KR100972183B1 - Method and device for mounting thin metal plate on frame - Google Patents

Abstract

Each side 11a of the metal thin plate 11 is gripped by a plurality of clamps 27. By pulling out the thin metal plate 11 with this clamp 27 and adjusting the tension force by each clamp, the metal thin plate 11 is hold | maintained in the flat state without distortion or loosening. At the same time, the frame 13 is pressed by the same large force in the opposite direction to the tensile force applied to the metal thin plate 11 and elastically deformed. In this state, the spot metal welder 40 is attached to the frame 13. Weld with and fix it. When the metal thin plate 11 and the frame 13 are opened, the tensile force remaining on the metal thin plate 11 is canceled by the restoring force of the frame 13 so that the frame 13 is pulled by the metal thin plate 11 and deformed. The metal thin plate 11 can be held in the frame 13 without distortion or loosening.

Description

Method and device for mounting thin metal plate on frame

The present invention relates to a thin metal plate having an extremely thin and different rigid area, such as a metal thin film having an opening having a plurality of slits, for example, used in a deposition mask used in a process for manufacturing an organic EL device. The present invention relates to a method and an apparatus for attaching and fixing a frame in a state.

Conventionally, vacuum evaporation is performed to manufacture an organic EL element. As a deposition mask, a metal thin plate having an opening having a plurality of slits is used. In vapor deposition, the vapor deposition mask is attached to a frame having a large rigidity with an opening larger than the opening by a magnet or the like. However, in recent years, when the patterning progresses in miniaturization and the slits formed in the openings become fine and the thickness of the deposition mask itself becomes thin, the vapor deposition mask is merely fixed to the opening by using a magnet or the like. Distortion or loosening occurs, resulting in a problem that slit accuracy cannot be maintained. Therefore, the present applicant has developed a holding jig for holding the deposition mask that can hold the deposition mask in a state where the deposition mask is attached to the frame and pulled the deposition mask in the slit direction of the opening (see Patent Document 1). By using this holding jig, the thin wire portion constituting the slit of the opening can be held in the lengthwise direction, so that the slits can be held in a straight line and at a constant pitch. There is an advantage that finer patterning is possible.

However, since the vapor deposition mask of patent document 1 is formed so that only one opening part may be formed in one vapor deposition mask, there existed a problem that productivity was bad. Therefore, in order to increase productivity, as shown in Fig. 22, it is preferable to use a multi-faced mask 1 having a plurality of openings 2 formed in one deposition mask. 3) and the movable clamp 4 may be gripped, and the movable clamp 4 may be held in the slit direction of the opening 2 as indicated by the arrow. However, in the multi-faced mask 1 having a plurality of openings 2, when both ends are gripped and pulled by the clamps 3 and 4, even though the entire width of the mask is equally pulled out, it is not compared with the openings. Since the rigidity is different in the openings, it has been found that distortion and loosening occur in the openings, so that a desired slit pattern is not obtained, and the positional accuracy of each opening is also deteriorated. For example, in the case of the deposition multifaced mask used in the manufacture of the organic EL element, a total pitch of ± 10 µm or less is required for the position of each opening, but it is difficult to achieve such dimensional accuracy.

Thus, in order to solve this problem, the applicant has already formed the attachment portion 5 on four sides of the multi-faceted mask 1A, which has formed a plurality of openings 2, as shown in FIG. The attachment portion 5 is wound around a winding shaft provided on the frame, and the winding shaft is wound up to pull the multifaceted mask 1A in both directions in a longitudinal and horizontal direction to hold it in a flat state. The multi-faced mask apparatus was developed (refer patent document 2). In this multifaceted mask apparatus, the multifaceted mask 1A is pulled in the vertical and horizontal directions, so that the multifaceted mask 1A can be relatively flat and the slits in each opening can be arranged in parallel. While being attached, there is an advantage that fine patterning is possible.

However, even in the case of the multifaced mask device described in Patent Document 2, when the multifaceted mask is thin and easily distorted, distortion or loosening occurs in the opening, which causes a problem that the desired slit pattern is not obtained. In this multi-faceted mask apparatus, the winding shafts are provided on four sides of the frame, respectively, and the four-sided attachment portions 5 of the multi-faceted mask 1A are wound up, so that the structure is complicated and expensive. There was a problem.

Patent Document 1: Japanese Patent Application Laid-Open No. 2003-68453

Patent Document 2: Japanese Patent Application Laid-Open No. 2003-332056

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and includes a metal thin plate having a region of different stiffness having a plurality of openings having a plurality of slits, such as a multi-faced mask for deposition, without openings or distortions, without distortion or loosening. It is an object of the present invention to provide a method for attaching and fixing a frame to a frame having a simple structure while maintaining a desired dimensional accuracy, and an apparatus used for implementing the method.

The present invention provides a process for placing a thin metal plate on a quadrilateral frame, and at least two mutually opposite sides of the thin metal plate are gripped with a plurality of clamps to apply a tensile force to hold the metal plate. A pressing process in the frame so as to cause an elastic deformation in a direction opposite to the tensile force applied to the metal sheet in a pulling process in a pulled state and an area corresponding to a region in which each clamp exerts a tensile force on the metal sheet; And a pressing step of applying a step, and a step of fixing the metal thin plate in the pulled state to the frame in the pressed state.

The present invention is a method for attaching a thin metal plate to a frame, wherein each of the four sides of the metal sheet is pulled with a clamp in a tensioning step, and each of the four sides of the frame is pressed in a pressing step.

The present invention is a method of attaching a thin metal sheet to a frame, wherein the clamping force is applied to the thin metal sheet so that the pressing force applied to the region corresponding to the region to which the clamp exerts the tensile force is equal. to be.

The present invention is characterized in that the metal thin plate has a plurality of slits and includes a plurality of quadrangular openings arranged side by side, and the plurality of clamps are disposed corresponding to the opening portion and the non-opening portion. Is attached to the frame.

The present invention is characterized in that in the tensioning step, the vicinity of the corner between the two adjacent sides of the metal sheet is gripped by the clamp, and the corner is pulled so that the clamp can move in the direction of each of the two adjacent sides. It is a method of attaching a thin metal plate to the frame.

The present invention relates to a frame attaching device configured to be fixed to a frame having a hexagonal shape while pulling a metal sheet having a hexagonal shape, each of which has a plurality of at least two opposite sides of the frame and the metal sheet disposed thereon. A plurality of plate pulling units and a plurality of frame pressing units provided to be positioned one by one, each plate pulling unit comprises a clamp for holding the metal sheet and a clamp to exert a tensile force on the metal sheet held by the clamp. Each frame pressing unit is adapted to cause elastic deformation in the direction opposite to the tensile force by the clamp in a region of the frame corresponding to the region where the clamp is exerting a tensile force on the metal sheet. A frame pressing member arranged to apply pressure to the frame, and the frame pressing member And a frame pressing member moving means for moving the frame pressing member to apply pressure to the frame.

The plate pulling unit and the frame pressing unit are apparatuses for attaching a metal thin plate to the frame, wherein a plurality of the plate pulling units and the frame pressing unit are provided on each of four sides of the frame and the metal thin plate disposed thereon.

According to the present invention, the plate pulling unit and the frame pressing unit are integrally formed, and the clamp moving unit of the plate pulling unit and the frame pressing member moving unit of the frame pressing unit are provided with a common cylinder device. Is a device for attaching a thin metal plate to the frame, which is connected to move in a direction away from each other and the approaching direction with respect to the clamp and the frame pressing member.

The present invention is an apparatus for attaching a thin metal plate to a frame, wherein the frame pressing member has a support surface on which the frame is placed and supported.

The present invention is characterized in that the metal thin plate has a plurality of slits and includes a plurality of quadrangular openings arranged side by side, and the plurality of clamps are disposed corresponding to the opening portion and the non-opening portion. To the frame.

The present invention is a device for attaching a thin metal plate to a frame, wherein the tensile force applied by the clamp moving means of the plurality of plate pulling units can be adjusted for each plate pulling unit.

According to the present invention, an additional plate pulling unit is provided in the vicinity of a corner between two adjacent sides of the thin metal plate, and the additional plate pulling unit has a clamp for holding the metal thin plate, and the clamp in the direction of two adjacent sides. It is a device for attaching a thin metal plate to the frame, characterized in that it has a clamp moving means for moving.

The present invention provides an additional plate pulling unit comprising: a first base member, a second base member held so as to be movable in the first base member in a direction parallel to the metal thin plate and perpendicular to the direction in which the tensile force is applied; Further comprising a clamp support held in such a manner as to be able to move in parallel to the direction in which the tensile force is applied from the member to the metal sheet, the clamp and the clamp opening / closing mechanism for opening and closing the clamp are held in the clamp support, and the clamp moving means is supported by the clamp support. It is a device for attaching a thin metal plate to the frame, characterized in that connected to the clamp support and the second base member so as to move the tensile force in the direction of the second base member.

The present invention provides an additional plate pulling unit comprising: a base member, a first clamp support held by the base member so as to be able to move in parallel in the direction of the tensile force of the metal sheet, and a parallel to the metal sheet on the first clamp support. And a second clamp support held to move in a direction perpendicular to the direction in which the tensile force is added, the clamp and a clamp opening / closing mechanism for opening and closing the clamp are held in the second clamp support, and the clamp moving means is provided in the first clamp support. It is a device for attaching a thin metal plate to the frame, characterized in that connected to the first clamp support and the base member to move the clamp support in the direction of the tensile force with respect to the base member.

The present invention further provides a clamp support, wherein the additional plate pulling unit has a base member and a clamp support held so as to be movable in parallel with the tensile force direction of the metal sheet on the base member, wherein the clamp is gripped from the clamp support to the clamp. It is held so as to be parallel to a thin metal plate and can be moved in a direction perpendicular to a direction of adding tension, a clamp opening and closing mechanism for opening and closing the clamp is held in the clamp support, and the clamp moving means moves the clamp support to the base member. It is a device for attaching a thin metal plate to the frame, characterized in that connected to the clamp support and the base member so as to move in the tensile force direction.

The present invention provides a process for positioning a thin metal plate on a quadrilateral frame, a tensile process of holding four sides of the thin metal plate with a plurality of clamps and applying a tensile force to pull the thin metal plate; And clamping the metal sheet in the pulled state to the frame in the pressed state. In the tensioning process, the vicinity of the corner between two neighboring sides of the metal sheet is gripped by a clamp. It is a method of attaching a thin metal plate to the frame, characterized in that to pull the corner portion to move in each direction of the opening.

The present invention is a frame attachment device for fixing to the frame of the quadrilateral shape in the state of pulling the quadrilateral metal thin plate, a plurality of installed on each of the four sides of the frame and the metal thin plate disposed thereon A plate pulling unit, each plate pulling unit having a clamp for holding the metal sheet and a clamp moving means for moving the clamp to exert a tensile force on the metal sheet held by the clamp; An additional plate pulling unit is installed in the vicinity of the corner portion between the two sides, and the additional plate pulling unit includes a clamp for holding a metal sheet and a clamp moving means for moving the clamp in each of two adjacent sides. It is a device for attaching a thin metal plate to the frame.

The present invention provides an additional plate pulling unit comprising: a first base member, a second base member held so as to be movable in the first base member in a direction parallel to the metal thin plate and perpendicular to the direction in which the tensile force is applied; Further comprising a clamp support held in such a manner as to be able to move in parallel in the direction of adding tensile force from the member to the metal sheet, the clamp and the clamp opening and closing mechanism for opening and closing the clamp are held in the clamp support, and the clamp moving means is supported by the clamp support. It is a device for attaching a thin metal plate to the frame, characterized in that connected to the clamp support and the second base member so as to move the tensile force in the direction of the second base member.

The present invention provides an additional plate pulling unit comprising: a base member, a first clamp support held by the base member so as to be able to move in parallel in the direction of the tensile force of the metal sheet, and a parallel to the metal sheet on the first clamp support. And a second clamp support held to move in a direction perpendicular to the direction in which the tensile force is added, the clamp and a clamp opening / closing mechanism for opening and closing the clamp are held in the second clamp support, and the clamp moving means is provided in the first clamp support. It is a device for attaching a thin metal plate to the frame, characterized in that connected to the first clamp support and the base member to move the clamp support in the direction of the tensile force with respect to the base member.

The present invention further provides a clamp support, wherein the additional plate pulling unit has a base member and a clamp support held so as to be movable in parallel with the tensile force direction of the metal sheet on the base member, wherein the clamp is gripped by the clamp support. It is held so as to be parallel to a thin metal plate and can be moved in a direction perpendicular to a direction of adding tension, a clamp opening and closing mechanism for opening and closing the clamp is held in the clamp support, and the clamp moving means moves the clamp support to the base member. It is a device for attaching a thin metal plate to the frame, characterized in that connected to the clamp support and the base member so as to move in the tensile force direction.

In the method of attaching the metal thin plate of the present invention to the frame as described above, when fixing the quadrilateral metal thin plate to the frame, each of at least two mutually opposite sides of the metal thin plate is gripped with a plurality of clamps to apply a tensile force. As a result, since the thin metal sheet is in a pulled state, a region in which the rigidity of the thin metal sheet is different can be pulled with a tension suitable for the rigidity of each region. As a result, the thin metal sheet can be kept in a flat state without distortion or loosening, and in the case of having an opening, the opening can be held at a position where desired dimensional accuracy is maintained. For this reason, it can be fixed to a frame using spot welding etc., holding the metal thin plate free from distortion and loosening, and maintaining the openings and the like with desired dimensional accuracy. Moreover, at this time, since the frame is pressed in the direction opposite to the direction of the tensile force applied to the thin metal sheet to generate elastic deformation, the frame has a restoring force in the opposite direction to the pressing force. For this reason, after fixing the thin metal plate to the frame by spot welding or the like, and releasing the thin metal plate and the frame, the restoring force remaining on the frame supports the tensile force remaining on the thin metal plate. As a result, even if the rigidity of the frame is small, the frame is not deformed poorly by the tensile force remaining on the thin metal sheet, or the thin metal sheet is contracted so that the tensile force is reduced. It becomes possible. As a result, even when a frame having a low rigidity and simple structure is used, the metal sheet can be kept in the frame without distortion or loosening, and the opening and the like are held in the desired dimensional accuracy to be fixed. I can hold it.

In carrying out the method according to the present invention, the clamps are arranged on each of the four sides of the metal sheet to pull the metal sheets in both directions, and the four sides of the frame are pressed in both directions. The effect that the metal thin plate can be pulled in a state without further distortion or loosening and fixed to the frame can be obtained.

Even if the clamp force is slightly different from the tensile force applied to the thin metal plate by the clamp and the pressing force applied to the frame, the frame itself is provided with rigidity. However, if the tensile force and the pressing force are the same size, the tensile force remaining on the metal sheet can be supported by the restoring force remaining on the frame, so that the metal sheet or the frame is deformed after the frame and the metal sheet are released. . For this reason, there exists an effect that it can hold | maintain the metal thin plate fixed to the frame in the state without further distortion and loosening, and hold | maintains the opening part etc. in the desired dimension precision.

The arrangement of the clamp that exerts a tensile force on the thin metal sheet may be appropriately determined in accordance with the distribution of the rigidity of the thin metal sheet, and the thin metal sheet includes a large number of slits, such as a multi-faced mask used for manufacturing an organic EL element. In the case where the opening is formed side by side, it is preferable to arrange the plurality of clamps in accordance with the opening and the non-opening portion. In such a configuration, since the openings and the non-openings having greatly different rigidity can be pulled out by separate clamps, the metal sheet can be held in a state without extremely distorting or loosening.

The apparatus for attaching the thin metal plate of the present invention to a frame includes a plurality of plate pulling units each of at least two opposite sides of a quadrangular frame disposed at a predetermined position and a quadrilateral metal thin plate disposed thereon; Since the frame pressing unit is provided, at least two opposite sides of the metal sheet are gripped by a plurality of clamps to exert a tensile force, thereby keeping the metal sheet flat and free of distortion and loosening. If so, the opening can be held at a position where the desired dimensional accuracy is maintained. In addition, the frame can be in a state in which a pressing force in a direction opposite to the tensile force applied to the thin metal plate is applied. By fixing the thin metal plate to the frame by spot welding or the like in this state, the thin metal plate is not distorted or loosened. The openings and the like can be held in the frame while being maintained at a desired dimensional accuracy. In addition, even after releasing the thin metal plate and the frame, the thin metal plate can be held without distorting or loosening, while maintaining the desired dimensional accuracy of the opening and the like.

Here, when the plate pulling unit and the frame pressing unit are arranged on each of the four sides of the metal sheet and the frame, the metal sheet can be pulled in both the longitudinal and horizontal directions so as to be in a state without further distortion or loosening. It can be fixed to the frame and held.

As the clamp moving means provided in the plate pulling unit and the frame pressing member moving means provided in the frame pressing unit, it is preferable to use a cylinder device such as an air cylinder because the force applied can be easily adjusted. . When the cylinder device is used, a separate cylinder device may be used as the clamp moving means and the frame pressing member moving means, but the cylinder device is used as the clamp moving means and the frame pressing member moving means. The clamp and the frame pressing member are preferably connected to each other so as to move in a direction away from and approaching each other. With such a configuration, a common cylinder device can simultaneously apply a tensile force and a pressing force to the clamp and the frame pressing member, simplifying the structure and making the tensile force and the pressing pressure applied equally.

It is preferable to provide a support surface for supporting the frame by placing the frame on the pressing member. Accordingly, it is not necessary to install a dedicated device for supporting the frame, thereby simplifying the device.

