JP6004851B2 - Shape measuring device, shape measuring method, and shape measuring program - Google Patents

Description

  The present invention relates to a shape measuring device, a shape measuring method, and a shape measuring program.

  In a triangulation type shape measuring apparatus, light is irradiated on the surface of a measurement object, and the reflected light is received by a light receiving element having pixels arranged one-dimensionally or two-dimensionally. The height of the surface of the measurement object can be measured based on the peak position of the received light amount distribution obtained by the light receiving element. Thereby, the shape of the measurement object can be measured.

  Non-Patent Document 1 proposes a shape measurement by a triangulation system that combines encoded light and a phase shift method. Further, Non-Patent Document 2 proposes a shape measurement using a triangulation system in which encoded light and striped light are combined. In these methods, the accuracy of the shape measurement of the measurement object can be improved.

Toni F. Schenk, "Remote Sensing and Reconstruction for Three-Dimensional Objects and Scenes", Proceedings of SPIE, Volume 2572, pp. 1-9 (1995) Sabry F. El-Hakim and Armin Gruen, "Videometrics and Optical Methods for 3D Shape Measurement", Proceedings of SPIE, Volume 4309, pp. 219-231 (2001)

  In the shape measurement by the triangulation method, it often includes a portion where accurate shape measurement is impossible or difficult, such as a portion where a shadow occurs or a portion where multiple reflection of light occurs. Therefore, in the shape measurement, the measurement conditions must be appropriately selected so that the position to be measured of the measurement object can be measured. However, depending on the shape of the measurement object, it is not easy to appropriately select the measurement conditions for the measurement object.

  An object of the present invention is to provide a shape measuring device, a shape measuring method, and a shape measuring program capable of easily and appropriately selecting measurement conditions for a measuring object before measuring the shape of the measuring object.

(1) A shape measuring apparatus according to a first aspect of the present invention is a stage on which a measurement object is placed, and a light projecting unit configured to irradiate light onto the measurement object placed on the stage obliquely from above. And a light receiving unit disposed above the stage, configured to receive light reflected by the measurement object and output a light reception signal indicating the amount of light received, and based on the light reception signal output by the light reception unit A data generation unit configured to generate image data for displaying an image of the measurement object and to generate solid shape data indicating the three-dimensional shape of the measurement object by a triangulation method; and a data generation unit based on the generated image data or three-dimensional shape data by a configured display unit as an image to view the measurement object, when the measurement conditions selected, a plurality of image data or a plurality of different measurement conditions Projecting unit as the plurality of three-dimensional shape data is generated to control the light receiving unit and the data generating unit, based on a plurality of image data or three-dimensional shape data generated by the data generating unit, a plurality of measurement Measured objects corresponding to multiple measurement conditions can be estimated by estimating the difficult measurement areas of the measurement object that occur in the shape measurement performed under conditions, and recognizing the difficult measurement areas estimated corresponding to multiple measurement conditions. A control unit that controls the display unit to display a plurality of images of an object, and a user to select one of a plurality of measurement conditions based on the plurality of images displayed on the display unit when the measurement condition is selected. and an operation unit operated by, in the plurality of measurement conditions, at least one direction of light emitted by the pattern and the projection portion of the light emitted by the light projecting unit is different Control unit, at the time of shape measurement, projected portion as three-dimensional shape data is generated by the measurement conditions selected by operating the operation unit, and controls the receiving unit and the data generating unit.

In the shape measuring apparatus, when the measurement conditions selected, different light obliquely from above the measuring object mounted on the stage by the light projecting unit in the measurement condition is irradiated, the light reflected by the measurement object A light receiving signal is received above the stage by the light receiving unit and an amount of received light is output. Based on the light receiving signal output by the light receiving unit , a plurality of image data or a plurality of three-dimensional images for displaying an image of the measurement object Each shape data is generated. Under a plurality of measurement conditions, at least one of the pattern of light irradiated by the light projecting unit and the direction of light irradiated by the light projecting unit is different. Based on the generated plurality of image data or the plurality of three-dimensional shape data, the measurement difficulty regions of the measurement object generated in the shape measurement performed under the plurality of measurement conditions are estimated. A plurality of images of the measurement object respectively corresponding to the plurality of measurement conditions are displayed on the display unit so that the measurement difficulty regions estimated corresponding to the plurality of measurement conditions can be recognized.

The user can select one of a plurality of measurement conditions based on a plurality of images displayed on the display unit. During shape measurement, the light obliquely from above is irradiated to the measured object mounted on the stage by the light projecting unit in the selected measurement condition, the upper stage measurement conditions light reflected is selected by the measurement object The light receiving signal is received by the light receiving unit, and a light receiving signal indicating the amount of received light is output. Based on the light receiving signal output by the light receiving unit, solid shape data is generated under the selected measurement conditions.

According to this configuration, the user can recognize the measurement difficulty region of the measurement object that occurs in the shape measurement performed under a plurality of different measurement conditions before the shape measurement. Thereby, it is possible to easily and appropriately select measurement conditions for the measurement object before measuring the shape of the measurement object.
(2) The control unit takes a shorter time to generate the image data or three-dimensional shape data corresponding to each measurement condition when the measurement condition is selected and to estimate the measurement difficult region than the measurement time required for the shape measurement at the time of the shape measurement. In this manner, the light projecting unit, the light receiving unit, and the data generating unit may be controlled.
(3) The measurement difficulty region may include at least one of a region where a shadow is generated in the measurement object, a region where light stagnation or multiple reflection occurs, and a region where high-intensity light reflection occurs.
(4) The control unit displays the data inaccurate portion in which the data is estimated to be inaccurate based on the light reception signal or the data missing portion in each image data or each three-dimensional shape data as the measurement difficult region. The display unit may be controlled to do so.

( 5 ) The control unit may control the display unit to display the measurement time required for shape measurement under a plurality of measurement conditions.

  In this case, the user can recognize the measurement time required for shape measurement under a plurality of measurement conditions. Accordingly, the user can easily and appropriately select the measurement condition of the measurement object based on the measurement difficulty region and the measurement time before measuring the shape of the measurement object.

( 6 ) The plurality of measurement conditions may include a plurality of measurement conditions in which at least one of the type, position, and area of the measurement difficulty region that occurs in the shape measurement is different.

  In this case, before the shape measurement, the user can recognize a plurality of measurement conditions in which at least one of the type, position, and area of the measurement difficulty region that occurs in the shape measurement is different. Accordingly, the user can set measurement conditions suitable for shape measurement among a plurality of measurement conditions in which at least one of the type, position, and area of the measurement difficulty region that occurs in shape measurement is different before measuring the shape of the measurement object. It can be easily selected appropriately.

( 7 ) The plurality of measurement conditions are: the pattern of light emitted by the light projecting unit, the number of times of light irradiation by the light projecting unit, the exposure time of the light receiving unit, the intensity of light irradiated on the measurement object by the light projecting unit, and A plurality of measurement modes in which at least one of the three-dimensional shape data generation methods by the data processing unit is different may be included.

  In this case, the user can recognize the measurement difficulty region of the measurement object that occurs in the shape measurement performed in different measurement modes before the shape measurement. This makes it possible to easily and appropriately select a measurement mode suitable for shape measurement from among a plurality of measurement modes before measuring the shape of the measurement object.

( 8 ) The plurality of measurement conditions may include a plurality of different postures or positions of the measurement object or a plurality of irradiation directions of different light.

  In this case, before the shape measurement, the user may recognize a measurement difficulty region of the measurement object that occurs in shape measurement performed in a plurality of postures or positions of the measurement object or a plurality of irradiation directions with different light. it can. Thus, before measuring the shape of the measurement object, the posture or position of the measurement object or the light irradiation direction suitable for shape measurement among the plurality of different postures or positions of the measurement object or the plurality of irradiation directions of different light. It can be easily selected appropriately.

( 9 ) The control unit displays a plurality of images of the measurement object corresponding to the plurality of measurement conditions based on the image data generated by the data generation unit when estimating the measurement difficulty region when the measurement condition is selected. In addition to controlling the display unit, the light pattern irradiated by the light projecting unit, the number of times of light irradiation by the light projecting unit, the exposure time of the light receiving unit, the intensity and data of the light irradiated to the measurement object by the light projecting unit In a plurality of states in which at least one of the image data generation methods by the processing unit is different, the measurement difficult regions of the measurement object under a plurality of measurement conditions are respectively estimated, and the estimation time required for estimation of the measurement difficult regions is required for the shape measurement. The pattern of light emitted by the light projecting unit so as to be shorter than the measurement time, the number of times of light irradiation by the light projecting unit, the exposure time of the light receiving unit, and the light irradiated on the measurement object by the light projecting unit At least one of the method of generating the image data by the degree and the data processing unit may be set to be different from the time of shape measurement.

  In this case, the measurement difficulty region is displayed together with the two-dimensional images. In addition, the measurement difficulty region is estimated in a shorter time than when measuring the shape of the measurement object. Thereby, the user can recognize the measurement difficulty region in a short time based on a plurality of two-dimensional images before measuring the shape.

( 10 ) The control unit displays a plurality of images of the measurement object corresponding to the plurality of measurement conditions based on the three-dimensional shape data generated by the data generation unit when estimating the measurement difficulty region at the time of selecting the measurement condition. In this way, the display unit is controlled, the pattern of light emitted by the light projecting unit, the number of times of light irradiation by the light projecting unit, the exposure time of the light receiving unit, the intensity of light irradiated on the measurement object by the light projecting unit, and Estimate the measurement difficulty region of the measurement object under multiple measurement conditions in multiple states with at least one of the three-dimensional shape data generation methods by the data processing unit, and estimate the time required for estimation of the measurement difficulty region The pattern of light irradiated by the light projecting unit, the number of times of light irradiation by the light projecting unit, the exposure time of the light receiving unit, and the light projecting unit At least one of the method for generating three-dimensional shape data according to the intensity and the data processing unit of the light may be set to be different from the time of shape measurement.

  In this case, the measurement difficulty region is displayed together with a plurality of three-dimensional images. Moreover, compared with the case where the shape of the measurement object is measured, the measurement difficulty region is estimated with high accuracy in a short time. Thereby, the user can recognize the measurement difficulty region in a short time based on a plurality of three-dimensional images before measuring the shape.

( 11 ) The control unit further includes a changing unit that sets the measuring object in a plurality of postures or positions by changing the direction of the measuring object with respect to the light projecting unit or the relative distance between the light receiving unit and the stage. When estimating the measurement difficult region when selecting the measurement condition, the measurement target may be estimated for each measurement target region under a plurality of measurement conditions in a state where the measurement target is set in a plurality of postures or positions by the changing unit. .

  In this case, the direction of the measurement object relative to the light projecting unit or the relative distance between the light receiving unit and the stage is changed. Thereby, the user can easily recognize the measurement difficulty region of the measurement object generated in a plurality of postures or positions before the shape measurement.

( 12 ) The light projecting unit is configured to irradiate the measurement object with light in different directions from different positions, and the control unit is different depending on the light projecting unit when estimating the measurement difficult region when the measurement condition is selected. The measurement difficulty regions of the measurement object under a plurality of measurement conditions may be estimated in a state where light is irradiated on the measurement object in one or a plurality of directions.

  According to this configuration, the user can surely recognize the measurement difficulty region of the measurement object that occurs when the measurement object is irradiated with light in one or more different directions by the light projecting unit before the shape measurement. can do.

( 13 ) The light projecting unit includes first and second light projecting units that respectively irradiate the measurement object in different directions from different positions, and the control unit is configured to estimate the measurement difficulty region when the measurement condition is selected. The first and second light projecting units are controlled so that the measurement object is irradiated with light by one of the first and second light projecting units, and the first and second light projecting units are measured during shape measurement. The first and second light projecting units may be controlled so that the measurement object is sequentially irradiated with light from both.

  In this case, in the estimation of the measurement difficulty region, the number of generations of the image data or the three-dimensional shape data is reduced, and the processing time of the data generation unit is shortened. Thereby, the measurement difficulty region is estimated in a short time.

( 14 ) The control unit may control the light receiving unit so as to output the thinned light receiving signal when the measurement difficult region is estimated when the measurement condition is selected .

  In this case, the processing time of the data generation unit is shortened in estimating the measurement difficulty region. Thereby, the measurement difficulty region is estimated in a short time.

( 15 ) The control unit may be configured to calculate a degree of the area of the estimated measurement difficulty region in the measurement object. In this case, the extent of the area where measurement is difficult can be used for selecting the measurement conditions.

( 16 ) The control unit may control the display unit to display a calculation result of the degree of the area of the measurement difficulty region in the measurement object.

  In this case, the user can easily recognize the degree of the area of the measurement difficulty region. Thereby, the user can easily select an appropriate measurement condition based on the degree of the area of the measurement difficulty region.

( 17 ) The control unit selects a recommended measurement condition from among a plurality of measurement conditions based on the calculation result of the extent of the measurement difficulty region in the measurement object, and the display unit is configured to display the selected measurement condition. You may control.

  In this case, the user can select an appropriate measurement condition from a plurality of measurement conditions in consideration of the recommended measurement conditions.

( 18 ) The operation unit is operated by the user to designate an arbitrary range on the image of the measurement object displayed on the display unit, and the control unit performs the estimated measurement in the range designated by the operation unit. The extent of the difficult area may be calculated.

  In this case, the user can recognize the degree of the area of the estimated difficult measurement area in an arbitrary range on the image of the measurement object. Thereby, the user can easily select an appropriate measurement condition based on the degree of the area of the measurement difficulty region in the region to be measured.

( 19 ) In the shape measuring method according to the second aspect of the present invention, when measuring conditions are selected , the measuring object placed on the stage by the light projecting unit is irradiated with light from obliquely above under a plurality of different measuring conditions. the light reflected is received by the light receiving portion above the stage by an object, and outputs a light reception signal indicating the amount of received light, based on the output received signal by the light receiving portion, a plurality for displaying the image of the measuring object image data or three-dimensional shape data and generating respectively, at the time of measurement condition selection of, based on the generated plurality of image data or three-dimensional shape data, occurs in the shape measurements performed at a plurality of measurement conditions estimating measurement difficulty region of the measuring object, respectively, when the measurement conditions selected, recognizably the measurement difficulty region estimated to correspond to a plurality of measurement conditions, a plurality of measurement conditions Each displaying a plurality of images on the display unit of the corresponding measuring object, in measurement condition selection, the steps of receiving a selection of either the plurality of measurement conditions based on a plurality of images displayed on the display unit, during shape measurement, the upper of the selected light is irradiated obliquely from above the measuring object mounted on the stage by the light projecting unit in the measurement conditions, stage measurement conditions selected light reflected by the measurement object Receiving the light by the light receiving unit, outputting a light reception signal indicating the amount of light received, and generating solid shape data under the selected measurement conditions based on the light reception signal output by the light receiving unit , and a plurality of measurement conditions in at least one direction of light emitted by the pattern and the projection portion of the light emitted by the light projecting unit it is different as shall.

In this shape measuring method, when the measurement conditions selected, different light obliquely from above the measuring object mounted on the stage by the light projecting unit in the measurement condition is irradiated, the light reflected by the measurement object A light receiving signal is received above the stage by the light receiving unit and an amount of received light is output. Based on the light receiving signal output by the light receiving unit , a plurality of image data or a plurality of three-dimensional images for displaying an image of the measurement object Each shape data is generated. Under a plurality of measurement conditions, at least one of the pattern of light irradiated by the light projecting unit and the direction of light irradiated by the light projecting unit is different. Based on the generated plurality of image data or the plurality of three-dimensional shape data, the measurement difficulty regions of the measurement object generated in the shape measurement performed under the plurality of measurement conditions are estimated. A plurality of images of the measurement object respectively corresponding to the plurality of measurement conditions are displayed on the display unit so that the measurement difficulty regions estimated corresponding to the plurality of measurement conditions can be recognized.

The user can select one of a plurality of measurement conditions based on a plurality of images displayed on the display unit. During shape measurement, the light obliquely from above is irradiated to the measured object mounted on the stage by the light projecting unit in the selected measurement condition, the upper stage measurement conditions light reflected is selected by the measurement object The light receiving signal is received by the light receiving unit, and a light receiving signal indicating the amount of received light is output. Based on the light receiving signal output by the light receiving unit, solid shape data is generated under the selected measurement conditions.

  According to this configuration, the user can recognize the measurement difficulty region of the measurement object that occurs in the shape measurement performed under a plurality of different measurement conditions before the shape measurement. Thereby, it is possible to easily and appropriately select measurement conditions for the measurement object before measuring the shape of the measurement object.

( 20 ) A shape measurement program according to a third invention is a shape measurement program executable by a processing device, and is a measurement placed on a stage by a light projecting unit under a plurality of different measurement conditions when a measurement condition is selected. light is irradiated obliquely from above to the object, the light reflected by the measurement object is received by the light receiving portion above the stage, and outputs a light reception signal representing the received light amount, based on the output received signal by the light receiving portion Te, a plurality of image data or three-dimensional shape data for displaying an image of the measuring object and generating respectively, when the measurement conditions selected, based on the plurality of generated image data or three-dimensional shape data a process of estimating each measurement difficulty region of the measuring object occurring in the shape measurements performed at a plurality of measurement conditions, when the measurement conditions selected, corresponding to a plurality of measurement conditions Recognizable the estimated measurement difficulty region, a process of displaying a plurality of images of the measuring object corresponding to the plurality of measurement conditions on the display unit, when the measurement conditions selected, the plurality of images displayed on the display unit A process for receiving selection of any of a plurality of measurement conditions based on the measurement object, and at the time of shape measurement, the measurement object placed on the stage by the light projecting unit under the selected measurement condition is irradiated with light obliquely from above, and the measurement object The light reflected by the light is received by the light receiving unit above the stage under the selected measurement conditions, and a light reception signal indicating the amount of light received is output. Based on the light reception signal output by the light receiving unit, the selected measurement conditions A processing device for generating the three-dimensional shape data, and in a plurality of measurement conditions, at least one of a pattern of light irradiated by the light projecting unit and a direction of light irradiated by the light projecting unit There is a shall different.

According to the shape measuring program, upon the measurement conditions selected, the light obliquely from above the measuring object mounted on the stage by the light projecting unit with a plurality of different measurement conditions is irradiated, the light reflected by the measurement object There is received by the light receiving portion above the stage, the output light signal indicating the amount of received light, based on the output received signal by the light receiving portion, the measurement object images in the plurality for displaying image data or a plurality of Three-dimensional shape data is respectively generated. Under a plurality of measurement conditions, at least one of the pattern of light irradiated by the light projecting unit and the direction of light irradiated by the light projecting unit is different. Based on the generated plurality of image data or the plurality of three-dimensional shape data, the measurement difficulty regions of the measurement object generated in the shape measurement performed under the plurality of measurement conditions are estimated. A plurality of images of the measurement object respectively corresponding to the plurality of measurement conditions are displayed on the display unit so that the measurement difficulty regions estimated corresponding to the plurality of measurement conditions can be recognized.

The user can select one of a plurality of measurement conditions based on a plurality of images displayed on the display unit. During shape measurement, the light obliquely from above is irradiated to the measured object mounted on the stage by the light projecting unit in the selected measurement condition, the upper stage measurement conditions light reflected is selected by the measurement object The light receiving signal is received by the light receiving unit, and a light receiving signal indicating the amount of received light is output. Based on the light receiving signal output by the light receiving unit, solid shape data is generated under the selected measurement conditions.

  According to this configuration, the user can recognize the measurement difficulty region of the measurement object that occurs in the shape measurement performed under a plurality of different measurement conditions before the shape measurement. Thereby, it is possible to easily and appropriately select measurement conditions for the measurement object before measuring the shape of the measurement object.

  According to the present invention, it is possible to easily and appropriately select measurement conditions for a measurement object before measuring the shape of the measurement object.

It is a block diagram which shows the structure of the shape measuring apparatus which concerns on one embodiment of this invention. It is a schematic diagram which shows the structure of the measurement part of the shape measuring apparatus of FIG. It is a schematic diagram of the measuring object in the state irradiated with light. It is a schematic diagram of the measuring object in the state irradiated with light. It is a figure which shows an example of GUI which displays an image on 2 screens. It is a figure for demonstrating the principle of a triangulation system. It is a figure for demonstrating the 1st pattern of measurement light. It is a figure for demonstrating the 2nd pattern of measurement light. It is a figure for demonstrating the 3rd pattern of measurement light. It is a figure which shows the relationship between the timing (number) by which the image in the specific part of the measuring object was image | photographed, and the intensity | strength of the received light. It is a figure for demonstrating the 4th pattern of measurement light. It is a figure which shows an example of GUI of the display part at the time of operation mode selection. It is a figure which shows an example of GUI of the display part at the time of operation mode selection. It is a figure which shows an example of GUI of the display part after shape measurement processing execution. It is a typical side view of a measuring object for explaining an all-focus texture image. It is a figure which shows the relationship between the focus position of a light-receiving part, and the definition of a texture image. It is an omnifocal texture image of the measuring object based on generated omnifocal texture image data. It is a synthesized image of the measurement object based on the synthesized data. It is a figure which shows an example of the GUI of the display part at the time of selection of the kind of texture image. It is a figure for demonstrating correction | amendment of the main solid shape data by substereoscopic shape data. It is a figure for demonstrating correction | amendment of the main solid shape data by substereoscopic shape data. It is a figure for demonstrating correction | amendment of the main solid shape data by substereoscopic shape data. It is a flowchart which shows the procedure of preparation for shape measurement. It is a flowchart which shows the detail of the 1st adjustment in the preparation procedure of shape measurement. It is a flowchart which shows the detail of the 1st adjustment in the preparation procedure of shape measurement. It is a schematic diagram which shows the light-receiving part of FIG. 2 seen from the X direction. It is a flowchart which shows the detail of the 2nd adjustment in the procedure of a preparation for shape measurement. It is a flowchart which shows the detail of the 2nd adjustment in the procedure of a preparation for shape measurement. It is a figure which shows an example of the GUI of the display part at the time of execution of 2nd adjustment. It is a flowchart which shows the procedure of a shape measurement process. It is a flowchart which shows the procedure of a shape measurement process. It is a flowchart which shows the procedure of a shape measurement process. It is a figure for demonstrating adjustment of the attitude | position of a measurement object. It is a perspective view which shows an example of the measuring object for demonstrating the measurement conditions in a shape measurement process. It is a figure which shows an example of the preview image of the measurement target object of FIG. 34 in the some measurement mode displayed on a display part. It is a figure which shows the other example of the preview image of the measurement target object of FIG. 34 in the some measurement mode displayed on a display part. It is a figure which shows an example of the preview image of the measurement target object of FIG. 34 in the some attitude | position displayed on a display part. It is a figure which shows an example of the preview image of the measurement target object of FIG. 34 in the several irradiation direction of the measurement light displayed on a display part. It is a figure which shows the table | surface describing the measurement information regarding a measurement difficult area | region and a measurable area | region. It is a figure which shows an example of a display of the display part by which ROI was set to the preview image. It is a flowchart which shows the procedure of selection of a measurement condition. It is a flowchart which shows the procedure of selection of a measurement condition. It is a flowchart which shows the detail of the display of the preview image in the 1st measurement conditions included in the selection procedure of a measurement condition. It is a flowchart which shows the detail of the display of the preview image in the 2nd measurement condition included in the selection procedure of a measurement condition. It is a flowchart which shows the detail of the display of the preview image in the 3rd measurement conditions included in the selection procedure of a measurement condition.

