JPH01105154A - Humidity detector - Google Patents
Humidity detectorInfo
- Publication number
- JPH01105154A JPH01105154A JP62263189A JP26318987A JPH01105154A JP H01105154 A JPH01105154 A JP H01105154A JP 62263189 A JP62263189 A JP 62263189A JP 26318987 A JP26318987 A JP 26318987A JP H01105154 A JPH01105154 A JP H01105154A
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- sensor
- humidity sensor
- circuit
- change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims abstract description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 7
- 230000003321 amplification Effects 0.000 claims abstract description 6
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 6
- 230000010355 oscillation Effects 0.000 claims abstract description 5
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 4
- 239000010703 silicon Substances 0.000 claims abstract description 4
- -1 silicon alkoxide Chemical class 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 10
- 239000003990 capacitor Substances 0.000 claims description 6
- 230000003301 hydrolyzing effect Effects 0.000 claims description 3
- 125000000217 alkyl group Chemical group 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 abstract description 3
- 238000001035 drying Methods 0.000 abstract description 3
- 238000005245 sintering Methods 0.000 abstract description 3
- 239000006185 dispersion Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 239000006229 carbon black Substances 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 239000002952 polymeric resin Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229920003002 synthetic resin Polymers 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229920001940 conductive polymer Polymers 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920005597 polymer membrane Polymers 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000001879 gelation Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000003923 scrap metal Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、相対湿度の変化を、多孔質湿度センサの電気
抵抗変化として検出し、相対湿度変化に比例したアナロ
グ信号を出力する湿度検出器に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention provides a humidity detector that detects a change in relative humidity as a change in electrical resistance of a porous humidity sensor and outputs an analog signal proportional to the change in relative humidity. Regarding.
従来、相対湿度の変化を、素子の電気的特性の変化とし
て検出する湿度センサには、電解質系、存機物系、金属
系、金屑酸化物系があり、現在実用化されているものは
、吸湿性高分子樹脂中に導電性粉末を混合した結露セン
サ、導電性高分子膜による湿度センサ、Ｚ ｎ Ｃｒ
＊ Ｏａ Ｌ ｉＺ ｎ ＶＯ，系セラミック湿度セ
ンサ、 Ｔ ｉＯｘ −Ｖ ＊ ０、系セラミック湿度
センサ等がある。吸湿性高分子樹脂中に導電性粉末混合
した結露センサは、高分子樹脂が吸湿すると膨張し、導
電性粉末の粒子間距離が増加し、抵抗値が増加するもの
で、一定の湿度になると急激な抵抗増加を起こす性質を
利用したものである。導電性高分子膜およびセラミック
系湿度センサは、水の吸着により素子の抵抗値が指数関
数的に減少する性質を利用したものである。Conventionally, humidity sensors that detect changes in relative humidity as changes in the electrical characteristics of elements include electrolyte-based, organic-based, metal-based, and scrap metal oxide-based humidity sensors. , condensation sensor with conductive powder mixed in hygroscopic polymer resin, humidity sensor with conductive polymer film, Z n Cr
*OaLiZnVO type ceramic humidity sensor, TiOx-V*0 type ceramic humidity sensor, etc. A dew condensation sensor made by mixing conductive powder into a hygroscopic polymer resin expands when the polymer resin absorbs moisture, increasing the distance between particles of the conductive powder and increasing the resistance value, which rapidly increases when the humidity reaches a certain level. This takes advantage of the property of causing a significant increase in resistance. Conductive polymer membrane and ceramic humidity sensors utilize the property that the resistance value of the element decreases exponentially due to water adsorption.
しかし従来技術では、結露センサは広範囲の湿度測定が
できず、高分子膜湿度センサは６０＠Ｃ以上での測定が
できない、また、高分子膜、セラミック系湿度センサ共
に低湿度域で精度が悪化するという欠点があった。セラ
ミック系湿度センサの中には一定時間ごとに数１００°
Ｃまで加熱する必要のあるものが使用されていたが、こ
れらのセンサは、可燃性蒸気、またはガスの存在する場
所では使用できない。さらにいずれのセンサも、高温多
湿の環境で長時間使用すると劣化してしまう。However, with conventional technology, dew condensation sensors cannot measure humidity over a wide range, polymer membrane humidity sensors cannot measure above 60@C, and both polymer membrane and ceramic humidity sensors have poor accuracy in low humidity areas. There was a drawback to that. Some ceramic humidity sensors measure several hundred degrees at regular intervals.
