JP2006098066A - Probe needle, using method therefor, and manufacturing method for probe needle - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a probe needle capable of measuring accurately an electric characteristic of a measured object by a four-terminal resistance measuring method, even in the measured object provided with a small electrode. <P>SOLUTION: In this probe 1, tip parts 6 are brought into contact with an electrode of the measured object to measure the electric characteristic of the measured object. The probe uses the probe needle having a metal conductor 2 and an insulating coating film 3 provided in the metal conductor of which the cross-sectional shape is straight-angled, a pair comprising the two probe needles is inserted into one guide hole 27 in a guide plate 21 of a probe unit 100, and the electric characteristic of the measured object is measured by the four-terminal resistance measuring method wherein the tip parts 6 of the paired probe needles are brought into concurrent contact with the one electrode of the measured object. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a probe needle, a method for using the probe needle, and a method for manufacturing the probe needle, for measuring the electrical characteristics of the object to be measured by bringing a tip portion into contact with an electrode of the object to be measured.

  In recent years, various circuit boards such as high-density mounting boards used for mobile phones and the like, or IC package boards such as BGA (Ball Grid Array) and CSP (Chip Size Package) incorporated in personal computers are used. Yes. In such a circuit board, the DC resistance value of the circuit board is measured and the quality thereof is inspected before and after the mounting. The inspection of the DC resistance value is performed using an inspection device jig (hereinafter referred to as “probe unit”) connected to an inspection device for measuring the DC resistance value. For example, the probe needle is attached to the probe unit. The probe needle is inserted into the hole of the guide plate and attached, and the tip of the probe needle is brought into contact with the electrode of the circuit board (hereinafter referred to as “measurement object”). In this case, as described in Patent Document 1, the probe unit includes a number of probe needles corresponding to the electrodes, and is configured such that one probe needle contacts one electrode.

By the way, an insulating film such as an oxide film is easily formed on the surface of the electrode to be measured, and a resistance value between the two (hereinafter referred to as “contact resistance”) can be obtained by simply contacting one probe needle with one electrode. Value ") may be too high to accurately check the DC resistance value. However, it is possible to accurately measure the DC resistance value using a four-terminal resistance measurement method by bringing two probe needles into contact with the same electrode, one on the source side, and the other on the sense side. It becomes possible.
Japanese Patent Laid-Open No. 11-344509

  However, when two probe needles having a circular cross section are set in one hole in the guide plate of the probe unit and the four-terminal resistance measurement method is performed, it is necessary to reduce the outer diameter of one probe needle. The probe needle cannot obtain sufficient elasticity, and the probe needle cannot penetrate the oxide film formed on the electrode surface of the object to be measured, so the electrical characteristics of the object to be measured (DC resistance value of the circuit board, etc.) ) May not be accurately inspected.

  In addition, in order for the two probe needles to contact the small electrode accurately, it is preferable that the tip portions of the two probe needles in a pair are at the shortest distance. For example, the wedge-shaped tip portions inclined on one side are mutually connected. It is necessary to set the shortest distance between adjacent probe needles. However, in a probe needle having a circular cross section, the probe needle rotates unnecessarily, and it is difficult to accurately set the tip of the probe needle.

  Furthermore, in order to make two probe needles come into contact with a small electrode, it is necessary to reduce the outer diameter of the probe needle, make the hole of the guide plate in the probe unit small, and make the hole pitch as close as possible. For this reason, manufacture of a probe needle and a probe unit becomes difficult, and those manufacturing costs will rise.

  The object of the present invention has been made in consideration of the above-mentioned circumstances, and even with a measurement object having small electrodes, the electrical characteristics of the measurement object can be accurately measured by a four-terminal resistance measurement method. It is to provide a probe needle that can be used.

  Another object of the present invention is to provide a method of using a probe needle that can accurately measure the electrical characteristics of the object to be measured by a four-terminal resistance measurement method even if the object has a small electrode. is there.

  Still another object of the present invention is to provide a probe needle that can easily manufacture a probe needle that can accurately measure the electrical characteristics of the object to be measured by a four-terminal resistance measurement method even if the object has a small electrode. It is in providing the manufacturing method of.

  A probe needle according to a first aspect of the present invention is a probe needle for measuring the electrical characteristics of a measured object by bringing the tip portion into contact with an electrode of the measured object, and a metal conductor and the metal conductor. The metal conductor has a flat rectangular shape in cross section.

  A probe needle according to a second aspect of the present invention is the probe needle according to the first aspect, wherein a tip portion contacting the electrode of the object to be measured is formed of a metal conductor exposed from an insulating film, and the tip portion side The insulating film is partially or entirely removed to form an insulating film removing portion, and a step portion is provided between the insulating film removing portion and the insulating film.