The arrangement of the plurality of plate pulling units and frame pressing units provided on one side may be determined so that the clamp for gripping and pulling the metal thin plates is in an appropriate position corresponding to the distribution of the rigidity of the metal thin plates. In the case where the thin metal sheet has a configuration in which a plurality of slits are included and quadrilateral openings are formed side by side like a multi-faced mask used for manufacturing an organic EL element, a plurality of plate pulling units and frame pressing units are opened. It is preferable to arrange | position in accordance with and a non-opening part. With such a configuration, since the openings and the non-openings of the metal sheet having large stiffness can be pulled out by separate clamps, the metal sheet can be pulled and held with almost no distortion or loosening.

It is preferable that the tensile force by the clamp moving means of a plurality of plate pulling units can be adjusted for each plate pulling unit. With such a configuration, the tensile force applied to the thin metal sheet can be precisely adjusted corresponding to the place, and the thin metal sheet can be pulled and fixed to the frame without further distortion or loosening.

According to the present invention, when four sides of a thin metal plate are gripped by a plurality of clamps respectively, and a tensile force is applied to the thin metal plate, the clamp is gripped near the corners of the thin metal plate when the sheet is not distorted or loosened. Since the can move in the direction perpendicular to the tensile direction, the clamps disposed between the corner portions do not interfere with each other, so that the corner portions of the thin metal sheet can also be stretched to a predetermined position. In addition, the thin metal plate can be kept in a state free from distortion and loosening, and the metal thin plate can be positioned within a predetermined dimensional accuracy range including the corner portion, thereby being fixed to the frame. As a result, in the metal thin plate formed by attaching the metal thin plate to the frame, the position of each part in the metal thin plate (for example, the position of each opening in the metal thin plate having a plurality of openings) without the metal thin plate being distorted or loosening. Is held within a predetermined dimensional accuracy including the corner portion, and vapor deposition using, for example, the metal thin plate can be performed to accurately perform fine pattern deposition.

As described above, according to the present invention, the position of each part in the metal thin plate is maintained within a predetermined dimensional accuracy including the corner portion in a state where the metal thin plate is not distorted or loosened. This makes it possible to accurately perform deposition of fine patterns.

1 is a schematic plan view of an apparatus for attaching a thin metal plate to a frame according to a first embodiment of the present invention;
2 (a) to 2 (d) are schematic cross-sectional views showing the procedure of the attaching operation by the apparatus for attaching the thin metal plate shown in FIG. 1 to the frame;
3 is a schematic perspective view showing a metal thin plate and a frame handled by an apparatus for attaching the metal thin plate shown in FIG. 1 to the frame;
4 is a schematic perspective view showing a thin metal plate and a frame after the frame is attached;
Fig. 5 is a partial cross-sectional schematic side view showing the plate pulling unit and frame pressing unit used in the apparatus for attaching the metal thin plate of Fig. 1 to the frame with the clamp open;
6A and 6B are partial cross-sectional schematic side views showing the plate pulling unit frame pressing unit shown in FIG. 5 in a different operating state with the clamp closed;
(A) and (b) are the partial cross-sectional schematic side views which showed the plate pulling unit and frame pressing unit used for another Example in the other operating state with the clamp closed,
8A and 8B are partial cross-sectional schematic side views showing a plate pulling unit and frame pressing unit used in still another embodiment in a different operating state with the clamp closed;
9A and 9B are partial cross-sectional schematic side views showing a plate pulling unit and frame pressing unit used in still another embodiment in a different operating state with the clamp closed;
10 is a schematic plan view of an apparatus for attaching a thin metal plate to a frame according to another embodiment of the present invention;
11 is a schematic plan view of an apparatus for attaching a metal mask (metal thin plate) to a frame according to a second embodiment of the present invention;
12 is a schematic cross-sectional view of an apparatus for attaching the metal thin plate shown in FIG. 11 to the frame;
13 (a) and 13 (b) are schematic side views showing, in another operating state, a tension unit provided in an apparatus for attaching the metal thin plate shown in FIG. 11 to a frame;
(A) and (b) are schematic side views which show the tension unit provided in the apparatus which attaches the metal thin plate shown in FIG. 11 to a frame in another operation state,
FIG. 15 is a schematic front view as seen in the V-V arrow direction of FIG. 14 (b);
FIG. 16 is a schematic plan view illustrating a state in which a corner region of a metal mask is pulled by a plurality of tension units in the apparatus for attaching the thin metal plate shown in FIG. 11 to the frame;
17A and 17B are partial cross-sectional schematic side views of a tension unit used in another embodiment in different operating states.
18A and 18B are partial cross-sectional schematic side views showing a tension unit used in still another embodiment in a different operating state;
(A) and (b) of FIG. 19 are schematic front and schematic side views which show the clamp of the tension unit shown in FIG. 18, and its vicinity, respectively,
20 is a schematic perspective view of a metal mask and a frame,
21 is a schematic perspective view of a mask unit formed by attaching a metal mask to a frame;
Fig. 22 is a schematic plan view showing a state in which both ends of the multi-sided deposition mask are gripped and pulled by one clamp, respectively;
23 is a schematic perspective view showing an example of a conventional multi-sided deposition mask.

(Embodiment 1)

The present invention can be applied to any metal thin plate that needs to be held in a flat state without distortion or loosening, but is a metal thin plate used as a multi-faced mask for deposition for manufacturing an organic EL device which requires particularly precision. It is preferable to apply to. Hereinafter, a preferred embodiment of the present invention will be described taking as an example a metal thin plate used as a multi-faced mask for deposition in manufacturing an organic EL device.

1 is a schematic plan view of an apparatus for attaching a metal sheet to a frame according to an embodiment of the present invention, FIG. 2 is a schematic cross-sectional view showing a procedure of an attaching operation by an apparatus for attaching a metal sheet to a frame, and FIG. 4 is a schematic perspective view showing a metal thin plate and a frame handled by an apparatus attached to the frame, FIG. 4 is a schematic perspective view showing a metal thin plate and a frame after attaching the frame, and FIG. 5 is a plate used for an apparatus for attaching a metal thin plate to the frame. A schematic side view of the pull unit frame pressing unit with the clamp open, and FIGS. 6A and 6B are schematic side views of the plate pulling unit frame pressing unit in different operating states.

In Fig. 3, reference numeral 11 denotes a thin metal plate of a quadrangular shape used as a deposition mask, in which a plurality of openings 12 having a plurality of slits 12a are formed side by side. Reference numeral 13 denotes a metal frame having a square shape for attaching the metal thin plate 11, and has an opening 14 having a size including an area where a plurality of openings 12 of the metal thin plate 11 are formed. . The metal thin plate 11 is made to have a size larger in both longitudinal and horizontal directions than the frame 13, and can be easily cut by bending at a position substantially corresponding to the outer peripheral edge of the frame 13. Line 15 is formed. On the other hand, the easy cutting line 15 is to have a strength that can withstand the tensile force applied to the thin metal plate (11).

The vapor deposition mask apparatus 17 shown in FIG. 4 is removed by fixing the thin metal plate 11 to the frame 13 by spot welding or the like, and cutting off the peripheral edge portion using the easy cutting line 15. Can be formed. The thickness of the metal thin plate 11, the size of the opening 12, the size of the slit formed therein, and the like are not particularly limited. As a representative example, the thickness of the metal thin plate 11 is 30 to 200 µm, and the opening ( The dimensions of 12) may be exemplified by 50 to 70 mm in length, 30 to 50 mm in width, 50 to 100 μm in slit width, and 100 to 150 μm in width of the fine metal wire constituting the slit.

In FIG. 1, the apparatus for attaching a frame of thin metal sheets, denoted by reference numeral 20 as a whole, includes four sides of a quadrangular frame 13 arranged at a predetermined position and a quadrangular metal sheet 11 arranged thereon. Each of the plate pulling unit and frame pressing unit 21 and the support rail 22 holding the plate pulling unit and frame pressing unit 21 are provided. The support rail 22 is arrange | positioned so that it may be parallel to each side of the metal thin plate 11 arrange | positioned at a predetermined position. Each plate pulling unit and frame pressing unit 21 is held so as to move to the support rail 22, so that it can be moved to a desired position along the support rail 22 and fixed to the position. It is.

