JP7154084B2 - Three-dimensional shape measuring device and three-dimensional shape measuring program - Google Patents

Description

The present invention relates to a three-dimensional shape measuring apparatus and a three-dimensional shape measuring program for measuring a three-dimensional shape of an object to be measured.

A three-dimensional shape measuring device is used to grasp the surface shape of an object to be measured. In a three-dimensional shape measuring apparatus, data indicating the three-dimensional shape of an object to be measured is acquired using, for example, the principle of triangulation. The acquired data is analyzed by an application program for dimension measurement, and the shape, dimension, etc. of the object to be measured are calculated.

As such a three-dimensional shape measuring device, the three-dimensional measuring device described in Patent Document 1 holds reference three-dimensional shape data that serves as a reference for comparing shapes. CAD data created using CAD (Computer Aided Design), for example, is used as the reference three-dimensional shape data.

The cross-sectional profile of the measured three-dimensional shape data obtained by the shape measurement of the object to be measured and the cross-sectional profile of the reference three-dimensional shape data are superimposed and displayed on the measurement screen. At this time, the area between the two profiles is colored according to the difference between the cross-sectional profile of the measured three-dimensional shape data and the cross-sectional profile of the reference three-dimensional shape data. Thereby, the user can easily grasp the difference in the actual shape of the object to be measured from the predetermined shape.

JP 2018-31746 A

However, in the three-dimensional measuring apparatus of Patent Document 1, the user needs to prepare reference three-dimensional shape data in advance before analyzing the shape of the object to be measured using the measured three-dimensional shape data. Creating and preparing such reference solid shape data is troublesome for the user. In addition to the above example, if the shape of each part of the object to be measured can be grasped if it deviates from the desired geometrical reference, the convenience of the three-dimensional measuring apparatus will be improved.

An object of the present invention is to provide a three-dimensional shape measuring apparatus and a three-dimensional shape measuring program that enable a user to easily and intuitively grasp the relationship between a desired geometric reference and the shape of an object to be measured. is.

(1) A three-dimensional shape measuring apparatus according to a first aspect of the present invention includes a shape data generation unit that generates three-dimensional shape data representing a three-dimensional shape of an object to be measured, and based on the three-dimensional shape data generated by the shape data generation unit: a display control unit for displaying an image including a three-dimensional shape of an object to be measured as a three-dimensional shape image on a display unit so that the posture can be changed; and receiving designation of a first geometric element on the three-dimensional shape image displayed on the display unit. and, based on the first geometric element received by the element receiving unit, a second geometric element having a unique relationship with the first geometric element and different from the first geometric element . a specifying unit for specifying as a reference, the display control unit corresponding to at least a portion of the three-dimensional shape image according to a distance between at least a portion of the measurement object and the geometric reference specified by the specifying unit. Sets the appearance of the part.

In the three-dimensional shape measuring apparatus, three-dimensional shape data of the object to be measured is generated, and a three-dimensional shape image based on the generated three-dimensional shape data is displayed on the display unit. Designation of a first geometric element is accepted on the solid shape image, and a first geometric element having a unique relationship with the first geometric element based on the accepted first geometric element and different from the first geometric element Two geometric elements are specified as geometric references. A display mode of a portion of the three-dimensional shape image corresponding to at least a portion of the measurement object is set according to the distance between at least a portion of the measurement object and the geometric reference.

Thereby, the user designates the first geometric element on the three-dimensional shape image of the object to be measured, and by visually recognizing the three-dimensional shape image displayed on the display unit, obtains the desired geometric reference and the shape of the object to be measured. It is possible to easily and intuitively grasp the relationship between

Note that setting the display mode of the 3D image portion means switching the display mode of the 3D image portion from a predetermined original display mode to a display mode according to the distance. In other words, setting the display mode of the 3D image portion means changing the display mode of the 3D image portion from a predetermined original display mode to a display mode according to the distance. . In other words, setting the display mode of the 3D image portion means changing the display mode of the 3D image portion from a predetermined original display mode to a display mode according to the distance. .

(2) The identifying unit may further identify at least a portion for which the display mode should be set based on the first geometric element received by the element receiving unit.

In this case, the user can easily and intuitively determine the relationship between the desired geometric element and the shape of the desired portion of the measurement object by specifying the first geometric element on the three-dimensional shape image of the measurement object. be able to comprehend.

(3) The display mode may be a color according to the distance between at least the part and the geometric reference.

In this case, the user can more intuitively grasp the relationship between the desired geometrical reference and the shape of at least a part of the object to be measured.

(4) The display control unit causes the display unit to display an index representing a geometric comparison result between the at least part and the geometric reference specified by the specifying unit, and the index displayed on the display unit emphasizes the comparison result. , it may be possible to adjust the display mode of the index.

In this case, the user can more intuitively grasp the result of the geometric comparison between the desired geometric reference and the shape of at least a part of the object to be measured.

(5) The three-dimensional shape measuring apparatus includes a stage holder, a stage held by the stage holder and on which a measurement object is placed, and a measurement light having a pattern applied to the measurement object placed on the stage. and a light-receiving section that receives the measurement light reflected by the object to be measured and outputs a light-receiving signal representing the amount of received light, and the head section and the stage holding section are fixedly connected to each other. The shape data generation unit may generate point cloud data representing the three-dimensional shape of the measurement object as three-dimensional shape data based on the received light signal output from the light receiving unit.

According to the above configuration, since the light projecting section, the light receiving section, and the stage holding section are integrally provided, the positional relationship between the light receiving section and the stage is uniquely determined. Therefore, point cloud data can be obtained with high accuracy. Therefore, the shape of the measurement object can be measured with high accuracy based on the three-dimensional shape data.

(6) The three-dimensional shape measuring device calculates the distance between at least a portion and the geometric reference based on the three-dimensional shape data, and sets the correspondence relationship between the display mode and the distance based on the calculated distance. A setting unit may be further included, and the display control unit may set a display mode of a portion corresponding to at least a portion of the three-dimensional shape image based on the correspondence set by the correspondence setting unit.

In this case, the user does not need to define the correspondence between the display mode and the distance. Moreover, according to the above configuration, it is possible to set a more appropriate correspondence relationship based on the three-dimensional shape data.

(7) A three-dimensional shape measuring apparatus includes an operation unit operated by a user to specify one geometric element for specifying one geometric reference for one measurement object, and an operation unit operated by the user. A template storage unit for storing operation procedures as template information; It may further include a template designating unit that designates the template based on the data, the three-dimensional shape data of the other measurement object, and the template information stored in the template storage unit.

In this case, the user does not need to specify geometric elements for each measurement object when he/she wishes to set mutually corresponding geometric references for a plurality of measurement objects having a common shape.
(8) When the first geometric element received by the element receiving unit is two planes parallel to each other, the specifying unit selects a second geometric element composed of a median plane positioned between the two planes. It may be specified as a geometric criterion.
(9) When the first geometrical element received by the element receiving part is a cylinder, the identifying unit may identify, as the geometrical reference, a second geometrical element consisting of the central axis of the cylinder.
(10) When the first geometrical element received by the element receiving part is a cone, the identifying unit may identify, as the geometrical reference, a second geometrical element consisting of the central axis of the cone.
(11) When the first geometric element accepted by the element accepting unit is a sphere, the specifying unit may specify a second geometric element formed by the center of the sphere as the geometric reference.

( 12 ) A three-dimensional shape measuring program according to a second aspect of the invention is a three-dimensional shape measuring program executable by a processing device, comprising a process of generating three-dimensional shape data representing a three-dimensional shape of a measurement target, and Based on the obtained three-dimensional shape data, a process of displaying an image including the three-dimensional shape of the object to be measured as a three-dimensional shape image on the display unit so that the posture can be changed; a second geometric element having a unique relationship with the first geometric element and different from the first geometric element based on the accepted first geometric element; and causing the processing device to execute and display on the display unit, according to the distance between at least part of the measurement object and the specified geometric reference, at least part of the three-dimensional shape image includes processing for setting the display mode of the portion corresponding to .

According to the three-dimensional shape measurement program, the three-dimensional shape data of the object to be measured is generated, and the three-dimensional shape image based on the generated three-dimensional shape data is displayed on the display unit. Designation of a first geometric element is accepted on the solid shape image, and a first geometric element having a unique relationship with the first geometric element based on the accepted first geometric element and different from the first geometric element Two geometric elements are specified as geometric references. A display mode of a portion of the three-dimensional shape image corresponding to at least a portion of the measurement object is set according to the distance between at least a portion of the measurement object and the geometric reference.

Thereby, the user designates the first geometric element on the three-dimensional shape image of the object to be measured, and by visually recognizing the three-dimensional shape image displayed on the display unit, obtains the desired geometric reference and the shape of the object to be measured. It is possible to easily and intuitively grasp the relationship between

According to the present invention, it is possible to easily and intuitively grasp the relationship between the desired geometrical reference and the shape of the object to be measured.

1 is a block diagram showing the configuration of a three-dimensional shape measuring device according to one embodiment of the present invention; FIG. FIG. 2 is a schematic diagram showing the configuration of a measuring section of the three-dimensional shape measuring apparatus of FIG. 1; It is a typical external appearance perspective view of a measurement part. FIG. 4 is a schematic side view of the measuring section of FIG. 3; It is a figure for demonstrating the principle of a triangulation ranging method. FIG. 4 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by capturing images of a measurement object from a plurality of directions; 4 is a flow chart showing a procedure for preparing for shape measurement. 4 is a flowchart of shape measurement processing; It is a figure for demonstrating the setting example of measurement conditions. It is a figure for demonstrating the setting example of measurement conditions. It is a figure for demonstrating the setting example of measurement conditions. It is a figure for demonstrating the setting example of measurement conditions. 1 is an external perspective view showing an example of an object to be measured; FIG. FIG. 10 is a diagram for explaining an example of use of the display mode setting function; FIG. 10 is a diagram for explaining an example of use of the display mode setting function; FIG. 10 is a diagram for explaining an example of use of the display mode setting function; FIG. 10 is a diagram for explaining an example of use of the display mode setting function; FIG. 10 is a diagram for explaining an example of use of the display mode setting function; FIG. 10 is a diagram for explaining an example of use of the display mode setting function; FIG. 10 is a diagram for explaining an example of use of the display mode setting function; FIG. 10 is a diagram for explaining an example of use of the display mode setting function; FIG. 10 is a diagram for explaining an example of use of the display mode setting function; FIG. 10 is a diagram for explaining an example of use of the display mode setting function; FIG. 10 is a diagram for explaining an example of use of the display mode setting function; FIG. 10 is a diagram for explaining an example of use of the display mode setting function; FIG. 10 is a diagram for explaining another usage example of the display mode setting function; FIG. 10 is a diagram for explaining another usage example of the display mode setting function; FIG. 10 is a diagram for explaining another usage example of the display mode setting function; FIG. 10 is a diagram for explaining another usage example of the display mode setting function; FIG. 10 is a diagram for explaining another usage example of the display mode setting function; FIG. 11 is a diagram for explaining still another usage example of the display mode setting function; FIG. 11 is a diagram for explaining still another usage example of the display mode setting function; FIG. 11 is a diagram for explaining still another usage example of the display mode setting function; 4 is a functional block diagram of a CPU for realizing a display mode setting function according to one embodiment of the present invention; FIG. 4 is a flowchart showing a basic flow of display mode setting processing based on a display mode setting program; FIG. 10 is a diagram showing an example of a geometric element setting screen for explaining the parallel plane extraction function; FIG. 10 is a diagram showing an example of a geometric element setting screen for explaining the parallel plane extraction function; FIG. 10 is a diagram showing an example of a geometric element setting screen for explaining the vertical plane extraction function; FIG. 10 is a diagram showing an example of a geometric element setting screen for explaining the vertical plane extraction function; FIG. 10 is a diagram showing an example of a geometric element setting screen for explaining the region extracting function; FIG. 10 is a diagram showing an example of a geometric element setting screen for explaining the region extracting function; It is a figure which shows an example of the matching screen displayed on a display part. It is a figure which shows an example of the matching screen displayed on a display part. FIG. 11 is an external perspective view showing another example of the measurement object; FIG. 11 is a diagram for explaining an example of use of a contrast highlighting function; FIG. 11 is a diagram for explaining an example of use of a contrast highlighting function; FIG. 11 is a diagram for explaining an example of use of a contrast highlighting function;

A three-dimensional shape measuring apparatus according to an embodiment of the present invention will be described below with reference to the drawings.

[1] Configuration of Three-Dimensional Shape Measuring Apparatus FIG. 1 is a block diagram showing the configuration of a three-dimensional shape measuring apparatus according to an embodiment of the present invention. FIG. 2 is a schematic diagram showing the configuration of the measuring section of the three-dimensional shape measuring apparatus 500 of FIG. A three-dimensional shape measuring apparatus 500 according to the present embodiment will be described below with reference to FIGS. 1 and 2. FIG. As shown in FIG. 1 , the three-dimensional shape measuring device 500 includes a measurement section 100 , a PC (personal computer) 200 , a control section 300 and a display section 400 . The measurement unit 100 is, for example, an imaging device that integrates light projection and reception, and includes a light projection unit 110 , a light reception unit 120 , an illumination light output unit 130 , a stage 140 and a control board 150 .

The measuring section 100 may include a plurality of light projecting sections 110 . Also, the measurement unit 100 may include a plurality of light receiving units 120 . In this embodiment, measuring section 100 includes two light projecting sections 110 and two light receiving sections 120 . Hereinafter, when distinguishing between the two light projecting sections 110, one light projecting section 110 will be referred to as a light projecting section 110A, and the other light projecting section 110 will be referred to as a light projecting section 110B. When distinguishing between the two light receiving sections 120, one light receiving section 120 is referred to as a light receiving section 120A, and the other light receiving section 120 is referred to as a light receiving section 120B.

FIG. 2 shows two light projecting units 110 and one light receiving unit 120 out of two light projecting units 110 and two light receiving units 120 . Light projecting unit 110 and light receiving unit 120 are arranged in one direction at a position obliquely above stage 140 . The details of the arrangement of light projecting section 110 and light receiving section 120 will be described later. As shown in FIG. 2, each light projector 110 includes a measurement light source 111, a pattern generator 112 and a plurality of lenses 113,114. Light receiving unit 120 includes camera 121 and lens 122 . A measuring object S is placed on the stage 140 .

