CN206161282U - Reflective diffraction grating cycle measuring device - Google Patents
Reflective diffraction grating cycle measuring device Download PDFInfo
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- CN206161282U CN206161282U CN201621143733.1U CN201621143733U CN206161282U CN 206161282 U CN206161282 U CN 206161282U CN 201621143733 U CN201621143733 U CN 201621143733U CN 206161282 U CN206161282 U CN 206161282U
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Abstract
The utility model relates to a reflective diffraction grating cycle measuring device, including the bottom plate, set up in main support on the bottom plate, measure screen, one -dimensional displacement platform, grating platform 8, light source generating device and light source adjusting mount, measure screen fixed connection in on the one -dimensional displacement platform, it is provided with the grating period scale mark to measure to shield, one -dimensional displacement platform sets up on the bottom plate and adjusts the grating period who measures the screen measures numerical value, diffraction grating has been placed on the grating platform 8, grating platform 8 and main support swivelling joint, the light source adjusting mount set up in the top of grating platform 8, and with the main support is connected, light source generating device set up in on the light source adjusting mount. The utility model discloses a methods of measurement is simple, and the measuring speed is fast, easy operation, and measuring period is wide to measurement accuracy is high.
Description
Technical field
The utility model is related to a kind of reflective diffraction gratings period measurement device.
Background technology
Diffraction grating is a kind of beam splitter, is also the core parts of spectral instrument.Before generation nineteen sixty, holographic grating,
Ruled grating etc. is widely used in spectrograph spectrum analysis as dispersion element, is analysis material composition, exploration of the universe secret, exploitation
The Nature must use instrument, greatly promote the development in an all-round way including science such as physics, astronomy, chemistry, biology.With
The development of science and technology, its application is not limited to already field of spectroscopy, led in meterological, astronomy, integrated optics, light
The aspects such as letter, atomic energy are widely used.Particularly reflective diffraction grating becomes in the numerous areas such as scientific research and technology
The pole that can not be substituted and its important instrument.For example, diffraction grating is applied to integrated optics, optical holographic, spectrum analysis, fuzzy
Process, digital-to-analogue conversion, associated storage, light beam coupling, beam expander, light beam steering, beam sampling, light beam light splitting, optical logic,
Data storage, optic test, patten transformation, phase conjugate, shaping pulse and compression, tune Q, locked mode, signal transacting, solar energy gather
Jiao, space light modulation, optical switch, diagnostic measurement, image recognition etc., while grating is also constantly applied in frontier.
The cardinal principle that reflective diffraction gratings produce dispersion to incident light is multiple-beam interference, as shown in Figure 1.If parallel
Light beam is with the oblique reflecting grating for being mapped to the groove cycle as d of incident angle α, and the diffraction light investigated is located respectively with incident light
In the both sides of grating normal or homonymy.When light beam reaches grating, the optical path difference of two adjacent beams be Δ=dsin α ±
dsinβ。
At present, there are many methods in the cycle (incisure density) for measuring diffraction grating, such as by microscope direct measurement, lead to
Cross measurement angle of diffraction calculating etc..But without the special measurement apparatus measured for the cycle of grating, therefore, test
Step is complicated, and measuring speed is slow.
Utility model content
The utility model provides a kind of reflective diffraction gratings period measurement device for defect of the prior art.
The purpose of this utility model is achieved through the following technical solutions：
A kind of reflective diffraction gratings period measurement device, including base plate, be arranged on the base plate main support, measurement
Screen, one dimension displacement platform, grating platform, light source generator and light source adjustment frame；
The measurement screen is fixedly connected on the one dimension displacement platform, and on the measurement screen screen periods scale is provided with
Line；
The one dimension displacement platform is arranged on base plate and adjusts the screen periods measured value of the measurement screen；
Diffraction grating is placed with the grating platform, the grating platform is rotatably connected with main support；
The light source adjustment frame is arranged at the top of the grating platform
And be connected with the main support；
The light source generator is arranged in the light source adjustment frame.
