TWI361636B - - Google Patents

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TWI361636B
TWI361636B TW094143460A TW94143460A TWI361636B TW I361636 B TWI361636 B TW I361636B TW 094143460 A TW094143460 A TW 094143460A TW 94143460 A TW94143460 A TW 94143460A TW I361636 B TWI361636 B TW I361636B
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Taiwan
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frame
tension
metal
cover film
metal strip
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TW094143460A
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Chinese (zh)
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TW200629970A (en
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Terunao Tsuchiya
Toshihiro Sano
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Dainippon Printing Co Ltd
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Priority claimed from JP2004356257A external-priority patent/JP5151004B2/en
Priority claimed from JP2005133155A external-priority patent/JP4784145B2/en
Priority claimed from JP2005290577A external-priority patent/JP2007257839A/en
Application filed by Dainippon Printing Co Ltd filed Critical Dainippon Printing Co Ltd
Publication of TW200629970A publication Critical patent/TW200629970A/en
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Publication of TWI361636B publication Critical patent/TWI361636B/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0332—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their composition, e.g. multilayer masks, materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/081—Shaping or machining of piezoelectric or electrostrictive bodies by coating or depositing using masks, e.g. lift-off

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Screen Printers (AREA)

Description

1361636 (1) 九、發明說明 【發明所屬之技術領域】 [產業上之利用區域] 本發明係關於一種例如適合在有機EL元件之製造之 蒸鍍製程來使用作爲蒸鍍罩膜之金屬罩膜單元、以及其製 造方法、金屬帶的安裝方法及張力附加裝置。 【先前技術】 [背景技術] 向來，在有機EL元件之製造，進行真空蒸鍍，作爲 該蒸鍍罩膜係使用將具備容許蒸鍍之許多之細長微小之開 口部之睪膜部予以具有之金屬罩膜。接著，在蒸鎪時，藉· 由磁鐵等而將該金屬罩膜，安裝在具備更加大於前述罩膜 部之開口之剛性大之窗框形狀之幀框。但是，在近年來， 在進行圖案化之微細化而使得形成於罩膜部之開口部變得 微細並且金屬罩膜之板厚本身也變薄時，在僅使用磁鐵等 而僅將金屬罩膜固定於窗框形狀之幀框，有所謂在罩膜部 產生歪斜或鬆弛而無法維持開口部之精度之問題發生。 爲了解決此種問題，因此，開發日本特開2004-311335號公報所示之金屬罩膜單元，但是，即使是藉由此 種金屬罩膜單元，也無法充分地消除罩膜部之歪斜或鬆驰 【發明內容】 -4- (2) (2)1361636 [發明之揭示] 本發明係有鑑於此種問題點而完成的；其目的係提供 一種即使是在固定於窗框形狀之幀框來附加張力之狀態下 之金屬罩膜之構造之金屬罩膜單元、並無增大幀框之厚度 及加大剛性也可以抑制產生於金屬罩膜單元之彎曲而提高 平面度之金屬罩膜單元、其製造方法、金屬帶的安裝方法 及張力附加裝置。 本發明係一種金屬罩膜單元，其特徵爲：具備：矩形 狀之幀框；金屬罩膜，係以附加幀框之縱方向及幀框之橫 方向之至少一種之張力之狀態，來安裝在該幀框之表面； 以及，細長狀金屬帶，係以在長邊方向來附加張力之狀態 且平行於附加在金屬罩膜之張力之方向，來安裝在幀框之 背面。 本發明係一種金屬罩膜單元，其特徵爲：金屬罩膜係 具有複數個之罩膜部，並且，附加縱方向及橫方向之張力 ，金屬帶係分別安裝在幀框之4邊。 本發明係一種金屬罩膜單元，其特徵爲：金屬帶係藉 由點銲而將至少其兩端附近，來固定於前述幀框。 本發明係一種金屬罩膜單元之製造方法，其特徵爲： 具備：在矩形狀幀框之表面，以在該金屬罩膜來附加幀框 之縱方向及幀框之橫方向之至少一種之張力之狀態，安裝 金屬罩膜之製程；以及，在幀框之背面，以在長邊方向來 附加張力之狀態，在平行於附加在金屬罩膜之張力之方向 ’來安裝細長狀金屬帶之製程。 -5- 1361636 ⑶ 本發明係一種金屬罩膜單元之製造方法，其特徵爲： 具備：在幀框之表面來安裝金屬罩膜時，安裝尺寸更加大 於幀框之金屬罩膜，然後，除去安裝在幀框之金屬罩膜周 邊之不必要部分。 本發明係一種金屬罩膜單元之製造方法，其特徵爲： 在幀框之背面來安裝金屬帶時，安裝更加長於幀框之金屬 帶’然後’除去安裝在幀框之金屬帶兩端之不必要部分。 本發明係一種金屬罩膜單元之製造方法，其特徵爲： 在幀框之背面安裝金屬帶之製程係具有：將金屬帶安裝於 幀框之金屬帶安裝位置之製程；在金屬帶附加張力而在幀 框產生反力之製程；以及，測定幀框之彎曲量，調整附加 於金屬帶-之張力-而使得彎曲量成爲要求之範圍內之製程。- 本發明係一種金屬罩膜單元之製造方法，其特徵爲： 在金屬帶附加張力時，把持金屬帶之兩端而附加張力，在 調整金屬帶之張力後，將金屬帶之至少兩端，固定於幀框 〇 本發明係一種金屬罩膜單元之製造方法，其特徵爲： 在將金屬帶之某一端預先地固定於幀框而在金屬帶附加張 力時，把持金屬帶之其他端而附加張力，在調整金屬帶之 張力後，將金屬帶之其他端，固定於幀框。 本發明係一種金屬帶的安裝方法，係在矩形狀之幀框 來安裝金屬帶之金屬帶的安裝方法，其特徵爲：具有：將 金屬帶安裝於幀框之金屬帶安裝位置之製程；在金屬帶附 加張力而在幀框產生反力之製程；以及，測定幀框之彎曲 -6- (4) (4)1361636 量，調整附加於金屬帶之張力而使得彎曲量成爲要求之範 圍內之製程。 本發明係一種金屬帶的安裝方法，其特徵爲：在金屬 帶附加張力時，把持金屬帶之兩端而附加張力，在調整金 屬帶之張力後，將金屬帶之至少兩端，固定於幀框。 本發明係一種金屬帶的安裝方法，其特徵爲：在將金 屬帶之某一端預先地固定於幀框而在金屬帶附加張力時， 把持金屬帶之其他端而附加張力，在調整金屬帶之張力後 ，將金屬帶之其他端，固定於幀框。 本發明係一種張力附加裝置，係在安裝於矩形狀幀框 之細長狀金屬帶來附加張力之張力附加裝置，其特徵爲： 具備配置於幀·框附近之張力附加用治具，該張力附加用治-具係具有：設置在幀框附近之支持台、呈直線狀且可移動 地保持於支持台並且把持金屬帶而使得其長邊方向平行於 移動方向之帶把持構件、以及安裝於帶把持構件而對於金 屬帶來附加張力之張力附加用螺絲。 本發明係一種張力附加裝置，其特徵爲：還具備：沿 著幀框之某一邊所配置之導引手段以及沿著該導引手段而 可自由移動地設置之移動台；張力附加用治具係保持於該 移動台上。 本發明係一種張力附加裝置，其特徵爲：張力附加用 治具之支持台係可以對於移動台而自由地移動於上下方向 本發明係一種張力附加裝置，其特徵爲：在導引手段 (5) (5)1361636 ’配置2組之移動台及張力附加用治具。 本發明係一種張力附加裝置，其特徵爲：張力附加用 螺絲係呈自由抵接地配置在幀框。 本發明係一種張力附加裝置，其特徵爲：支持台係呈 自由抵接地配置在幀框。 本發明係一種金屬帶安裝裝置，其特徵爲：具備：在 安裝於矩形狀幀框之細長狀金屬帶來附加張力之張力附加 裝置以及將金屬帶點銲於幀框之既定位置所固定之點銲裝 置；張力附加裝置係具備配置在幀框附近之張力附加用治 具，該張力附加用治具係具有：設置在幀框附近之支持台 、呈直線狀且可移動地保持於支持台且把持金屬帶而使得 其長邊方向平行於移動方向之帶把持構件、以及安裝於帶 把持構件而對於金屬帶來附加張力之張力附加用螺絲。 本發明係一種有機EL元件材料之蒸鍍方法，係使用 金屬罩膜單元而蒸鍍有機EL元件之有機層或陰極電極之 有機EL元件材料之蒸鑛方法，其特徵爲：金屬罩膜單元 係具備：矩形狀之幀框；金屬罩膜，係以附加幀框之縱方 向及幀框之橫方向之至少一種之張力之狀態，來安裝在該 幀框之表面；以及，細長狀金屬帶，係以在長邊方向來附 加張力之狀態且平行於附加在金屬罩膜之張力之方向，來 安裝在幀框之背面。 在本發明之金屬罩膜單元，可以藉由安裝在幀框背面 側之金屬帶之張力而減少由於安裝在幀框表面側之金屬罩 膜之張力所產生之幀框之彎曲，可以不增加幀框之剛性， (6) (6)I361636 縮小彎曲而提高平面度。因此，在使用作爲蒸鍍罩膜之狀 態下’可以提高對於玻璃基板等之被蒸鍍基材之密合性， 提高蒸鍍之圖案位置精度》 本發明之金屬罩膜單元係不僅是蒸鍍，並且，也可以 使用在需要罩膜之任意用途，但是，特別最好是使用在要 求高精細圖案化之有機EL元件之有機層或陰極電極之蒸 鍍。可以藉由使用該金屬罩膜單元，蒸鍍有機EL元件之 有機層或陰極電極，而呈高品質且生產性良好地形成高精 細圖案之有機層或陰極電極。 本發明之金屬帶的安裝方法係成爲在金屬帶安裝於幀 框時，在該金屬帶，在幀框之金屬帶安裝位置之附近，得 到反力”來附加張力之構造，因-此，金屬帶之張力係相伺 於該金屬帶固定在幀框之狀態而作用於幀框。在該狀態下 ，測定前述幀框之彎曲量而使得彎曲量，成爲要求之範圍 內，例如調整附加於前述金屬帶之張力而成爲容許範圍內 。可以藉此而使得在金屬帶固定於幀框後之彎曲量，成爲 要求之範圍內，可以藉由簡單之操作而將金屬帶安裝於幀 框，使得幀框之彎曲量，成爲要求之範圍內。 本發明之罩膜單元之製造方法係在固定金屬罩膜之幀 框之背面來安裝金屬帶時，適用前述本發明之金屬帶的安 裝方法。因此，可以調整金屬帶之張力，安裝於幀框而使 得幀框之彎曲，成爲要求之範圍內、例如容許範圍內，可 以藉由簡單之操作而製造高平面度之罩膜單元。 在本發明之張力附加用治具，可以藉由將支持台，配 -9- (7) (7)1361636 置在鄰接於幀框之位置，在帶把持構件，把持金屬帶，以 螺絲來鎖入張力附加用螺絲，使得其前端碰撞到幀框，並 且，以螺絲來鎖入，而在幀框之金屬帶安裝位置之附近， 得到反力，在金屬帶，附加張力，並且，可以藉由調整其 螺絲鎖入量而任意地調整對於金屬帶之張力》像這樣，相 同於對於幀框來固定金屬帶之狀態，可以作用金屬帶之張 力，並且，能夠容易且自在地調整該張力，可以使用在前 述本發明之金屬帶之安裝方法及罩膜單元之製造方法之實 施。 如果藉由本發明之張力附加裝置的話，則可以藉由將 應該安裝金屬帶之幀框，支持在幀框置台上之既定位置， 將金屬·帶安裝在幀框上之既定位置，同時，以將相反於該 金屬帶之張力附加用治具側之相反側之端部來固定於幀框 之狀態，將金屬帶之某一端把持在張力附加用治具，以螺 絲來鎖入張力附加用螺絲，而使得該張力附加用螺絲之前 端，碰撞到幀框側面，以在該幀框得到反力之形態，來在 金屬帶，附加張力。因此，金屬帶之張力係相同於該金屬 帶固定在幀框之狀態，作用於幀框。在該狀態下，測定前 述幀框之彎曲量而使得彎曲量，成爲要求之範圍內、例如 高精度之容許範圍內，可以藉由調整張力附加用螺絲之螺 絲鎖入量而調整附加於金屬帶之張力。像這樣，可以藉由 簡單之操作而進行張力之調整，來使得在金屬帶固定於幀 框後之彎曲量，成爲要求之範圍內，可以藉由在進行該張 力調整之狀態下，將該金屬帶固定於幀框，而達成幀框之 -10- (8)13616361361636 (1) Inventive description [Technical field of the invention] [Industrial use area] The present invention relates to a metal cover film which is suitable as an evaporation cover film, for example, in an evaporation process suitable for the manufacture of an organic EL element. The unit, the method of manufacturing the same, the method of mounting the metal strip, and the tension attachment device. [Prior Art] [Background Art] In the production of an organic EL device, vacuum deposition is carried out, and as the vapor deposition cover film, a film portion having a plurality of elongated and minute openings allowing vapor deposition is used. Metal cover film. Next, at the time of steaming, the metal cover film is attached to a frame having a sash shape which is larger than the opening of the cover film portion by a magnet or the like. However, in recent years, when the patterning is made fine, and the opening formed in the cover film portion is made fine, and the thickness of the metal cover film itself is also reduced, only the metal cover film is used only by using a magnet or the like. The frame frame fixed to the sash shape has a problem that the cover film portion is skewed or slack and the accuracy of the opening portion cannot be maintained. In order to solve such a problem, the metal cover film unit disclosed in Japanese Laid-Open Patent Publication No. 2004-311335 has been developed. However, even with such a metal cover film unit, it is not possible to sufficiently eliminate the skew or looseness of the cover film portion.驰 [Summary of the Invention] -4- (2) (2) 1361636 [Disclosure of the Invention] The present invention has been made in view of such a problem; the object is to provide a frame frame which is fixed even in the shape of a window frame. The metal cover film unit having the structure of the metal cover film in the state of the additional tension can suppress the curvature of the metal cover film unit and improve the flatness of the metal cover film unit without increasing the thickness of the frame frame and increasing the rigidity. The manufacturing method, the metal tape mounting method, and the tension attachment device. The present invention relates to a metal cover film unit comprising: a rectangular frame frame; and a metal cover film attached to the state of at least one of a longitudinal direction of the frame frame and a lateral direction of the frame frame. The surface of the frame frame; and the elongated metal strip is attached to the back surface of the frame frame in a state in which tension is applied in the longitudinal direction and parallel to the tension applied to the metal cover film. The present invention is a metal cover film unit characterized in that the metal cover film has a plurality of cover film portions, and the tension in the longitudinal direction and the lateral direction is added, and the metal strips are respectively attached to the four sides of the frame. The present invention is a metal cover film unit characterized in that a metal strip is fixed to the frame by at least two ends thereof by spot welding. The present invention provides a method of manufacturing a metal cover film unit, comprising: providing a tension on at least one of a longitudinal direction of a frame frame and a lateral direction of a frame frame on a surface of a rectangular frame frame The process of mounting the metal cover film; and the process of attaching the elongated metal strip in the direction parallel to the direction of the tension attached to the metal cover film in the state of adding tension in the longitudinal direction on the back side of the frame frame . -5- 1361636 (3) The present invention relates to a method for manufacturing a metal cover film unit, which is characterized in that: when a metal cover film is mounted on the surface of a frame frame, a metal cover film having a mounting size larger than that of the frame is mounted, and then the installation is removed. Unnecessary part of the metal cover film in the frame. The invention relates to a method for manufacturing a metal cover film unit, which is characterized in that: when a metal strip is mounted on the back side of the frame frame, a metal strip which is longer than the frame frame is mounted, and then the two ends of the metal strip mounted on the frame frame are removed. Necessary part. The invention relates to a method for manufacturing a metal cover film unit, characterized in that: the process of mounting a metal strip on the back side of the frame frame has a process of mounting the metal strip on the metal strip mounting position of the frame frame; A process of generating a reaction force in the frame; and measuring the amount of bending of the frame and adjusting the tension applied to the metal strip - so that the amount of bending becomes within the required range. - The present invention is a method of manufacturing a metal cover film unit, characterized in that: when the metal strip is attached with tension, the two ends of the metal strip are held to add tension, and after adjusting the tension of the metal strip, at least two ends of the metal strip are The invention is a method for manufacturing a metal cover film unit, characterized in that: when one end of the metal strip is fixed to the frame frame in advance and the tension is applied to the metal strip, the other end of the metal strip is held and attached Tension, after adjusting the tension of the metal strip, fix the other end of the metal strip to the frame. The invention relates to a method for mounting a metal strip, which is a method for mounting a metal strip of a metal strip in a rectangular frame, and has the following features: a process for mounting a metal strip to a metal strip mounting position of a frame frame; The process of generating a reaction force in the frame by adding tension to the metal strip; and measuring the amount of bending of the frame frame by -6-(4) (4) 1361636, adjusting the tension attached to the metal strip so that the amount of bending becomes within the required range. Process. The invention relates to a method for installing a metal strip, which is characterized in that: when the metal strip is attached with tension, the two ends of the metal strip are held to add tension, and after adjusting the tension of the metal strip, at least two ends of the metal strip are fixed to the frame. frame. The invention relates to a method for mounting a metal strip, which is characterized in that when one end of the metal strip is fixed to the frame frame in advance and the tension is applied to the metal strip, the other ends of the metal strip are held to add tension, and the metal strip is adjusted. After tensioning, fix the other end of the metal strip to the frame. The present invention relates to a tension attachment device which is a tension attachment device which is attached to a rectangular metal frame and which is provided with an additional tension, and is characterized in that it has a tension attachment jig disposed in the vicinity of a frame and a frame, and the tension is attached. The treatment system has: a support stand disposed near the frame frame, a belt holding member that is linearly and movably held by the support table, and holds the metal strip so that the longitudinal direction thereof is parallel to the moving direction, and is mounted on the belt A tension-adding screw for holding a member and bringing tension to the metal. The present invention relates to a tension attachment device, further comprising: a guiding means disposed along one side of the frame frame; and a moving table movably disposed along the guiding means; the tension attachment jig It is kept on the mobile station. The present invention relates to a tension attachment device, characterized in that the support platform of the tension attachment jig can be freely moved to the up and down direction with respect to the mobile station. The present invention is a tension attachment device characterized in that: (5) 1361636 'Configure two sets of mobile stations and tension attachment fixtures. The present invention is a tension attachment device characterized in that the tension attachment screw is disposed in a frame frame freely abutting against the ground. The present invention is a tension attachment device characterized in that the support platform is disposed in a frame frame with free grounding. The present invention relates to a metal belt mounting apparatus characterized by comprising: a tension attachment device for attaching a tension to an elongated metal attached to a rectangular frame frame, and a point at which a metal strip is spot-welded at a predetermined position of a frame frame The tension attachment device includes a tension attachment jig disposed in the vicinity of the frame frame, and the tension attachment jig has a support stand provided in the vicinity of the frame frame, and