GB2184866B - A contactless interferometric sensor for incremental scanning of variable interference structures - Google Patents

A contactless interferometric sensor for incremental scanning of variable interference structures

Info

Publication number
GB2184866B
GB2184866B GB8630195A GB8630195A GB2184866B GB 2184866 B GB2184866 B GB 2184866B GB 8630195 A GB8630195 A GB 8630195A GB 8630195 A GB8630195 A GB 8630195A GB 2184866 B GB2184866 B GB 2184866B
Authority
GB
United Kingdom
Prior art keywords
diaphragm
variable interference
interferometric sensor
interference structures
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB8630195A
Other versions
GB2184866A (en
GB8630195D0 (en
Inventor
Gerd Jager
Hans Buchner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUHL FEINMESSZEUGFAB VEB
Original Assignee
SUHL FEINMESSZEUGFAB VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUHL FEINMESSZEUGFAB VEB filed Critical SUHL FEINMESSZEUGFAB VEB
Publication of GB8630195D0 publication Critical patent/GB8630195D0/en
Publication of GB2184866A publication Critical patent/GB2184866A/en
Application granted granted Critical
Publication of GB2184866B publication Critical patent/GB2184866B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Abstract

An interferometer has a diaphragm (11) between an interferometer divider (1) and a beam divider (2), and allows greater angular mobility of a measuring reflector (7) by means of a lens (15, 16) which images the diaphragm, one lens being located in each of the two outlets of the beam divider. A radiation-sensitive face of a photodetector (19,20) is used to detect each of the two diaphragm images (17,18). It can be preferably used for measurement tasks in which changes in the interference structure to be scanned occur during measurement. it allows optically contactless scanning of plane and any type of curved surfaces (7) as well as, for example, use in pressure measuring chambers in which the gas flowing into and out of the chamber causes turbulence in the interference structure. <IMAGE>
GB8630195A 1985-12-23 1986-12-17 A contactless interferometric sensor for incremental scanning of variable interference structures Expired - Fee Related GB2184866B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD28497685 1985-12-23

Publications (3)

Publication Number Publication Date
GB8630195D0 GB8630195D0 (en) 1987-01-28
GB2184866A GB2184866A (en) 1987-07-01
GB2184866B true GB2184866B (en) 1990-03-21

Family

ID=5574830

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8630195A Expired - Fee Related GB2184866B (en) 1985-12-23 1986-12-17 A contactless interferometric sensor for incremental scanning of variable interference structures

Country Status (3)

Country Link
DE (1) DE3623244A1 (en)
FR (1) FR2592152B1 (en)
GB (1) GB2184866B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4427317C2 (en) * 1994-08-02 1999-04-01 Zeiss Carl Jena Gmbh Interferometer for testing optical elements
GB2555646A (en) * 2016-11-03 2018-05-09 Mbda Uk Ltd Interferometric position sensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2107079A (en) * 1981-09-24 1983-04-20 Suhl Feinmesszeugfab Veb Improvements in or relating to interferometers
GB2168476A (en) * 1984-11-22 1986-06-18 Suhl Feinmesszeugfab Veb Interferometer, in particular for incremental scanning of variable interference structures
GB2170005A (en) * 1985-01-18 1986-07-23 Suhl Feinmesszeugfab Veb Interferometric multicoordinate measuring device
GB2175687A (en) * 1985-04-26 1986-12-03 Suhl Feinmesszeugfab Veb Interferometric-incremental device for testing flatness

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1195840A (en) * 1967-01-10 1970-06-24 Barringer Research Ltd Scanning Interferometer Using Wedge for Producing Fringes
DE1547403A1 (en) * 1967-01-25 1969-12-18 Leitz Ernst Gmbh Evaluation method for interferometer
GB1460861A (en) * 1974-03-05 1977-01-06 Nat Res Dev Interferrometers
US4512661A (en) * 1982-09-02 1985-04-23 The United States Of America As Represented By The Aministration Of The National Aeronautics And Space Administration Dual differential interferometer
US4558952A (en) * 1983-02-22 1985-12-17 Kules Vladimir P Method for measuring an optical length of light path and a laser interferometer for carrying same into effect
US4498773A (en) * 1983-05-04 1985-02-12 Rockwell International Corporation Pencil beam interferometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2107079A (en) * 1981-09-24 1983-04-20 Suhl Feinmesszeugfab Veb Improvements in or relating to interferometers
GB2168476A (en) * 1984-11-22 1986-06-18 Suhl Feinmesszeugfab Veb Interferometer, in particular for incremental scanning of variable interference structures
GB2170005A (en) * 1985-01-18 1986-07-23 Suhl Feinmesszeugfab Veb Interferometric multicoordinate measuring device
GB2175687A (en) * 1985-04-26 1986-12-03 Suhl Feinmesszeugfab Veb Interferometric-incremental device for testing flatness

Also Published As

Publication number Publication date
DE3623244A1 (en) 1987-06-25
FR2592152B1 (en) 1991-03-22
GB2184866A (en) 1987-07-01
GB8630195D0 (en) 1987-01-28
FR2592152A1 (en) 1987-06-26

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee