JP2017185806A - Polyimide resin laminate and manufacturing method therefor - Google Patents

Polyimide resin laminate and manufacturing method therefor Download PDF

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JP2017185806A
JP2017185806A JP2017068868A JP2017068868A JP2017185806A JP 2017185806 A JP2017185806 A JP 2017185806A JP 2017068868 A JP2017068868 A JP 2017068868A JP 2017068868 A JP2017068868 A JP 2017068868A JP 2017185806 A JP2017185806 A JP 2017185806A
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layer
base material
polyimide resin
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carrier
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JP7030418B2 (en
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林 信行
Nobuyuki Hayashi
信行 林
平石 克文
Katsufumi Hiraishi
克文 平石
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Nippon Steel Chemical and Materials Co Ltd
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Nippon Steel and Sumikin Chemical Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0046Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
    • B32B37/0053Constructional details of laminating machines comprising rollers; Constructional features of the rollers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00Ancillary operations in connection with laminating processes
    • B32B38/10Removing layers, or parts of layers, mechanically or chemically
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02Physical, chemical or physicochemical properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/086Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/30Properties of the layers or laminate having particular thermal properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
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  • Laminated Bodies (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a polyimide resin laminate used for a display or a touch panel and capable of suppressing warpage as much as possible while maintaining handling ability in a manufacturing process and thickness as a substrate.SOLUTION: There is provided a polyimide resin laminate by laminating a curl suppression layer consisting of a polyimide resin, a carrier layer consisting of the polyimide resin and a substrate layer consisting of the polyimide resin, the curl suppression layer and the carrier layer are detachably adhered to one surface side of the substrate layer and thermal expansion coefficient (CTE) of a layer contacting with the substrate layer is smaller or larger than CTEs of any other layers.SELECTED DRAWING: Figure 1

Description

本発明は、ポリイミド基板上に液晶表示装置、有機ELディスプレイ、有機EL照明、電子ペーパー、タッチパネル、カラーフィルター等の機能層が形成されたポリイミド樹脂積層体及びその製造方法に関する。   The present invention relates to a polyimide resin laminate in which functional layers such as a liquid crystal display device, an organic EL display, organic EL lighting, electronic paper, a touch panel, and a color filter are formed on a polyimide substrate, and a method for manufacturing the same.

液晶表示装置や有機EL表示装置等の表示装置は、テレビのような大型ディスプレイから、携帯電話、パソコン、スマートフォンなどの小型ディスプレイに至るまで、幅広く使用されている。例えば、有機EL表示装置では、ガラス基板上に薄膜トランジスタ(TFT)を形成し、電極、発光層、電極等を順次形成し、最後に別途ガラス基板や多層薄膜等で気密封止して作られる。   Display devices such as liquid crystal display devices and organic EL display devices are widely used from large displays such as televisions to small displays such as mobile phones, personal computers and smartphones. For example, in an organic EL display device, a thin film transistor (TFT) is formed on a glass substrate, an electrode, a light emitting layer, an electrode and the like are sequentially formed, and finally airtightly sealed with a glass substrate and a multilayer thin film.

ここで、表示装置の種類は特に制限しないが、液晶表示装置、有機EL表示装置、電子ペーパーをはじめとする表示装置、及びカラーフィルター等の表示装置の構成部品も含んでいる。また、有機EL照明装置、タッチパネル装置、ITO等が積層された導電性フィルム、水分や酸素等の浸透を防止するガスバリアフィルム、フレキシブル回路基板の構成部品などを含めた、前記表示装置に付随して使用される各種機能装置も包含される。すなわち、本発明で言うフレキシブルデバイスとは、液晶表示装置、有機EL表示装置、及びカラーフィルター等の構成部品のみならず、有機EL照明装置、タッチパネル装置、有機EL表示装置の電極層もしくは発光層、ガスバリアフィルム、接着フィルム、薄膜トランジスタ(TFT)、液晶表示装置の配線層もしくは透明導電層等の1種又は2種以上を組み合わせたものも含めている。   Here, the type of the display device is not particularly limited, but includes display device components such as a liquid crystal display device, an organic EL display device, electronic paper, and a color filter. In addition, the display device includes an organic EL lighting device, a touch panel device, a conductive film laminated with ITO, a gas barrier film that prevents permeation of moisture, oxygen, and the like, and components of a flexible circuit board. Various functional devices used are also included. That is, the flexible device referred to in the present invention is not only a component such as a liquid crystal display device, an organic EL display device, and a color filter, but also an organic EL lighting device, a touch panel device, an electrode layer or a light emitting layer of the organic EL display device, A gas barrier film, an adhesive film, a thin film transistor (TFT), a wiring layer of a liquid crystal display device, or a combination of two or more types such as a transparent conductive layer is also included.

ガラス基板を樹脂基材に置き換えることで、薄型化、軽量化、フレキシブル化が実現でき、表示装置の用途を更に広げることが可能になる。ところが、樹脂はガラスと比較して寸法安定性、透明性、耐熱性、耐湿性、ガスバリア性等に劣るといった問題がある。   By replacing the glass substrate with a resin base material, it is possible to realize a reduction in thickness, weight, and flexibility, thereby further expanding the applications of the display device. However, there are problems that the resin is inferior in dimensional stability, transparency, heat resistance, moisture resistance, gas barrier properties, etc., compared to glass.

例えば、特許文献1は、フレキシブルディスプレイ用プラスチック基板として有用なポリイミド、及びその前駆体に係る発明に関し、シクロへキシルフェニルテトラカルボン酸等のような脂環式構造を含んだテトラカルボン酸類を用いて、各種ジアミンと反応させたポリイミドが、透明性に優れることを開示している。この他にも、ガラス基板の替わりにフレキシブルな樹脂基材を用いて軽量化を図る試みがなされており、例えば、非特許文献1及び2では、透明性の高いポリイミドを利用した有機EL表示装置が提案されている。   For example, Patent Document 1 relates to a polyimide useful as a plastic substrate for a flexible display and an invention relating to a precursor thereof, and uses tetracarboxylic acids containing an alicyclic structure such as cyclohexylphenyltetracarboxylic acid. Discloses that the polyimide reacted with various diamines is excellent in transparency. In addition to this, attempts have been made to reduce the weight by using a flexible resin base instead of a glass substrate. For example, in Non-Patent Documents 1 and 2, an organic EL display device using highly transparent polyimide is used. Has been proposed.

このように、ポリイミド等の樹脂フィルムがフレキシブルディスプレイ用の支持基材に有用であることは知られているが、表示装置の製造工程は、既にガラス基板を用いて行なわれており、その生産設備の大半はガラス基板を使用することを前提に設計されている。したがって、既存の生産設備を有効活用しながら、表示装置を生産できることが望ましい。   Thus, although it is known that a resin film such as polyimide is useful as a support base material for a flexible display, the manufacturing process of the display device has already been performed using a glass substrate, and its production equipment Most of them are designed on the assumption that glass substrates are used. Therefore, it is desirable to be able to produce display devices while effectively utilizing existing production equipment.

その検討例の一つとして、ガラス基板上に樹脂を積層した状態で所定の表示装置の製造工程を完了させ、その後にガラス基板を取り除くことで、樹脂の基材の上に表示部を備えた表示装置を製造する方法がある(特許文献2〜3、非特許文献3〜4参照)。このような方法の場合、樹脂基材上に形成された表示部に損傷を与えずに樹脂基材とガラスとを分離することが重要となる。   As one of the examination examples, the manufacturing process of a predetermined display device is completed in a state where the resin is laminated on the glass substrate, and then the glass substrate is removed to provide a display unit on the resin base material. There are methods for manufacturing a display device (see Patent Documents 2 to 3 and Non-Patent Documents 3 to 4). In the case of such a method, it is important to separate the resin base material and the glass without damaging the display portion formed on the resin base material.

すなわち、特許文献3や非特許文献3では、ガラス基板上に塗布して固着した樹脂基材に対して所定の表示部を形成した後、EPLaR(Electronics on Plastic by Laser Release)プロセスと呼ばれる方法によりガラス側からレーザーを照射して、表示部を備えた樹脂基材をガラス基板から強制分離している。また、特許文献2や非特許文献4では、ガラス基板に剥離層を形成した上で、剥離層よりも一回り大きくポリイミド樹脂を塗布してポリイミド層を形成し、剥離層に達する切断線を入れて、剥離層から一回り小さいポリイミドフィルムを剥離するようにしている。   That is, in Patent Document 3 and Non-Patent Document 3, after a predetermined display portion is formed on a resin base material applied and fixed on a glass substrate, a method called an EPLaR (Electronics on Plastic by Laser Release) process is used. The resin base material provided with the display part is forcibly separated from the glass substrate by irradiating a laser from the glass side. In Patent Document 2 and Non-Patent Document 4, after a release layer is formed on a glass substrate, a polyimide resin is applied slightly larger than the release layer to form a polyimide layer, and a cutting line reaching the release layer is inserted. Thus, a slightly smaller polyimide film is peeled off from the release layer.

一方、ガラス基板上に樹脂を積層させた場合には、反りが大きな問題になる。すなわち、ガラス基板の熱膨張係数は数ppm/Kであるのに対し、一般に樹脂は数十ppm/K以上の熱膨張係数を有することから、例えば、ガラス基板上に樹脂溶液を塗布し、加熱処理等により硬化させて樹脂層を形成して、室温まで放冷すると、反りが発生してしまう。このような反りを抑制できなければ、その後の表示部の形成等に悪影響を与えてしまう。   On the other hand, when a resin is laminated on a glass substrate, warping becomes a big problem. That is, the thermal expansion coefficient of the glass substrate is several ppm / K, whereas the resin generally has a thermal expansion coefficient of several tens of ppm / K or more. For example, a resin solution is applied on the glass substrate and heated. When it is cured by treatment or the like to form a resin layer and allowed to cool to room temperature, warpage occurs. If such warpage cannot be suppressed, the subsequent formation of the display portion and the like will be adversely affected.

ポリイミド積層体を使用する工程において、フレキシブルディスプレイTFT基板工程は、通常、In-Ga-Zn-O半導体(IGZO)又は低温ポリシリコン(LTPS)工法が使われており、350℃以上の熱をかける。その際、ガラス基板の熱膨張係数は数ppm/Kであることに対し、一般に樹脂は数十ppm/K以上の熱膨張係数を有することから、積層体は反りが発生してしまい、表示部の微細化ができなくなる恐れがある。   In the process using a polyimide laminate, the flexible display TFT substrate process usually uses an In-Ga-Zn-O semiconductor (IGZO) or low-temperature polysilicon (LTPS) method, and heat is applied at 350 ° C or higher. . At that time, the thermal expansion coefficient of the glass substrate is several ppm / K, whereas the resin generally has a thermal expansion coefficient of several tens of ppm / K or more, so that the laminate is warped, and the display unit There is a risk that it will not be possible to reduce the size.

この点について、特許文献3では、支持基板と樹脂フィルム(a)との間に、熱膨張係数が支持基板と樹脂フィルム(a)との間にあるような樹脂層(b)を設けることを開示しているが、反りの抑制効果は十分ではない。   In this regard, in Patent Document 3, a resin layer (b) having a thermal expansion coefficient between the support substrate and the resin film (a) is provided between the support substrate and the resin film (a). Although disclosed, the effect of suppressing warpage is not sufficient.

ところで、ディスプレイやタッチパネルなどをロール・ツー・ロール(Roll to Roll;以下「RTR」ともいう。)方式で製造する場合、支持基材となるフィルムにはプロセス中において300℃を超える高温処理に耐えられるため、耐熱性に優れた材料であることが要求される。また、光透過率を考えると薄いフィルムが好ましい。しかし、薄いフィルムをハンドリングすることは困難であり、製造も難しいため、現状、透明フィルムとしては、50μm以上の厚さのものが使われている。
また、ハンドリングや製造の容易さと薄さを両立させる方法として、キャリア付の透明フィルムが提案されている。このキャリア付積層フィルムは、接着剤を用いることなくキャリアフィルムと透明基材フィルムが積層されており、透明基材の上に薄膜トランジスタなどの機能層を成形した後、更に前面板と貼りあわせた後、キャリアフィルムを剥がすことで、製造工程におけるハンドリング性と、ディスプレイやタッチパネルにおける透明支持基材としての薄さを両立できる。
しかし、従来のキャリア付積層フィルムでは、反り(カール)が発生し易く、製造工程におけるハンドリング性が非常に悪いものであった。
By the way, when a display, a touch panel, etc. are manufactured by a roll-to-roll (hereinafter also referred to as “RTR”) system, the film as a supporting substrate can withstand high temperature processing exceeding 300 ° C. during the process. Therefore, the material is required to be excellent in heat resistance. Moreover, when considering the light transmittance, a thin film is preferable. However, since it is difficult to handle a thin film and it is difficult to manufacture, a transparent film having a thickness of 50 μm or more is currently used.
In addition, a transparent film with a carrier has been proposed as a method of achieving both handling and manufacturing ease and thinness. In this laminated film with carrier, a carrier film and a transparent substrate film are laminated without using an adhesive, and after forming a functional layer such as a thin film transistor on the transparent substrate, it is further bonded to the front plate By peeling off the carrier film, it is possible to achieve both handleability in the manufacturing process and thinness as a transparent support substrate in a display or a touch panel.
However, the conventional laminated film with a carrier is likely to warp (curl), and the handling property in the manufacturing process is very poor.

