JP6736383B2 - measuring device - Google Patents

Description

The present invention relates to a measuring device that measures an object to be measured.

In the triangulation type measuring apparatus, the surface of an object to be measured is irradiated with light, and the reflected light is received by a light receiving element having pixels arranged one-dimensionally or two-dimensionally. The height of the surface of the measuring object can be measured based on the peak position of the received light amount distribution obtained by the light receiving element.

Non-Patent Document 1 proposes triangulation type shape measurement in which coded light and a phase shift method are combined. Also, Non-Patent Document 2 proposes shape measurement by a triangulation method that combines coded light and light in a stripe shape. In these methods, the accuracy of shape measurement of the measurement object can be improved.

Toni F. Schenk, "Remote Sensing and Reconstruction for Three-Dimensional Objects and Scenes", Proceedings of SPIE, Volume 2572, pp. 1-9 (1995) Sabry F. El-Hakim and Armin Gruen, "Videometrics and Optical Methods for 3D Shape Measurement", Proceedings of SPIE, Volume 4309, pp. 219-231 (2001)

Based on the data obtained by the shape measurement as described above (hereinafter, referred to as measurement data), it is possible to calculate the size and the like of a desired portion of the measurement target. For example, an image showing the three-dimensional shape of the measurement target is displayed based on the measurement data. The user designates the measurement location on the displayed image, and the measurement value at the designated location is calculated from the measurement data.

Depending on the measurement location, the measurement data of the entire measurement object may not be needed, and only the measurement data of a specific location may be needed. When only the measurement data of a specific location is generated, it is necessary to properly adjust the orientation of the measurement object with respect to the light receiving element. However, it is not easy to make such an adjustment, and it requires labor and time.

An object of the present invention is to provide a measuring device that enables even an inexperienced user to easily acquire a measurement value at a measurement location.

(1) The measuring apparatus according to the present invention is held by the stage holding unit and the stage holding unit so as to be rotatable about a vertical rotation axis, and is non-perpendicular to the rotation axis, and an object to be measured is placed. Having a tilted mounting surface, a light projecting unit for irradiating the measuring object mounted on the stage with a measuring light having a pattern, and receiving the measuring light reflected by the measuring object to represent the received light amount. By connecting the head unit including the light receiving unit that outputs a light receiving signal, and the head unit and the stage holding unit , the measuring light is guided obliquely downward from the light projecting unit to the measurement target, and The optical axis extends obliquely downward toward the object to be measured, and a connecting portion that fixedly connects the head portion and the stage holding portion so that the positional relationship among the light projecting portion, the light receiving portion, and the stage is determined , and the stage. Generated by the rotation control means for controlling the rotation of the object, the point cloud data generating means for generating the point cloud data representing the three-dimensional shape of the measurement object based on the light receiving signal output by the light receiving section, and the point cloud data generating means. Based on the obtained point cloud data, a reference plane setting unit that sets a reference plane that serves as a measurement reference, and a point cloud data generated by the point cloud data generation unit that accepts designation of a measurement target portion of the measurement target. On the basis of the measurement means for calculating the measurement value of the designated portion with the reference plane set by the reference plane setting means as a reference, the light receiving section has an imaging surface perpendicular to the optical axis, Based on the instruction, the rotation control unit positions the stage at the first rotation position stored in advance so that the inclined mounting surface directly faces the image pickup surface of the light receiving unit, and the light projecting unit sets the stage to the first rotation position . The measuring object placed on the stage is irradiated with the measuring light in a two-dimensional manner in a state where the stage is located at the rotation position, and the point cloud data generating means is arranged such that the stage is located at the first rotation position. two dimensions of the point group data based on the light reception signal output from that generates a.

In this measuring device, the head unit including the light projecting unit and the light receiving unit is fixedly connected to the stage holding unit. The measurement target is placed on the inclined mounting surface of the stage held by the stage holding unit, and the measurement light having a pattern is applied to the measurement target from the light projecting unit. The measurement light reflected by the measurement object is received by the light receiving unit, and a light reception signal indicating the amount of received light is output. Point cloud data representing the three-dimensional shape of the measurement target is generated based on the light reception signal.

In this case, since the light projecting unit, the light receiving unit, and the stage are integrally provided, the user does not need to adjust their arrangement, and the measurement target is placed on the stage to measure the measurement target. Object point cloud data can be obtained. Further, since the rotation axis of the stage is not parallel to the optical axis of the light receiving section, the position of the measurement target pointed at the light receiving section changes when the stage is rotated. Therefore, the measurement light is irradiated to the measurement target in a state where the rotation position of the stage is different, and thus the reflected light at the different position of the measurement target is received by the light receiving unit. Therefore, it is possible to easily generate the point cloud data of a wide range of the measurement object based on the light reception signal output from the light receiving unit.

Further, a reference plane that is a reference for measurement is set based on the generated point cloud data, and a measurement value at a designated location is calculated based on the reference plane based on the point cloud data. In this case, setting the reference plane facilitates calculation of the measurement value from the point cloud data.

Further, since the stage is located at the first rotation position, the inclined mounting surface directly faces the image pickup surface of the light receiving unit. Therefore, the portion of the measurement object that is directed upward on the horizontal plane is directed to the imaging surface of the light receiving unit on the inclined mounting surface. Thereby, it is possible to generate the point cloud data of the location of the measurement object that is directed upward on the horizontal plane based on the light reception signal. Therefore, it is possible to efficiently generate the point cloud data of a required location. In addition, it becomes possible to represent the measurement object in a plan view based on the generated point cloud data. Therefore, even a user who is unfamiliar with the operation can easily set the reference plane at the location of the measurement target represented in a plan view and easily specify the measurement location. Become. Therefore, it is possible to easily acquire the measurement value at the measurement location.

(2) The light receiving unit may be a monocular camera. In this case, unlike the stereo camera, the viewpoints are not plural, so that the orientation of the imaging surface can be easily and accurately set with respect to the measurement object. This makes it possible to easily generate the point cloud data of a desired portion of the measurement target.

(3) The measuring device, based on the point cloud data generated by the point cloud data generating means, generates image data representing an image of the measurement object viewed perpendicularly to the reference plane set by the reference plane setting means. The image data generating means for generating may be further provided. In this case, based on the generated image data, an image of the measurement object is displayed perpendicular to the reference plane, so that the user can specify the measurement location as in the case of using the plan view. This makes it easy to specify measurement points.

(4) The stage may further have a non-tilted mounting surface orthogonal to the rotation axis. In this case, since the measurement light is guided obliquely downward from the light projecting unit to the measurement target and the reflected light is received by the light receiving unit having an optical axis extending obliquely downward toward the measurement target, the non-tilted mounting is performed. By placing the measurement object on the placement surface, it is possible to efficiently generate point cloud data in a wide range of the measurement object. Further, by rotating the stage, it is possible to easily generate point cloud data in a wider range of the measurement target.

(5) The stage may include a stage plate that has a non-tilted mounting surface and is held by the stage holding portion, and a tilted portion that has the tilted mounting surface and is attachable to and detachable from the stage plate. In this case, the non-tilted mounting surface and the inclined mounting surface can be selectively used by attaching/detaching the inclined portion to/from the stage plate, and switching between them can be easily performed.

(6) The stage may include a stage plate that is provided so that the tilt angle with respect to the plane perpendicular to the rotation axis can be adjusted so as to selectively form the non-tilted mounting surface and the tilted mounting surface. In this case, the non-tilted mounting surface and the inclined mounting surface can be selectively used by adjusting the tilt angle of the stage plate, and the switching between them can be easily performed.

(7) The optical axis of the light receiving unit may be orthogonal to the inclined mounting surface in the state where the stage is in the first rotation position. In this case, it is possible to generate the point cloud data of the location of the measurement target that is oriented vertically upward on the horizontal plane. Therefore, the measurement target can be represented in a more plan view based on the generated point cloud data.

(8) The rotation control means includes first control for positioning the stage at a first rotation position stored in advance based on the instruction, and second rotation position and second rotation position for the stage based on the setting. It is possible to execute a second control for positioning the third rotation position different from that, and when the rotation control means executes the first control based on the instruction, the point cloud data generating means causes the stage to move to the first rotation position. When the first stereoscopic shape data is generated as point cloud data based on the light reception signal output by the light receiving unit in the state of being located at the rotation position, and the rotation control means executes the second control based on the setting, the stage is Second stereoscopic shape data is generated as point group data based on the light reception signal output by the light receiving unit in the state of being positioned at the second rotation position, and the light receiving unit is caused to generate by the light receiving unit while the stage is at the third rotation position. Third solid shape data may be generated as point cloud data based on the output light receiving signal, and the second and third solid shape data may be combined.

(9) The rotation control means positions the stage in a quasi-facing position different from the first rotation position, and the point cloud data generation means outputs the light by the light receiving unit in a state where the stage is in the first rotation position. The first solid shape data is generated as point cloud data based on the light reception signal, and the second solid shape is generated as point cloud data based on the light reception signal output by the light receiving unit in a state where the stage is located at the quasi-facing position. Data may be generated and the first and second solid shape data may be combined.
(10) The light projecting unit irradiates the measurement object placed on the stage with the measurement light a plurality of times by irradiating the measurement light in a two-dimensional manner with the stage positioned at the first rotation position. Good.

In this case, due to the different rotation positions of the stage, the light receiving section receives the reflected light at different points on the measurement target. Therefore, it is possible to generate the point cloud data of a wide range of the measurement object based on the light reception signal output by the light receiving unit. It should be noted that three or more point cloud data may be generated while the rotational position of the stage is being changed, and these three or more point cloud data may be combined. The larger the number of generated point cloud data, the clearer the three-dimensional shape of each part of the measurement object, and the more accurate the measured value can be acquired.

According to the present invention, it is possible to easily acquire the measurement value of a desired portion of the measurement object.

It is a block diagram which shows the structure of the measuring device which concerns on one embodiment of this invention. It is a schematic diagram which shows the structure of the measurement part of the measuring device of FIG. 2 is a functional block diagram showing functions realized by the CPU of FIG. 1. FIG. It is a typical external appearance perspective view of a measurement part. It is a figure for demonstrating the positional relationship of a light-receiving part and a stage. It is a figure for explaining a concrete example of composition of a stage. It is a figure for explaining the principle of the triangulation method. It is a figure for demonstrating the 1st pattern of measurement light. It is a figure for demonstrating the 2nd pattern of measurement light. It is a figure for demonstrating the 3rd pattern of measurement light. It is a figure which shows the relationship of the timing which imaged the image in the specific part of a measuring object, and the intensity|strength of the light received. It is a figure for demonstrating the 4th pattern of measurement light. It is a figure for demonstrating the example which produces|generates several solid shape data by imaging a measurement target object from several directions. It is a flowchart which shows the procedure of preparation for shape measurement. It is a flow chart which shows the details of the 1st adjustment in the procedure of preparation for shape measurement. It is a flow chart which shows the details of the 1st adjustment in the procedure of preparation for shape measurement. It is a flow chart which shows the details of the 2nd adjustment in the procedure of preparation for shape measurement. It is a flow chart which shows an outline of shape measurement processing. It is a figure for demonstrating the difference between the shape measurement process in a normal state, and the shape measurement process in a slope facing state. It is a figure which shows an example of a measuring object. It is a figure which shows the measuring object imaged by the light-receiving part. 7 is a flowchart showing an operation example of a CPU when setting a reference plane. It is a figure which shows the example of a reference plane image. It is a figure for demonstrating the example of setting of measurement conditions. It is a figure which shows the other example of a reference plane image. It is a figure for demonstrating specification of the part which should acquire a profile. It is a figure which shows the example of a profile image. It is a figure for demonstrating the change of the direction of a measuring object by the change of the rotation position of a stage. It is a figure for demonstrating the change of the direction of a measuring object by the change of the rotation position of a stage. It is a figure for demonstrating the change of the direction of a measuring object in a comparative example. It is a figure for demonstrating the change of the direction of a measuring object in a comparative example. It is a figure for demonstrating the rotation position of the stage at the time of mounting of a measuring object. It is a figure for explaining other examples of composition of a stage.

Hereinafter, a measuring device according to an embodiment of the present invention will be described with reference to the drawings.

[1] Configuration of Measuring Apparatus FIG. 1 is a block diagram showing the configuration of the measuring apparatus according to one embodiment of the present invention. FIG. 2 is a schematic diagram showing the configuration of the measuring unit of the measuring device 500 shown in FIG. Hereinafter, the measuring device 500 according to the present embodiment will be described with reference to FIGS. 1 and 2. As shown in FIG. 1, the measurement device 500 includes a measurement unit 100, a PC (personal computer) 200, a control unit 300, and a display unit 400.