The measurement light source 111 of each of the light projection units 110A and 110B is, for example, a blue LED (light emitting diode). The measurement light source 111 may be another light source such as a halogen lamp. Light emitted from the measurement light source 111 (hereinafter referred to as measurement light) is appropriately condensed by the lens 113 and then enters the pattern generator 112 .

The pattern generator 112 is, for example, a DMD (digital micromirror device). The pattern generator 112 may be an LCD (Liquid Crystal Display), an LCOS (Liquid Crystal on Silicon), or a mask. The measurement light that has entered the pattern generator 112 is converted into a preset pattern and a preset intensity (brightness) and emitted. The measurement light emitted from the pattern generator 112 is converted by the lens 114 into light having a diameter larger than the dimension of the measurement object S, and then the measurement object S on the stage 140 is irradiated with the light.

The measurement light source 111, the lens 113, and the pattern generation section 112 of the light projection section 110A are arranged substantially parallel to the optical axis of the light reception section 120. FIG. Similarly, the measurement light source 111, the lens 113, and the pattern generator 112 of the light projecting section 110B are arranged substantially parallel to the optical axis of the light receiving section 120. FIG. On the other hand, the lens 114 of each of the light projection units 110A and 110B is arranged so as to be offset with respect to the measurement light source 111, the lens 113 and the pattern generation unit 112. FIG. As a result, the optical axes of the light-projecting sections 110A and 110B are tilted with respect to the optical axis of the light-receiving section 120, and measurement light is emitted toward the measurement object S from both sides of the light-receiving section 120, respectively.

The measurement light reflected upward from the stage 140 by the measurement object S is focused and imaged by the lens 122 of the light receiving unit 120 and received by the imaging element 121 a of the camera 121 .

In order to widen the imaging field of the light receiving unit 120, the light receiving unit 120 is configured to have a certain angle of view. In the present embodiment, the imaging field of view of the light receiving unit 120 means a spatial area that can be imaged by the light receiving unit 120 . The angle of view of the light receiving unit 120 is determined by the dimensions of the imaging device 121a and the focal length of the lens 122, for example. A telecentric optical system may be used for the light receiving section 120 when a wide field of view is not required. Here, the magnifications of the lenses 122 of the two light receiving units 120 provided in the measuring unit 100 are different from each other. Accordingly, by selectively using the two light receiving units 120, the measurement object S can be imaged at two different magnifications. The two light receiving sections 120 are preferably arranged such that the optical axes of the two light receiving sections 120 are parallel to each other.

The camera 121 is, for example, a CCD (charge-coupled device) camera. The imaging device 121a is, for example, a monochrome CCD (charge-coupled device). The imaging device 121a may be another imaging device such as a CMOS (Complementary Metal Oxide Semiconductor) image sensor. From each pixel of the imaging device 121 a , an analog electrical signal (hereinafter referred to as a light reception signal) corresponding to the amount of light received is output to the control board 150 .

The illumination light output unit 130 emits light with a red wavelength, light with a green wavelength, and light with a blue wavelength to the measurement object S in a time division manner. According to this configuration, a color image of the measuring object S can be picked up by the light receiving section 120 using a monochrome CCD.

Note that the imaging device 121a may be a color CCD if the color CCD has sufficient resolution and sensitivity. In this case, the illumination light output unit 130 does not need to time-divisionally irradiate the measurement object S with the red wavelength light, the green wavelength light, and the blue wavelength light, and irradiates the measurement object S with white light. Therefore, the configuration of illumination light source 320 can be simplified.

The control board 150 is mounted with an A/D converter (analog/digital converter) and FIFO (First In First Out) memory (not shown). The received light signal output from the camera 121 is sampled at a constant sampling period and converted into a digital signal by the A/D converter of the control board 150 under the control of the control unit 300 . Digital signals output from the A/D converter are sequentially stored in a FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data. Here, if the camera 121 is, for example, a monochrome CMOS camera, and a digital electric signal corresponding to the amount of received light is output from each pixel of the imaging element 121a to the control board 150, an A/D converter is absolutely necessary. is not.

As shown in FIG. 1, the PC 200 includes a CPU (Central Processing Unit) 210 , a ROM (Read Only Memory) 220 , a working memory 230 , a storage device 240 and an operation section 250 . Operation unit 250 includes a keyboard and pointing device. A mouse, a joystick, or the like is used as the pointing device.

A system program is stored in the ROM 220 . The working memory 230 consists of RAM (random access memory) and is used for processing various data. The storage device 240 consists of a hard disk or the like. The storage device 240 stores a three-dimensional shape measurement program. The three-dimensional shape measurement program includes a shape measurement program and a display mode setting program, which will be described later. Also, the storage device 240 is used to store various data such as pixel data provided from the control board 150 .

CPU 210 generates image data based on pixel data provided from control board 150 . Further, the CPU 210 performs various processes on the generated image data using the working memory 230 and causes the display unit 400 to display an image based on the image data. Furthermore, the CPU 210 gives a drive signal through the control board 150 to the stage drive section 146, which will be described later. The display unit 400 is configured by, for example, an LCD panel or an organic EL (electroluminescence) panel. The display unit 400 displays an image (hereinafter referred to as a live image) based on image data acquired in real time by the camera 121 of the light receiving unit 120, for example.

As shown in FIG. 2, stage 140 includes stage base 141 and stage plate 142 . A stage plate 142 is arranged on the stage base 141 . The stage plate 142 has a mounting surface on which the object S to be measured is mounted. The stage plate 142 may be provided with mounting portions (for example, screw holes) for mounting clamps, jigs, or the like. The stage plate 142 according to this embodiment has a disk shape.

A substantially cylindrical effective area MR is set in the space above the stage plate 142 . The effective area MR is an area that can be irradiated with measurement light by the light projecting sections 110A and 110B and can be imaged by the light receiving section 120. FIG. The imaging field of the light receiving unit 120 is determined by the magnification, depth of focus, angle of view, etc. of the lens 122 of the light receiving unit 120 .

Stage 140 is attached to rotation mechanism 143 . The rotating mechanism 143 is fixed to an installation portion 161 (FIG. 4), which will be described later. Also, the rotating mechanism 143 includes, for example, an encoder and a stepping motor. Further, the rotating mechanism 143 is driven by the stage operating section 145 or the stage driving section 146 of FIG. 1, and rotates the stage 140 around the rotation axis Ax passing through its center and extending in the vertical direction. The user can rotate the stage 140 by manually operating the stage operation unit 145 . Further, the stage driving section 146 supplies current to the rotating mechanism 143 based on a driving signal given from the PC 200 through the control board 150, thereby rotating the mounting surface of the stage plate 142 relative to the light receiving section 120. be able to.

When the stage 140 rotates, a signal output from the encoder of the rotation mechanism 143 is sent to the PC 200 through the control board 150 . Thereby, CPU 210 in FIG. 1 detects the amount of rotation (rotational position) of stage plate 142 from a predetermined reference angle.

Control unit 300 includes a control board 310 and an illumination light source 320 . A CPU (not shown) is mounted on the control board 310 . The CPU of the control board 310 controls the light projecting section 110 , the light receiving section 120 and the control board 150 based on commands from the CPU 210 of the PC 200 . Control board 310 and illumination light source 320 may be mounted on measurement unit 100 .

Illumination light source 320 includes, for example, three LEDs that emit red, green, and blue light. By controlling the brightness of the light emitted from each LED, light of any color can be generated from the illumination light source 320 . Light emitted from the illumination light source 320 (hereinafter referred to as illumination light) is output from the illumination light output section 130 of the measurement section 100 through a light guide member (light guide) 330 . Note that the illumination light source 320 may be provided in the measurement unit 100 without providing the illumination light source 320 in the control unit 300 . In this case, the light guide member 330 is not required.

Here, in the measuring unit 100, these components are connected so that the positional relationship of the plurality of light projecting units 110, the plurality of light receiving units 120, the illumination light output unit 130, and the stage 140 is fixed. .

FIG. 3 is a schematic external perspective view of the measurement unit 100. FIG. In FIG. 3 , the external appearance of the measurement unit 100 is indicated by thick solid lines, and some components provided inside the measurement unit 100 are indicated by dotted lines. As shown in FIG. 3, the measuring section 100 includes a pedestal 170. As shown in FIG. Two light projecting units 110 , two light receiving units 120 , an illumination light output unit 130 and a control board 150 are attached to the pedestal 170 . In this state, the pedestal 170 fixes the positional relationship between the two light projecting units 110 , the two light receiving units 120 , and the illumination light output unit 130 . The two light receiving units 120 are arranged vertically. Also, the illumination light output section 130 has an elliptical cylindrical shape and is arranged so as to surround the two light receiving sections 120 . An illumination light output port 131 having an elliptical shape is formed at one end of the illumination light output unit 130 . Further, the two light projecting units 110 are arranged side by side with the two light receiving units 120 and the illumination light output unit 130 interposed therebetween.

A head casing 180 that accommodates two light projecting units 110 , two light receiving units 120 , an illumination light output unit 130 and a part of the control board 150 is further attached to the base 170 . A head section 190 is composed of two light projecting sections 110 , two light receiving sections 120 , an illumination light output section 130 , a control board 150 , a base 170 and a head casing 180 .

The measuring section 100 further includes an installation section 161 and a stand section 162 . The installation portion 161 has a flat bottom surface and is formed to extend in one direction with a substantially constant width. The installation portion 161 is installed on a horizontal installation surface such as the upper surface of a table.

The stand portion 162 is connected to one end of the installation portion 161 and formed to extend upward from the one end of the installation portion 161 . The rotation mechanism 143 of FIG. 2 is fixed at a position near the other end of the installation portion 161 . The stage 140 is rotatably held by the rotating mechanism 143 .

The pedestal 170 is detachably attached to the upper end of the stand portion 162 . By attaching the pedestal 170 of the head portion 190 to the stand portion 162 , the head portion 190 and the installation portion 161 are fixedly connected by the stand portion 162 . Thereby, the positional relationship among the stage 140, the two light projecting sections 110, and the two light receiving sections 120 is kept constant.

Each light projection unit 110 is positioned so that the irradiation area irradiated with the measurement light includes the stage 140 and the space above it. The measurement light is guided obliquely downward toward the measurement target S from each light projecting section 110 . Further, each light receiving unit 120 is positioned such that the optical axis extends obliquely downward and the field of view of the camera 121 in FIG. 2 includes the stage 140 and the space above it. In FIG. 3, the irradiation region IR of each light projecting unit 110 is indicated by a two-dot chain line, and the imaging field TR1 of one light receiving unit 120A is indicated by a one-dot chain line. Each of the light receiving sections 120A and 120B is fixed so that the optical axis of the optical system (the optical axis of the lens 122 in FIG. 2) forms a predetermined angle (for example, 45 degrees) with respect to the mounting surface of the stage plate 142. be done.

As shown in FIG. 3 , part of the irradiation regions IR of the two light projecting sections 110A and 110B and part of the imaging field of view TR1 of the light receiving section 120A overlap in the space above the stage 140 . An effective area MR1 corresponding to the light receiving section 120A is set at a position where the irradiation area IR of the light projecting sections 110A and 110B and the imaging field of view TR1 of the light receiving section 120A overlap.

The two light receiving units 120A and 120B provided in the measuring unit 100 of this example are different from each other in the magnification, depth of focus and angle of view of the lens 122 . Specifically, the magnification of the lens 122 of the light receiving section 120B is higher than the magnification of the lens 122 of the light receiving section 120A. Also, the depth of focus of the lens 122 of the light receiving section 120B is smaller than the depth of focus of the lens 122 of the light receiving section 120A. Furthermore, the angle of view of the lens 122 of the light receiving section 120B is smaller than the angle of view of the lens 122 of the light receiving section 120A. In this case, the imaging field of view of the light receiving section 120B is smaller than the imaging field of view TR1 of the light receiving section 120A. Thereby, the effective area MR1 corresponding to one light receiving section 120A is set on the stage 140 in a relatively wide range. On the other hand, the effective area corresponding to the other light receiving section 120B is set on the stage 140 within a narrower range than the effective area MR1 corresponding to the light receiving section 120A.

4 is a schematic side view of the measuring section 100 of FIG. 3. FIG. In FIG. 4, the optical axis A1 of the optical system of the light receiving section 120A is indicated by a thick dashed line, and the effective area MR1 of the light receiving section 120A is indicated by a thick dotted line. An optical axis A2 of the optical system of the light receiving section 120B is indicated by a dashed line, and an effective area MR2 of the light receiving section 120B is indicated by a dotted line.

In measuring section 100 according to the present embodiment, as shown in FIG. 4, optical axis A2 is located below optical axis A1. Also, the optical axes A1 and A2 are parallel to each other. The effective area MR1 corresponding to the light receiving section 120A is set around, for example, the intersection F1 between the rotation axis Ax of the stage 140 and the focal plane of the optical system of the light receiving section 120A. The effective area MR2 corresponding to the light receiving section 120B is set, for example, around the intersection point F2 between the rotation axis Ax of the stage 140 and the focal plane of the optical system of the light receiving section 120B.

In measuring section 100 shown in FIGS. 3 and 4, a three-dimensional coordinate system (hereinafter referred to as apparatus coordinate system) unique to measuring section 100 is defined in the space above stage 140 including effective areas MR1 and MR2. be done. The device coordinate system of this example includes an origin and mutually orthogonal X, Y, and Z axes. In the following description, the direction parallel to the X axis of the apparatus coordinate system is called the X direction, the direction parallel to the Y axis is called the Y direction, and the direction parallel to the Z axis is called the Z direction. Furthermore, the direction of rotation around an axis parallel to the Z axis is called the θ direction. The X direction and the Y direction are orthogonal to each other within a plane parallel to the mounting surface of the stage plate 142 . The Z direction is orthogonal to a plane parallel to the mounting surface of the stage plate 142 . 3 and 4, the X direction, Y direction, Z direction and θ direction are indicated by arrows.

