WO2014178405A1 - Glass film laminate, and production method for electronic device - Google Patents

Glass film laminate, and production method for electronic device Download PDF

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Publication number
WO2014178405A1
WO2014178405A1 PCT/JP2014/062002 JP2014062002W WO2014178405A1 WO 2014178405 A1 WO2014178405 A1 WO 2014178405A1 JP 2014062002 W JP2014062002 W JP 2014062002W WO 2014178405 A1 WO2014178405 A1 WO 2014178405A1
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WO
WIPO (PCT)
Prior art keywords
glass
glass film
film
supporting
support
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Application number
PCT/JP2014/062002
Other languages
French (fr)
Japanese (ja)
Inventor
三和　義治
道治 江田
隆雄 岡
尚利 稲山
Original Assignee
日本電気硝子株式会社
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Application filed by 日本電気硝子株式会社 filed Critical 日本電気硝子株式会社
Publication of WO2014178405A1 publication Critical patent/WO2014178405A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation

Definitions

  • the present invention relates to flat panel displays such as liquid crystal displays and organic EL displays, solar cells, lithium ion batteries, digital signage, touch panels, electronic paper, glass substrates for devices such as mobile phones and smartphones, and organic EL lighting and mobile phones.
  • the present invention relates to a method for producing film-like glass used for a cover glass of a device such as a smartphone or a pharmaceutical package, and a glass film laminate in which a glass film is supported by a supporting glass.
  • flat panel displays such as a liquid crystal display, a plasma display, an organic EL display and a field emission display have become popular in recent years.
  • These flat panel displays are required to be thinner.
  • organic EL displays are required to be easily carried by folding or winding, and to be usable not only on flat surfaces but also on curved surfaces.
  • it is not limited to a display that can be used not only on a flat surface but also on a curved surface.
  • the surface of an object having a curved surface such as a car body surface, a roof of a building, a pillar, or an outer wall. If a solar cell can be formed or organic EL illumination can be formed, the application will be expanded. Therefore, the substrate and cover glass used in these devices are required to be further thinned and highly flexible.
  • Organic EL element materials such as a light emitting layer and an electron transport layer (Alq3) used for an organic EL display are deteriorated by contact with a gas such as oxygen or water vapor. Accordingly, since a high gas barrier property is required for a substrate used in an organic EL display, it is expected to use a glass substrate. However, unlike the resin film, the glass used for the substrate is weak in tensile stress and thus has low flexibility. When the glass substrate is bent, an excessive tensile stress is applied to the glass substrate surface, resulting in breakage. In order to impart flexibility to the glass substrate, it is necessary to make the glass substrate ultra-thin, and a glass film or glass roll having a thickness of 200 ⁇ m or less as described in Patent Document 1 below has been proposed. .
  • the glass substrate used for electronic devices such as flat panel displays and solar cells is subjected to various processing related to electronic device manufacturing such as processing and cleaning.
  • processing and cleaning various processing related to electronic device manufacturing
  • glass is a brittle material, so it is damaged by a slight stress change, and handling is difficult when performing various electronic device manufacturing related processes described above. There is a problem that it is difficult.
  • a glass film having a thickness of 200 ⁇ m or less is rich in flexibility, it is difficult to perform positioning when performing processing, and there is a problem that displacement or the like occurs during patterning.
  • Patent Document 2 proposes a glass film laminate in which a glass film is laminated on a supporting glass. According to this, even if a glass film having no strength or rigidity is used alone, the supporting glass has high rigidity, so that the entire glass film laminate can be easily positioned during processing. Moreover, in the following patent document 2, it is said that it can peel from a support glass immediately, without damaging a glass film after completion
  • Patent Document 3 the glass film is supported on the supporting glass so that the corner portion of the glass film is exposed at the peeling start portion formed by cutting out a part of the supporting glass into a concave shape.
  • a glass film laminate laminated on top has been proposed. Thereby, since the corner part which the glass film exposed can be easily hold
  • the present invention has been made to solve the above-mentioned problems of the prior art, and is a glass film when the glass film is peeled off or broken from the supporting glass during the manufacturing-related processing or when the glass film is peeled off from the supporting glass. It is an object of the present invention to make it possible to easily peel a glass film from a supporting glass while preventing breakage or breakage of the glass.
  • the present invention devised to solve the above problems is a glass film laminate in which a supporting glass and a glass film are laminated with their respective mating surfaces in surface contact, and the glass film is eaten from the supporting glass.
  • a protrusion that protrudes toward the glass film is provided, and the glass film is in contact with the protrusion, and in the vicinity of the edge of the glass film.
  • a peeling region is provided that is surrounded by the support glass, the protruding portion, and the glass film, and in which the mating surfaces of the support glass and the glass film are in a non-contact state.
  • the supporting surface of the supporting glass is the surface on the glass film side of the supporting glass of the glass film laminate, and when the supporting glass is composed only of glass, the surface of the glass is the supporting glass.
  • the supporting glass is formed by forming a thin film such as a resin thin film or an inorganic thin film on the surface of the glass, it means that the surface of the thin film becomes the mating surface of the supporting glass.
  • the “glass film mating surface” is the surface on the supporting glass side of the glass film of the glass film laminate, and when the glass film is composed only of glass, the surface of the glass is glass.
  • the surface of the thin film should be the mating surface of the glass film. Meaning (hereinafter the same).
  • the protruding portion is formed in the vicinity of the edge of the support glass, so that the strength of the support glass does not decrease, so that the probability of occurrence of breakage or breakage of the support glass is greatly reduced.
  • a peeling region that is surrounded by the support glass, the protruding portion, and the glass film and that the mating surfaces of the glass film and the support glass are brought into a non-contact state. Therefore, when peeling a glass film from support glass, a glass film can be easily peeled from support glass by expanding the above-mentioned peeling area gradually.
  • a thin metal member such as a resin sheet or a razor may be used as a peeling jig, but the peeling jig is easily inserted into the peeling area. be able to.
  • an excessive force for peeling does not act on the glass film, so that the glass film is effectively prevented from being broken or damaged during the peeling. .
  • the supporting glass protrudes from the glass film.
  • the protrusion is provided in the vicinity of at least one side of the polygonal support glass, and the protrusion and the glass film are in line contact.
  • tool can be more easily inserted in the space
  • the polygonal support glass is preferably a rectangular support glass
  • the glass film is preferably a rectangular glass film.
  • the supporting glass and the glass film are more preferably similar.
  • the glass film is preferably laminated so that the edge of the glass film is positioned above the protrusion, and the edge of the glass film and the protrusion are preferably separated from each other. .
  • the part which the glass film and the protrusion part of the support glass have separated can also be made into the peeling start part of a glass film. Further, the separated portion can be used as a guide for inserting the above-described peeling jig, and can more easily insert the above-described peeling jig into the peeling region. Therefore, the glass film can be more easily peeled from the supporting glass.
  • the protruding portion is disposed with a gap from an end side of the support glass, and the glass film has an end side between the end side of the support glass and the protruding portion. It is preferable to be laminated on the supporting glass so as to be positioned.
  • the edge of the glass film is separated from the supporting glass and the protruding portion, the edge of the glass film can effectively and sufficiently exhibit the function as the peeling start portion of the glass film. .
  • the protruding portion preferably protrudes from 1 to 50 ⁇ m to the glass film side from the mating surface of the support glass.
  • the height dimension of the above-described peeling region is optimized, and the size of the peeling region can sufficiently exhibit its function.
  • the width of the peeling region in the direction along the mating surface of the supporting glass is preferably 0.5 to 5 mm.
  • the protrusion is preferably made of a glass tape that is thinner than the glass film.
  • the protrusion is made of a glass tape that is thinner than the glass film, the protrusion can be easily formed on the supporting glass.
  • the surface roughness Ra of the mating surfaces of the glass film and the supporting glass is 2.0 nm or less.
  • the glass film and the supporting glass can be laminated by direct adhesion without using an adhesive.
  • Such advantages are particularly remarkable when both the glass film and the supporting glass are made of only glass and when one or both of them are formed with an inorganic thin film on the surface of the glass. Is obtained.
  • the support glass is preferably formed by an overflow down draw method, a slot down draw method, or a float method.
  • thick ear portions may be formed at both ends of the glass original plate immediately after the molding at the time of forming the supporting glass.
  • the ear portions can also be used as protruding portions. is there. Thereby, it becomes possible to omit the post-process for producing the protruding portion.
  • the glass film preferably has a thickness of 300 ⁇ m or less.
  • the glass film can be easily peeled off from the supporting glass as described above, even though it is a glass film having a thickness of 300 ⁇ m or less that is likely to be cracked or chipped.
  • the method according to the present invention which was created to solve the above-mentioned problems, is a method for manufacturing an electronic device in which a manufacturing-related process is performed on a glass film, and a glass tape is disposed in the vicinity of the edge of the supporting glass to protrude.
  • the first step is to perform a heat treatment after the glass tape is arranged, so that the supporting glass and the glass tape are bonded to each other to form a protruding portion. It is preferable to include a forming step.
  • the third step is a manufacturing-related process involving heating, and the heating temperature in the heating process after the glass tape placement is higher than the heating temperature of the third manufacturing-related process. High temperature is preferred.
  • the glass film is removed from the supporting glass while preventing the damage or damage of the supporting glass during the manufacturing-related processing and the glass film from being broken or damaged when the glass film is peeled off from the supporting glass. It can be easily peeled off.
  • FIG. 1 illustrates the configuration of the main part of a glass film laminate 1 according to an embodiment of the present invention.
  • this glass film laminate 1 has a surface contact portion 12 in which the lower surface (mating surface) 22 of the glass film 2 and the upper surface (mating surface) 33 of the supporting glass 3 are in surface contact over a wide range.
  • the glass film 2 is laminated on the support glass 3 so as to have a state.
  • a protruding portion 31 having a rectangular cross section separate from the support glass 2 is provided.
  • the support glass 3, the protruding portion 31, and the glass film 2 are surrounded in the vicinity of the edge 21 of the glass film 2, and the lower surface 22 of the glass film 2 and the upper surface of the support glass 3.
  • region 11 made into the non-contact state with 33 is formed.
  • the peeling region 11 is a space surrounded by the lower surface 22 of the glass film 2, the upper surface 33 of the supporting glass 3, and the inner surface 312 of the protruding portion 31.
  • the peeling region 11 preferably has a width dimension w in the direction along the upper surface 33 of the supporting glass 3 (distance from the inner surface 312 of the protruding portion 31 to the starting end of the surface contact portion 12) of 0.01 to 10 mm. 0.1 to 5 mm is more preferable, and 1 to 4 mm is most preferable. Thereby, it becomes possible to produce the peeling area
  • the peeling region 11 By forming the peeling region 11 on the glass film laminate 1, the following action is performed. That is, when peeling the glass film 2 from the support glass 3, the surface contact portion 12 can be separated by gradually expanding the peeling region 11, and the glass film 2 can be easily peeled from the support glass 3. it can. In addition, when the glass film 2 is peeled from the support glass 3, a thin metal member such as a resin sheet or a razor may be used as a peeling jig (not shown). 11 can be inserted.
  • the end side 21 of the glass film 2 is separated from the upper surface 313 of the protruding portion 31.
  • the glass film 2 can be peeled from the support glass 3 more easily.
  • a peeling jig (not shown) is used when peeling the glass film 2 from the support glass 3
  • the separation region 14 between the edge 21 of the glass film 2 and the upper surface 313 of the protruding portion 31 is peeled off. Since it serves as a guide when the jig is inserted, the peeling jig can be easily inserted into the peeling region 11.
  • the surface roughness Ra of the mating surfaces (the lower surface 22 of the glass film 2 and the upper surface 31 of the supporting glass 3) of the glass film 2 and the supporting glass 3 is 2.0 nm. It is as follows. Thereby, the glass film 2 and the support glass 3 can be laminated
  • the surface roughness Ra of the lower surface 22 of the glass film 2 and the upper surface 31 of the supporting glass 3 is preferably 1.0 nm or less, more preferably 0.5 nm or less, and preferably 0.2 nm or less. Most preferred.
  • the glass film 2 is made of silicate glass or silica glass, preferably borosilicate glass, most preferably non-alkali glass. If the glass film 2 contains an alkali component, cations are dropped on the surface, so-called soda blowing phenomenon occurs, and the structure becomes rough. In this case, if the glass film 2 is used while being curved, there is a possibility that the glass film 2 may be broken from a portion that has become rough due to deterioration over time.
  • the alkali-free glass is a glass that does not substantially contain an alkali component (alkali metal oxide), and specifically, a glass having an alkali component of 3000 ppm or less.
  • the content of the alkali component in the present invention is preferably 1000 ppm or less, more preferably 500 ppm or less, and still more preferably 300 ppm or less.
  • the thickness of the glass film 2 is preferably 300 ⁇ m or less, more preferably 5 ⁇ m to 200 ⁇ m, and most preferably 5 ⁇ m to 100 ⁇ m. Thereby, the thickness of the glass film 2 can be made thinner and appropriate flexibility can be imparted, and handling properties are difficult, and problems such as positioning errors and bending during patterning are likely to occur. On the other hand, electronic device manufacturing related processing and the like can be easily performed by using the supporting glass 3 having the characteristics described later. If the thickness of the glass film 2 is less than 5 ⁇ m, the strength of the glass film 2 tends to be insufficient, and the glass film 2 may be difficult to peel from the support glass 3.
  • silicate glass, silica glass, borosilicate glass, non-alkali glass, or the like is used as in the glass film 2.
  • the supporting glass 3 it is preferable to use a glass having a difference in thermal expansion coefficient at 30 to 380 ° C. with respect to the glass film 2 within 5 ⁇ 10 ⁇ 7 / ° C.
  • the supporting glass 3 and the glass film 2 are most preferably glass having the same composition.
  • the thickness of the support glass 3 is preferably 400 ⁇ m or more. When the thickness of the supporting glass 3 is less than 400 ⁇ m, there is a possibility that a problem may occur in terms of strength when the supporting glass 3 is handled alone.
  • the thickness of the supporting glass 3 is preferably 400 ⁇ m to 700 ⁇ m, and most preferably 500 ⁇ m to 700 ⁇ m. As a result, the glass film 2 can be reliably supported, and breakage of the glass film 2 that can occur when the glass film 2 is peeled from the support glass 3 can be effectively suppressed.
  • the thickness of the support glass 3 may be less than 400 ⁇ m (for example, 300 ⁇ m, the same thickness as the glass film 2).
  • the glass film 2 and the support glass 3 used in the present embodiment are preferably formed by an overflow down draw method, a slot down draw method, or a float method.
  • an overflow down draw method a slot down draw method, or a float method.
  • thick ears may be formed at both ends of the plate glass during molding of the supporting glass, but the ears can be used as protrusions. Thereby, it becomes possible to omit the process of producing a protrusion part.
  • a protruding portion may be newly formed at the end of the supporting glass after the ear portion is removed.
  • the glass ribbon G that has reached the predetermined thickness is gradually cooled in a slow cooling furnace (annealer), the thermal distortion of the glass ribbon (G) is removed, and the glass ribbon (G) is cut into a predetermined size, thereby forming a glass film. 2 and the supporting glass 3 are respectively formed.
  • the supporting glass 3 is laminated so as to protrude from the glass film 2. Thereby, it can prevent that the glass film 2 breaks because the edge 21 of the glass film 2 collides with the positioning pin etc. which are not shown in figure.