As shown in FIG. 1, the measurement unit 100 is, for example, an image pickup device integrated with light projection and light reception, and includes a light projection unit 110, a light reception unit 120, an illumination light output unit 130, a stage 140, and a control board 150. As shown in FIG. 2, the light projecting unit 110 includes a measurement light source 111, a pattern generating unit 112, and a plurality of lenses 113 and 114. The light receiving unit 120 includes a camera 121 having an image sensor 121a and a lens 122. In this example, the camera 121 is a monocular camera. The measuring object S is placed on the stage 140.

In the example of FIG. 2, the measuring unit 100 includes two light projecting units 110. Hereinafter, when distinguishing the two light projecting units 110, one light projecting unit 110 is referred to as a light projecting unit 110A, and the other light projecting unit 110 is referred to as a light projecting unit 110B. The light projecting units 110A and 110B are arranged symmetrically with the optical axis A1 of the light receiving unit 120 interposed therebetween. The optical axis A1 of the light receiving unit 120 passes through the center of the image sensor 121a of the camera 121 and the center of the lens 122.

The measurement light source 111 of each of the light projecting units 110A and 110B is, for example, a blue LED (light emitting diode). The measurement light source 111 may be another light source such as a halogen lamp. Light emitted from the measurement light source 111 (hereinafter, referred to as measurement light) is appropriately condensed by the lens 113 and then enters the pattern generation unit 112.

The pattern generation unit 112 is, for example, a DMD (digital micromirror device). The pattern generation unit 112 may be an LCD (liquid crystal display), an LCOS (Liquid Crystal on Silicon) or a mask. The measurement light that has entered the pattern generation unit 112 is converted into a preset pattern and a preset intensity (brightness) and then emitted. The measurement light emitted by the pattern generation unit 112 is converted by the lens 114 into light having a diameter larger than the dimension of the measurement target S, and then the measurement target S on the stage 140 is irradiated with the measurement light.

The measurement light source 111, the lens 113, and the pattern generation unit 112 of the light projecting unit 110A are arranged so as to be aligned substantially parallel to the optical axis A1 of the light receiving unit 120. Similarly, the measurement light source 111, the lens 113, and the pattern generation unit 112 of the light projecting unit 110B are arranged so as to be aligned substantially parallel to the optical axis A1 of the light receiving unit 120. On the other hand, the lenses 114 of the light projecting units 110A and 110B are arranged so as to be offset with respect to the measurement light source 111, the lens 113, and the pattern generating unit 112. As a result, the optical axes A2 of the light projecting units 110A and 110B are tilted with respect to the optical axis A1 of the light receiving unit 120, and the measurement light is emitted toward the measurement target S from both sides of the light receiving unit 120. The measurement light reflected above the stage 140 by the measurement target S is condensed and imaged by the lens 122 of the light receiving unit 120, and is received by the image sensor 121a of the camera 121.

In this example, in order to widen the irradiation range of the measurement light, the light projecting units 110A and 110B are configured to have a constant angle of view. The angles of view of the light projecting units 110A and 110B are determined by, for example, the size of the pattern generating unit 112 and the focal length of the lens 114. Further, in order to widen the visual field (imaging range) of the light receiving unit 120, the light receiving unit 120 is configured to have a constant angle of view. The angle of view of the light receiving unit 120 is determined by, for example, the size of the image sensor 121a and the focal length of the lens 122. When it is not necessary to widen the irradiation range and the imaging range of the measurement light, a telecentric optical system having an angle of view of approximately 0 degrees may be used as the light projecting units 110A and 110B and the light receiving unit 120.

The measurement unit 100 may include a plurality of light receiving units 120 having different magnifications. In this case, the measurement object S can be imaged at different magnifications by selectively using the plurality of light receiving units 120. The optical axes of the plurality of light receiving units 120 are preferably parallel to each other.

The camera 121 is, for example, a CCD (charge coupled device) camera. The image sensor 121a is, for example, a monochrome CCD (charge coupled device). The image sensor 121a may be another image sensor such as a CMOS (Complementary Metal Oxide Semiconductor) image sensor. From each pixel of the image sensor 121a, an analog electric signal corresponding to the amount of received light (hereinafter, referred to as a received light signal) is output to the control board 150.

Unlike a color CCD, a monochrome CCD does not need to be provided with a pixel that receives light of a red wavelength, a pixel that receives light of a green wavelength, and a pixel that receives light of a blue wavelength. Here, when a specific wavelength such as a blue wavelength is adopted as the measurement light, the color CCD can be used only for measurement of pixels that receive the light of the specific wavelength, but the monochrome CCD has no such limitation. Therefore, the measurement resolution of the monochrome CCD is higher than that of the color CCD. Further, unlike the color CCD, the monochrome CCD does not need to be provided with a color filter for each pixel. Therefore, the sensitivity of the monochrome CCD is higher than that of the color CCD. For these reasons, the camera 121 in this example is provided with a monochrome CCD.

In this example, the illumination light output unit 130 outputs the red wavelength light, the green wavelength light, and the blue wavelength light to the measurement object S in a time division manner. With this configuration, a color image of the measuring object S can be captured by the light receiving unit 120 using the monochrome CCD.

On the other hand, when the color CCD has sufficient resolution and sensitivity, the image pickup device 121a may be a color CCD. In this case, the illumination light output unit 130 does not need to irradiate the measurement target S with the red wavelength light, the green wavelength light, and the blue wavelength light in a time division manner, and irradiates the measurement target S with the white light. Therefore, the configuration of the illumination light source 320 can be simplified.

An A/D converter (analog/digital converter) and a FIFO (First In First Out) memory (not shown) are mounted on the control board 150. The light reception signal output from the camera 121 is sampled at a constant sampling period by the A/D converter of the control board 150 and converted into a digital signal under the control of the control unit 300. The digital signals output from the A/D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data. Here, when the camera 121 is, for example, a monochrome CMOS camera and each pixel of the image sensor 121a outputs a digital electric signal corresponding to the amount of received light to the control board 150, the A/D converter is not always necessary. is not.

As shown in FIG. 1, the PC 200 includes a CPU (central processing unit) 210, a ROM (read only memory) 220, a work memory 230, a storage device 240, and an operation unit 250. The operation unit 250 also includes a keyboard and a pointing device. A mouse, a joystick, or the like is used as the pointing device.

A system program is stored in the ROM 220. The working memory 230 is composed of a RAM (random access memory) and is used for processing various data. The storage device 240 includes a hard disk or the like. The storage device 240 stores a shape measurement program. The storage device 240 is also used to store various data such as pixel data provided from the control board 150.

The CPU 210 generates image data based on the pixel data provided from the control board 150. Further, the CPU 210 uses the work memory 230 to perform various processes on the generated image data, and causes the display unit 400 to display an image based on the image data. Further, the CPU 210 gives a drive signal to the stage drive unit 146 described later through the control board 150. The display unit 400 is composed of, for example, an LCD panel or an organic EL (electroluminescence) panel. On the display unit 400, an image of the measurement target S in real time (hereinafter, referred to as a live image) based on image data (hereinafter, referred to as live image data) acquired in real time by the camera 121 of the light receiving unit 120. ) Can be displayed.

The image of the measurement target S irradiated with the measurement light from one light projection unit 110A and the image of the measurement target S irradiated with the measurement light from the other light projection unit 110B are displayed on the display unit 400 so as to be aligned ( It may be displayed in two screens. In addition, the image of the measuring object S irradiated with the measuring light from one light projecting section 110A and the image of the measuring object S irradiated with the measuring light from the other light projecting section 110B are overlapped on the display section 400. Composite display such as display may be performed.

When two screens are displayed, for example, the measuring object S is alternately irradiated from the light projecting units 110A and 110B at a constant cycle (several Hz), and the measuring object S is projected from the light projecting unit 110A. The image acquired when the measuring light is irradiated and the image acquired when the measuring object S is irradiated with the measuring light from the light projecting unit 110B are separately displayed on the display unit 400. While observing the displayed image, the user receives the amount of light received by the light receiver 120 when the measurement light is emitted from the light emitter 110A and the light reception of the light receiver 120 when the measurement light is emitted from the light emitter 110B. The amount can be adjusted individually. The amount of light received by the light receiving unit 120 can be adjusted by changing the brightness of the measurement light emitted from the light projecting units 110A and 110B or the exposure time of the light receiving unit 120.

Even when the composite display is performed, the user receives the amount of light received by the light receiving unit 120 when the measurement light is emitted from the light projecting unit 110A while looking at the displayed image, as in the case where the two screens are displayed. The amount of light received by the light receiving unit 120 when the measurement light is emitted from the light projecting unit 110B can be adjusted. In this case, in the display unit 400, in addition to the combined display image, the image of the measuring object S irradiated with the measurement light from one light projecting unit 110A and the measurement light from the other light projecting unit 110B are irradiated. The image of the measured object S may be displayed side by side. Alternatively, the display unit 400 may switch between the two-screen display image and the composite display image. Alternatively, in the display unit 400, an image of combined display, an image of the measurement object S irradiated with the measurement light from one light projection unit 110A, and a measurement target irradiated with the measurement light from the other light projection unit 110B. The image of the object S may be switched and displayed.

As shown in FIG. 2, the stage 140 includes a stage base 141 and a stage plate 142. The stage plate 142 is arranged on the stage base 141. The stage plate 142 has a mounting surface on which the measuring object S is mounted. Here, two directions orthogonal to each other on the mounting surface of the stage plate 142 are defined as an X direction and a Y direction, which are indicated by arrows X and Y, respectively. Moreover, the direction orthogonal to the mounting surface is defined as the Z direction, and is indicated by an arrow Z. Further, a direction rotating about an axis parallel to the Z direction is defined as a θ direction, and is indicated by an arrow θ. The stage plate 142 may be provided with a mounting portion (for example, a screw hole) for mounting a clamp, a jig, or the like.

A substantially cylindrical measurable region MR is set above the mounting surface of the stage plate 142. The measurable region MR is a region in which the measuring light can be emitted by the light projecting units 110A and 110B and can be imaged by the light receiving unit 120. The size and position of the measurable region MR differ depending on the magnification and focal position of the lens 122 of the camera 121. When a plurality of light receiving units 120 having different magnifications are provided, the measurable region MR differs depending on the light receiving units 120 used.

The stage 140 is attached to the rotation mechanism 143. The rotation mechanism 143 includes, for example, a stepping motor. The rotation mechanism 143 is driven by the stage operation unit 145 or the stage drive unit 146 of FIG. 1 to rotate the stage 140 in the θ direction about the rotation axis Ax. In this example, the rotation axis Ax extends in the vertical direction. The direction of the rotation axis Ax is not limited to the vertical direction, and may be slightly inclined with respect to the vertical direction. The user can rotate the stage 140 in the θ direction by manually operating the stage operation unit 145. Further, the stage driving unit 146 can rotate the stage 140 in the θ direction relative to the light receiving unit 120 by supplying a current to the rotating mechanism 143 based on a drive signal given from the PC 200 through the control board 150. it can.

In this embodiment, the stage 140 can be driven by a stepping motor and can be manually operated, but the present invention is not limited to this. The stage 140 may be driven only by a stepping motor, or may be operated only manually. Further, instead of the stepping motor, another driving device such as a servo motor may be used.

The controller 300 includes a control board 310 and an illumination light source 320. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light projecting section 110, the light receiving section 120, and the control board 150 based on a command from the CPU 210 of the PC 200. The control board 310 and the illumination light source 320 may be mounted on the measurement unit 100. However, the control board 310 and the illumination light source 320 are likely to generate heat, and the influence of the heat may reduce the accuracy of the measurement unit 100. Therefore, in order to ensure the accuracy of the measurement unit 100, it is preferable that the control board 310 and the illumination light source 320 be provided outside the measurement unit 100.

The illumination light source 320 includes, for example, three LEDs that emit red light, green light, and blue light. By controlling the brightness of the light emitted from each LED, it is possible to generate light of any color from the illumination light source 320. Light generated from the illumination light source 320 (hereinafter referred to as illumination light) is output from the illumination light output unit 130 of the measurement unit 100 through the light guide member (light guide). The illumination light output unit 130 of FIG. 2 has an annular shape and is arranged above the stage 140 so as to surround the light receiving unit 120. As a result, the illumination light output unit 130 illuminates the measurement target S with illumination light so that no shadow is generated. The illumination light output unit 130 and the illumination light source 320 may be provided as external devices.

