JP2015096313A - Glass film laminate and method of producing liquid crystal panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a glass film laminate which prevents pour luminous points and occurrence of breakage while improving the handling ability of a glass film and a method of producing a liquid crystal panel.SOLUTION: A glass film laminate 1 is produced by laminating a glass film 10 on a support glass 12 serving as a support body 11 and has a chamfer part 15 on the outer peripheral edge of the glass film 10, only on the side of an effective surface 10b, or the surface on the side opposite to the contact surface 10a of the glass film 10 with the support glass 12.

Description

  The present invention relates to a technique for manufacturing a glass film laminate and a liquid crystal panel.

From the viewpoint of space saving, instead of the CRT type display that has been widely used in the past, in recent years, flat panel displays such as a liquid crystal display, a plasma display, and an organic EL display have become widespread.
In these flat panel displays, there is a need for further thinning.

In recent years, there is an increasing need for further thinning and high flexibility of substrates and cover glasses used in devices such as flat panel displays.
In order to impart flexibility to the glass substrate, it is effective to thin the glass substrate, and the following Patent Document 1 proposes a glass film having a thickness of 200 μm or less.

A glass substrate used for an electronic device such as a flat panel display or a solar cell is subjected to various manufacturing-related processes such as processing and cleaning.
However, if the glass substrate used in these electronic devices is thinned, the glass is a brittle material, which leads to breakage due to a slight change in stress, which makes handling extremely difficult when performing various electronic device manufacturing related processes described above. There is a problem that.
In addition, since a glass film having a thickness of 200 μm or less is rich in flexibility, it is difficult to perform positioning when performing processing, and there is a problem that displacement or the like occurs during patterning.

Moreover, in order to improve the handleability of the thinned glass film, in following patent document 1, the glass film laminated body which laminated | stacked the glass film on support glass is proposed.
According to this, even if a glass film having no strength or rigidity is used alone, the supporting glass has high rigidity, so that the entire glass film laminate can be easily positioned during processing.
Moreover, after completion | finish of a process, it is possible to peel from a support glass rapidly, without damaging a glass film.
If the thickness of the glass film laminate is the same as the thickness of a conventional glass substrate, an electronic device can be manufactured by sharing a conventional electronic device manufacturing line for a glass substrate.

JP 2011-183792 A

When using the glass film laminated body shown by patent document 1 as a board | substrate for liquid crystal panels, the rubbing process with respect to the polyimide alignment film apply | coated on the glass film exists. In the rubbing process, when the polyimide alignment film is rubbed with the rubbing roller in a certain direction, the rubbing roller is worn by contact with the edge portion of the glass film, and the fibers of the rubbed cloth are effective surfaces of the glass film. There is a problem that the liquid crystal panel causes light spot defect.
Therefore, it has been desired to prevent the occurrence of light spot defects by suppressing the abrasion of the rubbing roller when the glass film is rubbed.

Moreover, in the glass film laminated body shown by patent document 1, when it isolate | separates into a glass film and support glass, if there exists a fine unevenness | corrugation in the edge part of a glass film, a crack will arise from this unevenness | corrugation and it will be damaged. There is a problem of reaching. As the fine unevenness, when the glass film is cleaved along the scribe line, there is one generated in a scribe line forming part in the cleaved part.
Therefore, it has been desired to suppress the occurrence of breakage during the peeling of the glass film and improve the yield of the glass film.

  The present invention has been made in view of such a current problem, and is a glass film laminate and a liquid crystal capable of preventing the occurrence of defective light spots and breakage while improving the handleability of the glass film. It aims at providing the manufacturing method of a panel.

  The problem to be solved by the present invention is as described above. Next, means for solving the problem will be described.

  The invention according to claim 1 is a glass film laminate produced by laminating a glass film on a support, and is an effective surface that is a surface opposite to a contact surface side of the glass film with the support. Only on the side, a chamfered portion is provided on the outer peripheral edge of the glass film.

  The invention according to claim 2 is characterized in that the amount of chamfering in the chamfered portion is 50% or less of the thickness of the glass film.

  According to a third aspect of the present invention, the glass film is formed along with the scribe line, and a surface on the side where the scribe line is formed is selected as the effective surface. It is characterized by that.

  The invention according to claim 4 is characterized in that the support is support glass.

  In the invention according to claim 5, the glass film is directly laminated on the support glass, and the surface roughness Ra of each contact surface where the glass film and the support glass are in contact with each other is 2.0 nm or less. It is characterized by that.

  The invention according to claim 6 is a first step of laminating a glass film on a support to produce a glass film laminate, a second step of forming a liquid crystal alignment film on the surface of the glass film, Including a rubbing step of rubbing the surface of the liquid crystal alignment film in a certain direction with a rubbing roller, forming a liquid crystal element on the surface of the glass film in the glass film laminate, and producing a support-attached liquid crystal panel; And a fourth step of producing a liquid crystal panel by peeling the support from the liquid crystal panel with the support, wherein the glass film is formed before the second step. A chamfered portion is formed on the outer peripheral edge of the glass film only on the effective surface side that is the surface opposite to the contact surface side with the support.

