JP6695748B2 - measuring device - Google Patents

Description

  The present invention relates to a measuring device that measures an object to be measured.

  In the triangulation type measuring device, the surface of the measuring object is irradiated with light, and the reflected light is received by a light receiving element having pixels arranged one-dimensionally or two-dimensionally. The height of the surface of the measuring object can be measured based on the peak position of the received light amount distribution obtained by the light receiving element.

  Non-Patent Document 1 proposes a shape measurement by a triangulation method that combines coded light and a phase shift method. Further, Non-Patent Document 2 proposes shape measurement by a triangulation method that combines coded light and stripe light. In these methods, the accuracy of shape measurement of the measurement object can be improved.

Toni F. Schenk, "Remote Sensing and Reconstruction for Three-Dimensional Objects and Scenes", Proceedings of SPIE, Volume 2572, pp. 1-9 (1995) Sabry F. El-Hakim and Armin Gruen, "Videometrics and Optical Methods for 3D Shape Measurement", Proceedings of SPIE, Volume 4309, pp. 219-231 (2001)

  Displaying an image (hereinafter, referred to as a three-dimensional shape image) showing a three-dimensional shape of a measurement target on a plane based on the data (hereinafter, referred to as measurement data) acquired by the shape measurement as described above. You can However, the stereoscopic image is a so-called computer graphic image, and there is a gap between the appearance of the measurement target displayed as the stereoscopic image and the actual appearance of the measurement target. Therefore, the user may not be able to easily recognize the actual measurement target even when looking at the stereoscopic image.

  For example, the user specifies the measurement location of the measurement object on the three-dimensional image. In that case, if there is a discrepancy between the appearance of the measurement object displayed as a stereoscopic image and the appearance of the actual measurement object, it takes a long time to specify the measurement point, or the wrong measurement point is specified. Such problems may occur. In particular, it is difficult for a user who is unfamiliar with work using a stereoscopic image to do so.

  An object of the present invention is to provide a measuring device that can easily specify a location to be measured.

(1) A measuring device according to the present invention provides a stage holding section, a stage which is held by the stage holding section and on which an object to be measured is placed, and measuring light which has a pattern on the object to be measured placed on the stage. The projecting unit that emits light, the light receiving unit that receives the measurement light reflected by the measurement target and outputs a light reception signal that indicates the amount of light received, and the measurement target that is placed on the stage is imaged at a fixed angle of view. By including a head unit including an imaging unit that acquires live image data representing a real-time image of the measurement target object as a live image, measurement light is guided obliquely downward from the light projection unit with respect to the measurement target object, And, based on a light receiving signal output from the light receiving unit and a connecting unit that fixedly connects the head unit and the stage holding unit so that the optical axis of the light receiving unit extends obliquely downward toward the measurement target, the measurement is performed. Based on the point cloud data generating means for generating the point cloud data representing the three-dimensional shape of the object and the point cloud data generated by the point cloud data generating means, the image of the measurement object is stereoscopically projected on a plane by the stereoscopic method. A stereoscopic shape image data generation unit that generates stereoscopic shape image data represented as a shape image and a designation of a portion to be measured on the stereoscopic shape image represented by the stereoscopic shape image data generated by the stereoscopic shape image data generation unit are accepted. And a measurement unit that calculates a measurement value at a specified location based on the point cloud data generated by the point cloud data generation unit, and the three-dimensional shape image data generation unit uses It is represented as a stereoscopic image on a plane by the perspective method, and stereoscopic image data is generated so that the position of the vanishing point of the stereoscopic image matches the position of the vanishing point of the live image.

  In this measuring device, the head unit including the light projecting unit and the light receiving unit is fixedly connected to the stage holding unit. The measurement target is placed on the stage held by the stage holding unit, and the measurement light having a pattern is applied to the measurement target from the light projecting unit. The measurement light reflected by the measurement object is received by the light receiving unit, and a light reception signal indicating the amount of received light is output. Point cloud data representing the three-dimensional shape of the measurement target is generated based on the light reception signal.

  In this case, since the light projecting unit, the light receiving unit, and the stage are integrally provided, the user does not need to adjust their arrangement, and the object to be measured is placed on the stage to measure the object to be measured. Object point cloud data can be obtained. Further, since the measurement light is guided obliquely downward from the light projecting portion to the measurement object, and the reflected light is received by the light receiving portion having an optical axis extending obliquely downward toward the measurement object, the measurement object It is possible to efficiently generate a wide range of point cloud data. Furthermore, since the rotation axis of the stage is not parallel to the optical axis of the light receiving section, rotating the stage changes the location of the measurement target pointed at the light receiving section. Therefore, the measurement light is irradiated onto the measurement target in a state where the rotational position of the stage is different, and thus the reflected light at the different position of the measurement target is received by the light receiving unit. Therefore, it is possible to easily generate a wide range of point cloud data of the measurement target.

  Moreover, live image data representing an image of the measurement object in real time as a live image is acquired by imaging the measurement object placed on the stage at a constant angle of view. The user can confirm the position and orientation of the measurement target while viewing the live image represented by the live image data.

  Also, based on the point cloud data, stereoscopic image data representing an image of the measurement object on a plane as a stereoscopic image is generated by the stereoscopic method. A user specifies a measurement target portion of the measurement target on the stereoscopic image represented by the stereoscopic image data, and the measured value of the specified position is calculated based on the point cloud data.

Steric shape image data is generated as the position of the vanishing point is represented on a plane as a three-dimensional shape image and the three-dimensional shape image matches the position of the vanishing point of the live image by Toshigaho object to be measured ..

Thereby , the user can compare the stereoscopic image and the live image with each other without feeling discomfort. Therefore, the user can intuitively recognize the measurement target portion of the measurement target by looking at the three-dimensional image. Therefore, the user can easily specify the place to be measured on the stereoscopic image.

( 2 ) The light receiving section may function as an imaging section. In this case, the configuration of the head unit is simplified as compared with the case where the imaging unit is provided separately from the light receiving unit. Further, since the live image data and the point cloud data are respectively acquired by the common light receiving unit, it becomes easy to approximate the live image and the stereoscopic image generated based on the point cloud data.

( 3 ) The imaging unit acquires the texture information representing the surface state of the measurement target by imaging the measurement target, and the three-dimensional shape image data generation unit generates the point cloud data generated by the point cloud data generation unit. The stereoscopic shape image data may be generated based on the texture information acquired by the light receiving unit. In this case, stereoscopic shape image data including texture information can be generated. This further reduces the user's discomfort with respect to the stereoscopic image.

( 4 ) The measuring device includes a reference plane setting unit that sets a reference plane corresponding to a part of the surface of the object to be measured and serving as a reference for measurement, based on the point group data generated by the point group data generating unit. Planar image data for generating planar image data representing an image of a measurement object viewed perpendicularly to the reference plane set by the reference plane setting means, based on the point cloud data generated by the point cloud data generating means The measuring unit may further include a generating unit, and the measuring unit may calculate the measured value of the designated location with the reference plane set by the reference plane setting unit as a reference.

In this case, setting the reference plane facilitates calculation of the measurement value from the point cloud data. In addition, based on the generated planar image data, an image of the measurement object viewed perpendicularly to the reference plane is displayed, so that the user can easily specify the measurement location.
(5) The three-dimensional shape image data generating means may generate the three-dimensional shape image data based on the angle of view such that the position of the vanishing point of the three-dimensional image matches the position of the vanishing point of the live image.

(6) The three-dimensional shape image data generating means, based on the positional relationship between the imaging unit and the stage in addition to the angle of view , causes the position of the vanishing point of the three-dimensional image to match the position of the vanishing point of the live image. Stereoscopic image data may be generated.

  In this case, since the imaging unit is provided integrally with the stage, the position of the vanishing point of the stereoscopic image and the position of the vanishing point of the live image are determined based on the angle of view and the positional relationship between the imaging unit and the stage. Can be matched easily.

  (7) The stage is held by the stage holding unit so as to be rotatable about a vertical rotation axis, and the measuring device is configured to display a rotation instruction receiving unit that receives a rotation instruction of the stage and a rotation instruction received by the rotation instruction receiving unit. Based on the rotation instruction accepted by the rotation instruction acceptance means, the stereoscopic image data generation means further includes a rotation control means for controlling the rotation of the stage based on the rotation instruction. The stereoscopic shape image data may be generated so as to match the orientation of the measurement target in the image.

  In this case, the stage is rotated based on the user's instruction to rotate the stage, and the orientation of the measuring object in the live image is changed. On the other hand, based on the instruction to rotate the stage, the stereoscopic shape image data is updated so that the orientation of the measurement object in the stereoscopic image matches the orientation of the measurement object in the live image. As a result, the orientation of the measurement target in the stereoscopic image changes in association with the change in the orientation of the measurement target on the live image due to the rotation of the stage. As a result, the user can compare the three-dimensional image and the live image with each other without a feeling of discomfort, and can see the three-dimensional image and intuitively recognize the place to be measured of the measurement target.

  (8) The stage is held by a stage holding unit so as to be rotatable about a vertical rotation axis, and the measuring device has a rotation control means for controlling the rotation of the stage and a predetermined measurement target of a three-dimensional image. Second rotation instruction receiving means for receiving a rotation instruction of a direction is further provided, and the predetermined direction corresponds to the rotation direction of the stage, and the stereoscopic image data generating means is received by the second rotation instruction receiving means. Based on the rotation instruction, the three-dimensional image data is generated so that the measurement object in the three-dimensional image rotates in a predetermined direction, and the rotation control means rotates the rotation received by the second rotation instruction receiving means. Based on the instruction, the stage may be rotated so that the orientation of the measuring object in the live image matches the orientation of the measuring object in the stereoscopic image.

  In this case, based on the rotation instruction from the user, the three-dimensional shape image data is updated so that the measurement object in the three-dimensional shape image rotates in a predetermined direction. On the other hand, based on the rotation instruction, the stage is rotated so that the orientation of the measuring object in the live image matches the orientation of the measuring object in the stereoscopic image. As a result, the stage is rotated in association with the change in the orientation of the measurement target in the three-dimensional image, and the orientation of the measurement target on the live image changes. As a result, the user can compare the stereoscopic image and the live image with each other without feeling any discomfort. Further, since it is possible to easily grasp the difference between the stereoscopic shape image and the live image, it is possible to easily grasp the defective portion of the stereoscopic shape data.

  (9) The point cloud data generating means generates the first solid shape data as the point cloud data based on the light reception signal output from the light receiving unit when the stage is at the first rotation position, and the stage is the first Second stereoscopic shape data as point cloud data based on a light reception signal output from the light receiving unit when the second stereoscopic shape is different from the rotation position of the first and second stereoscopic shapes. The data may be combined.

  In this case, due to the different rotational positions of the stage, the light receiving section receives the reflected light at different points on the measurement target. Therefore, it is possible to generate the point cloud data of a wide range of the measurement object based on the light reception signal output by the light receiving unit.

  According to the present invention, it is possible to easily specify a portion to be measured.

It is a block diagram which shows the structure of the measuring device which concerns on one embodiment of this invention. It is a schematic diagram which shows the structure of the measurement part of the measuring device of FIG. 2 is a functional block diagram showing functions realized by the CPU of FIG. 1. FIG. It is a typical external appearance perspective view of a measurement part. It is a figure for demonstrating the positional relationship of a light-receiving part and a stage. It is a figure for explaining the principle of a triangulation method. It is a figure for demonstrating the 1st pattern of measurement light. It is a figure for demonstrating the 2nd pattern of measurement light. It is a figure for demonstrating the 3rd pattern of measurement light. It is a figure which shows the relationship with the timing which imaged the image in the specific part of a measuring object, and the intensity | strength of the light received. It is a figure for demonstrating the 4th pattern of measurement light. It is a figure for demonstrating the example which produces | generates several solid shape data by imaging a to-be-measured object from a some viewpoint. It is a flowchart which shows the procedure of preparation for shape measurement. It is a flow chart which shows the details of the 1st adjustment in the procedure of preparation for shape measurement. It is a flow chart which shows the details of the 1st adjustment in the procedure of preparation for shape measurement. It is a flow chart which shows the details of the 2nd adjustment in the procedure of preparation for shape measurement. It is a flow chart which shows an outline of shape measurement processing. It is a figure which shows an example of a measuring object. It is a figure which shows the example of a live image. It is a figure for demonstrating a stereoscopic image. It is a schematic diagram for demonstrating the direction of a measuring object in a stereoscopic image. It is a figure for demonstrating the position of a vanishing point. It is a figure which shows the example in which a live image and a stereoscopic image are simultaneously displayed. It is a figure which shows the example of the three-dimensional image with texture. It is a schematic diagram which shows the three-dimensional shape data corresponding to one viewpoint. FIG. 9 is a diagram for explaining an example of an instruction to rotate the stage by operating the operation unit. It is a figure for explaining an example which gives a rotation instruction of a stage using a stereoscopic image. It is a figure which shows the stereoscopic perspective image displayed based on the newly generated stereoscopic shape data. 7 is a flowchart showing an operation example of the CPU when the stage rotates. It is a figure for demonstrating the restriction | limiting of the rotation direction of the measuring object in a stereoscopic image. 6 is a flowchart showing an operation example of a CPU when setting a reference plane. It is a figure which shows the example of a reference plane image. It is a figure for explaining an example of setting measurement conditions. It is a figure which shows the other example of a reference plane image. It is a figure for demonstrating specification of the part which should acquire a profile. It is a figure which shows the example of a profile image.

  Hereinafter, a measuring device according to an embodiment of the present invention will be described with reference to the drawings.

[1] Configuration of Measuring Apparatus FIG. 1 is a block diagram showing the configuration of the measuring apparatus according to one embodiment of the present invention. FIG. 2 is a schematic diagram showing the configuration of the measuring unit of the measuring device 500 shown in FIG. Hereinafter, the measuring device 500 according to the present embodiment will be described with reference to FIGS. 1 and 2. As shown in FIG. 1, the measurement device 500 includes a measurement unit 100, a PC (personal computer) 200, a control unit 300, and a display unit 400.

  As shown in FIG. 1, the measurement unit 100 is, for example, an image pickup device integrated with light projection and light reception, and includes a light projection unit 110, a light reception unit 120, an illumination light output unit 130, a stage 140, and a control board 150. As shown in FIG. 2, the light projecting unit 110 includes a measurement light source 111, a pattern generating unit 112, and a plurality of lenses 113 and 114. The light receiving unit 120 includes a camera 121 having an image sensor 121a and a lens 122. In this example, the camera 121 is a monocular camera. The measuring object S is placed on the stage 140.