特許文献4では、反りの発生を抑制するために、ガラス基板等の支持体に対して、それよりも熱膨張係数が小さい第1のポリイミド層を設け、その上に、熱膨張係数が支持体よりも大きい第2のポリイミド層を設けることを開示しているが、ガラス基板ではない耐熱性樹脂からなる支持体についての検討は開示されていない。   In patent document 4, in order to suppress generation | occurrence | production of curvature, the 1st polyimide layer whose thermal expansion coefficient is smaller than it is provided with respect to support bodies, such as a glass substrate, and a thermal expansion coefficient is a support body on it. Although providing the 2nd polyimide layer larger than this is disclosed, the examination about the support body which consists of heat resistant resin which is not a glass substrate is not disclosed.

特開2008-231327号公報JP 2008-231327 A 特許4834758号公報Japanese Patent No. 4834758 特許5408848号公報Japanese Patent No. 5408848 特開2015-182393号公報JP-A-2015-182393

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従って、本発明の目的は、ディスプレイやタッチパネルにガラス代替基板として利用されるキャリア付ポリイミド樹脂積層体であって、キャリア材としてRTRプロセスに適用できる耐熱性樹脂を使用した場合においても、製造工程におけるハンドリング性とディスプレイやタッチパネルにおける支持基材としての薄さを維持しつつ、反り(カール)を極力抑制でき、かつ、キャリア材から支持基材を容易かつ簡便に分離できるポリイミド樹脂積層体及びその製造方法を提供することである。   Therefore, the object of the present invention is a polyimide resin laminate with a carrier used as a glass substitute substrate for a display or a touch panel, and even in the case where a heat resistant resin applicable to the RTR process is used as a carrier material, A polyimide resin laminate capable of suppressing curling as much as possible while maintaining handling properties and thinness as a support substrate in a display or touch panel, and capable of easily and easily separating the support substrate from a carrier material, and its production Is to provide a method.

そこで、本発明者らは、これらの課題を解決するために鋭意検討した結果、驚くべきことには、所定のポリイミド樹脂からなる基材層の一面側に、所定のポリイミド樹脂からなるカール抑制層及び所定のポリイミド樹脂からなるキャリア層を積層することにより、ハンドリング性や基材としての薄さを維持しつつ、反り(カール)を改善できることを見出し、本発明を完成するに至った。   Thus, as a result of intensive studies to solve these problems, the present inventors have surprisingly found that a curl suppressing layer made of a predetermined polyimide resin is provided on one side of a base material layer made of a predetermined polyimide resin. And by laminating a carrier layer made of a predetermined polyimide resin, it was found that curling can be improved while maintaining handling properties and thinness as a substrate, and the present invention has been completed.

すなわち、本発明は、ポリイミド樹脂からなるカール抑制層、ポリイミド樹脂からなるキャリア層、及び、ポリイミド樹脂からなる基材層が積層されたポリイミド樹脂積層体であって、該基材層の一面側に、カール抑制層及びキャリア層が剥離可能に接着され、該基材層に接している層の熱膨張係数(CTE)が、他の層のCTEのいずれよりも小さい又は大きいことを特徴とするポリイミド樹脂積層体である。   That is, the present invention is a polyimide resin laminate in which a curl suppressing layer made of a polyimide resin, a carrier layer made of a polyimide resin, and a base material layer made of a polyimide resin are laminated, on one side of the base material layer The polyimide, wherein the curl-suppressing layer and the carrier layer are detachably bonded, and the coefficient of thermal expansion (CTE) of the layer in contact with the base material layer is smaller or larger than any of the CTEs of the other layers It is a resin laminate.

本発明のポリイミド樹脂積層体は、次のいずれかの態様であることが好ましい。
1)キャリア層の一面側にカール抑制層を有し、さらに該カール抑制層に剥離可能に接着した基材層を有し、カール抑制層のCTEが支持層及び基材層のCTEのいずれよりも小さい又は大きいこと、
2)キャリア層の一面側に剥離可能に接着した基材層を有し、前記キャリア層の反対面側にカール抑制層を有し、キャリア層のCTEが基材層及びカール抑制層のCTEのいずれよりも小さい又は大きいこと。
The polyimide resin laminate of the present invention is preferably in any of the following aspects.
1) It has a curl suppressing layer on one side of the carrier layer, and further has a base material layer that is releasably adhered to the curl suppressing layer, and the CTE of the curl suppressing layer is higher than any of the CTE of the support layer and the base material layer. Small or large,
2) having a base material layer releasably bonded to one side of the carrier layer, having a curl suppression layer on the opposite side of the carrier layer, and the CTE of the carrier layer being the CTE of the base material layer and the curl control layer Smaller or larger than either.

本発明のポリイミド樹脂積層体は、基材層とキャリア層のCTE差、または、基材層とカール抑制層のCTE差が±40ppm/K以下であることが好ましい。
本発明のポリイミド樹脂積層体は、キャリア層の一面側にカール抑制層及び基材層を介在してさらに機能層が形成されてなるポリイミド樹脂積層体、または、キャリア層の一面側に基材層を介在してさらに機能層が形成されてなる機能層付きポリイミド樹脂積層体として、好ましく使用できる。
また、本発明のポリイミド樹脂積層体は、基材層の全光線透過率が80%以上、かつ、厚みが50μm以下であることが好ましく、基材層を形成するポリイミド樹脂のTgが300℃以上であることが好ましい。
In the polyimide resin laminate of the present invention, the CTE difference between the base material layer and the carrier layer or the CTE difference between the base material layer and the curl suppressing layer is preferably ± 40 ppm / K or less.
The polyimide resin laminate of the present invention is a polyimide resin laminate in which a functional layer is further formed on one side of the carrier layer with a curl suppression layer and a substrate layer interposed therebetween, or a substrate layer on the one side of the carrier layer It can be preferably used as a polyimide resin laminate with a functional layer in which a functional layer is further formed with an intervening layer interposed therebetween.
In the polyimide resin laminate of the present invention, the total light transmittance of the base material layer is preferably 80% or more and the thickness is preferably 50 μm or less, and the Tg of the polyimide resin forming the base material layer is 300 ° C. or more. It is preferable that

本発明の他の態様として、前記機能層付ポリイミド樹脂積層体を使用し、カール抑制層と基材層との界面、または、キャリア層と基材層との界面で剥離してキャリア層及びカール抑制層を除去してなる機能層付ポリイミドフィルムである。
また、本発明は、上記ポリイミド樹脂積層体を製造する方法であって、キャリア層にカール抑制層及び基材層をキャスト法にて形成することを特徴とするポリイミド樹脂積層体の製造方法である。
この製造方法は、キャリア層に塗工されたカール抑制層及び基材層を一体硬化すること
が好ましく、キャスト法が多層ダイ又は連続ダイによる塗工であることが好ましい。
As another aspect of the present invention, the polyimide resin laminate with a functional layer is used, and the carrier layer and the curl are peeled off at the interface between the curl suppressing layer and the base material layer or at the interface between the carrier layer and the base material layer. It is a polyimide film with a functional layer formed by removing the suppression layer.
Moreover, this invention is a method of manufacturing the said polyimide resin laminated body, Comprising: A curl suppression layer and a base material layer are formed in a carrier layer by the casting method, It is a manufacturing method of the polyimide resin laminated body characterized by the above-mentioned. .
In this production method, the curl suppressing layer and the base material layer coated on the carrier layer are preferably integrally cured, and the casting method is preferably coating with a multilayer die or a continuous die.

本発明によれば、製造工程におけるハンドリング性とディスプレイやタッチパネルにおける支持基材としての薄さを維持しつつ、反り(カール)を極力抑制でき、ディスプレイやタッチパネル用途におけるポリイミド樹脂積層体の要求特性を満たすことができる。   According to the present invention, it is possible to suppress warping (curl) as much as possible while maintaining the handling property in the manufacturing process and the thinness as a support base material in a display or a touch panel, and the required characteristics of the polyimide resin laminate for display or touch panel applications. Can be satisfied.

本発明の積層体について、各層構成を示す断面図である。It is sectional drawing which shows each layer structure about the laminated body of this invention. 積層体について、機能層を形成するための装置の模式図である。It is a schematic diagram of the apparatus for forming a functional layer about a laminated body. 積層体に反りが発生する様子を示すシミュレーション図である。It is a simulation figure which shows a mode that curvature generate | occur | produces in a laminated body.

先ず、本発明のポリイミド樹脂積層体は、ポリイミド樹脂からなるキャリア層を備える。キャリア層は、薄膜の基材層をRTRプロセスにおいて所定形状に維持するものであり、基材層を介在してITO膜などの機能層が形成された後においては、基材層から剥離除去されるものである。そのため、RTRプロセスに適応するためにフレキシブル性、及び基材層を補強して強度を維持することが要求されるが、透明性は必ずしも必要としない。そのため、キャリア層の厚みは、薄膜の基材層に比べて大きく、好ましくは10〜100μm、より好ましくは30〜75μmである。また、RTRの高温プロセスに適用できる耐熱性が要求されることから、ガラス転移温度(Tg)は、好ましくは300℃以上、より好ましくは300〜450℃である。   First, the polyimide resin laminate of the present invention includes a carrier layer made of a polyimide resin. The carrier layer maintains the thin base layer in a predetermined shape in the RTR process, and is peeled off from the base layer after a functional layer such as an ITO film is formed through the base layer. Is. Therefore, in order to adapt to the RTR process, it is required to maintain flexibility by reinforcing the base material layer, but transparency is not necessarily required. Therefore, the thickness of the carrier layer is larger than that of the thin film base layer, preferably 10 to 100 μm, more preferably 30 to 75 μm. Moreover, since the heat resistance applicable to the high temperature process of RTR is requested | required, Preferably glass transition temperature (Tg) is 300 degreeC or more, More preferably, it is 300-450 degreeC.

本発明のポリイミド樹脂積層体は、ポリイミド樹脂からなるカール抑制層(以下、単にカール抑制層ともいう。)、ポリイミド樹脂からなるキャリア層(以下、単にキャリア層ともいう。)、及び、ポリイミド樹脂からなる基材層(以下、単に基材層ともいう。)が積層されたポリイミド積層体であって、基材層の一面側に、カール抑制層及びキャリア層の積層体が剥離可能に接着されていることを特徴とする。さらに、前記ポリイミド樹脂積層体において、基材層に接している層のCTEが、他の層のCTEのいずれよりも小さい又は大きいことを特徴とする。
ここで、基材層に接している層とは、カール抑制層又はキャリア層のいずれか二態様があり、他の層とは、基材層に接している層がカール抑制層の場合、基材層及びキャリア層をいい、基材層に接している層がキャリア層の場合、基材層及びカール抑制層をいう。
なお、前記ポリイミド樹脂積層体の形態は2種類ある(形態1及び形態2)。以下に、各形態について、具体的に説明する。
The polyimide resin laminate of the present invention includes a curl suppression layer made of polyimide resin (hereinafter also simply referred to as a curl suppression layer), a carrier layer made of polyimide resin (hereinafter also simply referred to as a carrier layer), and a polyimide resin. A polyimide laminate in which a base material layer (hereinafter also simply referred to as a base material layer) is laminated, and a laminate of a curl suppressing layer and a carrier layer is detachably adhered to one surface side of the base material layer. It is characterized by being. Furthermore, in the polyimide resin laminate, the CTE of the layer in contact with the base material layer is smaller or larger than any of the CTEs of the other layers.
Here, the layer in contact with the base material layer has either two forms of a curl suppression layer or a carrier layer, and the other layer is a base when the layer in contact with the base material layer is a curl control layer. The material layer and the carrier layer are referred to. When the layer in contact with the base material layer is the carrier layer, the material layer and the curl suppressing layer are referred to.
There are two types of the polyimide resin laminate (form 1 and form 2). Below, each form is demonstrated concretely.