Although some sensors have been used that require heating to temperatures up to 50°C, these sensors cannot be used in the presence of flammable vapors or gases. Furthermore, both sensors deteriorate if used for long periods of time in hot and humid environments.
そこで本発明はこの様な問題点を解決するもので、その
目的とするところは、高温多湿な環境で長期の使用が可
能で、広範囲な湿度域で高精度な測定が、可能な湿度検
出器を提供するところにある。Therefore, the present invention is intended to solve these problems, and its purpose is to provide a humidity detector that can be used for a long period of time in high temperature and humid environments, and that can perform highly accurate measurements over a wide range of humidity. It is in a place where we provide.
（１） 本発明の湿度検出器は、ガラス中に導電性粒子
を分散させた多孔質体のセンサを用いた湿度検出器にお
いて、
（ａ）シリコンアルコキシド（Ｓ ｉ （ＯＲ） ＝
。(1) The humidity sensor of the present invention is a humidity sensor using a porous sensor in which conductive particles are dispersed in glass. (a) Silicon alkoxide (S i (OR) =
.
Ｒ：アルキル基）を加水分解したゾルに炭素粒子を分散
させ、該ゾルをゲル化させ乾燥、焼結した湿度センサ。A humidity sensor in which carbon particles are dispersed in a sol obtained by hydrolyzing R: alkyl group), and the sol is gelled, dried, and sintered.
（ｂ）前記湿度センサにコンデンサを直列に接続し、少
なくとも１個以上の固定抵抗器を更に直並列に、接続し
たセンサブロックをフィードバック抵抗として用い、前
記湿度センサの抵抗値変化によって増幅率が変化する構
成の検出アンプ回路。(b) A capacitor is connected in series to the humidity sensor, and a sensor block connected in series and parallel to at least one fixed resistor is used as a feedback resistor, and the amplification factor changes according to a change in the resistance value of the humidity sensor. A detection amplifier circuit configured to
（ｃ）前記検出アンプの信号源となる発振回路。(c) An oscillation circuit that serves as a signal source for the detection amplifier.
（’ｄ ）前記検出アンプ回路の出力信号を整流し、前
記湿度センサによって検出された相対湿度の変化に比例
した大きさの信号を出力する整流回路から構成されるこ
とを特徴とする。('d) It is characterized by comprising a rectifier circuit that rectifies the output signal of the detection amplifier circuit and outputs a signal having a magnitude proportional to a change in relative humidity detected by the humidity sensor.
本発明の湿度検出器は、石英ガラス中に炭素粉末を分散
させた多孔質体を湿度センサとして測定環境中に設置し
、湿度センサにコンデンサを直列に接続し、更に直並列
に固定抵抗器を組み合わせたセンサブロックをフィード
バック抵抗として用い、湿度センサの電気抵抗の変化に
より、増幅率の変化する検出アンプを構成し、検出アン
プ入力に発振回路から一定振幅、一定周波数の信号を与
え、検出アンプ出力を整流することによって、測定環境
中の湿度変化に比例して変化する出力信号が得られる。In the humidity detector of the present invention, a porous body made of quartz glass with carbon powder dispersed therein is installed as a humidity sensor in a measurement environment, a capacitor is connected in series to the humidity sensor, and a fixed resistor is connected in series and parallel. The combined sensor block is used as a feedback resistor to configure a detection amplifier whose amplification factor changes according to changes in the electrical resistance of the humidity sensor.A signal of constant amplitude and constant frequency is applied from an oscillation circuit to the detection amplifier input, and the detection amplifier output By rectifying the , an output signal is obtained that varies proportionally to changes in humidity in the measurement environment.
以下本発明について図面に基づいて詳細に説明する。 The present invention will be explained in detail below based on the drawings.