  • the protruding amount of the supporting glass 3 from the glass film 2 is preferably 0.5 to 30 mm, and more preferably 0.5 to 5 mm. By reducing the amount of protrusion of the supporting glass 3, the effective surface of the glass film 2 can be secured more widely. From such a viewpoint, the protrusion amount of the supporting glass 3 from the glass film 2 may be 0 mm.
  • the support glass 3 protrudes from the glass film 2 on all four sides, and at least a portion where the protruding portion 31 is formed in the vicinity of the end 32 of the support glass 3.
  • the support glass 3 protrudes from the glass film 2.
  • a protrusion 31 is formed in the vicinity of the end 32 of the support glass 3 so as to protrude toward the glass film 2 by a thickness t.
  • the protruding portion 31 may be formed in the vicinity of a part of the end side 32 of the support glass 3 or may be formed along the entire end side 32 of the support glass 3.
  • it may be formed only on one side of the support glass 3 having a polygonal shape or a rectangular shape, it may be provided on two adjacent sides, two opposite sides, or all four sides.
  • the protruding portion 31 is provided in the vicinity of the end side 32 of the support glass 3.
  • “the vicinity of the end side 32 of the support glass 3” refers to the end side 32 of the support glass 3.
  • positions so that the outer surface 311 of the protrusion part 31 may become on the same plane is also included.
  • the thickness t of the protrusion 31 is preferably 0.1 to 100 ⁇ m, more preferably 0.1 to 20 ⁇ m, and most preferably 1 to 10 ⁇ m. Thereby, the peeling area
  • the protrusion 31 is preferably formed in a rectangular cross section, and the corner of the protrusion 31 (particularly, the upper end portion of the inner side surface 312 of the protrusion 31) is C chamfered or R chamfered (circular chamfered in cross section) or the like. It is preferable that the shape is chamfered. Thereby, the protrusion part 31 and the glass film 2 will be line-contacted in the contact location 13, and the peeling jig
  • the protruding portion 31 when the protruding portion 31 has a shape in which the four corners are chamfered or a shape in which the side surface is formed with a convex curved surface as shown in FIG. 4, the protruding portion 31 can be prevented from being cracked or chipped.
  • the protrusion 31 may be formed in a polygonal cross section, or may be formed in a circular cross section or an elliptical cross section.
  • the protrusion 31 is preferably made of a glass tape having a thickness smaller than that of the glass film 2. Thereby, the desired protrusion part 31 is producible by setting freely the thickness and width
  • the silicate glass, the silica glass, the borosilicate glass, the alkali free glass etc. are used like the glass film 2 and the support glass 3.
  • FIG. it is preferable to use a glass having a difference in thermal expansion coefficient at 30 to 380 ° C. with respect to the glass film 2 or the supporting glass 3 within 5 ⁇ 10 ⁇ 7 / ° C.
  • thermal warp due to a difference in expansion coefficient, cracking of the protruding portion 31, and the like are unlikely to occur, and the glass film laminate 1 can maintain a stable laminated state. It becomes possible.
  • the material of the protrusion 31 is not limited to the glass described above, and resin, metal, or the like may be used.
  • the glass tape is preferably formed by a redraw method.
  • the protrusion 31 having a desired width and thickness can be easily formed by appropriately designing the thickness and width of the base material, the draw-down rate of stretch molding, and the like.
  • glass tape means a glass sheet having a stripe shape (ribbon shape or tape shape), and is preferably formed by a redraw method.
  • FIG. 3 is a diagram illustrating a redraw method used when the protruding portion 31 (glass tape) is manufactured.
  • a base glass 51 is prepared and set in the stretch molding apparatus 5 as shown in FIG. It is possible to form the glass tape 53 by heating the base glass 51 with the heater 52 and pulling out the base glass 51 at a temperature where the viscosity of the base glass 51 is 6.0 to 8.0 dPa ⁇ s so that the thickness is 100 ⁇ m or less. it can.
  • the stretching force of the stretch molding is controlled by the rotational force of the resin pulley 54, and the molded glass tape 53 is wound up by the winding drum 55. Thereby, since only the single side
  • the protruding portion 31 has been described by taking a glass tape produced by stretch molding as an example, but is not limited to this form. For example, you may use what cut
  • both the glass film 2 and the supporting glass 3 are made of only glass
  • the two films 2 and 3 are laminated by direct surface contact.
  • a resin layer such as silicone resin, EVA, PVB, acrylic, or an optical transparent adhesive may be formed on the upper surface 31 of the glass of the support glass 3, and the peelability of the glass film 2 may be improved.
  • an inorganic oxide thin film such as ITO or ZrO 2 or a metal thin film such as Ti may be formed on the upper surface 31 of the supporting glass 3.
  • a resin layer such as EVA, PVB, acrylic, or an optical transparent adhesive may be formed on the lower surface 22 of the glass of the glass film 2, and an inorganic oxide thin film such as ITO or ZrO 2 , SiN, TiN, A nitride film such as CrN, TiAlN, or AlCrN, a metal thin film such as Ti, a carbide film such as diamond-like carbon, TiC or WC, or a fluoride film such as MgF 2 may be formed. A film may be formed. In this case, the surface after the resin layer or inorganic thin film is formed becomes the mating surface of the glass film or the supporting glass.
  • an inorganic oxide thin film such as ITO or ZrO 2 , SiN, TiN, A nitride film such as CrN, TiAlN, or AlCrN, a metal thin film such as Ti, a carbide film such as diamond-like carbon, TiC or WC, or a fluoride film such as MgF 2
  • the protruding portion 31 may be formed after the inorganic thin film or the resin layer is formed, and before the inorganic thin film or the resin layer is formed. You may form the protrusion part 31 in this.
  • the method of fixing the protruding portion 31 on the supporting glass 3 may be bonding using an adhesive such as a resin, and by heating,
  • the protrusion 31 may be bonded onto the support glass 3.
  • the glass tape as the protrusion 31 is produced by the above-described redraw method, the glass tape can be directly bonded onto the supporting glass by setting the surface roughness Ra of the glass tape to 2.0 nm or less. Even if it is a lower temperature heating, the protrusion part 31 can be adhere
  • the surface roughness Ra of the glass tape is preferably 1.0 nm or less, more preferably 0.5 nm or less, and most preferably 0.2 nm or less.
  • FIG. 4 is a view showing another embodiment of the glass film laminate according to the present invention.
  • the glass film laminate 1 according to the present invention has a convex curved surface in which the outer side surface 311 and the inner side surface of the projecting portion 31 formed separately from the supporting glass 3 are substantially semicircular in cross section.
  • the protruding portion 31 is disposed with a distance 34 from the end side 32 of the supporting glass 3, and the end side 21 of the glass film 2 is formed between the end side 32 of the supporting glass 3 and the outer side surface 311 of the protruding portion 31. It is laminated
  • the edge 21 of the glass film 2 is directly gripped. It becomes easy to do.
  • the lower surface in the vicinity of the edge 21 of the glass film 2 is in surface contact with the upper surface of the protruding portion 31.
  • a separation region surrounded by the lower surface of the glass film 2, the upper surface of the support glass 3, and the inner surface of the protruding portion 31 is formed in the vicinity of the end side 21 of the glass film 2.
  • FIG 5 and 6 are plan views of the glass film laminate 1 according to the present embodiment.
  • the length in the longitudinal direction of the protruding portion 31 is longer than the length of the end side 21 of the glass film 2. Both ends protrude from both ends in the longitudinal direction of the end side 21 of the glass film 2.
  • the length in the longitudinal direction of the protruding portion 31 is shorter than the length of the end side 21 of the glass film 2.
  • the protrusion 31 protrudes from both ends in the longitudinal direction.
  • both ends in the longitudinal direction of the end side 21 may coincide with each other.
  • both end portions of the peeling region 11, that is, both longitudinal end portions of the space portion forming the peeling region 11 are opened.
  • a peeling jig having a diameter smaller than that of the peeling region 11 can be inserted, and the peeling jig can be inserted into the peeling region 11 without going through the contact portion 13 between the glass film 2 and the protruding portion 31.
  • the length in the longitudinal direction of the protruding portion 31 is shorter than the length of the end side 32 of the support glass 3, and both ends in the longitudinal direction of the end side 32 of the support glass 3 protrude.
  • the longitudinal length of the protruding portion 31 is made the same as the length of the end side 32 of the supporting glass 3, and both longitudinal ends of the protruding portion 31 are supported by the supporting glass 3. You may make it correspond to the longitudinal direction both ends of the edge 32 of this.
  • FIG. 7 is a view showing a flowchart of a manufacturing method of an electronic device (an electronic device subjected to manufacturing-related processing on a glass film) according to the present invention.
  • the reference numerals used in the following description are the same as those used in FIGS.
  • the glass film 2 is laminated on the support glass 3 as described above, and a glass film laminate 1 having a peeling region 11 surrounded by the support glass 3, the protruding portion 31, and the glass film 2 is produced, and glass
  • the first step (S1) is a step of forming the protruding portion 31 by placing a glass tape in the vicinity of the end side 32 of the supporting glass 3.
  • the end surface 32 of the support glass is arranged so that the surface on the side not in contact with the pulley 54 is in contact with the upper surface 33 of the support glass 3. Place the glass tape along.
  • the surface of the glass tape that is not in contact with the pulley 54 is in a better surface state than the surface that is in contact with the pulley 54, so that in the bonding step between the protruding portion 31 and the support glass 3 described later.
  • the heating temperature can be reduced.
  • the surface state which contacted the pulley 54 has deteriorated slightly, it can prevent that the glass film 2 and the protrusion part 31 adhere
  • the first step (S1) according to the present invention may include a protruding portion forming step in which the supporting glass 3 is heated to adhere the supporting glass 3 and the protruding portion 31 after the glass tape is arranged.
  • the method of heating the support glass 3 may be performed by putting the support glass 3 into a known baking furnace, and heating the contact surface between the upper surface 33 of the support glass 3 and the protruding portion 31 with a known laser or the like. You can go there. As described above, the smaller the surface roughness Ra of the protrusion 31 and the upper surface 33 of the support glass 3, the lower the temperature can be bonded.
  • the glass film 2 and the supporting glass 3 are laminated by bringing the mating surfaces 22 and 33 into surface contact so that the protruding portion 31 and the glass film 2 are in contact with each other.
  • the glass film laminated body which has the peeling area
  • 1 is a process of manufacturing 1.
  • the method for laminating the glass film 2 on the supporting glass 3 is not particularly limited, and the glass film 2 can be laminated on the supporting glass 3 using a known laminating machine or the like.
  • the third step (S3) according to the present invention is a step of performing manufacturing-related processing on the glass film 2 side of the glass film laminate 1.
  • Examples of the manufacturing-related processing performed on the glass film 2 side include film formation processing by sputtering, etc., sealing processing for sealing elements, sintering processing for glass frit, etc. in device, particularly electronic device manufacturing. It is done.
  • Examples of the manufacturing-related process performed on the glass film 2 side include a film forming process such as an antireflection film or a transmission preventing film by a sputtering method or the like.
  • the manufacturing-related process used in the third step may be constituted by a single processing means, or may be constituted by a plurality of identical or different processing means. Moreover, a manufacturing related process with heating may be included in part, and a manufacturing related process without heating such as a cleaning process may be included.
  • the third step forms an element on the glass film 2 of the glass film laminate 1 produced in the second step by performing an electronic device manufacturing related process, not shown.
  • the glass film laminated body 1 of this invention can be used also for a cover glass.
  • the fourth step (S4) according to the present invention is a step of peeling the treated glass film from the support glass 3.
  • a peeling jig (not shown) may be used. By using the peeling jig, the peeling jig can be smoothly inserted up to the peeling area 11, and by continuing to insert the peeling jig, the peeling area 11 can be expanded.
  • a fluid containing water in the peeling region 11 a gas containing water having a high relative humidity, a gas containing water mist, or liquid water itself or water is interfaced.
  • An aqueous solution containing an activator or the like may be supplied, or the glass film laminate 1 or the electronic device with supporting glass described above may be immersed in water. May be applied.
  • the shape of the peeling jig may be a thread-like member, but it is preferable to use a member having a small thickness and a wide width in the peeling progress direction, such as a sheet shape, a band shape, a plate shape or a strip shape.
  • the thickness of the peeling jig is preferably 0.01 mm to 1 mm, and more preferably 0.1 mm to 0.5 mm.
  • the peeling jig can smoothly pass through the contact portion 13 between the treated glass film and the protruding portion 31, and the peeling jig can be smoothly inserted into the peeling region 11.
  • tool also depends on the area of the glass film laminated body 1 used as the object of peeling, it is preferable that it is wider than the glass film laminated body 1 at least in the peeling progress direction.
  • the material of the peeling jig can be a rigid metal such as aluminum or stainless steel, but it is preferable to use a flexible resin film such as polyethylene or acrylic, and a hydrophobic film such as a fluorine film.
  • the resin sheet is more preferable.
  • a treated glass film is adsorbed by a pad or the like, and the treated glass film is moved from the supporting glass 3 by moving the pad in a direction separating from the supporting glass 3.
  • a peeling method may be used.
  • an electronic device subjected to manufacturing-related processing on the glass film can be obtained, and the manufacturing-related processing on the glass film is appropriately performed on another electronic device or the like. It is possible to incorporate an electronic device subjected to the above.
  • a liquid crystal panel or an organic EL panel can be directly produced in the third step to produce an electronic device with a supporting glass, and an electronic device can be produced by peeling the supporting glass. .
  • the heating temperature of the heating process performed after the placement of the glass tape in the first process is higher than the heating temperature of the manufacturing-related process in the third process.
  • the heating temperature of the heating process performed after the placement of the glass tape in the first process is higher than the heating temperature of the manufacturing-related process in the third process.
  • the heating temperature of the heat treatment performed after the placement of the glass tape in the first step is 50 ° C. or higher, and more preferably 100 ° C. or higher than the manufacturing-related processing temperature in the third step.
  • the manufacturing-related process in the third step is a film forming process such as a transparent conductive film
  • it is usually heated to 250 to 350 ° C. during the third step.
  • the heating performed after the glass tape is disposed.
  • the heating temperature for the treatment is preferably 350 to 450 ° C.
  • non-alkali glass (OA-10G, thermal expansion coefficient at 30 to 380 ° C .: 38 ⁇ 10 ⁇ 7 / ° C.) manufactured by Nippon Electric Glass Co., Ltd. was used.
  • a support tape and a glass film were produced by the overflow downdraw method, and a glass tape was produced by the redraw method.
  • a rectangular plate glass having a length of 110 mm, a width of 110 mm, and a thickness of 500 ⁇ m was prepared as a supporting glass.
  • a rectangular transparent glass having a length of 100 mm, a width of 100 mm, and a thickness of 100 ⁇ m was prepared as a glass film.
  • a streaky glass sheet having a length of 100 mm, a width of 5 mm, and a thickness of 5 ⁇ m was prepared as a glass tape.
  • a protrusion was formed by placing a glass tape on the support glass in a direction along the end side while being spaced 5 mm away from one end side of the support glass. Thereafter, the supporting glass was heat-treated at 400 ° C. for 30 minutes. After the heat treatment, the supporting glass and the glass film are washed, and the glass film is laminated on the supporting glass, so that the edge of the glass film is spaced above the protruding portion, and is about 2 mm from the contact point between the glass film and the protruding portion. The glass film laminated body in which the peeling area
  • Comparative example As a comparative example, a glass film with the same conditions was laminated on a supporting glass except that no protrusion was formed on the supporting glass, and when peeling the glass film was attempted, it was difficult to peel off the glass film. Some glass films were damaged during peeling.
  • the present invention can be suitably used for glass substrates used in flat panel displays such as liquid crystal displays and organic EL displays, devices such as solar cells, and cover glasses for organic EL lighting.

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  • Joining Of Glass To Other Materials (AREA)
  • Laminated Bodies (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Liquid Crystal (AREA)

Abstract

　A glass film laminate (1) obtained by bringing the respective lamination surfaces (33, 22) of support glass (3) and a glass film (2) into surface contact and laminating the support glass and the glass film (2), wherein: the glass film (2) does not extend beyond the support glass (3); a protrusion (31) that protrudes towards the glass film (2) side is provided in the vicinity of an edge (32) of the support glass (3); the glass film (2) is in contact with the protrusion (31); and a peeling region (11) which is surrounded by the support glass (3), the protrusion (31) and the glass film (2) and in which the lamination surfaces (33, 22) of the support glass (3) and the glass film (2) are not in contact is provided in the vicinity of an edge (21) of the glass film (2). The glass film (2) is peeled away from the support glass (3) by progressively enlarging the peeling region (11).

Description

ガラスフィルム積層体および電子デバイスの製造方法Glass film laminate and method for producing electronic device
　本発明は、液晶ディスプレイや有機ＥＬディスプレイ等のフラットパネルディスプレイや、太陽電池、リチウムイオン電池、デジタルサイネージ、タッチパネル、電子ペーパー、携帯電話やスマートフォン等のデバイスのガラス基板、及び有機ＥＬ照明や携帯電話、スマートフォン等のデバイスのカバーガラスや医薬品パッケージ等に使用されるフィルム状ガラスの製造方法、及び支持ガラスによってガラスフィルムを支持したガラスフィルム積層体に関する。 The present invention relates to flat panel displays such as liquid crystal displays and organic EL displays, solar cells, lithium ion batteries, digital signage, touch panels, electronic paper, glass substrates for devices such as mobile phones and smartphones, and organic EL lighting and mobile phones. The present invention relates to a method for producing film-like glass used for a cover glass of a device such as a smartphone or a pharmaceutical package, and a glass film laminate in which a glass film is supported by a supporting glass.
　省スペース化の観点から、従来普及していたＣＲＴ型ディスプレイに替わり、近年は液晶ディスプレイ、プラズマディスプレイ、有機ＥＬディスプレイ、フィールドエミッションディスプレイ等のフラットパネルディスプレイが普及している。これらのフラットパネルディスプレイにおいては、さらなる薄型化が要請される。特に有機ＥＬディスプレイには、折りたたみや巻き取ることによって持ち運びを容易にすると共に、平面だけでなく曲面にも使用可能とすることが求められている。また、平面だけでなく曲面にも使用可能とすることが求められているのはディスプレイには限られず、例えば、自動車の車体表面や建築物の屋根、柱や外壁等、曲面を有する物体の表面に太陽電池を形成したり、有機ＥＬ照明を形成したりすることができれば、その用途が広がることとなる。従って、これらデバイスに使用される基板やカバーガラスには、更なる薄板化と高い可撓性が要求される。 From the viewpoint of space saving, instead of the CRT type display which has been widely used in the past, flat panel displays such as a liquid crystal display, a plasma display, an organic EL display and a field emission display have become popular in recent years. These flat panel displays are required to be thinner. In particular, organic EL displays are required to be easily carried by folding or winding, and to be usable not only on flat surfaces but also on curved surfaces. In addition, it is not limited to a display that can be used not only on a flat surface but also on a curved surface. For example, the surface of an object having a curved surface, such as a car body surface, a roof of a building, a pillar, or an outer wall. If a solar cell can be formed or organic EL illumination can be formed, the application will be expanded. Therefore, the substrate and cover glass used in these devices are required to be further thinned and highly flexible.
　有機ＥＬディスプレイに使用される発光層や電子輸送層（Ａｌｑ３）をはじめとした有機ＥＬ素子材料は、酸素や水蒸気等の気体が接触することにより劣化する。従って有機ＥＬディスプレイに使用される基板には高いガスバリア性が求められるため、ガラス基板を使用することが期待されている。しかしながら、基板に使用されるガラスは、樹脂フィルムと異なり引っ張り応力に弱いため可撓性が低く、ガラス基板を曲げることによりガラス基板表面に過度な引っ張り応力がかけられると破損に至る。ガラス基板に可撓性を付与するためにはガラス基板の超薄板化を行う必要があり、下記特許文献１に記載されているような厚み２００μｍ以下のガラスフィルムやガラスロールが提案されている。 Organic EL element materials such as a light emitting layer and an electron transport layer (Alq3) used for an organic EL display are deteriorated by contact with a gas such as oxygen or water vapor. Accordingly, since a high gas barrier property is required for a substrate used in an organic EL display, it is expected to use a glass substrate. However, unlike the resin film, the glass used for the substrate is weak in tensile stress and thus has low flexibility. When the glass substrate is bent, an excessive tensile stress is applied to the glass substrate surface, resulting in breakage. In order to impart flexibility to the glass substrate, it is necessary to make the glass substrate ultra-thin, and a glass film or glass roll having a thickness of 200 μm or less as described in Patent Document 1 below has been proposed. .
　フラットパネルディスプレイや太陽電池等の電子デバイスに使用されるガラス基板には、加工処理や洗浄処理等、様々な電子デバイス製造関連の処理がなされる。ところが、これら電子デバイスに使用されるガラス基板のフィルム化を行うと、ガラスは脆性材料であるため多少の応力変化により破損に至り、上述した各種電子デバイス製造関連処理を行う際に、取り扱いが大変困難であるという問題がある。加えて、厚み２００μｍ以下のガラスフィルムは可撓性に富むため、処理を行う際に位置決めを行い難く、パターンニング時にずれ等が生じるという問題もある。 The glass substrate used for electronic devices such as flat panel displays and solar cells is subjected to various processing related to electronic device manufacturing such as processing and cleaning. However, when a glass substrate used in these electronic devices is made into a film, glass is a brittle material, so it is damaged by a slight stress change, and handling is difficult when performing various electronic device manufacturing related processes described above. There is a problem that it is difficult. In addition, since a glass film having a thickness of 200 μm or less is rich in flexibility, it is difficult to perform positioning when performing processing, and there is a problem that displacement or the like occurs during patterning.
　ガラスフィルムの取り扱い性を向上させるために、下記特許文献２では、支持ガラスの上にガラスフィルムを積層させたガラスフィルム積層体が提案されている。これによれば、単体では強度や剛性のないガラスフィルムを用いても、支持ガラスの剛性が高いため、処理の際にガラスフィルム積層体全体として位置決めが容易となる。また、下記特許文献２では、工程終了後にガラスフィルムを破損することなくすみやかに支持ガラスから剥離することが可能であるとされている。ガラスフィルム積層体の厚みを従来のガラス基板の厚みと同一とすれば、従来のガラス基板用液晶表示素子製造ラインを共用して、液晶表示素子を製造することも可能となる。 In order to improve the handleability of the glass film, the following Patent Document 2 proposes a glass film laminate in which a glass film is laminated on a supporting glass. According to this, even if a glass film having no strength or rigidity is used alone, the supporting glass has high rigidity, so that the entire glass film laminate can be easily positioned during processing. Moreover, in the following patent document 2, it is said that it can peel from a support glass immediately, without damaging a glass film after completion | finish of a process. If the thickness of the glass film laminate is the same as that of a conventional glass substrate, a liquid crystal display element can be manufactured by sharing a conventional liquid crystal display element manufacturing line for glass substrates.
　下記特許文献２に記載されたガラスフィルム積層体では、最終的に電子デバイス等に使用するため、支持ガラスからガラス基板を剥離する必要がある。この際に、一般的には、ガラスフィルムのコーナー部からガラスフィルムの剥離を開始する。しかしながら、特許文献２に記載のガラスフィルム積層体は、ガラスフィルムの全ての面が支持ガラスと接触している。このため、支持ガラスとガラスフィルムとの接着力が強固な場合については、ガラスフィルムのコーナー部を把持し難く、ガラスフィルムの剥離の際にガラスフィルムのコーナー部に破損や欠け等が生じ易くなるという問題がある。 In the glass film laminate described in Patent Document 2 below, it is necessary to peel the glass substrate from the supporting glass in order to be finally used for an electronic device or the like. At this time, generally, peeling of the glass film is started from the corner portion of the glass film. However, in the glass film laminate described in Patent Document 2, all surfaces of the glass film are in contact with the supporting glass. For this reason, when the adhesive force between the supporting glass and the glass film is strong, it is difficult to grip the corner of the glass film, and the glass film is easily damaged or chipped when the glass film is peeled off. There is a problem.
　この問題を解決するために、下記特許文献３では、支持ガラス上の一部を凹状に切り欠くことによって形成された剥離開始部で、ガラスフィルムのコーナー部が露出するようにガラスフィルムを支持ガラス上に積層したガラスフィルム積層体が提案されている。これにより、ガラスフィルムの剥離の際には、ガラスフィルムの露出したコーナー部を容易に把持することができるため、支持ガラスからガラスフィルムを容易に剥離することができる。 In order to solve this problem, in Patent Document 3 below, the glass film is supported on the supporting glass so that the corner portion of the glass film is exposed at the peeling start portion formed by cutting out a part of the supporting glass into a concave shape. A glass film laminate laminated on top has been proposed. Thereby, since the corner part which the glass film exposed can be easily hold | gripped in the case of peeling of a glass film, a glass film can be easily peeled from support glass.
特開２０１０－１３２５３１号公報JP 2010-132531 A 特開２０１１－１８３７９２号公報JP 2011-183792 A 特開２０１２－０３０４０４号公報JP 2012-030404 A
　しかしながら、特許文献３では、支持ガラスの端部近傍に剥離開始部を設けているため、剥離開始部近辺では支持ガラスの強度が低下し、これに起因して支持ガラスの欠損や破損を招くという問題がある。例えば、電子デバイスの製造関連処理時に、支持ガラスの剥離開始部付近の端部に位置決めピン等が打突すること等により、支持ガラスに欠損や破損が生じるという問題がある。また、ガラスフィルム積層体が、加熱を伴う電子デバイス製造関連処理を経る場合に、昇温時に熱衝撃により、剥離開始部を基点として、支持ガラスが欠損したり破損したりするという問題も生じる。 However, in patent document 3, since the peeling start part is provided in the edge part vicinity of the support glass, the intensity | strength of support glass falls in the vicinity of a peeling start part, and it is said that this causes the loss and breakage of support glass. There's a problem. For example, there is a problem in that the support glass is damaged or broken due to a positioning pin or the like hitting an end near the peeling start portion of the support glass at the time of manufacturing-related processing of the electronic device. In addition, when the glass film laminate undergoes an electronic device manufacturing related process involving heating, there is also a problem that the supporting glass is damaged or broken with a thermal shock at the time of temperature rise as a starting point of the peeling start portion.
　本発明は、上述したような従来技術の問題点を解決するためになされたものであって、製造関連処理時の支持ガラスの欠損あるいは破損や、支持ガラスからガラスフィルムを剥離する際のガラスフィルムの欠損あるいは破損を防止しつつ、支持ガラスからガラスフィルムを容易に剥離可能とすることを課題とする。 The present invention has been made to solve the above-mentioned problems of the prior art, and is a glass film when the glass film is peeled off or broken from the supporting glass during the manufacturing-related processing or when the glass film is peeled off from the supporting glass. It is an object of the present invention to make it possible to easily peel a glass film from a supporting glass while preventing breakage or breakage of the glass.
　上記課題を解決するために創案された本発明は、支持ガラスとガラスフィルムとを、それぞれの合わせ面を面接触させて積層したガラスフィルム積層体であって、前記ガラスフィルムは前記支持ガラスから食み出しておらず、前記支持ガラスの端辺近傍には、ガラスフィルム側に突出する突出部が設けられ、前記ガラスフィルムは、前記突出部と接触しており、前記ガラスフィルムの端辺近傍には、前記支持ガラスと前記突出部と前記ガラスフィルムとで囲繞され且つ前記支持ガラスとガラスフィルムとの両合わせ面が非接触状態とされた剥離領域が設けられていることに特徴づけられる。ここで、「支持ガラスの合わせ面」とは、ガラスフィルム積層体の支持ガラスのガラスフィルム側の面であって、支持ガラスがガラスのみからなる場合には、そのガラスの表面が、支持ガラスの合わせ面となるのに対して、支持ガラスがガラスの表面に樹脂薄膜や無機薄膜等の薄膜を形成してなる場合には、その薄膜の表面が、支持ガラスの合わせ面となることを意味する（以下、同様）。また、同様に、「ガラスフィルムの合わせ面」とは、ガラスフィルム積層体のガラスフィルムの支持ガラス側の面であって、ガラスフィルムがガラスのみからなる場合には、そのガラスの表面が、ガラスフィルムの合わせ面となるのに対して、ガラスフィルムがガラスの表面に樹脂薄膜や無機薄膜等の薄膜を形成してなる場合には、その薄膜の表面が、ガラスフィルムの合わせ面となることを意味する（以下、同様）。 The present invention devised to solve the above problems is a glass film laminate in which a supporting glass and a glass film are laminated with their respective mating surfaces in surface contact, and the glass film is eaten from the supporting glass. In the vicinity of the edge of the support glass, a protrusion that protrudes toward the glass film is provided, and the glass film is in contact with the protrusion, and in the vicinity of the edge of the glass film. Is characterized in that a peeling region is provided that is surrounded by the support glass, the protruding portion, and the glass film, and in which the mating surfaces of the support glass and the glass film are in a non-contact state. Here, “the supporting surface of the supporting glass” is the surface on the glass film side of the supporting glass of the glass film laminate, and when the supporting glass is composed only of glass, the surface of the glass is the supporting glass. When the supporting glass is formed by forming a thin film such as a resin thin film or an inorganic thin film on the surface of the glass, it means that the surface of the thin film becomes the mating surface of the supporting glass. (The same applies hereinafter). Similarly, the “glass film mating surface” is the surface on the supporting glass side of the glass film of the glass film laminate, and when the glass film is composed only of glass, the surface of the glass is glass. When the glass film is formed by forming a thin film such as a resin thin film or an inorganic thin film on the surface of the glass, the surface of the thin film should be the mating surface of the glass film. Meaning (hereinafter the same).
　このような構成によれば、支持ガラスの端辺近傍には突出部が形成されているため、支持ガラスの強度低下を生じないので、支持ガラスの欠損や破損の発生確率が大幅に低減される。しかも、ガラスフィルムの端辺近傍には、前記支持ガラスと前記突出部と前記ガラスフィルムとで囲繞され且つ前記ガラスフィルムと支持ガラスとの両合わせ面が非接触状態とされる剥離領域が設けられていることから、支持ガラスからガラスフィルムを剥離する際には、前述の剥離領域を徐々に広げていくことで、支持ガラスからガラスフィルムを容易に剥離することができる。加えて、支持ガラスからガラスフィルムを剥離する際に、剥離治具として、樹脂シートや剃刀のような薄肉の金属部材を使用することがあるが、当該剥離治具を容易に剥離領域に挿入することができる。このように、ガラスフィルムの剥離が容易且つ円滑に行われることによって、剥離のための過剰な力がガラスフィルムに作用しなくため、剥離時におけるガラスフィルムの欠損や破損も効果的に抑止される。 According to such a configuration, since the protruding portion is formed in the vicinity of the edge of the support glass, the strength of the support glass does not decrease, so that the probability of occurrence of breakage or breakage of the support glass is greatly reduced. . In addition, in the vicinity of the edge of the glass film, there is provided a peeling region that is surrounded by the support glass, the protruding portion, and the glass film and that the mating surfaces of the glass film and the support glass are brought into a non-contact state. Therefore, when peeling a glass film from support glass, a glass film can be easily peeled from support glass by expanding the above-mentioned peeling area gradually. In addition, when peeling the glass film from the supporting glass, a thin metal member such as a resin sheet or a razor may be used as a peeling jig, but the peeling jig is easily inserted into the peeling area. be able to. As described above, since the glass film is easily and smoothly peeled off, an excessive force for peeling does not act on the glass film, so that the glass film is effectively prevented from being broken or damaged during the peeling. .