[2] Three-dimensional shape data indicating the three-dimensional shape of the object to be measured (1) Shape measurement by triangulation method In the measuring unit 100, the shape of the object to be measured S is measured by the triangulation method. FIG. 5 is a diagram for explaining the principle of the triangulation method. In FIG. 5, the X direction, Y direction, Z direction and θ direction defined together with the device coordinate system are indicated by arrows.

As shown in FIG. 5, an angle α between the optical axis of the measuring light emitted from the light projecting section 110 and the optical axis of the measuring light entering the light receiving section 120 (the optical axis of the light receiving section 120) is set in advance. be. The angle α is greater than 0 degrees and less than 90 degrees.

When the measurement object S is not mounted on the stage 140 , the measurement light emitted from the light projecting section 110 is reflected by the point O on the mounting surface of the stage 140 and enters the light receiving section 120 . On the other hand, when the measurement object S is placed on the stage 140 , the measurement light emitted from the light projecting section 110 is reflected by the point A on the surface of the measurement object S and enters the light receiving section 120 .

If the distance in the X direction between the point O and the point A is d, the height h of the point A of the measuring object S with respect to the mounting surface of the stage 140 is given by h=d÷tan(α). The CPU 210 of the PC 200 in FIG. 1 measures the distance d between the point O and the point A in the X direction based on the pixel data of the measurement object S given by the control board 150 . The CPU 210 also calculates the height h of the point A on the surface of the measurement object S based on the measured distance d. By calculating the heights of all the points on the surface of the measurement object S, it is possible to specify the coordinates expressed in the apparatus coordinate system for all the points irradiated with the measurement light. Thereby, the three-dimensional shape of the measuring object S is measured.

In order to irradiate all points on the surface of the object S to be measured with the measurement light, the light projecting section 110 in FIG. 2 emits measurement light having various patterns. The pattern of the measurement light is controlled by the pattern generator 112 shown in FIG.

For example, as a first pattern, measurement light having a linear cross section parallel to the Y direction (hereinafter referred to as line-shaped measurement light) is emitted from the light projecting section 110 . As the second pattern, measurement light having a linear cross section parallel to the Y direction and a pattern in which the intensity varies sinusoidally in the X direction (hereinafter referred to as sinusoidal measurement light) is emitted. It is emitted from the unit 110 a plurality of times (four times in this example). Furthermore, as a third pattern, measurement light having a linear cross section parallel to the Y direction and aligned in the X direction (hereinafter referred to as striped measurement light) is emitted from the light projecting unit 110 a plurality of times (this example 16 times). Furthermore, as a fourth pattern, the light projecting unit 110 emits measurement light having a linear cross section parallel to the Y direction and having bright portions and dark portions lined up in the X direction (hereinafter referred to as coded measurement light). is emitted a plurality of times (four times in this example). The proportion of bright and dark parts of the coded measuring light is 50% each.

The method of scanning the measurement object S with the linear measurement light described above is generally called a light section method. On the other hand, the method of irradiating the measuring object S with sinusoidal measuring light, striped measuring light, or coded measuring light is classified as a pattern projection method. Among the pattern projection methods, the method of irradiating the measuring object S with sinusoidal measuring light or striped measuring light is classified as the phase shift method, and the method of irradiating the measuring object S with the coded measuring light is the spatial code method. classified by law.

In the measurement unit 100 according to the present embodiment, measurement light can be projected onto the measurement object S placed on the stage 140 from a plurality of (in this example, two) different directions. As a result, when there is a portion that cannot be measured by the measurement light projected from the light projecting portion 110A, the shape of the unmeasurable portion is measured using the measurement light projected from the light projecting portion 110B. be able to. Similarly, when there is a portion that cannot be measured by the measurement light projected from the light projecting portion 110B, the shape of the unmeasurable portion is measured using the measurement light projected from the light projecting portion 110A. be able to. As a result, the unmeasurable portion of the measurement object S can be reduced.

The light section method, the pattern projection method, the phase shift method and the spatial code method each have their advantages and disadvantages, but they all use the principle of triangulation in common. Point cloud data representing the three-dimensional shape of the measurement object S is generated based on image data of the measurement object S onto which measurement light having a predetermined pattern is projected (hereinafter referred to as pattern image data). be.

In the following description, the point cloud data representing the three-dimensional shape of the measurement object S will be referred to as three-dimensional shape data. The three-dimensional shape data includes position data of a plurality of points on the surface of the object S to be measured. The position data represents coordinates in the X, Y and Z directions, for example. In this case, if the data of an arbitrary point in the three-dimensional shape data is Pn (n is a natural number), Pn can be represented by (Xn, Yn, Zn) using the coordinate values of the device coordinate system, for example. Note that the three-dimensional shape data may be composed of surface information data generated based on point cloud data, or may include data in other formats such as polygon meshes. An image representing the three-dimensional shape of the measuring object S can be displayed based on the three-dimensional shape data. An image including the three-dimensional shape of the measurement object S displayed based on the three-dimensional shape data is hereinafter referred to as a three-dimensional shape image.

In this embodiment, the three-dimensional shape image is an image showing a state in which three-dimensional shape data is projected onto an arbitrary plane in which a two-dimensional coordinate system is defined. It is an image. The user can specify the plane on which the three-dimensional shape data is projected as the direction in which the measurement object S is viewed (the position of the light receiving unit 120 with respect to the measurement object S). As a result, the attitude (orientation) of the measuring object S represented by the three-dimensional shape image changes.

(2) Synthesis of Multiple 3D Shape Data If the position and orientation of the measurement object S with respect to the light projecting unit 110 and the light receiving unit 120 are constant, only a part of the measurement object S is irradiated with the measurement light. In addition, only the light reflected by a part of the measurement object S enters the light receiving section 120 . Therefore, three-dimensional shape data over a wide range of the surface of the measurement object S cannot be obtained. Therefore, by changing the position or posture of the measurement object S, the measurement object S is imaged from a plurality of mutually different directions, and a plurality of three-dimensional shape data corresponding to each of the plurality of imaging directions are acquired. A plurality of three-dimensional shape data may be synthesized.

FIG. 6 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by imaging the measuring object S from a plurality of directions. For example, as shown in FIG. 6A, after the user adjusts the position and orientation of the measurement object S on the stage 140, the measurement light is used to capture an image of the measurement object S, whereby the first Three-dimensional shape data is generated. An example of a three-dimensional shape image obtained by this is shown in FIG. 6(d). The three-dimensional shape data is generated based on the measurement light reflected by the surface of the measurement object S and incident on the light receiving unit 120 . Therefore, three-dimensional shape data is generated for the portion of the surface of the measurement object S that is visible from the position of the light receiving unit 120, but the portion of the surface of the measurement object S that is not visible from the position of the light receiving unit 120 is generated. 3D shape data cannot be generated for

Therefore, as shown in FIG. 6(b), after the stage 140 is rotated by a certain angle by the rotating mechanism 143 of FIG. is generated. In the example of FIG. 6(b), when the stage 140 is viewed from above, the stage 140 is rotated counterclockwise by about 45 degrees from the state of FIG. 6(a). An example of a three-dimensional shape image obtained by this is shown in FIG. 6(e). As described above, when the stage 140 rotates, the portion of the surface of the measurement object S that is visible from the position of the light receiving unit 120 and the portion that is not visible from the position of the light receiving unit 120 also change. As a result, three-dimensional shape data is generated that includes the portion that was not acquired at the time of the first imaging.

Further, as shown in FIG. 6C, after the stage 140 is rotated by a certain angle by the rotating mechanism 143 of FIG. is generated. In the example of FIG. 6(c), when the stage 140 is viewed from above, the stage 140 is rotated counterclockwise by about 45 degrees from the state of FIG. 6(b). An example of the three-dimensional shape image acquired by this is shown in FIG.6(f).

By repeating the rotation of the stage 140 and the imaging of the measurement object S in this manner, a plurality of three-dimensional shape data corresponding to a plurality of imaging directions are generated.

At the time of the above multiple imaging, the rotational position (rotational angle) of the stage 140 is detected by the CPU 210 in FIG. The positional relationship between the two light projecting units 110 and the two light receiving units 120 and the rotation axis Ax of the stage 140 is kept constant. Parameters representing these relative positions (hereinafter referred to as device parameters) are stored in advance in the storage device 240 of FIG. 1, for example. The device parameters are expressed, for example, in the device coordinate system.

In this case, based on the device parameters and the rotational position of the stage 140, the position data included in the plurality of three-dimensional shape data are represented by a virtual common three-dimensional coordinate system with a part of the stage 140 as a reference. In addition, coordinate transformation of each solid shape data can be executed.

In this example, as described above, a plurality of three-dimensional shape data are coordinate-transformed so as to be expressed in a common three-dimensional coordinate system, and the coordinate-transformed plurality of three-dimensional shape data are combined by pattern matching of overlapping portions. be done. As a result, three-dimensional shape data over a wide range of the outer surface of the object S to be measured is generated.

[3] Texture Image Data Representing Appearance of Measurement Object Image data representing the appearance (surface state) of the measurement object S (hereinafter referred to as texture image data) is generated in a state where the uniform measurement light is irradiated. Uniform measurement light is measurement light without a pattern and can be used instead of illumination light. Such measurement light is hereinafter referred to as uniform measurement light. The surface state of the measurement object S includes, for example, patterns or colors. An image represented by texture image data is hereinafter referred to as a texture image.

Various examples of texture image data will be described. For example, a plurality of pieces of texture image data may be acquired while the focus position of the light receiving unit 120 is changed relative to the object S to be measured. In this case, by synthesizing a plurality of texture image data, texture image data focused on the entire surface of the measurement object S (hereinafter referred to as omnifocal texture image data) is generated. Note that when generating omnifocal texture image data, the measurement unit 100 needs to be provided with a focus movement mechanism for moving the focus position of the light receiving unit 120 .

Also, a plurality of texture image data may be acquired under a plurality of different imaging conditions. The imaging conditions include, for example, the exposure time of the light receiving unit 120, the intensity (brightness) of illumination light from the illumination light output unit 130, the intensity (brightness) of uniform measurement light from the light projecting unit 110, and the like. In this case, by performing known high dynamic (HDR) synthesis using a plurality of acquired texture image data, texture image data in which blocked-up shadows and blown-out highlights are suppressed (hereinafter referred to as HDR texture image data). ) is generated.

Also, the imaging conditions may be changed as the focal position is changed. Specifically, the focus of the light receiving unit 120 is changed to a plurality of positions relative to the measurement object S, and the texture image data is acquired under a plurality of imaging conditions different from each other at each position. By synthesizing a plurality of acquired texture image data, texture image data in which the entire surface of the measurement object S is in focus and underexposure and overexposure are suppressed is generated.

Each texture image data includes texture information representing the color or brightness of each point of the measurement object S (information representing the optical surface state). On the other hand, the three-dimensional shape data described above does not include information on the optical surface state of the object S to be measured. Therefore, by synthesizing the three-dimensional shape data and any texture image data, textured three-dimensional shape data in which texture information is added to the three-dimensional shape data is generated.

The three-dimensional shape data with texture includes position data of a plurality of points on the surface of the measurement object S and data indicating the color or brightness of each point associated with the position data of each point. In this case, TPn (n is a natural number) is the data of an arbitrary point in the three-dimensional shape data with texture. , B) can be expressed as (Xn, Yn, Zn, Rn, Gn, Bn). Alternatively, TPn can be represented by (Xn, Yn, Zn, In) using the coordinate values of the device coordinate system and the luminance value (I), for example. The three-dimensional shape data with texture may be composed of surface information data generated based on the point cloud data.

In the following description, a texture image represented by texture image data acquired at a fixed focal position and imaging conditions is called a normal texture image, an image represented by omnifocal texture image data is called an omnifocal texture image, An image represented by HDR texture image data is called an HDR texture image. An image represented by textured three-dimensional shape data is called a textured three-dimensional shape image.

In this embodiment, the three-dimensional shape image with texture is an image showing a state in which the three-dimensional shape data with texture is projected onto an arbitrary plane in which a two-dimensional coordinate system is defined. It is an image for accepting. The user can specify the plane on which the three-dimensional shape data with texture is projected as the direction in which the measurement object S is viewed (the position of the light receiving unit 120 with respect to the measurement object S). As a result, the orientation of the measurement object S represented by the textured three-dimensional shape image changes.

As described above, the measurement object S is imaged using illumination light or uniform measurement light to generate texture image data. Here, as described above, the illumination light output section 130 has the illumination light exit opening 131 formed so as to surround the two light receiving sections 120 . With such a configuration, at least part of the illumination light emitted from the emission port 131 is applied to the measurement object S in a state substantially parallel to the optical axis of the light receiving section 120 . As a result, when the measurement object S is imaged using the illumination light, shadow components are less likely to occur in the generated texture image data. Therefore, it is preferable to use illumination light when generating texture image data.

Incidentally, as shown in the example of FIG. 6, in the case of generating a plurality of three-dimensional shape data by imaging the measurement object S from a plurality of directions, the imaging using the measurement light and the illumination light or the uniform measurement are performed. Imaging using light may be performed. In this case, it is possible to generate a plurality of texture image data respectively corresponding to a plurality of three-dimensional shape data. Therefore, by synthesizing a plurality of three-dimensional shape data and a plurality of texture image data, it is possible to generate textured three-dimensional shape data representing the three-dimensional shape and surface state over a wide range of the outer surface of the measurement object S. .

[4] Shape measurement (1) Preparation for shape measurement First, before the measurement object S is measured, the user prepares for shape measurement. FIG. 7 is a flow chart showing a procedure for preparing for shape measurement. The procedure for preparation for shape measurement will be described below with reference to FIGS. 1, 2 and 7. FIG. First, the user places the measuring object S on the stage 140 (step S1). Next, the user irradiates the measuring object S with measurement light from the light projecting unit 110 (step S2). At this time, a live image of the measuring object S is displayed on the display section 400 . Subsequently, the user adjusts the brightness of the acquired live image and the position and orientation of the measurement object S (hereinafter referred to as first adjustment) while viewing the live image displayed on the display unit 400 . ) is performed (step S3). The brightness of the live image acquired in step S3 can be adjusted by changing at least one of the amount of measurement light and the exposure time of the light receiving section 120 . In this embodiment, one of the light amount of the measurement light and the exposure time of the light receiving unit 120 is adjusted in order to make the brightness of the live image acquired using the measurement light suitable for observation.