  According to a third aspect of the present invention, there is provided a method of using the probe needles according to the first or second aspect, wherein two probe needles according to the first or second aspect are inserted into one hole of a jig for an inspection apparatus as a pair. The electrical characteristics of the object to be measured are measured by a four-terminal resistance measurement method in which the tip portion is simultaneously brought into contact with one electrode of the object to be measured.

  According to a fourth aspect of the present invention, there is provided a method of using the probe needle according to the third aspect of the present invention, wherein the pair of probe needles inserted into one hole of the inspection apparatus jig has a tip portion. The opposite end side with respect to the provided end portion is bent, and the bent portion is locked to the peripheral edge of the hole.

  A method of manufacturing a probe needle according to a fifth aspect of the present invention is a method for manufacturing a probe needle in which a tip portion is brought into contact with an electrode of a measured object to measure the electrical characteristics of the measured object. A conductor processing step of rolling the conductor into a flat rectangular shape, an insulating coating forming step of forming an insulating coating on the flat rectangular conductor, and a long rectangular conductor having the insulating coating formed thereon A cutting step of cutting the conductor into a predetermined length, and an end processing step of processing the end of the conductor having a rectangular cross-section with an insulating film cut into the predetermined length into a predetermined shape. It is.

  According to the first or third aspect of the present invention, since the cross-sectional shape of the metal conductor, that is, the cross-sectional shape of the probe needle is formed into a flat rectangular shape, a pair of two probe needles is used as one of the jigs for the inspection apparatus. Even when the probe needle is inserted into the hole and mounted, the cross-sectional area of each probe needle can be increased as compared with a probe needle having a circular cross section, so that the elastic force of each probe needle can be sufficiently secured. For this reason, since the probe needle can easily break through an insulating film such as an oxide film formed on the electrode surface of the object to be measured, the contact resistance value between the probe needle and the electrode is reduced, and the object having a small electrode is provided. Even in the case of a measurement object, the electrical characteristics of the object to be measured (for example, the circuit board that is the object to be measured) are measured by a four-terminal resistance measurement method in which a pair of probe needles are simultaneously brought into contact with one electrode of the object to be measured DC resistance value etc.) can be measured accurately. For this reason, the probe needle of the present invention is suitably used for inspection of a low-resistance object to be measured.

  In addition, since the cross-sectional shape of the metal conductor, that is, the cross-sectional shape of the probe needle is formed into a flat rectangular shape, the probe needle does not rotate unnecessarily. For example, a wedge-shaped probe needle tip having a slope on one side Can be easily set to the shortest distance between a pair of adjacent probe needles, and a four-terminal resistance measurement method can be suitably implemented.

  Further, since the cross-sectional shape of the metal conductor, that is, the cross-sectional shape of the probe needle is formed into a flat rectangular shape, a pair of these probe needles are inserted into one hole of the jig for the inspection apparatus, and the pair of probe needles Since the tip of the probe can be simultaneously brought into contact with one small electrode of the object to be measured, the outer shape of the probe needle having a circular cross section is reduced, and one of the inspection apparatus jigs through which the one probe needle is inserted. Compared to the case where the diameter of one hole is reduced and the pitch of these holes is made as close as possible to bring one probe needle into contact with one small electrode of the object to be measured, the probe needle and the inspection device jig are manufactured. The manufacturing cost can be reduced.

  According to the second aspect of the present invention, a part or the whole of the insulating film is removed to form the insulating film removing part on the tip end side of the probe needle, and the insulating film removing part and the insulating film are interposed between the insulating film removing part and the insulating film. Since the step portion is provided in the case, when the two probe needles are inserted into one hole of the jig for the inspection apparatus as a pair, the step portion is locked to the periphery of the hole and functions as a stopper. Thus, it is possible to prevent the probe needle from dropping from the inspection apparatus jig.

  According to the fourth aspect of the present invention, the pair of probe needles inserted into one hole of the inspection apparatus jig is bent at the opposite end side with respect to the end portion provided with the tip end portion. Since the bent portion is engaged with the periphery of the hole, the bent portion functions as a stopper, and the probe needle can be prevented from falling off the inspection apparatus jig.