[形態1]
形態1のポリイミド樹脂積層体は、キャリア層の一面側にカール抑制層を有し、さらに該カール抑制層に剥離可能に接着した基材層を有し、カール抑制層のCTEがキャリア層及び基材層のCTEのいずれよりも小さいか又は大きい。
[Form 1]
The polyimide resin laminate of aspect 1 has a curl suppression layer on one side of the carrier layer, and further has a base material layer that is releasably bonded to the curl suppression layer, and the CTE of the curl suppression layer is the carrier layer and the base layer. Smaller or larger than any of the material layer CTEs.

また、反り抑制の観点から、キャリア層のCTEは、基材層のCTEに近似することがよく、両者のCTE差(ΔCTE)は、好ましくは、±15ppm/K以内、より好ましくは、基材層のCTEがキャリア層のCTEに比べて+15ppm/K以内の差、つまり、CTE差が0〜+15ppm/Kである。なお、例えば、キャリア層のCTEは、好ましくは10〜85ppm/Kである。ここで、CTE差が±15ppm/K以内とは、基材層のCTEがキャリア層のCTEに比べて−15〜+15ppm/Kの差であることを意味する。   Further, from the viewpoint of warpage suppression, the CTE of the carrier layer is preferably approximated to the CTE of the base material layer, and the CTE difference (ΔCTE) between them is preferably within ± 15 ppm / K, more preferably the base material. The difference in the CTE of the layer is within +15 ppm / K compared to the CTE of the carrier layer, that is, the CTE difference is 0 to +15 ppm / K. For example, the CTE of the carrier layer is preferably 10 to 85 ppm / K. Here, the CTE difference within ± 15 ppm / K means that the CTE of the base material layer is a difference of −15 to +15 ppm / K compared to the CTE of the carrier layer.

キャリア層の一面側には、後記カール抑制層を介在して、基材層を有する。基材層は、その上にITO膜などの機能層が形成され、RTRプロセス終了後において、キャリア層を剥離除去した後、機能層を支持するガラス代替の透明基材となるものである。よって、基材層は、その全光線透過率が好ましくは80%以上、より好ましくは90%以上である。基材層の厚みは、薄型化、軽量化、フレキシブル化の要求特性から、極力薄いものがよく、好ましくは50μm以下、より好ましくは5〜25μmである。基材層のCTEは、上述のとおり、キャリア層のCTEに近似することがよく、好ましくは10〜80ppm/Kである。また、RTRの高温プロセスに適用できる耐熱性が要求されることから、基材層のガラス転移温度(Tg)は、好ましくは300℃以上、より好ましくは300〜450℃である。ガラス代替の樹脂基材として利用されることから、基材層の弾性率は、例えば2〜15GPaであるのがよい。   On one side of the carrier layer, a base material layer is provided with a post-curl suppression layer interposed therebetween. The base material layer is formed with a functional layer such as an ITO film, and after the RTR process is finished, the carrier layer is peeled and removed, and then becomes a transparent substrate instead of glass that supports the functional layer. Therefore, the base material layer preferably has a total light transmittance of 80% or more, more preferably 90% or more. The thickness of the base material layer is preferably as thin as possible from the required characteristics of thinning, lightening, and flexibility, and is preferably 50 μm or less, more preferably 5 to 25 μm. As described above, the CTE of the base material layer should be close to the CTE of the carrier layer, and is preferably 10 to 80 ppm / K. Moreover, since the heat resistance applicable to the high temperature process of RTR is requested | required, the glass transition temperature (Tg) of a base material layer becomes like this. Preferably it is 300 degreeC or more, More preferably, it is 300-450 degreeC. The elastic modulus of the base material layer is preferably 2 to 15 GPa, for example, because it is used as a resin base material instead of glass.

キャリア層の一面側において、キャリア層と基材層との間には、ポリイミド樹脂からなるカール抑制層を有する。カール抑制層は、RTRプロセスに適応する観点から、キャリア付基材層の反りを極力抑制するために、キャリア層と基材層との間に形成され、キャリア層及びカール抑制層が基材層を介在させてITO膜などの機能層が形成され、RTRプロセス終了後において、キャリア層が剥離除去される際、キャリア層と共に除去されるものである。そのため、RTRプロセスにおいて反りを極力抑制するために、厚みや熱膨張係数が選択される。よって、カール抑制層の厚みは、好ましくは50μm以下、より好ましくは5〜30μmである。また、RTRの高温プロセスに適用できる耐熱性が要求されることから、Tgは、好ましくは300℃以上、より好ましくは300〜450℃である。
カール抑制層のCTEは、キャリア層及び基材層とのCTE差が相対的に大きくなるように選定する。例えば、キャリア層及び基材層のCTEが必ずしも同一でなくてもかまわないが、これら双方のCTEに対してカール抑制層のCTEが一定以上の差を有するように選定することがよい。
そのため、カール抑制層のCTEについて、キャリア層とのCTE差、及び基材層とのCTE差は、好ましくは、±15ppm/K以上、より好ましくは、−15〜−60ppm/Kの範囲のCTE差である。なお、カール抑制層のCTEは、好ましくは、−10〜20ppm/Kである。ここで、CTE差が±15ppm/K以上とは、カール抑制層のCTEが、キャリア層のCTE及び基材層のCTEに比べて、−15ppm/Kよりも差が大きい、または、+15ppm/Kよりも差が大きいことを意味する。
On one side of the carrier layer, a curl suppressing layer made of polyimide resin is provided between the carrier layer and the base material layer. From the viewpoint of adapting to the RTR process, the curl suppression layer is formed between the carrier layer and the base material layer in order to suppress the warpage of the base material layer with carrier as much as possible, and the carrier layer and the curl suppression layer are the base material layer. A functional layer such as an ITO film is formed with the intervening layer, and when the carrier layer is peeled and removed after completion of the RTR process, the functional layer is removed together with the carrier layer. Therefore, the thickness and the thermal expansion coefficient are selected in order to suppress warping as much as possible in the RTR process. Therefore, the thickness of the curl suppressing layer is preferably 50 μm or less, more preferably 5 to 30 μm. Moreover, since heat resistance applicable to the high temperature process of RTR is requested | required, Tg becomes like this. Preferably it is 300 degreeC or more, More preferably, it is 300-450 degreeC.
The CTE of the curl suppression layer is selected so that the CTE difference between the carrier layer and the base material layer is relatively large. For example, the CTE of the carrier layer and the base material layer may not necessarily be the same, but it is preferable to select the CTE of the curl suppression layer to have a certain difference or more with respect to both of these CTEs.
Therefore, for the CTE of the curl suppression layer, the CTE difference with the carrier layer and the CTE difference with the base material layer are preferably ± 15 ppm / K or more, more preferably CTE in the range of −15 to −60 ppm / K. It is a difference. The CTE of the curl suppressing layer is preferably −10 to 20 ppm / K. Here, the CTE difference of ± 15 ppm / K or more means that the CTE of the curl suppression layer is larger than −15 ppm / K compared to the CTE of the carrier layer and the CTE of the base material layer, or +15 ppm / K. Means that the difference is greater.

キャリア層及び基材層によってなるキャリア付基材が、カール抑制層を、キャリア層及び基材層との間に存在することにより、特に、いわゆるガラス基板の第四世代(680×880mm〜730×920mm)以降に相当する比較的大きな積層体にした場合でも、反りの抑制効果を十分に得ることができる。加えて、カール抑制層の存在により、基材層の設計自由度を高めることができる。さらに、キャリア層に付着した異物が基材層に混入しにくい。また、キャリア層の表面状態が基材層に影響しにくいため、安価なポリイミドフィルムを選択できる等、キャリア層の設計自由度を高めることができる。   The carrier-attached base material composed of the carrier layer and the base material layer has a curl-suppressing layer between the carrier layer and the base material layer, so that the fourth generation of the so-called glass substrate (680 × 880 mm to 730 × Even when a relatively large laminate corresponding to 920 mm) or later is used, the effect of suppressing warping can be sufficiently obtained. In addition, the presence of the curl suppression layer can increase the degree of freedom in designing the base material layer. Furthermore, the foreign matter adhering to the carrier layer is not easily mixed into the base material layer. In addition, since the surface state of the carrier layer hardly affects the base material layer, it is possible to increase the degree of freedom in designing the carrier layer, such as selecting an inexpensive polyimide film.

[形態2]
形態2のポリイミド樹脂積層体は、キャリア層の一面側に剥離可能に接着した基材層を有し、さらに該キャリア層の反対面側にカール抑制層を有し、該キャリア層のCTEが該基材層及び該カール抑制層のCTEのいずれよりも小さいか又は大きい。
つまり、キャリア層は、基材層とカール抑制層との間に位置している。この構成であれば、反り抑制の観点から好ましい。なお、例えば、キャリア層のCTEは、好ましくは10〜70ppm/Kである。
[Form 2]
The polyimide resin laminate of aspect 2 has a base material layer that is releasably bonded to one side of the carrier layer, and further has a curl suppressing layer on the opposite side of the carrier layer, and the CTE of the carrier layer is It is smaller or larger than any of the CTE of the base material layer and the curl suppressing layer.
That is, the carrier layer is located between the base material layer and the curl suppressing layer. If it is this structure, it is preferable from a viewpoint of curvature suppression. For example, the CTE of the carrier layer is preferably 10 to 70 ppm / K.

基材層は、その上にITO膜などの機能層が形成され、RTRプロセス終了後において、キャリア層を剥離除去した後、機能層を支持するガラス代替の透明基材となるものである。よって、基材層は、その全光線透過率が好ましくは80%以上、より好ましくは90%以上である。基材層の厚みは、薄型化、軽量化、フレキシブル化の要求特性から、加工性が損なわれない範囲で、薄いものほどよく、好ましくは50μm以下、より好ましくは5〜25μmである。基材層のCTEは、好ましくは1〜80ppm/Kである。
また、RTRの高温プロセスに適用できる耐熱性が要求されることから、ガラス転移温度(Tg)は、好ましくは300℃以上、より好ましくは300〜450℃である。ガラス代替の樹脂基材として利用されることから、基材層の弾性率は、例えば2〜15GPaであるのがよい。
The base material layer is formed with a functional layer such as an ITO film, and after the RTR process is finished, the carrier layer is peeled and removed, and then becomes a transparent substrate instead of glass that supports the functional layer. Therefore, the base material layer preferably has a total light transmittance of 80% or more, more preferably 90% or more. The thickness of the base material layer is preferably as thin as possible within the range that does not impair the workability from the required characteristics of thinning, lightening, and flexibility, and is preferably 50 μm or less, more preferably 5 to 25 μm. The CTE of the base material layer is preferably 1 to 80 ppm / K.
Moreover, since the heat resistance applicable to the high temperature process of RTR is requested | required, Preferably glass transition temperature (Tg) is 300 degreeC or more, More preferably, it is 300-450 degreeC. The elastic modulus of the base material layer is preferably 2 to 15 GPa, for example, because it is used as a resin base material instead of glass.

キャリア層の反対面側には、ポリイミド樹脂からなるカール抑制層を有する。カール抑制層は、RTRプロセスに適応する観点から、キャリア付基材層の反りを極力抑制するために、基材層とは反対側に形成され、キャリア層が基材層を介在させてITO膜などの機能層が形成され、RTRプロセス終了後において、キャリア層が剥離除去される際、キャリア層と共に除去されるものである。そのため、RTRプロセスにおいて反り(カール)を極力抑制するために、厚みや熱膨張係数が選択される。よって、カール抑制層の厚みは、好ましくは50μm以下、より好ましくは6〜30μmである。また、RTRの高温プロセスに適用できる耐熱性が要求されることから、ガラス転移温度(Tg)は、好ましくは300℃以上、より好ましくは300〜450℃である。
カール抑制層のCTEは、基材層のCTEに近似することがよく、かつ、キャリア層と基材層とのCTE差を打ち消すように選定することがよい。そのため、基材層とのCTE差は、±40ppm/K以内、好ましくは±15ppm/K以内である。例えば、カール抑制層のCTEは、好ましくは1〜90ppm/Kである。
On the opposite side of the carrier layer, there is a curl suppression layer made of polyimide resin. From the viewpoint of adapting to the RTR process, the curl suppression layer is formed on the side opposite to the base material layer in order to suppress the warpage of the base material layer with carrier as much as possible, and the carrier layer interposes the base material layer and the ITO film. When the carrier layer is peeled and removed after completion of the RTR process, the functional layer is removed together with the carrier layer. Therefore, thickness and thermal expansion coefficient are selected in order to suppress warping (curl) as much as possible in the RTR process. Therefore, the thickness of the curl suppressing layer is preferably 50 μm or less, more preferably 6 to 30 μm. Moreover, since the heat resistance applicable to the high temperature process of RTR is requested | required, Preferably glass transition temperature (Tg) is 300 degreeC or more, More preferably, it is 300-450 degreeC.
The CTE of the curl suppressing layer is preferably close to the CTE of the base material layer, and is preferably selected so as to cancel the CTE difference between the carrier layer and the base material layer. Therefore, the CTE difference with the base material layer is within ± 40 ppm / K, preferably within ± 15 ppm / K. For example, the CTE of the curl suppressing layer is preferably 1 to 90 ppm / K.

