous polyamide varnish A was obtained. In addition, the polyimide varnish A is cured under heating conditions described below, thereby obtaining a polyimide resin A.

合成例2 在氮氣流下,在300 ml的可分離式燒瓶中一面攪拌一面將10.2 g的m-TB與1.6 g的TPE-R以90:10的莫耳比添加到170 g的溶劑DMAc中並進行加溫,在50℃下溶解。繼而以90:10的莫耳比添加9.2 g的PMDA與3.1 g的BPDA。使二胺與酸酐的莫耳比實質上成為1:1。然後,將溶液在室溫下繼續攪拌3小時而進行聚合反應,獲得200 g的淡白色的黏稠的聚醯胺酸清漆B。此外,將該聚醯胺酸清漆B在後述加熱條件下硬化,由此獲得聚醯亞胺樹脂B。Synthesis Example 2 Under nitrogen flow, 10.2 g of m-TB and 1.6 g of TPE-R were added to 170 g of solvent DMAc at a molar ratio of 90:10 in a 300 ml separable flask while stirring. Heat up and dissolve at 50°C. Then, 9.2 g of PMDA and 3.1 g of BPDA were added at a molar ratio of 90:10. The molar ratio of diamine and acid anhydride is substantially 1:1. Then, the solution was continuously stirred at room temperature for 3 hours to perform polymerization reaction, and 200 g of pale white viscous polyamide varnish B was obtained. In addition, this polyimide varnish B is cured under heating conditions described below, thereby obtaining a polyimide resin B.

合成例3 在氮氣流下,在300 ml的可分離式燒瓶中一面攪拌一面將TFMB(12.6 g、0.04 mol)添加到127.5 g的溶劑DMAc中並進行加溫,在50℃下溶解。繼而以12.5:87.5的莫耳比添加6FDA(2.2 g、0.005 mol)與PMDA(7.7 g、0.035 mol)。使二胺與酸酐的莫耳比實質上成為1:1。然後,將溶液在室溫下繼續攪拌3小時而進行聚合反應,獲得150 g的淡白色的黏稠的聚醯胺酸清漆C。此外,將該聚醯胺酸清漆C在後述加熱條件下硬化,由此獲得聚醯亞胺樹脂C。Synthesis Example 3 In a 300 ml separable flask while stirring, TFMB (12.6 g, 0.04 mol) was added to 127.5 g of solvent DMAc, heated, and dissolved at 50°C under nitrogen flow. Then, 6FDA (2.2 g, 0.005 mol) and PMDA (7.7 g, 0.035 mol) were added at a molar ratio of 12.5:87.5. The molar ratio of diamine and acid anhydride is substantially 1:1. Then, the solution was continuously stirred at room temperature for 3 hours to perform polymerization reaction, and 150 g of pale white viscous polyamide varnish C was obtained. In addition, this polyimide varnish C is cured under heating conditions described below, thereby obtaining a polyimide resin C.

合成例4 在氮氣流下,在300 ml的可分離式燒瓶中一面攪拌一面將m-TB(14.4 g、0.07 mol)添加到170 g的溶劑DMAc中並進行加溫,在50℃下溶解。繼而以90:10的莫耳比添加PMDA(13.6 g、0.06 mol)與BPDA(2 g、0.007 mol)。使二胺與酸酐的莫耳比實質上成為1:1。然後,將溶液在室溫下繼續攪拌3小時間而進行聚合反應,獲得200 g的淡白色的黏稠的聚醯胺酸清漆D。此外,將該聚醯胺酸清漆D在後述加熱條件下硬化,由此獲得聚醯亞胺樹脂D。Synthesis Example 4 In a 300 ml separable flask while stirring, m-TB (14.4 g, 0.07 mol) was added to 170 g of solvent DMAc and heated to dissolve at 50°C under nitrogen flow. Then PMDA (13.6 g, 0.06 mol) and BPDA (2 g, 0.007 mol) were added at a molar ratio of 90:10. The molar ratio of diamine and acid anhydride is substantially 1:1. Then, the solution was continuously stirred at room temperature for 3 hours to perform polymerization reaction, and 200 g of pale white viscous polyamide varnish D was obtained. In addition, this polyimide varnish D is cured under heating conditions described below, whereby a polyimide resin D is obtained.