  The invention according to claim 7 is characterized in that the amount of chamfering in the chamfered portion is 50% or less of the thickness of the glass film.

  In the invention according to claim 8, the glass film is formed with a scribe line and cleaved along the scribe line, and a surface on the side on which the scribe line is formed is selected as the effective surface. It is characterized by that.

  As effects of the present invention, the following effects can be obtained.

According to the invention which concerns on Claim 1, when using a glass film for the board | substrate for liquid crystal panels, abrasion of a rubbing roller can be suppressed.
Thereby, when producing a liquid crystal panel using a glass film laminated body, generation | occurrence | production of a light spot defect can be suppressed.

  According to the invention which concerns on Claim 2, when isolate | separating a glass film and a support body, it can prevent that a glass film breaks.

According to the invention which concerns on Claim 3, it can prevent that a chemical | medical solution etc. osmose | permeate the lower surface of a glass film.
Thereby, it can prevent that a glass film and a support body adhere locally by a chemical | medical solution, and can prevent the damage of the glass film at the time of peeling by extension.

  According to the invention which concerns on Claim 4, even if it heat-processes in the case of a manufacturing related process, it is easy to match | combine the thermal expansion coefficient of a glass film and support glass, and a glass film laminated body which is hard to produce a thermal warp, a crack, etc. It becomes possible to do.

  According to the invention which concerns on Claim 5, since a glass film and support glass contact on smooth surfaces, adhesiveness is good, and even if it does not use an adhesive agent, a glass film and support glass are firmly stabilized. Stacking is possible.

According to the invention which concerns on Claim 6, when using a glass film for the board | substrate for liquid crystal panels, abrasion of a rubbing roller can be suppressed.
Thereby, in the liquid crystal panel using a glass film, it can suppress that a light spot defect generate | occur | produces.

  According to the invention which concerns on Claim 7, when a glass film and support glass are isolate | separated, it can prevent that a glass film breaks.

According to the invention which concerns on Claim 8, it can prevent that a chemical | medical solution etc. osmose | permeate the lower surface of a glass film.
Thereby, it can prevent that a glass film and support glass adhere locally by a chemical | medical solution, and can prevent the damage of the glass film at the time of peeling by extension.

The perspective schematic diagram which shows the preparation conditions of a glass film laminated body. The side view cross-sectional schematic diagram which shows the preparation methods (overflow downdraw method) of a glass film. The schematic diagram for demonstrating the joining mechanism of a glass film and support glass, (a) The figure which shows the condition of the hydrogen bond between hydroxyl groups, (b) The figure which shows the condition of the hydrogen bond which interposes a water molecule. The schematic diagram which shows another embodiment of a glass film laminated body. The side view schematic diagram which shows the glass film laminated body which concerns on one Embodiment of this invention, (a) When a chamfering part is C chamfering, (b) When a chamfering part is R chamfering, (c) Chamfering amount is 50% or less in the case of. Side view schematic diagram showing the glass film laminate, (a) When the surface on the scribe side is a contact surface, (b) When a chamfer is provided on the contact surface side, (c) The chamfering amount exceeds 50% If yes. The side view schematic diagram which shows the manufacturing method of the liquid crystal panel which concerns on one Embodiment of this invention. The side view schematic diagram which shows a liquid crystal panel with support glass. The figure which shows the experimental result which compared the generation | occurrence | production number of the malfunction by the difference in the formation condition of a chamfer part.

  Hereinafter, preferred embodiments of a glass film laminate according to the present invention will be described with reference to the drawings.

  The glass film laminated body 1 which concerns on one Embodiment of this invention is produced by laminating | stacking the glass film 10 and the support body 11, as shown in FIG.

The glass film 10 is made of silicate glass, preferably silica glass or borosilicate glass, and most preferably non-alkali glass.
If the glass film 10 contains an alkali component, cations are dropped on the surface, so-called soda blowing phenomenon occurs, and the structure becomes rough. In this case, if the glass film 10 is curved and used, there is a possibility that it will be damaged from a portion that has become rough due to deterioration over time.
The alkali-free glass referred to here is a glass that does not substantially contain an alkali component (alkali metal oxide), and specifically, a glass having an alkali component of 3000 ppm or less. .
The content of the alkali component of the alkali-free glass used in the present invention is preferably 1000 ppm or less, more preferably 500 ppm or less, and most preferably 300 ppm or less.

The thickness of the glass film 10 is preferably 300 μm or less, more preferably 5 to 200 μm, and most preferably 5 to 100 μm.
Thereby, the thickness of the glass film 10 can be made thinner and appropriate flexibility can be provided.
The glass film 10 having a thinner thickness is difficult to handle and is likely to cause problems such as mispositioning and bending during patterning. However, by using the support 11 described later, processing related to electronic device manufacturing can be performed. It can be done easily.
If the thickness of the glass film 10 is less than 5 μm, the strength of the glass film 10 tends to be insufficient, and the glass film 10 may be difficult to peel from the support 11.

