CN109374259A - Holographic grating period high precision online measuring and regulating device - Google Patents
Holographic grating period high precision online measuring and regulating device Download PDFInfo
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- CN109374259A CN109374259A CN201811318508.0A CN201811318508A CN109374259A CN 109374259 A CN109374259 A CN 109374259A CN 201811318508 A CN201811318508 A CN 201811318508A CN 109374259 A CN109374259 A CN 109374259A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/32—Holograms used as optical elements
Abstract
The invention discloses a kind of holographic grating period high precision online measuring and regulating devices, the device includes the double-beam holographic interference optical path for generating and adjusting grid fields, photodetector for generating the reference grating coaxially interfered with acquiring interference signal, and the laser interferometer system of one-dimensional high precision movement platform and measurement displacement for scanning holographic grating field.Its main feature is that introducing reference grating in conventional photographic optical path, two beam coherent lights are made to generate coaxial interference, by the mechanical periodicity for measuring the interference signal, it realizes the high precision online measuring to holographic grating field, while realizing the high-precision on-line control in holographic grating period by the two-dimensional movement of collimation lens.
Description
Technical field
The present invention relates to a kind of measuring device in holographic grating period, especially it is a kind of coaxially interfere by reference to grating with
Scanning probe realizes the high precision online measuring of holographic interference grid fields and the device of adjusting.
Background technique
Grating is a kind of basic optical element, due to the superior dispersion characteristics of grating and light splitting ability, superlaser,
The fields such as accurate measurement, Three-dimensional Display, recognition of face, biologic medical detection and astronomical observation play an important role.With
The development of promotion and the scientific research of industrial manufacturing level, the demand across scale grating is more urgent, grating processing ruler
Very little increasing, raster density is also higher and higher.For example, in clapping watt ultra high power laser system, in order to realize higher energy
Pulse laser output, need the large scale pulse compression grating of meter level or more as support；On the other hand, permitted in x-ray
Raster density is required in every millimeter of lines thousands of or even up to ten thousand in more applications, these new requirements manufacture to grating and detect skill
Art proposes stern challenge.
Period is one of most important parameter of grating, how to produce and determines it with the setting period consistent grating of height
Application performance has reached sub-nanometer even micromicron magnitude to the required precision of screen periods in many grating application fields at present.
By taking grating scale as an example, the either low-density grating based on Moire fringe, or the high dencity grating based on beam splitting interference is all
Using screen periods as measuring basis.The uncertainty of screen periods will lead to biggish measurement error, though can by with
Laser interferometer compares the linearity error for eliminating period deviation, the nonlinearity erron as caused by the inhomogeneities of screen periods
It is difficult full correction.Especially in high-end litho machine, important means of the high-precision two-dimensional grating scale as Bit andits control is missed
Difference is typically superior to 1nm, this proposes very harsh requirement to the Accurate Calibration of screen periods.In addition, screen periods is high-precision
Degree measurement is also critically important in application fields such as fiber gratings, in order to realize the accurate matching of spectrum, general fiber grating position phase version
Period precision in 0.01nm magnitude, while the chirp value of chirp grating means the slowly varying of screen periods, generally also needs
Reach the controlled level of every millimeter of sub-nanometer.
In order to realize that the high-acruracy survey of screen periods, most straightforward approach are that beam of laser is impinged perpendicularly on grating table
Face, according to grating equation P=m λ/sin θ, laser will be diffracted into different levels, using method of geometry, measure the angle of diffraction
The value of screen periods can be extrapolated.When measurement is apart from long enough, the sub-nanometer that screen periods may be implemented is demarcated.But it should
Method needs, which first process grating, to be just capable of measuring, if inconsistent with the setting period, to readjust machined parameters, and
Processing-measurement-adjustment process is repeated, cost is very high, and efficiency is extremely low.
First technology [C.G.Chen, etc. " Image metrology and system controls for
scanning beam interference lithography,”Journal of Vacuum Science&Technology
B 19,2335-2341 (2001)] in, according to scanning interferometer photoetching technique (Scanning Beam Interference
Lithography, SBIL) the characteristics of, MIT scientific research personnel Dr.Carl Chen et al. propose based on beam splitter prism in linear light
Grid cycle measurement method.Scanning interferometer photoetching technique is a kind of laser direct-writing grating technology, is interfered using two beam small light spots and is generated
Grid fields, the processing of large-area grating is realized by the method for overlapping scan.In the art, by introducing one piece of beam splitting rib
Two interfering beams are combined into light beam and imported in photodetector by mirror, when mobile beam splitter prism, synthesize the light intensity of light beam
The variation of meeting generating period, corresponding moving distance is exactly the period of grid fields.The technology is by measuring thousands of secondary light intensity weeks
Phase variation (corresponding several millimeters of hot spot), so that measurement error reduces thousands of times, it is achieved that the grating of micromicron magnitude
Periodic on-line measurement.