Further, the measurement screen shields for outwardly circular arc measurement, and the diffraction light or reflected light projects are extremely
The inner side of circular arc measurement screen, one end of the circular arc measurement screen is connected on main support, and the circular arc measures the another of screen
One end is extended to the lower section of the light source generator or the light source adjustment frame and is fixedly connected on by horizontal support plate described
On displacement platform, the end that the horizontal support plate measures screen with the circular arc is fixedly connected.
Further, the circular arc measurement screen below the light source generator or the light source adjustment frame is provided with
Light source calibration line, the light source calibration line ensures the light source sent by the light source generator for straight down.
Further, the grating platform is provided with calibration hole, and the calibration hole is being arranged at the light source generator just
Lower section, the light straight down that the light source generator sends can pass through the calibration hole just.
Further, the light source generator is laser pen, simple, easily purchase, price material benefit.
Further, the screen periods graduation mark on the measurement screen includes a zero level alignment point graduation mark and multiple
Periodic quantity graduation mark；Zero level alignment point is used for demarcating the placed angle of diffraction grating.
Further, the measurement screen is using measurement screen made by translucent plastic.
Further, the grating platform is connected by grating platform adjustment frame with the main support, the grating platform adjustment frame
It is flexibly connected with the main support, the grating platform adjustment frame can rotate or extend shortening etc. relative to main support, be easy to flexibly
Adjustment grating platform.
The beneficial effects of the utility model：
The utility model provides a kind of reflective diffraction gratings period measurement device, and it can be to inciding the spy on grating
Standing wave length, the laser angle of specific incident angle carry out the measurement of screen periods, and measuring method is simple, and measuring speed is fast, operation
Simply, measure the cycle is wide, can many gears measurements, increase increment range, and certainty of measurement is high, and precision can pass through incisure density
It is adjusted, with important using value.
Description of the drawings
Fig. 1 is that the oblique principle that diffraction occurs that is mapped in reflecting grating of light beam described in the utility model embodiment is illustrated
Figure；
Fig. 2 is the dimensional structure diagram of the measurement apparatus in the diffraction grating cycle described in the utility model embodiment；
Fig. 3 is the structural representation of the measurement apparatus in the diffraction grating cycle described in the utility model embodiment；
Screen periods are illustrated with the corresponding relation of β when Fig. 4 is incident angle α=15 degree described in the utility model embodiment
Figure；
Screen periods are illustrated with the corresponding relation of β when Fig. 5 is incident angle α=30 degree described in the utility model embodiment
Figure；
Screen periods are illustrated with the corresponding relation of β when Fig. 6 is incident angle α=45 degree described in the utility model embodiment
Figure；
Screen periods are illustrated with the corresponding relation of β when Fig. 7 is incident angle α=60 degree described in the utility model embodiment
Figure；
Screen periods are illustrated with the corresponding relation of β when Fig. 8 is incident angle α=75 degree described in the utility model embodiment
Figure；
Fig. 9 is the scale line coordinates of the incident angle α=30 degree shelves described in the utility model embodiment.
In figure：
1st, base plate；2nd, main support；3rd, circular arc measurement screen；4th, one dimension displacement platform；5th, light source adjustment frame；6th, light source occurs
Device；7th, diffraction grating；8th, grating platform；9th, grating platform adjustment frame；10th, horizontal support plate；11st, light source calibration line.
Specific embodiment
It is new below in conjunction with this practicality to make purpose, technical scheme and the advantage of the utility model embodiment clearer
Accompanying drawing in type embodiment, is clearly and completely described, it is clear that retouched to the technical scheme in the utility model embodiment
The embodiment stated is a part of embodiment of the utility model, rather than the embodiment of whole.Generally described in accompanying drawing herein and
The component of the utility model embodiment for illustrating can be arranged and designed with a variety of configurations.Therefore, below to attached
The detailed description of the embodiment of the present utility model provided in figure is not intended to limit claimed scope of the present utility model,
But it is merely representative of selected embodiment of the present utility model.Based on the embodiment in the utility model, ordinary skill people
The every other embodiment that member is obtained under the premise of creative work is not made, belongs to the model of the utility model protection
Enclose.
