KR101341427B1 - One body type evaporation source and thin layers deposition apparatus for flat panel display having the same - Google Patents

Abstract

An integrated evaporation source and a substrate deposition apparatus for a flat panel display device having the same are disclosed. An integrated evaporation source according to an embodiment of the present invention, the cabinet (cabinet) to form an appearance; A crucible coupled to one side of the cabinet, the vapor deposition material being deposited on the surface of the substrate while being evaporated; A head body connected to the crucible in the cabinet and having a heating wire for heating the crucible integrally with the outer wall; And a plurality of nozzles, one end of which is connected to the head body and the other end of which is disposed to be exposed to the surface of the cabinet to spray the evaporated deposition material out of the cabinet.

Description

Integrated body evaporation source and substrate deposition apparatus for flat panel display element having the same {One body type evaporation source and thin layers deposition apparatus for flat panel display having the same}

The present invention relates to an integrated evaporation source and a substrate deposition apparatus for a flat panel display device having the same, and more particularly, it is possible to reduce the occurrence of temperature deviation that may occur at every use, thereby preventing the occurrence of hole clogging. Not only can the same process be performed consistently, but also the operation rate of the equipment can be improved, and the handling of assembly or maintenance is much more convenient than in the past, and it is possible to prevent damage to peripheral components during handling. An integrated evaporation source and a substrate deposition apparatus for a flat panel display device having the same.

As a result of the rapid development of information and communication technology and the expansion of the market, a flat panel display is attracting attention as a display device.

Such flat panel display devices include liquid crystal display devices, plasma display panels, and organic light emitting diodes.

Among these organic electroluminescent devices, for example, OLEDs have very good advantages such as high response speed, lower power consumption than conventional LCD, light weight, no need for a separate backlight device, And has been attracting attention as a next generation display device.

Such an organic electroluminescent device is a principle in which an anode film, an organic thin film, and a cathode film are sequentially formed on a substrate, and a voltage is applied between the anode and the cathode to form a proper energy difference in the organic thin film and emit light by itself.

In other words, the injected electrons and holes are recombined, and the excitation energy generated is generated by light. At this time, since the wavelength of light generated according to the amount of the dopant of the organic material can be controlled, full color can be realized.

1 is a structural diagram of an organic light emitting display device.

As shown in this figure, an organic electroluminescent device includes an anode, a hole injection layer, a hole transfer layer, an emitting layer, a hole blocking layer, an electron injection layer, a cathode, and the like are stacked in this order.

In this structure, ITO (Indium Tin Oxide), which has small surface resistance and good transparency, is mainly used as the anode. The organic thin film is composed of a multilayer of a hole injecting layer, a hole transporting layer, a light emitting layer, a hole blocking layer, an electron transporting layer, and an electron injecting layer in order to increase the luminous efficiency. Organic materials used as the light emitting layer include Alq3, TPD, PBD, m-MTDATA, and TCTA. As the cathode, a LiF-Al metal film is used. And since the organic thin film is very weak to moisture and oxygen in the air, a sealing film for sealing is formed at the top to increase the lifetime of the device.

1, the organic electroluminescent device includes an anode, a cathode, and a light emitting layer interposed between the anode and the cathode. When the organic electroluminescent device is driven, holes are injected into the light emitting layer from the anode, Is injected into the light emitting layer from the cathode. The holes and electrons injected into the light emitting layer are combined in the light emitting layer to generate excitons, and the excitons emit light while transitioning from the excited state to the ground state.

Such an organic electroluminescent device can be classified into a monochromatic or full color organic electroluminescent device according to the color to be realized. The full-color organic electroluminescent device includes red (R), green (G) and And a light emitting layer patterned for each blue (B) color is provided to realize a full color.

On the other hand, a substrate deposition apparatus for a flat panel display device is provided for depositing the light emitting layer (organic material) and the electrode layer (inorganic material) in order to make the organic electroluminescent device shown in FIG.

A substrate deposition apparatus for a flat panel display device, to which a thermal evaporation method is applied, is provided with an evaporation source as a deposition source for injecting a deposition material toward a substrate.

Conventional evaporation sources include a crucible containing a deposition material deposited on a surface of a substrate while being evaporated, and a hot wire assembly provided with a heating wire for heating the crucible. Thus, after assembling the crucible to the hot wire assembly, when electricity is supplied to the hot wire, the heat generated by the hot wire is transferred to the crucible by indirect heating, so that the evaporation material is evaporated, and then, at the end of the crucible. It is ejected through the evaporation outlet formed.