  If the support body 11 can support the glass film 10, it will not specifically limit about the material, A synthetic resin board, a natural resin board, a wooden board, a metal plate, a glass plate, a ceramic board, a crystallized glass board etc. are used. can do. Further, the thickness of the support 11 is not particularly limited, and the thickness of the support 11 may be appropriately selected according to the rigidity of the material selected as the support. For the purpose of improving the handling of the glass film 10, a resin film such as a PET film may be used.

As shown in FIG. 1, a support glass 12 is preferably used for the support 11. Thereby, even if heat treatment is involved in the electronic device manufacturing related process, it is possible to make it difficult to cause thermal warp or cracking of the glass film 10 due to a difference in expansion coefficient, and the glass film laminate 1 is stably laminated. Can be maintained.
As the support glass 12, silicate glass, silica glass, borosilicate glass, alkali-free glass, or the like is used as in the glass film 10.
About the support glass 12, it is preferable to use the glass with the difference of the thermal expansion coefficient in 30-380 degreeC with the glass film 10 within 5 * 10 < ^-7 > / ^degreeC .
And it is most preferable to use the glass which has the same composition as the support glass 12 and the glass film 10 from a viewpoint of suppressing the difference in an expansion coefficient.
The thickness of the support glass 12 is preferably 400 μm or more. When the thickness of the supporting glass 12 is less than 400 μm, there is a possibility that a problem may occur in terms of strength when the supporting glass 12 is handled alone. The thickness of the support glass 12 is preferably 400 to 700 μm, and most preferably 500 to 700 μm.
As a result, the glass film 10 can be reliably supported by the support glass 12, and breakage of the glass film 10 that can occur when the glass film 10 is peeled from the support glass 12 can be effectively suppressed. It becomes.
When the glass film laminate 1 is placed on a setter (not shown) at the time of applying the liquid crystal alignment film, the thickness of the support glass 12 may be less than 400 μm (for example, 300 μm, the same thickness as the glass film 10). .

The glass film 10 and the support glass 12 used in the present embodiment are preferably formed by a down draw method, and more preferably formed by an overflow down draw method.
In particular, the overflow downdraw method shown in FIG. 2 is a molding method in which both surfaces of the glass plate do not come into contact with the molded member at the time of molding, and the both surfaces (translucent surface) of the obtained glass plate are hardly scratched and polished. Even if not, high surface quality can be obtained. Of course, the glass film 10 and the support glass 12 used in the present invention may be formed by a float method, a slot down draw method, a roll out method, an up draw method, a redraw method, or the like.
In the overflow down draw method shown in FIG. 2, the glass ribbon G immediately after flowing down from the lower end 21 of the wedge-shaped molded body 20 is drawn downward while the shrinkage in the width direction is restricted by the cooling roller 22. The thickness becomes thin. Next, the glass ribbon G that has reached the predetermined thickness is gradually cooled in a slow cooling furnace (annealer) (not shown), the thermal distortion of the glass ribbon G is removed, and the glass ribbon G is cut into a predetermined size, whereby the glass film 10 and Each of the support glasses 12 is formed.

  Hereinafter, an embodiment in which the support glass 12 is employed as the support 11 will be described. With respect to portions other than the specific explanation portion due to the material of the support glass 12, the support glass 12 can be appropriately read as the support 11.

As shown in FIG. 1, the glass film 10 has a contact surface 10a and an effective surface 10b.
The contact surface 10 a is a surface on the side facing and contacting the support glass 12 when the support glass 12 is laminated.
The effective surface 10b is a surface on the side opposite to the contact surface 10a, and is a surface on which manufacturing-related processing such as element formation is performed.
Further, although not shown here, a chamfered portion is formed on the peripheral edge of the glass film 10. The chamfered part will be described in detail later.

Further, as shown in FIG. 1, the support glass 12 is provided with a contact surface 12a and a transport surface 12b.
The contact surface 12 a is a surface on the side facing and contacting the glass film 10 when the glass film 10 is laminated.
Moreover, the conveyance surface 12b is a surface on the opposite side to the contact surface 12a, and is a surface in contact with the conveyance roller when the glass film laminate 1 is conveyed on the conveyance roller.

In FIG. 1, the glass film 10 having substantially the same area is laminated on the support glass 12, but the support glass 12 may be laminated so as to protrude from the glass film 10.
In this case, the amount of protrusion of the supporting glass 12 from the glass film 10 is preferably 0.5 to 10 mm, and more preferably 0.5 to 1 mm.
By reducing the amount of protrusion of the support glass 12, the area of the effective surface 10b of the glass film 10 can be secured more widely.
Moreover, in the glass film laminated body 1, it is preferable that the support glass 12 protrudes from the glass film 10 in all four sides.

  The step of laminating the glass film 10 on the support glass 12 may be performed under reduced pressure. Thereby, even if bubbles are generated during lamination, the bubbles increase in the subsequent decompression and vacuum processes, and as a result, problems such as glass breakage in the vacuum processes can be prevented.