is linearly and movably held by the support table. A belt holding member that holds the metal belt so that the longitudinal direction thereof is parallel to the moving direction, and a tension applying screw that is attached to the belt holding member and that adds tension to the metal. The present invention relates to a method for vapor deposition of an organic EL device material, which is a method for vapor-depositing an organic EL device material of an organic layer or a cathode electrode of an organic EL device using a metal cap film unit, characterized in that a metal cap film unit is used. a frame frame having a rectangular shape; the metal cover film is attached to the surface of the frame frame in a state of tension of at least one of a longitudinal direction of the frame frame and a lateral direction of the frame frame; and an elongated metal strip, It is attached to the back surface of the frame frame in a state in which tension is applied in the longitudinal direction and in a direction parallel to the tension applied to the metal cover film. In the metal cover film unit of the present invention, the curvature of the frame caused by the tension of the metal cover film mounted on the surface side of the frame frame can be reduced by the tension of the metal tape attached to the back side of the frame frame, and the frame can be omitted. The rigidity of the frame, (6) (6) I361636 Reduce the curvature and improve the flatness. Therefore, in the state in which it is used as a vapor deposition cover film, the adhesion to the vapor-deposited substrate such as a glass substrate can be improved, and the positional accuracy of the vapor deposition pattern can be improved. The metal cover film unit of the present invention is not only vapor-deposited. Further, any use in which a cover film is required may be used, but it is particularly preferable to use vapor deposition on an organic layer or a cathode electrode of an organic EL element requiring high-definition patterning. By using the metal film unit to vapor-deposit the organic layer or the cathode electrode of the organic EL element, an organic layer or a cathode electrode having a high-precision pattern can be formed with high quality and productivity. The mounting method of the metal strip of the present invention is a structure in which a tension is applied to the metal strip in the vicinity of the metal strip mounting position of the frame frame when the metal strip is attached to the frame, thereby adding a tension. The tension of the belt acts on the frame frame while the metal strip is fixed in the frame frame. In this state, the amount of bending of the frame frame is measured so that the amount of bending is within the required range, for example, adjustment is added to the aforementioned The tension of the metal strip is within the allowable range. Therefore, the amount of bending after the metal strip is fixed to the frame can be made within a required range, and the metal strip can be attached to the frame by a simple operation, so that the frame The amount of bending of the frame is within the required range. The method for manufacturing the cover film unit of the present invention is to apply the metal tape mounting method of the present invention when the metal tape is attached to the back surface of the frame of the metal cover film. The tension of the metal strip can be adjusted and installed in the frame frame to bend the frame, which is within the required range, for example, within the allowable range, and can be manufactured by simple operation. The cover film unit of the present invention. In the tension attachment jig of the present invention, the support table can be placed at a position adjacent to the frame frame by holding the support table, and the handle is held by the handle member. The metal belt is screwed into the tension attachment screw so that its front end collides with the frame frame, and is locked with a screw, and in the vicinity of the metal strip mounting position of the frame frame, a reaction force is obtained, and the metal belt is attached. Tension, and the tension of the metal strip can be arbitrarily adjusted by adjusting the amount of screw locking. Like this, the tension of the metal strip can be applied in the same manner as the state in which the metal strip is fixed to the frame frame, and the tension can be easily and By adjusting the tension freely, the method of mounting the metal strip of the present invention and the method of manufacturing the cover film unit can be used. If the tension attachment device of the present invention is used, the frame frame to which the metal strip should be attached can be used. Supporting the predetermined position on the frame frame, mounting the metal tape at a predetermined position on the frame, and at the same time, adding the tension opposite to the metal tape to the opposite side of the jig side The end portion is fixed to the frame frame, and one end of the metal strip is held by the tension attachment jig, and the tension attachment screw is locked by a screw, so that the tension attachment screw front end collides with the frame frame side. In the form of a reaction force in the frame frame, tension is applied to the metal strip. Therefore, the tension of the metal strip is the same as the state in which the metal strip is fixed in the frame frame, and acts on the frame. In this state, the measurement is performed. The amount of warpage of the frame frame is such that the amount of warpage is within the required range, for example, within a tolerance range of high precision, and the tension applied to the metal strip can be adjusted by adjusting the amount of screw lock of the tension-adding screw. The tension can be adjusted by a simple operation so that the amount of bending after the metal strip is fixed to the frame is within the required range, and the metal strip can be fixed by the tension adjustment. Frame box, and reach the frame frame -10- (8) 1361636

高精度之平面度。此外，張力附加用治具係可以: 手段及移動台而調整沿著幀框之某1邊之位置，丨 夠容易地對應於不同尺寸之幀框。此外，在對於: 附加張力時，使得張力附加用螺絲之前端，碰撞; 側面，僅在該幀框，得到反力，因此，也具有所; 在幀框來施行用以附加張力至金屬帶之加工之效J 在此，在以能夠對於移動台而調整上下方向： 形態來保持前述之張力附加用治具時，也能夠容: 於不同厚度之幀框® 此外，在前述之導引手段呈可自由移動地保 移動台及張力附加用治具時，可以同時於安裝在ι| 之金屬帶而進行張力之附加及調整，可以提高作彳 時，使得在安裝金屬帶後之幀框之平面度，更進- Ψγ*8 π*Γ 爲间棺度。 本發明之金屬帶安裝裝置係成爲可以使用前3 附加裝置而進行對於金屬帶之張力之附加及調整 將該金屬帶點銲於幀框之構造，因此，可以調整3 張力而安裝於幀框，來使得幀框之彎曲，成爲要】 內、例如在高精度之容許範圍內，能夠藉由簡單;; 達成幀框之高精度之平面度。 $ ΐίHigh precision flatness. Further, the tension attachment jig can adjust the position along one side of the frame frame by means of the means and the moving table, and can easily correspond to frame frames of different sizes. In addition, when: for additional tension, the tension is added to the front end of the screw, colliding; the side, only in the frame, the reaction force is obtained, therefore, also has; in the frame frame to apply additional tension to the metal strip In the case of the tension-adding jig that can adjust the vertical direction in the vertical direction of the moving table, it is also possible to accommodate frame frames of different thicknesses. When the movable table and the tension-adding jig can be moved freely, the tension can be added and adjusted simultaneously with the metal tape attached to the ι|, and the plane of the frame after the metal tape is mounted can be improved. Degree, more advanced - Ψγ*8 π*Γ is the degree of interfaciality. The metal belt mounting device of the present invention has a structure in which the tension of the metal belt can be additionally and adjusted by using the first three attachment means, and the metal strip is spot-welded to the frame frame. Therefore, the tension can be adjusted and attached to the frame. In order to bend the frame, it is possible to achieve a high degree of flatness of the frame frame, for example, within a tolerance range of high precision. $ ΐί

I 由導引 此，能 屬帶來 幀框之 不需要 〇 位置之 地對應 Μ組之 框兩側 性，同 步地成 之張力 然後， 屬帶之 之範圍 操作而 【實施方式】 [發明之最佳實施形態] 第1實施形態 -11 - (9) (9)1361636 接著，就本發明之第i實施形態而言’藉由第1圖至第 1 〇圖而進行說明。 首先，藉由第8圖至第10圖而就本發明之參考例’來 進行敘述。在第8圖至第10圖所示之參考例’金屬罩膜1係 正如第8圖所示，成爲藉由極薄之金屬板所製作並且具有 複數個之罩膜部2之構造之附有多面之金屬罩膜1。藉由利 用複數個之夾具’來把持金屬罩膜1之4邊之各個’利用各 個夾具，來附加張力，以箭號來顯示於金屬罩膜丨’並且 ，在每各個夾具，調整該張力，而使得金屬罩膜1’成爲 並無歪斜或鬆弛之平坦狀態。並且’金屬罩膜1係各個罩 膜部2之開口部，保持於一定之間距’並且’在該狀態下 ------在窗框形狀之幀框-3,-藉由點銲等而進行安裝’除去厨 邊之不必要部分。正如第9圖所示，金屬罩膜1係附加張力 ，以成爲平坦之狀態，來保持於幀框3，形成金屬罩膜單 元8 » 即使是在像這樣形成之金屬罩膜單元8，也還有更加 應該改良之方面。也就是說，金屬罩膜單元8係具有在幀 框3之單面來附加張力之狀態之金屬罩膜1，因此，在具有 幀框3之金屬罩膜單元8，正如第10圖誇張地顯示，金屬罩 膜1側係發生彎曲而成爲曲面。在使用具有此種彎曲之金 屬罩膜單元8來作爲蒸鑛罩膜之狀態下，玻璃基板等之被 蒸鍍基材和金屬罩膜間之密合性變差，降低蒸鍍之圖案位 置精度。因此，必須抑制彎曲之大小（第1 〇圖之尺寸e) 至適當之容許値（例如在縱長500mmx橫寬500mm之金屬 -12- (10) 1361636 罩膜單元8、成爲0.1mm程度）以下。爲了抑制發生於金 屬罩膜單元8之彎曲’因此，可以增大幀框之厚度而增加 剛性，但是，在像這樣時，重量變大而不容易處理，並且 ，成本也變高。 接著，就藉由本發明所造成之金屬罩膜單元而進行敘 述。 在以下，以使用作爲有機EL元件製造之附有多面之 蒸鍍罩膜之金屬罩膜單元，來作爲例子而說明本發明之理 想之實施形態。第1 ( a )圖係由表面側來觀看本發明之實 施形態之金屬罩膜單元之槪略立體圖，第1 (b)圖係由背 面側來觀看其金屬罩膜單元之槪略立體圖。第2圖係以在 ……組裝前-之狀態-來顯-示構成該金屬罩-膜單元之零件之槪略立 體圖。在第1圖、第2圖’藉由參考圖號10來顯示整體之金 屬罩膜單元係具備：窗框形狀（矩形狀）之幀框13:矩形 狀之金屬罩膜11，係以附加張力之狀態來行安裝在幀框1 3 之表面；以及，細長狀金屬帶17、18，係以附加張力之狀 態來行安裝在幀框1 3之背面。 金屬罩膜11係金屬薄板製，呈縱橫地排列複數個之罩 膜部12所形成。各個罩膜部12係具備藉由蝕刻等而形成之 許多個之微小之開口部。各個罩膜部12之開口部係用以在 蒸鍍時，容許蒸氣之通過，其開口部之形狀、配列係成爲 任意。可以列舉例如呈平行地排列細長縫隙狀之開口部者 、在縱方向來排列縫隙狀之開口部同時也呈平行地進行排 列者等。在安裝於幀框13前之金屬罩膜11係比起幀框13 ’ -13- (11) (11)1361636 還皆在縱橫兩方向，製作成爲更大之尺寸，在幾乎對應於 幀框13外周邊之位置，形成能夠藉由彎曲而容易切斷之易 切斷線15。此外，易切斷線15係具備能夠忍耐於施加在金 屬罩膜11之張力之強度。金屬罩膜11之厚度、罩膜部12之 尺寸、以及形成於此之許多之微小之開口部之尺寸等係並 無特別限定，但是，作爲代表性者係可以例舉金屬罩膜1 1 之厚度30〜200;zm、罩膜部12之尺寸之長度50〜70mm、 幅寬30〜50 mm、開口部之幅寬40〜lOOym、呈平行地配 列之開口部間之無孔部分之幅寬80〜200 # m等。 幀框13係具備將形成金屬罩膜11之許多之罩膜部12之 區域予以包含之大小之開口 14之窗框形狀（矩形狀）者。 該-幀框13-係-即·使-是在安裝-於附加-張力之狀態下之金屬罩膜 11後，也並不會由於該金屬罩膜11之張力而進行彎曲，在 金屬罩膜，產生歪斜或鬆弛，並且，即使是在保管時、對 於蒸鍍機之安裝時、蒸鍍操作時等之處理時，也具備可以 保持金屬罩膜11在平坦之狀態之剛性。此外，即使是在安 裝附加張力之金屬罩膜11之時間點（在安裝金屬帶前之時 間點）產生稍微之彎曲（例如在縱長500mmx橫寬500mm 之幀框13、0.2〜0.5mm程度之彎曲），也可以然後安裝 金屬帶17、18而進行矯正，因此，不需要具有不產生此種 小彎曲爲止之大剛性。作爲幀框1 3之厚度係可以例舉2mm 〜30mm程度，作爲幅寬（開口 14之內圍面和幀框之外圍 面間之距離）係可以例舉5mm〜50mm程度。在幀框13之 背面，在安裝金屬帶17、18之區域，放入溝槽狀之挖入20 -14- (12) (12)1361636 細長狀金屬帶17、18係用以在這裡附加長邊方向之張 力之狀態，安裝於幀框13，而抑制金屬罩膜單元10之彎曲 至容許範圍內。選定金屬帶17、18之幅寬及厚度而能夠在 彈性區域內，加入必要大小之張力’例如選定幅寬成爲5 〜50 mm、厚度成爲50〜200//m程度。在安裝於幀框13前 之金屬帶17、18之長度係更加長於幀框13。 接著，說明金屬罩膜單元10之製造方法。預先準備第 2圖所示之金屬罩膜11、幀框13、金屬帶17、18。首先’ 在幀框13上，搭載金屬罩膜11，正如第3圖、第4圖所示， 藉由複數個之夾具23而把持該金屬罩膜11之4邊之各個， 一啓前連結·於各個夾具23之引擎等之驅動手段24，正如藉由 箭號所顯示的，將各個夾具23拉引於縱橫方向，在金屬罩 膜11，附加張力。在此，分別設置在金屬罩膜11之4邊之 複數個之夾具23係配合於罩膜部12之列和並無罩膜部之區 域而進行配置，因此，能夠分別藉由各個之夾具23而拉引 形成金屬罩膜11之罩膜部12之區域和並無罩膜部之區域， 來附加張力，可以藉此而分別利用各個之夾具23，來對於 金屬罩膜11之不同剛性之區域，附加張力。接著，在藉由 複數個之夾具23來保持及拉引金屬罩膜11之各邊之狀態下 ’對於金屬罩膜11之表面狀態，進行目視檢查，如果有歪 斜或鬆弛的話，則將施加在拉引該區域之夾具23之拉引力 予以調整，將金屬罩膜11調整成爲並無歪斜或鬆弛之平坦 狀態並且呈平行一致地拉引罩膜部12之開口部之狀態。此 -15- (13) (13)1361636 外，檢查形成於金屬罩膜11之各個罩膜部12之位置，調整 各個夾具23之拉引力而使得各個罩膜部進入至既定之尺寸 精度內之位置。可以藉由以上而使得金屬罩膜11成爲並無 歪斜或鬆弛之狀態並且各個罩膜部15位處於既定之尺寸精 度範圍內之狀態。然後，在該狀態下，使用雷射光，在幀 框13，對於金屬罩膜11之周邊部分，進行點銲（參考點銲 部30)及固定。然後，卸除夾具23，利用易切斷線15，來 除去金屬罩膜11周邊之不必要部分。 接著，正如第5圖所示，在長邊方向來附加張力之狀 態下，將金屬帶17擠壓在幀框13之平行之2邊之背面之控 入20(參考第2圖），使用雷射光，對於其兩端附近，進 行點銲（參考圖號56A)及固定。然後，切斷及除去金屬 帶17兩端之不必要部分。接著，正如第6圖所示，在長邊 方向來附加張力之狀態下，將金屬帶18擠壓在直角於先前 安裝金屬帶17之2邊之直角之2邊之背面之挖入20 (參考第 5圖），使用雷射光，對於其兩端附近，進行點銲（參考 圖號56B)及固定。然後，切斷及除去金屬帶18兩端之不 必要部分。藉由以上而製造第1圖所示之金屬罩膜單元10 〇 此外，金屬帶17、18係不僅示兩端附近’也涵蓋於全 長度而使用雷射光，進行點銲及固定。 在以上之製造製程’在將附加張力之狀態下之金屬罩 膜11來安裝於幀框13之時間點，正如第7 (a)圖誇張地顯 示，由於金屬罩膜11之張力而在幀框13 ’產生彎曲。但是 -16- (14) (14)1361636 ，藉由然後以在金屬帶1 7附加張力之狀態，安裝於幀框1 3 之背面，而使得該金屬帶17之張力，作用在幀框13之彎曲 回復到原本之方向，正如第7(b)圖所示，減少幀框13之 彎曲，提高平面度。在金屬罩膜11，沿著縱方向及橫方向 之兩方向，附加張力，在幀框13，由金屬罩膜11開始至縱 方向及橫方向之兩方向，產生彎曲，但是，金屬帶17、18 係在幀框13之縱方向及橫方向之兩方向，進行安裝而加入 張力，因此，在金屬帶17、18之安裝後，幀框13係皆在縱 方向及橫方向，抑制彎曲而提高平面度。 在此，在附加於金屬帶17、18之張力相等於附加在金 屬罩膜11之張力時，可以得到在幀框13兩面之張力平衡， -確實地消除1貞框13之，·曲，但是，在實用上，可以選定更 加遠小於附加在金屬罩膜之張力。也就是說，幀框13本身 係具有相當之剛性而支持金屬罩膜Π之張力，並且，可以 容許微小之彎曲（例如在縱長500mmx橫寬500mm之幀框 13、0.1mm以下之彎曲），因此，附加於金屬帶1 7、1 8之 張力係可以是由附加於金屬罩膜11之張力之5分之1至2分 之1程度，具體地說，可以選定發生於幀框13之彎曲來成 爲容許範圍內。 在正如以上而製造之金屬罩膜單元10，保持金屬罩膜 11成爲並無歪斜或鬆弛之狀態並且罩膜部12之開口部呈正 確平行地一致之狀態，而且，各個罩膜部1 2之位置係也保 持在既定之尺寸精度內。此外，金屬罩膜單元1〇之彎曲係 也保持在微小之容許範圍內。然後，使用該金屬罩膜單元 -17- (15) 1361636 _1〇而進行既定之蒸鍍操作。也就是說，在該金屬罩膜單元 ，安裝玻璃基板等之被蒸鍍基材，安裝於蒸鍍機，進行有 機EL元件之有機層或陰極電極之蒸鏟。可以藉此而位置 精度良好地進行微細圖案之蒸鍍，能夠形成高品質之有機 層或陰極電極。 在前述構造之金屬罩膜單元10，金屬罩膜11、幀框13 和金屬帶17、18之材質係並無特別限定，可以適當地選定 丨 具備必要之強度、剛性、蝕刻適性等之者》例如可以在金 屬罩膜1 1，列舉42合金、不銹鋼、不脹鋼材等，可以在幀 框13，列舉不銹鋼、不脹鋼材等，可以在金屬帶17、18, 相同於金屬罩膜1 1而列舉42合金、不銹鋼、不脹鋼材等。 ……其-中，金屬罩膜11_和金雷帶17、1 8係最好是使用相同之材 料或者是熱膨脹係數相同或接近者（例如熱膨脹係數之差 異20 %以下者）》在像這樣而選定材質時，在不同於製造 時之溫度環境下而放置金屬罩膜單元10之狀態，在金屬罩 丨膜11和金屬帶17、18之熱變形量，並無產生大差異，因此 ，並無擴大金屬罩膜單元1〇之彎曲。 此外，更加理想是藉由不脹鋼材而形成全部之金屬罩 膜11、幀框13和金屬帶17、18。作爲在此使用之不脹鋼材 係可以是Fe.3 6 % Ni之標準組成，並且，也可以是將該標 準組成之Ni之一部分來取代成爲Co或者是添加微量之 Μη。這些不脹鋼材係顯示極爲低之熱膨脹率，例如在Fe-36%Ni之標準組成，熱膨脹率係1·2χ1(Γ6/°Κ程度，並且 ，在將標準組成之Ni之一部分來取代成爲Co或者是添加 -18- (16) 1361636 微量之Μη，熱膨脹率係O.lxliT6 / °K 不脹鋼材時，在不同於製造時之溫度環 膜單元10之狀態，在金屬罩膜11、幀框 之熱變形量，幾乎並無差異，並且，其 。因此，並無在金屬罩膜單元10發生彎 並無發生歪斜或鬆驰，並且，各個罩膜 係也極爲微小。像這樣，即使是放置在 下，也可以位置精度良好地進行微細圖 度之管理變得容易。 在以上，說明本發明之理想之實施 明係並非限定於此，可以在專利申請範 適當之變更。例如作爲金屬罩膜1 1之周 13之固定方法係並無限定在藉由雷射光 可以變換成爲藉由接合劑所造成之固定 外，金屬帶17、18之固定方法係也並無 所造成之點銲，可以變換成爲藉由接合 螺絲鎖止等。但是，正如實施形態，在 造成之點銲時，比起螺絲鎖止等，還使 單且固定變得更加確實，得到所謂在固 純之優點。此外，金屬帶17、18之固定 定在兩端，可以倂用中間之適當位置之 方式係可以是電阻熔接。此外，熔接部 定爲點形狀，可以是線形狀。 此外，在前述之實施形態，在金屬 程度。在使用此種 境下而放置金屬罩 13和金屬帶17、1 8 熱變形量係極微小 曲而在金屬罩膜1 1 部1 2之位置之變動 任何一種溫度環境 案之蒸鍍，使得溫 形態，但是，本發 圍之記載內，進行 邊部分相對於幀框' 所造成之點銲，也 和螺絲鎖止等。此 限定在藉由雷射光 劑所造成之固定和 使用藉由雷射光所 得作業變得更加簡 定後之構造變得單 位置係也並無僅限 固定。此外，熔接 之形狀係還並無限 罩膜1 1固定於幀框 -19- (17) (17)1361636 13之際，藉由對應於罩膜部11所對應之區域和並無罩膜部 之區域來分別設置金屬罩膜11之4邊之複數個之夾具23而 進行把持，附加張力，但是’在金屬罩膜11來附加張力之 手段係並無限定在該構造’如果可以拉引金屬罩膜11成爲 並無歪斜或鬆弛之平坦狀態並且呈平行—致地拉引罩膜部 之開口部的話，則能夠適當地進行變更。可以加入例如變 更設置在金屬罩膜11各邊之複數個之夾具之個數或夾具之 幅寬等之變更。 此外，在前述之實施形態，在金屬覃膜11，沿著縱橫 兩方向而加入張力，成爲平坦之狀態，但是，有可以藉由 利用金屬罩膜而僅在縱方向或者是僅在橫方向，加入張力 '·，來呈一致地拉引_金屬罩膜，成爲並無歪斜或鬆弛之狀態 之情況發生。本發明係也包含該情況，在該情況下，金屬 帶係不需要設置在幀框之4邊，可以僅在平行於金屬罩膜 所附加之張力方向之平行之邊，安裝金屬帶。此外，在前 述之實施形態，安裝金屬帶17、18之全面而重疊於包圍幀 框13之開口 14之框之部分，但是，金屬帶之安裝位置係並 非限定於此，成爲可以在固定於幀框13之金屬罩膜11之罩 膜部12，在並無干涉之範圍內，安裝金屬帶而橫切開口 14 之構造。 本發明之金屬罩膜單元係最好是使用在要求高精細圖 案化之有機EL元件之有機層或者是陰極電極之蒸鍍，但 是，並非限定於此，可以使用在其他用途之蒸鍍，並且， 也可以使用在蒸鍍以外之需要遮罩之用途。 -20- (18) (18)1361636 第2實施形態 接著，就本發明之第2實施形態而言，藉由第11圖至 第1 7圖而進行說明。 此外，在第2實施形態，在相同於第1圖至第10圖所示 之第1實施形態之同一部分，附加相同之圖號而省略詳細 之說明。 藉由參考圖號10來顯示整體之罩膜單元係具備：窗框 形狀（矩形狀）之幀框13;矩形狀之金屬罩膜11，係以在 其表面附加張力之狀態，藉由點銲部30而進行安裝；以及 ，細長狀金屬帶1 7、1 8，係以在幀框1 3之背面附加張力之 狀態，藉由點銲部56A、56B而進行安裝（參考第1圖及第 1 1 圖）。 金屬罩膜11係金屬薄板製，呈縱橫地排列及形成複數 個之罩膜部12。各個罩膜部12係具備藉由蝕刻等之所形成 之許多之微小之開口部。各個罩膜部12之開口部係用以在 蒸鍍時，容許蒸氣之通過，其開口部之形狀、配列係成爲 任章，可以列舉例如呈平行地排列細長縫隙狀之開口部者 、在縱方向來排列插槽狀之開口部同時也呈平行地進行排 列者等。在安裝於幀框13前之金屬罩膜11係比起幀框13, 還皆在縱橫兩方向，製作成爲更大之尺寸，在幾乎對應於 幀框13外周邊之位置，形成能夠藉由彎曲而容易切斷之易 切斷線15。此外，易切斷線15係具備能夠忍耐於施加在金 屬罩膜11之張力之強度。金屬罩膜11之厚度、罩膜部12之 尺寸、以及形成於此之許多之微小之開口部之尺寸等係並 -21 - (19) (19)1361636 無特別限定，但是，作爲代表性者係可以例舉金屬罩膜1 1 之厚度30〜200 /zm、罩膜部12之尺寸之長度50〜70 mm 、幅寬30〜50 mm、開口部之幅寬40〜100 //m、呈平行 地配列之開口部間之無孔部分之幅寬80〜200 等。 幀框13係具備將形成金屬罩膜11之許多之罩膜部12之 區域予以包含之大小之開口 1 4之窗框形狀者。該幀框1 3係 即使是在安裝於附加張力之狀態下之金屬罩膜11後，也並 不會由於該金屬罩膜11之張力而進行彎曲，在金屬罩膜， 產生歪斜或鬆弛，並且，即使是在保管時、對於蒸鍍機之 安裝時、蒸鍍操作時等之處理時，也具備可以保持金屬罩 膜Π在平坦之狀態之剛性。