第１図は本発明の湿度検出器の回路図で、発振回路ｌは
、一定振幅、一定周波数の信号を出力する。検出アンプ
２はセンサブロック３の抵抗値変化によって増幅率が変
化する増幅回路、整流回路４は、交流を直流に変換する
回路である。FIG. 1 is a circuit diagram of a humidity detector according to the present invention, in which an oscillation circuit 1 outputs a signal with a constant amplitude and a constant frequency. The detection amplifier 2 is an amplification circuit whose amplification factor changes according to a change in the resistance value of the sensor block 3, and the rectifier circuit 4 is a circuit that converts alternating current into direct current.
センサブロック３は、第２図に示す様に湿度センサ３１
、コンデンサ３２、補正抵抗３３から構成され、湿度変
化に対してセンサブロックの合成抵抗変化が直線的にな
る様に構成されている。コンデンサ３２は、湿度センサ
３１に直流電流が流れることを避けるために接続されて
いる。The sensor block 3 includes a humidity sensor 31 as shown in FIG.
, a capacitor 32, and a correction resistor 33, and is configured such that the combined resistance change of the sensor block is linear with respect to changes in humidity. The capacitor 32 is connected to prevent direct current from flowing through the humidity sensor 31.
つぎに本発明の湿度センサの試料の製法について説明す
る。Next, a method for manufacturing a sample of the humidity sensor of the present invention will be explained.
テトラエトキシシラン、（Ｓ ｉ （ＱＣ，Ｈ，）、）
２００ｍｌに、０．０２Ｎ塩酸６５ｍ１を加え、１時間
撹はんし、テトラエトキシシランを加水分解すると透明
で均一なゾルが得られる。このゾルにカーボンブラック
１０．８ｇを加え、３０分間撹はんし、カーボンブラッ
クを分散させると黒色で均一なゾルが得られる。このゾ
ルに０．ＩＮアンモニア水を滴下して、ｐＨ値を５にす
ると１時間後にゲル化した。この、ゲルを６０°Ｃで７
２時間乾燥させた後、焼結炉に入れ、ＩＴｏｒｒ以下の
真空度で１２００°Ｃに加熱し、１２００°Ｃで１時間
保持した。得られた焼結体から５ｍｍＸ５ｍｍＸ２ｍｍ
の板を切り出しアルミナ基板に接着し電極を付け、ｔｉ
２図に示す湿度センサを製作した。第３図において、３
１は焼結体、３２は電極、３３はリード線、３４は基板
である。Tetraethoxysilane, (S i (QC,H,),)
Add 65 ml of 0.02N hydrochloric acid to 200 ml and stir for 1 hour to hydrolyze the tetraethoxysilane to obtain a transparent and uniform sol. Add 10.8 g of carbon black to this sol and stir for 30 minutes to disperse the carbon black to obtain a black, uniform sol. This sol contains 0. IN aqueous ammonia was added dropwise to bring the pH value to 5, and gelation occurred after 1 hour. This gel was heated at 60°C for 7
After drying for 2 hours, it was placed in a sintering furnace, heated to 1200°C under a vacuum of ITorr or less, and held at 1200°C for 1 hour. 5mm x 5mm x 2mm from the obtained sintered body
Cut out the plate, glue it to an alumina substrate, attach electrodes, and
The humidity sensor shown in Figure 2 was manufactured. In Figure 3, 3
1 is a sintered body, 32 is an electrode, 33 is a lead wire, and 34 is a substrate.
第４図は、本湿度センサの感湿特性図である。FIG. 4 is a diagram showing the humidity sensitivity characteristics of this humidity sensor.