In document [Xiansong Xiang, etc. " Precision fringe period metrology using
LSQ sine fit algorithm, " Applied Optics 57,4777-4784 (2018)] in, Xiansong Xiang
Et al. MIT method is improved, by designing novel interference prism, simplify the export and acquisition system of signal, together
Shi Liyong least square method is fitted screen periods, equally realizes the screen periods measurement of micromicron magnitude.
Other than laser direct-writing processes grating technology, holographic interference is also the important means for processing grating.However it is above-mentioned
This grating On-line Measuring Method may not apply in holographic grating system of processing, and most important problem is in holographic exposure system
Grid fields are very big, usually by several hundred millimeters, if carrying out conjunction beam using beam splitter prism, can only obtain the light intensity of very a small range
Variation, is unable to get the period profile of entire grid fields.[Li Wenhao etc., " Moire fringe technique accurately controls holographic optical to first technology
The research of grid grating constant ", Chinese journal of scientific instrument, 34,2867-2873 (2013).] in, Li Wenhao et al. is proposed based on ginseng
The period scaling method for examining grating is generated not by placing reference grating in exposure area by holographic grating field and reference grating
That striped, fringe density can show the deviation of holographic grating field and reference grating period, and striped is more sparse, and periodic deviation is got over
It is small, when Moire fringe disappears, when only complete bright or complete dark light distribution, illustrate that the holographic grating period is consistent with reference grating.
It can achieve the stated accuracy of sub-nanometer in the technical know-how, and the corrugated that can measure holographic grating field is poor, but still deposits
In problems.Firstly, the different postures of reference grating will affect density and the direction of Moire fringe, that is to say, that Moire fringe
The deviation of screen periods can not directly be reacted, it is most likely that it is the error of reference grating 3 d pose adjustment, therefore measure
Precision can have a greatly reduced quality；Secondly, reference grating is as measurement standard, indices requirement is very high, including its periodic quantity, grating
Corrugated and substrate planarity etc.；In addition, large area measurement needs the high quality reference grating of same scale, this is for large scale
Grating measuring is very big challenge.
Summary of the invention
The purpose of the present invention is to solve drawbacks described above in the prior art, provide a kind of holographic grating period high-precision
On-line measurement and regulating device.
The purpose of the present invention can be reached by adopting the following technical scheme that:
A kind of holographic grating period high precision online measuring and regulating device, the device include:
Double-beam holographic interference optical path, for generating highdensity grating fringe field, adjust interference field screen periods and
Corrugated, and can be realized accurate periodic adjustment；
Reference grating 9 generates coaxial interference, to be formed stable for some diffraction time of two-beam to be overlapped
Interference field；
Photodetector 11, for receiving the intensity signal of interference field；
Laser interferometer 13 and reflecting mirror 14, the displacement for high-acruracy survey mobile platform；
High Precision One Dimensional mobile platform 12, for realizing reference grating 9 and photodetector 11 and laser interferometer 13
With the movement of reflecting mirror 14；
Synchronously control, data Collection & Processing System acquire strength information, high-precision one for controlling photodetector 11
The displacement measurement of the motion in one dimension and laser interferometer 13 of tieing up mobile platform 12 remains synchronous, and passes through digital processing meter
Screen periods are calculated, in 12 motion process of High Precision One Dimensional mobile platform, the information that photodetector 11 records is periodically to become
The light intensity of change, light intensity light and shade change frequency are N, and it is L that laser interferometer 13, which measures obtained displacement, then holographic grating is calculated
Period is P=L/N.
Further, the double-beam holographic interference optical path include: hololaser 1,2, two sets of beam splitter symmetrically put
The first reflecting mirror 3 set and the second transmitting mirror 4, first filtering object lens 5 and the second filtering object lens 6, the first collimation lens 7 and second
Collimation lens 8, and the substrate adjustment frame in grating fringe field are fixed with reference grating 9 on the substrate adjustment frame,
Wherein, relevant ultraviolet light beam is stablized in the output of hololaser 1, is uniformly divided into two beams by beam splitter 2, and utilize the first reflection
Mirror 3 and the second reflecting mirror 4 are introduced between in symmetrically placed the first filtering object lens 5 and the second filtering object lens 6, by what is expanded
Two-beam finally becomes directional light by the first collimation lens 7 and the second collimation lens 8 respectively, intersects in reference grating 9, shape
At highdensity holographic grating fringe field.