合成例5 在氮氣流下,在300 ml的可分離式燒瓶中一面攪拌一面將作為二胺的TPE-R(14.8 g、0.05 mol)添加到170 g的溶劑DMAc中並進行加溫,在50℃下溶解。繼而添加作為酸酐的BPDA(15.2 g、0.05 mol)。使二胺與酸酐的莫耳比實質上成為1:1。然後,將溶液在室溫下繼續攪拌3小時而進行聚合反應,獲得200 g的淡白色的黏稠的聚醯胺酸清漆E。此外,將該聚醯胺酸清漆E在後述加熱條件硬化,由此獲得聚醯亞胺樹脂E。Synthesis Example 5 In a 300 ml separable flask, TPE-R (14.8 g, 0.05 mol) as a diamine was added to 170 g of solvent DMAc while stirring in a 300 ml separable flask and heated at 50°C under nitrogen flow. Down dissolve. Then, BPDA (15.2 g, 0.05 mol) was added as an acid anhydride. The molar ratio of diamine and acid anhydride is substantially 1:1. Then, the solution was continuously stirred at room temperature for 3 hours to perform polymerization reaction, and 200 g of pale white viscous polyamide varnish E was obtained. In addition, this polyimide varnish E is cured under heating conditions described later, whereby a polyimide resin E is obtained.

合成例6 在氮氣流下,在300 ml的可分離式燒瓶中一面攪拌一面以m-TB:TPE-R按莫耳比計成為90:10的方式添加到170 g的溶劑DMAc中並進行加溫,在50℃下溶解。繼而以PMDA:BPDA的莫耳比成為80:20的方式添加。使二胺與酸酐的莫耳比實質上成為1:1。然後,將溶液在室溫下繼續攪拌3小時而進行聚合反應,獲得200 g的淡白色的黏稠的聚醯胺酸F清漆。此外,將該聚醯胺酸F清漆在後述加熱條件下硬化,由此獲得聚醯亞胺樹脂F。Synthesis Example 6 In a 300 ml separable flask, while stirring, add it to 170 g of solvent DMAc so that m-TB:TPE-R becomes 90:10 in molar ratio and heat , Dissolve at 50°C. Then it was added in a way that the mol ratio of PMDA:BPDA became 80:20. The molar ratio of diamine and acid anhydride is substantially 1:1. Then, the solution was continuously stirred at room temperature for 3 hours to perform polymerization reaction, and 200 g of pale white viscous polyamide F varnish was obtained. In addition, the polyimide F varnish is cured under heating conditions described below, thereby obtaining a polyimide resin F.

合成例7 在氮氣流下,在300 ml的可分離式燒瓶中一面攪拌一面將TFMB(16.93 g)添加到溶劑DMAc(170 g)中並溶解。繼而添加PMDA(10.12 g)及6FDA(2.95 g)。然後,將溶液在室溫下繼續攪拌6小時而進行聚合反應,獲得200 g的淡黃色的黏稠的聚醯胺酸H清漆。此外,將該聚醯胺酸H清漆在後述加熱條件下硬化,由此獲得聚醯亞胺樹脂H。Synthesis Example 7 Under nitrogen flow, TFMB (16.93 g) was added to the solvent DMAc (170 g) and dissolved in a 300 ml separable flask while stirring. Then add PMDA (10.12 g) and 6FDA (2.95 g). Then, the solution was continuously stirred at room temperature for 6 hours to carry out a polymerization reaction, and 200 g of a pale yellow viscous polyamide H varnish was obtained. In addition, this polyimide H varnish is cured under heating conditions described below, whereby polyimide resin H is obtained.

合成例8 在氮氣流下,在300 ml的可分離式燒瓶中一面攪拌一面將BAPP(19.45 g)添加到溶劑DMAc(170 g)中並溶解。繼而添加PMDA(9.85 g)及BPDA(0.70 g)。然後,將溶液在室溫下繼續攪拌6小時而進行聚合反應,獲得200 g的淡黃色的黏稠的聚醯胺酸I清漆。此外,將該聚醯胺酸I清漆在後述加熱條件下硬化,由此獲得聚醯亞胺樹脂I。Synthesis Example 8 Under nitrogen flow, BAPP (19.45 g) was added to the solvent DMAc (170 g) and dissolved in a 300 ml separable flask while stirring. Then PMDA (9.85 g) and BPDA (0.70 g) were added. Then, the solution was continuously stirred at room temperature for 6 hours to carry out a polymerization reaction, and 200 g of a pale yellow viscous polyamide I varnish was obtained. In addition, this polyimide I varnish is cured under heating conditions described below, thereby obtaining a polyimide resin I.

合成例9 在氮氣流下,在300 ml的可分離式燒瓶中一面攪拌一面將4,4'-DAPE(8.97 g)添加到溶劑DMAc(170 g)中並溶解。繼而添加PMDA(8.95 g)及BPDA(12.08 g)。然後,將溶液在室溫下繼續攪拌6小時而進行聚合反應,獲得200 g的褐色的黏稠的聚醯胺酸J清漆。此外,將該聚醯胺酸J清漆在後述加熱條件下硬化,由此獲得聚醯亞胺樹脂J。Synthesis Example 9 In a 300 ml separable flask, 4,4'-DAPE (8.97 g) was added to the solvent DMAc (170 g) and dissolved while stirring. Then add PMDA (8.95 g) and BPDA (12.08 g). Then, the solution was continuously stirred at room temperature for 6 hours to perform polymerization reaction, and 200 g of brown viscous polyamide J varnish was obtained. In addition, this polyimide J varnish is cured under heating conditions described below, whereby polyimide resin J is obtained.