  In the example of FIG. 2, the measuring unit 100 includes two light projecting units 110. Hereinafter, when distinguishing the two light projecting units 110, one light projecting unit 110 is referred to as a light projecting unit 110A, and the other light projecting unit 110 is referred to as a light projecting unit 110B. The light projecting units 110A and 110B are arranged symmetrically with the optical axis A1 of the light receiving unit 120 interposed therebetween. The optical axis A1 of the light receiving unit 120 passes through the center of the image sensor 121a of the camera 121 and the center of the lens 122.

  The measurement light source 111 of each of the light projecting units 110A and 110B is, for example, a blue LED (light emitting diode). The measurement light source 111 may be another light source such as a halogen lamp. Light emitted from the measurement light source 111 (hereinafter, referred to as measurement light) is appropriately condensed by the lens 113 and then enters the pattern generation unit 112.

  The pattern generation unit 112 is, for example, a DMD (digital micromirror device). The pattern generation unit 112 may be an LCD (liquid crystal display), an LCOS (Liquid Crystal on Silicon) or a mask. The measurement light that has entered the pattern generation unit 112 is converted into a preset pattern and a preset intensity (brightness) and then emitted. The measurement light emitted by the pattern generation unit 112 is converted by the lens 114 into light having a diameter larger than the dimension of the measurement target S, and then the measurement target S on the stage 140 is irradiated with the measurement light.

  The measurement light source 111, the lens 113, and the pattern generation unit 112 of the light projecting unit 110A are arranged so as to be aligned substantially parallel to the optical axis A1 of the light receiving unit 120. Similarly, the measurement light source 111, the lens 113, and the pattern generation unit 112 of the light projecting unit 110B are arranged so as to be aligned substantially parallel to the optical axis A1 of the light receiving unit 120. On the other hand, the lenses 114 of the light projecting units 110A and 110B are arranged so as to be offset with respect to the measurement light source 111, the lens 113, and the pattern generating unit 112. As a result, the optical axes A2 of the light projecting units 110A and 110B are inclined with respect to the optical axis A1 of the light receiving unit 120, and measurement light is emitted toward the measurement target S from both sides of the light receiving unit 120. The measurement light reflected above the stage 140 by the measurement target S is condensed and imaged by the lens 122 of the light receiving unit 120, and is received by the image pickup element 121a of the camera 121.

  In this example, in order to widen the irradiation range of the measurement light, the light projecting units 110A and 110B are configured to have a constant angle of view θ1. The angle of view θ1 of the light projecting units 110A and 110B is determined by, for example, the size of the pattern generating unit 112 and the focal length of the lens 114. Further, in order to widen the visual field (imaging range) of the light receiving unit 120, the light receiving unit 120 is configured to have a constant angle of view θ2. The angle of view θ2 of the light receiving unit 120 is determined by, for example, the size of the image sensor 121a and the focal length of the lens 122. If it is not necessary to widen the irradiation range and the imaging range of the measurement light, a telecentric optical system having an angle of view of approximately 0 degrees may be used as the light projecting units 110A and 110B and the light receiving unit 120.

  The measurement unit 100 may include a plurality of light receiving units 120 having different magnifications. In this case, the measurement object S can be imaged at different magnifications by selectively using the plurality of light receiving units 120. The optical axes of the plurality of light receiving units 120 are preferably parallel to each other.

  The camera 121 is, for example, a CCD (charge coupled device) camera. The image pickup device 121a is, for example, a monochrome CCD (charge coupled device). The image sensor 121a may be another image sensor such as a CMOS (complementary metal oxide semiconductor) image sensor. From each pixel of the image sensor 121a, an analog electric signal (hereinafter referred to as a light reception signal) corresponding to the amount of light received is output to the control board 150.

  Unlike a color CCD, a monochrome CCD does not need to be provided with a pixel that receives light of a red wavelength, a pixel that receives light of a green wavelength, and a pixel that receives light of a blue wavelength. Here, when a specific wavelength such as a blue wavelength is adopted as the measurement light, the color CCD can only be used for measurement of pixels that receive light of the specific wavelength, but the monochrome CCD has no such restriction. Therefore, the measurement resolution of the monochrome CCD is higher than that of the color CCD. Further, unlike the color CCD, the monochrome CCD does not need to be provided with a color filter for each pixel. Therefore, the sensitivity of the monochrome CCD is higher than that of the color CCD. For these reasons, the camera 121 in this example is provided with a monochrome CCD.

  In this example, the illumination light output unit 130 outputs the red wavelength light, the green wavelength light, and the blue wavelength light to the measurement target S in a time division manner. With this configuration, a color image of the measuring object S can be captured by the light receiving unit 120 using the monochrome CCD.

  On the other hand, when the color CCD has sufficient resolution and sensitivity, the image sensor 121a may be the color CCD. In this case, the illumination light output unit 130 does not need to irradiate the measurement target S with the red wavelength light, the green wavelength light, and the blue wavelength light in a time division manner, and irradiates the measurement target S with the white light. Therefore, the configuration of the illumination light source 320 can be simplified.

  An A / D converter (analog / digital converter) and a FIFO (First In First Out) memory (not shown) are mounted on the control board 150. The light reception signal output from the camera 121 is sampled at a constant sampling period by the A / D converter of the control board 150 and converted into a digital signal under the control of the control unit 300. The digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data. Here, when the camera 121 is, for example, a monochrome CMOS camera and each pixel of the image sensor 121a outputs a digital electric signal corresponding to the amount of received light to the control board 150, the A / D converter is not always necessary. is not.

  As shown in FIG. 1, the PC 200 includes a CPU (central processing unit) 210, a ROM (read only memory) 220, a work memory 230, a storage device 240, and an operation unit 250. The operation unit 250 also includes a keyboard and a pointing device. A mouse, a joystick, or the like is used as the pointing device.

  A system program is stored in the ROM 220. The work memory 230 is composed of a RAM (random access memory) and is used for processing various data. The storage device 240 includes a hard disk or the like. The storage device 240 stores a shape measurement program. Further, the storage device 240 is used to store various data such as pixel data given from the control board 150.

  The CPU 210 generates image data based on the pixel data provided from the control board 150. Further, the CPU 210 uses the work memory 230 to perform various processes on the generated image data and causes the display unit 400 to display an image based on the image data. Further, the CPU 210 gives a drive signal to the stage drive unit 146 described later through the control board 150. The display unit 400 is composed of, for example, an LCD panel or an organic EL (electroluminescence) panel. An image of the measuring object S in real time (hereinafter referred to as a live image) is displayed on the display unit 400 based on image data (hereinafter referred to as live image data) acquired in real time by the camera 121 of the light receiving unit 120. ) Can be displayed.

  The image of the measurement target S irradiated with the measurement light from one light projection unit 110A and the image of the measurement target S irradiated with the measurement light from the other light projection unit 110B are displayed on the display unit 400 so as to be aligned ( It may be displayed in two screens. In addition, the image of the measuring object S irradiated with the measuring light from one light projecting section 110A and the image of the measuring object S irradiated with the measuring light from the other light projecting section 110B are overlapped on the display section 400. Composite display such as display may be performed.

  When two screens are displayed, for example, the measuring object S is alternately irradiated from the light projecting units 110A and 110B at a constant cycle (several Hz), and the measuring object S is projected from the light projecting unit 110A. The image acquired when the measuring light is irradiated and the image acquired when the measuring object S is irradiated with the measuring light from the light projecting unit 110B are separately displayed on the display unit 400. While watching the displayed image, the user receives the amount of light received by the light receiving unit 120 when the measurement light is emitted from the light projecting unit 110A and the light reception of the light receiving unit 120 when the measurement light is emitted from the light projecting unit 110B. The amount can be adjusted individually. The amount of light received by the light receiving unit 120 can be adjusted by changing the brightness of the measurement light emitted from the light projecting units 110A and 110B or the exposure time of the light receiving unit 120.

  Even when the composite display is performed, the user receives the amount of light received by the light receiving unit 120 when the measurement light is emitted from the light projecting unit 110A while looking at the displayed image, as in the case of the two-screen display. Also, it is possible to adjust the amount of light received by the light receiving unit 120 when the measurement light is emitted from the light projecting unit 110B. In this case, in the display unit 400, in addition to the combined display image, the image of the measuring object S irradiated with the measurement light from one light projecting unit 110A and the measurement light from the other light projecting unit 110B are irradiated. The image of the measurement target S may be displayed side by side. Alternatively, the display unit 400 may switch between the two-screen display image and the composite display image. Alternatively, in the display unit 400, an image of the combined display, an image of the measurement target S irradiated with the measurement light from one light projecting unit 110A, and a measurement target irradiated with the measurement light from the other light projection unit 110B. The image of the object S may be switched and displayed.

  As shown in FIG. 2, the stage 140 includes a stage base 141 and a stage plate 142. The stage plate 142 is arranged on the stage base 141. The stage plate 142 has a mounting surface on which the measurement target S is mounted. Here, two directions orthogonal to each other on the mounting surface of the stage plate 142 are defined as an X direction and a Y direction, which are indicated by arrows X and Y, respectively. Moreover, the direction orthogonal to the mounting surface is defined as the Z direction, and is indicated by an arrow Z. Further, a direction rotating about an axis parallel to the Z direction is defined as a θ direction and is indicated by an arrow θ. The stage plate 142 may be provided with a mounting portion (for example, a screw hole) for mounting a clamp, a jig, or the like.

  A substantially cylindrical measurable region MR is set above the mounting surface of the stage plate 142. The measurable region MR is a region that can be irradiated with the measurement light by the light projecting units 110A and 110B and can be imaged by the light receiving unit 120. The size and position of the measurable region MR differ depending on the magnification and focus position of the lens 122 of the camera 121. When a plurality of light receiving units 120 having different magnifications are provided, the measurable region MR differs depending on the light receiving units 120 used.

  The stage 140 is attached to the rotation mechanism 143. The rotation mechanism 143 includes, for example, a stepping motor. The rotation mechanism 143 is driven by the stage operation unit 145 or the stage drive unit 146 of FIG. 1 to rotate the stage 140 in the θ direction about the rotation axis Ax. In this example, the rotation axis Ax extends in the vertical direction. The direction of the rotation axis Ax is not limited to the vertical direction, and may be slightly inclined with respect to the vertical direction. The user can rotate the stage 140 in the θ direction by manually operating the stage operation unit 145. Further, the stage driving unit 146 can rotate the stage 140 in the θ direction relative to the light receiving unit 120 by supplying a current to the rotating mechanism 143 based on the drive signal given from the PC 200 through the control board 150. it can.

  In this embodiment, the stage 140 can be driven by a stepping motor and can be manually operated, but the present invention is not limited to this. The stage 140 may be driven only by a stepping motor, or may be operated only manually. Further, instead of the stepping motor, another driving device such as a servo motor may be used.

  The controller 300 includes a control board 310 and an illumination light source 320. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light projecting section 110, the light receiving section 120, and the control board 150 based on a command from the CPU 210 of the PC 200. The control board 310 and the illumination light source 320 may be mounted on the measurement unit 100. However, the control board 310 and the illumination light source 320 easily generate heat, and the accuracy of the measurement unit 100 may be deteriorated due to the influence of the heat. Therefore, in order to ensure the accuracy of the measurement unit 100, it is preferable that the control board 310 and the illumination light source 320 be provided outside the measurement unit 100.

  The illumination light source 320 includes, for example, three LEDs that emit red light, green light, and blue light. By controlling the brightness of the light emitted from each LED, it is possible to generate light of any color from the illumination light source 320. Light generated from the illumination light source 320 (hereinafter referred to as illumination light) is output from the illumination light output unit 130 of the measurement unit 100 through the light guide member (light guide). The illumination light output unit 130 of FIG. 2 has an annular shape and is arranged above the stage 140 so as to surround the light receiving unit 120. As a result, the illumination light output unit 130 illuminates the measurement target S with illumination light so that no shadow is generated. The illumination light output unit 130 and the illumination light source 320 may be provided as external devices.

  FIG. 3 is a functional block diagram showing functions realized by the CPU 210 of FIG. As illustrated in FIG. 3, the CPU 210 includes a point cloud data generation unit 501, a three-dimensional shape image data generation unit 502, a measurement unit 503, a reference plane setting unit 504, a plane image data generation unit 505, and a first rotation instruction reception unit 506a. , And a second rotation instruction receiving unit 506b and a rotation control unit 507.

  The point cloud data generation unit 501 generates point cloud data representing the three-dimensional shape of the measurement target S based on the light reception signal output by the light reception unit 120. Based on the point cloud data generated by the point cloud data generation unit 501, the stereoscopic shape image data generation unit 502 generates stereoscopic shape image data that represents an image of the measurement target S on a plane as a stereoscopic shape image by a stereoscopic method. To generate. The measuring unit 503 accepts designation of a position to be measured on the stereoscopic image represented by the stereoscopic image data generated by the stereoscopic image data generating unit 502, and the point cloud generated by the point cloud data generating unit 501. Based on the data, calculate the measured value at the specified location. The reference plane setting unit 504 sets a reference plane corresponding to a part of the surface of the measuring object S and serving as a reference for measurement, based on the point cloud data generated by the point cloud data generation unit 501. Based on the point cloud data generated by the point cloud data generation unit 501, the plane image data generation unit 505 displays an image of the measurement target S viewed perpendicularly to the reference plane set by the reference plane setting unit 504. The plane image data to represent is produced | generated. The first rotation instruction receiving unit 506a receives a rotation instruction of the stage 140 from the user. The second rotation instruction receiving unit 506b receives a rotation instruction of the measurement target S in the predetermined direction in the stereoscopic image. The rotation control unit 507 controls the rotation of the stage 140 by controlling the stage driving unit 146 based on the rotation instruction received by the first or second rotation instruction receiving unit 506a or 506b. Details of these functions will be described later.

  Point cloud data generation unit 501, stereoscopic shape image data generation unit 502, measurement unit 503, reference plane setting unit 504, plane image data generation unit 505, first rotation instruction reception unit 506a, second rotation instruction reception unit 506b, and The rotation control unit 507 is realized by the CPU 210 executing the shape measurement program stored in the ROM 220 or the storage device 240. These functional units may be realized by hardware such as an electronic circuit.

