TW201436064A - 暫時性鍵結 - Google Patents
暫時性鍵結 Download PDFInfo
- Publication number
- TW201436064A TW201436064A TW102138409A TW102138409A TW201436064A TW 201436064 A TW201436064 A TW 201436064A TW 102138409 A TW102138409 A TW 102138409A TW 102138409 A TW102138409 A TW 102138409A TW 201436064 A TW201436064 A TW 201436064A
- Authority
- TW
- Taiwan
- Prior art keywords
- temporary bonding
- semiconductor wafer
- group
- carrier substrate
- bonding layer
- Prior art date
Links
- 239000000203 mixture Substances 0.000 claims abstract description 117
- 239000000758 substrate Substances 0.000 claims abstract description 91
- 239000000654 additive Substances 0.000 claims abstract description 86
- 239000000463 material Substances 0.000 claims abstract description 83
- 239000000853 adhesive Substances 0.000 claims abstract description 80
- 230000001070 adhesive effect Effects 0.000 claims abstract description 80
- 230000000996 additive effect Effects 0.000 claims abstract description 78
- 239000004065 semiconductor Substances 0.000 claims description 123
- 238000000034 method Methods 0.000 claims description 71
- -1 aryl cyclobutene Chemical compound 0.000 claims description 60
- 229920000642 polymer Polymers 0.000 claims description 30
- 125000003118 aryl group Chemical group 0.000 claims description 28
- 229920002554 vinyl polymer Polymers 0.000 claims description 27
- 239000002318 adhesion promoter Substances 0.000 claims description 24
- 229920001577 copolymer Polymers 0.000 claims description 14
- 239000003960 organic solvent Substances 0.000 claims description 12
- 229920000570 polyether Polymers 0.000 claims description 10
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 8
- 229920000089 Cyclic olefin copolymer Polymers 0.000 claims description 7
- 229920000233 poly(alkylene oxides) Polymers 0.000 claims description 5
- 125000000732 arylene group Chemical group 0.000 claims description 4
- 125000004104 aryloxy group Chemical group 0.000 claims description 4
- 229920001223 polyethylene glycol Polymers 0.000 claims description 4
- 229920000909 polytetrahydrofuran Polymers 0.000 claims description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 3
- 239000002202 Polyethylene glycol Substances 0.000 claims description 3
- 125000003545 alkoxy group Chemical group 0.000 claims description 3
- 150000001925 cycloalkenes Chemical class 0.000 claims description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims description 3
- 229920001519 homopolymer Polymers 0.000 claims description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims description 2
- 229920001451 polypropylene glycol Polymers 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 230000001568 sexual effect Effects 0.000 claims description 2
- 230000001737 promoting effect Effects 0.000 claims 1
- DNIAPMSPPWPWGF-UHFFFAOYSA-N propylene glycol Substances CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000012545 processing Methods 0.000 abstract description 5
- 235000012431 wafers Nutrition 0.000 description 178
- 239000000178 monomer Substances 0.000 description 27
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 24
- 239000002904 solvent Substances 0.000 description 21
- 229910000679 solder Inorganic materials 0.000 description 17
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- FYGHSUNMUKGBRK-UHFFFAOYSA-N 1,2,3-trimethylbenzene Chemical compound CC1=CC=CC(C)=C1C FYGHSUNMUKGBRK-UHFFFAOYSA-N 0.000 description 14
- 238000000926 separation method Methods 0.000 description 13
- 238000004528 spin coating Methods 0.000 description 13
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 12
- 125000000217 alkyl group Chemical group 0.000 description 12
- 125000003710 aryl alkyl group Chemical group 0.000 description 12
- ZPOLOEWJWXZUSP-WAYWQWQTSA-N bis(prop-2-enyl) (z)-but-2-enedioate Chemical compound C=CCOC(=O)\C=C/C(=O)OCC=C ZPOLOEWJWXZUSP-WAYWQWQTSA-N 0.000 description 11
- 125000006273 (C1-C3) alkyl group Chemical group 0.000 description 10
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 10
- 238000006116 polymerization reaction Methods 0.000 description 10
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 125000002947 alkylene group Chemical group 0.000 description 9
- WKBPZYKAUNRMKP-UHFFFAOYSA-N 1-[2-(2,4-dichlorophenyl)pentyl]1,2,4-triazole Chemical compound C=1C=C(Cl)C=C(Cl)C=1C(CCC)CN1C=NC=N1 WKBPZYKAUNRMKP-UHFFFAOYSA-N 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000004615 ingredient Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 125000004191 (C1-C6) alkoxy group Chemical group 0.000 description 7
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 7
- 239000005977 Ethylene Substances 0.000 description 7
- 150000001336 alkenes Chemical class 0.000 description 7
- 238000003475 lamination Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 6
- 125000000753 cycloalkyl group Chemical group 0.000 description 6
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 6
- XMGQYMWWDOXHJM-UHFFFAOYSA-N limonene Chemical compound CC(=C)C1CCC(C)=CC1 XMGQYMWWDOXHJM-UHFFFAOYSA-N 0.000 description 6
- UAEPNZWRGJTJPN-UHFFFAOYSA-N methylcyclohexane Chemical compound CC1CCCCC1 UAEPNZWRGJTJPN-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 125000006274 (C1-C3)alkoxy group Chemical group 0.000 description 5
- 229920002359 Tetronic® Polymers 0.000 description 5
- 229920001400 block copolymer Polymers 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 239000008199 coating composition Substances 0.000 description 5
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical group C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- DIOQZVSQGTUSAI-UHFFFAOYSA-N n-butylhexane Natural products CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 5
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 5
- 238000005191 phase separation Methods 0.000 description 5
- FBCQUCJYYPMKRO-UHFFFAOYSA-N prop-2-enyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC=C FBCQUCJYYPMKRO-UHFFFAOYSA-N 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 229910052715 tantalum Inorganic materials 0.000 description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 5
- 125000004454 (C1-C6) alkoxycarbonyl group Chemical group 0.000 description 4
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 4
- KCMITHMNVLRGJU-CMDGGOBGSA-N Allyl cinnamate Chemical compound C=CCOC(=O)\C=C\C1=CC=CC=C1 KCMITHMNVLRGJU-CMDGGOBGSA-N 0.000 description 4
- 239000004713 Cyclic olefin copolymer Substances 0.000 description 4
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 4
- UEXCJVNBTNXOEH-UHFFFAOYSA-N Ethynylbenzene Chemical group C#CC1=CC=CC=C1 UEXCJVNBTNXOEH-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 4
- 239000003963 antioxidant agent Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000012776 electronic material Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- 125000001997 phenyl group Chemical class [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 238000001878 scanning electron micrograph Methods 0.000 description 4
- 229920001169 thermoplastic Polymers 0.000 description 4
- 239000004416 thermosoftening plastic Substances 0.000 description 4
- 229910052718 tin Inorganic materials 0.000 description 4
- 239000011135 tin Substances 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- 125000000008 (C1-C10) alkyl group Chemical group 0.000 description 3
- QPRQEDXDYOZYLA-UHFFFAOYSA-N 2-methylbutan-1-ol Chemical compound CCC(C)CO QPRQEDXDYOZYLA-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 230000003078 antioxidant effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 125000004122 cyclic group Chemical group 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 3
