KR100472924B1 - Manufacturing method and manufacturing apparatus of image displaying apparatus - Google Patents

Abstract

An image display appratus is manufactured by processing a panel member through a plurality of chambers including ones for a bake processing and a getter processing. The getter processng is performed at a temperature lower than a temperature of the panel member subjected to the bake processing, to prevent degrading of a getter film. <IMAGE>

Description

Manufacturing method and apparatus for manufacturing an image display device {MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF IMAGE DISPLAYING APPARATUS}

The present invention relates to a manufacturing method and a manufacturing apparatus of an image display device, and more particularly, a front panel constituting a display surface of a display panel on a rear panel, and having a gap interposed to constitute the back surface of the display panel. The present invention relates to an image display device configured by sealing a back plate disposed opposite to one front plate.

There is a conventionally known electron emitting device which is roughly classified into a hot electron emitting device and a cold cathode electron emitting device. Cold cathode electron emission devices include field emission type (hereinafter referred to as FE type) electron emission device, metal / insulating layer / metal type (hereinafter referred to as MIM type) electron emission device, surface conduction type electron emission device and the like. do.

[W. P. Dyke & W. W. Dolan, "Field Emission", Advance in Electron Physics, 8, 89 (1956), and C. A. Spindt, "PHYSICAL Properties of thin-film field emission cathodes with molybdenum cones", J. Appl. Phys., 47, 5248 (1976), and the like are known as examples of FE type electron emitting devices.

C. A. Mead, "Operation of Tunnel-Emission Devices", J. Appl. Phys., 32, 646 (1961), and the like are known as examples of MIM type electron emitting devices.

See M. I. Elinson, Radio Eng. Electron Phys., 10, 1290 (1965) and the like are known as examples of surface conduction electron emitting devices.

Surface conduction electron-emitting devices utilize a phenomenon in which electrons are emitted when a current is supplied through a thin film formed on a small region substrate in a direction parallel to the surface of the film. Using a SnO ₂ thin film studied by Elinson et al., Using an Au thin film (G. Dittmer: "Thin Solid Films 9, 317 (1972)"), In ₂ O ₃ / SnO ₂ Using thin films (M. Hartwell and CG Fonstad: "IEEE Trans. ED Conf.", 519 (1975))) and using carbon thin films (Hisashi Araki, et al. "Vacuum", vol, 26, No. 1, p22 (1983) &quot;) have been reported as surface conduction electron emission devices.

Manufacturing an electron source substrate (back plate) arranged in a matrix and a phosphor substrate (front plate) provided with a phosphor that emits light when excited by an electron beam; and inside the electron emitting device and the phosphor Arranging an envelope providing a vacuum sealing structure and a spacer providing an internal air pressure structure, a front plate and a back plate facing each other, and a low melting point material such as frit glass as a sealant. Sealing the interior, evacuating the interior to a vacuum through a prearranged vacuum exhaust pipe, and sealing the vacuum exhaust pipe, are used to manufacture an image display apparatus using the electron-emitting device as described above. have.

The manufacturing method using the above-described prior art is not suitable for the manufacture of a display panel which requires a considerably long time to manufacture the display panel, and also requires an internal vacuum of ^10-6 Pa or a further reduced level.

This problem of the prior art has been solved by the method disclosed in, for example, Japanese Patent Laid-Open No. 11-135018.

The method disclosed in Japanese Patent Laid-Open No. 11-135018 mentioned above uses only the steps of determining the position of the front plate and the back plate in a single vacuum chamber and sealing the front plate and the back plate. Other processes necessary for the manufacture of the display panel, such as firing treatment, getter treatment, and electron beam cleaning treatment, should also be carried out in the vacuum chamber, respectively. Each chamber is evacuated to a vacuum each time the front and back plates are returned to the vacuum chamber, requiring a long time for the manufacturing step, thereby significantly reducing the time for the manufacturing step and at the same time the final manufacturing step. In order to obtain a high vacuum or more decompressed level of 10 ^-6 Pa.

An object of the present invention is to shorten the time required for evacuation to a vacuum during the manufacture of an image display apparatus, and to improve the manufacturing yield by making it easy to obtain a high vacuum degree.

According to the present invention, a plurality of panel members constituting a panel of an image forming apparatus are continuously loaded into a plurality of processing chambers each having temperature control means and set under reduced pressure conditions, and a plurality of panel members are controlled while controlling temperature. A method of manufacturing an image display apparatus comprising the steps of: processing a process of forming a panel, and forming a panel by sealing the panel member, wherein the plurality of processing chambers include: a firing processing chamber for firing the panel member; And a getter processing chamber for carrying in the panel member after the firing treatment and performing getter processing on the panel member; The above-described getter process is performed while the panel member in the getter processing chamber is set at a temperature lower than the temperature of the panel member subjected to the firing process in the firing processing chamber. To provide.

In addition, the present invention is a panel member constituting the panel of the image forming apparatus, the step of continuously carried in a plurality of processing chambers each provided with a temperature control means and set to a reduced pressure condition, the panel member while controlling the temperature A method of manufacturing an image forming apparatus, comprising: performing a plurality of processes in a plurality of steps, and forming a panel by sealing the panel member, wherein the plurality of processing chambers are subjected to a firing process of firing the panel member. A chamber, a surface cleaning treatment chamber carrying in the panel member after the firing treatment and performing a surface cleaning treatment on the panel member, and a panel cleaning in which the panel member is carried in after the surface cleaning treatment. A getter processing chamber for performing getter processing on the member; The above-mentioned getter processing is performed in a state where the panel member in the getter processing chamber is set at a temperature lower than the temperature of the panel member subjected to the firing processing in the firing processing chamber. It provides a manufacturing method.

In addition, the present invention provides a panel member constituting a panel of an image display apparatus, wherein the panel member is continuously loaded into a plurality of processing chambers each provided with temperature control means and set under reduced pressure conditions, and the temperature is controlled. 10. A method of manufacturing an image display apparatus, comprising: performing a plurality of processes in a plurality of steps; and forming a panel by sealing the panel member; wherein the plurality of processing chambers are firing chambers for firing the panel member. And a first getter chamber which carries in the panel member after the firing process and performs a getter process for the interior of the process chamber, and the panel member after the getter process is loaded into the panel member. And a second getter chamber adjacent to the first getter chamber described above; The above panel member getter processing is performed in a state where the panel member in the second getter processing chamber is set at a temperature lower than the temperature of the panel member subjected to the firing process in the firing processing chamber. A method of manufacturing a display device is provided.

In addition, the present invention provides a panel member constituting a panel of an image display apparatus, wherein the panel member is continuously loaded into a plurality of processing chambers each provided with temperature control means and set under reduced pressure conditions, and the temperature is controlled. A method of manufacturing an image display apparatus, comprising: performing a plurality of processes in a plurality of steps, and forming a panel by sealing the panel member, wherein the plurality of processing chambers are subjected to a firing process of firing the panel member. A chamber, a surface cleaning treatment chamber carrying in the above panel member after the firing treatment and performing a surface cleaning treatment on the panel member, and carrying out the above-described treatment of the panel member after the surface cleaning treatment. A first getter processing chamber which performs a getter processing for the inside of the chamber and the panel member after the getter processing are carried in and A getter processing is performed with respect to the board member and a second getter processing chamber adjacent to the above described first getter processing chamber; The above-mentioned getter processing is performed in a state where the panel member in the second getter processing chamber is set at a temperature lower than the temperature of the panel member which has been fired in the firing processing chamber. Provided is a method of manufacturing a device.

In addition, the present invention provides a panel member constituting a panel of an image display apparatus, wherein the panel member is continuously loaded into a plurality of processing chambers each provided with temperature control means and set under reduced pressure conditions, and the temperature is controlled. A method of manufacturing an image display apparatus, comprising: performing a plurality of processes in a plurality of steps, and forming a panel by sealing the panel member, wherein the plurality of processing chambers are subjected to a firing process of firing the panel member. A getter which carries a chamber, a cooling processing chamber into which the panel member is brought in after the firing treatment and cools the panel member, and a getter process of carrying in the panel member after the cooling treatment and performing the getter processing on the panel member. It provides a manufacturing method of an image display apparatus comprising a processing chamber.

In addition, the present invention provides a plurality of treatments to the above-mentioned panel members while continuously conveying the panel members constituting the panel to a plurality of processing chambers each having temperature control means and set under reduced pressure conditions, and controlling the temperature. And forming a panel by sealing the panel member, wherein the plurality of processing chambers comprise: a firing processing chamber for firing the panel member; A cooling chamber for carrying in the panel member after the firing treatment and cooling the panel member, a surface cleaning chamber for performing surface cleaning treatment on the panel member, and the panel after the surface cleaning treatment And a getter processing chamber for conveying the member and performing getter processing on the panel member described above. It provides a manufacturing method.

In addition, the present invention provides a plurality of processes to the above panel member while controlling the temperature, the step of continuously bringing the panel member constituting the panel into a plurality of processing chambers each having temperature control means and set under reduced pressure conditions; And forming a panel by sealing the panel member, wherein the plurality of processing chambers comprise: a firing processing chamber for firing the panel member; A cooling processing chamber for carrying in the panel member after the firing treatment and cooling the panel member, and a getter processing for carrying in the panel member after the cooling treatment and performing the getter treatment to the interior of the processing chamber. Adjacent to the first getter processing chamber and the first getter processing chamber, and after the getter processing, the panel member is loaded and the panel member is Provides for a method of manufacturing an image displaying apparatus characterized in that it comprises a second getter processing chamber for performing a getter processing.

In addition, the present invention provides a panel member constituting a panel of an image display apparatus, wherein the panel member is continuously loaded into a plurality of processing chambers each provided with temperature control means and set under reduced pressure conditions, and the temperature is controlled. A method of manufacturing an image display apparatus, comprising: performing a plurality of processes in a plurality of steps, and forming a panel by sealing the panel member, wherein the plurality of processing chambers are subjected to a firing process of firing the panel member. A chamber, a cooling chamber in which the panel member is brought in after the firing treatment and cooling the panel member, and a surface cleaning chamber in which the panel member is brought in after the cooling treatment and surface-washing is performed on the panel member. And a first gettercher which carries in the panel member after the surface cleaning treatment and performs a getter treatment on the inside of the treatment chamber. And a second getter processing chamber adjacent to said first getter processing chamber and carrying in said panel member after said getter processing and performing getter processing on said panel member. A manufacturing method of an image display apparatus is provided.

In addition, the present invention (a) a first member including a substrate on which the phosphor excitation means is disposed and a second member including the substrate on which the phosphor is disposed in a firing chamber filled with a reduced pressure atmosphere, Performing a calcination process; (b) bringing one or both of the first member and the second member into and out of the first member and the second member in a reduced pressure atmosphere in a getter processing chamber filled with a reduced atmosphere; Performing getter processing on one or both of the members; (c) importing said first member and said second member under a reduced pressure atmosphere into a getter processing chamber filled with a reduced atmosphere and heating for sealing, said manufacturing method of the image display apparatus comprising: There is provided a manufacturing method of an image display apparatus, wherein the member or getter processing of the members in one step (b) is performed at a temperature lower than the heating temperature in the above step (a).

In addition, the present invention (a) a first member including a substrate on which the phosphor excitation means is disposed and a second member including the substrate on which the phosphor is disposed in a firing chamber filled with a reduced pressure atmosphere, and further firing Heating for; (b) carrying out one or both of said first member and said second member from said first member and said second member in a reduced pressure atmosphere in a cooling chamber filled with a reduced atmosphere and further performing a cooling treatment; (c) bringing one or both of the above-mentioned first member and said second member into the getter processing chamber filled with the reduced atmosphere under reduced pressure, and with respect to one or both of the imported members. Performing getter processing on one or both of the members; (d) bringing said first member and said second member into a getter processing chamber filled with a reduced atmosphere under reduced pressure and further heating and sealing said first member and said second member; A manufacturing method of an image display apparatus is provided.

In addition, the present invention (a) a first member including a substrate on which the phosphor excitation means is disposed and a second member including the substrate on which the phosphor is disposed in a firing chamber filled with a reduced pressure atmosphere, and further firing Heating for; (b) bringing one or both of the first member and the second member into the surface cleaning chamber filled with the pressure-reduced atmosphere under reduced pressure; Performing a surface cleaning treatment on one or both sides; (c) bringing one or both of the first member and the second member into the getter processing chamber filled with the decompressed atmosphere under reduced pressure and with respect to one of the imported members or one of the both members brought in; Or performing getter processing on both members; (d) importing said first member and said second member into a getter processing chamber filled with a reduced atmosphere under reduced pressure and heating for sealing; To provide.

In addition, the present invention (a) a first member including a substrate on which the phosphor excitation means is disposed and a second member including the substrate on which the phosphor is disposed in a firing chamber filled with a reduced pressure atmosphere, and further firing Heating for; (b) bringing one or both of the first member and the second member into and out of the first member and the second member under reduced pressure in a surface cleaning chamber filled with a reduced atmosphere; Performing a surface cleaning treatment on one or both of the members; (c) bringing one or both of the above-mentioned first member and said second member into a first getter processing chamber filled with a reduced atmosphere and depressurizing the inside of said first getter processing chamber. Performing a getter process; (d) bringing in one or both of the above-mentioned first member and said second member in a reduced pressure atmosphere to the second getter processing chamber, and for one member carried in or one of the conveyed members or Performing getter processing on both members; and (e) heating the first member and the second member into a getter processing chamber filled with a reduced atmosphere under heating under a reduced pressure to heat and seal the same. To provide.

In addition, the present invention (a) a first member including a substrate on which the phosphor excitation means is disposed and a second member including the substrate on which the phosphor is disposed in a firing chamber filled with a reduced pressure atmosphere, and further firing Heating for; (b) importing one or both of said first member and said second member from said first member and said second member under a reduced pressure atmosphere into a cooling chamber filled with a reduced atmosphere and further performing a cooling treatment; (c) bringing one or both of the first member and the second member into and out of the first member and the second member in a reduced pressure atmosphere into a surface cleaning chamber filled with a reduced atmosphere; Performing a surface cleaning treatment on one or both of the members; (d) bringing in one or both of the above-mentioned first members and said second members under a reduced-pressure atmosphere in a getter processing chamber and for one or both of the imported members or one of the two members. Performing getter processing on the member; (e) bringing the first member and the second member into a getter processing chamber filled with the reduced atmosphere under reduced pressure, and heating and sealing the first member and the second member. It provides a method of manufacturing.