FIG. 3 is a functional block diagram showing functions realized by the CPU 210 of FIG. As shown in FIG. 3, the CPU 210 includes a rotation control unit 501, a point cloud data generation unit 502, a reference plane setting unit 503, a measurement unit 504, and an image data generation unit 505.

The rotation control unit 501 controls the rotation of the stage 140 by controlling the stage driving unit 146. The point cloud data generation unit 502 generates point cloud data representing the three-dimensional shape of the measuring object S based on the light reception signal output by the light reception unit 120. The reference plane setting unit 503 sets a reference plane serving as a reference for measurement based on the point cloud data generated by the point cloud data generation unit 502. The measuring unit 504 receives the designation of the location of the measurement target S to be measured, and based on the point cloud data generated by the point cloud data generating unit 502, the reference plane setting unit 503 sets the measurement value of the designated location. Calculation is performed with the set reference plane as a reference. The image data generation unit 505 represents an image in which the measurement target S is viewed perpendicularly to the reference plane set by the reference plane setting unit 503 based on the point cloud data generated by the point cloud data generation unit 502. Generate image data. Details of these functions will be described later.

The rotation control unit 501, the point cloud data generation unit 502, the reference plane setting unit 503, the measurement unit 504, and the image data generation unit 505 are realized by the CPU 210 executing the shape measurement program stored in the ROM 220 or the storage device 240. It These functional units may be realized by hardware such as an electronic circuit.

FIG. 4 is a schematic external perspective view of the measuring unit 100. In FIG. 4, the appearance of the measurement unit 100 is shown by a thick solid line, and some of the components provided inside the measurement unit 100 are shown by a dotted line. As shown in FIG. 4, the measuring unit 100 includes a pedestal 170. Two light projecting units 110, a light receiving unit 120, an illumination light output unit 130, and a control board 150 are attached to the pedestal 170. In this state, the positional relationship among the two light projecting units 110, the light receiving units 120, and the illumination light output units 130 is fixed by the pedestal 170. The illumination light output unit 130 has a substantially cylindrical shape and is arranged so as to surround the light receiving unit 120. An illumination light outlet 131 having an elliptical shape is formed at one end of the illumination light output unit 130. Further, the two light projecting units 110 are arranged side by side with the light receiving unit 120 and the illumination light output unit 130 interposed therebetween.

A head casing 180 that accommodates a part of the two light projecting units 110, the light receiving unit 120, the illumination light output unit 130, and the control board 150 is attached to the pedestal 170. A head unit 190 is configured by the two light projecting units 110, the light receiving unit 120, the illumination light output unit 130, the control board 150, the pedestal 170, and the head casing 180.

The measurement unit 100 includes an installation unit 161 and a stand unit 162. The installation portion 161 has a flat bottom surface and is formed to extend in one direction with a substantially constant width. The stand portion 162 is connected to one end of the installation portion 161, and is formed to extend upward from one end of the installation portion 161. The stage 140 is rotatably held on the installation unit 161. The pedestal 170 of the head portion 190 is configured to be attachable to and detachable from the upper end of the stand portion 162. The head part 190 and the installation part 161 are fixedly connected by the stand part 162. As a result, the positional relationship between the stage 140, the two light projecting units 110, and the light receiving units 120 is held constant.

Each light projecting unit 110 is positioned so that the irradiation region IR to which the measurement light is irradiated includes the stage 140 and the space above it. The measurement light is guided obliquely downward with respect to the measuring object S from each light projecting unit 110. Each light receiving unit 120 is positioned so that the imaging region TR by the camera 121 of FIG. 2 includes the stage 140 and the space above it. In FIG. 4, the irradiation region IR of each light projecting unit 110 is shown by a chain double-dashed line, and the imaging region TR of the light receiving unit 120 is shown by a chain line.

FIG. 5 is a diagram for explaining the positional relationship between the light receiving unit 120 and the stage 140. FIG. 5 shows the light receiving unit 120 and the stage 140 viewed from the side. As shown in FIG. 5, the optical axis A1 of the light receiving unit 120 is inclined with respect to the rotation axis Ax of the stage 140 and extends obliquely downward toward the measurement target S on the stage 140.

The light receiving unit 120 has a virtual imaging surface 120a that is perpendicular to the optical axis A1. The area where the imaging surface 120a is directed becomes the area where the light receiving unit 120 images. In this example, the imaging surface 120a is directed obliquely downward with respect to the measurable region MR. The inclination angle D1 of the imaging surface 120a with respect to the horizontal plane is set to 45 degrees, for example.

FIG. 6 is a diagram for explaining a specific configuration example of the stage 140. As shown in FIG. 6A, the stage plate 142 includes a fixed portion 401 and an inclined portion 402. The fixed portion 401 has a flat fixed mounting surface 401a, and the inclined portion 402 has a flat inclined mounting surface 402a. The fixed mounting surface 401a and the inclined mounting surface 402a constitute a mounting surface 142a.

The fixed portion 401 is fixed to the stage base 141, and the fixed mounting surface 401a is maintained horizontally. On the other hand, the inclined portion 402 is provided so as to be switchable between a horizontal posture in which the inclined mounting surface 402a is kept horizontal and an inclined posture in which the inclined mounting surface 402a is inclined with respect to the fixed mounting surface 401a. In FIG. 6A, the inclined portion 402 is in the horizontal posture, and in FIG. 6B, the inclined portion 402 is in the inclined posture. Moreover, as shown in FIG. 6C, a support portion 403 for supporting the inclined portion 402 in an inclined posture may be provided. Further, a tilt drive unit that drives the tilt unit 402 may be provided, and the tilt unit 402 may be tilted automatically according to an instruction from the CPU 210.

The inclination angle of the inclined mounting surface 402a with respect to the fixed mounting surface 401a (the inclination angle of the inclined mounting surface 402a with respect to the horizontal plane) D2 when the inclined portion 402 is in the inclined posture can be adjusted only to a predetermined value. Alternatively, it may be switchable in a plurality of stages. In this example, the inclination angle D2 of the inclined mounting surface 402a is adjusted to be equal to the inclination angle D1 (FIG. 5) of the imaging surface 120a. The tilt angles D1 and D2 may be adjusted to values equal to each other other than 45 degrees. A locking portion (for example, a protrusion) for locking the measuring object S may be provided on the inclined mounting surface 402a.

[2] Shape measurement of measurement object (1) Shape measurement by triangulation method In the measurement unit 100, the shape of the measurement object S is measured by the triangulation method. FIG. 7 is a diagram for explaining the principle of the triangulation method. As shown in FIG. 7, an angle α between the optical axis A2 of the measurement light and the optical axis A1 of the light receiving unit 120 is set in advance. The angle α is larger than 0 degrees and smaller than 90 degrees.

When the measurement target S is not mounted on the stage 140, the measurement light emitted from the light projecting unit 110 is reflected by the point O on the mounting surface of the stage 140 and enters the light receiving unit 120. On the other hand, when the measurement target S is placed on the stage 140, the measurement light emitted from the light projecting unit 110 is reflected by the point A on the surface of the measurement target S and enters the light receiving unit 120.

When the distance between the point O and the point A in the X direction is d, the height h of the point A of the measuring object S with respect to the mounting surface of the stage 140 is given by h=d÷tan(α). The CPU 210 of the PC 200 in FIG. 1 measures the distance d between the point O and the point A in the X direction based on the pixel data of the measurement object S provided by the control board 150. Further, the CPU 210 calculates the height h of the point A on the surface of the measuring object S based on the measured distance d. The three-dimensional shape of the measurement target S is measured by calculating the heights of a plurality of points on the surface of the measurement target S.

In order to irradiate a plurality of points on the surface of the measuring object S with the measuring light, the light projecting unit 110 in FIG. 1 emits the measuring light having various patterns. The pattern of the measurement light is controlled by the pattern generation unit 112 in FIG. The pattern of measurement light will be described below.

(2) First Pattern of Measuring Light FIG. 8 is a diagram for explaining the first pattern of measuring light. FIG. 8A shows a state in which the measuring object S on the stage 140 is irradiated with the measurement light from the light projecting unit 110. FIG. 8B shows a plan view of the measurement object S irradiated with the measurement light. As shown in FIG. 8A, as the first pattern, measurement light having a linear cross section parallel to the Y direction (hereinafter, referred to as line measurement light) is emitted from the light projecting unit 110. In this case, as shown in FIG. 8B, the portion of the linear measuring light with which the stage 140 is irradiated and the portion of the linear measuring light with which the surface of the measuring object S is irradiated are of the measuring object S. They are offset from each other in the X direction by a distance d corresponding to the height h of the surface. Therefore, the height h of the measuring object S can be calculated by measuring the distance d.

When a plurality of portions along the Y direction on the surface of the measuring object S have different heights, the height h of the plurality of portions along the Y direction is measured by measuring the distance d for each portion. Can be calculated.

Further, the CPU 210 of FIG. 1 measures the distance d for a plurality of portions along the Y direction at one position in the X direction, and then scans the linear measuring light parallel to the Y direction in the X direction, The distance d is measured for a plurality of portions along the Y direction at other positions in the direction. Thereby, the heights h of the plurality of portions of the measuring object S along the Y direction at the plurality of positions in the X direction are calculated. The height h of each point on the surface of the measuring object S can be calculated by scanning the linear measuring light in the X direction in a range wider than the dimension of the measuring object S in the X direction. Thereby, the three-dimensional shape of the measuring object S can be measured.

(3) Second Pattern of Measuring Light FIG. 9 is a diagram for explaining the second pattern of measuring light. As shown in FIG. 9, as the second pattern, measurement light having a linear cross section parallel to the Y direction and a pattern in which the intensity changes sinusoidally in the X direction (hereinafter referred to as sinusoidal measurement light). ) Is emitted from the light projecting unit 110 a plurality of times (four times in this example).

FIG. 9A shows the sinusoidal measurement light emitted for the first time. The intensity of the sinusoidal measurement light emitted for the first time has an initial phase φ at an arbitrary portion P0 on the surface of the measuring object S. The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by emitting the sinusoidal measuring light. The intensity of the received light is measured based on the pixel data of the measuring object S. Let I1 be the intensity of the light reflected by the portion P0 on the surface of the measuring object S.

FIG. 9B shows the sinusoidal measurement light emitted for the second time. The intensity of the sinusoidal measurement light emitted the second time has a phase (φ+π/2) at the portion P0 on the surface of the measurement object S. The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by emitting the sinusoidal measuring light. The intensity of the received light is measured based on the pixel data of the measuring object S. Let I2 be the intensity of the light reflected by the portion P0 on the surface of the measuring object S.

FIG. 9C shows the sinusoidal measurement light emitted for the third time. The intensity of the sinusoidal measurement light emitted the third time has a phase (φ+π) at the portion P0 on the surface of the measurement object S. The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by emitting the sinusoidal measuring light. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I3.

FIG. 9D shows the sinusoidal measurement light emitted for the fourth time. The intensity of the fourth sinusoidal measurement light has a phase (φ+3π/2) at the portion P0 on the surface of the measuring object S. The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by emitting the sinusoidal measuring light. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I4.

The initial phase φ is given by φ=tan ⁻¹ [(I1-I3)/(I2-I4)]. The height h of an arbitrary portion of the measuring object S is calculated from the initial phase φ. According to this method, the initial phase φ of each portion of the measuring object S can be calculated quickly and easily by measuring the light intensity four times. The initial phase φ can be calculated by emitting measurement light having different phases at least three times and measuring the intensity of the received light. By calculating the height h of each portion on the surface of the measuring object S, the three-dimensional shape of the measuring object S can be measured.

(4) Third Pattern of Measuring Light FIG. 10 is a diagram for explaining the third pattern of measuring light. As shown in FIG. 10, as the third pattern, a plurality of measurement light beams (hereinafter, referred to as striped measurement light beams) having a linear cross section that is parallel to the Y direction and arranged in the X direction are provided from the light projecting unit 110. It is emitted once (16 times in this example). That is, in the striped measurement light, linear bright portions parallel to the Y direction and linear dark portions parallel to the Y direction are periodically arranged in the X direction.

The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by emitting the first striped measurement light. The intensity of the received light is measured based on the pixel data of the first captured image of the measuring object S. FIG. 10A is a first captured image of the measuring object S corresponding to the first striped measurement light.

The second striped measurement light has a pattern in which the bright portion and the dark portion are moved by one unit in the X direction from the first striped measurement light. The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by the second striped measurement light being emitted. The intensity of the received light is measured based on the pixel data of the second captured image of the measuring object S.