- 235000013824 polyphenols Nutrition 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 239000011877 solvent mixture Substances 0.000 description 3
- 239000002562 thickening agent Substances 0.000 description 3
- CFTSORNHIUMCGF-UHFFFAOYSA-N (1,1,1,3,3,3-hexafluoro-2-phenylpropan-2-yl)benzene Chemical compound C=1C=CC=CC=1C(C(F)(F)F)(C(F)(F)F)C1=CC=CC=C1 CFTSORNHIUMCGF-UHFFFAOYSA-N 0.000 description 2
- 125000004890 (C1-C6) alkylamino group Chemical group 0.000 description 2
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- WAEOXIOXMKNFLQ-UHFFFAOYSA-N 1-methyl-4-prop-2-enylbenzene Chemical group CC1=CC=C(CC=C)C=C1 WAEOXIOXMKNFLQ-UHFFFAOYSA-N 0.000 description 2
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 2
- XMNIXWIUMCBBBL-UHFFFAOYSA-N 2-(2-phenylpropan-2-ylperoxy)propan-2-ylbenzene Chemical compound C=1C=CC=CC=1C(C)(C)OOC(C)(C)C1=CC=CC=C1 XMNIXWIUMCBBBL-UHFFFAOYSA-N 0.000 description 2
- CFAKWWQIUFSQFU-UHFFFAOYSA-N 2-hydroxy-3-methylcyclopent-2-en-1-one Chemical compound CC1=C(O)C(=O)CC1 CFAKWWQIUFSQFU-UHFFFAOYSA-N 0.000 description 2
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 2
- MILSYCKGLDDVLM-UHFFFAOYSA-N 2-phenylpropan-2-ylbenzene Chemical compound C=1C=CC=CC=1C(C)(C)C1=CC=CC=C1 MILSYCKGLDDVLM-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000005062 Polybutadiene Substances 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- QCEUXSAXTBNJGO-UHFFFAOYSA-N [Ag].[Sn] Chemical compound [Ag].[Sn] QCEUXSAXTBNJGO-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 125000002877 alkyl aryl group Chemical group 0.000 description 2
- 125000003277 amino group Chemical group 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 2
- 239000004305 biphenyl Substances 0.000 description 2
- ZPOLOEWJWXZUSP-AATRIKPKSA-N bis(prop-2-enyl) (e)-but-2-enedioate Chemical compound C=CCOC(=O)\C=C\C(=O)OCC=C ZPOLOEWJWXZUSP-AATRIKPKSA-N 0.000 description 2
- MPMBRWOOISTHJV-UHFFFAOYSA-N but-1-enylbenzene Chemical compound CCC=CC1=CC=CC=C1 MPMBRWOOISTHJV-UHFFFAOYSA-N 0.000 description 2
- 150000001721 carbon Chemical group 0.000 description 2
- 150000007942 carboxylates Chemical class 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 238000007766 curtain coating Methods 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 125000006612 decyloxy group Chemical group 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 150000001993 dienes Chemical class 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- LTYMSROWYAPPGB-UHFFFAOYSA-N diphenyl sulfide Chemical compound C=1C=CC=CC=1SC1=CC=CC=C1 LTYMSROWYAPPGB-UHFFFAOYSA-N 0.000 description 2
- 125000004185 ester group Chemical group 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 125000005843 halogen group Chemical group 0.000 description 2
- 230000005660 hydrophilic surface Effects 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 239000011133 lead Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 2
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 description 2
- SFBTTWXNCQVIEC-UHFFFAOYSA-N o-Vinylanisole Chemical compound COC1=CC=CC=C1C=C SFBTTWXNCQVIEC-UHFFFAOYSA-N 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000006384 oligomerization reaction Methods 0.000 description 2
- AUONHKJOIZSQGR-UHFFFAOYSA-N oxophosphane Chemical compound P=O AUONHKJOIZSQGR-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 125000004344 phenylpropyl group Chemical group 0.000 description 2
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 2
- 229920002857 polybutadiene Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- QTECDUFMBMSHKR-UHFFFAOYSA-N prop-2-enyl prop-2-enoate Chemical compound C=CCOC(=O)C=C QTECDUFMBMSHKR-UHFFFAOYSA-N 0.000 description 2
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 2
- 239000013557 residual solvent Substances 0.000 description 2
- 238000007151 ring opening polymerisation reaction Methods 0.000 description 2
- 238000007142 ring opening reaction Methods 0.000 description 2
- 238000007761 roller coating Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 229910003468 tantalcarbide Inorganic materials 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 150000003505 terpenes Chemical class 0.000 description 2
- 235000007586 terpenes Nutrition 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 150000005671 trienes Chemical class 0.000 description 2
- ITMCEJHCFYSIIV-UHFFFAOYSA-M triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-M 0.000 description 2
- WJKHJLXJJJATHN-UHFFFAOYSA-N triflic anhydride Chemical compound FC(F)(F)S(=O)(=O)OS(=O)(=O)C(F)(F)F WJKHJLXJJJATHN-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 125000003837 (C1-C20) alkyl group Chemical group 0.000 description 1
- IPOBVSHPVYWJQC-UHFFFAOYSA-N 1,1,2,2,2-pentakis-phenylethylbenzene Chemical compound C1=CC=CC=C1C(C(C=1C=CC=CC=1)(C=1C=CC=CC=1)C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 IPOBVSHPVYWJQC-UHFFFAOYSA-N 0.000 description 1
- VXNZUUAINFGPBY-UHFFFAOYSA-N 1-Butene Chemical compound CCC=C VXNZUUAINFGPBY-UHFFFAOYSA-N 0.000 description 1
- RNDXWDKHOUVCDB-UHFFFAOYSA-N 1-ethenyl-2,3-dimethoxybenzene Chemical compound COC1=CC=CC(C=C)=C1OC RNDXWDKHOUVCDB-UHFFFAOYSA-N 0.000 description 1
- SDRZFSPCVYEJTP-UHFFFAOYSA-N 1-ethenylcyclohexene Chemical compound C=CC1=CCCCC1 SDRZFSPCVYEJTP-UHFFFAOYSA-N 0.000 description 1
- OQUIHNRSFOIOFU-UHFFFAOYSA-N 1-methoxy-2-(2-methoxypropoxy)propane Chemical class COCC(C)OCC(C)OC OQUIHNRSFOIOFU-UHFFFAOYSA-N 0.000 description 1
- IHWDSEPNZDYMNF-UHFFFAOYSA-N 1H-indol-2-amine Chemical class C1=CC=C2NC(N)=CC2=C1 IHWDSEPNZDYMNF-UHFFFAOYSA-N 0.000 description 1
- 150000003923 2,5-pyrrolediones Chemical class 0.000 description 1
- HIXDQWDOVZUNNA-UHFFFAOYSA-N 2-(3,4-dimethoxyphenyl)-5-hydroxy-7-methoxychromen-4-one Chemical compound C=1C(OC)=CC(O)=C(C(C=2)=O)C=1OC=2C1=CC=C(OC)C(OC)=C1 HIXDQWDOVZUNNA-UHFFFAOYSA-N 0.000 description 1
- MLMGJTAJUDSUKA-UHFFFAOYSA-N 2-ethenyl-1h-imidazole Chemical class C=CC1=NC=CN1 MLMGJTAJUDSUKA-UHFFFAOYSA-N 0.000 description 1
- MZNSQRLUUXWLSB-UHFFFAOYSA-N 2-ethenyl-1h-pyrrole Chemical class C=CC1=CC=CN1 MZNSQRLUUXWLSB-UHFFFAOYSA-N 0.000 description 1
- 239000001837 2-hydroxy-3-methylcyclopent-2-en-1-one Substances 0.000 description 1
- MHNNAWXXUZQSNM-UHFFFAOYSA-N 2-methylbut-1-ene Chemical group CCC(C)=C MHNNAWXXUZQSNM-UHFFFAOYSA-N 0.000 description 1
- KGIGUEBEKRSTEW-UHFFFAOYSA-N 2-vinylpyridine Chemical class C=CC1=CC=CC=N1 KGIGUEBEKRSTEW-UHFFFAOYSA-N 0.000 description 1
- BGIPUCONVJSUEP-UHFFFAOYSA-N 3-[2-(2-phenylethenyl)phenyl]prop-2-enoic acid Chemical compound OC(=O)C=CC1=CC=CC=C1C=CC1=CC=CC=C1 BGIPUCONVJSUEP-UHFFFAOYSA-N 0.000 description 1
- SXPGQGNWEWPWQZ-UHFFFAOYSA-N 4-(triethoxymethyl)dodecan-1-amine Chemical compound NCCCC(C(OCC)(OCC)OCC)CCCCCCCC SXPGQGNWEWPWQZ-UHFFFAOYSA-N 0.000 description 1
- WVYWICLMDOOCFB-UHFFFAOYSA-N 4-methyl-2-pentanol Chemical compound CC(C)CC(C)O WVYWICLMDOOCFB-UHFFFAOYSA-N 0.000 description 1
- VGVHNLRUAMRIEW-UHFFFAOYSA-N 4-methylcyclohexan-1-one Chemical compound CC1CCC(=O)CC1 VGVHNLRUAMRIEW-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- LDLIHNPXOOFTTQ-UHFFFAOYSA-N C1(=CC=CC=C1)CCCCC(CCCC)(C1=CC=CC=C1)C1=CC=CC=C1 Chemical compound C1(=CC=CC=C1)CCCCC(CCCC)(C1=CC=CC=C1)C1=CC=CC=C1 LDLIHNPXOOFTTQ-UHFFFAOYSA-N 0.000 description 1
- YDEAAJZYBOCXIO-UHFFFAOYSA-N C1(=CC=CC=C1)NCCCC(C(OCC)(OCC)OCC)CCCCCCCC Chemical compound C1(=CC=CC=C1)NCCCC(C(OCC)(OCC)OCC)CCCCCCCC YDEAAJZYBOCXIO-UHFFFAOYSA-N 0.000 description 1
