JP5931672B2 - Polyimide laminate and method for producing the same - Google Patents

Polyimide laminate and method for producing the same Download PDF

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JP5931672B2
JP5931672B2 JP2012209667A JP2012209667A JP5931672B2 JP 5931672 B2 JP5931672 B2 JP 5931672B2 JP 2012209667 A JP2012209667 A JP 2012209667A JP 2012209667 A JP2012209667 A JP 2012209667A JP 5931672 B2 JP5931672 B2 JP 5931672B2
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polyimide
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support substrate
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laminate
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芳樹 須藤
芳樹 須藤
若菜 ▲高▼吉
若菜 ▲高▼吉
平石 克文
克文 平石
奈津子 岡▲崎▼
奈津子 岡▲崎▼
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Nippon Steel and Sumikin Chemical Co Ltd
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Priority to CN201910106754.8A priority patent/CN110077065A/en
Priority to CN201710367693.1A priority patent/CN107253376A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/02Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1067Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/20Adhesives in the form of films or foils characterised by their carriers
    • C09J7/22Plastics; Metallised plastics
    • C09J7/25Plastics; Metallised plastics based on macromolecular compounds obtained otherwise than by reactions involving only carbon-to-carbon unsaturated bonds
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/20Adhesives in the form of films or foils characterised by their carriers
    • C09J7/29Laminated material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/30Properties of the layers or laminate having particular thermal properties
    • B32B2307/306Resistant to heat

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Laminated Bodies (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)

Description

本発明は、ポリイミド積層体及びその製造方法に関し、詳しくは、支持基材上に透明性を有するポリイミド層が積層されたポリイミド積層体及びその製造方法に関する。   The present invention relates to a polyimide laminate and a method for producing the same, and more particularly to a polyimide laminate obtained by laminating a transparent polyimide layer on a support substrate and a method for producing the same.

液晶表示装置や有機EL表示装置等の表示装置は、テレビのような大型ディスプレイや、携帯電話、パソコン、スマートフォンなどの小型ディスプレイ等、各種のディスプレイ用途に使用されている。このうち、有機EL表示装置を例にすれば、ガラス基板上に薄膜トランジスタ(以下、TFT)を形成した上で、電極、発光層、電極を順次積層させて、最後に別途ガラス基板や多層薄膜等で気密封止して作られる。   Display devices such as liquid crystal display devices and organic EL display devices are used for various display applications such as large displays such as televisions and small displays such as mobile phones, personal computers, and smartphones. Among these, when an organic EL display device is taken as an example, a thin film transistor (hereinafter referred to as TFT) is formed on a glass substrate, an electrode, a light emitting layer, and an electrode are sequentially laminated, and finally a glass substrate, a multilayer thin film, etc. Made with a hermetic seal.

ここで、ガラス基板を樹脂基板へと置き換えることにより、薄型・軽量化と共にフレキシブル化が実現でき、表示装置の用途を更に広げることができる。例えば、非特許文献1及び2では、透明性の高いポリイミドを支持基材に適用した有機EL表示装置が提案されている。しかしながら、一般に、樹脂はガラスと比較して寸法安定性、透明性、耐熱性、耐湿性、ガスバリア性等に劣るため、ガラス並みの特性を有した樹脂の開発が現在進められている。   Here, by replacing the glass substrate with a resin substrate, it is possible to realize flexibility and a reduction in thickness and weight, thereby further expanding the application of the display device. For example, Non-Patent Documents 1 and 2 propose an organic EL display device in which highly transparent polyimide is applied to a support substrate. However, in general, resins are inferior to glass in terms of dimensional stability, transparency, heat resistance, moisture resistance, gas barrier properties, etc., and therefore, development of resins having properties similar to those of glass is currently underway.

例えば、特許文献1は、フレキシブルディスプレー用プラスチック基板として有用なポリイミド、及びその前駆体に係る発明に関し、シクロへキシルフェニルテトラカルボン酸等のような脂環式構造を含んだテトラカルボン酸類を用いて、各種ジアミンと反応させたポリイミドが透明性及び耐熱性に優れることを報告している。   For example, Patent Document 1 relates to a polyimide useful as a plastic substrate for a flexible display and an invention relating to a precursor thereof, using tetracarboxylic acids containing an alicyclic structure such as cyclohexylphenyltetracarboxylic acid. It has been reported that polyimides reacted with various diamines are excellent in transparency and heat resistance.

一方で、樹脂基板の利点を追及した場合に問題となるのが、樹脂基板自体の取り扱い性や寸法安定性である。すなわち、樹脂基板をフィルム状にして薄くしていくと、皺や割れの発生を防いだり、TFTや電極等の機能層を積層形成する際の位置精度や機能層を形成した後の寸法精度を維持するのが難しくなる。そこで、非特許文献3では、ガラス上に塗布して固着した樹脂基板に対し、所定の機能層を形成した後、EPLaR(Electronics on Plastic by Laser Release)プロセスと呼ばれる方法によりガラス側からレーザーを照射して、機能層を備えた樹脂基板をガラスから強制分離する方法が提案されている。   On the other hand, when the advantages of the resin substrate are pursued, the problem is the handleability and dimensional stability of the resin substrate itself. In other words, if the resin substrate is made into a thin film, the occurrence of wrinkles and cracks can be prevented, and the positional accuracy when forming functional layers such as TFTs and electrodes and the dimensional accuracy after forming the functional layers are increased. It becomes difficult to maintain. Therefore, in Non-Patent Document 3, a predetermined functional layer is formed on a resin substrate that is applied and fixed on glass, and then a laser is irradiated from the glass side by a method called an EPLaR (Electronics on Plastic by Laser Release) process. A method for forcibly separating a resin substrate having a functional layer from glass has been proposed.

また、非特許文献4には、ガラス上に剥離層を介してポリアミド酸溶液を塗布し、硬化させて得られたポリイミド基板に対して所定の機能層を設けた後、ガラスからポリイミド基板を剥離する方法が提案されている。この方法の場合、剥離層よりも広い面積でポリアミド酸溶液を塗布して、硬化後のポリイミド基板の周辺部がガラスに直接固着するようにしておき、この周辺部をガラス上に残すようにして機能層が形成された部分に切り込みを入れて、剥離層を介して形成されたポリイミド基板をガラスから分離する。   In Non-Patent Document 4, after applying a polyamic acid solution on glass through a release layer and curing the polyimide substrate obtained by providing a predetermined functional layer, the polyimide substrate is peeled off from the glass. A method has been proposed. In this method, the polyamic acid solution is applied in a larger area than the release layer so that the periphery of the cured polyimide substrate is directly fixed to the glass, and the periphery is left on the glass. A cut is made in the portion where the functional layer is formed, and the polyimide substrate formed through the release layer is separated from the glass.

これら非特許文献3及び4に記載された技術は、いずれもガラスを支持基材として用いて、ガラスに固定した樹脂基板に機能層を形成することで、樹脂基板の取り扱い性や寸法安定性を担保するものであるが、ガラスから樹脂基板を分離する上で特殊な手段を採用するため生産性が低いなどの問題がある。すなわち、非特許文献3に記載されたEPLaRプロセスを利用する方法では、樹脂基板をガラスから分離するのに時間が掛かるばかりか、樹脂基板の表面性状に悪影響を及ぼすおそれがある。また、非特許文献4に記載された方法では工程数が嵩むほか、樹脂基板として利用できない領域が発生して無駄を生じてしまう。そのため、樹脂基板の長所を活かしつつ、工業的に資する手段で使用することができる技術の開発が強く望まれている。   These technologies described in Non-Patent Documents 3 and 4 both use glass as a supporting base material, and form a functional layer on a resin substrate fixed to glass, thereby improving the handleability and dimensional stability of the resin substrate. However, there is a problem in that productivity is low because a special means is used to separate the resin substrate from the glass. That is, in the method using the EPLaR process described in Non-Patent Document 3, it takes time to separate the resin substrate from the glass, and the surface properties of the resin substrate may be adversely affected. In addition, the method described in Non-Patent Document 4 increases the number of processes and generates a region that cannot be used as a resin substrate, resulting in waste. Therefore, there is a strong demand for the development of technology that can be used by industrially contributing means while taking advantage of the advantages of the resin substrate.

なお、特許文献2及び3には、ポリイミドフィルムの製造方法に関する発明が記載されており、それぞれ所定のポリイミド層を備えた金属箔のポリイミド層上にポリアミック酸溶液を塗布し、加熱処理してイミド化されたポリイミドを引き剥がして、皺や割れ等の外観不良を抑えたポリイミドフィルムを製造する方法が示されているが、ここに示されたポリイミドフィルムは透明ではなく、また、ポリイミドが積層された状態でこれを樹脂基板として用いるようにすることは何ら記載されていない。   Patent Documents 2 and 3 describe inventions relating to a method for producing a polyimide film. A polyamic acid solution is applied on a polyimide layer of a metal foil provided with a predetermined polyimide layer, and heat-treated to form an imide. Although a method for producing a polyimide film that peels off the formed polyimide and suppresses appearance defects such as wrinkles and cracks is shown, the polyimide film shown here is not transparent, and polyimide is laminated. It is not described at all that this is used as a resin substrate.

特開2008-231327号公報JP 2008-231327 A 特許第4260530号公報Japanese Patent No. 4260530 特開2011-56825号公報JP 2011-56825 A

S. An et.Al.,“2.8-inch WQVGA Flexible AMOLED Using High Performance Low Temperature Polysilicon TFT on Plastic Substrates”, SID2010 DIGEST, p706(2010)S. An et. Al., “2.8-inch WQVGA Flexible AMOLED Using High Performance Low Temperature Polysilicon TFT on Plastic Substrates”, SID2010 DIGEST, p706 (2010) Oishi et.Al.,“Transparent PI for flexible display”,IDW‘11 FLX2/FMC4-1Oishi et. Al., “Transparent PI for flexible display”, IDW’11 FLX2 / FMC4-1 E.I. Haskal et. al. "Flexible OLED Displays Made with the EPLaR Process",Proc.Eurodisplay '07,pp.36-39 (2007)E.I. Haskal et. Al. "Flexible OLED Displays Made with the EPLaR Process", Proc. Eurodisplay '07, pp. 36-39 (2007) Cheng-Chung Lee et. al. "A Novel Approach to Make Flexible Active Matrix Displays",SID10 Digest,pp.810-813(2010)Cheng-Chung Lee et. Al. "A Novel Approach to Make Flexible Active Matrix Displays", SID10 Digest, pp.810-813 (2010)

そこで、本発明者らは、取り扱い性(ハンドリング性ともいう。)や寸法安定性等を確保しながら、耐熱性及び透明性に優れたポリイミドフィルムを樹脂基板として利用することができる手段について鋭意検討を重ねた結果、透明性を有するポリイミド層の背面側に支持基材を備えたポリイミド積層体であって、支持基材の表面を所定の性状を有したポリイミドにより形成して支持基材からポリイミド層からなるポリイミドフィルムを分離可能にすることで、従来技術の問題を全て解決することができることを見出し、本発明を完成させた。   Therefore, the present inventors have intensively studied a means that can use a polyimide film excellent in heat resistance and transparency as a resin substrate while ensuring handling (also referred to as handling) and dimensional stability. As a result of overlaying, a polyimide laminate having a support base on the back side of a transparent polyimide layer, the surface of the support base being formed from polyimide having a predetermined property, and the polyimide from the support base It has been found that all the problems of the prior art can be solved by making the polyimide film composed of layers separable, and the present invention has been completed.