以上述べたように本発明の湿度センサは、湿度センサと
して、シリコンアルコキシドを加水分解したゾルに、炭
素粒子を分散させ、該ゾルを、ゲル化させ、乾燥、焼結
して得られた湿度センサを用いるので、高温高湿な環境
で長時間使用を続けても安定した特性を示し、また、炭
素粒子（実施例ではカーボンブラック）の含＊ｆｌによ
り湿度センサの感湿特性を広範囲に変化させることが出
来るので、従来測定が困難であった低湿度域での測定を
高精度に行うことが可能である。尚、本発明の回路構成
では湿度センサに直列にコンデンサを接続しているため
に、湿度センサに直流電流が流れることがなくｔｉｚセ
ンサの電気分解が避けられるので、感湿特性の劣化がな
く、長期間の精度保証が実現できる。また、本発明で用
いた湿度センサはきわめて安価なために、従来の湿度セ
ンサを用いた場合に比べて低コストな湿度検出器が実現
できる。As described above, the humidity sensor of the present invention is a humidity sensor obtained by dispersing carbon particles in a sol obtained by hydrolyzing silicon alkoxide, gelling the sol, drying it, and sintering it. Because it uses , it exhibits stable characteristics even when used for long periods of time in high temperature and high humidity environments, and the moisture sensitivity characteristics of the humidity sensor can be varied over a wide range due to the inclusion of carbon particles (carbon black in the example). Therefore, it is possible to perform measurements with high precision in low humidity regions, which have been difficult to measure in the past. In addition, in the circuit configuration of the present invention, since a capacitor is connected in series with the humidity sensor, no direct current flows through the humidity sensor, and electrolysis of the tiz sensor is avoided, so there is no deterioration of the humidity sensing characteristics. Long-term accuracy guarantee can be achieved. Further, since the humidity sensor used in the present invention is extremely inexpensive, a humidity detector can be realized at a lower cost than when a conventional humidity sensor is used.
第１図は、本発明の湿度検出器の回路図。 第２図は、センサブロックの構成図。 第３図は、湿度センサの構造図。 第４図は、湿度センサの感湿特性図。 以 上 出願人 セイコーエプソン株式会社 FIG. 1 is a circuit diagram of the humidity detector of the present invention. FIG. 2 is a configuration diagram of the sensor block. FIG. 3 is a structural diagram of the humidity sensor. FIG. 4 is a diagram showing the humidity sensitivity characteristics of the humidity sensor. that's all Applicant: Seiko Epson Corporation
Claims (1)
ンサを用いた湿度検出器において、（ａ）シリコンアル
コキシド（Ｓｉ（ＯＲ）＿４，Ｒ：アルキル基）を加水
分解したゾルに炭素粒子を分散させ、該ゾルをゲル化さ
せ乾燥、焼結した湿度センサ。 （ｂ）前記湿度センサにコンデンサを直列に接続し、少
なくとも１個以上の固定抵抗器を更に直並列に接続した
センサブロックをフィードバック抵抗として用い、前記
湿度センサの抵抗値変化によって増幅率が変化する構成
の検出アンプ回路。 （ｃ）前記検出アンプの信号源となる発振回路。 （ｄ）前記検出アンプ回路の出力信号を整流し、前記湿
度センサによって検出された相対湿度の変化に比例した
大きさの信号を出力する整流回路から構成されることを
特徴とする湿度検出器。(1) In a humidity sensor using a porous sensor with conductive particles dispersed in glass, (a) carbon is added to a sol obtained by hydrolyzing silicon alkoxide (Si(OR)_4, R: alkyl group). A humidity sensor in which particles are dispersed, the sol is gelled, dried, and sintered. (b) A sensor block in which a capacitor is connected in series to the humidity sensor and at least one or more fixed resistors are further connected in series and parallel is used as a feedback resistor, and the amplification factor changes according to a change in the resistance value of the humidity sensor. Configuration detection amplifier circuit. (c) An oscillation circuit that serves as a signal source for the detection amplifier. (d) A humidity detector comprising a rectifier circuit that rectifies the output signal of the detection amplifier circuit and outputs a signal having a magnitude proportional to a change in relative humidity detected by the humidity sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62263189A JPH01105154A (en) | 1987-10-19 | 1987-10-19 | Humidity detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62263189A JPH01105154A (en) | 1987-10-19 | 1987-10-19 | Humidity detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01105154A true JPH01105154A (en) | 1989-04-21 |
Family
ID=17386006
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62263189A Pending JPH01105154A (en) | 1987-10-19 | 1987-10-19 | Humidity detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01105154A (en) |
-
1987
- 1987-10-19 JP JP62263189A patent/JPH01105154A/en active Pending
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