[1] Configuration of Shape Measuring Device FIG. 1 is a block diagram showing a configuration of a shape measuring device according to an embodiment of the present invention. FIG. 2 is a schematic diagram illustrating a configuration of a measurement unit of the shape measuring apparatus 500 of FIG. Hereinafter, the shape measuring apparatus 500 according to the present embodiment will be described with reference to FIGS. 1 and 2. As shown in FIG. 1, the shape measuring apparatus 500 includes a measuring unit 100, a PC (personal computer) 200, a control unit 300, and a display unit 400.

  As illustrated in FIG. 1, the measurement unit 100 is a microscope, for example, and includes a light projecting unit 110, a light receiving unit 120, an illumination light output unit 130, a stage 140, and a control board 150. The light projecting unit 110 includes a measurement light source 111, a pattern generation unit 112, and a plurality of lenses 113, 114, and 115. The light receiving unit 120 includes a camera 121 and a plurality of lenses 122 and 123. On the stage 140, the measuring object S is placed.

  The light projecting unit 110 is disposed obliquely above the stage 140. The measuring unit 100 may include a plurality of light projecting units 110. In the example of FIG. 2, the measurement unit 100 includes two light projecting units 110. Hereinafter, when distinguishing the two light projecting units 110, one light projecting unit 110 is referred to as a light projecting unit 110A, and the other light projecting unit 110 is referred to as a light projecting unit 110B. The light projecting units 110 </ b> A and 110 </ b> B are arranged symmetrically across the optical axis of the light receiving unit 120.

  The measurement light source 111 of each of the light projecting units 110A and 110B is, for example, a halogen lamp that emits white light. The measurement light source 111 may be another light source such as a white LED (light emitting diode) that emits white light. Light emitted from the measurement light source 111 (hereinafter referred to as measurement light) is appropriately condensed by the lens 113 and then enters the pattern generation unit 112.

  The pattern generation unit 112 is a DMD (digital micromirror device), for example. The pattern generation unit 112 may be an LCD (Liquid Crystal Display), LCOS (Liquid Crystal on Silicon), or a mask. The measurement light incident on the pattern generation unit 112 is converted into a preset pattern and a preset intensity (brightness) and emitted. The measurement light emitted from the pattern generation unit 112 is converted into light having a diameter larger than the dimension of the measurement object S by the plurality of lenses 114 and 115 and then irradiated to the measurement object S on the stage 140. .

  The light receiving unit 120 is disposed above the stage 140. The measurement light reflected above the stage 140 by the measurement object S is collected and imaged by the plurality of lenses 122 and 123 of the light receiving unit 120 and then received by the camera 121.

  The camera 121 is, for example, a CCD (Charge Coupled Device) camera including an image sensor 121a and a lens. The image sensor 121a is, for example, a monochrome CCD (charge coupled device). The image sensor 121a may be another image sensor such as a CMOS (complementary metal oxide semiconductor) image sensor. From each pixel of the image sensor 121a, an analog electrical signal (hereinafter referred to as a light reception signal) corresponding to the amount of received light is output to the control board 150.

  Unlike a color CCD, a monochrome CCD does not need to be provided with pixels that receive red wavelength light, pixels that receive green wavelength light, and pixels that receive blue wavelength light. Therefore, the measurement resolution of the monochrome CCD is higher than the resolution of the color CCD. Further, unlike a color CCD, a monochrome CCD does not require a color filter for each pixel. Therefore, the sensitivity of the monochrome CCD is higher than that of the color CCD. For these reasons, the camera 121 in this example is provided with a monochrome CCD.

  In this example, the illumination light output unit 130 emits red wavelength light, green wavelength light, and blue wavelength light to the measurement object S in a time-sharing manner. According to this configuration, a color image of the measuring object S can be taken by the light receiving unit 120 using a monochrome CCD.

  On the other hand, when the color CCD has sufficient resolution and sensitivity, the image sensor 121a may be a color CCD. In this case, the illumination light output unit 130 does not need to irradiate the measurement object S with red wavelength light, green wavelength light, and blue wavelength light in a time-sharing manner, and irradiates the measurement object S with white light. Therefore, the configuration of the illumination light source 320 can be simplified.

  On the control board 150, an A / D converter (analog / digital converter) and a FIFO (First In First Out) memory (not shown) are mounted. The light reception signal output from the camera 121 is sampled at a constant sampling period by the A / D converter of the control board 150 and converted into a digital signal based on control by the control unit 300. Digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data.

  As shown in FIG. 1, the PC 200 includes a CPU (Central Processing Unit) 210, a ROM (Read Only Memory) 220, a work memory 230, a storage device 240, and an operation unit 250. The operation unit 250 includes a keyboard and a pointing device. A mouse or a joystick is used as the pointing device.

  The ROM 220 stores a system program. The working memory 230 includes a RAM (Random Access Memory), and is used for processing various data. The storage device 240 is composed of a hard disk or the like. The storage device 240 stores an image processing program and a shape measurement program. The storage device 240 is used for storing various data such as pixel data supplied from the control board 150.

  The CPU 210 generates image data based on the pixel data given from the control board 150. The CPU 210 performs various processes on the generated image data using the work memory 230 and causes the display unit 400 to display an image based on the image data. Further, the CPU 210 gives a driving pulse to a stage driving unit 146 to be described later. The display unit 400 is configured by, for example, an LCD panel or an organic EL (electroluminescence) panel.

  In FIG. 2, two directions orthogonal to each other within a plane (hereinafter referred to as a placement surface) on the stage 140 on which the measurement object S is placed are defined as an X direction and a Y direction, and arrows X and Y respectively. Show. A direction orthogonal to the mounting surface of the stage 140 is defined as a Z direction and is indicated by an arrow Z. A direction rotating around an axis parallel to the Z direction is defined as a θ direction, and is indicated by an arrow θ.

  The stage 140 includes an XY stage 141, a Z stage 142, a θ stage 143, and a tilt stage 144. The XY stage 141 has an X direction moving mechanism and a Y direction moving mechanism. The Z stage 142 has a Z direction moving mechanism. The θ stage 143 has a θ direction rotation mechanism. The tilt stage 144 has a mechanism that can rotate around an axis parallel to the mounting surface (hereinafter referred to as a tilt rotation mechanism). The XY stage 141, the Z stage 142, the θ stage 143, and the tilt stage 144 constitute a stage 140. The stage 140 further includes a fixing member (clamp) (not shown) that fixes the measuring object S to the placement surface.

  Here, a plane located at the focal point of the light receiving unit 120 and perpendicular to the optical axis of the light receiving unit 120 is referred to as a focal plane of the light receiving unit 120. As shown in FIG. 2, the relative positional relationship among the light projecting units 110A and 110B, the light receiving unit 120, and the stage 140 is such that the optical axis of the light projecting unit 110A, the optical axis of the light projecting unit 110B, and the optical axis of the light receiving unit 120. Are set so as to cross each other at the focal plane of the light receiving unit 120.

  A plane that is located at the focal point of the light projecting unit 110 (the point where the pattern of the measurement light is imaged) and is perpendicular to the optical axis of the light projecting unit 110 is referred to as a focal plane of the light projecting unit 110. Each of the light projecting units 110 </ b> A and 110 </ b> B is configured such that the focal plane of the light projecting unit 110 </ b> A and the focal plane of the light projecting unit 110 </ b> B intersect at a position including the focal point of the light receiving unit 120.

  The center of the rotation axis of the θ stage 143 in the θ direction coincides with the optical axis of the light receiving unit 120. Therefore, when the θ stage 143 is rotated in the θ direction, the measuring object S can be rotated within the field of view around the rotation axis without removing the measuring object S from the field of view. Further, the XY stage 141, the θ stage 143, and the tilt stage 144 are supported by the Z stage 142.

  That is, even if the θ stage 143 is rotated in the θ direction or the tilt stage 144 is rotated in the tilt direction, the center axis of the light receiving unit 120 and the movement axis of the Z stage 142 do not shift. It is configured. Here, the tilt direction is a rotation direction about an axis parallel to the placement surface. With this configuration, even when the position or orientation of the measurement object S is changed, the stage 140 is moved in the Z direction to synthesize a plurality of images respectively captured at a plurality of different focal positions of the light receiving unit 120. It becomes possible.

  Stepping motors are used for the X direction moving mechanism, the Y direction moving mechanism, the Z direction moving mechanism, the θ direction rotating mechanism, and the tilt rotating mechanism of the stage 140, respectively. The X direction moving mechanism, the Y direction moving mechanism, the Z direction moving mechanism, the θ direction rotating mechanism, and the tilt rotating mechanism of the stage 140 are driven by the stage operation unit 145 or the stage driving unit 146 in FIG.

  The user manually operates the stage operation unit 145 to move the mounting surface of the stage 140 in the X direction, the Y direction, or the Z direction relative to the light receiving unit 120, or the θ direction or tilt. Can be rotated in the direction. The stage driving unit 146 moves the stage 140 relative to the light receiving unit 120 in the X direction, the Y direction, or the Z direction by supplying current to the stepping motor of the stage 140 based on the driving pulse given from the PC 200. Or can be rotated in the θ direction or the tilt direction.

  In the present embodiment, stage 140 is an electric stage that can be driven by a stepping motor and can be manually operated, but is not limited thereto. The stage 140 may be an electric stage that can be driven only by a stepping motor, or may be a manual stage that can be operated only manually.

  The control unit 300 includes a control board 310 and an illumination light source 320. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light projecting unit 110, the light receiving unit 120, and the control board 150 based on a command from the CPU 210 of the PC 200.

  The illumination light source 320 includes, for example, three LEDs that emit red light, green light, and blue light. By controlling the luminance of the light emitted from each LED, light of an arbitrary color can be generated from the illumination light source 320. Light generated from the illumination light source 320 (hereinafter referred to as illumination light) is output from the illumination light output unit 130 of the measurement unit 100 through a light guide member (light guide). Note that the illumination light source 320 may be provided in the measurement unit 100 without providing the illumination light source 320 in the control unit 300. In this case, the illumination light output unit 130 is not provided in the measurement unit 100.

  The illumination light output unit 130 of FIG. 2 has an annular shape and is disposed above the stage 140 so as to surround the light receiving unit 120. Thereby, illumination light is irradiated to the measuring object S from the illumination light output unit 130 so that no shadow is generated. 3 and 4 are schematic views of the measuring object S in a state irradiated with light. In the example of FIGS. 3 and 4, the measuring object S has a hole Sh at the approximate center of the upper surface. 3A, 3C, and 4A, the shadow Ss is represented by hatching.

  FIG. 3A is a plan view of the measuring object S in a state irradiated with measurement light from one of the light projecting units 110A in FIG. 2, and FIG. 3B is a cross-sectional view taken along line AA in FIG. It is line sectional drawing. As shown in FIGS. 3A and 3B, when the measurement object S is irradiated with the measurement light from one light projecting unit 110A, the measurement light may reach the bottom of the hole Sh depending on the depth of the hole Sh. The shadow Ss is generated without reaching. Therefore, a part of the measuring object S cannot be observed.

  FIG. 3C is a plan view of the measuring object S in a state irradiated with the measurement light from the other light projecting unit 110B in FIG. 2, and FIG. 3D is a cross-sectional view taken along line BB in FIG. It is line sectional drawing. As shown in FIGS. 3C and 3D, when the measurement object S is irradiated with the measurement light from the other light projecting unit 110B, the measurement light may reach the bottom of the hole Sh depending on the depth of the hole Sh. The shadow Ss is generated without reaching. Therefore, a part of the measuring object S cannot be observed.

  FIG. 4A is a plan view of the measurement object S in a state where measurement light from both the light projecting units 110A and 110B is irradiated, and FIG. 4B is a CC line in FIG. 4A. It is sectional drawing. As shown in FIGS. 4A and 4B, when the measurement object S is irradiated with the measurement light from both the light projecting units 110A and 110B, the measurement light is applied from one of the light projecting units 110A and 110B. Compared with the case where S is irradiated, the measurement light that does not reach the bottom of the hole Sh is reduced, so that the generated shadow Ss is reduced. Therefore, the portion of the measuring object S that can be observed increases.

  FIG. 4C is a plan view of the measuring object S in a state irradiated with illumination light from the illumination light output unit 130 in FIG. 2, and FIG. 4D is a DD line in FIG. It is sectional drawing. As shown in FIGS. 4C and 4D, since the illumination light is irradiated from substantially right above the measurement object S, the illumination light reaches the bottom of the hole Sh regardless of the depth of the hole Sh. To do. Therefore, most of the measuring object S can be observed.

  Displayed on the display unit 400 so that the image of the measuring object S irradiated with the measuring light from one light projecting unit 110A and the image of the measuring object S irradiated with the measuring light from the other light projecting unit 110B are aligned ( (2 screen display). FIG. 5 is a diagram illustrating an example of a GUI (Graphical User Interface) that displays an image on two screens.

  As shown in FIG. 5, the display unit 400 is provided with two image display areas 410 and 420 arranged side by side. When displaying two images on the screen, the measurement light is alternately irradiated from the light projecting units 110 </ b> A and 110 </ b> B so that the measurement light S is switched. In the image display area 410, an image of the measurement object S when the measurement light is irradiated from one light projecting unit 110A is displayed. In the image display area 420, an image of the measurement object S when the measurement light is irradiated from the other light projecting unit 110B is displayed. Thereby, the user can distinguish and recognize the image of the measuring object S when each of the light projecting units 110A and 110B is irradiated with the measurement light.

  In this example, the frequency of switching the measurement light from the light projecting units 110A and 110B is, for example, several Hz. Note that the frequency of switching the measurement light from the light projecting units 110A and 110B may be set to a value (for example, 100 Hz) that cannot be recognized by the user. In this case, the user observes that the measuring object 100 is simultaneously irradiated with the measuring light from both the light projecting units 110 </ b> A and 110 </ b> B in the measuring unit 100.

  Two light amount setting bars 430 and 440 are displayed on the display unit 400. The light amount setting bar 430 includes a slider 430s that can move in the horizontal direction. The light amount setting bar 440 includes a slider 440s that can move in the horizontal direction. Hereinafter, the measurement light emitted from one light projecting unit 110A is referred to as one measurement light, and the measurement light emitted from the other light projection unit 110B is referred to as the other measurement light. The position of the slider 430s on the light amount setting bar 430 corresponds to the light amount of the light receiving unit 120 when receiving one measurement light (hereinafter, referred to as the light amount of one measurement light). The position of the slider 440s on the light amount setting bar 440 corresponds to the light amount of the light receiving unit 120 when receiving the other measurement light (hereinafter referred to as the light amount of the other measurement light).

  The user can change the light quantity of one measurement light by operating the operation unit 250 of the PC 200 in FIG. 1 and moving the slider 430s of the light quantity setting bar 430 in the horizontal direction. The light quantity of one measurement light is changed by changing the brightness of one measurement light or the exposure time of the light receiving unit 120 when receiving one measurement light. Similarly, the user can change the light amount of the other measurement light by operating the operation unit 250 and moving the slider 440s of the light amount setting bar 440 in the horizontal direction. The light quantity of the other measurement light is changed by changing the brightness of the other measurement light or the exposure time of the light receiving unit 120 when receiving the other measurement light.

  As described above, in the image display areas 410 and 420, images of the measurement object S when the measurement light is irradiated by each of the light projecting units 110A and 110B are displayed so as to be aligned. Therefore, the user moves the positions of the sliders 430 s and 440 s of the light amount setting bars 430 and 440 while viewing the images of the measurement object S displayed in the image display areas 410 and 420, respectively, and thereby The amount of measurement light can be adjusted appropriately.

  In addition, when there is a correlation between the light quantity of one and the other measurement light and the light quantity of the light receiving unit 120 when receiving the illumination light emitted from the illumination light output unit 130 (hereinafter referred to as illumination light quantity) There is. In this case, the light quantity of the one and the other measurement light may be automatically adjusted based on the light quantity of the illumination light. Or based on the light quantity of illumination light, the adjustment guide for making the light quantity of one and the other measurement light suitable may be displayed on the display part 400. FIG. In this case, the user can appropriately adjust the light amounts of one and the other measurement light by moving the positions of the sliders 430 s and 440 s of the light amount setting bars 430 and 440 based on the adjustment guide.

  If the light irradiation direction is different, the light reflection direction is also different. Therefore, even in the same portion of the measurement object S, the brightness of the image irradiated with one measurement light is different from the brightness of the image irradiated with the other measurement light. That is, the amount of light suitable for shape measurement varies depending on the irradiation direction.

  In the present embodiment, it is possible to individually adjust the brightness of each image when the measurement light is irradiated from the light projecting units 110A and 110B. Therefore, it is possible to set an appropriate amount of light according to the light irradiation direction. Further, the image whose light amount is being adjusted is displayed in the image display areas 410 and 420 while being updated. Thereby, the user can adjust the light amount while confirming the image.

  In this case, the PC 200 can display, in the image display areas 410 and 420, a portion in which an overexposure occurs because the image is too bright or a portion where an overexposure occurs because the image is too dark. Thereby, the user can easily confirm whether or not the light amount is appropriately adjusted.

[2] Shape Measurement of Measurement Object (1) Shape Measurement by Triangular Distance Measurement In the measurement unit 100, the shape of the measurement object S is measured by the triangular distance measurement method. FIG. 6 is a diagram for explaining the principle of the triangulation system. As shown in FIG. 6, an angle α between the optical axis of the measurement light emitted from the light projecting unit 110 and the optical axis of the measurement light incident on the light receiving unit 120 (the optical axis of the light receiving unit 120) is set in advance. The The angle α is larger than 0 degree and smaller than 90 degrees.

  When the measurement object S is not placed on the stage 140, the measurement light emitted from the light projecting unit 110 is reflected by the point O on the placement surface of the stage 140 and enters the light receiving unit 120. On the other hand, when the measuring object S is placed on the stage 140, the measuring light emitted from the light projecting unit 110 is reflected by the point A on the surface of the measuring object S and enters the light receiving unit 120.

  When the distance in the X direction between the point O and the point A is d, the height h of the point A of the measuring object S with respect to the mounting surface of the stage 140 is given by h = d ÷ tan (α). The CPU 210 of the PC 200 in FIG. 1 measures the distance d between the point O and the point A in the X direction based on the pixel data of the measurement object S given by the control board 150. Further, the CPU 210 calculates the height h of the point A on the surface of the measuring object S based on the measured distance d. By calculating the heights of all points on the surface of the measuring object S, the three-dimensional shape of the measuring object S is measured.

  In order to irradiate measurement light to all points on the surface of the measurement object S, measurement light having various patterns is emitted from the light projecting unit 110 in FIG. The pattern of the measurement light is controlled by the pattern generation unit 112 in FIG. Hereinafter, the pattern of the measurement light will be described.

(2) First Pattern of Measurement Light FIG. 7 is a diagram for explaining the first pattern of measurement light. FIG. 7A shows a state in which the measuring object S on the stage 140 is irradiated with the measuring light from the light projecting unit 110. FIG. 7B shows a plan view of the measuring object S irradiated with the measuring light. As shown in FIG. 7A, as the first pattern, measurement light having a linear cross section parallel to the Y direction (hereinafter referred to as linear measurement light) is emitted from the light projecting unit 110. In this case, as shown in FIG. 7B, the portion of the line-shaped measurement light irradiated on the stage 140 and the portion of the line-shaped measurement light irradiated on the surface of the measurement object S are the same as those of the measurement object S. They are shifted from each other in the X direction by a distance d corresponding to the surface height h. Therefore, the height h of the measuring object S can be calculated by measuring the distance d.

  When a plurality of portions along the Y direction on the surface of the measuring object S have different heights, the height h of the plurality of portions along the Y direction is measured by measuring the distance d for each portion. Can be calculated.

  Further, the CPU 210 in FIG. 1 measures the distance d for a plurality of portions along the Y direction at one position in the X direction, and then scans the line-shaped measurement light parallel to the Y direction in the X direction. The distance d is measured for a plurality of portions along the Y direction at other positions in the direction. Thereby, the height h of the several part of the measuring object S along the Y direction in the several position of a X direction is calculated. By scanning the line-shaped measurement light in the X direction in a range wider than the dimension in the X direction of the measurement object S, the height h of all points on the surface of the measurement object S can be calculated. Thereby, the three-dimensional shape of the measuring object S can be measured.

(3) Second Pattern of Measuring Light FIG. 8 is a diagram for explaining the second pattern of measuring light. As shown in FIG. 8, as the second pattern, measurement light having a linear cross section parallel to the Y direction and having a pattern in which the intensity changes sinusoidally in the X direction (hereinafter referred to as sinusoidal measurement light). ) Is emitted from the light projecting unit 110 a plurality of times (in this example, four times).

  FIG. 8A shows sinusoidal measurement light emitted for the first time. The intensity of the sinusoidal measurement light emitted for the first time has an initial phase φ at an arbitrary portion P0 on the surface of the measurement object S. When the sinusoidal measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I1.

  FIG. 8B shows sinusoidal measurement light emitted for the second time. The intensity of the sinusoidal measurement light emitted for the second time has a phase (φ + π / 2) at the portion P0 on the surface of the measurement object S. When the sinusoidal measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I2.

  FIG. 8C shows sinusoidal measurement light emitted for the third time. The intensity of the sinusoidal measurement light emitted for the third time has a phase (φ + π) at a portion P0 on the surface of the measurement object S. When the sinusoidal measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I3.

  FIG. 8D shows sinusoidal measurement light emitted for the fourth time. The intensity of the fourth sinusoidal measurement light has a phase (φ + 3π / 2) at the portion P0 on the surface of the measurement object S. When the sinusoidal measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is assumed to be I4.

The initial phase φ is given by φ = tan ⁻¹ [(I1−I3) / (I2−I4)]. A height h of an arbitrary portion of the measuring object S is calculated from the initial phase φ. According to this method, the initial phase φ of all portions of the measuring object S can be calculated at high speed and easily by measuring the intensity of light four times. Note that the initial phase φ can be calculated by emitting measurement light having different phases at least three times and measuring the intensity of the received light. By calculating the height h of all the parts on the surface of the measuring object S, the three-dimensional shape of the measuring object S can be measured.

(4) Third Pattern of Measurement Light FIG. 9 is a diagram for explaining the third pattern of measurement light. As shown in FIG. 9, as the third pattern, a plurality of measurement lights having a linear cross section parallel to the Y direction and aligned in the X direction (hereinafter referred to as striped measurement light) are emitted from the light projecting unit 110. It is emitted once (in this example, 16 times).

  That is, in the striped measurement light, a linear bright portion parallel to the Y direction and a linear dark portion parallel to the Y direction are periodically arranged in the X direction. Here, when the pattern generation unit 112 is a DMD, the dimension of the micromirror is set to one unit. The width of each bright portion of the striped measurement light in the X direction is, for example, 3 units, and the width of each dark portion of the striped measurement light in the X direction is, for example, 13 units. In this case, the period of the striped measurement light in the X direction is 16 units. The unit of the bright part and the dark part differs depending on the configuration of the pattern generation unit 112 in FIG. For example, when the pattern generation unit 112 is a liquid crystal, one unit is the size of one pixel.

  When the first striped measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the first captured image of the measuring object S. FIG. 9A is a first photographed image of the measuring object S corresponding to the first striped measurement light.

  The second striped measurement light has a pattern in which the bright portion and the dark portion are moved by one unit in the X direction from the first striped measurement light. When the second striped measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the second captured image of the measuring object S.