したがって、本発明の目的は、透明性を有するポリイミドフィルムを樹脂基材として利用しながらも、取り扱い性や寸法安定性に優れ、尚且つ、支持基材からポリイミドフィルムを容易に分離することができるポリイミド積層体、及びその製造方法を提供することにある。   Therefore, the object of the present invention is to use a transparent polyimide film as a resin base material, and is excellent in handleability and dimensional stability, and can easily separate the polyimide film from the support base material. It is providing the polyimide laminated body and its manufacturing method.

すなわち、本発明の要旨は以下のとおりである。
(1)ポリイミド層の背面側に支持基材を備えたポリイミド積層体であって、ポリイミド層が単層又は複数層からなり、少なくとも支持基材と接する層が含フッ素ポリイミドであると共に、該ポリイミド層440nmから780nmの波長領域での透過率が70%以上であり、また、ポリイミド層と支持基材との界面における支持基材の表面は、ガラス転移温度Tgが300℃以上の耐熱性ポリイミドにより形成されると共に、表面粗さRaが100nm以下であり、支持基材とポリイミド層との接着強度が1N/m以上500N/m以下であって、支持基材から前記ポリイミド層からなるポリイミドフィルムを分離可能にしたことを特徴とするポリイミド積層体。
(2)支持基材とポリイミド層との接着強度が5N/m以上300N/m以下である(1)に記載のポリイミド積層体。
(3)支持基材における耐熱性ポリイミドが、下記構造単位を有するポリイミドである(1)又は(2)に記載のポリイミド積層体。

Figure 0005931672
(4)ポリイミド層の熱膨張係数が15ppm/K以下である(1)〜(3)のいずれかに記載のポリイミド積層体。
(5)ポリイミド層の厚さが3μm以上50μm以下であり、また、支持基材の厚さが10μm以上100μm以下である(1)〜(4)のいずれかに記載のポリイミド積層体。
(6)支持基材から剥離した後のポリイミドフィルムの剥離面は、表面粗さRaが100nm以下である(1)〜(5)のいずれかに記載のポリイミド積層体。
(7)ポリイミド層の表面側に所定の機能層を形成した後、背面側の支持基材を分離して用いる(1)〜(6)のいずれかに記載のポリイミド積層体。
(8)支持基材の背面側に更に粘着層を備える(1)〜(7)のいずれかに記載のポリイミド積層体。
That is, the gist of the present invention is as follows.
(1) A polyimide laminate comprising a support base on the back side of the polyimide layer , the polyimide layer comprising a single layer or a plurality of layers, and at least the layer in contact with the support base is a fluorine-containing polyimide, and the polyimide and the transmittance at 440nm from 780nm wavelength region of the layer 70% or more, and the surface of the supporting substrate at the interface between the polyimide layer and the supporting substrate, a glass transition temperature Tg is above 300 ° C. heat-resistant polyimide The surface roughness Ra is 100 nm or less, the adhesive strength between the support substrate and the polyimide layer is 1 N / m or more and 500 N / m or less, and the polyimide film comprising the polyimide layer from the support substrate A polyimide laminate characterized in that it can be separated.
(2) The polyimide laminate according to (1), wherein the adhesive strength between the support substrate and the polyimide layer is 5 N / m or more and 300 N / m or less .
(3) The polyimide laminated body as described in (1) or (2) whose heat resistant polyimide in a support base material is a polyimide which has the following structural unit.
Figure 0005931672
(4) The polyimide laminated body in any one of (1)-(3) whose coefficient of thermal expansion of a polyimide layer is 15 ppm / K or less.
(5) The polyimide laminated body in any one of (1)-(4) whose thickness of a polyimide layer is 3 micrometers or more and 50 micrometers or less, and whose thickness of a support base material is 10 micrometers or more and 100 micrometers or less.
(6) The polyimide laminate according to any one of (1) to (5), wherein the release surface of the polyimide film after peeling from the support substrate has a surface roughness Ra of 100 nm or less.
(7) The polyimide laminate according to any one of (1) to (6), wherein a predetermined functional layer is formed on the surface side of the polyimide layer, and then the support substrate on the back side is separated and used.
(8) The polyimide laminate according to any one of (1) to (7), further including an adhesive layer on the back side of the support substrate.

(9)ポリイミド層の背面側に支持基材を備えたポリイミド積層体の製造方法であって、ガラス転移温度Tgが300℃以上であると共に、表面粗さRaが100nm以下の耐熱性ポリイミドにより形成された耐熱ポリイミド面を有する長尺状の支持基材をロール・トゥ・ロールプロセスで搬送しながら、長尺状の支持基材の耐熱ポリイミド面上に、含フッ素ポリアミド酸の樹脂溶液を塗布し、支持基材ごと200℃以上に加熱処理してポリアミド酸をイミド化させて、支持基材上に440nmから780nmの波長領域での透過率が70%以上のポリイミド層を形成すると共に、支持基材とポリイミド層との接着強度を1N/m以上500N/m以下にして、支持基材からポリイミド層からなるポリイミドフィルムを分離可能にすることを特徴とするポリイミド積層体の製造方法。
(10)ポリアミド酸の加熱処理条件が、加熱時の最高到達温度から20℃低い温度までの高温加熱温度域での加熱時間が15分以内である(9)に記載のポリイミド積層体の製造方法。
(11)支持基材における耐熱ポリイミド面を形成する耐熱性ポリイミドが、下記構造単位を有するポリイミドである(9)又は(10)に記載のポリイミド積層体の製造方法。

Figure 0005931672
(12)(9)〜(11)のいずれかに記載された方法により得られたポリイミド積層体から、ポリイミド層を分離することを特徴とするポリイミドフィルムの製造方法。 (9) A method for producing a polyimide laminate comprising a support base on the back side of a polyimide layer, which is formed of a heat-resistant polyimide having a glass transition temperature Tg of 300 ° C. or higher and a surface roughness Ra of 100 nm or less. While a long support substrate having a heat-resistant polyimide surface is conveyed by a roll-to-roll process, a fluorine-containing polyamic acid resin solution is applied onto the heat-resistant polyimide surface of the long support substrate. The support substrate is heat-treated at 200 ° C. or more to imidize the polyamic acid to form a polyimide layer having a transmittance of 70% or more in the wavelength region of 440 nm to 780 nm on the support substrate. The adhesive strength between the material and the polyimide layer is set to 1 N / m or more and 500 N / m or less, and the polyimide film composed of the polyimide layer can be separated from the support substrate. Method for manufacturing a polyimide laminate and symptoms.
(10) The method for producing a polyimide laminate according to (9), wherein the heat treatment condition of the polyamic acid is within 15 minutes in the high temperature heating temperature range from the highest temperature achieved during heating to a temperature lower by 20 ° C. .
(11) The method for producing a polyimide laminate according to (9) or (10), wherein the heat-resistant polyimide forming the heat-resistant polyimide surface in the support substrate is a polyimide having the following structural units.
Figure 0005931672
(12) A method for producing a polyimide film, comprising separating a polyimide layer from a polyimide laminate obtained by the method described in any one of (9) to (11).

本発明のポリイミド積層体によれば、透明性及び耐熱性に優れたポリイミド層が所定の支持基材と一体化されていることから、取り扱い性や寸法安定性等を確保することができ、尚且つ、支持基材からポリイミド層を容易に分離してポリイミドフィルムにできることから、当該ポリイミドフィルムは樹脂基板として好適に利用することができる。また、本発明のポリイミド積層体は、積層体自体の耐熱性も高く、高温での熱処理プロセスにおいても適用可能なばかりでなく、厚みを薄くすることでフレキシブル性も有し、ロール・トゥ・ロールプロセスで搬送させる使用方法にも適用可能であることから、タッチパネルや表示装置等の製造に好適に用いることができる。   According to the polyimide laminate of the present invention, since a polyimide layer excellent in transparency and heat resistance is integrated with a predetermined support base material, handling property, dimensional stability, etc. can be ensured, and In addition, since the polyimide layer can be easily separated from the support base material into a polyimide film, the polyimide film can be suitably used as a resin substrate. In addition, the polyimide laminate of the present invention has high heat resistance of the laminate itself and is applicable not only in a heat treatment process at high temperature, but also has flexibility by reducing the thickness, and roll-to-roll. Since it is applicable also to the usage method conveyed by a process, it can be used suitably for manufacture of a touch panel, a display apparatus, etc.

図1は、本発明のポリイミド積層体の一態様を示した断面図である。FIG. 1 is a cross-sectional view showing an embodiment of the polyimide laminate of the present invention. 図2は、本発明のポリイミド積層体の別の一態様(ポリイミド層が複数層である場合)を示した断面図である。FIG. 2 is a cross-sectional view showing another embodiment of the polyimide laminate of the present invention (when the polyimide layer is a plurality of layers). 図3は、本発明のポリイミド積層体の別の一態様(支持基材層が複数層である場合)を示した断面図である。FIG. 3 is a cross-sectional view showing another embodiment of the polyimide laminate of the present invention (when the supporting base material layer is a plurality of layers).

以下、本発明を詳細に説明する。
本発明のポリイミド積層体は、ポリイミド層と支持基材を必須の構成部材とし、図1に示すようにポリイミド層1の背面側に支持基材2を備える。ポリイミド積層体10におけるポリイミド層1の厚さは、3μm以上50μm以下であることが好ましい。ポリイミド層1の厚さが3μmに満たないと、これを絶縁層として用いる場合に絶縁性能が不足するおそれがあるばかりでなく、ポリイミド積層体10からの分離後のポリイミドフィルムのハンドリング性にも劣り、一方、50μmを超えると分離されたポリイミドフィルムのフレキシブル性、透明性が低下するおそれがある。支持基材2の厚さは、分離しやすければ特に制限されるものではないが、10μm以上100μm以下であることが好ましい。支持基材2の厚さが10μmに満たないと支持基材2としての支持性が十分発揮できず、搬送性、ハンドリング性が低下するおそれがあり、100μmを超えると製品コストに不利となる。
Hereinafter, the present invention will be described in detail.
The polyimide laminate of the present invention comprises a polyimide layer and a supporting substrate as essential constituent members, and includes a supporting substrate 2 on the back side of the polyimide layer 1 as shown in FIG. The thickness of the polyimide layer 1 in the polyimide laminate 10 is preferably 3 μm or more and 50 μm or less. If the thickness of the polyimide layer 1 is less than 3 μm, not only the insulation performance may be insufficient when it is used as an insulating layer, but also the handling property of the polyimide film after separation from the polyimide laminate 10 is inferior. On the other hand, if it exceeds 50 μm, the flexibility and transparency of the separated polyimide film may be lowered. The thickness of the support substrate 2 is not particularly limited as long as it can be easily separated, but is preferably 10 μm or more and 100 μm or less. If the thickness of the support base material 2 is less than 10 μm, the supportability as the support base material 2 cannot be sufficiently exhibited, and the transportability and handling property may be deteriorated. If the thickness exceeds 100 μm, the product cost is disadvantageous.

本発明のポリイミド積層体10は、支持基材2とポリイミド層1とを容易に分離することが可能である。本発明では、この分離容易性を発現するために、支持基材2、ポリイミド層1のいずれか一方もしくは両方を以下に示す特定の部材を適用することが好ましい。   The polyimide laminate 10 of the present invention can easily separate the support substrate 2 and the polyimide layer 1. In this invention, in order to express this ease of separation, it is preferable to apply the specific member which shows either one or both of the support base material 2 and the polyimide layer 1 below.

