CN106839997B - The detection method of linear grating ruler - Google Patents
The detection method of linear grating ruler Download PDFInfo
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- CN106839997B CN106839997B CN201710159240.XA CN201710159240A CN106839997B CN 106839997 B CN106839997 B CN 106839997B CN 201710159240 A CN201710159240 A CN 201710159240A CN 106839997 B CN106839997 B CN 106839997B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
The detection method of linear grating ruler is related to a kind of detection technique of fine measuring instrument, relates generally to a kind of detection method of linear grating ruler.The present invention chooses N number of measurement point in the detection stroke of ball slider at equal intervals, when ball slider moves to the measurement point of selection, the displacement measurement s α i' of three optical axis laser interferometer three beams of laser of synchronous acquisition measurement, s β i', the grating range data s on s γ i' and detected linear grating ruleri；Then s α i', s γ i' compensate to obtain s to s β i'i′；By the compensated data s of each measurement pointi' progress linear fit obtains function, and to the s of the compensated data of each measurement pointi' be modified to obtain yi, by max | yi‑si| the ratio with total range A realizes the detection to linear grating ruler as the examination criteria for being detected linear grating ruler.The present invention is used for the detection of linear grating ruler.
Description
Technical field
The present invention relates to a kind of detection techniques of fine measuring instrument, relate generally to a kind of detection side of linear grating ruler
Method.
Background technique
Optical grid line displacement sensor and linear movement guide rail mechanism form optical grid line displacement measuring device, such as: grating ten thousand
It can tool microscope, optical grating length measuring machine, comparator, three coordinate measuring machine, gear measuring center, Press Fit Device for Wheelset, numerical control processing
Center, numerically-controlled machine tool, grinding machine, milling machine, automatic decrater, pressing metal plates and bonding machine, robot and other automation science and technology
Device.Optical grid line displacement measuring device belongs to fine measuring instrument, is widely used in the equipment manufacture in China, in accurate machine
The industries such as tool processing, industrial production, measurement verification occupy an important position.
China is concentrated mainly on metrological service to the detection work of optical grid line displacement sensor, currently, there are no unifications
It is mostly the measuring system respectively built to the measuring instrument equipment of optical grid line displacement sensor, measuring principle is to utilize double frequency
The data that laser reads tested optical grid line displacement sensor as standard on measuring table are compared with double-frequency laser.Mesh
The technical indicator of the preceding country can in 200mm useful range measurement accuracy can achieve ± 1 μm.
And current detection device can not achieve the automatic measurement of optical grid line displacement sensor, in measurement linear grating
It can only rely on when the index of ruler and look for a little manually, and measuring all is manual measurement, human factor influences very greatly simultaneously measurement result
And working efficiency is extremely low.
Summary of the invention
The present invention looks for a little manually in order to solve the problems, such as to rely on existing for the detection method of current linear grating ruler
The problem of being affected with human factor to measurement result.
The detection method of linear grating ruler is that the detection device based on one-dimensional linear grating ruler is realized；One-dimensional line light
The detection device of grid ruler includes base station, displacement datum mechanism, displacement transmission mechanism and three optical axis laser interferometer；
The displacement datum mechanism includes the first clamping slider, the first clamping device, the second clamping slider, the second clamping machine
Structure and slide block guide rail seat；
The displacement transmission mechanism includes motor, ball-screw, spherical guide seat, ball slider, grating reading head, bearing
Seat；
The slide block guide rail seat and spherical guide seat are arranged on base station；Slide block guide rail seat is parallel with spherical guide seat to be set
It sets, that is, slide block guide rail seat is parallel with the axis in the guide direction of spherical guide seat；
First clamping slider and the second clamping slider are arranged on slide block guide rail seat, and can be transported along slide block guide rail seat
It is dynamic；First clamping device is arranged on the first clamping slider, and the second clamping device is arranged on the second clamping slider；First clamping
Mechanism and the second clamping device clamp the both ends of detected linear grating ruler respectively；
Ball slider is set on spherical guide seat, guide screw movement screw hole is set on ball slider, ball-screw passes through lead screw
Screw hole is moved, and the axis of ball-screw is parallel with the axis in spherical guide seat guide direction, ball-screw drives ball sliding
Block is moved along the axis direction of ball-screw；
Ball slider is equipped with grating reading head, and grating reading head is perpendicularly oriented to be detected the grating of linear grating ruler
Face, grating reading head read the grating range data being detected on linear grating ruler；The upper table of ball slider is arranged in reflecting mirror
Face；
One end of ball-screw connects motor, and the other end is arranged on bearing block；
Three optical axis laser interferometer are arranged on base station, and the laser of three optical axis laser interferometer projects direction and ball-screw
Axis it is parallel, and can vertically be mapped on reflecting mirror.