In addition, the present invention (a) a first member including a substrate on which the phosphor excitation means is disposed and a second member including a substrate on which the phosphor is disposed in a firing chamber in a reduced pressure atmosphere, Heating; (b) carrying out one or both of said first member and said second member from said first member and said second member in a reduced pressure atmosphere in a cooling chamber filled with a reduced atmosphere and further performing a cooling treatment; (c) bringing one or both of the above-mentioned first member and said second member into and out of the first member and said second member under a reduced pressure in a surface cleaning chamber filled with a reduced atmosphere. Performing a surface cleaning treatment on one or both of the members; (d) bringing one or both of the above-mentioned first member and said second member into a first getter processing chamber filled with a reduced atmosphere and depressurizing the interior of said first getter processing chamber; Performing a getter process; (e) bringing in one or both of said first members and said second member from said first member and said second member under a reduced pressure atmosphere in a second filled atmosphere and also in one of the imported members or in both of the imported components. Performing getter processing on one or both members; and (f) bringing the first member and the second member into a getter processing chamber under a reduced pressure and heating them for sealing.

In addition, the present invention provides a getter processing chamber for performing getter processing on one or both of the first member including the substrate on which the phosphor excitation means is disposed and the second member including the substrate on which the phosphor is disposed; A sealing processing chamber for carrying out a sealing treatment by heating the first member and the second member, and the first member and the second member are brought into the sealing processing chamber from the getter processing chamber. Arranging the carrying-in means which can be made in a reduced pressure atmosphere; Further, the heat shield member provides an apparatus for manufacturing an image display apparatus, wherein the heat shield member is disposed between the getter processing chamber and the sealing processing chamber.

In addition, the present invention provides a firing processing chamber which performs a firing process by heating a first member including a substrate on which phosphor excitation means is disposed and a second member including a substrate on which phosphor is disposed, the first member and the above-mentioned. A getter processing chamber for performing getter processing on one or both of the second members, and the first member and the second member can be loaded from the firing processing chamber into the getter processing chamber. Placing the loading means in a reduced pressure atmosphere; In addition, the heat shield member provides an apparatus for manufacturing an image display apparatus, characterized in that disposed between the firing processing chamber and the getter processing chamber.

In addition, the present invention provides a firing processing chamber which performs a firing process by heating a first member including a substrate on which phosphor excitation means is disposed and a second member including a substrate on which phosphor is disposed, the first member and the above-mentioned. A getter processing chamber for performing getter processing on one or both members of one of the second members, and a sealing processing chamber which performs sealing by heating the first member and the second member, the firing chamber, Disposing means for bringing the first member and the second member into the processing chamber in the order of the getter processing chamber and the sealing processing chamber in a reduced pressure atmosphere; Further, the heat shield member provides an apparatus for manufacturing an image display apparatus, wherein the heat shield member is disposed between a pair of processing chambers in the above processing chambers.

In addition, the present invention provides a firing processing chamber which performs a firing process by heating a first member including a substrate on which phosphor excitation means is disposed and a second member including a substrate on which phosphor is disposed; A cooling processing chamber for gradually cooling one or both members of one second member, a getter processing chamber for performing getter processing for one or both members of the first member and the second member, Arrangement of the first member and the second member into the processing chamber in the order of the firing chamber, the cooling chamber and the getter chamber in a reduced pressure atmosphere. An apparatus for manufacturing an image display apparatus is provided.

In addition, the present invention provides a firing processing chamber which performs a firing process by heating a first member including a substrate on which phosphor excitation means is disposed and a second member including a substrate on which phosphor is disposed; A cooling processing chamber for gradually cooling one or both members of one second member, a getter processing chamber for performing getter processing for one or both members of the first member and the second member; And a sealing chamber for sealing by heating the first member and the second member in the order of the firing chamber, the cooling chamber, the getter chamber, and the sealing chamber. Manufacture of an image display apparatus characterized by arranging a carrying means for carrying the first member and the second member into the processing chamber in a reduced pressure atmosphere. Provide value.

In the first aspect of the present invention, the panel members constituting the panel of the image display apparatus are sequentially loaded into a plurality of pressure reduction processing chambers each provided with temperature control means, and a plurality of panel members are controlled by controlling the temperature. After the treatment of the panel member, the panel member is sealed to form a panel; The plurality of processing chambers include a firing chamber for carrying out the firing process on the panel member and a getter process on the panel member after the firing process is completed. And performing the above getter processing in a state where the temperature of the panel member in the getter processing chamber is set to a temperature lower than the temperature of the panel member fired in the firing chamber as described above. There is a manufacturing method of an image display apparatus.

In the first aspect of the present invention, the plurality of processing chambers include a chamber adjacent to the getter chamber into which the panel member is loaded before being carried into the getter chamber after the firing process is performed in the firing chamber. Include. It is preferable that the vacuum degree in the front chamber and the getter processing chamber is set to 10 ⁻⁴ Pa or less.

In the second aspect of the present invention, the panel members constituting the panel of the image display apparatus are sequentially loaded into a plurality of pressure reduction processing chambers each provided with temperature control means, and the plurality of panel members are controlled by controlling the temperature. After the treatment, the panel member is sealed to form a panel; The plurality of processing chambers include a firing chamber for firing on the panel member, a surface cleaning chamber for surface cleaning on the panel member, and the panel member after the surface cleaning process is completed. A getter processing chamber carried in and performing getter processing on the panel member; And performing the above getter process in a state where the temperature of the panel member in the getter processing chamber is lower than the temperature of the panel member fired in the firing processing chamber. There is this.

Further, in the second invention described above, the plurality of processing chambers are the above-mentioned getters into which the panel members are carried in before the surface cleaning processing is finished in the surface cleaning processing chamber and before being brought into the getter processing chamber. A chamber in the front portion adjacent to the processing chamber, wherein the chamber in the front portion and the interior of the getter processing chamber are set to a vacuum of 10 ⁻⁴ Pa or less; Alternatively, the surface cleaning chamber is adjacent to the getter chamber, the interior of the surface cleaning chamber and the getter processing chamber are preferably set to a vacuum of 10 ⁻⁴ Pa or less, or the surface cleaning treatment described above. Is preferably a treatment of irradiating the surface of the loaded member with an electron beam to clean the member; Alternatively, the above-mentioned surface cleaning treatment is preferably a treatment of irradiating ions to the surface of the loaded member to clean the above member; Alternatively, the above-described surface cleaning treatment is preferably a treatment of irradiating ultraviolet rays to the surface of the loaded member to clean the above member; Alternatively, the above-described surface cleaning treatment is preferably a treatment of irradiating a plasma to the surface of the loaded member to clean the member.

In the first and second inventions described above, the getter processing inside the getter processing chamber is preferably performed in addition to the getter processing chamber; Alternatively, the panel member is preferably sealed in a state where the temperature of the panel member is set to a temperature higher than the temperature of the panel member gettered in the getter processing chamber.

According to a third aspect of the present invention, a plurality of panel members are sequentially loaded into a plurality of pressure reduction processing chambers each equipped with temperature control means, and the temperature is controlled to control the temperature. After the treatment of the panel member, the panel member is sealed to form a panel; The plurality of processing chambers include a firing processing chamber for firing the panel member, a first getter processing chamber into which the panel member is loaded after firing and performing getter processing in the processing chamber, and the getter described above. A panel member is loaded after the processing is finished, and the getter processing is performed on the panel member, and the second getter processing chamber is adjacent to the first getter processing chamber; The above getter processing of the panel member is performed in a state where the temperature of the panel member in the second getter processing chamber is set to a temperature lower than the temperature of the panel member subjected to the firing treatment in the firing treatment. A manufacturing method of an image display apparatus is provided.

Further, in the third invention, the plurality of processing chambers are configured such that the panel member is brought in and is adjacent to the first getter processing apparatus after the firing processing is finished in the firing processing chamber. It is preferable to include a chamber of the front part, and the chamber of the front part and the inside of the first getter chamber and the second getter chamber are set to a vacuum degree of 10 ⁻⁴ Pa or less.

In the fourth aspect of the present invention, a plurality of panel members constituting a panel of an image display apparatus are sequentially loaded into a plurality of pressure reduction processing chambers each provided with temperature control means, and a plurality of panel members are controlled by controlling the temperature. After the treatment of the panel member, the panel member is sealed to form a panel; The plurality of processing chambers may include: a firing processing chamber for firing the panel member; A surface cleaning chamber in which the panel is loaded after the firing treatment is finished and the surface cleaning treatment of the panel member is carried out, and a panel is loaded in the processing chamber after the surface cleaning treatment is finished. And a first getter processing chamber for processing and a second getter processing chamber which is loaded with the panel member after the getter processing is completed and performs a getter processing on the panel, and is adjacent to the first getter processing chamber. and; There is a manufacturing method of an image display apparatus, wherein the getter process is performed on the panel while the temperature of the panel is set to a temperature lower than the temperature of the panel member fired by the firing process. .

Further, in the fourth invention, the surface cleaning chamber is adjacent to the first getter processing chamber, and the inside of the surface cleaning chamber, the first getter chamber and the second getter chamber is 10 ^-4 Pa. It is preferable that the vacuum degree is set below; Alternatively, the surface cleaning treatment is preferably a treatment for irradiating an electron beam to the loaded member to clean the surface of the member; Alternatively, the above-mentioned surface cleaning treatment is preferably a treatment of irradiating ions to the loaded member to clean the surface of the member; Alternatively, the above-mentioned surface cleaning treatment is preferably a treatment of irradiating ultraviolet rays with respect to the carried member to clean the surface of the member; Alternatively, the above-described surface cleaning treatment is preferably a treatment for irradiating a plasma to the loaded member to clean the surface of the member.

Further, in the third and fourth inventions described above, the panel member is set in a state in which the temperature of the panel member is set to a temperature higher than the temperature of the panel member that is gettered in the second getter processing chamber. It is preferable to perform sealing.

In the fifth aspect of the present invention, a plurality of panel members constituting a panel of an image display apparatus are sequentially loaded into a plurality of decompression processing chambers each provided with temperature control means, and a plurality of panel members are controlled by controlling the temperature. After the treatment of the panel member, the panel member is sealed to form a panel; The plurality of processing chambers include a firing chamber for firing the panel member, a cold chamber for importing the panel member after the firing process and cooling the panel member, and the panel after the cooling process. And a getter processing chamber which carries in a member and performs getter processing on the panel member.

Further, in the fifth aspect of the present invention, the plurality of processing chambers include the panel member being loaded into the getter chamber after the cooling treatment is completed in the cooling processing chamber and before being brought into the getter processing chamber. It is preferable to include an adjacent front chamber, wherein the interior of the front chamber and the getter processing chamber are set to a vacuum of 10 ^-4 Pa or less; Further, it is preferable that the cooling chamber is adjacent to the getter processing chamber, and that the degree of vacuum is set to 10 ⁻⁴ Pa or less in the cooling processing chamber and the inside of the getter processing chamber; In the above getter processing chamber, it is preferable to add a getter process inside the getter process; In the cooling chamber described above, it is preferable to perform the surface cleaning treatment of the panel member; In the cooling chamber described above, it is preferable to add a getter treatment inside the cooling chamber; In the cooling chamber described above, it is preferable to perform the surface cleaning treatment of the panel member and the getter treatment inside the cooling treatment chamber; In addition, the above-mentioned surface cleaning treatment is preferably a treatment of irradiating an electron beam with respect to the loaded member to clean the surface of the member; In addition, the above-mentioned surface cleaning treatment is preferably a treatment of irradiating ions to the surface of the loaded member to clean the surface of the member; In addition, the surface cleaning treatment described above is preferably a treatment of irradiating ultraviolet rays to the surface of the loaded member to clean the surface of the member; In addition, the surface cleaning treatment described above is preferably a treatment in which plasma is irradiated to the surface of the loaded member to clean the surface of the member.

According to a sixth aspect of the present invention, a plurality of panel members constituting a panel of an image display apparatus are sequentially loaded into a plurality of pressure reduction processing chambers each provided with temperature control means, and a plurality of panel members are controlled by controlling the temperature. After the treatment of the panel member, the panel member is sealed to form a panel; The plurality of processing chambers include a firing processing chamber for firing the panel member, a cooling chamber for loading the panel member after the firing process and cooling the panel member, and the cooling process described above. The panel member is brought in after the completion of the process and the surface cleaning chamber is subjected to the surface cleaning treatment on the panel member, and the panel member is loaded after the surface cleaning treatment is finished, and the getter treatment is performed on the panel member. And a getter processing chamber for performing the above.

Further, in the sixth aspect of the present invention, the plurality of processing chambers are loaded with the panel member and brought into the getter processing chamber after the surface cleaning processing is finished in the surface cleaning processing chamber and before being brought into the getter processing chamber. It is preferable to include a chamber of the front portion adjacent to the inside of the chamber and the getter processing chamber of the front portion, the degree of vacuum is set to 10 ^-4 Pa or less; Or, the surface cleaning chamber is adjacent to the getter processing chamber, and the inside of the surface cleaning chamber and the getter processing chamber is set to a vacuum degree of 10 ^-4 Pa or less; Alternatively, in the above getter processing chamber, it is preferable to add a getter processing inside the getter processing chamber; Alternatively, the surface cleaning treatment is preferably a treatment for irradiating an electron beam to the surface of the loaded member to clean the surface of the member; Alternatively, the above-mentioned surface cleaning treatment is preferably a treatment of irradiating ions to the surface of the loaded member to clean the surface of the member; Alternatively, the above-mentioned surface cleaning treatment is preferably a treatment of irradiating ultraviolet rays with respect to the carried member to clean the surface of the member; Alternatively, the above-described surface cleaning treatment is preferably a treatment of irradiating a plasma to the loaded surface to clean the surface of the member.

Further, in the fifth and sixth inventions described above, the sealing of the panel member is performed while the temperature of the panel member is set to a temperature higher than the temperature of the panel member that is gettered in the getter processing chamber. It is preferable to carry out.

According to a seventh aspect of the present invention, a plurality of panel members constituting a panel of an image display apparatus are sequentially loaded into a plurality of pressure reduction processing chambers each provided with temperature control means, and a plurality of panel members are controlled by controlling the temperature. After the treatment of the panel member, the panel member is sealed to form a panel; The plurality of processing chambers may include: a firing processing chamber for firing the panel member, a cooling chamber for loading the panel member and cooling the panel member after the firing process is completed; The panel member is brought in after the cooling treatment is finished, and the first getter processing chamber which performs the getter processing inside the processing chamber, and the panel member is loaded after the getter processing is finished, and the panel is brought in. And a second getter processing chamber adjacent to said first getter processing chamber, wherein said getter processing is performed on said member.