The surface roughness Ra of the contact surface 10a of the glass film 10 and the contact surface 12a of the support glass 12 is preferably 2.0 nm or less. As a result, the glass film and the supporting glass are brought into contact with each other on a smooth surface, so that the adhesion is good, and the glass film and the supporting glass can be firmly and stably laminated without using an adhesive. .
In order to firmly laminate the glass film 10 and the support glass 12 without an adhesive, the surface roughness Ra of the contact surfaces 10a and 12a of the glass film 10 and the support glass 12 used in the present invention is 1 respectively. It is preferably 0.0 nm or less, more preferably 0.5 nm or less, and most preferably 0.2 nm or less.
In the present embodiment, the surface roughness Ra of the surfaces of the glass film 10 and the supporting glass 12 that are in contact with each other is set to 2.0 nm or less. In the first step, the surface roughness of the surfaces that are in contact with each other is set. A glass film laminate 1 is produced by laminating a glass film 10 and a supporting glass 12 each having a thickness Ra of 2.0 nm or less and firmly fixing the glass film 10 to the supporting glass 12.

When smoothing the surface roughness Ra of the contact surfaces 10a and 12a of the glass film 10 and the supporting glass 12 to be 2.0 nm or less, when these two smooth glass substrates are brought into close contact with each other, The glass film laminate 1 is fixed to such an extent that it can be peeled without an adhesive. This phenomenon is presumed to be due to the following mechanism.
As shown to Fig.3 (a), it is thought that it attracts by the hydrogen bond of the hydroxyl groups formed in the surface (contact surface 10a) of the glass film 10, and the surface (contact surface 12a) of the support glass 12. FIG. Alternatively, as shown in FIG. 3B, the glass film 10 and the supporting glass 12 are fixed to each other by forming hydrogen bonds through water molecules present at the interface 13 between the glass film 10 and the supporting glass 12. There are also thought to be.

  In the present embodiment, the glass film 10 is directly laminated on the support glass 12. However, as shown in FIG. 4, the resin film 14 is laminated between the glass film 10 and the support glass 12. May be. Since the glass film 10 is peeled last, it is preferable to use a slightly sticky resin layer 14. The resin layer 14 includes polyethylene, polyvinyl chloride, polyethylene terephthalate, polyvinylidene chloride, polypropylene, polyvinyl alcohol, polyester, polycarbonate, polystyrene, polyacrylonitrile, ethylene vinyl acetate copolymer, ethylene-vinyl alcohol copolymer, ethylene- A methacrylic acid copolymer, nylon, cellophane, silicone resin or the like can be used, and the resin layer 14 may use only a base material when the material itself has adhesiveness. Those having both sides coated with a pressure-sensitive adhesive may be used, or only the pressure-sensitive adhesive layer without a substrate may be used.

  On the other hand, the surface roughness of the effective surface 10b of the glass film 10 and the surface roughness of the conveying surface 12b of the support glass 12 are not particularly limited.

That is, in the glass film laminate 1 according to this embodiment, the support glass 12 is used as the support 11.
With such a configuration, it is easy to match the thermal expansion coefficients of the glass film 10 and the support glass 12, and even if heat treatment is performed during manufacturing-related processing, the glass film laminate 1 is less likely to cause thermal warping or cracking. It becomes possible.

Moreover, in the glass film laminated body 1 which concerns on this embodiment, the glass film 10 is directly laminated | stacked on the support glass 12, and the surface roughness of each contact surface 10a * 12a with which the glass film 10 and the support glass 12 contact mutually. Each Ra is 2.0 nm or less.
With such a configuration, the glass film 10 and the support glass 12 come in contact with each other on a smooth surface, so that the adhesion is good, and the glass film 10 and the support glass 12 can be firmly and stably maintained without using an adhesive. Stacking is possible.

Next, the formation situation of the chamfered part in the glass film laminated body 1 which concerns on one Embodiment of this invention is demonstrated using FIG. 5, FIG.
As shown in FIGS. 5 (a) and 5 (b), in the glass film laminate 1 according to this embodiment, in order to prevent the rubbing cloth from being worn, the edge portion (peripheral portion) of the glass film 10 that causes wear is provided. A chamfered portion 15 is formed.
The chamfered portion 15 is formed by chamfering the peripheral portion of the glass film 10 by a technique such as grinding. As a method for forming the chamfered portion 15, a mechanical chamfering method using a polishing grindstone, a grinding grindstone, a polishing tape, a chemical chamfering method using hydrofluoric acid, etc., heat generated by a burner, laser irradiation, or the like. Conventional chamfering methods can be used.

Further, the chamfered portion 15 may adopt a C chamfering mode (the chamfering angle is 45 degrees) as shown in FIG. 5A or an R chamfering mode as shown in FIG. 5B.
The chamfered portion 15 is not limited to the C chamfering and R chamfering modes, and various modes such as a combination of C chamfering and R chamfering and a mode in which the chamfering angle is other than 45 degrees can be adopted. .