此外，即使是在安裝附加張力 之金屬罩膜11之時間點（在安裝金屬帶前之時間點）產生 稍微之彎曲（例如在縱長500 mmx橫寬500 mm之幀框13 、0.2〜0.5 mm程度之彎曲），也可以然後安裝金屬帶17 、18而進行矯正，因此，不需要具有不產生此種小彎曲爲 止之大剛性。作爲幀框13之厚度係可以例舉2 mm〜30 mm 程度，作爲幅寬（開口 14之內圍面和幀框之外圍面間之距 離）係可以例舉5 mm〜50 mm程度。在幀框13之背面， 在安裝金屬帶17、18之區域，放入溝槽狀之挖入20» 金屬帶17、18係用以在這裡附加長邊方向之張力之狀 態，安裝於幀框13，而抑制罩膜單元10之彎曲至容許範圍 內。選定金屬帶17、18之幅寬及厚度而能夠在彈性區域內 ，加入必要大小之張力，例如選定幅寬成爲5〜5 0 mm、 厚度成爲50〜2 00 程度。在安裝於幀框13前之金屬帶 -22- (20) 1361636 17、18之長度係更加長於幀框13。該金屬帶17、18係在幾 乎對應於幀框13外周邊之位置，藉由半蝕刻等而形成能夠 藉由彎曲來容易切斷之易切斷線19。 接著，說明在金屬帶17、18安裝於幀框13時之所使用 ' 之張力附加用治具。第12圖係以在幀框13安裝金屬帶17時 之狀態來顯示張力附加用治具4 1之槪略立體圖，第1 3圖係 第12圖所示之部分之槪略剖面圖，第14圖係在第13圖之箭 φ 號 A-A方向來觀看張力附加用治具41之槪略立體圖。張 力附加用治具4 1係具備：支持台42 ;帶把持構件44，係在 該支持台42,透過直動導引43而呈直線狀可自由移動地進 行保持；帶附加用螺絲46，係安裝於該帶把持構件44。支 持台42係成爲可以在張力附加用治具41之使用時，在幀框 13端面之既定位置，藉由螺栓等而進行固定之構造。此外 ，支持台42係可以成爲固定於支持幀框13之平台等之支持 裝置之構造，來取代固定於幀框13。 # 直動導引43係在支持台42安裝在相對於幀框13之既定 位置之狀態時，配置帶把持構件44而能夠自由地移動於幀 框13之挖入20之長邊方向。帶把持構件44係具有帶把持本 體48和帶壓件49,在帶把持本體48之上面，形成可裝設金 . 屬帶17而使得其長邊方向平行於帶把持構件44之移動方向 之溝槽48a。該溝槽48a係可以在將張力附加用治具41安 裝在相對於幀框1 3之既定位置之狀態，形成位處於幀框1 3 之挖入20之延長上，並無彎曲安裝在挖入20內之金屬帶17 ，承受至溝槽48a內。帶壓件49係可以藉由利用螺栓50來 -23- (21) (21)1361636 固定在帶把持本體48，而將安裝在溝槽4 8a內之金屬帶17 ，擠壓及把持在帶把持本體48»此外，可以藉由帶把持本 體48和帶壓件49而確實地把持金屬帶17，因此，在帶壓件 49之下面，形成鑿緊用凸條49a。該凸條49a係可以設置 在帶把持本體46側。 張力附加用螺絲46係在接近於帶把持構件44所把持之 金屬帶17之位置，以平行於該金屬帶之長邊方向並且由帶 把持構件44開始突出前端之狀態，來進行安裝。可以藉由 成爲該構造而以螺絲來鎖入張力附加用螺絲46，使得其前 端碰撞到幀框1 3，並且，以螺絲來鎖入，而在幀框1 3之金 屬帶安裝位置之附近，產生反力，而且，在金屬帶17，附 加張力。在此，如果張力附加用螺絲46相對於帶把持構件 44之安裝位置成爲接近於帶把持構件44所把持之金屬帶17 之位置的話，則可以是金屬帶1 7之側方，但是，在圖示之 實施形態，成爲金屬帶17中央之正下方。可以藉由成爲該 位置而在金屬帶17之全幅寬，穩定及附加張力。 接著，說明使用前述構造之張力附加用治具41之金屬 帶安裝方法以及使用該金屬帶安裝方法之罩膜單元10之製 造方法。預先準備第11圖所示之金屬罩膜11、幀框13、金 屬帶1 7、1 8。首先在用以於幀框1 3藉由附加張力之狀態來 安裝金屬罩膜11之罩膜貼合裝置，將幀框13安裝在既定位 置，在其上面，搭載金屬罩膜11，藉由複數個之夾具23而 把持該金屬罩膜11之各個4邊，啓動連結於各個夾具23之 汽缸等之驅動手段24，正如藉由箭號所示，沿著縱橫方向 -24- (22) (22)1361636 ，來拉引各個夾具23,在金屬罩膜11，附加張力（參考第 3圖及第4圖）。 在此，分別設置於金屬罩膜11之4邊之複數個之夾具 23係配合於罩膜部12之列和並無罩膜部之區域而進行配置 ，因此，能夠分別藉由各個之夾具23而拉引形成金屬罩膜 11之罩膜部12之區域和並無罩膜部之區域’來附加張力’ 可以藉此而分別利用各個之夾具23，來對於金屬罩膜11之 不同剛性之區域，附加張力。接著’在藉由複數個之夾具 23而把持金屬罩膜11之各邊來進行拉引之狀態下，藉由目 視而檢査金屬罩膜1 1之表面狀態，如果有歪斜或鬆弛的話 ，則調整加入至拉引該區域之夾具23之拉引力，調整金屬 —罩膜1Γ成爲·並·無歪斜或鬆·驰之平坦狀態並且呈平行一致地 拉引罩膜部12之開口部之狀態。此外，檢查形成於金屬罩 膜11之各個罩膜部12之位置，調整各個夾具23之拉引力而 使得各個罩膜部進入至既定之尺寸精度內之位置。可以藉 由以上而使得金屬罩膜11成爲並無歪斜或鬆弛之狀態並且 各個罩膜部12位處於既定之尺寸精度範圍內之狀態。然後 ，在該狀態下，在幀框1 3，使用雷射光，點銲（參考點銲 部30)金屬罩膜11之周邊部分，進行固定。然後，卸除夾 具23，利用易切斷線15而除去金屬罩膜11周邊之不必要部 分。 接著，正如第17(a)圖所示，在用以安裝金屬帶之 所使用之平台等之支持裝置（並無圖示），以金屬罩膜11 側’作爲下面而放置安裝金屬罩膜11之幀框13，藉由利用 -25- (23) (23)1361636 支持承架等之適當之支持手段（並無圖示）所保持之測微 儀55，而測定產生於該幀框13之彎曲，接著，正如第17( b)圖所示，安裝張力附加用治具14而在該幀框13之背面 ，位處在形成於縱方向之溝槽狀之挖入20之兩端，在挖入 20內，安裝金屬帶17，同時，將其兩端，把持於帶把持構 件44。然後，藉由以螺絲，來鎖入張力附加用螺絲46，將 其前端擠壓在幀框13之端面，並且，以螺絲來鎖入，而在 幀框13產生反力之金屬帶17，來附加張力。在該狀態下， 正如第1 7 ( b )圖所示，藉由測微儀5 5，而測定幀框1 3之 彎曲量。接著，調整張力附加用螺絲46之螺絲鎖入，調整 附加於金屬帶1 7之張力，而使得測定所得到之彎曲量，成 爲要求之容許範圍內（例如在縱長500 mmX橫寬500 mm 之幀框13、0.1 mm以下之彎曲）。然後，正如第17 ( c ) 圖所示，在幀框13之彎曲量進入至要求之容許範圍內而確 保幀框13所要求之平面度時，正如第16圖所示，使用雷射 熔接裝置56而將金屬帶17之兩端附近，點銲在幀框13 (參 考圖號56A)，來進行固定。然後，卸除帶附加用治具41 ，利用易切斷線19而切斷及除去金屬帶17兩端之不必要部 分。 在此，在金屬帶17使用張力附加用治具41而附加張力 時，在金屬帶17相對於幀框13之安裝位置附近，產生反力 ，並且，安裝於金屬帶17而附加張力，因此，藉由點銲而 將金屬帶17固定於幀框13，即使是在卸除張力附加用治具 41之狀態下，也幾乎並無改變金屬帶17作用於幀框13之張 -26- (24) (24)1361636 力之狀態，因此，幀框1 3係仍然保持在先前調整之平面度 。像這樣，可以藉由僅調整張力附加用螺絲46，使得幀框 13成爲要求之平面度，在該狀態下，將金屬帶17固定於幀 框13，而矯正產生於幀框13之彎曲，成爲要求之平面度。 即使是就在幀框13之背面而形成於橫方向之溝槽狀之 挖入20來實施以上之操作，也在該挖入20，安裝金屬帶18 。可以藉此而矯正橫方向之彎曲，成爲要求之平面度。藉 由以上而製造罩膜單元1〇(參考第1圖）。 在正如以上而製造之罩膜單元10，金屬罩膜11係保持 在並無歪斜或鬆弛之狀態並且使得罩膜部12之開口部成爲 呈正確平行地一致之狀態，而且，各個罩膜部12之位置係 也保持在既定之尺寸精度內。此外，罩膜單元10之彎曲係 也保持在些微之容許範圍內。然後，使用該罩膜單元10而 進行既定之蒸鍍操作。也就是說，在該罩膜單元，安裝玻 璃基板等之被蒸鍍基材，裝設於蒸鍍機，進行有機EL元 件之有機層或陰極電極之蒸鍍。可以藉此而呈位置精度良 好地進行微細圖案之蒸鍍，能夠形成高品質之有機層或陰 極電極。 在以上之實施形態，在金屬帶17或18安裝於幀框13時 ，在金屬帶17或18之兩端，分別安裝張力附加用治具41， 但是，本發明係並非限定於該構造，可以成爲預先在幀框 13，藉由點銲等而固定金屬帶17或1 8之某一端側，僅在其 他端側，配置張力附加用治具4 1，使用該張力附加用治具 41，來附加張力之構造。也可以藉由該構造而同樣以矯正 -27- (25) (25)I361636 幀框13之彎曲之狀態，來將金屬帶17或18固定於幀框13。 在以上，說明本發明之理想之實施形態，但是，本發 明係並非限定於此，可以在申請專利範圍之記載內，進行 適當之變更。例如在前述之實施形態，將金屬帶17、18安 裝在固定金屬罩膜11後之幀框13，藉由金屬罩膜11之安裝 而矯正產生於幀框13之彎曲，但是，本發明之金屬帶之安 裝方法係也可以適用在安裝金屬罩膜前之幀框來安裝金屬 帶之狀態。可以在該狀態下，預測在後製程來安裝金屬罩 膜11時之所產生之彎曲，調整金屬帶之張力，而在幀框13 產生相反方向之要求之彎曲，來安裝金屬帶。此外，作爲 金屬帶17、18之固定方法係並無限定在藉由雷射光所造成 之點銲，可以變更成爲電阻熔接、接合劑' 螺絲鎖止等。 但是，在正如實施形態而使用藉由雷射光所造成之點銲時 ’得到比起螺絲鎖止等還使得作業更加地簡單且固定更加 地確實而在固定後之構造變得單純之優點。金屬帶17、18 之固定位置係也並非僅限定於兩端，可以倂用中間之適當 位置之固定。此外，金屬罩膜11之周邊部分對於幀框13之 固定方法係也並無限定在藉由雷射光所造成之點銲，可以 變更成爲電阻熔接、接合劑、螺絲鎖止等。此外，熔接部 之形狀係並非限定爲點形狀，也可以成爲線狀。 此外，在前述之實施形態’在金屬罩膜11固定於幀框 13時’分別藉由對應於罩膜部12所對應之區域和並無罩膜 部之區域來設置之複數個之夾具23而把持金屬罩膜〗丨之4 邊’附加張力，但是，在金屬罩膜1 1附加張力之手段係並 -28- (26) (26)1361636 非限定於該構造，如果是能夠拉引金屬罩膜11成爲並無歪 斜或鬆弛之平坦狀態並且呈平行一致地拉引罩膜部之開口 部的話，則可以適當地進行變更。例如可以將變更設置在 金屬罩膜11各邊之複數個夾具之個數或夾具之幅寬等之變 更予以加入。 此外，在前述之實施形態，成爲在金屬罩膜11、在縱 橫兩方向來加入張力而成爲平坦之狀態，但是，有可以藉 由金屬罩膜而僅在縱方向或橫方向，加入張力，來呈一致 地拉引金屬罩膜而成爲並無歪斜或鬆弛之坦狀態之情況發 生。本發明係也包含該情況，在該情況下，金屬帶係不需 要設置在幀框之4邊，可以僅在平行於金屬罩膜所附加之 張力之方向之邊，安裝金屬帶。此外，可以在幀框13變長 於縱方向之長方形之狀態而在橫方向不太產生彎曲之狀態 下，成爲僅在縱方向來安裝金屬帶之構造。此外，在前述 之實施形態，安裝金屬帶17、18而使得其全面重疊在包圍 幀框13之開口 14之框之部分，但是，金屬帶之安裝位置係 並非限定於此，也可以成爲在並無干涉到固定於幀框13之 金屬罩膜11之罩膜部12之範圍內，安裝金屬帶而橫切開口 14之構造。 第3實施形態 接著，就本發明之第3實施形態而言，藉由第18圖至 第23圖而進行說明。 此外，在第3實施形態，在相同於第1圖至第10圖所示 -29- (27) (27)1361636 之第1實施形態以及相同於第11圖至第17圖所示之第2實施 形態之同一部分，附加相同之圖號而省略詳細之說明。 藉由參考圖號10來顯示整體之罩膜單元係具備：窗框 形狀（矩形狀）之幀框13;矩形狀之金屬罩膜11，係以在 其表面附加張力之狀態，藉由點銲部3 0而進行安裝；以及 ，細長狀金屬帶17、18，係以在幀框13之背面附加張力之 狀態，藉由點銲部56A、56B而進行安裝（參考第1圖及第 1 1 圖）。 金屬罩膜11係金屬薄板製，呈縱橫地排列及形成複數 個之罩膜部12。各個罩膜部12係具備藉由蝕刻等之所形成 之許多之微小之開口部。各個罩膜部12之開口部係用以在 蒸鍍時，容許蒸氣之通過，其開口部之形狀、配列係成爲 任意，可以列舉例如呈平行地排列細長縫隙狀之開口部者 、在縱方向來排列插槽狀之開口部同時也呈平行地進行排 列者等。在安裝於幀框1 3前之金屬罩膜1 1係比起幀框1 3， 還皆在縱橫兩方向，製作成爲更大之尺寸，在幾乎對應於 幀框13外周邊之位置，形成能夠藉由彎曲而容易切斷之易 切斷線15。此外，易切斷線15係具備能夠忍耐於施加在金 屬罩膜11之張力之強度。金屬罩膜11之厚度、罩膜部12之 尺寸、以及形成於此之許多之微小之開口部之尺寸等係並 無特別限定，但是，作爲代表性者係可以例舉金屬罩膜1 1 之厚度30〜20 0 #m、罩膜部12之尺寸之長度50〜70 mm 、幅寬30〜50 mm、開口部之幅寬40〜100 ym'呈平行 地配列之開口部間之無孔部分之幅寬80〜200// m等。 -30- (28) 1361636 幀框13係具備將形成金屬罩膜11之許多 區域予以包含之大小之開口 14之窗框形狀者 即使是在安裝於附加張力之狀態下之金屬罩 不會由於該金屬罩膜11之張力而進行彎曲， ' 產生歪斜或鬆弛，並且，即使是在保管時、 安裝時、蒸鍍操作時等之處理時，也具備可 膜1 1在平坦之狀態之剛性。此外，即使是在 φ 之金屬罩膜11之時間點（在安裝金屬帶前之 稍微之彎曲（例如在縱長500 mmx橫寬500 、0.2〜0.5 mm程度之彎曲），也可以然後 、18而進行矯正，因此，不需要具有不產生 止之大剛性。作爲幀框1 3之厚度係可以例舉 程度，作爲幅寬（開口 1 4之內圍面和幀框之 離）係可以例舉5mm〜50mm程度。在幀框 安裝金屬帶17、18之區域，放入溝槽狀之挖 • 金屬帶17、18係用以在這裡附加長邊方 態，安裝於幀框13，而抑制罩膜單元10之彎 內。選定金屬帶17、18之幅寬及厚度而能夠 ，加入必要大小之張力，例如選定幅寬成f . 厚度成爲50〜200 M m程度。在安裝於幀框 17、18之長度係更加長於幀框13。也在該金 在幾乎對應於幀框13外周邊之位置，藉由半 能夠藉由彎曲來容易切斷之易切斷線19。 接著，將在金屬帶17、18安裝於幀框13 之罩膜部12之 。該幀框1 3係 膜1 1後，也並 在金屬罩膜， 對於蒸鏡機之 以保持金屬罩 安裝附加張力 時間點）產生 m m之幀框1 3 安裝金屬帶17 此種小彎曲爲 2 mm 〜30 mm 外圍面間之距 1 3之背面，在 Λ 20 〇 向之張力之狀 曲至容許範圍 在彈性區域內 ! 5 〜5 0 mm、 13前之金屬帶 屬帶17 、 18 ， 蝕刻等而形成 時之所使用之 -31 - (29) (29)1361636 張力附加裝置以及具備該張力附加裝置之金屬帶安裝裝置 予以說明。第1 8圖、第1 9圖係以不同之動作狀態來顯示本 發明之實施形態之金屬帶安裝裝置之槪略立體圖，第20圖 係設置在第18圖、第19圖所示之帶安裝裝置之張力附加裝 置之主要部分之槪略立體圖，第21圖係第20圖所示之區域 之一部分之槪略剖面圖，第22圖係第21圖之A-A箭號槪 略剖面圖。藉由參考圖號31來顯示整體之帶安裝裝置係具 有：具備高精度之平面度之支持面之支持盤、例如石平台 32、和保持於該石平台32之張力附加裝置33、以及點銲裝 置3 4。 張力附加‘裝置3 3係具備：呈水平地支持幀框1 3之幀框 置迕35、配置在相互地朝向於支持之幀框丨3之某一邊·而使 得在該幀框置台35成爲既定位置之導引手段36、在該導引 手段36呈可自由平行移動地保持在前述幀框13之某一邊之 移動台37、以及在該移動台37透過升降導引機構38而可自 由升降地進行保持之張力附加用治具41。導引手段3 6及移 動台37之構造係如果是能夠沿著導引手段36而呈直線狀地 將移動台37予以移動並且可以固定於要求位置之構造的話 ，則成爲任意，可以列舉例如使用導引溝槽者、使用導軌 者、使用直動導引者等。升降導引裝置3 8之構造係也如果 是能夠相對於移動台37而升降張力附加用治具41並且可以 固定於要求位置之構造的話，則成爲任意。 張力附加用治具41係具有：支持台42，係在移動台37 上而透過升降導引裝置3 8來進行保持；帶把持構件44’係 -32- .(30) .(30)1361636 在該支持台42透過直動導引43而呈水平且可自由移動地沿 著直角方向（在直交於藉由導引手段36所造成之移動台37 移動方向之方向）來保持於幀框13之某一邊之帶把持構件 44,使得金屬帶17、其長邊方向平行於帶把持構件44之移 動方向；帶附加用螺絲46，係安裝於該帶把持構件44。帶 把持構件44係具有帶把持本體48和帶壓件49，在帶把持本 體48之上面，形成可裝設金屬帶17而使得其長邊方向平行 於帶把持構件44之移動方向之溝槽48a。該溝槽48a係可 以在將張力附加用治具4 1配置在相對於幀框1 3之既定位置 之狀態，形成位處於幀框13之控入20之延長上，並無彎进 安裝在控入20內之金屬帶17，承受至溝槽4 8a內。帶壓件 49係可以藉由利用螺栓50來固定在帶把持本體48，而將安 裝在溝槽48a內之金屬帶17，擠壓及把持在帶把持本體48 。此外，可以藉由帶把持本體48和帶壓件49而確實地把持 金屬帶17，因此，在帶壓件49之下面，形成鑿緊用凸條 49a。該凸條49a係可以設置在帶把持本體48側。 張力附加用螺絲46係在接近於帶把持構件44所把持之 金屬帶17之位置，以能夠平行於該金屬帶之長邊方向並且 由帶把持構件44開始突出前端而碰撞到幀框1 3之側面之形 態，來進行安裝。可以藉由成爲該構造而以螺絲來鎖入張 力附加用螺絲46，使得其前端碰撞到幀框1 3，並且，以螺 絲來鎖入，而在幀框13之金屬帶安裝位置之附近，產生反 力，在金屬帶1 7，附加張力。在此，如果張力附加用螺絲 46相對於帶把持構件44之安裝位置成爲接近於帶把持構件 -33- (31) (31)1361636 44所把持之金屬帶17之位置的話，則可以是金屬帶17之側 方，但是，在圖示之實施形態，成爲金屬帶17中央之正下 方。可以藉由成爲該位置而在金屬帶17之全幅寬，穩定及 附加張力。 在第18圖、第19圖，點銲裝置34係用以將金屬帶17之 要求位置，熔接及固定在幀框13，在該實施形態，使用電 阻熔接方式。此外，點銲裝置3 4係並無限定在電阻熔接方 式，可以使用其他方式、例如雷射方式。點銲裝置3 4係設 置可以藉由導引裝置53而進行移動，成爲可以將安裝於幀 框13上之既定位置之金屬帶17之要求位置予以點銲之構造 。此外，在畫面，僅在幀框13之前面側，來描繪點銲裝置 34，但是，也在幀框13之深度側，設置點銲裝置（並未圖 示），能夠將深度側之金屬帶17，熔接及固定在幀框13。 此外，爲了夾住幀框13而將點銲裝置34設置在兩側，因此 ，可以成爲將單一之點銲裝置，保持在能夠於水平面內移 動在二次元方向之X-Y移動機構，使得該點銲裝置，移 動於Χ·Υ方向之要求位置，來進行點銲之構造。 接著，說明使用前述構造之金屬帶安裝裝置31而在金 屬帶附加張力來安裝於幀框13之方法以及使用該金屬帶安 裝裝置31之罩膜單元10之製造方法。預先準備金屬罩膜11 、幀框13、金屬帶17、18。首先正如第3圖、第4圖所示， 在用以於幀框13藉由附加張力之狀態來安裝金屬罩膜11之 罩膜貼合裝置，將幀框13安裝在既定位置，在其上面，搭 載金屬罩膜11，藉由複數個之夾具23而把持該金屬罩膜11 -34- (32) (32)1361636 之各個4邊，啓動連結於各個夾具23之汽缸等之驅動手段 24，正如藉由箭號所示，沿著縱橫方向，來拉引各個夾具 23，在金屬罩膜11，附加張力。 在此，分別設置於金屬罩膜11之4邊之複數個之夾具 23係配合於罩膜部12之列和並無罩膜部之區域而進行配置 ，因此，能夠分別藉由各個之夾具23而拉引形成金屬罩膜 11之罩膜部12之區域和並無罩膜部之區域，來附加張力’ 可以藉此而分別利用各個之夾具23，來對於金屬罩膜11之 不同剛性之區域，附加張力。接著，在藉由複數個之夾具 23而把持金屬罩膜11之各邊來進行拉引之狀態下，藉由目 視而檢查金屬罩膜11之表面狀態，如果有歪斜或鬆弛的話 ，則調整加入至拉引該區域之夾具23之拉引力，調整金屬 罩膜1 1成爲並無歪斜或鬆驰之平坦狀態並且呈平行一致地 拉引罩膜部12之開口部之狀態。此外，檢查形成於金屬罩 膜11之各個罩膜部12之位置，調整各個夾具23之拉引力而 使得各個罩膜部進入至既定之尺寸精度內之位置。可以藉 由以上而使得金屬罩膜11成爲並無歪斜或鬆弛之狀態並且 各個罩膜部12位處於既定之尺寸精度範圍內之狀態。然後 ，在該狀態下，在幀框1 3，使用雷射光，點銲（參考點銲 部30)金屬罩膜11之周邊部分，進行固定。然後，卸除夾 具23，利用易切斷線15而除去金屬罩膜11周邊之不必要部 分。 接著，正如第18圖及第23 (a)圖所示’在幀框置台 35上，以金屬罩膜11側’作爲下面，並且，定位某一邊而 -35- (33) (33)1361636 平行於導引手段36，來支持安裝金屬罩膜11之幀框13。接 著’藉由利用支持承架等之適當之支持手段（並無圖示） 所保持之測微儀55，而測定產生於該幀框13之彎曲。接著 ’在形成於該幀框13之溝槽狀之挖入20中，在延伸於直交 在導引手段36方向之挖入20，安裝金屬帶17，藉由點銲裝 置3 4而將相反於張力附加用治具4 1之相反側之端部附近， 點焊（參考圖號56A )及固定在幀框13，利用易切斷線19 (參考第2圖）而切斷及除去固定側之不必要部分。 接著，沿著導引手段36而將移動台37予以移動，保持 之張力附加用治具41之溝槽48a (參考第20圖）係定位在 重疊於幀框13所安裝之金屬帶17之位置，將移動台37固定 於該位置，接著，利用升降導引機構38而定位張力附加用 治具41之高度在成爲溝槽48a相同於幀框13之挖入20之同 樣高度之位置，固定於該位置。接著，將金屬帶17之端部 ，把持在帶把持構件44。該操作係就兩側之張力附加用治 具4 1而進行。然後，藉由以螺絲來鎖入張力附加用螺絲46 (參考第21圖），使得其前端擠壓在幀框13之側面’並且 ，以螺絲來鎖入，而在幀框1 3，得到反力，在金屬帶1 7， 附加張力。在該狀態下，正如第19圖及第23 (b)圖所示 ，藉由測微儀5 5，而測定幀框1 3之彎曲量。接著’調整張 力附加用螺絲46之螺絲鎖入，調整附加於金屬帶1 7之張力 ，而使得測定所得到之彎曲量，成爲要求之容許範圍內（ 例如在縱長500 mmx橫寬5 00 mm之幀框1 3、0.1 mm以下 之彎曲）。然後’正如第23 (c)圖所示，在幀框13之彎 -36- (34) (34)1361636 曲量進入至要求之容許範圍內而確保幀框13所要求之平面 度時，正如第19圖所示，使用點焊裝置34而將金屬帶17之 端部附近，點銲在幀框13’來進行固定。然後’由張力附 加用治具41來卸除金屬帶17，利用易切斷線19而切斷及除 去端部之不必要部分》 在此，在金屬帶17使用張力附加用治具41而附加張力 時，在金屬帶17相對於幀框13之安裝位置附近’產生反力 而附加張力，因此，藉由點銲而將金屬帶17固定於幀框13 ，即使是在卸除張力附加用治具41之狀態下，也幾乎並無 改變金屬帶1 7作用於幀框1 3之張力之狀態，因此，幀框1 3 係仍然保持在先前調整之平面度。像這樣，可以藉由僅調 整張力附加用螺絲46，使得幀框1 3成爲要求之平面度，在 該狀態下，將金屬帶17固定於幀框13，而矯正產生於幀框 13之彎曲，成爲要求之平面度。 即使是就在幀框13之背面而形成於橫方向之溝槽狀之 挖入20來實施以上之操作，也在該挖入20，安裝金屬帶18 。可以藉此而矯正橫方向之彎曲，成爲要求之平面度。藉 由以上而製造罩膜單元10。 在正如以上而製造之罩膜單元10，金屬罩膜11係保持 在並無歪斜或鬆弛之狀態並且使得罩膜部1 2之開口部成爲 呈正確平行地一致之狀態，而且，各個罩膜部12之位置係 也保持在既定之尺寸精度內。此外，罩膜單元10之彎曲係 也保持在些微之容許範圍內。然後，使用該罩膜單元10而 進行既定之蒸鍍操作。也就是說，在該罩膜單元，安裝玻 -37- (35) (35)1361636 璃基板等之被蒸鍍基材，裝設於蒸鍍機，進行有機EL元 件之有機層或陰極電極之蒸鍍。可以藉此而呈位置精度良 好地進行微細圖案之蒸鍍，能夠形成高品質之有機層或陰 極電極。 在以上，說明本發明之理想之實施形態，但是，本發 明係並非限定於此，可以在申請專利範圍之記載內，進行 適當之變更。例如在前述之實施形態，將金屬帶17、18安 裝在固定金屬罩膜11後之幀框13，藉由金屬罩膜11之安裝 而矯正產生於幀框13之彎曲，但是，本發明之金屬帶安裝 裝置係也可以使用在安裝金屬罩膜前之幀框來安裝金屬帶 之狀態。可以在該狀態下，預測在後製程來安裝金屬罩膜 1 1時之所產生之彎曲，調整金屬帶之張力，而在幀框1 3產 生相反方向之要求之彎曲，來安裝金屬帶。此外，金屬帶 1 7、1 8之固定位置係也並無僅限定在兩端，可以倂用中間 之適當位置之固定。 此外，在前述之實施形態，在金屬罩膜11固定於幀框 13時，分別藉由對應於罩膜部12所對應之區域和並無罩膜 部之區域來設置之複數個之夾具23而把持金屬罩膜11之4 邊，附加張力，但是，在金屬罩膜1 1附加張力之手段係並 非限定於該構造，如果是能夠拉引金屬罩膜11成爲並無歪 斜或鬆弛之平坦狀態並且呈平行一致地拉引罩膜部之開口 部的話，則可以適當地進行變更。例如可以將變更設置在 金屬罩膜11各邊之複數個夾具之個數或夾具之幅寬等之變 更予以加入。 -38- (36) 1361636 此外，在前述之實施形態，成爲在金屬罩膜11、在縱 橫兩方向來加入張力而成爲平坦之狀態，但是，有可以藉 由金屬罩膜而僅在縱方向或橫方向，加入張力，來呈一致 地拉引金屬罩膜而成爲並無歪斜或鬆弛之坦狀態之情況發 ' .生。在該情況下，金屬帶係不需要設置在幀框之4邊，可 以僅在平行於金屬罩膜所附加之張力之方向之邊，安裝金 屬帶。此外，可以在幀框13變長於縱方向之長方形之狀態 φ 而在橫方向不太產生彎曲之狀態下，成爲僅在縱方向來安 裝金屬帶之構造。此外，在前述之實施形態，安裝金屬帶 17、18而使得其全面重疊在包圍幀框13之開口 14之框之部 分，但是，金屬帶之安裝位置係並非限定於此，也可以成 .- —爲在並無干涉到固定於幀框1 3之金屬罩膜1 1之罩膜部12之 範圍內，安裝金屬帶而橫切開口 14之構造。 【圖式簡單說明】 • 第1(a)圖係由表面側來觀看本發明之實施形態之金 屬罩膜單元之槪略立體圖，第1 (b)圖係由背面側來觀看 其金屬罩膜單元之槪略立體圖。 第2圖係以在組裝前之狀態來顯示構成第1圖所示之金 . 屬罩膜單元之零件之槪略立體圖。 第3圖係顯示在金屬罩膜附加張力而安裝於幀框之狀 態之槪略俯視圖。 第4圖係顯示在金屬罩膜附加張力而安裝於幀框之狀 態之槪略立體圖 -39- 1361636 . 、 (37) 第5圖係顯示在金屬帶附加張力而安裝於幀框之狀態 之槪略立體圖。 第6圖係顯示在金屬帶附加張力而安裝於幀框之狀態 之槪略立體圖。 第7(a)圖、第7(b)圖係說明藉由金屬帶而矯正安 裝金屬罩膜之幀框之彎曲之槪略側視圖。 第8圖係顯示在參考例而在金屬罩膜附加張力來安裝 φ 於幀框之狀態之槪略俯視圖。 第9圖係參考例之金屬罩膜單元之槪略立體圖。 第10圖係誇大發生於該參考例之金屬罩膜單元之彎曲 而顯示參考例之金屬罩膜單元之槪略側視圖。 第1 ΓΒΓ係以在組裝前之狀態來顯示構成第1圖所示之 罩膜單元之零件之槪略立體圖。 第12圖係以在幀框安裝金屬帶時之狀態來顯示本發明 之實施形態之張力附加用治具之槪略立體圖。 φ 第13圖係第12圖所示之部分之槪略剖面圖。 第14圖係在第13圖之箭號A-A方向來觀看張力附加 用治具之槪略立體圖。 第1 5圖係顯示在金屬帶附加張力而安裝於幀框之狀態 . 之槪略立體圖。 第16圖係顯示將附加張力之金屬帶來固定於幀框之狀 態之槪略立體圖。 第17 (a)圖係顯示將安裝金屬罩膜之幀框之彎曲予 以測定之狀態之槪略側視圖’第1 7 ( b )圖、第1 7 ( c )圖 -40- (38) 1361636 係顯示在金屬帶附加張力而矯正幀框之彎曲之狀態 側視圖。 第18圖係顯示本發明之實施形態之金屬帶安裝 槪略立體圖。 第19圖係以不同於第18圖之動作狀態來顯示第 示之金屬帶安裝裝置之槪略立體圖。 第20圖係設置在第18圖所示之帶安裝裝置之張 裝置之主要部分之槪略立體圖。 第21圖係第20圖所示之區域之一部分之槪略剖 第22圖係第21圖之A-A箭號槪略剖面圖。 第23 (a)圖係顯示將安裝金屬罩膜之幀框之 以測定之狀態之槪略側視圖，第23 ( b )圖、第23 係顯示在金屬帶附加張力而矯正幀框之彎曲之狀態 側視圖。 【主要元件符號說明】 e :尺寸 1 :金屬罩膜 2 :罩膜部 3 :窗框形狀之幀框 8 :金屬罩膜單元 10 :金屬單元 π :金屬罩膜 12 :罩膜部 之槪略 裝置之 18圖所 力附加 面圖。 彎曲予 :c)圖 之槪略 -41 - (39) 1361636 1 3 :矩形狀之幀框 14 :開口 15:可切斷之易切斷線 1 7 :金屬帶 1 8 :金屬帶 19:可切斷之易切斷線 20 :溝槽狀之挖入 φ 23 :夾具 2 4 :驅動手段 3 0 :點銲部 31 :安裝帶裝置 31 :石平台 3 3 :張力附加裝置 3 4 :點銲裝置 3 5 :幢框置台 • 36 :導引手段 37 :移動台 38 :升降導引機構 4 1 :張力附加用治具 . 42 :支持台 43 :直動導引 44 :帶把持構件 46 :帶附加用螺絲 48 :帶把持本體 -42- (40) (40)1361636 48a :可裝設之溝槽 49 :帶壓件 49a :鑿緊用凸條 50 :螺栓 53 :導引裝置 5 5 :測微儀 5 6 :雷射熔接裝置 56A :點銲部 56B :點銲部I guided by this, can bring the frame frame, the location of the frame does not need to correspond to the two sides of the frame of the group, the tension is synchronously formed, and then the range of the band is operated. [Embodiment] [The most invented BEST MODE FOR CARRYING OUT THE INVENTION First Embodiment -11 - (9) (9) 1361636 Next, the first embodiment of the present invention will be described with reference to Figs. 1 to 1 . First, the reference example of the present invention will be described with reference to Figs. 8 to 10 . The reference example 'metal cover film 1' shown in Figs. 8 to 10 is as shown in Fig. 8 and is a structure made of an extremely thin metal plate and having a plurality of cover film portions 2 attached thereto. Multi-faceted metal cover film 1. By using a plurality of jigs 'to hold each of the four sides of the metal cover film 1 'with each jig, the tension is added, and the arrow is displayed on the metal cover 丨', and the tension is adjusted at each jig, The metal cover film 1' is made flat without being skewed or slack. Further, the 'metal cover film 1 is an opening portion of each of the cover film portions 2, and is held at a certain distance 'and' in this state ------ frame frame-3 in the shape of a window frame, by spot welding, etc. And to install 'removing unnecessary parts of the kitchen side. As shown in Fig. 9, the metal cover film 1 is tensioned to be held in a flat state to be held in the frame frame 3, and the metal cover film unit 8 is formed. Even in the metal cover film unit 8 formed as described above, There are more aspects that should be improved. That is, the metal cover film unit 8 has the metal cover film 1 in a state in which tension is applied to one side of the frame frame 3, and therefore, the metal cover film unit 8 having the frame frame 3 is displayed exaggeratedly as shown in FIG. The side of the metal cover film 1 is bent to form a curved surface. In the state in which the metal cover film unit 8 having such a curvature is used as the vapor deposition cover film, the adhesion between the vapor-deposited substrate such as the glass substrate and the metal cover film is deteriorated, and the positional accuracy of the vapor deposition pattern is lowered. . Therefore, it is necessary to suppress the size of the bend (the dimension e of the first drawing) to the appropriate allowable enthalpy (for example, a metal -12- (10) 1361636 cover film unit 8 having a length of 500 mm x a width of 500 mm becomes 0. 