キャリア層及び基材層によってなるキャリア付基材が、カール抑制層を、基材とは反対側に存在することにより、特に、いわゆるガラス基板の第四世代(680×880mm〜730×920mm)以降に相当する比較的大きな積層体にした場合でも、反りの抑制効果を十分に得ることができる。加えて、カール抑制層の存在により、基材層の設計自由度を高めることができる。   The base material with carrier consisting of the carrier layer and the base material layer has the curl suppression layer on the side opposite to the base material, so that the fourth generation of the so-called glass substrate (680 × 880 mm to 730 × 920 mm) or later in particular. Even when a relatively large laminated body corresponding to the above is used, the effect of suppressing warpage can be sufficiently obtained. In addition, the presence of the curl suppression layer can increase the degree of freedom in designing the base material layer.

以下に、形態1及び形態2に共通する内容について、具体的に説明する。   Below, the content common to the form 1 and the form 2 is demonstrated concretely.

カール抑制層として使用されるポリイミド樹脂は、上記特性を満たせば特に制限されないが、例えば、下記一般式(1)で表される構造単位を有するポリイミドにより形成することが挙げられる。好ましくは、下記一般式(1)で表される構造単位を50モル%以上含有するポリイミドであるのがよい。

Figure 2017185806
The polyimide resin used as the curl suppressing layer is not particularly limited as long as the above characteristics are satisfied. For example, it may be formed of polyimide having a structural unit represented by the following general formula (1). Preferably, it is a polyimide containing 50 mol% or more of a structural unit represented by the following general formula (1).
Figure 2017185806

ここで、上記一般式(1)におけるXは、芳香族基又は脂環式基であって、芳香環又は脂環を1個以上有する4価の有機基であり、Rは炭素数1〜6の置換基である。このうち、基Xを形成するための原料となる好適な具体例としては、例えば、ピロメリット酸二無水物(PMDA)、ナフタレン-2,3,6,7-テトラカルボン酸二無水物(NTCDA)、3,3',4,4'-ビフェニルテトラカルボン酸二無水物(BPDA)等が挙げられる。また、Rの好適な具体例としては、例えば、-CH、-CF等が挙げられる。 Here, X in the general formula (1) is an aromatic group or an alicyclic group, which is a tetravalent organic group having one or more aromatic rings or alicyclic rings, and R is a carbon number of 1-6. Is a substituent. Among these, suitable specific examples of raw materials for forming the group X include, for example, pyromellitic dianhydride (PMDA), naphthalene-2,3,6,7-tetracarboxylic dianhydride (NTCDA). ), 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride (BPDA) and the like. Further, suitable examples of R, for example, -CH 3, -CF 3, and the like.

なかでも、Rが-CFであると、基材層との界面での剥離性を高めることができて、これらの分離を容易にすることができる。 In particular, when R is —CF 3 , the peelability at the interface with the base material layer can be improved, and separation of these can be facilitated.

なお、上記一般式(1)で表される構造単位以外に含めることができるもの、好適には最大で50モル%未満含むことができるものについては、一般的な酸無水物とジアミンとを用いた構造単位が挙げられる。なかでも好適に用いられる酸無水物としては、ピロメリット酸二無水物(PMDA)、ナフタレン-2,3,6,7-テトラカルボン酸二無水物(NTCDA)、3,3',4,4'-ビフェニルテトラカルボン酸二無水物(BPDA)、シクロヘキサンテトラカルボン酸二無水物、フェニレンビス(トリメリット酸モノエステル無水物)、4,4'-オキシジフタル酸二無水物、ベンゾフェノン‐3,4,3',4'‐テトラカルボン酸二無水物、ジフェニルスルホン‐3,4,3',4'-テトラカルボン酸二無水物、2,3,6,7-ナフタレンテトラカルボン酸二無水物、4,4'-(2,2'-ヘキサフルオロイソプロピリデン)ジフタル酸二無水物等である。一方、ジアミンとしては、m-フェニレンジアミン、p-フェニレンジアミン、2,4-ジアミノトルエン、4,4'-ジアミノジフェニルエーテル、1,3-ビス(4-アミノフェノキシ)ベンゼン、4,4'-ジアミノジフェニルスルホン、2,2−ビス(4−アミノベンジルオキシフェニル)プロパン、ビス〔4-(4-アミノフェノキシ)フェニル〕スルホン、4,4'-ジアミノベンズアニリド、9,9-ビス(4-アミノフェニル)フルオレン等である。   In addition, as for what can be contained other than the structural unit represented by the above general formula (1), preferably less than 50 mol% at maximum, a general acid anhydride and diamine can be used. Structural units. Among them, pyromellitic dianhydride (PMDA), naphthalene-2,3,6,7-tetracarboxylic dianhydride (NTCDA), 3,3 ′, 4,4 are preferably used. '-Biphenyltetracarboxylic dianhydride (BPDA), cyclohexanetetracarboxylic dianhydride, phenylenebis (trimellitic monoester anhydride), 4,4'-oxydiphthalic dianhydride, benzophenone-3,4, 3 ', 4'-tetracarboxylic dianhydride, diphenylsulfone-3,4,3', 4'-tetracarboxylic dianhydride, 2,3,6,7-naphthalene tetracarboxylic dianhydride, 4 4,4 '-(2,2'-hexafluoroisopropylidene) diphthalic dianhydride. On the other hand, diamines include m-phenylenediamine, p-phenylenediamine, 2,4-diaminotoluene, 4,4'-diaminodiphenyl ether, 1,3-bis (4-aminophenoxy) benzene, 4,4'-diamino. Diphenylsulfone, 2,2-bis (4-aminobenzyloxyphenyl) propane, bis [4- (4-aminophenoxy) phenyl] sulfone, 4,4′-diaminobenzanilide, 9,9-bis (4-amino) Phenyl) fluorene and the like.

一般に、ポリイミドの熱膨張係数が小さくなると透明性が低下すると共に、厚み方向のリタデーション(複屈折の差による位相差)が高くなってしまう。そのため、RTRプロセス終了後、キャリア層から分離した基材層を、例えば表示装置の樹脂基材として利用したり、ガスバリアフィルム、タッチパネル基板に用いる場合には不向きになる。それに対して、本発明では、反対側のカール抑制層の存在によって、キャリア層に比べて大きな熱膨張係数を有した基材層の使用が許容される。   In general, when the thermal expansion coefficient of polyimide is reduced, transparency is lowered and retardation in the thickness direction (phase difference due to difference in birefringence) is increased. Therefore, it becomes unsuitable when the base material layer separated from the carrier layer after the RTR process is used as, for example, a resin base material of a display device, a gas barrier film, or a touch panel substrate. On the other hand, in the present invention, the use of the base material layer having a larger thermal expansion coefficient than that of the carrier layer is allowed due to the presence of the curl suppressing layer on the opposite side.

基材層を形成するポリイミドは、ポリイミド樹脂積層体の用途に応じて適宜選択することができる。なかでも、液晶表示装置、有機EL表示装置、電子ペーパー、カラーフィルター、タッチパネル等の表示装置における可撓性を有した樹脂基材として利用する場合には、下記一般式(2)で表される構造単位を有するポリイミドが挙げられ、好ましくは、この一般式(2)で表される構造単位を50モル%以上含有するポリイミドである。なお、この一般式(2)で表される構造単位以外に含めることができるもの(好適には最大で50モル%未満含有するもの)については、透明性を阻害しない限り、一般式(1)で説明したものと同様のものが挙げられる。好適に用いられる酸無水物としては、ピロメリット酸二無水物(PMDA)、ナフタレン-2,3,6,7-テトラカルボン酸二無水物(NTCDA)、3,3',4,4'-ビフェニルテトラカルボン酸二無水物(BPDA)、シクロヘキサンテトラカルボン酸二無水物、フェニレンビス(トリメリット酸モノエステル無水物)、4,4'-オキシジフタル酸二無水物、ベンゾフェノン‐3,4,3',4'‐テトラカルボン酸二無水物、ジフェニルスルホン‐3,4,3',4'-テトラカルボン酸二無水物、2,3,6,7-ナフタレンテトラカルボン酸二無水物、4,4'-(2,2'-ヘキサフルオロイソプロピリデン)ジフタル酸二無水物等である。一方、ジアミンとしては、m-フェニレンジアミン、p-フェニレンジアミン、2,4-ジアミノトルエン、4,4'-ジアミノジフェニルエーテル、1,3-ビス(4-アミノフェノキシ)ベンゼン、4,4'-ジアミノジフェニルスルホン、2,2−ビス(4−アミノベンジルオキシフェニル)プロパン、ビス〔4-(4-アミノフェノキシ)フェニル〕スルホン、4,4'-ジアミノベンズアニリド、9,9-ビス(4-アミノフェニル)フルオレン等である。

Figure 2017185806
The polyimide which forms a base material layer can be suitably selected according to the use of a polyimide resin laminated body. In particular, when used as a flexible resin substrate in a display device such as a liquid crystal display device, an organic EL display device, electronic paper, a color filter, or a touch panel, it is represented by the following general formula (2). The polyimide which has a structural unit is mentioned, Preferably, it is a polyimide which contains 50 mol% or more of structural units represented by this General formula (2). In addition, about what can be contained other than the structural unit represented by this general formula (2) (preferably containing less than 50 mol% at the maximum), unless the transparency is inhibited, the general formula (1) The thing similar to what was demonstrated in (1) is mentioned. Preferred acid anhydrides include pyromellitic dianhydride (PMDA), naphthalene-2,3,6,7-tetracarboxylic dianhydride (NTCDA), 3,3 ′, 4,4′- Biphenyltetracarboxylic dianhydride (BPDA), cyclohexanetetracarboxylic dianhydride, phenylenebis (trimellitic monoester anhydride), 4,4'-oxydiphthalic dianhydride, benzophenone-3,4,3 ' , 4'-tetracarboxylic dianhydride, diphenylsulfone-3,4,3 ', 4'-tetracarboxylic dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 4,4 '-(2,2'-hexafluoroisopropylidene) diphthalic dianhydride and the like. On the other hand, diamines include m-phenylenediamine, p-phenylenediamine, 2,4-diaminotoluene, 4,4'-diaminodiphenyl ether, 1,3-bis (4-aminophenoxy) benzene, 4,4'-diamino. Diphenylsulfone, 2,2-bis (4-aminobenzyloxyphenyl) propane, bis [4- (4-aminophenoxy) phenyl] sulfone, 4,4′-diaminobenzanilide, 9,9-bis (4-amino) Phenyl) fluorene and the like.
Figure 2017185806

上記一般式(2)において、Yは、芳香族又は脂環式の4価の有機基であるが、好ましくは、下記式(3)で示したいずれかである。

Figure 2017185806
In the general formula (2), Y is an aromatic or alicyclic tetravalent organic group, and is preferably any one represented by the following formula (3).
Figure 2017185806

なかでも、基材層として、440nmから780nmの波長領域での500nmにおける透過率が80%以上であり、かつ、厚さ方向のリタデーションが200nm以下のポリイミド樹脂を得る観点から、より好ましくは、下記式(4)で示したいずれかである。

Figure 2017185806
Among them, as a base material layer, from the viewpoint of obtaining a polyimide resin having a transmittance in a wavelength range of 440 nm to 780 nm at 500 nm of 80% or more and a thickness direction retardation of 200 nm or less, more preferably, It is either shown by Formula (4).
Figure 2017185806

好適には、下記式(5)で表されるポリイミド樹脂である。

Figure 2017185806
Preferably, it is a polyimide resin represented by the following formula (5).
Figure 2017185806

キャリア層として使用されるポリイミド樹脂は、上述した特性を満たせば特に制限されないが、例えば、一般に入手可能なものとしてカプトン(東レ・デュポン社製)、ユーピレックス(宇部興産社製)、アピカル(カネカ社製)或いはこれらに類する構造を有する市販のポリイミドを使用してもよいし、以下に詳述するようにジアミンと酸二無水物から合成して得ることができる。   The polyimide resin used as the carrier layer is not particularly limited as long as it satisfies the above-mentioned characteristics. For example, Kapton (manufactured by Toray DuPont), Upilex (manufactured by Ube Industries), Apical (Kaneka) Or a commercially available polyimide having a structure similar to these, or can be synthesized from diamine and acid dianhydride as described in detail below.