Each plate pulling unit and frame pressing unit 21 is held in a form that can be moved to the support rail 22 and fixed in a desired position, as shown in FIGS. 5 and 6. ) And a movable table held by the support 24 so as to be movable in a direction perpendicular to the side 11a of the metal thin plate 11 while being horizontal through the inner member 25. 26 and a fixing piece 27a fixed to the moving table 26 as a clamp 27 provided on the moving table 26 and holding the metal thin plate 11, and capable of opening and closing with the fixing piece 27a. A clamp 27 having a movable piece 27b, a cylinder device 29 such as an air cylinder provided to open and close the clamp 27 via a toggle joint 28, and a support 24 move. The cylinder device 30, such as an air cylinder, provided to reciprocate the base 26, the auxiliary support 32 fixed to the support 24, and this auxiliary support 32 directly The frame pressing member 34 held so as to move in the same direction as the moving table 26 through the guide member 33, and the frame pressing member 34 to the support 24 and the auxiliary support 32. Cylinder device 35, such as an air cylinder, provided to reciprocate relative to the moving position, and the forward position of the moving table 26 (moving limit position when the moving table 26 moves in the direction toward the center of the metal sheet 11). ) And a stopper plate 36 provided to regulate the retracted position of the frame pressing member 34 (moving limit position when the frame pressing member 34 moves away from the frame 13). Doing.

As shown in FIG. 6B, the cylinder device 30 connected to the movable table 26 moves the movable table 26 in the direction of arrow A when the piston rod 30a is operated to extend. A tensile force in the direction of the arrow A can be applied to the metal thin plate 11 held by the clamp 27 to move the tensile force to the metal thin plate 11 held by the clamp 27. It is to configure the clamp moving means for moving the clamp 27 so that. The frame pressing member 34 has a supporting surface 34a for supporting the frame 13 and an arrow B opposite to the direction A of the tensile force applied to the metal thin plate 11 by the clamp 27. When moving in the direction, the frame 13 has a structure capable of applying a pressing force in the direction of the arrow B. FIG.

Here, the region where the frame pressing member 34 exerts a pressing force on the frame 13 in the state where the metal thin plate 11 and the frame 13 are viewed from above, the clamp 27 of the frame 13 is the metal thin plate. It is an area | region defined so that elastic deformation of an arrow B direction may arise in the area | region (corresponding area | region) which overlaps with the area | region which pulls out (11). Preferably, the center of the region where the frame pressing member 34 exerts a pressing force on the frame 13 is defined such that the clamp 27 is in a position overlapping the center of the region where the metal thin plate 11 is pulled out. have. When the cylinder device 35 connected to the frame pressing member 34 is operated to extend the piston rod 35a, the cylinder pressing member 34 moves the frame pressing member 34 in the direction indicated by arrow B, and the frame 13 is made of metal. The pressing force in the direction opposite to the tensile force applied to the thin plate 11 constitutes the frame pressing member moving means for moving the frame pressing member so that the frame pressing member applies the pressing force to the frame.

In FIG. 1, the plurality of plate pulling units and frame pressing units 21 provided on the four sides 11a of the metal thin plate 11 respectively have openings 12 of the metal thin plate 11 placed at predetermined positions. And the width of the clamps 27 provided in each of them, the area where the openings 12 of the metal thin plate 11 are arranged side by side, and the area without the openings. It is decided to pull each well. By this structure, the area | region in which the opening part 12 of the metal thin plate 11 is parallel with the longitudinal direction, and the area next to the transverse direction, the area | region extended in the longitudinal direction and the area | region extended in the position without an opening, respectively, respectively The separate clamps 27 can be favorably pulled out.

In the cylinder device for imparting force (30 (see Figs. 5 and 6) 30 respectively provided in the plurality of plate pulling unit and frame pressing unit 21), the working fluid supply piping is provided via a regulator so that the tensile force can be adjusted separately. Is connected. The working fluid supply pipe is provided with a common on-off valve for operating all cylinder devices at the same time, and a working fluid for supplying the working fluid to each cylinder device to adjust the operation timing of each cylinder device. The supply line is also equipped with a speed controller. The working fluid supply pipe is also connected to the pressure applying cylinder device 35 provided in each of the plurality of plate pulling unit and frame pressing unit 21. This working fluid supply pipe is provided with a common regulator so that the pressure pressure of all the cylinder devices 35 can be adjusted at the same time. On the other hand, a regulator may also be provided in this working fluid supply pipe so that pressure pressure by each cylinder device 35 can be adjusted individually.

By the way, the plate pulling unit and frame pressing unit 21 described above has an integrated structure having a plate pulling function for pulling the metal thin plate 11 and a pressing function for pressing the frame 13, but with a fixed piece 27a. The plate pulling unit 21a having the plate pulling function composed of the clamp 27 and the cylinder devices 29 and 30, and the frame pressing unit 21b composed of the frame pressing member 34 and the cylinder device 35 You may install each independently.

Next, an operation of attaching the thin metal plate using the frame attaching device 20 having the above configuration to the frame will be described. In the state where the clamps 27 of each plate pulling unit and frame pressing unit 21 are opened (see FIG. 5), the frame 13 is placed on the support surface 34a of the frame pressing member 34 and the metal is placed thereon. The thin plate 11 is loaded and four sides thereof are gripped by a plurality of clamps 27. This state is the state shown to FIG. 1, FIG. 2 (a), and FIG. Next, as shown in FIG. 6 (b), the hydraulic fluid is supplied to the cylinder device 30 for providing tension, the piston rod 30a is extended to move the clamp 27 in the direction of arrow A, and the metal The tensile force is applied to the thin plate 11. Accordingly, as shown in FIG. 1, the metal thin plate 11 is pulled in the longitudinal and lateral directions by the plurality of clamps 27. In this state, the surface state of the thin metal plate 11 is visually inspected, and if there is distortion or loosening, the working fluid pressure to the cylinder device 30 connected to the clamp 27 pulling out the area is adjusted, The metal thin plate 11 is adjusted to a state in which the slit 12a of the opening 12 is pulled in parallel and aligned while being flat without distortion or loosening. Moreover, the position of each opening part 12 formed in the metal thin plate 11 is examined, and the working fluid pressure to each cylinder device 30 is adjusted so that each opening part may be in a position within a predetermined dimensional precision. As described above, the metal thin plate 11 can be made to be in a state where each opening is positioned within a predetermined dimensional accuracy range without being distorted or loosened.

Next, as shown in FIG. 6 (b), the hydraulic fluid is supplied to the pressure applying cylinder device 35 to extend the piston rod 35a to move the frame pressing member 34 in the direction of arrow B. As shown in FIG. The frame 13 is pressed in the arrow B direction. Here, the pressing force which presses the frame 13 in the arrow B direction is set to be approximately equal to the tensile force that the clamp 27 is acting on the metal thin plate 11. As a result, the frame 13 is elastically deformed in the direction of the arrow B, and the restoring force in the opposite direction is generated. In this state, as shown in FIG.2 (b), the spot welding of the metal thin plate 11 to the frame 13 using the laser welding machine 40 is carried out. This spot welding is performed by moving the laser welding machine 40 to the desired spot welding position one after another. Thereby, several places of the metal thin plate 11 are fixed to the frame 13 by the spot welding part 42 (refer FIG. 1). Thereafter, as illustrated in FIG. 2C, the clamp 27 is opened to release the metal thin plate 11, and the frame pressing member 34 is retracted to press the frame 13. Release it.

By the way, when the metal thin plate 11 is pulled in the arrow A direction by the clamp 27, the tensile force (restoration force) of the arrow B direction has generate | occur | produced in this metal thin plate 11. For this reason, when the clamp 27 is opened, as shown in Fig. 2D, the tensile force in the direction of the arrow B generated in the metal thin plate 11 acts directly on the frame 13, and the frame 13 To the direction of arrow B. If no pressing force is applied to the frame 13 at all, the frame 13 supports the tensile force in the arrow B direction of the metal sheet 11 by its rigidity, but in this case, the frame 13 The elastic deformation is caused by pulling in the direction of arrow B in the thin metal plate 11. If the rigidity of the frame 13 is set very large, this elastic deformation becomes negligibly small. However, in practice, the rigidity of the frame 13 can only be reduced to a certain extent in order to reduce the weight and reduce the cost. In this case, a negligible elastic deformation is generated in the frame 13, and with this, the thin metal plate 11 is contracted to lower the tensile force generated therein. As a result, distortion or loosening occurs in the thin metal plate 11, the balance of the slit 12a of the opening 12 is disturbed, so that a desired slit pattern cannot be obtained or the position of each opening 12 can be disturbed. have.

On the other hand, in the present embodiment, when the metal thin plate 11 is fixed to the frame 13, the frame 13 is elastically deformed by applying a pressing force in the arrow B direction, so that the frame 13 has an arrow A direction. The resilience of will be created. Therefore, when the metal thin plate 11 and the frame 13 are opened while the metal thin plate 11 is fixed to the frame 13, the tensile force generated in the arrow B direction on the metal thin plate 11 is generated in the frame 13. It is supported by the restoring force of the arrow A direction and the rigidity of the frame 13, so that even if the rigidity of the frame 13 is small, the frame 13 is pulled by the metal thin plate 11 and is not deformed again in the arrow A direction. do. Therefore, the thin metal plate 11 does not shrink, and the tensile force added to the metal thin plate 11 is maintained as it is. As a result, even if the rigidity of the frame 13 is small, the metal thin plate 11 can be held in a state without distortion or loosening, and each opening can be held in a state of being located within a predetermined dimensional accuracy range. In other words, by using the inexpensive frame 13 having a small rigidity, the metal thin plate 11 can be held without distortion or loosening, and each opening can be held within a predetermined dimensional accuracy range. Will be.