  Further, the chamfered portion 15 in the glass film laminate 1 is formed only on the effective surface 10 b side of the glass film 10.

Furthermore, in the glass film laminated body 1 which concerns on this embodiment, as shown to Fig.5 (a) (b) (c), the scribe surface 16 side of the glass film 10 is selected as the effective surface 10b, and the scribe surface 16 side is selected. It is preferable to form the chamfered portion 15 at the peripheral edge portion of the rim.
In addition, the “scribe surface” referred to here is a surface on the side where the scribe line is formed in a glass film that is formed along a scribe line and is formed along a scribe line. Means.

FIG. 6A shows a glass film laminate 1 a in which a chamfered portion 15 is formed only on the effective surface 10 b side of the glass film 10 as a glass film laminate according to an embodiment of the present invention.
However, in the glass film laminate 1a, the scribe surface 16 side of the glass film 10 is selected as the contact surface 10a, and in this respect, the glass film laminate 1 shown in FIGS. 5 (a), (b), and (c) It is different.

In the glass film laminated body 1a, as shown to Fig.6 (a), a processing process, a washing process, etc. are performed with respect to the effective surface 10b to the scribe mark formed in the edge part of the scribe surface 16 in the glass film 10. FIG. When the chemical solution used at the time permeates, a permeation portion 17 for the chemical solution or the like is formed at the interface 13 between the glass film 10 and the support glass 12. Thus, when the penetration part 17 is formed in the interface 13 of the glass film 10 and the support glass 12, the glass film 10 and the support glass 12 are fixed by the chemical solution or the like of the penetration part 17, so that the glass film 10 is peeled off. At times, the glass film 10 may be damaged.
That is, in the glass film laminate 1a, it is possible to prevent the rubbing cloth from being worn by the chamfered portion 15, but the glass film 10 may be damaged when the glass film 10 is peeled off. For this reason, it can be said that the glass film laminated body 1 shown to Fig.5 (a) is a more preferable aspect rather than the glass film laminated body 1a.

That is, in the glass film laminate 1 according to the present embodiment, the glass film 10 is formed with a scribe line and is cleaved along the scribe line, which is a surface on the side on which the scribe line is formed. 16 is selected as the effective surface 10b.
According to such a structure, it can prevent that a chemical | medical solution etc. osmose | permeate the lower surface of the glass film 10. FIG. Thereby, it can prevent that the glass film 10 and the support body 11 adhere locally by a chemical | medical solution, and can prevent the damage of the glass film 10 at the time of peeling by extension.

Moreover, in FIG.6 (b), the glass film laminated body 1b which formed the chamfer 15 in the contact surface 10a side is illustrated.
In the glass film laminate 1b, a chemical solution or the like that is used when processing or cleaning is performed on the effective surface 10b in the chamfered portion 15 penetrates the interface 13 between the glass film 10 and the support glass 12 or the like. Is formed, and the glass film 10 and the supporting glass 12 are fixed in the permeation portion 17, so that the glass film 10 is more likely to be damaged when the glass film 10 is peeled off. . In the embodiment shown in FIG. 6B, the chamfered portion 15 cannot prevent the rubbing cloth from being worn.
For this reason, in the glass film laminated body 1 * 1a which concerns on this embodiment, the glass film laminated body 1b of the aspect which forms the chamfer 15 as shown in FIG.6 (b) in the contact surface 10a side, and the glass film 10 A mode in which the chamfered portions 15 and 15 are formed on both the contact surface 10a and the effective surface 10b is not included.

  That is, the glass film laminate 1 according to the present embodiment is produced by laminating the glass film 10 on the support 11, and is opposite to the contact surface 10 a side of the glass film 10 with the support 11. The chamfered portion 15 is provided on the outer peripheral edge of the glass film 10 only on the effective surface 10b side.

Furthermore, in the glass film laminated body 1 which concerns on this embodiment, the structure which makes the chamfering amount of the chamfering part 15 50% or less of the thickness of the glass film 10 is preferable.
As shown in FIG. 5C, in the glass film laminate 1, the chamfering amount H of the chamfered portion 15 is 50% or less of the thickness d of the glass film 10.

On the other hand, in the glass film laminate 1 c shown in FIG. 6C, the chamfered portion 15 is formed only on the effective surface 10 b side of the glass film 10 as in the glass film laminate 1.
Moreover, in the glass film laminated body 1c, like the glass film laminated body 1, the scribe surface 16 side of the glass film 10 is selected as the effective surface 10b.
However, in the glass film laminated body 1c, the chamfering amount H of the chamfered portion 15 exceeds 50% of the thickness d of the glass film 10, and is different from the glass film laminated body 1 in this respect.

  In this case, when the glass film 10 is peeled from the support glass 12, a part of the bending stress acting on the chamfered portion 15 acts in the tensile direction. Damage may occur starting from the above.