合成例10 在氮氣流下,在300 ml的可分離式燒瓶中一面攪拌一面將4,4'-DAPE(8.14 g)及PPD(4.40 g)添加到溶劑DMAc(170 g)中並溶解。繼而添加PMDA(17.45 g)。然後,將溶液在室溫下繼續攪拌6小時而進行聚合反應,獲得200 g的褐色的黏稠的聚醯胺酸K清漆。此外,將該聚醯胺酸K清漆在後述加熱條件下硬化,由此獲得聚醯亞胺樹脂K。Synthesis Example 10 Under nitrogen flow, 4,4'-DAPE (8.14 g) and PPD (4.40 g) were added to the solvent DMAc (170 g) and dissolved in a 300 ml separable flask while stirring. Then PMDA (17.45 g) was added. Then, the solution was continuously stirred at room temperature for 6 hours to perform polymerization reaction, and 200 g of brown viscous polyamide K varnish was obtained. In addition, this polyimide K varnish is cured under heating conditions described below, whereby polyimide resin K is obtained.

3. 利用塗敷的聚醯亞胺(PI)層的形成 使用聚醯亞胺膜(中國寧波今山製造,厚度=0.75 mm,CTE=45 ppm/K,以下也稱為「載體膜」)作為載體層。 作為載體層,使用2種聚醯亞胺膜。 1)聚醯亞胺膜1:中國寧波今山製造,厚度=0.75 mm,CTE=45 ppm/K,Ra=3 nm(以下也稱為載體膜1) 2)聚醯亞胺膜2:中國瑞華泰(Rayitek)製造,厚度=0.75 mm,CTE=45 ppm/K,Ra=10 nm(以下也稱為載體膜2)3. The formation of the coated polyimide (PI) layer uses a polyimide film (manufactured by Ningbo Jinshan, China, thickness = 0.75 mm, CTE = 45 ppm/K, hereinafter also referred to as "carrier film") As a carrier layer. As the carrier layer, two types of polyimide films were used. 1) Polyimide film 1: made in Ningbo Jinshan, China, thickness=0.75 mm, CTE=45 ppm/K, Ra=3 nm (hereinafter also referred to as carrier film 1) 2) Polyimide film 2: China Made by Rayitek, thickness = 0.75 mm, CTE = 45 ppm/K, Ra = 10 nm (hereinafter also referred to as carrier film 2)

實施例1 一面利用具備卷出部、唇式塗布機(lip coater)、連續乾燥爐、連續爐及卷取部的例如圖2所示的RTR方式的塗敷乾燥硬化設備將載體膜1(寬度520 mm×長度500 m×厚度75 μm)以2 m/min的速度卷出,一面使用莫諾泵(mono pump)以膜厚成為45 μm的方式塗布聚醯胺酸清漆B。使該膜在由多個爐所構成的連續乾燥爐中通過,在90℃下乾燥2分鐘,在130℃下乾燥1分鐘,進而在由多個爐所構成、且溫度從試樣入口側的爐向出口側的爐階段性地增高的連續爐中通過,以合計25分鐘階段性地從130℃起階段性地加熱到400℃,製作在載體膜上形成有作為卷曲抑制層的聚醯亞胺樹脂B的輥。然後,將該卷安裝在相同的塗敷乾燥裝置的卷出部中,在聚醯亞胺樹脂C上塗布100 μm的聚醯亞胺酸清漆A,在由多個爐所構成的連續乾燥爐中通過,在90℃下乾燥2分鐘,在130℃下乾燥1分鐘,進而在由多個爐所構成、且溫度從試樣入口側的爐向出口側的爐階段性地增高的連續爐中通過,以合計20分鐘階段性地從130℃階段性地加熱到400℃,形成作為基材層的厚度10 μm的聚醯亞胺樹脂A,獲得卷狀的聚醯亞胺樹脂層疊體(層疊體1)。Example 1 One side of the carrier film 1 (width 520 mm×length 500 m×thickness 75 μm) was rolled out at a speed of 2 m/min, and a mono pump was used to coat polyamide varnish B so that the film thickness became 45 μm. The film was passed through a continuous drying furnace composed of multiple furnaces, dried at 90°C for 2 minutes, and dried at 130°C for 1 minute. The film was further composed of multiple furnaces and the temperature was from the sample inlet side. The furnace was passed through a continuous furnace where the furnace on the outlet side was stepped up, and it was heated stepwise from 130°C to 400°C in a total of 25 minutes to produce polyamide with a curl suppression layer formed on the carrier film. Roll of amine resin B. Then, the roll was installed in the unwinding part of the same coating and drying device, and 100 μm of polyimide varnish A was coated on the polyimide resin C, and in a continuous drying furnace composed of multiple furnaces. Medium pass, drying at 90°C for 2 minutes, and drying at 130°C for 1 minute, and then in a continuous furnace composed of a plurality of furnaces, and the temperature gradually increases from the furnace on the inlet side of the sample to the furnace on the outlet side By stepwise heating from 130°C to 400°C in a total of 20 minutes, a polyimide resin A with a thickness of 10 μm was formed as a base layer, and a roll-shaped polyimide resin laminate (laminated Body 1).