　以上の構成において、前記支持ガラスは、前記ガラスフィルムから食み出していることが好ましい。 In the above configuration, it is preferable that the supporting glass protrudes from the glass film.
　このようにすれば、ガラスフィルムの端辺に他部材が直接接触する機会が低減されるため、製品となるガラスフィルムが有効に保護される。 This makes it possible to effectively protect the glass film as a product because the chance of other members coming into direct contact with the edge of the glass film is reduced.
　以上の構成において、前記突出部は、多角形状の支持ガラスの少なくとも１辺の端辺近傍に設けられており、前記突出部と前記ガラスフィルムとは、線接触していることが好ましい。 In the above configuration, it is preferable that the protrusion is provided in the vicinity of at least one side of the polygonal support glass, and the protrusion and the glass film are in line contact.
　このようにすれば、前述のように支持ガラスからガラスフィルムを剥離する際に、剥離治具をより容易に支持ガラスとガラスフィルムとの間の離間部や剥離領域に挿入することができる。 If it does in this way, when peeling a glass film from support glass as mentioned above, a peeling jig | tool can be more easily inserted in the space | interval part and peeling area between support glass and a glass film.
　この場合、前記多角形状の支持ガラスは、矩形状の支持ガラスであると共に、前記ガラスフィルムは、矩形状のガラスフィルムであることが好ましい。 In this case, the polygonal support glass is preferably a rectangular support glass, and the glass film is preferably a rectangular glass film.
　このようにすれば、支持ガラスとガラスフィルムとの間に無駄な領域が存在しなくなり、両者間に適正な相互関係を有するガラスフィルム積層体を得ることができる。なお、支持ガラスとガラスフィルムとは相似形であることがより好ましい。 In this way, there is no useless area between the supporting glass and the glass film, and a glass film laminate having an appropriate correlation between them can be obtained. The supporting glass and the glass film are more preferably similar.
　以上の構成において、前記ガラスフィルムは、該ガラスフィルムの端辺が前記突出部の上方に位置するように積層され、前記ガラスフィルムの端辺と前記突出部とは、離間していることが好ましい。 In the above configuration, the glass film is preferably laminated so that the edge of the glass film is positioned above the protrusion, and the edge of the glass film and the protrusion are preferably separated from each other. .
　このようにすれば、ガラスフィルムと支持ガラスの突出部とが離間している部分もガラスフィルムの剥離開始部とすることができる。更に、当該離間している部分については、前述の剥離治具を挿入するガイドとしても使用することができ、より容易に前述の剥離治具を剥離領域に挿入することを可能とすることができるため、支持ガラスからガラスフィルムをより容易に剥離することができる。 If it does in this way, the part which the glass film and the protrusion part of the support glass have separated can also be made into the peeling start part of a glass film. Further, the separated portion can be used as a guide for inserting the above-described peeling jig, and can more easily insert the above-described peeling jig into the peeling region. Therefore, the glass film can be more easily peeled from the supporting glass.
　以上の構成において、前記突出部は、前記支持ガラスの端辺から間隔を設けて配置され、前記ガラスフィルムは、該ガラスフィルムの端辺が前記支持ガラスの端辺と前記突出部との間に位置するように、前記支持ガラス上に積層されていることが好ましい。 In the above configuration, the protruding portion is disposed with a gap from an end side of the support glass, and the glass film has an end side between the end side of the support glass and the protruding portion. It is preferable to be laminated on the supporting glass so as to be positioned.
　このようにすれば、ガラスフィルムの端辺が支持ガラスや突出部から離間しているため、ガラスフィルムの端辺が、ガラスフィルムの剥離開始部としての機能を有効且つ十分に発揮することができる。 In this way, since the edge of the glass film is separated from the supporting glass and the protruding portion, the edge of the glass film can effectively and sufficiently exhibit the function as the peeling start portion of the glass film. .
　以上の構成において、前記突出部は、前記支持ガラスの合わせ面から前記ガラスフィルム側に１～５０μｍ突出していることが好ましい。 In the above configuration, the protruding portion preferably protrudes from 1 to 50 μm to the glass film side from the mating surface of the support glass.
　このようにすれば、前述の剥離領域の高さ寸法が適切化されて、当該剥離領域の大きさが、その機能を十分に発揮し得るものとなる。 In this way, the height dimension of the above-described peeling region is optimized, and the size of the peeling region can sufficiently exhibit its function.
　以上の構成において、前記剥離領域は、前記支持ガラスの合わせ面に沿う方向の幅寸法が、０．５～５ｍｍであることが好ましい。 In the above configuration, the width of the peeling region in the direction along the mating surface of the supporting glass is preferably 0.5 to 5 mm.
　このようにすれば、ガラスフィルムと支持ガラスとのそれぞれの合わせ面の面接触部を広く確保しつつ、ガラスフィルムの剥離の際に剥離開始部となる剥離領域を適切に作製することが可能となる。 In this way, it is possible to appropriately produce a peeling region that becomes a peeling start portion at the time of peeling of the glass film, while ensuring a wide surface contact portion of each mating surface of the glass film and the supporting glass. Become.
　以上の構成において、前記突出部は、前記ガラスフィルムよりも薄肉のガラステープからなることが好ましい、 In the above configuration, the protrusion is preferably made of a glass tape that is thinner than the glass film.
　このようにすれば、突出部が前記ガラスフィルムよりも薄肉のガラステープからなることから、容易に支持ガラス上に突出部を形成することができる。 In this way, since the protrusion is made of a glass tape that is thinner than the glass film, the protrusion can be easily formed on the supporting glass.
　以上の構成において、前記ガラスフィルム及び前記支持ガラスのそれぞれの合わせ面の表面粗さＲａが２．０ｎｍ以下であることが好ましい。 In the above configuration, it is preferable that the surface roughness Ra of the mating surfaces of the glass film and the supporting glass is 2.0 nm or less.
　このようにすれば、ガラスフィルムと支持ガラスとを、接着剤を使用することなく直接接着により積層させることが可能となる。なお、このような利点は、ガラスフィルムと支持ガラスとの双方が、ガラスのみからなる場合と、その両者の一方または双方が、ガラスの表面に無機薄膜を形成してなる場合とにおいて、特に顕著に得られる。 In this way, the glass film and the supporting glass can be laminated by direct adhesion without using an adhesive. Such advantages are particularly remarkable when both the glass film and the supporting glass are made of only glass and when one or both of them are formed with an inorganic thin film on the surface of the glass. Is obtained.
　以上の構成において、前記支持ガラスは、オーバーフローダウンドロー法、スロットダウンドロー法、又はフロート法によって成形されていることが好ましい。 In the above configuration, the support glass is preferably formed by an overflow down draw method, a slot down draw method, or a float method.
　このようにすれば、高品位の支持ガラスを効率的に作製する上で極めて有利となる。また、これらの成形法を使用すると、支持ガラス成形時に、成形直後のガラス原板の両端部に肉厚の耳部が形成されることがあるが、当該耳部を突出部とすることも可能である。これにより、突出部を作製する後工程を省略することが可能となる。 In this way, it is extremely advantageous to efficiently produce a high-quality support glass. In addition, when these molding methods are used, thick ear portions may be formed at both ends of the glass original plate immediately after the molding at the time of forming the supporting glass. However, the ear portions can also be used as protruding portions. is there. Thereby, it becomes possible to omit the post-process for producing the protruding portion.
　以上の構成において、前記ガラスフィルムの厚みは、３００μｍ以下であることが好ましい。 In the above configuration, the glass film preferably has a thickness of 300 μm or less.
　このようにすれば、割れや欠け等が発生し易い厚み３００μｍ以下のガラスフィルムであるにも関わらず、前述のように容易に支持ガラスから剥離することができる。 In this way, the glass film can be easily peeled off from the supporting glass as described above, even though it is a glass film having a thickness of 300 μm or less that is likely to be cracked or chipped.
　上記課題を解決するために創案された本発明に係る方法は、ガラスフィルム上に製造関連処理を施した電子デバイスの製造方法であって、支持ガラスの端辺近傍にガラステープを配置して突出部を形成する第１の工程と、該支持ガラスとガラスフィルムとをそれぞれの合わせ面を面接触させ且つ前記突出部と前記ガラスフィルムとを接触させた状態に積層すると共に前記支持ガラスと前記突出部と前記ガラスフィルムとで囲繞され且つ前記支持ガラスとガラスフィルムの両合わせ面が非接触状態とされた剥離領域を有するガラスフィルム積層体を作製する第２の工程と、前記ガラスフィルム積層体の前記ガラスフィルム側に製造関連処理を行う第３の工程と、前記製造関連処理後に、前記剥離領域を拡大させて前記支持ガラスから前記処理を終えたガラスフィルムを剥離する第４の工程と、を有することに特徴づけられる。 The method according to the present invention, which was created to solve the above-mentioned problems, is a method for manufacturing an electronic device in which a manufacturing-related process is performed on a glass film, and a glass tape is disposed in the vicinity of the edge of the supporting glass to protrude. Laminating the supporting glass and the glass film in a state where the respective mating surfaces are in surface contact and the protruding portion and the glass film are in contact with each other, and the supporting glass and the protruding A second step of producing a glass film laminate having a peeled area surrounded by a portion and the glass film and having a non-contact state between both supporting surfaces of the support glass and the glass film; and A third step of performing manufacturing-related processing on the glass film side, and after the manufacturing-related processing, the processing is performed from the support glass by expanding the peeling region. A fourth step of peeling off the glass film having been subjected, characterized in that it has a.
　このような構成によれば、第１の工程から第４の工程を経ることで、ガラスフィルムに対して適切に製造関連処理を施すことが可能になると共に、製造関連処理後には、支持ガラスから電子デバイスが製造されたガラスフィルムを容易に剥離することが可能となる。 According to such a structure, it becomes possible to perform a manufacturing related process appropriately with respect to a glass film by passing through a 4th process from a 1st process, and after a manufacturing related process, from support glass It becomes possible to easily peel the glass film on which the electronic device is manufactured.
　以上の方法において、前記第１の工程は、前記ガラステープの配置後に加熱処理を行うことで、前記支持ガラスと前記ガラステープとをそれぞれの合わせ面同士を接着させて突出部を形成する突出部形成工程を含むことが好ましい。 In the above method, the first step is to perform a heat treatment after the glass tape is arranged, so that the supporting glass and the glass tape are bonded to each other to form a protruding portion. It is preferable to include a forming step.
　このようにすれば、ガラステープの配置後に加熱処理を行うことにより、第４の工程時において支持ガラスからガラスフィルムを剥離する際に、ガラステープがガラスフィルムと接着することで支持ガラスからガラステープが剥離することを防止することができる。 If it does in this way, when heat processing is performed after arrangement | positioning of a glass tape, when peeling a glass film from support glass at the time of a 4th process, a glass tape adhere | attaches a glass film on a support glass from a support glass. Can be prevented from peeling off.
　以上の方法において、前記第３の工程は、加熱を伴う製造関連処理であって、前記ガラステープ配置後の前記加熱処理における前記加熱温度は、前記第３の製造関連処理の加熱温度よりも、高温であることが好ましい。 In the above method, the third step is a manufacturing-related process involving heating, and the heating temperature in the heating process after the glass tape placement is higher than the heating temperature of the third manufacturing-related process. High temperature is preferred.
　このようにすれば、前記ガラステープ配置後の前記加熱処理における前記加熱温度は、前記第３の工程における製造関連処理の加熱温度よりも、高温であることから、より強くガラステープとガラスフィルムが接着する場合であっても、第４の工程時に支持ガラスからガラスフィルムを剥離する際に、ガラステープがガラスフィルムに引っ張られて支持ガラスから剥離することをより確実に防止することができる。 If it does in this way, since the said heating temperature in the said heat processing after the said glass tape arrangement | positioning is higher than the heating temperature of the manufacture related process in a said 3rd process, a glass tape and a glass film are stronger. Even in the case of bonding, when the glass film is peeled from the supporting glass in the fourth step, the glass tape can be more reliably prevented from being pulled from the supporting glass by being pulled by the glass film.
　以上のように本発明によれば、製造関連処理時の支持ガラスの欠損あるいは破損や、支持ガラスからガラスフィルムを剥離する際のガラスフィルムの欠損あるいは破損を防止しつつ、支持ガラスからガラスフィルムを容易に剥離することが可能となる。 As described above, according to the present invention, the glass film is removed from the supporting glass while preventing the damage or damage of the supporting glass during the manufacturing-related processing and the glass film from being broken or damaged when the glass film is peeled off from the supporting glass. It can be easily peeled off.
本発明に係るガラスフィルム積層体の一部拡大断面図である。It is a partially expanded sectional view of the glass film laminated body which concerns on this invention. ガラスフィルム及び支持ガラスの製造方法の一例を示した図である。It is the figure which showed an example of the manufacturing method of a glass film and support glass. ガラステープの製造方法の一例を示した図である。It is the figure which showed an example of the manufacturing method of a glass tape. 本発明に係るガラスフィルム積層体の他の実施形態を示した図である。It is the figure which showed other embodiment of the glass film laminated body which concerns on this invention. 本発明に係るガラスフィルム積層体の平面図である。It is a top view of the glass film laminated body which concerns on this invention. 本発明に係るガラスフィルム積層体の他の実施形態を示した平面図である。It is the top view which showed other embodiment of the glass film laminated body which concerns on this invention. 本発明に係るフィルム状ガラスの製造方法のフローチャートを示した図である。It is the figure which showed the flowchart of the manufacturing method of the film-form glass which concerns on this invention.
　以下、本発明に係るガラスフィルム積層体、及び、電子デバイスの製造方法の好適な実施形態について、図面を参照しつつ説明する。但し、以下の実施形態は、単なる一例であり、本発明は、以下の実施形態に何ら限定されない。 Hereinafter, preferred embodiments of a glass film laminate and an electronic device manufacturing method according to the present invention will be described with reference to the drawings. However, the following embodiments are merely examples, and the present invention is not limited to the following embodiments.
　図１は、本発明の実施形態に係るガラスフィルム積層体１の要部の構成を例示している。同図に示すように、このガラスフィルム積層体１は、ガラスフィルム２の下面（合わせ面）２２と、支持ガラス３の上面（合わせ面）３３とを広範囲にわたって面接触させた面接触部１２を有する状態となるように、支持ガラス３上にガラスフィルム２を積層したものである。そして、支持ガラス２の端辺３２の近傍には、支持ガラス２とは別体の断面矩形状の突出部３１が設けられている。従って、このガラスフィルム積層体１においては、ガラスフィルム２の端辺２１近傍に、支持ガラス３と突出部３１とガラスフィルム２とで囲繞され、且つガラスフィルム２の下面２２と支持ガラス３の上面３３とが非接触状態とされた剥離領域１１が形成されている。 FIG. 1 illustrates the configuration of the main part of a glass film laminate 1 according to an embodiment of the present invention. As shown in the figure, this glass film laminate 1 has a surface contact portion 12 in which the lower surface (mating surface) 22 of the glass film 2 and the upper surface (mating surface) 33 of the supporting glass 3 are in surface contact over a wide range. The glass film 2 is laminated on the support glass 3 so as to have a state. In the vicinity of the edge 32 of the support glass 2, a protruding portion 31 having a rectangular cross section separate from the support glass 2 is provided. Accordingly, in the glass film laminate 1, the support glass 3, the protruding portion 31, and the glass film 2 are surrounded in the vicinity of the edge 21 of the glass film 2, and the lower surface 22 of the glass film 2 and the upper surface of the support glass 3. The peeling area | region 11 made into the non-contact state with 33 is formed.