- 125000000882 C2-C6 alkenyl group Chemical group 0.000 description 1
- YGIOTTPLRCUUSI-UHFFFAOYSA-N COC(CCCCCCCCCC(C)C1=C(C=CC=C1)C(C)CCCCCCCCCC(OC)(OC)OC)(OC)OC Chemical compound COC(CCCCCCCCCC(C)C1=C(C=CC=C1)C(C)CCCCCCCCCC(OC)(OC)OC)(OC)OC YGIOTTPLRCUUSI-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- MHZGKXUYDGKKIU-UHFFFAOYSA-N Decylamine Chemical compound CCCCCCCCCCN MHZGKXUYDGKKIU-UHFFFAOYSA-N 0.000 description 1
- 238000005698 Diels-Alder reaction Methods 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 101001092910 Homo sapiens Serum amyloid P-component Proteins 0.000 description 1
- 229920006309 Invista Polymers 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- XYVQFUJDGOBPQI-UHFFFAOYSA-N Methyl-2-hydoxyisobutyric acid Chemical compound COC(=O)C(C)(C)O XYVQFUJDGOBPQI-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- XJDCHDFUMGSEHD-UHFFFAOYSA-N NCCCC(C(OC)(OC)OC)CCCCCCCC Chemical compound NCCCC(C(OC)(OC)OC)CCCCCCCC XJDCHDFUMGSEHD-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 108091034117 Oligonucleotide Proteins 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- 102100036202 Serum amyloid P-component Human genes 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- CTHJQRHPNQEPAB-BQYQJAHWSA-N [(e)-2-methoxyethenyl]benzene Chemical compound CO\C=C\C1=CC=CC=C1 CTHJQRHPNQEPAB-BQYQJAHWSA-N 0.000 description 1
- PQIJHIWFHSVPMH-UHFFFAOYSA-N [Cu].[Ag].[Sn] Chemical compound [Cu].[Ag].[Sn] PQIJHIWFHSVPMH-UHFFFAOYSA-N 0.000 description 1
- 230000021736 acetylation Effects 0.000 description 1
- 238000006640 acetylation reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 125000003158 alcohol group Chemical group 0.000 description 1
- 125000003172 aldehyde group Chemical group 0.000 description 1
- 150000001335 aliphatic alkanes Chemical group 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 1
- 125000004414 alkyl thio group Chemical group 0.000 description 1
- 150000001356 alkyl thiols Chemical class 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 101150059062 apln gene Proteins 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 125000006615 aromatic heterocyclic group Chemical group 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 150000001540 azides Chemical class 0.000 description 1
- SYWDWCWQXBUCOP-UHFFFAOYSA-N benzene;ethene Chemical group C=C.C1=CC=CC=C1 SYWDWCWQXBUCOP-UHFFFAOYSA-N 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- 230000031709 bromination Effects 0.000 description 1
- 238000005893 bromination reaction Methods 0.000 description 1
- IAQRGUVFOMOMEM-UHFFFAOYSA-N butene Natural products CC=CC IAQRGUVFOMOMEM-UHFFFAOYSA-N 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 125000006165 cyclic alkyl group Chemical group 0.000 description 1
- 125000001047 cyclobutenyl group Chemical group C1(=CCC1)* 0.000 description 1
- DIOQZVSQGTUSAI-NJFSPNSNSA-N decane Chemical group CCCCCCCCC[14CH3] DIOQZVSQGTUSAI-NJFSPNSNSA-N 0.000 description 1
- 239000000412 dendrimer Substances 0.000 description 1
- 229920000736 dendritic polymer Polymers 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 125000004386 diacrylate group Chemical group 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 125000001033 ether group Chemical group 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- WHRIKZCFRVTHJH-UHFFFAOYSA-N ethylhydrazine Chemical group CCNN WHRIKZCFRVTHJH-UHFFFAOYSA-N 0.000 description 1
- 125000006125 ethylsulfonyl group Chemical group 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 150000002240 furans Chemical class 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 125000001475 halogen functional group Chemical group 0.000 description 1
- 230000026030 halogenation Effects 0.000 description 1
- 238000005658 halogenation reaction Methods 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 125000001072 heteroaryl group Chemical group 0.000 description 1
- PYGSKMBEVAICCR-UHFFFAOYSA-N hexa-1,5-diene Chemical group C=CCCC=C PYGSKMBEVAICCR-UHFFFAOYSA-N 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- 150000002431 hydrogen Chemical group 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000005984 hydrogenation reaction Methods 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 150000002596 lactones Chemical class 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 235000001510 limonene Nutrition 0.000 description 1
- 229940087305 limonene Drugs 0.000 description 1
- 125000005647 linker group Chemical group 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Natural products C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- PZUGJLOCXUNFLM-UHFFFAOYSA-N n-ethenylaniline Chemical compound C=CNC1=CC=CC=C1 PZUGJLOCXUNFLM-UHFFFAOYSA-N 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 150000002826 nitrites Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- HNPFNYDBAOYNSY-UHFFFAOYSA-N oxirane;oxolane Chemical compound C1CO1.C1CO1.C1CCOC1 HNPFNYDBAOYNSY-UHFFFAOYSA-N 0.000 description 1
- 125000005188 oxoalkyl group Chemical group 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 235000021317 phosphate Nutrition 0.000 description 1
- XRBCRPZXSCBRTK-UHFFFAOYSA-N phosphonous acid Chemical compound OPO XRBCRPZXSCBRTK-UHFFFAOYSA-N 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920001983 poloxamer Polymers 0.000 description 1
- 229920001281 polyalkylene Polymers 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229920000412 polyarylene Polymers 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 150000008442 polyphenolic compounds Chemical class 0.000 description 1
- 229920006295 polythiol Polymers 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
- ODOZNBUSHKFCSH-FNORWQNLSA-N prop-2-enyl (e)-2-methylbut-2-enoate Chemical compound C\C=C(/C)C(=O)OCC=C ODOZNBUSHKFCSH-FNORWQNLSA-N 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 125000000547 substituted alkyl group Chemical group 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 150000003871 sulfonates Chemical class 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- HQZPMWBCDLCGCL-UHFFFAOYSA-N tantalum telluride Chemical compound [Te]=[Ta]=[Te] HQZPMWBCDLCGCL-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XBFJAVXCNXDMBH-UHFFFAOYSA-N tetracyclo[6.2.1.1(3,6).0(2,7)]dodec-4-ene Chemical compound C1C(C23)C=CC1C3C1CC2CC1 XBFJAVXCNXDMBH-UHFFFAOYSA-N 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 150000003573 thiols Chemical class 0.000 description 1
- 229910000969 tin-silver-copper Inorganic materials 0.000 description 1
- 239000013638 trimer Substances 0.000 description 1
- 238000003828 vacuum filtration Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/08—Macromolecular additives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J143/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and containing boron, silicon, phosphorus, selenium, tellurium, or a metal; Adhesives based on derivatives of such polymers
- C09J143/04—Homopolymers or copolymers of monomers containing silicon
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/50—Additional features of adhesives in the form of films or foils characterized by process specific features
- C09J2301/502—Additional features of adhesives in the form of films or foils characterized by process specific features process for debonding adherents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2423/00—Presence of polyolefin
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2471/00—Presence of polyether
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68318—Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