先ず、本発明で用いる支持基材2について説明する。
本発明で用いられる支持基材2は、図1(A)に示すように支持基材2が樹脂基材からなる場合や、図3に示すように金属箔上2bに樹脂層2aを形成した複合基材が挙げられ、ポリイミド層1との分離が容易で所定の特性を示すものであれば特に限定されるものではない。ポリイミド層1との分離が容易であるとは、支持基材2とポリイミド層1との接着強度が1N/m以上500N/m以下の範囲にあるものを言うが、好ましくは5N/m以上300N/m以下、より好ましくは10N/m以上200N/m以下である。支持基材2とポリイミド層1の剥離強度をこの範囲とすることで、皺、破断等の外観上の不良がなく、工業上安定的に生産可能な透明ポリイミドフィルムを与えるポリイミド積層体10を得ることができる。
First, the support substrate 2 used in the present invention will be described.
The support base material 2 used in the present invention has a resin layer 2a formed on the metal foil 2b as shown in FIG. 3 when the support base material 2 is made of a resin base material as shown in FIG. A composite base material is mentioned, and it is not particularly limited as long as it can be easily separated from the polyimide layer 1 and exhibits predetermined characteristics. “Separation from the polyimide layer 1 is easy” means that the adhesive strength between the support base 2 and the polyimide layer 1 is in the range of 1 N / m to 500 N / m, preferably 5 N / m to 300 N. / M or less, more preferably 10 N / m or more and 200 N / m or less. By setting the peel strength between the support substrate 2 and the polyimide layer 1 within this range, there is obtained a polyimide laminate 10 that gives a transparent polyimide film that can be produced industrially stably without defects in appearance such as wrinkles and fractures. be able to.

本発明のポリイミド積層体10は、タッチパネルや表示装置等の製造に用いることができるが、そこでは耐熱性が必要とされる場合がある。したがって、支持基材2が樹脂基材からなる場合には、例えばポリイミド基材が好ましいものとして例示され、また、複合基材からなる場合には、金属箔とポリイミドとの積層体が好ましいものとして例示される。   The polyimide laminate 10 of the present invention can be used in the manufacture of touch panels, display devices, etc., but heat resistance may be required there. Therefore, when the support base material 2 is made of a resin base material, for example, a polyimide base material is exemplified, and when it is made of a composite base material, a laminate of metal foil and polyimide is preferred. Illustrated.

ここで、少なくともポリイミド層1との界面をなす支持基材2の表面は、ガラス転移温度Tgが300℃以上の耐熱性ポリイミドにより形成されることが必要である。この支持基材表面の耐熱ポリイミドのガラス転移温度Tgが300℃に満たないと、ポリイミド積層体10としての耐熱性が低下する他、ポリイミド層1との分離性が悪化する恐れがある。また、耐熱ポリイミド面の表面粗さRaは100nm以下であることが必要である。表面粗さRaが100nmを越えると、やはりポリイミド層1との分離性が悪化し、ポリイミドの分離時における変形の原因となるばかりではなく、その透明性も低下しやすくなる。   Here, at least the surface of the support base 2 that forms an interface with the polyimide layer 1 needs to be formed of a heat-resistant polyimide having a glass transition temperature Tg of 300 ° C. or higher. If the glass transition temperature Tg of the heat-resistant polyimide on the surface of the supporting substrate is less than 300 ° C., the heat resistance as the polyimide laminate 10 is lowered and the separability from the polyimide layer 1 may be deteriorated. Further, the surface roughness Ra of the heat-resistant polyimide surface needs to be 100 nm or less. If the surface roughness Ra exceeds 100 nm, the separation property from the polyimide layer 1 is deteriorated, which not only causes deformation at the time of separation of the polyimide, but also its transparency tends to be lowered.

次に、本発明のポリイミド積層体10を構成するポリイミド層1について説明する。
本発明のポリイミド積層体10のポリイミド層1は440nmから780nmの波長領域での透過率が70%以上を示す(本明細書中では、この透過率特性を満たす場合、透明性を示すものとして表現する)。ポリイミド層1は支持基材2上に直接設けられているが、ポリイミド層1は単層のみからなるものであってもよく、また、例えば、図2に示すように複数層(1a,1b,1c)からなるものであってもよい。ポリイミド層1が複数層からなる場合、複数層全体で上記透過率を示す。
Next, the polyimide layer 1 which comprises the polyimide laminated body 10 of this invention is demonstrated.
The polyimide layer 1 of the polyimide laminate 10 of the present invention exhibits a transmittance of 70% or more in the wavelength region of 440 nm to 780 nm (in the present specification, when this transmittance characteristic is satisfied, it is expressed as indicating transparency) To do). Although the polyimide layer 1 is directly provided on the support substrate 2, the polyimide layer 1 may be composed of only a single layer. For example, as shown in FIG. 2, a plurality of layers (1a, 1b, It may be composed of 1c). When the polyimide layer 1 is composed of a plurality of layers, the transmittance is exhibited by the whole of the plurality of layers.

本発明のポリイミド積層体10において、支持基材上に設けられるポリイミド層1と、このポリイミド層1との界面をなす支持基材2の表面は、それぞれ所定のポリイミドによって構成される。   In the polyimide laminate 10 of the present invention, the polyimide layer 1 provided on the support substrate and the surface of the support substrate 2 that forms the interface with the polyimide layer 1 are each composed of a predetermined polyimide.

ポリイミドは、通常、原料である酸無水物とジアミンを重合して得られ、下記一般式(1)で表される。

Figure 0005931672
式中、Ar1は4価の有機基を表し、Ar2は2価の有機基であるが、耐熱性の観点から、Ar1、Ar2の少なくとも一方は、芳香族残基であることが好ましい。 A polyimide is usually obtained by polymerizing an acid anhydride as a raw material and a diamine, and is represented by the following general formula (1).
Figure 0005931672
In the formula, Ar 1 represents a tetravalent organic group and Ar 2 is a divalent organic group. From the viewpoint of heat resistance, at least one of Ar 1 and Ar 2 may be an aromatic residue. preferable.

ここで、ポリイミド原料となる酸無水物として、代表的なものを例示すると、ピロメリット酸二無水物、3,3',4,4'-ベンゾフェノンテトラカルボン酸二無水物、2,2',3,3'-ベンゾフェノンテトラカルボン酸二無水物、2,3,3',4'-ベンゾフェノンテトラカルボン酸二無水物、ナフタレン-2,3,6,7-テトラカルボン酸二無水物、ナフタレン-1,2,5,6-テトラカルボン酸二無水物、ナフタレン-1,2,4,5-テトラカルボン酸二無水物、ナフタレン-1,4,5,8-テトラカルボン酸二無水物、ナフタレン-1,2,6,7-テトラカルボン酸二無水物、4,8-ジメチル-1,2,3,5,6,7-ヘキサヒドロナフタレン-1,2,5,6-テトラカルボン酸二無水物、4,8-ジメチル-1,2,3,5,6,7-ヘキサヒドロナフタレン-2,3,6,7-テトラカルボン酸二無水物、2,6-ジクロロナフタレン-1,4,5,8-テトラカルボン酸二無水物、2,7-ジクロロナフタレン-1,4,5,8-テトラカルボン酸二無水物、2,3,6,7-テトラクロロナフタレン-1,4,5,8-テトラカルボン酸二無水物、1,4,5,8-テトラクロロナフタレン-2,3,6,7-テトラカルボン酸二無水物、3,3',4,4'-ビフェニルテトラカルボン酸二無水物、2,2',3,3'-ビフェニルテトラカルボン酸二無水物、2,3,3',4'-ビフェニルテトラカルボン酸二無水物、3,3'',4,4''-p-テルフェニルテトラカルボン酸二無水物、2,2'',3,3''-p-テルフェニルテトラカルボン酸二無水物、2,3,3'',4''-p-テルフェニルテトラカルボン酸二無水物、2,2-ビス(2,3-ジカルボキシフェニル)-プロパン二無水物、2,2-ビス(3,4-ジカルボキシフェニル)-プロパン二無水物、ビス(2,3-ジカルボキシフェニル)エーテル二無水物、ビス(2,3-ジカルボキシフェニル)メタン二無水物、ビス(3.4-ジカルボキシフェニル)メタン二無水物、ビス(2,3-ジカルボキシフェニル)スルホン二無水物、ビス(3,4-ジカルボキシフェニル)スルホン二無水物、1,1-ビス(2,3-ジカルボキシフェニル)エタン二無水物、1,1-ビス(3,4-ジカルボキシフェニル)エタン二無水物、ペリレン-2,3,8,9-テトラカルボン酸二無水物、ペリレン-3,4,9,10-テトラカルボン酸二無水物、ペリレン-4,5,10,11-テトラカルボン酸二無水物、ペリレン-5,6,11,12-テトラカルボン酸二無水物、フェナンスレン-1,2,7,8-テトラカルボン酸二無水物、フェナンスレン-1,2,6,7-テトラカルボン酸二無水物、フェナンスレン-1,2,9,10-テトラカルボン酸二無水物、シクロペンタン-1,2,3,4-テトラカルボン酸二無水物、ピラジン-2,3,5,6-テトラカルボン酸二無水物、ピロリジン-2,3,4,5-テトラカルボン酸二無水物、チオフェン-2,3,4,5-テトラカルボン酸二無水物、4,4'-オキシジフタル酸二無水物などが挙げられ、これらは単独で又は2種以上混合して用いることができる。   Here, typical acid anhydrides used as polyimide raw materials are exemplified by pyromellitic dianhydride, 3,3 ′, 4,4′-benzophenonetetracarboxylic dianhydride, 2,2 ′, 3,3'-benzophenonetetracarboxylic dianhydride, 2,3,3 ', 4'-benzophenonetetracarboxylic dianhydride, naphthalene-2,3,6,7-tetracarboxylic dianhydride, naphthalene- 1,2,5,6-tetracarboxylic dianhydride, naphthalene-1,2,4,5-tetracarboxylic dianhydride, naphthalene-1,4,5,8-tetracarboxylic dianhydride, naphthalene -1,2,6,7-tetracarboxylic dianhydride, 4,8-dimethyl-1,2,3,5,6,7-hexahydronaphthalene-1,2,5,6-tetracarboxylic acid bis Anhydride, 4,8-dimethyl-1,2,3,5,6,7-hexahydronaphthalene-2,3,6,7-tetracarboxylic dianhydride, 2,6-dichloronaphthalene-1,4 , 5,8-Tetracarboxylic dianhydride, 2,7-dichloronaphthalene-1,4 , 5,8-tetracarboxylic dianhydride, 2,3,6,7-tetrachloronaphthalene-1,4,5,8-tetracarboxylic dianhydride, 1,4,5,8-tetrachloronaphthalene -2,3,6,7-tetracarboxylic dianhydride, 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 2,2', 3,3'-biphenyltetracarboxylic dianhydride 2,3,3 ', 4'-biphenyltetracarboxylic dianhydride, 3,3``, 4,4' '-p-terphenyltetracarboxylic dianhydride, 2,2' ', 3 , 3``-p-terphenyltetracarboxylic dianhydride, 2,3,3 '', 4 ''-p-terphenyltetracarboxylic dianhydride, 2,2-bis (2,3-di Carboxyphenyl) -propane dianhydride, 2,2-bis (3,4-dicarboxyphenyl) -propane dianhydride, bis (2,3-dicarboxyphenyl) ether dianhydride, bis (2,3- Dicarboxyphenyl) methane dianhydride, bis (3.4-dicarboxyphenyl) methane dianhydride, bis (2,3-dicarbo Cyphenyl) sulfone dianhydride, bis (3,4-dicarboxyphenyl) sulfone dianhydride, 1,1-bis (2,3-dicarboxyphenyl) ethane dianhydride, 1,1-bis (3,4 -Dicarboxyphenyl) ethane dianhydride, perylene-2,3,8,9-tetracarboxylic dianhydride, perylene-3,4,9,10-tetracarboxylic dianhydride, perylene-4,5, 10,11-tetracarboxylic dianhydride, perylene-5,6,11,12-tetracarboxylic dianhydride, phenanthrene-1,2,7,8-tetracarboxylic dianhydride, phenanthrene-1,2 , 6,7-tetracarboxylic dianhydride, phenanthrene-1,2,9,10-tetracarboxylic dianhydride, cyclopentane-1,2,3,4-tetracarboxylic dianhydride, pyrazine-2 , 3,5,6-tetracarboxylic dianhydride, pyrrolidine-2,3,4,5-tetracarboxylic dianhydride, thiophene-2,3,4,5-tetracarboxylic dianhydride, 4, 4'-oxydiphthalic dianhydride The thing etc. are mentioned, These can be used individually or in mixture of 2 or more types.

また、ポリイミド原料となるジアミンとして、代表的なものを例示すると、4,6-ジメチル-m-フェニレンジアミン、2,5-ジメチル-p-フェニレンジアミン、2,4-ジアミノメシチレン、4,4'-メチレンジ-o-トルイジン、4,4'-メチレンジ-2,6-キシリジン、4,4'-メチレン-2,6-ジエチルアニリン、2,4-トルエンジアミン、m-フェニレンジアミン、p-フェニレンジアミン、4,4'-ジアミノジフェニルプロパン、3,3'-ジアミノジフェニルプロパン、4,4'-ジアミノジフェニルエタン、3,3'-ジアミノジフェニルエタン、4,4'-ジアミノジフェニルメタン、3,3'-ジアミノジフェニルメタン、2,2-ビス[4-(4-アミノフェノキシ)フェニル]プロパン、4,4'-ジアミノジフェニルスルフィド、3,3'-ジアミノジフェニルスルフィド、4,4'-ジアミノジフェニルスルホン、3,3'-ジアミノジフェニルスルホン、3,3'-ジアミノジフェニルエーテル、4,4'-ジアミノジフェニルエーテル、3, 4'-ジアミノジフェニルエーテル、1,3-ビス(3-アミノフェノキシ)ベンゼン、1,3-ビス(4-アミノフェノキシ)ベンゼン、1,4-ビス(4-アミノフェノキシ)ベンゼン、ベンジジン、3,3'-ジアミノビフェニル、3,3'-ジメチル-4,4'-ジアミノビフェニル、3,3'-ジメトキシベンジジン、4,4'-ジアミノ-p-テルフェニル、3,3'-ジアミノ-p-テルフェニル、ビス(p-アミノシクロヘキシル)メタン、ビス(p-β-アミノ-t-ブチルフェニル)エーテル、ビス(p-β-メチル-δ-アミノペンチル)ベンゼン、p-ビス(2-メチル-4-アミノペンチル)ベンゼン、p-ビス(1,1-ジメチル-5-アミノペンチル)ベンゼン、1,5-ジアミノナフタレン、2,6-ジアミノナフタレン、2,4-ビス(β-アミノ-t-ブチル)トルエン、2,4-ジアミノトルエン、m-キシレン-2,5-ジアミン、p-キシレン-2,5-ジアミン、m-キシリレンジアミン、p-キシリレンジアミン、2,6-ジアミノピリジン、2,5-ジアミノピリジン、2,5-ジアミノ-1,3,4-オキサジアゾール、ピペラジンなどが挙げられ、これらは単独で又は2種以上混合して用いることができる。   Moreover, typical examples of the diamine used as the polyimide raw material include 4,6-dimethyl-m-phenylenediamine, 2,5-dimethyl-p-phenylenediamine, 2,4-diaminomesitylene, 4,4 ′. -Methylenedi-o-toluidine, 4,4'-methylenedi-2,6-xylidine, 4,4'-methylene-2,6-diethylaniline, 2,4-toluenediamine, m-phenylenediamine, p-phenylenediamine 4,4'-diaminodiphenylpropane, 3,3'-diaminodiphenylpropane, 4,4'-diaminodiphenylethane, 3,3'-diaminodiphenylethane, 4,4'-diaminodiphenylmethane, 3,3'- Diaminodiphenylmethane, 2,2-bis [4- (4-aminophenoxy) phenyl] propane, 4,4'-diaminodiphenyl sulfide, 3,3'-diaminodiphenyl sulfide, 4,4'-diaminodiphenyl sulfone, 3, 3'-diaminodiphenylsulfone, 3,3'- Diaminodiphenyl ether, 4,4'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 1,3-bis (3-aminophenoxy) benzene, 1,3-bis (4-aminophenoxy) benzene, 1,4-bis (4-Aminophenoxy) benzene, benzidine, 3,3'-diaminobiphenyl, 3,3'-dimethyl-4,4'-diaminobiphenyl, 3,3'-dimethoxybenzidine, 4,4'-diamino-p- Terphenyl, 3,3'-diamino-p-terphenyl, bis (p-aminocyclohexyl) methane, bis (p-β-amino-t-butylphenyl) ether, bis (p-β-methyl-δ-amino Pentyl) benzene, p-bis (2-methyl-4-aminopentyl) benzene, p-bis (1,1-dimethyl-5-aminopentyl) benzene, 1,5-diaminonaphthalene, 2,6-diaminonaphthalene, 2,4-bis (β-amino-t-butyl) toluene, 2,4-diaminotoluene, m-xylene-2 , 5-diamine, p-xylene-2,5-diamine, m-xylylenediamine, p-xylylenediamine, 2,6-diaminopyridine, 2,5-diaminopyridine, 2,5-diamino-1,3 1,4-oxadiazole, piperazine and the like, and these can be used alone or in admixture of two or more.

このうち、ポリイミド層1との界面をなす、支持基材2の表面を構成する耐熱性ポリイミドは、ガラス転移温度Tgが300℃以上である必要があるが、好ましくは、ビフェニルテトラカルボン酸二無水物とフェニレンジアミンとからなる下記構造単位を主成分とするポリイミドであるのがよく、

Figure 0005931672
特には、下記で表される構造単位を主成分とするポリイミドであるのがよい。
Figure 0005931672
なお、ここで言う主成分とは、耐熱性ポリイミドを構成する構造単位の50モル%以上を占めることを意味し、好ましくは80モル%以上である。 Of these, the heat-resistant polyimide constituting the surface of the supporting substrate 2 that forms the interface with the polyimide layer 1 needs to have a glass transition temperature Tg of 300 ° C. or higher, preferably biphenyltetracarboxylic dianhydride. It is good that it is a polyimide whose main component is the following structural unit consisting of a product and phenylenediamine,
Figure 0005931672
In particular, it is good that it is a polyimide which has the structural unit represented below as a main component.
Figure 0005931672
In addition, the main component said here means occupying 50 mol% or more of the structural unit which comprises heat resistant polyimide, Preferably it is 80 mol% or more.

一方、本発明のポリイミド積層体10における支持基材2上のポリイミド層1は、支持基材2に上記の好ましいポリイミドを用いた場合、分離が容易であるため透明のポリイミド層を与えるものであれば特に制限なく用いることができるが、支持基材表面に上記の好ましいポリイミドを用いない場合や、より分離を容易にしたい場合には、支持基材2と接する層に含フッ素ポリイミドを適用することが好ましい。このことは、ポリイミド層1が単層からなる場合は、そのポリイミドが含フッ素ポリイミドであることを意味し、図2に示すようにポリイミド層が複数層からなる場合には、支持基材表面の耐熱ポリイミドと接する層1aが含フッ素ポリイミドであることを意味する。   On the other hand, the polyimide layer 1 on the support base material 2 in the polyimide laminate 10 of the present invention can provide a transparent polyimide layer because the above-mentioned preferable polyimide is used for the support base material 2 so that separation is easy. Although it can be used without particular limitation, if the above-mentioned preferred polyimide is not used on the surface of the support substrate or if it is desired to make separation easier, apply fluorine-containing polyimide to the layer in contact with the support substrate 2. Is preferred. This means that when the polyimide layer 1 is composed of a single layer, the polyimide is a fluorine-containing polyimide. When the polyimide layer is composed of a plurality of layers as shown in FIG. It means that the layer 1a in contact with the heat-resistant polyimide is a fluorine-containing polyimide.

含フッ素ポリイミドとは、ポリイミド構造中にフッ素原子を有するものを指し、ポリイミド原料である酸無水物およびジアミンの少なくとも一方に、フッ素含有基を有するものである。このような含フッ素ポリイミドとしては、上記一般式(1)中、Ar2が下記一般式(2)又は一般式(3)で表されるものとして例示される。

Figure 0005931672
〔ここで、一般式(2)又は一般式(3)におけるR1〜R8は、互いに独立に水素原子、フッ素原子、炭素数1〜5までのアルキル基若しくはアルコキシ基、又はフッ素置換炭化水素基であり、一般式(2)にあっては、R1〜R4のうち少なくとも一つはフッ素原子又はフッ素置換炭化水素基であり、また、一般式(3)にあっては、R1〜R8のうち少なくとも一つはフッ素原子又はフッ素置換炭化水素基である。〕 The fluorine-containing polyimide refers to one having a fluorine atom in the polyimide structure, and has a fluorine-containing group in at least one of an acid anhydride and a diamine which are polyimide raw materials. Such fluorinated polyimide, in the general formula (1), Ar 2 is exemplified as those represented by the following general formula (2) or general formula (3).
Figure 0005931672
[Wherein, R 1 to R 8 in the general formula (2) or the general formula (3) are each independently a hydrogen atom, a fluorine atom, an alkyl group or an alkoxy group having 1 to 5 carbon atoms, or a fluorine-substituted hydrocarbon. In the general formula (2), at least one of R 1 to R 4 is a fluorine atom or a fluorine-substituted hydrocarbon group, and in the general formula (3), R 1 at least one of to R 8 is a fluorine atom or a fluorine-substituted hydrocarbon group. ]

1〜R8の好適な具体的としては、−H、−CH3、−OCH3、−F、−CF3などが挙げられるが、式(2)又は式(3)において少なくとも一つの置換基が、−F又は−CF3の何れかであるのがよい。 Preferable specific examples of R 1 to R 8 include —H, —CH 3 , —OCH 3 , —F, —CF 3, etc., and at least one substitution in formula (2) or formula (3) group, may be between either -F or -CF 3.