Further, in the seventh invention, the cooling chamber is adjacent to the first getter processing chamber, and the inside of the cooling processing chamber, the first getter processing chamber and the second getter processing chamber is 10. It is preferable that the degree of vacuum be set below ^-4 Pa; Alternatively, in the surface cleaning treatment chamber described above, it is preferable to add the surface cleaning treatment of the panel member; Alternatively, the surface cleaning treatment is preferably a treatment for irradiating an electron beam to the surface of the loaded member to clean the surface of the member; Alternatively, the above-mentioned surface cleaning treatment is preferably a treatment of irradiating ions to the surface of the loaded member to clean the surface of the member; Alternatively, the above-mentioned surface cleaning treatment is preferably a treatment of irradiating ultraviolet rays to the surface of the loaded member to clean the surface of the member; Alternatively, the surface cleaning treatment described above is preferably a treatment in which plasma is irradiated to the surface of the loaded member to clean the surface of the member.

In the eighth aspect of the present invention, a plurality of panel members constituting a panel of an image display apparatus are sequentially loaded into a plurality of pressure reduction processing chambers each provided with temperature control means, and a plurality of panel members are controlled by controlling the temperature. After the treatment of the panel member, the panel member is sealed to form a panel; The plurality of processing chambers may include: a firing processing chamber for firing the panel member; a cooling chamber for loading the panel member and cooling the panel after the firing process is completed; After the cooling treatment is finished, the panel member is loaded and the surface cleaning chamber is subjected to the surface cleaning treatment of the panel member, and after the surface cleaning treatment is completed, the panel member is loaded and the inside of the processing chamber is finished. A first getter processing chamber for performing a getter processing of the second getter processing chamber, and a second getter processing chamber loaded with the panel member brought in after the getter processing is completed and adjacent to the first getter processing chamber with respect to the panel member. There is a manufacturing method of an image display apparatus.

Further, in the eighth invention, the surface cleaning chamber is adjacent to the first getter processing chamber, and the inside of the surface cleaning chamber, the first getter processing chamber and the second getter processing chamber are It is preferable that the vacuum degree be set at 10 ⁻⁴ Pa or less; Alternatively, the surface cleaning treatment is preferably a treatment for irradiating an electron beam to the surface of the loaded member to clean the surface of the member; Alternatively, the above-mentioned surface cleaning treatment is preferably a treatment of irradiating ions to the surface of the loaded member to clean the surface of the member; Alternatively, the above-mentioned surface cleaning treatment is preferably a treatment of irradiating ultraviolet rays to the surface of the loaded member to clean the surface of the member; Alternatively, the above-described surface cleaning treatment is preferably a treatment for irradiating a plasma to the surface of the loaded member to clean the surface of the member.

Further, in the seventh to eighth inventions, the panel member is sealed in a state where the temperature of the panel is set to a temperature higher than the temperature of the panel member that is gettered in the second getter processing chamber. It is preferable to carry out.

Further, in the first to eighth inventions described above, the panel member has a front panel constituting a display on the front surface of the panel, is disposed to face away from the front panel, and constitutes a rear surface of the panel. It is preferable that it is sealed with the backplane which; Alternatively, on the rear plate side, it is preferable that a first sealing material for sealing with the panel member is arranged; Alternatively, at the rear plate side, it is preferable that an outer frame constituting the side of the panel fixed by the second sealing material and a first sealing material sealing with the panel member portion disposed on the outer frame are arranged. ; Alternatively, the melting point of the second sealing material is preferably higher than the melting point of the first sealing material; Alternatively, the first sealing material is preferably a metal having a low melting point or an alloy of the metal; Alternatively, the second sealing material is preferably frit glass.

Further, in the first to eighth inventions described above, the panel member further includes a first sealing member disposed on the front plate side, and is sealed with the back plate by the first sealing member. Preferably; Or, it is preferable that the outer frame constituting the side of the panel fixed by the second sealing member on the rear plate side is disposed; Alternatively, the melting point of the second sealing material is preferably higher than the melting point of the first sealing material; Alternatively, the above sealing material is preferably a metal having a low melting point or an alloy of the metal; Alternatively, the second sealing material is preferably frit glass.

Further, in the seventh to eighth inventions, the panel member further includes an outer frame constituting the panel side surface fixed to the front plate by a second sealing material, and the back plate It is preferable to seal with; Or, in the back plate, it is preferable that the first sealing material for sealing with the panel member is disposed; Alternatively, the melting point of the second sealing material is preferably higher than the melting point of the first sealing material; Alternatively, the first sealing material is preferably a metal having a low melting point or an alloy of the metal; Alternatively, the second sealing material is preferably frit glass.

Further, in the seventh to eighth inventions, the panel member includes an outer frame constituting the panel side surface fixed to the front plate by a second sealing material and a first disposed on the outer frame. Preferably, the panel member is sealed by the back plate and the first sealing material described above; Further, the melting point of the second sealing material is preferably higher than the melting point of the first sealing material; In addition, it is preferable that the said 1st sealing material is a low melting metal or an alloy of this metal; Moreover, it is preferable that said 2nd sealing material is frit glass.

Further, in the first to eighth inventions described above, the panel members are disposed to face each other at a distance from a front plate constituting a rear side of the panel and constituting a display surface of the panel. It is preferable to have a backplate which seals with; Or, it is preferable that the said 1st sealing material which seals with the said panel member is arrange | positioned at the said front plate side; Alternatively, it is preferable that, on the front plate side, an outer frame constituting the panel side surface fixed by the second sealing material and a first sealing material sealing the panel arranged with respect to the outer frame are arranged; Alternatively, the melting point of the second sealing material is preferably higher than the melting point of the first sealing material; Alternatively, the first sealing material is preferably a metal having a low melting point or an alloy of the metal; Alternatively, the second sealing material is preferably frit glass.

Further, in the first to eighth inventions described above, the panel member further includes a first sealing material disposed on the rear plate, and is sealed with the front plate by the first sealing material. Preferably; Alternatively, in the front plate, the outer frame constituting the panel side is preferably fixed by a second sealing material; Alternatively, the melting point of the second sealing material is preferably higher than the melting point of the first sealing material; Alternatively, the first sealing material is preferably a metal having a low melting point or an alloy of the metal; Alternatively, the second sealing material is preferably frit glass.

Further, in the first to eighth inventions, it is preferable that the panel member further has an outer frame constituting the panel side fixed to the back plate by a second sealing material; Or, it is preferable that the said 1st sealing material which seals with the said panel member is arrange | positioned at the said front plate side; Alternatively, the melting point of the second sealing member is preferably higher than the melting point of the first sealing member; Alternatively, the first sealing material is preferably a metal having a low melting point or an alloy of the metal; Alternatively, the second sealing material is preferably frit glass.

Further, in the first to eighth inventions described above, the panel member includes an outer frame constituting the panel side surface fixed to the rear plate by a second sealing member and a first sealing disposed on the outer frame. It is preferable that the panel member is further sealed by the front plate and the first sealing material; Alternatively, the melting point of the second sealing material is preferably higher than the melting point of the first sealing material; Alternatively, the first sealing material is preferably a metal having a low melting point or an alloy of the metal; Alternatively, the second sealing material is preferably frit glass.

Further, in the first to eighth inventions described above, it is preferable that the front plate is a phosphor; Alternatively, the front plate preferably has a phosphor and a metal back; Alternatively, the rear plate preferably has phosphor excitation means; Alternatively, the above-mentioned phosphor excitation means preferably has an electron emitting device.

In the ninth invention of the present invention, (a): a second member comprising a substrate having a phosphor disposed in a firing chamber of a vacuum atmosphere and a first member comprising a substrate on which phosphor excitation means are arranged for heat treatment and firing; Importing the member; (b): the first member described above in the getter processing chamber in a vacuum atmosphere in order to perform getter processing on one of the imported members or on one or both of the imported members. Importing one or both members from the second member; (c): a method of manufacturing an image display apparatus comprising the steps of bringing said first member and said second member into a getter processing chamber of a vacuum atmosphere for heating and sealing. There is a manufacturing method of an image display apparatus, wherein the step (b) is performed while the temperature is set to a temperature lower than the heating temperature in the step (a).

According to a tenth aspect of the present invention, (a) a second member including a substrate having a phosphor disposed in a firing chamber of a vacuum atmosphere and a first member comprising a substrate on which phosphor excitation means are disposed for heating and firing treatment. Importing the member; (b) bringing one or both of said first member and said second member into said cooling chamber under a vacuum atmosphere for cooling; (c) the first member and the above-mentioned agent in the sealing chamber of the vacuum atmosphere under a vacuum atmosphere, so as to perform a getter treatment on one or both of the members carried or both members carried. Importing one or both of the two members; (d) There is a manufacturing method of an image display apparatus comprising the steps of bringing said first member and said second member into a sealing chamber of a vacuum atmosphere for heating and sealing.

Further, in the tenth invention, it is preferable to perform surface cleaning treatment on one or both of the members carried in the cooling treatment chamber in the step (b) or on both of the conveyed members; Alternatively, in the cooling treatment chamber of step (b), surface cleaning treatment and getter treatment in one of the members carried in or in one or both of the members brought in, in the cooling treatment chamber. It is preferable to carry out.

According to an eleventh aspect of the present invention, (a) a second member including a substrate having a phosphor disposed in a firing chamber of a vacuum atmosphere and a first member comprising a substrate on which phosphor excitation means are disposed for heating and firing treatment. Importing the member; (b) the first member described above in the surface cleaning chamber of the vacuum atmosphere under vacuum atmosphere to perform surface cleaning treatment on one of the imported members or on one or both of the imported members. Importing one or both members from the second member; (c) the first member and the above-mentioned agent in the getter processing chamber of the vacuum atmosphere under a vacuum atmosphere, so as to perform a getter processing on one of the imported members or on one or both of the imported members. Importing one or both of the two members; (d) There is a manufacturing method of an image display apparatus, comprising the steps of bringing the first member and the second member into a sealing chamber of a vacuum atmosphere for heating and sealing.

In addition, in the eleventh invention, it is preferable to perform a getter processing in the surface cleaning processing chamber inside the surface cleaning processing chamber in step (b); In addition, it is preferable to cool the inside of the surface cleaning treatment chamber of step (b) with respect to one member carried in or both members carried in.

According to a twelfth aspect of the present invention, there is provided a (a) second member including a substrate having a phosphor disposed in a firing chamber of a vacuum atmosphere and a first member including a substrate on which phosphor excitation means are disposed for heating and firing treatment. Importing the member; (b) the first member described above in the surface cleaning chamber of the vacuum atmosphere and under the vacuum atmosphere, in order to perform the surface cleaning treatment on one or both of the imported members or both of the imported members. Importing one or both members from the second member; (c) bringing one or both of said first member and said second member into said getter processing chamber of a vacuum atmosphere in order to perform getter processing in said getter processing chamber; ; (d) the first member described above in the second getter processing chamber of the vacuum atmosphere under a vacuum atmosphere for performing getter processing on one of the imported members or on one or both of the imported members. Importing one or both members from the second member; (e) There is a manufacturing method of an image display apparatus, comprising the steps of bringing the first member and the second member into a sealing chamber of a vacuum atmosphere for heating and sealing.

Further, in the twelfth invention, it is preferable to cool one or both of the members carried in the inside of the surface cleaning chamber of step (b).

According to a thirteenth aspect of the present invention, (a) a first member comprising a substrate on which phosphor excitation means is disposed and a second member comprising a substrate on which phosphor is disposed in a firing chamber of a vacuum atmosphere for heating and firing treatment. Importing; (b) bringing one or both of said first member and said second member into said cooling chamber of said vacuum atmosphere in a vacuum atmosphere to effect cooling; (c) the first member described above in the surface cleaning chamber of the vacuum atmosphere under a vacuum atmosphere for performing surface cleaning treatment on one of the imported members or on one or both of the imported members; or Bringing in one or both members from the second member; (d) the first member and the above-mentioned material in the getter processing chamber of the vacuum atmosphere under a vacuum atmosphere, so as to perform getter processing on one or both of the imported members or both of the imported members. Importing one or both of the two members; (e) There is a manufacturing method of an image display apparatus comprising the steps of bringing the first member and the second member into a sealing chamber of a vacuum atmosphere for heating and sealing.

According to a fourteenth aspect of the present invention, (a) a first member including a substrate on which phosphor excitation means is disposed and a second member including a substrate on which phosphor is disposed in a firing chamber of a vacuum atmosphere for heating and firing treatment. Importing; (b) bringing one or both of said first member and said second member into said cooling chamber of said vacuum atmosphere in a vacuum atmosphere to effect cooling; (c) the first member and the above-mentioned material in the surface cleaning chamber of the vacuum atmosphere under vacuum atmosphere, in order to perform the surface cleaning treatment on one of the imported members or on one or both of the imported members. Bringing in one member or both members from two members; (d) One or both of said first member and said second member in said first getter processing chamber of a vacuum atmosphere for performing getter processing in said first getter processing chamber. Importing; (e) The above-mentioned first member and the above described method in a second getter processing chamber of a vacuum atmosphere in order to perform a getter treatment on one or both of the imported members or both of the imported members. Importing one or both members from the second member; (f) There is a method of manufacturing an image display apparatus, comprising the steps of bringing the first member and the second member into a sealing chamber of a vacuum atmosphere for heating and sealing.

In the ninth to fourteenth inventions described above, getter processing in the cooling processing chamber and the surface cleaning processing chamber or getter processing in the first getter processing chamber means the degree of vacuum for each processing chamber. The process performed to increase and the getter film is formed for the constituent members of the image display apparatus, or the getter film is formed for the non-constituent members of the image display apparatus disposed inside the processing chamber.

In the ninth to fourteenth inventions described above, the surface cleaning treatment is a process for cleaning the surface of the member, and the surface of the member is preferably irradiated with an electron beam, ions, ultraviolet rays, or plasma. .

In the ninth to fourteenth inventions described above, it is preferable to perform the getter treatment of the above members while heat-treating the above-described members.

According to a fifteenth aspect of the present invention, there is provided a getter processing chamber for performing a getter process on one or both members of a first member including a substrate on which phosphor excitation means are disposed under a vacuum atmosphere and a second member on which phosphors are disposed; And a sealing treatment chamber for heating and sealing the first member and the second member; Providing carry-in means capable of carrying in said first member and said second member from said getter processing chamber to said sealing processing chamber; In addition, the heat shield member has a manufacturing method of an image display apparatus disposed between the getter processing chamber and the sealing processing chamber.

According to a sixteenth aspect of the present invention, there is provided a firing chamber in which a first member including a substrate on which phosphor excitation means is disposed and a second member including a substrate on which phosphor is disposed are subjected to a heat treatment and a firing treatment; A getter processing chamber which performs getter processing on one or both of the first member and the second member; Providing import means capable of bringing the first member and the second member into the getter processing chamber from the firing chamber; The heat shield member has a manufacturing method of an image display apparatus disposed between the firing processing chamber and the getter processing chamber.