In the glass film laminate 1c having such a configuration, the chamfered portion 15 can prevent the rubbing cloth from being worn, but the glass film 10 may be damaged when the glass film 10 is peeled off.
For this reason, it can be said that the glass film laminated body 1 shown in FIG.5 (c) is a more preferable aspect rather than the glass film laminated body 1c.

In the glass film laminate 1, when the glass film 10 is peeled from the support glass 12, the bending stress acting on the chamfered portion 15 acts in the compression direction. It is possible to suppress the occurrence of breakage due to proper chipping or the like.
In addition, if the surface roughness of the chamfered portion 15 is small, the effect of reducing the wear of the rubbing cloth and the effect of preventing breakage due to chipping are enhanced. Therefore, it is preferable to reduce the surface roughness of the chamfered portion 15 as much as possible.

That is, in the glass film laminate 1 according to this embodiment, the chamfering amount H in the chamfered portion 15 is 50% or less (that is, H ≦ d / 2) of the thickness d of the glass film 10.
According to such a configuration, the glass film 10 can be prevented from being damaged when the glass film 10 and the support 11 are separated.

Next, the manufacturing method of the liquid crystal panel which concerns on one Embodiment of this invention is demonstrated using FIG. 7, FIG.
In the method for manufacturing the liquid crystal panel 3 according to this embodiment, the glass film laminate 1 is produced by laminating the glass film 10 and the support 11 in the first step, as shown in FIG. In addition, in this embodiment, the glass film laminated body 1 of the aspect by which the liquid crystal panel 3 was formed on the glass film 10 is called the liquid crystal panel 4 with support glass. In other words, the liquid crystal panel 3 (see FIG. 7) is obtained by peeling and removing the support glass 12 from the liquid crystal panel 4 with support glass.

  In the second step, the glass film laminate 1 is coated with a liquid crystal alignment film 31 made of a polyimide material on the glass film 10.

In the third step of the method for manufacturing the liquid crystal panel 3 according to this embodiment, as shown in FIG. 7, the liquid crystal alignment film 31 of the glass film 10 is fixed by the rubbing roller 5 when the liquid crystal panel 4 with supporting glass is manufactured. By rubbing in the direction, the liquid crystal molecules are aligned in a predetermined direction.
The rubbing roller 5 is a roll-shaped member comprising a regenerated cellulose fiber or the like and subjected to a conductive treatment on the roll surface. The rubbing roller 5 is configured to be rotatable around the roller axis and while rotating in a predetermined direction. The liquid crystal alignment film 31 can be rubbed in a certain direction.
The liquid crystal alignment film 31 is rubbed in a certain direction by the rubbing roller 5 so that the molecules of the polyimide material are aligned in the certain direction.
Thus, since the rubbing roller 5 has a roll surface made of regenerated cellulose fiber or the like, if the frictional force when rubbing the liquid crystal alignment film 31 is locally excessive at the edge portion of the glass film 10 or the like, It has the property that the fiber of the excessive part will be worn out and shredded.

  In the method for manufacturing the liquid crystal panel 3 according to the present embodiment, the chamfered portion 15 may be formed before the third step (that is, the rubbing step) is performed, and even before the first step. It may be performed between the first step and the second step. In other words, after forming the chamfered portion 15 in the state of the glass film 10, the glass film 10 having the chamfered portion 15 formed on the support glass 12 may be laminated by performing the first step. In this case, the chamfered portion 15 can be easily formed on the glass film 10. Moreover, after producing the glass film laminated body 1 after the first step, the chamfered portion 15 may be formed by chamfering only the glass film 10 laminated on the supporting glass 12. In this case, it is possible to prevent the glass powder generated during chamfering from causing bubbles at the time of lamination.

  Thus, by forming the chamfered portion 15 on the effective surface 10b side of the glass film 10, the frictional force generated between the rubbing roller 5 and the edge portion of the glass film 10 during the rubbing process is excessive. This can prevent the rubbing cloth constituting the rubbing roller 5 from being worn out and torn off.

Further, in the third step, as shown in FIG. 8, the liquid crystal alignment film 31 aligned by rubbing is sealed with the color filter side glass substrate 6 and liquid crystal is injected (not shown). The liquid crystal element 32 is formed on the glass film 10.
In the embodiment shown in FIG. 8, the color filter side glass substrate 6 and the glass film 10 are directly bonded, but the color filter side glass substrate 6 and the glass film 10 are appropriately used by using a known glass frit, a spacer or the like. And may be adhered. In the form shown in FIGS. 7 and 8, the support glass 12 (support 11) is also used for the color filter side glass substrate 6. Moreover, the glass film laminated body which laminated | stacked the color filter side glass substrate 6 and support glass 12 (support 11) used by this embodiment also has the structure similar to the glass film laminated body 1 of this invention. .

  As the substrate used for sealing the liquid crystal element 32, the color filter side glass substrate 6 made of silicate glass, silica glass, borosilicate glass, non-alkali glass, or the like is used as in the glass film 10 described above.

