CN206523141U - The detection means of one-dimensional linear grating chi - Google Patents
The detection means of one-dimensional linear grating chi Download PDFInfo
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- CN206523141U CN206523141U CN201720260704.1U CN201720260704U CN206523141U CN 206523141 U CN206523141 U CN 206523141U CN 201720260704 U CN201720260704 U CN 201720260704U CN 206523141 U CN206523141 U CN 206523141U
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- ball
- slider
- screw
- seat
- linear grating
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- 238000001514 detection method Methods 0.000 title claims abstract description 44
- 230000003287 optical effect Effects 0.000 claims abstract description 35
- 238000006073 displacement reaction Methods 0.000 claims description 30
- 230000033001 locomotion Effects 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000005259 measurement Methods 0.000 description 22
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
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- 230000001360 synchronised effect Effects 0.000 description 1
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Abstract
The detection means of one-dimensional linear grating chi, is related to a kind of detection means of fine measuring instrument, relates generally to a kind of detection means of linear grating chi.Slide block guide rail seat of the present utility model is be arranged in parallel with spherical guide seat, and the first clamping slider and the second clamping slider are arranged on slide block guide rail seat；First and second clamping device is separately positioned on first and second clamping slider；First and second gripper mechanism grips live detected linear grating chi；Ball slider is set on spherical guide seat, and ball-screw driving ball slider is moved along the axis direction of ball-screw；Ball slider is provided with grating reading head；Speculum is arranged on the upper surface of ball slider；One end connection motor of ball-screw, the other end is arranged on bearing block；Three optical axis laser interferometer are arranged on base station, and the laser of three optical axis laser interferometer projects the diameter parallel of direction and ball-screw, and vertically can be mapped on speculum.The utility model is used for the detection of linear grating chi.
Description
Technical field
The utility model is related to a kind of detection means of fine measuring instrument, relates generally to a kind of detection of linear grating chi
Device.
Background technology
Optical grid line displacement sensor and rectilinear movement guide rail mechanism composition optical grid line displacement measurement apparatus, such as：Grating ten thousand
Can tool microscope, optical grating length measuring machine, comparator, three coordinate measuring machine, gear measuring center, Press Fit Device for Wheelset, digital control processing
Center, Digit Control Machine Tool, grinding machine, milling machine, automatic decrater, pressing metal plates and bonding machine, robot and other automation science and technology
Device.Optical grid line displacement measurement apparatus belongs to fine measuring instrument, and it is widely used in the equipment manufacture of China, in accurate machine
The industries such as tool processing, industrial production, measurement verification occupy an important position.
Detection work of the China to optical grid line displacement sensor is concentrated mainly on metrological service, at present, also ununified
Mostly it is the measuring system each built to the measuring instrument equipment of optical grid line displacement sensor, measuring principle is to utilize double frequency
The data that laser reads tested optical grid line displacement sensor as standard on measuring table are compared with double-frequency laser.Mesh
Preceding domestic technical indicator can in 200mm useful ranges measurement accuracy can reach ± 1 μm.
And current detection device can not realize the automatic measurement of optical grid line displacement sensor, in measurement linear grating
It can only rely on and look for a little manually during the index of chi, and it is all manual measurement to measure, and human factor influences very greatly simultaneously on measurement result
And operating efficiency is extremely low.
Utility model content
The utility model is in order to solve to be detected that when is present using the detection means of current one-dimensional linear grating chi
Can only be by looking for manually the problem of.