According to a seventeenth aspect of the present invention, there is provided a firing chamber for heating and firing a first member including a substrate on which phosphor excitation means and a second member including a substrate on which phosphor is disposed, and the first member. And a getter processing chamber for performing getter processing on one or both of the second members, and a sealing processing chamber for heating and sealing the first member and the second member; And a carrying means capable of carrying the first member and the second member into the firing chamber, the getter chamber and the sealing chamber, wherein the heat shield member is disposed between the chambers. There is a manufacturing method of an image display apparatus.

According to an eighteenth aspect of the present invention, there is provided a firing chamber for heating and firing a first member including a substrate on which phosphor excitation means is disposed and a second member including a substrate on which phosphor is disposed under vacuum atmosphere; A cooling processing chamber for cooling one or both members of the first member and the second member, and a getter processing chamber for performing getter processing for one or both members of the first member and the second member. Including; There is a manufacturing method of an image display apparatus which provides an import means capable of carrying the first member and the second member into the processing chambers in the order of the firing processing chamber, the cooling processing chamber, and the getter processing chamber. .

Further, in the eighteenth invention, it is preferable that the heat shield member is disposed between the firing chamber and the cooling chamber; Alternatively, the heat shield member is preferably disposed between the treatment chambers.

According to a nineteenth aspect of the present invention, there is provided a firing chamber for heating and firing a first member including a substrate on which phosphor excitation means is disposed and a second member including a substrate on which phosphor is disposed; And a cooling processing chamber for cooling one or both members of the second member, a getter processing chamber for performing getter processing for one or both members of the first member and the second member, and A sealing chamber for heating and sealing the first member and the second member; Of the image display apparatus providing loading means for carrying the first member and the second member into the processing chamber in the order of the firing processing chamber, the cooling processing chamber, and the getter processing chamber. There is a manufacturing method.

Further, in the nineteenth invention, it is preferable that the heat shield member is disposed between the firing chamber and the cooling chamber; Alternatively, the heat shield member is preferably disposed between the getter processing chamber and the getter processing chamber; Alternatively, the heat shield member is preferably disposed between the firing chamber and the cooling chamber, and between the getter chamber and the sealing chamber; Alternatively, the heat shielding means is preferably arranged between the treatment chambers.

Here, in the above fifteenth to nineteenth inventions, the heat shielding member is preferably formed of a reflective metal.

Further, in the ninth to nineteenth inventions described above, the first member has a substrate and an outer frame on which phosphor excitation means are disposed, or a substrate and a spacer on which phosphor excitation means are arranged, or a phosphor It is preferred to have a substrate, an outer frame and a spacer on which excitation means are arranged.

Alternatively, the second member may have a substrate and an outer frame on which the phosphor is disposed, or a substrate and a spacer on which the phosphor is disposed, or a substrate, an outer frame and a spacer on which the phosphor is disposed.

Further, in the ninth to nineteenth inventions described above, it is preferable that the getter used for the above getter processing is a getter to evaporate, or the phosphor excitation means preferably having an electron-emitting device.

In the above-described invention, each processing chamber is disposed under a vacuum atmosphere, and thus the temperature of the first member or the second member can be set independently for each processing chamber, so that the time required for raising or lowering the processing temperature can be considerably shortened. have.

Further, in the above invention, the getter treatment is performed by setting the temperature of the gettered member at a temperature lower than the temperature of the fired member, whereby the deterioration of the getter film formed on the member due to heating can be reliably reduced. .

In addition, in the above-described invention, the pressure reduction state inside the advancing chamber adjacent to the chamber or the getter chamber of the front part is set to 10 ⁻⁴ Pa or less, and more preferably to 10 ⁻⁵ Pa or less, so that the member is getter processed. When carrying into a chamber, the fall of the vacuum degree inside a getter process chamber can be prevented, and the waiting time from carrying a member to a getter process chamber to a getter process can be reduced.

Further, in the above-described invention, by performing the getter treatment while heating the member to be gettered, it is possible to reduce the difference in temperature between the getter processing step and the front and rear of the heating step, and to make extreme the temperature of the first member or the second member. In addition to preventing breakdown due to the increase, the difference in the temperature of the first member or the second member between the getter processing step and the sealing processing step is reduced, thereby raising the temperature during the sealing step. The time required for this can be significantly reduced.

Further, in the above invention, by having a cooling treatment or a cooling treatment chamber, not only the breakdown of the first member or the second member due to the extreme increase in temperature can be prevented, but also the member between the firing treatment step and the getter treatment step. By arranging, it is possible to prevent deterioration of the getter film formed on the member due to heat.

In addition, in the above embodiment, the surface remaining treatment of the first member or the second member in the processing chamber subjected to the cooling treatment or the like causes heat to remain in the treatment step such as the firing treatment step for the surface cleaning of the member. Can be used, and thus the surface cleaning treatment can be performed more efficiently.

In addition, in the above invention, the surface remaining treatment is performed after finishing the heat treatment step such as the firing step for the first member or the second member, so that the remaining heat in the heat treatment step for the surface cleaning of the member is performed. Can be used, and thus the surface cleaning treatment can be performed more efficiently.

In addition, in the above-described invention, deterioration of the getter film due to heat can be considerably reduced by disposing a heat shield member between the getter processing chamber and the sealing processing chamber or between the firing processing chamber and the getter processing chamber.

By fixing the outer frame on the front plate or the rear plate by using the second sealing member of high melting point, the plate and the above-mentioned plate due to softness of the second sealing member due to the sealing treatment temperature of the first sealing member in the getter processing chamber and It is possible to prevent the displacement at the position between the outer frames.

(Example)

1 (a) is a representative view showing a manufacturing apparatus according to the present invention, FIG. 1 (b) is a temperature profile showing the temperature of the panel member of the image display apparatus, that is, the first member or the second member, Fig. 1C is a vacuum profile showing the degree of vacuum in the manufacturing apparatus. Next, an example of the manufacturing method and manufacturing apparatus which concern on this invention is demonstrated based on the said drawing.

In Fig. 1 (a), reference numeral 101 denotes a back plate (hereinafter referred to as RP) which is a panel member, and as a phosphor excitation means, an electron source in which a plurality of electron-emitting devices are wired in a matrix form is formed. Reference numeral 102 denotes a front plate (hereinafter referred to as FP) that is a panel member on which phosphors, metal backs, and the like are formed. 103 is arranged between the RP 101 and the FP 102 and together with the RP 101 and the FP 102 constitutes a panel which is an airtight container and displays an outer frame which is a panel member. 104 denotes a spacer that maintains a gap between the RP 101 and the FP 102. This embodiment shows a case in which the outer frame 103 and the spacer 104 are arranged and fixed on the RP 101 in advance.

Numeral 105 denotes the front chamber, numeral 106 denotes the firing chamber, numeral 107 denotes the surface cleaning chamber, and numeral 108 denotes the first getter processing chamber (chamber getter processing chamber). Where 109 denotes a second getter processing chamber (panel getter processing chamber), 110 denotes a sealed processing chamber, 111 denotes a cooling chamber, and these are indicated in the carry-in direction (arrows in the drawing). And connected to each other in the order shown by 145, each of which is evacuated by a vacuum pump (not shown) to form a vacuum atmosphere.

In the present embodiment, the surface cleaning processing chamber 107 is an electron beam irradiation chamber (hereinafter referred to as an EB irradiation chamber) in which electron beam irradiation means is disposed. The atmosphere of each processing chamber is set by gate valves 112, 113, 114, 115, 116, 117, 118, and 119, respectively. 101, the FP 102, the outer frame 103 and the spacer 104 are brought into the chamber 105 of the front part by opening and closing the gate valve 112, and sequentially each processing chamber by opening and closing each gate valve. Is moved to.

Further, 121, 123, 127, 132, and 136 are hot plates for heating the RP 101, the outer frame 103 and the spacer 104 fixed thereon. )to be. On the other hand, 122, 124, 128, 133, and 137 are hot plates for heating the FP 302.

Reference numeral 125 denotes an electron gun for EB irradiation in the EB irradiation processing chamber 107, and 126 denotes an electron beam emitted from the electron gun 125. Inside the chamber getter chamber 108, 129 denotes a chamber getter flush device, and 130 denotes a chamber getter flush device generated from a chamber getter flush device in which material such as Ba is evaporated instantaneously. Reference numeral 131 denotes a chamber getter board, and may adhere to the chamber getter flush 130 and perform an exhaust action as the chamber getter, that is, increase the degree of vacuum in the chamber getter processing chamber 108.

In the panel getter processing chamber 109, 134 denotes a panel getter flush device, 135 denotes a panel getter flush device generated from the panel getter flush device 134, and instantaneously evaporates materials such as Ba. And adheres to the FP 102.

138, 139, 140, 141, and 142 support hot plates 121, 123, 127, 132, and 136, respectively, for each treatment step. The lift having the function of raising the RP 101 to the required height is indicated.

Fig. 1 (b) shows the stage of each processing chamber of the manufacturing apparatus of Fig. 1 (a) on the abscissa, and the temperature profile of the panel member at the stage of each treatment chamber on the ordinate. The temperature profile shows the temperature state of the RP 101 and the FP 102. In addition, FIG.1 (c) shows the step in each processing chamber of the manufacturing apparatus of FIG.1 (a) on a horizontal axis, and the vacuum degree in the step of each processing chamber is shown on a vertical coordinate axis.

The RP 101 and FP 102, the outer frame 103 and the spacer 104 pass through the respective processing chambers in the direction of the arrow 145 by the driving of the conveying roller 120 serving as the conveying means. Various kinds of processing are performed.

In this embodiment, first, the first member including the RP 101, the outer frame 103, the spacer 104, and the phosphor and the metal back, in which the electron source is disposed, under the vacuum atmosphere of the chamber 105 in the front part. Fabricating a second member comprising an FP 102; Firing in the firing chamber 106, irradiating an electron beam in the EB irradiation processing chamber 107, reaching a high vacuum degree by the chamber getter processing in the chamber getter processing chamber 108, and In the getter processing chamber 109, each of the steps of adhering the getter flush to the panel by the panel getter processing, heat sealing in the sealing processing chamber 110, and cooling in the cooling chamber 111 in series On one line.

As shown in Fig. 1 (a), gate valves 112, 113, 114, 115, 116, 117, and 118 between the respective processing chambers of the manufacturing apparatus. 119 are arranged as described above, and each processing chamber is evacuated by a vacuum exhaust system (not shown). In this embodiment, the gate valves 112, 113, 114, 115, 116, 117, 118, and 119 are disposed between the respective processing chambers, and the gate valve The above arrangement of can be made only between the processing chambers, which can be arranged between different processing chambers and also between atmospheric external devices, as shown in Fig. 1 (c), for example, The gate valves 116 and 117 may be omitted between the chamber getter processing chamber 108, the panel getter processing chamber 109, and the sealing chamber 110.

As described above, when there are no gate valves available between adjacent processing chambers, and when the temperature of the panel member is different in each processing step, for example, a heat shield member formed of a reflective metal such as aluminum, chromium, stainless steel, or the like (In the form of a board, a film, etc.) is preferably arranged between the steps. This heat shield member is formed between processing chambers in which the temperature profile of the panel member is different as shown in FIG. 1B, for example, between the firing processing chamber 106 and the panel getter processing chamber 109 or the panel getter. It is preferable to arrange | position between the process chamber 109 and the sealing process chamber 110, or between each said chamber. In addition, the heat shield chamber may be disposed between each processing chamber. The heat shield chamber described above is arranged so that no problem occurs when moving between the installed processing chambers of the FP 102 and the RP 101 RK.

In addition, in the present embodiment, the outer frame 103 for sealing the vacuum structure and the spacer 104 forming the inner atmospheric pressure structure are fixed to the RP 101 before being brought into the chamber 105 in the front part, but one configuration It is not limited to this. For example, the spacer 104 may be fixed in advance to the outer frame 103 (eg, a board such as a spacer 104 that intersects within the outer frame 103 and each end is fixed to the outer frame 103). It is introduced into the main apparatus as a single component member away from the RP 101 and the FP 102, processed at each processing step, and finally disposed and fixed at a desired position as a panel component member in the sealing processing step, Alternatively, the outer frame 103 may be fixed to the FP 102 in advance.

When the outer frame 103 is fixed to the RP 101 side or the FP 102 side in advance, it is preferable to be fixed by a sealing material having a melting point higher than the melting point of the sealing member 143 to be described. For example, when the sealing material 143 which will be described below is a low melting point metal such as indium or an alloy thereof, the outer frame 103 may be formed in advance to the RP 101 or the FP 102 using frit glass. It is preferable to be fixed.

In Fig. 1A, reference numeral 143 denotes a sealing member as described above, and is disposed on the RP 101 as a low melting point material such as frit glass or a low melting point metal such as indium or an alloy of these metals. It may be arranged in advance at the FP 102 side end of the outer frame 103. The arrangement of the sealing material 143 is not limited to this, but it may be disposed on the portion of the FP 102 to which the outer frame 103 is attached and fixed. Further, when the outer frame 103 is introduced into the main apparatus as a single independent member, the sealing member 143 may be disposed at the RP 101 side end and the FP 102 side end of the outer frame 103. In addition, the sealing member 143 may be disposed on a portion of the RP 101 and the FP 102 to which the end of the outer frame 103 is attached and fixed. The portion in which the sealing material 143 is disposed may be disposed at least at the end of the outer frame 103 or the portion on the RP 101 or the FP 102 to which the end of the outer frame 103 is attached and fixed. .

In the apparatus as configured above, the vacuum evacuation step and the sealing step of the panel are as follows. Note that the following steps apply when sealing only one part of the panel. When a plurality of panels are continuously processed and sealed, the processing time for each processing step is sometimes different. For the step having a long processing time, the processing step is divided into a plurality of processing chambers so that the long processing time is adjusted to another processing step time. Alternatively, in the plurality of constituent elements, for example, hot plates and the like necessary for the processing are arranged in the same processing chamber, and the processing is performed at the same time.

First, the outer frame 103 and the spacer 104 are fixed in advance, and the sealing material 143 also carries the prearranged RP 101 and FP 102 into the chamber 105 in the front part. Here, the outer frame 103 and the spacer 104 are fixed to the RP 101 using frit glass, and indium is used as the sealing material 143. At the time of loading, the RP 101 and FP 102 are placed on the loading jig to form a space between the substrates structurally. Carrying in or conveying is not limited to using a jig, and it is also possible to carry in the board | substrate of RP101 and FP102 as it is by the conveyance support unit by the main apparatus side.

When the carry-in is completed, the gate valve 112 which is a carry-in port is closed and the inside of the chamber 105 of the front part is evacuated. At this time, the processing chambers after the firing processing chamber are set to respective vacuum degrees and temperature profiles. Next, when carrying in the board | substrate of RP101 and FP102, the gate valve 113-119 between the process chambers is opened and closed one by one.