  The third striped measurement light has a pattern in which the bright part and the dark part are moved by one unit in the X direction from the second striped measurement light. By emitting the third striped measurement light, the light reflected by the surface of the measuring object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the third captured image of the measuring object S.

  By repeating the same operation, the intensity of the light corresponding to the 4th to 16th striped measurement light is measured based on the pixel data of the 4th to 16th captured images of the measuring object S, respectively. The striped measurement light whose period in the X direction is 16 units is emitted 16 times, so that the entire surface of the measurement object S is irradiated with the striped measurement light. FIG. 9B is a seventh captured image of the measuring object S corresponding to the seventh striped measurement light. FIG. 9C is a thirteenth captured image of the measuring object S corresponding to the thirteenth striped measurement light.

  FIG. 10 is a diagram illustrating a relationship between the timing (number) at which an image of a specific portion of the measurement object S is captured and the intensity of received light. The horizontal axis in FIG. 10 indicates the order of images, and the vertical axis indicates the intensity of received light. As described above, the first to sixteenth captured images are generated for each part of the measuring object S. In addition, the intensity of light corresponding to each pixel of the generated first to sixteenth captured images is measured.

  As shown in FIG. 10, a scatter diagram is obtained by illustrating the light intensity of each pixel of the captured image corresponding to the number of the captured image. For example, by fitting a Gaussian curve, a spline curve, or a parabola to the obtained scatter diagram, the number (number) of the photographed image when the light intensity becomes maximum can be estimated with an accuracy of less than one. In the example of FIG. 10, it is presumed that the light intensity is maximized in the virtual 9.38th photographed image between the ninth and tenth by the curve shown by the fitted dotted line. .

  Further, the maximum value of the light intensity can be estimated from the fitted curve. The height h of each part of the measurement object S can be calculated based on the number of the photographed image that maximizes the light intensity estimated in each part of the measurement object S. According to this method, the three-dimensional shape of the measuring object S is measured based on the intensity of light having a sufficiently large S / N (signal / noise) ratio. Thereby, the precision of the shape measurement of the measuring object S can be improved.

  In the measurement of the shape of the measurement object S using measurement light having a periodic pattern shape such as sinusoidal measurement light or striped measurement light, the relative height of each portion of the surface of the measurement object S is measured. (Relative height) is measured. This is because each of a plurality of straight lines (stripes) parallel to the Y direction forming the pattern cannot be identified, and there is an uncertainty corresponding to an integral multiple of one period (2π) of the plurality of straight lines. This is because the absolute phase cannot be obtained. Therefore, a known unwrapping process is performed on the measured height data based on the assumption that the height of one part of the measuring object S and the height of the part adjacent to the part continuously change. It may be done.

(5) Fourth Pattern of Measurement Light FIG. 11 is a diagram for explaining the fourth pattern of measurement light. As shown in FIG. 11, as the fourth pattern, measurement light having a linear cross section parallel to the Y direction and having a bright portion and a dark portion aligned in the X direction (hereinafter referred to as code-like measurement light) is used. The light is emitted from the light projecting unit 110 a plurality of times (in this example, four times). The ratio of the bright part and the dark part of the code-like measurement light is 50%.

  In this example, the surface of the measuring object S is divided into a plurality of regions (16 in the example of FIG. 11) in the X direction. Hereinafter, the areas of the measurement object S in the X direction divided into a plurality of parts are referred to as first to sixteenth areas, respectively.

  FIG. 11A shows the code-like measurement light emitted for the first time. The code-shaped measurement light emitted for the first time has a bright portion that is irradiated onto the first to eighth regions of the measurement object S. Moreover, the code-shaped measurement light emitted for the first time has a dark part irradiated on the ninth to sixteenth regions of the measuring object S. Thereby, in the code-like measurement light emitted for the first time, the bright portion and the dark portion are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright part and the dark part of the code-like measurement light emitted for the first time is 50%.

  FIG. 11B shows the code-like measurement light emitted for the second time. The code-like measurement light emitted for the second time has a bright portion that is irradiated onto the fifth to twelfth regions of the measurement object S. Moreover, the code-like measurement light emitted for the second time has dark portions that are irradiated to the first to fourth and thirteenth to sixteenth regions of the measuring object S. Thereby, in the code-like measurement light emitted for the second time, the bright part and the dark part are parallel to the Y direction and aligned in the X direction. Moreover, the ratio of the bright part and the dark part of the code-like measurement light emitted for the second time is 50%.

  FIG. 11C shows the code-like measurement light emitted for the third time. The code-like measurement light emitted for the third time has bright portions that are irradiated on the first, second, seventh to tenth, fifteenth and sixteenth regions of the measurement object S. Moreover, the code-like measurement light emitted for the third time has dark portions that are irradiated on the third to sixth and the eleventh to fourteenth regions of the measurement object S. Thereby, in the code-like measurement light emitted for the third time, the bright part and the dark part are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright part and the dark part of the code-like measurement light emitted for the third time is 50%.

  FIG. 11D shows the code-like measurement light emitted for the fourth time. The coded measurement light emitted for the fourth time has a bright portion that is irradiated on the first, fourth, fifth, eighth, ninth, twelfth, thirteenth, and sixteenth regions of the measurement object S. . In addition, the coded measurement light emitted for the fourth time is a dark portion irradiated on the second, third, sixth, seventh, tenth, eleventh, fourteenth and fifteenth regions of the measuring object S. Have Thereby, in the code-like measurement light emitted for the fourth time, the bright part and the dark part are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright part and the dark part of the code-like measurement light emitted for the fourth time is 50%.

  Logic “1” is assigned to the bright part of the code-like measurement light, and logic “0” is assigned to the dark part of the code-like measurement light. In addition, the logic arrangement of the first to fourth code-like measurement lights irradiated on each region of the measurement object S is referred to as a code. In this case, the first region of the measurement object S is irradiated with the code-shaped measurement light with the code “1011”. As a result, the first region of the measuring object S is encoded to the code “1011”.

  The second area of the measurement object S is irradiated with code-shaped measurement light with a code “1010”. As a result, the second region of the measuring object S is encoded to the code “1010”. The third region of the measuring object S is irradiated with code-shaped measurement light with a code “1000”. As a result, the third region of the measuring object S is encoded with the code “1000”. Similarly, the 16th region of the measuring object S is irradiated with the code-shaped measurement light with the code “0011”. Thus, the sixteenth region of the measuring object S is encoded with the code “0011”.

  In this way, between the adjacent regions of the measurement object S, the code-shaped measurement light is irradiated to the measurement object S a plurality of times so that any digit of the code differs by “1”. That is, the code-shaped measurement light is applied to the measurement object S a plurality of times so that the bright portion and the dark portion change into a gray code shape.

  Light reflected by each region on the surface of the measuring object S is received by the light receiving unit 120. By measuring the sign of the received light, a sign that has changed due to the presence of the measurement object S is obtained for each region of the measurement object S. A distance corresponding to the distance d in FIG. 6 can be calculated by obtaining a difference between the obtained code and the code when the measurement object S does not exist for each region. Here, the absolute value of the distance d is calculated from the feature of the measurement method using the code-like measurement light that the code appears only once in the X-axis direction in the image. Thereby, the absolute height (absolute value of the height) of the region of the measuring object S is calculated. By calculating the height of all regions on the surface of the measuring object S, the three-dimensional shape of the measuring object S can be measured.

In the above description, the surface of the measuring object S is divided into 16 regions in the X direction, and the code-shaped measurement light is emitted from the light projecting unit 110 four times. However, the present invention is not limited to this. The surface of the measurement object S may be divided into 2 ^N regions (N is a natural number) in the X direction, and the code-shaped measurement light may be emitted N times from the light projecting unit 110. In the above description, N is set to 4 for easy understanding. In the shape measurement process in the present embodiment, N is set to 8, for example. Therefore, the surface of the measuring object S is divided into 256 regions in the X direction.

  In the shape measurement of the measuring object S using the code-like measurement light, the distance that can be identified by separating the code-like measurement light, that is, the distance corresponding to one pixel is the minimum resolution. Therefore, when the number of pixels in the field of view in the X direction of the light receiving unit 120 is 1024 pixels, a measurement object S having a height of, for example, 10 mm can be measured with a resolution of 10 mm ÷ 1024≈10 μm. Measurement by combining shape measurement using code-shaped measurement light with low resolution but capable of calculating absolute value and shape measurement using sinusoidal measurement light or striped measurement light that cannot calculate absolute value but has high resolution The absolute value of the height of the object S can be calculated with higher resolution.

  In particular, in the shape measurement of the measuring object S using the striped measurement light in FIG. 9, the resolution can be 1/100 pixels. The resolution of 1/100 pixels is that the surface of the measuring object S is divided into about 100,000 areas in the X direction when the number of pixels of the field of view in the X direction of the light receiving unit 120 is 1024 pixels (that is, N≈ 17). Therefore, the absolute value of the height of the measuring object S can be calculated with higher resolution by combining the shape measurement using the cord-shaped measurement light and the shape measurement using the striped measurement light.

  A method of scanning the above-described line-shaped measurement light on the measurement object S is generally called a light cutting method. On the other hand, the method of irradiating the measuring object S with sinusoidal measurement light, striped measurement light or code-like measurement light is classified as a pattern projection method. Among the pattern projection methods, the method of irradiating the measuring object S with sinusoidal measuring light or the striped measuring light is classified as a phase shift method, and the method of irradiating the measuring object S with code-like measuring light is a spatial code. Classified into law.

  In the phase shift method, when a sinusoidal measurement light or a striped measurement light that is a periodic projection pattern is emitted, the calculation is based on the amount of light received reflected from the reference height position when the measurement object S does not exist. The height of the measuring object S is obtained from the phase difference between the phase thus calculated and the phase calculated based on the received light amount reflected from the surface of the measuring object S when the measuring object S exists. In the phase shift method, individual periodic fringes cannot be distinguished, and there is an uncertainty corresponding to an integral multiple of one fringe period (2π). However, since the number of images to be acquired is smaller than that of the light cutting method, the measurement time is relatively short and the measurement resolution is high.

On the other hand, Oite the space code method is, for each area of the measuring object S, the code is obtained which is changed by the measuring object S is present. The absolute height of the measurement object S can be obtained by obtaining the difference between the obtained code and the code when the measurement object S does not exist for each region. The spatial code method also has an advantage that measurement can be performed with a relatively small number of images, and an absolute height can be obtained. However, the measurement resolution is limited compared to the phase shift method.

  Each of these projection methods has its advantages and disadvantages, but both use the principle of triangulation. Therefore, it is impossible to measure a shadow portion that is not irradiated with the measurement light by any measurement method.

[3] Microscope Mode and Shape Measurement Mode The shape measurement apparatus 500 according to the present embodiment can operate in the microscope mode and in the shape measurement mode. 12 and 13 are diagrams illustrating an example of the GUI of the display unit 400 when the operation mode is selected. As shown in FIGS. 12 and 13, an image display area 450 and setting change areas 470 and 480 are displayed on the display unit 400. In the image display area 450, an image of the measuring object S captured by the light receiving unit 120 is displayed.

  In the setting change area 470, a brightness selection field 471, a brightness setting bar 472, a display switching field 473, a magnification switching field 474, a magnification selection field 475, and a focus adjustment field 476 are displayed. The brightness setting bar 472 includes a slider 472s that can move in the horizontal direction.

  The user can switch the exposure time method of the light receiving unit 120 between auto (automatic) and manual by selecting the exposure time method of the light receiving unit 120 in the brightness selection field 471. When manual is selected as the exposure time method of the light receiving unit 120, the user operates the operation unit 250 of the PC 200 to move the slider 472 s of the brightness setting bar 472 in the horizontal direction, whereby the light receiving unit 120. The exposure time can be adjusted. The user can switch the image display type between color and monochrome by selecting the image display type from the display switching field 473.

  As shown in FIG. 26 described later, the light receiving unit 120 includes a camera 121A and a camera 121B having different lens magnifications as the camera 121. In this example, for example, one camera 121A is called a low-magnification camera, and the other camera 121B is called a high-magnification camera. The user can switch the camera 121 of the light receiving unit 120 between the high magnification camera and the low magnification camera by selecting the magnification of the camera in the magnification switching field 474.

  The light receiving unit 120 has a digital zoom function. In this example, by combining the two cameras 121 and the digital zoom function, the magnification of the camera 121 can be substantially changed to two or more types. The user can set the magnification of the camera 121 of the light receiving unit 120 by selecting the magnification in the magnification selection field 475.

  The user can change the focus position of the light receiving unit 120 in the Z direction by a distance corresponding to the input numerical value by inputting a numerical value in the focus adjustment field 476. The focus position of the light receiving unit 120 is changed by changing the position of the Z stage 142 of the stage 140, that is, the relative distance in the Z direction between the light receiving unit 120 and the measurement object S.

  In the setting change area 480, a microscope mode selection tab 480A and a shape measurement mode selection tab 480B are displayed. When the microscope mode selection tab 480A is selected, the shape measuring apparatus 500 operates in the microscope mode. In the microscope mode, the measurement object S is irradiated with illumination light from the illumination light output unit 130. In this state, the enlarged observation of the measuring object S can be performed.

  As shown in FIG. 12, when the microscope mode selection tab 480A is selected, a tool selection field 481 and a shooting button 482 are displayed in the setting change area 480. The user can capture (capture) an image of the measurement object S displayed in the image display area 450 by operating the capture button 482.

  The tool selection field 481 displays a plurality of icons for selecting a plurality of execution tools. The user operates any one of the plurality of icons in the tool selection field 481 to perform planar measurement of the image of the measurement object S being observed, insertion of scales in the image, depth synthesis, and comment on the image. Execution tools such as insertion or image improvement can be executed.

  For example, when execution of plane measurement is selected, a measurement tool display field 481a and an auxiliary tool display field 481b are displayed below the tool selection field 481. The measurement tool display field 481a is used for measuring the distance between two points, measuring the distance between two parallel lines, measuring the diameter or radius of a circle, and measuring the angle formed by two straight lines. Multiple icons are displayed. In the auxiliary tool display field 481b, a plurality of icons for executing auxiliary drawing such as dots, lines or circles on the image in the image display area 450 are displayed.

  When the shape measurement mode selection tab 480B is selected, the shape measurement apparatus 500 operates in the shape measurement mode. As shown in FIG. 13, when the shape measurement mode selection tab 480B is selected, a measurement button 483 is displayed in the setting change area 480. The user can execute the shape measurement process by operating the measurement button 483 after preparation for shape measurement is completed.

[4] Texture Image (1) Composite Image In the measurement unit 100, the measurement object 100 is irradiated with illumination light from the illumination light output unit 130 or measurement light having a uniform pattern from the light projection unit 110. Data indicating an image of the surface state is generated. The surface state includes, for example, a pattern or a color. Hereinafter, the image of the surface state of the measuring object S is referred to as a texture image, and the data indicating the texture image is referred to as texture image data.

  The generated texture image data and the 3D shape data generated in the shape measurement process are combined to generate combined data. The display unit 400 displays a combined image of the three-dimensional shape and surface state of the measurement object S based on the combined data. Hereinafter, the solid shape data generated in the shape measurement process is referred to as main solid shape data. An image displayed based on the main stereoscopic shape data is referred to as a main stereoscopic shape image.

  FIG. 14 is a diagram illustrating an example of the GUI of the display unit 400 after execution of the shape measurement process. As shown in FIG. 14, an image of the measuring object S is displayed in the image display area 450 based on the composite data generated in the shape measurement process. The user can confirm the measurement result of the measurement object S or perform simple measurement on the composite image.

  Here, even when the entire surface of the measuring object S is located within the measurable range in the Z direction of the light receiving unit 120, the entire surface of the measuring object S is located within the depth of field. If not, all or part of the texture image is not displayed clearly. Therefore, when the dimension in the Z direction of the measuring object S is larger than the range of the depth of field of the light receiving unit 120, while changing the relative distance between the light receiving unit 120 and the measuring object S, Texture image data of the measurement object S located within the range of the depth of field of the light receiving unit 120 is acquired. By synthesizing the acquired plurality of texture image data, texture image data (hereinafter referred to as omnifocal texture image data) that can be clearly displayed over the entire surface of the measurement object S is generated.

  FIG. 15 is a schematic side view of the measuring object S for explaining the omnifocal texture image. The measuring object S in FIG. 15 has a configuration in which an electrolytic capacitor Sc is mounted on a circuit board Sb. Further, letters are attached to the upper surface of the circuit board Sb and the electrolytic capacitor Sc. As shown in FIG. 15, the dimension of the measuring object S in the Z direction (in this example, the dimension from the lower surface of the circuit board Sb to the upper surface of the electrolytic capacitor Sc) is larger than the measurable range of the light receiving unit 120 in the Z direction. Is smaller than the range of depth of field.

  FIG. 16 is a diagram illustrating the relationship between the focal position of the light receiving unit 120 and the sharpness of the texture image. FIGS. 16A, 16C, and 16E are side views of the measuring object S in FIG. In FIG. 16A, the light receiving unit 120 is focused on the position a on the upper surface of the electrolytic capacitor Sc of the measurement object S. In FIG. 16B, the light receiving unit 120 is focused on a position b intermediate between the upper surface of the electrolytic capacitor Sc of the measurement object S and the upper surface of the circuit board Sb. In FIG. 16C, the light receiving unit 120 is focused on the position c of the upper surface of the circuit board Sb of the measurement object S.

  FIG. 16B shows a texture image of the measuring object S based on the texture image data acquired in the state of FIG. In this case, since the position “a” on the upper surface of the electrolytic capacitor Sc is located within the range of the depth of field of the light receiving unit 120, the letters attached to the upper surface of the electrolytic capacitor Sc are clear as shown in FIG. Is displayed. However, the position c on the upper surface of the circuit board Sb is not located within the range of the depth of field of the light receiving unit 120. Therefore, the characters attached to the upper surface of the circuit board Sb are displayed unclearly. Further, the position c on the upper surface of the circuit board Sb is not located within the measurable range of the light receiving unit 120 in the Z direction. Therefore, when the height of the stage 140 is adjusted to the position of FIG. 16E, the height of the position a on the upper surface of the electrolytic capacitor Sc cannot be calculated, or the reliability of the calculated height is lowered. .

  FIG. 16D shows a texture image of the measuring object S based on the texture image data acquired in the state of FIG. In this case, an intermediate position b between the upper surface of the electrolytic capacitor Sc and the upper surface of the circuit board Sb is located within the range of the depth of field of the light receiving unit 120. However, since the upper surface of the electrolytic capacitor Sc and the upper surface of the circuit board Sb are located outside the range of the depth of field of the light receiving unit 120 and within the measurable range in the Z direction, as shown in FIG. The characters attached to the top surface of Sc and the characters attached to the top surface of the circuit board Sb are displayed slightly unclear.

  FIG. 16F shows a texture image of the measuring object S based on the texture image data acquired in the state of FIG. In this case, since the position c of the upper surface of the circuit board Sb is located within the range of the depth of field of the light receiving unit 120, the characters attached to the upper surface of the circuit board Sb are clear as shown in FIG. Is displayed. However, the position a on the upper surface of the electrolytic capacitor Sc is not located within the range of the depth of field of the light receiving unit 120. Therefore, characters attached to the upper surface of the electrolytic capacitor Sc are displayed unclearly. Further, the position a of the upper surface of the electrolytic capacitor Sc is not located within the measurable range of the light receiving unit 120 in the Z direction. Accordingly, when the height of the stage 140 is adjusted to the position of FIG. 16A, the height of the position c on the upper surface of the circuit board Sb cannot be calculated, or the reliability of the calculated height is lowered. .

  The omnifocal texture image data is generated by synthesizing the texture image data at the positions a to c. FIG. 17 is an omnifocal texture image of the measuring object S based on the generated omnifocal texture image data. In the omnifocal texture image, as shown in FIG. 17, characters attached to the upper surface of the electrolytic capacitor Sc are clearly displayed, and characters attached to the upper surface of the circuit board Sb are clearly displayed.

  Thus, by changing the relative position of the light receiving unit 120 and the stage 140 in the Z direction, the height at which the light receiving unit 120 is focused with respect to the measurement object S is changed. Therefore, even if the measurement object S has a height difference that cannot be within the range of the depth of field of the light receiving unit 120 at a time, a plurality of texture images captured by changing the focus of the light receiving unit 120 are combined. By doing so, it is possible to obtain an omnifocal texture image in which the whole is in focus. Note that the depth of field has a unique width of the shape measuring apparatus 500 that varies depending on the magnification of the lens of the light receiving unit 120.

  When generating an omnifocal texture image, a plurality of texture images are acquired by changing the relative position in the Z direction between the light receiving unit 120 and the stage 140 within a predetermined range at predetermined intervals. The range and interval in which the light receiving unit 120 and the stage 140 are relatively moved in the Z direction at this time are unique values of the shape measuring apparatus 500. However, the shape of the measuring object S is known, for example, when the shape measuring process of the measuring object S is executed in advance or when data indicating the shape of the measuring object S (for example, CAD data) is held in advance. In some cases, the optimal movement range and interval may be determined based on this data.

  For example, a range slightly wider than the range defined by the upper and lower limits of the height of the measuring object S may be set as the movement range. Further, the interval may be changed according to the gradient of the height shape of the measuring object S. When acquiring an all-focus texture image, the above-described parameter that defines the relative movement in the Z direction between the stage 140 and the light receiving unit 120 may be arbitrarily set by the user.

  The all-focus texture image data is generated by synthesizing a plurality of texture image data for the portions included in the depth of field of the light receiving unit 120 among all the portions of the measurement object S. . When acquiring the texture image data of each part of the measuring object S, the light receiving unit 120 and the measuring object when each part of the measuring object S is included in the range of the depth of field of the light receiving unit 120. Based on the relative distance to the object S, the height of each part of the measurement object S is calculated.

  By combining the heights calculated for all parts of the measurement object S, data indicating the three-dimensional shape of the measurement object S is generated. Data indicating the three-dimensional shape of the measuring object S is referred to as sub-three-dimensional shape data. The synthesized data is generated by synthesizing the omnifocal texture image data and the main stereoscopic shape data.

  FIG. 18 is a composite image of the measuring object S based on the composite data. FIG. 18A shows an image of the main stereoscopic shape of the measuring object S based on the main stereoscopic shape data. The synthesized data is generated by synthesizing the main stereoscopic shape data indicating the main stereoscopic shape of FIG. 18A and the omnifocal texture image data. FIG. 18B is a composite image based on the generated composite data. As shown in FIG. 18B, even when the dimension of the measurement object S in the Z direction is larger than the range of the depth of field of the light receiving unit 120, the measurement object S has different heights. The state of the surface of is clearly displayed.

  The value of each pixel in the main stereoscopic shape data indicates the height data at the position of the pixel. On the other hand, the value of each pixel of the omnifocal texture image data indicates texture information (surface state information) including color and luminance at the position of the pixel. Therefore, the synthesized image shown in FIG. 18 can be generated by synthesizing the information of corresponding pixels.

  In addition, although mentioned later for details, the shape measurement of the measuring object S is normally performed by one process. For example, in the example of FIG. 16A, since the upper surface c of the circuit board Sb is not within the measurable range of the light receiving unit 120, the height of the upper surface c of the circuit board Sb cannot be calculated. Therefore, as shown in FIG. 16C, the relative distance in the Z direction between the light receiving unit 120 and the stage 140 is set so that the entire measurement object S is within the measurable range of the light receiving unit 120 in the Z direction as much as possible. It needs to be adjusted.