　詳述すると、剥離領域１１は、ガラスフィルム２の下面２２と、支持ガラス３の上面３３と、突出部３１の内側面３１２とで囲繞された空間である。この剥離領域１１は、支持ガラス３の上面３３に沿う方向の幅寸法ｗ（突出部３１の内側面３１２から面接触部１２の始端までの距離）が、０．０１～１０ｍｍであることが好ましく、０．１～５ｍｍであることがより好ましく、１～４ｍｍであることが、最も好ましい。これにより、有効面であるガラスフィルム２と支持ガラス３との面接触部１２を広く確保しつつ、剥離領域１１を適切に作製することが可能となる。 Specifically, the peeling region 11 is a space surrounded by the lower surface 22 of the glass film 2, the upper surface 33 of the supporting glass 3, and the inner surface 312 of the protruding portion 31. The peeling region 11 preferably has a width dimension w in the direction along the upper surface 33 of the supporting glass 3 (distance from the inner surface 312 of the protruding portion 31 to the starting end of the surface contact portion 12) of 0.01 to 10 mm. 0.1 to 5 mm is more preferable, and 1 to 4 mm is most preferable. Thereby, it becomes possible to produce the peeling area | region 11 appropriately, ensuring the surface contact part 12 of the glass film 2 which is an effective surface, and the support glass 3 widely.
　ガラスフィルム積層体１に上記の剥離領域１１を形成したことによって、次のような作用が行われる。すなわち、支持ガラス３からガラスフィルム２を剥離する際には、剥離領域１１を徐々に広げていくことで、面接触部１２を離反させ、支持ガラス３からガラスフィルム２を容易に剥離することができる。加えて、支持ガラス３からガラスフィルム２を剥離する際に、図示しない剥離治具として樹脂シートや剃刀のような薄肉の金属部材を使用することがあるが、当該剥離治具を容易に剥離領域１１に挿入することができる。 By forming the peeling region 11 on the glass film laminate 1, the following action is performed. That is, when peeling the glass film 2 from the support glass 3, the surface contact portion 12 can be separated by gradually expanding the peeling region 11, and the glass film 2 can be easily peeled from the support glass 3. it can. In addition, when the glass film 2 is peeled from the support glass 3, a thin metal member such as a resin sheet or a razor may be used as a peeling jig (not shown). 11 can be inserted.
　しかも、この実施形態に係るガラスフィルム積層体１は、ガラスフィルム２の端辺２１が、突出部３１の上面３１３から離間している。これにより、ガラスフィルム２の端辺２１を直接把持することが可能となるため、より容易にガラスフィルム２を支持ガラス３から剥離することができる。加えて、支持ガラス３からガラスフィルム２を剥離する際に、図示しない剥離治具を使用する場合、ガラスフィルム２の端辺２１と突出部３１の上面３１３との間の離間領域１４が、剥離治具挿入の際のガイドの役割を果たすため、剥離治具を剥離領域１１に挿入し易くなる。 Moreover, in the glass film laminate 1 according to this embodiment, the end side 21 of the glass film 2 is separated from the upper surface 313 of the protruding portion 31. Thereby, since it becomes possible to hold | grip the edge 21 of the glass film 2 directly, the glass film 2 can be peeled from the support glass 3 more easily. In addition, when a peeling jig (not shown) is used when peeling the glass film 2 from the support glass 3, the separation region 14 between the edge 21 of the glass film 2 and the upper surface 313 of the protruding portion 31 is peeled off. Since it serves as a guide when the jig is inserted, the peeling jig can be easily inserted into the peeling region 11.
　さらに、この実施形態に係るガラスフィルム積層体１は、ガラスフィルム２及び支持ガラス３のそれぞれの合わせ面（ガラスフィルム２の下面２２と支持ガラス３の上面３１）の表面粗さＲａが２．０ｎｍ以下とされている。これにより、ガラスフィルム２と支持ガラス３とを、接着剤を使用することなく安定して積層させることができる。ガラスフィルム２の下面２２及び支持ガラス３の上面３１の表面粗さＲａは、夫々１．０ｎｍ以下であることが好ましく、０．５ｎｍ以下であることがより好ましく、０．２ｎｍ以下であることが最も好ましい。 Further, in the glass film laminate 1 according to this embodiment, the surface roughness Ra of the mating surfaces (the lower surface 22 of the glass film 2 and the upper surface 31 of the supporting glass 3) of the glass film 2 and the supporting glass 3 is 2.0 nm. It is as follows. Thereby, the glass film 2 and the support glass 3 can be laminated | stacked stably, without using an adhesive agent. The surface roughness Ra of the lower surface 22 of the glass film 2 and the upper surface 31 of the supporting glass 3 is preferably 1.0 nm or less, more preferably 0.5 nm or less, and preferably 0.2 nm or less. Most preferred.
　ガラスフィルム２は、ケイ酸塩ガラス、シリカガラスが用いられ、好ましくはホウ珪酸ガラスが用いられ、最も好ましくは無アルカリガラスが用いられる。ガラスフィルム２にアルカリ成分が含有されていると、表面において陽イオンの脱落が発生し、いわゆるソーダ吹きの現象が生じ、構造的に粗となる。この場合、ガラスフィルム２を湾曲させて使用していると、経年劣化により粗となった部分から破損する可能性がある。尚、ここで無アルカリガラスとは、アルカリ成分（アルカリ金属酸化物）が実質的に含まれていないガラスのことであって、具体的には、アルカリ成分が３０００ｐｐｍ以下のガラスのことである。本発明でのアルカリ成分の含有量は、好ましくは１０００ｐｐｍ以下であり、より好ましくは５００ｐｐｍ以下であり、更に好ましくは３００ｐｐｍ以下である。 The glass film 2 is made of silicate glass or silica glass, preferably borosilicate glass, most preferably non-alkali glass. If the glass film 2 contains an alkali component, cations are dropped on the surface, so-called soda blowing phenomenon occurs, and the structure becomes rough. In this case, if the glass film 2 is used while being curved, there is a possibility that the glass film 2 may be broken from a portion that has become rough due to deterioration over time. Here, the alkali-free glass is a glass that does not substantially contain an alkali component (alkali metal oxide), and specifically, a glass having an alkali component of 3000 ppm or less. The content of the alkali component in the present invention is preferably 1000 ppm or less, more preferably 500 ppm or less, and still more preferably 300 ppm or less.
　ガラスフィルム２の厚みは、好ましくは３００μｍ以下、より好ましくは５μｍ～２００μｍ、最も好ましくは５μｍ～１００μｍである。これによりガラスフィルム２の厚みをより薄くして、適切な可撓性を付与することができるとともに、ハンドリング性が困難で、かつ、位置決めミスやパターニング時の撓み等の問題が生じやすいガラスフィルム２に対して、後述する特質を備えた支持ガラス３を使用することで電子デバイス製造関連処理等を容易に行うことができる。ガラスフィルム２の厚みが５μｍ未満であると、ガラスフィルム２の強度が不足がちになり、支持ガラス３からガラスフィルム２を剥離しにくくなるおそれがある。 The thickness of the glass film 2 is preferably 300 μm or less, more preferably 5 μm to 200 μm, and most preferably 5 μm to 100 μm. Thereby, the thickness of the glass film 2 can be made thinner and appropriate flexibility can be imparted, and handling properties are difficult, and problems such as positioning errors and bending during patterning are likely to occur. On the other hand, electronic device manufacturing related processing and the like can be easily performed by using the supporting glass 3 having the characteristics described later. If the thickness of the glass film 2 is less than 5 μm, the strength of the glass film 2 tends to be insufficient, and the glass film 2 may be difficult to peel from the support glass 3.
　支持ガラス３は、ガラスフィルム２と同様、ケイ酸塩ガラス、シリカガラス、ホウ珪酸ガラス、無アルカリガラス等が用いられる。支持ガラス３については、ガラスフィルム２との３０～３８０℃における熱膨張係数の差が、５×１０-7／℃以内のガラスを使用することが好ましい。これにより、電子デバイス製造関連処理の際に熱処理を伴ったとしても、膨張率の差による熱反りやガラスフィルム２の割れ等が生じ難く、安定した積層状態を維持できるガラスフィルム積層体１とすることが可能となる。支持ガラス３とガラスフィルム２とは、同一の組成を有するガラスを使用することが最も好ましい。 As the support glass 3, silicate glass, silica glass, borosilicate glass, non-alkali glass, or the like is used as in the glass film 2. For the supporting glass 3, it is preferable to use a glass having a difference in thermal expansion coefficient at 30 to 380 ° C. with respect to the glass film 2 within 5 × 10 −7 / ° C. As a result, even when heat treatment is involved in the processing related to electronic device manufacturing, thermal warp due to a difference in expansion coefficient, cracking of the glass film 2 and the like hardly occur, and the glass film laminate 1 can maintain a stable laminated state. It becomes possible. The supporting glass 3 and the glass film 2 are most preferably glass having the same composition.
　支持ガラス３の厚みは、４００μｍ以上であることが好ましい。支持ガラス３の厚みが４００μｍ未満であると、支持ガラス３を単体で取り扱う場合に、強度の面で問題が生じるおそれがある。支持ガラス３の厚みは、４００μｍ～７００μｍであることが好ましく、５００μｍ～７００μｍであることが最も好ましい。これによりガラスフィルム２を確実に支持することが可能となるとともに、支持ガラス３からガラスフィルム２を剥離する際に生じ得るガラスフィルム２の破損を効果的に抑制することが可能となる。尚、電子デバイス製造関連処理時に、図示しないセッター上に、ガラスフィルム積層体１を載置する場合は、支持ガラス３の厚みは４００μｍ未満（例えば３００μｍ等、ガラスフィルム２と同一の厚み）でも良い。 The thickness of the support glass 3 is preferably 400 μm or more. When the thickness of the supporting glass 3 is less than 400 μm, there is a possibility that a problem may occur in terms of strength when the supporting glass 3 is handled alone. The thickness of the supporting glass 3 is preferably 400 μm to 700 μm, and most preferably 500 μm to 700 μm. As a result, the glass film 2 can be reliably supported, and breakage of the glass film 2 that can occur when the glass film 2 is peeled from the support glass 3 can be effectively suppressed. In addition, when the glass film laminated body 1 is mounted on a setter (not shown) at the time of electronic device manufacturing-related processing, the thickness of the support glass 3 may be less than 400 μm (for example, 300 μm, the same thickness as the glass film 2). .
　本実施形態で使用されるガラスフィルム２及び支持ガラス３は、オーバーフローダウンドロー法、スロットダウンドロー法、フロート法によって成形されていることが好ましい。これらの成形法であると、支持ガラス成形時に、板ガラスの両端部に肉厚の耳部が形成されることがあるが、当該耳部を突出部とすることができる。これにより、突出部を作製する工程を省略することが可能となる。無論、これらの成形法を使用したとしても、耳部を除去した後の支持ガラスの端部に、新たに突出部を形成してもよい。特に、図２に示すオーバーフローダウンドロー法は、成形時にガラス板の両面が、成形部材と接触しない成形法であり、得られたガラス板の両面（透光面）には傷が生じ難く、研磨しなくても高い表面品位を得ることができる。 The glass film 2 and the support glass 3 used in the present embodiment are preferably formed by an overflow down draw method, a slot down draw method, or a float method. With these molding methods, thick ears may be formed at both ends of the plate glass during molding of the supporting glass, but the ears can be used as protrusions. Thereby, it becomes possible to omit the process of producing a protrusion part. Of course, even if these forming methods are used, a protruding portion may be newly formed at the end of the supporting glass after the ear portion is removed. In particular, the overflow downdraw method shown in FIG. 2 is a molding method in which both surfaces of the glass plate do not come into contact with the molded member at the time of molding, and the both surfaces (translucent surface) of the obtained glass plate are hardly scratched and polished. Even if not, high surface quality can be obtained.
　図２に示すオーバーフローダウンドロー法において、成形炉４内の断面が楔型の成形体４１の下端部４２から流下した直後の板ガラスＧは、冷却ローラ４３によって幅方向の収縮が規制されながら下方へ引き伸ばされて所定の厚みまで薄くなる。次に、前記所定厚みに達したガラスリボンＧを徐冷炉（アニーラ）で徐々に冷却し、ガラスリボン（Ｇ）の熱歪を除き、ガラスリボン（Ｇ）を所定寸法に切断することにより、ガラスフィルム２及び支持ガラス３が夫々成形される。 In the overflow down draw method shown in FIG. 2, the sheet glass G immediately after the cross section in the forming furnace 4 flows down from the lower end portion 42 of the wedge-shaped formed body 41 is lowered while the shrinkage in the width direction is restricted by the cooling roller 43. It is stretched and thinned to a predetermined thickness. Next, the glass ribbon G that has reached the predetermined thickness is gradually cooled in a slow cooling furnace (annealer), the thermal distortion of the glass ribbon (G) is removed, and the glass ribbon (G) is cut into a predetermined size, thereby forming a glass film. 2 and the supporting glass 3 are respectively formed.
　図１では、支持ガラス３がガラスフィルム２から食み出すように積層されている。これにより、ガラスフィルム２の端辺２１が、図示しない位置決めピン等に打突することで、ガラスフィルム２が破損することを防止することができる。この場合、支持ガラス３のガラスフィルム２からの食み出し量は、０．５～３０ｍｍであることが好ましく、０．５～５ｍｍであることがより好ましい。支持ガラス３の食み出し量を少なくすることで、ガラスフィルム２の有効面をより広く確保することができる。このような観点から、支持ガラス３のガラスフィルム２からの食み出し量は、０ｍｍであってもよい。ガラスフィルム積層体１において、４辺全てにおいて、支持ガラス３がガラスフィルム２から食み出していることが好ましく、少なくとも、支持ガラス３の端辺３２の近傍に突出部３１が形成されている部分については、支持ガラス３がガラスフィルム２よりも食み出していることが好ましい。 In FIG. 1, the supporting glass 3 is laminated so as to protrude from the glass film 2. Thereby, it can prevent that the glass film 2 breaks because the edge 21 of the glass film 2 collides with the positioning pin etc. which are not shown in figure. In this case, the protruding amount of the supporting glass 3 from the glass film 2 is preferably 0.5 to 30 mm, and more preferably 0.5 to 5 mm. By reducing the amount of protrusion of the supporting glass 3, the effective surface of the glass film 2 can be secured more widely. From such a viewpoint, the protrusion amount of the supporting glass 3 from the glass film 2 may be 0 mm. In the glass film laminate 1, it is preferable that the support glass 3 protrudes from the glass film 2 on all four sides, and at least a portion where the protruding portion 31 is formed in the vicinity of the end 32 of the support glass 3. About, it is preferable that the support glass 3 protrudes from the glass film 2.