また、含フッ素ポリイミドを形成する際の一般式(1)中のAr1の具体例としては、例えば、以下のような4価の酸無水物残基が挙げられる。

Figure 0005931672
Specific examples of Ar 1 in the general formula (1) when forming the fluorine-containing polyimide include, for example, the following tetravalent acid anhydride residues.
Figure 0005931672

また、含フッ素ポリイミドを形成する際、一般式(1)におけるAr2を与える具体的なジアミン残基としては、例えば、以下のものが挙げられる。

Figure 0005931672
Also, when forming a fluorine-containing polyimide, as a specific diamine residue give Ar 2 in the general formula (1), for example, include the following.
Figure 0005931672

ポリイミド層1は、耐熱性が高く、熱膨張係数が15ppm/K以下であることが好ましく、上記で例示したポリイミド樹脂の中でも、下記式(4)又は(5)で表される構造単位を80モル%以上の割合で有するものが適している。

Figure 0005931672
The polyimide layer 1 has high heat resistance and preferably has a thermal expansion coefficient of 15 ppm / K or less. Among the polyimide resins exemplified above, the structural unit represented by the following formula (4) or (5) is 80 Those having a proportion of mol% or more are suitable.
Figure 0005931672

上記で説明した各種ポリイミドは、ポリアミド酸をイミド化して得られるが、ここで、ポリアミド酸の樹脂溶液は、原料であるジアミンと酸二無水物とを実質的に等モル使用し、有機溶媒中で反応させることによって得ることができる。より具体的には、窒素気流下にN,N−ジメチルアセトアミドなどの有機極性溶媒にジアミンを溶解させた後、テトラカルボン酸二無水物を加えて、室温で5時間程度反応させることにより得ることができる。塗工時の膜厚均一化と得られるポリイミドフィルムの機械強度の観点から、得られたポリアミド酸の重量平均分子量は1万から30万が好ましい。なお、ポリイミド層の好ましい分子量範囲もポリアミド酸と同じ分子量範囲である。   The various polyimides described above are obtained by imidizing polyamic acid. Here, the polyamic acid resin solution uses substantially equimolar amounts of diamine and acid dianhydride as raw materials in an organic solvent. It can obtain by making it react. More specifically, it is obtained by dissolving diamine in an organic polar solvent such as N, N-dimethylacetamide under a nitrogen stream, adding tetracarboxylic dianhydride, and reacting at room temperature for about 5 hours. Can do. The weight average molecular weight of the obtained polyamic acid is preferably 10,000 to 300,000 from the viewpoint of uniform film thickness during coating and mechanical strength of the resulting polyimide film. In addition, the preferable molecular weight range of a polyimide layer is also the same molecular weight range as a polyamic acid.

ポリイミドを一般式(4)又は(5)の構造に係るポリイミドとした場合、そのポリイミド以外に最大20モル%未満の割合で添加されてもよいその他のポリイミドについては、特に限定されるものではなく、一般的な酸無水物とジアミンを使用することができる。好ましく使用される酸無水物としては、ピロメリット酸二無水物、3,3',4,4'−ビフェニルテトラカルボン酸ニ無水物、1,4-シクロヘキサンジカルボン酸、1,2,3,4−シクロブタンテトラカルボン酸二無水物、2,2'−ビス(3,4−ジカルボキシフェニル)ヘキサフルオロプロパン二無水物等が挙げられ、また、ジアミンとして4,4'−ジアミノジフェニルサルフォン、トランス−1,4−ジアミノシクロヘキサン、4,4'−ジアミノシクロヘキシルメタン、2,2'−ビス(4−アミノシクロヘキシル)−ヘキサフルオロプロパン、2,2'−ビス(トリフルオロメチル)−4,4'−ジアミノビシクロヘキサン等が挙げられる。   When the polyimide is a polyimide according to the structure of the general formula (4) or (5), other polyimides that may be added at a ratio of less than 20 mol% at the maximum other than the polyimide are not particularly limited. Common acid anhydrides and diamines can be used. Preferred acid anhydrides include pyromellitic dianhydride, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 1,4-cyclohexanedicarboxylic acid, 1,2,3,4 -Cyclobutanetetracarboxylic dianhydride, 2,2'-bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride, etc., and 4,4'-diaminodiphenylsulfone, trans -1,4-diaminocyclohexane, 4,4'-diaminocyclohexylmethane, 2,2'-bis (4-aminocyclohexyl) -hexafluoropropane, 2,2'-bis (trifluoromethyl) -4,4 ' -Diamino bicyclohexane etc. are mentioned.

このようにして得られるポリイミド層1は、上記したとおり単層であっても、複数層からなるものであってもよいが、複数層からなる場合であっても原料を適宜選択し、透明性を与えるポリアミド酸を複数層形成することによって、ポリイミド層全体として透明とすることが可能である。   The polyimide layer 1 thus obtained may be a single layer or a plurality of layers as described above. However, even if the polyimide layer 1 is composed of a plurality of layers, a raw material is appropriately selected and transparency is obtained. It is possible to make the entire polyimide layer transparent by forming a plurality of layers of polyamic acid that provides the.

本発明においてポリイミドフィルムは、支持基材2上にポリイミド層1を形成し、これを剥離等の手段で分離することで得られるが、支持基材2から剥離した後のポリイミドフィルムの剥離面は、表面粗さRaが100nm以下であることが好ましい。この剥離面の表面粗さを低くするには、支持基材2側の表面も平滑にすることがよく、支持基材2に金属箔と樹脂の複合基板を用いる場合を例にとると、金属箔上にポリアミド酸の樹脂溶液を塗布法により形成し、乾燥及び/又は硬化のために熱処理することで、耐熱ポリイミド面の表面粗さRaを100nm以下にすることができる。   In the present invention, the polyimide film is obtained by forming the polyimide layer 1 on the support substrate 2 and separating it by means such as peeling, but the release surface of the polyimide film after peeling from the support substrate 2 is The surface roughness Ra is preferably 100 nm or less. In order to reduce the surface roughness of the peeling surface, the surface on the support base material 2 side is preferably smooth, and a metal foil and resin composite substrate is used for the support base material 2 as an example. The surface roughness Ra of the heat-resistant polyimide surface can be reduced to 100 nm or less by forming a resin solution of polyamic acid on the foil by a coating method and performing heat treatment for drying and / or curing.

本発明では、支持基材2上にポリイミド層1が積層されたポリイミド積層体10の他、図1(B)に示すように、このポリイミド積層体10のポリイミド層1の表面側に所定の機能層3を形成したポリイミド積層体とすることもできる。このようなポリイミド積層体は、背面側の支持基材を分離した後、機能層付ポリイミドフィルムを与える。ここで機能層としては、有機ELや液晶ディスプレイ等の表示装置、タッチパネル等の入力装置、ガスや水分を透過させないためのバリア層、透明導電膜等が例示される。なお、所定の機能層3を形成した後の支持基材2の分離は、機能層形成後であればいずれの工程であってもよい。   In the present invention, in addition to the polyimide laminate 10 in which the polyimide layer 1 is laminated on the support substrate 2, as shown in FIG. 1B, a predetermined function is provided on the surface side of the polyimide layer 1 of the polyimide laminate 10. It can also be set as the polyimide laminated body in which the layer 3 was formed. Such a polyimide laminate provides a polyimide film with a functional layer after separating the support substrate on the back side. Examples of the functional layer include a display device such as an organic EL or liquid crystal display, an input device such as a touch panel, a barrier layer for preventing gas and moisture from permeating, a transparent conductive film, and the like. In addition, separation of the support base material 2 after forming the predetermined functional layer 3 may be performed in any step as long as the functional layer is formed.

また、本発明のポリイミド積層体10は、支持基材2の背面側、すなわちポリイミド層1と支持基材2とがなす界面とは反対側の支持基材2の表面に、エポキシ樹脂、アクリル樹脂等からなる粘着層4を更に備えるようにしてもよい。そのことによって、ポリイミド積層体10を他の部材に貼り付けた後、ポリイミドフィルムのみ、もしくは機能層付ポリイミドフィルムを分離する操作を行なうこともできる。   In addition, the polyimide laminate 10 of the present invention has an epoxy resin and an acrylic resin on the back side of the support base 2, that is, on the surface of the support base 2 opposite to the interface between the polyimide layer 1 and the support base 2. You may make it further provide the adhesion layer 4 which consists of these. Accordingly, after the polyimide laminate 10 is attached to another member, an operation of separating only the polyimide film or the polyimide film with a functional layer can be performed.

次に、本発明のポリイミド積層体の製造方法についてより詳細に説明する。
本発明のポリイミド積層体10の好適な製造方法は、ガラス転移温度Tgが300℃以上であると共に、表面粗さRaが100nm以下の耐熱性ポリイミドにより形成された耐熱ポリイミド面を有する長尺状の支持基材2をロール・トゥ・ロールプロセスで搬送しながら、長尺状の支持基材2の耐熱ポリイミド面上に、含フッ素ポリアミド酸の樹脂溶液を塗布し、支持基材2ごと200℃以上に加熱処理してポリアミド酸をイミド化させて、支持基材2上に440nmから780nmの波長領域での透過率が70%以上のポリイミド層1を形成すると共に、支持基材2とポリイミド層1との接着強度を1N/m以上500N/m以下にして、支持基材2からポリイミド層1からなるポリイミドフィルムを分離可能にすることを特徴とする。
Next, the manufacturing method of the polyimide laminated body of this invention is demonstrated in detail.
A preferred method for producing the polyimide laminate 10 of the present invention is that the glass transition temperature Tg is 300 ° C. or higher, and the long surface having a heat-resistant polyimide surface formed of a heat-resistant polyimide having a surface roughness Ra of 100 nm or less. While transporting the support base material 2 by a roll-to-roll process, a fluorine-containing polyamic acid resin solution is applied onto the heat-resistant polyimide surface of the long support base material 2, and the support base material 2 is 200 ° C. or more. Heat treatment to imidize the polyamic acid to form a polyimide layer 1 having a transmittance of 70% or more in the wavelength region of 440 nm to 780 nm on the support base material 2, and the support base material 2 and the polyimide layer 1. The adhesive strength is 1 N / m or more and 500 N / m or less so that the polyimide film made of the polyimide layer 1 can be separated from the support base 2.

すなわち、本発明におけるポリイミド積層体10の好適な製造方法は、ロール・トゥ・ロールプロセスを可能とするものであることから、用いられる支持基材2は長尺状でガラス転移温度Tgが300℃以上であると共に、表面粗さRaが100nm以下の耐熱性ポリイミドにより形成された耐熱ポリイミド面を有するものである。ロール・トゥ・ロールプロセスにおいて、支持基材2は、ロール状に巻き取られた状態で準備され、その一部を引き出すことで支持基材2として供される。なお、耐熱ポリイミド面を与えるポリイミドは上記ポリイミド積層体の発明で記載した同様のものを適用することが好ましい。   That is, since the suitable manufacturing method of the polyimide laminated body 10 in this invention enables a roll-to-roll process, the support base material 2 used is elongate, and the glass transition temperature Tg is 300 degreeC. In addition to the above, the surface has a heat-resistant polyimide surface formed of heat-resistant polyimide having a surface roughness Ra of 100 nm or less. In the roll-to-roll process, the support base material 2 is prepared in a state of being wound in a roll shape, and is provided as the support base material 2 by pulling out a part thereof. In addition, it is preferable to apply the same thing as described in invention of the said polyimide laminated body for the polyimide which gives a heat-resistant polyimide surface.

このようにして供される長尺状の支持基材2の耐熱ポリイミド面上に、ポリイミド前駆体であるポリアミド酸の樹脂溶液を塗布する。ポリアミド酸としては、上記した含フッ素ポリアミド酸を用いることが好ましい。   A polyamic acid resin solution, which is a polyimide precursor, is applied on the heat-resistant polyimide surface of the long support substrate 2 provided in this manner. As the polyamic acid, the above-described fluorine-containing polyamic acid is preferably used.

ポリアミド酸の樹脂溶液を塗布した後、長尺状の支持基材2ごと150〜160℃まで加熱処理して、樹脂溶液中に含まれる溶剤を除去すると共に、更に高温の熱処理にてポリアミド酸をイミド化させる。イミド化に際して行う加熱処理は、溶剤をある程度除去したのち、160℃程度の温度から350℃程度の温度まで、連続的又は段階的に昇温を行なうようにするのがよい。   After applying the polyamic acid resin solution, the long support base 2 is heated to 150 to 160 ° C. to remove the solvent contained in the resin solution. Imidize. In the heat treatment performed at the time of imidation, it is preferable to raise the temperature continuously or stepwise from a temperature of about 160 ° C. to a temperature of about 350 ° C. after removing the solvent to some extent.