The detection method of the linear grating ruler, comprising the following steps:
Step 1: detected linear grating ruler is mounted on the first clamping device and the second clamping device, is guaranteed tested
It is parallel with the grating reading head direction of motion to survey linear grating ruler；
Step 2: command displacement transmission mechanism carries out returning to zero movement, and grating reading head is made to return to detected linear grating ruler
Initial zero；
Grating reading head in displacement transmission mechanism finds the zero-bit of detected linear grating ruler, as initial zero；
Step 3: command displacement benchmark mechanism is zeroed out；
The process that command displacement benchmark mechanism is zeroed out: ball slider and grating reading head are from initial zero, fortune
Move detected linear grating ruler detection stroke starting point；
Step 4: command displacement transmission mechanism carries out detection campaign:
The detecting distance for being detected linear grating ruler corresponds to the detection stroke of ball slider, the detection stroke note of ball slider
For total range A；In the detection stroke of ball slider, N number of measurement point is chosen at equal intervals, when ball slider moves to the every of selection
When a measurement point, three optical axis laser interferometer three beams of laser of synchronous acquisition measurement displacement measurement s α i', s β i', s γ i' and
The grating range data s being detected on linear grating ruleri；The three beams of laser that three optical axis laser interferometer project is denoted as first respectively
Light beam, the second light beam and third light beam, s α i', s β i', s γ i' are respectively the displacement of the first light beam, the second light beam, third light beam
Measured value；
Step 5: it is directed to ith measurement point, utilizes shift value s α i', s γ i' couple measured by three optical axis laser interferometer
S β i' compensates to obtain s 'i；
Step 6: by the compensated data s ' of each measurement pointiIt carries out linear fit and obtains function
Y=k*s 'i+b；I=1,2 ..., N；
Wherein k, b are respectively the parameter after being fitted；
Utilize y=k*s 'iS ' of+the b to the compensated data of each measurement pointiIt is modified, obtains s 'iCorresponding amendment
Value y afterwardsi；
Step 7: by max | yi-si| the ratio with total range A is realized as the examination criteria for being detected linear grating ruler
Detection to linear grating ruler.
Preferably, it is directed to ith measurement point described in step 5, utilizes shift value measured by three optical axis laser interferometer
S α i', s γ i' compensate to obtain s ' to s β i'iProcess the following steps are included:
For ith measurement point, deflection angle is obtained according to the distance between the second light beam and third light beam D
Then the offset deviation e on the second caused light beam of deflection is calculated according to distance D and deflection angle theta, then passed through
Formula s 'i=s β i '-e compensates to obtain s ' to s β i'i。
Preferably, e=Dsin θ described in step 5.
Preferably, the N=10.
Preferably, the detection method is further comprising the steps of:
Step 8: by max | yi-si| it is denoted as λ with the ratio of total range A, when λ is less than the threshold value of setting, is detected straight line
Grating scale is detected as qualification；When λ is more than or equal to the threshold value of setting, being detected as detected linear grating ruler is unqualified.