  According to the invention described in claim 5, a conductor processing step of rolling a long conductor into a rectangular cross section, an insulating coating forming step of forming an insulating coating on the rectangular conductor, and the insulation A cutting step of cutting a long cross-section rectangular conductor with a coating formed into a predetermined length, and an end for processing the end of the cross-section rectangular conductor with an insulating coating cut into the predetermined length into a predetermined shape Since it has a partial processing step, it is possible to easily manufacture a probe needle having a flat cross-sectional shape. As a result, the manufacturing yield of the probe needle can be improved, and the manufacturing cost of the probe needle can be reduced.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

[A] One Embodiment (FIGS. 1 to 3)
FIG. 1 is a schematic view showing an embodiment of the probe needle of the present invention. FIG. 2 is a schematic diagram showing a state in which two probe needles of FIG. 1 are paired. FIG. 3 is a schematic cross-sectional view showing an embodiment of a method for using the probe needles of FIGS. 1 and 2, that is, a method for inspecting the electrical characteristics of a measurement object using a probe unit equipped with the probe needles. It is.

(Probe needle)
As shown in FIG. 1, the probe needle 1 of this embodiment includes a metal conductor 2 and an insulating film 3 provided on the metal conductor 2. As shown in FIGS. 2 and 3, two probe needles 1 are inserted into the guide holes 27 and 28 of the guide plates 21 and 22 of the probe unit 100 and attached. The tip 6 of the pair of probe needles 1 is used for an inspection in which the electrical characteristics of the measured object 25 are measured by bringing the tip portions 6 of the pair of probe needles 1 into contact with one electrode 26 of the measured object 25 simultaneously.

  As the metal conductor 2, a metal wire (also referred to as “metal spring wire”) having high conductivity and high elastic modulus is used. Examples of the metal used for the metal conductor 2 include a metal having a wide elastic range. For example, copper alloys such as beryllium copper, tungsten, rhenium tungsten, steel, and the like can be preferably used.

  The metal conductor 2 is usually subjected to plastic working such as cold or hot rolling after plastic working such as cold or hot wire drawing until the metal becomes a linear conductor having a predetermined rectangular cross section. The dimension of the metal conductor 2 is arbitrarily selected from the range in which the vertical dimension N and the horizontal dimension M are 25 to 500 μm according to the interval between the adjacent probe needles 11 in the probe unit 100 (FIG. 1B). The probe needle 1 is characterized in that the metal conductor 2 has a flat rectangular shape, and the cross section of the metal conductor 2 described above from the viewpoint of stably inserting and holding the two into the guide hole 27 of the guide plate 21. The ratio of the vertical dimension N to the horizontal dimension M in the shape is preferably 1 to 1.1 or more.

  In addition, the probe needle 1 can be easily attached to the probe unit 100 and the movement of the probe needle 1 is prevented from being hindered by the probe needle 1 being caught in the guide hole 27 of the guide plate 21 when the probe unit 100 is used. In view of the above, the straightness of the metal conductor 2 is preferably high, and specifically, the straightness is preferably 1000 mm or more in terms of the radius of curvature R. The metal conductor 2 having a high straightness can be obtained by performing a straightening treatment in advance before the insulating coating 3 is provided.

  The insulating coating 3 is provided on the metal conductor 2 and acts to prevent a short circuit that occurs when adjacent probe needles 1 come into contact with each other when the electrical characteristics of the measurement object 25 are inspected. The insulating coating 3 may be provided on the metal conductor 2, that is, on the outer periphery of the metal conductor 2 in the longitudinal direction, and may be provided between the metal conductor 2 via another layer.

  The insulating coating 3 is not particularly limited as long as it is an insulating coating, but is at least one resin selected from the group consisting of polyurethane resin, polyester resin, polyesterimide resin, polyamideimide resin, epoxy resin, and fluororesin. Is preferably formed. Usually, the insulating coating 3 is formed of one kind of resin. Since the insulating coating 3 made of these resins has different heat resistance, it can be arbitrarily selected in consideration of the heat generated during the inspection. For example, when more heat resistance is required, the insulating coating 3 is preferably formed of a polyesterimide resin, a polyamideimide resin, a fluorine resin, or the like.

  Furthermore, the average film thickness of the insulating coating 3 may be a thickness that can ensure the electrical insulation of the insulating coating 3 and is appropriately set within a range of 1 μm to 50 μm. For example, the insulating coating 3 is set to be thick when the cross-sectional area of the metal conductor 2 is large, and is set to be thin when the cross-sectional area of the metal conductor 2 is small. Here, the vertical dimension of the probe needle 1 provided with the insulating coating 3 is denoted as H, and the lateral dimension is denoted as W.

  Further, when the probe needle 1 is attached to the probe unit 100, when the step portion 5 between the insulating coating 3 and the insulating coating removing portion 7 functions as a stopper as described later, the average of the insulating coating 3 is used. The film thickness is preferably set in consideration of the diameter of the guide hole 27 of the guide plate 21 provided in the probe unit 100 (described later) (see FIG. 2B).