  FIG. 4 is a schematic external perspective view of the measuring unit 100. In FIG. 4, the appearance of the measurement unit 100 is shown by a thick solid line, and some of the constituent elements provided inside the measurement unit 100 are shown by a dotted line. As shown in FIG. 4, the measuring unit 100 includes a pedestal 170. Two light projecting units 110, a light receiving unit 120, an illumination light output unit 130, and a control board 150 are attached to the pedestal 170. In this state, the positional relationship among the two light projecting units 110, the light receiving units 120, and the illumination light output units 130 is fixed by the pedestal 170. The illumination light output section 130 has a substantially cylindrical shape and is arranged so as to surround the light receiving section 120. An illumination light outlet 131 having an elliptical shape is formed at one end of the illumination light output unit 130. Further, the two light projecting units 110 are arranged side by side with the light receiving unit 120 and the illumination light output unit 130 interposed therebetween.

  A head casing 180 that accommodates a part of the two light projecting units 110, the light receiving unit 120, the illumination light output unit 130, and the control board 150 is attached to the pedestal 170. A head unit 190 is configured by the two light projecting units 110, the light receiving unit 120, the illumination light output unit 130, the control board 150, the pedestal 170, and the head casing 180.

  The measurement unit 100 includes an installation unit 161 and a stand unit 162. The installation portion 161 has a flat bottom surface and is formed to extend in one direction with a substantially constant width. The stand portion 162 is connected to one end of the installation portion 161, and is formed to extend upward from one end of the installation portion 161. The stage 140 is rotatably held on the installation unit 161. The pedestal 170 of the head portion 190 is configured to be attachable to and detachable from the upper end of the stand portion 162. The head part 190 and the installation part 161 are fixedly connected by the stand part 162. As a result, the positional relationship between the stage 140, the two light projecting units 110, and the light receiving units 120 is held constant.

  Each light projecting unit 110 is positioned such that the irradiation region IR to which the measurement light is irradiated includes the stage 140 and the space above it. The measurement light is guided obliquely downward from each light projecting unit 110 with respect to the measurement target S. Each light receiving unit 120 is positioned so that the imaging region TR by the camera 121 of FIG. 2 includes the stage 140 and the space above it. In FIG. 4, the irradiation region IR of each light projecting unit 110 is shown by a two-dot chain line, and the imaging region TR of the light receiving unit 120 is shown by a one-dot chain line.

  FIG. 5 is a diagram for explaining the positional relationship between the light receiving unit 120 and the stage 140. FIG. 5 shows the light receiving unit 120 and the stage 140 viewed from the side. As shown in FIG. 5, the optical axis A1 of the light receiving unit 120 is inclined with respect to the rotation axis Ax of the stage 140 and extends obliquely downward toward the measurement target S on the stage 140.

  The light receiving unit 120 has a virtual imaging surface 120a perpendicular to the optical axis A1. The area where the imaging surface 120a is directed becomes the area where the light receiving unit 120 images. In this example, the imaging surface 120a is directed obliquely downward with respect to the measurable region MR. The inclination angle D1 of the imaging surface 120a with respect to the horizontal plane is set to 45 degrees, for example.

[2] Measurement of Shape of Object to be Measured (1) Shape Measurement by Triangular Ranging Method In the measuring unit 100, the shape of the object of measurement S is measured by the triangular distance measuring method. FIG. 6 is a diagram for explaining the principle of the triangulation method. As shown in FIG. 6, an angle α between the optical axis A2 of the measurement light and the optical axis A1 of the light receiving unit 120 is set in advance. The angle α is larger than 0 degrees and smaller than 90 degrees.

  When the measurement target S is not mounted on the stage 140, the measurement light emitted from the light projecting unit 110 is reflected by the point O on the mounting surface of the stage 140 and enters the light receiving unit 120. On the other hand, when the measurement target S is placed on the stage 140, the measurement light emitted from the light projecting unit 110 is reflected by the point A on the surface of the measurement target S and enters the light receiving unit 120.

  When the distance between the point O and the point A in the X direction is d, the height h of the point A of the measuring object S with respect to the mounting surface of the stage 140 is given by h = d ÷ tan (α). The CPU 210 of the PC 200 in FIG. 1 measures the distance d between the point O and the point A in the X direction based on the pixel data of the measurement object S provided by the control board 150. Further, the CPU 210 calculates the height h of the point A on the surface of the measuring object S based on the measured distance d. The three-dimensional shape of the measuring object S is measured by calculating the heights of a plurality of points on the surface of the measuring object S.

  In order to irradiate a plurality of points on the surface of the measuring object S with the measuring light, the light projecting unit 110 in FIG. 1 emits the measuring light having various patterns. The pattern of the measurement light is controlled by the pattern generation unit 112 in FIG. Hereinafter, the pattern of the measurement light will be described.

(2) First Pattern of Measuring Light FIG. 7 is a diagram for explaining the first pattern of measuring light. FIG. 7A shows a state in which the measuring object S on the stage 140 is irradiated with the measuring light from the light projecting unit 110. FIG. 7B shows a plan view of the measuring object S irradiated with the measurement light. As shown in FIG. 7A, as the first pattern, measurement light having a linear cross section parallel to the Y direction (hereinafter, referred to as line measurement light) is emitted from the light projecting unit 110. In this case, as shown in FIG. 7B, the portion of the linear measuring light with which the stage 140 is irradiated and the portion of the linear measuring light with which the surface of the measuring object S is irradiated are of the measuring object S. They are offset from each other in the X direction by a distance d corresponding to the height h of the surface. Therefore, the height h of the measuring object S can be calculated by measuring the distance d.

  When a plurality of portions along the Y direction on the surface of the measuring object S have different heights, the height h of the plurality of portions along the Y direction is measured by measuring the distance d for each portion. Can be calculated.

  Further, the CPU 210 of FIG. 1 measures the distance d at a plurality of portions along the Y direction at one position in the X direction, and then scans a linear measuring light parallel to the Y direction in the X direction, thereby The distance d is measured for a plurality of portions along the Y direction at other positions in the direction. Thereby, the heights h of the plurality of portions of the measuring object S along the Y direction at the plurality of positions in the X direction are calculated. The height h of each point on the surface of the measuring object S can be calculated by scanning the linear measuring light in the X direction in a range wider than the dimension of the measuring object S in the X direction. Thereby, the three-dimensional shape of the measuring object S can be measured.

(3) Second Pattern of Measuring Light FIG. 8 is a diagram for explaining the second pattern of measuring light. As shown in FIG. 8, as the second pattern, measurement light having a linear cross section parallel to the Y direction and a pattern in which the intensity changes sinusoidally in the X direction (hereinafter referred to as sinusoidal measurement light). ) Is emitted from the light projecting unit 110 a plurality of times (four times in this example).

  FIG. 8A shows the sinusoidal measurement light emitted for the first time. The intensity of the sinusoidal measurement light emitted for the first time has an initial phase φ at an arbitrary portion P0 on the surface of the measuring object S. The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by emitting the sinusoidal measuring light. The intensity of the received light is measured based on the pixel data of the measuring object S. Let I1 be the intensity of the light reflected by the portion P0 on the surface of the measuring object S.

  FIG. 8B shows the sinusoidal measurement light emitted for the second time. The intensity of the sinusoidal measurement light emitted the second time has a phase (φ + π / 2) at the portion P0 on the surface of the measurement object S. The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by emitting the sinusoidal measuring light. The intensity of the received light is measured based on the pixel data of the measuring object S. Let I2 be the intensity of the light reflected by the portion P0 on the surface of the measuring object S.

  FIG. 8C shows the sinusoidal measurement light emitted for the third time. The intensity of the sinusoidal measurement light emitted for the third time has a phase (φ + π) at the portion P0 on the surface of the measuring object S. The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by emitting the sinusoidal measuring light. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I3.

  FIG. 8D shows the sinusoidal measurement light emitted for the fourth time. The intensity of the fourth sinusoidal measurement light has a phase (φ + 3π / 2) at the portion P0 on the surface of the measuring object S. The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by emitting the sinusoidal measuring light. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I4.

The initial phase φ is given by φ = tan ⁻¹ [(I1-I3) / (I2-I4)]. The height h of an arbitrary portion of the measuring object S is calculated from the initial phase φ. According to this method, the initial phase φ of each portion of the measuring object S can be calculated quickly and easily by measuring the light intensity four times. The initial phase φ can be calculated by emitting measurement light having different phases at least three times and measuring the intensity of the received light. By calculating the height h of each part on the surface of the measuring object S, the three-dimensional shape of the measuring object S can be measured.

(4) Third Pattern of Measuring Light FIG. 9 is a diagram for explaining the third pattern of measuring light. As shown in FIG. 9, as the third pattern, a plurality of measurement light beams (hereinafter, referred to as striped measurement light beams) having a linear cross section that is parallel to the Y direction and aligned in the X direction are emitted from the light projecting unit 110. It is emitted once (16 times in this example). That is, in the striped measurement light, linear bright portions parallel to the Y direction and linear dark portions parallel to the Y direction are periodically arranged in the X direction.

  The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by emitting the first striped measurement light. The intensity of the received light is measured based on the pixel data of the first captured image of the measuring object S. FIG. 9A is a first photographed image of the measuring object S corresponding to the first striped measurement light.

  The second striped measurement light has a pattern in which the bright portion and the dark portion are moved by one unit in the X direction from the first striped measurement light. The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by the second striped measurement light being emitted. The intensity of the received light is measured based on the pixel data of the second captured image of the measuring object S.

  The third striped measurement light has a pattern in which the bright portion and the dark portion are moved by one unit in the X direction from the second striped measurement light. The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by the third striped measurement light being emitted. The intensity of the received light is measured based on the pixel data of the third captured image of the measuring object S.

  By repeating the same operation, the light intensities corresponding to the 4th to 16th striped measurement lights are measured based on the pixel data of the 4th to 16th captured images of the measurement object S, respectively. The striped measurement light having a period of 16 units in the X direction is emitted 16 times, so that each portion of the surface of the measuring object S is irradiated with the striped measurement light. Note that FIG. 9B is a seventh captured image of the measuring object S corresponding to the seventh striped measurement light. FIG. 9C is a 13th photographed image of the measuring object S corresponding to the 13th striped measurement light.

  FIG. 10 is a diagram showing the relationship between the timing (number) at which an image of a specific portion of the measuring object S is captured and the intensity of the received light. The horizontal axis of FIG. 10 represents the order of images, and the vertical axis represents the intensity of the received light. As described above, for each part of the measurement object S, the first to 16th captured images are generated. In addition, the intensity of light corresponding to each pixel of the generated 1st to 16th captured images is measured.

  As shown in FIG. 10, a scatter diagram is obtained by illustrating the light intensity of each pixel of the captured image corresponding to the number of the captured image. By fitting a Gaussian curve, a spline curve, or a parabola to the obtained scatter diagram, the number (number) of the photographed image when the light intensity becomes maximum can be estimated with an accuracy of less than 1. In the example of FIG. 10, it is estimated from the fitted curved line that the light intensity is maximum in the virtual 9.38th captured image between the 9th and 10th. ..

  Moreover, the maximum value of the light intensity can be estimated from the fitted curve. The height h of each portion of the measuring object S can be calculated based on the number of the captured image where the light intensity estimated in each portion of the measuring object S is maximum. According to this method, the three-dimensional shape of the measuring object S is measured based on the intensity of light having a sufficiently high S / N (signal / noise) ratio. Thereby, the accuracy of the shape measurement of the measuring object S can be improved.

  In the shape measurement of the measuring object S using the measuring light having a periodic pattern shape such as the sinusoidal measuring light or the striped measuring light, the relative height of each part of the surface of the measuring object S is measured. (Relative value of height) is measured. This is because it is not possible to identify each of a plurality of straight lines (fringes) parallel to the Y direction that form a pattern, and there is uncertainty corresponding to an integral multiple of one period (2π) of the plurality of straight lines. , Because the absolute phase cannot be obtained. Therefore, a known unwrapping process is performed on the measured height data based on the assumption that the height of one portion of the measuring object S and the height of the portion adjacent to the portion continuously change. May be done.

(5) Fourth Pattern of Measuring Light FIG. 11 is a diagram for explaining the fourth pattern of measuring light. As shown in FIG. 11, as the fourth pattern, measurement light (hereinafter, referred to as code measurement light) having a linear cross section parallel to the Y direction and having bright and dark portions arranged in the X direction is used. The light is emitted from the light projecting unit 110 a plurality of times (four times in this example). The proportion of the bright portion and the dark portion of the coded measuring light is 50%, respectively.

  In this example, the surface of the measuring object S is divided into a plurality of (16 in the example of FIG. 11) regions in the X direction. Hereinafter, the areas of the measuring object S in the X direction divided into a plurality of areas will be referred to as first to sixteenth areas, respectively.

  FIG. 11A shows the coded measurement light emitted for the first time. The cord-shaped measurement light emitted for the first time has a bright portion with which the first to eighth regions of the measuring object S are irradiated. In addition, the cord-shaped measurement light emitted for the first time has a dark portion that is irradiated to the ninth to sixteenth regions of the measuring object S. As a result, in the coded measurement light emitted for the first time, the bright portion and the dark portion are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright portion and the dark portion of the code-like measurement light emitted the first time is 50%.

  FIG. 11B shows the coded measurement light emitted for the second time. The coded measurement light emitted for the second time has a bright portion with which the fifth to twelfth regions of the measuring object S are irradiated. In addition, the cord-shaped measurement light emitted for the second time has a dark portion that is applied to the first to fourth and thirteenth to sixteenth regions of the measuring object S. As a result, in the coded measurement light emitted the second time, the bright portion and the dark portion are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright portion and the dark portion of the cord-shaped measuring light emitted the second time is 50%.

  FIG. 11C shows the coded measurement light emitted for the third time. The coded measurement light emitted for the third time has a bright portion that is irradiated to the first, second, seventh to tenth, fifteenth, and sixteenth regions of the measuring object S. In addition, the coded measurement light emitted for the third time has a dark portion that is irradiated to the third to sixth and first to fourteenth regions of the measuring object S. As a result, in the coded measurement light emitted the third time, the bright portion and the dark portion are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright portion and the dark portion of the code-like measurement light emitted the third time is 50%.