  On the other hand, in the process of generating the omnifocal texture image, imaging is performed a plurality of times by changing the relative distance between the light receiving unit 120 and the stage 140 in the Z direction, so that the entire measurement object S is received by one imaging. It is not necessary to previously adjust the relative distance between the light receiving unit 120 and the stage 140 so as to be within the range of the depth of field of the unit 120. Therefore, the user does not place the measurement object S within the measurable range in the Z direction of the light receiving unit 120 for performing the shape measurement process, not in the range of the depth of field of the light receiving unit 120 when acquiring the texture image. The relative distance in the Z direction between the light receiving unit 120 and the stage 140 is adjusted in consideration of whether or not it is within the range.

  When the shape measurement process is performed at the position of the stage 140 shown in FIG. 16A, the height of the upper surface c of the circuit board Sb cannot be calculated, or the reliability of the calculated height becomes low. On the other hand, in the omnifocal texture image generation process, imaging is performed a plurality of times by changing the relative distance between the light receiving unit 120 and the stage 140 in the Z direction, so the focus of the light receiving unit 120 is on the upper surface c of the circuit board Sb. A matched texture image can be obtained. Therefore, even if height data is missing in a part of a texture image or a pixel with low reliability exists, it is possible to give texture information of omnifocal texture image data to that pixel.

  In the shape measurement process using triangulation in the present invention, the measurable range in the Z direction of the light receiving unit 120 is generally wider than the range of the depth of field of the light receiving unit 120. This is because in the triangulation, it is possible to measure the shape of the measuring object S even if some blur occurs in the image. However, the range of the depth of field of the light receiving unit 120 is a subjective range that seems to be in focus for the user. Further, the measurable range in the Z direction of the light receiving unit 120 is a unique value of the shape measuring apparatus 500 determined by the light projecting unit 110 and the light receiving unit 120, but is not within the measurable range in the Z direction of the light receiving unit 120. The object S is not necessarily impossible to measure.

  Further, when the height difference of the measuring object S is large, the entire measuring object S can be measured at a time, no matter how the relative distance in the Z direction between the light receiving unit 120 and the stage 140 is adjusted. There are cases where it is not possible. In that case, when performing the shape measurement process, the relative distance in the Z direction between the light receiving unit 120 and the stage 140 is changed, and the shape measurement process is performed a plurality of times. It is also possible to acquire a three-dimensional shape constituted by the data. In this case, the entire measurement object S having a height difference exceeding the measurable range in the Z direction of the light receiving unit 120 can be measured, and the entire three-dimensional shape of the measurement object S having a large height difference can be measured. Texture information can be added.

  In the example of FIG. 18, the texture image is synthesized with the measurement object S displayed three-dimensionally, but the present invention is not limited to this. For example, texture information may be superimposed and displayed on a two-dimensional image in which the height of the measuring object S is expressed by a change in color. In this case, for example, by allowing the user to adjust the ratio between the two-dimensional image indicating the height and the texture information, an image having an intermediate color and brightness between the two-dimensional image indicating the height and the texture image. Can also be generated and displayed.

  In the above description, the omnifocal texture image data and the sub-stereoscopic shape data are respectively generated based on the texture image data and the height at the three positions a to c for easy understanding. It is not limited. The omnifocal texture image data and the sub-stereoscopic shape data may be respectively generated based on the texture image data and the height at two or less positions or four or more positions.

  In this example, the position of the measuring object S in the Z direction is smaller than the range of the depth of field of the light receiving unit 120, toward the lower limit from the upper limit of the measurable range of the light receiving unit 120 in the Z direction. Or it is changed from the lower limit to the upper limit. All-focus texture image data and sub-stereoscopic shape data are generated based on the texture image data and height at each position in the Z direction.

  Alternatively, when the main stereoscopic shape data of the measuring object S is generated before the generation of the omnifocal texture image data and the sub-stereoscopic shape data, the upper end in the Z direction of the measuring object S based on the main stereoscopic shape data And the lower end can be calculated. Therefore, the position of the measuring object S in the Z direction is smaller than the range of the depth of field of the light receiving unit 120, and the dimension of the measuring object S in the Z direction is from the upper end to the lower end or from the lower end to the upper end. May be changed. All-focus texture image data and sub-stereoscopic shape data are generated based on the texture image data and height at each position in the Z direction.

  In this case, the texture image data can be acquired in the minimum range for generating the omnifocal texture image data and the sub-stereoscopic shape data of the measurement object S, and the height can be calculated. Thereby, all-focus texture image data and sub-stereoscopic shape data can be generated at high speed.

(2) Type of texture image The user can select the type of texture image in acquiring the texture image data. The types of texture images include, for example, normal texture images, omnifocal texture images, high dynamic range (HDR) texture images, or combinations thereof. When an omnifocal texture image is selected, the above omnifocal texture image data is generated. When an HDR texture image is selected, texture image data subjected to a known high dynamic range (HDR) composition is generated.

  When the difference in reflectance of a plurality of portions on the surface of the measuring object S or the difference in brightness due to color is small and the dimension of the measuring object S in the Z direction is larger than the depth of field of the light receiving unit 120, the user Selects an all-focus texture image. Thereby, the texture image data which clearly shows the surface state of the measuring object S can be generated in a short time. When the surface of the measuring object S includes a portion having a high reflectance and a portion having a low reflectance, or when a difference in brightness due to color is large, the user selects an HDR texture image. Thereby, it is possible to generate texture image data that clearly shows the surface state of the measuring object S that does not include blackout and overexposure.

  In a normal texture image, the texture image is not synthesized. In this case, one texture image data is generated based on the light reception signal output from the light receiving unit 120 with the focus position of the light receiving unit 120 fixed. When the difference in reflectance or the brightness difference due to color of a plurality of portions on the surface of the measurement object S is small and the dimension of the measurement object S in the Z direction is smaller than the range of the depth of field of the light receiving unit 120, The user selects a normal texture image. Thereby, the texture image data which clearly shows the surface state of the measuring object S can be generated in a shorter time.

  When the HDR texture image is selected, a plurality of texture image data is generated under different imaging conditions at one position in the Z direction. Here, the imaging conditions include the exposure time of the light receiving unit 120. Alternatively, the imaging condition may include the intensity (brightness) of illumination light from the illumination light output unit 130 or the intensity (brightness) of uniform measurement light from the light projecting unit 110. In these cases, the CPU 210 can easily generate a plurality of texture image data under a plurality of imaging conditions.

  The plurality of generated texture image data are combined (HDR combined) so that the texture image at the position in the Z direction does not include blackout and overexposure. As a result, the dynamic range of the texture image is expanded. An HDR texture image is displayed based on the HDR synthesized texture image data (hereinafter referred to as HDR texture image data).

  When a combination of an omnifocal texture image and an HDR texture image (hereinafter referred to as an HDR omnifocal texture image) is selected, the position of the measuring object S is changed for each position in the Z direction while being changed. A plurality of texture image data under the imaging condition is acquired. A plurality of texture image data acquired at each position in the Z direction is HDR-synthesized so that the dynamic range of the image at the position in the Z direction is expanded, thereby generating HDR texture image data.

  Moreover, the surface of the measuring object S is obtained by synthesizing a plurality of HDR texture image data of the parts included in the range of the depth of field of the light receiving unit 120 among all the parts of the measuring object S. HDR texture image data that can be displayed throughout (hereinafter referred to as HDR omnifocal texture image data) is generated. An HDR omnifocal texture image is displayed based on the HDR omnifocal texture image data.

  As described above, the surface of the measuring object S includes a portion having a high reflectance and a low reflectance, or the brightness difference due to the color is large, and the dimension of the measuring object S is larger than the depth of field of the light receiving unit. If so, the user selects an HDR omnifocal texture image. Thereby, the texture image data which shows the surface state of the measuring object S clearly can be produced | generated.

  FIG. 19 is a diagram illustrating an example of the GUI of the display unit 400 when a texture image type is selected. As shown in FIG. 19, when selecting the type of texture image, a texture image selection field 484 is displayed in the setting change area 480 of the display unit 400. In the texture image selection field 484, three check boxes 484a, 484b and 484c are displayed.

  The user can select a normal texture image, HDR texture image, and omnifocal texture image by designating check boxes 484a to 484c, respectively. Further, the user can select the HDR omnifocal texture image by specifying the check boxes 484b and 484c.

(3) Correction of main stereoscopic shape data The accuracy of sub stereoscopic shape data is lower than the accuracy of main stereoscopic shape data. However, since the main stereoscopic shape data is generated based on the triangulation method, in order to generate the main stereoscopic shape data, the measurement object S is irradiated with light from an angle different from the optical axis of the light receiving unit 120. There is a need. Therefore, the main stereoscopic shape data often includes a defective portion corresponding to a region where the shape of the measuring object S cannot be accurately measured. Here, the defective portion includes blank data corresponding to the shadow portion of the image, noise data corresponding to the noise portion, or false shape data corresponding to the false shape portion of the measuring object S due to multiple reflection or the like. .

  On the other hand, in order to generate sub-stereoscopic shape data, it is not necessary to irradiate the measurement object S from an angle different from the optical axis of the light receiving unit 120, and measurement is performed from an angle substantially equal to the optical axis of the light receiving unit 120. The object S can be irradiated. In this case, the sub-stereoscopic shape data includes almost no defective portion. Therefore, by using illumination light emitted from the illumination light output unit 130 disposed substantially above the measurement object S, sub-stereoscopic shape data that hardly includes a defective portion can be generated.

  A defective portion of the main stereoscopic shape data is determined based on the sub stereoscopic shape data. In this example, the sub stereoscopic shape data and the main stereoscopic shape data for the same measurement object S are compared. Thereby, it is possible to easily determine a defective portion in the main stereoscopic shape data. Further, in the shape measurement process, when the contrast of the pattern of the measurement light is partially reduced, the reliability of the part of the main stereoscopic shape data corresponding to that part is lowered.

  Even in this case, it is possible to determine a portion with low reliability of the main stereoscopic shape data based on the sub stereoscopic shape data and the main stereoscopic shape data. In this example, the sub stereoscopic shape data and the main stereoscopic shape data are compared. The difference between each part of the sub-stereoscopic shape data and each part of the main stereoscopic shape data is calculated, and it is determined that the part of the main stereoscopic shape data whose difference is larger than a predetermined threshold is low in reliability. .

  In this way, it is determined that the portion of the plurality of portions of the main stereoscopic shape data whose deviation from the sub stereoscopic shape data is larger than the threshold value has low reliability. The threshold value may be a fixed value or a variable value that can be arbitrarily adjusted by the user operating a slider or the like. Hereinafter, a portion of the main stereoscopic shape data that has been determined to be low in reliability is referred to as a reliability-decreasing portion of the main stereoscopic shape data.

  The defective part or the reduced reliability part of the main stereoscopic shape data may be corrected by replacement or interpolation by the corresponding sub stereoscopic shape data part. Thereby, the user can observe an image or a composite image of the main three-dimensional shape of the measuring object S that does not include a defective portion or a reduced reliability portion on the display unit 400. Further, it is possible to improve the reliability of the portion of the main stereoscopic shape data whose reliability is reduced. In the correction of the main stereoscopic shape data, the defective portion or the reduced reliability portion of the main stereoscopic shape data may be interpolated by the surrounding main stereoscopic shape data portion.

  20, FIG. 21, and FIG. 22 are diagrams for explaining the correction of the main stereoscopic shape data by the sub stereoscopic shape data. FIGS. 20A and 20B show a main stereoscopic image and a composite image of the measuring object S, respectively. FIGS. 21A and 21B show a sub-stereoscopic image and a composite image of the measurement object S, respectively. FIGS. 22A and 22B show a corrected main stereoscopic image and a corrected combined image of the measuring object S, respectively.

  As shown in FIGS. 20A and 20B, the main stereoscopic image and the composite image include a shadow Ss based on blank data and a false shape Sp based on false shape data. On the other hand, as shown in FIGS. 21A and 21B, the sub-stereoscopic image and the composite image are not affected by the shadow.

  The portion of the shadow Ss and the false shape Sp in the main stereoscopic shape image and the composite image of FIGS. 20A and 20B are the sub-stereo shape image and the omnifocal texture image of FIGS. 21A and 21B. It is corrected by the corresponding part. As a result, as shown in FIGS. 22A and 22B, it is possible to observe a main stereoscopic image and a synthesized image that are not affected by a shadow.

  When displaying the main stereoscopic shape image or the texture image on the display unit 400, the defective portion or the reduced reliability portion of the main stereoscopic shape data is not corrected, and corresponds to the defective portion or the reduced reliability portion of the main stereoscopic shape data. A three-dimensional image or texture image portion may be highlighted. Alternatively, when displaying the corrected main stereoscopic shape image on the display unit 400, the defective portion or the reduced reliability of the main stereoscopic shape data in a state where the defective portion or the reduced reliability portion of the main stereoscopic shape data is corrected. A portion of the corrected three-dimensional image corresponding to the portion may be highlighted. As a result, the user can easily and reliably recognize a defective portion or a reduced reliability portion of the main stereoscopic shape data. The defective part or the reduced reliability part of the main stereoscopic shape data may be treated as invalid data in measurement or analysis of the measurement position in the shape measurement process.

  In the shape measurement process, when the main stereoscopic shape data is generated using measurement light from both the light projecting units 110A and 110B, the main stereoscopic shape data based on the measurement light from each of the light projecting units 110A and 110B is appropriate. The main three-dimensional shape data is generated by combining with appropriate weighting. Here, when the main stereoscopic shape data based on one measurement light includes a defective portion or a reliability reduction portion, the weight of the synthesis of the main stereoscopic shape data based on one measurement light is reduced in that portion. The weight of the synthesis of the main stereoscopic shape data based on the other measurement light may be increased.

(4) Efficiency improvement of shape measurement process In the shape measurement process of FIGS. 30 to 32 described later, the measurement light S is irradiated with the code-shaped measurement light (see FIG. 11) and the stripe measurement is performed. Light (see FIG. 9) is irradiated. In this case, the absolute value of the height of each part of the measuring object S is calculated based on the code-shaped measuring light, and the relative value of the height of each part of the measuring object S is calculated based on the striped measuring light. Calculated with high resolution. Thereby, the absolute value of the height of each part of the measuring object S is calculated with high resolution. That is, the absolute value of the height calculated based on the striped measurement light is determined by the height calculated based on the code-shaped measurement light.

  Instead, the absolute value of the height calculated based on the striped measurement light may be determined based on the height of each part in the sub-stereoscopic shape data. In this case, it is not necessary to irradiate the measurement object S from the light projecting unit 110 with the code-shaped measurement light in the shape measurement process. Thereby, the shape measurement process can be executed in a short time and efficiently while calculating the absolute value of the height of each part of the measuring object S with high resolution.

[5] Shape Measurement Processing (1) Preparation for Shape Measurement Before executing the shape measurement processing of the measurement object S, the user prepares for shape measurement. FIG. 23 is a flowchart showing a procedure for preparing for shape measurement. Hereinafter, a procedure for preparing for shape measurement will be described with reference to FIGS. 1, 2, and 23. First, the user places the measuring object S on the stage 140 (step S1). Next, the user irradiates the measurement object S with illumination light from the illumination light output unit 130 (step S2). Thereby, the image of the measuring object S is displayed on the display unit 400. Subsequently, the user adjusts the light amount of the illumination light, the focus of the light receiving unit 120, and the position and orientation of the measurement object S (hereinafter referred to as the first object) while viewing the image of the measurement object S displayed on the display unit 400. Is called (step S3).

  Next, the user stops the irradiation of the illumination light and irradiates the measurement object S with the measurement light from the light projecting unit 110 (step S4). Thereby, the image of the measuring object S is displayed on the display unit 400. Subsequently, the user adjusts the light amount of the measurement light, the focal point of the light receiving unit 120, and the position and orientation of the measurement object S (hereinafter referred to as the second) while viewing the image of the measurement object S displayed on the display unit 400. Is called (step S5). In step S5, when no shadow is generated at the position to be measured of the measurement object S, the user adjusts the focus of the light receiving unit 120 and the position and orientation of the measurement object S as the second adjustment. There is no need to adjust the amount of measurement light.

  Thereafter, the user stops the irradiation of the measurement light and irradiates the measurement object S from the illumination light output unit 130 again with the illumination light (step S6). Thereby, the image of the measuring object S is displayed on the display unit 400. Next, the user confirms the image of the measuring object S displayed on the display unit 400 (step S7). Here, from the image of the measuring object S displayed on the display unit 400, the user appropriately determines the amount of light, the focus of the light receiving unit 120, and the position and orientation of the measuring object S (hereinafter referred to as an observation state). It is determined whether or not (step S8).

  If it is determined in step S8 that the observation state is not appropriate, the user returns to the process in step S2. On the other hand, when it is determined in step S8 that the observation state is appropriate, the user finishes preparation for shape measurement.

  In the above description, the second adjustment is performed after the first adjustment, but the present invention is not limited to this. The first adjustment may be performed after the second adjustment. In this case, in step S6, the measurement object S is irradiated with the measurement light instead of the illumination light. In step S5, when the focus of the light receiving unit 120 and the position and orientation of the measurement object S are not adjusted in the second adjustment, the user omits the steps S6 to S8. The preparation for shape measurement may be completed.

(2) First Adjustment FIGS. 24 and 25 are flowcharts showing details of the first adjustment in the procedure for the preparation for shape measurement. Hereinafter, the details of the first adjustment in the procedure for the preparation of the shape measurement will be described with reference to FIGS. 1, 2, 24 and 25. First, the user adjusts the amount of illumination light (step S11). The adjustment of the amount of illumination light is performed by adjusting the brightness of the illumination light emitted from the illumination light source 320 of the control unit 300 or the exposure time of the light receiving unit 120. Next, the user determines whether or not the amount of illumination light applied to the measurement object S is appropriate based on the image of the measurement object S displayed on the display unit 400 (step S12). .

  If it is determined in step S12 that the amount of illumination light is not appropriate, the user returns to the process in step S11. On the other hand, if it is determined in step S12 that the amount of illumination light is appropriate, the user adjusts the focus of the light receiving unit 120 (step S13). The focus of the light receiving unit 120 is adjusted by changing the position of the Z stage 142 of the stage 140 and adjusting the relative distance in the Z direction between the light receiving unit 120 and the measuring object S. Next, the user determines whether or not the focus of the light receiving unit 120 is appropriate based on the image of the measurement object S displayed on the display unit 400 (step S14).

  If it is determined in step S14 that the focus of the light receiving unit 120 is not appropriate, the user returns to the process of step S13. On the other hand, when it determines with the focus of the light-receiving part 120 being appropriate in step S14, a user adjusts the position and attitude | position of the measuring object S (step S15). The position and orientation of the measuring object S are adjusted by changing the position of the XY stage 141 and the angle of the θ stage 143 of the stage 140.

  Next, the user determines whether or not the position and orientation of the measurement object S are appropriate based on the image of the measurement object S displayed on the display unit 400 (step S16). Here, when the measurement position of the measurement object S is included in the visual field range of the light receiving unit 120, the user determines that the position and orientation of the measurement object S are appropriate. On the other hand, when the measurement position of the measurement object S is not included in the visual field range of the light receiving unit 120, the user determines that the position and orientation of the measurement object S are not appropriate.

  If it is determined in step S16 that the position and orientation of the measurement object S are not appropriate, the user returns to the process of step S15. On the other hand, if it is determined in step S16 that the position and orientation of the measuring object S are appropriate, the user adjusts the visual field size (step S17). The adjustment of the visual field size is performed by changing the magnification of the lens of the camera 121 of the light receiving unit 120, for example.

  Next, the user determines whether or not the visual field size is appropriate based on the image of the measurement object S displayed on the display unit 400 (step S18). If it is determined in step S18 that the field of view size is not appropriate, the user returns to the process of step S17. On the other hand, if it is determined in step S18 that the visual field size is appropriate, the user selects the type of texture image (step S19), and the first adjustment is terminated. By performing the first adjustment, an optimal illumination light amount condition for generating texture image data is set.

  In step S <b> 17, the light receiving unit 120 may include a plurality of cameras 121 having different lens magnifications, and the lens magnification may be changed by switching the cameras 121. Alternatively, one lens 121 that can switch the lens magnification may be included, and the lens magnification may be changed by switching the lens magnification. Alternatively, the visual field size may be adjusted by the digital zoom function of the light receiving unit 120 without changing the magnification of the lens.

  FIG. 26 is a schematic diagram showing the light receiving unit 120 of FIG. 2 viewed from the X direction. As shown in FIG. 26, the light receiving unit 120 includes cameras 121 </ b> A and 121 </ b> B as a plurality of cameras 121. The lens magnification of the camera 121A and the lens magnification of the camera 121B are different from each other. The light receiving unit 120 further includes a half mirror 124.

  The light that has passed through the plurality of lenses 122 and 123 is separated into two lights by the half mirror 124. One light is received by the camera 121A, and the other light is received by the camera 121B. By switching the camera 121 that outputs a light reception signal to the control board 150 in FIG. 1 between the camera 121A and the camera 121B, the magnification of the lens can be changed. Switching between the camera 121A and the camera 121B is performed by selecting the camera magnification in the magnification switching field 474 of FIG.

(3) Second Adjustment FIGS. 27 and 28 are flowcharts showing details of the second adjustment in the procedure for preparing for shape measurement. Hereinafter, the details of the second adjustment in the procedure for the preparation of the shape measurement will be described with reference to FIGS. 1, 2, 27 and 28. First, the user adjusts the amount of one measurement light (step S21).

  Next, the user determines whether or not the position and orientation of the measurement object S are appropriate based on the image of the measurement object S displayed on the display unit 400 (step S22). Here, when a shadow is not generated at the measurement position of the measurement object S, the user determines that the position and orientation of the measurement object S are appropriate. On the other hand, when a shadow is generated at the measurement position of the measurement object S, the user determines that the position and orientation of the measurement object S are not appropriate.

  If it is determined in step S22 that the position and orientation of the measurement object S are not appropriate, the user adjusts the position and orientation of the measurement object S (step S23). The position and orientation of the measuring object S are adjusted by changing the position of the XY stage 141 and the angle of the θ stage 143 of the stage 140. Thereafter, the user returns to the process of step S22.

  On the other hand, when it is determined in step S22 that the position and orientation of the measurement target S are appropriate, the user irradiates the measurement target S based on the image of the measurement target S displayed on the display unit 400. It is determined whether or not the amount of one of the measured light is appropriate (step S24).

  If it is determined in step S24 that the light amount of one measurement light is not appropriate, the user adjusts the light amount of one measurement light (step S25). Thereafter, the user returns to the process of step S24.

  On the other hand, if it is determined in step S24 that the amount of the one measurement light is appropriate, the user is appropriately focused on the light receiving unit 120 based on the image of the measurement object S displayed on the display unit 400. It is determined whether or not there is (step S26).

  If it is determined in step S26 that the focus of the light receiving unit 120 is not appropriate, the user adjusts the focus of the light receiving unit 120 (step S27). The focus of the light receiving unit 120 is adjusted by changing the position of the Z stage 142 of the stage 140 and adjusting the relative distance in the Z direction between the light receiving unit 120 and the measuring object S. Thereafter, the user returns to the process of step S26.

  On the other hand, when it is determined in step S26 that the focus of the light receiving unit 120 is appropriate, the user determines whether or not the observation state is appropriate from the image of the measurement object S displayed on the display unit 400. (Step S28).