When the above-mentioned chamber 105 reaches the vacuum exhaust state at the level of 10 ^-5 Pa, the gate valve 113 is opened, and the RP 101 and the FP 102 are conveyed from the chamber 105 in the previous portion. It is moved to the firing chamber 106, and when the movement is completed, the gate valve 113 is closed.

The RP 101 and FP 102 move to the firing chamber without being exposed to the atmosphere and are heated (baked) by the hot plates 121 and 122 in the firing chamber. By this firing treatment, impurities such as hydrogen, oxygen, water and the like contained or adhered to the RP 101 and the FP 102 can be exhausted in a gaseous state. The firing temperature at this time is generally 300 ° C to 400 ° C, preferably 350 ° C to 380 ° C. The vacuum degree at this time is 10 ^-4 Pa.

The RP 101 and FP 102 which have completed the firing process are moved to the EB irradiation treatment chamber 107, the RP 101 is fixed on the hot plate 123, and the EB irradiation treatment chamber 107 by the lift 139. Go to the top of). At this time, the RP 101 and the FP 102 are temporarily separated from the hot plates 121 and 122 of the firing chamber 106 as a heating source, but the RP 101 and the FP 102 do not cause a sudden drop in temperature. It is fixed to the hot plates 123 and 124 of the EB irradiation treatment chamber 107, and heated so that the temperature rises gently. In this substrate temperature region in an elevated temperature state, the EB irradiation process is performed by irradiating EB from the electron gun 125 to an arbitrary region. The EB irradiation treatment is generally performed within a range from 100 ° C to the firing temperature in the substrate temperature range. The degree of vacuum at this time is in the range of approximately 10 ⁻⁴ Pa to 10 ⁻⁵ Pa.

Here, the degree of vacuum in the surface cleaning process of the panel member such as the EB irradiation treatment chamber 107 is preferably set to 10 ⁻⁴ Pa or less, and more preferably 10 ⁻⁵ Pa or less.

The EB irradiation treatment is effective for cleaning the substrate due to separation of gas from impurities absorbed toward the RP 101 and the FP 102 by irradiation. In addition, as described above, at this time, the heat remaining in the calcining step may be used to further improve the cleaning effect. EB irradiation processing can be given to both the RP 101 and the FP 102 or to one of the RP 101 and the FP 102.

Further, the EB irradiation is not limited to the RP 101 and the FP 102, but can be given to any area in the EB irradiation step chamber. In the EB irradiation process, the EB irradiation is performed inside the chamber space separately from the substrate cleaning, thereby ionizing the gas released by firing and EB irradiation substrate cleaning, and adsorbing to the getter during the later getter flush processing. There is an effect that can be promoted further.

Further, the EB irradiation treatment chamber 107 or the EB irradiation treatment chamber 107 and the first getter processing chamber 108 (chamber getter processing chamber) are RP 101 and FP 102 in which the firing treatment is completed. While achieving a function as a cooling chamber for lowering the temperature of the chamber, it is one of the preferred embodiments to arrange another cooling chamber separately between the firing chamber 106 and the EB irradiation chamber 107.

In such a cooling chamber, the temperature is gradually lowered because the RP 101 and the FP 102 are fixed to the hot plates so that the temperature does not suddenly drop from the heating temperature during the firing process. The temperature range of the hot plate at this time is set in the range of 100 ° C to the firing temperature, and therefore, the vacuum state in the processing chamber is preferably set to 10 ^-4 Pa or less, more preferably 10 ^-5 or less.

After the EB irradiation process is finished, the lift 139 is lowered, the RP 101 is withdrawn from the hot plate 123 together, and moves with the FP 102 to the chamber getter processing chamber 108. At this time, the RP 101 and FP 102 move to the chamber getter processing chamber 108 without being exposed to the atmosphere. The vacuum state in the chamber getter processing chamber 108 is set to be 10 ^-5 Pa or less. In this chamber getter processing chamber, the evaporation getter member contained in the chamber getter flush device 129 (e.g., a getter member such as barium) is thus heated by heat or the like to generate the chamber getter flush 130. And evaporates, thus allowing a getter film (not shown) comprising a barium film to adhere to the surface of the chamber getter board 131 disposed in the chamber rather than the panel member. As for the film thickness of the panel getter at this time, 5 nm-500 nm are common, 10 nm-200 nm are preferable, and 20 nm-200 nm are more preferable. By this chamber getter processing step, the getter film adhered to the chamber getter board 131 absorbs and exhausts gas in the chamber, and the vacuum degree in the chamber getter processing chamber reaches a level of 10 ^-6 Pa. The getter treatment is performed at the substrate temperatures of the RP 101 and FP 102 in the range of firing temperature to 100 ° C. Note that the getter material is evaporated by the chamber getter flush 130 and subsequently the vacuum in the chamber is temporarily lowered but becomes high vacuum by vacuum exhaust. The chamber getter processing described above is not limited to being performed by arranging the chamber getter processing chambers independently, and may be performed in the panel getter processing chamber which will be described later without particularly arranging the chamber getter processing chambers.

Next, the RP 101 and FP 102 move to the panel getter processing chamber 109, the RP 101 is fixed to the hot plate 132, and lifts 141 to the top of the panel getter processing chamber. Move. The panel getter processing chamber 109 is evacuated in advance to a level of 10 ⁻⁶ Pa. In order to attain this degree of vacuum, in addition to the general vacuum exhaust pump, the additional exhaust means as described above can be exhausted by flushing the exhaust getter material, or exhausted by heating activation of the non-evaporation getter material. The above method of evacuating to a level of 10 ⁻⁶ Pa also used a sealing chamber 110 and a cooling chamber 111 to be described later. In the panel getter processing chamber 109, a vaporized getter material (e.g., a getter material such as barium) contained in the panel getter flush device 134 is heated and evaporated by heat resistance to generate the panel getter flush 135. Thus, a getter film (not shown) containing a barium film is adhered to the surface of the FP 102. At this time, the film thickness of the panel getter is generally 5 nm to 500 nm, preferably 10 nm to 200 nm, and more preferably 20 nm to 200 nm. Here, the membrane placed in the exhaust getter has a high vacuum of 10 ^-6 Pa, and moves to the next sealing treatment stage while maintaining the getter vacuum exhaust capacity completely, so that the vaporized getter deposited in the membrane is absorbed by gas absorption. Hardly deteriorated by

In Fig. 1A, the getter film is formed by sticking on the FP 102, but the material to be formed is not limited to this and may be formed on the RP 101 or the like. However, since the getter material is generally conductive, when the sealed panel is driven to display an image, a large leakage current may be generated, or a problem may occur in which the breakdown voltage of the driving voltage cannot be maintained. For example, when the panel getter flush is performed on the RP 101 of Fig. 1A, the conductive getter film is formed on the outer frame 103 and the spacer 104. This can sometimes cause electrical problems when driving. In this case, the part where the getter film is not adhered and the getter film is not formed is covered with a mask of metal on which the thin film is deposited, so that the getter film is not adhered to the part and is not formed, and further, the RP 101 Only where necessary is the getter film deposited. The getter material is evaporated by the panel getter flush and the vacuum in the chamber is then temporarily lowered, but it becomes high vacuum by the vacuum exhaust.

After the panel getter processing step is finished, and also after the lift 141 is lowered, the RP 101 is withdrawn from the hot plate 132 and moves with the FP 102 to the getter processing chamber 108.

The RP 101 and FP 102 move to the sealing chamber 110 evacuated to a level of 10 ⁻⁶ Pa in advance, and the RP 101 and FP 102 are fixed to the hot plates 136 and 137, respectively. do. At this time, the sealing material 143 and the spacer 104 disposed on the fixed frame 103 and placed in the RP 101 are not placed in contact with the FP 102 but fixed in some space left between them. . In addition, at the time of such fixing, the relative positions of the RP 101 and the FP 102 at the time of panel sealing are determined. The determination of the relative position can be made based on the standard end by the projection pin, but is not limited thereto.

Next, the lift 142 is lowered, and the outer frame 103 disposed and fixed to the RP 101 and FP 102 is brought into close contact with each other so that the temperature of the substrate as shown in the temperature profile of FIG. Rises to a temperature suitable for the material of the sealing material 143. Next, the sealing material 143 is softened, that is, dissolved and held at the peak temperature for 10 minutes. Next, the temperature of the substrate is raised, so that the sealing material is adhesively fixed. As a result, the sealing material 143 formed on the outer frame 103 is softened and dissolved, so that the outer frame 103 and the FP 102 are adhered. Thereafter, the sealing material 143 is cured and fixed. At this time, the vacuum degree in the sealing chamber 110 is maintained at 10 ⁻⁶ Pa, and the vacuum degree in the panel sealed at the present stage is also 10 ⁻⁶ Pa. The sticky fixing temperature of the sealing material 143 is set to 160 ° C as the heating peak temperature in the case of indium metal, and to 140 ° C as the curing and fixing temperature, for example. In addition, when the sealing material 143 is frit glass, the peak temperature is set to 390 ° C, and the curing temperature is set to 300 ° C. The rate of increase of the temperature by heating is set to 20 ° C / min, and the rate of falling is set to 5 ° C / min, but is not limited thereto. In addition, the heating peak temperature and the curing fixation temperature are not necessarily limited to the above.

When the temperature falls below the curing fixation temperature of the sealing material, the sealing process is finished, after which the RP 101 is drawn out of the hot plate 136 and the lift 142 is lowered. The FP 102 is drawn out from the hot plate 137, and the sealing panel 144 composed of the RP 101, the FP 102, the outer frame 103, and the spacer 104 moves to the cooling chamber 111. do. At this time, the cooling chamber 111 evacuates to a level of 10 ⁻⁶ Pa in order to maintain the vacuum degree of the getter processing chamber. The sealing panel 144 is drawn out from the hot plate by the curing fixation temperature of the sealing material and cooled in the cooling processing chamber 111. As the cooling means, a cooling plate having a temperature control function by water cooling or the like is used, but not limited thereto. If damage to the substrate due to the rapid drop in temperature of the sealing panel 144 does not occur, natural cooling may be performed in the cooling processing chamber 111.

In the step in which the temperature of the sealing panel 144 drops to or near room temperature, vacuum leakage of the cooling processing chamber 111 is performed so that the processing chamber becomes atmospheric pressure. Thereafter, the gate valve 119 is opened in the atmosphere outside the apparatus, and the sealing member 114 is brought in from the exterior of the apparatus.

In the manufacturing apparatus of this embodiment, the gate valve 118 is disposed between the sealed chamber 110 and the cooling chamber 111, and the display panel is conveyed from the sealed chamber 110 when the gate valve is opened. Therefore, it is carried in to the cooling chamber 111, and is cooled by the gate valve closed. Thereafter, the conveyance port 119 is opened, the display panel is conveyed from the cooling chamber 111, finally the conveyance port 119 is closed, and all steps are completed. Before starting the next step, the interior of the cooling chamber 111 may be preferably set to a vacuum state by a vacuum exhaust system (not shown) arranged independently.

In this embodiment, in addition to the exhaust getter material described above, a non-evaporation getter film or a non-evaporation getter member containing titanium material or the like may be disposed in advance on the RF 101 and the FP 102.

In addition, the hot plates 121, 123, 127, 132, and 136 are equipment capable of fixing the FP 101 with sufficient force without the FP 102 falling off, for example, mechanically surrounding the substrate. Equipment using a claw chuck method, an electrostatic chuck method, or a vacuum absorption chuck method may be used.

Although the above embodiment is one embodiment of the combination of steps, the configuration of the embodiment of the processing chamber can be listed by the combination of each processing step. That is, in particular, during the firing treatment or the sealing treatment, as a first modified embodiment, the step of firing in the firing chamber 106 after preparing in a vacuum atmosphere in the chamber 105 in the front part; A panel getter processing in the panel getter processing chamber 109; For example, the processing chambers may be arranged in series so as to sequentially perform heat sealing in the sealing processing chamber 110.

As a second modification, the step of firing in the firing chamber 106 after preparing in a vacuum atmosphere in the chamber 105 in the front part; Performing a surface cleaning treatment such as an EB irradiation treatment in the EB irradiation treatment chamber 107; Performing a panel getter process in the panel getter processing chamber 109; For example, the processing chambers may be arranged in series so as to sequentially perform the heat sealing treatment in the sealing processing chamber 110.

As a third modification, the step of firing in the firing chamber 106 after preparing in the vacuum chamber in the front chamber 105; Chamber getter processing in the chamber getter processing chamber 108; Performing a panel getter process in the panel getter processing chamber 109; For example, the processing chambers may be arranged in series so as to sequentially perform the heat sealing processing in the sealing processing chamber 110.

As a fourth modification, after the preparation in a vacuum atmosphere in the chamber 105 at the front, the surface cleaning treatment such as the EB irradiation treatment in the EB irradiation treatment chamber 107 is performed; Chamber getter processing in the chamber getter processing chamber 108; Performing a panel getter process in the panel getter processing chamber 109; For example, each processing chamber may be arranged in series so as to sequentially perform a heat sealing process in the sealing processing chamber 110.

As a fifth modification, the step of firing in the firing chamber 106 after preparing in a vacuum atmosphere in the chamber 105 in the front part; Cooling the panel member in a cooling chamber; Performing a panel getter process in the panel getter processing chamber 109; For example, each processing chamber may be arranged in series so as to sequentially perform a heat sealing process in the sealing processing chamber 110.

As a sixth modification, the step of firing in the firing chamber 106 after preparing in the vacuum chamber in the chamber 105 in the front part; Cooling the panel member in a cooling chamber; Performing a surface cleaning treatment such as an EB irradiation treatment in the EB irradiation treatment chamber 107; Performing a panel getter process in the panel getter processing chamber 109; For example, each processing chamber may be arranged in series so as to sequentially perform a heat sealing process in the sealing processing chamber 110.

As a seventh modification, the process of firing in the firing chamber 106 after preparing in a vacuum atmosphere in the chamber 105 at the front; Cooling the panel member in a cooling chamber; Chamber getter processing in the chamber getter processing chamber 108; Performing a panel getter process in the panel getter processing chamber 109; For example, each processing chamber may be arranged in series so as to sequentially perform a heat sealing process in the sealing processing chamber 110.

As an eighth modification, the step of firing in the firing chamber 106 after preparing in a vacuum atmosphere in the chamber 105 in the preceding section; Cooling the panel member in a cooling chamber; Performing a surface cleaning treatment such as an EB irradiation treatment in the EB irradiation treatment chamber 107; Chamber getter processing in the chamber getter processing chamber 108; Performing a panel getter process in the panel getter processing chamber 109; For example, each processing chamber may be arranged in series so as to sequentially perform a heat sealing process in the sealing processing chamber 110.

Next, modifications of the conveyance of the RP 101, the FP 102, the outer frame 103 and the spacer 104 as the constituent members and the introduction of the apparatus are as follows.