About the color filter side glass substrate 6, it is preferable to use the glass whose difference of the thermal expansion coefficient in 30-380 degreeC with the glass film 10 is less than 5 * 10 < ^-7 > / ^degreeC .
Thereby, even if the temperature of the surrounding environment of the produced liquid crystal panel 3 changes, the heat warp by the difference in expansion coefficient, the crack of the glass film 10 and the color filter side glass substrate 6 are not easily generated, and the liquid crystal panel is hardly damaged. 3 is possible.
And it is most preferable to use the glass which has the same composition for the color filter side glass substrate 6 and the glass film 10 from a viewpoint of suppressing the difference of an expansion coefficient.

  The thickness of the color filter side glass substrate 6 is preferably 300 μm or less, more preferably 5 to 200 μm, and most preferably 5 to 100 μm. Thereby, the thickness of the color filter side glass substrate 6 can be made thinner, and appropriate flexibility can be provided. If the thickness of the color filter side glass substrate 6 is less than 5 μm, the strength of the color filter side glass substrate 6 tends to be insufficient.

  As shown in FIG. 7, in the manufacturing method of the liquid crystal panel 3 according to the present embodiment, in the fourth step, the support glass 12 and the glass film 10 of the liquid crystal panel 4 with support glass are peeled to form the liquid crystal element 32. The liquid crystal panel 3 which is the glass film 10 of the mode performed is produced.

The 4th process of the manufacturing method of the liquid crystal panel 3 which concerns on this embodiment is a process of isolate | separating the liquid crystal panel 4 with support glass into the liquid crystal panel 3 (glass film 10) and the support glass 12. FIG.
For example, when the liquid crystal panel 3 is peeled from the support glass 12, the edge of the glass film 10 is separated from the support glass 12 while inserting a wedge (not shown) at the interface 13 between the glass film 10 and the support glass 12. It can peel by pulling in the direction. Moreover, when the support glass 12 exists also in the color filter side glass substrate 6, the support glass 12 and the color filter side glass substrate 6 can be peeled by the method similar to this.

  Thus, the manufacturing method of the liquid crystal panel 3 according to the present embodiment includes the first step of laminating the glass film 10 on the support glass 12 as the support 11 to produce the glass film laminate 1, and the glass film 10. A second step of forming the liquid crystal alignment film 31 on the surface of the film, and a rubbing step of rubbing the surface of the liquid crystal alignment film 31 in a certain direction with the rubbing roller 5, and a liquid crystal element on the surface of the glass film 10 in the glass film laminate 1. And forming a liquid crystal panel 3 by peeling the support glass 12 from the liquid crystal panel 4 with a support glass and forming a liquid crystal panel 3. Only the effective surface 10b side which is the surface opposite to the contact surface 10a side of the supporting glass 12 of the glass film 10 before the second step. Oite, it is configured to form a chamfered portion 15 at the outer peripheral edge of the glass film 10.

And by using such a structure, when using the glass film 10 for a liquid crystal panel substrate, wear of the rubbing roller 5 can be suppressed.
Thereby, when producing the liquid crystal panel 3 using the glass film laminated body 1, generation | occurrence | production of a light spot defect can be suppressed.

Next, the state of occurrence of defects when a liquid crystal panel is manufactured using the glass film laminate according to one embodiment of the present invention will be described with reference to FIG.
FIG. 9 shows the number of occurrences of defects under various conditions when a liquid crystal panel is manufactured from a glass film by changing the conditions of the presence / absence of a chamfered portion, the amount of chamfering, the formation status of the chamfered portion, and the setting status of the effective surface. Is a summary.

In each of the following examples and comparative examples, non-alkali glass (product name: OA-10G) manufactured by Nippon Electric Glass Co., Ltd. is used as the glass film and the supporting glass.
In addition, a glass film having a size of 368 × 468 and a thickness of 0.2 t is used, and a supporting glass having a size of 370 × 470 and a thickness of 0.5 t is used.

Each glass film laminated body which concerns on Example 1- Example 3 corresponds to the glass film laminated body which concerns on this invention, and forms the chamfering part in the peripheral part of a glass film.
The chamfered portion was chamfered with a # 2000 disc grindstone so that the angle was 45 degrees.

On the other hand, the glass film laminated body which concerns on the comparative example 1 has not formed the chamfering part in the peripheral part of a glass film, and does not correspond to the glass film laminated body which concerns on this invention.
Moreover, in the glass film laminated body which concerns on the comparative example 1, the scribe surface is selected as the effective surface of a glass film.

The glass film laminated body which concerns on Example 1 has selected the scribe surface in the effective surface of a glass film, has formed the chamfering part in the peripheral part of the effective surface side, and also sets the amount of chamfering to the thickness ( 200 μm), which is 50% or less of 90 μm.
In addition, the glass film laminated body which concerns on Example 1 respond | corresponds to the glass film laminated body 1 mentioned above.