含有黏著劑材料與釋放添加劑之組成物適用於暫時性鍵結兩表面,如晶圓主動面與基板。這些組成物可用於製造電子裝置,其中元件,如主動晶圓,係暫時性鍵結至基板,之後進一步加工該主動晶圓。
Description
本發明係關於半導體製造領域,且尤其是半導體晶圓與基板之暫時性鍵結。
在許多製造領域中,欲作業(加工)零件需要暫時性附著至另一工件或支座。舉例而言,製造半導體裝置時,在各製造步驟中常需要支撐半導體晶圓。對於更薄之晶片封裝的需求,已迫使半導體製造商生產薄型半導體晶圓。此薄化步驟,一般經由暫時性黏著半導體晶圓前側(含有主動元件)與載體(支座),以使晶圓後側可進行研磨。同時,經薄化之晶圓可進行進一步生產操作,如金屬化、清洗、蝕刻,及類似操作。在此種加工之後,該經薄化之晶圓必須自載體分離(去鍵結)。若暫時性黏著劑與晶圓的鍵結太強,則該晶圓可能會損壞,如破損,或自載體分離時,鍵結特徵變形。或者,暫時性黏著劑可能缺乏足夠之塊體強度,並於分離後仍殘留於晶圓主動表面(前側)與基板上,因此需要額外的清洗或蝕刻步驟。
習知用於製造半導體裝置之暫時性鍵結黏著劑為熱塑性黏著劑或交聯性黏著劑。熱塑性黏著劑具有殘留之黏著劑易於由溶劑清洗方式移除之優點。熱塑性黏著劑之主要問題為加熱時會變軟,因此侷限其於某些應用之用途。交聯性黏著劑不易以溶劑清洗方式移除,且通常是在去鍵結操作期間或之後以剝離方式移除。此剝離步驟需要該交聯性黏著劑於室溫下具備某些程度之柔軟度。遺憾的是,該室溫柔軟度有些問題,因其於研磨操作之後達到均一晶圓厚度仍是一大挑戰。
為了解決這些問題,建議使用多層法,其中首先以釋放層,如聚矽氧材料,施加至晶圓主動側,接著使用黏著劑鍵結基板與釋放層-晶圓。在此系統中,可使用更廣範圍之黏著劑,因為去鍵結晶圓之能力由該釋放層提供。舉例而言,美國專利申請公開號2009/0176349揭示了施加聚矽氧油至晶圓表面,接著沈積漸變電漿聚合物層,後接基板。利用低壓電漿聚合製程沈積該電漿聚合物層,其中藉由改變反應參數(舉例而言,反應氣體組成),以取得該聚合物層之漸變組成物。此方法具有某些缺點:其需要在晶圓上施加個別的釋放層;其需要低壓電漿聚合反應設備;以及沈積於晶圓上的電漿聚合物層之組成物需經過篩選,使得該電漿聚合物層對於基板具有足夠黏著性,而這可能會侷限可供使用之電漿可聚合單體。
因此,工業上仍需要容易施加、容易移除、不使晶圓主動面變形以及可於比目前之暫時性黏著劑更高溫操作下使用的暫時性黏著劑。本發明解決了這些該點之一或多者。
本發明係提供一種可釋放附著半導體晶圓至載體基板之方法,其包含:(a)提供具有前側與後側之半導體晶圓;(b)提供具有附著表面之載體基板;(c)將包含可固化黏著劑材料與釋放添加劑之暫時性鍵結組成物置於該半時導體晶圓前側與該載體基板附著表面之間;以及(d)固化該黏著劑材料,以提供置於該半導體晶圓前側與載體基板附著表面間之暫時性鍵結層;其中,該鄰近於載體基板附著表結之暫時性鍵結層包含相對較低量之釋放添加劑,以及鄰近於該半導體晶圓前側之暫時性鍵結層包含相對較高量之該釋放添加劑。
本發明亦提供一種構造,其包含:具有前側與後側之半導體晶圓;具有附著表面之載體基板;以及置於該半導體晶圓前側與該載體基板附著表面間之暫時性鍵結層;其中,該暫時性鍵結層包含已固化黏著劑材料與釋放添加劑;其中,鄰近於該載體基板附著表面之暫時性鍵結層包含相對較低量之該釋放添加劑,以及鄰近於該半導體晶圓前側之暫時性鍵結層包含相對較高量之該釋放添加劑。
此外,本發明提供包含可固化黏著劑材料與釋放添加劑之組成物。較佳地,該黏著劑材料為選自於聚伸芳基寡聚物、環烯烴寡聚物、芳基環丁烯寡聚物、乙烯基芳族寡聚物及其混合物。該釋放添加劑在用於固化該黏著劑材料之條件下為非可固化。
令人驚訝的是,本發明解決了一或多個半導體產業習知暫時性鍵結方法之缺點。本發明可於某些加工步驟期間,有效地將半導體晶圓與基板(載體)進行暫時性鍵結。隨後,晶圓可自基板脫離,相較於習知之暫時性鍵結黏著劑,其明顯減少且較佳無特徵變形,以及其明顯減少且較佳無殘餘黏著劑殘留於該晶圓之主動面。本發明特別適用於半導體晶圓之加工,或任何其他需要暫時性鍵結之應用。
在上圖中,相似數字標號意指相似元件。應理解的是,當一元件被指稱為“鄰近於”另一元件時,其可直接鄰近於其他元件或其間存在中間元件。相反的是,當一元件被指稱為“直接鄰近於”另一元件時,則不存在中間元件。如本文所使用,術語“及/或”包括一或多種相關列出項目之任何與所有組合。
應理解的是,雖然本文中術語第一、第二、第三等係用於描述各種元件、組分、區域、層及/或部分,但是該些元件、組分、區域、層及/或部分不可因該些術語而有侷限。該些術語僅用於區別一元件、組分、區域、層或部分與另一元件、組分、區域、層或部分。因此,下述討論之第一元件、組分、區域、層或部分,可稱為第二元件、組分、區域、層或部分,而不悖離本發明之宗旨。
使用於整個說明書中,以下縮寫應具有下列意義,除非本文以其他方式清楚指明:℃=攝氏度數;g=公克;mg=毫克;L=公升;ppm=百萬分之一;m=微米(micron)=微米(micrometer);nm=奈米;mm=毫米;mL=毫升;kPa=千帕;以及GPa=千兆帕。除非另有說明,所有的量皆為重量百分比,且所有的比例皆為莫耳比。所有的數值範圍皆涵蓋並以任何順序組合,除了明顯該等數字範圍侷限於加總至100%。除非另有說明,“Wt%”係以參考組成物之總重量為基準計,意指重量百分比。
使用於整個說明書中,“特徵”意指基板上,特別是半導體晶圓上之幾何構造。術語“烷基”包括直鏈、支鏈與環狀烷基。同樣地,“烯基”意指直鏈、支鏈與環狀烯基。“芳基”意指芳香族碳環類與芳香族雜環類。“(甲基)丙烯酸系”同時指“丙烯酸系”與“甲基丙烯酸系”。術語“固化”係指任何增加材料或組成物分子量之製程,如聚合反應或縮合反應。“可固化”意指能於某些條件下被固化(被聚合)之任何材料。術語“寡聚物”意指能進一步固化之二聚體、三聚體、四聚體與其他相對低分子量之材料。冠詞“一(a)或(an)”與“該”意指單數與複數。
已發現包含可固化黏著劑材料與釋放添加劑之黏著劑組成物可用於形成暫時性(ephemeral或temporary)鍵結層。在使用上,本發明之黏著劑組成物係首先置於基板(載體)表面與組分表面之間,隨後組成物經固化,之後可於該組分上進行各種操作,之後自該基板分離該組分。
特別的是,本發明提供可釋放附著半導體晶圓至載體基板之方法,其包含:(a)提供具有前側與後側之半導體晶圓;(b)提供具有附著表面之載體基板;(c)將包含可固化黏著劑材料與釋放添加劑之暫時性鍵結組成物置於該半導體晶圓前側與該載體基板附著表面之間;以及(d)固化該黏著劑材料,以提供置於該半導體晶圓前側與該載體基板附著表面間之暫時性鍵結層;其中,該鄰近於載體基板附著表面之暫時性鍵結層包含相對較低量之釋放添加劑,以及鄰近於該半導體晶圓前側之暫時性鍵結層包含相對較高量之該釋放添加劑。
有多種半導體晶圓可用於本發明。如本文所使用,術語“半導體晶圓”意指涵蓋“電子裝置基板”、“半導體基板”、“半導體裝置”,以及各級互連之各種封裝,包括單晶片晶圓、多晶片晶圓、各級封裝、發光二極體(LEDs)基板,或其他需要焊料連接之組裝件。特別適用之基板為玻璃、藍寶石、矽酸鹽材料、氮化矽材料、碳化矽材料,以及圖樣化晶圓,如圖樣化矽晶圓與圖樣化砷化鎵晶圓。此類晶圓可為任何適用之尺寸。雖然依據本發明可能適用具有較小與較大直徑之晶圓,較佳之晶圓直徑為200 mm至300 mm。如本文所使用,術語“半導電性基板”包括具有一或多種半導體層或結構,其包含半導體裝置之主動或可操作部分,之任何基板。術語“半導體基板”係定義為任何構造,其包含半導電性材料,包括但不限於,塊狀半導電性材料如半導電性晶圓,無論是單獨或包含其他材料於其上之組裝件,以及半導體材料層,無論是單獨或包含其他材料之組裝件。半導體裝置意指半導體基板,其上有至少一微電子裝置已被或正被製造。
半導體晶圓之前側(或裝置側)典型含有主動裝置。“主動”裝置為任何形式之電路組分,其具備電控制電子流(如電晶體)之能力。典型而言,半導體晶圓前側亦包括各種特徵,如金屬焊墊、焊點凸塊(或焊點球)、金屬柱,及其類似物。金屬焊墊典型包含一或多種選自於銅、錫、金、銀之金屬。例示性之焊點凸塊典型包含錫、銅、銀、金、鉛與鉍之一或多者,較佳為錫、銅、銀、金與鉛,且更佳為錫、銅、銀、金、錫-鉛、錫-銀,以及錫-銀-銅。金屬柱典型包含銅,常被覆蓋一或多種其他金屬,如銀或錫-銀。較佳地,相較於載體基板之附著表面,半導體晶圓之主動表面為相對親水性。藉由以液體或電漿處理晶圓表面,以移除表面雜質,如外來的碳,能使主動表面之親水性增加。
任何適用之載體可作為載體基板。例示性載體基板包括但不限於,晶圓、玻璃如硼矽酸鹽、石英、二氧化矽,以及熱穩定聚合物。作為載體使用之晶圓可由矽、碳化矽、鍺化矽、氮化矽、砷化鎵、藍寶石,及其類似物組成。熱穩定聚合物包括但不侷限於,於黏著劑材料之固化溫度下維持穩定之任何聚合物,如聚亞醯胺(舉例而言,KAPTONTM聚亞醯胺,購自DuPont,Wilmington,Delaware)。較佳地,相較於半導體晶圓之主動表面,該載體基板之附著表面為相對疏水性。若該載體基板之附著表面疏水性不足,則可由本發明所屬技術領域已知之許多方法提供所欲之疏水性,如以適用之黏著促進劑與附著表面接觸,或以蒸汽處理附著表面。可使用任何適用之方法將黏著促進劑與附著表面接觸,如旋轉塗佈法、浸塗佈法、噴塗佈法、簾塗佈法、滾軸塗佈法、蒸汽沈積法,及其類似方法,且較佳為旋轉塗佈法。可使用各種蒸汽處理方法,如電漿處理法,以增加該附著表面之疏水性。較佳地,以黏著促進劑處理該附著表面,以提供所欲之疏水性。可使用任何適用之黏著促進劑,且此類黏著促進劑之選用為本發明所屬技術領域具有通常知識者之能力範圍內可及。較佳之黏著促進劑為含矽烷材料,且更佳為含三烷氧基矽烷材料。例示性黏著促進劑包括但不侷限於:雙(三烷氧基矽基烷基)苯類,如雙(三甲氧基矽基乙基)苯;胺基烷基三烷氧基矽烷類,如胺基丙基三甲氧基矽烷、胺基丙基三乙氧基矽烷,與苯基胺基丙基三乙氧基矽烷;及其他矽烷耦合試劑,以及前述之混合物。特別適用之黏著促進劑包括AP 3000、AP 8000與AP 9000S,其購自Dow Electronic Materials (Marlborough,Massachusetts)。
本發明之暫時性鍵結組成物包含可固化黏著劑材料與釋放添加劑,以及視需要之有機溶劑。典型地,當固化時,可固化黏著劑材料具有>1 GPa之模數。例示性可固化黏著劑材料包括但不侷限於,聚伸芳基寡聚物、環烯烴寡聚物、芳基環丁烯寡聚物、乙烯基芳族寡聚物及其混合物。可固化黏著劑材料可以任何適用之部分(moiety)取代,如含氟基團,以提供額外的疏水性,只要該些部分不會不利地影響固化黏著劑材料之機械性能。較佳地,可固化黏著劑材料係選自於聚伸芳基寡聚物、環烯烴寡聚物、芳基環丁烯寡聚物、乙烯基芳族寡聚物及其混合物,且更佳為選自芳基環丁烯寡聚物、乙烯基芳族寡聚物或其混合物之一或多者。當本發明使用不同可固化黏著劑材料之混合物時,該些材料係經選擇,使其可於固化步驟期間彼此固化。當使用不同可固化材料之混合物時,所使用之該些可固化材料之重量比為99:1至1:99,較佳為95:5至5:95,更佳為90:10至10:90,且又更佳為75:25至25:75。
本發明可使用廣範圍之聚伸芳基寡聚物。如本文所使用,術語“聚伸芳基類”包括聚伸芳基醚類。適用之聚伸芳基寡聚物可合成自如下式之乙炔基芳族化合物之前驅物:
其中,每一Ar為芳族基團或經惰性取代之芳族基團;每一R單獨地為氫、烷基、芳基或經惰性取代之烷基或芳基;L為共價鍵,或連接Ar與至少一其他Ar之基團;n與m為至少2之整數;以及q為至少1之整數。因此,該乙炔基芳族化合物典型具有四或更多個乙炔基團(舉例而言,四乙炔基芳族化合物)。
適用於暫時性鍵結組成物之聚伸芳基寡聚物可包括含有下列聚合單元之聚合物:
其中,Ar’為(C≡C)n-Ar或Ar-(C≡C)m部分之反應產物殘餘物,且R、L、n與m係如前面所定義。本發明使用之聚伸芳基共聚物包括具有下式單體作為聚合單元:
其中,Ar’與R係如前面所定義。
例示性聚伸芳基化合物包括但不限於,其中,Ar-L-Ar如下者:聯苯基;2,2-二苯基丙烷;9,9’-二苯基茀;2,2-二苯基六氟丙烷;二苯基硫醚;氧基二伸苯基;二苯基醚;雙(伸苯基)二苯基矽烷;雙(伸苯基)膦氧化物;雙(伸苯基)苯;雙(伸苯基)萘;雙(伸苯基)蒽;硫二伸苯基;1,1,1-三伸苯基乙烷;1,3,5-三伸苯基苯;1,3,5-(2-伸苯基-2-丙基)苯;1,1,1-三伸苯基甲烷;1,1,2,2-四伸苯基-1,2-二苯基乙烷;雙(1,1-二伸苯基乙基)苯;2,2’-二伸苯基-1,1,1,3,3,3-六氟丙烷;1,1-二伸苯基-1-苯基乙烷;萘;蒽;或雙(伸苯基)稠四苯;更佳為聯伸苯基;伸萘基;p,p’-(2,2-二伸苯基丙烷)(或-C6H4-C(CH3)2-C6H4-);p,p’-(2,2-二伸苯基-1,1,1,3,3,3-六氟丙烯)與(-C6H4-C(CF3)2-C6H4-)。適用之雙苯基衍生物包括2,2-二苯基丙烷;9,9’-二苯基茀;2,2-二苯基六氟丙烷;二苯基硫醚;二苯基醚;雙(伸苯基)二苯基矽烷;雙(伸苯基)膦氧化物;雙(伸苯基)苯;雙(伸苯基)萘;雙(伸苯基)蒽;或雙(伸苯基)稠四苯。
聚伸芳基前驅物單體可由本發明所屬技術領域之多種已知方法製備,例如藉由:(a)選擇性鹵化,較佳為溴化,較佳為溶劑中之多酚(較佳為雙酚),其中以鹵素鹵化每一酚環上酚系羥基團之二鄰位之一者;(b)將所得之聚(鄰-鹵酚)上之酚系羥基,較佳為於溶劑中,轉化為離去基,如磺酸酯(舉例而言,製備自三氟甲烷磺醯基鹵化物或三氟甲烷磺酸酐之三氟甲烷磺酸酯),其與末端乙炔基化合物反應且被取代;以及(c)在芳基乙炔化存在下,較佳為於鈀、催化劑與酸受體之存在下,將步驟(b)之反應產物與含乙炔基之化合物或乙炔基合成子(synthon)反應,以同時將含乙炔基之基團(舉例而言,乙炔、苯乙炔、經取代之苯乙炔或經取代之乙炔)取代鹵素與三氟甲基磺酸酯。該合成之進一步解釋係揭示於國際專利申請案第WO 97/10193號(Babb)。
式(I)之乙炔基芳族單體適用於製備式(II)或式(III)之聚合物。乙炔基芳族單體之聚合反應為本發明所屬技術領域具有通常知識者之能力範圍內可及。然而聚合反應之特定條件取決於各種因子,包括欲聚合之特定乙炔基芳族單體,與所得之聚合物之希望特性,聚合反應之一般條件係詳述於國際專利申請案第WO 97/10193號(Babb)。
用於本發明之特別適用之聚伸芳基類包括該些以SiLKTM Semiconductor Dielectric售出者(購自Dow Electronic Materials,Marlborough,Massachusetts)。其他特別適用之聚伸芳基類包括該些揭示於WO 00/31183、WO 98/11149、WO 97/10193、WO 91/09081、EP 755957、以及美國專利號第5,115,082;5,155,175;5,179,188;5,874,516;以及6,093,636號者。
適用之環烯烴材料為聚(環烯烴類),其可為熱塑性,較佳為具有重量平均分子量(Mw)為2000至200,000道爾頓,更佳為5000至100,000道爾頓,尤佳為2000至50,000道爾頓。較佳之聚(環烯烴類)具有至少100℃,更佳為至少140℃的軟化溫度(融熔黏度為3,000 PaS)。適用之聚(環烯烴類)亦較佳為具有玻璃轉化溫度(Tg)為至少60℃,更佳為60至200℃,且最佳為75至160℃。
較佳之聚(環烯烴類)係包含環烯烴類與非環烯烴類之重複單體,或以環烯烴類為主之開環聚合物。適用於本發明之環烯烴類係選自於降冰片烯為主之烯烴類、四環十二烯為主之烯烴類、二環戊二烯為主之烯烴類、狄耳士-阿德爾(Diels-Alder)聚合物,如衍生自呋喃類與馬來亞醯胺類者,及其衍生物。衍生物包括經烷基(較佳為C1-C20烷基,更佳為C1-C10烷基)、伸烷基(較佳為C1-C20亞烷基,更佳為C1-C10伸烷基)、芳烷基(較佳為C6-C30芳烷基,更佳為C6-C18芳烷基)、環烷基(較佳為C3-C30環烷基,更佳為C3-C18環烷基)、醚類、乙醯基、芳族、酯類、羥基、烷氧基、氰基、醯胺、亞醯胺,以及矽基取代之衍生物。用於本發明之特佳環烯烴類包括選自於
與前述之組合,其中R1與R2之每一者皆單獨地選自於H與烷基(較佳為C1-C20烷基,更佳為C1-C10烷基),且R3之每一者皆單獨地選自於H、經取代與未經取代之芳基(較佳為C6-C18芳基)、烷基(較佳為C1-C20烷基,更佳為C1-C10烷基)、環烷基(較佳為C3-C30環烷基,更佳為C3-C18環烷基)、芳烷基(較佳為C6-C30芳烷基,更佳為C6-C18芳烷基如苄基、苯乙基、苯丙基,及其類似物)、酯基、醚基、乙醯基、醇類(較佳為C1-C10醇類)、醛基、酮類、腈類,及其組合。
較佳之非環烯烴類係選自於分支與未分支之C2-C20烯類(較佳為C2-C10烯類)。更佳地,該非環烯烴類具有(R4)2C=C(R4)2之結構,其中R4之每一者皆單獨地選自於H與烷基(較佳為C1-C20烷基,更佳為C1-C10烷基)。用於本發明之特佳非環烯烴類包括選自於乙烯、丙烯、丁烯者,並以乙烯為最佳。