　図１に示される通り、支持ガラス３の端辺３２の近傍には、ガラスフィルム２側へ厚みｔだけ突出する突出部３１が形成されている。これにより、離間しているガラスフィルム２の端辺２１を基点として、支持ガラス３からガラスフィルム２を容易に剥離することができる。突出部３１は、支持ガラス３の端辺３２の一部の近傍に形成されていてもよく、支持ガラス３の端辺３２の全体に沿って形成されていてもよい。また、多角形状あるいは矩形状の支持ガラス３の１辺のみに形成されていてもよいが、隣り合う２辺や対向する２辺、また、４辺全てに設けられていてもよい。前述の通り、突出部３１は、支持ガラス３の端辺３２の近傍に設けられているが、ここで、「支持ガラス３の端辺３２の近傍」とは、支持ガラス３の端辺３２と突出部３１の外側面３１１とが同一平面上となるように配置される場合も含む。 As shown in FIG. 1, a protrusion 31 is formed in the vicinity of the end 32 of the support glass 3 so as to protrude toward the glass film 2 by a thickness t. Thereby, the glass film 2 can be easily peeled off from the support glass 3 with the end side 21 of the glass film 2 being separated from the base point. The protruding portion 31 may be formed in the vicinity of a part of the end side 32 of the support glass 3 or may be formed along the entire end side 32 of the support glass 3. Moreover, although it may be formed only on one side of the support glass 3 having a polygonal shape or a rectangular shape, it may be provided on two adjacent sides, two opposite sides, or all four sides. As described above, the protruding portion 31 is provided in the vicinity of the end side 32 of the support glass 3. Here, “the vicinity of the end side 32 of the support glass 3” refers to the end side 32 of the support glass 3. The case where it arrange | positions so that the outer surface 311 of the protrusion part 31 may become on the same plane is also included.
　突出部３１の厚みｔは、０．１～１００μｍであることが好ましく、０．１～２０μｍであることがより好ましく、１～１０μｍであることが、最も好ましい。これにより、後述する剥離領域１１を適切に作製することができる。また、ガラスフィルム２が、端辺２１周辺で大きく変形することを防止することができる。 The thickness t of the protrusion 31 is preferably 0.1 to 100 μm, more preferably 0.1 to 20 μm, and most preferably 1 to 10 μm. Thereby, the peeling area | region 11 mentioned later can be produced appropriately. Further, the glass film 2 can be prevented from being greatly deformed around the end side 21.
　突出部３１は、断面矩形状に形成されていることが好ましく、突出部３１の隅部（特に、突出部３１の内側面３１２の上端部）がＣ面取りやＲ面取り（断面円形の面取り）等によって面取りされた形状であることが好ましい。これにより、突出部３１とガラスフィルム２とが、接触箇所１３にて線接触することとなり、より円滑に図示しない剥離治具等を剥離領域１１に挿入することができる。特に、突出部３１が、四隅が面取りされた形状や、図４で示される通り側面が凸曲面で形成されている形状であると、突出部３１の割れや欠けを防止することができ、より好ましい。突出部３１を、断面多角形状に形成しても良く、断面円形状や楕円形状に形成してもよい。 The protrusion 31 is preferably formed in a rectangular cross section, and the corner of the protrusion 31 (particularly, the upper end portion of the inner side surface 312 of the protrusion 31) is C chamfered or R chamfered (circular chamfered in cross section) or the like. It is preferable that the shape is chamfered. Thereby, the protrusion part 31 and the glass film 2 will be line-contacted in the contact location 13, and the peeling jig | tool etc. which are not shown in figure can be inserted in the peeling area | region 11 more smoothly. In particular, when the protruding portion 31 has a shape in which the four corners are chamfered or a shape in which the side surface is formed with a convex curved surface as shown in FIG. 4, the protruding portion 31 can be prevented from being cracked or chipped. preferable. The protrusion 31 may be formed in a polygonal cross section, or may be formed in a circular cross section or an elliptical cross section.
　突出部３１は、ガラスフィルム２よりも厚みの小さいガラステープで作製されていることが好ましい。これにより、支持ガラスとは別体のガラステープの厚みや幅を自由に設定することで、所望の突出部３１を作製することができる。 The protrusion 31 is preferably made of a glass tape having a thickness smaller than that of the glass film 2. Thereby, the desired protrusion part 31 is producible by setting freely the thickness and width | variety of a glass tape separate from support glass.
　突出部３１は、ガラスフィルム２や支持ガラス３と同様、ケイ酸塩ガラス、シリカガラス、ホウ珪酸ガラス、無アルカリガラス等が用いられる。突出部３１についても、ガラスフィルム２や支持ガラス３との３０～３８０℃における熱膨張係数の差が、５×１０-7／℃以内のガラスを使用することが好ましい。これにより、電子デバイス製造関連処理の際に熱処理を伴ったとしても、膨張率の差による熱反りや突出部３１の割れ等が生じ難く、安定した積層状態を維持できるガラスフィルム積層体１とすることが可能となる。突出部３１と支持ガラス３とガラスフィルム２とは、同一の組成を有するガラスを使用することが最も好ましい。突出部３１の材質は、前述のガラスには限定されず、樹脂や金属等を使用しても良い。 As for the protrusion part 31, the silicate glass, the silica glass, the borosilicate glass, the alkali free glass etc. are used like the glass film 2 and the support glass 3. FIG. For the protrusion 31, it is preferable to use a glass having a difference in thermal expansion coefficient at 30 to 380 ° C. with respect to the glass film 2 or the supporting glass 3 within 5 × 10 −7 / ° C. As a result, even when heat treatment is involved in the electronic device manufacturing related process, thermal warp due to a difference in expansion coefficient, cracking of the protruding portion 31, and the like are unlikely to occur, and the glass film laminate 1 can maintain a stable laminated state. It becomes possible. It is most preferable to use the glass having the same composition for the protruding portion 31, the supporting glass 3, and the glass film 2. The material of the protrusion 31 is not limited to the glass described above, and resin, metal, or the like may be used.
　突出部３１としてガラステープを使用する場合は、ガラステープはリドロー法で成形されていることが好ましい。母材の厚みや幅、延伸成形の引き落とし率等を適宜設計することで、容易に所望の幅と厚みを有する突出部３１を成形することができる。なお、本明細書中で「ガラステープ」とは、筋状（リボン状やテープ状）のガラスシートのことを意味し、好ましくはリドロー法で成形される。 When a glass tape is used as the projecting portion 31, the glass tape is preferably formed by a redraw method. The protrusion 31 having a desired width and thickness can be easily formed by appropriately designing the thickness and width of the base material, the draw-down rate of stretch molding, and the like. In the present specification, “glass tape” means a glass sheet having a stripe shape (ribbon shape or tape shape), and is preferably formed by a redraw method.
　図３は、突出部３１（ガラステープ）を作製する際に使用されるリドロー法を示す図である。 FIG. 3 is a diagram illustrating a redraw method used when the protruding portion 31 (glass tape) is manufactured.
　母材ガラス５１を準備し、図３に示すように延伸成形装置５にセットする。ヒータ５２で母材ガラス５１を加熱し、母材ガラス５１の粘度が６．０～８．０ｄＰａ・ｓとなる温度で、厚み１００μｍ以下になるように引き出すことでガラステープ５３を成形することができる。延伸成形の延伸力は、樹脂性のプーリー５４の回転力で制御され、成形されたガラステープ５３は、巻き取りドラム５５で巻き取られる。これにより、プーリー５４は、ガラステープ５３の片面しか接触していないため、表面品位の高いガラステープ５３を得ることができる。この場合、ガラステープ５３のプーリー５４と接していない面が、支持ガラス２と接触するように、突出部３１を形成することが好ましい。 A base glass 51 is prepared and set in the stretch molding apparatus 5 as shown in FIG. It is possible to form the glass tape 53 by heating the base glass 51 with the heater 52 and pulling out the base glass 51 at a temperature where the viscosity of the base glass 51 is 6.0 to 8.0 dPa · s so that the thickness is 100 μm or less. it can. The stretching force of the stretch molding is controlled by the rotational force of the resin pulley 54, and the molded glass tape 53 is wound up by the winding drum 55. Thereby, since only the single side | surface of the glass tape 53 is contacting the pulley 54, the glass tape 53 with a high surface quality can be obtained. In this case, it is preferable to form the protruding portion 31 so that the surface of the glass tape 53 that is not in contact with the pulley 54 is in contact with the support glass 2.
　図３では、突出部３１として、延伸成形によって作製されたガラステープを例に挙げて説明を行ったが、この形態には限定されない。例えば、ガラスフィルムを公知のレーザー割断やレーザー溶断法によって、短冊状に切断されたものを使用しても良い。 In FIG. 3, the protruding portion 31 has been described by taking a glass tape produced by stretch molding as an example, but is not limited to this form. For example, you may use what cut | disconnected the glass film by the well-known laser cutting or the laser fusing method in strip shape.
　図１に示す実施形態においては、ガラスフィルム２と支持ガラス３との両者がガラスのみからなる場合に、その両者２、３を直接面接触させることで積層させているが、この形態には限定されず、例えば、支持ガラス３のガラスの上面３１上にシリコーン樹脂やＥＶＡ、ＰＶＢ、アクリル、光学透明粘着剤等の樹脂層を形成しても良いし、ガラスフィルム２の剥離性を向上させるために、支持ガラス３のガラスの上面３１上にＩＴＯ、ＺｒＯ2等の無機酸化物薄膜やＴｉ等の金属薄膜を形成しても良い。また、ガラスフィルム２のガラスの下面２２にも、ＥＶＡ、ＰＶＢ、アクリル、光学透明粘着剤等の樹脂層を形成しても良く、ＩＴＯ、ＺｒＯ2等の無機酸化物薄膜や、ＳｉＮ、ＴｉＮ、ＣｒＮ、ＴｉＡｌＮ、ＡｌＣｒＮ等の窒化膜、Ｔｉ等の金属薄膜、ダイヤモンドライクカーボン、ＴｉＣ、ＷＣ等の炭化膜、ＭｇＦ2等のフッ化膜を形成しても良く、ＨＭＤＳ等を塗布することによって有機膜を形成しても良い。この場合、樹脂層や無機薄膜形成後の面が、ガラスフィルムや支持ガラスの合わせ面となる。加えて、支持ガラス３のガラス上に上述した無機薄膜や樹脂層を形成する場合においては、無機薄膜や樹脂層の形成後に突出部３１を形成しても良く、無機薄膜や樹脂層の形成前に突出部３１を形成しても良い。 In the embodiment shown in FIG. 1, when both the glass film 2 and the supporting glass 3 are made of only glass, the two films 2 and 3 are laminated by direct surface contact. For example, a resin layer such as silicone resin, EVA, PVB, acrylic, or an optical transparent adhesive may be formed on the upper surface 31 of the glass of the support glass 3, and the peelability of the glass film 2 may be improved. In addition, an inorganic oxide thin film such as ITO or ZrO 2 or a metal thin film such as Ti may be formed on the upper surface 31 of the supporting glass 3. In addition, a resin layer such as EVA, PVB, acrylic, or an optical transparent adhesive may be formed on the lower surface 22 of the glass of the glass film 2, and an inorganic oxide thin film such as ITO or ZrO 2 , SiN, TiN, A nitride film such as CrN, TiAlN, or AlCrN, a metal thin film such as Ti, a carbide film such as diamond-like carbon, TiC or WC, or a fluoride film such as MgF 2 may be formed. A film may be formed. In this case, the surface after the resin layer or inorganic thin film is formed becomes the mating surface of the glass film or the supporting glass. In addition, in the case where the inorganic thin film or the resin layer described above is formed on the glass of the supporting glass 3, the protruding portion 31 may be formed after the inorganic thin film or the resin layer is formed, and before the inorganic thin film or the resin layer is formed. You may form the protrusion part 31 in this.
　突出部３１が支持ガラス３とは別体である場合において、支持ガラス３上に突出部３１を固定する方法は、樹脂等による接着剤を使用しての接着でもよく、加熱を行うことで、支持ガラス３上に突出部３１を接着してもよい。特に、前述のリドロー法で突出部３１としてのガラステープを作製した場合は、ガラステープの表面粗さＲａを、２．０ｎｍ以下とすることで、支持ガラス上に直接ガラステープを貼り合わせることができ、より低温の加熱であったとしても、支持ガラス３上に突出部３１を接着させることができる。ガラステープの表面粗さＲａは、１．０ｎｍ以下であることが好ましく、０．５ｎｍ以下であることがより好ましく、０．２ｎｍ以下であることが最も好ましい。 In the case where the protruding portion 31 is separate from the supporting glass 3, the method of fixing the protruding portion 31 on the supporting glass 3 may be bonding using an adhesive such as a resin, and by heating, The protrusion 31 may be bonded onto the support glass 3. In particular, when the glass tape as the protrusion 31 is produced by the above-described redraw method, the glass tape can be directly bonded onto the supporting glass by setting the surface roughness Ra of the glass tape to 2.0 nm or less. Even if it is a lower temperature heating, the protrusion part 31 can be adhere | attached on the support glass 3. FIG. The surface roughness Ra of the glass tape is preferably 1.0 nm or less, more preferably 0.5 nm or less, and most preferably 0.2 nm or less.
　図４は、本発明に係るガラスフィルム積層体の他の実施形態を示した図である。 FIG. 4 is a view showing another embodiment of the glass film laminate according to the present invention.
　本発明に係るガラスフィルム積層体１は、図４に示す通り、支持ガラス３とは別体として形成された突出部３１の外側面３１１と内側面とが、断面略半円形状の凸曲面とされている。この突出部３１は、支持ガラス３の端辺３２から間隔３４を設けて配置されており、ガラスフィルム２の端辺２１が、支持ガラス３の端辺３２と突出部３１の外側面３１１との間（間隔３４の上方）に位置するように、支持ガラス３上に積層されている。これにより、ガラスフィルム２の端辺２１が、支持ガラス３の上面３３から離間することとなるため、ガラスフィルム２を支持ガラス３から剥離する際には、ガラスフィルム２の端辺２１を直接把持し易くなる。この場合、ガラスフィルム２の端辺２１の近傍における下面は、突出部３１の上面に面接触している。そして、この場合も、ガラスフィルム２の端辺２１の近傍には、ガラスフィルム２の下面と支持ガラス３の上面と突出部３１の内側面とで囲繞された剥離領域が形成されている。 As shown in FIG. 4, the glass film laminate 1 according to the present invention has a convex curved surface in which the outer side surface 311 and the inner side surface of the projecting portion 31 formed separately from the supporting glass 3 are substantially semicircular in cross section. Has been. The protruding portion 31 is disposed with a distance 34 from the end side 32 of the supporting glass 3, and the end side 21 of the glass film 2 is formed between the end side 32 of the supporting glass 3 and the outer side surface 311 of the protruding portion 31. It is laminated | stacked on the support glass 3 so that it may be located in between (above the space | interval 34). As a result, the edge 21 of the glass film 2 is separated from the upper surface 33 of the support glass 3. Therefore, when the glass film 2 is peeled from the support glass 3, the edge 21 of the glass film 2 is directly gripped. It becomes easy to do. In this case, the lower surface in the vicinity of the edge 21 of the glass film 2 is in surface contact with the upper surface of the protruding portion 31. Also in this case, a separation region surrounded by the lower surface of the glass film 2, the upper surface of the support glass 3, and the inner surface of the protruding portion 31 is formed in the vicinity of the end side 21 of the glass film 2.
　図５、図６は、本実施形態に係るガラスフィルム積層体１の平面図である。 5 and 6 are plan views of the glass film laminate 1 according to the present embodiment.