However, in the conventional evaporation source to which the indirect heating method is applied, since the crucible is attached to and detached from the hot wire assembly, the temperature variation occurs every time the crucible is assembled and used after assembly. There is a problem.

As such, when temperature variation occurs each time the crucible is assembled, it is difficult not only to perform the same process uniformly, but also to obstruct the hole of the evaporation outlet. Especially, the larger the size of the evaporation source, the larger the crucible is assembled. In addition, there is a high risk of breakage of the hot wire and the fixing parts for fixing the hot wire during maintenance, so a new alternative is required in consideration of this general matter.

Korea Patent Office Application No. 10-2007-0013776

Therefore, the technical problem to be achieved by the present invention is to reduce the occurrence of temperature deviation that can be caused in each use, to prevent the blockage of the hole to occur, as well as to perform the same process in a constant operation rate of equipment To provide an integrated evaporation source and a substrate deposition apparatus for a flat panel display device, which can be improved, and which is more convenient than the conventional assembly or maintenance handling operation, and can prevent the peripheral parts from being damaged during the handling operation. will be.

According to an aspect of the invention, the cabinet (cabinet) to form an appearance; A crucible coupled to one side of the cabinet, the vapor deposition material being deposited on the surface of the substrate while being evaporated; A head body connected to the crucible in the cabinet and having a heating wire for heating the crucible integrally with an outer wall; And a plurality of nozzles, one end of which is connected to the head body and the other end of which is disposed to be exposed to the surface of the cabinet to spray the evaporated deposition material to the outside of the cabinet. May be provided.

The hot wire may be arranged in a zigzag shape on the entire outer wall of the head body.

It may further include a plurality of hot wire clamp coupled to the head body to clamp the hot wire.

The hot wire clamp, the boss is provided to protrude from the outer surface of the head body; A hot wire guide holder inserted into the boss and guided by the hot wire at a circumferential surface thereof; And a fastening member which is fastened to the boss through the hot wire guide holder and prevents the deviation of the seat of the hot wire guide holder.

The hot wire guide holder may have a janggu shape, the hot wire guide roller may be made of a ceramic material.

The hot wire clamp may further include a fixing member inserted into the boss to be fixed to the fastening member fastened in the boss to prevent deviation of the fastening member.

The apparatus may further include first and second reflectors disposed in the cabinet and arranged side by side in the longitudinal direction of the head body at both sides of the head body to reflect heat generated from the heating wire.

The first reflector may further include a nozzle seat groove in which the nozzle is disposed.

The apparatus may further include a cooler provided in the cabinet adjacent to the nozzle.

The cabinet may further include a crucible coupling duct provided on an opposite side of a surface on which the nozzle is disposed to which the crucible is detachably coupled.

The surface where the crucible and the crucible coupling duct are coupled may form an inclined surface.

The crucible includes: a body portion in which the evaporation material is accommodated; And an inclined head portion formed at one end of the body portion and inclined at a predetermined angle with respect to the longitudinal direction of the body portion.

First and second flange parts may be respectively formed in an area where the crucible and the crucible coupling duct are coupled, and the first and second flange parts may be formed when the first and second flange parts are coupled to each other. The seal can be sealed.

It may further include a door connected to the cabinet for opening and closing the crucible.

The door may be a rotary door that opens and closes the crucible while being rotated by a hinge provided between the cabinet.

The door comprises a heating jacket for heating the crucible; And it may further include a cooling jacket (heating jacket) for cooling the crucible.

The cabinet may include a plurality of unit cabinets connected along a length direction; An upper body disposed above the unit cabinets; A lower body disposed under the unit cabinets; And it may include a support frame for supporting the lower body.

According to another aspect of the present invention, there is provided a process chamber comprising: a processing chamber in which a deposition process for a substrate proceeds; And an integrated evaporation source provided at one side of the process chamber to inject a deposition material toward the substrate, wherein the integrated evaporation source comprises: a cabinet defining an appearance; A crucible coupled to one side of the cabinet and having the deposition material received therein; A head body connected to the crucible in the cabinet and having a heating wire for heating the crucible integrally with an outer wall; And a plurality of nozzles having one end connected to the head body and the other end exposed to the surface of the cabinet to inject the evaporated deposition material to the outside of the cabinet. Substrate deposition apparatus for may be provided.

The heating wire may be arranged in a zigzag shape on the entire outer wall of the head body, and the integrated evaporation source may further include a plurality of heating wire clamps coupled to the head body to clamp the heating wire.