1mm degree or less. In order to suppress the occurrence of the bending of the metal cover film unit 8, the thickness of the frame frame can be increased to increase the rigidity. However, in this case, the weight becomes large and it is not easy to handle, and the cost is also high. Next, the metal cover film unit caused by the present invention will be described. In the following, a preferred embodiment of the present invention will be described by using a metal cover film unit having a multi-faced vapor deposition cover film produced as an organic EL element as an example. Fig. 1(a) is a schematic perspective view of the metal cover film unit of the embodiment of the present invention viewed from the front side, and Fig. 1(b) is a schematic perspective view of the metal cover film unit viewed from the back side. Fig. 2 is a schematic elevational view showing the components constituting the metal cover-membrane unit in a state before assembly. In the first and second drawings, the entire metal cover film unit is provided with a window frame shape (rectangular shape) frame frame 13 in a rectangular frame shape, and a rectangular metal film 11 is attached thereto. The state is mounted on the surface of the frame 13; and the elongated metal strips 17, 18 are mounted on the back side of the frame 13 in an additional tension state. The metal cover film 11 is made of a thin metal plate and is formed by arranging a plurality of cover film portions 12 vertically and horizontally. Each of the cover film portions 12 is provided with a plurality of minute openings formed by etching or the like. The opening of each of the cover film portions 12 is for allowing passage of vapor during vapor deposition, and the shape and arrangement of the openings are arbitrary. For example, an opening having a slit shape in parallel may be arranged, and an opening having a slit shape may be arranged in the longitudinal direction while being arranged in parallel. The metal cover film 11 mounted before the frame frame 13 is formed in a larger size than the frame frames 13'-13-(11)(11)1361636 in both the vertical and horizontal directions, almost corresponding to the frame 13 The position of the outer periphery forms an easy cutting line 15 which can be easily cut by bending. Further, the easy cutting line 15 is provided with a strength capable of enduring the tension applied to the metal cover film 11. The thickness of the metal cover film 11, the size of the cover film portion 12, and the size of many minute openings formed therein are not particularly limited. However, as a representative, a metal cover film 1 1 can be exemplified. The thickness is 30 to 200; zm, the length of the cover film portion 12 is 50 to 70 mm, the width is 30 to 50 mm, the width of the opening is 40 to 100 μm, and the width of the non-porous portion between the openings arranged in parallel is wide. 80~200 #m etc. The frame frame 13 is provided with a sash shape (rectangular shape) having an opening 14 of a size that includes a plurality of regions of the cover film portion 12 of the metal cover film 11. The frame frame 13--------after being mounted on the metal cover film 11 in the state of additional-tension, does not bend due to the tension of the metal cover film 11, in the metal cover film In addition, even if it is handled at the time of storage, at the time of mounting of a vapor deposition machine, or at the time of a vapor deposition operation, the rigidity of the metal cover film 11 can be maintained. Further, even at the point of time when the metal film 11 of the additional tension is mounted (the time point before the metal tape is mounted), a slight curvature is generated (for example, in the frame frame 13 and 0 of 500 mm in length and 500 mm in width). 2~0. The bending of the 5 mm degree can also be performed by mounting the metal strips 17, 18, so that it is not necessary to have a large rigidity without such small bending. The thickness of the frame frame 13 can be, for example, about 2 mm to 30 mm, and the width (the distance between the inner surface of the opening 14 and the outer surface of the frame) can be, for example, about 5 mm to 50 mm. On the back side of the frame frame 13, in the area where the metal strips 17, 18 are mounted, a trench-like digging 20 - 14 - (12) (12) 1361636 elongated metal strips 17, 18 are attached for lengthening here. The state of the tension in the side direction is attached to the frame 13 to suppress the bending of the metal cover film unit 10 to the allowable range. The width and thickness of the metal strips 17, 18 are selected so that a tension of a necessary size can be added in the elastic region. For example, the selected width is 5 to 50 mm and the thickness is 50 to 200/m. The length of the metal strips 17, 18 mounted before the frame 13 is longer than the frame 13. Next, a method of manufacturing the metal cover film unit 10 will be described. The metal cover film 11, the frame frame 13, and the metal strips 17, 18 shown in Fig. 2 are prepared in advance. First, the metal cover film 11 is mounted on the frame frame 13, and as shown in Figs. 3 and 4, each of the four sides of the metal cover film 11 is held by a plurality of jigs 23, and the front side is connected. The driving means 24 of the engine or the like of each of the jigs 23, as shown by the arrows, pulls the respective jigs 23 in the longitudinal and lateral directions, and tension is applied to the metal cover film 11. Here, the plurality of jigs 23 provided on the four sides of the metal cover film 11 are arranged in the area of the cover film portion 12 and the region where the cover film portion is not provided, and therefore, the respective jigs 23 can be respectively provided. The region where the cover film portion 12 of the metal cover film 11 is formed and the region where the cover film portion is not formed are pulled to add tension, whereby the respective jigs 23 can be used to differently rigid regions of the metal cover film 11. , additional tension. Next, in a state in which the sides of the metal cover film 11 are held and pulled by a plurality of jigs 23, the surface state of the metal cover film 11 is visually inspected, and if it is skewed or slack, it is applied to The pulling force of the jig 23 in the region is adjusted, and the metal cover film 11 is adjusted to a flat state in which there is no skew or slack, and the opening portion of the cover film portion 12 is pulled in parallel. In addition to the -15-(13) (13) 1361636, the position of each of the cover films 12 formed on the metal cover film 11 is inspected, and the pulling force of each of the jigs 23 is adjusted so that each cover film portion enters a predetermined dimensional accuracy. position. The metal cover film 11 can be made into a state in which it is not skewed or slack, and each of the cover film portions 15 is in a predetermined dimensional accuracy range. Then, in this state, spot laser welding (reference spot welding portion 30) and fixing are performed on the peripheral portion of the metal cover film 11 in the frame frame 13 using the laser light. Then, the jig 23 is removed, and unnecessary portions of the periphery of the metal cover film 11 are removed by the easy-cut line 15. Next, as shown in Fig. 5, in a state where tension is applied in the longitudinal direction, the metal strip 17 is pressed against the control 20 of the back side of the parallel sides of the frame frame 13 (refer to Fig. 2), using a thunder Spot light is spot welded (see Figure 56A) and fixed near its ends. Then, unnecessary portions of both ends of the metal strip 17 are cut and removed. Next, as shown in Fig. 6, in the state in which the tension is applied in the longitudinal direction, the metal strip 18 is pressed at the right side of the two sides of the right side of the two sides of the previously mounted metal strip 17 by the digging 20 (refer to Fig. 5), using laser light, spot welding (refer to Fig. 56B) and fixing for the vicinity of both ends. Then, unnecessary portions of both ends of the metal strip 18 are cut and removed. The metal cover film unit 10 shown in Fig. 1 is manufactured by the above. Further, the metal strips 17, 18 are not only shown in the vicinity of both ends, but also cover the full length and use laser light to perform spot welding and fixing. In the above manufacturing process 'the time when the metal cover film 11 in the state of the additional tension is attached to the frame frame 13, as shown in the figure 7 (a), the frame is framed due to the tension of the metal cover film 11. 13 'There is a bend. However, -16-(14)(14)1361636 is attached to the back surface of the frame frame 13 by the additional tension in the metal strip 17, so that the tension of the metal strip 17 acts on the frame 13 The bending returns to the original direction, as shown in Fig. 7(b), reducing the curvature of the frame 13 and improving the flatness. In the metal cover film 11, tension is applied in both the longitudinal direction and the lateral direction, and the frame 13 is bent from the metal cover film 11 in both the longitudinal direction and the lateral direction. However, the metal strip 17 is bent. 18 is attached in the longitudinal direction and the lateral direction of the frame frame 13 to add tension. Therefore, after the metal strips 17 and 18 are mounted, the frame 13 is in the longitudinal direction and the lateral direction, thereby suppressing the bending and improving. Flatness. Here, when the tension applied to the metal strips 17, 18 is equal to the tension applied to the metal cover film 11, the tension balance on both sides of the frame 13 can be obtained, and the 1 frame 13 is surely eliminated. In practical terms, it can be selected to be much smaller than the tension attached to the metal cover film. That is to say, the frame 13 itself has a relatively rigid rigidity to support the tension of the metal cover film, and can allow slight bending (for example, frame frames of length 500 mm x 500 mm in width). The bending force of 1 mm or less is therefore, the tension system attached to the metal belts 17 and 18 may be one-fifth to one-half of the tension applied to the metal cover film 11, and specifically, may be selected to occur. The bending in the frame 13 is within the allowable range. In the metal cover film unit 10 manufactured as described above, the metal cover film 11 is kept in a state where it is not skewed or slack, and the opening portions of the cover film portion 12 are in a state of being correctly parallel, and each cover film portion 12 is The position system is also kept within the specified dimensional accuracy. In addition, the bending system of the metal cover film unit 1 is also kept within a small tolerance range. Then, the metal deposition film unit -17-(15) 1361636 _1 使用 is used to perform a predetermined vapor deposition operation. In other words, in the metal cover film unit, a vapor-deposited substrate such as a glass substrate is mounted on a vapor deposition machine to carry out a steaming blade of an organic layer or a cathode electrode of the organic EL element. By this, the vapor deposition of the fine pattern can be performed with high precision, and a high-quality organic layer or a cathode electrode can be formed. In the metal cover film unit 10 of the above-described structure, the material of the metal cover film 11, the frame 13 and the metal strips 17, 18 is not particularly limited, and the necessary strength, rigidity, etching suitability, and the like can be appropriately selected. For example, in the metal cover film 1 1, a 42 alloy, a stainless steel, an inflated steel material, or the like may be cited, and in the frame frame 13, stainless steel, an intumescent steel, or the like may be cited, and the metal strips 17, 18 may be the same as the metal cover film 1 1 . Listed as 42 alloys, stainless steel, non-expanded steel, and the like. In the middle, the metal cover film 11_ and the gold band 17 and 18 are preferably made of the same material or have the same or similar coefficients of thermal expansion (for example, the difference in thermal expansion coefficient is less than 20%). When the material is selected, the metal cover film unit 10 is placed in a temperature different from the temperature at the time of manufacture, and there is no large difference in the amount of thermal deformation between the metal cover film 11 and the metal strips 17, 18. There is no bending of the expanded metal cover film unit 1〇. Further, it is more desirable to form all of the metal cover film 11, the frame frame 13, and the metal strips 17, 18 by inflating the steel material. The invar material used herein may be Fe. The standard composition of 3 6 % Ni may be replaced by a part of Ni of the standard composition to be Co or a trace amount of Μη. These non-expanded steels exhibit extremely low thermal expansion rates, for example, in the standard composition of Fe-36% Ni, the coefficient of thermal expansion is 1·2χ1 (Γ6/°Κ degree, and a part of Ni of the standard composition is substituted into Co. Or add -18- (16) 1361636 trace Μ, thermal expansion rate is O. When lxliT6 / °K is not inflated, there is almost no difference in the amount of thermal deformation of the metal cover film 11 and the frame in a state different from the temperature of the film unit 10 at the time of manufacture, and it is. Therefore, no bending or loosening occurs in the metal cover film unit 10, and each cover film system is extremely small. In this way, even if it is placed underneath, it is easy to manage the fine image with high positional accuracy. In the above, the preferred embodiments of the present invention are not limited thereto, and may be modified as appropriate in the patent application. For example, the method of fixing the periphery 13 of the metal cover film 1 is not limited to the case where the laser light can be converted into a fixing by the bonding agent, and the fixing method of the metal tapes 17, 18 is not caused. Spot welding