上述した各種ポリイミドは、ポリイミド前駆体(以下、ポリアミド酸ともいう)をイミド化して得られるが、ポリアミド酸の樹脂溶液は、原料であるジアミンと酸二無水物とを実質的に等モル使用し、有機溶媒中で反応させることによって得ることができる。詳しくは、例えば、窒素気流下にN,N−ジメチルアセトアミド等の有機極性溶媒にジアミンを溶解させた後、テトラカルボン酸二無水物を加えて、室温で5時間程度反応させることにより得ることができる。ここで、塗工時の膜厚均一化や、得られるポリイミドの機械強度の観点から、ポリアミド酸の重量平均分子量(Mw)は1万から30万程度が好ましい。ポリイミド樹脂の好適な分子量範囲もポリアミド酸と同じ分子量範囲である。   The various polyimides described above are obtained by imidizing a polyimide precursor (hereinafter also referred to as polyamic acid), but the polyamic acid resin solution uses substantially equimolar amounts of diamine and acid dianhydride as raw materials. It can be obtained by reacting in an organic solvent. Specifically, for example, it can be obtained by dissolving diamine in an organic polar solvent such as N, N-dimethylacetamide under a nitrogen stream, adding tetracarboxylic dianhydride, and reacting at room temperature for about 5 hours. it can. Here, the weight average molecular weight (Mw) of the polyamic acid is preferably about 10,000 to 300,000 from the viewpoint of uniform film thickness during coating and the mechanical strength of the resulting polyimide. The preferred molecular weight range of the polyimide resin is also the same molecular weight range as that of the polyamic acid.

本発明における基材層及びカール抑制層は、好ましくは、それぞれポリイミド又はポリイミド前駆体の樹脂溶液を塗布・乾燥し、加熱処理する、いわゆるキャスト法により得られたものであるのがよい。すなわち、本発明のポリイミド樹脂積層体を得るにあたって、好適には、キャリア層の一面側または両面に、それぞれ、ポリイミド又はポリイミド前駆体の樹脂溶液を塗布・乾燥し、加熱処理することにより、基材層及びカール抑制層を形成することができる。例えば、乾燥などのために90〜130℃にて5〜30分程度の予備加熱処理を行った後、さらにイミド化のため130〜360℃にて10〜240分程度の高温加熱処理を行うことが好ましい。   The base material layer and the curl suppressing layer in the present invention are preferably obtained by a so-called casting method in which a polyimide or polyimide precursor resin solution is applied and dried, followed by heat treatment. That is, in obtaining the polyimide resin laminate of the present invention, it is preferable to apply and dry a polyimide or polyimide precursor resin solution on one side or both sides of the carrier layer, respectively, and heat-treat the substrate. Layers and curl suppression layers can be formed. For example, after preheating at 90 to 130 ° C. for about 5 to 30 minutes for drying, etc., further high temperature heating at 130 to 360 ° C. for about 10 to 240 minutes is performed for imidization. Is preferred.

このようにして得られたポリイミド樹脂積層体は、基材層と該基材層に接している層(キャリア層またはカール抑制層)との界面で分離可能になるが、これらの界面での分離を容易にするには、好ましくは、基材層が、ポリイミド構造中にフッ素原子を有した含フッ素ポリイミドから形成されるようにするのがよい。このような含フッ素ポリイミドを用いることで、基材層と該基材層に接している層との剥離強度を好適には1〜200N/m、より好適には1〜100N/mにすることができるため、例えば人の手で容易に剥離できる程度の分離性を備える。また、基材層の分離面は、キャスト法によって得られる表面粗さ(一般に表面粗さRa=1〜80nm程度)がそのまま維持されるため、表示装置の視認性等に悪影響を及ぼすようなこともない。   The polyimide resin laminate thus obtained can be separated at the interface between the base material layer and the layer (carrier layer or curl suppression layer) in contact with the base material layer. In order to facilitate the above, it is preferable that the base material layer be formed of a fluorine-containing polyimide having a fluorine atom in the polyimide structure. By using such a fluorine-containing polyimide, the peel strength between the base material layer and the layer in contact with the base material layer is preferably 1 to 200 N / m, more preferably 1 to 100 N / m. Therefore, for example, it has a separability enough to be easily peeled off by a human hand. In addition, the separation surface of the base material layer maintains the surface roughness obtained by the casting method (generally surface roughness Ra = 1 to 80 nm) as it is, so that the visibility of the display device is adversely affected. Nor.

本発明においては、異なる材料が積層されたポリイミド樹脂積層体について、以下のような考えのもと、反り変形(反り量)を計算により求めて、ポリイミド樹脂積層体の最適化を図ることができる。すなわち、簡便な材料力学計算をベースに、自重の影響を三次元的材料力学計算によって算出したうえで反り変形(反り量)に加味し最終的な反り量を求めた。計算方法としては、熱変形と自重が釣り合った状態の最終的な反り変形について、積層シェル要素を用いて離散化し数値計算的にコンピューターで演算を実施する有限要素法を用いた。(図3参照)   In the present invention, with respect to a polyimide resin laminate in which different materials are laminated, warping deformation (amount of warpage) can be obtained by calculation based on the following idea, and the polyimide resin laminate can be optimized. . That is, based on simple material mechanics calculation, the influence of its own weight was calculated by three-dimensional material mechanics calculation and added to warpage deformation (warpage amount) to obtain the final warpage amount. As a calculation method, a finite element method was used in which the final warpage deformation in a state where thermal deformation and its own weight are balanced is discretized using a laminated shell element and numerically calculated by a computer. (See Figure 3)

本発明のポリイミド樹脂積層体は、上述したように、基材層上に機能部材を備えた表示装置を得るのに好適に用いることができる。すなわち、基材層上に所定の機能層を形成した後、カール抑制層と基材層との界面で、または、基材層とキャリア層との界面で、分離すればよい。ここで、キャリア層は、基材層側に表示部を形成する際の台座の役割をするものであり、表示部の製造過程で基材層の取扱性や寸法安定性等を担保することはあっても、最終的には除去されて表示装置を構成するものではない。同様に、カール抑制層についても、キャリア層に同伴して分離され、同様に最終的に除去されて表示装置を構成するものではなく、仮に透明性に劣るものであっても何ら構わない。このようなポリイミド樹脂積層体を利用することにより、所定の機能層を基材層上に精度良くかつ確実に形成することができると共に、薄型・軽量・フレキシブル化を実現した表示装置を得ることができる。   As described above, the polyimide resin laminate of the present invention can be suitably used to obtain a display device having a functional member on a base material layer. That is, after a predetermined functional layer is formed on the base material layer, the functional layer may be separated at the interface between the curl suppression layer and the base material layer or at the interface between the base material layer and the carrier layer. Here, the carrier layer serves as a pedestal when forming the display part on the base material layer side, and ensuring the handleability and dimensional stability of the base material layer in the manufacturing process of the display part Even if it exists, it is removed finally and does not constitute a display device. Similarly, the curl-suppressing layer is not separated from the carrier layer and finally removed in the same manner to constitute a display device, and it may be inferior in transparency. By using such a polyimide resin laminate, it is possible to accurately and reliably form a predetermined functional layer on the base material layer, and to obtain a thin, lightweight, and flexible display device. it can.

基材層上に形成される機能層については、特に制限されない。例えば、有機EL表示装置の場合には、代表的には、TFT、電極、発光層を含む有機EL素子等が表示部に相当する。また、液晶表示装置の場合には、TFT、駆動回路、必要に応じてカラーフィルター等である。これらのほか、電子ペーパーやMEMSディスプレイ等のような各種表示装置を含めて、従来、ガラス基板上に形成している種々の機能層であって、所定の映像(動画又は画像)を映し出すのに必要な部品が表示部に相当する。このうち、例えば、TFTの形成には、一般に400℃程度のアニール工程が必要になるが、本発明におけるポリイミド樹脂積層体は、このようなアニール工程にも耐え得る耐熱性を有する。   The functional layer formed on the base material layer is not particularly limited. For example, in the case of an organic EL display device, typically, an organic EL element including a TFT, an electrode, a light emitting layer, or the like corresponds to the display unit. In the case of a liquid crystal display device, a TFT, a drive circuit, and a color filter as necessary. In addition to these, various functional layers conventionally formed on a glass substrate including various display devices such as electronic paper and MEMS displays, etc., for projecting a predetermined video (moving image or image). Necessary parts correspond to the display unit. Among these, for example, formation of TFT generally requires an annealing step of about 400 ° C., but the polyimide resin laminate in the present invention has heat resistance that can withstand such an annealing step.

以下、実施例及び比較例に基づき、本発明を具体的に説明する。なお、本発明はこれらの内容に限定されるものではない。   Hereinafter, based on an Example and a comparative example, this invention is demonstrated concretely. The present invention is not limited to these contents.

1.各種物性測定および性能試験方法 1. Various physical property measurement and performance test methods

[剥離強度]
基材層−(カール抑制層)−キャリア層間の剥離強度は、積層体を、幅が1mm〜10mm、長さが10mm〜25mmの短冊状に加工し、東洋精機株式会社製引張試験機(ストログラフ−M1)を用いて、キャリア層を180°方向に引き剥がし、剥離強度を測定した。なお、剥離強度が強固であり、剥離が困難であるものは「剥離不可」とした。
[Peel strength]
The peel strength between the base material layer- (curl suppression layer) -carrier layer was obtained by processing the laminate into a strip shape having a width of 1 mm to 10 mm and a length of 10 mm to 25 mm. Using Graph-M1), the carrier layer was peeled off in the 180 ° direction, and the peel strength was measured. In addition, the thing whose peeling strength was strong and it was difficult to peel was made into "non-peeling".

[透過率]
20μm厚の基材層を5cm角に切り出し、これを日本電色工業製のHAZE METER NDH−5000を用いて、380nmから780nmの透過率の測定を行った。
[Transmissivity]
A 20 μm-thick base material layer was cut into a 5 cm square, and this was measured for transmittance from 380 nm to 780 nm using HAZE METER NDH-5000 manufactured by Nippon Denshoku Industries Co., Ltd.

[Ra]
基材層、キャリア層及びカール抑制層を、それぞれ単独で3cm角に切り出し、これをブルカー・エイエックスエス製のAFMを用いて、Raの測定を行った。
[Ra]
The base material layer, the carrier layer, and the curl suppression layer were each cut into 3 cm squares, and Ra was measured using an AFM manufactured by Bruker AXS.

[CTE]
基材層、キャリア層及びカール抑制層のCTEは、それぞれを3mm×15mm角に切り出し、これをセイコーインスツルメント製の熱機械分析(TMA)装置にて5.0gの荷重を加えながら一定の昇温速度(10℃/min)で30℃から260℃の温度範囲で引張り試験を行い、100℃〜250℃での温度に対するボリイミドフィルムの伸び量からCTE(×10−6/K)を測定した。
[CTE]
The CTE of the base material layer, the carrier layer, and the curl suppression layer was cut into 3 mm × 15 mm squares, and this was constant while applying a 5.0 g load with a thermomechanical analysis (TMA) apparatus manufactured by Seiko Instruments. A tensile test is performed in a temperature range of 30 ° C. to 260 ° C. at a rate of temperature increase (10 ° C./min), and CTE (× 10 −6 / K) is calculated from the amount of elongation of the polyimide film relative to the temperature at 100 ° C. to 250 ° C. It was measured.

[反り]
積層フィルムから1辺が100mmの正方形サンプルをカッターナイフで切り出し、23℃50%で24時間調湿した後、定盤にのせ4角の浮き上がり高さをノギスで測定し、その平均値を反り(カール)とした。
[warp]
A square sample with a side of 100mm was cut out from the laminated film with a cutter knife, conditioned at 23 ° C and 50% for 24 hours, placed on a surface plate, measured with four calipers, and the average value warped ( Curl).

2.ポリアミド酸(ポリイミド前駆体)溶液の合成
以下の合成例や実施例等に用いた原料を以下に示す。
2. Synthesis of Polyamic Acid (Polyimide Precursor) Solution The raw materials used in the following synthesis examples and examples are shown below.

