HK1171728A1 - Substrate cartridge, substrate processing apparatus, substrate processing system, substrate processing method, control apparatus, and method for manufacturing display element - Google Patents

Substrate cartridge, substrate processing apparatus, substrate processing system, substrate processing method, control apparatus, and method for manufacturing display element

Info

Publication number
HK1171728A1
HK1171728A1 HK12112641.4A HK12112641A HK1171728A1 HK 1171728 A1 HK1171728 A1 HK 1171728A1 HK 12112641 A HK12112641 A HK 12112641A HK 1171728 A1 HK1171728 A1 HK 1171728A1
Authority
HK
Hong Kong
Prior art keywords
substrate processing
substrate
display element
cartridge
control apparatus
Prior art date
Application number
HK12112641.4A
Other languages
Chinese (zh)
Inventor
井上英也
Original Assignee
株式會社尼康
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2009253976A external-priority patent/JP2011098809A/en
Priority claimed from JP2009253975A external-priority patent/JP2011098808A/en
Application filed by 株式會社尼康 filed Critical 株式會社尼康
Publication of HK1171728A1 publication Critical patent/HK1171728A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H16/00—Unwinding, paying-out webs
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/12—Surface aspects
    • B65H2701/124—Patterns, marks, printed information
    • B65H2701/1242—Patterns, marks, printed information printed information
    • B65H2701/12422—Patterns, marks, printed information printed information codes or the like which can be used for further processing, e.g. relative to consumed or still available material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/18—Form of handled article or web
    • B65H2701/184—Wound packages
    • B65H2701/1849—Wound packages in cartridge or similar packaging device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/19—Specific article or web
    • B65H2701/1942—Web supporting regularly spaced non-adhesive articles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
HK12112641.4A 2009-11-05 2012-12-07 Substrate cartridge, substrate processing apparatus, substrate processing system, substrate processing method, control apparatus, and method for manufacturing display element HK1171728A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009253976A JP2011098809A (en) 2009-11-05 2009-11-05 Substrate cartridge, substrate processing device, substrate processing system, substrate processing method, control device and method of manufacturing display element
JP2009253975A JP2011098808A (en) 2009-11-05 2009-11-05 Substrate cartridge, substrate processing device, substrate processing system, substrate processing method, control device and method of manufacturing display element
PCT/JP2010/069684 WO2011055781A1 (en) 2009-11-05 2010-11-05 Substrate cartridge, substrate processing apparatus, substrate processing system, substrate processing method, control apparatus, and method for manufacturing display element

Publications (1)

Publication Number Publication Date
HK1171728A1 true HK1171728A1 (en) 2013-04-05

Family

ID=43970017

Family Applications (1)

Application Number Title Priority Date Filing Date
HK12112641.4A HK1171728A1 (en) 2009-11-05 2012-12-07 Substrate cartridge, substrate processing apparatus, substrate processing system, substrate processing method, control apparatus, and method for manufacturing display element

Country Status (5)

Country Link
KR (1) KR101678716B1 (en)
CN (1) CN102574659B (en)
HK (1) HK1171728A1 (en)
TW (1) TWI538861B (en)
WO (1) WO2011055781A1 (en)

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62123735A (en) * 1985-11-22 1987-06-05 Mitsubishi Electric Corp Wafer cassette
JPH01158360A (en) * 1987-12-16 1989-06-21 Fuji Photo Film Co Ltd Test film cassette
JPH03138958A (en) * 1989-10-24 1991-06-13 Seiko Epson Corp Wafer carrier and method of identifying wafer carrier
EP0456388A1 (en) * 1990-05-08 1991-11-13 International Business Machines Corporation Processing high-density circuit substrates and container for use in such processing
JPH04219805A (en) * 1990-12-20 1992-08-10 Ikegai Corp Continuous machining method for different kind of work
JPH08293540A (en) * 1995-04-24 1996-11-05 Sony Corp Substrate holding device
JP2000272784A (en) * 1999-01-18 2000-10-03 Seiko Instruments Inc Printing paper assembly of photosensitive microcapsule type, and printer and printing system using it
JP2003100843A (en) * 2001-09-26 2003-04-04 Dainippon Screen Mfg Co Ltd Method for managing substrate, system for processing substrate and mounting table
KR101029434B1 (en) * 2003-03-04 2011-04-14 신에츠 폴리머 가부시키가이샤 Precision substrate storage container
JP4759292B2 (en) * 2005-03-10 2011-08-31 株式会社イシダ Packaging material container
GB2439001B (en) 2005-03-18 2011-03-09 Konica Minolta Holdings Inc Method of forming organic compound layer, method of manufacturing organic el element and organic el element
JP2006286966A (en) * 2005-03-31 2006-10-19 Fujitsu Ltd Semiconductor device and production management method thereof
US8801307B2 (en) * 2009-09-25 2014-08-12 Nikon Corporation Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element
JP5556105B2 (en) * 2009-09-25 2014-07-23 株式会社ニコン Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and display element manufacturing method

Also Published As

Publication number Publication date
CN102574659A (en) 2012-07-11
CN102574659B (en) 2016-02-24
TWI538861B (en) 2016-06-21
TW201132565A (en) 2011-10-01
KR101678716B1 (en) 2016-11-23
WO2011055781A1 (en) 2011-05-12
KR20120092098A (en) 2012-08-20

Similar Documents

Publication Publication Date Title
IL259567A (en) System and method for inspecting a substrate
IL219767A0 (en) Apparatus, system and method for self orientation
GB2475015B (en) Method and system for providing hybrid-shutdown and fast startup processes
PL2215821T3 (en) Method and apparatus for alert control
TWI369613B (en) Control device, data processing device and method thereof
EP2497275A4 (en) Image display apparatus, method for controlling the image display apparatus, and image display system
EP2309313A4 (en) Optical display device manufacturing system and manufacturing method, and material roll set and method for manufacturing same
EP2448484A4 (en) System, method and apparatus for sensor insertion
EP2509180A4 (en) Control apparatus and control method
EP2446223A4 (en) Information processing apparatus, information processing method, and program
EP2313823A4 (en) Information processing apparatus and method, and control program
EP2493385A4 (en) Information processing apparatus, information processing method, and program
EP2328389A4 (en) Plasma temperature control apparatus and plasma temperature control method
EP2494437A4 (en) Information processing system, print system, and method and program for controlling information processing system
EP2296372A4 (en) Booking control apparatus, booking execution apparatus, booking control system and booking control method
EP2461622A4 (en) Self-backhaul method, apparatus and system
EP2138992A4 (en) Display element manufacturing method, display element manufacturing apparatus and display element
HK1146130A1 (en) Apparatus, method and program for processing information
EP2168053A4 (en) Method and system for process control
EP2120510A4 (en) Display device, apparatus for manufacturing display device, and method for manufacturing display device
EP2440344A4 (en) Apparatus, system and method for manufacturing metal parts
ZA200905162B (en) Method and control system for processing greywater
EP2381637A4 (en) Registration backup data processing method, apparatus and system
EP2316107A4 (en) Apparatus, and associated method, for tracking aircraft status
ZA201101648B (en) Method and system for controlling an industrial process

Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20201101