The third striped measurement light has a pattern in which the bright portion and the dark portion are moved by one unit in the X direction from the second striped measurement light. The light reflected by the surface of the measuring object S is received by the light receiving unit 120 by the third striped measurement light being emitted. The intensity of the received light is measured based on the pixel data of the third captured image of the measuring object S.

By repeating the same operation, the light intensities corresponding to the 4th to 16th striped measurement lights are measured based on the pixel data of the 4th to 16th captured images of the measuring object S, respectively. The striped measurement light having a cycle of 16 units in the X direction is emitted 16 times, so that each portion of the surface of the measuring object S is irradiated with the striped measurement light. In addition, FIG.10(b) is a 7th picked-up image of the measuring object S corresponding to the 7th striped measurement light. FIG. 10C is a thirteenth captured image of the measurement object S corresponding to the thirteenth striped measurement light.

FIG. 11 is a diagram showing the relationship between the timing (number) at which an image of a specific portion of the measuring object S is captured and the intensity of the received light. The horizontal axis of FIG. 11 represents the order of images, and the vertical axis represents the intensity of received light. As described above, for each part of the measuring object S, the 1st to 16th captured images are generated. In addition, the intensity of light corresponding to each pixel of the generated 1st to 16th captured images is measured.

As shown in FIG. 11, a scatter diagram is obtained by illustrating the light intensity of each pixel of the captured image corresponding to the number of the captured image. By fitting a Gaussian curve, a spline curve, or a parabola to the obtained scatter diagram, it is possible to estimate the number (number) of the captured image when the light intensity is maximum with an accuracy of less than 1. In the example of FIG. 11, the fitted curved line indicates that the light intensity is maximized in the virtual 9.38th captured image between the 9th and 10th images. ..

Moreover, the maximum value of the light intensity can be estimated from the fitted curve. The height h of each portion of the measuring object S can be calculated based on the number of the captured image where the light intensity estimated in each portion of the measuring object S is maximum. According to this method, the three-dimensional shape of the measuring object S is measured based on the intensity of light having a sufficiently high S/N (signal/noise) ratio. Thereby, the accuracy of the shape measurement of the measuring object S can be improved.

In the shape measurement of the measurement object S using the measurement light having a periodic pattern shape such as the sinusoidal measurement light or the striped measurement light, the relative height of each part of the surface of the measurement object S is measured. (Relative value of height) is measured. This is because it is not possible to identify each of a plurality of straight lines (stripe) parallel to the Y direction that form a pattern, and there is an uncertainty corresponding to an integral multiple of one period (2π) of the plurality of straight lines. , Because the absolute phase cannot be obtained. Therefore, a known unwrapping process is performed on the measured height data based on the assumption that the height of one portion of the measuring object S and the height of a portion adjacent to the portion continuously change. May be done.

(5) Fourth Pattern of Measuring Light FIG. 12 is a diagram for explaining the fourth pattern of measuring light. As shown in FIG. 12, as the fourth pattern, measurement light (hereinafter, referred to as code measurement light) having a linear cross section parallel to the Y direction and having a bright portion and a dark portion aligned in the X direction is used. The light is emitted from the light projecting unit 110 a plurality of times (four times in this example). The proportion of the bright portion and the dark portion of the coded measuring light is 50%, respectively.

In this example, the surface of the measuring object S is divided into a plurality of (16 in the example of FIG. 12) regions in the X direction. Hereinafter, the areas of the measuring object S in the X direction divided into a plurality of areas will be referred to as first to sixteenth areas, respectively.

FIG. 12A shows the coded measurement light emitted for the first time. The cord-shaped measurement light emitted for the first time has a bright portion with which the first to eighth regions of the measuring object S are irradiated. In addition, the cord-shaped measurement light emitted for the first time has a dark portion with which the ninth to sixteenth regions of the measuring object S are irradiated. As a result, in the coded measurement light emitted for the first time, the bright portion and the dark portion are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright portion and the dark portion of the code-shaped measuring light emitted the first time is 50%.

FIG. 12B shows the coded measurement light emitted for the second time. The coded measurement light emitted for the second time has a bright portion with which the fifth to twelfth regions of the measuring object S are irradiated. In addition, the cord-shaped measurement light emitted the second time has a dark portion which is irradiated to the first to fourth and thirteenth to sixteenth regions of the measuring object S. As a result, in the coded measurement light emitted the second time, the bright portion and the dark portion are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright portion and the dark portion of the cord-shaped measuring light emitted the second time is 50%.

FIG. 12C shows the coded measurement light emitted for the third time. The coded measurement light emitted for the third time has a bright portion that is irradiated to the first, second, seventh to tenth, fifteenth, and sixteenth regions of the measuring object S. In addition, the coded measurement light emitted for the third time has a dark portion that is irradiated to the third to sixth and first to fourteenth regions of the measuring object S. As a result, in the coded measurement light emitted the third time, the bright portion and the dark portion are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright portion and the dark portion of the code-like measuring light emitted the third time is 50%.

FIG. 12D shows the coded measurement light emitted for the fourth time. The cord-shaped measurement light emitted for the fourth time has a bright portion with which the first, fourth, fifth, eighth, ninth, twelfth, thirteenth, and sixteenth areas of the measuring object S are irradiated. .. In addition, the code-shaped measurement light emitted for the fourth time is a dark portion irradiated to the second, third, sixth, seventh, tenth, eleventh, fourteenth, and fifteenth regions of the measuring object S. Have. As a result, in the coded measurement light emitted for the fourth time, the bright portion and the dark portion are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright portion and the dark portion of the code-like measurement light emitted the fourth time is 50%.

A logic "1" is assigned to the bright portion of the coded measurement light, and a logic "0" is assigned to the dark portion of the coded measurement light. Further, the logical arrangement of the first to fourth coded measurement lights with which each region of the measurement object S is irradiated is referred to as a code. In this case, the first region of the measuring object S is irradiated with the coded measuring light of the code “1011”. As a result, the first region of the measuring object S is encoded as the code “1011”.

The second region of the measuring object S is irradiated with the coded measurement light of the code “1010”. As a result, the second region of the measuring object S is encoded as the code “1010”. The third region of the measuring object S is irradiated with the coded measuring light with the code “1000”. As a result, the third region of the measuring object S is encoded with the code “1000”. Similarly, the sixteenth region of the measuring object S is irradiated with the coded measuring light having the code “0011”. As a result, the 16th region of the measuring object S is encoded with the code “0011”.

In this way, between the adjacent regions of the measuring object S, the measuring object S is irradiated with the coded measuring light a plurality of times such that any one digit of the codes is different by "1". That is, the coded measurement light is applied to the measurement object S a plurality of times such that the bright portion and the dark portion change into a gray code.

The light reflected by each region of the surface of the measuring object S is received by the light receiving unit 120. By measuring the sign of the received light, the sign changed due to the existence of the measurement object S can be obtained for each region of the measurement object S. The distance corresponding to the distance d in FIG. 7 can be calculated by obtaining the difference between the obtained code and the code when the measurement object S does not exist for each region. Here, the absolute value of the distance d is calculated from the characteristic of the measuring method using the coded measuring light that the above code appears only once in the X-axis direction in the image. Thereby, the absolute height (absolute value of height) of the region of the measuring object S is calculated. By calculating the heights of all the regions on the surface of the measuring object S, the three-dimensional shape of the measuring object S can be measured.

In the above description, the surface of the measuring object S is divided into 16 regions in the X direction, and the coded measuring light is emitted from the light projecting unit 110 four times, but the present invention is not limited to this. The surface of the measuring object S may be divided into 2 ^N regions (N is a natural number) in the X direction, and the coded measuring light may be emitted N times from the light projecting unit 110. In the above description, N is set to 4 for ease of understanding. In the shape measuring process described later, N is set to 8, for example. Therefore, the surface of the measuring object S is divided into 256 regions in the X direction.

In the shape measurement of the measuring object S using the coded measurement light, the minimum resolution is a distance at which the coded measurement light can be separated and identified, that is, a distance corresponding to one pixel. Therefore, when the number of pixels in the visual field of the light receiving unit 120 in the X direction is 1024 pixels, the measurement target S having a height of 10 mm can be measured with a resolution of 10 mm÷1024≈10 μm. Measurement is performed by combining shape measurement using a coded measurement light that has a low resolution but can calculate an absolute value with shape measurement that uses a sinusoidal measurement light or a striped measurement light that cannot calculate an absolute value but has a high resolution. The absolute value of the height of the object S can be calculated with higher resolution.

In particular, in the shape measurement of the measuring object S using the striped measuring light in FIG. 10, the resolution can be set to 1/100 pixel. Note that the resolution of 1/100 pixel is to divide the surface of the measuring object S into approximately 100,000 regions in the X direction when the number of pixels in the visual field of the light receiving unit 120 in the X direction is 1024 pixels (that is, N≈). It corresponds to 17). Therefore, the absolute value of the height of the measuring object S can be calculated with higher resolution by combining the shape measurement using the cord-shaped measurement light and the shape measurement using the striped measurement light.

The method of scanning the measuring object S with the above-mentioned line-shaped measuring light is generally called a light section method. On the other hand, the method of irradiating the measuring object S with the sinusoidal measurement light, the striped measurement light or the coded measurement light is classified into the pattern projection method. Further, among the pattern projection methods, the method of irradiating the measuring object S with the sinusoidal measuring light or the striped measuring light is classified into the phase shift method, and the method of irradiating the measuring object S with the code measuring light is a spatial code. Classified as law.

In the phase shift method, calculation is performed based on the amount of received light reflected from the reference height position when the measurement target S does not exist when the sinusoidal measurement light or the striped measurement light that is a periodic projection pattern is emitted. The height of the measurement target S is obtained from the phase difference between the calculated phase and the phase calculated based on the amount of light received reflected from the surface of the measurement target S when the measurement target S is present. In the phase shift method, individual periodic fringes cannot be distinguished, and there is an uncertainty corresponding to an integer multiple of one fringe period (2π). Therefore, the absolute phase cannot be obtained. However, compared to the light section method, the number of images to be acquired is smaller, so that the measurement time is relatively short and the measurement resolution is high.

On the other hand, in the spatial code method, a code changed due to the existence of the measurement object S is obtained for each region of the measurement object S. The absolute height of the measurement object S can be obtained by obtaining the difference between the obtained code and the code when the measurement object S does not exist for each region. The spatial code method also has an advantage that it is possible to measure with a relatively small number of images and it is possible to obtain an absolute height. However, the measurement resolution is limited as compared with the phase shift method.

Although these projection methods have their respective drawbacks and advantages, they all have the common point that they use the principle of triangulation. The three-dimensional shape of the measurement object S is represented based on the image data (hereinafter, referred to as pattern image data) of the measurement object S onto which the measurement light of one or more patterns among the plurality of patterns as described above is projected. Point cloud data is generated.

In the following description, the point cloud data representing the three-dimensional shape of the measuring object S will be referred to as three-dimensional shape data. The three-dimensional shape data includes position data of a plurality of points on the surface of the measuring object S. The position data represents, for example, coordinates in the X direction, the Y direction, and the Z direction. In this case, if the data of an arbitrary point in the three-dimensional shape data is Pn (n is a natural number), Pn can be represented by (Xn, Yn, Zn) using the coordinate value of the device coordinate system, for example. The three-dimensional shape data may be composed of surface information data generated based on the point cloud data, and may include data in other formats such as a polygon mesh. An image representing the three-dimensional shape of the measuring object S (hereinafter, referred to as a three-dimensional shape image) can be displayed based on the three-dimensional shape data.

In the present embodiment, the three-dimensional shape image is an image showing a state in which the three-dimensional shape data is projected on an arbitrary plane in which the two-dimensional coordinate system is defined, and is used for receiving the designation of the measurement location by the user. It is an image. The user can specify the plane on which the three-dimensional shape data is projected as the direction in which the measurement target S is viewed (the position of the light receiving unit 120 with respect to the measurement target S). Thereby, the orientation of the measuring object S represented by the three-dimensional image changes.

If the position and orientation of the measuring object S with respect to the light projecting unit 110 and the light receiving unit 120 are constant, only a part of the measuring object S is irradiated with the measuring light. Further, only the light reflected by a part of the measuring object S enters the light receiving unit 120. Therefore, it is not possible to obtain solid shape data over a wide range of the surface of the measuring object S. Therefore, by changing the position or orientation of the measuring object S, the measuring object S is imaged from a plurality of different viewpoints, a plurality of three-dimensional shape data corresponding to each of the plurality of viewpoints is acquired, and the acquired plurality of 3D shape data may be combined.

FIG. 13 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by imaging the measurement target S from a plurality of viewpoints. For example, as shown in FIG. 13A, after the position and orientation of the measuring object S is adjusted by the user on the stage 140, the measuring object S is imaged by using the measurement light. Three-dimensional shape data is generated. An example of a stereoscopic image based on the first stereoscopic shape data is shown in FIG. The three-dimensional shape data is generated based on the measurement light reflected by the surface of the measuring object S and incident on the light receiving unit 120. Therefore, three-dimensional shape data is generated for the portion of the surface of the measuring object S that faces the light receiving unit 120, but three-dimensional shape data cannot be generated for the portion that does not face the light receiving unit 120. ..

Then, as shown in FIG. 13B, after the stage 140 is rotated by a certain angle by the rotation mechanism 143 of FIG. 2, the measurement object S is imaged using the measurement light, so that the second three-dimensional shape data is obtained. Is generated. In the example of FIG. 13B, the stage 140 is rotated counterclockwise by a predetermined angle from the state of FIG. 13A. An example of a stereoscopic image based on the second stereoscopic shape data is shown in FIG. As described above, when the stage 140 rotates, the portion of the surface of the measuring object S facing the light receiving unit 120 changes with the rotation. As a result, three-dimensional shape data including a part that was not acquired at the time of the first imaging is generated.

Further, as shown in FIG. 13C, after the stage 140 is rotated by a certain angle by the rotation mechanism 143 of FIG. 2, the measurement object S is imaged using the measurement light, so that the third three-dimensional shape data is obtained. Is generated. In the example of FIG. 13C, the stage 140 is rotated counterclockwise by a predetermined angle from the state of FIG. 13B. An example of a three-dimensional shape image based on the third three-dimensional shape data is shown in FIG.

In this way, the rotation of the stage 140 and the imaging of the measuring object S are repeated, so that a plurality of three-dimensional shape data corresponding to a plurality of viewpoints are generated. The one rotation angle of the stage 140 and the number of rotations thereof may be predetermined, or may be arbitrarily designated by the user. By combining these three-dimensional shape data, a wide range of three-dimensional shape data of the measuring object S is generated.

In the present embodiment, the relative positions of the light receiving unit 120, the light projecting unit 110, and the stage 140 are constant, and parameters (hereinafter, device parameters) representing these relative positions are stored in advance in, for example, the storage device 240 in FIG. 1. To be done. When the stage drive unit 146 of FIG. 1 drives the rotation mechanism 143, for example, the rotation angle of the stage 140 is designated in advance by the user, and the stage drive unit 146 is controlled based on the stored angle. In this case, the rotation angle of the stage 140 is stored in, for example, the ROM 220 or the work memory 230 of FIG. When synthesizing a plurality of three-dimensional shape data, the CPU 210 of FIG. 1 can easily and accurately align the plurality of three-dimensional shape data based on the stored rotation angle and the device parameter. Further, the user may perform detailed setting and correction of alignment.

A sensor or the like that detects the rotation angle of the stage 140 may be provided. In this case, even when the user operates the stage operation unit 145 to rotate the stage 140, it is easy to align the plurality of three-dimensional shape data on the basis of the angle detected by the sensor and the device parameter. It can be done accurately and accurately.

[3] Texture Image In the measurement unit 100, the illumination light output unit 130 irradiates the measurement object S with illumination light or the light projecting units 110A and 110B illuminate the measurement object S with uniform measurement light. In this state, image data (hereinafter referred to as texture image data) representing the appearance (surface state) of the measuring object S is generated. The uniform measuring light is a measuring light having no pattern and can be used in place of the illumination light. The surface state of the measuring object S includes, for example, a pattern or a color. Hereinafter, the image represented by the texture image data is referred to as a texture image.

Various examples of texture image data will be described. For example, a plurality of texture image data are acquired while the focus position of the light receiving unit 120 is relatively changed with respect to the measurement target S. By combining the plurality of texture image data, texture image data in which the entire surface of the measuring object S is in focus (hereinafter referred to as all-focus texture image data) is generated.

Moreover, a plurality of texture image data may be acquired under a plurality of different imaging conditions. The imaging conditions include, for example, the exposure time of the light receiving unit 120, the intensity (brightness) of the illumination light from the illumination light output unit 130, the uniform intensity (brightness) of the measurement light from the light projecting unit 110, and the like. Well-known high dynamic (HDR) composition is performed using a plurality of acquired texture image data. As a result, texture image data (hereinafter referred to as HDR texture image data) in which blackout and whiteout due to differences in brightness are suppressed is generated.

Further, the imaging condition may be changed as the focus position is changed. Specifically, the focus position of the light receiving unit 120 is relatively changed with respect to the measurement target S, and the texture image data is acquired under a plurality of different imaging conditions at each focus position. By synthesizing a plurality of acquired texture image data, it is possible to generate texture image data in which the entire surface of the measurement target S is in focus and blackout and whiteout are suppressed.

Each texture image data includes texture information (information indicating an optical surface state) indicating the color or brightness of each point on the measurement target S. On the other hand, the above-mentioned three-dimensional shape data does not include the texture information of the measured object S. Therefore, the solid shape data and any one of the texture image data are combined to generate textured solid shape data in which texture information is added to the solid shape data.

The textured three-dimensional shape data includes position data of a plurality of points on the surface of the measuring object S and data indicating the color or brightness of the point associated with the position data of each point. In this case, if the data of an arbitrary point in the textured solid shape data is TPn (n is a natural number), TPn is, for example, the coordinate value of the device coordinate system and the three primary color components (R, G) of red, green, and blue. , B) and can be represented by (Xn, Yn, Zn, Rn, Gn, Bn). Alternatively, TPn can be represented by (Xn, Yn, Zn, In) using the coordinate value of the device coordinate system and the brightness value (I), for example. The textured three-dimensional shape data may be composed of surface information data generated based on the point cloud data.

In the following description, the texture image represented by the texture image data acquired in a fixed focus position and imaging conditions is called a normal texture image, the image represented by the omnifocal texture image data is called an omnifocal texture image, An image represented by HDR texture image data is called an HDR texture image. An image represented by textured solid shape data is referred to as a textured solid shape image.

When a plurality of three-dimensional shape data in which the position or orientation of the measuring object S is different is generated as described above, the texture image data may be acquired when generating each three-dimensional shape data. In this case, by combining a plurality of three-dimensional shape data and a plurality of texture image data, it is possible to generate textured three-dimensional shape data representing a wide range of three-dimensional shapes and surface states of the measuring object S.

[4] Shape measurement processing (1) Preparation for shape measurement Before executing the shape measurement processing of the measurement object S, the user prepares for shape measurement. FIG. 14 is a flowchart showing a procedure for preparation for shape measurement. Hereinafter, the procedure for preparing the shape measurement will be described with reference to FIGS. 1, 2, and 14. First, the user places the measuring object S on the stage 140 (step S1). Next, the user irradiates the measuring object S with the measuring light from the light projecting unit 110 (step S2). Subsequently, the user adjusts the brightness of the acquired live image and the position and orientation of the measurement target S while observing the live image displayed on the display unit 400 (hereinafter, referred to as first adjustment). Is performed (step S3). The brightness of the live image acquired in step S3 can be adjusted by changing at least one of the light amount of the measurement light and the exposure time of the light receiving unit 120. In the present embodiment, in order to make the brightness of the live image acquired using the measurement light suitable for observation, one of the light amount of the measurement light or the exposure time of the light receiving unit 120 is adjusted. The brightness of the acquired live image is preferably adjusted by the exposure time of the light receiving unit 120 while keeping the amount of measurement light constant. As a result, it is possible to suppress a decrease in measurement accuracy due to a change in the temperature of the measurement light source 111 with a change in the amount of measurement light.

In step S2, the measurement object S may be irradiated with any of the above-described first to fourth patterns of measurement light, or the measurement object S may be irradiated with uniform measurement light. In step S3, when a shadow of the measurement target S to be measured (hereinafter referred to as a measurement position) does not occur, the user does not need to adjust the position and orientation of the measurement target S. Instead, the light amount of the measurement light or the exposure time of the light receiving unit 120 may be adjusted.

Next, the user stops the irradiation of the measurement light and irradiates the measurement object S with the illumination light from the illumination light output unit 130 (step S4). Subsequently, the user adjusts the light amount of the illumination light or the exposure time of the light receiving unit 120 (hereinafter, referred to as second adjustment) while watching the live image displayed on the display unit 400 (step S5). The brightness of the live image acquired in step S5 can be adjusted by changing at least one of the light amount of illumination light and the exposure time of the light receiving unit 120, basically as in the example of step S3. In the present embodiment, one of the light amount of the illumination light and the exposure time of the light receiving unit 120 is adjusted in order to make the brightness of the live image acquired using the illumination light suitable for observation.

Next, the user confirms the live image displayed on the display unit 400, and determines whether the light amount, the exposure time of the light receiving unit 120, and the position and orientation of the measurement target S (hereinafter, referred to as an observation state) are appropriate. It is determined whether or not (step S6). In step S6, the measurement target S may be irradiated with the measurement light, the irradiation light, or the measurement light and the illumination light may be sequentially irradiated.

When it is determined in step S6 that the observation state is not appropriate, the user returns to the process of step S2. On the other hand, when it is determined in step S6 that the observation state is appropriate, the user ends preparation for shape measurement.

In the above description, the second adjustment is performed after the first adjustment, but the present invention is not limited to this. The first adjustment may be performed after the second adjustment. In this case, the user adjusts the position and orientation of the measurement target S in the second adjustment, and confirms that the desired portion of the measurement target S is irradiated with the measurement light during the first adjustment. Good. When the measurement light is not applied to the desired portion of the measurement object S, the position and the posture of the measurement object S are readjusted, and the light amount of the illumination light or the exposure time of the light receiving unit 120 is again adjusted as the second adjustment. May be adjusted.

(2) First Adjustment FIGS. 15 and 16 are flowcharts showing the details of the first adjustment in the procedure for the preparation for shape measurement. Hereinafter, the details of the first adjustment in the procedure for the shape measurement preparation will be described with reference to FIGS. 1, 2, 15, and 16. Hereinafter, the measurement light emitted from one of the light projecting units 110A and 110B will be referred to as one measurement light, and the measurement light emitted from the other will be referred to as the other measurement light. Here, in the measurement unit 100 according to the present embodiment, the light amounts of the one and the other measurement lights can be set independently. In addition, the exposure time of the light receiving unit 120 when the measurement object S is imaged using one measurement light and the exposure time of the light receiving unit 120 when the measurement object S is imaged using the other measurement light are Each can be set independently.

First, the user provisionally adjusts the light amount of one measurement light or the exposure time of the light receiving unit 120 in order to make the brightness of the obtained live image suitable for observation (step S11). Next, the user adjusts the magnification of the live image of the measurement target S displayed on the display unit 400 (hereinafter referred to as the field size) (step S12). Specifically, when a plurality of light receiving units 120 having different magnifications are used, the user selects any one of the light receiving units 120. Thereby, the live image acquired by the selected light receiving unit 120 is displayed on the display unit 400. The visual field size when the low-magnification light receiving unit 120 is selected is larger than the visual field size when the high-magnification light receiving unit 120 is selected. The measuring unit 100 may have a digital zoom function. In this case, the user can adjust the display magnification of the live image acquired by the light receiving unit 120.

Subsequently, the user determines whether or not the position and orientation of the measuring object S are appropriate based on the live image displayed on the display unit 400 (step S13). Here, when the shadow is not generated at the measurement location of the measurement target S, the user determines that the position and orientation of the measurement target S are appropriate. On the other hand, when a shadow is generated at the measurement location of the measurement object S, the user determines that the position and orientation of the measurement object S are not appropriate.

When it is determined in step S13 that the position and orientation of the measurement target S are not appropriate, the user adjusts the position and orientation of the measurement target S (step S14). Specifically, the user adjusts the position and orientation of the measuring object S by rotating the stage 140 with the rotating mechanism 143 or moving the measuring object S by hand. After that, the user returns to the process of step S13.

On the other hand, when it is determined in step S13 that the position and orientation of the measuring object S are appropriate, the user observes the brightness of the acquired live image based on the live image displayed on the display unit 400. It is determined whether or not the brightness is suitable for the measurement target S, that is, whether the light amount of one of the measurement lights or the exposure time of the light receiving unit 120 that is irradiated on the measurement target S is appropriate (step S15).

When it is determined in step S15 that the light amount of one measurement light or the exposure time of the light receiving unit 120 is not appropriate, the user adjusts the light amount of one measurement light or the exposure time of the light receiving unit 120 (step S16). Then, the user returns to the process of step S15.

On the other hand, when it is determined in step S15 that the light amount of one of the measurement lights or the exposure time of the light receiving unit 120 is appropriate, the user determines whether the observation state is appropriate from the live image displayed on the display unit 400. It is determined whether or not (step S17). When it is determined in step S17 that the observation state is not appropriate, the user returns to the process of step S14 or step S16. Specifically, when it is determined that the position and orientation of the measuring object S is not appropriate in the observation state, the user returns to the process of step S14. When it is determined that the light amount of the light (one measurement light) or the exposure time of the light receiving unit 120 is not appropriate in the observation state, the user returns to the process of step S16.

On the other hand, when it is determined in step S17 that the observation state is appropriate, the user stops the irradiation of one measurement light and irradiates the measurement object S with the measurement light from the other light projecting unit 110B ( Step S18 of FIG. 16). Subsequently, while viewing the live image displayed on the display unit 400, the user sets the light amount of the other measurement light or the light receiving unit 120 in order to make the brightness of the obtained live image suitable for observation. The exposure time is adjusted (step S19).

Then, based on the live image displayed on the display unit 400, the user determines whether the brightness of the acquired live image is suitable for observation, that is, the light amount of the other measurement light or the light receiving unit. It is determined whether the exposure time of 120 is appropriate (step S20). When it is determined in step S20 that the light amount of the other measurement light or the exposure time of the light receiving unit 120 is not appropriate, the user returns to the process of step S19. On the other hand, in step S20, when it is determined that the light amount of the other measurement light or the exposure time of the light receiving unit 120 is appropriate, the user ends the first adjustment. By performing the first adjustment, the optimal light amount condition of the one and the other measurement light for generating the three-dimensional shape data, or the exposure time condition of the light receiving unit 120 corresponding to the one and the other measurement light, respectively, can be obtained. Is set. If the other light projecting unit 110B is not used, the user may omit the procedure of steps S18 to S20 and end the first adjustment after the process of step S17.

(3) Second Adjustment FIG. 17 is a flowchart showing details of the second adjustment in the procedure for the preparation for shape measurement. Hereinafter, the details of the second adjustment in the procedure for the shape measurement preparation will be described with reference to FIGS. 1, 2, and 17. Here, in measurement unit 100 according to the present embodiment, the light amount of the illumination light can be set independently of the light amounts of the one and the other measurement lights. In addition, the exposure time of the light receiving unit 120 when the measurement target S is imaged using the illumination light is independent of the exposure time of the light reception unit 120 when the measurement target S is imaged using one or the other measurement light. Can be set.

First, the user adjusts the light amount of the illumination light or the exposure time of the light receiving unit 120 in order to make the brightness of the acquired live image suitable for observation (step S31). Next, based on the live image displayed on the display unit 400, the user determines whether or not the brightness of the acquired live image is suitable for observation, that is, the measurement target S is illuminated. It is determined whether the amount of illumination light or the exposure time of the light receiving unit 120 is appropriate (step S32).

When it is determined in step S32 that the amount of illumination light or the exposure time of the light receiving unit 120 is not appropriate, the user returns to the process of step S31. On the other hand, if it is determined in step S32 that the amount of illumination light or the exposure time of the light receiving unit 120 is appropriate, the user selects the type of texture image to be displayed (step S33) and makes the second adjustment. finish. The types of texture images include, for example, normal texture images, omnifocal texture images, and HDR texture images. By performing the second adjustment, the optimum light amount condition of the illumination light for generating the texture image data or the condition of the exposure time of the light receiving unit 120 corresponding to the illumination light is set.

Further, in step S33, when the omnifocal texture image or the HDR texture image is selected, the setting for appropriately acquiring the omnifocal texture image data or the HDR texture image data may be separately performed. For example, when the omnifocal texture image is selected, the change range of the focus position may be set. Further, when HDR texture image data is selected, details of the image capturing condition and the like may be set. In addition, an omnifocal texture image for preview or an HDR texture image may be displayed on the display unit 400 based on these settings.

(4) Shape Measurement Processing After the preparation for the shape measurement of FIGS. 14 to 17, the shape measurement processing of the measuring object S is executed. FIG. 18 is a flowchart showing an outline of the shape measuring process. When the user instructs the CPU 210 to start the shape measuring process, the CPU 210 irradiates the measuring object S with the measuring light according to the light amount condition or the exposure time condition set in the first adjustment. The image data (pattern image data) of the measuring object S on which the pattern of the measurement light is projected is acquired (step S41). The acquired pattern image data is stored in the work memory 230.

Next, the CPU 210 processes the acquired pattern image data with a predetermined measurement algorithm to generate three-dimensional shape data indicating the three-dimensional shape of the measuring object S (step S42). The generated three-dimensional shape data is stored in the work memory 230. In steps S41 and S42, as described above, pattern image data corresponding to a plurality of viewpoints may be acquired, and a plurality of three-dimensional shape data generated from the pattern image data may be combined. Thereby, a wide range of three-dimensional shape data of the measuring object S can be generated.

Next, the CPU 210 acquires texture image data corresponding to the type of texture image selected in step S33 of FIG. 17 (step S43). The acquired texture image data is stored in the work memory 230. Next, the CPU 210 generates textured solid shape data by synthesizing the solid shape data generated in step S42 and the texture image data acquired in step S43 (step S44). Next, the CPU 210 displays the three-dimensional image of the measurement object S or the three-dimensional image with texture on the display section 400 based on the generated three-dimensional data or three-dimensional data with texture (step S45). In this case, the user can appropriately select the image to be displayed. In step S45, when the measurement location of the measurement object S is not properly displayed, the user may perform the first and second adjustments of FIGS. 15 to 17 again. After that, the CPU 210 executes the measurement of the measurement location based on the measurement condition set by the user (step S46). The setting of measurement conditions will be described later. This completes the shape measurement process.

[5] Standard State and Inclination Confronting State The shape measurement process may be performed in a state in which the inclined portion 402 (FIG. 6) of the stage 140 is in a horizontal posture, and is performed in a state in which the inclined portion 402 is in an inclined posture. May be. When the measurement location of the measurement target S is predetermined and the measurement location is within the limited range of the measurement target S, it is not necessary to generate the three-dimensional shape data of the wide range of the measurement target S. In the present embodiment, the shape measurement process is performed in a state where the inclined portion 402 is in the inclined posture and the inclined mounting surface 402a (FIG. 6) of the inclined portion 402 and the imaging surface 120a (FIG. 5) of the light receiving unit 120 face each other. By performing the above, it is possible to efficiently acquire the required three-dimensional shape data of the measurement object S, and it is possible to easily acquire the measurement value of the measurement location. The fact that the inclined mounting surface 402a and the imaging surface 120a face each other is not limited to the case where the inclined mounting surface 402a and the imaging surface 120a are parallel to each other, and the inclined mounting surface 402a and the imaging surface 120a are within a certain range. It also includes the case of forming an angle (for example, 10 degrees or less).

In the following description, a state in which the inclined portion 402 is in the horizontal posture is called a standard state, and a state in which the inclined portion 402 is in the inclined posture and the inclined mounting surface 402a faces the imaging surface 120a is called an inclined facing state. When the shape measurement process is performed in the standard state, the first and second adjustments described above are preferably performed in the standard state, and when the shape measurement process is performed in the tilt facing state, the above-mentioned adjustment is performed. It is preferable that the first and second adjustments of (1) and (2) are performed in a tilt facing state.

The difference between the shape measuring process in the normal state and the shape measuring process in the inclination facing state will be described. FIG. 19A shows the positional relationship between the light receiving unit 120 and the measuring object S in the standard state, and FIG. 19B shows the positional relationship between the light receiving unit 120 and the measuring object S in the tilt facing state. Show. As shown in FIG. 19A, in the standard state, the measuring object S is mounted on the horizontal mounting surface 142a. As described above, the image pickup surface 120a of the light receiving unit 120 is directed obliquely downward with respect to the measurement target region MR.

As shown in FIG. 19B, in the inclined facing state, the measuring object S is placed on the inclined mounting surface 402a inclined with respect to the horizontal plane. Further, the rotational position of the stage 140 is adjusted so that the imaging surface a of the light receiving unit 120 and the inclined mounting surface 402a face each other. Hereinafter, the rotational position of the stage 140 when the imaging surface a of the light receiving unit 120 and the inclined mounting surface 402a face each other is referred to as a facing position. As described above, in this example, the tilt angle D1 of the tilt mounting surface 402a and the tilt angle D2 of the imaging surface 120a are equal to each other (FIGS. 5 and 6). Therefore, when the stage 140 is in the front facing position, the imaging surface 120a of the light receiving unit 120 and the inclined mounting surface 402a are parallel to each other.

In this example, since the inclined portion 402 is provided integrally with the stage base 141, the rotational position (face-to-face position) of the stage 140 in the tilt-faced state is constant. The facing position is stored in advance in the storage device 240 in FIG. 1, for example. The CPU 210 can adjust the rotational position of the stage 140 to a pre-stored facing position based on a user's instruction.

FIG. 20 is a diagram showing an example of the measuring object S. FIG. 21A is a diagram showing the measuring object S imaged by the light receiving unit 120 in the standard state. FIG. 21B is a diagram showing the measuring object S imaged by the light receiving unit 120 in the inclination facing state. The measurement object S in FIG. 20 includes a board B1 and elements B2 and B3 mounted on the board B1.

In the standard state, the upper surfaces of the substrate B1 and the elements B2, B3 are substantially parallel to the mounting surface 142a and not parallel to the imaging surface 120a of the light receiving unit 120. Therefore, as shown in FIG. 21A, the measurement target S is imaged in a state where the upper surfaces of the substrate B1 and the elements B2 and B3 are oriented obliquely with respect to the light receiving unit 120. On the other hand, in the inclined facing state, the upper surfaces of the substrate B1 and the elements B2 and B3 are substantially parallel to the inclined mounting surface 402a and substantially parallel to the imaging surface 120a of the light receiving unit 120. Therefore, as shown in FIG. 21B, the measurement target S is imaged in a state where the upper surfaces of the substrate B1 and the elements B2 and B3 substantially face the light receiving unit 120. In this way, the portion of the measuring object S that is directed vertically upward in the standard state (hereinafter, referred to as the upper surface region) is directed to the light receiving unit 120 in the inclined facing state. Therefore, in the inclined facing state, the three-dimensional shape data of the upper surface region is generated.

When the three-dimensional shape data is generated in the standard state, the upper surface region may not be properly represented by one three-dimensional shape data. In the example of FIG. 21A, a part of the upper surface of the substrate B1 is hidden by the elements B2 and B3. Therefore, the three-dimensional shape data of a part of the upper surface of the substrate B1 cannot be obtained. In order to properly obtain the three-dimensional shape data of the upper surface area, it is necessary to generate the three-dimensional shape data corresponding to a plurality of viewpoints and combine the plurality of three-dimensional shape data. On the other hand, in the inclined facing state, it is possible to easily acquire the three-dimensional shape data of the upper surface region without combining a plurality of three-dimensional shape data.

In step S46 of FIG. 18, the user sets the measurement conditions while viewing the stereoscopic image or the textured stereoscopic image displayed on the display unit 400. The measurement conditions include measurement items and measurement points. The measurement item is the type of parameter to be measured, and includes distance, height, diameter, area, and the like. Further, as the measurement item, a geometric shape (for example, a point, a straight line, a circle, a surface, a sphere, a cylinder, a cone, etc.) for specifying a measurement location may be designated.

The setting of measurement conditions will be described. In the following description, the three-dimensional image and the three-dimensional image with texture are collectively referred to as an object image. Here, an example will be described in which a reference plane serving as a measurement reference is set. FIG. 22 is a flowchart showing an operation example of the CPU 210 when setting the reference plane.

The user specifies the surface of the measuring object S to be the reference surface on the displayed object image. For example, a pointer is displayed on the display unit 400 together with the object image. The user operates the operation unit 250 to move the pointer and designates the target surface with the pointer. The CPU 210 determines whether or not the surface to be the reference surface is designated (step S61). When the surface is not designated, the CPU 210 repeats the process of step S61.

Next, the CPU 210 extracts the plane closest to the designated plane based on the three-dimensional shape data (step S62), and sets the extracted plane as the reference plane (step S63). Usually, each surface of the measuring object S is not a perfect flat surface because it slightly includes irregularities or is slightly curved. Therefore, a virtual plane having the highest degree of coincidence with the designated plane is extracted and set as the reference plane. Next, the CPU 210 generates reference plane image data based on the set reference plane, and displays the reference plane image on the display unit 400 using the generated reference plane image data (step S64). The reference plane image is a two-dimensional (plan view) image in which the measurement target S is viewed perpendicularly to the reference plane. That is, in the reference plane image, the set reference plane is parallel to the screen of the display unit 400.

FIG. 23 is a diagram showing an example of the reference plane image. In the reference plane image GS of FIG. 23, the upper surface of the element B2 is designated and set as the reference plane. Therefore, the upper surface of the element B2 is substantially parallel to the screen of the display section 400. FIG. 24 is a diagram for explaining an example of setting measurement conditions. In the example of FIG. 24, the distance between two lines is specified as the measurement item, and two parallel sides L1 and L2 of the element B2 are specified as the measurement points. In this case, the edges corresponding to the sides L1 and L2 are extracted based on the reference plane image data, and the measurement points are set. When the measurement item and the measurement point are designated, the measurement values corresponding to the designated measurement item and the measurement point are calculated based on the three-dimensional shape data and displayed on the object image or the reference plane image GS. Specifically, the measurement value is calculated based on the reference plane image data generated based on the three-dimensional shape data. In the example of FIG. 24B, "xx (mm)" is displayed as the distance between the sides L1 and L2 on the reference plane image GS.

In the present embodiment, the shape measurement process is performed in the inclined facing state, so that it is possible to generate three-dimensional shape data of the upper surface region in which loss of position data is suppressed. Therefore, it is possible to appropriately represent the measurement object S in a plan view using only the three-dimensional shape data of the upper surface region generated in the inclined facing state without combining a plurality of three-dimensional shape data. As a result, the time required to generate the three-dimensional shape data can be shortened, and the measurement points can be accurately measured.

Further, depending on the orientation of the measuring object S in the initially displayed object image, it is necessary to adjust the orientation of the measuring object S in the object image in order to specify the reference plane. For example, when the surface to be designated as the reference surface does not appear in the object image, it is necessary to adjust the orientation of the measuring object S in the object image so that the surface appears in the object image. However, performing such work may reduce the work efficiency. Further, depending on the orientation of the measuring object S in the initially displayed object image, it may not be possible to intuitively recognize the surface to be designated as the reference surface.

Therefore, in the present embodiment, after the three-dimensional shape data is generated by the shape measuring process, the orientation of the measuring object S in the object image displayed first is determined by the direction of the measuring object S imaged by the light receiving unit 120. It is matched with the orientation (the relative orientation of the measuring object S with respect to the light receiving unit 120). For example, when the shape measurement process is performed on the measurement object S of FIG. 20 in the tilt-facing state, the orientation of the measurement object S in the first object image displayed is the measurement object of FIG. It matches the direction of the object S. Therefore, when designating the surface of the measuring object S included in the upper surface region (for example, the upper surface of the element B2) as the reference surface, the user hardly changes the orientation of the measuring object S in the object image, The reference plane can be easily specified. Further, since the displayed object image represents the measurement object S in a plan view, even a user who is unfamiliar with the operation can intuitively recognize the surface to be the reference surface and the measurement location. Therefore, the user can efficiently and quickly set the reference plane and the measurement conditions.

FIG. 25 is a diagram showing another example of the reference surface image GS. In the reference plane image GS of FIG. 25, the portion of the measuring object S is colored in accordance with the difference in height with respect to the reference plane. Here, the height means a distance from the reference plane in a direction perpendicular to the reference plane. In FIG. 25, the difference in color is represented by the difference in dot pattern. In this case, the user can easily recognize the difference in height between the reference surface and the other portion. The reference plane image functions as a height image in which the stereoscopic shape data or the textured stereoscopic shape data is represented by the height from a predetermined reference surface.

An image (hereinafter referred to as a profile image) representing the profile (cross-sectional shape) of the measuring object S may be displayed based on the three-dimensional shape data. FIG. 26 is a diagram for explaining designation of a portion where a profile should be acquired, and FIG. 27 is a diagram showing an example of a profile image.

In the example of FIG. 26, on the reference plane image GS, the line segment LS specifies the location of the measurement target S whose profile is to be acquired. In this case, profile data representing the profile of the measuring object S on the plane passing through the line segment LS and perpendicular to the reference plane is generated based on the three-dimensional shape data. The profile image GP of FIG. 27 is displayed based on the generated profile data. The profile image GP includes a profile line PL representing the profile of the measuring object S.

The measurement condition may be set using the profile image GP. In the example of FIG. 27, the distance between the two surfaces is designated as the measurement item, and the line segment L11 and the line segment L12 on the profile line PL are designated as the measurement points. The line segments L11 and L12 correspond to the upper surface of the substrate B1 and the upper surface of the element B3 of the measuring object S, respectively. In this case, the distance between the line segment L11 and the line segment L12 (the distance between the upper surface of the substrate B1 and the upper surface of the element B3) is calculated as a measurement value based on the three-dimensional shape data or the profile data. The calculated measurement value “yy” is displayed on the profile image GP.

[6] Quasi-facing position In the shape measuring process in the tilt-facing state, the rotational position of the stage 140 may be changed within a certain angle range from the facing position. 28 and 29 are diagrams for explaining a change in the orientation of the measuring object S due to a change in the rotational position of the stage 140. 28 and 29, the measuring object S is a cube.

As shown in FIG. 28, in a state where the inclined portion 402 of the stage 140 is in the inclined posture, the rotational position of the stage 140 is changed by a certain angle from the facing position to one and the other rotational directions. When the stage 140 is in the facing position, as shown in FIG. 29A, only the upper surface C1 of the measuring object S is imaged by the light receiving unit 120. Therefore, three-dimensional shape data representing only the upper surface C1 of the measuring object S is generated from the pattern image data acquired in this state.

When the rotation position of the stage 140 is changed from the facing position by one angle in one rotation direction (for example, 15 degrees), the measurement is performed in addition to the upper surface C1 of the measurement target S as shown in FIG. The side surface C2 of the object S is imaged. Therefore, three-dimensional shape data representing the upper surface C1 and the side surface C2 of the measuring object S is generated from the pattern image data acquired in this state. Hereinafter, the rotational position of the stage 140 when the stage 140 is rotated by a certain angle in the one rotation direction from the facing position is referred to as a first quasi-facing position.

Further, when the rotation position of the stage 140 is changed from the facing position to the other rotation direction by a constant angle (for example, 15 degrees), in addition to the upper surface C1 of the measurement target S, as shown in FIG. The side surface C3 of the measuring object S is imaged. Therefore, from the pattern image data acquired in this state, three-dimensional shape data representing the upper surface C1 and the side surface C3 of the measuring object S is generated. Hereinafter, the rotational position of the stage 140 when it is rotated from the facing position in the other rotating direction by a certain angle is referred to as a second quasi-facing position.

As an actual operation, for example, the first three-dimensional shape data is generated in a state where the stage 140 is in the facing position, and then the stage 140 is slightly rotated in one direction so that the rotational position of the stage 140 is the first quasi-direction. It is adjusted to the facing position, and the next solid shape data is generated. Subsequently, the stage 140 is slightly rotated in the reverse direction, the rotational position of the stage 140 is adjusted to the second quasi-facing position, and the final three-dimensional shape data is generated. Then, the stage 140 is returned to the facing position.

As described above, in the present embodiment, the optical axis A1 of the light receiving section 120 is tilted with respect to the rotation axis Ax of the stage 140. Therefore, when the stage 140 is rotated, the orientation of the measuring object S changes three-dimensionally in the imaging visual field of the light receiving unit 120. Therefore, as in the example of FIG. 29, the different surface of the measuring object S can be imaged by rotating the stage 140.

As a comparative example, a case where the rotation axis Ax of the stage 140 and the optical axis A1 of the light receiving unit 120 are parallel to each other will be described. 30 and 31 are diagrams for explaining a change in the orientation of the measuring object S in the comparative example. Differences between the examples of FIGS. 30 and 31 and the examples of FIGS. 28 and 29 will be described.

In the example of FIG. 30, the rotation axis Ax of the stage 140 and the optical axis A1 of the light receiving unit 120 are parallel to each other, and the stage 140 is in the standard state. In this case, the upper surface C1 of the measuring object S is imaged by the light receiving unit 120 as shown in FIG. That is, the measurement target S can be imaged in the same manner as in the inclination facing state in the present embodiment. However, in the comparative example, even if the stage 140 is rotated, the measuring object S rotates in a plane perpendicular to the optical axis A1 of the light receiving unit 120. Therefore, the orientation of the measuring object S changes two-dimensionally in the imaging visual field of the light receiving unit 120. Thereby, as shown in FIGS. 31B and 31C, even if the measurement target S is rotated, the surfaces other than the upper surface C1 are not imaged by the light receiving unit 120.

As described above, in the present embodiment, the rotational position of the stage 140 is slightly changed between the facing position and the quasi-facing position, so that the upper surface region of the measuring object S that is not imaged in the tilt facing state. An image of the surrounding area is captured. Thereby, three-dimensional shape data of the peripheral portion of the upper surface region can be generated. In particular, three-dimensional shape data representing a surface (for example, the side surfaces C2 and C3 of FIG. 29B and FIG. 29C) of the measuring object S parallel to the optical axis Ax of the light receiving unit 120 at the inclination facing position is also generated. can do. Generation of three-dimensional shape data representing such a surface is impossible when the rotation axis Ax of the stage 140 and the optical axis A1 of the light receiving unit 120 are parallel to each other as in the comparative example.

By combining the three-dimensional shape data generated in the inclined facing state and the three-dimensional shape data generated in the state in which the stage 140 is in the first and second quasi-facing positions, the measurement target S A wider range of three-dimensional shape data is generated. Therefore, the range of measurable measuring object S becomes wider.

The angle between the facing position and the first quasi-facing position and the angle between the facing position and the second quasi-facing position may be specified by the user and are predetermined. Good. These angles are the surfaces of the measuring object S that are parallel to the optical axis A1 of the light receiving unit 120 when the stage 140 is in the facing position (for example, the side surface C2 in FIGS. 29B and 29C). C3) is determined according to the optical characteristics (for example, the angle of view) of the light receiving unit 120 so that the image is captured by the light receiving unit 120 when the stage 140 is in the first and second quasi-facing positions. preferable.

Further, the required range of the object image data differs depending on the measurement location to be designated. Therefore, one of the first and second quasi-facing positions is selected, and the three-dimensional shape is obtained only when the stage 140 is in the facing position (tilt facing state) and in the selected quasi-facing position. Data may be generated. Further, the pattern image data may not be acquired in the tilt facing state, and the three-dimensional shape data may be generated only in the state in which the stage 140 is at least one of the first and second quasi-facing positions. However, even when the pattern image data is not acquired in the tilt facing state, the stage 140 is returned to the facing position after the three-dimensional shape data is generated, and the direction of the measuring object S in the displayed object image is the tilt facing direction. It is preferable that the orientation of the measuring object S corresponding to the state is the same.

[7] Placement of Measurement Object When the user places the measurement object S on the stage 140, the rotational position of the stage 140 may be changed from the front facing position. FIG. 32 is a diagram for explaining the rotational position of the stage 140 when the measurement target S is placed. In the example of FIG. 32, the inclined portion 402 is in an inclined posture, and the stage 140 is in a rotation position that is 180 degrees different from the facing position. In this case, the user can visually recognize the measuring object S on the inclined mounting surface 402a from a position substantially facing the inclined mounting surface 402a.

When the user places the measuring object S on the stage 140 with the stage 140 in the front facing position, the user looks at the live image displayed on the display unit 400 and the measuring object S receives the light. It is confirmed how the image is captured by the unit 120. In this case, the user needs to convert the direction on the screen of the display unit 400 into the direction in the actual three-dimensional space. Therefore, it is not easy for a user who is unfamiliar with such work to adjust the position and orientation of the measuring object S while observing the live image displayed on the display unit 400. Therefore, as in the example of FIG. 32, the rotational position of the stage 140 is adjusted so that the user's viewpoint substantially faces the inclined mounting surface 402a. In this state, the position and orientation of the measuring object S viewed by the user are substantially the same as the position and orientation of the measuring object S imaged by the light receiving unit 120 in the inclination facing state. Therefore, the user can adjust the position and orientation of the measurement target S while directly looking at the measurement target S. Therefore, even the inexperienced user can easily and appropriately adjust the position and posture of the measuring object S.