  If it is determined in step S28 that the observation state is not appropriate, the user returns to the process in step S23, step S25, or step S27. Specifically, when it is determined that the position and orientation of the measurement object S are not appropriate in the observation state, the user returns to the process of step S23. If it is determined that the amount of light (one measurement light) is not appropriate in the observation state, the user returns to the process of step S25. When it is determined that the focus of the light receiving unit 120 is not appropriate in the observation state, the user returns to the process of step S27.

  On the other hand, when it is determined in step S28 that the observation state is appropriate, the user stops the irradiation of one measurement light and irradiates the measurement object S with the measurement light from the other light projecting unit 110B ( Step S29). Thereby, the image of the measuring object S is displayed on the display unit 400. Subsequently, the user adjusts the light quantity of the other measurement light while viewing the image of the measurement object S displayed on the display unit 400 (step S30).

  Thereafter, the user determines whether or not the amount of the other measurement light is appropriate based on the image of the measurement object S displayed on the display unit 400 (step S31). If it is determined in step S31 that the amount of the other measurement light is not appropriate, the user returns to the process of step S30. On the other hand, if it is determined in step S31 that the amount of the other measurement light is appropriate, the user ends the second adjustment. By performing the second adjustment, an optimal light quantity condition for one and the other measurement light is set in order to generate the main stereoscopic shape data. In addition, when not using the other light projection part 110B, the user may abbreviate | omit the procedure of step S29-S31 after the process of step S28, and may complete | finish 2nd adjustment.

  FIG. 29 is a diagram illustrating an example of the GUI of the display unit 400 when the second adjustment is performed. As shown in FIG. 29, when the second adjustment is executed, light amount setting bars 430 and 440 similar to those in FIG. 5 are displayed in the setting change area 480 of the display unit 400. The user can change the light amount of one measurement light by operating the operation unit 250 and moving the slider 430s of the light amount setting bar 430 in the horizontal direction. Similarly, the user can change the light amount of the other measurement light by operating the operation unit 250 and moving the slider 440s of the light amount setting bar 440 in the horizontal direction.

  When the second adjustment is performed, the display unit 400 is provided with three image display areas 450a, 450b, and 450c. In the image display area 450a, an image of the measurement object S when one and the other measurement light is irradiated is displayed. In the image display area 450b, an image of the measurement object S when one measurement light is irradiated is displayed. In the image display area 450c, an image of the measurement object S when the other measurement light is irradiated is displayed.

  Here, the image is displayed in the image display areas 450a to 450c so that a portion where overexposure occurs because it is too bright and a portion where blackout occurs because it is too dark can be identified. In the example of FIG. 29, the overexposed part is highlighted by the dot pattern because it is too bright. In addition, a portion that is blackened due to being too dark is highlighted by a hatching pattern.

(4) Shape measurement process After the preparation of the shape measurement of FIG. 23, the shape measurement process of the measuring object S is executed. 30, 31 and 32 are flowcharts showing the procedure of the shape measurement process. Hereinafter, the procedure of the shape measurement process will be described with reference to FIGS. 1, 2, and 30 to 32. The user instructs the CPU 210 to start the shape measurement process after completing the preparation for the shape measurement. The CPU 210 determines whether or not the user has instructed the start of the shape measurement process (step S41).

  If the start of the shape measurement process is not instructed in step S41, the CPU 210 waits until the start of the shape measurement process is instructed. The user can prepare for shape measurement until instructing the start of the shape measurement process. On the other hand, when the start of the shape measurement process is instructed in step S41, the CPU 210 irradiates the measurement object S with the measurement light from the light projecting unit 110 according to the light amount condition set in the second adjustment, and the measurement object. An image obtained by projecting the measurement light pattern onto S (hereinafter referred to as a pattern image) is acquired (step S42). The acquired pattern image is stored in the work memory 230.

  Next, the CPU 210 generates main three-dimensional shape data indicating the three-dimensional shape of the measuring object S by processing the acquired pattern image with a predetermined measurement algorithm (step S43). The generated main stereoscopic shape data is stored in the work memory 230. Subsequently, the CPU 210 displays an image of the main stereoscopic shape of the measuring object S on the display unit 400 based on the generated main stereoscopic shape data (step S44).

  Thereafter, the CPU 210 determines whether or not a three-dimensional shape of a position to be measured (hereinafter referred to as a measurement position) is displayed based on a user instruction (step S45). The user views the image of the main three-dimensional shape of the measuring object S displayed on the display unit 400 and instructs the CPU 210 whether or not the three-dimensional shape at the measurement position is displayed.

  If it is determined in step S45 that the three-dimensional shape of the measurement position is not displayed, the CPU 210 returns to the process of step S41. Thus, the CPU 210 waits until the start of the shape measurement process is instructed, and the user prepares for shape measurement so that the three-dimensional shape of the measurement position is displayed until the user instructs the start of the shape measurement process again. Can do. On the other hand, if it is determined in step S45 that the three-dimensional shape of the measurement position is displayed, the CPU 210 determines whether or not a normal texture image has been selected by the user in step S19 of the first adjustment in FIG. (Step S46).

  Here, when the check box 484a in the texture image selection field 484 of FIG. 19 is designated, the CPU 210 determines that a normal texture image has been selected. Further, the CPU 210 determines that a normal texture image has been selected even when none of the check boxes 484a to 484c in the texture image selection field 484 of FIG. 19 is designated.

  If it is determined in step S46 that a normal texture image has been selected, the CPU 210 irradiates the measurement object S with illumination light from the illumination light output unit 130 according to the light amount condition set in the first adjustment, and the measurement object. Normal texture image data of S is generated (step S47). Thereafter, the CPU 210 proceeds to the process of step S55.

  If it is determined in step S46 that the normal texture image has not been selected, the CPU 210 determines whether or not the omnifocal texture image has been selected by the user in step S19 of the first adjustment in FIG. 25 (step S48). ). Here, when the check box 484c of the texture image selection field 484 of FIG. 19 is designated, the CPU 210 determines that the omnifocal texture image has been selected.

  If it is determined in step S48 that the omnifocal texture image has been selected, the CPU 210 irradiates the measurement object S with illumination light from the illumination light output unit 130 according to the light amount condition set in the first adjustment, and the measurement object. S omnifocal texture image data is generated (step S49). On the other hand, if it is determined in step S48 that the omnifocal texture image has not been selected, the CPU 210 proceeds to the process of step S50.

  Next, the CPU 210 determines whether or not the HDR texture image has been selected by the user in the first adjustment step S19 of FIG. 25 (step S50). Here, when the check box 484b of the texture image selection field 484 of FIG. 19 is designated, the CPU 210 determines that the HDR texture image has been selected.

  If it is determined in step S50 that the HDR texture image has been selected, the CPU 210 irradiates the measurement object S with illumination light from the illumination light output unit 130 according to the light amount condition set in the first adjustment, and the measurement object S HDR texture image data is generated (step S51). If the omnifocal texture image data has been generated in step S49, the CPU 210 generates HDR omnifocal texture image data instead of the HDR texture image data in step S51. On the other hand, if it is determined in step S50 that the HDR texture image has not been selected, the CPU 210 proceeds to the process of step S52.

  The user can instruct the CPU 210 to display a texture image based on the generated texture image data on the display unit 400. CPU 210 determines whether display of a texture image has been instructed (step S52). If it is determined in step S52 that the display of the texture image has not been instructed, the CPU 210 proceeds to the process of step S55. On the other hand, if it is determined in step S52 that display of a texture image has been instructed, the CPU 210 causes the display unit 400 to display a texture image based on the generated texture image data (step S53).

  Next, the CPU 210 determines whether or not the texture image is appropriate based on a user instruction (step S54). The user looks at the texture image displayed on the display unit 400 and instructs the CPU 210 whether or not the texture image is appropriate.

  If it is determined in step S54 that the texture image is not appropriate, the CPU 210 returns to the process of step S48. Thereby, the processing of steps S48 to S54 is repeated until it is determined that the texture image is appropriate. The user can cause the CPU 210 to generate appropriate texture image data by changing the type of texture image to be selected.

  If it is determined in step S54 that the texture image is appropriate, the CPU 210 generates composite data (step S55). The combined data is generated by combining the texture image data generated in step S47, step S49 or step S51 with the main stereoscopic shape data generated in step S43.

  Subsequently, the CPU 210 causes the display unit 400 to display a composite image of the measurement object S based on the generated composite data (step S56). Thereafter, the CPU 210 performs measurement or analysis of the measurement position based on a user instruction (step S57). This completes the shape measurement process. With such shape measurement processing, the CPU 210 can perform measurement or analysis of the measurement position on the composite image based on the user's instruction.

  In step S42 described above, when the measurement object S is irradiated with the measurement object S from both the light projecting units 110A and 110B, one pattern image corresponding to the measurement light from the one light projecting unit 110A is acquired. The other pattern image corresponding to the measurement light from the other light projecting unit 110B is acquired.

  In step S43, one main stereoscopic shape data corresponding to the measurement light from one light projecting unit 110A is generated, and the other main stereoscopic shape data corresponding to the measurement light from the other light projecting unit 110B is generated. Is done. One main stereoscopic shape data is generated by combining one main stereoscopic shape data and the other main stereoscopic shape data with appropriate weighting.

  In steps S47, S49, and S51 described above, the illumination light is applied to the measurement object S from the illumination light output unit 130, and the texture image data of the measurement object S is generated. However, the present invention is not limited to this. In steps S47, S49, and S51, texture image data of the measurement object S may be generated by irradiating the measurement object S with the measurement light from the light projecting unit 110. In this case, since the shape measuring apparatus 500 does not need to include the illumination light output unit 130, the shape measuring apparatus 500 can be downsized. Moreover, the manufacturing cost of the shape measuring apparatus 500 can be reduced.

  In the shape measurement process described above, it is determined whether an HDR image is selected after it is determined whether an omnifocal texture image is selected, but the present invention is not limited to this. It may be determined whether an omnifocal image has been selected after determining whether an HDR texture image has been selected.

  In the shape measurement process, the texture image data generation process (steps S46 to S54) is executed after the main stereoscopic shape data generation process (steps S42 to S45), but the present invention is not limited to this. Either the texture image data generation process or the main stereoscopic shape data generation process may be executed first, and a part of the texture image data generation process and the main stereoscopic shape data generation process are executed simultaneously. May be.

  For example, after the process of generating texture image data (steps S46 to S54) is performed, the process of generating main stereoscopic shape data (steps S42 to S45) may be performed. Even in this case, the CPU 210 can generate composite data in the process of step S55. In step S54, while the user looks at the texture image displayed on the display unit 400 and determines whether the texture image is appropriate, the process of generating the main stereoscopic shape data is performed. Can be executed. Therefore, the shape measurement process can be executed efficiently in a short time.

  In addition, when the texture image data generation process is performed before the main stereoscopic shape data generation process, the upper and lower ends of the dimension in the Z direction of the measuring object S can be calculated based on the sub stereoscopic shape data. Become. Therefore, in the process of generating the main stereoscopic shape data, the focus of the light receiving unit 120 can be automatically adjusted to the center of the measurement object S in the Z direction. In this case, the accuracy of the main stereoscopic shape data can be further improved.

  On the other hand, when the process of generating the main stereoscopic shape data is performed before the process of generating the texture image data as in the shape measurement process of FIGS. 30 to 32, the measurement object S is measured based on the main stereoscopic shape data. It becomes possible to calculate the upper end and the lower end of the dimension in the Z direction. Therefore, in the process of generating the texture image data, when generating the omnifocal texture image data, the movement range of the stage 140 with respect to the light receiving unit 120 in the Z direction can be minimized and the movement interval can be set appropriately. Thereby, omnifocal texture image data can be generated at high speed.

(5) Effect In the shape measuring apparatus 500 according to the present embodiment, main three-dimensional shape data indicating the three-dimensional shape of the measuring object S is generated with high accuracy by the triangulation method. Further, the omnifocal texture image data is generated by synthesizing the texture image data of the measurement object S when each part of the measurement object S is located within the range of the depth of field of the light receiving unit 120. . Therefore, the omnifocal texture image data clearly shows the surface state over the entire surface of the measuring object S.

  Thereby, the synthesized data obtained by synthesizing the main stereoscopic shape data and the omnifocal texture image data shows the stereoscopic shape of the measuring object S measured with high accuracy and clearly shows the surface state of the measuring object S. A composite image based on the composite data is displayed on the display unit 400. As a result, the user can clearly observe the surface state of the measuring object S while measuring the shape of the measuring object S with high accuracy.

  In the shape measuring apparatus 500 according to the present embodiment, the light quantity condition of one and the other measurement light suitable for generating main stereoscopic shape data and the light quantity of illumination light suitable for generating texture image data Conditions are set individually. As a result, it is possible to generate the main stereoscopic shape data with higher accuracy, and it is possible to generate texture image data that shows the surface state over the entire surface of the measuring object S more clearly. As a result, the surface state of the measuring object S can be observed more clearly while measuring the shape of the measuring object S with higher accuracy.

[6] Selection of Measurement Condition (1) Preview Image In the second adjustment in the preparation for shape measurement, the posture of the measurement object S is adjusted. FIG. 33 is a diagram for explaining the adjustment of the posture of the measuring object S. FIG. 33A and 33C show a state in which the measuring object S on the stage 140 is irradiated with the measuring light from the light projecting unit 110. FIG. 33 (b) and 33 (d) show images displayed on the display unit 400 when the measurement object S is imaged by the light receiving unit 120 of FIGS. 33 (a) and 33 (c), respectively.

  In the example of FIG. 33, the measuring object S is a block having an L-shaped cross section having two upper surfaces having different heights. In the example of FIG. 33A, the measurement light from the light projecting unit 110 is blocked by the upper surface of the measurement object S. In this case, as shown in FIG. 33B, a shadow Ss is generated at the measurement position on the upper surface of the lower stage of the measurement object S. Therefore, the shape of the measurement position of the measuring object S cannot be measured.

  In the example of FIG. 33 (c), the posture of the measurement object S is adjusted by changing the direction of the measurement object S. In this case, as shown in FIG. 33 (d), no shadow Ss occurs at the measurement position on the upper surface of the lower stage of the measurement object S. Thereby, the shape of the measurement position of the measuring object S can be measured.

  FIG. 34 is a perspective view showing an example of the measurement object S for explaining measurement conditions in the shape measurement process. As shown in FIG. 34, in the measuring object S, two prismatic members Sx, one plate member Sy, and one plate member Sz are formed on the plate member Sw. The two prismatic members Sx have a larger thickness than the plate-like members Sy and Sz. In this case, a shadow is likely to occur around the two prismatic members Sx. Therefore, when there is a measurement position in the vicinity of the two prismatic members Sx, there is a possibility that the shape of the measurement object S at the measurement position cannot be measured accurately.

  The plate-like member Sy has a higher transmittance than the two prismatic members Sx and the plate-like members Sw and Sz. In this case, the measurement light that has entered the inside of the plate-like member Sy and the measurement light that has been reflected (multiple reflection) a plurality of times by a plurality of portions of the plate-like member Sy are easily received by the light receiving unit 120 in FIG. Therefore, when there is a measurement position on the plate-like member Sy, there is a possibility that the shape of the measurement object S at the measurement position cannot be accurately measured.

  Furthermore, the plate-like member Sz has a higher reflectance than the two prismatic members Sx and the plate-like members Sw and Sy. In this case, the measurement light reflected by the plate member Sz has higher intensity than the measurement light reflected by the two prismatic members Sx or the plate member Sy. Thereby, when the light receiving unit 120 receives the measurement light reflected by the plate-like member Sz, the portion of the light reception signal corresponding to the plate-like member Sz is likely to be saturated. Therefore, when there is a measurement position on the plate-like member Sz, there is a possibility that the shape of the measurement object S at the measurement position cannot be accurately measured.

  On the other hand, it is a natural phenomenon that a shadow is generated on a part of the measuring object S, light is submerged or multiple reflection occurs, and high-intensity light is reflected. For this reason, even if a shadow, light sneaking or multiple reflection or high intensity light reflection occurs at the measurement position, the user may not notice it. Further, whether or not shadow, light sneak or multiple reflection, or high-intensity light reflection occurs on the measurement object S depends on the posture, shape, or material of the measurement object S. Therefore, it is difficult for the user to set appropriate measurement conditions in the shape measurement process of the measurement object S.

  Therefore, in the present embodiment, before the shape measurement processing of the measuring object S, there are areas where shadows occur under a plurality of different measurement conditions, areas where light stagnation or multiple reflection occurs, or reflection of high intensity light. The generated area is estimated by the PC 200. The measurement conditions include the measurement mode, the posture and position of the measurement object S, and the irradiation direction of the measurement light. The measurement mode includes a standard mode, a fine mode, a halation removal mode, and a super fine mode.

  Hereinafter, a region in the measuring object S where accurate shape measurement is impossible is referred to as a measurement difficult region. In particular, a region where a shadow is generated in the measurement object S is referred to as a first measurement difficulty region, and a region where light stagnation or multiple reflection occurs is referred to as a second measurement difficulty region, and high intensity light reflection occurs. The region is referred to as a third measurement difficulty region. The measurement difficulty region includes first to third measurement difficulty regions. Light that has entered the inside of the member or multiple reflected measurement light is called indirect light. The part of the main stereoscopic shape data corresponding to the difficult measurement area becomes a defective part such as a data missing part or a data inaccurate part.

  In the present embodiment, a plurality of image data (hereinafter referred to as preview image data) corresponding to a plurality of measurement conditions is generated. An image based on a plurality of preview image data (hereinafter referred to as a preview image) is displayed on the display unit 400 so that a measurement difficulty region estimated under a plurality of corresponding measurement conditions can be identified. Further, the measurement time estimated when the shape measurement process of the measurement object S is executed under a plurality of measurement conditions is displayed on the display unit 400 so as to correspond to the plurality of preview images.

  The user selects an appropriate measurement condition by operating the operation unit 250 of the PC 200 while viewing a plurality of preview images and measurement times displayed on the display unit 400 so as to be able to identify measurement difficulty regions in a plurality of measurement conditions. can do. The shape measurement process of the measuring object S is executed under the measurement conditions selected by the user.

(2) Estimation of measurement difficulty region based on image data When measurement mode is set as a measurement condition, before measuring the shape of measurement object S, in each of standard mode, fine mode, halation removal mode, and super fine mode The difficult measurement area is estimated based on the image data.

(A) Estimation of difficult measurement area in standard mode Standard mode is a standard measurement mode. In the standard mode, a first measurement difficulty region where a shadow is generated on the measurement object S, a second measurement difficulty region where a light stagnation or multiple reflection occurs, and a third measurement where a high intensity light reflection occurs. Difficult areas appear.

  In the estimation of the difficult measurement area in the standard mode, the measuring object S is irradiated with the measurement light consisting only of the bright part. That is, uniform measurement light is irradiated from the light projecting unit 110 to the entire measurement object S. In this case, measurement light and natural light are incident on the light receiving unit 120. Image data (hereinafter referred to as bright image data) is generated based on the light reception signal output by the light receiving unit 120.

  Thereafter, the measuring object S is irradiated with measuring light consisting of only a dark part. That is, the measurement light is not irradiated from the light projecting unit 110 to the measurement object S. In this case, only natural light is incident on the light receiving unit 120. Image data (hereinafter referred to as dark image data) is generated based on the light reception signal output by the light receiving unit 120.

  A difference between each pixel data value of the bright image data and a corresponding pixel data value of the dark image data is calculated. Thereby, the influence of natural light is removed. Here, when a shadow is generated in the portion of the measuring object S, the calculated difference becomes smaller than a certain value. Therefore, it is estimated that the part of the measuring object S corresponding to pixel data whose calculated difference is smaller than a preset value is the first measurement difficulty region.

  Further, when a part of the measuring object S has a higher reflectance than other parts, the light reception signal may be saturated. In this case, the value of pixel data corresponding to a portion having high reflectance in the bright image data is equal to the upper limit value of the dynamic range. Therefore, it is estimated that the part of the measuring object S corresponding to the pixel data having a value equal to the upper limit of the dynamic range among the pixel data of the bright image data is the third measurement difficulty region.

  In the standard mode, the second measurement difficulty region is not estimated, and the second measurement difficulty region estimated in the following fine mode is adopted as the second measurement difficulty region in the standard mode. In addition, the time required for estimating the difficult measurement area in the standard mode and the time required for the shape measurement process in the standard mode have a correlation. Therefore, based on the time required for estimating the measurement difficulty region in the standard mode, the measurement time required for executing the shape measurement process in the standard mode is estimated.

(B) Estimation of difficult measurement area in fine mode Fine mode is suitable for the measurement of translucent resin and metal with irregularities that easily bleed light. In the fine mode, a first measurement difficulty region in which a shadow is generated in the measurement object S and a third measurement difficulty region in which high-intensity light is reflected appear, but the second in which light sneak or multiple reflection occurs. The measurement is performed so that the measurement difficult region does not appear.

  In the estimation of the measurement difficulty region in the fine mode, the measurement object S is sequentially irradiated with a plurality of types of measurement light. Measurement light reflected by the measurement object S is sequentially received by the light receiving unit 120. A plurality of image data is generated based on the light reception signal output from the light receiving unit 120. Based on the change in the pixel data of the plurality of generated image data, the portion of the measuring object S where indirect light is generated is estimated as the second difficult region. Further, image data from which the influence of indirect light is removed (hereinafter referred to as indirect light-removed image data) is generated based on a plurality of image data.

  Furthermore, the measuring object S is irradiated with measuring light consisting only of dark portions. That is, the measurement light is not irradiated from the light projecting unit 110 to the measurement object S. In this case, only natural light is incident on the light receiving unit 120. Dark image data is generated based on the light reception signal output by the light receiving unit 120.

  A difference between each pixel data value of the indirect light removal image data and a corresponding pixel data value of the dark image data is calculated. Thereby, the influence of natural light is removed. In this case, the part of the measuring object S corresponding to the pixel data whose calculated difference is smaller than a preset value is estimated to be the first measurement difficulty region. Further, the portion of the measurement object S corresponding to the pixel data having a value equal to the upper limit value of the dynamic range among the pixel data values of the indirect light removal image data is estimated to be the third measurement difficulty region. .

  In addition, the time required for estimating the difficult measurement area in the fine mode and the time required for the shape measurement process in the fine mode have a correlation. Therefore, the measurement time required for executing the shape measurement process in the fine mode is estimated based on the time required for estimating the measurement difficult region in the fine mode.

(C) Estimation of measurement difficulty region in halation removal mode The halation removal mode is suitable for measurement of the measuring object S having a large luminance difference between a bright part and a dark part. In the halation removal mode, the first measurement difficulty region in which the shadow is generated in the measurement object S and the second measurement difficulty region in which light stagnation or multiple reflection occurs appear, but high-intensity light reflection occurs. The measurement is performed so that the third measurement difficulty region does not appear.

  In the estimation of the difficult measurement region in the halation removal mode, for example, the measurement object S is irradiated with measurement light including only a bright part. Here, when the exposure time of the light receiving unit 120 is set to the first time, measurement light including only a bright part reflected by the measurement object S is received by the light receiving unit 120. Based on the light reception signal output from the light receiving unit 120, first bright image data is generated.

  Thereafter, for example, the measuring object S is irradiated with measuring light consisting only of a bright part. Here, when the exposure time of the light receiving unit 120 is set to a second time that is longer than the first time, the light receiving unit 120 receives measurement light consisting only of a bright portion reflected by the measurement object S. The Based on the light reception signal output from the light receiving unit 120, second bright image data is generated.