上記加熱処理によって、長尺状の支持基材2上にポリイミド層1が形成されたポリイミド積層体10とすることができる。ここで、支持基材2上のポリイミド層1は、440nmから780nmの波長領域での透過率が70%以上の透明ポリイミド層1となるわけであるが、本発明においては、特に上記加熱処理における昇温時の最高加熱温度(最高到達温度)より20℃低い温度から最高到達温度までの高温加熱温度域での加熱時間(以下、高温保持時間という。)を15分以内とすることが好ましい。この高温保持時間が15分を越えると、着色等によってポリイミド層の透明性が低下する傾向にある。透明性を維持するためには高温保持時間は短い方が良いが、時間が短すぎると熱処理の効果が十分に得られない可能性がある。最適な高温保持時間は加熱方式、支持基材10の熱容量、ポリイミド層1の厚み等によって異なるが、0.5分以上5分以下とするのがより好ましい。   By the heat treatment, a polyimide laminate 10 in which the polyimide layer 1 is formed on the long support base 2 can be obtained. Here, the polyimide layer 1 on the support substrate 2 becomes the transparent polyimide layer 1 having a transmittance of 70% or more in the wavelength region of 440 nm to 780 nm. In the present invention, in particular in the above heat treatment. It is preferable that the heating time (hereinafter referred to as “high temperature holding time”) in a high temperature heating temperature range from a temperature 20 ° C. lower than the maximum heating temperature at the time of temperature rise (maximum temperature reached) to the maximum temperature reached is within 15 minutes. When the high temperature holding time exceeds 15 minutes, the transparency of the polyimide layer tends to be lowered due to coloring or the like. In order to maintain transparency, it is better that the high temperature holding time is short. However, if the time is too short, the effect of heat treatment may not be sufficiently obtained. The optimum high temperature holding time varies depending on the heating method, the heat capacity of the support substrate 10, the thickness of the polyimide layer 1, etc., but is more preferably 0.5 minutes or more and 5 minutes or less.

本発明のポリイミド積層体10は、支持基材2とポリイミド層1との接着強度が1N/m以上500N/m以下の範囲にあり、支持基材2からポリイミド層1からなるポリイミドフィルムが容易に分離可能な状態となっており、その分離の形態については特に制限はない。例えば、支持基材2上とポリイミド層1からなるポリイミド積層体10は、そのままの状態でロールに巻き取られてロール状のものとしてもよく、また、ロール・トゥ・ロールプロセスの途中工程であるイミド化工程を完了した後、巻き取り工程の前に支持基材2とポリイミド層1とを剥離し、分離してもよい。或いは、1枚ごとに所定のサイズに切り出したシート状のポリイミド積層体10を用意して、それぞれ支持基材2からポリイミド層1を剥離して分離するようにしてもよい。いずれの場合にも、ポリイミド層1の表面に機能層3を形成すれば、分離したポリイミドフィルムは樹脂基板として利用でき、特に、ポリイミド層1を支持基材2から分離する前に機能層3を形成すれば、当該ポリイミドフィルムの取り扱い性や寸法安定性等を十分確保することができる。   In the polyimide laminate 10 of the present invention, the adhesive strength between the support substrate 2 and the polyimide layer 1 is in the range of 1 N / m or more and 500 N / m or less, and the polyimide film comprising the polyimide layer 1 from the support substrate 2 can be easily obtained. It is in a separable state, and there are no particular restrictions on the form of the separation. For example, the polyimide laminate 10 composed of the support substrate 2 and the polyimide layer 1 may be wound into a roll as it is, and may be in the form of a roll, and is an intermediate step in a roll-to-roll process. After the imidization step is completed, the support substrate 2 and the polyimide layer 1 may be peeled off and separated before the winding step. Alternatively, a sheet-like polyimide laminate 10 cut into a predetermined size may be prepared for each sheet, and the polyimide layer 1 may be peeled off from the support base 2 and separated. In any case, if the functional layer 3 is formed on the surface of the polyimide layer 1, the separated polyimide film can be used as a resin substrate. In particular, before separating the polyimide layer 1 from the support base 2, the functional layer 3 is formed. If it forms, the handleability, dimensional stability, etc. of the said polyimide film can fully be ensured.

本発明のポリイミド積層体10は、支持基材2とポリイミド層1との接着強度が低く、これらを容易に分離可能なことを特徴とするが、このようなポリイミド積層体10を得る過程において、支持基材2とポリイミド層1との界面の一部に接着強度が高い(500N/m超)箇所を一時的に設けておき、後にその部分を切除するなどして本発明に係るポリイミド積層体10を得るようにしてもよい。すなわち、例えば、長期の保管や輸送時の形態安定性を高めるなどの目的から、意図的に支持基材2の表面の一部を粗化した後にポリアミド酸溶液を塗布するなどの方法によりポリイミド層1を形成して、界面の一部の接着強度を他の大部分の面より高く(500N/m超)しておき、その後、接着強度の高い部分を切断等の手段で除去することで、本発明のポリイミド積層体10とすることもできる。   The polyimide laminate 10 of the present invention is characterized in that the adhesive strength between the support substrate 2 and the polyimide layer 1 is low and can be easily separated. In the process of obtaining such a polyimide laminate 10, A polyimide laminate according to the present invention is prepared by temporarily providing a part having a high adhesive strength (over 500 N / m) at a part of the interface between the support base 2 and the polyimide layer 1 and then excising the part. You may get 10. That is, for example, for the purpose of enhancing the shape stability during long-term storage or transportation, the polyimide layer is applied by a method such as applying a polyamic acid solution after intentionally roughening a part of the surface of the support substrate 2. 1 is formed, the adhesive strength of a part of the interface is made higher than most other surfaces (over 500 N / m), and then the part with high adhesive strength is removed by means such as cutting, It can also be set as the polyimide laminated body 10 of this invention.

以下、実施例等に基づいて本発明の内容をより具体的に説明するが、本発明はこれら実施例の範囲に限定されるものではない。   Hereinafter, the contents of the present invention will be described more specifically based on examples and the like, but the present invention is not limited to the scope of these examples.

先ず、ポリイミドを合成する際の原料モノマーや溶媒の略語、及び、実施例中の各種物性の測定方法とその条件について以下に示す。
[略語]
・DMAc:N,N−ジメチルアセトアミド
・PDA:1,4−フェニレンジアミン
・TFMB:2,2’−ビス(トリフルオロメチル)−4,4’−ジアミノビフェニル
・DADMB:4,4’−ジアミノ−2,2’−ジメチルビフェニル
・1,3−BAB:1,3−ビス(4−アミノフェノキシ)ベンゼン
・BPDA:3,3’,4,4’−ビフェニルテトラカルボン酸二無水物
・6FDA:2,2’−ビス(3,4−ジカルボキシフェニル)ヘキサフルオロプロパン二無水物
・PMDA:ピロメリット酸二無水物
First, the abbreviations of raw material monomers and solvents for synthesizing polyimide, and various physical property measuring methods and conditions in the examples are shown below.
[Abbreviation]
DMAc: N, N-dimethylacetamide PDA: 1,4-phenylenediamine TFMB: 2,2′-bis (trifluoromethyl) -4,4′-diaminobiphenyl DADMB: 4,4′-diamino- 2,2′-dimethylbiphenyl, 1,3-BAB: 1,3-bis (4-aminophenoxy) benzene, BPDA: 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 6FDA: 2 , 2'-bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride-PMDA: pyromellitic dianhydride

〔表面粗さ(Ra)〕
ブルカー社製の原子間力顕微鏡(AFM)「Multi Mode8」を用いて表面観察をタッピングモードで行った。10μm角の視野観察を4回行い、それらの平均値を求めた。表面粗さ(Ra)は、算術平均粗さ(JIS B0601-1991)を表す。
[Surface roughness (Ra)]
Surface observation was performed in a tapping mode using an atomic force microscope (AFM) “Multi Mode 8” manufactured by Bruker. Observation of a 10 μm square field of view was performed four times, and the average value thereof was obtained. The surface roughness (Ra) represents the arithmetic average roughness (JIS B0601-1991).

〔剥離性〕
ポリイミド積層体を50mm角サイズにカットしたものを評価サンプルとし、その一つの角からポリイミド層と支持基材の剥離を行った。剥離が可能であったもののうち、ポリイミド層にダメージを与えることなく容易に剥離できたものを○、フィルムの伸びや破断が見られたものを×とした。剥離の際にポリイミド層と支持基材の接着力が強く、剥離ができなかったものは剥離不可とした。
[Peelability]
The polyimide laminate was cut into a 50 mm square size as an evaluation sample, and the polyimide layer and the supporting substrate were peeled from one corner. Among those that could be peeled off, those that could be easily peeled without damaging the polyimide layer were marked with ◯, and those that showed film elongation or breakage were marked with ×. In the case of peeling, the adhesive force between the polyimide layer and the supporting substrate was strong, and those that could not be peeled were regarded as unpeelable.

〔剥離強度〕
東洋精機製作所社製ストログラフR−1を用いて、ポリイミド積層体を幅10mmの短冊状に切断したサンプルについて、T字剥離試験法によるピール強度を測定することにより評価した。
[Peel strength]
A sample obtained by cutting a polyimide laminate into a strip shape having a width of 10 mm was evaluated by measuring peel strength according to a T-peeling test method using a strograph R-1 manufactured by Toyo Seiki Seisakusho.

〔透過率(%)〕
ポリイミドフィルム(50mm×50mm)をU4000形分光光度計にて、440nmから780nmにおける光透過率の平均値を求めた。
[Transmissivity (%)]
The average value of the light transmittance from 440 nm to 780 nm was determined for a polyimide film (50 mm × 50 mm) with a U4000 spectrophotometer.

〔ガラス転移温度Tg〕
ガラス転移温度は、粘弾性アナライザ(レオメトリックサイエンスエフィー株式会社製RSA−II)を使って、10mm幅のサンプルを用いて、1Hzの振動を与えながら、室温から400℃まで10℃/分の速度で昇温した際の、損失正接(Tanδ)の極大から求めた。
[Glass transition temperature Tg]
The glass transition temperature was measured at a rate of 10 ° C./min from room temperature to 400 ° C. while applying a 1 Hz vibration using a 10 mm wide sample using a viscoelasticity analyzer (RSA-II manufactured by Rheometric Science Effy Co., Ltd.). It was determined from the maximum loss tangent (Tan δ) when the temperature was raised at.

〔熱膨張係数(CTE)〕
3mm×15mmのサイズのポリイミドフィルムを、熱機械分析(TMA)装置にて5.0gの荷重を加えながら一定の昇温速度(20℃/min)で30℃から260℃の温度範囲で引張り試験を行い、温度に対するポリイミドフィルムの伸び量から熱膨張係数(×10-6/K)を測定した。
[Coefficient of thermal expansion (CTE)]
Tensile test of polyimide film with a size of 3mm x 15mm in a temperature range from 30 ° C to 260 ° C at a constant heating rate (20 ° C / min) while applying a 5.0g load with a thermomechanical analysis (TMA) device And the coefficient of thermal expansion (× 10 −6 / K) was measured from the amount of elongation of the polyimide film with respect to temperature.