Further, first collimation lens 7 and the second collimation lens 8 are fixed on two-dimensional precision translation stage pedestal
On, by adjusting the lateral position of collimation lens, the exit direction for continuously adjusting collimated light beam is realized, so that two-beam is dry
Continuous variation occurs for the angle that relates to, then screen periods also consecutive variations therewith, by adjusting the axial position of collimation lens,
Realize different degrees of defocusing amount, so that outgoing beam is become by directional light with the slight spherical wave dissipated or converge, thus
Change the spatial distribution of two-beam interference periods.
Further, it is provided with aperture 10 in the optical path between the reference grating 9 and photodetector 11, led to
The constraint of small holes diaphragm 10, the acquired information of photodetector 11 are the sub-fraction of coaxial interference optical field, are less than interference item
The half in line period.
Further, the photodetector 11 is photomultiplier tube or CCD charge-coupled device.
Further, the reference grating 9 is transmission-type or reflective, density and holographic interference light field period one
It causes, or with the holographic interference light field period at multiple proportion.
Further, the laser interferometer 13, reflecting mirror 14 and the reference grating 9, photodetector 11 are same
When be fixed on High Precision One Dimensional mobile platform 12, also, the reflecting mirror 14 and reference grating 9 are located at same level,
The laser that the laser interferometer 13 is emitted simultaneously is consistent with 12 direction of motion of High Precision One Dimensional mobile platform, and and reference light
Grid 9 are in same plane.
Further, the synchronously control, Data collection and precessing system are realized by industrial personal computer 15, and pass through plate
Card, controller and data line connect photodetector 11, laser interferometer 13 and High Precision One Dimensional mobile platform 12, and benefit
The synchronously control to distinct device is realized with computer instruction.
Further, the hololaser 1 uses ultraviolet laser, and the beam splitter 2 uses semi-transparent semi-reflecting lens.
The present invention has the following advantages and effects with respect to the prior art:
The invention proposes beam interferometer is closed based on reference grating, while being swept using high precision displacement platform and laser interferometer
Grid fields are retouched, realize the high precision online measuring in holographic grating period.Ginsengs different from reference grating in the prior art, used
Examining grating, there is no stringent quality requirements, and screen periods and the poor, flatness of difference and corrugated of holographic grating field etc. are
Final measurement result is not influenced.The effect of reference grating is that two beam holography coherent lights are combined into a branch of, the coaxial interference of formation,
By the scanning to holographic grating field, periodic Strength Changes are generated, and then Accurate Estimation goes out the holographic grating period.Meanwhile
By the mobile collimation lens of two-dimension high-precision, the period that can be realized holographic grating field fine-tunes the device.As both can be with
The online screen periods high-precision calibrating technology that measurement can be adjusted again significantly improves the precision of grating processing, while
The processing efficiency of raising, therefore the invention is manufacturing high-precision holographic grating, such as two-dimensional grating ruler, fiber grating position phase
It would be possible to obtain important application in plate, chirp grating and concave grating.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of holographic grating period high precision online measuring and regulating device in the present invention；
Fig. 2 (a) is to adjust screen periods schematic diagram using the transverse shifting of collimation lens；
Fig. 2 (b) is to adjust grating corrugated schematic diagram using the axial movement of collimation lens；
Fig. 3 (a) is the measurement structural representation of same period transmission-type reference grating；
Fig. 3 (b) is the measurement structural representation of doubling time transmission-type reference grating；
Fig. 3 (c) is the measurement structural representation of the reflective reference grating of doubling time；
Fig. 4 is specific implementation example period measurement schematic diagram in the present invention.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
Embodiment one
The present embodiment discloses a kind of holographic grating period high precision online measuring and regulating device, comprising: double-beam holographic
Optical interference circuit for generating highdensity grating fringe field, and can be realized accurate periodic adjustment；Reference grating and photoelectricity are visited
Device is surveyed, reference grating is used to for some diffraction time of two-beam being overlapped, and coaxial interference is generated, to form stable interference
, photodetector is used to receive the intensity signal of interference field；High Precision One Dimensional mobile platform and laser interferometer system, it is high-precision
Degree one-dimensional movement platform is for realizing the movement of grating and photodetector, and laser interferometer is for high-acruracy survey mobile station position
It moves；Synchronously control, data Collection & Processing System, control photodetector acquire strength information, the motion in one dimension of mobile platform
And the displacement measurement of laser interferometer system remains synchronous, and calculates screen periods by digital processing.The device can
To meet the high precision online measuring demand in holographic grating period, while acceptable high-precision on-line control screen periods, therefore
To there is important application value in the processing of high-precision grating.
