EP2496419A4 - Inkjet printhead assembly having backside electrical connection - Google Patents

Inkjet printhead assembly having backside electrical connection

Info

Publication number
EP2496419A4
EP2496419A4 EP09847677.3A EP09847677A EP2496419A4 EP 2496419 A4 EP2496419 A4 EP 2496419A4 EP 09847677 A EP09847677 A EP 09847677A EP 2496419 A4 EP2496419 A4 EP 2496419A4
Authority
EP
European Patent Office
Prior art keywords
electrical connection
printhead assembly
inkjet printhead
backside electrical
backside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09847677.3A
Other languages
German (de)
French (fr)
Other versions
EP2496419B1 (en
EP2496419A1 (en
Inventor
Gregory John Mcavoy
Ronan Padraig Sean O'reilly
David Mcleod Johnstone
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Memjet Technology Ltd
Original Assignee
Zamtec Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zamtec Ltd filed Critical Zamtec Ltd
Publication of EP2496419A1 publication Critical patent/EP2496419A1/en
Publication of EP2496419A4 publication Critical patent/EP2496419A4/en
Application granted granted Critical
Publication of EP2496419B1 publication Critical patent/EP2496419B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/145—Arrangement thereof
    • B41J2/155—Arrangement thereof for line printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/18—Electrical connection established using vias

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP09847677.3A 2009-07-27 2009-07-27 Inkjet printhead assembly having backside electrical connection Active EP2496419B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/AU2009/000953 WO2011011807A1 (en) 2009-07-27 2009-07-27 Inkjet printhead assembly having backside electrical connection

Publications (3)

Publication Number Publication Date
EP2496419A1 EP2496419A1 (en) 2012-09-12
EP2496419A4 true EP2496419A4 (en) 2014-02-19
EP2496419B1 EP2496419B1 (en) 2018-05-30

Family

ID=43528619

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09847677.3A Active EP2496419B1 (en) 2009-07-27 2009-07-27 Inkjet printhead assembly having backside electrical connection

Country Status (6)

Country Link
EP (1) EP2496419B1 (en)
JP (1) JP5475116B2 (en)
KR (1) KR101444560B1 (en)
CN (1) CN102470671B (en)
SG (1) SG176568A1 (en)
WO (1) WO2011011807A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9289974B2 (en) 2013-04-29 2016-03-22 Hewlett-Packard Development Company L.P. Printhead control systems and methods for controlling a printhead
CN105453539B (en) * 2013-08-02 2019-02-22 富士胶片株式会社 Image processing apparatus, photographic device and image processing method
JP6492891B2 (en) 2015-03-31 2019-04-03 ブラザー工業株式会社 Liquid ejection device and liquid ejection device unit
JP6911170B2 (en) * 2016-02-24 2021-07-28 ヒューレット−パッカード デベロップメント カンパニー エル．ピー．Ｈｅｗｌｅｔｔ‐Ｐａｃｋａｒｄ Ｄｅｖｅｌｏｐｍｅｎｔ Ｃｏｍｐａｎｙ， Ｌ．Ｐ． Fluid discharge device including integrated circuits
TWI789529B (en) 2018-07-30 2023-01-11 瑞士商西克帕控股有限公司 A multi-chip module (mcm) assembly
MX2021007974A (en) * 2019-02-06 2021-08-16 Hewlett Packard Development Co Fluid ejection devices including electrical interconnect elements for fluid ejection dies.
CN113365842B (en) * 2019-02-06 2022-10-14 惠普发展公司，有限责任合伙企业 Fluid ejection device and method of manufacturing fluid ejection device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6394580B1 (en) * 2001-03-20 2002-05-28 Hewlett-Packard Company Electrical interconnection for wide-array inkjet printhead assembly
EP1559557A2 (en) * 2004-01-30 2005-08-03 Hewlett-Packard Development Company, L.P. A method of making an inkjet printhead
WO2006009236A1 (en) * 2004-07-22 2006-01-26 Canon Kabushiki Kaisha Ink jet recording head and ink jet recording apparatus
US20080225076A1 (en) * 2007-03-12 2008-09-18 Silverbrook Research Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face