合成例1(ポリイミドA)
窒素気流下で、300mlのセパラブルフラスコの中で攪拌しながらPDA8.00gを溶剤DMAcに溶解させた。次いで、この溶液BPDA22.00gを加えた。その後、溶液を室温で5時間攪拌を続けて重合反応を行い、一昼夜保持した。粘稠なポリアミド酸溶液が得られ、高重合度のポリアミド酸Aが生成されていることが確認された。
Synthesis Example 1 (Polyimide A)
Under a nitrogen stream, 8.00 g of PDA was dissolved in the solvent DMAc while stirring in a 300 ml separable flask. Then 22.00 g of this solution BPDA was added. Thereafter, the solution was stirred at room temperature for 5 hours to conduct a polymerization reaction, and kept for a whole day and night. A viscous polyamic acid solution was obtained, and it was confirmed that polyamic acid A having a high polymerization degree was produced.

合成例2(ポリイミドB)
窒素気流下で、300mlのセパラブルフラスコの中で攪拌しながらDADMB19.11gおよび2.92gの1,3−BABを溶剤DMAcに溶解させた。次いで、この溶液に5.79gのBPDAおよび17.17gのPMDAを加えた。その後、溶液を室温で5時間攪拌を続けて重合反応を行い、一昼夜保持した。粘稠なポリアミド酸溶液が得られ、高重合度のポリアミド酸Bが生成されていることが確認された。
Synthesis Example 2 (Polyimide B)
Under a nitrogen stream, 19.11 g of DADMB and 2.92 g of 1,3-BAB were dissolved in the solvent DMAc while stirring in a 300 ml separable flask. To this solution was then added 5.79 g BPDA and 17.17 g PMDA. Thereafter, the solution was stirred at room temperature for 5 hours to conduct a polymerization reaction, and kept for a whole day and night. A viscous polyamic acid solution was obtained, and it was confirmed that polyamic acid B having a high polymerization degree was produced.

合成例3(ポリイミドC)
窒素気流下で、300mlのセパラブルフラスコの中で攪拌しながらTFMB12.08gを溶剤DMAcに溶解させた。次いで、この溶液にPMDA6.20gと6FDA4.21gを加えた。その後、溶液を室温で5時間攪拌を続けて重合反応を行い、一昼夜保持した。粘稠なポリアミド酸溶液が得られ、高重合度のポリアミド酸Cが生成されていることが確認された。
Synthesis Example 3 (Polyimide C)
Under a nitrogen stream, 12.08 g of TFMB was dissolved in the solvent DMAc while stirring in a 300 ml separable flask. Next, 6.20 g of PMDA and 4.21 g of 6FDA were added to this solution. Thereafter, the solution was stirred at room temperature for 5 hours to conduct a polymerization reaction, and kept for a whole day and night. A viscous polyamic acid solution was obtained, and it was confirmed that polyamic acid C having a high polymerization degree was produced.

合成例4(ポリイミドD)
窒素気流下で、300mlのセパラブルフラスコの中で攪拌しながらTFMB13.30gを溶剤DMAcに溶解させた。次いで、この溶液にPMDA9.20gを加えた。その後、溶液を室温で5時間攪拌を続けて重合反応を行い、一昼夜保持した。粘稠なポリアミド酸溶液が得られ、高重合度のポリアミド酸Dが生成されていることが確認された。
Synthesis Example 4 (Polyimide D)
Under a nitrogen stream, 13.30 g of TFMB was dissolved in the solvent DMAc while stirring in a 300 ml separable flask. Next, 9.20 g of PMDA was added to this solution. Thereafter, the solution was stirred at room temperature for 5 hours to conduct a polymerization reaction, and kept for a whole day and night. A viscous polyamic acid solution was obtained, and it was confirmed that polyamic acid D having a high polymerization degree was produced.

[実施例1]
厚み18μmの電解銅箔上に、合成例1で得たポリアミド酸Aの樹脂溶液を塗布した後、130℃で加熱乾燥し溶剤を除去した。次に、160℃から360℃まで約15℃/分の昇温速度で熱処理することでイミド化し、厚み25μmのポリイミド層(表面粗さRa=1.3nm、Tg=355℃)が銅箔上に形成された支持基材を得た。
[Example 1]
After applying the polyamic acid A resin solution obtained in Synthesis Example 1 onto an electrolytic copper foil having a thickness of 18 μm, the solvent was removed by heating and drying at 130 ° C. Next, it is imidized by heat treatment from 160 ° C. to 360 ° C. at a heating rate of about 15 ° C./min, and a polyimide layer (surface roughness Ra = 1.3 nm, Tg = 355 ° C.) having a thickness of 25 μm is formed on the copper foil. A formed support substrate was obtained.

得られた支持基材のポリイミド層上に、合成例3で得たポリアミド酸Cの樹脂溶液を均一の厚みで塗布した後、130℃で加熱乾燥し、樹脂溶液中の溶剤を除去した。次に、160℃から360℃まで約20℃/分の昇温速度で熱処理することでポリアミド酸をイミド化させ、ポリイミド層の背面側に支持基材を備えたポリイミド積層体とした。この状態で直ちに常温まで冷却し、ポリイミド層の部分を支持基材から引き剥がして厚み25μmの透明ポリイミドフィルムを得た。引き剥がしの際の支持基材と透明ポリイミドフィルムとの剥離性は良好であった。なお、ポリアミド酸Cのイミド化にあたり、最高到達温度より20℃低い温度から最高到達温度までの高温加熱温度域での加熱時間(高温保持時間)、すなわち340℃から360℃までの高温保持時間は1分とした。   After applying the polyamic acid C resin solution obtained in Synthesis Example 3 to a uniform thickness on the polyimide layer of the obtained support substrate, the solution was heated and dried at 130 ° C. to remove the solvent in the resin solution. Next, the polyamic acid was imidized by heat treatment at a rate of temperature increase of about 20 ° C./min from 160 ° C. to 360 ° C. to obtain a polyimide laminate having a support base on the back side of the polyimide layer. In this state, it was immediately cooled to room temperature, and the polyimide layer was peeled off from the supporting substrate to obtain a transparent polyimide film having a thickness of 25 μm. The peelability between the support substrate and the transparent polyimide film during peeling was good. In the imidization of polyamic acid C, the heating time (high temperature holding time) in a high temperature heating temperature range from a temperature 20 ° C. lower than the highest temperature to the highest temperature, that is, a high temperature holding time from 340 ° C. to 360 ° C. is 1 minute.

この実施例1の場合を含めて、各実施例で使用した支持基材の特性、支持基材上に形成したポリイミド層又はポリイミドフィルムの特性、及びポリイミド積層体の評価結果等を表1に示す。   Table 1 shows the characteristics of the supporting base material used in each example, the characteristics of the polyimide layer or polyimide film formed on the supporting base material, and the evaluation results of the polyimide laminate, including the case of Example 1. .

Figure 0005931672
Figure 0005931672

[実施例2]
支持基材として厚さ25μmのポリイミドフィルム(カプトンH、東レ・デュポン株式会社製:表面粗さRa=70nm、Tg=428℃)を使用し、この上に合成例3で得たポリアミド酸Cの樹脂溶液を塗布し、その後、130℃で加熱乾燥することで樹脂溶液中の溶剤を除去した。次に、160℃から360℃まで約20℃/分の昇温速度で熱処理しポリアミド酸をイミド化させ(340℃から360℃までの高温保持時間は1分)、ポリイミド層の背面側に支持基材を備えたポリイミド積層体とした。この状態で直ちに常温まで冷却し、ポリイミド層の部分を支持基材から引き剥がして厚み25μmの透明ポリイミドフィルムを得た。引き剥がしの際の支持基材と透明ポリイミドフィルムの剥離性は良好であった。
[Example 2]
A polyimide film (Kapton H, manufactured by Toray DuPont Co., Ltd .: surface roughness Ra = 70 nm, Tg = 428 ° C.) having a thickness of 25 μm was used as a supporting substrate, and the polyamic acid C obtained in Synthesis Example 3 was further formed thereon. The resin solution was applied and then dried by heating at 130 ° C. to remove the solvent in the resin solution. Next, heat treatment is performed at a rate of about 20 ° C / min from 160 ° C to 360 ° C to imidize the polyamic acid (high temperature holding time from 340 ° C to 360 ° C is 1 minute), and it is supported on the back side of the polyimide layer It was set as the polyimide laminated body provided with the base material. In this state, it was immediately cooled to room temperature, and the polyimide layer was peeled off from the supporting substrate to obtain a transparent polyimide film having a thickness of 25 μm. The peelability of the supporting substrate and the transparent polyimide film during peeling was good.

[実施例3]
支持基材として厚さ25μmのポリイミドフィルム(ユーピレックスS、宇部興産株式会社製:表面粗さRa=15nm、Tg=359℃)を使用し、この上に合成例4で得たポリアミド酸Dの樹脂溶液を塗布し、その後、130℃で加熱乾燥することで樹脂溶液中の溶剤を除去した。次に、160℃から360℃まで約20℃/分の昇温速度で熱処理しポリアミド酸をイミド化させ(340℃から360℃までの高温保持時間は1分)、ポリイミド層の背面側に支持基材を備えたポリイミド積層体とした。この状態で直ちに常温まで冷却し、ポリイミド層の部分を支持基材から引き剥がして厚み25μmの透明ポリイミドフィルムを得た。引き剥がしの際の支持基材と透明ポリイミドフィルムの剥離性は良好であった。
[Example 3]
Polyamide acid D resin obtained in Synthesis Example 4 was used on the polyimide film (Upilex S, manufactured by Ube Industries, Ltd .: surface roughness Ra = 15 nm, Tg = 359 ° C.) having a thickness of 25 μm as a supporting substrate. The solution was applied, and then heated and dried at 130 ° C. to remove the solvent in the resin solution. Next, heat treatment is performed at a rate of about 20 ° C / min from 160 ° C to 360 ° C to imidize the polyamic acid (high temperature holding time from 340 ° C to 360 ° C is 1 minute), and it is supported on the back side of the polyimide layer It was set as the polyimide laminated body provided with the base material. In this state, it was immediately cooled to room temperature, and the polyimide layer was peeled off from the supporting substrate to obtain a transparent polyimide film having a thickness of 25 μm. The peelability of the supporting substrate and the transparent polyimide film during peeling was good.

[実施例4]
支持基材として厚さ25μmのポリイミドフィルム(ユーピレックスS、宇部興産株式会社製:表面粗さRa=15nm、Tg=359℃)を使用し、この上に合成例4で得たポリアミド酸Dの樹脂溶液を塗布し、その後、130℃で加熱乾燥することで、樹脂溶液中の溶剤を除去した。次に、150℃、200℃、250℃で30分加熱後、350℃で1時間加熱しポリアミド酸をイミド化させ、ポリイミド層の背面側に支持基材を備えたポリイミド積層体とした。この状態で直ちに常温まで冷却し、ポリイミド層の部分を支持基材から引き剥がして厚み25μmの透明ポリイミドフィルムを得た。引き剥がしの際の支持基材と透明ポリイミドフィルムの剥離性は良好であった。
[Example 4]
Polyamide acid D resin obtained in Synthesis Example 4 was used on the polyimide film (Upilex S, manufactured by Ube Industries, Ltd .: surface roughness Ra = 15 nm, Tg = 359 ° C.) having a thickness of 25 μm as a supporting substrate. The solution was applied and then dried by heating at 130 ° C. to remove the solvent in the resin solution. Next, after heating at 150 ° C., 200 ° C., and 250 ° C. for 30 minutes, heating was performed at 350 ° C. for 1 hour to imidize polyamic acid to obtain a polyimide laminate having a support base on the back side of the polyimide layer. In this state, it was immediately cooled to room temperature, and the polyimide layer was peeled off from the supporting substrate to obtain a transparent polyimide film having a thickness of 25 μm. The peelability of the supporting substrate and the transparent polyimide film during peeling was good.