  Incidentally, the probe needle 1 is provided with an end 4a and an end 4b. This end portion 4a is an end portion on the side in contact with the electrode 26 of the object to be measured 25 at the time of inspection, and from the viewpoint of ensuring electrical contact between the metal conductor 2 and the electrode 26, the end portion 6 thereof. The exposed metal conductor 2 is preferably processed into a predetermined shape. Examples of the shape of the distal end portion 6 of the end portion 4a include a wedge shape, a semicircular cross section, a cone shape, and a flat shape.

  At the end 4 a of the probe needle 1, in order to suppress an increase in the contact resistance value between the probe needle 1 and the electrode 26 (FIG. 3) of the measured object 25, the tip 4 is exposed on the tip 6 where the metal conductor 2 is exposed. It is preferable that a plating layer is provided. Examples of the metal forming the plating layer include metals such as nickel, gold, and rhodium, and alloys such as gold alloys. The plating layer may be a single layer or a multilayer. Preferred examples of the multi-layered plating layer include those in which a gold plating layer is formed on a nickel plating layer.

  The other end 4b of the probe needle 1 is also exposed in the same manner as in the case of the end 4a from the viewpoint of ensuring electrical contact between the metal conductor 2 and the lead wire 24 (FIG. 3). The metal conductor 2 is preferably processed into the above-mentioned shape (wedge shape, semicircular cross section, cone shape, flat shape, etc.).

  As shown in FIG. 1, the end portion 4 a of the probe needle 1 has an insulating film removing portion 7 in which all or a part of the insulating coating 3 is removed in a region of a dimension L excluding the tip portion 6 where the metal conductor 2 is exposed. Is formed. In the present embodiment, the insulating film removing portion in which a part of the insulating film 3 (that is, the upper side and the lateral sides in FIG. 1B) is removed in the region of the dimension L excluding the tip portion 6 where the metal conductor 2 is exposed. 7 is formed. A step portion 5 is provided between the insulating film removing portion 7 and the insulating coating 3, and the step portion 5 is hooked on the guide plate 21 and functions as a stopper. This prevents the probe needle 1 from falling off the guide plates 21 and 22 of the probe unit 100. In order to ensure such a drop-off prevention, as shown in FIG. 2 (B), in a state where the probe needles 1 are paired, a pair of insulating coatings 3 for forming the stepped portions 5 are provided. At least one of the vertical dimension 2H of the probe needle 1 (the sum of the vertical dimension H of each probe needle 1 when two probe needles 1 are paired) and the horizontal dimension W is based on the diameter of the guide hole 27 of the guide plate 21. Is preferably large.

  At the end 4a of the probe needle 1, the length L of the insulating film removing portion 7 from which the insulating film 3 is removed except for the tip 6 is such that the probe unit 100 of the object to be measured 25 is as shown in FIG. The tip 6 of the end 4a is positioned at the position of the guide plate 21 even if the probe needle 1 attached is moved (lowered) in the direction and contacts the electrode 26 of the measured object 25 and is bent by elastic deformation. The length L is not particularly limited as long as it does not reach the length. Such a length L is usually set longer than the sum of the thickness of the guide plate 21 and the stroke length when the probe unit 100 is lowered. The insulating coating 3 can be removed by a peeling means using various laser beams.

(Inspection method of electrical characteristics using probe needle)
Next, a method for using the probe needle 1, that is, a method for inspecting the electrical characteristics of the measurement object 25 using the probe needle 1 will be described.

  The probe needle 1 of this embodiment is attached to the probe unit 100 and used for checking the quality of the electrical characteristics of the measured object 25 such as a circuit board. As shown in FIG. 3, the probe unit 100 includes a plurality of to several thousand probe needles 1, and guide plates 21 and 22 that guide these probe needles 1 to the electrodes 26 of the measurement object 25. Is done. The guide plate 21 is slightly smaller than at least one of the longitudinal dimension 2H and the lateral dimension W (both refer to FIG. 2 (B)) of the probe needles 1 and 1 in which two are paired, and the two are paired. The probe needles 1 and 1 have a guide hole 27 that is slightly larger than the insulating film removing portion 7. The guide plate 22 has guide holes 28 that are slightly larger than the vertical dimension 2H and the horizontal dimension W of the probe needle 1. These guide holes 27 and 28 guide both of the probe needles 1 in a pair to the electrode 26 of the measured object 25.