〔芳香族ジアミノ化合物〕
・4,4’−ジアミノ−2,2’−ビス(トリフルオロメチル)ビフェニル(TFMB)
・2,2’−ジメチル−4,4’−ジアミノビフェニル(mTB)
・1,3−ビス(4−アミノフェノキシ)ベンゼン(TPER)
・2,2−ビス[4−(4−アミノフェノキシ)フェニル]プロパン(BAPP)
・1,4−フェニレンジアミン(PPD)
〔芳香族テトラカルボン酸の酸無水物〕
・無水ピロメリット酸(PMDA)
・2,2−ビス(3,4−アンヒドロジカルボキシフェニル)ヘキサフルオロプロパン(6FDA)
・2,3,2’,3’−ビフェニルテトラカルボン酸二無水物(BPDA)
〔溶剤〕
・N,N―ジメチルアセトアミド(DMAc)
[Aromatic diamino compounds]
・ 4,4′-diamino-2,2′-bis (trifluoromethyl) biphenyl (TFMB)
・ 2,2'-dimethyl-4,4'-diaminobiphenyl (mTB)
1,3-bis (4-aminophenoxy) benzene (TPER)
2,2-bis [4- (4-aminophenoxy) phenyl] propane (BAPP)
・ 1,4-Phenylenediamine (PPD)
[Aromatic tetracarboxylic acid anhydride]
・ Pyromellitic anhydride (PMDA)
2,2-bis (3,4-anhydrodicarboxyphenyl) hexafluoropropane (6FDA)
・ 2,3,2 ′, 3′-biphenyltetracarboxylic dianhydride (BPDA)
〔solvent〕
・ N, N-dimethylacetamide (DMAc)

合成例1
窒素気流下で、TFMB(9.4g、0.03mol)を300mlのセパラブルフラスコの中で攪拌しながら溶剤DMAc127.5g中に加え加温し、50℃で溶解させた。次いで、6FDA(13.09g、0.03mol)を加えた。ジアミンと酸無水物のモル比が実質的に1:1になるようにした。その後、溶液を室温で3時間攪拌を続けて重合反応を行い、200gの淡黄色の粘稠なポリアミド酸ワニスAを得た。なお、このポリアミド酸ワニスAを後述の加熱条件で硬化することによりポリイミド樹脂Aが得られる。
Synthesis example 1
Under a nitrogen stream, TFMB (9.4 g, 0.03 mol) was added to 127.5 g of solvent DMAc while stirring in a 300 ml separable flask, and dissolved at 50 ° C. 6FDA (13.09 g, 0.03 mol) was then added. The molar ratio of diamine to acid anhydride was substantially 1: 1. Thereafter, the solution was stirred at room temperature for 3 hours to carry out a polymerization reaction to obtain 200 g of a pale yellow viscous polyamic acid varnish A. In addition, the polyimide resin A is obtained by hardening | curing this polyamic-acid varnish A on the below-mentioned heating conditions.

合成例2
窒素気流下で、m−TB10.2gとTPE−R1.6gをモル比90:10で、300mlのセパラブルフラスコの中で攪拌しながら溶剤DMAc170g中に加え加温し、50℃で溶解させた。次いで、PMDA9.2gとBPDA3.1gをモル比90:10で加えた。ジアミンと酸無水物のモル比が実質的に1:1になるようにした。その後、溶液を室温で3時間攪拌を続けて重合反応を行い、200gの淡白色の粘稠なポリアミド酸ワニスBを得た。なお、このポリアミド酸ワニスBを後述の加熱条件で硬化することによりポリイミド樹脂Bが得られる。
Synthesis example 2
Under a nitrogen stream, 10.2 g of m-TB and 1.6 g of TPE-R at a molar ratio of 90:10 were added to 170 g of solvent DMAc while stirring in a 300 ml separable flask, and dissolved at 50 ° C. . Next, 9.2 g of PMDA and 3.1 g of BPDA were added at a molar ratio of 90:10. The molar ratio of diamine to acid anhydride was substantially 1: 1. Thereafter, the solution was stirred at room temperature for 3 hours to carry out a polymerization reaction to obtain 200 g of a pale white viscous polyamic acid varnish B. In addition, the polyimide resin B is obtained by hardening | curing this polyamic-acid varnish B on the below-mentioned heating conditions.

合成例3
窒素気流下で、TFMB(12.6g、0.04mol)を300mlのセパラブルフラスコの中で攪拌しながら溶剤DMAc127.5g中に加え加温し、50℃で溶解させた。次いで、6FDA(2.2g、0.005mol)とPMDA(7.7g、0.035mol)をモル比12.5:87.5で加えた。ジアミンと酸無水物のモル比が実質的に1:1になるようにした。その後、溶液を室温で3時間攪拌を続けて重合反応を行い、150gの淡白色の粘稠なポリアミド酸ワニスCを得た。なお、このポリアミド酸ワニスCを後述の加熱条件で硬化することによりポリイミド樹脂Cが得られる。
Synthesis example 3
Under a nitrogen stream, TFMB (12.6 g, 0.04 mol) was added to 127.5 g of solvent DMAc while stirring in a 300 ml separable flask, and dissolved at 50 ° C. Then 6FDA (2.2 g, 0.005 mol) and PMDA (7.7 g, 0.035 mol) were added at a molar ratio of 12.5: 87.5. The molar ratio of diamine to acid anhydride was substantially 1: 1. Thereafter, the solution was stirred at room temperature for 3 hours to carry out a polymerization reaction to obtain 150 g of a pale white viscous polyamic acid varnish C. In addition, the polyimide resin C is obtained by hardening | curing this polyamic-acid varnish C on the below-mentioned heating conditions.

合成例4
窒素気流下で、m−TB(14.4g、0.07mol)を300mlのセパラブルフラスコの中で攪拌しながら溶剤DMAc170g中に加え加温し、50℃で溶解させた。次いで、PMDA(13.6g 0.06mol)とBPDA(2g、0.007mol)をモル比90:10で加えた。ジアミンと酸無水物のモル比が実質的に1:1になるようにした。その後、溶液を室温で3時間攪拌を続けて重合反応を行い、200gの淡白色の粘稠なポリアミド酸ワニスDを得た。なお、このポリアミド酸ワニスDを後述の加熱条件で硬化することによりポリイミド樹脂Dが得られる。
Synthesis example 4
Under a nitrogen stream, m-TB (14.4 g, 0.07 mol) was added to 170 g of solvent DMAc while stirring in a 300 ml separable flask, and dissolved at 50 ° C. PMDA (13.6 g 0.06 mol) and BPDA (2 g, 0.007 mol) were then added at a 90:10 molar ratio. The molar ratio of diamine to acid anhydride was substantially 1: 1. Thereafter, the solution was stirred at room temperature for 3 hours to carry out a polymerization reaction to obtain 200 g of a pale white viscous polyamic acid varnish D. In addition, the polyimide resin D is obtained by hardening | curing this polyamic-acid varnish D on the below-mentioned heating conditions.

合成例5
窒素気流下で、ジアミンとしてTPE−R(14.8g、0.05mol)を300mlのセパラブルフラスコの中で攪拌しながら溶剤DMAc170g中に加え加温し、50℃で溶解させた。次いで、酸無水物としてBPDA(15.2g,0.05mol)を加えた。ジアミンと酸無水物のモル比が実質的に1:1になるようにした。その後、溶液を室温で3時間攪拌を続けて重合反応を行い、200gの淡白色の粘稠なポリアミド酸ワニスEを得た。なお、このポリアミド酸ワニスEを後述の加熱条件で硬化することによりポリイミド樹脂Eが得られる。
Synthesis example 5
Under a nitrogen stream, TPE-R (14.8 g, 0.05 mol) as a diamine was added to 170 g of solvent DMAc while stirring in a 300 ml separable flask, and dissolved at 50 ° C. Then BPDA (15.2 g, 0.05 mol) was added as an acid anhydride. The molar ratio of diamine to acid anhydride was substantially 1: 1. Thereafter, the solution was stirred at room temperature for 3 hours to carry out a polymerization reaction to obtain 200 g of a pale white viscous polyamic acid varnish E. In addition, the polyimide resin E is obtained by hardening | curing this polyamic-acid varnish E on the below-mentioned heating conditions.

合成例6
窒素気流下で、m−TB:TPE−Rがモル比で90:10になるように300mlのセパラブルフラスコの中で攪拌しながら溶剤DMAc170g中に加え加温し、50℃で溶解させた。次いで、PMDA:BPDAのモル比が80:20になるように加えた。ジアミンと酸無水物のモル比は実質的に1:1になるようにした。その後、溶液を室温で3時間攪拌を続けて重合反応を行い、200gの淡白色の粘稠なポリアミド酸Fワニスを得た。なお、このポリアミド酸Fワニスを後述の加熱条件で硬化することによりポリイミド樹脂Fが得られる。
Synthesis Example 6
Under a nitrogen stream, m-TB: TPE-R was added to 170 g of solvent DMAc while stirring in a 300 ml separable flask so that the molar ratio was 90:10, and dissolved at 50 ° C. Subsequently, it added so that the molar ratio of PMDA: BPDA might be set to 80:20. The molar ratio of diamine to acid anhydride was substantially 1: 1. Thereafter, the solution was stirred at room temperature for 3 hours to carry out a polymerization reaction to obtain 200 g of a pale white viscous polyamic acid F varnish. In addition, the polyimide resin F is obtained by hardening | curing this polyamic-acid F varnish on the below-mentioned heating conditions.

合成例7
窒素気流下で、TFMB(16.93g)を300mlのセパラブルフラスコの中で攪拌しながら溶剤DMAc(170g)中に加え溶解させた。次いで、PMDA(10.12g)と6FDA(2.95g)を加えた。その後、溶液を室温で6時間攪拌を続けて重合反応を行い、200gの淡黄色の粘稠なポリアミド酸Hワニスを得た。なお、このポリアミド酸Hワニスを後述の加熱条件で硬化することによりポリイミド樹脂Hが得られる。
Synthesis example 7
Under a nitrogen stream, TFMB (16.93 g) was dissolved in the solvent DMAc (170 g) with stirring in a 300 ml separable flask. PMDA (10.12 g) and 6FDA (2.95 g) were then added. Thereafter, the solution was stirred at room temperature for 6 hours to carry out a polymerization reaction to obtain 200 g of a pale yellow viscous polyamic acid H varnish. In addition, the polyimide resin H is obtained by hardening | curing this polyamic-acid H varnish on the below-mentioned heating conditions.

合成例8
窒素気流下で、BAPP(19.45g)を300mlのセパラブルフラスコの中で攪拌しながら溶剤DMAc(170g)中に加え溶解させた。次いで、PMDA(9.85g)とBPDA(0.70g)を加えた。その後、溶液を室温で6時間攪拌を続けて重合反応を行い、200gの淡黄色の粘稠なポリアミド酸Iワニスを得た。なお、このポリアミド酸Iワニスを後述の加熱条件で硬化することによりポリイミド樹脂Iが得られる。
Synthesis Example 8
Under a nitrogen stream, BAPP (19.45 g) was dissolved in the solvent DMAc (170 g) with stirring in a 300 ml separable flask. PMDA (9.85 g) and BPDA (0.70 g) were then added. Thereafter, the solution was continuously stirred at room temperature for 6 hours to carry out a polymerization reaction to obtain 200 g of a pale yellow viscous polyamic acid I varnish. In addition, the polyimide resin I is obtained by hardening | curing this polyamic-acid I varnish on the below-mentioned heating conditions.

合成例9
窒素気流下で、4,4‘−DAPE(8.97g)を300mlのセパラブルフラスコの中で攪拌しながら溶剤DMAc(170g)中に加え溶解させた。次いで、PMDA(8.95g)とBPDA(12.08g)を加えた。その後、溶液を室温で6時間攪拌を続けて重合反応を行い、200gの褐色の粘稠なポリアミド酸Jワニスを得た。なお、このポリアミド酸Jワニスを後述の加熱条件で硬化することによりポリイミド樹脂Jが得られる。
Synthesis Example 9
Under a nitrogen stream, 4,4′-DAPE (8.97 g) was dissolved in the solvent DMAc (170 g) with stirring in a 300 ml separable flask. PMDA (8.95 g) and BPDA (12.08 g) were then added. Thereafter, the solution was stirred at room temperature for 6 hours to carry out a polymerization reaction, thereby obtaining 200 g of a brown viscous polyamic acid J varnish. In addition, the polyimide resin J is obtained by hardening | curing this polyamic-acid J varnish on the below-mentioned heating conditions.

合成例10
窒素気流下で、4,4‘−DAPE(8.14g)とPPD(4.40g)を300mlのセパラブルフラスコの中で攪拌しながら溶剤DMAc(170g)中に加え溶解させた。次いで、PMDA(17.45g)を加えた。その後、溶液を室温で6時間攪拌を続けて重合反応を行い、200gの褐色の粘稠なポリアミド酸Kワニスを得た。なお、このポリアミド酸Kワニスを後述の加熱条件で硬化することによりポリイミド樹脂Kが得られる。
Synthesis Example 10
Under a nitrogen stream, 4,4′-DAPE (8.14 g) and PPD (4.40 g) were dissolved in the solvent DMAc (170 g) with stirring in a 300 ml separable flask. PMDA (17.45 g) was then added. Thereafter, the solution was stirred at room temperature for 6 hours to carry out a polymerization reaction to obtain 200 g of a brown viscous polyamic acid K varnish. In addition, the polyimide resin K is obtained by hardening | curing this polyamic-acid K varnish on the below-mentioned heating conditions.