　本発明に係るガラスフィルム積層体１は、図５に示す通り、突出部３１の長手方向の長さが、ガラスフィルム２の端辺２１の長さよりも長くなっており、突出部３１の長手方向両端が、ガラスフィルム２の端辺２１の長手方向両端から食み出している。また、逆に、図６に示す形態では、突出部３１の長手方向の長さが、ガラスフィルム２の端辺２１の長さよりも短くなっており、ガラスフィルム２の端辺２１の長手方向両端が、突出部３１の長手方向両端から食み出している。図５、図６には示していないが、突出部３１の長手方向の長さを、ガラスフィルム２の端辺２１の長さと等しくすることで、突出部３１の長手方向両端と、ガラスフィルム２の端辺２１の長手方向両端とを一致させても良い。これらの構成を有することにより、剥離領域１１の両側端部、つまり剥離領域１１を形成している空間部の長手方向両端部が開放されているため、その開放されている両側端部から針金等の剥離領域１１よりも小径の剥離治具を挿入することができ、ガラスフィルム２と突出部３１との接触箇所１３を経由せずに剥離治具を剥離領域１１に挿入することもできる。また、図５、図６の形態では、突出部３１の長手方向の長さが支持ガラス３の端辺３２の長さよりも短くなっており、支持ガラス３の端辺３２の長手方向両端が突出部３１の長手方向両端から食み出しているが、突出部３１の長手方向の長さを、支持ガラス３の端辺３２の長さと同一にして、突出部３１の長手方向両端を支持ガラス３の端辺３２の長手方向両端に一致させても良い。 In the glass film laminate 1 according to the present invention, as shown in FIG. 5, the length in the longitudinal direction of the protruding portion 31 is longer than the length of the end side 21 of the glass film 2. Both ends protrude from both ends in the longitudinal direction of the end side 21 of the glass film 2. On the other hand, in the embodiment shown in FIG. 6, the length in the longitudinal direction of the protruding portion 31 is shorter than the length of the end side 21 of the glass film 2. However, the protrusion 31 protrudes from both ends in the longitudinal direction. Although not shown in FIGS. 5 and 6, by making the length in the longitudinal direction of the protruding portion 31 equal to the length of the end side 21 of the glass film 2, both ends in the longitudinal direction of the protruding portion 31 and the glass film 2. The both ends in the longitudinal direction of the end side 21 may coincide with each other. By having these configurations, both end portions of the peeling region 11, that is, both longitudinal end portions of the space portion forming the peeling region 11 are opened. A peeling jig having a diameter smaller than that of the peeling region 11 can be inserted, and the peeling jig can be inserted into the peeling region 11 without going through the contact portion 13 between the glass film 2 and the protruding portion 31. 5 and 6, the length in the longitudinal direction of the protruding portion 31 is shorter than the length of the end side 32 of the support glass 3, and both ends in the longitudinal direction of the end side 32 of the support glass 3 protrude. Although protruding from both longitudinal ends of the portion 31, the longitudinal length of the protruding portion 31 is made the same as the length of the end side 32 of the supporting glass 3, and both longitudinal ends of the protruding portion 31 are supported by the supporting glass 3. You may make it correspond to the longitudinal direction both ends of the edge 32 of this.
　図７は、本発明に係る電子デバイス（ガラスフィルム上に製造関連処理を施した電子デバイス）の製造方法のフローチャートを示した図である。なお、以下の説明での符号は図１～図６で用いたものと同じである。 FIG. 7 is a view showing a flowchart of a manufacturing method of an electronic device (an electronic device subjected to manufacturing-related processing on a glass film) according to the present invention. The reference numerals used in the following description are the same as those used in FIGS.
　本発明に係る電子デバイスの製造方法は、支持ガラス３の端辺３２の近傍にガラステープを配置して突出部３１を形成する第１の工程と、突出部３１とガラスフィルム２とが接触するようにガラスフィルム２を支持ガラス３上に積層して支持ガラス３と突出部３１とガラスフィルム２とで囲繞された剥離領域１１を有するガラスフィルム積層体１を作製する第２の工程と、ガラスフィルム積層体１のガラスフィルム２側に製造関連処理を行う第３の工程と、製造関連処理後に剥離領域１１を広げて支持ガラス３から処理済のガラスフィルムを剥離する第４の工程と、を有する。 In the method for manufacturing an electronic device according to the present invention, the first step of forming a protruding portion 31 by placing a glass tape in the vicinity of the edge 32 of the supporting glass 3, and the protruding portion 31 and the glass film 2 are in contact with each other. The glass film 2 is laminated on the support glass 3 as described above, and a glass film laminate 1 having a peeling region 11 surrounded by the support glass 3, the protruding portion 31, and the glass film 2 is produced, and glass A third step of performing manufacturing-related processing on the glass film 2 side of the film laminate 1 and a fourth step of peeling the treated glass film from the supporting glass 3 by expanding the peeling region 11 after the manufacturing-related processing. Have.
　本発明に係る第１の工程（Ｓ１）は、支持ガラス３の端辺３２の近傍にガラステープを配置して突出部３１を形成する工程である。ガラステープが前述の図３で説明したリドロー法によって作製された場合は、プーリー５４と接触していない側の面が、支持ガラス３の上面３３と接触するように、支持ガラスの端辺３２に沿ってガラステープを配置する。ガラステープは、プーリー５４と接触していない側の面の方が、プーリー５４と接触した面よりも、表面状態が良好であるため、後述する突出部３１と支持ガラス３との接着工程での加熱温度を低減させることができる。また、プーリー５４と接触した面は、表面状態が微かに悪化しているため、ガラスフィルム２と突出部３１とが接着することを防止することができ、ガラスフィルム２を良好に剥離することができる。 The first step (S1) according to the present invention is a step of forming the protruding portion 31 by placing a glass tape in the vicinity of the end side 32 of the supporting glass 3. When the glass tape is manufactured by the redraw method described with reference to FIG. 3 described above, the end surface 32 of the support glass is arranged so that the surface on the side not in contact with the pulley 54 is in contact with the upper surface 33 of the support glass 3. Place the glass tape along. The surface of the glass tape that is not in contact with the pulley 54 is in a better surface state than the surface that is in contact with the pulley 54, so that in the bonding step between the protruding portion 31 and the support glass 3 described later. The heating temperature can be reduced. Moreover, since the surface state which contacted the pulley 54 has deteriorated slightly, it can prevent that the glass film 2 and the protrusion part 31 adhere | attach, and can peel the glass film 2 favorably. it can.
　本発明に係る第１の工程（Ｓ１）は、ガラステープの配置後に支持ガラス３を加熱して支持ガラス３と突出部３１とを接着させる突出部形成工程を含んでいてもよい。支持ガラス３を加熱する方法は、支持ガラス３を公知の焼成炉に投入することで行ってもよく、支持ガラス３の上面３３と突出部３１との接触面を公知のレーザー等で加熱することで行っても良い。前述の通り、突出部３１と支持ガラス３の上面３３の表面粗さＲａが小さい程低温加熱で接着することができる。 The first step (S1) according to the present invention may include a protruding portion forming step in which the supporting glass 3 is heated to adhere the supporting glass 3 and the protruding portion 31 after the glass tape is arranged. The method of heating the support glass 3 may be performed by putting the support glass 3 into a known baking furnace, and heating the contact surface between the upper surface 33 of the support glass 3 and the protruding portion 31 with a known laser or the like. You can go there. As described above, the smaller the surface roughness Ra of the protrusion 31 and the upper surface 33 of the support glass 3, the lower the temperature can be bonded.
　本発明に係る第２の工程（Ｓ２）は、突出部３１とガラスフィルム２とが接触するようにガラスフィルム２と支持ガラス３とをそれぞれの合わせ面２２、３３同士を面接触させて積層することで、支持ガラス３と突出部３１とガラスフィルム２とで囲繞され且つガラスフィルム２と支持ガラス３との両合わせ面２２，３３が非接触状態とされた剥離領域１４を有するガラスフィルム積層体１を作製する工程である。支持ガラス３上にガラスフィルム２を積層する方法については、特に限定されず、公知のラミネート機械等を使用して、支持ガラス３上にガラスフィルム２を積層することができる。 In the second step (S2) according to the present invention, the glass film 2 and the supporting glass 3 are laminated by bringing the mating surfaces 22 and 33 into surface contact so that the protruding portion 31 and the glass film 2 are in contact with each other. By this, the glass film laminated body which has the peeling area | region 14 which was enclosed by the support glass 3, the protrusion part 31, and the glass film 2, and both the joining surfaces 22 and 33 of the glass film 2 and the support glass 3 were made into the non-contact state. 1 is a process of manufacturing 1. The method for laminating the glass film 2 on the supporting glass 3 is not particularly limited, and the glass film 2 can be laminated on the supporting glass 3 using a known laminating machine or the like.
　本発明に係る第３の工程（Ｓ３）は、ガラスフィルム積層体１のガラスフィルム２側に、製造関連処理を行う工程である。 The third step (S3) according to the present invention is a step of performing manufacturing-related processing on the glass film 2 side of the glass film laminate 1.
　ガラスフィルム２側に行われる製造関連処理としては、例えば、デバイス、特に電子デバイス製造において、スパッタ法等による成膜処理、素子等を封止する封止処理、ガラスフリットの焼結処理等が挙げられる。また、ガラスフィルム２側に行われる製造関連処理として、スパッタ法等による反射防止膜、透過防止膜等の成膜処理等も挙げられる。 Examples of the manufacturing-related processing performed on the glass film 2 side include film formation processing by sputtering, etc., sealing processing for sealing elements, sintering processing for glass frit, etc. in device, particularly electronic device manufacturing. It is done. Examples of the manufacturing-related process performed on the glass film 2 side include a film forming process such as an antireflection film or a transmission preventing film by a sputtering method or the like.
　上記第３の工程で用いる製造関連処理は、単一の処理手段で構成されたものであってもよいし、複数の同一の又は異なる処理手段で構成されたものであっても良い。また、一部に加熱を伴う製造関連処理が含まれていてもよく、洗浄処理等の加熱を伴わない製造関連処理が含まれていてもよい。 The manufacturing-related process used in the third step may be constituted by a single processing means, or may be constituted by a plurality of identical or different processing means. Moreover, a manufacturing related process with heating may be included in part, and a manufacturing related process without heating such as a cleaning process may be included.
　また、図示はしないが、上記第３の工程は、電子デバイス製造関連処理を行うことで、第２の工程で作製されたガラスフィルム積層体１のガラスフィルム２上に素子を形成し、図示しないカバーガラスでガラスフィルム２上に形成された素子を封止することで支持ガラス付電子デバイスを作製しても良い。なお、カバーガラスにも、本発明のガラスフィルム積層体１を用いることができる。 Although not shown, the third step forms an element on the glass film 2 of the glass film laminate 1 produced in the second step by performing an electronic device manufacturing related process, not shown. You may produce an electronic device with support glass by sealing the element formed on the glass film 2 with a cover glass. In addition, the glass film laminated body 1 of this invention can be used also for a cover glass.
　本発明に係る第４の工程（Ｓ４）は、支持ガラス３から処理済のガラスフィルムを剥離する工程である。 The fourth step (S4) according to the present invention is a step of peeling the treated glass film from the support glass 3.
　支持ガラス３から処理済のガラスフィルムを剥離する際には、図示しない剥離治具を使用しても良い。剥離治具を使用することで、剥離治具を円滑に剥離領域１１まで挿入することができ、引き続き剥離治具を挿入し続けることで、剥離領域１１を広げることができる。支持ガラス３から処理済のガラスフィルムを剥離する際に、剥離領域１１に水を含んだ流体(水の相対湿度が高いガスや水のミストを含んだガス、もしくは液体の水そのものや水に界面活性剤などを含有させた水溶液など)を供給しても良いし、ガラスフィルム積層体１や上述する支持ガラス付電子デバイスを水中に浸漬してもよく、水中に浸漬した際には、超音波を印加しても良い。 When peeling the treated glass film from the support glass 3, a peeling jig (not shown) may be used. By using the peeling jig, the peeling jig can be smoothly inserted up to the peeling area 11, and by continuing to insert the peeling jig, the peeling area 11 can be expanded. When the treated glass film is peeled off from the supporting glass 3, a fluid containing water in the peeling region 11 (a gas containing water having a high relative humidity, a gas containing water mist, or liquid water itself or water is interfaced. An aqueous solution containing an activator or the like) may be supplied, or the glass film laminate 1 or the electronic device with supporting glass described above may be immersed in water. May be applied.
　剥離治具の形状は、糸状の部材でもよいが、シート状、帯状、板状、短冊状等、厚みが少なく剥離進行方向に幅広な部材を使用することが好ましい。具体的には、剥離治具の厚みが０．０１ｍｍ～１ｍｍであることが好ましく、０．１ｍｍ～０．５ｍｍであることがより好ましい。これにより、処理済のガラスフィルムと突出部３１との接触箇所１３を円滑に剥離治具が通過することができ、剥離領域１１に剥離治具を円滑に挿入することができる。剥離治具の幅は、剥離の対象となるガラスフィルム積層体１の面積にも依存するが、少なくともガラスフィルム積層体１よりも剥離進行方向において幅広であることが好ましい。 The shape of the peeling jig may be a thread-like member, but it is preferable to use a member having a small thickness and a wide width in the peeling progress direction, such as a sheet shape, a band shape, a plate shape or a strip shape. Specifically, the thickness of the peeling jig is preferably 0.01 mm to 1 mm, and more preferably 0.1 mm to 0.5 mm. As a result, the peeling jig can smoothly pass through the contact portion 13 between the treated glass film and the protruding portion 31, and the peeling jig can be smoothly inserted into the peeling region 11. Although the width | variety of a peeling jig | tool also depends on the area of the glass film laminated body 1 used as the object of peeling, it is preferable that it is wider than the glass film laminated body 1 at least in the peeling progress direction.
　剥離治具の材質は、剛性を有するアルミニウム、ステンレス等の金属を使用することが可能であるが、可撓性を有するポリエチレンやアクリル等の樹脂フィルムを使用することが好ましく、フッ素フィルム等の疎水性の樹脂シートであることがより好ましい。 The material of the peeling jig can be a rigid metal such as aluminum or stainless steel, but it is preferable to use a flexible resin film such as polyethylene or acrylic, and a hydrophobic film such as a fluorine film. The resin sheet is more preferable.
　剥離治具を用いない剥離方法としては、例えば処理済のガラスフィルムをパッド等により吸着させ、該パッドを支持ガラス３から離間させる方向に動作させることで、処理済のガラスフィルムを支持ガラス３から剥離させる方法を用いても良い。 As a peeling method that does not use a peeling jig, for example, a treated glass film is adsorbed by a pad or the like, and the treated glass film is moved from the supporting glass 3 by moving the pad in a direction separating from the supporting glass 3. A peeling method may be used.
　上記第１の工程から第４の工程を実行することで、ガラスフィルム上に製造関連処理を施した電子デバイスを得ることができ、適宜他の電子デバイス等に、当該ガラスフィルム上に製造関連処理を施した電子デバイスを組み込むことができる。加えて、前述の通り、上記第３の工程で液晶パネルや有機ＥＬパネルを直接作製することで、支持ガラス付電子デバイスを作製し、支持ガラスを剥離することで電子デバイスを作製することもできる。 By performing the first step to the fourth step, an electronic device subjected to manufacturing-related processing on the glass film can be obtained, and the manufacturing-related processing on the glass film is appropriately performed on another electronic device or the like. It is possible to incorporate an electronic device subjected to the above. In addition, as described above, a liquid crystal panel or an organic EL panel can be directly produced in the third step to produce an electronic device with a supporting glass, and an electronic device can be produced by peeling the supporting glass. .