環烯烴共聚物之製造方法為本發明所屬技術領域所已知。舉例而言,可由環狀單體與非環狀單體之鏈聚合反應製造環烯烴共聚物。當降冰片烯於此條件下與乙烯進行反應時,得到含有交替性降冰片烷二基與乙烯單元之乙烯-降冰片烯共聚物。以此方法所製造之共聚物例子包括購自TOPASTM(由Topas Advanced Polymers製造)與APELTM(由Mitsui Chemicals製造)之品牌者。製造這些共聚物之適用方法係揭示於美國專利號第6,008,298號。環烯烴共聚物亦可由多種環狀單體之開環置換(metathesis)聚合反應,之後進行氫化反應而製造。由此類聚合反應取得之聚合物,在概念上可被視為乙烯與環烯烴單體之共聚物(如乙烯與環戊烷-1,3-二基之交替性單元)。利用開環法製造之共聚物之例子包括品牌ZEONORTM(由Zeon Chemicals製造)與ARTONTM(由JSR Corporation製造)所提供者。利用該開環法製造此類共聚物之適用方法係揭示於美國專利號第5,191,026號。
適用於作為本發明可固化黏著劑材料之芳基環丁烯寡聚物為本發明所屬技術領域所已知。適用之芳基環丁烯寡聚物包括但不限於具有下式者:
其中,B為n價連接基團;Ar為多價芳基,且環丁烯環之碳原子係鍵結至Ar同一芳環之相鄰碳原子上;m為1或以上之整數;n為1或以上之整數;以及R5為單價基團。較佳地,該多價芳基Ar可由1至3個芳族碳環或雜芳族環構成。較佳地,該芳族包含單一芳環,更佳為苯環。芳基係視需要經選自於(C1-C6)烷基、三(C1-C6)烷基矽基、(C1-C6)烷氧基,以及鹵基之1至3個基團取代,較佳經(C1-C6)烷基、三(C1-C3)烷基矽基、(C1-C3)烷氧基,以及氯之一或多者取代,更佳經(C1-C3)烷基、三(C1-C3)烷基矽基,以及(C1-C3)烷氧基之一或多者取代。較佳地,該芳基為未經取代。較佳地,n=1或2,且更佳為n=1。較佳地,m=1至4,更佳為m=2至4,且尤佳為m=2。較佳地,R5係選自於H與(C1-C6)烷基,且更佳為選自於H與(C1-C3)烷基。較佳地,B包含一或多個碳-碳雙鍵(烯系不飽和)。適用之單價B基團較佳具有化學式-[C(R10)=CR11]xZ,其中,R10與R11皆單獨地選自於氫、(C1-C6)烷基以及芳基;Z係選自於氫、(C1-C6)烷基、芳基、矽氧烷基、-CO2R12;R12之每一者皆單獨地選自於H、(C1-C6)烷基、芳基、芳烷基以及烷芳基;以及x=1或2。較佳地,R10與R11皆單獨地選自於H、(C1-C3)烷基以及芳基,且更佳為H與(C1-C3)烷基。較佳地,R12為(C1-C3)烷基、芳基,以及芳烷基。Z較佳為矽氧烷基。較佳之矽氧烷基具有化學式-[Si(R13)2-O]p-Si(R13)2-,其中,R13之每一者皆單獨地選自於H、(C1-C6)烷基、芳基、芳烷基以及烷芳基;以及p為1或以上之整數。較佳地,R13係選自於(C1-C3)烷基、芳基以及芳烷基。適用之芳烷基包括苄基、苯乙基與苯丙基。
較佳地,該芳基環丁烯寡聚物包含一或多種下式之寡聚物:
其中,R6之每一者皆單獨地選自於H與(C1-C6)烷基,且較佳為選自於H與(C1-C3)烷基;R7之每一者皆單獨地選自於(C1-C6)烷基、三(C1-C6)烷基矽基、(C1-C6)烷氧基,以及鹵基;R8之每一者皆單獨地為二價烯系不飽和有機基團;R9之每一者皆單獨地選自於H、(C1-C6)烷基、芳烷基,以及苯基;p為1或以上之整數;以及q為0至3之整數。R6之每一者較佳為單獨地選自於H與(C1-C3)烷基,且更佳地,R6之每一者皆為H。較佳地,R7之每一者皆單獨地選自於(C1-C6)烷基、三(C1-C3)烷基矽基、(C1-C3)烷氧基以及氯,且更佳為選自(C1-C3)烷基、三(C1-C3)烷基矽基以及(C1-C3)烷氧基。較佳地,R8之每一者皆單獨地選自於(C2-C6)烯基,且更佳地,R8之每一者為-CH=CH-。R9之每一者較佳為選自於(C1-C3)烷基,且更佳地,R9之每一者為甲基。較佳為p=1至5,更佳為p=1至3,尤佳為p=1。較佳為q=0。特佳之芳基環丁烯寡聚物,1,3-雙(2-雙環[4.2.0]八-1,3,5-三烯-3-基乙烯基)-1,1,3,3-四甲基二矽氧烷(“DVS-bisBCB”)具有下式:
芳基環丁烯寡聚物可由任何適用之方法製備,如該些揭示於美國專利號第4,812,588;5,136,069;5,138,081號;以及國際專利申請號第WO 94/25903號者。適用之芳基環丁烯寡聚物亦有市售之CYCLOTENETM品牌,其購自Dow Electronic Materials。該芳基環丁烯寡聚物可依原樣使用,或可進一步以任何適用之方法純化。
能被固化之任何乙烯基芳族寡聚物,皆可使用作為本發明之可固化黏著劑材料。此類乙烯基芳族寡聚物典型上為具有一或多種反應性烯系不飽和共單體之乙烯基芳族單體寡聚物。較佳地,該乙烯基芳族單體含有一乙烯基團。適用之乙烯基芳族單體為未經取代之乙烯基芳族單體與經取代之乙烯基芳族單體,其中一或多個氫係以選自於由(C1-C6)烷基、(C1-C6)烷氧基、鹵基與胺基所組成群組之取代基置換。例示性乙烯基芳族單體包括但不侷限於苯乙烯、乙烯基甲苯、乙烯基二甲苯、乙烯基苯甲醚、乙烯基二甲氧基苯、乙烯基苯胺、鹵苯乙烯如氟化苯乙烯、α-甲基苯乙烯、β-甲氧基苯乙烯、乙基乙烯基苯、乙烯基吡啶類、乙烯基咪唑類、乙烯基吡咯類及其混合物。較佳之乙烯基芳族單體為苯乙烯、乙烯基甲苯、乙烯基二甲苯、乙烯基苯甲醚、乙基乙烯基苯及其混合物。較佳之反應性共單體為除了包含以往用於乙烯基芳族寡聚物之烯烴(或烯系不飽和)部分之外,尚包含反應性部分者,亦即,於乙烯基芳族寡聚物形成之後能進一步聚合(或交聯)之部分,如烯丙基部分或乙烯基。此類反應性共單體可適當地為任何的不對稱二烯或三烯,其於乙烯基芳族單體之寡聚合化後,能進一步以狄耳士-阿德爾反應進行聚合反應。更佳地,該反應性共單體除了包含以往用於形成乙烯基芳族寡聚物之烯系不飽和之外,尚包含烯丙基部分,且更佳包含烯丙基酯片段(除了烯系不飽和之外)。用於形成該乙烯基芳族寡聚物之例示性反應性共單體包括但不限於乙烯基環己烯、乙烯基醚類、不對稱之二烯類或三烯類如萜烯單體、二環戊二烯、馬來酸二烯丙酯、丙烯酸烯丙酯、甲基丙烯酸烯丙酯、肉桂酸烯丙酯、富馬酸二烯丙酯、巴豆酸烯丙酯(allyl tiglate)、二乙烯基苯及其混合物。較佳之反應性共單體為馬來酸二烯丙酯、丙烯酸烯丙酯、甲基丙烯酸烯丙酯、肉桂酸烯丙酯、富馬酸二烯丙酯及其混合物,且更佳為馬來酸二烯丙酯、甲基丙烯酸烯丙酯及其混合物。例示性之萜烯單體包括但不侷限於檸檬烯、二戊烯、月桂油烯等。本發明所屬技術領域中具有通常知識者將會瞭解到一或多種二級共單體亦可用於形成該乙烯基芳族寡聚物。此類二級共單體為烯系不飽和性,但不含反應性部分。例示性二級共單體包括但不限於(甲基)丙烯酸、(甲基)丙烯醯胺類、(C1-C10)烷基(甲基)丙烯酸酯類、芳族(甲基)丙烯酸酯類、經取代之乙烯單體以及聚(環氧烷)單體。
在此類乙烯基芳族寡聚物中,乙烯基芳族單體與共單體之莫耳比較佳為99:1至1:99,更佳為95:5至5:95,且尤佳為90:10至10:90。此類乙烯基芳族寡聚物可由任何適用之方法製備,如本發明所屬技術領域中已知之任何方法。典型地,乙烯基芳族寡聚物係以乙烯基芳族單體與共單體之自由基聚合反應而製備。較佳之乙烯基芳族寡聚物包含未反應之烯丙基部分,使得此類寡聚物可進一步固化。
有多種材料可使用作為暫時性鍵結組成物中的釋放添加劑,惟此類材料在保存與使用條件下,不會與黏著劑材料產生反應,且在用於固化黏著劑材料之條件下為非可固化。此外,釋放添加劑應與暫時性鍵結組成物相容,亦即,釋放添加劑必須具有分散性、可混溶性或實質上相容於黏著劑材料,以及用於暫時性鍵結組成物之任何其他成分,如有機溶劑。當有機溶劑(或混合之溶劑系統)用於暫時性鍵結組成物中時,釋放添加劑與可固化黏著劑材料兩者必須可溶於此等溶劑。本發明之釋放添加劑具有足夠非揮發性,使得其於使用條件下實質上不會揮發,亦即,其實質上於任何沈積步驟,如旋轉塗佈,或用於移除任何有機溶劑或固化黏著劑材料之任何後續加熱步驟期間都不會揮發。當暫時性鍵結組成物之膜或層被鑄造,如旋轉塗佈時,許多(或全部)溶劑會揮發。較佳地,釋放添加劑可溶於所使用之任何有機溶劑,但不完全溶於可固化黏著劑材料中。該釋放添加劑之親水性優於固化黏著劑材料。不因理論而有侷限,咸信在固化黏著劑材料時,釋放添加劑相會分離,並優先移至晶圓主動層(相較於載體表面,為更親水之表面)。在釋放添加劑中使用適當之親水性部分能使釋放添加劑完全分散,或較佳溶解於暫時性鍵結組成物中,並於黏著劑材料固化時,使釋放添加劑移至更親水性表面,而形成釋放添加劑相分離。在固化期間,任何無法從黏著劑材料產生相分離之材料將無法作為本發明之釋放添加劑。
一般而言,釋放添加劑將含有一或多種相對親水性部分,如含有氧、氮、磷與硫之一或多種部分。適用之釋放添加劑包括但不侷限於:醚類、酯類、羧酸鹽類、醇類、硫醚類、硫醇類、胺類、亞胺類、醯胺類、磷酸酯類、磺酸酯類及其混合物。較佳地,釋放添加劑含有一或多個極性末端基團,其含有氧、氮與硫之一或多者,且較佳為氧。例示性之極性末端基團包括:烷氧基、芳氧基、羥基、羧酸根、烷氧基羰基、巰基、烷基硫醇基、一級胺、二級胺,以及三級胺;較佳地,該末端基團係選自於(C1-C6)烷氧基、(C6-C10)芳氧基、羥基、羧酸根、(C1-C6)烷氧基羰基、巰基、(C1-C6)烷基硫醇基、胺基、(C1-C6)烷基胺基以及二(C1-C6)烷基胺基;更佳地,選自於(C1-C6)烷氧基、(C6-C10)芳氧基、羥基、羧酸根以及(C1-C6)烷氧基羰基;以及甚而更佳地,選自於(C1-C6)烷氧基、羥基、羧酸根以及(C1-C6)烷氧基羰基。特別較佳之極性末端基團係選自於羥基、甲氧基、乙氧基、丙氧基、丁氧基、羧基,以及乙醯氧基。較佳為,釋放添加劑不含矽。
適用之釋放添加劑具有數目平均分子量(Mn)為10,000道爾頓,較佳為7500道爾頓,且更佳為7000道爾頓。釋放添加劑具有最小分子量(Mn),其足以提供釋放添加劑於使用條件下實質上非揮發性,亦即於使用時,釋放添加劑之<5%,較佳為<3%,及更佳為1%揮發。較佳地,釋放添加劑具有Mn為500道爾頓。較佳之Mn範圍為500至10,000道爾頓,更佳為500至7500道爾頓,且尤佳為500至7000道爾頓。儘管釋放添加劑可為直鏈聚合物;分支聚合物如樹枝狀聚合物、星狀聚合物及其類似物;聚合物粒子;以及其類似物,較佳該釋放添加劑為直鏈聚合物或聚合物粒子,且更佳為直鏈聚合物。然而,不因理論而有侷限,咸信相較於分支聚合物,直鏈聚合物善於能夠通過固化中之黏著劑材料相往親水性晶圓表面移動。
聚醚類為較佳之釋放添加劑。聚醚化合物包括環氧烷均聚物,與環氧烷共聚物,該共聚物可為隨機型或嵌段型。聚環氧烷釋放添加劑可具有多種極性末端基團,較佳地,此類極性末端基團為羥基、(C1-C6)烷氧基以及(C1-C6)烷氧基羰基,且更佳為羥基、(C1-C3)烷氧基以及乙醯氧基。較佳之聚醚化合物為聚乙二醇類(或聚環氧烷),如聚(C1-C4)環氧烷化合物,其可包含單一環氧烷重複單元,或二或更多種不同的環氧烷重複單元。較佳之聚醚化合物包括聚乙二醇、聚丙二醇、聚(1,3-丙二醇)、聚(四氫呋喃)、環氧乙烷-環氧丙烷共聚物、環氧乙烷-環氧丁烷共聚物及其混合物。較佳地,當釋放添加劑包含以環氧丁烷作為重複單元時,其為具有一或多種不同環氧烷重複單元之共聚物。本發明所屬技術領域中具有通常知識者應理解到,釋放添加劑之混合物可用於本發明暫時性鍵結組成物中。適用之釋放添加劑包括品名為PLURONIC、TETRONIC與POLYTHF(購自BASF,Ludwigshafen,Germany)、品名為FORTEGRA(購自The Dow Chemical Company,Midland Michigan)以及品名為TERATHANE(購自Invista,Wichita,KS)之聚醚類,這些皆可直接使用,不須進一步純化。
較佳地,暫時性鍵結組成物中可使用一或多種有機溶劑。溶解或分散,較佳為溶解可固化黏著劑材料與釋放添加劑之任何溶劑或溶劑混合物皆適用於暫時性鍵結組成物中。例示性有機溶劑包括但不侷限於:芳族烴類如甲苯、二甲苯以及三甲苯;醇類如2-甲基-1-丁醇、4-甲基-2-戊醇以及甲基異丁基甲醇;酯類如乳酸乙酯、丙二醇甲基醚乙酸酯,以及2-羥基異丁酸甲酯;內酯類如γ-丁內酯;內醯胺類如N-甲基吡咯啶酮;醚類如丙二醇甲基醚與二丙二醇二甲基醚異構物(商業上購自The Dow Chemical Company之PROGLYDETM DMM);酮類如環己酮與甲基環己酮;以及其混合物。
本發明之暫時性鍵結組成物可視需要包括一或多種額外成分,如固化劑、抗氧化劑、增稠劑及其類似物。適用之固化劑有助於黏著劑材料之固化,並可經由熱或光活化。例示性固化劑包括但不限於,熱產生起始劑、光起始劑、疊氮化物類、氮烯類以及交聯劑如聚胺類與聚硫醇類。增稠劑包括能增加暫時性鍵結組成物黏度之任何材料,例如,以減少組成物於黏著劑材料完全固化前,自載體與主動裝置之間流出。增稠劑亦包括可快速進階(聚合)之低分子量材料,以增加所使用暫時性鍵結組成物之黏度。此類額外成分之選擇為本發明所屬技術領域中具有通常知識者之能力範圍內可及。
暫時性鍵結組成物包含一或多種量為50至99 wt%之可固化黏著劑材料、一或多種量為1至50 wt%之釋放添加劑、視需要之有機溶劑,以及視需要之一或多種額外成分。較佳地,可固化黏著劑材料以50至95 wt%之量存在。較佳地,釋放添加劑以2至50,更佳為5至45,以及甚而更佳為5至40 wt%之量存在。當存在時,有機溶劑之量較佳為足以溶解或分散,且較佳為溶解可固化黏著劑材料與釋放添加劑。有機溶劑之量典型為0至50 wt%。較佳地,使用有機溶劑。本發明暫時性鍵結組成物,係以任何順序結合可固化黏著劑材料、釋放添加劑,以及任何視需要之成分而製備。
在使用上,本發明之暫時性鍵結組成物可由任何適用之方法置放於載體基板之附著表面上、半導體晶圓前側,或兩者表面上。用於置放該暫時性鍵結組成物之適用方法,除了其他方法以外,包括但不限於,旋轉塗佈法、簾塗佈法、噴灑塗佈法、滾軸塗佈法、浸塗佈法、蒸汽沈積法,以及層壓法如真空層壓法。在半導體製造工業中,旋轉塗佈法為利用現有設備與過程之較佳方法。在旋轉塗佈法中,組成物固體含量可隨旋轉速度調整,以達到組成物於表面上所欲之施加厚度。典型而言,本發明組成物以旋轉速度400至4000 rpm進行旋轉塗佈。暫時性鍵結組成物分配至晶圓或基板上的量取決於組成物之總固體含量、所得之暫時性鍵結層之所欲厚度以及本發明所屬技術領域中具有通常知識者廣知之其他因素。較佳地,置放於表面上以後,加熱(烘烤)暫時性鍵結組成物以移除任何殘留的溶劑。雖然其他溫度亦適用,典型之烘乾溫度為90至140℃。雖然更長或更短的時間亦適用,此種以烘乾移除殘留溶劑之步驟典型進行約2分鐘。
在另一較佳之方法中,暫時性鍵結組成物係形成為乾燥膜,並以層壓法置於載體基板之附著表面上、半導體晶圓前側或兩者表面上。可使用多種適用的層壓技術,包括真空層壓技術,並為本發明所屬技術領域中具有通常知識者所廣知。在形成乾燥膜方面,暫時性鍵結組成物首先以狹縫式塗佈、凹版印刷或其他適用方法,置於適用之膜支撐片(如聚酯片,較佳為聚對酞酸乙二酯(PET)片,或聚亞醯胺片如KAPTONTM聚亞醯胺)之前表面上。隨後,組成物於適當溫度,如90至140℃,進行軟烘烤達適當時間,如1至30分鐘,以移除任何的溶劑。隨後,於室溫下,將聚合物膜覆蓋片(如聚乙烯)滾軸層壓至經乾燥之暫時性鍵結組成物,以於保存與操作期間保護組成物。欲將經乾燥之暫時性鍵結組成物置於載體及/或半導體晶圓上,首先要移去覆蓋片。隨後,利用滾軸層壓法或真空層壓法,將支撐片上之經乾燥暫時性鍵結組成物層壓至適當表面上。層壓溫度範圍可為20至120℃。隨後,移去(剝除)支撐片,並於表面上留下經乾燥之暫時性鍵結組成物。利用此方法,第1A、1B與1C圖所示之構造皆可實施。
第1A圖係說明本發明之第一具體實施例,其中暫時性鍵結組成物3係例如藉由旋轉塗佈法置於載體基板1之附著表面上之視需要之黏著促進劑層2。第1B圖係說明本發明之另一具體實施例,其中暫時性鍵結組成物3係置於具有特徵如金屬柱4a及/或焊點凸塊4b之半導體晶圓5之前表面。本發明所屬技術領域中具有通常知識者應理解到,半導體晶圓可僅具有金屬柱,或焊點凸塊,或金屬柱與焊點凸塊之組合,或不含金屬柱與焊點凸塊。在第1B圖中,暫時性鍵結組成物3具有足夠之可流動性以填充特徵4a與4b之周圍。在第1B圖中,載體基板1之附著表面具有視需要之黏著促進劑層2。第1C圖係說明本發明之第三具體實施例,其中暫時性鍵結組成物3係置於半導體晶圓5之前側與具有黏著促進劑層2之載體基板1附著表面兩者。在第1C圖中,暫時性鍵結組成物3具有足夠之可流動性以填充特徵4a與4b之周圍。在第1C圖中,置於半導體晶圓上之暫時性鍵結組成物可相同於或不同於置於載體基板附著表面上之暫時性鍵結。本發明所屬技術領域中具有通常知識者應理解到,可施加多層之暫時性鍵結組成物,以達到所欲厚度。
在暫時性鍵結組成物置於半導體晶圓前側或載體基板之附著表面上以後,可藉由分別將載體晶圓附著表面或半導體晶圓前表面與暫時性鍵結組成物接觸,而形成構造,如第1A與1B圖之箭頭說明。在暫時性鍵結組成物置於半導體晶圓前側及載體基板附著表面兩者上以後,藉由將兩暫時性鍵結組成物層互相接觸,而形成構造,如第1C圖之箭頭說明。可使用任何適用之方法,如熱壓鍵結法,其中施加壓力與熱,進行載體基板、半導體晶圓與暫時性鍵結組成物之接觸。例示性方法係揭示於美國專利號第7,713,835號與美國專利申請公開號第2010/0263794與2011/0272092號。典型地,熱壓鍵結法係於真空下進行以減少空隙。較佳地,載體基板與半導體晶圓兩者皆置於真空腔內,暫時性鍵結組成物係置於至少一載體基板上,以芳基環丁烯黏著劑材料之情況為例,晶圓隨即加熱至所欲溫度,如50至200℃歷時1至10分鐘,之後腔內抽真空,並使載體基板及半導體晶圓與暫時性鍵結組成物接觸,隨後腔室經視需要之加壓,如1至100 kPa。接著,已鍵結之配對物可自腔室中移出並經固化,或視需要於腔室內固化。暫時性鍵結組成物之固化,以芳基環丁烯黏著劑材料之情況為例,典型為將組成物加熱至溫度180至250℃歷時1至600分鐘而達成。