  The generated first and second bright image data are combined so that the dynamic range is expanded. In this case, for the region where the light reception signal is saturated, the pixel data of the first bright image data is selected, and the value of the selected pixel data includes the second exposure time and the first exposure time. The ratio is multiplied. For the region where the saturation of the light reception signal does not occur, the pixel data of the second bright image data is selected. The pixel data of the first first bright image data obtained by multiplication and the pixel data of the selected second bright image data are synthesized. Thereby, image data with an expanded dynamic range (hereinafter referred to as HDR (high dynamic range) image data) is generated.

  Further, the measuring object S is irradiated with measurement light consisting only of a dark part. That is, the measurement light is not irradiated from the light projecting unit 110 to the measurement object S. In this case, only natural light is incident on the light receiving unit 120. Dark image data is generated based on the light reception signal output by the light receiving unit 120.

  A difference between each pixel data value of the HDR image data and a corresponding pixel data value of the dark image data is calculated. The part of the measuring object S corresponding to the pixel data whose calculated difference is smaller than a preset value is estimated to be the first measurement difficulty region. Moreover, it is estimated that the part of the measuring object S corresponding to the pixel data having a value equal to the upper limit value of the expanded dynamic range among the pixel data of the HDR image data is the third measurement difficulty region.

  In the halation removal mode, the second measurement difficulty region is not estimated, and the second measurement difficulty region estimated in the fine mode is employed as the second measurement difficulty region in the halation removal mode. In addition, the time required for estimating the measurement difficulty region in the halation removal mode and the time required for the shape measurement process in the halation removal mode have a correlation. Therefore, based on the time required for estimating the measurement difficulty region in the halation removal mode, the measurement time required for executing the shape measurement process in the halation removal mode is estimated.

  In the above description, the first bright image data is generated by setting the exposure time of the light receiving unit 120 to the first time while the intensity of the measurement light is set to be constant, and the light receiving unit. Although the second bright image data is generated by setting the exposure time of 120 to the second time, the present invention is not limited to this. With the exposure time of the light receiving unit 120 set to be constant, the first light image data is generated by setting the intensity of the measurement light to the first intensity, and the intensity of the measurement light is greater than the first intensity. The second bright image data may be generated by setting the second intensity to a larger second intensity. The same applies to the estimation of the measurement difficult region in the following super fine mode.

(D) Estimation of Difficulty Region in Super Fine Mode According to the super fine mode, the effects of the fine mode and the halation removal mode can be obtained. In the super fine mode, the first measurement difficulty region in which a shadow occurs in the measurement object S appears, but the second measurement difficulty region in which light sneak or multiple reflection occurs and the reflection of high intensity light occur. The measurement is performed so that the measurement difficulty region 3 does not appear.

  In the estimation of the difficult measurement area in the super fine mode, the exposure time of the light receiving unit 120 is set to the first time. In this state, the measurement object S is sequentially irradiated with a plurality of types of measurement light in the same manner as the estimation of the measurement difficult region in the fine mode. Thereby, 1st indirect light removal image data is produced | generated.

  Further, the exposure time of the light receiving unit 120 is set to the second time. In this state, the measurement object S is sequentially irradiated with a plurality of types of measurement light in the same manner as the estimation of the measurement difficult region in the fine mode. Thereby, the second indirect light removal image data is generated and the second measurement difficulty region is estimated.

  The generated first and second indirect light removal image data are combined so that the dynamic range is expanded, similarly to the estimation of the measurement difficulty region in the halation removal mode. As a result, image data in which the dynamic range is expanded and the influence of indirect light is removed (hereinafter referred to as HDR indirect light removal image data) is generated.

  Further, the measuring object S is irradiated with measurement light consisting only of a dark part. That is, the measurement light is not irradiated from the light projecting unit 110 to the measurement object S. In this case, only natural light is incident on the light receiving unit 120. Dark image data is generated based on the light reception signal output by the light receiving unit 120.

  A difference between each pixel data value of the HDR indirect light removal image data and each pixel data value of the dark image data is calculated. The part of the measuring object S corresponding to the pixel data whose calculated difference is smaller than a preset value is estimated to be the first measurement difficulty region. In addition, the portion of the measurement object S corresponding to the pixel data having a value equal to the upper limit value of the expanded dynamic range in the pixel data of the HDR indirect light removal image data is estimated to be the third measurement difficulty region. Is done.

  In addition, the time required for estimating the measurement difficulty region in the super fine mode and the time required for the shape measurement process in the super fine mode have a correlation. Therefore, the measurement time required for executing the shape measurement process in the super fine mode is estimated based on the time required for estimating the measurement difficult region in the super fine mode.

  In the above description, the measurement time required for the shape measurement process in each measurement mode is estimated based on the time required to estimate the measurement difficulty region in the corresponding measurement mode, but is not limited to this. The measurement time required for the shape measurement process and the number of times of measurement light irradiation correspond approximately linearly. Therefore, when the number of times of measurement light irradiation is predetermined in each measurement mode, the measurement time required for the shape measurement process in the corresponding measurement mode may be calculated based on the number of times of measurement light irradiation.

  As described above, in the present embodiment, all of the measurement light having a plurality of patterns necessary for executing the shape measurement process in each measurement mode is not emitted and becomes a measurement difficult region in each measurement mode. Measurement light having a simple pattern corresponding to each measurement mode necessary for estimating the portion to be is emitted. Further, a measurement difficulty region is estimated based on the generated image data, and a preview image is displayed on the display unit 400 so that the estimated measurement difficulty region can be recognized. As a result, it is possible to display the measurement difficulty region corresponding to each measurement mode while greatly reducing the time required for displaying the preview image.

(3) Selection of Measurement Mode FIG. 35 is a diagram illustrating an example of a preview image of the measurement object S of FIG. 34 in a plurality of measurement modes displayed on the display unit 400. When the measurement mode is set as the measurement condition, four image display areas 450a, 450b, 450c, and 450d and a measurement condition display area 460 are displayed on the display unit 400 as shown in FIG. The image display areas 450a to 450d are arranged so as to be approximately equal in size and arranged in 2 rows and 2 columns.

  In the image display area 450a, a first preview image based on the first preview image data is displayed so that the measurement difficult area estimated in the standard mode can be identified. In the example of the standard mode in FIG. 35, the portion between the two prismatic members Sx is estimated to be the first measurement difficulty region. A portion between the two prismatic members Sx estimated to be the first measurement difficulty region is highlighted by a hatching pattern.

  Moreover, it is estimated that the part on plate-shaped member Sy is a 2nd measurement difficult area | region. The portion on the plate-like member Sy that is estimated to be the second measurement difficulty region is highlighted by the first dot pattern. Furthermore, the part on the plate-like member Sz is estimated to be the third measurement difficulty region. The portion on the plate-like member Sz estimated to be the third measurement difficulty region is highlighted with the second dot pattern.

  In the image display area 450b, a second preview image based on the second preview image data is displayed so that the measurement difficult area estimated in the fine mode can be identified. In the example of the fine mode in FIG. 35, the portion between the two prismatic members Sx is estimated to be the first measurement difficulty region. A portion between the two prismatic members Sx estimated to be the first measurement difficulty region is highlighted by a hatching pattern.

  Moreover, it is estimated that the part on the plate-shaped member Sz is a 3rd measurement difficult area | region. The portion on the plate-like member Sz estimated to be the third measurement difficulty region is highlighted with the second dot pattern. In the fine mode, measurement is performed so that the second measurement difficult region does not appear. Therefore, the second measurement difficulty region is not displayed in the image display region 450b.

  In the image display area 450c, a third preview image based on the third preview image data is displayed so that the measurement difficult area estimated in the halation removal mode can be identified. In the example of the halation removal mode of FIG. 35, the portion between the two prismatic members Sx is estimated to be the first measurement difficulty region. A portion between the two prismatic members Sx estimated to be the first measurement difficulty region is highlighted by a hatching pattern.

  Moreover, it is estimated that the part on plate-shaped member Sy is a 2nd measurement difficult area | region. The portion on the plate-like member Sy that is estimated to be the second measurement difficult region is highlighted by the first dot pattern. In the halation removal mode, measurement is performed so that the third measurement difficulty region does not appear. Therefore, the third measurement difficulty region is not displayed in the image display region 450c.

  In the image display area 450d, a fourth preview image based on the fourth preview image data is displayed so that the measurement difficult area estimated in the super fine mode can be identified. In the example of the super fine mode in FIG. 35, it is estimated that the portion between the two prismatic members Sx is the first measurement difficult region. A portion between the two prismatic members Sx estimated to be the first measurement difficulty region is highlighted by a hatching pattern. In the super fine mode, the measurement is performed so that the second and third measurement difficult regions do not appear. Therefore, the second and third measurement difficulty areas are not displayed in the image display area 450d.

  In this way, preview images in the standard mode, fine mode, halation removal mode, and super fine mode are displayed in the image display areas 450a to 450d, respectively. In generating preview image data in a plurality of measurement modes, the intensity (brightness) of measurement light is automatically adjusted so that the brightness of the plurality of preview images is substantially equal to each other.

  In this example, the preview image data is image data generated in a state where measurement light having a uniform light amount distribution (uniform pattern) is irradiated from the light projecting unit 110, but is not limited thereto. The preview image data may be image data generated in a state where illumination light is irradiated from the illumination light output unit 130. Even in this case, the user can recognize how the measurement difficulty region changes under each measurement condition by looking at a plurality of preview images, so that the optimum measurement condition can be easily selected.

  In the measurement condition display area 460, a plurality of check boxes 461a, 461b, 461c, 461d and measurement time display fields 462a, 462b, 462c, 462d are displayed. In the measurement condition display area 460, a plurality of check boxes 463a, 463b, 463c and a measurement time display field 464 are displayed. Further, an update button 466 and an OK button 467 are displayed in the measurement condition display area 460.

  The measurement mode is selected by designating any of the check boxes 461a to 461d. Further, when any of the check boxes 463a to 463c is designated, the irradiation direction of the measurement light is selected. The preview images corresponding to the designated check boxes 461a to 461d are displayed in an identifiable manner.

  In the example of FIG. 35, a check box 461d and a check box 463c are designated. Therefore, the preview image corresponding to the super fine mode displayed in the image display area 450d is displayed so as to be identifiable by being surrounded by a thick line. When the OK button 467 is operated in a state where any of the check boxes 461a to 461d is designated and any of the check boxes 463a to 463c is designated, measurement conditions in the shape measurement process are determined.

  When the check box 461a is designated, the standard mode is selected. The measurement time display field 462a displays a measurement time estimated when the shape measurement process is executed in the standard mode. In the example of FIG. 35, when the shape measurement process is executed in the standard mode, the measurement time is estimated to be 5 seconds.

  When the check box 461b is designated, the fine mode is selected. The measurement time display field 462b displays the measurement time estimated when the shape measurement process is executed in the fine mode. In the example of FIG. 35, when the shape measurement process is executed in the fine mode, the measurement time is estimated to be 15 seconds.

  When the check box 461c is designated, the halation removal mode is selected. The measurement time display field 462c displays a measurement time estimated when the shape measurement process is executed in the halation removal mode. In the example of FIG. 35, when the shape measurement process is executed in the halation removal mode, it is estimated that the measurement time is 20 seconds.

  When the check box 461d is designated, the super fine mode is selected. The measurement time display field 462d displays a measurement time estimated when the shape measurement process is executed in the super fine mode. In the example of FIG. 35, when the shape measurement process is executed in the super fine mode, the measurement time is estimated to be 60 seconds.

  When the check box 463a is designated, the measurement light is irradiated to the measurement object S from one light projecting unit 110A. When the check box 463b is designated, the measurement light is irradiated from the other light projecting unit 110B to the measurement object S. When the check box 463c is designated, measurement light is sequentially irradiated onto the measurement object S from both the light projecting units 110A and 110B.

  The measurement time display field 464 displays a measurement time estimated when the shape measurement process is executed in the selected measurement light irradiation direction. When the check boxes 463a and 463b are designated, the measurement time is equal to the measurement time in each measurement mode. Therefore, “measurement time × 1” is displayed in the measurement time display field 464. On the other hand, when the check box 463c is designated, the measurement time is twice the measurement time of each measurement mode. Therefore, “measurement time × 2” is displayed in the measurement time display field 464. In this example, since the check box 463c is designated, the time displayed in the measurement time display column 464 is 120 seconds, which is twice the measurement time of the shape measurement process in the super fine mode.

  When the posture of the measuring object S is changed, the update button 466 is operated by the user. Thereby, the preview image data of the measuring object S is updated in the changed posture, and the estimated measurement difficulty region is updated. When the amount of preview image data is small, the preview image data and the estimated measurement difficulty region are updated at regular intervals, so that the preview image is displayed as a live image in the image display regions 450a to 450d. May be. According to this configuration, even when the posture of the measuring object S is changed, the user does not have to operate the update button 466.

  When the irradiation direction of the measurement light is changed, the update button 466 is operated by the user. Thereby, the preview image data is updated in the changed irradiation direction of the measurement light, and the estimated measurement difficulty region is updated. Note that when the measurement conditions such as the irradiation direction of the measurement light are changed, the preview image data and the estimated measurement difficulty region may be automatically updated. According to this configuration, even when the measurement light irradiation direction is changed, the user does not have to operate the update button 466.

  FIG. 36 is a diagram showing another example of the preview image of the measurement object S of FIG. 34 in the plurality of measurement modes displayed on the display unit 400. The display unit 400 of FIG. 36 will be described while referring to differences from the display unit 400 of FIG. In this example, the check boxes 461a to 461d correspond to the image display areas 450a to 450d, respectively. As shown in FIG. 36, one image display area corresponding to the designated check box among the check boxes 461a to 461d is arranged in an enlarged state. Further, the other image display areas are arranged to be arranged in a reduced state below the one image display area.

  In the example of FIG. 36, a check box 461a and a check box 463c are designated. Therefore, the image display area 450a is arranged in an enlarged state. As a result, the preview image in the standard mode is displayed in an enlarged state in the image display area 450a. In this case, the time displayed in the measurement time display field 464 is 10 seconds, which is twice the measurement time of the shape measurement process in the standard mode.

  On the other hand, the image display areas 450b to 450d are arranged to be arranged in a reduced state below the image display area 450a. Thereby, the preview images in the fine mode, the halation removal mode, and the super fine mode are displayed in a reduced state in the image display areas 450b to 450d, respectively.

  In this way, the user can recognize the measurement difficulty region of the measurement object S that occurs in the shape measurement process executed in a plurality of different measurement modes before the shape measurement process. Thereby, before the shape measurement process of the measuring object S, a measurement mode suitable for shape measurement can be easily and appropriately selected from among a plurality of measurement modes.

(4) Shape measurement process in each measurement mode (a) Shape measurement process in standard mode When the standard mode is selected as the measurement mode, the shape measurement of the measuring object S in the standard mode is performed in the shape measurement process. In the shape measurement processing in the standard mode, for example, the striped measurement light and the code measurement light are sequentially irradiated onto the measurement object S, and the stripe measurement light and the code measurement light reflected by the measurement object S are received by the light receiving unit 120. Are sequentially received. Main three-dimensional shape data in the standard mode is generated based on the light reception signal output by the light receiving unit 120 during irradiation of the striped measurement light and the light reception signal output by the light receiving unit 120 during irradiation of the code-shaped measurement light.

(B) Shape measurement process in fine mode When the fine mode is selected as the measurement mode, the shape measurement of the measuring object S in the fine mode is performed in the shape measurement process. In the shape measurement process in the fine mode, for example, it is obtained by deforming a plurality of types of striped measurement light and code-shaped measurement light obtained by transforming the striped measurement light into a plurality of different shapes. A plurality of types of cord-shaped measuring light are used.

  One kind of striped measurement light and one kind of code-like measurement light are sequentially irradiated onto the measuring object S, and one kind of striped measurement light and one kind of code-like light reflected by the measurement object S are reflected. Measurement light is sequentially received by the light receiving unit 120. Based on the light reception signal output from the light receiving unit 120, one main stereoscopic shape data is generated. The same process is repeated using other types of striped measurement light and other types of code-like measurement light. Thereby, a plurality of main stereoscopic shape data are generated. Based on the generated plurality of main stereoscopic shape data, main stereoscopic shape data from which the influence of indirect light in the fine mode is removed (hereinafter referred to as indirect light-removed stereoscopic shape data) is generated.

(C) Shape measurement process in halation removal mode When the halation removal mode is selected as the measurement mode, the shape measurement of the measurement object S in the halation removal mode is performed in the shape measurement process. In the shape measurement process in the halation removal mode, the exposure time of the light receiving unit 120 is set to a predetermined time. In this state, for example, the striped measurement light and the code-shaped measurement light are sequentially irradiated onto the measurement object S, and the striped measurement light and the code-shaped measurement light reflected by the measurement object S are sequentially received by the light receiving unit 120. . One main three-dimensional shape data is generated based on the light reception signal output by the light receiving unit 120 during irradiation of the striped measurement light and the light reception signal output by the light receiving unit 120 during irradiation of the code-shaped measurement light.

  The exposure time of the light receiving unit 120 is changed, and the same processing is repeated. Thereby, a plurality of main stereoscopic shape data are generated. The plurality of generated main stereoscopic shape data are combined so that the dynamic range is expanded. As a result, main stereoscopic shape data (hereinafter referred to as HDR stereoscopic shape data) with an expanded dynamic range in the halation removal mode is generated.

  In the above description, a plurality of main stereoscopic shape data is generated by changing the exposure time of the light receiving unit 120 in a state where the intensity of the measurement light is set to be constant, but the present invention is not limited to this. A plurality of main stereoscopic shape data may be generated by changing the intensity of the measurement light in a state where the exposure time of the light receiving unit 120 is set to be constant. The same applies to the shape measurement process in the following super fine mode.

(D) Shape measurement process in super fine mode When the super fine mode is selected as the measurement mode, the shape measurement of the measuring object S in the super fine mode is performed in the shape measurement process. In the shape measurement process in the super fine mode, the exposure time of the light receiving unit 120 is set to a predetermined time. In this state, similarly to the shape measurement process in the fine mode, one indirect light-removed three-dimensional shape data is generated using, for example, a plurality of types of striped measurement light and a plurality of types of code-shaped measurement light.

  The exposure time of the light receiving unit 120 is changed, and the same processing is repeated. Thereby, a plurality of indirect light removal solid shape data is generated. The generated plurality of indirect light-removed solid shape data are combined so that the dynamic range is expanded, as in the shape measurement process in the halation removal mode. Thereby, main stereoscopic shape data in which the dynamic range in the super fine mode is expanded and the influence of indirect light is removed is generated.

(5) Posture and Position of Measurement Object FIG. 37 is a diagram illustrating an example of a preview image of the measurement object S of FIG. 34 in a plurality of postures displayed on the display unit 400. When the posture of the measuring object S is set as the measurement condition, as shown in FIG. 37, four image display areas 450a to 450d and a measurement condition display area 460 are displayed on the display unit 400. A difference between the display unit 400 of FIG. 37 and the display unit 400 of FIG. 35 will be described. In the following description, the measurement difficult region in the standard mode is estimated.

  In the image display area 450a, a first preview image based on the first preview image data is displayed so that the measurement difficult area estimated in the first posture can be identified. The first posture is the posture of the measuring object S when the rotation angle of the θ stage 143 is, for example, an initial value (0 degrees in this example).

  In the example of the 1st attitude | position of FIG. 37, it is estimated that the part between two prismatic members Sx is a 1st measurement difficult area | region. A portion between the two prismatic members Sx estimated to be the first measurement difficulty region is highlighted by a hatching pattern.

  Moreover, it is estimated that the part on plate-shaped member Sy is a 2nd measurement difficult area | region. The portion on the plate-like member Sy that is estimated to be the second measurement difficulty region is highlighted by the first dot pattern. Furthermore, the part on the plate-like member Sz is estimated to be the third measurement difficulty region. The portion on the plate-like member Sz estimated to be the third measurement difficulty region is highlighted with the second dot pattern.

  In the image display area 450b, a second preview image based on the second preview image data is displayed so that the measurement difficulty area estimated in the second posture can be identified. The second posture is the posture of the measuring object S when the rotation angle of the θ stage 143 is 20 degrees, for example.

  In the example of the 2nd attitude | position of FIG. 37, it is estimated that the part between two prismatic members Sx is a 1st measurement difficult area | region. Here, the first measurement difficulty region is smaller than the first measurement difficulty region in the first posture. A portion between the two prismatic members Sx estimated to be the first measurement difficulty region is highlighted by a hatching pattern.

  Similarly to the first posture example, the portion on the plate-like member Sy that is estimated to be the second measurement difficulty region is highlighted by the first dot pattern. The portion on the plate-like member Sz estimated to be the third measurement difficulty region is highlighted with the second dot pattern.

  In the image display area 450c, a third preview image based on the third preview image data is displayed so that the measurement difficulty area estimated in the third posture can be identified. The third posture is the posture of the measuring object S when the rotation angle of the θ stage 143 is 50 degrees, for example.

  In the example of the third posture in FIG. 37, the portion between the two prismatic members Sx is estimated to be the first measurement difficulty region. Here, the first measurement difficulty region is smaller than the first measurement difficulty region in the second posture. A portion between the two prismatic members Sx estimated to be the first measurement difficulty region is highlighted by a hatching pattern.

  Similarly to the first posture example, the portion on the plate-like member Sy that is estimated to be the second measurement difficulty region is highlighted by the first dot pattern. The portion on the plate-like member Sz estimated to be the third measurement difficulty region is highlighted with the second dot pattern.

  In the image display area 450d, a fourth preview image based on the fourth preview image data is displayed so that the measurement difficulty area estimated in the fourth posture can be identified. The first posture is the posture of the measuring object S when the rotation angle of the θ stage 143 is, for example, 90 degrees.

  In the example of the 4th attitude | position of FIG. 37, measurement light is irradiated from the direction of the both sides orthogonal to the direction where two prismatic members Sx are located in a line. Therefore, the first measurement difficult region does not appear. Similarly to the first posture, the portion on the plate-like member Sy that is estimated to be the second measurement difficulty region is highlighted by the first dot pattern. The portion on the plate-like member Sz estimated to be the third measurement difficulty region is highlighted with the second dot pattern.

  Thus, preview images in the first to fourth postures are displayed in the image display areas 450a to 450d, respectively. In generating preview image data in a plurality of postures, the brightness of the measurement light is automatically adjusted so that the brightness of the plurality of preview images is substantially equal to each other.

  In the measurement condition display area 460 of FIG. 37, a plurality of check boxes 465a, 465b, 465c, and 465d are displayed instead of the check boxes 461a to 461d of FIG. In this example, since the measurement time estimated when the shape measurement processing is executed in the first to fourth postures is equal to each other, the measurement time display column is not displayed in the measurement condition display area 460, but the present invention is not limited to this. . A measurement time display field for displaying a measurement time estimated when the shape measurement process is executed in the first to fourth postures may be displayed in the measurement condition display area 460.

  When the check boxes 465a to 465d are designated, the first to fourth postures are selected. Further, when any of the check boxes 463a to 463c is designated, the irradiation direction of the measurement light is selected. The preview images corresponding to the designated check boxes 465a to 465d are displayed in an identifiable manner.

  In the example of FIG. 37, a check box 465d and a check box 463c are designated. Therefore, the preview image corresponding to the fourth posture displayed in the image display area 450d is displayed so as to be identifiable by being surrounded by a thick line. When the OK button 467 is operated in a state in which any of the check boxes 465a to 465d is designated and any of the check boxes 463a to 463c is designated, measurement conditions in the shape measurement process are determined.