The hot wire clamp, the boss is provided to protrude from the outer surface of the head body; A hot wire guide holder inserted into the boss and of which a hot wire is guided at a circumferential surface thereof; A fastening member which is fastened to the boss through the hot wire guide holder to prevent deviation of the hot wire guide holder; And a fixing member inserted into the boss to be fixed to the fastening member fastened in the boss to prevent deviation of the fastening member.

The unitary evaporation source may include: first and second reflectors disposed in the cabinet and arranged side by side along the longitudinal direction of the head body at both sides of the head body to reflect heat generated from the heating wire; And a cooler provided in the cabinet adjacent to the nozzle.

The integrated evaporation source may further include a crucible coupling duct provided on an opposite side of a surface of the cabinet in which the nozzle is disposed so that the crucible is detachably coupled.

The surface where the crucible and the crucible coupling duct are coupled may form an inclined surface.

The integrated evaporation source may further include a rotary door that opens and closes the crucible while being rotated by a hinge provided between the cabinet and the cabinet.

The rotatable door may comprise a heating jacket for heating the crucible; And it may further include a cooling jacket (heating jacket) for cooling the crucible.

The substrate may be a substrate for organic light emitting diodes.

According to the present invention, it is possible to reduce the occurrence of temperature deviation that can be caused at every use, to prevent the occurrence of hole clogging phenomenon, as well as to perform the same process to improve the operation rate of the equipment, In addition, handling of assembly or maintenance is much more convenient than in the prior art, and it is possible to prevent damage to peripheral components during handling.

1 is a structural view of an organic electroluminescent device.
2 is a schematic structural diagram of a substrate deposition apparatus for a flat panel display device according to an embodiment of the present invention.
3 is a front perspective view of the unitary evaporation source applied to FIG. 2.
FIG. 4 is a schematic cross-sectional view of the structure excluding the door along the line AA of FIG. 3.
5 is a partially enlarged view of the head body region.
6 is an exploded view of the hot wire clamp.
7 is a rear perspective view of the unitary evaporation source.
8 is a perspective view of the crucible.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

2 is a schematic structural diagram of a substrate deposition apparatus for a flat panel display device according to an embodiment of the present invention.

Prior to describing the drawings, the flat panel display device includes a liquid crystal display, a plasma display panel, an organic light emitting diode, etc. Hereinafter, a flat panel display device is referred to as an organic electric field And a substrate for a light emitting device (OLED).

Referring to FIG. 2, a substrate deposition apparatus for a flat panel display device according to an exemplary embodiment of the present invention may include a process chamber 1 in which a deposition process is performed on a substrate, and provided at one side of the process chamber 1 toward the substrate. An integrated evaporation source 100 that sprays the deposition material.

The process chamber 1 is a place where a deposition process for a substrate is performed. That is, a place for depositing a light emitting layer (organic material) and an electrode layer (inorganic material) is formed for manufacturing the organic electroluminescent device shown in FIG. During the deposition process, the interior of the process chamber 1 may maintain a vacuum atmosphere.

The integrated evaporation source 100 is provided on one side of the process chamber 1 to spray the deposition material toward the substrate.

As will be described later in detail, since the integrated evaporation source 100 of the present embodiment discloses an integrated structure that does not require a separate assembly, it is possible to reduce the occurrence of temperature deviation that may occur at every use.

Therefore, it is possible to prevent the blockage of the holes, which has been generated by using the prefabricated evaporation source (not shown) of the prior art, and to perform the same process constantly, thereby improving the operation rate of the equipment. You can. In addition, handling of assembly or maintenance is much more convenient than in the prior art, and it is possible to prevent damage to peripheral components during handling.

Hereinafter, the integrated evaporation source 100 will be described in detail with reference to FIGS. 3 to 8.

FIG. 3 is a front perspective view of the integrated evaporation source applied to FIG. 2, FIG. 4 is a schematic cross-sectional structural view excluding a door along the AA line of FIG. 3, FIG. 5 is a partially enlarged view of the head body region, and FIG. 6 is An exploded view of the hot wire clamp, FIG. 7 is a back perspective view of the integral evaporation source, and FIG. 8 is a perspective view of the crucible.

Referring to these drawings, the integrated evaporation source 100 of the present embodiment is coupled to one side of the cabinet 110 and the cabinet 110, and the deposition material deposited on the surface of the substrate while being evaporated is accommodated therein. The head body 140 is connected to the crucible 120 and the crucible 120 in the cabinet 110, and the heating wire 130 for heating the crucible 120 is integrally provided on the outer wall. and a plurality of nozzles 150, one end of which is connected to the head body 140 and the other end of which is exposed to the surface of the cabinet 110 to spray the evaporated deposition material to the outside of the cabinet 110. nozzle).