As a first modification, the RP 101, FP 102 and spacer 104 fixed and arranged on the outer frame 103 can be introduced into the apparatus body as constituent members. In this case, the sealing surface of the outer frame 103 by the sealing treatment in the apparatus main body is each side surface of the RP 101 and the FP 102, and therefore, the sealing material must be formed beforehand against the sealing surface.

As the second modification, the outer frame fixed by sticking to the RP 101 and the outer frame 103 or the outer frame 103 sticking to the RP 101, the FP 102 and the spacer 104 is fixed. 103 can be introduced inside the apparatus body as two component members. In this case, the sealing surface of the outer frame 103 by the sealing treatment in the apparatus main body is on the RP 101 side, and therefore the sealing material must be formed in advance facing the sealing surface.

Next, with respect to the above-described modification of the constituent members, each processing chamber of the apparatus is arranged in a row for each constituent member, and all the constituent members are combined into one processing chamber in the sealing processing step, and perform the sealing treatment. An example follows.

As the first modification, the panel getter flush processing chamber 109 from the chamber 105 in the front portion, taking the RP 101, the FP 102 and the spacer fixed and arranged on the outer frame 103 as three constituent members. Three rows of processing chambers, wherein the three components are introduced separately into each device, and the three panel getter processing chambers are joined to unite into a single getter processing chamber, whereby the getter processing chamber An example of a configuration of an apparatus characterized in that the sealing treatment of the three constituent members is carried out and the cooling treatment is likewise performed.

As a second variant, the FP 102 and the outer frame 103 which are fixed and arranged on the RP 101 are fixed and arranged on the FP 102 and the outer frame 103 or the FP 102, the RP 101 and the spacer 104. RP 101 and outer frame 103, or RP 101, FP 102 and spacers, which take the outer frame 103 as two constituent members, or are fixed and attached by sticking on the FP 102; The outer frame 103, which is fixed and adhered to and adhered on 104, takes two constituent members, and is formed in two rows of processing chambers from the chamber 105 in the front part to the panel getter processing chamber 109, Two panel getter processing chambers are connected so that two component members are introduced into each apparatus and combined into a getter processing chamber, whereby the three member members are sealed in the getter processing chamber, and the cooling treatment is likewise performed. For example, the configuration of the device characterized in that. It should be noted that the first and second modifications described above may include the case where the getter process is performed on any one of the three components or the two components.

Further, according to the above embodiment, the vacuum degree at the time of panel sealing is set at a level of 10 ^-6 Pa, but the present invention is not limited thereto. That is, the vacuum degree at the time of panel sealing can be set at the level of ^10-5 Pa which even a normal vacuum pump can reach. In this case, the chamber getter processing chamber 140 and the getter processing step may be omitted to increase the degree of vacuum in the processing chamber. Vacuum evacuation by an additional getter pump to reach 10 ⁻⁶ Pa may also be omitted.

The sealing panel 144 performing the processing step is an evaporation source of evaporation getter material existing in a conventional sealing panel or getter line mainly for getter flushing due to heat regardless of whether an evaporation getter material such as barium forms a film on the FP. The gettering which performs getter flush by high frequency heating which does not remain inside the sealing panel.

In addition, the processing step and the device is characterized in that the panel getter flush processing step and the continuous sealing process constitute a different processing chamber.

Fig. 2 is a schematic diagram showing part of an image display apparatus manufactured by using the manufacturing apparatus and manufacturing method of this embodiment.

In the drawings, the same reference numerals as in FIG. 1 denote the same members. The image display apparatus manufactured by the apparatus and method described above has a vacuum vessel or a pressure reducing vessel formed by the RP 101, the FP 102 and the outer frame 103. In the pressure reducing vessel, an inert gas such as argon gas, neon gas or hydrogen gas may be contained under a reduced pressure.

Further, in the case of a vacuum vessel, the degree of vacuum may be set at 10 ⁻⁵ Pa or more, and preferably at 10 ⁻⁶ Pa or more.

In the vacuum vessel or the pressure reducing vessel, the spacer 104 is arranged to form an internal atmospheric pressure structure. The spacer 104 used by the present invention comprises a non-alkali insulating material such as non-alkali glass; A high resistance film 309 in which a film is formed of a high resistance material disposed by covering the surface of the main body 311; A body comprising metal (tungsten, copper, silver, gold, molybdenum or alloys thereof) films 308 and 310 that are electrically connected to and adhered to the wiring 306 through the conductive adhesive 308 and disposed on both ends. Has (311). The spacer 104 is fixed to the RP 101 in advance by the pressure-sensitive adhesive 308 when the spacer 104 is brought into the chamber 105 of the above-mentioned portion, and when the processing is finished in the sealing chamber 110, the spacer described above. The other end of the 104 is electrically connected to the FP 102, connected to the FP 102, and disposed.

In the RP 101, a liner (SiO ₂ , SnO _2, etc.) 305 for preventing the penetration of alkalis such as sodium and a plurality of electron beam emitting devices 312 arranged in an XY matrix form are disposed.

The present invention can use a plasma generating element in place of the electron beam emitting element or image display element member used as the phosphor excitation means. At this time, an inert gas such as argon gas, neon gas, or hydrogen gas is contained in the vessel under reduced pressure.

In the FP 102, an anode metal (aluminum, silver, copper, etc.) film 303 connected to the transparent substrate 301, the phosphor layer 302, and an anode source (not shown) is disposed.

In addition, the present invention can use a color filter in place of the phosphor used as the image display member when the above-mentioned plasma generating element is used.

The outer frame 103 is adhered to the RP 101 in advance by a low melting point adhesive 307 such as frit glass and is fixed, and the sealing using indium and frit glass in the processing step of the sealing chamber 110 described above. It is fixedly adhered by the material 143.

According to the present invention, the electron-emitting device and the plasma generating device are disposed in the XY direction with a large capacity, such as one million pixels or more, and the image display device is disposed on a large screen having a size of 30 inches or more in a diagonal direction having large pixels. When manufactured, the manufacturing process time can be greatly reduced, and the vacuum vessel constituting the image display apparatus can reach a vacuum degree of 10 ^-6 Pa or more.

1 is a schematic representation of a manufacturing apparatus according to the invention with a temperature profile of a panel member in the manufacturing apparatus and a vacuum degree profile in a chamber of the manufacturing apparatus;

2 is a partial sectional view showing an image display device manufactured by the manufacturing apparatus and the manufacturing method according to the present invention;

<Brief Description of Drawings>

101: backplane (RP) 102: frontplane (FP)

103: outer frame 104: spacer

105,106,107,108,109,110,111: chamber

112, 113, 114, 115, 116, 117, 118, 119: Gate valve 119: Return port

120: conveying roller 121,123: 127,132,136: hot plate

125: electron gun 126: electron beam

129: chamber getter flush device 130: chamber getter flush

131: chamber getter board 134: panel getter flush device

135: Panel getter flush 138,139,140,141,142: lift

143: sealing material 144: sealing panel

Reference numeral 145: arrow 304: transparent substrate 305: liner 306: wiring 308: conductive adhesive 309: high resistance film 311: main body 312: electron beam emitting device

Claims (144)