  As shown in FIG. 3, the probe unit 100 is position-controlled so that the pair of probe needles 1, 1 and one electrode 26 correspond when inspecting the electrical characteristics of the measurement object 25. The inspection of the electrical characteristics is performed by moving the probe unit 100 in the direction of approaching the electrode 26 of the measured object 25 or the direction of moving away from the electrode 26 (up-and-down movement) and using the elastic force of the probe needle 1. This is performed by pressing the tip 6 of the end 4a of the probe needle 1 against the electrode 26 of the measuring body 25 with a predetermined pressure. At this time, the other end 4 b of the probe needle 1 contacts the lead wire 24, and an electric signal from the measured object 25 passes through the lead wire 24 and is sent to an inspection device (not shown). In FIG. 3, reference numeral 23 denotes a lead wire holding plate.

  In this way, two electrodes are brought into contact with one electrode 26 of the object 25 to be measured, and the tip portion 6 of the pair of probe needles 1 is contacted. The measured object 25 is inspected by measuring the DC resistance value. In the inspection of the object to be measured 25, the step portion 5 formed by removing a part of the insulating coating 3 on the tip portion 6 side of the probe needle 1 functions as a stopper as described above. The needle 1 does not fall off from the guide plates 21 and 22 of the probe unit 100.

(Probe needle manufacturing method)
Next, a method for manufacturing the probe needle of the present invention will be described.

  The manufacturing method of the probe needle 1 of the present embodiment includes a rolling process as a conductor processing process for rolling a long metal conductor 2 having a circular cross section into a rectangular cross section having a predetermined vertical dimension N and a horizontal dimension M, A straightening process for straightening a long metal conductor 2 having a flat cross-sectional shape, an insulating film forming process for forming an insulating film 3 on the long metal conductor 2 having a straight cross-sectional shape that has been straightened, and a cross-sectional flatness A cutting step of cutting the metal conductor 2 with the insulating coating 3 into a predetermined length, and processing the end portions 4a and 4b of the metal conductor 2 with the insulating coating 3 having a rectangular cross section cut into the predetermined length into a predetermined shape At least an edge processing step.

  The rolling process is a process of rolling the long metal conductor 2 having a circular cross section into a rectangular cross section having a predetermined vertical dimension N and horizontal dimension M. In this rolling process, the metal conductor 2 having a rectangular shape with a predetermined vertical and horizontal dimension is rolled and formed using, for example, a continuous rolling apparatus using a rolling roll.

  The straight line straightening step is a step of straightening the long metal conductor 2 having a flat cross-sectional shape processed in the rolling step into a straight line. In this straightening process, the metal conductor 2 is straightened and straightened using, for example, a continuous straightening device using a roller leveler.

  The insulating film forming process is an insulating film forming process in which the insulating film 3 is formed on the long metal conductor 2 having a flat rectangular shape that has been straightened in the straightening process. In this insulating coating forming step, the insulating coating 3 is formed using, for example, an enameled wire manufacturing apparatus. In this insulating coating forming process, the enamel coating and baking are usually repeated until the insulating coating 3 has a desired average film thickness. The enamel paint is prepared by mixing the resin already described in the description of the probe needle 1 and an organic solvent.

  The cutting step is a step of cutting the long metal conductor 2 having a straight rectangular cross-sectional shape that has been straight-lined and formed with the insulating coating 3 in the insulating coating forming step into a predetermined length. In this cutting process, it is considered that the end portions 4a and 4b of the long metal conductor 2 on which the baking enamel coating (insulating coating 3) is formed are processed using, for example, a standard cutting device. And cut to a predetermined length.

  The end portion processing step is a step of processing the end portions 4a, 4b of the metal conductor 2 having a rectangular cross section with the insulating coating 3 cut into a predetermined length into a predetermined shape. Both the tip portion 6 and the end portion 4b of the end portion 4a are usually processed into a wedge shape, a semicircular cross-sectional shape, a cone shape, a flat shape, or the like by a processing means such as grinding. This end portion processing step includes a plating step of plating the end portion after grinding (that is, the end portion 6 and the end portion 4b of the end portion 4a where the metal conductor 2 is exposed) as a sub-step. Also good. By this plating step, a plating layer for reducing the contact resistance can be formed on the tip portion 6 and the end portion 4b of the end portion 4a.

  Further, in this end processing step, the insulating coating 3 is removed by removing the insulating coating 3 in a region of a certain length L excluding the tip 6 at the end 4a of the probe needle 1 on the measured object 25 side. You may have the insulating film removal process of forming. As described above, the step portion 5 between the insulating coating removing portion 7 and the insulating coating 3 functions as a stopper. The insulating coating 3 can be removed by removing the insulating coating 3 at the end 4a of the probe needle 1 (or the metal conductor 2 with the insulating coating 3) by laser light irradiation or the like.