In description of the present utility model, it should be noted that term "front", "rear", " upper surface ", " vertical ", " water
It is flat ", etc. instruction orientation or position relationship be, based on orientation shown in the drawings or position relationship, to be for only for ease of description this reality
With new and simplified description, rather than indicate or imply indication device or element must have specific orientation, with specific
Azimuth configuration and operation, therefore it is not intended that to restriction of the present utility model.
Embodiment 1
As shown in figures 2-3, a kind of reflective diffraction gratings period measurement device described in the utility model embodiment, bag
Include base plate 1, the main support 2, circular arc being arranged on base plate 1 measurement screen 3, one dimension displacement platform 4, grating platform 8, light source to fill
Put 6 and light source adjustment frame 5；
Circular arc measurement screen 3 is connected to the upper surface of one dimension displacement platform 4, and the circular arc measurement screen 3 can be with one
Tie up the movement of displacement platform 4 and move, therefore circular arc measurement screen 3 can be adjusted by adjusting one dimension displacement platform 4；Circular arc
The screen periods graduation marks (i.e. cycle value) that measurement screen 3 is provided with a longitudinal arrangement, i.e. only one of which measurement gear, its be
Cycle value under a certain incident angle, as shown in Fig. 9 the scale coordinate under incident angle α=30 degree (part scale
Cycle value is not marked, but does not affect the understanding of overall technical architecture).
Circular arc measurement screen 3 is outwardly circular arc measurement screen 3, the diffraction light sent by diffraction grating 7 or reflection
Light projection measures the inner side of screen 3 to circular arc, and one end of circular arc measurement screen 3 is connected on main support 2, circular arc measurement screen 3
The other end extend to the lower section of light source generator 6 or light source adjustment frame 5 and be fixedly connected on by horizontal support plate 10 one-dimensional
On displacement platform 4, the end that horizontal support plate 10 measures screen 3 with circular arc is fixedly connected.
Circular arc measurement screen 3 can be made using translucent plastic, so as to be beneficial to carry out scale reading.
One dimension displacement platform 4 is arranged on base plate 1, and one dimension displacement platform 4 can be by moving forward and backward in the horizontal direction
To adjust the circular arc for being arranged at the upper surface of one dimension displacement platform 4 measurement screen 3, due to the circular arc measurement screen 3 of the present embodiment
Upper only one of which measures gear, then adjustment one dimension displacement platform 4 is only needed to when using makes reflection light point measure in circular arc just
Just may be used on the cycle value carved on screen 3 or demarcated.
Grating platform 8 is used to place and fixed diffraction grating 7, and grating platform 8 is movable with main support 2 by the adjustment frame of grating platform 8
Connection, then grating platform 8 can be connected by grating platform adjustment frame 9 with main support 2, then grating platform adjustment frame 9 can be relative to main support 2
Rotation or elongation shortening etc. are adjusted flexibly, then adjust the diffraction grating on grating platform 8 by rotation adjustment grating platform adjustment frame 9
7, so as to can adjust the incidence angle of the incident light being projected on diffraction grating 7；
The center position of grating platform 8 is provided with calibration hole, and calibration hole is arranged at the underface of light source generator 6, described
The light straight down that light source generator 6 sends can pass through the calibration hole just.
Light source adjustment frame 5 is arranged at the top of grating platform 8, and is flexibly connected with main support 2, then by light source adjustment frame 5
Regulation make emergent light straight down the direction that adjusts light source；
The circular arc measurement screen 3 of the lower section of light source adjustment frame 5 or light source generator 6 is provided with light source calibration line 11, should
Light source calibration line 11 ensures that the light source sent by light source generator 6 is light straight down.
Light source generator 6 adopts wavelength for the red laser pen of 633nm, and laser pen simply, is easily bought, price reality
Favour, laser pen is fixed in light source adjustment frame 5, and adjusts laser pen by rotating light source adjustment frame 5, is not placing diffraction
During grating 7, the laser of laser pen outgoing is made by the calibration hole of the center of grating platform 8, and measure the light source on screen 3 with circular arc
Lubber-line 11 overlaps, to ensure laser pen as vertical direction, so as to ensure laser straight down.