關於層疊體1的各層的厚度,載體層為75 μm,卷曲抑制層為4.5 μm,基材層為10 μm。將層疊體1的層結構示意性地示於圖1中。Regarding the thickness of each layer of the laminate 1, the carrier layer was 75 μm, the curl suppression layer was 4.5 μm, and the base layer was 10 μm. The layer structure of the laminate 1 is schematically shown in FIG. 1.

然後,對於所述卷狀的聚醯亞胺樹脂層疊體,一面使用具備卷出部、搬送輥、製程處理部及卷取部的RTR方式的裝置,以2 m/min的速度以基材層朝上的方式在長度方向上卷出,一面經由搬送輥而導入到設置在真空腔室內的製程處理部中,利用濺鍍法通過連續處理在基材層上將厚度50 nm的作為功能層的ITO成膜,以帶有功能層的聚醯亞胺基板膜的形式卷取。Then, for the roll-shaped polyimide resin laminate, an RTR device equipped with a reeling section, a conveying roller, a process processing section, and a winding section was used to transfer the base material layer at a speed of 2 m/min. It is rolled up in the longitudinal direction, and one side is introduced into the process processing section installed in the vacuum chamber through the conveying roller. The sputtering method is used to continuously process the substrate layer with a thickness of 50 nm as a functional layer. The ITO film is formed and is rolled up in the form of a polyimide substrate film with a functional layer.

進而,將帶有功能層的聚醯亞胺基板膜切割成370 mm×450 mm的片狀,對經製膜的ITO在一個方向(X方向)及另一方向(Y方向)的XY方向上進行透明電路加工。此時,Y電路與X電路的交點並未形成電路。Furthermore, the polyimide substrate film with the functional layer was cut into a 370 mm×450 mm sheet shape, and the ITO film was formed in the XY direction in one direction (X direction) and the other direction (Y direction). Perform transparent circuit processing. At this time, the intersection of the Y circuit and the X circuit does not form a circuit.

然後,在XY電路的交點塗布外塗劑(over coating),在250℃下進行熱處理而使外塗層硬化,使用銀糊橫跨外塗層進行橋接加工而製成XY電路,進而在ITO成膜側的整個面上塗布外塗劑,在270℃下進行退火處理,進行外塗劑的硬化及ITO的結晶化。Then, apply an over coating to the intersection of the XY circuit, heat it at 250°C to harden the overcoat, and use silver paste to bridge the overcoat to form an XY circuit, which is then formed on the ITO. The entire surface of the film side is coated with an overcoat agent, and an annealing treatment is performed at 270°C to perform curing of the overcoat agent and crystallization of ITO.

最後,對蓋板玻璃(cover glass)在ITO製膜側的表面貼附光學透明膠帶(Optically Clear Adhesive,OCA)(透明黏合片),然後將載體膜及卷曲抑制層機械剝離,製成在基材層上形成有功能層的觸控面板基板。Finally, the cover glass (Optically Clear Adhesive, OCA) (transparent adhesive sheet) is attached to the surface of the cover glass on the ITO film side, and then the carrier film and the curl suppression layer are mechanically peeled off to form a base A touch panel substrate with a functional layer formed on the material layer.

比較例1 不形成卷曲抑制層,而與實施例1同樣地在載體膜上形成作為基材層的聚醯亞胺樹脂A(厚度10 μm),獲得聚醯亞胺樹脂層疊體(層疊體C1)。Comparative Example 1 Without forming a curl suppression layer, polyimide resin A (thickness 10 μm) was formed on the carrier film as a base layer in the same manner as in Example 1, to obtain a polyimide resin laminate (laminate C1 ).

該層疊體C1的翹曲(卷曲)大,在觸控面板的製造步驟中在將ITO製膜切割成片狀時因翹曲而無法與遮罩進行對位,無法進行XY方向的透明電路加工,從而無法製作觸控面板。The laminated body C1 has a large warpage (curl), and when the ITO film is cut into a sheet in the manufacturing step of the touch panel, it cannot be aligned with the mask due to the warpage, and the transparent circuit processing in the XY direction cannot be processed. , Thus unable to make a touch panel.