Here, the pressing force applied to the frame 13 by the frame pressing member 34 is set to be equal to the tensile force applied to the metal thin plate 11 by the clamp 27. The tensile force of the metal thin plate 11 is set to the frame 13. It is preferable because it can cancel out by the restoring force which arises in). However, even if there is a slight difference between the two, the frame 13 itself has some degree of rigidity, so there is no problem. The pressing force applied to the frame 13 by the frame pressing member 34 may be set so that the difference from the tensile force applied by the clamp 27 to the metal thin plate 11 is within ± 30% of the tensile force.

After the metal thin plate 11 is fixed to the frame 13, the clamp 27 is opened and the frame pressing member 34 is retracted to release the pressing of the frame, the peripheral edge of the metal thin plate 11 can be easily removed. It is removed using the cutting line 15. As mentioned above, as shown in FIG. 4, the vapor deposition mask apparatus 17 of the structure which fixed the metal thin plate 11 to the frame 13 is manufactured. In the obtained vapor deposition mask apparatus 17, while the metal thin plate 11 is a state without distortion and loosening, the slit 12a of the opening part 12 is maintained in the state exactly aligned in parallel, and the The position is also maintained within a predetermined dimensional accuracy. As a result, by performing vapor deposition using this vapor deposition mask apparatus 17, fine pattern vapor deposition can be performed accurately.

On the other hand, in the above-described operation, while pressing the metal thin plate 11 with a plurality of clamps 27 to prepare a flat state, the pressing force is applied to the frame 13, the pressing force is applied to the frame 13 The timing is not limited to this, and the pressing force may be applied at the same time when the tension force by the clamp 27 is applied. In the above embodiment, the cylinder device 30 for applying the tensile force to the thin metal plate 11 and the cylinder device 35 for applying the pressure force to the frame 13 are separately provided. It is not limited to a structure, A common cylinder apparatus can also be used. An embodiment in such a case will be described below.

Fig. 7 shows a plate pulling unit and frame pressing unit 21A used in an apparatus for attaching a thin metal plate to a frame according to another embodiment of the present invention. In this plate pulling unit and frame pressing unit 21A, an auxiliary support 32A is attached to the support 24A, and the frame pressing member 34A is connected to the auxiliary support 32A via the inner member 33. It is held so as to be movable, and this frame pressing member 34A is connected to the piston rod 30a of the cylinder device 30A by the connecting rod 50. The cylinder device 30A holds its cylinder 30b on the movable table 26 holding the clamp 27. By such a configuration, by operating the cylinder device 30A, the movable table 26 and the frame pressing member 34A can be moved in the direction away from each other (arrow A direction and arrow B direction) and close to each other. The force applied to the base 26 and the frame pressing member 34A can be made equal. On the other hand, reference numeral 55 is a spring for pushing the connecting rod 50 in the right direction to return the frame pressing member 34A to the retracted position. The other structure is the same as that of the plate pulling unit / frame pressing unit 21 of the embodiment shown in Figs. The plate pulling unit and frame pressing unit 21A shown in FIG. 7 is used instead of the plate pulling unit and frame pressing unit 21 in the frame attachment device 20 shown in FIG.

Also in the apparatus for attaching the metal thin plate using the plate pulling unit and frame pressing unit 21A shown in Fig. 7, the frame 13 is placed on the frame pressing member 34A and the metal thin plate 11 is placed thereon. The clamp is held by the clamp 27. Next, as shown in Fig. 7B, the cylinder device 30A is operated in the direction in which the piston rod 30a is extended to move the movable table 26 and the clamp 27 held therein. In addition to moving in the direction of arrow A, frame pressing member 34A is moved in the direction of arrow B. As shown in FIG. Accordingly, the clamp 27 exerts a tensile force on the thin metal plate 11, and a pressing force equal to the tensile force can be applied to the frame 13 via the frame pressing member 34A. Then, the tension force exerted by the clamps 27 arranged on each of the four sides of the metal thin plate 11 is adjusted to adjust the tensile force, so that the openings have a predetermined dimensional accuracy while the metal thin plate 11 is not distorted or loosened. After setting it in the state located in the range, the metal thin plate 11 is spot-welded to the frame 13, and is fixed. At this time, the frame pressing member 34A acts on the pressing force of the same magnitude as the tensile force in the region of the frame 13 overlapping the region where the clamp 27 exerts the tensile force on the metal thin plate 11. Since the thin metal plate 11 and the frame 13 have the same size and mutually opposite restoring force, the thin metal plate 11 and the frame 13 are opened when the metal thin plate 11 and the frame 13 are opened. The restoring force (tensile force) of the steel plate is offset by the restoring force of the frame 13, so that the frame 13 is not pulled out and deformed by the metal thin plate 11, so that the metal thin plate 11 is not contracted and a predetermined tensile force is applied. Stays in the state. As a result, by using the inexpensive frame 13 having a small rigidity, the metal thin plate 11 can be held in a state where each opening is positioned within a predetermined dimensional accuracy range without distortion or loosening.

In the plate pulling unit and frame pressing unit 21A shown in FIG. 7, the tensioning force on the metal thin plate 11 and the pressing force on the frame 13 can be executed by the common cylinder device 30A. In addition to simplifying the structure and the control system, the tensile force applied to the metal thin plate 11 and the pressing force applied to the frame 13 can be equalized, and the metal thin plate 11 is fixed to the frame 13. Shrinkage of the metal thin plate 11 after opening is more reliably prevented, and the metal thin plate 11 is held in a state without distortion or loosening, and each opening is held in a state of being within a predetermined dimensional accuracy range. This has the advantage of being able to.

FIG. 8 shows a plate pulling unit and frame pressing unit 21B used in an apparatus for attaching a thin metal plate to a frame according to another embodiment of the present invention. In this plate pulling unit and frame pressing unit 21B, the width of the support stand 24B is widened, and the long rail 57 is provided on the upper surface thereof, and the rail 57 is connected to the rail 57 via the inner member 25 during the straight line. In addition to holding the movable table 26 to be movable, the frame pressing member 34B is movable to be held through the inner member 33 during the straight line. The frame pressing member 34B is connected to the piston rod 30a of the cylinder device 30B held by the moving table 26 via the connecting rod 50B. The other structure is the same as that of the plate pulling unit and frame pressing unit 21A shown in FIG. Also in the plate pulling unit and frame pressing unit 21B of FIG. 8, as shown in FIG. 8B, by operating the cylinder device 30B, the movable table 26 and the clamps 27 held therein are operated. ) Is moved in the direction of arrow A, the frame pressing member 34B is moved in the direction of arrow B, and a tension force is applied to the metal sheet 11 by the clamp 27, and a pressure of the same size as the tensile force is applied. Pressure can be applied to the frame 13 via the frame pressing member 34B. In this embodiment, by holding the movable table 26 and the frame pressing member 34B so as to be movable by the common rail 57, there is an advantage that the structure can be simplified.

Fig. 9 shows a plate pulling unit and frame pressing unit 21C used in an apparatus for attaching a thin metal plate to a frame according to another embodiment of the present invention. In the plate pulling unit / frame pressing unit (21C), the supporting base (61) is held on the supporting table (24C) so as to be able to move through the inner member (60) during the straight line, and on the supporting base (61). The movable table 26 can be held by the inner member 25 during the straight line movement. Then, the frame pressing member 34C is attached to the auxiliary movable table 61, the cylinder 30b of the cylinder device 30C is attached to the movable table 26, and the piston rod 30a is attached to the auxiliary movable table. It is connected to 61. Moreover, the spring 63 for returning 34 C of frame pressing members to a retracted position is also provided. The other structure is the same as that of the plate pulling unit frame pressing unit 21B shown in FIG. Also in the plate pulling unit frame pressing unit 21C of FIG. 9, as shown in FIG. 9B, by operating the cylinder device 30C, the movable table 26 and the clamp 27 held therein are operated. ) Is moved in the direction of arrow A and the frame pressing member 34C is moved in the direction of arrow B through the auxiliary movable base 61 to exert a tensile force on the thin metal plate 11 by the clamp 27. In addition, a pressing force having the same magnitude as the tensile force can be applied to the frame 13 via the frame pressing member 34C. In this embodiment, there is an advantage that the width of the plate pulling unit and frame pressing unit 21C can be reduced by arranging the auxiliary movable base 61 and the movable base 26 in an overlapping manner.