3.塗工によるポリイミド(PI)層の形成
キャリア層として、2種類のポリイミドフィルムを使用した。
1)ポリイミドフィルム1:中国寧波今山製、厚み=0.75mm、CTE=45ppm/K、Ra=3nm(以下、キャリアフィルム1ともいう。)
2)ポリイミドフィルム2:中国Rayitek製、厚み=0.75mm、CTE=45ppm/K、Ra=10nm(以下、キャリアフィルム2ともいう。)
3. Formation of polyimide (PI) layer by coating Two types of polyimide films were used as carrier layers.
1) Polyimide film 1: Ningbo Imayama, China, thickness = 0.75 mm, CTE = 45 ppm / K, Ra = 3 nm (hereinafter also referred to as carrier film 1)
2) Polyimide film 2: manufactured by China Rayitek, thickness = 0.75 mm, CTE = 45 ppm / K, Ra = 10 nm (hereinafter also referred to as carrier film 2)

実施例1
キャリアフィルム1(幅520mm×長さ500m×厚さ75μm)を、巻出し部、リップコーター、連続乾燥炉、連続炉及び巻き取り部を備えた、例えば図3に示すRTR方式の塗工乾燥硬化設備で2m/minの速度で巻出しながら、ポリアミド酸ワニスBをモーノポンプを用いて膜厚が45μmになるように塗布した。これを複数の炉から構成される連続乾燥炉を通過させて90℃で2分間、130℃で1分間乾燥して、さらに複数の炉から構成され、試料入口側の炉から出口側の炉にかけて段階的に温度が高くなる連続炉に通過させて、130℃から段階的に400℃まで、合計25分間段階的に加熱し、キャリアフィルム上に、カール抑制層としてのポリイミド樹脂Bが形成されたロールを作成した。次に、このロールを同じ塗工乾燥装置の巻出し部にセットし、ポリイミド樹脂Bの上に、ポリイミド酸ワニスAを100μm塗布し、複数の炉から構成される連続乾燥炉を通過させて90℃で2分間、130℃で1分間で乾燥して、さらに、複数の炉から構成され、試料入口側の炉から出口側の炉にかけて段階的に温度が高くなる連続炉に通過させて、130℃から段階的に400℃まで、合計20分間段階的に加熱し、基材層としての厚さ10μmのポリイミド樹脂Aを形成し、ロール状のポリイミド樹脂積層体(積層体1)を得た。
積層体1の各層の厚さは、キャリア層が75μm、カール抑制層が4.5μm、基材層が10μmであった。積層体1の層構造を、図1に模式的に示す。キャリアフィルム4の一面側に、カール抑制層3を介在して基材層2が積層した構造となっている(形態1)。なお、積層体の基材層2上に、以下の方法によって、機能層1を形成する。
Example 1
The carrier film 1 (width 520 mm × length 500 m × thickness 75 μm) is provided with an unwinding section, a lip coater, a continuous drying furnace, a continuous furnace, and a winding section, for example, RTR type coating drying curing shown in FIG. While unwinding at a speed of 2 m / min with the equipment, the polyamic acid varnish B was applied using a Mono pump so that the film thickness was 45 μm. This is passed through a continuous drying furnace composed of a plurality of furnaces, dried at 90 ° C. for 2 minutes and at 130 ° C. for 1 minute, and further composed of a plurality of furnaces, from the furnace on the sample inlet side to the furnace on the outlet side. By passing through a continuous furnace where the temperature gradually increases and gradually heating from 130 ° C. to 400 ° C. for a total of 25 minutes, polyimide resin B as a curl suppressing layer was formed on the carrier film. Created a role. Next, this roll is set in the unwinding part of the same coating and drying apparatus, and the polyimide acid varnish A is applied to the polyimide resin B by 100 μm and passed through a continuous drying furnace composed of a plurality of furnaces. Dried at 130 ° C. for 2 minutes and further at 130 ° C. for 1 minute, and further passed through a continuous furnace composed of a plurality of furnaces and gradually increasing in temperature from the sample inlet side furnace to the outlet side furnace. From 10 ° C. to 400 ° C. in steps, the mixture was heated stepwise for a total of 20 minutes to form a polyimide resin A having a thickness of 10 μm as a base material layer to obtain a roll-shaped polyimide resin laminate (laminate 1).
The thickness of each layer of the laminate 1 was 75 μm for the carrier layer, 4.5 μm for the curl suppressing layer, and 10 μm for the base material layer. The layer structure of the laminate 1 is schematically shown in FIG. It has a structure in which the base material layer 2 is laminated on one surface side of the carrier film 4 with the curl suppression layer 3 interposed (mode 1). The functional layer 1 is formed on the base material layer 2 of the laminate by the following method.

次に、上記ロール状のポリイミド樹脂積層体について、巻出し部、搬送ロール、プロセス処理部及び巻き取り部を備えた、RTR方式の装置を用いて、2m/minの速度で、基材層が上になるように長手方向に巻出しながら、搬送ロールを経由して真空チャンバー内に設置されたプロセス処理部に導入させて、基材層に、スパッタリング法により厚さ50nmの機能層としてのITOを連続処理により成膜し、機能層付ポリイミド基板フィルムとして巻き取った。
さらに、機能層付ポリイミド基板フィルム370×450mmのシート状にカットし、製膜したITOについて、一方向(X方向)及び他方向(Y方向)のXY方向に透明回路加工を行った。その際、Y回路のX回路との交点は回路を形成しなかった。
続いて、XY回路の交点にオーバーコートを塗布して250℃で熱処理してオーバーコート層を硬化させ、銀ペーストを用いて、オーバーコート層をまたいでブリッジ加工を行ってXY回路を完成させ、さらに、ITO成膜側の全面にオーバーコートを塗布し、270℃でアニール処理を行い、オーバーコートの硬化及びITOの結晶化を行った。
最後に、カバーガラスにITO製膜側の表面にOCA(透明粘着シート)を貼りつけ、その後キャリアフィルム及びカール抑制層を機械的に剥離し、基材層上に機能層が形成されたタッチパネル基板を完成させた。
Next, with respect to the roll-shaped polyimide resin laminate, the base material layer is formed at a speed of 2 m / min using an RTR system apparatus including an unwinding section, a transport roll, a process processing section, and a winding section. ITO as a functional layer having a thickness of 50 nm is formed on the base material layer by a sputtering method while being unwound in the longitudinal direction so as to be upward and introduced into a process processing unit installed in a vacuum chamber via a transport roll. Was formed into a film by continuous treatment and wound up as a polyimide substrate film with a functional layer.
Furthermore, the transparent circuit processing was performed in the XY direction of one direction (X direction) and the other direction (Y direction) about the ITO which was cut into the sheet | seat shape of the polyimide substrate film with a functional layer 370x450mm, and was formed into a film. At that time, the intersection of the Y circuit and the X circuit did not form a circuit.
Subsequently, an overcoat is applied to the intersection of the XY circuit, heat-treated at 250 ° C. to cure the overcoat layer, and a silver paste is used to bridge the overcoat layer to complete the XY circuit. Further, an overcoat was applied to the entire surface of the ITO film formation side, and an annealing treatment was performed at 270 ° C. to cure the overcoat and crystallize the ITO.
Finally, an OCA (transparent adhesive sheet) is attached to the surface of the ITO film on the cover glass, and then the carrier film and the curl suppression layer are mechanically peeled off, and the touch panel substrate on which the functional layer is formed on the base material layer Was completed.

比較例1
カール抑制層を形成することなく、実施例1と同様にキャリアフィルム1に基材層としてのポリイミド樹脂A(厚さ10μm)を形成して、ポリイミド樹脂積層体(積層体C1)を得た。
この積層体C1は、反り(カール)が大きくタッチパネルの製造工程でITO製膜をシート状にカットしたときに反りのためマスクとの位置合わせができず、XY方向の透明回路加工できず、タッチパネルは作成できなかった。
Comparative Example 1
Without forming the curl suppressing layer, a polyimide resin A (thickness 10 μm) as a base material layer was formed on the carrier film 1 in the same manner as in Example 1 to obtain a polyimide resin laminate (laminate C1).
This laminated body C1 has a large warp (curl), and when the ITO film is cut into a sheet shape in the touch panel manufacturing process, it cannot be aligned with the mask due to the warp, and the transparent circuit processing in the XY directions cannot be performed. Could not be created.

実施例2
キャリアフィルム1(幅520mm×長さ500m×厚さ75μm)を、巻出し部、リップコーター、連続乾燥炉、連続炉及び巻き取り部を備えた、例えば図3に示すRTR方式の塗工乾燥硬化設備で2m/minの速度で巻出しながら、ポリアミド酸ワニスEをモーノポンプを用いて膜厚が100μmになるように塗布した。これを複数の炉から構成される連続乾燥炉を通過させて90℃で2分間、130℃で1分間乾燥して、キャリアフィルム上に、カール抑制層としてのポリイミド樹脂Eが形成されたロールを作成した。次に、このロールを同じ塗工乾燥装置の巻出し部にセットし、ポリイミド樹脂Eの反対側に、ポリアミド酸ワニスAを100μm塗布し、複数の炉から構成される連続乾燥炉を通過させて90℃で2分間、130℃で1分間で乾燥して、さらに、複数の炉から構成され、試料入口側の炉から出口側の炉にかけて段階的に温度が高くなる連続炉に通過させて、130℃から段階的に400℃まで、合計20分間段階的に加熱し、基材層としての厚さ10μのポリイミド樹脂Aを形成し、ロール状のポリイミド樹脂積層体(積層体2)を得た。
積層体2の各層の厚さは、キャリアフィルムが75μm、カール抑制層が13μm、基材層が10μmであった。積層体2の層構造は、図1において、カール抑制層3とキャリアフィルム4とを逆に積層した構造であり、キャリアフィルム4の一面側にカール抑制層3、反対面側に基材層2が積層されている(形態2)。
Example 2
The carrier film 1 (width 520 mm × length 500 m × thickness 75 μm) is provided with an unwinding section, a lip coater, a continuous drying furnace, a continuous furnace, and a winding section, for example, RTR type coating drying curing shown in FIG. While unwinding at a speed of 2 m / min with equipment, the polyamic acid varnish E was applied using a Mono pump so that the film thickness was 100 μm. This is passed through a continuous drying furnace composed of a plurality of furnaces and dried at 90 ° C. for 2 minutes and 130 ° C. for 1 minute, and a roll on which a polyimide resin E as a curl suppressing layer is formed on a carrier film is provided. Created. Next, this roll is set in the unwinding part of the same coating and drying apparatus, and the polyamic acid varnish A is applied to the opposite side of the polyimide resin E by 100 μm, and passed through a continuous drying furnace composed of a plurality of furnaces. Dry at 90 ° C. for 2 minutes and 130 ° C. for 1 minute, and further pass through a continuous furnace that is composed of a plurality of furnaces and gradually increases in temperature from the furnace on the sample inlet side to the furnace on the outlet side, Stepwise heating from 130 ° C. to 400 ° C. for a total of 20 minutes was performed to form a polyimide resin A having a thickness of 10 μm as a base material layer to obtain a roll-shaped polyimide resin laminate (laminate 2). .
The thickness of each layer of the laminate 2 was 75 μm for the carrier film, 13 μm for the curl suppression layer, and 10 μm for the base material layer. The layer structure of the laminate 2 is a structure in which the curl suppressing layer 3 and the carrier film 4 are laminated in reverse in FIG. 1, with the curl suppressing layer 3 on one side of the carrier film 4 and the base material layer 2 on the opposite side. Are stacked (form 2).

次に、積層体2について、実施例1と同様の方法で、基材層上に機能層が形成されたタッチパネル基板を完成させた。   Next, for the laminate 2, a touch panel substrate in which a functional layer was formed on the base material layer was completed by the same method as in Example 1.

実施例3
基材層として、ポリアミド酸ワニスAに替えてポリアミド酸ワニスCを、カール抑制層として、ポリアミド酸ワニスEに替えてポリアミド酸ワニスDを使用した以外は、実施例2と同様の方法で、ポリイミド樹脂積層体(積層体3)を得た。
積層体3の各層の厚さは、キャリア層が75μm、基材層が12μm、カール抑制層が13μmであった。
この積層体2の上に、実施例1と同様の方法で、ITO及びXY回路を製膜し、タッチパネルを得た。
Example 3
Polyimide acid varnish C was used instead of the polyamic acid varnish A as the base material layer, and the polyamic acid varnish D was used instead of the polyamic acid varnish E as the curl suppression layer. A resin laminate (laminate 3) was obtained.
The thickness of each layer of the laminate 3 was 75 μm for the carrier layer, 12 μm for the base material layer, and 13 μm for the curl suppressing layer.
On this laminated body 2, the ITO and XY circuit were formed by the method similar to Example 1, and the touch panel was obtained.