實施例2 一面利用具備卷出部、唇式塗布機、連續乾燥爐、連續爐及卷取部的例如圖2所示的RTR方式的塗敷乾燥硬化設備將載體膜(寬度520 mm×長度500 m×厚度75 μm)以2 m/min的速度卷出,一面使用莫諾泵以膜厚成為100 μm的方式塗布聚醯胺酸清漆E。使該膜在由多個爐所構成的連續乾燥爐中通過,在90℃下乾燥2分鐘,在130℃下乾燥1分鐘,製作在載體膜上形成有作為卷曲抑制層的聚醯亞胺樹脂E的輥。然後,將該卷安裝在相同的塗敷乾燥裝置的卷出部中,在聚醯亞胺樹脂E的相反側塗布100 μm的聚醯胺酸清漆A,在由多個爐所構成的連續乾燥爐中通過,在90℃下乾燥2分鐘,在130℃下乾燥1分鐘,進而在由多個爐所構成、且溫度從試樣入口側的爐向出口側的爐階段性地增高的連續爐中通過,以合計20分鐘階段性地從130℃起階段性地加熱到400℃,形成作為基材層的厚度10 μm的聚醯亞胺樹脂A,獲得卷狀的聚醯亞胺樹脂層疊體(層疊體2)。Example 2 A carrier film (width 520 mm x length 500 m×thickness 75 μm) was rolled out at a speed of 2 m/min, and polyamide varnish E was coated with a Mono pump so that the film thickness became 100 μm. The film was passed through a continuous drying furnace composed of a plurality of furnaces, and dried at 90°C for 2 minutes and at 130°C for 1 minute to produce a polyimide resin having a curl suppression layer formed on the carrier film E's roll. Then, the roll was installed in the unwinding part of the same coating and drying device, 100 μm of polyimide varnish A was coated on the opposite side of the polyimide resin E, and then dried in a continuous drying system composed of multiple ovens. Pass through the furnace, dry at 90°C for 2 minutes, and dry at 130°C for 1 minute, and then in a continuous furnace composed of multiple furnaces and gradually increasing the temperature from the furnace on the inlet side of the sample to the furnace on the outlet side In the middle pass, stepwise heating from 130°C to 400°C for a total of 20 minutes to form a base layer of polyimide resin A with a thickness of 10 μm to obtain a roll-shaped polyimide resin laminate (Laminated body 2).

關於層疊體2的各層的厚度,載體膜為75 μm,卷曲抑制層為13 μm,基材層為10 μm。將層疊體2的層結構示意性地示於圖4中。Regarding the thickness of each layer of the laminate 2, the carrier film was 75 μm, the curl suppression layer was 13 μm, and the base layer was 10 μm. The layer structure of the laminate 2 is schematically shown in FIG. 4.

然後,對於層疊體2,利用與實施例1相同的方法製成在基材層上形成有功能層的觸控面板基板。Then, the laminated body 2 was produced by the same method as in Example 1 to produce a touch panel substrate in which a functional layer was formed on a base layer.

實施例3 使用聚醯胺酸清漆C代替聚醯胺酸清漆A作為基材層,且使用聚醯胺酸清漆D代替聚醯胺酸清漆E作為卷曲抑制層,除此以外,利用與實施例2相同的方法獲得聚醯亞胺樹脂層疊體(層疊體3)。Example 3 Polyamide varnish C was used instead of polyamide varnish A as the substrate layer, and polyamide varnish D was used instead of polyamide varnish E as the curl suppression layer. In addition, the same as in the examples was used. 2 The same method was used to obtain a polyimide resin laminate (Laminate 3).

關於層疊體3的各層的厚度,載體層為75 μm,基材層為12 μm,卷曲抑制層為13 μm。Regarding the thickness of each layer of the laminate 3, the carrier layer was 75 μm, the base layer was 12 μm, and the curl suppression layer was 13 μm.

在該層疊體3上,利用與實施例1相同的方法將ITO及XY電路製膜,獲得觸控面板。On this laminated body 3, ITO and XY circuits were formed into a film by the same method as Example 1, and the touch panel was obtained.

實施例4 使用聚醯亞胺膜2作為載體層,使用聚醯胺酸清漆F代替聚醯胺酸清漆C作為卷曲抑制層,除此以外,利用與實施例1相同的方法獲得聚醯亞胺樹脂層疊體(層疊體4)。 關於層疊體4的各層的厚度,載體層為75 μm,基材層為10 μm,卷曲抑制層為4 μm。Example 4 Polyimide film 2 was used as the carrier layer, and polyimide varnish F was used instead of polyimide varnish C as the curl suppression layer, except that the same method as in Example 1 was used to obtain polyimide Resin laminate (Laminate 4). Regarding the thickness of each layer of the laminate 4, the carrier layer was 75 μm, the base layer was 10 μm, and the curl suppression layer was 4 μm.