It is coaxial to interfere record system, High Precision One Dimensional movement and displacement measurement the device mainly includes holographic interference system
System and synchronously control, Data collection and precessing system.As shown in Figure 1, holographic grating period high-acruracy survey and adjusting dress
It sets and mainly filters object by hololaser 1, beam splitter 2, the first reflecting mirror 3, the second reflecting mirror 4, first filtering object lens 5, second
Mirror 6, the first collimation lens 7, the second collimation lens 8, reference grating 9, aperture 10, photodetector 11, High Precision One Dimensional
The composition such as mobile platform 12, laser interferometer 13, reflecting mirror 14 and industrial personal computer 15.
Holographic interference system is double-beam holographic interference optical path, for generating highdensity grating fringe field, and can essence
Thin tuning grating field duration and corrugated.It specifically includes: hololaser 1,2, two sets of beam splitter the first symmetrically placed reflecting mirrors 3
Object lens 5 and the second filtering object lens 6, the first collimation lens 7 and the second collimation lens 8 are filtered with the second transmitting mirror 4, first, and
Photolithograhic substrates adjustment frame (placed reference grating 9 in figure) in grating fringe field.Wherein, hololaser 1 exports surely
Surely relevant ultraviolet light beam, is uniformly divided into two beams by beam splitter 2, and draw respectively using the first reflecting mirror 3 and the second reflecting mirror 4
Enter into symmetrically placed the first expand device 5 and the second expand device 6, finally passes through first respectively by the two-beam expanded
Collimation lens 7 and the second collimation lens 8 become directional light, intersect on photolithograhic substrates adjustment frame, form highdensity holographic optical
Grid fringe field, first collimation lens 7 and the second collimation lens 8 are mounted on two-dimensional precision translation stage pedestal.
The holographic interference system can be realized high-precision screen periods simultaneously and adjust, and method is by two-dimensional movement first
Collimation lens 7 and the second collimation lens 8, thus it is possible to vary the direction or corrugated of outgoing beam, to change the period of interference field.
By taking wherein light beam as an example, as shown in Fig. 2, the first collimation lens 7 is fixed on two-dimensional precision translation stage pedestal, first expands dress
It sets 5 fixed, by adjusting the lateral position (Fig. 2 (a)) of the first collimation lens 7, realizes and continuously adjust going out for collimated light beam
Direction is penetrated, so that continuous variation occurs for the angle of two-beam interference, then screen periods also consecutive variations therewith.Pass through
The axial position (Fig. 2 (b)) for adjusting the first collimation lens 7, may be implemented different degrees of defocusing amount, so that outgoing beam is by putting down
Row light becomes with the slight spherical wave dissipated or converge, to change the spatial distribution of two-beam interference periods.Utilize the party
Method can fine adjustment screen periods, and the grid fields of variable period may be implemented, the processing for the special grating such as chirp grating.
Coaxial interference record system is core of the invention part, including reference grating 9, aperture 10 and photodetection
Device 11.Reference grating 9 is placed on the substrate adjustment frame of interference optical field, in order to make some of two-beam in holographic light path
Diffraction time is overlapped, and realizes coaxial interference.By adjusting reference grating posture, interference fringe can be made to become very sparse, so
Interference field strength information is acquired by photodetector 11 afterwards.Photodetector 11 can be photomultiplier tube, be also possible to CCD
Equal light-sensitive devices.By the constraint of aperture 10, the acquired information of photodetector 11 is a small portion of coaxial interference optical field
Point, less than the half of fringe period.