実施例4
キャリアとしてポリイミドフィルム2を用い、カール抑制層として、ポリアミド酸ワニスCに替えてポリアミド酸ワニスFを使用した以外は、実施例1と同様の方法で、ポリイミド樹脂積層体(積層体4)を得た。
積層体4の各層の厚さは、キャリア層が75μm、基材層が10μm、カール抑制層が4μmであった。
Example 4
A polyimide resin laminate (laminated body 4) is obtained in the same manner as in Example 1 except that the polyimide film 2 is used as a carrier and the polyamic acid varnish F is used instead of the polyamic acid varnish C as a curl suppressing layer. It was.
The thickness of each layer of the laminate 4 was 75 μm for the carrier layer, 10 μm for the base material layer, and 4 μm for the curl suppressing layer.

実施例5
基材層として、ポリアミド酸ワニスAに替えてポリアミド酸ワニスHを、カール抑制層として、ポリアミド酸ワニスBに替えてポリアミド酸ワニスEを使用した以外は、実施例1と同様の方法で、ポリイミド樹脂積層体(積層体5)を得た。
積層体5の各層の厚さは、キャリア層が75μm、基材層が10μm、カール抑制層が50μmであった。
Example 5
Polyimide acid varnish H was used instead of polyamic acid varnish A as the base material layer, and polyamic acid varnish E was used instead of polyamic acid varnish B as the curl suppression layer. A resin laminate (laminate 5) was obtained.
The thickness of each layer of the laminate 5 was 75 μm for the carrier layer, 10 μm for the base material layer, and 50 μm for the curl suppression layer.

実施例6
基材層及びカール抑制層の厚さ以外は、実施例2と同様の方法で、ポリイミド樹脂積層体(積層体6)を得た。
積層体6の各層の厚さは、キャリア層が75μm、基材層が10μm、カール抑制層が13μmであった。
Example 6
A polyimide resin laminate (laminate 6) was obtained in the same manner as in Example 2 except for the thicknesses of the base material layer and the curl suppressing layer.
The thickness of each layer of the laminate 6 was 75 μm for the carrier layer, 10 μm for the base material layer, and 13 μm for the curl suppressing layer.

実施例7
基材層として、ポリアミド酸ワニスAに替えてポリアミド酸ワニスHを使用し、カール抑制層としてポリアミド酸ワニスEに替えてBを使用した以外は、実施例2と同様の方法で、ポリイミド樹脂積層体(積層体7)を得た。
積層体7の各層の厚さは、キャリア層が75μm、基材層が10μm、カール抑制層が15μmであった。
Example 7
Polyimide resin laminate in the same manner as in Example 2 except that the polyamic acid varnish A was used instead of the polyamic acid varnish A, and B was used instead of the polyamic acid varnish E as the curl suppression layer. A body (laminate 7) was obtained.
The thickness of each layer of the laminate 7 was 75 μm for the carrier layer, 10 μm for the base material layer, and 15 μm for the curl suppressing layer.

比較例2
カール抑制層として、ポリアミド酸ワニスBに替えてポリアミド酸ワニスIを使用した以外は、実施例1と同様の方法で、ポリイミド樹脂積層体(積層体C2)を得た。
積層体C2の各層の厚さは、キャリア層が75μm、基材層が10μm、カール抑制層が4μmであった。
Comparative Example 2
A polyimide resin laminate (laminate C2) was obtained in the same manner as in Example 1, except that the polyamic acid varnish B was used instead of the polyamic acid varnish B as the curl suppressing layer.
The thickness of each layer of the laminate C2 was 75 μm for the carrier layer, 10 μm for the base material layer, and 4 μm for the curl suppressing layer.

比較例3
カール抑制層として、ポリアミド酸ワニスEに替えてポリアミド酸ワニスJを使用した以外は、実施例2と同様の方法で、ポリイミド樹脂積層体(積層体C3)を得た。
積層体C3の各層の厚さは、キャリア層が75μm、基材層が10μm、カール抑制層が15μmであった。
Comparative Example 3
A polyimide resin laminate (laminate C3) was obtained in the same manner as in Example 2 except that the polyamic acid varnish E was used instead of the polyamic acid varnish E as the curl suppressing layer.
The thickness of each layer of the laminate C3 was 75 μm for the carrier layer, 10 μm for the base material layer, and 15 μm for the curl suppressing layer.

比較例4
カール抑制層として、ポリアミド酸ワニスBに替えてポリアミド酸ワニスIを使用した以外は、実施例1と同様の方法で、ポリイミド樹脂積層体(積層体C4)を得た。
積層体C4の各層の厚さは、キャリア層が75μm、基材層が10μm、カール抑制層が13μmであった。
Comparative Example 4
A polyimide resin laminate (laminate C4) was obtained in the same manner as in Example 1 except that the polyamic acid varnish I was used in place of the polyamic acid varnish B as the curl suppressing layer.
The thickness of each layer of the laminate C4 was 75 μm for the carrier layer, 10 μm for the base material layer, and 13 μm for the curl suppressing layer.

比較例5
実施例4のポリアミック酸Aの代わりにポリアミック酸Hを用いポリアミック酸Eの代わりにポリアミック酸Kを用いた以外は実施例1と同様に行った。
基材層として、ポリアミド酸ワニスAに替えてポリアミド酸ワニスHを、カール抑制層として、ポリアミド酸ワニスBに替えてポリアミド酸ワニスKを使用した以外は、実施例1と同様の方法で、ポリイミド樹脂積層体(積層体C5)を得た。
積層体C5の各層の厚さは、キャリア層が75μm、基材層が10μm、カール抑制層が13μmであった。
Comparative Example 5
The same procedure as in Example 1 was performed except that polyamic acid H was used instead of polyamic acid A of Example 4 and polyamic acid K was used instead of polyamic acid E.
Polyimide acid varnish H was used instead of polyamic acid varnish A as the base material layer, and polyamic acid varnish K was used as the curl suppression layer instead of polyamic acid varnish B. A resin laminate (laminate C5) was obtained.
The thickness of each layer of the laminate C5 was 75 μm for the carrier layer, 10 μm for the base material layer, and 13 μm for the curl suppressing layer.

これらの実施例及び比較例で得られたポリイミド樹脂積層体の物性を、表1に示す。   Table 1 shows the physical properties of the polyimide resin laminates obtained in these examples and comparative examples.

Figure 2017185806
Figure 2017185806

1 機能層
2 基材層
3 カール抑制層
4 キャリア層(キャリアフィルム)
10 積層体
11 スパッタ装置
12、13 ガイドロール
14 巻出ロール
15 巻取ロール
DESCRIPTION OF SYMBOLS 1 Functional layer 2 Base material layer 3 Curl suppression layer 4 Carrier layer (carrier film)
DESCRIPTION OF SYMBOLS 10 Laminated body 11 Sputtering device 12, 13 Guide roll 14 Unwinding roll 15 Winding roll

Claims (14)


ポリイミド樹脂からなるカール抑制層、ポリイミド樹脂からなるキャリア層、及びポリイミド樹脂からなる基材層が積層されたポリイミド樹脂積層体であって、該基材層の一面側に、カール抑制層及びキャリア層が剥離可能に接着され、該基材層に接している層の熱膨張係数(CTE)が、他の層のCTEのいずれよりも小さい又は大きいことを特徴とするポリイミド樹脂積層体。

A polyimide resin laminate in which a curl suppression layer made of a polyimide resin, a carrier layer made of a polyimide resin, and a base material layer made of a polyimide resin are laminated, and on one side of the base material layer, a curl suppression layer and a carrier layer A polyimide resin laminate, wherein the layer is in a peelable manner and the coefficient of thermal expansion (CTE) of the layer in contact with the base material layer is smaller or larger than any of the CTEs of the other layers.
キャリア層の一面側にカール抑制層を有し、さらに該カール抑制層に剥離可能に接着した基材層を有し、カール抑制層の熱膨張係数(CTE)がキャリア層及び基材層の熱膨張係数(CTE)のいずれよりも小さい又は大きい請求項1記載ポリイミド樹脂積層体。   It has a curl suppression layer on one side of the carrier layer, and further has a base material layer that is releasably adhered to the curl control layer, and the thermal expansion coefficient (CTE) of the curl control layer is the heat of the carrier layer and the base material layer. The polyimide resin laminate according to claim 1, which is smaller or larger than any of the coefficient of expansion (CTE). 基材層とキャリア層の熱膨張係数(CTE)差が±40ppm/K以下である請求項2記載のポリイミド樹脂積層体。   The polyimide resin laminate according to claim 2, wherein a difference in coefficient of thermal expansion (CTE) between the base material layer and the carrier layer is ± 40 ppm / K or less. キャリア層の一面側にカール抑制層及び基材層を介在してさらに機能層が形成されてなる請求項2記載のポリイミド樹脂積層体。   The polyimide resin laminate according to claim 2, wherein a functional layer is further formed on one side of the carrier layer with a curl suppressing layer and a base material layer interposed. キャリア層の一面側に剥離可能に接着した基材層を有し、前記キャリア層の反対面側にカール抑制層を有し、キャリア層の熱膨張係数(CTE)が基材層及びカール抑制層の熱膨張係数(CTE)のいずれよりも小さい又は大きい請求項1記載のポリイミド樹脂積層体。   It has a base material layer that is releasably bonded to one side of the carrier layer, has a curl suppression layer on the opposite side of the carrier layer, and has a thermal expansion coefficient (CTE) of the carrier layer and the curl control layer The polyimide resin laminate according to claim 1, which is smaller or larger than any of the thermal expansion coefficients (CTEs). 基材層とカール抑制層の熱膨張係数(CTE)差が±40ppm/K以下である請求項5記載のポリイミド樹脂積層体。   The polyimide resin laminate according to claim 5, wherein a difference in coefficient of thermal expansion (CTE) between the base material layer and the curl suppressing layer is ± 40 ppm / K or less. キャリア層の一面側に基材層を介在してさらに機能層が形成されてなる請求項5記載のポリイミド樹脂積層体。   The polyimide resin laminate according to claim 5, wherein a functional layer is further formed on one side of the carrier layer with a base material layer interposed. 基材層の全光線透過率が80%以上、かつ、厚みが50μm以下である請求項2又は5記載のポリイミド樹脂積層体。   The polyimide resin laminate according to claim 2 or 5, wherein the substrate layer has a total light transmittance of 80% or more and a thickness of 50 µm or less. 基材層を形成するポリイミド樹脂のTgが300℃以上である請求項2又は5記載のポリイミド樹脂積層体。   The polyimide resin laminate according to claim 2 or 5, wherein Tg of the polyimide resin forming the base material layer is 300 ° C or higher. 請求項4記載のポリイミド樹脂積層体を使用し、カール抑制層と基材層との界面で剥離してキャリア層及びカール抑制層を除去してなることを特徴とする機能層付きポリイミドフィルム。   A polyimide film with a functional layer, wherein the polyimide resin laminate according to claim 4 is used, and the carrier layer and the curl suppressing layer are removed by peeling at the interface between the curl suppressing layer and the base material layer. 請求項7記載のポリイミド樹脂積層体を使用し、キャリア層と基材層との界面で剥離してキャリア層及びカール抑制層を除去してなることを特徴とする機能層付きポリイミドフィルム。   A polyimide film with a functional layer, wherein the polyimide resin laminate according to claim 7 is used, and the carrier layer and the curl suppressing layer are removed by peeling at the interface between the carrier layer and the base material layer. 請求項1記載のポリイミド樹脂積層体を製造する方法であって、キャリア層にカール抑制層及び基材層をキャスト法にて塗工することを特徴とするポリイミド樹脂積層体の製造方法。   A method for producing a polyimide resin laminate according to claim 1, wherein the curl suppressing layer and the base material layer are coated on the carrier layer by a casting method. キャリア層に塗工されたカール抑制層及び基材層を一体硬化する請求項13記載のポリイミド樹脂積層体の製造方法。   The method for producing a polyimide resin laminate according to claim 13, wherein the curl suppressing layer and the base material layer coated on the carrier layer are integrally cured. キャスト法が多層ダイ又は連続ダイによる塗工である請求項13記載のポリイミド樹脂積層体の製造方法。
The method for producing a polyimide resin laminate according to claim 13, wherein the casting method is coating with a multilayer die or a continuous die.
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