The invention has the following advantages:
The detection method of linear grating ruler of the present invention is that the detection device based on linear grating ruler is realized, is not only able to
It realizes the automatic detection of optical grid line displacement sensor, and a little not only easy to detect without looking for manually, and eliminates artificial
Influence of the factor to measurement result, improves the accuracy of the detection of linear grating ruler.
The present invention provides displacement datum using three optical axis laser interferometer, ensure that detection device precision with higher,
To ensure that the precision of detection method.Three optical axis laser interferometer being capable of the appearance of real-time monitoring detection device during the motion
State, line position of going forward side by side move compensation deals, thus eliminate detection device deflect during the motion with pitching bring error, into one
Step ensure that detection accuracy.Compared to the detection method of existing full accuracy, the present invention can will test precision in useful range
Improve 50% or more.
Detailed description of the invention
Fig. 1 is the structure of the detecting device schematic diagram of linear grating ruler；
Fig. 2 is the schematic diagram for the three beams of laser that three optical axis laser interferometer project；
Fig. 3 is the bit shift compensation schematic illustration in specific embodiment two.
Specific embodiment
Specific embodiment 1:
The detection method of linear grating ruler is that the detection device based on one-dimensional linear grating ruler is realized；
As shown in Figure 1, the detection device of one-dimensional linear grating ruler includes base station 1, displacement datum mechanism, displacement transmission mechanism
With three optical axis laser interferometer 16；
The displacement datum mechanism includes the first clamping slider 2, the first clamping device 3, the second clamping slider 7, second folder
Hold mechanism 6 and slide block guide rail seat 8；
The displacement transmission mechanism includes motor 15, ball-screw 13, spherical guide seat 12, ball slider 10, grating reading
Several 5, bearing block 9；
The slide block guide rail seat 8 and spherical guide seat 12 are arranged on base station 1；Slide block guide rail seat 8 and spherical guide seat
12 are arranged in parallel, that is, slide block guide rail seat 8 is parallel with the axis in the guide direction of spherical guide seat 12；
First clamping slider 2 and the second clamping slider 7 are arranged on slide block guide rail seat 8, and can be along slide block guide rail seat 8
Movement；First clamping device 3 is arranged on the first clamping slider 2, and the second clamping device 6 is arranged on the second clamping slider 7；The
One clamping device 3 and the second clamping device 6 clamp the both ends of detected linear grating ruler 4 respectively；
Ball slider 10 is set on spherical guide seat 12, guide screw movement screw hole, ball-screw 13 are set on ball slider 10
Across guide screw movement screw hole, and the axis of ball-screw 13 is parallel with the axis in 12 guide direction of spherical guide seat, ball wire
Thick stick 13 drives ball slider 10 to move along the axis direction of ball-screw 13；
Ball slider 10 is equipped with grating reading head 5, and grating reading head 5 is perpendicularly oriented to be detected linear grating ruler 4
Grating face, grating reading head 5 read the grating range data being detected on linear grating ruler 4；The setting of reflecting mirror 11 is sliding in ball
The upper surface of block 10, that is, be arranged on ball slider 10 on the opposite surface on the surface that is in contact with spherical guide seat 12；
One end of ball-screw 13 connects motor 15, and the other end is arranged on bearing block 9；The motor 15 is solid by motor
Reservation 14 is fixed on base station 1；
Three optical axis laser interferometer 16 are arranged on base station 1, and the laser of three optical axis laser interferometer 16 projects direction and rolling
The axis of ballscrew 13 is parallel, and can vertically be mapped on reflecting mirror 11.
As shown in Fig. 2, the three beams of laser that three optical axis laser interferometer 16 project is denoted as the first light beam 16a, the second light respectively
Beam 16b and third light beam 16c；The second light beam 16b that the three optical axises laser interferometer 16 projects is by being irradiated to reflecting mirror 11
The move distance of upper measurement ball slider 10.