A plurality of depressurized chambers including a firing chamber for firing the panel members constituting the panel of the image display apparatus, and a getter chamber for carrying out the panel members after the firing process to getter the panel members. As a manufacturing method of an image display apparatus using a processing chamber, Continuously introducing the panel member into the plurality of pressure-reduced processing chambers each having a temperature control means; Performing a plurality of processes on said panel member while controlling temperature; Forming a panel by sealing the panel member, And the getter processing is performed under a set condition of the panel member in the getter processing chamber at a temperature lower than the temperature of the panel member subjected to the firing processing in the firing processing chamber. 2. The processing chamber according to claim 1, wherein the plurality of processing chambers include the preliminary chamber member and a prechamber adjacent to the getter processing chamber after carrying out the firing processing in the firing processing chamber and before being brought into the getter processing chamber. And the inside of the preliminary chamber and the inside of the getter processing chamber are set to a pressure not higher than 10 ^-4 Pa. A firing processing chamber for firing the panel members constituting the panel of the image display apparatus, a surface cleaning processing chamber for carrying in the panel member and performing surface cleaning on the panel member after the firing processing, and the surface cleaning A manufacturing method of an image display apparatus using a plurality of reduced pressure processing chambers including a getter processing chamber for carrying in the panel member and performing getter processing of the panel member after performing the processing. Continuously introducing the panel member into the plurality of pressure-reduced processing chambers each having a temperature control means; Performing a plurality of processes on said panel member while controlling temperature; Forming a panel by sealing the panel member, And the getter processing is performed while the panel member in the getter processing chamber is set at a temperature lower than the temperature of the panel member subjected to the firing processing in the firing processing chamber. 4. The process chamber according to claim 3, wherein the plurality of processing chambers further include a preliminary chamber for carrying in the panel member before carrying into the getter processing chamber after the surface cleaning process is performed in the surface cleaning processing chamber. The inside and the inside of the getter processing chamber are set to an air pressure not higher than 10 ^-4 Pa. 4. The image display apparatus as claimed in claim 3, wherein the surface cleaning chamber is adjacent to the getter processing chamber, and the surface cleaning processing chamber and the interior of the getter processing chamber are set at a pressure not higher than 10 ^-4 . Manufacturing method. 4. The manufacturing method of an image display apparatus according to claim 3, wherein said surface cleaning process is a process of irradiating the surface of a conveyed member with an electron beam, thereby cleaning the surface treatment of said member. 6. The image display apparatus according to any one of claims 3 to 5, wherein the surface cleaning process is a process of irradiating the surface of the loaded member with ions, thereby cleaning the surface of the member. Way. 6. The manufacture of an image display apparatus according to any one of claims 3 to 5, wherein the surface cleaning process is a process of irradiating the surface of the carried member with ultraviolet rays, thereby cleaning the surface of the member. Way. 6. The manufacture of an image display apparatus according to any one of claims 3 to 5, wherein the surface cleaning process is a process of irradiating the surface of the loaded member with plasma, thereby cleaning the surface of the member. Way. 10. The manufacturing method of an image display apparatus according to any one of claims 1 to 9, wherein the getter processing in the getter processing chamber is performed in the getter processing chamber. The panel member is sealed according to any one of claims 1 to 10, wherein the panel member is sealed at a temperature higher than a temperature of the panel member subjected to getter processing in the getter processing chamber. A manufacturing method of an image display apparatus. A firing processing chamber for firing the panel members constituting the panel of the image display apparatus; a first getter processing chamber for carrying in the panel member after carrying out the firing processing and performing getter processing inside the processing chamber; A method of manufacturing an image display apparatus using a plurality of reduced pressure processing chambers including a second getter processing chamber adjacent to the first getter processing chamber, wherein the panel member is loaded and subjected to getter processing after the processing. Continuously introducing the panel member into the plurality of pressure-reduced processing chambers each having a temperature control means; Performing a plurality of processes on said panel member while controlling temperature; Forming a panel by sealing the panel member, The manufacturing of an image display apparatus, wherein the panel member of the second getter processing chamber is set to a temperature lower than the temperature of the panel member subjected to the firing process in the firing chamber. Way. 13. The process chamber according to claim 12, wherein the plurality of processing chambers carry in the panel member and carry out a prechamber adjacent to the first getter processing chamber after carrying out the firing treatment in the firing processing chamber and before bringing it into the first getter processing chamber. And, wherein the interior of the preliminary chamber and the interior of the first and second getter processing chambers are set to a pressure not higher than 10 ^-4 Pa. A firing processing chamber for firing the panel members constituting the panel of the image display apparatus, a surface cleaning chamber for carrying in the panel member and surface cleaning the panel member after the firing processing, and the processing chamber A first getter processing chamber for carrying in said panel member after said surface cleaning process for getter processing, and a second adjoining said panel member after said getter processing for getter processing of said panel member and adjacent said first getter processing chamber A manufacturing method of an image display apparatus using a plurality of reduced pressure chambers including a getter processing chamber, Continuously introducing the panel member into the plurality of pressure-reduced chambers each having temperature control means; Performing a plurality of processes on said panel member while controlling temperature; Forming a panel by sealing the panel member, The manufacturing of an image display apparatus, wherein the panel member of the second getter processing chamber is set to a temperature lower than the temperature of the panel member subjected to the firing process in the firing chamber. Way. 15. The surface cleaning treatment chamber of claim 14, wherein the surface cleaning processing chamber is adjacent to the first getter processing chamber, and the surface cleaning processing chamber and the interior of the first and second getter processing chambers are set to a pressure not higher than 10 ^-4 Pa. Method for manufacturing an image display device, characterized in that. The manufacturing method of an image display apparatus according to claim 14 or 15, wherein said surface cleaning process is a process of irradiating the surface of a conveyed member with an electron beam, thereby cleaning the surface of said member. The manufacturing method of an image display apparatus according to claim 14 or 15, wherein said surface cleaning process is a process of irradiating a surface of a conveyed member with ions, thereby cleaning the surface of said member. The manufacturing method of an image display apparatus according to claim 14 or 15, wherein said surface cleaning process is a process of irradiating a surface of a carried member with ultraviolet rays, thereby cleaning the surface of said member. The manufacturing method of an image display apparatus according to claim 14 or 15, wherein said surface cleaning process is a process of irradiating a surface of a conveyed member with plasma, thereby cleaning the surface of said member. 16. The panel member according to any one of claims 12 to 15, wherein the panel member is sealed at a temperature higher than a temperature of the panel member subjected to getter processing in the second getter processing chamber. A method of manufacturing an image display apparatus, characterized in that. A firing processing chamber for firing the panel members constituting the panel of the image display apparatus, a cooling processing chamber for carrying in the firing process for the cooling process and then cooling the panel member, and the panel member A method of manufacturing an image display apparatus using a plurality of reduced pressure processing chambers including a getter processing chamber for carrying in the panel member after the cooling process for getter processing of Continuously introducing the panel member into a plurality of pressure-reduced processing chambers each having temperature control means; Performing a plurality of processes on the panel member while controlling temperature; And forming a panel by sealing the panel member. 22. The method according to claim 21, wherein the plurality of processing chambers include a pre-chamber which carries in the panel member and adds a prechamber adjacent to the getter processing chamber after carrying out the cooling treatment in the cooling processing chamber and before bringing it into the getter processing chamber. And the inside of the preliminary chamber and the inside of the getter processing chamber are set to a pressure not higher than 10 ^-4 Pa. 22. The image display apparatus according to claim 21, wherein the cooling processing chamber is adjacent to the getter processing chamber, and the cooling processing chamber and the interior of the getter processing chamber are set to a pressure not higher than 10 ^-4 Pa. Manufacturing method. 24. The manufacturing method of an image display apparatus according to any one of claims 21 to 23, wherein getter processing in the getter processing chamber is performed in the getter processing chamber. 24. The manufacturing method of an image display apparatus according to any one of claims 21 to 23, wherein surface cleaning processing of said panel member is performed in said cooling chamber. 24. The manufacturing method of an image display apparatus according to any one of claims 21 to 23, wherein getter processing in the cooling processing chamber is performed in the cooling processing chamber. 26. The manufacturing method of an image displaying apparatus according to claim 25, wherein getter processing in the cooling processing chamber is performed in the cooling processing chamber. 26. The manufacturing method of an image displaying apparatus according to claim 25, wherein said surface cleaning process is a process of irradiating the surface of a conveyed member with an electron beam, thereby cleaning the surface of said member. 27. The manufacturing method of an image displaying apparatus according to claim 25, wherein said surface cleaning process is a process of irradiating a surface of a loaded member with ions, thereby cleaning the surface of said member. 27. The manufacturing method of an image displaying apparatus according to claim 25, wherein said surface cleaning process is a process of irradiating a surface of a carried member with ultraviolet rays, thereby cleaning the surface of said member. 27. The manufacturing method of an image displaying apparatus according to claim 25, wherein said surface cleaning process is a process of irradiating a surface of a loaded member with plasma, thereby cleaning the surface of said member. A firing processing chamber for firing the panel members constituting the panel of the image display apparatus, a cooling processing chamber for carrying in the panel member and cooling the panel member after the firing process, and the panel member after the cooling process An image using a plurality of pressure-reduced processing chambers including a surface cleaning processing chamber for surface cleaning the panel member for carrying in, and a getter processing chamber for importing the panel member after the surface cleaning processing and getter processing of the panel member. As a manufacturing method of a display device, Continuously introducing the panel member into a plurality of pressure-reduced processing chambers each having temperature control means; Performing a plurality of processes on said panel member while controlling temperature; And forming a panel by sealing the panel member. 33. The process chamber according to claim 32, wherein the plurality of processing chambers carry in the panel member and add a prechamber adjacent to the getter processing chamber after carrying out the surface cleaning treatment in the surface cleaning processing chamber and before bringing it into the getter processing chamber. And the inside of the preliminary chamber and the inside of the getter processing chamber are set at a reduced level between 10 ^-4 Pa and 10 ^-5 Pa. 33. The surface cleaning treatment chamber of claim 32, wherein the surface cleaning chamber is adjacent to the getter processing chamber, and wherein the surface cleaning chamber and the interior of the getter processing chamber are set at a reduced pressure level between 10 ^-4 Pa and 10 ^-5 Pa. A method of manufacturing an image display apparatus, characterized in that. 35. The manufacturing method of an image processing apparatus according to any one of claims 32 to 34, wherein getter processing inside the getter processing chamber is performed in the getter processing chamber. 35. The manufacture of an image display apparatus according to any one of claims 32 to 34, wherein said surface cleaning process is a process of irradiating the surface of a conveyed member with an electron beam, thereby cleaning the surface of said member. Way. 35. The image display apparatus according to any one of claims 32 to 34, wherein the surface cleaning process is a process of irradiating the surface of the loaded member with ions, thereby cleaning the surface of the member. Way. 35. The manufacture of an image display apparatus according to any one of claims 32 to 34, wherein said surface cleaning process is a process of irradiating the surface of a conveyed member with ultraviolet rays, thereby cleaning the surface of said member. Way. 35. The manufacture of an image display apparatus according to any one of claims 32 to 34, wherein said surface cleaning process is a process of irradiating a surface of a loaded member with plasma, thereby cleaning the surface of said member. Way. 40. The sealing of the panel member according to any one of claims 21 to 39, wherein the panel member is sealed at a temperature higher than a temperature of the panel member subjected to getter processing in the getter processing chamber. A method of manufacturing an image display apparatus. A firing processing chamber for firing the panel members constituting the panel of the image display apparatus, a cooling processing chamber for carrying in the panel member and cooling the panel member after the firing process, and the panel member after the cooling process A first getter processing chamber configured to getter the interior of the getter processing chamber into which the getter process is carried; and a second getter processing chamber brought into the panel member after the getter processing and gettered to the panel member and adjacent to the first getter processing chamber. A method of manufacturing an image display apparatus using a plurality of reduced pressure chambers including: Continuously introducing the panel member into the plurality of reduced pressure chambers each having a temperature control means; Performing a plurality of processes on said panel member while controlling temperature; And forming a panel by sealing the panel member. 42. The method of claim 41, wherein the cooling chamber is adjacent to the first getter processing chamber, wherein the cooling chamber and the interior of the first and second getter processing chambers are decompressed between 10 ^-4 Pa and 10 ^-5 Pa. A manufacturing method of an image display apparatus, characterized in that it is set at a predetermined level. 43. The manufacturing method of an image displaying apparatus according to claim 41 or 42, wherein surface cleaning is performed in said cooling processing chamber. 44. The manufacturing method of an image displaying apparatus according to claim 43, wherein said surface cleaning process is a process of irradiating a surface of a conveyed member with an electron beam, thereby cleaning the surface of said member. 44. The manufacturing method of an image displaying apparatus according to claim 43, wherein said surface cleaning process is a process of irradiating a surface of a loaded member with ions, thereby cleaning the surface of said member. 44. The manufacturing method of an image displaying apparatus according to claim 43, wherein said surface cleaning process is a process of irradiating a surface of a carried member with ultraviolet rays, thereby cleaning the surface of said member. 44. The manufacturing method of an image displaying apparatus according to claim 43, wherein said surface cleaning process is a process of irradiating a surface of a loaded member with plasma, thereby cleaning the surface of said member. A firing processing chamber for firing the panel members constituting the panel of the image display apparatus, a cooling processing chamber for carrying in the panel member and cooling the panel member after the firing process, and the panel member after the cooling process A surface cleaning chamber for carrying out surface cleaning of the panel member, a first getter processing chamber for importing the panel member after the surface cleaning processing, and a getter processing inside the processing chamber, and after the getter processing A method of manufacturing an image display apparatus using a plurality of reduced pressure processing chambers carrying a panel member and comprising a second getter processing chamber adjacent to the first getter processing chamber for getter processing of the panel member. Continuously introducing the panel member into a plurality of pressure-reduced processing chambers each having temperature control means; Performing a plurality of processes on said panel member while controlling temperature; And forming a panel by sealing the panel member. 49. The method of claim 48, wherein the surface cleaning chamber is adjacent to the first getter processing chamber, wherein the surface cleaning chamber and the interior of the first and second getter processing chambers are between 10 ^-4 Pa to 10 ^-5 Pa. The method for manufacturing an image display apparatus, characterized in that it is set to a reduced pressure level. 50. The manufacturing method of an image displaying apparatus according to claim 48 or 49, wherein said surface cleaning process is a process of irradiating a surface of a conveyed member with an electron beam, thereby cleaning the surface of said member. 50. The manufacturing method of an image displaying apparatus according to claim 48 or 49, wherein said surface cleaning process is a process of irradiating a surface of a loaded member with ions, thereby cleaning the surface of said member. 50. The manufacturing method of an image displaying apparatus according to claim 48 or 49, wherein said surface cleaning process is a process of irradiating a surface of a conveyed member with ultraviolet rays, thereby cleaning the surface of said member. 50. The manufacturing method of an image displaying apparatus according to claim 48 or 49, wherein said surface cleaning process is a process of irradiating a surface of a conveyed member with plasma, thereby cleaning the surface of said member. The image according to claim 41 or 48, wherein the panel member is sealed in a state where the panel member is set at a temperature higher than a temperature of the panel member subjected to getter processing in the second getter processing chamber. Method for manufacturing a display device. The panel member according to any one of claims 1, 3, 12, 14, 21, 32, 41, and 48, wherein the panel member constitutes a display surface of the panel. And a back plate disposed to face the front plate with a gap interposed therebetween to form a rear surface of the panel, wherein the front plate is sealed. 56. The manufacturing method of an image displaying apparatus according to claim 55, wherein said panel member is sealed by a first sealing material such as indium or an alloy thereof disposed on a side surface of said back plate. 56. The panel member of claim 55, wherein the panel member further comprises an outer frame fixed to the front plate by a second sealing material such as frit glass and forming a side surface of the panel, wherein the panel member includes the outer frame and the A method for manufacturing an image display apparatus, which is disposed on both sides of a side surface of a rear plate and sealed by a first sealing material such as indium or an alloy thereof. 58. The manufacturing method of an image displaying apparatus according to claim 57, wherein said second sealing material has a melting point higher than that of said first sealing material. 57. The manufacturing method of an image displaying apparatus according to claim 56, wherein said first sealing material is a metal having a low melting point or an alloy of the metal. delete 56. The manufacturing method of an image displaying apparatus according to claim 55, wherein said panel member is sealed with said back plate by a first sealing material such as indium or an alloy thereof disposed on said front plate. 62. The panel member according to claim 61, wherein the panel member further comprises an outer frame disposed on the side of the back plate, wherein the outer frame is fixed by a second sealing material such as frit glass to form a side surface of the panel. A method of manufacturing an image display apparatus. 63. The manufacturing method of an image displaying apparatus according to claim 62, wherein said second sealing material has a melting point higher than that of said first sealing material. 64. The manufacturing method of an image displaying apparatus according to any one of claims 61 to 63, wherein the first sealing material is a metal having a low melting point or an alloy of the metal. delete 56. The method of claim 55, wherein the panel member further comprises an outer frame fixed to the front plate by a second sealing material such as frit glass to form a side surface of the panel, wherein the panel is sealed by a back plate. A method of manufacturing an image display apparatus. 67. The manufacturing method of an image displaying apparatus according to claim 66, wherein said panel member is disposed on said back plate and sealed by frit sealing material such as indium or an alloy thereof. 68. The manufacturing method of an image displaying apparatus according to claim 67, wherein said second sealing material has a melting point higher than that of said first sealing material. 69. The manufacturing method of an image displaying apparatus according to claim 67 or 68, wherein the first sealing material is a metal having a low melting point or an alloy of the metal. delete 56. The panel member of claim 55, wherein the panel member further comprises an outer frame fixed to the front plate by a second sealing material such as frit glass and constituting the side of the panel, disposed on the frame and having indium or the like. And the back plate is sealed by a first sealing material such as an alloy. 72. The manufacturing method of an image displaying apparatus according to claim 71, wherein said second sealing material has a melting point higher than that of said first sealing material. 