The detection means of one-dimensional linear grating chi, including base station, displacement datum mechanism, displacement transmission mechanism and three optical axises swash
Optical interferometer；
The displacement datum mechanism includes the first clamping slider, the first clamping device, the second clamping slider, the second clamping machine
Structure and slide block guide rail seat；
The displacement transmission mechanism includes motor, ball-screw, spherical guide seat, ball slider, grating reading head, bearing
Seat；
Described slide block guide rail seat and spherical guide seat is arranged on base station；Slide block guide rail seat is parallel with spherical guide seat to be set
Put, that is, slide block guide rail seat and the diameter parallel in the guide direction of spherical guide seat；
First clamping slider and the second clamping slider are arranged on slide block guide rail seat, and can be transported along slide block guide rail seat
It is dynamic；First clamping device is arranged on the first clamping slider, and the second clamping device is arranged on the second clamping slider；First clamping
Mechanism and the second clamping device clamp the two ends of detected linear grating chi respectively；
Setting guide screw movement screw on ball slider, ball slider is set on spherical guide seat, and ball-screw passes through leading screw
Screw, and the axis and the diameter parallel in spherical guide seat guide direction of ball-screw are moved, ball-screw driving ball is slided
Block is moved along the axis direction of ball-screw；
Ball slider is provided with grating reading head, and grating reading head is perpendicularly oriented to be detected the grating of linear grating chi
Face, grating reading head reads the grating range data being detected on linear grating chi；Speculum is arranged on the upper table of ball slider
Face；
One end connection motor of ball-screw, the other end is arranged on bearing block；
Three optical axis laser interferometer are arranged on base station, and the laser of three optical axis laser interferometer projects direction and ball-screw
Diameter parallel, and vertically can be mapped on speculum.
Preferably, the three beams of laser that three optical axis laser interferometer are projected is designated as the first light beam, the second light beam and the 3rd respectively
The plane that light beam, the second light beam and the 3rd light beam are formed is parallel with the plane of ball slider.
Preferably, the guide groove of the slide block guide rail seat is V guide grooves.
Preferably, the motor is fixed on base station by motor fixing seat.
Preferably, the bearing block is arranged on base station.
The utility model has the advantages that：
Being capable of examining to linear grating chi using the detection means of one-dimensional linear grating chi described in the utility model
Survey, be not only able to realize the automatic detection of optical grid line displacement sensor, and without looking for a little not only easy to detect manually, and
Influence of the human factor to measurement result is eliminated, the degree of accuracy of the detection of linear grating chi is improved.
And the utility model provides displacement datum using three optical axis laser interferometer, it is ensured that detection means has higher
Precision, so as to ensure that the precision of detection method.Three optical axis laser interferometer can monitor detection means in real time and be moved through
Posture in journey, line position of going forward side by side moves compensation deals, so that eliminate detection means deflects what is brought with pitching in motion process
Error, further ensures accuracy of detection.Compared to the measuring system each built of existing full accuracy, the utility model is utilized
Detected, accuracy of detection improves more than 50%.
Brief description of the drawings
Fig. 1 is the structure of the detecting device schematic diagram of one-dimensional linear grating chi；
Fig. 2 is the schematic diagram for the three beams of laser that three optical axis laser interferometer are projected；
Fig. 3 is the bit shift compensation principle schematic in embodiment one.
Embodiment
Embodiment one：Illustrate present embodiment with reference to Fig. 1,
The detection means of one-dimensional linear grating chi includes base station 1, displacement datum mechanism, displacement transmission mechanism and three optical axises and swashed
Optical interferometer 16；
The displacement datum mechanism includes the first clamping slider 2, the first clamping device 3, the second clamping slider 7, second folder
Hold mechanism 6 and slide block guide rail seat 8；
The displacement transmission mechanism includes motor 15, ball-screw 13, spherical guide seat 12, ball slider 10, grating and read
Several first 5, bearing block 9；
Described slide block guide rail seat 8 and spherical guide seat 12 is arranged on base station 1；Slide block guide rail seat 8 and spherical guide seat
12 be arranged in parallel, that is, slide block guide rail seat 8 and the diameter parallel in the guide direction of spherical guide seat 12；
First clamping slider 2 and the second clamping slider 7 are arranged on slide block guide rail seat 8, and can be along slide block guide rail seat 8
Motion；First clamping device 3 is arranged on the first clamping slider 2, and the second clamping device 6 is arranged on the second clamping slider 7；The
One clamping device 3 and the second clamping device 6 clamp the two ends of detected linear grating chi 4 respectively；
Set on spherical guide seat 12 and guide screw movement screw, ball-screw 13 are set on ball slider 10, ball slider 10
Diameter parallel through on guide screw movement screw, and axis and spherical guide 12 guide directions of seat of ball-screw 13, ball wire
Thick stick 13 drives axis direction of the ball slider 10 along ball-screw 13 to move；
Ball slider 10 is provided with grating reading head 5, and grating reading head 5 is perpendicularly oriented to be detected linear grating chi 4
Grating face, grating reading head 5 reads the grating range data being detected on linear grating chi 4；Speculum 11 is arranged on ball cunning
The upper surface of block 10, that is, it is arranged on ball slider 10 and 12 is in contact with spherical guide seat on the relative surface on surface；
One end connection motor 15 of ball-screw 13, the other end is arranged on bearing block 9；
Three optical axis laser interferometer 16 are arranged on base station 1, and the laser of three optical axis laser interferometer 16 projects direction and rolling
The diameter parallel of ballscrew 13, and can vertically be mapped on speculum 11.