The measurement range of screen periods measured value is：0.32 μm～2.45 μm.
The precision of the cycle value on circular arc measurement screen 3 can be adjusted according to scale density, and scale is more intensive, then survey
Accuracy of measurement is higher, and vice versa.
Embodiment 2
Circular arc measurement screen 3 in embodiment 1 is provided with when a measurement gear, i.e. circular arc measurement screen 3 are provided with longitudinal row
The screen periods graduation mark (i.e. cycle value) of row, and by the different transversely arranged multiple measurement gears of incident angle, by one
The dimension adjustment gear to be aligned of displacement platform 4, so as to the effect measured with multi gear, i.e., is projected to diffraction light according to incident light
The difference of the incidence angle on grid 7, on circular arc measurement screen 3 multi gear screen periods measured value has been arranged side by side, different gears
The range of screen periods measured value is different, is measured using many gears, by increasing capacitance it is possible to increase the measurement range of screen periods.Such as Fig. 4 and
Shown in Fig. 8, under incident angle α=15 degree, maximum measure the cycle is 2.45 μm；The minimum measurement under incident angle α=75 degree
Cycle is 0.32 μm, therefore the measurement range of this device can be 0.32 μm -2.45 μm, be 100 according to every grade of scale number
Calculate, α=15 degree shelves certainty of measurement is 0.02 μm, can as needed carry out closeer scale and make with further raising measurement essence
Degree；Scale coordinate as shown in Fig. 9 under incident angle α=30 degree (cycle value of part scale is not marked, but not shadow
Ring the understanding of overall technical architecture).
The multi gear measurement of the screen periods measured value on above-mentioned circular arc measurement screen 3 can be 5 grades, respectively incidence angle
Five files, five gears when degree α is 15 degree, 30 degree, 45 degree, 60 degree and 75 degree, it is of course also possible to according to demand, adjust and survey
The quantity of amount gear.
Embodiment 3
A kind of diffraction grating period measurement device of employing embodiment 1 carries out the measuring method of screen periods, including following
Step：
S1：The calibration of light source：Light source generator 6 still adopts wavelength for the red laser pen of 633nm, and laser pen is consolidated
In light source adjustment frame 5, before measurements, being first turned on laser pen power supply makes its shoot laser, adjusts light source adjustment frame
5, the laser of laser pen outgoing is made by the calibration hole of the center of grating platform 8, and measure the light source calibration on screen 3 with circular arc
Line 11 overlaps, it is ensured that laser pen claims vertical direction, so as to ensure laser straight down, relatively adjusting before completing to measure.
S2：The coarse adjustment of diffraction grating 7：Diffraction grating to be measured 7 is fixedly installed on grating platform 8, adjustment grating platform 8 makes light
Grid reflection light point is irradiated on measurement screen；
S3：The calibration of diffraction grating 7：There is the screen periods numerical value of longitudinal arrangement on circular arc measurement screen 3, and by different
Incidence angle carries out many gears measurements of transversely arranged formation, and mobile one dimension displacement platform 4 makes optical grating reflection luminous point be projeced into circular arc
On screen periods gear to be selected on measurement screen 3, the measurement range of the screen periods measured value of different gears is different,
Adjustment gear can improve certainty of measurement；Then rotating grating platform 8 makes the Zero-order diffractive optical registration measurement screen that diffraction grating 7 sends
Zero level alignment point in upper screen periods measured value；If zero level alignment point refers to regard as on grating pip during minute surface,
The angle of grating can be demarcated by this point；
S4：Read cycle numerical value：After completing the operation in step S3, then first-order diffraction light projection is to circular arc measurement screen 3
On corresponding scale be the screen periods of diffraction grating to be measured 7, directly read and just may be used.Shown in Fig. 9, Fig. 9 be incident angle α=
Scale coordinate under 30 degree, when the Zero-order diffractive optical registration zero level alignment point of diffraction grating 7, grating incidence angle α=30 degree,
The corresponding scale of first-order diffraction light is read, β=45 degree in such as Fig. 9, the cycle is 0.664 μm.