  When any one of the first to fourth postures is selected as the measurement condition, the shape measurement of the measurement object S in the posture selected in the shape measurement process is performed. In the shape measurement processing in the first to fourth postures, the rotation angle of the θ stage 143 is set to 0 degrees, 20 degrees, 50 degrees, and 90 degrees, for example.

  In this state, in a state where the rotation angle of the θ stage 143 is set to an angle corresponding to the posture selected from the first to fourth postures, for example, the striped measurement light and the code measurement light are measured on the measurement object S. Are sequentially irradiated. Main three-dimensional shape data in the selected posture is generated based on the light reception signal output by the light receiving unit 120 when the striped measurement light and the code measurement light are irradiated.

  In the example of FIG. 37, the posture of the measurement object S (the rotation angle in the θ direction) is set as the measurement condition, but the measurement condition is not limited to this. As a measurement condition, the position of the measurement object S may be set instead of the posture of the measurement object S. In this case, preview image data of the measuring object S at the first to fourth positions is generated. Further, based on the generated preview image data, preview images of the measurement object S at the first to fourth positions are displayed in the image display areas 450a to 450d so that the estimated measurement difficulty areas can be identified. .

  Further, the posture of the measuring object S may be not the rotation angle in the θ direction but the rotation angle in the tilt direction of the tilt stage 144.

  Thus, the user can recognize the measurement difficulty region of the measurement object S generated in the shape measurement process executed in a plurality of postures or positions of the measurement object S before the shape measurement process. Thereby, before the shape measurement process of the measuring object S, a plurality of different postures or positions of the measuring object S suitable for shape measurement among a plurality of different postures or positions of the measuring object S can be easily and appropriately selected. can do.

(6) Irradiation direction of measurement light FIG. 38 is a diagram illustrating an example of a preview image of the measurement object S of FIG. 34 in a plurality of irradiation directions of measurement light displayed on the display unit 400. When the measurement light irradiation direction is set as the measurement condition, as shown in FIG. 38, three image display areas 450 a to 450 c and a measurement condition display area 460 are displayed on the display unit 400. A difference between the display unit 400 of FIG. 38 and the display unit 400 of FIG. 35 will be described. In the following description, the measurement difficult region in the standard mode is estimated.

  In the image display area 450a, a first preview image based on the first preview image data is displayed so that the measurement difficulty area estimated in the first irradiation direction can be identified. The first irradiation direction is a direction in which the measurement light is sequentially irradiated from both the light projecting units 110A and 110B to the measurement object S.

  In the example of the first irradiation direction in FIG. 38, the portion between the two prismatic members Sx is estimated to be the first measurement difficulty region. A portion between the two prismatic members Sx estimated to be the first measurement difficulty region is highlighted by a hatching pattern. Moreover, it is estimated that the part on plate-shaped member Sy is a 2nd measurement difficult area | region. The portion on the plate-like member Sy that is estimated to be the second measurement difficulty region is highlighted by the first dot pattern. Furthermore, the part on the plate-like member Sz is estimated to be the third measurement difficulty region. The portion on the plate-like member Sz estimated to be the third measurement difficulty region is highlighted with the second dot pattern.

  In the image display area 450b, a second preview image based on the second preview image data is displayed so that the measurement difficult area estimated in the second irradiation direction can be identified. The second irradiation direction is a direction in which the measurement light is irradiated from one light projecting unit 110A to the measurement object S.

  In the example of the second irradiation direction in FIG. 38, the portion between the two prismatic members Sx and the one side (right side) portion of the two prismatic members Sx and the plate-like member Sy are the first Estimated to be a difficult measurement area. A portion between the two prismatic members Sx estimated to be the first measurement difficulty region and a right portion of the two prismatic members Sx and the plate-like member Sy are highlighted by a hatching pattern. Similarly to the example of the first direction, the portion on the plate-like member Sy estimated to be the second measurement difficult region is highlighted by the first dot pattern. The portion on the plate-like member Sz estimated to be the third measurement difficulty region is highlighted with the second dot pattern.

  In the image display area 450c, a third preview image based on the third preview image data is displayed so that the measurement difficult area estimated in the third irradiation direction can be identified. The third irradiation direction is a direction in which measurement light is irradiated from the other light projecting unit 110B to the measurement object S.

  In the example of the third irradiation direction in FIG. 38, the portion between the two prismatic members Sx and the other side (left side) portion of the two prismatic members Sx and the plate-like member Sy are the first Estimated to be a difficult measurement area. A portion between the two prismatic members Sx estimated to be the first measurement difficulty region and a left portion of the two prismatic members Sx and the plate-like member Sy are highlighted by a hatching pattern. Similarly to the example of the first direction, the portion on the plate-like member Sy estimated to be the second measurement difficult region is highlighted by the first dot pattern. The portion on the plate-like member Sz estimated to be the third measurement difficulty region is highlighted with the second dot pattern.

  Thus, preview images in the first to third irradiation directions are displayed in the image display areas 450a to 450c, respectively. In generating preview image data in a plurality of irradiation directions, the brightness of the measurement light is automatically adjusted so that the brightness of the plurality of preview images is substantially equal to each other.

  In the measurement condition display area 460, check boxes 463a to 463c, an update button 466, and an OK button 467 are displayed. When the check boxes 463c, 463a, and 463b are designated, the first to third irradiation directions are selected, respectively. The preview images corresponding to the designated check boxes 463a to 463c are displayed in an identifiable manner.

  In the example of FIG. 38, the check box 463c is designated. Therefore, the preview image corresponding to the first irradiation direction displayed in the image display area 450a is displayed so as to be identifiable by being surrounded by a thick line. When the OK button 467 is operated in a state where any of the check boxes 463a to 463c is designated, the measurement condition in the shape measurement process is determined.

  When any one of the first to third irradiation directions is selected as the measurement condition, the shape measurement of the measurement object S in the irradiation direction selected in the shape measurement process is performed. In the shape measurement process in the first irradiation direction, for example, the stripe-shaped measurement light and the code-shaped measurement light are sequentially irradiated from the light projecting unit 110A to the measurement object S, and the stripe-shaped measurement light and the code-shaped measurement light are projected. The measurement object S is sequentially irradiated from 110B. During irradiation of striped light from the light projecting unit 110A, irradiation of code-shaped light from the light projecting unit 110A, irradiation of striped light from the light projecting unit 110B, and irradiation of code-shaped light from the light projecting unit 110B On the basis of the light reception signal output from the light receiving unit 120 at times, main stereoscopic shape data in the first irradiation direction is generated.

  In the shape measurement process in the second irradiation direction, for example, the stripe-shaped measurement light and the code-shaped measurement light are sequentially irradiated onto the measurement object S from one light projecting unit 110A. Main three-dimensional shape data in the second irradiation direction is generated based on the light reception signal output by the light receiving unit 120 during irradiation of the striped light and the code-shaped light from the light projecting unit 110A.

  In the shape measurement process in the third irradiation direction, for example, the striped measurement light and the code-shaped measurement light are sequentially irradiated onto the measurement object S from the other light projecting unit 110B. Main three-dimensional shape data in the third irradiation direction is generated based on the light reception signal output by the light receiving unit 120 when the stripe light is emitted from the light projecting unit 110B and when the code light is emitted.

  In this way, the user can recognize the measurement difficulty region of the measuring object S generated in the shape measurement process executed in a plurality of irradiation directions with different light before the shape measurement process. Thereby, before the shape measurement process of the measuring object S, the irradiation direction of light suitable for shape measurement can be easily selected appropriately from a plurality of irradiation directions with different light.

  In addition, by combining the measurement mode, the posture and position of the measurement object S, and the irradiation direction of the measurement light, a preview image is displayed on the display unit 400 so that the measurement difficult regions corresponding to a plurality of more complicated measurement conditions can be identified. be able to. In this case, the user can select an appropriate measurement condition from a plurality of measurement conditions corresponding to more complicated measurement conditions.

  For example, by irradiating the measuring object S with measurement light from one light projecting unit 110A, four measurement difficulty regions corresponding to the four measurement modes are estimated, and four preview image data are generated. Similarly, by irradiating the measurement object S with the measurement light from the other light projecting unit 110B, four measurement difficulty regions corresponding to the four measurement modes are estimated, and four preview image data are generated. . Based on the generated preview image data, a total of eight preview images can be displayed as a list on the display unit 400 so that the measurement difficulty region can be identified. In this case, although it takes time to display the preview image, since the user can specify a plurality of measurement conditions at a time, the optimum measurement conditions can be easily set.

  The PC 200 can also guide the user to display a plurality of preview images in stages and sequentially set a plurality of measurement conditions (wizard format). For example, as shown in FIG. 37, preview images for a plurality of postures of the measuring object S are displayed on the display unit 400. Thereby, the user can select the optimal posture of the measuring object S.

  Next, in the selected posture, preview images for a plurality of measurement modes are displayed on the display unit 400 as shown in FIG. Thereby, the user can select an optimal measurement mode. Subsequently, in the selected measurement mode, as shown in FIG. 38, preview images for a plurality of measurement light irradiation directions are displayed on the display unit 400. Thereby, the user can select the optimal measurement light irradiation direction. Thus, by displaying the preview image in stages, the measurement conditions can be narrowed down in stages.

  The measurement conditions may include an accuracy mode. The accuracy mode includes a normal measurement mode, a simple measurement mode, and a super simple measurement mode. When the accuracy mode is set as the measurement condition, before the shape measurement process of the measurement object S, an index indicating the measurement difficulty region, the measurement time, and the measurement accuracy in each accuracy mode is estimated. In addition, a preview image is displayed on the display unit 400 so that an index indicating the measurement difficulty region, measurement time, and measurement accuracy in each estimated accuracy mode can be identified.

  In the normal measurement mode, the main three-dimensional shape data is generated as a preview image by sequentially irradiating the measurement object S with the code-shaped measurement light and the striped measurement light. Based on the generated preview image data, a three-dimensional preview image of the measuring object S is displayed in one image display area of the display unit 400.

  In the simple measurement mode, the main three-dimensional shape data is generated as a preview image by irradiating the measurement object S with the code-shaped measurement light and the striped measurement light. Based on the generated preview image data, a three-dimensional preview image of the measuring object S is displayed in another image display area of the display unit 400.

  Here, the width in the X direction and the movement distance in the X direction of each bright portion of the striped measurement light in the simple measurement mode are the width in the X direction and the movement in the X direction of each bright portion of the striped measurement light in the normal measurement mode. Each is set larger than the distance. Therefore, the main stereoscopic shape data in the simple measurement mode is smaller than the main stereoscopic shape data in the normal measurement mode.

  In the ultra-simple measurement mode, the main three-dimensional shape data is generated as a preview image by irradiating the measurement object S with the code-like measurement light. Based on the generated preview image data, a three-dimensional preview image of the measuring object S is displayed in still another image display area of the display unit 400. The main stereoscopic shape data in the ultra simple measurement mode is smaller than the main stereoscopic shape data in the simple measurement mode.

  The sizes of the measurement difficulty regions estimated in the plurality of accuracy modes are substantially equal to each other. However, the measurement time required for the shape measurement process estimated in a plurality of accuracy modes and the accuracy of the generated main stereoscopic shape data are significantly different from each other. Therefore, the user can select an appropriate accuracy mode from among a plurality of accuracy modes by looking at the measurement time and accuracy displayed on the display unit 400.

(7) Other Display of Difficult-to-Measure Area Hereinafter, an area that is not the difficult-to-measure area is called a measurable area. In the above embodiment, the plurality of preview images are displayed on the display unit 400 so that the estimated measurement difficulty region can be identified, but the present invention is not limited to this. The degree of the area of the region may be calculated as measurement information related to the estimated measurement difficulty region and the measurable region, and a table describing the calculated measurement information may be displayed on the display unit 400. FIG. 39 is a diagram illustrating a table in which measurement information related to the measurement difficulty region and the measurable region is described.

  As shown in FIG. 39, in the first to third rows of Table T, the ratios of the first to third measurement difficulty regions occupying the entire region of the preview image are respectively displayed numerically and visually displayed by a bar. Is displayed. In the fourth row of Table T, the ratio of the measurable area to the entire area of the preview image is displayed numerically and visually displayed by a bar. Thereby, the user can easily recognize the measurement information of the measurement difficulty region and the measurable region. As a result, the user can easily select appropriate measurement conditions based on the measurement information of the measurement difficulty region and the measurable region.

  Further, the user can set an ROI (region of interest) in an image displayed on the display unit 400 using the operation unit 250. As a result, the preview image in which the ROI is set is displayed on the display unit 400. FIG. 40 is a diagram illustrating an example of display on the display unit 400 in which the ROI is set. As shown in FIG. 40, a measurement position designation frame MF indicating a measurement position as an ROI is displayed on the preview images in the image display areas 450a to 450d. When the ROI is set, regarding the preview image portion included in the measurement position designation frame MF, brightness adjustment, estimation of the measurement difficulty region, highlighting of the estimated measurement difficulty region, or the table of FIG. T may be displayed.

  In this case, the user can recognize the measurement information of the estimated measurement difficulty region and the measurable region in an arbitrary range on the preview image of the measurement object S. Accordingly, the user can easily select an appropriate measurement condition based on the measurement information of the measurement difficulty region and the measurable region at the measurement position.

(8) Estimation of measurement difficulty region based on main stereoscopic shape data In the above embodiment, measurement corresponding to each measurement mode based on image data without actually generating main stereoscopic shape data by the triangulation method. Although a difficult area is estimated, it is not limited to this. The measurement difficulty region corresponding to each measurement mode may be estimated based on the main stereoscopic shape data by estimating the difficult measurement region based on the image data and actually generating the main stereoscopic shape data by the triangulation method. In this case, the measurement difficulty region can be estimated more reliably.

  In the estimation of the difficult measurement area based on the main stereoscopic shape data, a plurality of main stereoscopic shape data by a triangulation method is generated as preview image data under a plurality of measurement conditions. Here, in the estimation of the measurement difficulty region based on the image data, the region that is estimated as the first measurement difficulty region and for which the main stereoscopic shape data indicating the height of the measurement object S has not been generated is the 1 is estimated to be a difficult measurement area. In the estimation of the measurement difficulty region based on the image data, the region that is estimated as the second measurement difficulty region and the generated change in the main stereoscopic shape data is regarded as the change in the main stereoscopic shape data obtained when the indirect light is generated is the main solid. It is estimated as the second measurement difficulty region based on the shape data. In the estimation of the difficult measurement region based on the image data, the region that is estimated as the third measurement difficult region and that the generated change in the main stereoscopic shape data is regarded as the change in the main stereoscopic shape data obtained when the received light signal is saturated is the main solid. It is estimated as the third measurement difficulty region based on the shape data.

  The time required for estimating the measurement difficulty region based on the main stereoscopic shape data under each measurement condition and the time required for the shape measurement process under each measurement condition have a correlation. Therefore, the measurement time required when executing the shape measurement process under each measurement condition is estimated based on the time required for estimating the measurement difficulty region based on the main stereoscopic shape data under each measurement condition.

  A preview image based on the generated plurality of main stereoscopic shape data is displayed on the display unit 400 so that the measurement difficulty region estimated under the corresponding plurality of measurement conditions can be identified. Further, the measurement time estimated when the shape measurement process of the measurement object S is executed under a plurality of measurement conditions is displayed on the display unit 400 so as to correspond to the plurality of preview images.

  The resolution of the main stereoscopic shape data in the estimation of the difficult measurement region may be lower than the resolution of the main stereoscopic shape data in the shape measurement process. Therefore, the main stereoscopic shape data in the estimation of the difficult measurement region is set to have a lower accuracy or a smaller data amount than the main stereoscopic shape data in the shape measurement process. Thereby, the main stereoscopic shape data in the estimation of the difficult measurement region can be generated at a higher speed than the main stereoscopic shape data in the shape measurement process.

  As an example of generation of the main stereoscopic shape data in the estimation of the difficult measurement area, for example, the measurement light S is irradiated with the code-shaped measurement light. Main three-dimensional shape data is generated based on the light reception signal output by the light receiving unit 120 when the code-like light is irradiated. On the other hand, in the shape measurement process, the main three-dimensional shape data under the selected measurement conditions is generated by irradiating the measuring object S with the striped measurement light and the code-like measurement light.

  In this case, the accuracy of the main stereoscopic shape data in the estimation of the difficult measurement region can be made lower than the accuracy of the main stereoscopic shape data in the shape measurement process. Thereby, in the estimation of the difficult measurement area, the number of pattern image acquisitions necessary for generating the main stereoscopic shape data is reduced, and the processing time of the CPU 210 is shortened, so the main stereoscopic shape data is generated at high speed. be able to.

  In order to generate image data or main 3D shape data in estimation of difficult measurement area faster than main 3D shape data in shape measurement processing, estimation of difficult measurement area and shape measurement processing may be performed by the following method. Good.

  As an example of estimation of the measurement difficulty region, in the estimation of the measurement difficulty region, image data or main stereoscopic shape data is generated by irradiating the measurement object S with the measurement light from one light projecting unit 110A. A measurement difficulty region under each measurement condition is estimated based on the generated image data or main stereoscopic shape data. On the other hand, in the shape measurement process, main stereoscopic shape data is generated by sequentially irradiating the measurement object S with the measurement light from both the light projecting units 110A and 110B.

  In this case, in the estimation of the difficult measurement area, the measurement object S is irradiated with the measurement light S only from one of the light projecting units 110A, so that the accuracy of the image data or the main stereoscopic shape data in the estimation of the difficult measurement area is measured. It can be made lower than the accuracy of the main stereoscopic shape data in the processing. Thereby, in the estimation of the difficult measurement area, the number of generations of the image data or the main stereoscopic shape data is reduced, and the processing time of the CPU 210 is shortened. Therefore, the image data or the main stereoscopic shape data can be generated at high speed. it can. As a result, the measurement difficulty region can be estimated in a short time.

  As another example of estimation of the difficult measurement region, in the estimation of the difficult measurement region, pixel data in the Y direction corresponding to the light reception signal from the light receiving unit 120 is thinned out. As a result, the frame rate of the light receiving unit 120 can be increased, and the transfer rate of pixel data from the control board 150 to the CPU 210 can be improved. The pixel data after the thinning is extended in the Y direction, and image data or main stereoscopic shape data under each measurement condition is generated based on the extended pixel data. A measurement difficulty region under each measurement condition is estimated based on the generated image data or main stereoscopic shape data.

  On the other hand, in the shape measurement process, the main stereoscopic shape data under the measurement conditions selected based on the pixel data is generated without thinning out the pixel data corresponding to the light reception signal from the light receiving unit 120. .

  In this case, in estimating the measurement difficulty region, the frame rate of the light receiving unit 120 increases and the transfer rate of pixel data from the control board 150 to the CPU 210 is improved, so that the processing time of the CPU 210 is shortened. In addition, image data or main stereoscopic shape data can be generated at high speed.

  Further, in this example, since the measurement light has a linear cross section parallel to the Y direction, even when the pixel data is thinned in the Y direction and then extended in the Y direction, the accuracy of the pixel data is Almost no change. Therefore, image data or main stereoscopic shape data can be generated in a short time with almost no decrease in accuracy. As a result, the measurement difficulty region can be estimated in a short time.

(9) Measurement Condition Selection Procedure (a) Overall Procedure FIGS. 41 and 42 are flowcharts showing the measurement condition selection procedure. The procedure for selecting the measurement conditions is performed after the preparation of the shape measurement process of FIG. 23 and before the shape measurement process of FIGS. Hereinafter, the procedure for selecting the measurement conditions will be described with reference to FIGS. 1, 2, 41, and 42.

  The CPU 210 determines whether or not the user has instructed the setting of the ROI (step S61). The user can instruct the setting of the ROI after preparation for the shape measurement process of FIG. Alternatively, the user can complete the preparation for the shape measurement process after the first adjustment in step S3 in the preparation for the shape measurement process is completed, and instruct the setting of the ROI.

  If the setting of ROI is not instructed in step S61, the CPU 210 proceeds to the process of step S63. On the other hand, when the setting of the ROI is instructed, the CPU 210 sets the ROI based on the user's instruction (step S62).

  Next, the CPU 210 determines whether or not the user has instructed to display a preview image under the first measurement condition (step S63). In this example, the first measurement condition is, for example, a measurement mode.

  If the display of the preview image under the first measurement condition is not instructed in step S63, the CPU 210 waits until the display of the preview image under the first measurement condition is instructed. On the other hand, when the display of the preview image under the first measurement condition is instructed in step S63, the CPU 210 displays a plurality of preview images on the display unit 400 so that the measurement difficult area under the first measurement condition can be identified ( Step S64). When one of the plurality of preview images displayed on the display unit 400 is selected by the user, one corresponding measurement mode is determined.

  Subsequently, the CPU 210 determines whether or not the user has instructed display of the preview image under the second measurement condition (step S65). In this example, the second measurement condition is, for example, the posture of the measurement object S. The second measurement condition may be the position of the measurement object S, for example.

  If the display of the preview image under the second measurement condition is not instructed in step S65, the CPU 210 proceeds to the process of step S67. On the other hand, when the display of the preview image under the second measurement condition is instructed in step S65, the CPU 210 displays a plurality of preview images on the display unit 400 so as to identify the measurement difficulty region under the second measurement condition ( Step S66). When one of the plurality of preview images displayed on the display unit 400 is selected by the user, one posture of the corresponding measurement object S is determined.

  Thereafter, the CPU 210 determines whether or not the user has instructed display of the preview image under the third measurement condition (step S67). In this example, the third measurement condition is, for example, the irradiation direction of the measurement light.

  If the display of the preview image under the third measurement condition is not instructed in step S67, the CPU 210 ends the measurement condition selection procedure. On the other hand, when the display of the preview image under the third measurement condition is instructed in step S65, the CPU 210 displays a plurality of preview images on the display unit 400 so that the measurement difficult area under the third measurement condition can be identified ( Step S68).

  When one of the plurality of preview images displayed on the display unit 400 is selected by the user, one irradiation direction of the corresponding measurement light is determined. Thus, the procedure for selecting the measurement conditions is completed. Thereafter, the shape measurement process of FIGS. 30 to 32 is executed according to the selected condition.

  As described above, the user can recognize a plurality of measurement conditions in which at least one of the type, position, and area of the measurement difficulty region generated in the shape measurement process is different before the shape measurement process. Accordingly, the user is suitable for shape measurement among a plurality of measurement conditions in which at least one of the type, position, and area of the measurement difficult region generated in the shape measurement is different before the shape measurement processing of the measurement object S. Measurement conditions can be easily and appropriately selected.

(B) Display of Preview Image under First Measurement Condition FIG. 43 is a flowchart showing details of display of a preview image under the first measurement condition included in the measurement condition selection procedure. Hereinafter, details of the display of the preview image under the first measurement condition will be described with reference to FIGS. 1, 2, and 43.

  First, the CPU 210 sets one measurement mode (step S71). In this example, the standard mode is set as the initial measurement mode. Next, the CPU 210 adjusts the brightness of the measurement light (step S72).

  Subsequently, the CPU 210 irradiates the measurement object S with the measurement light from the light projecting unit 110 (step S73). Here, in step S74 to be described later, when the measurement difficulty region is estimated based on the image data, the measurement object S is irradiated with the measurement light for generating the image data. On the other hand, when the measurement difficulty region based on the main stereoscopic shape data is estimated, measurement light for generating image data and measurement light for generating main stereoscopic shape data (for example, code-shaped measurement light) are measured. The object S is sequentially irradiated.