  The removal of the insulating film 3 may be performed before or after the tip portion 6 of the end portion 4a of the probe needle 1 is ground. The removal of the insulating coating 3 may be performed before or after the plating step when it is performed after grinding the tip 6 of the end 4a. The removal of the insulating coating 3 is preferably performed after the plating step from the viewpoint of easily manufacturing the probe needle 1, that is, the tip 6 of the end 4a of the metal conductor 2 with the insulating coating 3 is ground. And it is preferable to carry out after plating the front-end | tip part 6 which the metal conductor 2 exposed.

  Next, the manufacturing method of the probe needle 1 will be specifically described.

  A long beryllium copper wire (outer diameter 0.10 mm) is used as the metal conductor 2. Further, as the coating for the insulating coating 3, a polyurethane resin-based enamel coating (manufactured by Tohoku Paint Co., Ltd., trade name: TPU5100) is used.

  First, a wire rod made of beryllium copper wire fed from a wire rod feeder such as a bobbin has a cross-sectional rectangular shape with a vertical dimension N = 0.07 mm and a horizontal dimension M = 0.11 mm in a rolling apparatus. So that it is rolled. Thereafter, the polyurethane-based enamel paint is applied and baked using an enamel wire manufacturing apparatus, and the wire with the insulating film 3 is finished with a vertical dimension H = 0.09 mm and a horizontal dimension W = 0.13 mm. It is processed to have a flat cross-sectional shape.

  Next, the long wire with a rectangular cross section having the insulating coating 3 formed thereon is cut to cut out the metal conductor 2 with the insulating coating 3 having a length of 26 mm, and the end 4a of the metal conductor 2 with the insulating coating 3 is cut. The probe needle 1 is manufactured by grinding the distal end portion 6 and the end portion 4b into a wedge shape having a slope on one side.

  Next, the tip 6 and the end 4b of the end 4a of the metal conductor 2 exposed by the grinding process are plated, so that a nickel plating layer (film thickness 1.7 μm) and a gold plating layer (film thickness 0.3 μm) are obtained. ) Of two plating layers (total film thickness: 2 μm). These two plating layers are subjected to pretreatment such as degreasing and pickling on the exposed portion of the metal conductor 2, and then electroless with a nickel plating solution (trade name; BEL-801, manufactured by Uemura Kogyo Co., Ltd.). A plating process is performed, and then an electroless plating process is performed with a gold plating solution (trade name; Au-601, manufactured by Meltex Co., Ltd.).

  Finally, using a laser beam irradiation device (manufactured by Keyence Corporation, model number: ML-9110), a part of a region of length L = 2 mm excluding the distal end portion 6 at the end portion 4a of the probe needle 1 (FIG. 1 ( The insulating coating 3 is removed from the upper side and both lateral sides of B), and the insulating coating removing portion 7 is formed to produce the probe needle 1 (length: 25 mm).

(Effect of one embodiment)
With the above configuration, the following effects (1) to (5) are achieved according to the above-described embodiment.

  (1) Since the cross-sectional shape of the metal conductor 2, that is, the cross-sectional shape of the probe needle 1 is formed in a flat rectangular shape, two probe needles 1 are paired into one guide hole 27 in the guide plate 21 of the probe unit 100. Even when the probe needle 1 is inserted and mounted, the cross-sectional area of each probe needle 1 can be increased as compared with a probe needle having a circular cross section, so that the elastic force of each probe needle 1 can be sufficiently secured. For this reason, since the probe needle 1 can easily break through an insulating film such as an oxide film formed on the surface of the electrode 26 of the measured object 25, the contact resistance value between the probe needle 1 and the electrode 26 is reduced, Even if the measured object 25 includes a small electrode 25, the electrical characteristics of the measured object 25 are measured by a four-terminal resistance measurement method in which a pair of probe needles 1 are simultaneously brought into contact with one electrode 26 of the measured object 25. (For example, the DC resistance value of the circuit board that is the measured object 25) can be accurately measured. For this reason, the probe needle 1 is suitably used for inspection of a low-resistance object to be measured.

  (2) Since the cross-sectional shape of the metal conductor 2, that is, the cross-sectional shape of the probe needle 1 is formed into a flat rectangular shape, the probe needle 1 does not rotate unnecessarily. For example, a wedge-shaped having a slope on one side The tip portion 6 of the probe needle 1 can be easily set to the shortest distance between the pair of probe needles 1 and 1 adjacent to each other, and the four-terminal resistance measurement method can be suitably implemented.