The detection method of the linear grating ruler, comprising the following steps:
Step 1: detected linear grating ruler 4 is mounted on the first clamping device 3 and the second clamping device 6, guarantees quilt
It is parallel with 5 direction of motion of grating reading head to detect linear grating ruler 4；
Step 2: command displacement transmission mechanism carries out returning to zero movement, and grating reading head 5 is made to return to detected linear grating ruler
4 initial zero；
Grating reading head 5 in displacement transmission mechanism finds the zero-bit of detected linear grating ruler 4, as initial zero；
Step 3: command displacement benchmark mechanism is zeroed out；
The process that command displacement benchmark mechanism is zeroed out: ball slider 10 and grating reading head 5 from initial zero,
It moves to detected linear grating ruler 4 and detects stroke starting point；
Step 4: command displacement transmission mechanism carries out detection campaign:
The detecting distance for being detected linear grating ruler 4 corresponds to the detection stroke of ball slider 10, the detection of ball slider 10
Stroke is denoted as total range A；In the detection stroke of ball slider 10, N number of measurement point is chosen at equal intervals, when ball slider 10 moves
To selection each measurement point when, three optical axis laser interferometer of synchronous acquisition, 16 three beams of laser measurement displacement measurement s α i', s
Grating range data s on β i', s γ i' and detected linear grating ruler 4i；The three beams that three optical axis laser interferometer 16 project swashs
Light is denoted as the first light beam 16a, the second light beam 16b and third light beam 16c respectively, it is ensured that the second light beam 16b and third light beam 16c
It is parallel with the plane of ball slider 10 to be formed by plane；S α i', s β i', s γ i' are respectively the first light beam 16a, the second light beam
The displacement measurement of 16b, third light beam 16c；
Step 5: it is directed to ith measurement point, utilizes shift value s α i', s γ i' couple measured by three optical axis laser interferometer
S β i' compensates to obtain s 'i；
Step 6: by the compensated data s ' of each measurement pointiIt carries out linear fit and obtains function
Y=k*s 'i+b；I=1,2 ..., N；
Wherein k, b are respectively the parameter after being fitted；
Utilize y=k*s 'iS ' of+the b to the compensated data of each measurement pointiIt is modified, obtains s 'iCorresponding amendment
Value y afterwardsi；
Why will be to the s ' of each measurement pointiIt is modified, is the s ' because of each measurement pointiNot necessarily in y=k*
s′iIt, can be because error causes s ' on+biDeviate y=k*s 'i'+b utilizes y=k*s ' to exclude errori+ b is to every group of s 'i
It is modified, the function y=k*s ' exactly obtained in linear fitiEach measurement point s ' is found on+biIt should correspond in straight line y
=k*s 'iValue on+b.
Step 7: by max | yi-si| the ratio with total range A is realized as the examination criteria for being detected linear grating ruler 4
Detection to linear grating ruler.
Based on the detection device of linear grating ruler, the detection method of linear grating ruler of the present invention is not only able to realize grid stroke
The automatic detection of displacement sensor, and it is a little not only easy to detect without looking for manually, and human factor is eliminated to measurement
As a result influence improves the accuracy of the detection of linear grating ruler.
The present invention provides displacement datum using three optical axis laser interferometer, ensure that detection device precision with higher,
To ensure that the precision of detection method.Three optical axis laser interferometer being capable of the appearance of real-time monitoring detection device during the motion
State, line position of going forward side by side move compensation deals, thus eliminate detection device deflect during the motion with pitching bring error, into one
Step ensure that detection accuracy.Compared to the detection method of existing full accuracy, the present invention can will test precision in useful range
Improve 50% or more.