10 is a schematic plan view showing an apparatus 20D for attaching a thin metal plate to a frame according to another embodiment of the present invention. In the frame attaching device 20D according to this embodiment, a plurality of plate pulling units and frame pressing units 21 are arranged on four sides of the metal thin plate 11 placed at a predetermined position. In addition, an additional plate pulling unit and frame pressing unit 21D is disposed at the corner 11b between two adjacent sides 11a of the metal thin plate 11. The rest of the configuration is the same as in the embodiment of FIG. Also in the embodiment shown in FIG. 10, the metal sheet 11 is gripped and pulled by the clamps 27 of the respective plate pulling unit and frame pressing unit 21 and the additional plate pulling unit and frame pressing unit 21D. It is fixed to the frame of the pressing state. At this time, the thin metal plate 11 is first pulled diagonally with the clamp 27 of the additional plate pulling unit and frame pressing unit 21D arranged at the corner portion 11b, and then four plate pulling units The clamps 27 of the frame pressing unit 21 are pulled in the vertical and horizontal directions. In this way, by first pulling the four corner portions 11b of the metal thin plate 11 in the diagonal direction, the metal thin plate 11 can be stretched as a whole, and then, by pulling each side 11a, the corner The tension force in the longitudinal direction can be exerted on the entire surface of the metal thin plate 11 while reducing the interference between the clamps 27 arranged at positions sandwiching the portions 11b. As a result, the metal thin plate 11 is held in a state where there is almost no distortion or loosening, and the opening 12 is held in a position where a desired dimensional accuracy is maintained, and the state is fixed to the frame 13 in that state. There is an advantage to be able.

On the other hand, the additional plate pulling unit and frame pressing unit 21D of the corner portion 11b may be used in place of the additional plate pulling unit having only a plate pulling function.

As mentioned above, although preferred Example of this invention was described, this invention is not limited to these Examples, It can also be variously changed and implemented within the range of description of a claim. For example, a clamp moving means for moving the clamp to exert a tensile force on the metal sheet held by the clamp, or a frame pressing member moving means for moving the frame pressing member so that the frame pressing member exerts a pressing force on the frame. It is not limited to the cylinder device shown in the figure, but may be changed to the one using a motor. In addition, in the above embodiment, the cylinder device 30 for imparting a tensile force to the clamps 27 of the plurality of plate pulling unit and frame pressing unit 21 and the additional plate pulling unit and frame pressing unit 21D, respectively. The working fluid pressure to be supplied can be adjusted individually, and the tension force applied to the metal thin plate 11 by each clamp 27 can be adjusted individually. Since such a structure can precisely adjust the tensile force applied to the metal thin plate 11, even if the metal thin plate 11 which tends to be distorted or loosened, there is an advantage that it can be pulled and held in an extremely flat state. do. However, the present invention is not limited to this configuration, for example, in the case of using the metal thin plate 11 which can be easily held and held in a relatively flat state, the plurality of clamps 27 arranged on each side 11a. For example, a cylinder device connected to each set of clamps is divided into a plurality of sets so that the clamp corresponding to the opening 12 is the first set, and the clamp 27 corresponding to the non-opening portion 12b is the second set. The working fluid pressure supplied may be adjusted in common.

Moreover, as for the plate pull unit and frame press unit 21, 21A, 21B, 21C etc. which are arrange | positioned at each side 11a of the metal thin plate 11, each clamp 27 must necessarily have the opening part 12 and the non-opening part. It is not limited to arranging the positions so as to fit the positions of each of them, and the combination of the openings and the non-openings is appropriately combined to change the gripping width, or to use more clamps so as to grasp the finer divided areas. You may also make changes. In any case, the number and arrangement of clamps of the plate pulling unit and frame pressing unit may be determined so as to correspond to the characteristics of the metal sheet to be used so that the metal sheet can be pulled and held without distortion or loosening. In the above-described embodiment, a plurality of plate pulling units and frame pressing units are arranged on the four sides 11a of the metal thin plate 11, but the plurality of plate pulling units is not limited thereto but only two sides facing each other. You may change it so that a unit frame pressing unit may be arrange | positioned. In this case, however, it is preferable to arrange a plurality of plate pulling units and frame pressing units at both ends in the same direction as the slits so that the slits of the openings 12 can be held in parallel.

(Second Embodiment)

The present invention is applicable to the case of attaching any quadrilateral metal mask (also referred to as a metal thin plate) to the frame of the quadrangular frame shape that needs to be held in a flat state without distortion or loosening. It is preferable to apply to the metal mask used as the mask for attaching a multifaced film | membrane for manufacture of organic electroluminescent element which requires especially precision. Hereinafter, a preferred embodiment of the present invention will be described taking as an example a metal mask used as a multi-faced mask for deposition in organic EL device fabrication.

20 is a schematic perspective view showing a metal mask and a frame-shaped frame handled by a frame attaching device (also referred to as a frame attaching device of a thin metal plate) according to an embodiment to be described later, and FIG. 21 is formed by fixing a metal mask to a frame. A schematic perspective view of one mask unit.

In FIG. 20, reference numeral 101 denotes a rectangular quadrangle metal mask used as a deposition mask, in which a plurality of mask portions (opening portions) 102 are formed side by side. Each mask portion is provided with a number of fine slits 102a to allow deposition. The shape and arrangement of the slits in each mask portion 102 are arbitrary, for example, the slits of elongated shapes are arranged side by side in parallel, the slot slits are arranged side by side in parallel with the longitudinal direction, and the like. I can lift it. Reference numeral 103 is a frame having a large rigidity for attaching the metal mask 101, and has an opening 104 having a size (called an effective area) in which a plurality of mask portions 102 of the metal mask 101 are formed. ). The metal mask 101 is made larger in both longitudinal and transverse directions than the frame 103, so that the easy cutting line 105 which can be easily cut by being bent at a position approximately corresponding to the outer circumferential edge of the frame 103 is provided. Formed. On the other hand, the easy cutting line 105 is to have a strength that can withstand the tensile force applied to the metal mask 101. The thickness of the metal mask 101, the size of the mask portion 102, and the size of the plurality of minute openings formed therein are not particularly limited, but the thickness of the metal mask 101 is 30 to 200 mu m. The dimensions of the mask portion 102 are 50 to 70 mm in length, 30 to 50 mm in width, 40 to 100 μm in width of the slit 102a, and 80 to 200 μm in width without holes between the openings arranged in parallel. Etc. can be illustrated. The mask unit 108 shown in FIG. 21 can be formed by fixing the metal mask 101 to the frame 103 by spot welding or the like, and cutting off and removing the peripheral edge portion thereof using the easy cutting line 105. have.

11 is a schematic plan view of a frame attaching apparatus of a metal mask according to a second embodiment of the present invention, FIG. 12 is a schematic cross-sectional view of the frame attaching apparatus, and FIGS. 13A and 13B are installed in the frame attaching apparatus. Fig. 14 (a) and Fig. 14 (b) show a tension unit 113 in a different operating state, in which the tension unit 113A is provided at a position where the frame attaching device is held near the corner of the metal mask. Fig. 15 is a schematic front view showing the tension unit 113A shown in Fig. 14B in the direction of an arrow VV.

11 and 12, the frame attaching device (also referred to as the frame attaching device of the thin metal plate) of the metal mask, denoted by reference numeral 110 in its entirety, is the support 111 and the support 111 of the metal mask 101. A plurality of tension units 113 and 113A are arranged so as to hold a plurality of locations on each of four sides to apply tension. Here, the tension unit 113A is disposed at a position for holding the vicinity of the corner of the metal mask 101, and the tension unit 113 is disposed at other regions.

That is, the metal mask 101 has a quadrangular shape, and a tension unit 113A is provided in the vicinity of the corner portion 101b between two neighboring sides 101a, and the tension unit 113 is disposed in other areas. It is.

The tension unit 113 can also be used as a pull unit, and the tension unit 113A can also be used as an additional pull unit.

As shown in an enlarged view in FIG. 13, the tension unit 113 includes a base member 115 and a base member 115 fixed to a support rail 114 installed on the support 111 so as to adjust an attachment position. The clamp support 117 is held so as to move in the direction of applying a tensile force to the metal mask through the inner member 116 during the straight line, and the clamp is installed on the clamp support 117 to hold the metal mask 101 ( 118, the clamp opening / closing mechanism 119 which opens and closes this clamp 118, and the clamp support 117 which hold | maintained the clamp 118 so that the clamp 118 may apply tension force to the metal mask 101 hold | maintained. ) Is provided with a clamp moving means (123) for moving the relative to the base member (115).