實施例5 使用聚醯胺酸清漆H代替聚醯胺酸清漆A作為基材層,且使用聚醯胺酸清漆E代替聚醯胺酸清漆B作為卷曲抑制層,除此以外,利用與實施例1相同的方法獲得聚醯亞胺樹脂層疊體(層疊體5)。Example 5 Polyamide varnish H was used instead of polyamide varnish A as the substrate layer, and polyamide varnish E was used instead of polyamide varnish B as the curl suppression layer. In addition, the same as in the examples was used. 1 The same method was used to obtain a polyimide resin laminate (laminate 5).

關於層疊體5的各層的厚度,載體層為75 μm,基材層為10 μm,卷曲抑制層為50 μm。Regarding the thickness of each layer of the laminate 5, the carrier layer was 75 μm, the base layer was 10 μm, and the curl suppression layer was 50 μm.

實施例6 除了基材層及卷曲抑制層的厚度以外,利用與實施例2相同的方法獲得聚醯亞胺樹脂層疊體(層疊體6)。Example 6 A polyimide resin laminate (laminate 6) was obtained by the same method as Example 2 except for the thickness of the base layer and the curl suppression layer.

關於層疊體6的各層的厚度,載體層為75 μm,基材層為10 μm,卷曲抑制層為13 μm。Regarding the thickness of each layer of the laminate 6, the carrier layer was 75 μm, the base layer was 10 μm, and the curl suppression layer was 13 μm.

實施例7 使用聚醯胺酸清漆H代替聚醯胺酸清漆A作為基材層,且使用聚醯胺酸清漆B代替聚醯胺酸清漆E作為卷曲抑制層,除此以外,利用與實施例2相同的方法獲得聚醯亞胺樹脂層疊體(層疊體7)。Example 7 Polyamide varnish H was used instead of polyamide varnish A as the substrate layer, and polyamide varnish B was used instead of polyamide varnish E as the curl suppression layer. In addition, the same as in the examples was used. 2 The same method was used to obtain a polyimide resin laminate (Laminate 7).

關於層疊體7的各層的厚度,載體層為75 μm,基材層為10 μm,卷曲抑制層為15 μm。Regarding the thickness of each layer of the laminate 7, the carrier layer was 75 μm, the base layer was 10 μm, and the curl suppression layer was 15 μm.

比較例2 除了使用聚醯胺酸清漆I代替聚醯胺酸清漆B作為卷曲抑制層以外,利用與實施例1相同的方法獲得聚醯亞胺樹脂層疊體(層疊體C2)。Comparative Example 2 A polyimide resin laminate (laminate C2) was obtained by the same method as in Example 1, except that polyamide varnish I was used instead of polyamide varnish B as the curl suppression layer.

關於層疊體C2的各層的厚度,載體層為75 μm,基材層為10 μm,卷曲抑制層為4 μm。Regarding the thickness of each layer of the laminate C2, the carrier layer was 75 μm, the base layer was 10 μm, and the curl suppression layer was 4 μm.

比較例3 除了使用聚醯胺酸清漆J代替聚醯胺酸清漆E作為卷曲抑制層以外,利用與實施例2相同的方法獲得聚醯亞胺樹脂層疊體(層疊體C3)。Comparative Example 3 A polyimide resin laminate (laminate C3) was obtained by the same method as in Example 2 except that polyamide varnish J was used instead of polyamide varnish E as the curl suppression layer.

關於層疊體C3的各層的厚度,載體層為75 μm,基材層為10 μm,卷曲抑制層為15 μm。Regarding the thickness of each layer of the laminate C3, the carrier layer was 75 μm, the base layer was 10 μm, and the curl suppression layer was 15 μm.

比較例4 除了使用聚醯胺酸清漆I代替聚醯胺酸清漆B作為卷曲抑制層以外,利用與實施例1相同的方法獲得聚醯亞胺樹脂層疊體(層疊體C4)。Comparative Example 4 A polyimide resin laminate (laminate C4) was obtained by the same method as in Example 1, except that polyamide varnish I was used instead of polyamide varnish B as the curl suppression layer.

關於層疊體C4的各層的厚度,載體層為75 μm,基材層為10 μm,卷曲抑制層為13 μm。Regarding the thickness of each layer of the laminate C4, the carrier layer was 75 μm, the base layer was 10 μm, and the curl suppression layer was 13 μm.