The cabinet 110 forms the exterior of the unitary evaporation source 100 of this embodiment. When the integrated evaporation source 100 of the present embodiment proceeds with the deposition process for the horizontal substrate, the cabinet 110 is disposed in a horizontal state in the process chamber 1 (see FIG. 2), and when the deposition process for the vertical substrate is performed. The cabinet 110 may be disposed in a vertical state in the process chamber 1.

The cabinet 110 includes a plurality of unit cabinets 111 connected along a length direction, an upper body 112 disposed above the unit cabinets 111, and a lower body disposed below the unit cabinets 111. 113 and a support frame 114 for supporting the lower body 113.

The integrated evaporation source 100 of the present embodiment may be designed to correspond to the size of the substrate to be deposited, that is, the size of the process chamber 1 (see FIG. 2).

Therefore, when manufacturing a single cabinet 110 by connecting a plurality of unit cabinets 111 along the longitudinal direction as in this embodiment, there is an advantage that can be used properly from a small size to a large size.

Of course, such matters are only one example, and the scope of the present invention is not limited thereto. That is, those applied to a process chamber of a small size and those applied to a process chamber of a large size, may be individually manufactured and used. The structure of the unit cabinets 111 may be all the same.

The upper body 112 is provided with a ring portion 115 to be spaced apart from each other. The support frame 114 may be inclined on both sides of the lower body 113 to support the lower body 113. The cabinet 110 having such a structure may be made of a metal material having rigidity.

The crucible 120 is a tubular structure that is coupled to one side of the cabinet 110, and a deposition material that is evaporated and deposited on the surface of the substrate is accommodated therein. The deposition material contained in the crucible 120 may be a solid shape.

Referring to the structure of the crucible 120 with reference to Figure 8, the crucible 120 is formed in the body portion 121 and the one end of the body portion 121 is the deposition material is received therein, It includes an inclined head portion 122 is formed to be inclined at a predetermined angle with respect to the longitudinal direction of the body portion 121.

The inclined head portion 122 is formed on the crucible 120 to facilitate detachably coupling the crucible 120 to the cabinet 110. In addition, since the inclined head 122 is formed on the crucible 120, the evaporated material can be smoothly moved.

Looking at this, the cabinet 110 is provided with a flexible coupling duct 116 detachably coupled to the removable 120 on the opposite side of the surface on which the nozzle 150 is disposed, the flexible coupling duct The crucible 120 is coupled to 116.

At this time, the surface to which the crucible 120 and the crucible coupling duct 116 are coupled forms a sloped surface as shown in FIG. 4. To this end, a first flange portion 117 and a second flange portion 123 are formed in a region where the crucible 120 and the crucible coupling duct 116 are coupled.

Accordingly, when the first and second flange portions 117 and 123 are inclined to each other and the first and second flange portions 117 and 123 are coupled using bolts, the crucible 120 is secured to the crucible coupling duct 116. It can be easily combined in the photo state.

Of course, when the first and second flange portions 117 and 123 are coupled to each other, the first and second flange portions 117 and 123 may be sealed, for example, a gasket or the like may be interposed therebetween. You can keep it.

The head body 140 is a box type structure having an empty interior connected to the crucible 120 in the cabinet 110.

The heating wire 130 is disposed on the outer wall of the head body 140. The heating wire 130 is heated when electricity is applied to heat the crucible 120 while being heated, and thus, the deposition material in the crucible 120 may be evaporated while being heated.

The hot wire 130 is disposed in a zigzag shape in the entire area of the outer wall of the head body 140. In the present embodiment, since the head body 140 has a rectangular cross-sectional structure, the heating wire 130 is arranged in a zigzag shape on all four wall surfaces of the head body 140 to increase the thermal efficiency.

A plurality of hot wire clamps 135 for clamping the hot wire 130 are coupled to the outer wall of the head body 140 so that the hot wire 130 may be arranged in a zigzag shape on the outer wall of the head body 140.

The hot wire clamp 135 includes a boss 135a provided to protrude from the outer surface of the head body 140, and a hot wire guide holder 135b inserted into the boss 135a and guided by the hot wire 130 at a circumferential surface thereof. And a fastening member 135c that is fastened to the boss 135a through the hot wire guide holder 135b and prevents the departure of the hot wire guide holder 135b.