  FIG. 11D shows the coded measurement light emitted for the fourth time. The cord-shaped measurement light emitted for the fourth time has a bright portion with which the first, fourth, fifth, eighth, ninth, twelfth, thirteenth, and sixteenth areas of the measuring object S are irradiated. .. In addition, the code-shaped measurement light emitted for the fourth time is a dark portion irradiated to the second, third, sixth, seventh, tenth, eleventh, fourteenth, and fifteenth regions of the measuring object S. Have. As a result, in the coded measurement light emitted for the fourth time, the bright portion and the dark portion are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright portion and the dark portion of the code-like measuring light emitted the fourth time is 50%.

  A logic "1" is assigned to the bright portion of the coded measurement light, and a logic "0" is assigned to the dark portion of the coded measurement light. In addition, the logical arrangement of the first to fourth coded measurement lights with which each region of the measurement object S is irradiated is referred to as a code. In this case, the first region of the measuring object S is irradiated with the coded measuring light of the code “1011”. As a result, the first region of the measuring object S is encoded as the code “1011”.

  The second region of the measuring object S is irradiated with the coded measuring light having the code “1010”. As a result, the second region of the measuring object S is encoded as the code “1010”. The third region of the measuring object S is irradiated with the coded measuring light with the code “1000”. As a result, the third region of the measuring object S is encoded with the code “1000”. Similarly, the sixteenth region of the measuring object S is irradiated with the coded measuring light having the code “0011”. As a result, the 16th region of the measuring object S is encoded with the code “0011”.

  In this way, between the adjacent regions of the measuring object S, the measuring object S is irradiated with the coded measuring light a plurality of times such that any one of the digits of the code is different by “1”. That is, the coded measurement light is applied to the measurement object S a plurality of times such that the bright portion and the dark portion change into a gray code.

  The light reflected by each area on the surface of the measuring object S is received by the light receiving unit 120. By measuring the sign of the received light, the sign changed due to the existence of the measurement object S is obtained for each region of the measurement object S. The distance corresponding to the distance d in FIG. 6 can be calculated by obtaining the difference between the obtained code and the code when the measurement target S does not exist for each region. Here, the absolute value of the distance d is calculated from the characteristic of the measuring method using the coded measuring light that the above code appears only once in the X-axis direction in the image. Thereby, the absolute height (absolute value of height) of the region of the measuring object S is calculated. By calculating the heights of all the regions on the surface of the measuring object S, the three-dimensional shape of the measuring object S can be measured.

In the above description, the surface of the measuring object S is divided into 16 regions in the X direction, and the coded measuring light is emitted from the light projecting unit 110 four times, but the present invention is not limited to this. The surface of the measuring object S may be divided into 2 ^N regions (N is a natural number) in the X direction, and the coded measuring light may be emitted N times from the light projecting unit 110. In the above description, N is set to 4 for ease of understanding. In the shape measuring process described later, N is set to 8, for example. Therefore, the surface of the measuring object S is divided into 256 regions in the X direction.

  In the shape measurement of the measuring object S using the coded measurement light, the minimum resolution is a distance at which the coded measurement light can be separated and identified, that is, a distance corresponding to one pixel. Therefore, when the number of pixels of the visual field of the light receiving unit 120 in the X direction is 1024 pixels, the measurement target S having a height of 10 mm can be measured with a resolution of 10 mm ÷ 1024≈10 μm. Measurement is performed by combining shape measurement using coded measurement light that has low resolution but can calculate absolute value with shape measurement that uses sinusoidal measurement light or striped measurement light that cannot calculate absolute value but has high resolution. The absolute value of the height of the object S can be calculated with higher resolution.

  In particular, in the shape measurement of the measuring object S using the striped measuring light in FIG. 9, the resolution can be set to 1/100 pixel. Note that the resolution of 1/100 pixel is that when the number of pixels of the visual field in the X direction of the light receiving unit 120 is 1024 pixels, the surface of the measuring object S is divided into about 100000 regions in the X direction (that is, N≈). It corresponds to 17). Therefore, the absolute value of the height of the measuring object S can be calculated with a higher resolution by combining the shape measurement using the coded measuring light and the shape measurement using the striped measuring light.

  The method of scanning the measuring object S with the above-mentioned line-shaped measuring light is generally called a light section method. On the other hand, the method of irradiating the measuring object S with the sinusoidal measuring light, the striped measuring light or the code measuring light is classified into the pattern projection method. Further, among the pattern projection methods, the method of irradiating the measurement object S with the sinusoidal measurement light or the striped measurement light is classified into the phase shift method, and the method of irradiating the measurement object S with the code measurement light is a spatial code. Classified as law.

  In the phase shift method, calculation is performed based on the amount of received light reflected from the reference height position when the measurement target S does not exist when the sinusoidal measurement light or the striped measurement light that is a periodic projection pattern is emitted. The height of the measurement target S is obtained from the phase difference between the calculated phase and the phase calculated based on the amount of received light reflected from the surface of the measurement target S when the measurement target S is present. In the phase shift method, individual periodic fringes cannot be distinguished, and there is an uncertainty corresponding to an integral multiple of one fringe period (2π), so that the absolute phase cannot be obtained. However, as compared with the light section method, the number of images to be acquired is small, so that the measurement time is relatively short and the measurement resolution is high.

  On the other hand, in the space code method, the code changed due to the existence of the measurement object S is obtained for each region of the measurement object S. The absolute height of the measurement object S can be obtained by obtaining the difference between the obtained code and the code when the measurement object S does not exist for each region. The spatial code method also has an advantage that it is possible to measure with a relatively small number of images and it is possible to obtain an absolute height. However, the measurement resolution is limited as compared with the phase shift method.

  These projection methods have their respective advantages and disadvantages, but they all have the common point that they use the principle of triangulation. The three-dimensional shape of the measurement target S is represented based on the image data (hereinafter, referred to as pattern image data) of the measurement target S onto which the measurement light of one or a plurality of the plurality of patterns as described above is projected. Point cloud data is generated.

  In the following description, the point cloud data representing the three-dimensional shape of the measuring object S will be referred to as three-dimensional shape data. The three-dimensional shape data includes position data of a plurality of points on the surface of the measuring object S. The position data represents coordinates in the X direction, Y direction, and Z direction, for example. In this case, if the data of an arbitrary point in the three-dimensional shape data is Pn (n is a natural number), Pn can be represented by (Xn, Yn, Zn) using the coordinate value of the device coordinate system, for example. The three-dimensional shape data may be composed of surface information data generated based on the point cloud data, and may include data in other formats such as a polygon mesh. Based on the stereoscopic shape data, stereoscopic image data representing an image of the measuring object S on a plane as a stereoscopic image is generated by a stereoscopic method. The three-dimensional drawing method is a drawing method that represents a three-dimensional object on a plane, and includes a projection drawing method (parallel projection drawing method) and a perspective drawing method (perspective projection drawing method) described later. Details of the stereoscopic image will be described later.

  In the present embodiment, the three-dimensional shape image is an image showing a state in which the three-dimensional shape data is projected on an arbitrary plane in which the two-dimensional coordinate system is defined, and is used for receiving the designation of the measurement location by the user. It is an image. The user can specify the plane on which the three-dimensional shape data is projected as the direction in which the measurement target S is viewed (the position of the light receiving unit 120 with respect to the measurement target S). Thereby, the orientation of the measuring object S represented by the three-dimensional image changes.

  When the position and orientation of the measuring object S with respect to the light projecting unit 110 and the light receiving unit 120 are constant, only a part of the measuring object S is irradiated with the measuring light. Further, only the light reflected by a part of the measuring object S enters the light receiving unit 120. Therefore, it is not possible to obtain solid shape data over a wide range of the surface of the measuring object S. Therefore, by changing the position or orientation of the measurement target S, the measurement target S is imaged from a plurality of different viewpoints, a plurality of three-dimensional shape data respectively corresponding to a plurality of viewpoints is acquired, and the acquired plurality of 3D shape data may be combined.

  FIG. 12 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by imaging the measurement target S from a plurality of viewpoints. For example, as shown in FIG. 12A, after the position and orientation of the measurement target S is adjusted on the stage 140 by the user, the measurement target S is imaged using the measurement light. Three-dimensional shape data is generated. An example of the three-dimensional image based on the first three-dimensional data is shown in FIG. The three-dimensional shape data is generated based on the measurement light reflected by the surface of the measurement target S and incident on the light receiving unit 120. Therefore, three-dimensional shape data is generated for the portion of the surface of the measuring object S that faces the light receiving unit 120, but three-dimensional shape data cannot be generated for the portion that does not face the light receiving unit 120. ..

  Therefore, as shown in FIG. 12B, after the stage 140 is rotated by a certain angle by the rotation mechanism 143 of FIG. 2, the measurement object S is imaged using the measurement light, and the second three-dimensional shape data is obtained. Is generated. In the example of FIG. 12B, the stage 140 is rotated counterclockwise by a predetermined angle from the state of FIG. 12A. An example of a stereoscopic image based on the second stereoscopic shape data is shown in FIG. As described above, when the stage 140 rotates, the portion of the surface of the measuring object S facing the light receiving unit 120 changes with the rotation. As a result, three-dimensional shape data including a part that was not acquired at the time of the first imaging is generated.

  Further, as shown in FIG. 12C, after the stage 140 is rotated by a certain angle by the rotation mechanism 143 of FIG. 2, the measurement object S is imaged using the measurement light, so that the third three-dimensional shape data is obtained. Is generated. In the example of FIG. 12C, the stage 140 is rotated counterclockwise by a predetermined angle from the state of FIG. 12B. An example of a stereoscopic image based on the third stereoscopic data is shown in FIG.

  In this way, the rotation of the stage 140 and the imaging of the measurement target S are repeated, so that a plurality of three-dimensional shape data corresponding to a plurality of viewpoints is generated. The one rotation angle of the stage 140 and the number of rotations thereof may be predetermined or may be arbitrarily designated by the user. By combining these three-dimensional shape data, a wide range of three-dimensional shape data of the measuring object S is generated.

  In the present embodiment, the relative positions of the light receiving unit 120, the light projecting unit 110, and the stage 140 are constant, and parameters (hereinafter, device parameters) representing these relative positions are stored in advance in, for example, the storage device 240 in FIG. To be done. When the stage driving unit 146 of FIG. 1 drives the rotating mechanism 143, the rotation angle of the stage 140 is designated in advance by the user, and the stage 140 is controlled based on the stored angle. In this case, the rotation angle of the stage 140 is stored in, for example, the ROM 220 or the work memory 230 of FIG. When synthesizing a plurality of three-dimensional shape data, the CPU 210 of FIG. 1 can easily and accurately align the plurality of three-dimensional shape data based on the stored rotation angle and the device parameter. Further, the user may perform detailed setting and correction of alignment.

  A sensor or the like that detects the rotation angle of the stage 140 may be provided. In this case, even when the user operates the stage operation unit 145 to rotate the stage 140, it is easy to align a plurality of three-dimensional shape data based on the angle detected by the sensor and the above-mentioned device parameter. It can be done accurately and accurately.

[3] Texture Image In the measurement unit 100, the illumination light output unit 130 irradiates the measurement object S with illumination light, or the light projecting units 110A and 110B illuminate the measurement object S with uniform measurement light. In this state, image data (hereinafter referred to as texture image data) representing the appearance (surface state) of the measuring object S is generated. The uniform measuring light is a measuring light having no pattern and can be used instead of the illuminating light. The surface state of the measuring object S includes, for example, a pattern or a color. Hereinafter, the image represented by the texture image data is referred to as a texture image.

  Various examples of texture image data will be described. For example, a plurality of texture image data are acquired while the focus position of the light receiving unit 120 is relatively changed with respect to the measurement target S. By combining the plurality of texture image data, texture image data in which the entire surface of the measuring object S is in focus (hereinafter, referred to as omnifocal texture image data) is generated.

  Further, a plurality of texture image data may be acquired under a plurality of different imaging conditions. The imaging conditions include, for example, the exposure time of the light receiving unit 120, the intensity (brightness) of the illumination light from the illumination light output unit 130, the uniform intensity (brightness) of the measurement light from the light projecting unit 110, and the like. Well-known high dynamic (HDR) composition is performed using a plurality of acquired texture image data. As a result, texture image data (hereinafter referred to as HDR texture image data) in which blackout and whiteout due to differences in brightness are suppressed is generated.

  Further, the imaging condition may be changed as the focus position is changed. Specifically, the focus position of the light receiving unit 120 is relatively changed with respect to the measurement target S, and the texture image data is acquired under a plurality of different imaging conditions at each focus position. By synthesizing a plurality of acquired texture image data, it is possible to generate texture image data in which the entire surface of the measurement target S is focused and blackout and whiteout are suppressed.

  Each texture image data includes texture information (information indicating an optical surface state) indicating the color or brightness of each point on the measurement target S. On the other hand, the above-mentioned three-dimensional shape data does not include information on the surface state of the measuring object S. Therefore, the three-dimensional shape data and any one of the texture image data are combined to generate three-dimensional shape data with texture in which texture information is added to the three-dimensional shape data.

  The textured three-dimensional shape data includes position data of a plurality of points on the surface of the measuring object S and data indicating the color or brightness of the point associated with the position data of each point. In this case, if the data of an arbitrary point in the textured three-dimensional shape data is TPn (n is a natural number), TPn is, for example, the coordinate value of the device coordinate system and the three primary color components (R, G) of red, green, and blue. , B) and can be represented by (Xn, Yn, Zn, Rn, Gn, Bn). Alternatively, TPn can be represented by (Xn, Yn, Zn, In) using, for example, the coordinate value of the device coordinate system and the brightness value (I). The textured solid shape data may be composed of surface information data generated based on the point cloud data.

  In the following description, the texture image represented by the texture image data acquired in a fixed focus position and imaging conditions is called a normal texture image, the image represented by the omnifocal texture image data is called an omnifocal texture image, An image represented by HDR texture image data is called an HDR texture image. Also, based on the textured solid shape data, solid shape image data including texture information is generated. Hereinafter, the stereoscopic image represented by the stereoscopic image data generated from the textured stereoscopic image data is referred to as a textured stereoscopic image. The textured three-dimensional image represents the surface state of the measurement target.

  When a plurality of three-dimensional shape data in which the position or orientation of the measuring object S is different is generated as described above, the texture image data may be acquired when generating each three-dimensional shape data. In this case, by combining a plurality of three-dimensional shape data generated from a plurality of pattern image data and a plurality of texture image data, it is possible to generate textured three-dimensional shape data of a wide range of the measuring object S.