第2A圖係說明第1A至1C圖之每一者所述之組分進行接觸後所形成之結構。在第2A圖中,半導體晶圓5具有如金屬柱4a與焊點凸塊4b所示之形貌特徵,暫時性鍵結組成物3係直接鄰近於半導體晶圓5並置於特徵4a與4b周圍,暫時性鍵結組成物亦直接鄰近於視需要之黏著促進劑層2,其直接鄰近於載體基板1。一旦第2A圖之結構形成,暫時性鍵結組成物隨即置於足以使黏著劑材料固化之條件下。此條件包括加熱、暴露於光化輻射(光線),或其組合形式。較佳地,採取加熱方式,無論是單獨進行或結合光線暴露,且更佳地,以加熱方式固化黏著劑材料。選擇加熱速率,使得黏著劑材料不會瞬間固化,而是以更可控制之方式固化。亦即,聚合反應之速率必須小於相分離之速率。
不因理論而有侷限,咸信在固化期間,釋放添加劑相會自固化中之黏著劑材料分離(亦即,會發生聚合反應引發之相分離),且一般移往半導體晶圓上相對更親水性之表面(前側)。固化之後,半導體晶圓與載體基板附著表面之間會形成暫時性鍵結層,如圖2B所示,其中經固化之暫時性鍵結組成物(現為暫時性鍵結層)3係由包含相對較低量之釋放添加劑之鄰近於載體晶圓的第一區域3a,以及鄰近於半導體晶圓且包含相對較高(較大)量之釋放添加劑之第二區域3b所組成。相較於區域3a,區域3b相對較小。第2B圖係顯示所定義之區域3a與3b,目的僅用於說明。不因理論而有侷限,咸信區域3a與3b可代表釋放添加劑於暫時性鍵結層中之連續濃度(由較低之3a至較高之3b),或其可代表含不同釋放添加劑濃度之不同區域,其中區域3b可包含主要量之釋放添加劑。無論區域3a與3b是否代表不同區域或為連續濃度,區域3b主要包含釋放添加劑。當固化黏著劑材料(暫時性鍵結層)為由芳基環丁烯黏著劑材料所組成時,此固化材料典型上具有模數>1 GPa,以及斷裂點伸長率<20%。
一旦暫時性鍵結層形成,半導體晶圓上可進行一或多種適當之操作,如研磨(薄化)晶圓之後側,如第2C圖所示,其中半導體晶圓5之後側被磨研(變薄)並形成平面5a。可進行進一步操作,如圖樣化、導孔形成,以及於半導體晶圓之後側形成導電接觸點。第2D圖係說明具有載體基板1之結構,其包含視需要之黏著促進劑層2、連接半導體晶圓5與載體基板1之暫時性鍵結層3,其中暫時性鍵結層圍繞互連特徵,如位於半導體晶圓前側之金屬柱及/或焊點凸塊,其中晶圓5之後側經研磨,且其上形成金屬接觸點6。
相對於鄰近於載體基板之暫時性鍵結層之釋放添加劑濃度,鄰近於,且較佳為直接鄰近於半導體晶圓前側之釋放添加劑濃度越大,所提供之結構,其在半導體晶圓與暫時性鍵結層之間具有較低的黏著能(相較於載體基板與暫時性鍵結層之間的黏著能)。較佳地,半導體晶圓-暫時性鍵結層介面與載體基板-暫時性鍵結層介面之間的黏著能差異為>20 J/m2,且更佳為>25 J/m2。暫時性鍵結層與不具互連結構之半導體晶圓前側之間的黏著能為5 J/m2,較佳為<5 J/m2,更佳為<3 J/m2,且最佳為2 J/m2。暫時性鍵結層與載體基板附著表面之間的黏著能較佳為>30 J/m2,更佳為>35 J/m2,且尤佳為40 J/m2。這些黏著能差異使半導體晶圓比載體基板更容易自暫時性鍵結層釋放。
在完成半導體晶圓上欲進行之操作以後,晶圓隨即自載體基板與暫時性鍵結層分離。可使用任何適用之方法自暫時性鍵結層分離半導體晶圓,如揭示於美國專利申請公開號第2010/0263794;2011/0308739;以及2012/0028438號,以及國際專利申請號第WO 2011/079170號者。該結構可視需要經加熱以促進半導體晶圓之分離,不過此種加熱並非必要。本發明之優點為,由於此種暫時性鍵結層與半導體晶圓之間的低黏著能,可經由施力於半導體晶圓與載體基板之間的楔形物,並迫使分開或撬開該結構,而易於完成分離。一旦分離步驟啟動,則半導體晶圓可輕易地與暫時性鍵結層分離。第2E圖係說明本發明之一態樣,其顯示經加工之半導體晶圓5所具備之空間特徵,如位於前側之金屬柱4a與焊點凸塊4b,及位於後側之導電接觸點6,其與具視需要之黏著促進劑層2之載體基板1以及暫時性鍵結層之兩區域3a與3b分離。之後,以適當之溶劑或溶劑混合物洗滌經加工之半導體晶圓5,以移除任何殘留物,隨後乾燥。適用之洗滌劑包括但不侷限於,異丙醇、丙酮,三甲苯、氨/水、水/界面活性劑,及其類似物。第2F圖係說明另一態樣,其中區域3b於分離後仍留在半導電前側,其隨後容易因半導體晶圓5與適當溶劑或溶劑混合物接觸,以及接下來的乾燥步驟而分離。如第2E與2F圖之說明,本發明之暫時性鍵結層可自半導電晶圓表面,甚至是自具有空間特徵如金屬柱與焊點凸塊之區域移除,幾乎不留固化黏著劑材料殘留物。
第3A至3D圖為掃描式電子顯微照片,其顯示具備銅柱陣列之半導體晶圓自本發明暫時性鍵結層(包含作為可固化黏著劑材料之DVS-bisBCB與聚醚釋放添加劑)之釋放能力。第3A圖顯示自本發明之暫時性鍵結層分離以及溶劑洗滌後,半導體晶圓上之銅柱陣列。第3B圖顯示自半導體晶圓分離後,暫時性鍵結層之表面。第3C圖為半導體晶圓上陣列之單一銅柱近視圖,且第3D圖為半導體晶圓分離後,暫時性鍵結層之單一孔洞近視圖。如這些顯微照片中所見,半導體晶圓完全自暫時性鍵結層分離,並於溶劑洗滌後,晶圓表面或銅柱上無可見之殘留物,且半導體晶圓幾乎無損壞。
第4A至4D圖為掃描式電子顯微照片,其顯示具備焊點凸塊陣列之半導體晶圓自本發明之暫時性鍵結層(其包含作為可固化黏著劑材料之DVS-bisBCB與聚醚釋放添加劑)之釋放能力。第4A圖顯示自本發明之暫時性鍵結層分離及溶劑洗滌後,半導體晶圓上之焊點凸塊陣列。第4B圖顯示自半導體晶圓分離後,暫時性鍵結層之表面。第4C圖為半導體晶圓上陣列之單一焊點凸塊近視圖,且第4D圖為半導體晶圓分離後,暫時性鍵結層之單一孔洞近視圖。如這些顯微照片中所見,半導體晶圓完全自暫時性鍵結層分離,並於溶劑洗滌後,晶圓表面或焊點凸塊上無可見之殘留物。
某些形貌特徵,如焊點凸塊,由於其形狀之故,欲移除任何暫時性鍵結層是一大挑戰。因此,在本發明之暫時性鍵結組成物中,可能需要更高量的釋放添加劑,以確保具該些形貌特徵之半導體晶圓的良好釋放。更高量的釋放添加劑將造成鄰近於半導體晶圓前側之主要含有釋放添加劑之較大區域(如圖2B之3b),此會促進具此類形貌特徵區域之晶圓的分離。
以下檢測方法係於下列實施例中使用。
半導體晶圓塗佈:將矽晶圓塗佈於配備有整合式加熱板與晶圓轉換系統之Brewer CEE 400旋轉塗佈系統上。利用動態分配器與1000至2000 rpm之旋轉速度,並歷時至多45秒鐘,將一定量(6-8 g)之樣本置於未經處理之矽晶圓上,接著在120℃之加熱板上軟烘烤90秒鐘。最終之塗層厚度係反比於旋轉速度,其範圍為25至50 μm。
載體基板塗佈:除非另有指明,係以三烷氧基矽烷黏著促進劑(AP-3000TM黏著促進劑,購自Dow Electronic Materials)處理晶圓表面製備載體晶圓以用於鍵結研究,以增進暫時性鍵結層於固化後之黏著性。利用配備有靜態分配器之旋轉塗佈機施加黏著促進劑,隨後以2000 rpm旋轉45秒鐘,並以90℃進行90秒的加熱板烘乾步驟。
半導體晶圓與載體基板之鍵結:兩矽晶圓片,一個具有暫時性鍵結組成物層置於其上,兩者於加熱板上直接接觸進行加熱鍵結,隨後接上夾鉗以防零件滑開。隨後,樣本於快速熱退火室內,以260℃固化1小時。
單懸臂樑黏著力檢測:將欲評估之零件附著於承載室(load cell),接著,依據S.Chauffaille,等人,“Pre-Cracking Behaviour in the Single Cantilever Beam Adhesion Test,”Int.J.Fract(2011)169:133-144所述之方法,經由施加楔形物解開壓力(wedge open stress)分離半導體晶圓與載體基板。
實施例1-對照組1:藉由旋轉塗佈法,將溶於三甲苯(購自The Dow Chemical Company)之含63 wt% DVS-bisBCB寡聚物(作為可固化黏著劑材料)之溶液組成物沈積於乾淨之矽晶圓上,接著進行120℃/10分鐘之軟烘烤,以移除溶劑。在第二個矽晶圓上(載體基板),藉由旋轉塗佈法施加黏著促進劑,接著進行120℃/2分鐘之軟烘烤以移除溶劑。兩晶圓於在180℃下擠壓成一體,歷時10分鐘,接著在210℃下固化30分鐘。鍵結之晶圓對經冷卻至室溫。試圖以楔形物解開法自載體基板分離半導體晶圓時,其中將楔形物如刀片插入兩晶圓之間,並用於將其撬開,發現由於固化黏著劑材料之高黏著能,晶圓無法分開。
實施例2-對照組2:將溶於三甲苯之含65%固體之DVS-bisBCB寡聚物(25,000分子量)組成物旋轉塗佈於半導體晶圓上並固化。利用單懸臂樑檢測法,測量經固化之DVS-雙苯環丁烯膜與矽表面之間的黏著力為9 J/m2。
實施例3-比較例:將13.83 g的BAC-45(一種具3000分子量之二丙烯酸酯末端之丁二烯橡膠)加入100 g之溶於三甲苯之63% DVS-bisBCB寡聚物(具有分子量25,000),以產生透明溶液。以0.4 μm聚四氟乙烯(PTFE)濾膜過濾溶液。將溶液旋轉塗佈於半導體晶圓並固化。利用單懸臂樑檢測法,測量經固化之DVS-雙苯環丁烯膜與矽表面之間的黏著力為64.5 J/m2。此外,經固化之DVS-bisBCB層未觀察到相分離。
實施例4:將11.18 g(15 wt%,以組成物總重量為基準計)之聚(四甲二醇)(具有分子量為2000(為POLYTHF 2000,購自BASF)並作為釋放添加劑)加入100 g溶於三甲苯之含63%固體DVS-bisBCB(可固化黏著劑材料)之溶液中。於混合時產生單相系統且未發現相分離。以0.4 μm PTFE薄膜過濾溶液。將溶液旋轉塗佈於半導體晶圓並固化。利用單懸臂樑檢測法,測量經固化之DVS-雙苯環丁烯薄膜與矽表面之間的黏著力為1至2 J/m2。基於蠟質外觀與固化黏著劑材料易於自矽晶圓移除等性質,顯示該釋放添加劑往表面移動。
實施例5:重複實施例4之流程,除了使用10 wt%之環氧乙烷-環氧丁烷-環氧乙烷嵌段共聚物以外。利用單懸臂樑檢測法,測量經固化之DVS-雙苯環丁烯薄膜與矽表面之間的黏著力為<1 J/m2。基於蠟質外觀與固化黏著劑材料易於自矽晶圓移除等性質,顯示該釋放添加劑往表面移動。
實施例6:製備含有90 g之溶於三甲苯之63 wt% DVS-bisBCB寡聚物(可固化黏著劑材料),與10 g之聚乙二醇(具有12,000分子量(購自Fluka)並作為釋放添加劑)之組成物,並於120℃下攪拌直到取得均質混合物。之後,將所得之暫時性鍵結組成物冷卻至室溫。接著,利用旋轉塗佈法,將暫時性鍵結組成物沈積於乾淨之矽晶圓(半導體晶圓)上,接著進行120℃/10分鐘之軟烘烤以移除溶劑。在第二個矽晶圓(載體基板)上,以旋轉塗佈法施加黏著促進劑,接著進行120℃/2分鐘之軟烘烤。兩晶圓於在180℃下擠壓成一體,歷時10分鐘,接著在210℃下固化30分鐘。鍵結之晶圓對經冷卻至室溫。以尖刀片插入兩晶圓之間時,該兩晶圓容易被分開,且經固化之暫時性鍵結層黏附於載體基板晶圓上。
實施例7:重複實施例6之流程,除了使用下列之釋放添加劑以外。在各情況中,釋放添加劑之量為10 g(10 wt%)。在各情況中,兩晶圓容易被分開,且經固化之暫時性鍵結層黏附於載體基板晶圓上。在下表中,“EO”意指乙烯氧基、“PO”意指丙烯氧基,以及“BO”意指丁烯氧基。自暫時性鍵結層分離後,以肉眼檢查注意半導體晶圓表面上存在任何殘留物。以適當之溶劑洗滌該半導體晶圓,易於移除該等殘留物。
實施例8-載體基板與半導體晶圓之黏著力:釋放添加劑之功能為降低固化黏著劑材料與半導體之間的附著力,同時維持對於載體基板的附著力。這可由測定個別介面之臨界應變能釋放率GC而量化顯示。所使用之方法為前述之單懸臂樑法。臨界應變能釋放率GC係與負載與破裂(PC)、裂縫長度(a)、樑厚度(h)、樑寬度(B),以及樑平面應變彈性模數(E’)有關:
測量黏著促進劑塗佈之載體基板、兩種純的DVS-BCB之裸矽、及含有作為可固化黏著劑材料之90 wt% DVS-BCB寡聚物以及作為釋放添加劑之具有分子量2000(購自BASF)之10 wt%聚(四甲二醇)之組成物之附著力。經測定之數值報導於下表,其中“APCS”意指黏著力提升之載體基板表面、“SW”意指半導體晶圓之前側,以及“RA”意指釋放添加劑。
聚(四甲二醇)釋放添加劑減少80%之經固化組成物與矽之間的黏著力,使半導體晶圓分開。此外,黏著力提升之經塗佈載體基板的黏著力僅減少27%,因此確保經固化之組成物將黏附於載體基板,並可自半導體晶圓乾淨地釋放。
實施例9:重複實施例4之流程,除了使用以環氧丙烷(“PO”)與環氧乙烷(“EO”)依序加入乙烯二胺所衍生之四官能基嵌段共聚物,其具有平均分子量4700,以及PO:EO比例為90:10(TETRONIC 901,購自BASF),作為釋放添加劑。
實施例10:重複實施例9之流程,除了使用以PO與EO依序加入乙烯二胺所衍生之四官能性嵌段共聚物,其具有平均分子量4000與PO:EO比例80:20(TETRONIC 702,購自BASF),作為釋放添加劑,其使用量為20 wt%(以組成物總重量為基準計)。
實施例11:重複實施例9之流程,除了使用以PO與EO依序加入乙烯二胺所衍生之四官能性嵌段共聚物,其具有平均分子量4000與PO:EO比例60:40(TETRONIC 304,購自BASF),作為釋放添加劑,其使用量為23 wt%(以組成物總重量為基準計)。
實施例12:結合6 g乙烯-降冰片烯共聚物(TOPASTM 5010,Tg 110℃;購自TOPAS Advanced Polymers,Florence,KY)、35 g甲基環己烷、14 g低分子量環烯烴共聚物(TOPASTM TonerTM,Mw 8000,Mw/Mn 2.0)以及作為釋放添加劑之具有分子量2000的5 g聚(四甲烯二醇)(poly(tetramethylene glycol))(為POLYTHF 2000,購自BASF)製備暫時性鍵結組成物。於室溫下攪拌該溶液直到成分溶解。隨後,依據實施例1之流程,該組成物用於鍵結晶圓與載體基板。
實施例13:結合7.5 g乙烯-降冰片烯共聚物(TOPASTM 5013,Tg 134℃)、40 g甲基環己烷、12.5 g低分子量環烯烴共聚物(TOPASTM TonerTM,Mw 8000,Mw/Mn 2.0)、0.15 g酚系抗氧化劑(IRGANOXTM 1010)、0.2 g亞膦酸酯抗氧化劑(IRGAFOXTM P-EPQ)以及作為釋放添加劑之具有分子量12,000的7.5 g聚乙二醇製備暫時性鍵結組成物。於室溫下攪拌該溶液直到成分溶解。隨後,依據實施例1之流程,該組成物用於鍵結晶圓與載體基板。
實施例14:結合26.4 g氫化之降冰片烯系共聚物(以開環聚合反應製備(ZEONORTM 1060,Tg 100℃;購自Zeon Chemicals,Louisville,KY))、21.6 g低分子量環烯烴共聚物(TOPASTM TonerTM)、72 g甲基環己烷以及35 g之以PO與EO依序加入乙烯二胺所衍生之四官能性嵌段共聚物(其具有平均分子量4000與PO:EO比例80:20(TETRONIC 702))作為釋放添加劑,製備暫時性鍵結組成物。於室溫下攪拌該溶液直到成分溶解。隨後,依據實施例1之流程,該組成物用於鍵結晶圓與載體基板。
實施例15:在懸浮於IKA油攪拌/浴中,並配備有冷凝器、60 mL進料漏斗、磁攪拌石、氮氣沖洗器與JKem熱電偶探頭之250 mL三頸圓底反應燒瓶中,將苯甲醯過氧化物(LUPEROXTM A98)(9.68 g,0.04 mol)溶於PROGLYDETM DMM溶劑(150 g,0.32 mol),並加熱至90℃。將苯乙烯(33.08 g,0.32 mol)與馬來酸二烯丙酯(6.92 g,0.04 mol)一起混合、移至進料漏斗、且將單體混合物逐滴加入反應燒瓶中歷時30分鐘,期間反應溫度維持在90℃。2.5小時後,使反應混合物冷卻至室溫,接著逐滴加入甲醇(約10x過量體積)。於過濾前,經沈澱之聚合物靜置隔夜。聚合物以真空過濾法單離、以2 x 250 mL之MeOH洗滌、於結晶盤中空氣乾燥,以及隨後於20至30℃之真空下乾燥12小時。所得之苯乙烯-馬來酸二烯丙酯寡聚物具有苯乙烯與馬來酸二烯丙酯之莫耳比約為90:10。
實施例16:重複實施例15之一般流程,除了以等莫耳量之甲基丙烯酸烯丙酯取代馬來酸二烯丙酯,以提供具有苯乙烯與甲基丙烯酸烯丙酯之莫耳比約為90:10之苯乙烯-甲基丙烯酸烯丙酯寡聚物。
實施例17:重複實施例15之一般流程,除了以等莫耳量之肉桂酸烯丙酯取代馬來酸二烯丙酯,以提供具有苯乙烯與肉桂酸烯丙酯之莫耳比約為90:10之苯乙烯-肉桂酸烯丙酯寡聚物。
實施例18:以結合83.63 g之溶於PROGLYDETM DMM之68.5% DVS-bisBCB寡聚物(具有分子量(Mw)25,000至30,000),其中加入作為釋放添加劑之8.78 g之聚(四甲烯二醇)(具有分子量為2900(為POLYTHF 2900,購自BASF))、4.17 g BAC-45(具有分子量為3000之二丙烯酸酯終端之丁二烯橡膠)、0.68 g二異丙苯基過氧化物、0.49 g市售抗氧化劑以及2.25 g PROGLYDETM DMM溶劑,而製備塗佈組成物。該組成物以木棍手動混合、加熱至50℃約1小時、之後滾動直到均質。