The fastening member 135c may be a bolt or a pin. In the latter case, the seat of the fastening member 135c is fixed by being fastened to the fastening member 135c which is inserted through the boss 135a and fastened in the boss 135a. A fixing member (not shown) for preventing the release may be further used.

In the present embodiment, the hot wire guide holder 135b may have a roller or a long gear shape. Therefore, when the heating wire 130 is arranged in a zigzag shape, the heating wire 130 can be easily guided without disconnection. The hot wire 130 may be made of a ceramic material resistant to heat deformation.

Referring to FIG. 4, first and second sides of the head body 140 in the cabinet 110 are arranged side by side in the longitudinal direction of the head body 140 to reflect heat generated from the heating wire 130. Reflectors 161 and 162 are disposed.

A nozzle seat groove 161a in which the nozzle 150 is disposed is formed in the first reflector 161 adjacent to the nozzle 150 among the first and second reflectors 161 and 162.

A plurality of nozzles 150, one end is connected to the head body 140 and the other end is disposed to be exposed to the surface of the cabinet 110 to form a place for spraying the evaporated deposition material to the outside of the cabinet 110. .

As shown in FIG. 2, the plurality of nozzles 150 may be spaced apart in a row on the cabinet 110.

As shown in FIG. 4, a cooler 170 is provided around the nozzles 150. The cooler 170 may be coupled to the cabinet 110, and air or water cooling may be applied.

3 and 7, a door 180 for opening and closing the crucible 120 is provided at one side of the cabinet 110.

In this embodiment, the door 180 may be applied as a rotary door 180 that opens and closes the crucible 120 while being rotated by a hinge (not shown) provided between the cabinet 110 and the cabinet 110. The rotary door 180 is provided with a door handle 181.

A heating jacket 191 for heating the crucible 120 and a cooling jacket 192 for cooling the crucible 120 are coupled to the rotary door 180.

The heating jacket 191 serves to heat the crucible 120 together with the heating wire 130 described above, and the cooling jacket 192 cools the temperature of the crucible 120 or maintains the equipment. When doing so, it serves to cool the crucible 120.

The heating jacket 191 may be provided in the same structure as the heating wire 130 disposed in a zigzag shape on the outer wall of the head body 140 described above. In addition, the cooling jacket 192 may achieve a cooling action by the refrigerant circulated by the refrigerant pipe (not shown).

The operation of the substrate deposition apparatus for flat panel display devices having such a configuration will be briefly described below.

Power is supplied to the hot wire 130 of the integrated evaporation source 100 to proceed with the deposition process on the substrate.

When the heating wire 130 generates heat by, for example, several hundred degrees or more by the supplied power, the heat is transferred to the crucible 120 to heat the crucible 120. In this case, the heating jacket 191 may also be operated together to cooperate in heating the crucible 120.

When the crucible 120 is heated, the solid deposition material contained in the crucible 120 is evaporated and sprayed to the outside of the cabinet 110 through the plurality of nozzles 150 via the head body 140. This allows the surface of the substrate to be deposited.

At this time, in the present embodiment, since the integrated evaporation source 100 is applied differently than the conventional method, it is possible to reduce the occurrence of temperature deviation that may be caused in every use, so that the hole clogging phenomenon, in particular, the clogging of the nozzle 150 occurs. Not only can this be avoided, but the same process can be performed consistently, improving the utilization of the equipment.

In addition, assembling or maintenance handling work is much more convenient than the conventional as well as to prevent damage to the peripheral parts during the handling work.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

1: process chamber 100: integral evaporation source
110: cabinet 111: unit cabinet
112: upper body 113: lower body
114: support frame 116: crucible coupling duct
117: first flange portion 120: crucible
121: body portion 122: inclined head portion
123: second flange portion 130: heating wire
135: hot wire clamp 135a: boss
135b: hot wire guide holder 135c: fastening member
140: head body 150: nozzle
161,162: first and second reflector 170: cooler
180: revolving door 191: heating jacket
192: Cooling Jacket

Claims (26)

