JPS57104803A - Displacement measuring apparatus - Google Patents

Displacement measuring apparatus

Info

Publication number
JPS57104803A
JPS57104803A JP18114180A JP18114180A JPS57104803A JP S57104803 A JPS57104803 A JP S57104803A JP 18114180 A JP18114180 A JP 18114180A JP 18114180 A JP18114180 A JP 18114180A JP S57104803 A JPS57104803 A JP S57104803A
Authority
JP
Japan
Prior art keywords
measured
light
light beam
light source
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18114180A
Other languages
Japanese (ja)
Inventor
Kenji Matsumaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP18114180A priority Critical patent/JPS57104803A/en
Publication of JPS57104803A publication Critical patent/JPS57104803A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To enable the implementation of a non-contact and highly accurate measurement of the distance to material to be measured and displacement thereof by irradiating light beam from a light source on material to be measured in linear expansion perpendicular to the optical axis thereof. CONSTITUTION:A light beam from a light source is linearly expanded in the direction perpendicular to the optical axis using a means of expanding light and irradiated on material to be measured with a flat section thereof to measure the distance to the material and the displacement thereof in a non-contact fashion. For example, a light beam 3 from a light source 1 is expanded with a flat section using a cylindrical lens 2 and irradiated on the material 5 being measured through a lens 4. The reflected light beam 3' is received by a light detecting unit 7 to detect the position of the material to be measured. Here, the section of the reflected light on the light detecting unit becomes so fine in the linearity as to equalize the unevenness of the brightness on the reflecting surface while maintaining high resolution thereby enabling a highly accurate, non-contact optical measurement.
JP18114180A 1980-12-20 1980-12-20 Displacement measuring apparatus Pending JPS57104803A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18114180A JPS57104803A (en) 1980-12-20 1980-12-20 Displacement measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18114180A JPS57104803A (en) 1980-12-20 1980-12-20 Displacement measuring apparatus

Publications (1)

Publication Number Publication Date
JPS57104803A true JPS57104803A (en) 1982-06-30

Family

ID=16095600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18114180A Pending JPS57104803A (en) 1980-12-20 1980-12-20 Displacement measuring apparatus

Country Status (1)

Country Link
JP (1) JPS57104803A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61178626A (en) * 1985-02-04 1986-08-11 Nippon Soken Inc Optical torque detector
FR2600412A1 (en) * 1986-06-18 1987-12-24 Bertin & Cie OPTO-ELECTRONIC DEVICE FOR DETERMINING THE DISTANCE AND SHAPE OF AN OBJECT
JPH01185410A (en) * 1988-01-20 1989-07-25 Toyota Motor Corp Optical length measuring method
JPH04295711A (en) * 1991-03-25 1992-10-20 Rikagaku Kenkyusho Position detecting method for laser light
JP2007298473A (en) * 2006-05-02 2007-11-15 Seiko Epson Corp Inspection apparatus of vibrator unit
CN103712564A (en) * 2014-01-03 2014-04-09 安徽理工大学 Reflection type optical fiber displacement sensor based on Y-shaped optical fiber coupler and self-focusing lens
JP2017075868A (en) * 2015-10-15 2017-04-20 アズビル株式会社 Photoelectric sensor
WO2022190522A1 (en) * 2021-03-10 2022-09-15 オムロン株式会社 Triangulating displacement sensor

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61178626A (en) * 1985-02-04 1986-08-11 Nippon Soken Inc Optical torque detector
FR2600412A1 (en) * 1986-06-18 1987-12-24 Bertin & Cie OPTO-ELECTRONIC DEVICE FOR DETERMINING THE DISTANCE AND SHAPE OF AN OBJECT
JPH01185410A (en) * 1988-01-20 1989-07-25 Toyota Motor Corp Optical length measuring method
JPH04295711A (en) * 1991-03-25 1992-10-20 Rikagaku Kenkyusho Position detecting method for laser light
JP2007298473A (en) * 2006-05-02 2007-11-15 Seiko Epson Corp Inspection apparatus of vibrator unit
CN103712564A (en) * 2014-01-03 2014-04-09 安徽理工大学 Reflection type optical fiber displacement sensor based on Y-shaped optical fiber coupler and self-focusing lens
JP2017075868A (en) * 2015-10-15 2017-04-20 アズビル株式会社 Photoelectric sensor
US10473765B2 (en) 2015-10-15 2019-11-12 Azbil Corporation Photoelectric sensor
WO2022190522A1 (en) * 2021-03-10 2022-09-15 オムロン株式会社 Triangulating displacement sensor

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