以200 mm之矽晶圓進行10秒鐘之氧電漿蝕刻。其次,以市售黏著促進劑旋轉塗佈於載體晶圓之附著表面上(2000 rpm),接著於120℃下進行軟烘烤90秒鐘,隨後進行冷卻。其次,將該塗佈組成物旋轉塗佈於(2000 rpm)裝置晶圓上、於120℃下軟烘烤90秒鐘、冷卻30秒鐘、並於160℃下軟烘烤120秒鐘,以於該裝置晶圓上形成暫時性鍵結組成物層。隨後,於80℃下,將載體晶圓真空層壓至暫時性鍵結組成物上,歷時60秒鐘,其中真空步驟施加45秒鐘,且加壓步驟施加60秒鐘。隨後,於氮氣氛圍下,將層壓之晶圓置於加熱板上進行加熱固化,裝置側朝下,於210℃加熱120秒鐘。經固化之暫時性鍵結層厚度約25 μm。於固化後,以刀片插入缺口附近,並經導引環繞晶圓一周,使晶圓成功去鍵結。輕易地以丙酮洗滌移除裝置晶圓上的殘留物。
實施例19:重複實施例18之流程,除了該塗佈組成物亦含有取自實施例15之41.82 g苯乙烯:馬來酸二烯丙酯寡聚物。該塗佈組成物含有DVS-bisBCB寡聚物,與重量比1:1之苯乙烯:馬來酸二烯丙酯寡聚物。該組成物之經固化暫時性鍵結層之厚度約為26 μm。於固化後,以刀片插入缺口附近,並經導引環繞晶圓一周,使晶圓成功去鍵結。於去鍵結後,裝置晶圓上未發現殘留物。
實施例20:重複實施例18之流程,除了以溶於PROGLYDETM DMM溶劑(68.5%固體)之83.63 g的苯乙烯:馬來酸二烯丙酯寡聚物(源自實施例15)取代DVS-bisBCB寡聚物。此塗佈組成物不含DVS-bisBCB寡聚物。此組成物之經固化暫時性鍵結層厚度約為36 μm。於固化後,以刀片插入缺口附近,並經導引環繞晶圓一周,使晶圓成功去鍵結。以丙酮加壓洗滌或浸泡於丙酮中移除裝置晶圓上的殘留物。
實施例21:重複實施例20之一般流程,除了所使用之苯乙烯:馬來酸二烯丙酯寡聚物具有莫耳比為99:1。所用之晶圓為100 mm。裝置晶圓乾淨地去鍵結。
實施例22:重複實施例20之一般流程,除了以95:5之苯乙烯:二戊烯寡聚物取代苯乙烯:馬來酸二烯丙酯寡聚物。所用之晶圓為100 mm。裝置晶圓乾淨地去鍵結。
1...載體基板
2...黏著促進劑層
3...暫時性鍵結組成物
4a...特徵
4b...特徵
5...半導體晶圓
第1A至1C圖為示意圖,其說明本發明製程之替代態樣。
第2A至2F圖為示意圖,其說明本發明之製程。
第3A至3D圖為掃描式電子顯微照片,其顯示本發明黏著劑於含銅圓柱表面之釋放能力。
第4A至4D圖為掃描式電子顯微照片,其顯示本發明黏著劑於含焊點凸塊表面之釋放能力。
1...載體基板
2...黏著促進劑層
3...暫時性鍵結組成物
4a...特徵
4b...特徵
5...半導體晶圓
Claims (15)
- 一種可釋放附著半導體晶圓至載體基板之方法,其包含:(a)提供具有前側與後側之半導體晶圓;(b)提供具有附著表面之載體基板;(c)將包含可固化黏著劑材料與釋放添加劑之暫時性鍵結組成物置於該半導體晶圓前側與該載體基板附著表面之間;以及(d)固化該黏著劑材料,以提供置於該半導體晶圓前側與該載體基板附著表面間之暫時性鍵結層;其中,該鄰近於載體基板附著表面之暫時性鍵結層包含相對較低量之釋放添加劑,以及鄰近於該半導體晶圓前側之該暫時性鍵結層包含相對較高量之該釋放添加劑。
- 如申請專利範圍第1項所述之方法,其中,該可固化黏著劑材料係選自於聚伸芳基寡聚物、環烯烴寡聚物、芳基環丁烯寡聚物、乙烯基芳族寡聚物,以及其混合物。
- 如申請專利範圍第1項所述之方法,其中,該釋放添加劑為聚醚化合物。
- 如申請專利範圍第1項所述之方法,其中,該釋放添加劑係選自於由聚環氧烷均聚物與聚環氧烷共聚物所組成之群組。
- 如申請專利範圍第4項所述之方法,其中,該聚醚化合物包含選自於由羥基、烷氧基、芳氧基以及其混合物所組成之群組的端基。
- 如申請專利範圍第4項所述之方法,其中,該聚醚化合物係選自於聚乙二醇、聚丙二醇、聚(1,3-丙二醇)、聚丁二醇、聚(四氫呋喃)、乙二醇-丙二醇共聚物以及其混合物。
- 如申請專利範圍第1項所述之方法,其中,該暫時性鍵結組成物係使用熱、光、輻射或其混合而固化。
- 如申請專利範圍第1項所述之方法,更包含於接觸該暫時性鍵結組成物之前,以黏著促進劑處理該載體基板附著表面之步驟。
- 如申請專利範圍第1項所述之方法,更包含:(e)於該半導體晶圓後側進行操作;以及(f)將該半導體晶圓前側與該暫時性鍵結層分離之步驟。
- 如申請專利範圍第1項所述之方法,其中,該暫時性鍵結組成物更包含有機溶劑。
- 一種構造,其包含:具有前側與後側之半導體晶圓;具有附著表面之載體基板;以及置於該半導體晶圓前側與該載體基板附著表面間之暫時性鍵結層;其中,該暫時性鍵結層包含已固化黏著劑材料與釋放添加劑;其中,鄰近於該載體基板附著表面之該暫時性鍵結層包含相對較低量之該釋放添加劑,以及鄰近於該半導體晶圓前側之該暫時性鍵結層包含相對較高量之該釋放添加劑。
- 如申請專利範圍第11項所述之構造,其更包含黏著促進層,其置於該暫時性鍵結層與該載體基板附著表面之間。
- 如申請專利範圍第11項所述之構造,其中,該暫時性鍵結層與該半導體晶圓前側具有<3 J/m2之黏著能。
- 如申請專利範圍第11項所述之構造,其中,該暫時性鍵結層與該載體基板附著表面具有>30 J/m2之黏著能。
- 如申請專利範圍第11項所述之構造,其中,該已固化黏著劑材料係選自於聚伸芳基聚合物、環烯烴聚合物、芳基環丁烯聚合物、乙烯基芳族寡聚物,及其混合物。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/661,025 US20140117503A1 (en) | 2012-10-25 | 2012-10-25 | Ephemeral bonding |
US14/060,185 US9269623B2 (en) | 2012-10-25 | 2013-10-22 | Ephemeral bonding |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201436064A true TW201436064A (zh) | 2014-09-16 |
TWI531012B TWI531012B (zh) | 2016-04-21 |
Family
ID=49474310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW102138409A TWI531012B (zh) | 2012-10-25 | 2013-10-24 | 暫時性鍵結 |
Country Status (6)
Country | Link |
---|---|
US (3) | US9269623B2 (zh) |
EP (1) | EP2725605B1 (zh) |
JP (1) | JP6275993B2 (zh) |
KR (1) | KR101505875B1 (zh) |
CN (1) | CN103779255B (zh) |
TW (1) | TWI531012B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI586725B (zh) * | 2015-04-10 | 2017-06-11 | 羅門哈斯電子材料有限公司 | 增韌芳基環丁烯聚合物 |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3092658A4 (en) * | 2014-01-07 | 2017-07-05 | Brewer Science, Inc. | Cyclic olefin polymer compositions and polysiloxane release layers for use in temporary wafer bonding processes |
US9865490B2 (en) * | 2014-01-07 | 2018-01-09 | Brewer Science Inc. | Cyclic olefin polymer compositions and polysiloxane release layers for use in temporary wafer bonding processes |
US10141216B2 (en) * | 2014-10-22 | 2018-11-27 | Promerus, Llc | Room temperature debondable and thermally curable compositions |
CN105845618B (zh) * | 2015-01-13 | 2019-07-19 | 中芯国际集成电路制造(上海)有限公司 | 一种防止铜氧化扩散的方法 |
US9644118B2 (en) * | 2015-03-03 | 2017-05-09 | Dow Global Technologies Llc | Method of releasably attaching a semiconductor substrate to a carrier |
TW201709456A (zh) * | 2015-05-04 | 2017-03-01 | 艾歐普雷克斯有限公司 | 不具有晶粒連接墊之引線承載座結構及由該結構形成的封裝 |
CN109417026B (zh) * | 2016-06-22 | 2023-06-13 | 日产化学株式会社 | 含有聚二甲基硅氧烷的粘接剂 |
GB2551732B (en) * | 2016-06-28 | 2020-05-27 | Disco Corp | Method of processing wafer |
DE102019101631B4 (de) | 2019-01-23 | 2024-05-23 | Infineon Technologies Ag | Korrosionsgeschützte Formmasse, Verfahren zu deren Herstellung und deren Verwendung |
US11189518B2 (en) * | 2019-11-15 | 2021-11-30 | Advanced Semiconductor Engineering, Inc. | Method of processing a semiconductor wafer |
JP7470411B2 (ja) | 2020-09-30 | 2024-04-18 | フジコピアン株式会社 | ウェーハ加工用積層体、それを用いた薄型ウェーハの製造方法及び薄型ウェーハ個片化の製造方法 |
CN117098824A (zh) | 2021-03-30 | 2023-11-21 | 日产化学株式会社 | 粘接剂组合物、层叠体、层叠体的制造方法以及经加工的基板的制造方法 |
KR20230164088A (ko) | 2021-03-31 | 2023-12-01 | 닛산 가가쿠 가부시키가이샤 | 적층체, 박리제 조성물 및 가공된 반도체 기판의 제조 방법 |
EP4310157A1 (en) | 2021-03-31 | 2024-01-24 | Nissan Chemical Corporation | Laminate, release agent composition, and method for manufacturing machined semiconductor substrate |
WO2022210262A1 (ja) | 2021-03-31 | 2022-10-06 | 日産化学株式会社 | 積層体、剥離剤組成物及び加工された半導体基板の製造方法 |
WO2023074324A1 (ja) | 2021-10-29 | 2023-05-04 | 日産化学株式会社 | 積層体、剥離剤組成物及び加工された半導体基板の製造方法 |
KR20230089976A (ko) * | 2021-12-14 | 2023-06-21 | 코닝 인코포레이티드 | 시트 일시적 본딩 방법 및 장치 |
NL2032112B1 (en) | 2022-06-09 | 2023-12-18 | Univ Eindhoven Tech | A method for bonding a first and second planar substrate |
Family Cites Families (62)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4661193A (en) | 1984-08-27 | 1987-04-28 | The Dow Chemical Company | Adhesive compositions for arylcyclobutene monomeric compositions |
US4812588A (en) | 1987-12-14 | 1989-03-14 | The Dow Chemical Company | Polyorganosiloxane-bridged bisbenzocyclobutene monomers |
US5191026A (en) | 1987-12-25 | 1993-03-02 | Nippon Zeon Co., Ltd. | Ring-opening hydrogenated copolymer and process for producing the same |
US5155175A (en) | 1989-12-08 | 1992-10-13 | Intellectual Property Law Dept. | Crosslinkable fluorinated polyarylene ether composition |
US5115082A (en) | 1990-04-17 | 1992-05-19 | Raychem Corporation | Fluorinated poly(arylene ether) |
US5179188A (en) | 1990-04-17 | 1993-01-12 | Raychem Corporation | Crosslinkable fluorinated aromatic ether composition |
US5136069A (en) | 1991-03-28 | 1992-08-04 | The Dow Chemical Company | Process for preparing vinylically-unsaturated compounds (II) |
US5138081A (en) | 1991-04-30 | 1992-08-11 | The Dow Chemical Company | Process for purifying vinylically-unsaturated organosilicon compounds |
US5238763A (en) * | 1991-12-31 | 1993-08-24 | Xerox Corporation | Electrophotographic imaging member with polyester adhesive layer and polycarbonate adhesive layer combination |
US5854302A (en) | 1993-04-29 | 1998-12-29 | The Dow Chemical Company | Partially polymerized divinylsiloxane linked bisbenzocyclobutene resins and methods for making said resins |
DE59408507D1 (de) | 1993-10-06 | 1999-08-26 | Ticona Gmbh | Modifiziertes Cycloolefincopolymer |
US5874516A (en) | 1995-07-13 | 1999-02-23 | Air Products And Chemicals, Inc. | Nonfunctionalized poly(arylene ethers) |
WO1997010193A1 (en) | 1995-09-12 | 1997-03-20 | The Dow Chemical Company | Ethynyl substituted aromatic compounds, synthesis, polymers and uses thereof |
US5965679A (en) | 1996-09-10 | 1999-10-12 | The Dow Chemical Company | Polyphenylene oligomers and polymers |
US6093636A (en) | 1998-07-08 | 2000-07-25 | International Business Machines Corporation | Process for manufacture of integrated circuit device using a matrix comprising porous high temperature thermosets |
JP2000077366A (ja) * | 1998-08-28 | 2000-03-14 | Nitta Ind Corp | 研磨布及びその研磨布の研磨機定盤への脱着方法 |
IL143207A0 (en) | 1998-11-24 | 2002-04-21 | Dow Chemical Co | A composition containing a cross-linkable matrix precursor and a poragen, and a porous matrix prepared therefrom |