[4] Shape Measurement Processing (1) Preparation for Shape Measurement Before executing the shape measurement processing for the measurement object S, the user prepares for shape measurement. FIG. 13 is a flowchart showing a procedure for preparation for shape measurement. Hereinafter, the procedure of preparation for shape measurement will be described with reference to FIGS. 1, 2, and 13. First, the user places the measuring object S on the stage 140 (step S1). Next, the user irradiates the measuring object S with the measuring light from the light projecting unit 110 (step S2). Subsequently, the user adjusts the brightness of the acquired live image and the position and orientation of the measurement target S while observing the live image displayed on the display unit 400 (hereinafter referred to as the first adjustment). Is performed (step S3). The brightness of the live image acquired in step S3 can be adjusted by changing at least one of the light amount of the measurement light and the exposure time of the light receiving unit 120. In the present embodiment, in order to make the brightness of the live image acquired using the measurement light suitable for observation, one of the light amount of the measurement light and the exposure time of the light receiving unit 120 is adjusted. In addition, it is preferable that the brightness of the acquired live image is adjusted by the exposure time of the light receiving unit 120 while keeping the light amount of the measurement light constant. This suppresses a decrease in measurement accuracy due to a change in the temperature of the measurement light source 111 with a change in the amount of measurement light.

  In step S2, the measurement object S may be irradiated with any of the above-described first to fourth patterns of measurement light, or the measurement object S may be irradiated with uniform measurement light. In step S3, when a shadow of the measurement target S to be measured (hereinafter referred to as a measurement position) does not occur, the user does not need to adjust the position and orientation of the measurement target S. Instead, the light amount of the measurement light or the exposure time of the light receiving unit 120 may be adjusted.

  Next, the user stops the irradiation of the measurement light and irradiates the measurement object S with the illumination light from the illumination light output unit 130 (step S4). Subsequently, the user adjusts the light amount of the illumination light or the exposure time of the light receiving unit 120 (hereinafter referred to as the second adjustment) while watching the live image displayed on the display unit 400 (step S5). The brightness of the live image acquired in step S5 can be adjusted basically by changing at least one of the light amount of the illumination light and the exposure time of the light receiving unit 120, as in the example of step S3. In the present embodiment, either the light amount of the illumination light or the exposure time of the light receiving unit 120 is adjusted in order to make the brightness of the live image acquired by using the illumination light suitable for observation.

  Next, the user confirms the live image displayed on the display unit 400, and determines whether the light amount, the exposure time of the light receiving unit 120, and the position and orientation of the measurement target S (hereinafter, referred to as an observation state) are appropriate. It is determined whether or not (step S6). In step S6, the measurement object S may be irradiated with the measurement light, the irradiation light, or the measurement light and the illumination light may be sequentially irradiated.

  When it is determined in step S6 that the observation state is not appropriate, the user returns to the process of step S2. On the other hand, when it is determined in step S6 that the observation state is appropriate, the user ends preparation for shape measurement.

  In the above description, the second adjustment is performed after the first adjustment, but the present invention is not limited to this. The first adjustment may be performed after the second adjustment. In this case, the user adjusts the position and orientation of the measuring object S in the second adjustment, and confirms that the desired portion of the measuring object S is irradiated with the measurement light in the first adjustment. Good. When the measurement light is not applied to the desired portion of the measurement object S, the position and the posture of the measurement object S are readjusted, and the light amount of the illumination light or the exposure time of the light receiving unit 120 is again adjusted as the second adjustment. May be adjusted.

(2) First Adjustment FIGS. 14 and 15 are flowcharts showing the details of the first adjustment in the procedure for the preparation for shape measurement. Hereinafter, the details of the first adjustment in the procedure for the shape measurement preparation will be described with reference to FIGS. 1, 2, 14, and 15. Hereinafter, the measurement light emitted from one of the light projecting units 110A and 110B will be referred to as one measurement light, and the measurement light emitted from the other will be referred to as the other measurement light. Here, in the measurement unit 100 according to the present embodiment, the light amounts of the one and the other measurement lights can be independently set. Further, the exposure time of the light receiving unit 120 when the measurement target S is imaged using one measurement light and the exposure time of the light reception unit 120 when the measurement target S is imaged using the other measurement light are Each can be set independently.

  First, the user tentatively adjusts the light amount of one measurement light or the exposure time of the light receiving unit 120 in order to make the brightness of the acquired live image suitable for observation (step S11). Next, the user adjusts the magnification of the live image of the measurement object S displayed on the display unit 400 (hereinafter referred to as the field size) (step S12). Specifically, when a plurality of light receiving units 120 having different magnifications are used, the user selects any one of the light receiving units 120. Thereby, the live image acquired by the selected light receiving unit 120 is displayed on the display unit 400. The visual field size when the low-magnification light receiving unit 120 is selected is larger than the visual field size when the high-magnification light receiving unit 120 is selected. The measuring unit 100 may have a digital zoom function. In this case, the user can adjust the display magnification of the live image acquired by the light receiving unit 120.

  Subsequently, the user determines whether or not the position and orientation of the measuring object S is appropriate based on the live image displayed on the display unit 400 (step S13). Here, when the shadow is not generated at the measurement location of the measurement target S, the user determines that the position and orientation of the measurement target S are appropriate. On the other hand, when a shadow is generated at the measurement location of the measurement object S, the user determines that the position and orientation of the measurement object S are not appropriate.

  When it is determined in step S13 that the position and orientation of the measuring object S are not appropriate, the user adjusts the position and orientation of the measuring object S (step S14). Specifically, the user adjusts the position and orientation of the measuring object S by rotating the stage 140 with the rotating mechanism 143 or moving the measuring object S by hand. After that, the user returns to the process of step S13.

  On the other hand, when it is determined in step S13 that the position and orientation of the measuring object S are appropriate, the user observes the brightness of the acquired live image based on the live image displayed on the display unit 400. It is determined whether or not the brightness is suitable for the measurement target S, that is, whether or not the light amount of one of the measurement lights applied to the measurement target S or the exposure time of the light receiving unit 120 is appropriate (step S15).

  When it is determined in step S15 that the light amount of one measurement light or the exposure time of the light receiving unit 120 is not appropriate, the user adjusts the light amount of one measurement light or the exposure time of the light receiving unit 120 (step S16). Then, the user returns to the process of step S15.

  On the other hand, when it is determined in step S15 that the light amount of one of the measurement lights or the exposure time of the light receiving unit 120 is appropriate, the user determines whether the observation state is appropriate from the live image displayed on the display unit 400. It is determined whether or not (step S17). When it is determined in step S17 that the observation state is not appropriate, the user returns to the process of step S14 or step S16. Specifically, when it is determined that the position and orientation of the measuring object S is not appropriate in the observation state, the user returns to the process of step S14. When it is determined that the light amount of the light (one measurement light) or the exposure time of the light receiving unit 120 is not appropriate in the observation state, the user returns to the process of step S16.

  On the other hand, when it is determined in step S17 that the observation state is appropriate, the user stops the irradiation of one measurement light and irradiates the measurement target S with the measurement light from the other light projecting unit 110B ( Step S18 of FIG. 16). Subsequently, while viewing the live image displayed on the display unit 400, the user sets the light amount of the other measurement light or the light receiving unit 120 in order to make the brightness of the obtained live image suitable for observation. The exposure time is adjusted (step S19).

  Then, based on the live image displayed on the display unit 400, the user determines whether or not the brightness of the acquired live image is suitable for observation, that is, the light amount of the other measurement light or the light receiving unit. It is determined whether the exposure time of 120 is appropriate (step S20). When it is determined in step S20 that the light amount of the other measurement light or the exposure time of the light receiving unit 120 is not appropriate, the user returns to the process of step S19. On the other hand, in step S20, when it is determined that the light amount of the other measurement light or the exposure time of the light receiving unit 120 is appropriate, the user ends the first adjustment. By performing the first adjustment, the optimum light amount condition of the one and the other measurement light for generating the three-dimensional shape data, or the exposure time condition of the light receiving unit 120 corresponding to the one and the other measurement light, respectively, can be obtained. Is set. Note that when the other light projecting unit 110B is not used, the user may omit the procedure of steps S18 to S20 and end the first adjustment after the process of step S17.

(3) Second Adjustment FIG. 16 is a flowchart showing the details of the second adjustment in the procedure for the shape measurement preparation. Hereinafter, the details of the second adjustment in the procedure for the shape measurement preparation will be described with reference to FIGS. 1, 2, and 16. Here, in measurement unit 100 according to the present embodiment, the light amount of the illumination light can be set independently of the light amounts of the one and the other measurement lights. Further, the exposure time of the light receiving unit 120 when the measurement object S is imaged using the illumination light is independent of the exposure time of the light receiving unit 120 when the measurement object S is imaged using one or the other measurement light. Can be set.

  First, the user adjusts the light amount of the illumination light or the exposure time of the light receiving unit 120 in order to make the brightness of the acquired live image suitable for observation (step S31). Next, based on the live image displayed on the display unit 400, the user determines whether or not the brightness of the acquired live image is suitable for observation, that is, the measurement target S is illuminated. It is determined whether the amount of illumination light or the exposure time of the light receiving unit 120 is appropriate (step S32).

  When it is determined in step S32 that the amount of illumination light or the exposure time of the light receiving unit 120 is not appropriate, the user returns to the process of step S31. On the other hand, when it is determined in step S32 that the amount of illumination light or the exposure time of the light receiving unit 120 is appropriate, the user selects the type of texture image to be displayed (step S33) and makes the second adjustment. finish. The types of texture images include, for example, normal texture images, omnifocal texture images, and HDR texture images. By performing the second adjustment, the optimum light amount condition of the illumination light for generating the texture image data or the condition of the exposure time of the light receiving unit 120 corresponding to the illumination light is set.

  Further, when the omnifocal texture image or the HDR texture image is selected in step S33, the setting for appropriately acquiring the omnifocal texture image data or the HDR texture image data may be separately performed. For example, when the omnifocal texture image is selected, the change range of the focus position may be set. Further, when the HDR texture image data is selected, the details of the imaging condition and the like may be set. Further, an omnifocal texture image for preview or an HDR texture image may be displayed on the display unit 400 based on these settings.

(4) Shape Measurement Processing After preparation for the shape measurement of FIGS. 13 to 16, the shape measurement processing of the measuring object S is executed. FIG. 17 is a flowchart showing an outline of the shape measuring process. When the user instructs the CPU 210 to start the shape measuring process, the CPU 210 irradiates the measuring object S with the measuring light according to the light amount condition or the exposure time condition set in the first adjustment. The image data (pattern image data) of the measurement target S on which the pattern of the measurement light is projected is acquired (step S41). The acquired pattern image data is stored in the work memory 230.

  Next, the CPU 210 processes the acquired pattern image data by a predetermined measurement algorithm to generate three-dimensional shape data indicating the three-dimensional shape of the measuring object S (step S42). The generated solid shape data is stored in the work memory 230. In steps S41 and S42, as described above, pattern image data corresponding to a plurality of viewpoints may be acquired, and a plurality of stereoscopic shape data generated from the pattern image data may be combined. Thereby, a wide range of three-dimensional shape data of the measuring object S can be generated.

  Next, the CPU 210 acquires texture image data corresponding to the type of texture image selected in step S33 of FIG. 16 (step S43). The acquired texture image data is stored in the work memory 230. Next, the CPU 210 generates textured solid shape data by synthesizing the solid shape data generated in step S42 and the texture image data acquired in step S43 (step S44). Next, the CPU 210 causes the display section 400 to display a stereoscopic image of the measurement object S based on the generated stereoscopic shape data or textured stereoscopic shape data (step S45). In this case, the user can appropriately select the image to be displayed. In step S45, when the measurement location of the measurement object S is not properly displayed, the user may perform the first and second adjustments in FIGS. 14 to 16 again. After that, the CPU 210 executes the measurement of the measurement location based on the measurement condition set by the user (step S46). The setting of measurement conditions will be described later. This completes the shape measurement process.

[5] Stereoscopic shape image (1) Stereoscopic projection image and stereoscopic perspective image FIG. 18 is a diagram showing an example of the measuring object S. FIG. 19 is a diagram showing an example of a live image of the measuring object S of FIG. The measurement object S in FIG. 18 includes a board B1 and elements B2 and B3 mounted on the upper surface of the board B1. Further, in the example of FIG. 18, as a feature of the appearance of the measuring object S, the upper surfaces of the element B2 and the element B3 are colored differently from each other. In the figure, different colors are represented by hatching.

  As shown in FIG. 19, the live image G1 represents the appearance of the measuring object S. As described above, the light receiving unit 120 has a constant angle of view θ2 (FIG. 2). Therefore, the live image G1 has a perspective, and the size of each part of the measuring object S represented in the live image G1 depends on the distance from the light receiving unit 120. For example, the actual lengths of the sides L1 and L2 on the upper surface of the substrate B1 are equal to each other, but in the live image G1, the length of the side L1 located closer to the light receiving unit 120 is larger than the length of the side L2.

  FIG. 20 is a diagram for describing a stereoscopic image. As described above, the stereoscopic image is represented by the stereoscopic image data generated based on the stereoscopic data. In the present embodiment, the stereoscopic shape image data is stereoscopic projection image data that represents the measurement target S as a stereoscopic projection image by the projection image method, and stereoscopic perspective image data that represents the measurement target S as a stereoscopic perspective image by the perspective imaging method. including. The stereoscopic perspective image data is generated using the position (coordinates) of the light receiving unit 120 with respect to the stage 140, the angle of view θ2 of the lens 122 of the light receiving unit 120, the focus position, and the like as device parameters.

  FIG. 20A shows a stereoscopic projection image of the measuring object S of FIG. FIG. 20B shows a stereoscopic perspective image of the measurement object S of FIG. As shown in FIG. 20A, the stereoscopic projection image G2 has no sense of perspective, and the size of each part of the measuring object S does not depend on the distance from the light receiving part 120. Therefore, the length of the side L1 and the length of the side L2 of the measuring object S are equal to each other. On the other hand, as shown in FIG. 20B, the stereoscopic perspective image G3 has a perspective like the live image G1, and the size of each part of the measuring object S depends on the distance from the light receiving part 120. .. Therefore, similarly to the live image G1 in FIG. 19, the length of the side L1 is larger than the length of the side L2. The stereoscopic projection image G2 and the stereoscopic perspective image G3 may include a shadow or the like caused by light from a preset light source. The user can selectively display the stereoscopic projection image G2 and the stereoscopic perspective image G3 on the display unit 400 as the stereoscopic image.