A cabinet forming an appearance;
A crucible coupled to one side of the cabinet, the vapor deposition material being deposited on the surface of the substrate while being evaporated;
A head body connected to the crucible in the cabinet and having a heating wire for heating the crucible integrally with an outer wall;
A plurality of nozzles, one end of which is connected to the head body and the other end of which is disposed to be exposed to the surface of the cabinet to spray the vaporized deposition material out of the cabinet; And
And a crucible coupling duct provided on an opposite side of a surface of the cabinet in which the nozzle is disposed, the crucible coupling duct detachably coupled thereto. The method of claim 1,
And the hot wire is arranged in a zigzag shape in the entire outer wall of the head body. The method of claim 1,
And a plurality of hot wire clamps coupled to the head body to clamp the hot wires. The method of claim 3,
The hot wire clamp,
A boss provided to protrude from an outer surface of the head body;
A hot wire guide holder inserted into the boss and guided by the hot wire at a circumferential surface thereof; And
And a fastening member which is fastened to the boss through the hot wire guide holder and prevents a deviation from the seat of the hot wire guide holder. 5. The method of claim 4,
The hot wire guide holder has a janggu shape,
And the hot wire guide roller is made of a ceramic material. 5. The method of claim 4,
The hot wire clamp,
And a fixing member inserted into the boss and fixed to the fastening member fastened in the boss to prevent the fastening of the fastening member. The method of claim 1,
A first and second reflectors disposed in the cabinet and arranged side by side in the longitudinal direction of the head body at both sides of the head body to reflect heat generated from the heating wire. Integral evaporation source. The method of claim 7, wherein
The first reflector is a unitary evaporation source, characterized in that the nozzle seat groove is further formed. The method of claim 1,
And a cooler provided in the cabinet adjacent to the nozzle. delete The method of claim 1,
And a surface on which the crucible and the crucible coupling duct are coupled to form an inclined surface. 12. The method of claim 11,
The above-
A body portion in which the deposition material is accommodated; And
And an inclined head portion formed at one end of the body portion and inclined at a predetermined angle with respect to the longitudinal direction of the body portion. The method of claim 1,
First and second flange portions are respectively formed in regions where the crucible and the crucible coupling duct are coupled.
And the sealing portion is sealed between the first and second flange portions when the first and second flange portions are coupled to each other. The method of claim 1,
And a door connected to the cabinet to open and close the crucible. 15. The method of claim 14,
And the door is a rotary door that opens and closes the crucible while being rotated by a hinge provided between the cabinet. 15. The method of claim 14,
The door
A heating jacket for heating the crucible; And
And a cooling jacket for cooling said crucible. The method of claim 1,
In the cabinet,
A plurality of unit cabinets connected along the length direction;
An upper body disposed above the unit cabinets;
A lower body disposed under the unit cabinets; And
And a support frame for supporting said lower body. A process chamber in which a deposition process is performed on a substrate; And
An integrated evaporation source provided on one side of the process chamber to inject a deposition material toward the substrate,
The integrated evaporation source,
A cabinet forming an appearance;
A crucible coupled to one side of the cabinet and having the deposition material received therein;
A head body connected to the crucible in the cabinet and having a heating wire for heating the crucible integrally with an outer wall;
A plurality of nozzles, one end of which is connected to the head body and the other end of which is disposed to be exposed to the surface of the cabinet to spray the vaporized deposition material out of the cabinet; And
And a crucible coupling duct provided on an opposite side of a surface of the cabinet on which the nozzle is disposed, the crucible coupling duct detachably coupled thereto. 19. The method of claim 18,
The heating wire is arranged in a zigzag shape on the entire outer wall of the head body,
The integrated evaporation source further comprises a plurality of hot wire clamps coupled to the head body to clamp the hot wires. 20. The method of claim 19,
The hot wire clamp,
A boss provided to protrude from an outer surface of the head body;
A hot wire guide holder inserted into the boss and of which a hot wire is guided at a circumferential surface thereof;
A fastening member which is fastened to the boss through the hot wire guide holder to prevent deviation of the hot wire guide holder; And
And a fixing member inserted into the boss to be fixed to the fastening member fastened in the boss to prevent deviation of the fastening member. 19. The method of claim 18,
The integrated evaporation source,
First and second reflectors disposed in the cabinet and arranged side by side in the longitudinal direction of the head body at both sides of the head body to reflect heat generated from the hot wires; And
And a cooler provided in the cabinet adjacent to the nozzle. delete 19. The method of claim 18,
And a surface on which the crucible and the crucible coupling duct are coupled to each other to form an inclined surface. 19. The method of claim 18,
The integrated evaporation source,
And a rotatable door which opens and closes the crucible while being rotated by a hinge provided between the cabinet and the cabinet. 25. The method of claim 24,
The rotary door,
A heating jacket for heating the crucible; And
And a cooling jacket for cooling the crucible. 19. The method of claim 18,
Wherein the substrate is a substrate for organic light emitting diodes (OLED).

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