can be changed to be locked by a joint screw. However, as in the embodiment, in the case of spot welding, the fixing and the fixing are made more reliable than the screw locking, etc., and the advantage of so-called solidification is obtained. Further, the metal strips 17, 18 are fixed at both ends, and the appropriate position in the middle may be a resistance fusion. Further, the welded portion is formed in a dot shape and may be in a line shape. Further, in the above embodiment, it is at the metal level. In the case where the metal cover 13 and the metal strips 17 and 18 are placed in such a state, the amount of thermal deformation is extremely small and the position of the metal cover film 1 1 portion 1 2 is changed, and the vapor deposition is performed in any temperature environment. However, in the description of this publication, the spot welding caused by the edge portion with respect to the frame frame is also performed, and the screw is locked. This is limited to the fact that the fixing by the laser light and the use of the laser light become more precise, and the configuration becomes a single position system and is not limited to being fixed. Further, the shape of the fusion is also fixed to the frame -19-(17)(17)1361636 13 by the infinite cover film 1 by the area corresponding to the cover film portion 11 and the portion having no cover film portion In the region, a plurality of clamps 23 on the four sides of the metal cover film 11 are respectively provided and held, and tension is applied. However, the means for adding tension to the metal cover film 11 is not limited to the configuration. When the film 11 is in a flat state without being skewed or slack, and the opening portion of the mask film portion is pulled in parallel, it can be appropriately changed. For example, the number of the jigs provided on each side of the metal cover film 11 or the width of the jig or the like can be changed. Further, in the above-described embodiment, the metal tantalum film 11 is placed in tension in both the longitudinal and lateral directions, and is flat. However, it may be in the longitudinal direction or only in the lateral direction by using the metal cover film. The tension '· is added to uniformly pull the metal cover film to a state where it is not skewed or slack. This is also the case in the present invention. In this case, the metal strip is not required to be disposed on the four sides of the frame, and the metal strip can be attached only on the side parallel to the direction of the tension attached to the metal cover film. Further, in the above-described embodiment, the metal strips 17 and 18 are entirely overlapped and overlapped with the frame surrounding the opening 14 of the frame frame 13. However, the mounting position of the metal strip is not limited thereto, and may be fixed to the frame. The cover film portion 12 of the metal cover film 11 of the frame 13 has a structure in which the metal strip is attached to cross the opening 14 without interference. The metal cover film unit of the present invention is preferably used for vapor deposition of an organic layer or a cathode electrode of an organic EL element requiring high-definition patterning, but is not limited thereto, and vapor deposition for other uses may be used, and It is also possible to use a mask other than vapor deposition. -20- (18) (18) 1361636 Second Embodiment Next, a second embodiment of the present invention will be described with reference to Figs. 11 to 17 . In the second embodiment, the same portions as those in the first embodiment shown in Figs. 1 to 10 are denoted by the same reference numerals, and detailed description thereof will be omitted. Referring to Fig. 10, the entire cover film unit is provided with a frame frame 13 having a sash shape (rectangular shape), and a rectangular metal cover film 11 by spot welding in a state where tension is applied to the surface thereof. The mounting portion 30 is attached; and the elongated metal strips 17 and 18 are attached to the back surface of the frame frame 13 by the spot welding portions 56A and 56B (refer to Fig. 1 and Fig. 1 1 figure). The metal cover film 11 is made of a thin metal plate, and is arranged in a vertical and horizontal direction and a plurality of cover film portions 12 are formed. Each of the cover film portions 12 is provided with a plurality of minute openings formed by etching or the like. In the opening portion of each of the cover film portions 12, the vapor is allowed to pass through during vapor deposition, and the shape and the arrangement of the openings are set as follows. For example, the openings having the elongated slits are arranged in parallel, and In the direction in which the slots are formed, the openings are arranged in parallel. The metal cover film 11 mounted before the frame frame 13 is formed in a larger size than the frame frame 13 in both the vertical and horizontal directions, and can be formed by bending at a position almost corresponding to the outer periphery of the frame frame 13. It is easy to cut off the easy cutting line 15. Further, the easy cutting line 15 is provided with a strength capable of enduring the tension applied to the metal cover film 11. The thickness of the metal cover film 11, the size of the cover film portion 12, and the size of a plurality of minute opening portions formed therein are not particularly limited, but are representative. The thickness of the metal cover film 1 1 is 30 to 200 /zm, the length of the cover film portion 12 is 50 to 70 mm, the width is 30 to 50 mm, and the width of the opening is 40 to 100 //m. The width of the non-porous portion between the openings arranged in parallel is 80 to 200 or the like. The frame frame 13 is provided with a sash shape of an opening 14 having a size that includes a plurality of regions of the cover film portion 12 forming the metal cover film 11. The frame frame 13 is not bent by the tension of the metal cover film 11 even after being attached to the metal cover film 11 in a state of additional tension, and the metal cover film is skewed or slackened, and Even in the case of handling during the storage, at the time of mounting the vapor deposition machine, or during the vapor deposition operation, the rigidity of the metal cover film can be kept flat. Further, even at the time point when the metal film 11 of the additional tension is mounted (at the time point before the metal tape is mounted), a slight curvature is generated (for example, in the frame frame 13 and 0 of 500 mm in length and 500 mm in width). 2~0. The bending of the 5 mm degree can also be performed by mounting the metal strips 17, 18, and therefore, it is not necessary to have a large rigidity which does not cause such a small bending. The thickness of the frame frame 13 can be, for example, about 2 mm to 30 mm, and the width (the distance between the inner surface of the opening 14 and the outer peripheral surface of the frame) can be, for example, about 5 mm to 50 mm. On the back side of the frame frame 13, in the area where the metal strips 17, 18 are mounted, a groove-like digging 20» metal strip 17, 18 is attached to the state in which the tension in the longitudinal direction is added thereto, and is attached to the frame frame. 13, and the bending of the cover film unit 10 is suppressed to an allowable range. The width and thickness of the metal strips 17, 18 are selected to add a necessary amount of tension in the elastic region, for example, the selected width is 5 to 50 mm, and the thickness is 50 to 200. The length of the metal strip -22-(20) 1361636 17, 18 mounted before the frame 13 is longer than the frame 13. The metal strips 17, 18 are formed at positions corresponding to the outer periphery of the frame frame 13, and are formed by half etching or the like to form an easy cutting line 19 which can be easily cut by bending. Next, the jig for attaching tension used when the metal belts 17, 18 are attached to the frame 13 will be described. Fig. 12 is a schematic perspective view showing the tension attachment jig 4 1 in a state in which the metal strip 17 is attached to the frame frame 13, and Fig. 13 is a schematic sectional view of a portion shown in Fig. 12, the 14th The figure is a schematic perspective view of the tension attachment jig 41 viewed in the direction of the arrow φ AA of Fig. 13. The tension attachment jig 41 includes a support base 42. The belt holding member 44 is attached to the support base 42 and is linearly movably held by the linear motion guide 43. The attachment screw 46 is attached. It is attached to the belt holding member 44. The support base 42 is a structure that can be fixed by a bolt or the like at a predetermined position of the end surface of the frame frame 13 when the tension attachment jig 41 is used. Further, the support base 42 may be configured to be fixed to a support device such as a platform supporting the frame 13 instead of being fixed to the frame 13. When the support table 42 is attached to a predetermined position with respect to the frame frame 13, the direct-moving guide 43 is disposed so as to be freely movable in the longitudinal direction of the digging 20 of the frame frame 13. The belt holding member 44 has a belt holding body 48 and a belt pressing member 49 which is formed on the upper surface of the belt holding body 48 so as to be mountable with gold.  The belt 17 is such that its longitudinal direction is parallel to the groove 48a of the direction in which the holding member 44 is moved. The groove 48a can be attached to the predetermined position of the frame frame 13 in a state in which the tension attachment jig 41 is mounted, and the position is formed on the extension of the digging 20 of the frame frame 13 without being bent and mounted. The metal strip 17 in the 20 is received into the groove 48a. The pressing member 49 can be fixed to the belt holding body 48 by bolts -23-(21) (21) 1361636, and the metal belt 17 installed in the groove 48a is pressed and held by the belt holding device. Main body 48» In addition, the metal strip 17 can be surely held by the belt holding body 48 and the pressing member 49, and therefore, the squeezing rib 49a is formed under the belt pressing member 49. The ridges 49a may be provided on the side of the belt holding body 46. The tension applying screw 46 is attached to the metal tape 17 held by the tape holding member 44 so as to be parallel to the longitudinal direction of the metal tape and to be in a state in which the tape holding member 44 starts to protrude from the front end. By making this configuration, the tension-adding screw 46 can be locked with a screw so that the front end thereof collides with the frame 13 and is locked by a screw, and in the vicinity of the metal strip mounting position of the frame 13 The reaction force is generated, and, in the metal strip 17, additional tension is applied. Here, if the attachment position of the tension applying screw 46 with respect to the belt holding member 44 is close to the position of the metal belt 17 held by the belt holding member 44, it may be the side of the metal belt 17, but in the figure In the embodiment shown, it is directly below the center of the metal strip 17. It is possible to stabilize and add tension to the full width of the metal strip 17 by becoming the position. Next, a metal tape mounting method using the tension attachment jig 41 of the above-described configuration and a manufacturing method of the cover film unit 10 using the metal tape mounting method will be described. The metal cover film 11, the frame frame 13, and the metal strips 17 and 18 shown in Fig. 11 are prepared in advance. First, the cover film bonding apparatus for attaching the metal cover film 11 in a state in which the tension is applied to the frame frame 13 is attached to the predetermined position, and the metal cover film 11 is mounted thereon, by the plural Each of the four sides of the metal cover film 11 is held by the clamps 23, and the driving means 24 connected to the cylinders of the respective clamps 23 or the like is activated, as indicated by the arrows, along the vertical and horizontal directions - 24 - (22) (22 1361636, to pull each of the clamps 23, and to apply tension to the metal cover film 11 (refer to Figs. 3 and 4). Here, the plurality of jigs 23 provided on the four sides of the metal cover film 11 are disposed in the array of the cover film portion 12 and the region where the cover film portion is not provided, and therefore, the respective clamps 23 can be respectively provided. The region where the cover film portion 12 of the metal cover film 11 is formed and the region where the cover film portion is not provided are added to the tension portion, whereby the respective jigs 23 can be utilized to differently rigid regions of the metal cover film 11. , additional tension. Then, the state of the surface of the metal cover film 1 is inspected by visual inspection while the respective sides of the metal cover film 11 are held by a plurality of jigs 23, and if it is skewed or slack, the adjustment is made. The pulling force of the jig 23 that is pulled to the region is adjusted, and the metal-cover film 1 is adjusted to be in a flat state without skew or looseness, and the opening portion of the cover film portion 12 is pulled in parallel. Further, the positions of the respective cover film portions 12 formed on the metal cover film 11 are inspected, and the pulling force of each of the jigs 23 is adjusted so that each of the cover film portions enters a position within a predetermined dimensional accuracy. By the above, the metal cover film 11 can be in a state where it is not skewed or slack, and each of the cover film portions 12 is in a state of a predetermined dimensional accuracy. Then, in this state, in the frame frame 13, the peripheral portion of the metal cover film 11 is spot-welded (reference spot-welded portion 30) using laser light to be fixed. Then, the jig 23 is removed, and the unnecessary portion of the periphery of the metal cover film 11 is removed by the easy cutting line 15. Next, as shown in Fig. 17(a), a metal cover film 11 is placed on the metal cover film 11 side as a support device (not shown) for mounting a metal tape or the like. The frame frame 13 is determined by the micrometer 55 held by the appropriate support means (not shown) supporting the bracket or the like by the -25-(23) (23) 1361636, and the measurement is generated in the frame 13 Bending, then, as shown in Fig. 17(b), the tension attachment jig 14 is attached to the back of the frame frame 13 at the ends of the groove-like