  In the present embodiment, the stereoscopic image data is generated so that at least one of the following first and second conditions is satisfied. The first condition is that the vanishing point position of the stereoscopic image matches the vanishing point position of the live image G1. The second condition is that the orientation of the measuring object in the stereoscopic image matches the orientation of the measuring object in the live image G1.

  When the stereoscopic projection image G2 is displayed as the stereoscopic image, the orientation of the measuring object S in the stereoscopic projection image G2 is the same as the orientation of the measuring object S in the live image G1 so that the second condition is satisfied. Will be matched. On the other hand, when the stereoscopic perspective image G3 is displayed as the stereoscopic image, it is preferable that both the first and second conditions are satisfied. That is, the position of the vanishing point of the stereoscopic perspective image G3 matches the position of the vanishing point of the live image G1, and the orientation of the measuring object S in the stereoscopic perspective image G3 coincides with the orientation of the measuring object S in the live image G1. Preferably. When the stereoscopic perspective image G3 is displayed, only one of the first and second conditions may be satisfied.

  FIG. 21 is a diagram for explaining the orientation of the measuring object S in the live image G1 and the stereoscopic image. In the example of FIG. 21A, the projection plane PP is set perpendicularly to the optical axis of the light receiving unit 120. Further, a plurality of projection lines PL are set so as to connect the lens 122 (FIG. 2) of the light receiving unit 120 and the surface of the measuring object S. The image projected on the projection plane PP along the plurality of projection lines PL corresponds to the live image G1. The relative orientation of the measuring object S with respect to the projection plane PP corresponds to the orientation of the measuring object S in the live image G1.

  In the example of FIG. 21B, the projection plane PPa is set with respect to the virtual measurement target S represented by the three-dimensional shape data, and the projection plane PPa forms a constant angle (for example, 90 degrees). A plurality of projection lines PLa are set at. The image projected on the projection surface PPa along the plurality of projection lines PLa corresponds to the stereoscopic projection image G2. The relative orientation of the measurement target S with respect to the projection plane PPa corresponds to the orientation of the measurement target S in the stereoscopic projection image G2.

  In the example of FIG. 21C, the projection plane PPb is set with respect to the virtual measurement object S represented by the three-dimensional shape data, and a plurality of projection planes PPb pass through the common viewpoint VP and intersect the projection plane PPb. The projection line PLb is set. The projection plane PPb and the viewpoint VP have a fixed positional relationship. The distance between the measuring object S and the viewpoint VP is determined by the angle of view θ2 (FIG. 2) of the light receiving unit 120 and the focal length. The image projected on the projection surface PPb along the plurality of projection lines PLb corresponds to the stereoscopic perspective image G3. The relative orientation of the measurement target S with respect to the projection plane PPb corresponds to the orientation of the measurement target S in the stereoscopic perspective image G3.

  The second condition is not limited to the case where the orientation of the measurement object S in the live image G1 and the orientation of the measurement object S in the stereoscopic image are exactly the same, but may include the case where they are slightly deviated. .. For example, when the direction of the projection line PLa with respect to the measurement target S in the example of FIG. 21B matches the direction of the optical axis of the light receiving unit 120 with respect to the measurement target S in the example of FIG. The condition of is satisfied. When the direction of any of the projection lines PLb with respect to the measurement target S of FIG. 21C matches the direction of the optical axis of the light receiving unit 120 with respect to the measurement target S of FIG. The condition may be met. The direction of the projection line corresponds to the direction of the line of sight with respect to the measuring object S.

  FIG. 22 is a diagram for explaining the position of the vanishing point. As shown in FIG. 22, in the live image G1 and the stereoscopic perspective image G3, the parallel lines actually make an angle with each other due to the perspective and intersect with each other at a certain vanishing point. In the example of FIG. 22, there are three vanishing points VN1, VN2, VN3. When the position of the vanishing point of the live image G1 and the position of the vanishing point of the stereoscopic perspective image G3 match, the degree of perspective of the live image G1 and the degree of perspective of the stereoscopic perspective image G3 match.

  The first condition may include not only the case where the position of the vanishing point of the live image G1 and the position of the vanishing point of the stereoscopic perspective image G3 exactly match, but also the case where they are slightly deviated.

  The user can display the live image G1 and the stereoscopic image (stereoscopic projection image G2 or stereoscopic perspective image G3) selectively or simultaneously on the display unit 400. Thereby, the user can compare the live image G1 with the stereoscopic image.

  23A shows an example in which the live image G1 and the stereoscopic projection image G2 are simultaneously displayed, and FIG. 23B shows an example in which the live image G1 and the stereoscopic perspective image G3 are simultaneously displayed. After generating the three-dimensional shape data, the user specifies the measurement location of the measuring object S on the three-dimensional shape image. In that case, by comparing the live image G1 and the three-dimensional image, it becomes easy to specify the measurement location of the measuring object S on the three-dimensional image. However, if the appearance of the measurement object S in the live image G1 and the appearance of the measurement object S in the three-dimensional shape image are different from each other, discomfort occurs when comparing the live image G1 and the three-dimensional image, and the measurement location Can be difficult to identify. Therefore, in the present embodiment, the stereoscopic image data is generated so that at least one of the first and second conditions described above is satisfied.

  In the example of FIG. 23A, the orientation of the measuring object S in the stereoscopic projection image G2 matches the orientation of the measuring object S in the live image G1, and the second condition is satisfied. In the example of FIG. 23 (b), the position of the vanishing point of the stereoscopic perspective image G3 matches the position of the vanishing point of the live image G1, and the orientation of the measuring object S in the stereoscopic perspective image G3 is the live image G1. It matches the orientation of the measuring object S, and the first and second conditions are satisfied.

  As a result, the difference between the live image G1 and the stereoscopic image is reduced. Therefore, the user can compare the live image G1 with the stereoscopic image without any discomfort. In order to further reduce the degree of deviation between the live image G1 and the stereoscopic image, it is more preferable that the display size (display magnification) of the live image G1 and the display size of the stereoscopic image match.

(2) Stereoscopic shape image with texture As described above, stereoscopic shape data with texture is combined from stereoscopic shape data and texture image data, and stereoscopic shape image data representing a stereoscopic shape image with texture is generated from the stereoscopic shape data with texture. It In this case, stereoscopic projection image data (hereinafter referred to as textured projection image data) may be generated as stereoscopic shape image data, and stereoscopic perspective image data (hereinafter referred to as textured perspective image data) may be generated. May be done. Hereinafter, the textured three-dimensional image represented by the textured projection image data is referred to as a textured projection image, and the textured three-dimensional image represented by the textured perspective image data is referred to as a textured perspective image.

  FIG. 24A shows an example of a textured projection image, and FIG. 24B shows an example of a textured perspective image. As shown in FIG. 24A, the textured projection image G2a is an image in which the texture information of the measuring object S is added to the stereoscopic projection image G2. Further, as shown in FIG. 24B, the textured perspective image G3a is an image in which the texture information of the measuring object S is added to the stereoscopic perspective image G3. In this example, the texture information is optical color and light / dark information of the upper surfaces of the elements B2 and B3.

  The textured projection image G2a is closer to the live image G1 than the stereoscopic projection image G2, and the textured perspective image G3a is closer to the live image G1 than the stereoscopic perspective image G3. Therefore, the user can compare the live image G1 and the three-dimensional image with less discomfort.

[6] Rotation of Stage As described above, after the solid shape data corresponding to one viewpoint is generated, the solid shape data corresponding to another viewpoint may be additionally acquired. In that case, the user rotates the stage 140 by operating the operation unit 250 of FIG. 1 to instruct rotation of the stage 140 or by operating the stage operation unit 145 of FIG. 1.

  FIG. 25 is a schematic diagram showing three-dimensional shape data corresponding to one viewpoint. The three-dimensional shape data SD in FIG. 25 corresponds to the viewpoint of the live image G1 in FIG. The three-dimensional shape data SD includes position data of the surface portion of the measuring object S that is irradiated with the measurement light and is imaged by the light receiving unit 120. The three-dimensional shape data SD of FIG. 25 includes position data of the surface portion of the measuring object S appearing in the live image G1 of FIG. On the other hand, the position data of the surface portion of the measuring object S that does not appear in the live image G1 of FIG. 19 is not included in the three-dimensional shape data SD.

  FIG. 26 is a diagram for describing an example of an instruction to rotate the stage 140 by operating the operation unit 250 (FIG. 1). In the example of FIG. 26A, the pointer PT is displayed on the display unit 400 together with the live image G1. In this example, the operation unit 250 includes a mouse. The user instructs the rotation of the stage 140 by moving the mouse while moving the pointer PT in the right direction D1 or the left direction D2 while pressing the mouse button. For example, movement of the pointer PT in the right direction D1 instructs rotation in the counterclockwise direction D1a, and movement of the pointer PT in the left direction D2 instructs rotation in the clockwise direction D2a. In this case, the amount of movement of the pointer PT in the right direction D1 or the left direction D2 corresponds to the rotation angle of the stage 140. Instead of moving the pointer PT, an icon for designating the rotation direction of the stage 140 may be displayed on the display unit 400, and the rotation of the stage 140 may be instructed by operating the icon. The CPU 210 controls the stage drive unit 146 of FIG. 1 in response to a user's instruction to rotate the stage 140.

  In the live image G1 of FIG. 26B, the measurement target S is rotated 90 degrees in the clockwise direction D2a from the state shown in the live image G1 of FIG. In this way, the orientation of the measuring object S can be easily adjusted while watching the live image G1.

  Instead of the live image G1, a stereoscopic image may be used to instruct the rotation of the stage 140. FIG. 27 is a diagram for describing an example of instructing the rotation of the stage 140 using the stereoscopic perspective image G3. When the rotation instruction of the stage 140 is performed using the stereoscopic image, the stereoscopic image data is generated so that the second condition described above is satisfied. That is, the orientation of the measuring object S in the three-dimensional image matches the orientation of the measuring object S in the live image G1.

  The user can instruct rotation of the stage 140 on the stereoscopic perspective image G3 in the same manner as the example of FIG. 26, and the CPU 210 controls the stage drive unit 146 based on the rotation instruction. In this case, the orientation of the measuring object S in the stereoscopic perspective image G3 is changed so as to follow the rotation of the stage 140. Specifically, the stereoscopic perspective image data is updated so as to represent the rotated measurement target S based on the stereoscopic shape data and the rotation instruction from the user, and the stereoscopic perspective image is updated based on the updated stereoscopic perspective image data. G3 is displayed.

  In the stereoscopic perspective image G3 of FIG. 27B, the measurement target S is rotated 90 degrees in the clockwise direction D2a from the state represented by the stereoscopic perspective image G3 of FIG. 24B. In this case, since only the stereoscopic shape data corresponding to the viewpoint before the rotation of the stage 140 is generated, a part of the measuring object S is missing in the stereoscopic perspective image G3.

  Therefore, three-dimensional shape data is newly generated after the rotation of the stage 140. That is, the pattern image data is acquired by imaging the measurement target S while irradiating the measurement target S with the measurement light, and new three-dimensional shape data is generated based on the acquired pattern image data. The newly generated three-dimensional image data includes position data of the surface portion of the measuring object S appearing in the live image G1 of FIG. 26 (b).

  FIG. 28 is a diagram showing a stereoscopic perspective image G3 displayed based on the newly generated stereoscopic shape data. In the stereoscopic perspective image G3 of FIG. 28, the missing portion of the measuring object S in the stereoscopic perspective image G3 of FIG. 27B is supplemented. In this way, the stereoscopic shape data corresponding to a plurality of viewpoints can be acquired while rotating the stage 140.

  When the rotation instruction of the stage 140 is given using the stereoscopic image, the user can intuitively recognize the missing portion of the stereoscopic data by looking at the stereoscopic image. Further, the user can intuitively recognize the angle at which the stage 140 should be rotated to compensate for the missing portion of the stereoscopic shape data by looking at the stereoscopic image. Therefore, a wide range of three-dimensional shape data of the measuring object S can be efficiently generated.

  In the example of FIG. 27, the stereoscopic perspective image G3 is used as the stereoscopic image, but instead of the stereoscopic perspective image G3, the stereoscopic projection image G2, the textured projection image G2a, or the textured perspective image G3a is used, and the stage 140 is similarly used. May be instructed to rotate. Further, the live image G1 may be displayed together with the stereoscopic image. In this case, the user can more specifically recognize the loss of the stereoscopic shape data by comparing the live image G1 and the stereoscopic image.

  FIG. 29 is a flowchart showing an operation example of the CPU 210 when the stage 140 rotates. In the example of FIG. 29, the rotation instruction of the stage 140 is performed while the live image G1 and the stereoscopic image are displayed. First, the CPU 210 displays the live image G1 on the display unit 400 based on the acquired live image data, generates stereoscopic image data based on the acquired stereoscopic shape data, and generates the stereoscopic shape image data. The three-dimensional shape image is displayed on the display unit 400 based on (step S51). In this case, the stereoscopic image data is generated so that the second condition is satisfied. Further, when the stereoscopic perspective image G3 is displayed as the stereoscopic image, the stereoscopic perspective image data is preferably generated so that the first condition is satisfied together with the second condition.

  Next, the CPU 210 determines whether or not there is a rotation instruction of the stage 140 based on the operation of the operation unit 250 (step S52). When there is a rotation instruction of the stage 140, the CPU 210 specifies the rotation direction and the rotation angle of the stage 140 based on the rotation instruction (step S53), and the stage 140 is rotated by the rotation angle specified in the specified rotation direction. The stage drive unit 146 is controlled so as to control (step S54).

  When there is no instruction to rotate the stage 140 in step S52, the CPU 210 determines whether or not the stage operation unit 145 of FIG. 2 has been operated (step S55). When the stage operation unit 145 is operated, the CPU 210 detects the rotation direction and the rotation angle of the stage 140 based on the operation of the stage operation unit 145 or the output of the detection sensor (step S56).

  Next, the CPU 210 generates three-dimensional image data so as to represent the measurement target S after rotation based on the rotation direction and the rotation angle specified in step S53 or the rotation direction and the rotation angle detected in step S56. Update (step S57). Next, the CPU 210 updates the display of the stereoscopic perspective image based on the updated stereoscopic image data. Then, the processes of steps S52 to S58 are repeated.