The clamp 118 is provided with the fixing piece 118a fixed to the clamp support 117, and the movable piece 118b which can be opened and closed with respect to this. The clamp opening and closing mechanism 119 includes a toggle mechanism 120 and a cylinder mechanism 121 such as an air cylinder that opens and closes the movable piece 118b of the clamp 118 via the toggle mechanism 120. The toggle mechanism 120 includes a first lever 120b held so as to pivot about the pin 120a on a support plate 117a attached to the clamp support 117, and a pin (on the support plate 117a). And a second lever 120d held so as to be able to pivot about 120c, and a ring 120e connecting the first lever 120b and the second lever 120d and the like. The cylinder mechanism 121 is connected to 120b, and the movable piece 118b of the clamp 118 is hold | maintained so that the 2nd lever 120d may turn. Again, an adjustment screw 120f for supporting the rear surface of the movable piece 118b is attached to the front end of the second lever 120d, and the adjustment screw 120f is used as shown in Fig. 13B. Similarly, the height position of the movable piece 118b when the clamp 118 is in the closed position can be adjusted. On the other hand, although not shown, as shown in Fig. 13A, the movable piece 118b is adjusted by the adjusting screw 120f even when the second lever 120d is rotated upward to open the movable piece 118b. Spring is installed to hold in contact with With these arrangements, the clamp mechanism 118 can be opened and closed by reciprocating the first lever 120b with the cylinder mechanism 121. In the closed position shown in Fig. 13B, the metal mask 101 is opened. The holding piece 118a and the movable piece 118b can be held firmly.

The clamp moving means 123 reciprocates the clamp support 117 with respect to the base member 115. In this embodiment, an air cylinder is used. As the clamp moving means 123 moves the clamp support 117 in the direction of arrow A as shown in Fig. 13B, the arrow moves with respect to the metal mask 101 held by the clamp 118. Tensile force in the A direction can be added. In addition, although the air cylinder is used here as the clamp moving means 123, it is not limited to this, You may use a hydraulic cylinder, a servomotor, etc.

The frame member 125 supporting the frame 103 is attached to the base member 115. The frame support 125 places the frame 103 thereon, and positions the frame 103 at a predetermined position in the horizontal plane, and the upper surface of the frame 103 is gripped by the clamp 118 to provide tension. It is arrange | positioned so that positioning may be carried out also in the up-down direction so that it may become the position which is substantially in contact with the metal mask 101 to which it is provided. The frame support 125 also acts as a stopper for regulating the forward position of the clamp support 117.

As shown in FIGS. 14 and 15, the tension unit 113A disposed to grip the corners of the metal mask 101 can adjust the attachment position to the support rail 114 provided on the support 111. The first base member 115A fixed in shape, and the tension force to the metal mask while being parallel to the metal mask 101 held by the clamp 118 via the inner member 127 during the first base member 115A. The second base member 115B held so as to be able to move in a direction perpendicular to the direction in which the direction is added, and the direction in which the tensile force is applied to the metal mask via the inner member 116 during the second base member 115B. A clamp support 117 held to be movable in the same direction as the movement direction of the clamp support 117 to be described later, a clamp 118 mounted to the clamp support 117 and gripping the metal mask 101; To open and close the clamp 118 via the toggle mechanism 120. Clamp support that holds the clamp 118 so as to exert a tensile force on the clamp opening and closing mechanism 119 including the cylinder mechanism 121 such as an air cylinder and the metal mask 101 held by the clamp 118 ( And a clamp moving means 123 for moving the 117 relative to the second base member 115B, a frame support 125 for supporting the frame 103, and the like.

Here, by allowing the second base member 115B to move in a direction perpendicular to the moving direction of the clamp support 117 with the inner member 127 during the straight line, the clamp support 117 and the clamp 118 held therein It can move in the direction A which adds a tensile force to the metal mask 101, and BB direction orthogonal to it. On the other hand, between the first base member 115A and the second base member 115B, when a force in the BB direction is applied to the second base member 115B, the second base member 115B is allowed to move. When that force is lost, a return spring is installed to return it to its original center position. The frame support 125 is held by the first base member 115A. The other structure is the same as that of the tension unit 113 shown in FIG.

In FIGS. 11 and 12, the tension units 113 and 113A are disposed so that the sides of the metal mask 101 are gripped by the plurality of tension units 113 and 113A, respectively, to apply tensile force to the sides at right angles. It is. The clamps 118 of the plurality of tension units 113 and 113A, which are arranged to hold the sides of the metal mask 101, are provided with a mask portion 102 and a non-mask portion 102b of the metal mask 101. The longitudinally extending and transversely extending regions, in which the mask portion 102 of the metal mask 101 is formed, and the longitudinally extending and transversely extending regions without the mask portion. In this case, each of the clamps 118 may be pulled by a separate clamp 118 to impart a tensile force.

The clamp moving means 123 provided in each of the plurality of tension units 113 and 113A individually controls the driving force by the clamp moving means 123 so that the tension force applied to the metal mask 101 can be individually adjusted. An adjusting means (not shown) for adjusting is provided. More specifically, an air supply pipe is connected to the air cylinder constituting the clamp moving means 123, and a regulator for individually adjusting the pressure supplied to each air cylinder to the air supply pipe is provided as an adjusting means. have. On the other hand, air is supplied to the air supply pipes connected to these air cylinders via a common on / off valve so that the clamp movement means (air cylinder) 123 of all the tension units 113 can be operated at the same time. In addition, a speed controller is also installed in the piping for supplying air to each air cylinder so that the operation timing of each air cylinder can be adjusted.

Next, the metal mask attaching operation by the frame attaching device 110 of the metal mask configured as described above will be described. As shown in FIGS. 13A and 14A, the clamp support 117 is in the forward position, and in the state where the clamp 118 is opened, first of the plurality of tension units 113 and 113A. After holding the frame 103 in the frame support 125, the metal mask 101 is mounted thereon, and the four sides thereof are gripped by the clamps 118 of the plurality of tension units 113. At this time, the metal mask 101 is positioned with respect to the frame 103 using a plurality of positioning pins (not shown). Next, the pressurized air is sent to the clamp moving means 123 connected to each clamp support 117 to move the respective clamps 118 in a direction away from the metal mask 101, so that a plurality of metal masks 101 are provided. A small tensile force is applied in both the longitudinal and horizontal directions by the clamp to make the metal mask 101 lightly pulled out, and after the positioning pin is pulled out in that state, a large tensile force is applied to the metal mask 101. This state is a state shown in FIG.13 (b) and FIG.14 (b). On the other hand, even if the positioning pin is removed from the metal mask 101, the position of the metal mask 101 with respect to the frame 103 hardly changes, and the desired position with respect to the frame 103 of the metal mask 101 is desired. Determination precision can be maintained.

As described above, by holding the four sides of the metal mask 101 with the tension unit 113 disposed on the four sides of the metal mask 101 and applying a tensile force, as shown in FIG. 11, the metal mask 101 is pulled in both longitudinal and transverse directions by multiple clamps 118. In this state, the surface state of the metal mask 101 is visually inspected, and if there is distortion or loosening, the working fluid pressure acting on the clamp moving means 123 connected to the clamp 118 pulling the area is checked. By adjusting, the metal mask 101 is adjusted so that the opening of the mask portion 102 is pulled in parallel and aligned while being flat without distortion or loosening. In addition, the working fluid pressure acting on each clamp moving means 123 to inspect the position of each mask portion 102 formed in the metal mask 101 so that each mask portion 102 is in a position within a predetermined dimensional accuracy. Adjust it. When this adjustment operation is performed, as shown in Fig. 16, in the tension units 113A and 113A disposed in the vicinity with the corner portions of the metal mask 101 interposed, the clamps 118 and 118 are metal masks. The tensioning force in the direction of arrow A and direction B is applied to 101, and therefore the metal mask 101 of the part gripped by the clamp 118 of each tension unit 113A has a corner part. The tension force by the tension unit 113A disposed on the adjacent side is pulled in the direction perpendicular to the tension direction by the clamp 118 (B direction or A direction), and the force acts on the clamp 118. . However, in the tension unit 113A, the clamp support 117 (see FIGS. 14 and 15) supporting the clamp 118 can move in a direction perpendicular to the direction in which the tension force is applied to the metal mask. 101) to be pulled and moved. For this reason, the corner part of the metal mask 101 can be lengthened to a predetermined dimension, and the corner part of the effective area can be positioned at a desired point P. As a result, the state where the mask portion 102 is located within the predetermined dimensional accuracy range, including the mask portion 102 arranged at the corner portion while the metal mask 101 is not distorted or loosened. You can do that.

Next, as shown in FIG. 12, spot welding is performed on the frame 103 by using the laser welder 130 on the metal mask 101. This spot welding is carried out by moving the laser welding machine 130 to the desired spot welding position in turn. Thereby, the several places of the metal mask 101 are fixed to the frame 103 by the spot welding part 132 (refer FIG. 11). Thereafter, the clamp 118 is opened to release the metal mask 101 and the peripheral edge of the metal mask 101 is removed using the easy cutting line 105. As described above, as illustrated in FIG. 21, the mask unit 108 having the structure in which the metal mask 101 is fixed to the frame 103 is formed. In the obtained mask unit 108, the metal mask 101 is maintained in a state in which the openings of the mask portions 102 are exactly aligned in parallel while being free from distortion or loosening, and the positions of the mask portions 102 are maintained. It can also be maintained within a predetermined dimensional accuracy. As a result, by performing deposition using this mask unit 108, it is possible to accurately perform deposition of fine patterns. For example, by depositing a deposition substrate such as a glass substrate on the mask unit 108 and setting it on a vapor deposition apparatus, deposition of an organic layer or a cathode of an organic EL element can be performed, so that fine pattern deposition can be performed with high positional accuracy. It is possible to form a high quality organic layer or cathode electrode.