  (3) On the tip portion 6 side of the probe needle 1, a part of the insulating coating 3 is removed to form an insulating coating removing portion 7, and a step portion 5 is formed between the insulating coating removing portion 7 and the insulating coating 3. Therefore, when the two probe needles 1 are inserted into one guide hole 27 in the guide plate 21 of the probe unit 100 as a pair, the step portion 5 is locked to the peripheral edge of the guide hole 27 to stop the stopper. As a result, the probe needle 1 can be prevented from falling off the probe unit 100.

  (4) Since the cross-sectional shape of the metal conductor 2, that is, the cross-sectional shape of the probe needle 1 is formed into a flat rectangular shape, one guide hole in the guide plate 21 of the probe unit 100 with the two probe needles 1 as a pair. 27, the tip portions 6 of the pair of probe needles 1 and 1 can be simultaneously brought into contact with one small electrode 26 of the object 25 to be measured. The diameter of one hole of the probe unit through which one probe needle is inserted is reduced, and the pitch of the holes is made as close as possible to bring one probe needle into contact with one small electrode 26 of the object 25 to be measured. Compared to the case, the probe needle 1 and the probe unit 100 can be easily manufactured, and the manufacturing costs thereof can be reduced.

  (5) A rolling process in which the long metal conductor 2 is rolled and processed into a rectangular cross section, an insulating film forming process in which the insulating film 3 is formed on the metal conductor 2 having a rectangular cross section, and the insulating film 3 are formed. A cutting step of cutting the long rectangular metal conductor 2 into a predetermined length, and processing the end portions 4a and 4b of the rectangular metal conductor 2 with the insulating coating 3 cut into a predetermined length into a predetermined shape. Therefore, the probe needle 1 having a flat cross-sectional shape can be easily manufactured. As a result, since the manufacturing yield of the probe needle 1 can be improved, the manufacturing cost of the probe needle 1 can be reduced.

[B] Other embodiment (FIG. 4)
FIG. 4 is a schematic cross-sectional view showing another embodiment of a method for using a probe needle according to the present invention, that is, a method for inspecting an electrical characteristic of a measured object using a probe unit including the probe needle. It is. In other embodiments, the same parts as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the probe needle 11 of this other embodiment, the insulating film removal portion 7 is not formed on the end portion 4a of the measured object 25 on the side in contact with the electrode 26, and the metal conductor 2 is exposed and ground into a predetermined shape. Only the processed tip 6 is formed.

  Therefore, also in the edge processing step in the manufacturing process for manufacturing the probe needle 11, there is an insulating film removing step for forming the insulating film removing portion 7 by removing the insulating film 3 on the end 4a side by laser light irradiation or the like. Not included, in this end portion processing step, grinding of the tip portion 6 and the end portion 4b of the end portion 4a and a plating step on the tip portion 6 and the end portion 4b of these end portions 4a are performed.

  When inspecting the electrical characteristics of the measurement object 25 using the probe needle 11, two of the probe needles 11 are paired, and the end 4 a side is a guide on the guide plate 21 of the probe unit 100. The pair of probe needles 11 is attached to the probe unit 100 by inserting the end 4 b into one guide hole 28 in the guide plate 22 of the probe unit 100. Here, like the guide hole 28, the guide hole 12 is set to have a diameter slightly larger than the vertical dimension 2H and the horizontal dimension W (see FIG. 2B) of the probe needle 11 in which two pairs are paired. Yes.

  Then, at the end 4 b side portion of each pair of probe needles 11, the portion extending from the guide hole 28 of the guide plate 22 toward the lead wire 24 is bent outward, and this bent portion 13 is bent to the periphery of the guide hole 28. To stop and function as a stopper. The stopper function of the bent portion 13 of the two pairs of probe needles 11 prevents the probe needle 11 from falling off the guide plates 21 and 22 of the probe unit 100. In this state, the probe unit 100 is moved in the direction of the object to be measured 25, and the tip portions 6 of the pair of probe needles 11 are simultaneously brought into contact with one electrode 26 of the object to be measured 25. Thus, the DC resistance value, which is the electrical characteristic of the DUT 25, is measured.

  Since it is configured as described above, the other embodiments described above can achieve the same effects as the effects (1), (2), (4), and (5) of the one embodiment, and the following. The effects (6) to (8) are obtained.

  (6) A pair of probe needles 11 inserted into one guide hole 12 in the guide plate 21 of the probe unit 100 and one guide hole 28 in the guide plate 22 are connected to the end 4 a provided with the tip 6. On the opposite end 4b (end on the lead wire 24 side), the portion of the guide plate 22 extending from the guide hole 28 toward the lead wire 24 is bent, and the bent portion 13 is bent into the guide plate 22. Since the bent portion 13 functions as a stopper, the pair of probe needles 11 can be prevented from falling off the guide plates 21 and 22 of the probe unit 100.