Family Cites Families (19)

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JP3309341B2 (en) * 1992-08-05 2002-07-29 株式会社吉野工業所 Tube container supply device
US6536882B1 (en) * 2000-07-26 2003-03-25 Eastman Kodak Company Inkjet printhead having substrate feedthroughs for accommodating conductors
US6727115B2 (en) * 2001-10-31 2004-04-27 Hewlett-Packard Development Company, L.P. Back-side through-hole interconnection of a die to a substrate
US6902872B2 (en) * 2002-07-29 2005-06-07 Hewlett-Packard Development Company, L.P. Method of forming a through-substrate interconnect
US6755509B2 (en) 2002-11-23 2004-06-29 Silverbrook Research Pty Ltd Thermal ink jet printhead with suspended beam heater
JP2005044927A (en) * 2003-07-25 2005-02-17 Kyocera Corp Piezoelectric actuator and its manufacturing method, and liquid discharge apparatus
JP4456609B2 (en) * 2004-01-21 2010-04-28 シルバーブルック リサーチ ピーティワイ リミテッド Printhead assembly and printhead module
US7524016B2 (en) * 2004-01-21 2009-04-28 Silverbrook Research Pty Ltd Cartridge unit having negatively pressurized ink storage
US7441865B2 (en) 2004-01-21 2008-10-28 Silverbrook Research Pty Ltd Printhead chip having longitudinal ink supply channels
US7275805B2 (en) 2004-05-27 2007-10-02 Silverbrook Research Pty Ltd Printhead comprising different printhead modules
US7303930B2 (en) 2005-10-11 2007-12-04 Silverbrook Research Pty Ltd Method of fabricating suspended beam in a MEMS process
US7438371B2 (en) 2005-12-05 2008-10-21 Silverbrook Research Pty Ltd Method of modulating printhead peak power requirement using redundant nozzles
JP2007326340A (en) * 2006-06-09 2007-12-20 Canon Inc Inkjet recording head and its manufacturing method
JP4819608B2 (en) * 2006-07-31 2011-11-24 富士フイルム株式会社 Liquid ejection head, liquid ejection apparatus, and image forming apparatus
US7984973B2 (en) 2006-12-04 2011-07-26 Silverbrook Research Pty Ltd Thermal bend actuator comprising aluminium alloy
US7938974B2 (en) 2007-03-12 2011-05-10 Silverbrook Research Pty Ltd Method of fabricating printhead using metal film for protecting hydrophobic ink ejection face
US7669967B2 (en) 2007-03-12 2010-03-02 Silverbrook Research Pty Ltd Printhead having hydrophobic polymer coated on ink ejection face
US7819503B2 (en) 2007-06-15 2010-10-26 Silverbrook Research Pty Ltd Printhead integrated circuit comprising inkjet nozzle assemblies having connector posts
US8029097B2 (en) 2008-11-26 2011-10-04 Silverbrook Research Pty Ltd Inkjet nozzle assembly having moving roof structure and sealing bridge

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6394580B1 (en) * 2001-03-20 2002-05-28 Hewlett-Packard Company Electrical interconnection for wide-array inkjet printhead assembly
EP1559557A2 (en) * 2004-01-30 2005-08-03 Hewlett-Packard Development Company, L.P. A method of making an inkjet printhead
WO2006009236A1 (en) * 2004-07-22 2006-01-26 Canon Kabushiki Kaisha Ink jet recording head and ink jet recording apparatus
US20080225076A1 (en) * 2007-03-12 2008-09-18 Silverbrook Research Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2011011807A1 *

Also Published As

Publication number Publication date
CN102470671A (en) 2012-05-23
EP2496419B1 (en) 2018-05-30
SG176568A1 (en) 2012-01-30
CN102470671B (en) 2014-11-26
JP5475116B2 (en) 2014-04-16
WO2011011807A1 (en) 2011-02-03
KR20120031499A (en) 2012-04-03
EP2496419A1 (en) 2012-09-12
JP2012529384A (en) 2012-11-22
KR101444560B1 (en) 2014-10-07

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