On the other hand, in the above embodiment, one tension unit 113A, which allows the clamp 118 to move in the direction perpendicular to the direction in which the tension force is applied to the metal mask, is disposed at the position closest to the corner of each side, but the tension The number of installations of the unit 113A can be increased or decreased appropriately, and in some cases, all the tension units may be the tension units 113A. In the above embodiment, since the clamp unit 118 can be moved in the tension unit 113A in a direction perpendicular to the direction in which the tension force is applied to the metal mask, the clamp support 117 or the clamp moving unit 123 is moved. Although the second base member 115B held can be moved in a direction perpendicular to the direction of adding tension, the present invention is not limited to this configuration, and at least the clamp 118 may move in a direction perpendicular to the direction of addition of tension. . Hereinafter, another example of the tension unit that can be used in the present invention will be described.

The tension unit 113B shown in FIG. 17 divides the clamp support 117 of the tension unit 113 shown in FIG. 13 into upper and lower first clamp supports 117A and second clamp supports 117B. The inner member 134 is installed between the two members, and the second clamp supporter 117B is moved parallel to the metal mask 101 held by the clamp 118 while moving in a direction perpendicular to the direction in which the tensile force is applied to the metal mask. The clamp 118 and the clamp opening and closing mechanism 119 are held in the second clamp support 117B, and the clamp moving means 123 is connected to the first clamp support 117A. On the other hand, a position return spring (not shown) for returning the second clamp support 117B to the center position with respect to the first clamp support 117A is also provided. The other structure is the same as that of the tension unit 113 shown in FIG. Also in this tension unit 113B, since the clamp 118 can move at right angles to the direction in which the tensile force is added to the metal mask, the clamp 118 is used at a position where the corner portion of the metal mask 101 is gripped, thereby providing a metal mask ( The corner portion of 101 can be stretched to a predetermined dimension position without any trouble.

The tension unit 113C shown in FIG. 18 and FIG. 19 is a movable piece 118Ab which can pivot the clamp 118A through the fixing piece 18Aa and the pin 136 with respect to the fixing piece 118Aa. Direction in which the clamp force 118A is applied to the metal mask while parallel to the metal mask 101 held by the clamp 118A via the inner member 138 during the straight line with respect to the clamp support 117. It can move at right angles to. On the other hand, a position return spring for returning the clamp 118A to the center position with respect to the clamp support 117 is also provided. The clamp support 117 holds a clamp opening and closing mechanism 119A including a toggle mechanism 120A and a cylinder mechanism 121 for opening and closing the clamp 118A. The toggle mechanism 120A includes a first lever 120b held by the support plate 117a attached to the clamp support 117 so as to pivot about the pin 120a, and a pin on the support plate 117a. A second lever 120d held so as to be able to pivot about 120c, and a ring 120e connecting the first lever 120b and the second lever 120d, and the like. The cylinder mechanism 121 is connected to the first lever 120b, and the adjustment screw 120g for attaching the movable piece 118Ab of the clamp 118A to the closed position is attached to the second lever 120d. As shown in FIG. 18B, the adjustment screw 120g can also adjust the tightening force by the movable piece 118Ab when the clamp 118A is in the closed position. In addition, a torsion coil spring 140 is also provided so as to be connected to each other in order to open and close the movable piece 118Ab in conjunction with the reciprocating swing of the second lever 120b. The other structure is the same as that of the tension unit 113 shown in FIG. Also in this tension unit 113C, since the clamp 118C can move in the direction perpendicular to the direction in which the tensile force is applied to the metal mask, the clamp 118C is used at a position for holding the vicinity of the corner portion 101b of the metal mask 101. The corner portion of the metal mask 101 can be stretched to a predetermined dimension position without interruption.

As mentioned above, although the preferred Example of this invention was described, this invention is not limited to these Examples, It can variously change and implement within the range of description of a claim. For example, in the above embodiment, the hydraulic fluid pressure supplied to the clamp moving means (air cylinder) 123 for imparting a tensile force to each of the plurality of clamps 118 can be individually adjusted so that each clamp 118 is a metal mask ( The tension applied to 101 can be adjusted individually. Since such a structure can precisely adjust the tensile force applied to the metal mask 101, even if the metal mask 101 is prone to distortion or loosening, there is an advantage that it can be pulled and held in an extremely flat state. The present invention is not limited to this configuration. For example, in the case of using a metal mask that can be easily held and held in a relatively flat state, a plurality of clamps arranged at each side may be used, for example, a clamp corresponding to the mask portion. The first set may be divided into a plurality of sets so that the clamp corresponding to the non-mask portion is the second set, and the working fluid pressure to the cylinder device connected to each set of clamps may be adjusted in common.

In addition, the tension units 113, 113A, 113B, and 113C disposed on each side of the metal mask 101 must be positioned so that the respective clamps 118 are aligned with the mask portion 102 and the non-mask portion, respectively. It is not limited to the case where it is arranged, and the mask part 102 and the non-mask part 102b are appropriately combined to change the gripping width or to change the clamping to use more clamps so as to hold the finely divided area. May be added. In any case, in accordance with the characteristics of the metal mask to be used, the number and arrangement of tension units (clamps) may be determined so that the metal mask can be pulled and held without distortion or loosening.

In addition, although the said 1st Example and 2nd Example were demonstrated separately, respectively, you may implement combining 1st Example and 2nd Example as needed.

For example, in the first embodiment, the tension unit 113A shown in FIG. 11 in the second embodiment may be used instead of the additional plate pulling unit and frame pressing unit 21D shown in FIG.

Claims (5)

Positioning the thin metal plate of the quadrilateral shape on the quadrilateral frame;
A tensioning process in which the four sides of the metal sheet are gripped with a plurality of clamps and a tensile force is applied to the metal sheet to be pulled out;
Has a process of fixing the metal sheet in the pulled state to the frame in the pressed state,
In the tensioning process, the vicinity of the corner between the two adjacent sides of the metal sheet is gripped by a clamp, and the clamp pulls the corner portion so as to move in each direction of the two neighboring sides. How to attach. In the frame attaching device for fixing to the frame of the square shape while pulling the thin metal plate of the square shape,
Each of the four sides of the frame and the thin metal plate disposed thereon is provided with a plurality of plate pulling units installed so as to be located in plurality,
Each of the plate pulling units has a clamp for holding the metal sheet and a clamp moving means for moving the clamp to exert a tensile force on the metal sheet held by the clamp,
An additional plate pulling unit is installed near the corner between two adjacent sides of the metal sheet.
The additional sheet pulling unit includes a clamp for holding a metal sheet and a clamp moving means for moving the clamp in each direction of two neighboring sides. 3. The additional plate pulling unit according to claim 2, further comprising: a first base member, and a second base member held in such a manner as to be movable in a direction perpendicular to the direction of adding tension while being parallel to the thin metal plate in the first base member; Further comprising a clamp support held in such a manner as to be able to move in parallel in the direction of the tension force addition from the second base member to the metal sheet,
The clamp and the clamp opening / closing mechanism for opening and closing the clamp are held in the clamp support, and the clamp moving means is connected to the clamp support and the second base member to move the clamp support in the direction of the tensile force addition with respect to the third base member. Apparatus for attaching a thin metal sheet to the frame, characterized in that. 3. The plate clamping unit as set forth in claim 2, wherein the additional plate pulling unit comprises: a base member, a first clamp support held by the tensile force of the metal sheet in such a direction so as to move in parallel in the direction, and the metal on the first clamp support. Further having a second clamp support held parallel to the sheet and held in a direction perpendicular to the direction in which the tensile force is applied,
The clamp and the clamp opening / closing mechanism for opening and closing the clamp are held in the second clamp support, and the clamp moving means moves the first clamp support in a direction in which tensile force is applied with respect to the base member. Apparatus for attaching a thin metal plate to the frame, characterized in that connected to. 3. The additional plate pulling unit according to claim 2, further comprising a base member and a clamp support held in such a manner as to be able to move in parallel in the direction of the tensile force of the metal sheet,
The clamp is held on the clamp support so as to be parallel to the metal thin plate held by the clamp and to be perpendicular to the tensile force direction, and the clamp opening and closing mechanism for opening and closing the clamp is held on the clamp support. And a moving means is connected to the clamp support and the base member to move the clamp support in the direction of the tensile force with respect to the base member.

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