[7] Limitation of Rotation Direction When a wide range of three-dimensional shape data of the measurement object S is acquired, the orientation of the measurement object S in the displayed three-dimensional shape image may be arbitrarily changeable. Specifically, when the user instructs to change the orientation of the measuring object S in the stereoscopic image, the stereoscopic image data is updated. The display of the stereoscopic image is updated based on the updated stereoscopic image data.

  On the other hand, since the live image G1 represents the measurement target S in real time that is actually captured by the light receiving unit 120, the orientation of the measurement target S in the live image G1 can be changed by rotating the stage 140. However, unlike the stereoscopic image, the direction of the measuring object S cannot be arbitrarily changed.

  As described above, when comparing the live image G1 and the three-dimensional image, it is preferable that the difference between the live image G1 and the three-dimensional image is small. Therefore, the rotation direction of the measurement object S in the three-dimensional image can be restricted so that the rotation direction of the measurement object S in the live image G1 and the rotation direction of the measurement object S in the three-dimensional image match. Good.

  FIG. 30 is a diagram for explaining the restriction on the rotation direction of the measuring object S in the three-dimensional image. In the example of FIG. 30, a stereoscopic perspective image G3 is displayed as a stereoscopic image. As shown in FIG. 30, the orientation of the measuring object S in the stereoscopic perspective image G3 is integrated with the orientation of the measuring object S actually imaged by the light receiving unit 120 when the stage 140 is in any rotation position. Is determined. In this case, it is preferable that the orientation of the measurement target S in the live image G1 and the orientation of the measurement target S in the stereoscopic perspective image G3 match. In this stereoscopic perspective image G3, the measuring object S can be rotated only in the direction around the virtual rotation axis Ax ′ corresponding to the rotation axis Ax of the stage 140, and rotation in other directions is prohibited. It Thereby, the difference between the live image G1 and the stereoscopic image can be reduced, and the user can compare the live image G1 and the stereoscopic image with each other without feeling discomfort. Further, since it is possible to rotate the measuring object S with a certain degree of freedom, it is possible to confirm the portion of the measuring object S that does not appear in the live image G1 on the stereoscopic image. Further, as described above, by making the orientation of the measuring object S in the live image G1 coincide with the orientation of the measuring object S in the stereoscopic image, it is possible to easily grasp the difference between the live image G1 and the stereoscopic image. You can For this reason, it is possible to easily grasp the missing portion of the three-dimensional shape data and the like, and it is possible to efficiently perform additional acquisition of the three-dimensional shape data.

[8] Acquisition of Measurement Value In step S46 of FIG. 17, the user sets measurement conditions while viewing the stereoscopic image displayed on the display unit 400. The measurement conditions include measurement items and measurement points. The measurement item is the type of parameter to be measured, and includes distance, height, diameter, area, and the like. In addition, a geometric shape (for example, a point, a straight line, a circle, a surface, a sphere, a cylinder, a cone, or the like) for specifying a measurement location may be designated as the measurement item.

  An example of setting measurement conditions will be described. First, a reference plane that is a reference for measurement is set. FIG. 31 is a flowchart showing an operation example of the CPU 210 when setting the reference plane.

  The user specifies the surface of the measuring object S to be the reference surface on the displayed three-dimensional image. For example, a pointer is displayed on the display unit 400 together with the stereoscopic image. The user operates the operation unit 250 to move the pointer and designates the target surface with the pointer. The CPU 210 determines whether or not the surface to be the reference surface is designated (step S61). When the surface is not designated, the CPU 210 repeats the process of step S61.

  Next, the CPU 210 extracts the plane closest to the specified plane based on the three-dimensional shape data (step S62), and sets the extracted plane as the reference plane (step S63). Usually, each surface of the measuring object S is not a perfect flat surface because it slightly includes irregularities or is slightly curved. Therefore, a virtual plane having the highest degree of coincidence with the designated plane is extracted and set as the reference plane. Next, the CPU 210 updates the displayed stereoscopic image so that the set reference plane is parallel to the screen of the display unit 400. That is, a two-dimensional (planar) image of the measurement object S viewed perpendicularly to the reference surface (hereinafter referred to as a reference surface image) is displayed on the display unit 400.

  FIG. 32 is a diagram showing an example of the reference plane image. The reference plane image G4 of FIG. 32 represents the measurement target S of FIG. 18 in a plan view. In the reference plane image G4 of FIG. 32, the upper surface of the element B2 of the measuring object S is designated and set as the reference plane. Therefore, the upper surface of the element B2 is substantially parallel to the screen of the display section 400. FIG. 33 is a diagram for explaining an example of setting measurement conditions. In the example of FIG. 33, the distance between two lines is designated as a measurement item, and two parallel sides L1 and L2 of the element B2 are designated as measurement points. The measurement point is set on the reference plane. When the measurement item and the measurement point are designated, the measurement value corresponding to the designated measurement item and the measurement point is calculated based on the three-dimensional shape data and displayed on the reference plane image G4. In the example of FIG. 30B, "xx (mm)" is displayed as the distance between the sides L1 and L2.

  Thus, by using the two-dimensional reference plane image G4, the user can intuitively set the measurement conditions without being aware of the three-dimensional shape of the measurement target S. .. The image data representing the reference plane image G4 may be stored in the storage device 240 in FIG. 1, for example. In this case, the reference plane image G4 can be displayed at any time to acquire the measurement value. Further, a plurality of reference planes may be set, and a plurality of reference plane images G4 corresponding to the plurality of reference planes may be displayed simultaneously or selectively. Further, the reference plane image G4 and the three-dimensional image may be displayed simultaneously, or the reference plane image G4 and the three-dimensional image may be arbitrarily switched and displayed.

  In the example of FIG. 33, the measurement condition is set using the reference plane image G4, but the measurement condition may be set using a stereoscopic image. For example, the distance between the two surfaces is specified as the measurement item. In addition, two surfaces of the measuring object S are designated as measurement points on the three-dimensional image. In this case, the specified distance between the two surfaces is calculated as a measurement value and displayed on the stereoscopic image. When the measurement conditions are set using the three-dimensional image, the reference plane may not be set.

  FIG. 34 is a diagram showing another example of the reference plane image G4. In the reference plane image G4 of FIG. 34, the portion of the measuring object S is colored in accordance with the difference in height with respect to the reference plane. Here, the height means a distance from the reference plane in a direction perpendicular to the reference plane. In FIG. 34, the difference in color is represented by the difference in dot pattern. In this case, the user can easily recognize the difference in height between the reference surface and other portions. The reference plane image functions as a height image in which the three-dimensional shape data or the three-dimensional shape data with texture is represented by the height from a predetermined reference plane.

  An image (hereinafter referred to as a profile image) representing the profile (cross-sectional shape) of the measuring object S may be displayed based on the three-dimensional shape data. FIG. 35 is a diagram for explaining the designation of the portion where the profile is to be acquired, and FIG. 36 is a diagram showing an example of the profile image.

  In the example of FIG. 35, on the reference plane image G4, the line segment LS specifies the location of the measurement object S whose profile is to be acquired. In this case, profile data representing the profile of the measuring object S on the plane that passes through the line segment LS and is perpendicular to the reference plane is generated based on the three-dimensional shape data. The profile image G5 of FIG. 36 is displayed based on the generated profile data. The profile image G5 includes a profile line PRL representing the profile of the measuring object S.

  The measurement condition may be set using the profile image G5. In the example of FIG. 36, the distance between the two surfaces is designated as the measurement item, and the line segment L11 and the line segment L12 on the profile line PL are designated as the measurement points. The line segments L11 and L12 correspond to the upper surface of the substrate B1 and the upper surface of the element B3 of the measuring object S, respectively. In this case, the distance between the line segment L11 and the line segment L12 (the distance between the upper surface of the substrate B1 and the upper surface of the element B3) is calculated as a measurement value based on the three-dimensional shape data or the profile data. The calculated measurement value "yy" is displayed on the profile image G5.

[9] Effects Since the light emitting unit 110, the light receiving unit 120, and the stage 140 are integrally provided in the measuring apparatus 500 according to the present embodiment, the user does not need to adjust their arrangement. By mounting the measuring object S on the stage 140, the three-dimensional shape data of the measuring object S can be obtained. In addition, since the rotation axis Ax of the stage 140 is not parallel to the optical axis A1 of the light receiving unit 120, rotating the stage 140 changes the location of the measurement target S directed toward the light receiving unit 120. Therefore, the light receiving unit 120 images different portions of the measurement target S. Therefore, it is possible to easily generate a wide range of three-dimensional shape data of the measuring object S.

  In addition, live image data is acquired by capturing an image of the measuring object S mounted on the stage 140 at a constant angle of view θ2 by the light receiving unit 120, and in real time, based on the acquired live image data. An image of the measuring object S is displayed as the live image G1. The user can confirm the position and orientation of the measuring object S while viewing the displayed live image G1.

  Further, based on the stereoscopic shape data, stereoscopic image data representing an image of the measuring object S on a plane as a stereoscopic image is generated by a stereoscopic method. The user designates a position on the three-dimensional image to be measured on the measuring object. Based on the three-dimensional shape data, the measurement value at the designated place is calculated.

  In this case, the stereoscopic image data is generated so that at least one of the first condition and the second condition is satisfied. The first condition is that the measurement object is represented as a stereoscopic image on a plane by the perspective drawing method, and the position of the vanishing point of the stereoscopic image matches the vanishing point of the live image G1. The condition 2 is that the orientation of the measurement target in the stereoscopic image matches the orientation of the measurement target in the live image G1. As a result, the user can compare the stereoscopic image and the live image G1 with each other without feeling discomfort. Therefore, the user can intuitively recognize the location of the measurement target S to be measured by looking at the stereoscopic image. Therefore, the user can easily specify the place to be measured on the stereoscopic image.

  In addition, in the present embodiment, the light receiving unit 120 captures an image of the measurement target S to acquire the texture information of the measurement target S, and based on the point cloud data and the texture information, the three-dimensional shape image data is obtained. , Textured projection image data including texture information and textured perspective image data are generated. This further reduces the user's discomfort with respect to the stereoscopic image.

  In addition, in the present embodiment, a reference plane serving as a reference for measurement is set based on the generated three-dimensional shape data, and a reference plane image G4 is displayed in which the measurement target is viewed perpendicularly to the set reference plane. To be done. In this case, the user can easily specify the measurement location on the reference plane image. Further, the measurement value at the measurement location can be easily calculated with the reference plane as a reference.

  In addition, in the present embodiment, the stage 140 is rotated based on the user's instruction to rotate the stage 140, and the orientation of the measuring object in the live image G1 is changed. Further, based on the instruction to rotate the stage, the stereoscopic shape image data is updated such that the orientation of the measurement object S in the stereoscopic image matches the orientation of the measurement object S in the live image G1. As a result, the orientation of the measuring object S in the stereoscopic image changes along with the change in the orientation of the measuring object A on the live image G1 due to the rotation of the stage 140. Thereby, the user can compare the three-dimensional image and the live image G1 with each other without feeling any discomfort, and can intuitively recognize the position of the measuring object S1 to be measured by looking at the three-dimensional image.

  Further, in the present embodiment, it is possible to change the rotational position of the stage 140 to generate a plurality of three-dimensional shape data and combine the generated plurality of three-dimensional shape data. Accordingly, it is possible to generate three-dimensional shape data of a wide range of the measuring object S.

[10] Other Embodiments In the above embodiments, the monocular camera is used for the light receiving unit 120, but a compound eye camera may be used instead of or in addition to the monocular camera. In addition, a plurality of light receiving units 120 may be used and stereoscopic shape data may be generated by a stereo method. Further, in the above-described embodiment, two light projecting units 110 are used, but if it is possible to generate stereoscopic shape data, only one light projecting unit 110 may be used, or three or more light projecting units 110 may be used. The light unit 110 may be used.

  Further, when the live image data and the texture image data are acquired using the uniform measurement light from the light projecting unit 110, the illumination light output unit 130 and the illumination light source 320 may not be provided. It is also possible to generate texture image data by synthesizing pattern image data, and in that case, the illumination light output unit 130 and the illumination light source 320 may not be provided.

  Further, in the above embodiment, the pattern image data, the live image data, and the texture image data are acquired by the common light receiving unit 120. However, the live image data and the live image data are acquired separately from the light receiving unit for acquiring the three-dimensional shape data. It may be provided in an image capturing unit that captures the measurement target S in order to acquire texture image data.

  Further, in the above embodiment, the point cloud data is generated by the triangulation method, but the point cloud data may be generated by another method such as the TOF (Time Of Flight) method.

  In addition, in the above-described embodiment, the stage driving unit 146 configures the stage 140 to be rotatable about the rotation axis Ax and does not move in other directions, but the present invention is not limited to this.

  The stage 140 may be configured to be rotatable about the rotation axis Ax and movable in at least one of the X direction, the Y direction, and the Z direction, for example. In this case, the rotation angle and the position of the stage 140 can be freely changed while the measurement target S is placed on the stage 140 in a fixed posture. Therefore, the measuring object S can be imaged from various viewpoints. As a result, it is possible to obtain three-dimensional shape data of a wider range of the measuring object S.

[11] Correspondence between each component of the claims and each part of the embodiment Hereinafter, an example of the correspondence between each component of the claims and each part of the embodiment will be described. Not limited.

  In the above embodiment, the installation unit 161 is an example of a stage holding unit, the stage 140 is an example of a stage, the head unit 190 is an example of a head unit, and the light projecting unit 110 is an example of a light projecting unit. Yes, the light receiving unit 120 is an example of a light receiving unit and an imaging unit, the stand unit 162 is an example of a connecting unit, the point cloud data generation unit 501 is an example of point cloud data generation means, and a stereoscopic shape image data generation unit. Reference numeral 502 is an example of three-dimensional shape image data generation means, measurement unit 503 is an example of measurement means, reference plane setting unit 504 is an example of reference plane setting means, and plane image data generation unit 505 is plane image data generation. The first rotation instruction receiving unit 506a is an example of the first rotation instruction receiving unit, the second rotation instruction receiving unit 506b is an example of the second rotation instruction receiving unit, and the rotation control is performed. The part 507 is an example of the rotation control means.