  (7) In the probe needle 11, the bent portion 13 is formed by bending the portion of the probe unit 100 extending from the guide hole 28 of the guide plate 22 toward the lead wire 24 in the portion on the end 4 b side. Since the pitch P of the lead wire 24 can be set wide, the hole diameter of the lead wire hole 29 of the holding plate 23 can be formed large, and a thick lead wire 24 can be used. As a result, the drilling process of the lead wire hole 29 and the assembly work for inserting the lead wire 24 into the lead wire hole 29 can be facilitated, so that the manufacturing cost of the probe unit 100 can be reduced.

  (8) In the probe needle 11, the end portion 4 b side portion of the probe unit 100 extending from the guide hole 28 of the guide plate 22 to the lead wire 24 side is bent outward to form the bent portion 13. In the pair of probe needles 11, the interval between the end portions 4b on the lead wire 24 side can be set wide, so that the end portion 4b of one probe needle 11 of the pair contacts the end portion 4b of the other probe needle 11. Can be avoided reliably.

  As mentioned above, although this invention was demonstrated based on said embodiment, this invention is not limited to this.

  For example, in the other embodiments described above, the probe needle 11 is also provided with the insulating film removing portion 7 at the end 4 a, as in the probe needle 1, and the step between the insulating film removing portion 7 and the insulating film 3 is provided. In addition to causing the portion 5 to exhibit a stopper function, the probe unit of the probe needle 11 is also caused to exhibit a stopper function at the bent portion 13 of the probe needle 11 that extends from the guide hole 28 of the guide plate 22 to the lead wire 24 side. Dropping from 100 may be prevented. However, the manufacturing cost of the probe needle 11 can be reduced when the probe needle 11 is not formed with the insulating film removal portion 7 and the probe needle 11 exhibits the stopper function only by the bent portion 13.

It is a schematic diagram which shows one Embodiment of the probe needle | hook of this invention. It is a schematic diagram which shows the state which made the probe needle of FIG. 1 2 pairs. FIG. 3 is a schematic cross-sectional view showing an embodiment of a method for using the probe needle of FIGS. 1 and 2, that is, a method for inspecting the electrical characteristics of a measurement object using a probe unit including the probe needle. It is typical sectional drawing which shows other embodiment of the usage method of the probe needle which concerns on this invention, ie, the method to test | inspect the electrical property of a to-be-measured object using the probe unit provided with this probe needle.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,11 Probe needle 2 Metal conductor 3 Insulation film 4a, 4b End part 5 Step part 6 Tip part 7 Insulation film removal part 13 Bending part 21, 22 Guide plate 23 Lead wire holding plate 24 Lead wire 25 Measured object 26 Electrode 27, 28 Guide hole 100 Probe unit (Jig for inspection device)
H Vertical dimension W Horizontal dimension L Length

Claims (5)

  A probe needle for measuring the electrical characteristics of the object to be measured by bringing the tip portion into contact with the electrode of the object to be measured, comprising a metal conductor and an insulating film provided on the metal conductor, A probe needle having a flat cross-sectional shape.   The tip part that contacts the electrode of the object to be measured is formed of a metal conductor exposed from the insulating film, and a part or all of the insulating film on the tip part side is removed to form an insulating film removing part. The probe needle according to claim 1, wherein a step portion is provided between the insulating film removing portion and the insulating film.   4. Four terminals for inserting two probe needles according to claim 1 or 2 as a pair into one hole of a jig for an inspection apparatus and simultaneously contacting the tip of the pair of probe needles with one electrode of a measured object A method of using a probe needle, wherein the electrical characteristics of the object to be measured are measured by a resistance measurement method.   A pair of probe needles inserted into one hole of a jig for an inspection apparatus is bent on the opposite end side with respect to the end portion provided with the tip portion, and this bent portion is formed at the periphery of the hole. The method of using the probe needle according to claim 3, wherein the probe needle is locked.   A probe needle manufacturing method for measuring the electrical characteristics of a measured object by bringing the tip portion into contact with an electrode of the measured object, and a conductor processing step of rolling a long conductor into a rectangular cross section An insulating coating forming step for forming an insulating coating on the conductor having a rectangular cross section, a cutting step for cutting the long rectangular conductor having the insulating coating formed into a predetermined length, and the predetermined length. An end portion processing step of processing the end portion of the cut rectangular conductor with insulating coating into a predetermined shape.

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