SG10201610832YA - Article transport facility - Google Patents

Article transport facility

Info

Publication number
SG10201610832YA
SG10201610832YA SG10201610832YA SG10201610832YA SG10201610832YA SG 10201610832Y A SG10201610832Y A SG 10201610832YA SG 10201610832Y A SG10201610832Y A SG 10201610832YA SG 10201610832Y A SG10201610832Y A SG 10201610832YA SG 10201610832Y A SG10201610832Y A SG 10201610832YA
Authority
SG
Singapore
Prior art keywords
article transport
transport facility
facility
article
transport
Prior art date
Application number
SG10201610832YA
Inventor
Kinugawa Tomotaka
Nishikawa Tadashi
Original Assignee
Daifuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Kk filed Critical Daifuku Kk
Publication of SG10201610832YA publication Critical patent/SG10201610832YA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02—Control of position or course in two dimensions
    • G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0212—Control of position or course in two dimensions specially adapted to land vehicles with means for defining a desired trajectory
    • G05D1/0223—Control of position or course in two dimensions specially adapted to land vehicles with means for defining a desired trajectory involving speed control of the vehicle
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/02—Control or detection
    • B65G2203/0266—Control or detection relating to the load carrier(s)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04—Detection means
    • B65G2203/042—Sensors

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Warehouses Or Storage Devices (AREA)
SG10201610832YA 2015-12-28 2016-12-23 Article transport facility SG10201610832YA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015256532A JP2017120510A (en) 2015-12-28 2015-12-28 Article conveyance facility

Publications (1)

Publication Number Publication Date
SG10201610832YA true SG10201610832YA (en) 2017-07-28

Family

ID=59087734

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201610832YA SG10201610832YA (en) 2015-12-28 2016-12-23 Article transport facility

Country Status (6)

Country Link
US (1) US9932175B2 (en)
JP (1) JP2017120510A (en)
KR (1) KR20170077823A (en)
CN (1) CN106927211A (en)
SG (1) SG10201610832YA (en)
TW (1) TWI702178B (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10543988B2 (en) * 2016-04-29 2020-01-28 TricornTech Taiwan Real-time mobile carrier system for facility monitoring and control
JP6593316B2 (en) * 2016-12-15 2019-10-23 株式会社ダイフク Goods transport vehicle
JP6963908B2 (en) * 2017-05-09 2021-11-10 株式会社ダイフク Goods carrier
JP6849074B2 (en) * 2017-08-16 2021-03-24 村田機械株式会社 Control method for transport system and ceiling transport vehicle
JP7006050B2 (en) * 2017-09-08 2022-01-24 株式会社ダイフク Inspection system
CN108909525B (en) * 2018-05-28 2020-12-11 华中农业大学 Wireless limiting control system and method for traction type mountain rail transportation device
NO345059B1 (en) * 2018-06-12 2020-09-14 Autostore Tech As Safety device for a delivery vehicle
JP6844588B2 (en) * 2018-06-26 2021-03-17 株式会社ダイフク Goods carrier
JP7305258B2 (en) * 2018-07-18 2023-07-10 株式会社ディスコ Conveyor system
JP7040637B2 (en) * 2018-10-29 2022-03-23 村田機械株式会社 Ceiling vehicle, ceiling vehicle system, and obstacle detection method
KR102158838B1 (en) * 2019-03-05 2020-09-22 세메스 주식회사 Semiconductor manufacturing facility and method of controlling operation of the same
JP7099367B2 (en) * 2019-03-06 2022-07-12 株式会社ダイフク Inspection system
TWI685459B (en) * 2019-03-29 2020-02-21 鴻勁精密股份有限公司 Carrying unit and its applied electronic component operation equipment
KR102326017B1 (en) * 2019-12-30 2021-11-15 세메스 주식회사 Transfer apparatus and transfer method
US20210247774A1 (en) * 2020-02-10 2021-08-12 Shuhei Hotta Transport system and transport method
TWI733593B (en) 2020-04-28 2021-07-11 盟立自動化股份有限公司 Anti-collision control method and rail car control system
JP2022012369A (en) * 2020-07-01 2022-01-17 株式会社豊田自動織機 Industrial vehicle
CN112319654B (en) * 2020-10-27 2021-10-22 北京特种机械研究所 Mechanical guide head for AGV navigation and guiding device using same
KR20220055779A (en) * 2020-10-27 2022-05-04 세메스 주식회사 Apparatus for controlling drive of transport vehicle in article transport system and method thereof
KR102459085B1 (en) 2021-04-09 2022-10-26 주식회사 에스에프에이 Junction Controller for Transfer System and Driving Method Thereof, and Transfer System

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000214928A (en) 1999-01-22 2000-08-04 Shinko Electric Co Ltd Automated guided vehicle
JP2000235483A (en) * 1999-02-16 2000-08-29 Nec Gumma Ltd Information processor
JP2004094298A (en) * 2002-08-29 2004-03-25 Daifuku Co Ltd Transport device using self-propelled vehicle
JP3961478B2 (en) * 2002-12-27 2007-08-22 オムロン株式会社 Programmable controller unit and automatic memory recovery method
JP2005352855A (en) * 2004-06-11 2005-12-22 Mazda Motor Corp Production line system
JP4533787B2 (en) * 2005-04-11 2010-09-01 フィグラ株式会社 Work robot
JP4172465B2 (en) * 2005-05-09 2008-10-29 村田機械株式会社 Conveyor cart system
TW200711970A (en) * 2005-09-16 2007-04-01 Fortrend Taiwan Scient Corp Mask box transporting vehicle
US7920962B2 (en) * 2006-06-19 2011-04-05 Kiva Systems, Inc. System and method for coordinating movement of mobile drive units
JP4306723B2 (en) * 2006-12-15 2009-08-05 村田機械株式会社 Conveyor cart system
JP5312367B2 (en) * 2010-02-12 2013-10-09 村田機械株式会社 Traveling cart system
US8509982B2 (en) * 2010-10-05 2013-08-13 Google Inc. Zone driving
CN102710619B (en) * 2012-05-21 2015-06-10 福州博远无线网络科技有限公司 Method for realizing one-key update of resource bundles of PC terminal and WEB terminal
JP6110119B2 (en) * 2012-11-30 2017-04-05 株式会社日立産機システム Automatic carrier and display control method of automatic carrier
JP5928402B2 (en) * 2013-04-19 2016-06-01 株式会社ダイフク Traveling vehicle control system
US9909898B2 (en) * 2013-04-26 2018-03-06 Mitsubishi Electric Corporation In-vehicle device, information distribution server, and facility information display method
JP6393523B2 (en) * 2014-06-04 2018-09-19 北陽電機株式会社 Laser sensor and automatic transfer device

Also Published As

Publication number Publication date
TW201726523A (en) 2017-08-01
JP2017120510A (en) 2017-07-06
US20170183154A1 (en) 2017-06-29
TWI702178B (en) 2020-08-21
US9932175B2 (en) 2018-04-03
KR20170077823A (en) 2017-07-06
CN106927211A (en) 2017-07-07

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