[8] Effects Since the light emitting unit 110, the light receiving unit 120, and the stage 140 are integrally provided in the measuring device 500 according to the present embodiment, the user does not need to adjust their arrangement. By mounting the measuring object S on the stage 140, the three-dimensional shape data of the measuring object S can be obtained. Further, since the rotation axis Ax of the stage 140 is not parallel to the optical axis A1 of the light receiving unit 120, the location of the measurement target S directed toward the light receiving unit 120 is changed by rotating the stage 140. Therefore, the light receiving unit 120 images different portions of the measurement target S. Therefore, it is possible to easily generate a wide range of three-dimensional shape data of the measuring object S.

Further, a reference plane that is a reference for measurement is set based on the generated three-dimensional shape data, and a measurement value at a designated measurement point is calculated based on the three-dimensional shape data and the reference plane. In this case, the processing using the point cloud data can be two-dimensionally performed by setting the reference plane. This facilitates calculation of the measurement value from the point cloud data.

Further, since the stage 140 is located at the front facing position, the inclined mounting surface 402a of the stage 140 directly faces the imaging surface 120a of the light receiving unit 120. Therefore, the position (upper surface region) of the measurement target S that is directed upward on the horizontal plane is directed to the imaging surface 120a of the light receiving unit 120 on the inclined mounting surface 402a. Thereby, the three-dimensional shape data of the upper surface region can be generated based on the light receiving signal from the light receiving unit 120. Therefore, it is possible to efficiently generate the three-dimensional shape data of a required portion while suppressing the loss of position data. Further, it becomes possible to represent the measurement target S in a plan view based on the generated three-dimensional shape data. Therefore, even an inexperienced user can easily and appropriately set the reference plane and the measurement location.

In addition, in the present embodiment, since the inclined portion 402 of the stage 140 can be switched between the horizontal posture and the inclined posture, the mounting surface 142a perpendicular to the rotation axis Ax and the rotation axis Ax are inclined. The inclined mounting surface 402a can be selectively used. Thereby, the three-dimensional shape data can be generated in different modes according to the purpose.

Further, in the present embodiment, the optical axis A1 of the light receiving unit 120 is inclined on the mounting surface 402a when the inclined portion 402 of the stage 140 is in the inclined posture and the stage 140 is in the facing position (inclined facing state). Orthogonal to. As a result, the position of the measuring object S that is directed vertically upward on the horizontal plane is directed to the imaging surface 120a of the light receiving unit 120 on the inclined mounting surface 402a. Therefore, the measurement object can be represented in plan view with high accuracy based on the generated three-dimensional shape data.

[9] Other Embodiments (1) FIG. 33 is a diagram for explaining another configuration example of the stage 140. In the example of FIG. 33, the stage plate 142 is not divided into the fixed portion 401 and the inclined portion 402. The tilting member 410 is attached on the mounting surface 142a of the stage plate 142. The tilt member 410 is attachable to and detachable from the stage plate 142. The tilting member 410 has a tilted mounting surface 410a and a locking portion 411 for locking the measuring object S mounted on the tilted mounting surface 410a. The tilt angle of the tilt mounting surface 410a is, for example, the same as the tilt angle of the tilt mounting surface 402a in the above-described embodiment.

Since the rotational position of the stage 140 and the orientation of the inclined mounting surface 402a are associated with each other, it is preferable that the mounting position of the inclined member 410 on the mounting surface 142a be constant. In this example, the stage plate 142 is provided with a plurality of holes 142h, and the bottom surface of the inclined member 410 is provided with a plurality of protrusions 410b corresponding to the holes 142h. By inserting the protrusions 410b of the tilting member 410 into the plurality of holes 142h of the stage plate 142, the stage plate 142 is attached to the mounting surface 142a at predetermined positions. Instead of providing the hole 142h and the protrusion 410b, a mark or the like indicating the mounting position of the tilt member 410 may be attached to the stage plate 142.

Also in this example, the inclined mounting surface 402a can be directly opposed to the imaging surface 120a of the light receiving unit 120. Therefore, it is possible to generate three-dimensional shape data of the position of the measuring object S that is directed upward on the horizontal plane. Further, based on the generated three-dimensional shape data, it is possible to easily display a target object image that two-dimensionally represents the measurement target S. Therefore, even an inexperienced user can easily set the reference plane and specify the measurement location.

Also, by mounting and dismounting the slant member 410, the mounting surface 142a perpendicular to the rotation axis Ax and the slant mounting surface 410a slanting with respect to the rotation axis Ax can be selectively used. Thereby, the three-dimensional shape data can be generated in different modes according to the purpose.

It should be noted that a plurality of types of tilt members 410 having different tilt angles of the tilt mounting surface 410a may be used. Further, in the one tilt member 410, the tilt angle of the tilt mounting surface 410a may be variable.

(2) In the above embodiment, the reference plane is set by the user designating any surface of the measurement object S on the object image, but the reference plane may be set automatically. .. For example, as described above, the three-dimensional shape data is generated in the inclined facing state, so that the object image representing the measurement object S in a plan view can be displayed. Therefore, in the object image, the surface of the measuring object S having the smallest inclination in the depth direction (the surface of the measuring object S having the smallest angle with respect to the imaging surface 120a of the light receiving unit 120) is specified, and the surface is specified. The plane with the highest degree of coincidence may be extracted and set as the reference plane.

(3) In the above embodiment, the monocular camera is used as the light receiving unit 120, but a compound eye camera may be used instead of the monocular camera or in addition to the monocular camera. In addition, a plurality of light receiving units 120 may be used and stereoscopic shape data may be generated by a stereo method. Further, in the above-described embodiment, two light projecting units 110 are used, but if it is possible to generate three-dimensional shape data, only one light projecting unit 110 may be used, or three or more light projecting units may be used. The light unit 110 may be used.

Further, when the live image data and the texture image data are acquired using the uniform measurement light from the light projecting unit 110, the illumination light output unit 130 and the illumination light source 320 may not be provided. It is also possible to generate texture image data by synthesizing pattern image data, and in that case, the illumination light output unit 130 and the illumination light source 320 may not be provided.

Further, in the above embodiment, the pattern image data, the live image data, and the texture image data are acquired by the common light receiving unit 120. However, the light receiving unit for acquiring the three-dimensional shape data, the live image data, and the texture image data are acquired. May be separately provided.

Further, in the above embodiment, the point cloud data is generated by the triangulation method, but the point cloud data may be generated by another method such as the TOF (Time Of Flight) method.

(4) In the above embodiment, the stage drive unit 146 allows the stage 140 to rotate about the rotation axis Ax and does not move in other directions, but the present invention is not limited to this.

The stage 140 may be configured to be rotatable about, for example, the rotation axis Ax and movable in at least one of the X direction, the Y direction, and the Z direction. In this case, the rotation angle and the position of the stage 140 can be freely changed while the measurement target S is placed on the stage 140 in a fixed posture. Therefore, the measuring object S can be imaged from various viewpoints. As a result, it is possible to obtain three-dimensional shape data of a wider range of the measuring object S.

[10] Correspondence between each component of the claims and each part of the embodiment Hereinafter, an example of correspondence between each component of the claims and each part of the embodiment will be described, but the present invention is not limited to the following examples. Not limited.

In the above embodiment, the installation unit 161 is an example of a stage holding unit, the stage 140 is an example of a stage, the inclined mounting surfaces 402a and 410a are examples of an inclined mounting surface, and the head unit 190 is a head. The light emitting unit 110 is an example of a light emitting unit, the light receiving unit 120 is an example of a light receiving unit, the stand unit 162 is an example of a connecting unit, and the rotation control unit 501 is a rotation control unit. In the example, the point cloud data generation unit 502 is an example of the point cloud data generation unit, the reference plane setting unit 503 is an example of the reference plane setting unit, the measurement unit 504 is an example of the measurement unit, and the image data generation is performed. The part 505 is an example of the image data generating means, the mounting surface 142a is an example of a non-tilted mounting surface, the stage plate 142 is an example of a stage plate, and the tilting member 410 is an example of a tilted part. The paired position is an example of the first rotational position, and the first and second quasi-positive positions are examples of the second rotational position.

As each of the constituent elements in the claims, various other elements having the configurations or functions described in the claims can be used.

INDUSTRIAL APPLICABILITY The present invention can be used for various measuring devices that measure an object to be measured.

100 measuring unit 110 light projecting unit 111 measuring light source 112 pattern generating unit 113, 114 lens 120 light receiving unit 130 illumination light output unit 140 stage 150 control board 200 PC
210 CPU
220 ROM
230 Working Memory 240 Storage Device 250 Operation Unit 300 Control Unit 320 Illumination Light Source 400 Display Unit 500 Measuring Device S Measurement Object

Claims (10)

A stage holder,
A stage that is held by the stage holding unit so as to be rotatable about a vertical rotation axis, and that has a tilted mounting surface that is non-perpendicular to the rotation axis and on which a measurement target is mounted.
A light projecting unit that irradiates the measurement target placed on the stage with a measurement light having a pattern, and a light receiving unit that receives the measurement light reflected by the measurement target and outputs a light reception signal indicating a light reception amount. Head part including
By connecting the head unit and the stage holding unit, the measurement light is guided obliquely downward from the light projecting unit to the measurement target, and the optical axis of the light receiving unit is directed toward the measurement target. And a connecting portion that fixedly connects the head portion and the stage holding portion so that the positional relationship among the light projecting portion, the light receiving portion, and the stage is determined.
Rotation control means for controlling the rotation of the stage,
Point cloud data generating means for generating point cloud data representing a three-dimensional shape of the measurement object based on a light reception signal output by the light receiving unit;
A reference plane setting means for setting a reference plane as a measurement reference, based on the point cloud data generated by the point cloud data generating means,
The designation of the location to be measured of the measurement object is accepted, and based on the point cloud data generated by the point cloud data generation unit, the measurement value of the designated location is set to the reference plane set by the reference plane setting unit. With a measuring means for calculating with
The light receiving unit has an imaging surface perpendicular to the optical axis,
The rotation control means positions the stage at a first rotation position stored in advance so that the inclined mounting surface directly faces the imaging surface of the light receiving unit based on an instruction,
The light projecting unit irradiates the measurement target placed on the stage with measurement light in a two-dimensional manner in a state where the stage is located at the first rotation position,
The said point cloud data production|generation means is a measuring apparatus which produces|generates two-dimensional point cloud data based on the light reception signal output from the said light receiving part in the state which the said stage is located in the said 1st rotation position. The measuring device according to claim 1, wherein the light receiving unit is a monocular camera. Image data for generating image data representing an image of the measurement object viewed perpendicularly to the reference plane set by the reference plane setting means, based on the point cloud data generated by the point cloud data generating means. The measurement device according to claim 1, further comprising a generation unit. The measuring device according to claim 1, wherein the stage further has a non-tilted mounting surface orthogonal to the rotation axis. The stage is
A stage plate having the non-inclined mounting surface and held by the stage holding part;
The measuring device according to claim 4, further comprising: an inclined portion having the inclined mounting surface and detachable from the stage plate. The stage, the so a non-inclined mounting surface and the inclined placement surface is selectively formed, including the stage plate provided to be adjusted angle of inclination with respect to a plane orthogonal to the axis of rotation, according to claim 4 The measuring device described. The measuring device according to claim 1, wherein an optical axis of the light receiving unit is orthogonal to the inclined mounting surface in a state where the stage is located at the first rotation position. The rotation control means positions the stage at the first rotation position stored in advance based on an instruction, and sets the stage at a second rotation position based on a setting, and the second control. It is possible to execute a second control of positioning the third rotation position different from the rotation position,
When the rotation control means executes the first control based on the instruction, the point cloud data generation means outputs a light reception signal output by the light reception unit in a state in which the stage is located at the first rotation position. A state in which the stage is located at the second rotational position when the first three-dimensional shape data is generated as the point cloud data based on the above, and the rotation control means executes the second control based on the setting. The second light receiving unit generates second solid shape data as the point group data based on a light receiving signal output by the light receiving unit, and outputs light by the light receiving unit when the stage is located at the third rotation position. The measuring device according to any one of claims 1 to 7, which generates third solid shape data as the point cloud data based on a signal and combines the second and third solid shape data. The rotation control means positions the stage at a quasi-facing position different from the first rotation position,
The point cloud data generating means generates first stereoscopic shape data as the point cloud data based on a light reception signal output by the light receiving unit in a state where the stage is located at the first rotation position, Second solid shape data is generated as the point cloud data based on a light receiving signal output by the light receiving unit in a state where the stage is located at the quasi-confronting position, and the first and second solid shape data are generated. The measuring apparatus according to any one of claims 1 to 8, which is synthesized. The light projecting unit two-dimensionally irradiates the measuring object placed on the stage with the measuring light a plurality of times while the stage is located at the first rotation position. The measuring device according to any one of claims 1 to 9.

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