Reference grating 9 is transmission-type or reflective, and density is consistent with the holographic interference light field period, or and holographic interference
The light field period is at multiple proportion.As shown in figure 3, being needed according to different reference grating types using different measurement structures, figure
Reference grating 9 is transmission-type in 3 (a), and raster density is consistent with holographic grating, and reference grating 9 is transmission-type, grating in Fig. 3 (b)
Density is the half of holographic grating, and reference grating 9 is reflective in Fig. 3 (c), and raster density is the half of holographic grating, this hair
Bright technical solution includes but is not limited to several measurement structures shown in Fig. 3.There are many processing method of the reference grating, can use
The technologies such as mechanical scratching, electron-beam direct writing, laser direct-writing obtain, and can also expose in holophotal system to be measured and directly be formed,
The period slight difference of period and holographic interference light field does not influence final measurement result.
High Precision One Dimensional is mobile and displacement measurement system realizes the scanning survey to holographic grating field, including High Precision One Dimensional
Mobile station 12, laser interferometer 13 and reflecting mirror 14.High Precision One Dimensional mobile station 12 has good movenent performance, and linearity is logical
It is often better than 1 micron, the direction of motion is vertical with the stripe direction of holographic interference grating.The carrying ginseng of High Precision One Dimensional mobile platform 12
It examines grating 9, aperture 10 and photodetector 11 to move together, realizes the scanning probe to holographic interference light field.
On High Precision One Dimensional mobile platform 12 simultaneously fixed laser interferometer 13 reflecting mirror 14, for measuring mobile platform
Move distance, the laser and reference mirror of laser interferometer 13 be fixed on in holographic interference system identical platform.Laser is dry
Interferometer 13 and reflecting mirror 14 should be located at same level with reference grating 9, at the same the laser that is emitted of laser interferometer 13 with it is high-precision
Degree one-dimensional movement 12 direction of motion of platform is consistent, and is in same plane with reference grating 9, avoids the influence of Abbe error.
In 12 motion process of High Precision One Dimensional mobile platform, the information that photodetector 11 records is periodically variable light intensity, right
The cycle information of holographic grating field should be contained in the position that laser interferometer 13 measures.
Synchronously control, Data collection and precessing system are realized by industrial personal computer 15, and pass through board, controller and data line
It is connected Deng by photodetector 11, laser interferometer 13 and High Precision One Dimensional mobile platform 12, and real using computer instruction
Now to the synchronously control of distinct device.The synchronization of 12 setting in motion of High Precision One Dimensional mobile platform, 11 He of photodetector
13 start recording data of laser interferometer, the synchronization of 12 stop motion of High Precision One Dimensional mobile platform, photodetector 11
Data are stopped recording with laser interferometer 13.Industrial personal computer 15 will realize the place to data after data acquisition by algorithm
Reason, is calculated the period of holographic interference grating.
By the scanning of High Precision One Dimensional mobile platform 12, the time that photodetector 11 has recorded coaxial interference light intensity becomes
Change sequence, light intensity change frequency is N, while the displacement that laser interferometer measurement obtains is L, then holographic grating can be calculated
Period is P=L/N, the precision of displacement measurement and the calculating error of light intensity change frequency, determines the precision of screen periods, passes through
Thousands of up to ten thousand light intensity variations are recorded, measurement error can be greatly lowered, realize the screen periods calibration of micromicron magnitude.
Embodiment two
The invention discloses a kind of holographic grating period high precision online measuring and regulating devices, according to the holographic grating period
It, can be there are many implementation method with the difference of device selection.
In the present embodiment, intend measuring and the holographic grating period adjusted is 833.333nm (1200 lines per millimeter), it is holographic
The angle of light beam is 30.6864 degree.The holographic light source used is helium cadmium laser (Kimmon, model IK4171I-G), wavelength
It is 441 nanometers, laser output power 180mW.Incident light is divided into two beams with the energy ratio of 1:1 by semi-transparent semi-reflecting lens, so
After be radiated in two panels silvered mirror, adjust the angle of reflecting mirror, intersect light beam light symmetrically, while angle is close to 30.7
Degree.Symmetrically placed filtering object lens and collimation lens device in two light beams, the light beam by shearing interferometer judgement outgoing are
Directional light.Wherein collimation lens is mounted on high-precision two-dimensional mobile platform, and 1.5 meters of the focal length of lens, two-dimensional movement platform is adjusted
Precision 0.01mm, according to the simple reckoning of geometric optics, the minimum change in available holographic grating period is about 0.01nm, from
And it realizes high-precision screen periods and adjusts.