72. The manufacturing method of an image displaying apparatus according to claim 71 or 72, wherein the first sealing material is a metal having a low melting point or an alloy of the metal. delete 49. The panel member according to any one of claims 1, 3, 12, 14, 21, 32, 41, and 48, wherein the panel member constitutes a rear surface of the panel. And a back plate disposed to face the front plate constituting the display surface of the panel, wherein the panel is sealed with the front plate. 76. The manufacturing method of an image displaying apparatus according to claim 75, wherein said panel is disposed on a side of said front plate and sealed by a first sealing material such as indium or an alloy thereof. 76. The panel member according to claim 75, wherein the panel member further comprises an outer frame disposed on the side of the front plate, wherein the outer frame is fixed by a second sealing material such as frit glass to form a side surface of the panel. And the panel member is sealed by a first sealing material such as indium or an alloy thereof disposed on the outer frame. 78. The manufacturing method of an image displaying apparatus according to claim 77, wherein said second sealing material has a melting point higher than that of said first sealing material. 79. The manufacturing method of an image displaying apparatus according to any one of claims 76 to 78, wherein the first sealing material is a metal having a low melting point or an alloy of the metal. delete 76. The manufacturing method of an image displaying apparatus according to claim 75, wherein said panel member is sealed with said front plate by a first sealing material such as indium or an alloy thereof disposed on said back plate. 84. The apparatus of claim 81, wherein the panel member further comprises an outer frame disposed on the side of the front plate, wherein the outer frame is fixed by a second sealing material such as frit glass to form the side of the panel. A manufacturing method of an image display apparatus. 83. The manufacturing method of an image displaying apparatus according to claim 82, wherein said second sealing material has a melting point higher than that of said first sealing material. 84. The manufacturing method of an image displaying apparatus according to any one of claims 81 to 83, wherein the first sealing material is a metal having a low melting point or an alloy of the metal. delete 76. The manufacturing method of an image displaying apparatus according to claim 75, wherein said panel member further comprises an outer frame fixed to said back plate by a second sealing material such as frit glass and constituting a side of said panel. . 87. The manufacturing method of an image displaying apparatus according to claim 86, wherein said panel member is sealed with a first sealing material such as indium or an alloy thereof disposed on the front plate. 88. The manufacturing method of an image displaying apparatus according to claim 87, wherein said second sealing material has a melting point higher than that of said first sealing material. 89. The manufacturing method of an image displaying apparatus according to claim 87 or 88, wherein the first sealing material is a metal having a low melting point or an alloy of the metal. delete 76. The panel member of claim 75, wherein the panel member further comprises an outer frame fixed to the back plate by a second sealing material, such as frit glass, wherein the panel is formed of indium or the like, or the like, disposed on the outer frame. A manufacturing method of an image display apparatus, characterized in that the front plate is sealed by a first sealing material. 92. The manufacturing method of an image displaying apparatus according to claim 91, wherein said second sealing material has a melting point higher than that of said first sealing material. 92. The manufacturing method of an image displaying apparatus according to claim 91 or 92, wherein the first sealing material is a metal having a low melting point or an alloy of the metal. delete 56. The manufacturing method of an image displaying apparatus according to claim 55, wherein said front plate is a phosphor. 56. The manufacturing method of an image displaying apparatus according to claim 55, wherein said front plate has a phosphor and a metal back. 56. The manufacturing method of an image displaying apparatus according to claim 55, wherein said back plate has an electron source as phosphor excitation means. 98. The manufacturing method of an image displaying apparatus according to claim 97, wherein said phosphor excitation means has a plurality of electron-emitting devices which are matrix wirings. (a) a front plate including a back plate including a substrate on which an electron source as a phosphor excitation means is disposed, and a front plate including a substrate on which a phosphor is disposed in a firing chamber filled with a reduced pressure atmosphere; Heating in the range of ° C; (b) In either of the two members, which have been subjected to getter processing or brought in to one of the back members and one of the front plates brought in through a reduced pressure atmosphere in a getter processing chamber filled with a reduced pressure atmosphere. Performing getter processing on one or both sides of the apparatus; (c) bringing the back plate and the front plate through a pressure-reduced atmosphere into a sealed chamber filled with a reduced pressure atmosphere and heating for sealing within a range of 160 ° C to 140 ° C. Method for manufacturing a display device. 100. The method of claim 99, wherein the getter treatment in step (b) is performed while heating to one member carried in the baking temperature or less and within a range of 100 DEG C or heating one or both of the members brought in. A method of manufacturing an image display apparatus, characterized in that. (a) a front plate including a back plate including a substrate on which an electron source as a phosphor excitation means is disposed, and a front plate including a substrate on which a phosphor is disposed in a firing chamber filled with a reduced pressure atmosphere; Heating in the range of ° C; (b) importing one or both of the backplate and the frontplate through a reduced pressure atmosphere into a cooling chamber filled with a reduced pressure atmosphere for cooling; (c) either one of the rear plate and the front plate through an atmosphere depressurized with a getter processing chamber filled with a pressure-reduced atmosphere for gettering with respect to one of the imported members or one or both of the imported members; Importing both; and (d) bringing the back plate and the front plate through a reduced pressure atmosphere into a sealed chamber filled with a reduced pressure atmosphere. 102. The manufacturing method of an image displaying apparatus according to claim 101, wherein surface cleaning processing of one or both of the carried members or both of the carried members is performed in the cooling processing chamber in the step (b). 102. The surface cleaning treatment of one or both of the members carried in or the members carried in the carrying out is performed in a cooling chamber, and the getter processing of the inside of the cooling chamber is performed in the step (b). The manufacturing method of the image display apparatus characterized by the above-mentioned. (a) a front plate including a back plate including a substrate on which an electron source as a phosphor excitation means is disposed, and a front plate including a substrate on which a phosphor is disposed in a firing chamber filled with a reduced pressure atmosphere; Heating in the range of ° C; (b) bringing one or both of the rear plate and the front plate into a surface cleaning chamber filled with a pressure-reduced atmosphere through a pressure-reduced atmosphere; Performing a surface cleaning treatment on one or both of the members; (c) bringing one or both of the back plate and the front plate through a reduced pressure atmosphere into a getter processing chamber filled with a reduced pressure atmosphere, and in either of the two members which have been subjected to getter processing or carried in one of the imported members; Performing getter processing on one or both; (d) bringing the back plate and the front plate through a reduced pressure atmosphere into a sealed chamber filled with a reduced pressure atmosphere and heating them within a range of 160 ° C. to 140 ° C. for sealing. Method of manufacturing the device. 107. The manufacturing method of an image displaying apparatus according to claim 104, wherein the getter processing inside the surface cleaning processing chamber is performed in the surface cleaning processing chamber of step (b). 107. The manufacturing of an image display apparatus according to claim 104 or 105, wherein one or both members of one of the carried members or both of the carried members are cooled in the surface cleaning processing chamber of step (b). Way. 107. The method according to any one of claims 101 to 106, wherein the getter treatment is carried out by heating one member carried in the baking temperature or less and 100 DEG C or heating one or both of the members brought in. The manufacturing method of the image display apparatus characterized by the above-mentioned. (a) a front plate including a back plate including a substrate on which an electron source as a phosphor excitation means is disposed, and a front plate including a substrate on which a phosphor is placed into a firing chamber filled with a reduced pressure atmosphere, and then 300 ° C to 400 Heating in the range of ° C; (b) bringing one or both of the rear plate and the front plate into a surface cleaning chamber filled with a pressure-reduced atmosphere through a pressure-reduced atmosphere; Performing a surface cleaning treatment on one or both of the members; (c) bringing one or both of the back plate and the front plate through a reduced pressure atmosphere into a first getter processing chamber filled with a reduced pressure atmosphere, and performing getter processing inside the first getter processing chamber; (d) One or both of the back plate and the front plate are brought in and the getter process is carried out to the second getter processing chamber filled with the reduced pressure atmosphere, and both of the members are subjected to getter processing or carried in. Performing getter processing on one or both; (e) bringing the rear plate and the front plate into a sealed chamber filled with a reduced pressure atmosphere and heating them in a range of 160 ° C. to 140 ° C. for sealing. Method of manufacturing the device. 109. The manufacturing method of an image displaying apparatus according to claim 108, wherein one or both of the imported members or both of the imported members are cooled in the surface cleaning processing chamber of step (b). (a) a front plate including a back plate including a substrate on which an electron source as a phosphor excitation means is disposed, and a front plate including a substrate on which a phosphor is placed into a firing chamber filled with a reduced pressure atmosphere, and then 300 ° C to 400 Heating in the range of ° C; (b) carrying one or both of the rear plate and the front plate through a reduced pressure atmosphere into a cooling chamber filled with a reduced pressure atmosphere, and performing a cooling treatment; (c) bringing one or both of the back plate and the front plate into a surface cleaning chamber filled with a pressure-reduced atmosphere through a pressure-reduced atmosphere; Performing a surface cleaning treatment on one or both of the members, (d) One or both of the back plate and the front plate are brought in through a reduced pressure atmosphere into a getter processing chamber filled with a reduced pressure atmosphere, and one of the two members which have been subjected to getter processing or brought in Performing getter processing on both sides; (e) bringing the rear plate and the front plate into a sealed chamber filled with a reduced pressure atmosphere and heating them in a range of 160 ° C. to 140 ° C. for sealing. Method of manufacturing the device. 117. The method according to any one of claims 108 to 110, wherein the getter treatment is carried out by heating one member carried in the baking temperature or less and 100 DEG C or heating one or both of the members brought in. The manufacturing method of the image display apparatus characterized by the above-mentioned. (a) importing a back plate comprising a substrate on which an electron source as a phosphor excitation means is disposed and a front plate including a substrate on which a phosphor is disposed, and heating the substrate in a range of 300 ° C. to 400 ° C. for firing; ; (b) carrying one or both of the rear plate and the front plate through a reduced pressure atmosphere into a cooling chamber filled with a reduced pressure atmosphere, and performing a cooling treatment; (c) bringing one or both of the back plate and the front plate into a surface cleaning chamber filled with a pressure-reduced atmosphere through a pressure-reduced atmosphere; Performing a surface cleaning treatment on one or both of the members; (d) bringing one or both of the rear plate and the front plate into a first getter processing chamber filled with a reduced pressure atmosphere and performing getter processing inside the first getter processing chamber; (e) Importing one or both of the back plate and the front plate through a reduced pressure atmosphere into a second getter processing chamber filled with a reduced pressure atmosphere, and performing getter processing or bringing in one of the imported members. Performing getter processing on one or both of the members; and (f) bringing the back plate and the front plate through a reduced pressure atmosphere into a sealed chamber filled with a reduced pressure atmosphere. 117. The image display apparatus according to claim 112, wherein the getter processing in step e is performed while heating one or both of the one or both of the members carried in the baking processing temperature or less and 100 ° C. Manufacturing method. 117. The image display apparatus according to any one of claims 102 to 113, wherein the surface cleaning process is a process for irradiating a surface of a substrate carried by an electron beam, thereby cleaning the surface of the substrate. Manufacturing method. 117. The manufacturing of an image display apparatus according to any one of claims 102 to 113, wherein said surface cleaning process is a process of irradiating a surface of a loaded substrate with ions, thereby cleaning the surface of said substrate. Way. 117. The manufacturing of an image display apparatus according to any one of claims 102 to 113, wherein said surface cleaning process is a process of irradiating a surface of a loaded substrate with ultraviolet rays, thereby cleaning the surface of said substrate. Way. 117. The manufacturing of an image display apparatus according to any one of claims 102 to 113, wherein said surface cleaning process is a process of irradiating a surface of a loaded substrate with plasma, thereby cleaning the surface of said substrate. Way. 101. The apparatus of any one of claims 99, 101, 104, 108, 110, and 112, wherein the back plate has a substrate on which an electron source, which is a phosphor excitation means, is disposed, and an outer frame. A method of manufacturing an image display apparatus. 107. The apparatus of any one of claims 99, 101, 104, 108, 110, and 112, wherein the back plate has a substrate and a spacer on which an electron source as a phosphor excitation means is disposed. A manufacturing method of an image display apparatus. 102. The apparatus of any one of claims 99, 101, 104, 108, 110, and 112, wherein the back plate comprises: a substrate on which an electron source as a phosphor excitation means is disposed; A manufacturing method of an image display apparatus comprising a spacer. 102. An image according to any one of claims 99, 101, 104, 108, 110, and 112, wherein the front plate has a substrate on which phosphors are disposed and an outer frame. Method for manufacturing a display device. The image display according to any one of claims 99, 101, 104, 108, 110, and 112, wherein the front plate has a substrate and a spacer on which phosphors are disposed. Method of manufacturing the device. 101. The apparatus of any one of claims 99, 101, 104, 108, 110, and 112, wherein the front plate has a substrate on which phosphors are disposed, an outer frame, and a spacer. A manufacturing method of an image display apparatus. 101. The image display apparatus according to any one of claims 99, 101, 104, 108, 110, and 112, wherein the getter used for the getter processing is a getter that evaporates. Manufacturing method. 103. The apparatus of any one of claims 99, 101, 104, 108, 110, and 112, wherein the phosphor excitation means comprises a plurality of electron emitting devices which are matrix wirings. A manufacturing method of an image display apparatus. A getter processing chamber for getting one or both of the backplanes comprising a substrate on which an electron source as a phosphor excitation means and a front plate including a substrate on which phosphors are disposed under a vacuum atmosphere; A sealing processing chamber which performs sealing by heat-treating the back plate and the front plate within a range of 160 ° C to 140 ° C; A manufacturing method of an image display apparatus having a carrying jig or a carrying support configured to carry the back plate and the front plate into the sealing process chamber from the getter processing chamber, And a heat shield member formed of a material selected from one of aluminum, chromium, stainless steel, and the like, disposed between the getter processing chamber and the sealing processing chamber. A firing processing chamber which performs baking by heating a back plate including a substrate on which an electron source is disposed and a front plate including a substrate on which a phosphor is disposed within a range of 300 ° C to 400 ° C under vacuum atmosphere; A getter processing chamber configured to getter one or both of the rear plate and the front plate; A manufacturing method of an image display apparatus having a carrying means constituted by a transport jig or a transport support capable of carrying the rear plate and the front plate into the getter processing chamber from the firing processing chamber, And a heat shield member formed of a material selected from one of aluminum, chromium, stainless steel, and the like, disposed between the firing chamber and the getter chamber. A firing processing chamber which performs baking by heating a back plate including a substrate on which an electron source is disposed and a front plate including a substrate on which a phosphor is disposed within a range of 300 ° C to 400 ° C under vacuum atmosphere; A getter processing chamber configured to getter one or both of the rear plate and the front plate; A sealing treatment chamber for sealing the rear plate and the front plate by heat treatment within a range of 160 ° C to 140 ° C; Manufacture of an image display apparatus having conveying means constituted by a transport jig or transport support capable of carrying the back plate and the front plate into these chambers in the order of a firing chamber, a getter chamber, and a seal chamber. As a method, A heat shielding member formed of a material selected from one of aluminum, chromium, stainless steel, and the like, is disposed between the processing chambers. 129. An apparatus according to any one of claims 126 to 128, wherein said heat shield member has a reflective surface. A firing treatment chamber for firing the phosphor by means of heating the back plate including the substrate on which the electron source is disposed and the front plate including the substrate on which the phosphor is disposed in a reduced pressure in the range of 300 ° C to 400 ° C; A cooling chamber which gradually cools one or both of the rear plate and the front plate; A getter processing chamber configured to getter one or both members of the rear plate and the front plate; And a transport jig or transport support capable of bringing the rear plate and the front plate into their chambers in the order of the firing chamber, the cooling chamber, and the getter processing chamber. An apparatus for manufacturing an image display device. A calcination treatment chamber for performing a calcination process by heating a back plate including a substrate on which an electron source is disposed and a front plate including a substrate on which a phosphor is disposed in a reduced pressure atmosphere in a range of 300 ° C to 400 ° C; ; A cooling chamber which gradually cools one or both members of the rear plate and the front plate; A getter processing chamber configured to getter one or both members of the rear plate and the front plate; A sealing processing chamber which performs sealing by heat-treating the back plate and the front plate within a range of 160 ° C to 140 ° C; And a transport jig or transport support capable of bringing the rear plate and the front plate into their chambers in the order of the firing chamber, the cooling chamber, and the getter processing chamber. An apparatus for manufacturing an image display device. The manufacturing apparatus according to claim 130 or 131, wherein the manufacturing apparatus includes a heat shield member formed of a material selected from one of aluminum, chromium, stainless steel, and the like, and disposed between the firing chamber and the cooling chamber. Apparatus for producing an image display apparatus, characterized in that provided. 143. The apparatus of claim 131, wherein the manufacturing apparatus further comprises a heat shielding member formed of a material selected from one of aluminum, chromium, stainless steel, and the like, and disposed between the getter processing chamber and the sealing processing chamber. An apparatus for producing an image display apparatus. 143. The apparatus of claim 131, wherein the manufacturing apparatus further includes a heat shielding member formed of a material selected from one of aluminum, chromium, stainless steel, and the like, wherein one heat shielding member includes the firing chamber and the cooling chamber. And the other heat shielding member is disposed between the getter processing chamber and the sealing processing chamber. The manufacturing apparatus according to claim 130 or 131, wherein the manufacturing apparatus further includes a plurality of heat shielding members formed by a material selected from one of aluminum, chromium, stainless steel, and the like, and each heat shielding member is subjected to the firing treatment. An apparatus for manufacturing an image display apparatus, characterized in that it is disposed between two adjacent chambers selected from a chamber, a cooling processing chamber, a getter processing chamber, and a sealing processing chamber. 137. An apparatus according to any one of claims 132 to 135, wherein said heat shield member has a reflective surface. 129. The manufacture of an image display apparatus according to any one of claims 126 to 128, 130 and 131, wherein said back plate has a substrate and an outer frame on which an electron source is disposed as a phosphor excitation means. Device. 133. The apparatus for manufacturing an image display apparatus according to any one of claims 126 to 128, 130 and 131, wherein said back plate has a substrate and a spacer on which an electron source is disposed as a phosphor excitation means. . 133. The apparatus of any one of claims 126 to 128, 130 and 131, wherein the back plate has a substrate on which an electron source is disposed as a phosphor excitation means, an outer frame, and a spacer. An apparatus for manufacturing an image display device. 133. The apparatus according to any one of claims 126 to 128, 130 and 131, wherein the front plate has a substrate on which phosphors are disposed and an outer frame. 133. The apparatus according to any one of claims 126 to 128, 130 and 131, wherein the front plate has a substrate and a spacer on which phosphors are disposed. 129. The manufacture of an image display apparatus according to any one of claims 126 to 128, 130, and 131, wherein said front plate has a substrate on which phosphors are disposed, an outer frame, and a spacer. Device. 133. The apparatus according to any one of claims 126 to 128, 130 and 131, wherein the getter used for the getter processing is a getter that evaporates. 133. The apparatus according to any one of claims 126 to 128, 130, and 131, wherein the phosphor excitation means comprises a plurality of electron-emitting devices which are matrix wirings.