Specific embodiment 2: illustrate present embodiment in conjunction with Fig. 2 and Fig. 3,
It is directed to ith measurement point described in step five described in present embodiment, is surveyed using three optical axis laser interferometer
Shift value s α i', the s γ i' obtained compensates to obtain s ' to s β i'iProcess the following steps are included:
For ith measurement point, deflection angle is obtained according to the distance between the second light beam 16b and third light beam 16c D
Then the offset deviation e on the second caused light beam 16b of deflection is calculated according to distance D and deflection angle theta, then led to
Cross formula s 'i=s β i '-e compensates to obtain s ' to s β i'i。
Other steps and parameter are same as the specific embodiment one.
Specific embodiment 3:
E=Dsin θ described in step five described in present embodiment.
Other steps and parameter are identical with embodiment two.
Specific embodiment 4:
N=10 described in present embodiment.
Other steps and parameter are identical as one of specific embodiment one to three.
Specific embodiment 5:
Detection method described in present embodiment is further comprising the steps of:
Step 8: by max | yi-si| it is denoted as λ with the ratio of total range A, when λ is less than the threshold value of setting, is detected straight line
Grating scale 4 is detected as qualification；When λ is more than or equal to the threshold value of setting, being detected as detected linear grating ruler 4 is unqualified.
Other steps and parameter are identical as one of specific embodiment one to four.
Claims (5)
1. the detection method of linear grating ruler is that the detection device based on one-dimensional linear grating ruler is realized；
The detection device of one-dimensional linear grating ruler includes base station (1), displacement datum mechanism, displacement transmission mechanism and three optical axis laser
Interferometer (16)；
The displacement datum mechanism includes the first clamping slider (2), the first clamping device (3), the second clamping slider (7), second
Clamping device (6) and slide block guide rail seat (8)；
The displacement transmission mechanism includes motor (15), ball-screw (13), spherical guide seat (12), ball slider (10), light
Grid reading head (5), bearing block (9)；
The slide block guide rail seat (8) and spherical guide seat (12) are arranged on base station (1)；Slide block guide rail seat (8) is led with ball
Rail chair (12) is arranged in parallel, that is, slide block guide rail seat (8) is parallel with the axis in the guide direction of spherical guide seat (12)；
First clamping slider (2) and the second clamping slider (7) are arranged on slide block guide rail seat (8), and can be along slide block guide rail
Seat (8) movement；First clamping device (3) is arranged on the first clamping slider (2), and the second clamping device (6) setting is in the second folder
It holds on sliding block (7)；First clamping device (3) and the second clamping device (6) clamp the two of detected linear grating ruler (4) respectively
End；
Ball slider (10) are set on spherical guide seat (12), guide screw movement screw hole, ball-screw are set on ball slider (10)
(13) guide screw movement screw hole is passed through, and the axis in the axis of ball-screw (13) and spherical guide seat (12) guide direction is flat
Row, ball-screw (13) drive ball slider (10) to move along the axis direction of ball-screw (13)；
Ball slider (10) is equipped with grating reading head (5), and grating reading head (5) is perpendicularly oriented to be detected linear grating ruler
(4) grating face, grating reading head (5) read the grating range data being detected on linear grating ruler (4)；Reflecting mirror (11) is set
Set the upper surface in ball slider (10)；
One end of ball-screw (13) connects motor (15), and the other end is arranged on bearing block (9)；
Three optical axis laser interferometer (16) are arranged on base station (1), the laser of three optical axis laser interferometer (16) project direction with
The axis of ball-screw (13) is parallel, and can vertically be mapped on reflecting mirror (11)；
It is characterized in that, detection method includes the following steps for the linear grating ruler:
Step 1: detected linear grating ruler (4) is mounted on the first clamping device (3) and the second clamping device (6), is guaranteed
It is parallel with grating reading head (5) direction of motion to be detected linear grating ruler (4)；