PI High Precision One Dimensional mobile platform is placed horizontally in holographic interference light field, substrate adjustment is fixed on mobile platform
The reflecting mirror of frame and laser interferometer (Angilent, model 5530, double-frequency interference instrument), reflecting mirror and substrate adjustment frame
In same perpendicular.The incident laser for adjusting reflecting mirror and laser interferometer moves measurement direction and mobile platform
Direction is consistent.It will be measured using density reference grating identical with holographic light field in the present embodiment, reference grating passes through straight
Exposure is connect to obtain.Substrate to be exposed by spin coating processing is placed on substrate adjustment frame, and adjust substrate to make its plane of exposure
It is consistent with moving direction, substrate spin coating thickness 280nm, the time for exposure 40 seconds.It is dried with after by developing, completes reference grating
Production.
As shown in figure 4, reapposing reference grating on substrate adjustment frame, reference grating posture is adjusted, left side light is made
The zero level of beam is consistent with the negative one grade direction of the right light beam.Coaxial interference will occur for two-beam, form sparse interference fringe,
Substrate adjustment frame is finely tuned, keeps number of interference fringes minimum, usual fringe period about 10mm or more.Photodetector is fixed on Fig. 4
Shown in position, adjust aperture size, so that the energy less than half of fringe period is entered photodetector.
Laser interferometer, photodetector and High Precision One Dimensional mobile platform are connected into industry control with board by controller
Machine.High Precision One Dimensional mobile platform uniform motion is controlled by computer instruction, while laser interferometer and photodetector are opened
Begin acquisition data.Laser interferometer acquisition is the displacement information changed over time, and photodetector acquisition is to become at any time
The intensity signal of change, the two is corresponding by clock signal, to obtain the intensity signal with change in displacement.The information has the period
Property variation the characteristics of, be ideally sinus shaped curves, due to the influence of measurement error and environmental vibration, which can occur
Deformation, can obtain the times N of mechanical periodicity, while corresponding laser interference by the acquisition process of mass data with precise measurement
Instrument measurement displacement is L, then the period that can extrapolate holographic grating is P=L/N.Alternatively, it is also possible to be carried out just to signal curve
String fitting, can equally obtain high-precision screen periods.Displacement selection 100mm, the grating measured for the first time in the present embodiment
Period is 838nm, differs larger with setting screen periods, by lateral adjustments collimation lens, approaches the holographic grating period to setting
Near definite value.The measurement result of final the present embodiment 20 times average out to 833.334nm, maximum value 833.351nm, minimum value
833.323nm mean square deviation 5.6pm.
This example demonstrates that holographic grating period high precision online measuring is feasible, measurement and adjusting with regulation technology
Precision has reached micromicron magnitude, and measurement and adjusting method are simple and efficient, and are used for existing holographic grating system of processing, can be significant
Grating performance is improved, period high-precision controllable grating processing and application demand are met.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention,
It should be equivalent substitute mode, be included within the scope of the present invention.
Claims (9)
1. a kind of holographic grating period high precision online measuring and regulating device, which is characterized in that the device includes:
Double-beam holographic interference optical path adjusts screen periods and the corrugated of interference field for generating highdensity grating fringe field,
And it can be realized accurate periodic adjustment；
Reference grating (9) generates coaxial interference, to form stable do for some diffraction time of two-beam to be overlapped
Relate to field；
Photodetector (11), for receiving the intensity signal of interference field；
Laser interferometer (13) and reflecting mirror (14), the displacement for high-acruracy survey mobile platform；
High Precision One Dimensional mobile platform (12), for realizing reference grating (9) and photodetector (11) and laser interferometer
(13) and the movement of reflecting mirror (14)；
Synchronously control, data Collection & Processing System, for controlling photodetector (11) acquisition strength information, High Precision One Dimensional
The motion in one dimension of mobile platform (12) and the displacement measurement of laser interferometer (13) remain synchronous, and pass through digital processing
Screen periods are calculated, in High Precision One Dimensional mobile platform (12) motion process, the information of photodetector (11) record is week
The light intensity of phase property variation, light intensity light and shade change frequency are N, and the displacement that laser interferometer (13) measurement obtains is L, then is calculated
The holographic grating period is P=L/N.