比較例5 使用聚醯胺酸H代替實施例4的聚醯胺酸A,且使用聚醯胺酸K代替聚醯胺酸E,除此以外,與實施例1同樣地進行操作。Comparative Example 5 The operation was performed in the same manner as in Example 1, except that polyamide H was used instead of polyamide A of Example 4, and polyamide K was used instead of polyamide E.

使用聚醯胺酸清漆H代替聚醯胺酸清漆A作為基材層,且使用聚醯胺酸清漆K代替聚醯胺酸清漆B作為卷曲抑制層,除此以外,利用與實施例1相同的方法獲得聚醯亞胺樹脂層疊體(層疊體C5)。Polyamide varnish H was used instead of polyamide varnish A as the substrate layer, and polyamide varnish K was used instead of polyamide varnish B as the curl suppression layer. The same as in Example 1 was used, except that The method obtains a polyimide resin laminate (laminate C5).

關於層疊體C5的各層的厚度,載體層為75 μm,基材層為10 μm,卷曲抑制層為13 μm。Regarding the thickness of each layer of the laminate C5, the carrier layer was 75 μm, the base layer was 10 μm, and the curl suppression layer was 13 μm.

將以上的實施例及比較例中所得的聚醯亞胺樹脂層疊體的物性示於表1中。Table 1 shows the physical properties of the polyimide resin laminate obtained in the above Examples and Comparative Examples.

[表1]

Figure 106110944-A0304-0001
[Table 1]
Figure 106110944-A0304-0001

1‧‧‧功能層 2‧‧‧基材層 3‧‧‧載體層 4‧‧‧卷曲抑制層 10‧‧‧層疊體 11‧‧‧濺鍍裝置 12、13‧‧‧導輥 14‧‧‧卷出輥 15‧‧‧卷取輥1‧‧‧Functional layer 2‧‧‧Substrate layer 3‧‧‧Carrier layer 4‧‧‧Curl suppression layer 10‧‧‧Laminated body 11‧‧‧Sputtering device 12, 13‧‧‧Guide roller 14‧‧‧Unwind Roller 15‧‧‧Reel roll

圖1為對本發明的聚醯亞胺樹脂層疊體示出帶有功能層的各層構成的剖面圖。 圖2為用於對層疊體形成功能層的裝置的示意圖。 圖3為表示聚醯亞胺層疊體產生翹曲的狀態的類比圖。 圖4為對本發明的聚醯亞胺樹脂層疊體示出帶有功能層的各層構成的剖面圖。Fig. 1 is a cross-sectional view showing the structure of each layer with a functional layer of the polyimide resin laminate of the present invention. Fig. 2 is a schematic diagram of an apparatus for forming a functional layer on a laminate. Fig. 3 is an analogy diagram showing a state where the polyimide laminate has warped. Fig. 4 is a cross-sectional view showing the structure of each layer with a functional layer of the polyimide resin laminate of the present invention.

1‧‧‧功能層 1‧‧‧Functional layer

2‧‧‧基材層 2‧‧‧Substrate layer

3‧‧‧載體層 3‧‧‧Carrier layer

4‧‧‧卷曲抑制層 4‧‧‧Curl suppression layer

10‧‧‧層疊體 10‧‧‧Laminated body

Claims (14)

一種聚醯亞胺樹脂層疊體,其為包含聚醯亞胺樹脂的卷曲抑制層、包含聚醯亞胺樹脂的載體層及包含聚醯亞胺樹脂的基材層的層疊體,並且其特徵在於:在所述基材層的一面側以可剝離的方式黏合有所述卷曲抑制層及所述載體層,與所述基材層接觸的層的熱膨脹係數小於或大於其他層的熱膨脹係數的任一個。A polyimide resin laminate, which is a laminate of a curl suppression layer containing a polyimide resin, a carrier layer containing a polyimide resin, and a base layer containing a polyimide resin, and is characterized in : On one side of the base layer, the curl suppression layer and the carrier layer are peelably bonded, and the thermal expansion coefficient of the layer in contact with the base layer is less than or greater than the thermal expansion coefficient of other layers. One. 如申請專利範圍第1項所述的聚醯亞胺樹脂層疊體,其中在所述載體層的一面側具有所述卷曲抑制層,進而具有以可剝離的方式黏合於所述卷曲抑制層的所述基材層,所述卷曲抑制層的熱膨脹係數小於或大於所述載體層及所述基材層的熱膨脹係數的任一個。The polyimide resin laminate according to the first item of the patent application, wherein the curl suppressing layer is provided on one side of the carrier layer, and further has the curl suppressing layer adhered to the curl suppressing layer in a peelable manner. In the substrate layer, the thermal expansion coefficient of the curl-inhibiting layer is less than or greater than any one of the thermal expansion coefficients of the carrier layer and the substrate layer. 如申請專利範圍第2項所述的聚醯亞胺樹脂層疊體,其中所述基材層與所述載體層的熱膨脹係數差為±40 ppm/K以下。The polyimide resin laminate according to the second item of the scope of patent application, wherein the difference in thermal expansion coefficient between the base layer and the carrier layer is ±40 ppm/K or less. 如申請專利範圍第2項所述的聚醯亞胺樹脂層疊體,其中在所述載體層的一面側隔著所述卷曲抑制層及所述基材層而進一步形成有功能層。The polyimide resin laminate according to claim 2 wherein a functional layer is further formed on one side of the carrier layer with the curl suppression layer and the base layer interposed therebetween. 如申請專利範圍第1項所述的聚醯亞胺樹脂層疊體,其中在所述載體層的一面側具有以可剝離的方式黏合的所述基材層,在所述載體層的相反面側具有所述卷曲抑制層,所述載體層的熱膨脹係數小於或大於所述基材層及所述卷曲抑制層的熱膨脹係數的任一個。The polyimide resin laminate according to claim 1, wherein the substrate layer is peelably bonded on one side of the carrier layer, and on the opposite side of the carrier layer With the curl suppression layer, the thermal expansion coefficient of the carrier layer is smaller than or greater than any one of the thermal expansion coefficients of the base layer and the curl suppression layer. 如申請專利範圍第5項所述的聚醯亞胺樹脂層疊體,其中所述基材層與所述卷曲抑制層的熱膨脹係數差為±40 ppm/K以下。The polyimide resin laminate as described in claim 5, wherein the difference in thermal expansion coefficient between the base layer and the curl suppression layer is ±40 ppm/K or less. 如申請專利範圍第5項所述的聚醯亞胺樹脂層疊體,其中在所述載體層的一面側隔著所述基材層而進一步形成有功能層。The polyimide resin laminate according to claim 5, wherein a functional layer is further formed on one side of the carrier layer with the base layer interposed therebetween. 如申請專利範圍第2項或第5項所述的聚醯亞胺樹脂層疊體,其中所述基材層的全光線透過率為80%以上,且厚度為50 μm以下。The polyimide resin laminate as described in item 2 or item 5 of the scope of patent application, wherein the base layer has a total light transmittance of 80% or more and a thickness of 50 μm or less. 如申請專利範圍第2項或第5項所述的聚醯亞胺樹脂層疊體,其中形成所述基材層的聚醯亞胺樹脂的玻璃轉移溫度為300℃以上。The polyimide resin laminate according to item 2 or item 5 of the scope of patent application, wherein the glass transition temperature of the polyimide resin forming the substrate layer is 300° C. or higher. 一種帶有功能層的聚醯亞胺膜,其特徵在於:其是使用如申請專利範圍第4項所述的聚醯亞胺樹脂層疊體,在所述卷曲抑制層與所述基材層的界面處進行剝離,將所述載體層及所述卷曲抑制層除去而成。A polyimide film with a functional layer, which is characterized in that it uses the polyimide resin laminate as described in item 4 of the scope of the patent application, and is formed between the curl-inhibiting layer and the substrate layer. The interface is peeled off, and the carrier layer and the curl suppression layer are removed. 一種帶有功能層的聚醯亞胺膜,其特徵在於:其是使用如申請專利範圍第7項所述的聚醯亞胺樹脂層疊體,在所述載體層與所述基材層的界面處進行剝離,將所述載體層及所述卷曲抑制層除去而成。A polyimide film with a functional layer, characterized in that it uses the polyimide resin laminate as described in item 7 of the scope of the patent application, at the interface between the carrier layer and the substrate layer It is formed by peeling off the carrier layer and the curl suppression layer. 一種聚醯亞胺樹脂層疊體的製造方法,其為製造如申請專利範圍第1項所述的聚醯亞胺樹脂層疊體的方法,並且其特徵在於:利用澆注法在所述載體層上塗敷所述卷曲抑制層及所述基材層。A method for manufacturing a polyimide resin laminate, which is a method for manufacturing the polyimide resin laminate as described in item 1 of the scope of the patent application, and is characterized in that: the carrier layer is coated by a casting method The curl suppression layer and the base material layer. 如申請專利範圍第12項所述的聚醯亞胺樹脂層疊體的製造方法,其使塗敷在所述載體層上的所述卷曲抑制層及所述基材層一體硬化。The method for producing a polyimide resin laminate as described in claim 12, which hardens the curl-inhibiting layer and the base layer coated on the carrier layer integrally. 如申請專利範圍第13項所述的聚醯亞胺樹脂層疊體的製造方法,其中所述澆注法為利用多層模頭或連續模頭的塗敷。The manufacturing method of the polyimide resin laminate as described in the 13th item of the scope of patent application, wherein the casting method is coating using a multilayer die or a continuous die.
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