digging 20 formed in the longitudinal direction. Inside the digging 20, the metal belt 17 is attached, and at the same time, both ends are held by the belt holding member 44. Then, by tightening the tension applying screw 46 with a screw, the front end is pressed against the end surface of the frame frame 13, and the screw is locked, and the metal strip 17 of the reaction force is generated in the frame frame 13 Additional tension. In this state, as shown in Fig. 7(b), the amount of bending of the frame 13 is measured by the micrometer 5 5 . Next, the screw of the tension attachment screw 46 is locked, and the tension applied to the metal belt 17 is adjusted so that the amount of bending obtained is measured within a required tolerance range (for example, a length of 500 mm×width of 500 mm). Frame frame 13, 0. Bending below 1 mm). Then, as shown in Fig. 17(c), when the amount of bending of the frame frame 13 is within the required tolerance to ensure the flatness required for the frame 13, as shown in Fig. 16, the laser welding device is used. 56, near the ends of the metal strip 17, spot welded to the frame frame 13 (see Fig. 56A) for fixing. Then, the tape attachment tool 41 is removed, and the unnecessary portion of the metal tape 17 is cut and removed by the easy cutting line 19. When the tension is added to the metal belt 17 by the tension attachment jig 41, a reaction force is generated in the vicinity of the attachment position of the metal belt 17 with respect to the frame frame 13, and the metal belt 17 is attached to the metal belt 17 to apply tension. By fixing the metal strip 17 to the frame frame 13 by spot welding, even in the state in which the tension attachment jig 41 is removed, the metal strip 17 is hardly changed to the sheet -26- of the frame frame 13 (24) (24) 1361636 The state of the force, therefore, the frame 1 3 remains at the flatness of the previous adjustment. In this manner, the tension frame 46 can be adjusted so that the frame frame 13 has a desired flatness. In this state, the metal strip 17 is fixed to the frame 13 and the curvature caused by the frame frame 13 is corrected. The flatness required. Even if the above operation is performed on the groove 20 formed in the lateral direction on the back surface of the frame frame 13, the metal tape 18 is attached to the digging 20. By this, the curvature in the lateral direction can be corrected to become the required flatness. The cover unit 1 is manufactured by the above (refer to Fig. 1). In the cover film unit 10 manufactured as described above, the metal cover film 11 is maintained in a state where it is not skewed or slack, and the opening portions of the cover film portion 12 are in a state of being correctly parallel and aligned, and each cover film portion 12 is provided. The position is also maintained within the specified dimensional accuracy. Further, the bending system of the cover film unit 10 is also kept within a slight tolerance. Then, the mask unit 10 is used to perform a predetermined vapor deposition operation. In other words, in the cover film unit, a vapor-deposited substrate such as a glass substrate is mounted on a vapor deposition machine to carry out vapor deposition of an organic layer or a cathode electrode of the organic EL element. By this, it is possible to carry out vapor deposition of a fine pattern with good positional accuracy, and it is possible to form a high-quality organic layer or a cathode electrode. In the above embodiment, when the metal strip 17 or 18 is attached to the frame 13, the tension attachment jig 41 is attached to both ends of the metal strip 17 or 18, but the present invention is not limited to this structure. In the frame frame 13, the one end side of the metal strip 17 or 18 is fixed by spot welding or the like, and the tension attachment jig 4 1 is placed only on the other end side, and the tension attachment jig 41 is used. Additional tension construction. It is also possible to fix the metal strip 17 or 18 to the frame 13 by correcting the state of the -27-(25) (25) I361636 frame frame 13 by this configuration. In the above, the preferred embodiments of the present invention are described. However, the present invention is not limited thereto, and may be appropriately modified within the scope of the claims. For example, in the above-described embodiment, the metal strips 17, 18 are attached to the frame 13 after the metal cover film 11 is fixed, and the bending of the frame frame 13 is corrected by the mounting of the metal cover film 11, but the metal of the present invention The mounting method of the belt can also be applied to the state in which the metal belt is mounted in the frame frame before the metal cover film is installed. In this state, it is possible to predict the bending which occurs when the metal cover film 11 is mounted in the post-process, adjust the tension of the metal strip, and bend the frame frame 13 in the opposite direction to mount the metal strip. Further, the fixing method of the metal strips 17, 18 is not limited to spot welding by laser light, and can be changed to resistance welding, bonding agent 'screw locking, and the like. However, when the spot welding by laser light is used as in the embodiment, the work is made simpler than the screw lock, and the fixing is more reliable, and the structure after the fixing becomes simple. The fixing positions of the metal strips 17, 18 are not limited to only the both ends, and the fixing of the appropriate position in the middle can be employed. Further, the method of fixing the frame portion 13 to the peripheral portion of the metal cover film 11 is not limited to spot welding by laser light, and can be changed to resistance welding, bonding agent, screw locking, and the like. Further, the shape of the welded portion is not limited to a dot shape, and may be linear. Further, in the above-described embodiment, when the metal cover film 11 is fixed to the frame frame 13, the plurality of jigs 23 are provided corresponding to the region corresponding to the cover film portion 12 and the region having no cover film portion. Holding the metal cover film 4 4 sides 'additional tension, but the means of attaching tension to the metal cover film 1 1 and -28- (26) (26) 1361636 is not limited to this structure, if it is capable of pulling the metal cover When the film 11 is in a flat state without being skewed or slack, and the opening portion of the cover film portion is pulled in parallel, the film 11 can be appropriately changed. For example, it is possible to add a change in the number of jigs provided on each side of the metal cover film 11 or the width of the jig. Further, in the above-described embodiment, the metal cover film 11 is placed in tension in both the longitudinal and lateral directions to be flat. However, it is possible to add tension only in the longitudinal direction or the lateral direction by the metal cover film. The metal cover film is drawn in unison to cause a state of no skew or slack. The present invention also includes this case, in which case the metal strip is not required to be disposed on the side of the frame frame, and the metal strip can be attached only to the side parallel to the direction of the tension applied to the metal cover film. Further, in a state in which the frame frame 13 is longer than the rectangular shape in the longitudinal direction and the bending is less likely to occur in the lateral direction, the metal strip can be attached only in the longitudinal direction. Further, in the above-described embodiment, the metal strips 17, 18 are attached so as to be entirely overlapped with the frame surrounding the opening 14 of the frame frame 13. However, the mounting position of the metal strip is not limited thereto, and may be There is no interference to the structure of the cover film portion 12 of the metal cover film 11 fixed to the frame frame 13, and the metal strip is attached to cross the opening 14. Third Embodiment Next, a third embodiment of the present invention will be described with reference to Figs. 18 to 23 . Further, in the third embodiment, the first embodiment is similar to the first embodiment shown in Figs. 1 to 10, and the second embodiment shown in Figs. 11 to 17 is the same as the second embodiment. The same portions of the embodiments are denoted by the same reference numerals, and the detailed description is omitted. Referring to Fig. 10, the entire cover film unit is provided with a frame frame 13 having a sash shape (rectangular shape), and a rectangular metal cover film 11 by spot welding in a state where tension is applied to the surface thereof. The mounting portion 30 is mounted; and the elongated metal strips 17, 18 are attached by the spot welding portions 56A and 56B in a state where tension is applied to the back surface of the frame frame 13 (refer to Figs. 1 and 1 1). Figure). The metal cover film 11 is made of a thin metal plate, and is arranged in a vertical and horizontal direction and a plurality of cover film portions 12 are formed. Each of the cover film portions 12 is provided with a plurality of minute openings formed by etching or the like. In the opening portion of each of the cover film portions 12, the vapor is allowed to pass through during vapor deposition, and the shape and the arrangement of the openings are arbitrary, and for example, the openings having the elongated slits are arranged in parallel, and the longitudinal direction is The openings in the shape of the slots are arranged in parallel, and are arranged in parallel. The metal cover film 1 1 mounted before the frame frame 13 is formed in a larger size than the frame frame 13 in both the vertical and horizontal directions, and is formed at a position almost corresponding to the outer periphery of the frame frame 13 The easy cutting line 15 which is easily cut by bending. Further, the easy cutting line 15 is provided with a strength capable of enduring the tension applied to the metal cover film 11. The thickness of the metal cover film 11, the size of the cover film portion 12, and the size of many minute openings formed therein are not particularly limited. However, as a representative, a metal cover film 1 1 can be exemplified. The thickness of 30 to 20 0 #m, the length of the cover film portion 12 is 50 to 70 mm, the width is 30 to 50 mm, and the width of the opening portion is 40 to 100 ym', and the non-porous portion between the openings is arranged in parallel. The width is 80~200//m and so on. -30- (28) 1361636 The frame frame 13 is provided with a sash shape having an opening 14 of a size including a plurality of regions of the metal cover film 11 even if the metal cover is attached to the state of the additional tension. The metal cover film 11 is bent by the tension, and is caused to be skewed or slack, and the rigidity of the film 1 1 is flat even when it is handled during storage, installation, or vapor deposition operation. In addition, even at the time point of the metal cover film 11 of φ (slightly curved before mounting the metal strip (for example, in the length of 500 mm x width 500, 0. 2~0. The bending of 5 mm is also possible, and then corrected by 18, so that it is not necessary to have a large rigidity which does not occur. The thickness of the frame frame 13 can be exemplified, and the width (the inner circumference of the opening 14 and the frame frame) can be, for example, about 5 mm to 50 mm. In the area where the metal strips 17, 18 are mounted in the frame, the trenches are placed in the trenches. The metal strips 17, 18 are used to attach the long side state to the frame frame 13 to suppress the bending of the mask unit 10. Inside. The width and thickness of the metal strips 17, 18 can be selected to add the necessary amount of tension, for example, the selected width is f.  The thickness is about 50 to 200 M m. The lengths installed in the frame frames 17, 18 are longer than the frame frame 13. Also in the position where the gold is almost corresponding to the outer periphery of the frame frame 13, the easy-cut line 19 which can be easily cut by bending is half. Next, the metal strips 17, 18 are attached to the cover film portion 12 of the frame 13. After the frame frame 13 is the film 1 1 and also in the metal cover film, for the steam mirror machine to keep the metal cover attached to the additional tension time point, the frame frame of mm is generated. 1 The metal strip 17 is mounted. The small bend is 2 Mm ~ 30 mm The distance between the peripheral faces is 1 3, and the tension in the Λ 20 曲 direction is within the elastic range! 5 ~ 5 0 mm, the metal band before the 13 is 17, 18, etched The -31 - (29) (29) 1361636 tension attachment device and the metal belt attachment device including the tension attachment device will be described. Figs. 18 and 19 show schematic perspective views of the metal belt mounting device according to the embodiment of the present invention in different operating states, and Fig. 20 shows the belt mounting shown in Figs. 18 and 19. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 21 is a schematic cross-sectional view showing a portion of a region shown in FIG. 20, and FIG. 22 is a schematic cross-sectional view showing an AA arrow in FIG. 21. The overall tape mounting device is shown by reference numeral 31 having a support plate having a high-precision flatness support surface, such as a stone platform 32, and a tension attachment 33 held by the stone platform 32, and spot welding. Device 34. The tension-adding device 3 3 is configured to support the frame frame 35 of the frame frame 13 horizontally and to face one side of the frame frame 3 that is supported by the frame frame 3 so that the frame frame 35 is set in the frame frame The position guiding means 36 is configured such that the guiding means 36 is movable on the side of the frame frame 13 in a freely movable manner, and the moving table 37 is freely movable up and down by the lifting guide mechanism 38. The jig 41 for holding the tension is held. The structure of the guiding means 36 and the moving table 37 is arbitrary if it can move the moving table 37 linearly along the guiding means 36 and can be fixed to a required position, for example, use Guide the groove, use the guide, use the direct guide, and so on. The structure of the lifting and lowering device 38 is also arbitrary if the jig 41 can be raised and lowered with respect to the moving table 37 and can be fixed to a desired position. The tension attachment jig 41 has a support table 42 that is held by the elevating guide 38 on the moving table 37, and the belt holding member 44' is -32-. (30) . (30) 1361636 The support table 42 is held horizontally and freely movable in the direction of the right angle (in the direction orthogonal to the direction of movement of the moving table 37 by the guiding means 36) through the linear guide 43 The belt holding member 44 is held on one side of the frame frame 13 such that the metal strip 17 has a longitudinal direction parallel to the moving direction of the belt holding member 44; and a belt attachment screw 46 is attached to the belt holding member 44. The belt holding member 44 has a belt holding body 48 and a belt pressing member 49. On the belt holding body 48, a groove 48a is formed in which the metal belt 17 can be mounted such that its longitudinal direction is parallel to the moving direction of the belt holding member 44. . The groove 48a can be placed in a state relative to the predetermined position of the frame frame 13 in the state in which the tension attachment jig 41 is placed, and the position is formed on the extension of the control frame 20 of the frame 13 without being bent into the control. The metal strip 17 entering the 20 is received into the groove 48a. The belt pressing member 49 can be fixed to the belt holding body 48 by means of a bolt 50, and the metal belt 17 mounted in the groove 48a is pressed and held by the belt holding body 48. Further, the metal strip 17 can be surely held by the belt holding body 48 and the pressing member 49, and therefore, the caulking rib 49a is formed under the belt pressing member 49. The ridges 49a may be disposed on the side of the belt holding body 48. The tension attachment screw 46 is located close to the metal belt 17 held by the belt holding member 44 so as to be able to collide with the frame frame 13 in parallel with the longitudinal direction of the metal belt and by the belt holding member 44 to protrude from the front end. The shape of the side is to be installed. By the configuration, the tension applying screw 46 can be locked with a screw so that the front end thereof collides with the frame 13 and is locked by a screw, and is generated in the vicinity of the metal strip mounting position of the frame 13 The reaction force, in the metal belt, 7, additional tension. Here, if the mounting position of the tension applying screw 46 with respect to the belt holding member 44 is close to the position of the metal belt 17 held by the belt holding member - 33-(31) (31) 1361636 44, it may be a metal belt. On the side of 17, the embodiment shown in the figure is directly below the center of the metal strip 17. The full width, stability and additional tension of the metal strip 17 can be achieved by this position. In Figs. 18 and 19, the spot welding device 34 is used to weld and fix the desired position of the metal strip 17 to the frame frame 13. In this embodiment, a resistance welding method is used. Further, the spot welding device 34 is not limited to the resistance welding method, and other methods such as a laser method may be used. The spot welding device 34 is configured to be movable by the guiding device 53, so that the desired position of the metal strip 17 attached to the predetermined position on the frame 13 can be spot-welded. Further, on the screen, the spot welding device 34 is drawn only on the front side of the frame frame 13, but a spot welding device (not shown) is provided on the depth side of the frame frame 13, and the metal strip on the depth side can be provided. 17, welded and fixed in frame 13. Further, in order to sandwich the frame frame 13 and to provide the spot welding device 34 on both sides, it is possible to maintain the single spot welding device in the XY moving mechanism capable of moving in the horizontal direction in the horizontal plane, so that the spot welding The device is moved to the required position in the direction of the Χ·Υ to perform the spot welding structure. Next, a method of attaching the metal tape to the frame frame 13 by using the metal tape mounting device 31 of the above-described configuration and a method of manufacturing the cover film unit 10 using the metal tape mounting device 31 will be described. The metal cover film 11, the frame 13 and the metal strips 17, 18 are prepared in advance. First, as shown in Figs. 3 and 4, in a cover film bonding apparatus for attaching the metal cover film 11 in a state in which the frame frame 13 is attached with tension, the frame frame 13 is mounted at a predetermined position. The metal cover film 11 is mounted, and the four sides of the metal cover film 11-34-(32) (32) 1361636 are held by a plurality of clamps 23, and the driving means 24 connected to the cylinders of the respective clamps 23 are activated. As shown by the arrows, each of the jigs 23 is pulled in the longitudinal and lateral directions, and tension is applied to the metal cover film 11. Here, the plurality of jigs 23 provided on the four sides of the metal cover film 11 are disposed in the array of the cover film portion 12 and the region where the cover film portion is not provided, and therefore, the respective clamps 23 can be respectively provided. The region where the cover film portion 12 of the metal cover film 11 is formed and the region where the cover film portion is not formed are added to apply the tension ′, whereby the respective jigs 23 can be used to respectively different regions of the metal cover film 11 , additional tension. Next, in a state where the sides of the metal cover film 11 are held by a plurality of jigs 23 and pulled, the surface state of the metal cover film 11 is inspected by visual inspection, and if it is skewed or slack, the adjustment is added. The pulling force of the jig 23 of the region is pulled, and the metal cover film 1 is adjusted so as to be in a flat state without being skewed or relaxed, and the opening portion of the cover film portion 12 is pulled in parallel. Further, the positions of the respective cover film portions 12 formed on the metal cover film 11 are inspected, and the pulling force of each of the jigs 23 is adjusted so that each of the cover film portions enters a position within a predetermined dimensional accuracy. By the above, the metal cover film 11 can be in a state where it is not skewed or slack, and each of the cover film portions 12 is in a state of a predetermined dimensional accuracy. Then, in this state, in the frame frame 13, the peripheral portion of the metal cover film 11 is spot-welded (reference spot-welded portion 30) using laser light to be fixed. Then, the jig 23 is removed, and the unnecessary portion of the periphery of the metal cover film 11 is removed by the easy cutting line 15. Next, as shown in Fig. 18 and Fig. 23(a), 'on the frame frame 35, the side of the metal cover film 11' is used as the lower side, and one side is positioned and -35-(33) (33) 1361636 is parallel. The frame means 13 for mounting the metal cover film 11 is supported by the guiding means 36. Next, the curvature generated in the frame 13 is measured by using the micrometer 55 held by an appropriate supporting means (not shown) supporting the rack or the like. Then, in the trench-like digging 20 formed in the frame frame 13, the metal strip 17 is mounted on the digging 20 extending in the direction of the guiding means 36, which is reversed by the spot welding device 34. In the vicinity of the end portion on the opposite side of the tension attachment jig 41, spot welding (see Fig. 56A) and fixing to the frame frame 13, and cutting and removing the fixed side by the easy cutting line 19 (refer to Fig. 2) Unnecessary part. Next, the moving table 37 is moved along the guiding means 36, and the groove 48a (refer to Fig. 20) of the tension applying jig 41 held is positioned to overlap the metal strip 17 to which the frame 13 is mounted. The mobile station 37 is fixed at this position, and then the height of the tension applying jig 41 is positioned by the lifting guide mechanism 38 at a position equal to the same height as the digging 20 of the frame frame 13 of the groove 48a. The location. Next, the end portion of the metal strip 17 is held by the belt holding member 44. This operation is carried out with respect to the tension applying tool 41 on both sides. Then, by tightening the tension attachment screw 46 with a screw (refer to Fig. 21), the front end thereof is pressed against the side of the frame frame 'and locked with a screw, and in the frame frame 13, the reverse is obtained. Force, in the metal belt 17, additional tension. In this state, as shown in Fig. 19 and Fig. 23(b), the amount of bending of the frame 13 is measured by the micrometer 5 5 . Then, the tension of the tension-adding screw 46 is locked, and the tension applied to the metal strip 17 is adjusted, so that the amount of bending obtained is measured within the required tolerance range (for example, a length of 500 mm x a width of 500 mm). Frame frame 1 3, 0. Bending below 1 mm). Then, as shown in Fig. 23(c), when the curvature of the frame frame 13 is -36-(34) (34) 1361636, the volume is within the required tolerance to ensure the flatness required by the frame 13 As shown in Fig. 19, the vicinity of the end portion of the metal strip 17 is spot-welded to the frame frame 13' by the spot welding device 34 to be fixed. Then, the metal tape 17 is removed by the tension attachment jig 41, and the unnecessary portion of the end portion is cut and removed by the easy cutting line 19. Here, the metal tape 17 is attached using the tension attachment jig 41. In the case of tension, a reaction force is generated in the vicinity of the mounting position of the metal strip 17 with respect to the frame 13 and tension is applied. Therefore, the metal strip 17 is fixed to the frame 13 by spot welding, even if the tension is removed. In the state of 41, the state in which the metal strip 17 acts on the tension of the frame 13 is hardly changed, and therefore, the frame 13 remains at the flatness of the previous adjustment. In this manner, the tension frame 46 can be adjusted so that the frame frame 13 has a desired flatness. In this state, the metal band 17 is fixed to the frame 13 and the curvature caused by the frame frame 13 is corrected. Be the flatness of the requirements. Even if the above operation is performed on the groove 20 formed in the lateral direction on the back surface of the frame frame 13, the metal tape 18 is attached to the digging 20. By this, the curvature in the lateral direction can be corrected to become the required flatness. The cover unit 10 is manufactured by the above. In the cover film unit 10 manufactured as described above, the metal cover film 11 is maintained in a state where it is not skewed or slack, and the opening portions of the cover film portion 12 are in a state of being correctly parallel, and each cover film portion is provided. The position of 12 is also maintained within the specified dimensional accuracy. Further, the bending system of the cover film unit 10 is also kept within a slight tolerance. Then, the mask unit 10 is used to perform a predetermined vapor deposition operation. In other words, a vapor-deposited substrate such as a glass-37-(35) (35) 1361636 glass substrate is mounted on the cover film unit, and is placed in a vapor deposition machine to perform an organic layer or a cathode electrode of the organic EL element. Evaporation. By this, it is possible to carry out vapor deposition of a fine pattern with good positional accuracy, and it is possible to form a high-quality organic layer or a cathode electrode. In the above, the preferred embodiments of the present invention are described. However, the present invention is not limited thereto, and may be appropriately modified within the scope of the claims. For example, in the above-described embodiment, the metal strips 17, 18 are attached to the frame 13 after the metal cover film 11 is fixed, and the bending of the frame frame 13 is corrected by the mounting of the metal cover film 11, but the metal of the present invention The belt mounting device can also be used in a state in which a metal frame is attached to a frame frame before the metal cover film is attached. In this state, it is possible to predict the bending generated when the metal cover film 1 1 is mounted in the post-process, adjust the tension of the metal strip, and bend the frame in the opposite direction to form the metal strip. Further, the fixed positions of the metal strips 17 and 18 are not limited to only the both ends, and the fixing at the appropriate position in the middle can be employed. Further, in the above-described embodiment, when the metal cover film 11 is fixed to the frame frame 13, the plurality of jigs 23 are provided corresponding to the region corresponding to the cover film portion 12 and the region having no cover film portion. The tension is applied to the four sides of the metal cover film 11, but the means for applying tension to the metal cover film 1 is not limited to this structure, and if the metal cover film 11 can be pulled, it is flat without slack or slack. When the opening of the cover film portion is pulled in parallel, the change can be appropriately made. For example, it is possible to add a change in the number of jigs provided on each side of the metal cover film 11 or the width of the jig. -38- (36) 1361636 In addition, in the above-described embodiment, the metal cover film 11 is placed in tension in both the longitudinal and lateral directions and is flat. However, it may be in the longitudinal direction only by the metal cover film or In the lateral direction, tension is added to uniformly pull the metal cover film to become a state of no skew or slack. Health. In this case, the metal strip is not required to be disposed on the four sides of the frame, and the metal strip can be attached only in the direction parallel to the direction of the tension applied to the metal cover film. Further, in the state in which the frame frame 13 is longer than the rectangular shape in the longitudinal direction φ and the bending is less likely to occur in the lateral direction, the metal tape can be mounted only in the longitudinal direction. Further, in the above embodiment, the metal strips 17, 18 are attached so as to be entirely overlapped with the portion surrounding the frame of the opening 14 of the frame frame 13, but the mounting position of the metal strip is not limited thereto, and may be formed. - a structure in which the metal strip is attached to cross the opening 14 without interfering with the cover film portion 12 of the metal cover film 1 fixed to the frame frame 13. BRIEF DESCRIPTION OF THE DRAWINGS: Fig. 1(a) is a schematic perspective view of a metal cover film unit according to an embodiment of the present invention viewed from the front side, and Fig. 1(b) is a view of the metal cover film viewed from the back side. A schematic perspective view of the unit. Fig. 2 shows the gold shown in Fig. 1 in a state before assembly.  