2. holographic grating period high precision online measuring according to claim 1 and regulating device, which is characterized in that
The double-beam holographic interference optical path include: hololaser (1), beam splitter (2), two sets symmetrically placed first it is anti-
Penetrate mirror (3) and the second transmitting mirror (4), the first filtering object lens (5) and the second filtering object lens (6), the first collimation lens (7) and second
Collimation lens (8), and the substrate adjustment frame in grating fringe field are fixed with reference grating on the substrate adjustment frame
(9), wherein relevant ultraviolet light beam is stablized in hololaser (1) output, is uniformly divided into two beams by beam splitter (2), and utilize
First reflecting mirror (3) and the second reflecting mirror (4) are introduced between symmetrically placed the first filtering object lens (5) and the second filtering object lens
(6) in, finally become directional light by the first collimation lens (7) and the second collimation lens (8) respectively by the two-beam expanded,
It intersects on reference grating (9), forms highdensity holographic grating fringe field.
3. holographic grating period high precision online measuring according to claim 2 and regulating device, which is characterized in that described
The first collimation lens (7) and the second collimation lens (8) be fixed on two-dimensional precision translation stage pedestal, pass through adjust collimation lens
Lateral position, realize and continuously adjust the exit direction of collimated light beam so that the angle of two-beam interference occur it is continuous
Variation, then also consecutive variations therewith by adjusting the axial position of collimation lens realize different degrees of defocus to screen periods
Amount, so that outgoing beam is become by directional light with the slight spherical wave dissipated or converge, to change two-beam interference periods
Spatial distribution.
4. holographic grating period high precision online measuring according to claim 1 and regulating device, which is characterized in that described
Reference grating (9) and photodetector (11) between optical path on be provided with aperture (10), pass through aperture (10)
Constraint, photodetector (11) acquired information be coaxial interference optical field sub-fraction, less than the two of fringe period
/ mono-.
5. holographic grating period high precision online measuring according to claim 1 and regulating device, which is characterized in that described
Photodetector (11) be photomultiplier tube or CCD charge-coupled device.
6. holographic grating period high precision online measuring according to claim 1 and regulating device, which is characterized in that described
Reference grating (9) be transmission-type or reflective, density is consistent with the holographic interference light field period, or with holographic interference light field
Period is at multiple proportion.
7. holographic grating period high precision online measuring according to claim 1 and regulating device, which is characterized in that described
Laser interferometer (13), reflecting mirror (14) and the reference grating (9), photodetector (11) be also secured to high-precision
It is moved one-dimensionally on platform (12), also, the reflecting mirror (14) and reference grating (9) are located at same level, while described
Laser interferometer (13) outgoing laser it is consistent with High Precision One Dimensional mobile platform (12) direction of motion, and and reference grating
(9) in same plane.
8. holographic grating period high precision online measuring according to claim 1 and regulating device, which is characterized in that described
Synchronously control, Data collection and precessing system realized by industrial personal computer (15), and by board, controller and data line by light
Electric explorer (11), laser interferometer (13) and High Precision One Dimensional mobile platform (12) connection, and it is real using computer instruction
Now to the synchronously control of distinct device.
9. holographic grating period high precision online measuring according to claim 1 and regulating device, which is characterized in that described
Hololaser (1) use ultraviolet laser, the beam splitter (2) use semi-transparent semi-reflecting lens.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109580571A (en) * | 2019-01-11 | 2019-04-05 | 中国科学院上海光学精密机械研究所 | The detection device and detection method of potential finger mark |
| CN110057543A (en) * | 2019-04-24 | 2019-07-26 | 暨南大学 | Based on the wavefront measurement device coaxially interfered |
| CN110132169A (en) * | 2019-05-22 | 2019-08-16 | 暨南大学 | It is a kind of based on the wavefront measurement system and method coaxially interfered |