In step S2, the measurement object S may be irradiated with any one of the first to fourth patterns of measurement light, or the measurement object S may be irradiated with uniform measurement light. In step S3, if there is no shadow at the location to be measured of the measurement object S (hereinafter referred to as a measurement location), the user does not need to adjust the position and orientation of the measurement object S. The amount of measurement light or the exposure time of the light receiving section 120 may be adjusted.

Next, the user stops irradiation of the measurement light and irradiates the measurement object S with the illumination light from the illumination light output unit 130 (step S4). At this time, a live image of the measuring object S is displayed on the display section 400 . Subsequently, the user adjusts the brightness of the acquired live image (hereinafter referred to as second adjustment) while viewing the live image displayed on the display unit 400 (step S5). The brightness of the live image acquired in step S5 can be adjusted by changing at least one of the amount of illumination light and the exposure time of the light receiving unit 120, basically in the same manner as in the example of step S3. In this embodiment, one of the light amount of the illumination light and the exposure time of the light receiving unit 120 is adjusted in order to make the brightness of the live image acquired using the illumination light suitable for observation.

Next, the user confirms the live image displayed on the display unit 400, and confirms that the light intensity, the exposure time of the light receiving unit 120, and the position and orientation of the measurement object S (hereinafter referred to as an observation state) are appropriate. It is determined whether or not (step S6). In step S6, the measuring object S may be irradiated with the measurement light, the illumination light may be irradiated, or the measurement light and the illumination light may be irradiated in order.

If it is determined in step S6 that the observation state is not appropriate, the user returns to the process of step S2. On the other hand, if it is determined in step S6 that the observation state is appropriate, the user ends preparations for shape measurement.

In the above example, the second adjustment is performed after the first adjustment, but the first adjustment may be performed after the second adjustment. In this case, the user adjusts the position and orientation of the measurement object S in the second adjustment, and confirms that the desired portion of the measurement object S is irradiated with the measurement light in the first adjustment. good too. If the desired portion of the measurement object S is not irradiated with the measurement light, the position and orientation of the measurement object S are readjusted, and again the amount of illumination light or the exposure time of the light receiving unit 120 is adjusted as the second adjustment. may be adjusted.

Here, during the second adjustment in step S5, the user may select the type of texture image to be acquired. Types of texture images include, for example, normal texture images, all-focus texture images, and HDR texture images. In this case, by performing the second adjustment, the optimal light amount condition of the illumination light or the exposure time condition of the light receiving unit 120 corresponding to the illumination light for generating the texture image data of the selected texture image is set. It may be set automatically.

(2) Shape Measurement Processing After the preparation for shape measurement in FIG. 7 by the user, the shape measurement processing of the measurement object S is performed. FIG. 8 is a flowchart of shape measurement processing. The shape measurement process is started by the CPU 210 of FIG. 1 executing the shape measurement program in response to the user's instruction to start the shape measurement process.

First, the CPU 210 irradiates the measuring object S with the measuring light and acquires pattern image data (step S41). The acquired pattern image data is stored in the working memory 230 .

Next, the CPU 210 generates three-dimensional shape data representing the three-dimensional shape of the measurement object S by processing the obtained pattern image data with a predetermined algorithm (step S42). The generated solid shape data is stored in the work memory 230 .

Next, the CPU 210 irradiates the measurement object S with illumination light or uniform measurement light, and acquires texture image data (step S43). The acquired texture image data is stored in the working memory 230 .

Next, the CPU 210 generates textured three-dimensional shape data by synthesizing the three-dimensional shape data generated in step S42 and the texture image data obtained in step S43 (step S44).

Here, before the shape measurement process is started, predetermined data generation conditions are stored in the storage device 240 of FIG. The data generation conditions include information about three-dimensional shape data to be generated in the shape measurement process. For example, as shown in the example of FIG. 6, in the case of synthesizing a plurality of three-dimensional shape data obtained by imaging from a plurality of directions to generate one three-dimensional shape data, a plurality of three-dimensional shape data are combined. It is necessary to rotate the stage 140 (FIG. 2) to generate it. Therefore, the rotational position of the stage 140 for each imaging, the rotational direction of the stage 140, the number of times of imaging, and the like are stored in the storage device 240 as data generation conditions.

After the process of step S44, the CPU 210 determines whether or not all imaging of the measurement object S has been completed based on preset generation conditions (step S45). If all imaging has not been completed, the CPU 210 rotates the stage 140 (FIG. 2) by a predetermined pitch based on the generation conditions (step S46), and returns to the process of step S41.

When all imaging is completed in step S45, the CPU 210 synthesizes a plurality of three-dimensional shape data generated by repeating the process of step S42 multiple times, and generates A plurality of three-dimensional shape data with texture are synthesized (step S47). Note that if the processes of steps S41 to S45 have been executed only once, the process of step S47 is omitted. In this way, three-dimensional shape data and textured three-dimensional shape data used for measurement of the measurement object S are generated.

Next, the CPU 210 causes the display unit 400 to display a three-dimensional shape image or textured three-dimensional shape image of the measuring object S based on the generated three-dimensional shape data or textured three-dimensional shape data (step S48). In this case, the user can appropriately select either the stereoscopic image or the textured stereoscopic image as the image to be displayed on the display unit 400 .

After that, the CPU 210 sets the measurement conditions in response to the user's operation of the operation unit 250 of FIG. 1, and measures the measurement points based on the set measurement conditions (step S49). The setting of measurement conditions will be described later. This completes the shape measurement process.

In the shape measurement process described above, the processes of steps S41 to S45, S47, and S48 are mainly executed by the shape data generator 211 shown in FIG. 34, which will be described later.

(3) Setting measurement conditions Measurement conditions include measurement locations and measurement items. When setting the measurement conditions, for example, a three-dimensional shape image is displayed on the display unit 400 by the process of step S48. The user can specify the direction in which the measurement object S is viewed (the position of the light receiving unit 120 with respect to the measurement object S) by operating the operation unit 250 in FIG. In this case, the CPU 210 adjusts the orientation of the observation object S on the display unit 400 in response to the direction specified by the user so that the state in which the measurement object S is viewed from the specified direction is reproduced. display the 3D shape image.

By visually recognizing the three-dimensional shape image, the user roughly grasps the shape of each part of the measurement object S and designates a measurement point on the three-dimensional shape image. The user can then specify the geometry that contains the measurement points (eg, points, lines, circles, surfaces, spheres, cylinders, cones, etc.) to specify the measurement points. The user can also specify measurement items for the specified geometric shape. A measurement item is a type of parameter to be measured at a measurement point of the measurement object S specified by the user, and includes distance, height, diameter, area, and the like.

9 to 12 are diagrams for explaining setting examples of measurement conditions. FIG. 9 shows an example of the three-dimensional shape image SI displayed on the display unit 400 in the process of step S48, regarding the measurement object S in which one element is mounted on the substrate. In the three-dimensional shape image SI of FIG. 9, images B1I and B2I respectively showing the substrate and the device of the object S to be measured are clearly distinguished.

For example, by operating a pointer PI displayed on the screen of the display unit 400, the user designates a portion of the image B2I corresponding to the top surface of the element as a measurement point, as shown in FIG. Next, by operating the pointer PI, the user designates the portion of the image B1I corresponding to the upper surface of the substrate as the measurement point, as shown in FIG.

Here, when setting the measurement conditions, it is preferable that the measurement location specified by the user is displayed in a manner different from other portions. In the examples of FIGS. 10 and 11, the measurement points specified by the user are hatched. Thereby, the user can easily identify the measurement point designated by the user.

Subsequently, the user designates the distance between the two measurement points (planes) designated as measurement items. Accordingly, the distance between the upper surface of the substrate and the upper surface of the element is calculated based on the point cloud data corresponding to the upper surface of the substrate and the point cloud data corresponding to the upper surface of the element. As a result, as shown in FIG. 12, the calculation result is displayed on the display unit 400 as the measurement result. In the example of FIG. 12, "zz (mm)" is displayed as the distance between the upper surface of the substrate and the upper surface of the element.

[5] Display mode setting function (1) Overview of display mode setting function The three-dimensional shape measuring device 500 measures using three-dimensional shape data or textured three-dimensional shape data obtained by the processing of steps S41 to S47 of the shape measurement processing. It has a display mode setting function for grasping the shape of each part of the object S more accurately.

The display mode setting function sets a geometric reference (hereinafter referred to as a geometric reference) regarding the three-dimensional shape of the measurement object S for which the three-dimensional shape data has been generated, and also sets the set geometric reference. This is a function of setting the display mode of at least a part of the three-dimensional shape image of the measuring object S based on. In the present embodiment, setting the display mode of at least part of the three-dimensional shape image means that the display mode of at least part of the three-dimensional shape image is changed from a predetermined original display mode to another determined based on geometric criteria. It means to switch to the display mode. In other words, setting the display mode of at least part of the three-dimensional shape image means that the display mode of at least part of the three-dimensional shape image is changed from a predetermined original display mode to another display mode determined based on geometric criteria. means to change to Furthermore, in other words, setting the display mode of at least part of the three-dimensional shape image means that the display mode of at least part of the three-dimensional shape image is changed from a predetermined original display mode to another display mode determined based on geometric criteria. It means to make a mode.

According to the display mode setting function, the display mode of a portion corresponding to at least a portion of the measurement object S in the three-dimensional shape image is changed to the distance between the at least a portion of the measurement object S and the set geometrical reference. (hereinafter referred to as contrast distance). In the present embodiment, a color corresponding to the comparison distance is set as the display mode.

A geometric reference is a geometric reference consisting of points, lines or planes expressed in the device coordinate system. Furthermore, in the display mode setting function, it is also possible to set a portion of the measurement object S (hereinafter referred to as a measurement target portion) for which the display mode is to be set. The part to be measured may be a part of the object S to be measured, or the whole object S to be measured.

(2) Example of use of display mode setting function A basic example of use of the display mode setting function will be described below. FIG. 13 is an external perspective view showing an example of the object S to be measured. The measurement object S in FIG. 13 has a structure in which a step is formed on the upper surface of a member having a substantially rectangular parallelepiped shape, and a depression that opens upward is formed in the center of the upper surface.

The upper surface includes an upper surface s11 and a lower surface s12 parallel to each other. The recess has a rectangular bottom surface s21 parallel to the upper surface s11 and the lower surface s12. A vertical surface s22 is formed from one side of the bottom surface s21 to the upper surface s11. An inclined surface s23 is formed from the other side opposite to one side of the bottom surface s21 to the lower surface s12. The vertical surface s22 is perpendicular to the bottom surface s21, and the inclined surface s23 is inclined with respect to the bottom surface s21. Furthermore, the measurement object S has one end face s31 and the other end face s32 that face each other in the longitudinal direction. The vertical surface s22, one end surface s31 and the other end surface s32 are parallel to each other.

14 to 25 are diagrams for explaining a usage example of the display mode setting function. In this example, for the measurement object S in FIG. 13, for example, in order to grasp the details of the positional relationship between the upper surface s11, the lower surface s12, the bottom surface s21, the vertical surface s22, and the inclined surface s23, the user has a display mode setting function. Suppose you use It is assumed that the three-dimensional shape data of the measuring object S shown in FIG. 13 is stored in advance in the storage device 240 shown in FIG.

In response to the user's instruction to use the display mode setting function, a geometric element setting screen SC1 is displayed on the display unit 400 of FIG. 1, as shown in FIG. The geometric element setting screen SC1 is a screen for the user to specify a geometric element (hereafter referred to as a geometric element) for specifying the geometric reference or the portion to be measured on the three-dimensional shape image SI. be.

In the geometric element setting screen SC1, the display area of the display section 400 is divided into a main display area ma and a sub-display area sa. In the geometric element setting screen SC1, the main display area ma and the sub display area sa are arranged side by side.

A stereoscopic image SI is displayed in the main display area ma. The user can change the orientation of the measurement object S in the stereoscopic image SI to a desired orientation by performing a drag operation or the like on the main display area ma.

An element type selection field es, a name input field f01, a return button b01, a setting button b02 and a display mode button b03 are displayed in the secondary display area sa. A plurality of item icons ic respectively corresponding to the types of a plurality of geometric elements are displayed in the element type selection column es. Types of geometric elements include planes, cylinders, cones, spheres and points.

In this example, the user sets the geometric element by designating the type of geometric element, the position of the element to be set on the apparatus coordinate system, and the name. Specifically, the user designates the element type by operating one of a plurality of item icons ic displayed in the element type selection field es. At this time, the designated item icon ic is highlighted, for example. In the example of FIG. 14, hatching indicates that the item icon ic corresponding to the plane is highlighted by operating the item icon ic.

Next, the user inputs a desired name for the element to be set in the name input field f01. A name may be automatically entered in the name input field f01 according to a predetermined method according to the type of the specified element.

Furthermore, the user designates the position of the element on the three-dimensional shape image SI displayed in the main display area ma. For example, the user designates a plurality of portions on the three-dimensional shape image SI corresponding to three or more portions of the measurement object S by a single-click operation while a plane is designated as the element type. In this case, the position and size of a plane on the apparatus coordinate system defined by three or more portions of the measurement object S are determined. A plane on the device coordinate system defined by three or more portions may be a plane including the plurality of portions or a plane fitted to the plurality of portions.

Alternatively, the user designates a portion on the three-dimensional shape image SI corresponding to a desired planar portion of the measurement object S by double-clicking in a state where a plane is designated as the element type. In this case, the position and size of the plane on the apparatus coordinate system corresponding to the plane portion of the measurement object S are determined.

The return button b01 is a button for the user to instruct cancellation of use of the display mode setting function. The user operates the return button b01 while the geometric element setting screen SC1 is displayed on the display unit 400. FIG. As a result, the display state of the display unit 400 returns to the state during normal shape measurement (for example, the states shown in FIGS. 9 to 12).

The setting button b02 is a button for the user to command the setting of geometric elements. As described above, the user operates the setting button b02 after specifying the type of geometric element, the position of the element to be set on the device coordinate system, and the name. As a result, the specified series of contents are stored in the storage device 240 of FIG. 1 for each geometric element (geometric element setting).