A schematic perspective view of a part of a cover film unit. Fig. 3 is a schematic plan view showing a state in which a metal cover film is attached to a frame by adding tension. Fig. 4 is a schematic perspective view showing the state in which the metal cover film is attached to the frame frame with additional tension - 39-1636636 .  (37) Fig. 5 is a schematic perspective view showing a state in which the metal belt is attached to the frame by adding tension. Fig. 6 is a schematic perspective view showing a state in which the metal belt is attached to the frame by adding tension. Fig. 7(a) and Fig. 7(b) illustrate a schematic side view of the bending of the frame of the metal cover film by the metal strip. Fig. 8 is a schematic plan view showing a state in which φ is placed in a frame frame by attaching a tension to a metal cover film in a reference example. Fig. 9 is a schematic perspective view of a metal cover film unit of a reference example. Fig. 10 is a schematic side view showing the metal cover film unit of the reference example, exaggerating the bending of the metal cover film unit of the reference example. The first cymbal is a schematic perspective view showing the components constituting the cover unit shown in Fig. 1 in a state before assembly. Fig. 12 is a schematic perspective view showing the tension attachment jig according to the embodiment of the present invention in a state in which the metal strip is attached to the frame. Fig. 13 is a schematic cross-sectional view of the portion shown in Fig. 12. Fig. 14 is a schematic perspective view of the tension attachment jig viewed in the direction of the arrow A-A of Fig. 13. Figure 15 shows the state in which the metal strip is attached to the frame by adding tension.  A slightly stereoscopic view. Fig. 16 is a schematic perspective view showing the state in which the metal band of the additional tension is fixed to the frame. Figure 17 (a) shows a schematic side view of the state in which the bending of the frame of the metal cover film is measured. Figure 17 (b), 1 7 (c) Figure 40- (38) 1361636 A side view showing a state in which the metal belt is attached with a tension to correct the bending of the frame. Fig. 18 is a perspective view showing the mounting of the metal belt according to the embodiment of the present invention. Fig. 19 is a schematic perspective view showing the metal belt mounting device of the first embodiment in an operation state different from that of Fig. 18. Fig. 20 is a schematic perspective view showing the main part of the apparatus with a mounting device shown in Fig. 18. Figure 21 is a schematic cross-sectional view of a portion of the area shown in Figure 20, and Figure 22 is a schematic cross-sectional view of the A-A arrow of Figure 21. Figure 23 (a) shows a schematic side view of the frame in which the metal cover film is to be attached, and Figure 23 (b) and Figure 23 show the tension applied to the metal strip to correct the bending of the frame. State side view. [Description of main component symbols] e: Size 1: Metal cover film 2: Cover film portion 3: Frame frame shape of window frame 8: Metal cover film unit 10: Metal unit π: Metal cover film 12: Mask film portion The attached figure of the device is shown in Figure 18. Bending to: c) Figure - -41 - (39) 1361636 1 3 : Rectangular frame 14 : Opening 15 : Easy to cut line 1 7 : Metal band 1 8 : Metal band 19 : Cut-off easy cutting line 20: groove-like digging φ 23 : jig 2 4 : drive means 3 0 : spot-welded part 31 : mounting band device 31 : stone platform 3 3 : tension attachment device 3 4 : spot welding Device 3 5: Frame mounting table 36: Guide means 37: Mobile station 38: Lifting guide mechanism 4 1 : Fixture for tension attachment.  42: Support table 43: Straight guide 44: With holding member 46: With additional screws 48: With holding body -42- (40) (40) 1361636 48a: Configurable groove 49: With pressure piece 49a : Knurling rib 50 : Bolt 53 : Guide device 5 5 : Micrometer 5 6 : Laser welding device 56A : Spot welding portion 56B : Spot welding portion

Claims (1)

1361636 (1) 十、申請專利範圍 1. 一種金屬罩膜單元，其特徵爲：具備： 矩形狀之幀框； 金屬罩膜，係以附加幀框之縱方向及幀框之橫方向之 ' 至少一種之張力之狀態，來安裝在該幀框之表面；以及， 細長狀金屬帶，係以在長邊方向來附加張力之狀態且 平行於附加在金屬罩膜之張力之方向，來安裝在幀框之背 • 面。 2. 如申請專利範圍第1項所記載之金屬罩膜單元，其 中，金屬罩膜係具有複數個之罩膜部，並且，附加縱方向 及橫方向之張力，金屬帶係分別安裝在幀框之4邊。 3 .如申請專利範圍第1或2項所記載之金屬罩膜單元， 其中’金屬帶係藉由點銲而將至少兩端附近，來固定於前 述幀框。 4. 一種金屬罩膜單元之製造方法，其特徵爲：具備： Φ 在矩形狀幀框之表面’以在該金屬罩膜來附加幀框之 縱方向及幀框之橫方向之至少一種之張力之狀態，安裝金 屬罩膜之製程：以及， 在幀框之背面，以在長邊方向來附加張力之狀態，在 . 平行於附加在金屬罩膜之張力之方向，來安裝細長狀金屬 帶之製程。 5. 如申請專利範圍第4項所記載之金屬罩膜單元之製 造方法’其中’在幀框之表面來安裝金屬罩膜時，安裝尺 寸更加大於幀框之金屬罩膜’然後，除去安裝在幢框之金 -44- (2) 1361636 屬罩膜周邊之不必要部分。 6. 如申請專利範圍第4項所記載之金屬罩膜單元之製 . 造方法’其中，在幀框之背面來安裝金屬帶時，安裝更加 長於幀框之金屬帶，然後，除去安裝在幀框之金屬帶兩端 之不必要部分。 7. 如申請專利範圍第4項所記載之金屬罩膜單元之製 造方法，其中，在幀框之背面安裝金屬帶之製程係具有： # 將金屬帶安裝於幀框之金屬帶安裝位置之製程； 在金屬帶附加張力而在幀框產生反力之製程；以及， 測定幀框之彎曲量，調整附加於金屬帶之張力而使得 彎曲量成爲要求之範圍內之製程。 8 .如申請專利範圍第7項所記載之金屬罩膜單元之製' 造方法，其中，在金屬帶附加張力時，把持金屬帶之兩端 而附加張力，在調整金屬帶之張力後，將金屬帶之至少兩 端，固定於幀框。 # 9.如申請專利範圍第7項所記載之金屬罩膜單元之製 造方法，其中，在將金屬帶之某一端預先地固定於幀框而 在金屬帶附加張力時，把持金屬帶之其他端而附加張力， 在調整金屬帶之張力後，將金屬帶之其他端，固定於幀框 〇 10. —種金屬帶的安裝方法，係在矩形狀之幀框來安 裝金屬帶之金屬帶的安裝方法，其特徵爲：具有： 將金屬帶安裝於幀框之金屬帶安裝位置之製程； 在金屬帶附加張力而在幀框產生反力之製程；以及， -45- (3) (3)1361636 測定幀框之彎曲量，調整附加於金屬帶之張力而使得 彎曲量成爲要求之範圍內之製程。 11. 如申請專利範圍第10項所記載之金屬帶的安裝方 法，其中，在金屬帶附加張力時，把持金屬帶之兩端而附 加張力，在調整金屬帶之張力後，將金屬帶之至少兩端， 固定於幀框。 12. 如申請專利範圍第10項所記載之金屬帶的安裝方 法，其中，在將金屬帶之某一端預先地固定於幀框而在金 屬帶附加張力時，把持金屬帶之其他端而附加張力，在調 整金屬帶之張力後，將金屬帶之其他端，固定於幀框。 13. —種張力附加裝置，係在安裝於矩形狀幀框之細 長狀金屬'帶來附加張力之張力附加裝置，其特徵爲：具備 配置於幀框附近之張力附加用治具，該張力附加用治具係 具有：設置在幀框附近之支持台、呈直線狀且可移動地保 持於支持台且把持金屬帶而使得其長邊方向平行於移動方 向之帶把持構件、以及安裝於帶把持構件而對於金屬帶來 附加張力之張力附加用螺絲。 1 4 .如申請專利範圍第1 3項所記載之張力附加裝置， 其中，還具備：沿著幀框之某一邊所配置之導引手段以及 沿著該導引手段而可自由移動地設置之移動台；張力附加 用治具係保持於該移動台上。 1 5 ·如申請專利範圍第1 4項所記載之張力附加裝置， 其中，張力附加用治具之支持台係可以對於移動台而自由 地移動於上下方向。 -46- (4) 1361636 • 1 6 .如申請專利範圍第1 4項所記載之張力附加裝 其中，在導引手段，配置2組之移動台及張力附加用 〇 17. 如申請專利範圍第13項所記載之張力附加裝 ' 其中，張力附加用螺絲係呈自由抵接地配置在幀框。 18. 如申請專利範圍第13項所記載之張力附加裝 其中，支持台係呈自由抵接地配置在幀框。 φ 19. 一種金屬帶安裝裝置，其特徵爲：具備：在 於矩形狀幀框之細長狀金屬帶來附加張力之張力附加 以及將金屬帶點銲於幀框之既定位置所固定之點銲裝 張力附加裝置係具備配置在幀框附近之張力附加用治 該張力附加用治具係具有：設置在幀框附近之支持台 直線狀且可移動地保持於支持台且把持金屬帶而使得 邊方向平行於移動方向之帶把持構件、以及安裝於帶 構件而對於金屬帶來附加張力之張力附加用螺絲。 # 20.—種有機EL元件材料之蒸鍍方法，係使用金 膜單元而蒸鍍有機EL元件之有機層或陰極電極之有^ 元件材料之蒸鍍方法，其特徵爲：金屬罩膜單元係具 矩形狀之幀框； ^ 金屬罩膜，係以附加幀框之縱方向及幀框之橫方 至少一種之張力之狀態，來安裝在該幀框之表面；以 細長狀金屬帶，係以在長邊方向來附加張力之狀 平行於附加在金屬罩膜之張力之方向，來安裝在幀框 面。 置’ 治具 置， 置， 安裝 裝置 置； 具， 、呈 其長 把持 屬罩 i el 備· 向之 及， 態且 之背 -47-1361636 (1) X. Patent application scope 1. A metal cover film unit, which is characterized in that it has: a rectangular frame frame; a metal cover film which is in the longitudinal direction of the additional frame and the lateral direction of the frame frame. a state of tension applied to the surface of the frame; and an elongated metal strip attached to the frame in a state in which tension is applied in the longitudinal direction and parallel to the tension applied to the metal cover film The back of the box • Face. 2. The metal cover film unit according to claim 1, wherein the metal cover film has a plurality of cover film portions, and the tension in the longitudinal direction and the lateral direction is added, and the metal strips are respectively attached to the frame frame. 4 sides. 3. The metal cover film unit according to claim 1 or 2, wherein the metal strip is fixed to the frame frame by at least two ends by spot welding. A method of manufacturing a metal cover film unit, comprising: Φ at least one of a longitudinal direction of a frame frame and a lateral direction of a frame frame in the metal cover film on a surface of the rectangular frame frame The state in which the metal cover film is mounted: and, in the state of the tension on the back side of the frame frame, in the direction of the tension in the longitudinal direction, the elongated metal strip is attached in parallel with the direction of the tension attached to the metal cover film. Process. 5. The method for manufacturing a metal cover film unit as described in claim 4, wherein the metal cover film is mounted on the surface of the frame, the metal cover film is larger than the frame frame, and then removed. The gold-44- (2) 1361636 of the frame is an unnecessary part of the cover film. 6. The method of manufacturing a metal cover film unit as described in claim 4, wherein when the metal strip is mounted on the back side of the frame, a metal strip longer than the frame is mounted, and then the frame is removed. The unnecessary part of the metal strip of the frame. 7. The method of manufacturing a metal cover film unit according to the fourth aspect of the invention, wherein the process of attaching the metal strip to the back surface of the frame frame comprises: # manufacturing the metal strip to the metal strip mounting position of the frame frame A process in which a tension is applied to the metal frame to generate a reaction force in the frame; and a bending amount of the frame is measured, and a tension applied to the metal tape is adjusted so that the amount of bending becomes within a required range. 8. The method of manufacturing a metal cover film unit according to claim 7, wherein when the metal tape is attached with tension, the two ends of the metal strip are held to apply tension, and after adjusting the tension of the metal strip, At least two ends of the metal strip are fixed to the frame. The method for manufacturing a metal cover film unit according to claim 7, wherein the other end of the metal strip is held when the metal strip is fixed to the frame frame in advance and the tension is applied to the metal strip. After the tension is adjusted, the other ends of the metal strip are fixed to the frame frame 〇10. The mounting method of the metal strip is mounted in a rectangular frame to mount the metal strip of the metal strip. The method has the following features: a process of mounting a metal strip on a metal strip mounting position of a frame frame; a process of adding a tension to the metal strip to generate a reaction force in the frame; and, -45- (3) (3) 1361636 The amount of bending of the frame is measured, and the tension applied to the metal strip is adjusted so that the amount of bending becomes within the required range. 11. The method of mounting a metal strip according to claim 10, wherein when the metal strip is tensioned, the ends of the metal strip are held to apply tension, and after adjusting the tension of the metal strip, the metal strip is at least Both ends are fixed to the frame. 12. The method of attaching a metal strip according to claim 10, wherein when one end of the metal strip is fixed to the frame in advance and the tension is applied to the metal strip, the other end of the metal strip is held and tension is applied. After adjusting the tension of the metal strip, fix the other end of the metal strip to the frame. 13. A tension attachment device which is a tension attachment device for attaching a tension to a rectangular metal frame attached to a rectangular frame, and is characterized in that: a tension attachment jig disposed in the vicinity of a frame frame is provided, and the tension is attached The jig has a support stand disposed near the frame frame, a belt holding member that is linearly and movably held by the support table, and holds the metal strip so that the longitudinal direction thereof is parallel to the moving direction, and is attached to the belt grip A tension-adding screw that adds tension to the metal for the member. The tension attachment device according to claim 1, further comprising: a guiding means disposed along one side of the frame frame and movably disposed along the guiding means The mobile station; the tension attachment jig is held on the mobile station. The tension attachment device according to claim 14, wherein the support table of the tension attachment jig is freely movable in the vertical direction with respect to the moving table. -46- (4) 1361636 • 1 6. The tension is added as described in item 14 of the patent application, and two sets of mobile stations and tension attachments are arranged in the guiding means. Tension attachments described in item 13] The tension attachment screws are placed in a frame frame with freely grounded. 18. The tension attachment as described in claim 13 of the patent application, wherein the support station is placed in a frame frame freely. Φ 19. A metal tape mounting device comprising: a tension-like addition of an elongated metal in a rectangular frame frame and a spot welding tension fixed by spot welding a metal strip at a predetermined position of the frame frame; The additional device includes a tension attachment device disposed in the vicinity of the frame frame. The tension attachment jig has a support table disposed in the vicinity of the frame frame and is linearly and movably held by the support table and holds the metal strip so that the side direction is parallel The belt holding member in the moving direction and the tension-adding screw attached to the belt member to impart tension to the metal. #20. A vapor deposition method for a material of an organic EL device, which is a method for vapor deposition of an organic layer or a cathode electrode of an organic EL device using a gold film unit, characterized in that a metal cover film unit is used. a frame frame having a rectangular shape; ^ a metal cover film attached to the surface of the frame frame in a state in which the longitudinal direction of the additional frame frame and the lateral direction of the frame frame are at least one of the tensions; The tension in the longitudinal direction is attached to the frame surface in parallel with the direction of the tension applied to the metal cover film. Set the fixture, set, and install the device; have, and have a long handle, a cover, i el, and the back, -47-
TW094143460A 2004-12-09 2005-12-08 Metal mask unit, method of producing the same, method of installing metal tape, and tension application device TW200629970A (en)

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JP2004356257A JP5151004B2 (en) 2004-12-09 2004-12-09 Metal mask unit and manufacturing method thereof
JP2005133155A JP4784145B2 (en) 2005-04-28 2005-04-28 Attaching method of metal tape, manufacturing method of mask unit and jig for applying tension
JP2005290577A JP2007257839A (en) 2005-10-03 2005-10-03 Tension applying device and metal tape installation device

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