| CN110986761A (en) * | 2019-11-18 | 2020-04-10 | 中国科学院上海光学精密机械研究所 | Picomicroscope |
| CN111649693A (en) * | 2020-05-27 | 2020-09-11 | 中国科学院微电子研究所 | Sample morphology measuring device and method |
| CN112198576A (en) * | 2020-10-12 | 2021-01-08 | 中国计量大学 | Ultraviolet exposure method of volume holographic Bragg reflector |
| CN112229318A (en) * | 2020-09-14 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Measuring tape |
| CN113325683A (en) * | 2021-05-11 | 2021-08-31 | 昆明理工大学 | Off-axis scanning holographic three-dimensional target real-time joint transformation recognition system and method |
| WO2023008691A1 (en) * | 2021-07-29 | 2023-02-02 | Samsung Electronics Co., Ltd. | Method and system for simultaneous recording of superimposed holographic gratings for augmented reality devices (variants) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2338212A2 (en) * | 2008-10-22 | 2011-06-29 | Massachusetts Institute of Technology | Fourier domain mode locking |
| CN102566391A (en) * | 2012-02-16 | 2012-07-11 | 中国科学院上海光学精密机械研究所 | Device for preparing holographic scan high-density grating based on focus of cylindrical mirror |
| CN102620908A (en) * | 2012-03-20 | 2012-08-01 | 西北工业大学 | Method for acquiring reflection type volume holographic grating parameters |
| CN103076162A (en) * | 2013-02-04 | 2013-05-01 | 中国科学院光电技术研究所 | Device for measuring period of sub-wavelength grating |
| CN105954977A (en) * | 2016-07-08 | 2016-09-21 | 中国科学院长春光学精密机械与物理研究所 | Holographic grating manufacture apparatus, and holographic grating exposure interference fringe phase stabilizing apparatus and method |
| CN206161282U (en) * | 2016-10-20 | 2017-05-10 | 尚文涛 | Reflective diffraction grating cycle measuring device |
| CN107664482A (en) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | grating measuring device |
-
2018
- 2018-11-07 CN CN201811318508.0A patent/CN109374259A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2338212A2 (en) * | 2008-10-22 | 2011-06-29 | Massachusetts Institute of Technology | Fourier domain mode locking |
| CN102566391A (en) * | 2012-02-16 | 2012-07-11 | 中国科学院上海光学精密机械研究所 | Device for preparing holographic scan high-density grating based on focus of cylindrical mirror |
| CN102620908A (en) * | 2012-03-20 | 2012-08-01 | 西北工业大学 | Method for acquiring reflection type volume holographic grating parameters |
| CN103076162A (en) * | 2013-02-04 | 2013-05-01 | 中国科学院光电技术研究所 | Device for measuring period of sub-wavelength grating |
| CN105954977A (en) * | 2016-07-08 | 2016-09-21 | 中国科学院长春光学精密机械与物理研究所 | Holographic grating manufacture apparatus, and holographic grating exposure interference fringe phase stabilizing apparatus and method |
| CN107664482A (en) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | grating measuring device |
| CN206161282U (en) * | 2016-10-20 | 2017-05-10 | 尚文涛 | Reflective diffraction grating cycle measuring device |
Non-Patent Citations (1)
| Title |
|---|
| 姜珊等: "扫描干涉场曝光系统中干涉条纹周期精确测量方法", 《光学学报》 * |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109580571B (en) * | 2019-01-11 | 2021-05-04 | 中国科学院上海光学精密机械研究所 | Detection device and detection method for potential fingerprints |
| CN109580571A (en) * | 2019-01-11 | 2019-04-05 | 中国科学院上海光学精密机械研究所 | The detection device and detection method of potential finger mark |
| CN110057543A (en) * | 2019-04-24 | 2019-07-26 | 暨南大学 | Based on the wavefront measurement device coaxially interfered |
| CN110132169A (en) * | 2019-05-22 | 2019-08-16 | 暨南大学 | It is a kind of based on the wavefront measurement system and method coaxially interfered |
| CN110986761B (en) * | 2019-11-18 | 2021-07-06 | 中国科学院上海光学精密机械研究所 | Picomicroscope |
| WO2021097921A1 (en) * | 2019-11-18 | 2021-05-27 | 中国科学院上海光学精密机械研究所 | Pico-microscope |
| CN110986761A (en) * | 2019-11-18 | 2020-04-10 | 中国科学院上海光学精密机械研究所 | Picomicroscope |
| CN111649693A (en) * | 2020-05-27 | 2020-09-11 | 中国科学院微电子研究所 | Sample morphology measuring device and method |
| CN112229318A (en) * | 2020-09-14 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Measuring tape |
| CN112198576A (en) * | 2020-10-12 | 2021-01-08 | 中国计量大学 | Ultraviolet exposure method of volume holographic Bragg reflector |
| CN113325683A (en) * | 2021-05-11 | 2021-08-31 | 昆明理工大学 | Off-axis scanning holographic three-dimensional target real-time joint transformation recognition system and method |
| CN113325683B (en) * | 2021-05-11 | 2023-01-06 | 昆明理工大学 | Off-axis scanning holographic three-dimensional target real-time joint transformation recognition system and method |
| WO2023008691A1 (en) * | 2021-07-29 | 2023-02-02 | Samsung Electronics Co., Ltd. | Method and system for simultaneous recording of superimposed holographic gratings for augmented reality devices (variants) |
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