When setting the geometric elements, as indicated by dotted lines and hatching in FIG. 15, an image showing the set geometric elements is superimposed and displayed on the three-dimensional image SI in the main display area ma. Thereby, the user can easily grasp the geometric elements set by the user. In this example, the geometric elements “plane 1,” “plane 2,” and “plane 0” respectively correspond to the upper surface s11, lower surface s12, bottom surface s21, vertical surface s22, and inclined surface s23 of the measurement object S in FIG. , “plane 3” and “plane 4” are set.

The display mode button b03 is a button for the user to command the setting of the display mode according to the comparison distance for the three-dimensional shape image SI displayed in the main display area ma. The setting of the display mode according to the contrast distance is performed based on one or more geometric elements set on the geometric element setting screen SC1.

After setting the desired geometric element, the user operates the display mode button b03. As a result, as shown in FIG. 16, the screen displayed on the display unit 400 is switched from the geometric element setting screen SC1 to the display mode setting screen SC2. In the display mode setting screen SC2, similarly to the example of the geometric element setting screen SC1, the display area of the display section 400 is divided into the main display area ma and the sub display area sa.

Immediately after the screen is switched, the display state of the main display area ma is maintained in the display state before the switching. On the other hand, the sub-display area sa displays a correspondence setting field dc, a target pull-down menu m11, a reference pull-down menu m12, a return button b04, an OK button b05, and a geometric element button b06.

As described above, in the display mode setting function according to the present embodiment, as the display mode of the portion corresponding to at least part of the measurement object S in the three-dimensional shape image, the color is set according to the comparison distance. will be Buttons, sliders, and the like for setting the correspondence between the comparison distance and the color are displayed in the correspondence setting field dc.

Specifically, a color display bar 411, a distance reference adjustment bar 412, a color range adjustment bar 413, an other setting button 414, and an automatic correspondence setting button 415 are displayed in the correspondence setting field dc.

In the color display bar 411, a plurality of types of colors that can be displayed in the stereoscopic image SI are displayed in an arrangement according to the comparison distances associated in advance as a plurality of types of display modes. In predetermined drawings after FIG. 16, different types of dot patterns are shown instead of the multiple types of colors displayed in the three-dimensional shape image SI. The color display bar 411 shown in FIG. 16 shows six types of dot patterns with different densities in stages. These dot patterns represent, for example, blue, light blue, green, yellow, orange, and red in order from darkest to lightest. A color located in the center of the colors arranged in spectral order on the color display bar 411 is called a reference color.

Distance reference adjustment bar 412 includes a slider. By operating the slider of the distance reference adjustment bar 412, the user can set the reference value of the contrast distance (hereinafter referred to as the reference color distance) corresponding to the reference color. For example, when a horizontal plane is set as the geometric reference and the reference color distance is set to 10.00 mm, when the measurement target portion is 10.00 mm above the plane, the measurement target portion The image will be represented in the reference colors.

Color range adjustment bar 413 includes sliders. By operating the slider of color range adjustment bar 413 , the user can set the range of contrast distances to be represented by a plurality of types of colors displayed on color display bar 411 . For example, when 5.00 mm is set as the range of the comparison distance, any color displayed on the color display bar 411 is associated with a range of ±5.00 mm centered on the reference color distance.

The correspondence automatic setting button 415 is a button for the user to instruct that the correspondence relationship between the comparison distance and the display mode (color in this example) should be automatically set. When the geometric reference and the portion to be measured are set by operating the object pull-down menu m11 and the reference pull-down menu m12, which will be described later, the comparison distance is calculated based on the three-dimensional shape data of the object S to be measured. When the corresponding automatic setting button 415 is operated, the reference value and expression of the comparison distance are set so that the calculated minimum and maximum values of the comparison distance are displayed in at least one of the colors displayed on the color display bar 411. The range of comparison distances to be used is automatically set by the CPU 210 of FIG.

The other setting button 414 is a button for performing settings related to handling of the contrast distance with respect to the geometric reference, color reversal, and correction of the contrast distance. When the other setting button 414 is operated, the other setting window SW shown in FIG. 17 is displayed on the display mode setting screen SC2. Three check boxes 421, 422, and 423 are displayed in the other setting window SW.

When a plane is set as the geometric reference, the contrast distance from the plane to the portion of the measurement object S is normally calculated as a positive or negative value with respect to the plane. Therefore, for example, when the reference color distance is set to 10.00 mm and the contrast distance range is set to 5.00 mm, as shown by hatching in FIG. Only the contrast distance calculated as a positive value is associated with the color displayed on the color display bar 411 .

On the other hand, when a plane is set as the geometric reference, the absolute value of the distance calculated from the plane to the measurement object S is taken as the comparison distance. In this case, the color displayed in the color display bar 411 is associated with the comparison distance calculated as a positive value with respect to the plane, and the comparison distance originally calculated as a negative value is also associated with the color display bar. A color represented by 411 is associated. Therefore, for example, when the reference color distance is set to 10.00 mm and the contrast distance range is set to 5.00 mm, as shown by hatching in FIG. Colors represented by the color display bar 411 are associated with the comparison distances calculated in the range of 5.00 mm to 15.00 mm and the range of -15.00 mm to -5.00 mm.

Thus, the check box 421 is used to set whether or not to convert the calculated contrast distance into an absolute value and use it when a plane is set as the geometric reference.

Checkbox 422 is used to reverse the color correspondence to the pre-associated contrast distance when a plane is set as the geometric reference.

A check box 423 is used to correct the calculated contrast distance when the cone axis (central axis) is set as the geometric reference. Correction of the contrast distance performed by checking the check box 423 is called cone correction. Details of the cone correction will be described later.

The target pull-down menu m11 in FIG. 16 is used when the user designates a geometric element (hereinafter referred to as a target element) for specifying the measurement target portion. In the object pull-down menu m11, one or more preset geometric elements are displayed in response to the user's operation. Furthermore, the set combination of one or more geometric elements and the like are displayed. Thereby, the user can designate a desired target element by operating the target pull-down menu m11. In the target pull-down menu m11, the entire measurement target S may be displayed as a target element candidate in response to the user's operation.

The reference pull-down menu m12 is used when the user designates a geometric element (hereinafter referred to as a reference element) for specifying the geometric reference. In the reference pull-down menu m12, one or more preset geometric elements are displayed in response to the user's operation. Additionally, geometric elements that have a unique relationship to the configured geometric element are displayed. For example, when a cylindrical geometric element is set in advance, the axis (central axis) of the cylinder and the like are displayed. Further, when geometric elements of two planes parallel to each other are set in advance, a plane (middle plane) located between the two planes is displayed. Thereby, the user can designate a desired reference element by operating the reference pull-down menu m12.

The return button b04 is, like the return button b01 in FIG. 14, a button for the user to instruct cancellation of use of the display mode setting function. The geometric element button b06 is a button for the user to command setting of a new geometric element. When the user wants to set a new geometric element while the display mode setting screen SC2 is displayed, the user operates the geometric element button b06. As a result, the screen displayed on the display unit 400 switches from the display mode setting screen SC2 to the geometric element setting screen SC1 again.

The OK button b05 is a button for the user to issue a command to apply the display mode set in the correspondence setting field dc to the portion of the three-dimensional shape image SI corresponding to the portion to be measured. After setting the correspondence between the distance and the color, specifying the target element, and specifying the reference element, the user operates the OK button b05. As a result, the color of the portion of the three-dimensional shape image SI corresponding to the measurement target portion is changed to a color corresponding to the contrast distance based on the set correspondence relationship, designated target element, and reference element.

In FIG. 19, the geometric element "plane 0" in FIG. 15 is designated as the reference element, and the geometric elements "plane 0", "plane 1", "plane 2", "plane 3" and "plane 3" in FIG. 15 are designated as the target elements. A display example of the three-dimensional shape image SI when "plane 4" (all of the set geometric elements) is specified and the OK button b05 is operated is shown.

As described above, the upper surface s11, the lower surface s12 and the bottom surface s21 corresponding to the geometric elements "plane 1", "plane 2" and "plane 0" in the measurement object S of FIG. 13 are parallel to each other. As a result, in the stereoscopic image SI, the image of each portion specified by the geometric elements "plane 1", "plane 2" and "plane 0" is displayed in a single color.

On the other hand, in the measurement object S of FIG. 13, the vertical plane s22 corresponding to the geometric element "plane 3" is perpendicular to the bottom surface s21, and the inclined plane s23 corresponding to the geometric element "plane 4" is perpendicular to the bottom surface s21. Inclined. As a result, in the stereoscopic image SI, the images of the portions specified by the geometric elements "plane 3" and "plane 4" are displayed in a plurality of colors arranged in one direction.

In this state, as shown in FIGS. 20 and 21, the user can change the posture of the measuring object S in the stereoscopic image SI. This makes it possible to easily grasp the positional relationship of each part of the measurement object S when the geometric element "plane 0" is used as a reference from a plurality of viewpoints different from each other.

19 to 21, the user operates the other setting button 414 and checks the check box 422 in FIG. 17 to reverse the previously associated color correspondence with the contrast distance. can be done. In this case, as shown in FIG. 22, the plurality of colors displayed on the color display bar 411 are inverted with respect to the plurality of colors displayed on the color display bar 411 of FIG. 19 with respect to the reference color. Further, the color of the portion corresponding to the measurement target portion of the three-dimensional shape image SI changes according to the inverted correspondence relationship.

By the way, in the examples of FIGS. 19 to 21, the portions corresponding to the portions specified by the geometric elements “plane 1,” “plane 2,” and “plane 0” in the three-dimensional shape image SI are displayed in a single color. be. In this case, the user visually recognizes the three-dimensional shape image SI to see the upper surface s11 and the lower surface s12 of the measurement object S corresponding to the geometric elements "plane 1", "plane 2" and "plane 0", respectively. and the bottom surface s21 are parallel to each other.

However, in the examples of FIGS. 19 to 21, portions of the three-dimensional image SI corresponding to the portions specified by the geometric elements “plane 3” and “plane 4” are displayed in multiple colors. In this case, even if the user visually recognizes the three-dimensional shape image SI, the user cannot confirm whether the inclined surface s23 and the vertical surface s22 of the measurement object S corresponding to the geometric elements "plane 3" and "plane 4" are parallel to each other. It is difficult to grasp whether or not

In such a case, the user can set a new geometric element by operating the geometric element button b06. For example, as shown in FIG. 23, the geometric elements “plane 3” and “plane 4” are reset, and the geometric elements corresponding to the one end surface s31 and the other end surface s32 of the measurement object S in FIG. 13, respectively. "Plane 5" and "Plane 6" are newly set.

In this case, as shown in FIG. 24, the user operates the reference pull-down menu m12 on the display mode setting screen SC2 to specify the middle planes of the geometric elements “plane 5” and “plane 6” as reference elements. be able to.

The vertical plane s22 of the measuring object S is parallel to the virtual plane specified by the middle planes of the geometric elements "plane 5" and "plane 6", and the inclined plane s23 is inclined. Therefore, when the OK button b05 is operated in a state in which the middle planes of the geometric elements "plane 5" and "plane 6" are specified as the reference elements, the geometric elements in the three-dimensional shape image SI are displayed as shown in FIG. A portion corresponding to the portion specified by "Plane 3" is displayed in a single color. On the other hand, as shown in FIG. 24, the portion of the three-dimensional shape image SI corresponding to the portion specified by the geometric element "plane 4" is displayed in a plurality of colors arranged in one direction. 24 and 25, the user can see the inclined surface s23 and vertical surface s22 of the measurement object S corresponding to the geometric elements "plane 3" and "plane 4". It can be easily grasped that they are not parallel to each other.

24 and 25, the user operates the other setting button 414 and checks the check box 421 in FIG. Distances can be displayed in colors of the same correspondence. Thereby, the user can easily compare the distance from the central portion of the measurement object S in the longitudinal direction to the vertical surface s22 and the distance from the central portion of the measurement object S in the longitudinal direction to the inclined surface s23. can be done.

(3) Other Usage Examples of Display Mode Setting Function FIGS. 26 to 30 are diagrams for explaining other usage examples of the display mode setting function. In this example, a paper cup without a handle will be described as the object S to be measured. With the geometric element setting screen SC1 displayed on the display unit 400, the geometric elements "cone 1" and "plane 10" are set as shown in FIG. The geometric element "cone 1" corresponds to the entire side surface (peripheral surface) of the object S to be measured, and the geometric element "plane 10" corresponds to a virtual plane closing the open end of the object S to be measured.

After that, while the display mode setting screen SC2 is displayed on the display unit 400, as shown in FIG. Specified as the target element. In this case, the three-dimensional shape image SI including the display mode according to the contrast distance is displayed with the geometric element "plane 10" as a reference.

According to the three-dimensional shape image SI shown in FIG. It is not possible to grasp the bulge or dent that occurred in the

Therefore, as shown in FIG. 28, the axis (central axis) of the geometric element "cone 1" is specified as the reference element, and the set geometric element "cone 1" is specified as the target element. As a result, in the three-dimensional image SI, the portion indicating the side surface of the measurement object S is displayed in a color corresponding to the contrast distance with the axis of the geometric element "cone 1" as a reference. The comparison distance in this example is the distance from the central axis of the measuring object S to the side surface. Therefore, according to the three-dimensional shape image SI of FIG. 28, it is easier to grasp that there is a local shape change portion on the side surface of the measurement object S compared to the three-dimensional shape image SI of FIG.

Here, the user can perform the above cone correction by operating the other setting button 414 in the display state of FIG. 28 and checking the check box 423 of FIG. Conical correction will be explained.

The sides of an ideal cone have a constant slope with respect to the direction in which the axis of the cone extends. In this case, as shown in FIG. 29(a), the length of the perpendicular line pl extending from the axis ax of the cone to the side surface of the cone increases at a constant rate as the distance from the vertex pp increases. Therefore, in the three-dimensional shape image SI in which the display mode is set using the axis of the cone as the geometric reference and the side surface of the cone as the target element, a color change component due to the shape of the cone appears in the direction of the axis of the cone.