For above-mentioned measuring method, such as angle of diffraction is excessive or too small, can adjust circular arc using one dimension displacement platform 4
Shape measurement shields the measurement gear on 3 to improve certainty of measurement.
For above-mentioned steps S3, a screen periods measurement gear can be only set as needed, i.e., on circular arc measurement screen 3
Cycle scale under certain incident angle, then adjustment one dimension displacement platform 4 is only needed to when using makes the photoelectricity of reflected light lucky
Measure in circular arc and just may be used on the cycle value carved on screen 3 or demarcated.Only one of which gear, then range is non-adjustable.
The present embodiment may also be employed the diffraction grating period measurement device in embodiment 2 to carry out the measurement of screen periods.
Embodiment 4
As shown in figs. 3 to 9, a kind of method that the cycle of diffraction grating 7 is demarcated in measurement apparatus in embodiment 1, the party
Method is：
1. screen periods numerical value is demarcated according to grating equation；
Grating equation is：Dsin α ± dsin β=m λ (m=0, ± 1, ± 2 ...), wherein, d is screen periods, and α is incidence
Angle, β is angle of diffraction, and m is diffraction progression, and λ is wavelength；When incident light and diffraction light are in the same side, grating equation takes just
Number；When incident light and diffraction light are in the both sides of normal, grating equation takes negative sign；
When diffraction progression determines, can be calculated under incidence angles degree α according to grating equation, angle of diffraction β correspondence
Cycle size.Fig. 4-Fig. 8 be calculated according to grating equation α=15 degree, 30 degree, 45 degree, 60 degree, the cycle under 75 degree and
The relation of angle of diffraction β；Corresponding cycle scale value is produced on circular arc measurement screen 3 according to this relation, in an incidence
The file cycle value demarcated under angle be one measurement gear, five in Fig. 4-Fig. 8 incident angle (i.e. 15 degree, 30
Degree, 45 degree, 60 degree, 75 degree) can be formed 5 measure gears.Shown in Fig. 9, Fig. 9 is the scale coordinate under incident angle α=30 degree,
When the Zero-order diffractive optical registration zero level alignment point of diffraction grating 7, incident angle α=30 degree, during angle of diffraction β=45 degree, one
The order diffraction light lower cycle is 0.664 μm, then in 0.664 μm of corresponding location position.
Step same as mentioned above carries out scale making, and the longitudinal arrangement on circular arc measurement screen 3, flat by displacement
Platform is vertically moved, you can form multi gear (different α angles) measurement, while improving certainty of measurement measurement range has been widened.
Such as under α=15 degree, maximum measure the cycle is 2.45 μm；Minimum measure the cycle is 0.32 μm under α=75 degree, therefore this device
Measurement range can be 0.32 μm -2.45 μm (being approximately equal to incisure density 400/mm-3000/mm).
It is 100 calculating according to every grade of scale number, α=15 degree shelves certainty of measurement is 0.02 μm, can be carried out as needed
Closeer scale makes further to improve certainty of measurement.
2. the period measurement device normalization zero level alignment point of diffraction grating 7 is adopted：Under 30 degree of incident angle, grating is regarded as
Pip during minute surface is zero level alignment point, then the zero level alignment point is the zero level in incident angle α is 30 degree of gears
Alignment point；Further according to the method, it is the zero level alignment point under 15 degree, 45 degree, 60 degree and 75 degree to demarcate incident angle α；
It should be noted that according to above-mentioned scaling method, can select only to demarcate one on measurement screen according to actual needs
The screen periods numerical value (i.e. under an incident angle) of gear, it is also possible to demarcate two, three, 5 or more measure shelves
Position (i.e. under different incident angles).
In the present embodiment 4, in measurement apparatus that also can be in embodiment 1 the diffraction grating cycle is demarcated.
When being embodied as, the utility model using visible wavelength laser pen as emission source (such as 633nm ruddiness), with
Known fixed angle is incident to reflective diffraction gratings 7.Incident laser is diffracted into special angle by diffraction grating 7, is projected
The measurement screen of circular arc.Measurement screen is marked with advance correspondence cycle scale according to diffraction grating equation, is spread out according to the one-level of m=1
Luminous point corresponding scale of the luminous point on measurement screen is penetrated, the grating line cycle is directly read.The utility model mainly adopts m=1
First-order diffraction luminous point measure because first-order diffraction point is generally stronger, therefore be easy to measure.