[比較例1]
支持基材として銅箔を使用したこと以外は、実施例1と同様に塗布、加熱乾燥及びイミド化のための熱処理を行ない、ポリイミド積層体を得た。ポリイミド積層体からポリイミド層を引き剥がそうとしたが、ポリイミド層と支持基材との界面の接着力が強く、支持基材からポリイミドを剥離することができなかった。
[Comparative Example 1]
Except having used copper foil as a support base material, it heat-processed for application | coating, heat drying, and imidation similarly to Example 1, and obtained the polyimide laminated body. An attempt was made to peel off the polyimide layer from the polyimide laminate, but the adhesive force at the interface between the polyimide layer and the support substrate was strong, and the polyimide could not be peeled from the support substrate.

[比較例2]
実施例1で使用した支持基材の銅箔をエッチングし、ポリイミドフィルムからなる支持基材を得た。この支持基材の銅箔エッチング面の表面粗度Raは180nmであり、Tgは355℃であった。支持基材であるポリイミドフィルムのこの面に合成例3で得られたポリイミド酸Cの樹脂溶液を塗布したこと以外は、実施例1と同様に行いポリイミド積層体を得た。ポリイミド積層体からポリイミド層を引き剥がそうとしたが、ポリイミドと支持基材の界面の接着力が強く、支持基材からポリイミドを剥離することができなかった。
[Comparative Example 2]
The support base copper foil used in Example 1 was etched to obtain a support base made of a polyimide film. Surface roughness Ra of the copper foil etching surface of this support base material was 180 nm, and Tg was 355 degreeC. A polyimide laminate was obtained in the same manner as in Example 1 except that the polyimide acid C resin solution obtained in Synthesis Example 3 was applied to this surface of the polyimide film as the support substrate. Although an attempt was made to peel off the polyimide layer from the polyimide laminate, the adhesive force at the interface between the polyimide and the support substrate was strong, and the polyimide could not be peeled from the support substrate.

[比較例3]
支持基材として厚さ10mmのポリイミド基板(ユピモール、宇部興産株式会社製:表面粗さRa=160nm、Tg=401℃)を使用したこと以外は、実施例1と同様にしてポリイミド積層体を得、その後常温まで冷却してから、ポリイミド層を支持基材から引き剥がし厚み25μmの透明ポリイミドフィルムを得た。支持基材と透明ポリイミドフィルムの剥離時に、透明ポリイミドフィルムの伸び、さらには破断が発生しやすく、剥離性は良くなかった。
[Comparative Example 3]
A polyimide laminate is obtained in the same manner as in Example 1 except that a 10 mm-thick polyimide substrate (Iupimol, Ube Industries, Ltd .: surface roughness Ra = 160 nm, Tg = 401 ° C.) is used as the support substrate. Then, after cooling to room temperature, the polyimide layer was peeled off from the supporting substrate to obtain a transparent polyimide film having a thickness of 25 μm. When the support substrate and the transparent polyimide film were peeled off, the transparent polyimide film was easily stretched and further ruptured, and the peelability was not good.

[比較例4]
ポリアミド酸として合成例2で得たポリアミド酸Bの樹脂溶液を使用したこと以外は実施例3と同様にしてポリイミド積層体を得、その後常温まで冷却してから、ポリイミド層を支持基材から引き剥がして厚み25μmの透明ポリイミドフィルムを得た。支持基材とポリイミドフィルムの剥離時に、ポリイミドフィルムの伸び、さらには破断が発生しやすく、剥離性は良くなかった。
[Comparative Example 4]
A polyimide laminate was obtained in the same manner as in Example 3 except that the polyamic acid B resin solution obtained in Synthesis Example 2 was used as the polyamic acid. After cooling to room temperature, the polyimide layer was pulled from the support substrate. The film was peeled off to obtain a transparent polyimide film having a thickness of 25 μm. When the support substrate and the polyimide film were peeled off, the polyimide film was easily stretched and further ruptured, and the peelability was not good.

[比較例5]
支持基材としてポリイミドフィルム(カプトンH 東レ・デュポン株式会社製)を使用したこと以外は、比較例4と同様にしてポリイミド積層体を得た。ポリイミド積層体からポリイミド層を引き剥がそうとしたが、ポリイミドと支持基材の界面の接着力が強く、支持基材からポリイミドを剥離することができなかった。
[Comparative Example 5]
A polyimide laminate was obtained in the same manner as in Comparative Example 4 except that a polyimide film (Kapton H manufactured by Toray DuPont Co., Ltd.) was used as the support substrate. Although an attempt was made to peel off the polyimide layer from the polyimide laminate, the adhesive force at the interface between the polyimide and the support substrate was strong, and the polyimide could not be peeled from the support substrate.

1 ポリイミド層
2 支持基材
3 機能層
4 粘着層
10 ポリイミド積層体
1 Polyimide layer 2 Support base material 3 Functional layer 4 Adhesive layer
10 Polyimide laminate

Claims (12)

ポリイミド層の背面側に支持基材を備えたポリイミド積層体であって、ポリイミド層が単層又は複数層からなり、少なくとも支持基材と接する層が含フッ素ポリイミドであると共に、該ポリイミド層440nmから780nmの波長領域での透過率が70%以上であり、また、ポリイミド層と支持基材との界面における支持基材の表面は、ガラス転移温度Tgが300℃以上の耐熱性ポリイミドにより形成されると共に、表面粗さRaが100nm以下であり、支持基材とポリイミド層との接着強度が1N/m以上500N/m以下であって、支持基材から前記ポリイミド層からなるポリイミドフィルムを分離可能にしたことを特徴とするポリイミド積層体。 A polyimide laminate having a support substrate on the back side of the polyimide layer, the polyimide layer is a single layer or multiple layers, with a layer in contact with at least the supporting substrate is a fluorinated polyimide, 440 nm of the polyimide layer transmittance at 780nm wavelength region from is 70% or more, and the surface of the supporting substrate at the interface between the polyimide layer and the supporting substrate, a glass transition temperature Tg is formed by 300 ° C. or more heat-resistant polyimide In addition, the surface roughness Ra is 100 nm or less, the adhesive strength between the support substrate and the polyimide layer is 1 N / m or more and 500 N / m or less, and the polyimide film composed of the polyimide layer can be separated from the support substrate. A polyimide laminate characterized by the above. 支持基材とポリイミド層との接着強度が5N/m以上300N/m以下である請求項1に記載のポリイミド積層体。 The polyimide laminate according to claim 1, wherein the adhesive strength between the support substrate and the polyimide layer is 5 N / m or more and 300 N / m or less . 支持基材における耐熱性ポリイミドが、下記構造単位を有するポリイミドである請求項1又は2に記載のポリイミド積層体。
Figure 0005931672
The polyimide laminate according to claim 1 or 2, wherein the heat-resistant polyimide in the support substrate is a polyimide having the following structural units.
Figure 0005931672
ポリイミド層の熱膨張係数が15ppm/K以下である請求項1〜3のいずれかに記載のポリイミド積層体。   The polyimide laminate according to any one of claims 1 to 3, wherein the polyimide layer has a thermal expansion coefficient of 15 ppm / K or less. ポリイミド層の厚さが3μm以上50μm以下であり、また、支持基材の厚さが10μm以上100μm以下である請求項1〜4のいずれかに記載のポリイミド積層体。   The polyimide laminate according to any one of claims 1 to 4, wherein the polyimide layer has a thickness of 3 µm to 50 µm, and the support base material has a thickness of 10 µm to 100 µm. 支持基材から剥離した後のポリイミドフィルムの剥離面は、表面粗さRaが100nm以下である請求項1〜5のいずれかに記載のポリイミド積層体。   The polyimide laminate according to any one of claims 1 to 5, wherein the release surface of the polyimide film after peeling from the support substrate has a surface roughness Ra of 100 nm or less. ポリイミド層の表面側に所定の機能層を形成した後、背面側の支持基材を分離して用いる請求項1〜6のいずれかに記載のポリイミド積層体。   The polyimide laminate according to any one of claims 1 to 6, wherein after forming a predetermined functional layer on the surface side of the polyimide layer, the support substrate on the back side is separated and used. 支持基材の背面側に更に粘着層を備える請求項1〜7のいずれかに記載のポリイミド積層体。   The polyimide laminated body in any one of Claims 1-7 further equipped with the adhesion layer in the back side of a support base material. ポリイミド層の背面側に支持基材を備えたポリイミド積層体の製造方法であって、ガラス転移温度Tgが300℃以上であると共に、表面粗さRaが100nm以下の耐熱性ポリイミドにより形成された耐熱ポリイミド面を有する長尺状の支持基材をロール・トゥ・ロールプロセスで搬送しながら、長尺状の支持基材の耐熱ポリイミド面上に、含フッ素ポリアミド酸の樹脂溶液を塗布し、支持基材ごと200℃以上に加熱処理してポリアミド酸をイミド化させて、支持基材上に440nmから780nmの波長領域での透過率が70%以上のポリイミド層を形成すると共に、支持基材とポリイミド層との接着強度を1N/m以上500N/m以下にして、支持基材からポリイミド層からなるポリイミドフィルムを分離可能にすることを特徴とするポリイミド積層体の製造方法。   A method for producing a polyimide laminate comprising a support base on the back side of a polyimide layer, wherein the glass transition temperature Tg is 300 ° C. or higher and the surface roughness Ra is 100 nm or less and is formed by a heat resistant polyimide. While transporting a long support substrate having a polyimide surface by a roll-to-roll process, a fluorine-containing polyamic acid resin solution is applied onto the heat-resistant polyimide surface of the long support substrate, The whole material is heat-treated at 200 ° C. or more to imidize polyamic acid, and a polyimide layer having a transmittance of 70% or more in the wavelength region of 440 nm to 780 nm is formed on the support substrate, and the support substrate and polyimide The adhesive strength with the layer is 1 N / m or more and 500 N / m or less, and the polyimide film composed of the polyimide layer can be separated from the support substrate. Method for producing a polyimide laminate that. ポリアミド酸の加熱処理条件が、昇温加熱時の最高到達温度より20℃低い温度から最高到達温度までの高温加熱温度域での加熱時間が15分以内である請求項9に記載のポリイミド積層体の製造方法。   The polyimide laminate according to claim 9, wherein the heat treatment condition of the polyamic acid is within 15 minutes in a high-temperature heating temperature range from a temperature 20 ° C lower than the highest temperature achieved during heating and heating to the highest temperature. Manufacturing method. 支持基材における耐熱ポリイミド面を形成する耐熱性ポリイミドが、下記構造単位を有するポリイミドである請求項9又は10に記載のポリイミド積層体の製造方法。
Figure 0005931672
The manufacturing method of the polyimide laminated body of Claim 9 or 10 whose heat resistant polyimide which forms the heat resistant polyimide surface in a support base material is a polyimide which has the following structural unit.
Figure 0005931672
請求項9〜11のいずれかに記載された方法により得られたポリイミド積層体から、ポリイミド層を分離することを特徴とするポリイミドフィルムの製造方法。   The manufacturing method of the polyimide film characterized by isolate | separating a polyimide layer from the polyimide laminated body obtained by the method as described in any one of Claims 9-11.
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