Therefore, in the cone correction, the contrast distance is corrected so as to remove the color change component caused by the shape of the cone. Specifically, as shown in FIG. 29(b), a reference position α is defined on the axis ax of the conical geometric element that has been set. Further, the length d2 of the perpendicular from the axis ax to the side at an arbitrary position β on the axis ax is aligned with the length d1 of the perpendicular from the axis ax to the side at the reference position α. Find the arithmetic expression according to the position. Based on the arithmetic expression calculated in this way, the actually calculated comparison distance is corrected.

The contrast distance after the above correction shows a constant value because the portion to be measured has an ideal conical shape. On the other hand, if the portion to be measured locally deviates from the ideal conical shape, the value will show a large variation.

As a result, in the three-dimensional shape image SI whose display mode is set based on the contrast distance after cone correction, as shown in FIG. Therefore, the user can accurately grasp the presence of the local shape change portion on the side surface of the measurement object S as well as the shape thereof. According to the example of FIG. 30, it can be seen that a local bulge occurs on a part of the side surface of the object S to be measured.

(4) Still Another Usage Example of Display Mode Setting Function FIGS. 31 to 33 are diagrams for explaining still another usage example of the display mode setting function. In this example, a light bulb will be described as the measuring object S. As shown in FIG. With the geometric element setting screen SC1 displayed on the display unit 400, the geometric elements "sphere 1" and "plane 11" are set as shown in FIG. The geometric element "sphere 1" corresponds to the entire bulb of the object S to be measured, and the geometric element "plane 10" corresponds to an imaginary plane near the lower end of the base of the object S to be measured and perpendicular to the central axis of the bulb.

After that, while the display mode setting screen SC2 is displayed on the display unit 400, as shown in FIG. Specified as the target element. In this case, in the three-dimensional shape image SI, the portion showing the entire valve of the measurement object S is displayed in a color corresponding to the comparison distance with the geometric element "plane 11" as a reference.

According to the three-dimensional shape image SI shown in FIG. 32, a plurality of types of colors shown in the color display bar 411 are displayed side by side in the portion indicating the bulb of the measurement object S. It is not possible to grasp the bulge or dent that occurred on the outer surface of the

Therefore, as shown in FIG. 33, the center of the geometric element "sphere 1" is specified as the reference element, and the entire outer surface of the bulb of the measurement object S specified by the geometric element "sphere 1" is specified as the target element. be done. In this case, in the three-dimensional shape image SI, the portion showing the entire bulb of the measurement object S is displayed in a color corresponding to the contrast distance with the center of the geometric element "sphere 1" as a reference. The comparison distance in this example is the distance from the center of the bulb of the measuring object S to the outer surface of the bulb. Therefore, according to the three-dimensional shape image SI of FIG. 33, the presence of a local shape change portion on the outer surface of the valve of the measurement object S can be accurately grasped together with the shape thereof, compared to the three-dimensional shape image SI of FIG. be able to.

(5) Functional Configuration of CPU 210 for Implementing Display Mode Setting Function FIG. 34 is a functional block diagram of the CPU 210 for implementing the display mode setting function according to one embodiment of the present invention. As shown in FIG. 34 , CPU 210 includes shape data generator 211 , display controller 212 , specifier 213 , element receiver 214 and correspondence setter 215 . These components are implemented by CPU 210 executing a display mode setting program stored in storage device 240 . A part or all of the plurality of components included in CPU 210 may be realized by hardware such as an electronic circuit.

The shape data generation unit 211 generates point cloud data representing the three-dimensional shape of the measurement object S as three-dimensional shape data based on the light reception signal output from the light receiving unit 120 , and stores the three-dimensional shape data in the storage device 240 . The display control unit 212 causes the display unit 400 to display an image including the three-dimensional shape of the measurement object S as a three-dimensional shape image SI based on the three-dimensional shape data stored in the storage device 240 so that the posture can be changed. Further, the display control unit 212 sets the display mode of the portion corresponding to the measurement target portion in the three-dimensional image SI based on the correspondence set by the correspondence setting unit 215, which will be described later. Furthermore, the display control unit 212 causes the display unit 400 to display the stereoscopic image SI including the set display mode.

The element accepting unit 214 accepts designation of geometric elements on the three-dimensional shape image SI displayed on the display unit 400 based on the operation of the operating unit 250 by the user. Further, the element accepting unit 214 accepts designation of a reference element and a target element using the set geometric elements based on the operation of the operation unit 250 by the user.

The specifying unit 213 specifies a geometric reference regarding the three-dimensional shape of the measurement object S as a geometric reference based on the reference element received by the element receiving unit 214 . Further, the identifying unit 213 identifies the measurement target portion of the measurement object S for which the display mode should be set based on the target element received by the element receiving unit 214 .

The correspondence setting unit 215 sets the correspondence between the comparison distance and the color (display mode) based on the operation of the operation unit 250 by the user. Note that the correspondence setting unit 215 may set the correspondence between the comparative distance and the color based on the distance between the three-dimensional shape data of the measurement target portion specified by the specifying unit 213 and the geometric reference. For example, the correspondence setting unit 215 may set the correspondence between the comparative distance and the color such that the calculated minimum value and maximum value of the comparative distance are displayed in different kinds of colors.

(6) Display Mode Setting Process FIG. 35 is a flow chart showing the basic flow of the display mode setting process based on the display mode setting program. In this example, in the initial state, the three-dimensional shape data of the measuring object S is generated in advance by the shape data generation unit 211 shown in FIG. 34 and stored in the storage device 240 shown in FIG.

The display mode setting process is started in response to a user's instruction to use the display mode setting function. When the display mode setting process is started, the display control unit 212 in FIG. 34 reads the three-dimensional shape data of the measuring object S stored in the storage device 240 (step S11). Further, the display control unit 212 causes the display unit 400 in FIG. 1 to display a three-dimensional shape image SI of the measurement object S based on the read three-dimensional shape data (step S12).

Next, the element reception unit 214 in FIG. 34 receives designation of geometric elements on the three-dimensional shape image SI displayed on the display unit 400 (step S13). In this case, information indicating the accepted geometric elements is stored in storage device 240 .

Next, the element receiving unit 214 receives designation of a reference element using the designated geometric element (step S14). Therefore, the identifying unit 213 in FIG. 34 identifies the geometric reference for shape measurement of the measurement object S based on the reference elements received by the element receiving unit 214 (step S15). In this case, information indicative of the identified geometric criteria is stored in storage device 240 .

Next, the element reception unit 214 receives designation of the target element using the set geometric element (step S16). Therefore, the identifying unit 213 in FIG. 34 identifies the measurement target portion of the measurement object S based on the target element received by the element receiving unit 214 (step S17). In this case, information indicating the identified measurement target portion is stored in the storage device 240 .

Next, the correspondence setting unit 215 in FIG. 34 sets the correspondence between the comparison distance and the color (display mode) based on the operation of the operation unit 250 by the user (step S18).

After that, the display control unit 212 sets the color of the portion corresponding to the measurement target portion in the three-dimensional shape image SI based on the correspondence set by the correspondence setting unit 215, and includes the color corresponding to the comparison distance. The three-dimensional shape image SI is displayed on the display unit 400 (step S19). This completes the display mode setting process.

The series of processes of steps S14 to S19 is performed by operating the OK button b05 of the display mode setting screen SC2, for example.

In the display mode setting process of FIG. 35, for example, after the process of step S19, the processes after step S13 may be performed again in response to the operation of the operation unit 250 by the user. In this case, the three-dimensional shape image SI including the new display mode is displayed on the display unit 400 in the process of step S19 that is performed again.

[6] Effect In three-dimensional shape measuring apparatus 500 according to the present embodiment, three-dimensional shape data of measurement object S is generated, and three-dimensional shape image SI based on the generated three-dimensional shape data is displayed on display unit 400. be. One or more geometric elements are designated on the solid image SI based on the user's operation of the operation unit 250 . A specification of a reference element is further received using any of the specified geometric elements, and a geometric reference is specified based on the reference element. In addition, specification of a target element is further accepted using one of the specified geometric elements, and a measurement target portion is specified based on the target element. The display mode of the portion of the stereoscopic image SI corresponding to the measurement target portion is set according to the comparison distance between the measurement target portion and the geometric reference. A three-dimensional shape image SI including a display mode corresponding to the comparison distance is displayed on the display unit 400 . As a result, the user can easily and intuitively understand the relationship between the desired geometric reference and the shape of the desired portion of the measurement object S by visually recognizing the three-dimensional shape image SI including the display mode corresponding to the comparison distance. be able to comprehend.

Further, in the three-dimensional shape measuring apparatus 500 according to the present embodiment, the light projecting units 110A and 110B, the light receiving units 120A and 120B, and the stage 140 are integrally provided. The positional relationship with is uniquely defined. Therefore, it is possible to obtain point cloud data as three-dimensional shape data with high accuracy. Therefore, the shape of the measurement object S can be measured with high accuracy based on the three-dimensional shape data.

[7] Other Embodiments (1) Parallel Plane Extraction Function The three-dimensional shape measuring apparatus 500 may have a parallel plane extraction function for assisting the user in setting geometric elements. The parallel plane extraction function of this example extracts a plane portion of the measurement object S parallel to the set geometric element based on the three-dimensional shape data when a plane geometric element is set, and extracts the extracted plane portion is superimposed on the three-dimensional shape image SI.

36 and 37 are diagrams showing an example of the geometric element setting screen SC1 for explaining the parallel plane extraction function. In the geometric element setting screen SC1 of this example, the three-dimensional shape image SI of the measuring object S in FIG. 13 is displayed in the main display area ma. In the three-dimensional shape measuring apparatus 500 having a parallel plane extraction function, a parallel plane extraction button b11 is displayed in the sub-display area sa of the geometric element setting screen SC1.

For example, as shown in FIG. 36, the user operates the parallel plane extraction button b11 after setting the geometric element "plane 0" corresponding to the bottom surface s21 of the measurement object S in FIG. In this case, based on the three-dimensional shape data of the measurement object S, the CPU 210 determines the portion of the measurement object S that has parallelism within a predetermined range with respect to the geometric element “plane 0” set immediately before. (hereinafter referred to as a parallel portion) exists. If there is a parallel portion, the CPU 210 extracts the 3D shape data of the parallel portion from the 3D shape data of the object S to be measured.

In this case, the CPU 210 may or may not extract the portion of the measurement object S corresponding to the reference geometric element “plane 0”. In this example, the CPU 210 does not extract the portion of the measurement object S corresponding to the geometric element "plane 0".

Further, the CPU 210 superimposes an extraction image showing the extracted parallel portion on the three-dimensional shape image SI, as shown in FIG. 37, based on the extracted three-dimensional shape data. In the example of FIG. 37, extracted images are superimposed and displayed on portions corresponding to the upper surface s11 and the lower surface s12 of the measurement object S in FIG. 13 in the three-dimensional shape image SI. The extracted image is displayed in a manner (for example, color) distinguishable from the set geometric elements.

Further, on the stereoscopic image SI, a name is attached to each extracted image so that the parallel portion can be individually identified. In the example of FIG. 37, two extracted images are named "extraction e1" and "extraction e2", respectively.

In this state, the user selects a desired extracted image on the solid shape image SI and operates the setting button b02 to set a new geometric element based on the parallel portion corresponding to the selected extracted image. can do. The user can also select a desired extraction image on the stereoscopic image SI and delete the extraction image.

Note that the geometric element that serves as a reference for extracting parallel portions need not be set immediately before the parallel plane extraction button b11 is operated, and may be selected by the user from a plurality of set geometric elements.

(2) Vertical Plane Extraction Function The three-dimensional shape measuring apparatus 500 may have a vertical plane extraction function for assisting the user in setting geometric elements. The vertical plane extraction function of this example extracts a plane portion of the measurement object S perpendicular to the set geometric element based on the three-dimensional shape data when a plane geometric element is set, and extracts the extracted plane portion is superimposed on the three-dimensional shape image SI.

38 and 39 are diagrams showing an example of the geometric element setting screen SC1 for explaining the vertical plane extraction function. In the geometric element setting screen SC1 of this example, a three-dimensional shape image SI of the measurement object S made of electronic components is displayed in the main display area ma. In the three-dimensional shape measuring device 500 having a vertical plane extraction function, a vertical plane extraction button b12 is displayed in the secondary display area sa of the geometric element setting screen SC1.

Here, it is assumed that the electronic component, which is the object to be measured S in this example, has a substantially rectangular package that accommodates an integrated circuit. A plurality of strip-shaped leads are led out from the inside of the package on each side of the package. A plurality of strip-shaped leads are arranged in the longitudinal direction of the package. Each strip lead is bent to extend downward from both sides of the package. It is assumed that the vertically extending portion of each strip-shaped lead is substantially perpendicular to the upper surface of the package.

For example, as shown in FIG. 38, the user operates the vertical plane extraction button b12 after setting the geometric element "plane 50" corresponding to the upper surface of the electronic component package. In this case, based on the three-dimensional shape data of the measurement object S, the CPU 210 determines the portion of the measurement object S that has a degree of perpendicularity within a predetermined range with respect to the geometric element “plane 50” set immediately before. (hereafter referred to as the vertical portion) exists. If a vertical portion exists, the CPU 210 extracts the 3D shape data of the vertical portion from the 3D shape data of the object S to be measured.

Furthermore, the CPU 210 superimposes an extracted image showing the extracted vertical portion on the three-dimensional shape image SI, as shown in FIG. 39, based on the extracted three-dimensional shape data. In the example of FIG. 39, extracted images are superimposed and displayed on portions corresponding to the outer surfaces of a plurality of strip-shaped leads of the electronic component in the three-dimensional shape image SI. The extracted image is displayed in a manner (for example, color) distinguishable from the set geometric elements.

Further, on the three-dimensional shape image SI, a name is attached to each extracted image so that the vertical portion can be individually identified. In the example of FIG. 39, 14 extracted images are given names of "extraction e1" to "extraction e14".

In this state, the user selects a desired extracted image on the stereoscopic image SI and operates the setting button b02 to set a new geometric element based on the vertical portion corresponding to the selected extracted image. can do. The user can also select a desired extraction image on the stereoscopic image SI and delete the extraction image.

Note that the reference geometric element for extracting the vertical portion need not be set immediately before the parallel plane extraction button b11 is operated, and may be selected by the user from a plurality of already set geometric elements.