  Thereafter, the CPU 210 estimates a measurement difficulty region based on the image data or the main stereoscopic shape data (step S74). In this example, the CPU 210 estimates a difficult measurement area based on image data. In addition, the CPU 210 generates preview image data for displaying a preview image on the display unit 400 by irradiating the measurement object S with measurement light having a uniform pattern (step S75).

  Next, the CPU 210 determines whether or not measurement difficulty conditions in all measurement modes have been estimated (step S76). In step S76, when the measurement difficulty conditions in all the measurement modes are not estimated, the CPU 210 changes the measurement mode (step S77).

  In this example, when the measurement difficult region in the standard mode is estimated, the measurement mode is changed to the fine mode. When the measurement difficult region in the standard mode and the fine mode is estimated, the measurement mode is changed to the halation removal mode. When the measurement difficult region in the standard mode, the fine mode, and the halation removal mode is estimated, the measurement mode is changed to the super fine mode.

  Thereafter, the CPU 210 returns to the process of step S72. The processes in steps S72 to S76 are repeated until the measurement difficulty conditions in all measurement modes are estimated. Thereby, the brightness of the preview images in the plurality of measurement modes becomes substantially equal to each other.

  When the measurement difficulty conditions in all the measurement modes are estimated in step S76, the CPU 210 can identify the measurement difficulty areas estimated in the plurality of corresponding measurement modes from the plurality of preview images. Are displayed in the respective image display areas 450a to 450d (step S78).

  Here, the CPU 210 displays the measurement time estimated in the case of executing the shape measurement process of the measurement object S in the plurality of measurement modes on the display unit 400 so as to correspond to the plurality of preview images. Further, the CPU 210 may display the table T on which the measurement information of FIG. 39 corresponding to a plurality of measurement modes is described on the display unit 400.

  The user views a plurality of preview images and measurement times displayed in the image display areas 450a to 450d, and selects a preview image corresponding to an appropriate measurement mode. CPU 210 determines the measurement mode based on the preview image selected by the user (step S79). Thereby, the display of the preview image under the first measurement condition is terminated.

  In step S78, the CPU 210 may determine a recommended measurement mode and display a preview image corresponding to the measurement mode in an identifiable manner. In this case, the user can select an appropriate measurement mode from a plurality of measurement modes while considering the recommended measurement mode.

  The recommended measurement mode may be determined based on the size of the measurable area, or may be determined based on the size of the measurable area included in the ROI when the ROI is set. Alternatively, the recommended measurement mode may be appropriately determined based on the balance between the size of the measurable area and the short measurement time.

(C) Display of Preview Image under Second Measurement Condition FIG. 44 is a flowchart showing details of display of a preview image under the second measurement condition included in the measurement condition selection procedure. Hereinafter, details of the display of the preview image under the second measurement condition will be described with reference to FIGS. 1, 2, and 44.

  First, the CPU 210 sets one posture of the measurement object S (step S81). In this example, the first posture is set as the initial posture. Next, the CPU 210 adjusts the brightness of the measurement light (step S82).

  Subsequently, the CPU 210 irradiates the measurement object S with the measurement light from the light projecting unit 110 (step S83). Here, in step S84 to be described later, when the measurement difficulty region is estimated based on the image data, the measurement object S is irradiated with the measurement light for generating the image data. On the other hand, when the measurement difficulty region based on the main stereoscopic shape data is estimated, measurement light for generating image data and measurement light for generating main stereoscopic shape data (for example, code-shaped measurement light) are measured. The object S is sequentially irradiated.

  Thereafter, the CPU 210 estimates a measurement difficulty region based on the image data or the main stereoscopic shape data (step S84). In this example, the CPU 210 estimates a difficult measurement area based on image data. Further, the CPU 210 generates preview image data for displaying a preview image on the display unit 400 by irradiating the measurement object S with measurement light having a uniform pattern (step S85).

  Next, the CPU 210 determines whether or not the measurement difficulty conditions in all postures have been estimated (step S86). In step S86, when the measurement difficulty conditions in all postures are not estimated, the CPU 210 changes the posture of the measuring object S (step S87). The posture of the measuring object S is performed, for example, when the θ stage 143 rotates.

  In this example, when the measurement difficulty region in the first posture is estimated, the posture of the measuring object S is changed to the second posture. When the measurement difficulty region in the first and second postures is estimated, the posture of the measurement object S is changed to the third posture. When the measurement difficulty region in the first to third postures is estimated, the posture of the measurement object S is changed to the fourth posture.

  Thereafter, the CPU 210 returns to the process of step S82. The processes in steps S82 to S86 are repeated until the measurement difficulty conditions in all postures are estimated. As a result, the brightness of the preview images in the first to fourth postures becomes substantially equal to each other.

  When the measurement difficulty conditions in all postures are estimated in step S86, the CPU 210 can identify the measurement difficulty regions estimated in the corresponding plurality of postures from the plurality of preview images. Each of the display areas 450a to 450d is displayed (step S88). Here, the CPU 210 may display the table T on which the measurement information of FIG. 39 corresponding to the plurality of postures of the measurement object S is described on the display unit 400.

  The user views a plurality of preview images displayed in the image display areas 450a to 450d and selects a preview image corresponding to an appropriate posture of the measurement object S. The CPU 210 determines the posture of the measurement object S based on the preview image selected by the user (step S89). Thereby, the display of the preview image under the second measurement condition is terminated.

  In step S88, the CPU 210 may determine the recommended posture of the measuring object S and display a preview image corresponding to the posture of the measuring object S so as to be identifiable. In this case, the user can select an appropriate posture from a plurality of postures while considering the recommended posture of the measuring object S.

(D) Display of Preview Image under Third Measurement Condition FIG. 45 is a flowchart showing details of display of a preview image under the third measurement condition included in the measurement condition selection procedure. Hereinafter, details of the display of the preview image under the third measurement condition will be described with reference to FIGS. 1, 2, and 45.

  First, the CPU 210 sets one irradiation direction of the measurement light (step S91). In this example, the first irradiation direction is set as the irradiation direction of the initial measurement light. Next, the CPU 210 adjusts the brightness of the measurement light (step S92).

  Subsequently, the CPU 210 sequentially irradiates the measurement object S with the measurement light from both the light projecting units 110A and 110B (step S93). Here, in step S94, which will be described later, when the measurement difficulty region is estimated based on the image data, the measurement object S is irradiated with the measurement light for generating the image data. On the other hand, when the measurement difficulty region based on the main stereoscopic shape data is estimated, measurement light for generating image data and measurement light for generating main stereoscopic shape data (for example, code-shaped measurement light) are measured. The object S is sequentially irradiated.

  Thereafter, the CPU 210 estimates a measurement difficulty region based on the image data or the main stereoscopic shape data (step S94). In this example, the CPU 210 estimates a difficult measurement area based on image data. In addition, the CPU 210 generates preview image data for displaying a preview image on the display unit 400 by irradiating the measurement object S with measurement light having a uniform pattern (step S95).

  Next, the CPU 210 determines whether or not measurement difficulty conditions in all irradiation directions have been estimated (step S96). In step S96, when the measurement difficulty conditions in all the irradiation directions are not estimated, the CPU 210 changes the irradiation direction of the measuring object S (step S97).

  In this example, when the measurement difficulty region in the first irradiation direction is estimated, the irradiation direction is changed to the second irradiation direction. When the measurement difficulty region in the first and second irradiation directions is estimated, the irradiation direction is changed to the third irradiation direction.

  Thereafter, the CPU 210 returns to the process of step S92. The processes in steps S92 to S96 are repeated until the measurement difficulty conditions in all irradiation directions are estimated. As a result, the brightness of the preview images in the first to third irradiation directions becomes substantially equal to each other. When the irradiation direction is changed to the second irradiation direction in step S97, the measuring object S is irradiated with the measurement object S from one light projecting unit 110A in step S93. If the irradiation direction is changed to the third irradiation direction in step S97, the measurement light S is irradiated from the other light projecting unit 110B to the measurement object S in step S93.

  In step S96, when the measurement difficulty conditions in all the irradiation directions are estimated, the CPU 210 can identify the measurement difficulty regions estimated in the corresponding plurality of irradiation directions from the plurality of preview images. Are displayed in the respective image display areas 450a to 450c (step S98). Here, the CPU 210 may display the table T on which the measurement information of FIG. 39 corresponding to a plurality of irradiation directions of the measurement light is described on the display unit 400.

  The user views a plurality of preview images displayed in the image display areas 450a to 450c and selects a preview image corresponding to an appropriate irradiation direction. CPU 210 determines the irradiation direction based on the preview image selected by the user (step S99). Thereby, the display of the preview image under the third measurement condition is terminated.

  In step S98, the CPU 210 may determine a recommended irradiation direction and display a preview image corresponding to the irradiation direction in an identifiable manner. In this case, the user can select an appropriate irradiation direction from a plurality of irradiation directions while considering the recommended irradiation direction.

(10) Effect In shape measuring apparatus 500 according to the present embodiment, measurement that occurs in shape measuring processing executed under a plurality of different measurement conditions based on image data or main stereoscopic shape data before shape measuring processing. The measurement difficulty regions of the object S are estimated by the PC 200, respectively. Further, a plurality of preview images of the measuring object S respectively corresponding to the plurality of measurement conditions are displayed on the display unit 400 so that the measurement difficulty regions estimated corresponding to the plurality of measurement conditions can be recognized.

  Here, when the measurement difficulty region of the measuring object S is estimated based on the image data, a plurality of two-dimensional preview images are displayed on the display unit 400 so that the measurement difficulty region can be identified. When the measurement difficulty region of the measuring object S is estimated based on the main stereoscopic shape data, a plurality of three-dimensional preview images are displayed on the display unit 400 so that the measurement difficulty region can be identified. The measurement difficulty region is estimated in a shorter time than when the shape of the measurement object S is measured.

  The user can select one of a plurality of measurement conditions based on a plurality of preview images displayed on the display unit 400. The shape measurement process is executed under the measurement conditions selected by the user. According to this configuration, the user can perform measurement that occurs in the shape measurement process executed under a plurality of different measurement conditions in a short time based on the two-dimensional or three-dimensional preview images before the shape measurement process. The measurement difficulty region of the object S can be recognized. Thereby, the measurement conditions of the measuring object S can be easily and appropriately selected before the shape measuring process of the measuring object S.

  Further, based on the estimation time required for estimating the measurement difficulty region corresponding to the plurality of measurement modes, the measurement time required for the shape measurement process in the plurality of measurement modes is estimated. The estimated measurement time is displayed on the display unit 400. Thereby, the user can recognize the measurement time required for the shape measurement process in a plurality of measurement modes. As a result, the user can easily and appropriately determine the measurement mode of the measurement object S by determining the balance between the size of the measurement difficulty region and the short measurement time before the shape measurement process of the measurement object S. You can choose.

[7] Correspondence relationship between each constituent element of claim and each part of embodiment The following describes an example of the correspondence between each constituent element of the claim and each part of the embodiment. It is not limited.

  The measurement object S is an example of a measurement object, the stage 140 is an example of a stage, the light projecting unit 110 is an example of a light projecting unit, and the light projecting unit 110A is an example of a first light projecting unit. The light projecting unit 110B is an example of a second light projecting unit, and the light receiving unit 120 is an example of a light receiving unit. The CPU 210 is an example of a data generation unit, a control unit, and a processing device, the display unit 400 is an example of a display unit, the operation unit 250 is an example of an operation unit, and the shape measuring device 500 is an example of a shape measuring device. The stage driving unit 146 is an example of the changing unit.

  As each constituent element in the claims, various other elements having configurations or functions described in the claims can be used.

  The present invention can be effectively used for various shape measuring apparatuses, shape measuring methods, and shape measuring programs.

DESCRIPTION OF SYMBOLS 100 Measurement part 110,110A, 110B Light projection part 111 Measurement light source 112 Pattern generation part 113-115,122,123 Lens 120 Light reception part 121,121A, 121B Camera 121a Image pick-up element 124 Half mirror 130 Illumination light output part 140 Stage 141 X -Y stage 142 Z stage 143 θ stage 144 Tilt stage 145 Stage operation unit 146 Stage drive unit 150 Control board 200 PC
210 CPU
220 ROM
230 Working memory 240 Storage device 250 Operation unit 300 Control unit 310 Control board 320 Illumination light source 400 Display unit 410, 420, 450, 450a to 450d Image display area 430, 440 Light quantity setting bar 430s, 440s, 472s Slider 460 Measurement condition display Area 461a to 461d, 463a to 463c, 465a to 465d, 484a to 484c Check box 462a to 462d, 464 Measurement time display field 466 Update button 467 OK button 470, 480 Setting change area 471 Brightness selection field 472 Brightness setting bar 473 Display switching field 474 Magnification switching field 475 Magnification selection field 476 Focus adjustment field 480A Microscope mode selection tab 480B Shape measurement mode selection tab 481 Tool selection field 481a Measurement tool display field 48 1b Auxiliary tool display field 482 Shooting button 483 Measurement button 484 Texture image selection field 500 Shape measuring device MF Measurement position designation frame S Measurement object Sh Hole Ss Shadow Sw, Sy, Sz Plate member Sx Square column member T Table

Claims (20)

A stage on which the measurement object is placed;
A light projecting unit configured to irradiate light on the measurement object placed on the stage obliquely from above;
A light receiving unit arranged above the stage, configured to receive light reflected by the measurement object and output a light reception signal indicating the amount of light received;
Based on the light reception signal output by the light receiving unit, image data for displaying an image of the measurement object is generated, and three-dimensional shape data indicating the three-dimensional shape of the measurement object is generated by a triangulation method. A data generator configured in
A display unit configured to display an image of the measurement object based on the image data or the three-dimensional shape data generated by the data generation unit;
Controlling the light projecting unit, the light receiving unit, and the data generating unit so that a plurality of image data or a plurality of three-dimensional shape data are generated under a plurality of different measurement conditions when the measurement condition is selected , and the data generating unit based on the plurality of image data or three-dimensional shape data generated by the measurement difficulty region of the measuring object occurring in the shape measurement to be performed by the plurality of measurement conditions were estimated respectively, corresponding to the plurality of measurement conditions A control unit that controls the display unit so as to display a plurality of images of the measurement object respectively corresponding to the plurality of measurement conditions, so that the measurement difficult region estimated in the above can be recognized.
During the measurement condition selection, and an operation unit operated by a user to select one of said plurality of measurement conditions on the basis of the displayed plurality of images on the display unit,
In the plurality of measurement conditions, at least one of the pattern of light irradiated by the light projecting unit and the direction of light irradiated by the light projecting unit is different,
The control unit controls the light projecting unit, the light receiving unit, and the data generating unit so that three-dimensional shape data is generated under measurement conditions selected by operating the operation unit during shape measurement. . The control unit is configured so that the time required to generate image data or three-dimensional shape data corresponding to each measurement condition at the time of measurement condition selection and to estimate the measurement difficult region is shorter than the measurement time required for shape measurement at the time of shape measurement. The shape measuring apparatus according to claim 1, wherein the shape measuring device controls the light projecting unit, the light receiving unit, and the data generating unit. 3. The measurement difficulty region includes at least one of a region where a shadow occurs in the measurement object, a region where light sneaking or multiple reflection occurs, and a region where high intensity light reflection occurs. Shape measuring device. The control unit displays, as the measurement difficult region, a data missing portion in each image data or each three-dimensional shape data, or a data inaccurate portion estimated to be inaccurate based on the light reception signal. The shape measuring apparatus according to claim 1, wherein the display unit is controlled as described above. The shape measuring apparatus according to any one of claims 1 to 4 , wherein the control unit controls the display unit to display a measurement time required for shape measurement under the plurality of measurement conditions. The shape measurement apparatus according to claim 1, wherein the plurality of measurement conditions include a plurality of measurement conditions that differ in at least one of a type, a position, and an area of a measurement difficulty region that occurs in shape measurement. The plurality of measurement conditions include a light pattern irradiated by the light projecting unit, a number of times of light irradiation by the light projecting unit, an exposure time of the light receiving unit, and a light irradiated on the measurement object by the light projecting unit. The shape measurement apparatus according to claim 6 , comprising a plurality of measurement modes in which at least one of intensity and a method of generating solid shape data by the data processing unit is different. The shape measuring apparatus according to claim 6 or 7 , wherein the plurality of measurement conditions include a plurality of postures or positions of different measurement objects or a plurality of irradiation directions of different light. The control unit displays a plurality of images of the measurement object corresponding to the plurality of measurement conditions based on the image data generated by the data generation unit at the time of estimating the measurement difficulty region when the measurement condition is selected. In addition to controlling the display unit, the pattern of light irradiated by the light projecting unit, the number of times of light irradiation by the light projecting unit, the exposure time of the light receiving unit, and the measurement object is irradiated by the light projecting unit It is necessary to estimate the measurement difficulty region by estimating the measurement difficulty region of the measurement object under the plurality of measurement conditions in a plurality of states in which at least one of the light intensity and the image data generation method by the data processing unit is different. The pattern of light irradiated by the light projecting unit, the number of times of light irradiation by the light projecting unit, and the exposure of the light receiving unit so that the estimated time is shorter than the measurement time required for shape measurement During at least one of the method of generating the image data by the light projecting unit intensity and the data processing unit of the light irradiated to the measurement object, the set to be different from the time of shape measurement, claims 6 to shape measuring apparatus according to any one of 8. The control unit displays a plurality of images of the measurement object corresponding to the plurality of measurement conditions based on the solid shape data generated by the data generation unit when estimating the measurement difficulty region when the measurement condition is selected. In this way, the display unit is controlled, and the pattern of light irradiated by the light projecting unit, the number of times of light irradiation by the light projecting unit, the exposure time of the light receiving unit, and the measurement object is irradiated by the light projecting unit. The measurement difficulty region of the measurement object under the plurality of measurement conditions is estimated in each of a plurality of states in which at least one of the intensity of light and the method of generating the three-dimensional shape data by the data processing unit is different, and estimation of the measurement difficulty region The light pattern irradiated by the light projecting unit, the number of times of light irradiation by the light projecting unit, and the light reception so that the estimated time required for the measurement is shorter than the measurement time required for shape measurement At least one of the exposure time, the intensity of light applied to the measurement object by the light projecting unit, and the method of generating the three-dimensional shape data by the data processing unit is set to be different from that at the time of shape measurement. Item 9. The shape measuring device according to any one of Items 6 to 8 . A change unit configured to set the measurement object in a plurality of postures or positions by changing a direction of the measurement object with respect to the light projecting unit or a relative distance between the light receiving unit and the stage;
The control unit, when estimating the measurement difficulty region at the time of measurement condition selection, the measurement target region of the measurement object under the plurality of measurement conditions in a state where the measurement object is set in a plurality of postures or positions by the change unit, respectively The shape measuring device according to any one of claims 6 to 10 , wherein each of the parameters is estimated. The light projecting unit is configured to irradiate the measurement object with light in different directions from different positions,
The control unit is configured to measure the measurement object under the plurality of measurement conditions in a state where the measurement object is irradiated with light in one or a plurality of directions different from each other by the light projecting unit when estimating the measurement difficult region when the measurement condition is selected. The shape measuring device according to any one of claims 6 to 11 , wherein each of the measurement difficulty regions of the object is estimated. The light projecting unit includes first and second light projecting units that irradiate the measurement object in different directions from different positions,
The control unit is configured to cause the first and second light projections to irradiate the measurement object with one of the first and second light projection units when estimating the measurement difficulty region when the measurement condition is selected. And controlling the first and second light projecting units so that the measurement object is sequentially irradiated with light from both the first and second light projecting units during shape measurement. The shape measuring apparatus according to any one of 1 to 12 . The shape measuring device according to any one of claims 1 to 13 , wherein the control unit controls the light receiving unit so as to output a thinned light receiving signal when estimating a measurement difficult region when measuring conditions are selected. . The shape measuring device according to any one of claims 1 to 14 , wherein the control unit is configured to calculate a degree of an estimated area of the measurement difficulty region in the measurement object. The shape measuring apparatus according to claim 15 , wherein the control unit controls the display unit to display a calculation result of a degree of the area of the measurement difficulty region in the measurement object. The control unit selects a recommended measurement condition from the plurality of measurement conditions based on the calculation result of the extent of the measurement difficulty region in the measurement object, and the display unit is configured to display the selected measurement condition. The shape measuring apparatus according to claim 15 or 16 , which is controlled. The operation unit is operated by a user to specify an arbitrary range on the image of the measurement object displayed on the display unit,
The shape measuring device according to any one of claims 15 to 17 , wherein the control unit calculates a degree of an area of the estimated difficult measurement region in a range specified by the operation unit. During the measurement conditions selected, the light is irradiated obliquely from above the measuring object mounted on the stage by the light projecting unit with different measurement conditions, the light receiving portion of the light reflected by the measurement object above said stage received by the generated output a light reception signal indicating the amount of received light, based on the output received signal by the light receiving unit, for displaying the image of the measuring object a plurality of image data or three-dimensional shape data, respectively And steps to
During the measurement conditions selected, the steps based on the generated plurality of image data or three-dimensional shape data, estimates the measurement difficulty region of the measuring object occurring in the shape measurement to be performed by the plurality of measurement conditions, respectively,
During the measurement conditions selected, recognizable measurement difficulty region estimated to correspond to the plurality of measurement conditions, and displaying a plurality of images of the measuring object corresponding to the plurality of measurement conditions on a display unit,
Receiving a selection of any of the plurality of measurement conditions based on the plurality of images displayed on the display unit when the measurement condition is selected ;
At the time of shape measurement, the measurement object placed on the stage by the light projecting unit under the selected measurement condition is irradiated with light obliquely from above, and the light reflected by the measurement object is selected under the selected measurement condition. received by the light receiving portion above the stage, and outputs a light reception signal indicating the amount of received light, on the basis of the outputted light reception signal by the light receiving unit, and a step of generating a three-dimensional shape data in the selected measurement conditions,
Wherein in the plurality of measurement conditions, that Do different at least one direction of light emitted is the pattern and the light projecting unit of the light emitted by the light projecting unit, the shape measuring method. A shape measurement program executable by a processing device,
During the measurement conditions selected, the light is irradiated obliquely from above the measuring object mounted on the stage by the light projecting unit with different measurement conditions, the light receiving portion of the light reflected by the measurement object above said stage received by the generated output a light reception signal indicating the amount of received light, based on the output received signal by the light receiving unit, for displaying the image of the measuring object a plurality of image data or three-dimensional shape data, respectively Processing to
During the measurement conditions selected, the processing based on the generated plurality of image data or three-dimensional shape data, and estimates the plurality of measurement difficulty region of the measuring object occurring in the shape measurement performed by the measurement conditions, respectively,
A process of displaying a plurality of images of the measurement object respectively corresponding to the plurality of measurement conditions on the display unit so that the measurement difficulty region estimated corresponding to the plurality of measurement conditions can be recognized at the time of measurement condition selection ;
A process of accepting selection of any of the plurality of measurement conditions based on a plurality of images displayed on the display unit when selecting the measurement conditions;
At the time of shape measurement, the measurement object placed on the stage by the light projecting unit under the selected measurement condition is irradiated with light obliquely from above, and the light reflected by the measurement object is selected under the selected measurement condition. received by the light receiving portion above the stage, and outputs a light reception signal indicating the amount of received light, based on the output received signal by the light receiving unit, and a process of generating a three-dimensional shape data in the selected measurement conditions,
Causing the processing device to execute ,
Wherein in the plurality of measurement conditions, the at least one direction of light emitted by the pattern and the light projecting unit of the light emitted by the light projecting unit that Do different shape measurement program.

Images