As each constituent element of the claims, various other elements having the configurations or functions described in the claims may be used.
[12] Reference form
(1) A measuring device according to a reference embodiment includes a stage holding unit, a stage held by the stage holding unit, on which a measurement target is placed, and measurement light having a pattern on the measurement target placed on the stage. The projecting unit that emits light, the light receiving unit that receives the measurement light reflected by the measurement target and outputs a light reception signal that indicates the amount of light received, and the measurement target that is placed on the stage is imaged at a fixed angle of view. By including a head unit including an imaging unit that acquires live image data representing a real-time image of the measurement target as a live image, the measurement light is guided obliquely downward from the light projection unit with respect to the measurement target, Also, based on a light receiving signal output from the light receiving unit and a connecting unit that fixedly connects the head unit and the stage holding unit so that the optical axis of the light receiving unit extends obliquely downward toward the measurement target, measurement is performed. Based on the point cloud data generating means for generating the point cloud data representing the three-dimensional shape of the object and the point cloud data generated by the point cloud data generating means, the image of the measuring object is stereoscopically projected on a plane by the stereoscopic method. A three-dimensional shape image data generation unit that generates three-dimensional shape image data represented as a shape image, and a place to be measured on the three-dimensional shape image represented by the three-dimensional shape image data generated by the three-dimensional shape image data generation unit. Of the three-dimensional shape image data generating means, the measuring means calculating the measurement value of the designated place based on the point cloud data generated by the point cloud data generating means. The three-dimensional shape image data is generated so as to satisfy at least one of the conditions, and the first condition is that the measurement object is represented as a three-dimensional shape image on a plane by the perspective drawing method in the three-dimensional drawing method. The second condition is that the orientation of the measuring object in the stereoscopic image matches the orientation of the measuring object in the live image. ..
In this measuring device, the head unit including the light projecting unit and the light receiving unit is fixedly connected to the stage holding unit. The measurement target is placed on the stage held by the stage holding unit, and the measurement light having a pattern is applied to the measurement target from the light projecting unit. The measurement light reflected by the measurement object is received by the light receiving unit, and a light reception signal indicating the amount of received light is output. Point cloud data representing the three-dimensional shape of the measurement target is generated based on the light reception signal.
In this case, since the light projecting unit, the light receiving unit, and the stage are integrally provided, the user does not need to adjust their arrangement, and the object to be measured is placed on the stage to measure the object to be measured. Object point cloud data can be obtained. Further, since the measuring light is guided obliquely downward from the light projecting portion to the measuring object, and the reflected light is received by the light receiving portion having the optical axis extending obliquely downward toward the measuring object, the measuring object is It is possible to efficiently generate a wide range of point cloud data. Further, since the rotation axis of the stage is not parallel to the optical axis of the light receiving section, rotating the stage changes the location of the measurement target pointed at the light receiving section. Therefore, the measurement light is irradiated onto the measurement target in a state where the rotational position of the stage is different, and thus the reflected light at the different position of the measurement target is received by the light receiving unit. Therefore, it is possible to easily generate a wide range of point cloud data of the measurement target.
In addition, live image data representing an image of the measurement object in real time as a live image is acquired by imaging the measurement object placed on the stage at a constant angle of view. The user can confirm the position and orientation of the measurement target while looking at the live image represented by the live image data.
Also, based on the point cloud data, stereoscopic image data representing an image of the measurement object on a plane as a stereoscopic image is generated by the stereoscopic method. A user specifies a measurement target portion of the measurement target on the stereoscopic image represented by the stereoscopic image data, and the measured value of the specified position is calculated based on the point cloud data.
In this case, the stereoscopic image data is generated so that at least one of the first condition and the second condition is satisfied. The first condition is that the object to be measured is represented as a stereoscopic image on a plane by the perspective drawing method, and the position of the vanishing point of the stereoscopic image matches the vanishing point of the live image. The condition is that the orientation of the measurement target in the stereoscopic image matches the orientation of the measurement target in the live image.
By satisfying at least one of the first condition and the second condition, the user can compare the stereoscopic image and the live image with each other without feeling discomfort. Therefore, the user can intuitively recognize the measurement target portion of the measurement target by looking at the three-dimensional image. Therefore, the user can easily specify the place to be measured on the stereoscopic image.
(2) The three-dimensional image is an image in which the measurement target is viewed in one direction, and the second condition is that the one direction with respect to the measurement target matches the direction of the optical axis of the imaging unit with respect to the measurement target. May be included.
In this case, the orientation of the measuring object in the three-dimensional image matches the orientation of the measuring object in the live image, and the user can compare the three-dimensional image and the live image with each other without discomfort. Therefore, the user can intuitively recognize the measurement target portion of the measurement target by looking at the three-dimensional image.
(3) The light receiving section may function as an imaging section. In this case, the configuration of the head unit is simplified as compared with the case where the imaging unit is provided separately from the light receiving unit. Further, since the live image data and the point cloud data are respectively acquired by the common light receiving unit, it becomes easy to approximate the live image and the stereoscopic image generated based on the point cloud data.
(4) The imaging unit acquires the texture information representing the surface state of the measurement target by imaging the measurement target, and the three-dimensional shape image data generation unit uses the point cloud data generated by the point cloud data generation unit. The stereoscopic shape image data may be generated based on the texture information acquired by the light receiving unit. In this case, stereoscopic shape image data including texture information can be generated. This further reduces the user's discomfort with respect to the stereoscopic image.
(5) The measuring device includes a reference plane setting unit that sets a reference plane corresponding to a part of the surface of the object to be measured and serving as a reference for measurement, based on the point cloud data generated by the point cloud data generating unit. Planar image data for generating planar image data representing an image of a measurement object viewed perpendicularly to the reference plane set by the reference plane setting means, based on the point cloud data generated by the point cloud data generating means The measuring unit may further include a generating unit, and the measuring unit may calculate the measured value of the designated location with the reference plane set by the reference plane setting unit as a reference.
In this case, setting the reference plane facilitates calculation of the measurement value from the point cloud data. In addition, based on the generated planar image data, an image of the measurement object viewed perpendicularly to the reference plane is displayed, so that the user can easily specify the measurement location.
(6) The three-dimensional shape image data generation means sets the three-dimensional shape so that the position of the vanishing point of the three-dimensional image matches the position of the vanishing point of the live image based on the angle of view and the positional relationship between the imaging unit and the stage. Image data may be generated.
In this case, since the imaging unit is provided integrally with the stage, the position of the vanishing point of the stereoscopic image and the position of the vanishing point of the live image are determined based on the angle of view and the positional relationship between the imaging unit and the stage. Can be matched easily.
(7) The stage is held by the stage holding unit so as to be rotatable about a vertical rotation axis, and the measuring device is configured to display a rotation instruction receiving unit that receives a rotation instruction of the stage and a rotation instruction received by the rotation instruction receiving unit. Based on the rotation instruction accepted by the rotation instruction acceptance means, the stereoscopic image data generation means further includes a rotation control means for controlling the rotation of the stage based on the rotation instruction. The stereoscopic shape image data may be generated so as to match the orientation of the measurement target in the image.
In this case, the stage is rotated based on the user's instruction to rotate the stage, and the orientation of the measuring object in the live image is changed. On the other hand, based on the instruction to rotate the stage, the stereoscopic shape image data is updated so that the orientation of the measurement object in the stereoscopic image matches the orientation of the measurement object in the live image. As a result, the orientation of the measurement target in the stereoscopic image changes in association with the change in the orientation of the measurement target on the live image due to the rotation of the stage. As a result, the user can compare the three-dimensional image and the live image with each other without a feeling of discomfort, and can see the three-dimensional image and intuitively recognize the place to be measured of the measurement target.
(8) The stage is held by a stage holding unit so as to be rotatable about a vertical rotation axis, and the measuring device has a rotation control means for controlling the rotation of the stage and a predetermined measurement target of a three-dimensional image. Second rotation instruction receiving means for receiving a rotation instruction of a direction is further provided, and the predetermined direction corresponds to the rotation direction of the stage, and the stereoscopic image data generating means is received by the second rotation instruction receiving means. Based on the rotation instruction, the three-dimensional image data is generated so that the measurement object in the three-dimensional image rotates in a predetermined direction, and the rotation control means rotates the rotation received by the second rotation instruction receiving means. Based on the instruction, the stage may be rotated so that the orientation of the measuring object in the live image matches the orientation of the measuring object in the stereoscopic image.
In this case, based on the rotation instruction from the user, the three-dimensional shape image data is updated so that the measurement object in the three-dimensional shape image rotates in a predetermined direction. On the other hand, based on the rotation instruction, the stage is rotated so that the orientation of the measuring object in the live image matches the orientation of the measuring object in the stereoscopic image. As a result, the stage is rotated in association with the change in the orientation of the measurement target in the three-dimensional image, and the orientation of the measurement target on the live image changes. Thereby, the user can compare the stereoscopic image and the live image with each other without feeling discomfort. Further, since it is possible to easily grasp the difference between the stereoscopic shape image and the live image, it is possible to easily grasp the defective portion of the stereoscopic shape data.
(9) The point cloud data generating means generates the first solid shape data as the point cloud data based on the light reception signal output from the light receiving unit when the stage is at the first rotation position, and the stage is the first Second stereoscopic shape data is generated as point group data based on the light reception signal output from the light receiving unit when the second stereoscopic shape is different from the rotation position of the first and second stereoscopic shapes. The data may be combined.
In this case, due to the different rotational positions of the stage, the light receiving section receives the reflected light at different points on the measurement target. Therefore, it is possible to generate the point cloud data of a wide range of the measurement object based on the light reception signal output by the light receiving unit.

  INDUSTRIAL APPLICABILITY The present invention can be used for various measuring devices that measure an object to be measured.

100 measuring unit 110 light emitting unit 111 measuring light source 112 pattern generating unit 113, 114 lens 120 light receiving unit 130 illumination light output unit 140 stage 150 control board 200 PC
210 CPU
220 ROM
230 Working Memory 240 Storage Device 250 Operation Unit 300 Control Unit 320 Illumination Light Source 400 Display Unit 500 Measuring Device S Measurement Object

Claims (9)

A stage holder,
A stage which is held by the stage holding unit and on which a measurement target is placed,
A light projecting unit that irradiates a measurement light having a pattern on the measurement target placed on the stage, and a light receiving unit that receives the measurement light reflected by the measurement target and outputs a light reception signal indicating a light reception amount. A head unit including an imaging unit that acquires live image data representing a real-time image of the measurement target by capturing the measurement target placed on the stage at a constant angle of view; ,
The head unit and the stage holder are arranged so that the measuring light is guided obliquely downward from the light projecting unit to the measuring object, and the optical axis of the light receiving unit extends obliquely downward toward the measuring object. A connecting portion that fixedly connects the portion,
Point cloud data generation means for generating point cloud data representing a three-dimensional shape of the measurement object based on a light reception signal output from the light receiving unit,
Stereoscopic shape image data generation means for generating stereoscopic shape image data representing an image of the measurement object as a stereoscopic shape image on a plane by a stereoscopic method based on the point cloud data generated by the point cloud data generation means. ,
Accepting designation of a location to be measured on the stereoscopic shape image represented by the stereoscopic shape image data generated by the stereoscopic shape image data generating unit, based on the point cloud data generated by the point cloud data generating unit, With a measuring unit that calculates the measured value of the specified location,
The three-dimensional shape image data generating means, before Symbol measurement object is represented as the three-dimensional shape image on a plane by Toshigaho of the stereoscopic image method, the position of the vanishing point of the three-dimensional shape image of the live image A measuring device that generates the stereoscopic image data so as to match the position of the vanishing point. The light receiving unit functions as the imaging unit, measuring apparatus according to claim 1. The image capturing unit acquires texture information representing a surface state of the measurement target by capturing the measurement target,
The three-dimensional shape image data generating means, based on the obtained texture information by the light receiving unit and the generated point group data by the point group data generating means generates the three-dimensional shape image data, according to claim 1 or 2. The measuring device according to 2 . Based on the point cloud data generated by the point cloud data generating means, a reference plane setting means for setting a reference plane corresponding to a part of the surface of the measurement target and serving as a measurement reference,
A plane for generating plane image data representing an image of the measurement object viewed perpendicularly to the reference plane set by the reference plane setting means, based on the point cloud data generated by the point cloud data generating means. Further comprising image data generating means,
The measuring device according to any one of claims 1 to 5 , wherein the measuring unit calculates the measured value at the designated location with reference to the reference plane set by the reference plane setting unit. The stereoscopic shape image data generation unit generates the stereoscopic shape image data based on the angle of view such that the position of the vanishing point of the stereoscopic image matches the position of the vanishing point of the live image. Item 5. The measuring device according to any one of items 1 to 4. The three-dimensional shape image data generation unit matches the vanishing point position of the three-dimensional image with the vanishing point position of the live image based on the positional relationship between the imaging unit and the stage in addition to the angle of view. 6. The measuring device according to claim 5 , wherein the stereoscopic image data is generated. The stage is held by the stage holder so as to be rotatable about a vertical rotation axis,
First rotation instruction receiving means for receiving a rotation instruction of the stage,
Further comprising a rotation control means for controlling the rotation of the stage based on the rotation instruction accepted by the first rotation instruction acceptance means,
Based on the rotation instruction received by the first rotation instruction receiving unit, the three-dimensional image data generation unit matches the orientation of the measurement object in the three-dimensional image with the orientation of the measurement object in the live image. The measuring apparatus according to any one of claims 1 to 6, which generates the stereoscopic image data as described above. The stage is held by the stage holder so as to be rotatable about a vertical rotation axis,
Rotation control means for controlling the rotation of the stage,
Further comprising second rotation instruction receiving means for receiving a rotation instruction of the measurement target in a predetermined direction in the three-dimensional image,
The predetermined direction corresponds to the rotation direction of the stage,
The three-dimensional shape image data generation means is configured to rotate the measurement object in the three-dimensional shape image in the predetermined direction based on the rotation instruction accepted by the second rotation instruction acceptance means. Generate image data,
The rotation control means, based on the rotation instruction received by the second rotation instruction receiving means, so that the orientation of the measurement object in the live image matches the orientation of the measurement object in the three-dimensional image, The measuring device according to claim 1, wherein the stage is rotated. The point cloud data generation means generates first stereoscopic shape data as the point cloud data based on a light reception signal output from the light receiving unit when the stage is at the first rotation position, and the stage is The second stereoscopic shape data is generated as the point cloud data based on the light reception signal output from the light receiving unit when the second rotation position is different from the first rotation position, and the generated first solid shape data is generated. 9. The measuring device according to claim 7, which synthesizes the second solid shape data and the second solid shape data.

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