(3) Area Extraction Function The three-dimensional shape measuring apparatus 500 may have an area extraction function for assisting the user in setting geometric elements. The region extracting function of this example extracts a planar portion of the measurement object S located in the selected region based on the three-dimensional shape data when a specific region is selected on the three-dimensional shape image SI by the user. and superimposes an extracted image showing the extracted planar portion on the three-dimensional shape image SI.

40 and 41 are diagrams showing an example of the geometric element setting screen SC1 for explaining the region extracting function. In the geometric element setting screen SC1 of this example, similarly to the examples of FIGS. 38 and 39, the main display area ma displays a three-dimensional shape image SI of the measurement object S made of electronic components. The electronic components that serve as the measurement object S in this example are the same as the electronic components of the measurement object S shown in FIGS. 38 and 39 . In the three-dimensional shape measuring device 500 having an area extraction function, an area extraction button b13 is displayed in the sub-display area sa of the geometric element setting screen SC1.

For example, after operating the region extraction button b13, the user selects a desired region on the three-dimensional shape image SI as indicated by a thick dashed line in FIG. Selection of this region is performed by the user, for example, by single-clicking a plurality of portions on the stereoscopic image SI.

In this case, based on the three-dimensional shape data of the measurement object S, the CPU 210 selects a planar portion of the measurement object S corresponding to the image within the selected region and having a size equal to or greater than a predetermined size (hereinafter referred to as an intra-region portion). ) exists. If there is a portion inside the region, the CPU 210 extracts the three-dimensional shape data for the inside of the region from the three-dimensional shape data of the object S to be measured.

Furthermore, the CPU 210 superimposes an extracted image showing the extracted inner region on the three-dimensional shape image SI based on the extracted three-dimensional shape data, as shown in FIG. In the example of FIG. 41, extracted images are superimposed and displayed on portions of the three-dimensional shape image SI that are positioned within a region selected by the user and correspond to the outer surfaces of a plurality of strip-shaped leads of the electronic component.

Further, on the three-dimensional shape image SI, a name is attached to each extracted image so that the inner portion of the region can be individually identified. In the example of FIG. 39, seven extracted images are given names of "extraction e1" to "extraction e7", respectively.

In this state, the user selects a desired extraction image on the solid shape image SI and operates the setting button b02 to create a new geometric element based on the region inside part corresponding to the selected extraction image. can be set. The user can also select a desired extraction image on the stereoscopic image SI and delete the extraction image.

(4) Template Setting Function The three-dimensional shape measuring apparatus 500 may have a template setting function for assisting the user in designating geometric elements, reference elements, and target elements. The template setting function of this example is such that when shape measurements of the same content are sequentially performed on a plurality of measurement objects S having the same shape, various operations performed on one measurement object S are performed on other measurement objects. This function automatically reproduces S.

In the template setting function, the measurement object S to be used as a reference is determined in advance by the user. Hereinafter, the measurement object S used as a reference will be referred to as a reference object. The user operates the operation unit 250 to generate three-dimensional shape data, specify geometric elements, specify reference elements, specify target elements, and the like for the reference object. In this case, the CPU 210 stores, as template information, operation procedures for designating the geometric element, designating the reference element, and designating the target element for the reference object based on the user's operation of the operation unit 250 .

After that, the user generates three-dimensional shape data for another measurement object S having the same shape as the reference object, and then issues an instruction to use the template setting function. In this case, the CPU 210 designates, for the other measurement object S, geometric elements corresponding to the geometric elements designated for the reference object, based on the stored template information. Further, the CPU 210 designates, for another measurement object S, reference elements and target elements corresponding to the reference elements and target elements designated for the reference object, based on the template information.

Accordingly, after specifying the geometric element, the reference element, and the target element for the reference object, the user can measure the other measurement object S having the same shape without repeating the same operation. It is possible to confirm, for example, the solid shape image SI in which the color of the target portion is represented in a color corresponding to the contrast distance. Therefore, the convenience of the three-dimensional shape measuring device 500 is improved.

By the way, in order to effectively use the template setting function, it is necessary to accurately grasp the positional relationship between the three-dimensional shape data of the reference object and the three-dimensional shape data of the other measurement object S. For example, when the orientation of the reference object and the orientation of the other measurement object S at the time of generating the three-dimensional shape data are significantly different from each other, it is possible to specify appropriate geometric elements using the above template information. can't

Therefore, in this example, when the use of the template setting function is instructed, as a preliminary process, a process of matching the three-dimensional shape data of the other measurement object S with the three-dimensional shape data of the reference object (hereinafter referred to as matching process). call) is performed.

A matching screen is displayed on the display unit 400 by starting the matching process. FIGS. 42 and 43 are diagrams showing examples of matching screens displayed on the display unit 400. FIG. In the combined screen SC3, the display area of the display unit 400 is divided into a first main display area ma1, a second main display area ma2, a third main display area ma3 and a sub display area sa.

A stereoscopic image SI of another measurement object S is displayed in the first main display area ma1, and a stereoscopic image SI of the reference object is displayed in the second main display area ma2. In the third main display area ma3, the degree of matching of the three-dimensional shape data of the other measurement object S with the three-dimensional shape data of the reference object is displayed as an image. Specifically, the three-dimensional shape image SI of the reference object and the three-dimensional shape image of the other measurement object S are displayed in different colors according to a common coordinate system. In the examples of FIGS. 42 and 43, two different colors are indicated by dot patterns and hatching.

An element type selection field es, an alignment element display field et, a return button b21 and an apply button b22 are displayed in the sub display area sa. A plurality of item icons ic respectively corresponding to the types of a plurality of geometric elements are displayed in the element type selection field es, as in the above-described embodiment. The alignment element display field et will be described later.

With the matching screen SC3 displayed on the display unit 400, the user can change the posture of the other measurement object S on the three-dimensional shape image SI displayed in the first main display area ma1. Also, the user can change the orientation of the reference object on the three-dimensional shape image SI displayed in the second main display area ma2.

Therefore, the user compares the three-dimensional shape image SI including the other measurement object S with the three-dimensional shape image SI including the reference object, and uses portions having common shapes and corresponding to each other as alignment elements. Specify 3 pairs. At this time, the user can select the type of alignment element to be specified by operating any one of the plurality of item icons ic displayed in the element type selection field es.

The alignment element display column et of the sub-display area sa indicates whether or not three sets of alignment elements have been designated for the other measurement object S and the reference object. In the example of FIG. 42, no three sets of alignment elements are specified.

The user operates the item icon ic corresponding to the plane to designate, for example, the first set of alignment elements. After that, on the three-dimensional shape image SI including the other measurement object S and on the three-dimensional shape image SI including the reference object, mutually corresponding planar portions are specified by double-clicking. This completes the specification of the first set of alignment elements (“Plane A” in FIG. 43) for the other measurement object S and the reference object.

Next, the user specifies the second and third alignment elements ("plane B" and "Plane C") are sequentially specified. At this time, as shown in FIG. 43, the specified alignment elements are displayed so as to be sequentially identifiable on the three-dimensional image SI displayed in the first main display area ma1 and the second main display area ma2.

When the three sets of alignment elements are specified, the CPU 210 determines that the three portions of the other measurement object S corresponding to the three sets of alignment elements are the three parts of the reference object S corresponding to the three sets of alignment elements. Coordinate transformation of the three-dimensional shape data of the other measurement object S is performed so as to correspond to each of the two portions.

By accurately matching the three-dimensional shape data of the other measurement object S with the three-dimensional shape data of the reference object, the three-dimensional shape image SI displayed in the third main display area ma3 as shown in FIG. The position and orientation of the reference object and the position and orientation of the other measurement object S match.

While confirming the display state of the third main display area ma3 in the matching screen SC3, the user operates the apply button b22 when determining that there is no problem. This completes the matching process. The return button b21 is a button for the user to command cancellation of the fitting process. The user operates the return button b21 while the adjustment screen SC3 is displayed on the display unit 400. FIG. As a result, the display state of the display unit 400 returns to the state during normal shape measurement (for example, the states shown in FIGS. 9 to 12).

In the example of FIG. 43, "plane A", "plane B" and "plane C" are specified as three alignment elements, and among these elements, "plane B" and "plane C" are The planes are parallel to each other. When performing the above alignment using three planes, it is desirable that the three alignment elements are set so as to intersect each other. Therefore, for example, in the example of FIG. 43, instead of "plane B", "plane D" indicated by a dashed line may be specified as an alignment element. In this case, by using alignment elements "plane A", "plane C" and "plane D" that intersect with each other, it is possible to align three-dimensional shape data with higher accuracy.

(5) Comparison highlighting function The three-dimensional shape measuring apparatus 500 may have a comparison highlighting function for allowing the user to easily understand the geometric comparison result of the measurement target portion with respect to the geometric reference. When a geometric reference extending in one direction and a measurement target portion of the measurement object S extending in the other direction are specified, the contrast highlighting function of this example represents the tilting direction of the measurement target portion with respect to the geometric reference. It includes a function of superimposing and displaying an index (hereinafter referred to as an inclination index) on the stereoscopic image SI. Furthermore, the contrast highlighting function of this example adjusts the display mode of the tilt index so as to emphasize the tilt direction of the measurement target portion with respect to the geometric reference (hereinafter simply referred to as the tilt direction). Including function. An example of using the contrast highlighting function will be described below.

FIG. 44 is an external perspective view showing another example of the measuring object S. FIG. A measurement object S in FIG. 44 is composed of a first member p1, a second member p2 and a third member p3 each having a flat rectangular parallelepiped shape. The first member p1 and the second member p2 are connected by a third member p3 so as to face each other with a space therebetween. A circular first through hole h1 and a circular second through hole h2 are formed in the first member p1 and the second member p2, respectively.

When the user wants to know in which direction the central axis of the second through hole h2 is inclined with respect to the central axis of the first through hole h1 for the measurement object S of FIG. Three-dimensional shape data is generated for the object S to be measured in FIG. The user then uses the contrast highlighting function.

45 to 47 are diagrams for explaining one usage example of the contrast highlighting function. As shown in FIG. 45, in the three-dimensional shape measuring apparatus 500 having the contrast highlighting function, an inclination confirmation button b31 is displayed in the secondary display area sa of the geometric element setting screen SC1.

For example, while the three-dimensional shape image SI corresponding to the measurement object S in FIG. 44 is displayed in the main display area ma, the user may Set "Cylinder 1". Also, the user sets a geometric element "cylinder 2" corresponding to the inner peripheral surface of the second through hole h2 in FIG. After that, the user operates the inclination confirmation button b31.

As a result, as shown in FIG. 46, the screen displayed on the display unit 400 is switched from the geometric element setting screen SC1 to the inclination confirmation screen SC4. The tilt confirmation screen SC4 is basically the same as the display mode setting screen SC2 described above, except that the tilt confirmation setting field eu is displayed instead of the correspondence setting field dc.

A check box 431 and an emphasis degree adjustment bar 432 are displayed in the tilt confirmation setting field eu. The check box 431 is used to set whether or not to display the tilt index to emphasize the tilt direction when axes are designated as the geometric reference and the measurement target portion. By checking the check box 431, the user can display the tilt index so as to emphasize the tilt direction.

The enhancement degree adjustment bar 432 includes a slider. The user can adjust the degree of emphasis of the tilt direction indicated by the tilt index by operating the slider of the emphasis degree adjustment bar 432 .

In this example, as shown in FIG. 46, the user specifies the axis of the geometric element "cylinder 2" as the target element and the axis of the geometric element "cylinder 1" as the reference element. In this case, an image showing the axis of the geometric element “cylinder 1” and the axis of the geometric element “cylinder 2” is superimposed on the three-dimensional shape image SI, as indicated by the dashed line in FIG.

By operating the OK button b05 in this state, as indicated by the white arrow in FIG. The index is superimposed on the three-dimensional shape image SI.

Here, if the inclination angle of the axis of the geometric element "cylinder 2" with respect to the axis of the geometric element "cylinder 1" is small, even if the user visually recognizes the inclination index, It is difficult to grasp in which direction the axis of the geometric element "cylinder 2" is inclined. Therefore, the user checks the check box 431 and operates the emphasis degree adjustment bar 432 . In this case, as shown in FIG. 47, the orientation of the tilt of the axis of the geometric element "cylinder 2" with respect to the axis of the geometric element "cylinder 1" is highlighted by the tilt indicator. Specifically, the angle of intersection of the target axis (the axis of the geometric element “cylinder 2” in this example) with the reference axis (the axis of the geometric element “cylinder 1” in this example) in the device coordinate system is determined by the tilt index. displayed too large. Thereby, the user can easily grasp the direction in which the axis of the geometric element "cylinder 2" is inclined with respect to the axis of the geometric element "cylinder 1".

Note that, in the three-dimensional shape measuring apparatus 500 having a comparison highlighting function, the display control unit 212 in FIG. The tilt index shown is displayed on the display unit 400 . In addition, the display control unit 212 adjusts the display mode of the tilt index so that the tilt direction is emphasized in response to the operation of the operation unit 250 by the user.

(6) Others In the above embodiment, after one or more geometric elements are specified and set, the reference element is specified using one of the set geometric elements, but the present invention is not limited to this. . When specifying a geometric element, the geometric element may be specified as a reference element. Similarly, in the above embodiment, after one or more geometric elements are set, the target element is specified using any of the set geometric elements, but the present invention is not limited to this. When specifying a geometric element, the geometric element may be specified as the target element.

In the above embodiment, monocular cameras are used for the light receiving units 120A and 120B, but compound-eye cameras may be used instead of or in addition to the monocular cameras. Also, a plurality of light receiving sections 120A and a plurality of light receiving sections 120B may be used to generate three-dimensional shape data by a stereo method. In addition, although two light projecting units 110 are used in the above embodiment, only one light projecting unit 110 may be used, or three or more projecting units may be used as long as three-dimensional shape data can be generated. A light section 110 may be used.

Further, when the texture image data is acquired using the uniform measurement light from the light projecting section 110, the illumination light output section 130 and the illumination light source 320 may not be provided. It is also possible to generate texture image data by synthesizing pattern image data, in which case illumination light output unit 130 and illumination light source 320 may not be provided.