　第３の工程が加熱を伴う製造関連処理である場合に、第１の工程におけるガラステープの配置後に行う加熱処理の加熱温度は、第３の工程における製造関連処理の加熱温度よりも、高温であることが好ましい。これにより、第４の工程時に支持ガラスから処理済のガラスフィルムを剥離する際に、ガラステープが処理済ガラスフィルムと接着することで、支持ガラスからガラステープが剥離することを防止することができる。 When the third process is a manufacturing-related process involving heating, the heating temperature of the heating process performed after the placement of the glass tape in the first process is higher than the heating temperature of the manufacturing-related process in the third process. Preferably there is. Thereby, when peeling a processed glass film from support glass at the time of a 4th process, it can prevent that a glass tape peels from support glass because a glass tape adheres to a processed glass film. .
　第３の工程の製造関連処理温度よりも、第１の工程でガラステープの配置後に行う加熱処理の加熱温度が５０℃以上高いことが好ましく、１００℃以上高いことがより好ましい。これにより、支持ガラスからガラステープが剥離することを、より確実に防止することができる。例えば、第３の工程の製造関連処理が、透明導電膜等の成膜処理の場合、通常、第３の工程時に２５０～３５０℃まで加熱されるが、この場合、ガラステープの配置後に行う加熱処理の加熱温度が、３５０～４５０℃であることが好ましい。 It is preferable that the heating temperature of the heat treatment performed after the placement of the glass tape in the first step is 50 ° C. or higher, and more preferably 100 ° C. or higher than the manufacturing-related processing temperature in the third step. Thereby, it can prevent more reliably that a glass tape peels from support glass. For example, when the manufacturing-related process in the third step is a film forming process such as a transparent conductive film, it is usually heated to 250 to 350 ° C. during the third step. In this case, the heating performed after the glass tape is disposed. The heating temperature for the treatment is preferably 350 to 450 ° C.
　以下、本発明のガラスフィルム積層体を実施例に基づいて詳細に説明するが、本発明は、これらの実施例に限定されるものではない。 Hereinafter, although the glass film laminated body of this invention is demonstrated in detail based on an Example, this invention is not limited to these Examples.
　（実施例）
　支持ガラス、ガラスフィルム、ガラステープとして、日本電気硝子株式会社製の無アルカリガラス（ＯＡ－１０Ｇ、３０～３８０℃における熱膨張係数：３８×１０-7／℃）を使用した。オーバーフローダウンドロー法にて、支持ガラスとガラスフィルムを、リドロー法にてガラステープを製造した。支持ガラスとして、縦１１０ｍｍ、横１１０ｍｍ、厚み５００μｍの矩形状の板ガラスを準備した。ガラスフィルムとして、縦１００ｍｍ、横１００ｍｍ、厚み１００μｍの矩形状の透明なガラスを準備した。ガラステープとして、縦１００ｍｍ、横５ｍｍ、厚み５μｍの筋状のガラスシートを準備した。支持ガラスの１端辺から５ｍｍ離間させつつ、端辺に沿う方向にガラステープを支持ガラス上に設置することで、突出部を形成した。その後、支持ガラスを４００℃、３０分間熱処理を行った。熱処理後に、支持ガラスとガラスフィルムの洗浄を行い、支持ガラス上にガラスフィルムを積層したところ、ガラスフィルムの端辺が突出部上方で離間しつつ、ガラスフィルムと突出部の接触箇所から約２ｍｍに亘って剥離領域が形成されたガラスフィルム積層体が得られた。このガラスフィルム積層体からガラスフィルムの剥離を試みたところ、良好にガラスフィルムを剥離することができた。 (Example)
As the supporting glass, glass film, and glass tape, non-alkali glass (OA-10G, thermal expansion coefficient at 30 to 380 ° C .: 38 × 10 −7 / ° C.) manufactured by Nippon Electric Glass Co., Ltd. was used. A support tape and a glass film were produced by the overflow downdraw method, and a glass tape was produced by the redraw method. A rectangular plate glass having a length of 110 mm, a width of 110 mm, and a thickness of 500 μm was prepared as a supporting glass. A rectangular transparent glass having a length of 100 mm, a width of 100 mm, and a thickness of 100 μm was prepared as a glass film. A streaky glass sheet having a length of 100 mm, a width of 5 mm, and a thickness of 5 μm was prepared as a glass tape. A protrusion was formed by placing a glass tape on the support glass in a direction along the end side while being spaced 5 mm away from one end side of the support glass. Thereafter, the supporting glass was heat-treated at 400 ° C. for 30 minutes. After the heat treatment, the supporting glass and the glass film are washed, and the glass film is laminated on the supporting glass, so that the edge of the glass film is spaced above the protruding portion, and is about 2 mm from the contact point between the glass film and the protruding portion. The glass film laminated body in which the peeling area | region was formed over was obtained. When an attempt was made to peel the glass film from the glass film laminate, the glass film could be peeled well.
　（比較例）
　比較例として、支持ガラス上に突出部が形成されていないこと以外は、同一の条件のガラスフィルムを支持ガラス上に積層して、ガラスフィルムの剥離を試みたところ、ガラスフィルムの剥離が困難になったものがあり、剥離の途中でガラスフィルムが破損するものがあった。 (Comparative example)
As a comparative example, a glass film with the same conditions was laminated on a supporting glass except that no protrusion was formed on the supporting glass, and when peeling the glass film was attempted, it was difficult to peel off the glass film. Some glass films were damaged during peeling.
　本発明は、液晶ディスプレイや有機ＥＬディスプレイ等のフラットパネルディスプレイや太陽電池等のデバイスに使用されるガラス基板、及び有機ＥＬ照明のカバーガラスに好適に使用することができる。 The present invention can be suitably used for glass substrates used in flat panel displays such as liquid crystal displays and organic EL displays, devices such as solar cells, and cover glasses for organic EL lighting.
１　　ガラスフィルム積層体
１１　剥離領域
１２　面接触部
１３　接触箇所
１４　離間領域
２　　ガラスフィルム
２１　端辺
３　　支持ガラス
３１　突出部
３２　端辺
４　　成形炉
５　　延伸成形装置 DESCRIPTION OF SYMBOLS 1 Glass film laminated body 11 Peeling area | region 12 Surface contact part 13 Contact location 14 Separation area | region 2 Glass film 21 End side 3 Support glass 31 Projection part 32 End side 4 Molding furnace 5 Stretch molding apparatus

Claims (15)

  1. 　支持ガラスとガラスフィルムとを、それぞれの合わせ面を面接触させて積層したガラスフィルム積層体であって、
    　前記ガラスフィルムは前記支持ガラスから食み出しておらず、
    　前記支持ガラスの端辺近傍には、ガラスフィルム側に突出する突出部が設けられ、
    　前記ガラスフィルムは、前記突出部と接触しており、
    　前記ガラスフィルムの端辺近傍には、前記支持ガラスと前記突出部と前記ガラスフィルムとで囲繞され且つ前記支持ガラスとガラスフィルムとの両合わせ面が非接触状態とされた剥離領域が設けられていることを特徴とするガラスフィルム積層体。     It is a glass film laminate in which the supporting glass and the glass film are laminated by bringing the respective mating surfaces into surface contact with each other,
    The glass film does not protrude from the supporting glass,
    In the vicinity of the edge of the supporting glass, a protruding portion protruding to the glass film side is provided,
    The glass film is in contact with the protrusion,
    In the vicinity of the edge of the glass film, there is provided a peeling region that is surrounded by the support glass, the protruding portion, and the glass film and in which the mating surfaces of the support glass and the glass film are in a non-contact state. The glass film laminated body characterized by having.
  2. 　前記支持ガラスは、前記ガラスフィルムから食み出していることを特徴とする請求項１に記載のガラスフィルム積層体。 The glass film laminate according to claim 1, wherein the supporting glass protrudes from the glass film.
  3. 　前記突出部は、多角形状の支持ガラスの少なくとも１辺の端辺近傍に設けられており、
    前記突出部と前記ガラスフィルムとは、線接触していることを特徴とする請求項１または２に記載のガラスフィルム積層体。     The protrusion is provided in the vicinity of the end of at least one side of the polygonal support glass,
    The glass film laminate according to claim 1, wherein the protruding portion and the glass film are in line contact.
  4. 　前記多角形状の支持ガラスは、矩形状の支持ガラスであると共に、前記ガラスフィルムは、矩形状のガラスフィルムであることを特徴とする請求項３に記載のガラスフィルム積層体。 The glass film laminate according to claim 3, wherein the polygonal support glass is a rectangular support glass, and the glass film is a rectangular glass film.
  5. 　前記ガラスフィルムは、該ガラスフィルムの端辺が前記突出部の上方に位置するように積層され、
    　前記ガラスフィルムの端辺と前記突出部とは、離間していることを特徴とする請求項１～４のいずれかに記載のガラスフィルム積層体。     The glass film is laminated so that the edge of the glass film is located above the protrusion,
    The glass film laminate according to any one of claims 1 to 4, wherein an end side of the glass film and the protrusion are separated from each other.
  6. 　前記突出部は、前記支持ガラスの端辺から間隔を設けて配置され、
    前記ガラスフィルムは、該ガラスフィルムの端辺が前記支持ガラスの端辺と前記突出部との間に位置するように、前記支持ガラス上に積層されていることを特徴とする請求項１～５のいずれかに記載のガラスフィルム積層体。     The projecting portion is disposed with an interval from an end side of the support glass,
    The glass film is laminated on the supporting glass so that an edge of the glass film is positioned between an edge of the supporting glass and the protruding portion. The glass film laminated body in any one of.
  7. 　前記突出部は、前記支持ガラスの合わせ面から前記ガラスフィルム側に１～５０μｍ突出していることを特徴とする請求項１～６のいずれかに記載のガラスフィルム積層体。 The glass film laminate according to any one of claims 1 to 6, wherein the protruding portion protrudes 1 to 50 µm from the mating surface of the supporting glass toward the glass film.
  8. 　前記剥離領域は、前記支持ガラスの合わせ面に沿う方向の幅寸法が、０．５～５ｍｍであることを特徴とする請求項１～７のいずれかに記載のガラスフィルム積層体。 The glass film laminate according to any one of claims 1 to 7, wherein the peeling region has a width dimension in the direction along the mating surface of the supporting glass of 0.5 to 5 mm.
  9. 　前記突出部は、前記ガラスフィルムよりも薄肉のガラステープからなることを特徴とする請求項１～８のいずれかに記載のガラスフィルム積層体。 The glass film laminate according to any one of claims 1 to 8, wherein the protrusion is made of a glass tape that is thinner than the glass film.
  10. 　前記ガラスフィルム及び前記支持ガラスのそれぞれの合わせ面の表面粗さＲａが２．０ｎｍ以下であることを特徴とする請求項１～９のいずれかに記載のガラスフィルム積層体。 The glass film laminate according to any one of claims 1 to 9, wherein the surface roughness Ra of the mating surfaces of the glass film and the supporting glass is 2.0 nm or less.
  11. 　前記支持ガラスは、オーバーフローダウンドロー法、スロットダウンドロー法、又はフロート法によって成形されていることを特徴とする請求項１～１０のいずれかに記載のガラスフィルム積層体。 The glass film laminate according to any one of claims 1 to 10, wherein the supporting glass is formed by an overflow downdraw method, a slot downdraw method, or a float method.
  12. 　前記ガラスフィルムの厚みは、３００μｍ以下であることを特徴とする請求項１～１１のいずれかに記載のガラスフィルム積層体。 The glass film laminate according to any one of claims 1 to 11, wherein the glass film has a thickness of 300 µm or less.
  13. 　ガラスフィルム上に製造関連処理を施した電子デバイスの製造方法であって、
    　支持ガラスの端辺近傍にガラステープを配置して突出部を形成する第１の工程と、該支持ガラスとガラスフィルムとをそれぞれの合わせ面を面接触させ且つ前記突出部と前記ガラスフィルムとを接触させた状態に積層すると共に前記支持ガラスと前記突出部と前記ガラスフィルムとで囲繞され且つ前記支持ガラスとガラスフィルムの両合わせ面が非接触状態とされた剥離領域を有するガラスフィルム積層体を作製する第２の工程と、前記ガラスフィルム積層体の前記ガラスフィルム側に製造関連処理を行う第３の工程と、前記製造関連処理後に、前記剥離領域を拡大させて前記支持ガラスから前記処理を終えたガラスフィルムを剥離する第４の工程と、を有することを特徴とする電子デバイスの製造方法。     A method of manufacturing an electronic device that has undergone manufacturing-related processing on a glass film,
    A first step of arranging a glass tape in the vicinity of the edge of the supporting glass to form a protruding portion; bringing the supporting glass and the glass film into surface contact with each other; and the protruding portion and the glass film. A glass film laminate having a peeling region that is laminated in a contacted state and surrounded by the support glass, the protruding portion, and the glass film, and in which the mating surfaces of the support glass and the glass film are in a non-contact state. The second step to produce, the third step to perform manufacturing-related processing on the glass film side of the glass film laminate, and after the manufacturing-related processing, expand the release region and perform the processing from the support glass. And a fourth step of peeling off the finished glass film.
  14. 　前記第１の工程は、前記ガラステープの配置後に加熱処理を行うことで、前記支持ガラスと前記ガラステープとをそれぞれの合わせ面同士を接着させて突出部を形成する突出部形成工程を含むことを特徴とする請求項１３に記載の電子デバイスの製造方法。 The first step includes a protruding portion forming step in which a protruding portion is formed by bonding the supporting glass and the glass tape to each other by bonding the respective mating surfaces by performing a heat treatment after the glass tape is disposed. The method of manufacturing an electronic device according to claim 13.
  15. 　前記第３の工程は、加熱を伴う製造関連処理であって、
    前記ガラステープ配置後の前記加熱処理における前記加熱温度は、前記第３の製造関連処理の加熱温度よりも、高温であることを特徴とする請求項１４に記載の電子デバイスの製造方法。     The third step is a manufacturing-related process involving heating,
    The method for manufacturing an electronic device according to claim 14, wherein the heating temperature in the heat treatment after the glass tape is arranged is higher than the heating temperature in the third manufacturing-related processing.
PCT/JP2014/062002 2013-04-30 2014-04-30 Glass film laminate, and production method for electronic device WO2014178405A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003308019A (en) * 2002-04-17 2003-10-31 Sharp Corp Sticking sheet and body stuck by the sheet
JP2010194874A (en) * 2009-02-25 2010-09-09 Nippon Electric Glass Co Ltd Glass film laminate and glass roll of laminate
WO2011001946A1 (en) * 2009-07-03 2011-01-06 日本電気硝子株式会社 Glass film laminate
JP2013075818A (en) * 2011-09-15 2013-04-25 Nippon Electric Glass Co Ltd Method for cutting thin plate glass and thin plate glass

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003308019A (en) * 2002-04-17 2003-10-31 Sharp Corp Sticking sheet and body stuck by the sheet
JP2010194874A (en) * 2009-02-25 2010-09-09 Nippon Electric Glass Co Ltd Glass film laminate and glass roll of laminate
WO2011001946A1 (en) * 2009-07-03 2011-01-06 日本電気硝子株式会社 Glass film laminate
JP2013075818A (en) * 2011-09-15 2013-04-25 Nippon Electric Glass Co Ltd Method for cutting thin plate glass and thin plate glass

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