In the glass film laminate according to Example 2, a surface opposite to the scribe surface is selected as the effective surface of the glass film, and a chamfered portion is formed in the peripheral portion on the effective surface side. The amount is 90 μm, which is 50% or less of the thickness of the glass film. And in each glass film laminated body which concerns on Example 2, the scribe surface is selected as a contact surface.
In addition, the glass film laminated body which concerns on Example 2 respond | corresponds to the glass film laminated body 1a mentioned above.

In the glass film laminate according to Example 3, a scribe surface is selected as the effective surface of the glass film, and a chamfered portion is formed at the peripheral portion on the effective surface side. The amount exceeds 50% and is 110 μm.
In addition, the glass film laminated body which concerns on Example 3 respond | corresponds to the glass film laminated body 1c mentioned above.

And about each glass film laminated body which concerns on Example 1- Example 3 and the comparative example 1, 20 samples are prepared, respectively, and it introduce | transduces into the manufacturing process of a liquid crystal display, and the osmosis | permeation of a chemical | medical solution is in the interface of a glass film laminated body. It was confirmed whether or not dusting occurred in the rubbing cloth in the rubbing process.
Further, for each of 20 samples, it was confirmed whether or not the glass film was damaged when the glass film was peeled from the supporting glass.

  According to the experimental result shown in FIG. 9, in the glass film laminated body which concerns on the comparative example 1, it became the result which "dust generation by rubbing" produced in all 20 samples.

  On the other hand, according to the experimental results shown in FIG. 9, in the glass film laminate according to Example 1, in all 20 samples, “breakage during peeling”, “dust generation due to rubbing”, “breakage due to chemical penetration”. Neither defect occurred.

  Further, in the glass film laminate according to Example 2, “dusting by rubbing” did not occur in all 20 samples, but “breakage during peeling” occurred in 2 of 20 samples, “Fracture caused by chemical penetration” resulted in 5 out of 20 samples.

  Furthermore, in the glass film laminate according to Example 3, “dusting by rubbing” and “breakage due to chemical penetration” did not occur in all 20 samples, but “breakage during peeling” was 20 samples. Of these, 5 resulted.

That is, according to the results of this experiment, in each glass film laminate (that is, each glass film laminate 1) according to Examples 1 to 3, “dusting by rubbing” could be reliably prevented.
That is, it was confirmed that dusting of the rubbing cloth in the rubbing process can be effectively suppressed by providing the chamfered portion at the peripheral portion on the effective surface side of the glass film.

Further, according to the results of this experiment, in the glass film laminate (that is, the glass film laminate 1) according to Example 1, “breakage due to chemical penetration” and “breakage during peeling” can be reliably prevented. It was.
In other words, by selecting a scribe surface as the effective surface of the glass film and making the chamfering amount 50% or less of the thickness of the glass film, it is possible to effectively suppress breakage during peeling and realize an improvement in the yield of the glass film. Was confirmed.

DESCRIPTION OF SYMBOLS 1 Glass film laminated body 3 Liquid crystal panel 4 Liquid crystal panel with support glass 10 Glass film 10a Contact surface 10b Effective surface 11 Support body 12 Support glass 12a Contact surface 15 Chamfering part 16 Scribe surface

Claims (8)

A glass film laminate produced by laminating a glass film on a support,
Only on the effective surface side that is the surface opposite to the contact surface side of the glass film with the support, a chamfered portion is provided on the outer peripheral edge of the glass film.
The glass film laminated body characterized by the above-mentioned. The amount of chamfering in the chamfered portion is
It is 50% or less of the thickness of the glass film.
The glass film laminate according to claim 1. The glass film is
A scribe line is formed and cut along the scribe line,
The surface on the side where the scribe line is formed,
Select as the effective surface,
The glass film laminate according to claim 1 or claim 2, wherein The support is support glass,
The glass film laminated body as described in any one of Claims 1-3 characterized by the above-mentioned. The glass film is directly laminated on the supporting glass,
The surface roughness Ra of each contact surface where the glass film and the supporting glass are in contact with each other is 2.0 nm or less.
The glass film laminated body of Claim 4 characterized by the above-mentioned. A first step of laminating a glass film on a support to produce a glass film laminate;
A second step of forming a liquid crystal alignment film on the surface of the glass film;
Including a rubbing step of rubbing the surface of the liquid crystal alignment film with a rubbing roller in a certain direction, and forming a liquid crystal element on the surface of the glass film in the glass film laminate to produce a support-equipped liquid crystal panel When,
A fourth step of producing a liquid crystal panel by peeling the support from the liquid crystal panel with support;
A method of manufacturing a liquid crystal panel having
Prior to the second step,
Only on the effective surface side that is the surface opposite to the contact surface side of the glass film with the support, a chamfered portion is formed on the outer peripheral edge of the glass film.
A method for manufacturing a liquid crystal panel. The amount of chamfering in the chamfered portion is
It is 50% or less of the thickness of the glass film.
The method for producing a liquid crystal panel according to claim 6. The glass film is
A scribe line is formed and cleaved along the scribe line,
The surface on the side where the scribe line is formed,
Select as the effective surface,
The method for manufacturing a liquid crystal panel according to claim 6 or 7, wherein

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