In the above embodiment, the pattern image data and the texture image data are acquired by the common light receiving units 120A and 120B. A light-receiving unit for detecting the light may be provided separately.

Further, in the above embodiment, the point cloud data is generated by the triangulation method, but the point cloud data may be generated by other methods such as the TOF (Time Of Flight) method.

[8] Correspondence between each constituent element of the claim and each part of the embodiment Hereinafter, an example of correspondence between each constituent element of the claim and each part of the embodiment will be described. Not limited.

In the above embodiment, the shape data generation unit 211 is an example of the shape data generation unit, the display control unit 212 is an example of the display control unit, the element reception unit 214 is an example of the element reception unit, and the identification unit 213 is an example of the specifying unit, and the three-dimensional shape measuring device 500 is an example of the three-dimensional shape measuring device.

The tilt index is an example of the index, the installation portion 161 and the rotation mechanism 143 are examples of the stage holding portion, the stage 140 is an example of the stage, and the light projection portions 110, 110A, and 110B are examples of the light projection portions. , the light receiving portions 120, 120A, and 120B are examples of the light receiving portions, the head portion 190 is an example of the head portion, and the stand portion 162 is an example of the connecting portion.

Furthermore, the correspondence relationship setting unit 215 is an example of a correspondence relationship setting unit, the operation unit 250 is an example of an operation unit, the CPU 210 is an example of a template storage unit and a template designation unit, and the PC 200 is an example of a processing device. .

Various other elements having the structure or function described in the claims can be used as each component of the claims.
[9] Reference form
(1) A three-dimensional shape measuring apparatus according to a first embodiment includes a shape data generation unit that generates three-dimensional shape data representing a three-dimensional shape of an object to be measured, and based on the three-dimensional shape data generated by the shape data generation unit: a display control unit for displaying an image including a three-dimensional shape of the object to be measured as a three-dimensional shape image on the display unit so that the posture can be changed; and a specifying unit that specifies, as a geometric reference, a geometric reference relating to the three-dimensional shape of the measurement object based on the geometric elements received by the element reception unit, wherein the display control unit controls at least a portion of the measurement object. and the geometric reference specified by the specifying unit, the display mode of the part corresponding to at least part of the three-dimensional shape image is set.
In the three-dimensional shape measuring apparatus, three-dimensional shape data of the object to be measured is generated, and a three-dimensional shape image based on the generated three-dimensional shape data is displayed on the display unit. A specification of a geometric element is accepted on the solid image, and a geometric reference is specified based on the accepted geometric element. A display mode of a portion of the three-dimensional shape image corresponding to at least a portion of the measurement object is set according to the distance between at least a portion of the measurement object and the geometric reference.
Thereby, the user can specify a geometric element on the three-dimensional shape image of the object to be measured, and visually confirm the three-dimensional shape image displayed on the display section, thereby determining the relationship between the desired geometric reference and the shape of the object to be measured. can be grasped easily and intuitively.
Note that setting the display mode of the 3D image portion means switching the display mode of the 3D image portion from a predetermined original display mode to a display mode according to the distance. In other words, setting the display mode of the 3D image portion means changing the display mode of the 3D image portion from a predetermined original display mode to a display mode according to the distance. . In other words, setting the display mode of the 3D image portion means changing the display mode of the 3D image portion from a predetermined original display mode to a display mode according to the distance. .
(2) The specifying unit may further specify at least a part for which the display mode should be set based on the geometric element received by the element receiving unit.
In this case, the user can easily and intuitively grasp the relationship between the desired geometric element and the shape of the desired portion of the measurement object by specifying the geometric element on the three-dimensional shape image of the measurement object. becomes possible.
(3) The display mode may be a color according to the distance between at least the part and the geometric reference.
In this case, the user can more intuitively grasp the relationship between the desired geometrical reference and the shape of at least a part of the object to be measured.
(4) The display control unit causes the display unit to display an index representing a geometric comparison result between the at least part and the geometric reference specified by the specifying unit, and the index displayed on the display unit emphasizes the comparison result. , it may be possible to adjust the display mode of the index.
In this case, the user can more intuitively grasp the result of the geometric comparison between the desired geometric reference and the shape of at least a part of the object to be measured.
(5) The three-dimensional shape measuring apparatus includes a stage holder, a stage held by the stage holder and on which a measurement object is placed, and a measurement light having a pattern applied to the measurement object placed on the stage. and a light-receiving section that receives the measurement light reflected by the object to be measured and outputs a light-receiving signal representing the amount of received light, and the head section and the stage holding section are fixedly connected to each other. The shape data generation unit may generate point cloud data representing the three-dimensional shape of the measurement object as three-dimensional shape data based on the received light signal output from the light receiving unit.
According to the above configuration, since the light projecting section, the light receiving section, and the stage holding section are integrally provided, the positional relationship between the light receiving section and the stage is uniquely determined. Therefore, point cloud data can be obtained with high accuracy. Therefore, the shape of the measurement object can be measured with high accuracy based on the three-dimensional shape data.
(6) The three-dimensional shape measuring device calculates the distance between at least a portion and the geometric reference based on the three-dimensional shape data, and sets the correspondence relationship between the display mode and the distance based on the calculated distance. A setting unit may be further included, and the display control unit may set a display mode of a portion corresponding to at least a portion of the three-dimensional shape image based on the correspondence set by the correspondence setting unit.
In this case, the user does not need to define the correspondence between the display mode and the distance. Moreover, according to the above configuration, it is possible to set a more appropriate correspondence relationship based on the three-dimensional shape data.
(7) A three-dimensional shape measuring apparatus includes an operation unit operated by a user to specify one geometric element for specifying one geometric reference for one measurement object, and an operation unit operated by the user. A template storage unit for storing operation procedures as template information; It may further include a template designating unit that designates the template based on the data, the three-dimensional shape data of the other measurement object, and the template information stored in the template storage unit.
In this case, the user does not need to specify geometric elements for each measurement object when he/she wishes to set mutually corresponding geometric references for a plurality of measurement objects having a common shape.
(8) A three-dimensional shape measurement program according to a second embodiment is a three-dimensional shape measurement program that can be executed by a processing device, and includes a process of generating three-dimensional shape data representing a three-dimensional shape of an object to be measured; Based on the obtained three-dimensional shape data, a process of displaying an image including the three-dimensional shape of the object to be measured as a three-dimensional shape image on the display unit so that the posture can be changed; The process of causing the processing device to execute the process of accepting the designation and the process of specifying the geometric reference for the three-dimensional shape of the object to be measured as the geometric reference based on the accepted geometric elements, and causing the display unit to display the A process of setting a display mode of a portion corresponding to at least a portion of the three-dimensional shape image according to a distance between at least a portion of the measurement object and the specified geometric reference is included.
According to the three-dimensional shape measurement program, the three-dimensional shape data of the object to be measured is generated, and the three-dimensional shape image based on the generated three-dimensional shape data is displayed on the display unit. A specification of a geometric element is accepted on the solid image, and a geometric reference is specified based on the accepted geometric element. A display mode of a portion of the three-dimensional shape image corresponding to at least a portion of the measurement object is set according to the distance between at least a portion of the measurement object and the geometric reference.
Thereby, the user can specify a geometric element on the three-dimensional shape image of the object to be measured, and visually confirm the three-dimensional shape image displayed on the display section, thereby determining the relationship between the desired geometric reference and the shape of the object to be measured. can be grasped easily and intuitively.

DESCRIPTION OF SYMBOLS 100... Measurement part 110, 110A, 110B... Light-projection part 111... Measurement light source 112... Pattern generation part 113, 114, 122... Lens, 120, 120A, 120B... Light-receiving part, 121... Camera, 121a... Imaging Elements 130 Illumination light output unit 131 Output port 140 Stage 141 Stage base 142 Stage plate 143 Rotation mechanism 145 Stage operation unit 146 Stage drive unit 150, 310 Control Substrate 161 Installation unit 162 Stand unit 170 Pedestal 180 Head casing 190 Head unit 200 PC 210 CPU 211 Shape data generation unit 212 Display control unit 213 Specification Part 214 Element reception part 215 Correspondence setting part 220 ROM 230 Work memory 240 Storage device 250 Operation part 300 Control part 320 Illumination light source 330 Light guide member , 400... Display section 411... Color display bar 412... Distance reference adjustment bar 413... Color range adjustment bar 414... Other setting buttons 415... Corresponding automatic setting buttons 421, 422, 423, 431... Check boxes, 432... Enhancement degree adjustment bar, 500... Three-dimensional shape measuring device, A1, A2... Optical axis, Ax... Rotational axis, ax... Axis, b01, b04, b21... Return button, b02... Setting button, b03... Display mode button , b05...OK button, b06...geometric element button, b11...parallel plane extraction button, b12...vertical plane extraction button, b13...area extraction button, B1I, B2I...image, b22...apply button, b31...inclination confirmation button, dc ... Correspondence setting field, es ... Element type selection field, et ... Alignment element display field, f01 ... Name input field, F1, F2 ... Intersection, h1 ... First through hole, h2 ... Second through hole, ic ... item icon, IR ... irradiation area, m11 ... target pull-down menu, m12 ... reference pull-down menu, ma ... main display area, ma1 ... first main display area, ma2 ... second main display area, ma3 ... third main display area , MR, MR1, MR2 effective area p1 first member p2 second member p3 third member PI pointer pl perpendicular line pp vertex S object to be measured s11 Upper surface s12 Lower surface s21 Bottom surface s22 Vertical surface s23 Inclined surface s31 One end surface s32 Other end surface sa Sub display area SC1 Geometric element setting screen SC2 Display mode Setting screen, SC3... Alignment screen, SC4... Inclination Confirmation screen, SI... Solid shape image, SW... Other setting window, TR1... Imaging field of view

Claims (12)

a shape data generation unit that generates three-dimensional shape data indicating the three-dimensional shape of the object to be measured;
a display control unit that causes a display unit to display an image including a three-dimensional shape of an object to be measured as a three-dimensional shape image based on the three-dimensional shape data generated by the shape data generation unit so that the posture can be changed;
an element receiving unit that receives designation of a first geometric element on the three-dimensional shape image displayed on the display unit;
Based on the first geometric element received by the element receiving unit, a second geometric element having a unique relationship with the first geometric element and different from the first geometric element is specified as a geometric reference. a specific part,
The display control unit changes a display mode of a portion of the three-dimensional shape image corresponding to the at least a portion according to a distance between at least a portion of the measurement object and the geometric reference specified by the specifying unit. 3D shape measuring device to set. 2. The three-dimensional shape measuring apparatus according to claim 1, wherein said specifying unit further specifies said at least one portion for which said display mode is to be set, based on said first geometric element accepted by said element accepting unit. 3. The three-dimensional shape measuring apparatus according to claim 1, wherein said display mode is a color according to the distance between said at least one portion and said geometric reference. The display control unit causes the display unit to display an index representing a geometric comparison result between the at least one portion and the geometric reference specified by the specifying unit, and the index displayed on the display unit is the comparison result. 3. The three-dimensional shape measuring apparatus according to claim 1, wherein the display mode of said index can be adjusted so that a stage holder;
a stage held by the stage holder and on which a measurement object is placed;
a light projecting unit that irradiates a measurement light having a pattern onto an object to be measured that is placed on the stage; and a light receiving unit that receives the measurement light reflected by the object to be measured and outputs a light reception signal representing the amount of received light. a head comprising
further comprising a connecting portion that fixedly connects the head portion and the stage holding portion;
5. The shape data generation unit according to any one of claims 1 to 4, wherein the shape data generation unit generates point cloud data representing a three-dimensional shape of the object to be measured as the three-dimensional shape data based on the received light signal output from the light receiving unit. The three-dimensional shape measuring device according to the item. further comprising a correspondence setting unit that calculates the distance between the at least one part and the geometric reference based on the three-dimensional shape data and sets the correspondence between the display mode and the distance based on the calculated distance;
6. The display control unit according to any one of claims 1 to 5, wherein the display control unit sets a display mode of a portion corresponding to the at least part of the three-dimensional shape image based on the correspondence set by the correspondence setting unit. or the three-dimensional shape measuring device according to any one of items. an operation unit operated by a user to specify one geometric element for specifying one geometric reference for one measurement object;
a template storage unit that stores an operation procedure of the operation unit by a user as template information;
For another measurement object, another geometric element for specifying another geometric reference corresponding to the one geometric reference is the three-dimensional shape data of the one measurement object and the three-dimensional shape of the other measurement object. The three-dimensional shape measuring apparatus according to any one of claims 1 to 6, further comprising a template specifying unit that specifies based on shape data and template information stored in said template storage unit. When the first geometric element received by the element receiving unit is two planes parallel to each other, the specifying unit selects a second geometric element formed of a median plane positioned between the two planes. 3. The three-dimensional shape measuring device according to claim 1, specified as a geometric reference. 2. The specifying unit according to claim 1, wherein, when the first geometric element accepted by said element accepting unit is a cylinder, said specifying unit specifies a second geometric element consisting of a central axis of said cylinder as said geometric reference. Three-dimensional shape measuring device. 2. The specifying unit according to claim 1, wherein, when the first geometric element accepted by said element accepting unit is a cone, said specifying unit specifies a second geometric element consisting of a central axis of said cone as said geometric reference. Three-dimensional shape measuring device. 2. The cubic according to claim 1, wherein when the first geometric element accepted by the element accepting unit is a sphere, the specifying unit specifies a second geometric element consisting of the center of the sphere as the geometric reference. Original shape measuring device. A three-dimensional shape measurement program executable by a processing device,
a process of generating three-dimensional shape data indicating the three-dimensional shape of the object to be measured;
a process of displaying an image including the three-dimensional shape of the object to be measured as a three-dimensional shape image on the display unit based on the generated three-dimensional shape data, so that the posture can be changed;
a process of accepting designation of a first geometric element on the three-dimensional shape image displayed on the display unit;
a process of identifying, based on the received first geometric element, a second geometric element having a unique relationship with the first geometric element and different from the first geometric element as a geometric reference; causing the processing device to execute
The processing for displaying on the display unit changes the display mode of a portion of the three-dimensional shape image corresponding to the at least the portion according to the distance between the at least the portion of the object to be measured and the specified geometric reference. A three-dimensional shape measurement program including setting processing.

Images