Also, it should be noted that this device itself can adjust diffraction progression, and diffraction progression is adjusted, such as Zero-order diffractive
Light, first-order diffraction light etc. belong to general knowledge known in this field.Diffraction grating itself is different to different series optical diffraction angles, zero level
Diffraction light is the light that grating is regarded as plane mirror reflection, and rotating shutter is rotatable this light beam.
Finally it should be noted that：Above-described each embodiment is merely to illustrate the technical solution of the utility model, rather than
It is limited；Although being described in detail to the utility model with reference to the foregoing embodiments, one of ordinary skill in the art
It should be understood that：It still can modify to the technical scheme described in previous embodiment, or to which part or whole
Technical characteristic carries out equivalent；And these modifications or replacement, do not make essence disengaging the utility model of appropriate technical solution
The scope of each embodiment technical scheme.
Claims (10)
1. a kind of reflective diffraction gratings period measurement device, including base plate and the main support being arranged on the base plate, it is special
Levy and be：Also include measurement screen, one dimension displacement platform, grating platform, light source generator and light source adjustment frame；
The measurement screen is fixedly connected on the one dimension displacement platform, and on the measurement screen screen periods graduation mark is provided with；
The one dimension displacement platform is arranged on base plate and adjusts the screen periods measured value of the measurement screen；
Diffraction grating is placed with the grating platform, the grating platform is rotatably connected with main support；
The light source adjustment frame is arranged at the top of the grating platform and is connected with the main support；
The light source generator is arranged in the light source adjustment frame.
2. reflective diffraction gratings period measurement device according to claim 1, it is characterised in that：The light source is filled
Put or the light source adjustment frame below the measurement screen be provided with light source calibration line.
3. reflective diffraction gratings period measurement device according to claim 1, it is characterised in that：Set on the grating platform
There is calibration hole.
4. reflective diffraction gratings period measurement device according to claim 3, it is characterised in that：The calibration hole is arranged
In the underface of the light source generator, the light straight down that the light source generator sends can pass through described just
Calibration hole.
5. reflective diffraction gratings period measurement device according to claim 4, it is characterised in that：The light source is filled
It is set to laser pen.
6. reflective diffraction gratings period measurement device according to claim 5, it is characterised in that：On the measurement screen
Screen periods graduation mark includes a zero level alignment point graduation mark and multiple periodic quantity graduation marks.
7. reflective diffraction gratings period measurement device according to claim 5, it is characterised in that：The measurement screen is to adopt
With measurement screen made by translucent plastic.
8. reflective diffraction gratings period measurement device according to claim 1, it is characterised in that：The grating platform passes through
Grating platform adjustment frame is connected with the main support, and the grating platform adjustment frame is flexibly connected with the main support.
9. the reflective diffraction gratings period measurement device according to any one of claim 1～8, it is characterised in that：Institute
Measurement screen is stated for outwardly circular arc measurement screen.
10. reflective diffraction gratings period measurement device according to claim 9, it is characterised in that：The circular arc is surveyed
One end of amount screen is connected on main support, the other end of circular arc measurement screen extend to the lower section of the light source adjustment frame,
And be fixedly connected on institute's translation stage by horizontal support plate.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201621143733.1U CN206161282U (en) | 2016-10-20 | 2016-10-20 | Reflective diffraction grating cycle measuring device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621143733.1U CN206161282U (en) | 2016-10-20 | 2016-10-20 | Reflective diffraction grating cycle measuring device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109374259A (en) * | 2018-11-07 | 2019-02-22 | 暨南大学 | Holographic grating period high precision online measuring and regulating device |
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2016
- 2016-10-20 CN CN201621143733.1U patent/CN206161282U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109374259A (en) * | 2018-11-07 | 2019-02-22 | 暨南大学 | Holographic grating period high precision online measuring and regulating device |
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