US6699419B1 (en) * | 2000-06-05 | 2004-03-02 | General Motors Corporation | Method of forming a composite article with a textured surface and mold therefor |
JP5209168B2 (ja) | 2000-07-19 | 2013-06-12 | ダウ グローバル テクノロジーズ エルエルシー | コーティングエンハンサーを含むスピンオン誘電体組成物 |
DE10137376A1 (de) * | 2001-07-31 | 2003-02-27 | Infineon Technologies Ag | Geklebte Chip- und Waferstapel |
JP4565804B2 (ja) | 2002-06-03 | 2010-10-20 | スリーエム イノベイティブ プロパティズ カンパニー | 被研削基材を含む積層体、その製造方法並びに積層体を用いた極薄基材の製造方法及びそのための装置 |
DE10256247A1 (de) * | 2002-11-29 | 2004-06-09 | Andreas Jakob | Schichtverbund aus einer Trennschicht und einer Schutzschicht zum Schutze und zum Handling eines Wafers beim Dünnen, bei der Rückseitenbeschichtung und beim Vereinzeln |
JP4936667B2 (ja) * | 2002-11-29 | 2012-05-23 | フラウンホファー ゲゼルシャフト ツール フェルドルンク デル アンゲヴァントテン フォルシュンク エー ファウ | ウェーハ処理プロセス及び装置並びに中間層及びキャリヤー層を有するウェーハ |
US6869894B2 (en) | 2002-12-20 | 2005-03-22 | General Chemical Corporation | Spin-on adhesive for temporary wafer coating and mounting to support wafer thinning and backside processing |
FR2860799B1 (fr) | 2003-10-08 | 2006-02-17 | Rhodia Chimie Sa | Compositions de revetements comprenant une dispersion aqueuse de polymere filmogene et une silicone polyether, leur procede de preparation et leurs utilisations |
JP2005150235A (ja) | 2003-11-12 | 2005-06-09 | Three M Innovative Properties Co | 半導体表面保護シート及び方法 |
US7226812B2 (en) * | 2004-03-31 | 2007-06-05 | Intel Corporation | Wafer support and release in wafer processing |
US7722940B2 (en) * | 2004-09-01 | 2010-05-25 | Appleton Papers, Inc. | Adhesively securable stock packaging materials |
US7541264B2 (en) | 2005-03-01 | 2009-06-02 | Dow Corning Corporation | Temporary wafer bonding method for semiconductor processing |
KR101458143B1 (ko) | 2006-03-01 | 2014-11-05 | 씬 머티리얼즈 아게 | 처리방법, 특히, 웨이퍼의 얇은 배면 처리방법, 웨이퍼-캐리어 배열 및 상기 타입의 웨이퍼-캐리어 배열의 제조방법 |
JP4875414B2 (ja) * | 2006-06-23 | 2012-02-15 | 三井化学東セロ株式会社 | 半導体ウェハの裏面研削用粘着フィルム及びそれを用いた半導体ウェハの裏面研削方法 |
US20080014532A1 (en) | 2006-07-14 | 2008-01-17 | 3M Innovative Properties Company | Laminate body, and method for manufacturing thin substrate using the laminate body |
US8247079B2 (en) * | 2006-09-01 | 2012-08-21 | Momentive Performance Materials Inc. | Laminate containing a silylated polyurethane adhesive composition |
US7713835B2 (en) | 2006-10-06 | 2010-05-11 | Brewer Science Inc. | Thermally decomposable spin-on bonding compositions for temporary wafer bonding |
US20080200011A1 (en) * | 2006-10-06 | 2008-08-21 | Pillalamarri Sunil K | High-temperature, spin-on, bonding compositions for temporary wafer bonding using sliding approach |
JP5256641B2 (ja) | 2007-04-06 | 2013-08-07 | Jsr株式会社 | 接着剤組成物 |
JP5788173B2 (ja) | 2007-06-25 | 2015-09-30 | ブルーワー サイエンス アイ エヌシー. | 高温スピンオン仮接合用組成物 |
US20090017323A1 (en) | 2007-07-13 | 2009-01-15 | 3M Innovative Properties Company | Layered body and method for manufacturing thin substrate using the layered body |
US8541515B1 (en) * | 2007-11-21 | 2013-09-24 | Trillium Specialties, LLC | Polymer compositions with improved surface properties |
EP2238618B1 (en) | 2008-01-24 | 2015-07-29 | Brewer Science, Inc. | Method for reversibly mounting a device wafer to a carrier substrate |
KR20110020862A (ko) | 2008-06-02 | 2011-03-03 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 접착성 캡슐화 조성물 및 그것을 사용하여 제조한 전자 소자 |
US8092628B2 (en) | 2008-10-31 | 2012-01-10 | Brewer Science Inc. | Cyclic olefin compositions for temporary wafer bonding |
DE102008044200B4 (de) | 2008-11-28 | 2012-08-23 | Thin Materials Ag | Bonding-Verfahren |
DE102008055155A1 (de) | 2008-12-23 | 2010-07-01 | Thin Materials Ag | Trennverfahren für ein Schichtsystem umfassend einen Wafer |
US8267143B2 (en) | 2009-04-16 | 2012-09-18 | Suss Microtec Lithography, Gmbh | Apparatus for mechanically debonding temporary bonded semiconductor wafers |
KR20100134492A (ko) | 2009-06-15 | 2010-12-23 | 스미토모 베이클리트 컴퍼니 리미티드 | 반도체 웨이퍼의 가고정제 및 그것을 이용한 반도체 장치의 제조 방법 |
KR20100134491A (ko) | 2009-06-15 | 2010-12-23 | 스미토모 베이클리트 컴퍼니 리미티드 | 반도체 웨이퍼의 가고정제 및 그것을 이용한 반도체 장치의 제조 방법 |
US8343300B2 (en) | 2009-12-23 | 2013-01-01 | Suss Microtec Lithography, Gmbh | Automated thermal slide debonder |
JP5651344B2 (ja) | 2010-02-04 | 2015-01-14 | 日東電工株式会社 | 熱伝導性両面粘着シート |
KR20120132624A (ko) | 2010-02-12 | 2012-12-06 | 다우 코닝 코포레이션 | 반도체 가공을 위한 임시 웨이퍼 접합 방법 |
JP2011168663A (ja) | 2010-02-17 | 2011-09-01 | Sumitomo Bakelite Co Ltd | 有機基板の仮固定剤及びそれを用いた半導体装置の製造方法 |
US7883991B1 (en) | 2010-02-18 | 2011-02-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Temporary carrier bonding and detaching processes |
JP6124111B2 (ja) | 2010-02-26 | 2017-05-10 | エルジー・ケム・リミテッド | 光学部材保護フィルム、光学部材、及び、液晶表示装置 |
US8852391B2 (en) | 2010-06-21 | 2014-10-07 | Brewer Science Inc. | Method and apparatus for removing a reversibly mounted device wafer from a carrier substrate |
US8461017B2 (en) | 2010-07-19 | 2013-06-11 | Soitec | Methods of forming bonded semiconductor structures using a temporary carrier having a weakened ion implant region for subsequent separation along the weakened region |
US9263314B2 (en) | 2010-08-06 | 2016-02-16 | Brewer Science Inc. | Multiple bonding layers for thin-wafer handling |
EP2622010A4 (en) * | 2010-09-29 | 2015-08-19 | Dow Global Technologies Llc | AQUEOUS DISPERSIONS DISENSITIZED OF THERMOPLASTIC POLYMERS |
KR20120082129A (ko) * | 2011-01-13 | 2012-07-23 | 도레이첨단소재 주식회사 | 전자부품 제조용 점착테이프 |
DE102011079687A1 (de) | 2011-07-22 | 2013-01-24 | Wacker Chemie Ag | Temporäre Verklebung von chemisch ähnlichen Substraten |
US8696864B2 (en) | 2012-01-26 | 2014-04-15 | Promerus, Llc | Room temperature debonding composition, method and stack |
EP2828883B1 (en) | 2012-03-20 | 2019-07-31 | 3M Innovative Properties Company | Laminate body and method of making the same for temporary substrate support |
CN104936628B (zh) * | 2012-11-21 | 2019-03-01 | 波士顿科学国际有限公司 | 用于医疗器械的离子亲水性聚合物涂层 |
-
2013
- 2013-10-22 US US14/060,185 patent/US9269623B2/en active Active
- 2013-10-23 JP JP2013219705A patent/JP6275993B2/ja active Active
- 2013-10-24 TW TW102138409A patent/TWI531012B/zh active
- 2013-10-25 KR KR1020130127934A patent/KR101505875B1/ko active IP Right Grant
- 2013-10-25 EP EP13190207.4A patent/EP2725605B1/en active Active
- 2013-10-25 CN CN201310717281.8A patent/CN103779255B/zh active Active
-
2016
- 2016-01-12 US US14/993,123 patent/US9493686B2/en active Active
- 2016-10-12 US US15/291,539 patent/US9818636B2/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI586725B (zh) * | 2015-04-10 | 2017-06-11 | 羅門哈斯電子材料有限公司 | 增韌芳基環丁烯聚合物 |
Also Published As
Publication number | Publication date |
---|---|
US20140117504A1 (en) | 2014-05-01 |
US9818636B2 (en) | 2017-11-14 |
TWI531012B (zh) | 2016-04-21 |
EP2725605B1 (en) | 2016-07-13 |
CN103779255A (zh) | 2014-05-07 |
US9493686B2 (en) | 2016-11-15 |
US20160122602A1 (en) | 2016-05-05 |
EP2725605A3 (en) | 2015-08-26 |
JP2014150239A (ja) | 2014-08-21 |
JP6275993B2 (ja) | 2018-02-07 |
KR20140052905A (ko) | 2014-05-07 |
US9269623B2 (en) | 2016-02-23 |
CN103779255B (zh) | 2016-06-29 |
EP2725605A2 (en) | 2014-04-30 |
KR101505875B1 (ko) | 2015-03-25 |
US20170032996A1 (en) | 2017-02-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI531012B (zh) | 暫時性鍵結 | |
JP6510795B2 (ja) | 一時的な結合 | |
EP2362970B1 (en) | Cyclic olefin compositions for temporary wafer bonding | |
TWI510573B (zh) | 黏著促進劑 | |
TWI619790B (zh) | 暫時性黏合 | |
US20140117503A1 (en) | Ephemeral bonding | |
US10867830B2 (en) | Room temperature debondable and thermally curable compositions | |
JP2022141031A (ja) | 接着剤組成物及び積層体 |