Step 2: command displacement transmission mechanism carries out returning to zero movement, and grating reading head (5) is made to return to detected linear grating ruler
(4) initial zero；
Grating reading head (5) in displacement transmission mechanism finds the zero-bit of detected linear grating ruler (4), as initial zero；
Step 3: command displacement benchmark mechanism is zeroed out；
The process that command displacement benchmark mechanism is zeroed out: ball slider (10) and grating reading head (5) from initial zero,
Move to detected linear grating ruler (4) detection stroke starting point；
Step 4: command displacement transmission mechanism carries out detection campaign:
The detecting distance for being detected linear grating ruler (4) corresponds to the detection stroke of ball slider (10), the inspection of ball slider (10)
It surveys stroke and is denoted as total range A；In the detection stroke of ball slider (10), N number of measurement point is chosen at equal intervals, works as ball slider
(10) when moving to each measurement point of selection, the displacement of three optical axis laser interferometer (16) three beams of laser of synchronous acquisition measurement is surveyed
Grating range data s on magnitude s α i', s β i', s γ i' and detected linear grating ruler (4)i；Three optical axis laser interferometer
(16) three beams of laser projected is denoted as the first light beam (16a), the second light beam (16b) and third light beam (16c), s α i', s β respectively
I', s γ i' are respectively the displacement measurement of the first light beam (16a), the second light beam (16b), third light beam (16c)；
Step 5: it is directed to ith measurement point, using shift value s α i', s γ i' measured by three optical axis laser interferometer to s β i'
It compensates to obtain s 'i；
Step 6: by the compensated data s ' of each measurement pointiIt carries out linear fit and obtains function
Y=k*s 'i+b；I=1,2 ..., N；
Wherein k, b are respectively the parameter after being fitted；
Utilize y=k*s 'iS ' of+the b to the compensated data of each measurement pointiIt is modified, obtains s 'iIt is corresponding revised
Value yi；
Step 7: by max | yi-si| the ratio with total range A is as the examination criteria for being detected linear grating ruler (4), realization pair
The detection of linear grating ruler.
2. the detection method of linear grating ruler according to claim 1, which is characterized in that be directed to i-th described in step 5
A measurement point compensates to obtain s ' using shift value s α i', s γ i' measured by three optical axis laser interferometer to s β i'i's
Process the following steps are included:
For ith measurement point, deflection angle is obtained according to the distance between the second light beam (16b) and third light beam (16c) D
Then the offset deviation e on caused the second light beam (16b) of deflection is calculated according to distance D and deflection angle theta, then passed through
Formula s 'i=s β i '-e compensates to obtain s ' to s β i'i。
3. the detection method of linear grating ruler according to claim 2, which is characterized in that e=Dsin described in step 5
θ。
4. the detection method of linear grating ruler according to claim 3, which is characterized in that the N=10.
5. according to claim 1 to the detection method of linear grating ruler described in one of 4, which is characterized in that the detection method
It is further comprising the steps of:
Step 8: by max | yi-si| it is denoted as λ with the ratio of total range A, when λ is less than the threshold value of setting, is detected linear grating
Ruler (4) is detected as qualification；When λ is more than or equal to the threshold value of setting, being detected as detected linear grating ruler (4) is unqualified.
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| CN107167083B (en) * | 2017-07-04 | 2023-08-04 | 吉林大学珠海学院 | Error compensation system and method for grating ruler |
| CN108406442B (en) * | 2018-03-13 | 2020-02-04 | 上海铼钠克数控科技股份有限公司 | Grating scale performance detection method and system |
| CN112461126B (en) * | 2020-11-05 | 2023-01-03 | 广东工业大学 | Measuring system and method of double-reading head absolute grating ruler and related equipment |
| CN112415944A (en) * | 2020-11-26 | 2021-02-26 | 西安航天计量测试研究所 | PLC-based grating scale data acquisition system and method |
| CN113029002B (en) * | 2021-03-18 | 2021-12-07 | 中国科学院长春光学精密机械与物理研究所 | Linear displacement measuring device and method |
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