As shown in Fig. 2 the three beams of laser that three optical axis laser interferometer 16 are projected is designated as the first light beam 16a, the second light respectively
Beam 16b and the 3rd light beam 16c；The second light beam 16b that the three optical axises laser interferometer 16 is projected is by being irradiated to speculum 11
The move distance of upper measurement ball slider 10.
The process that the detection of linear grating chi is carried out using the utility model is as follows：
Step one：Detected linear grating chi 4 is arranged on the first clamping device 3 and the second clamping device 6, it is ensured that quilt
Detection of straight lines grating scale 4 is parallel with the direction of motion of grating reading head 5；
Step 2：Command displacement transmission mechanism carries out back to zero motion, grating reading head 5 is returned to detected linear grating chi
4 initial zero；
Grating reading head 5 in displacement transmission mechanism finds the zero-bit of detected linear grating chi 4, is used as initial zero；
Step 3：Command displacement benchmark mechanism is zeroed out；
The process that command displacement benchmark mechanism is zeroed out：Ball slider 10 with grating reading head 5 from initial zero,
Move to the detected detection of linear grating chi 4 stroke starting point；
Step 4：Command displacement transmission mechanism carries out detection campaign：
It is detected the detection stroke of the detecting distance correspondence ball slider 10 of linear grating chi 4, the detection of ball slider 10
Stroke is designated as total range A；In the detection stroke of ball slider 10,10 measurement points are chosen at equal intervals, when ball slider 10 is transported
When moving each measurement point of selection, the displacement measurement s α of the three beams of laser of three optical axis laser interferometer of synchronous acquisition 16 measurement
Grating range data s on i', s β i', s γ i' and detected linear grating chi 4i；The three of three optical axis laser interferometer 16 injection
Shu Jiguang is designated as the first light beam 16a, the second light beam 16b and the 3rd light beam 16c respectively, it is ensured that the second light beam 16b and the 3rd light
The plane that beam 16c is formed is parallel with the plane of ball slider 10；S α i', s β i', s γ i' are respectively the first light beam 16a, second
Light beam 16b, the 3rd light beam 16c displacement measurement；
Step 5：For ith measurement point, obtained partially according to the distance between the second light beam 16b and the 3rd light beam 16c D
Corner
Then according to the offset deviation e=calculated apart from D and deflection angle theta on the second light beam 16b caused by deflecting
Dsin θ, then pass through formula si'=s β i '-e are compensated to s β i' and are obtained si′。
Step 6：Data s after each measurement point is compensatedi' progress linear fit obtains function
Y=k*s '+b；I=1,2 ..., 10；
Wherein k, b are respectively the parameter after fitting；
The s of data after being compensated using y=k*s'+b each measurement pointi' be modified, obtain siAfter ' corresponding amendment
Value yi；
Why will be to the s of each measurement pointi' be modified, it is the s because each measurement pointi' not necessarily in y=k*s '
, can be because error causes s on+bi' deviate y=k*s '+b, in order to exclude error using y=k*s '+b to every group of si' repaiied
Just, each measurement point s is exactly found on the function y=k*s '+b that linear fit is obtainedi' should correspond to straight line y=k*s '+
Value on b.
Step 7：By max | yi-si| the ratio with total range A is realized as the examination criteria of detected linear grating chi 4
Detection to linear grating chi.
Being capable of examining to linear grating chi using the detection means of one-dimensional linear grating chi described in the utility model
Survey, be not only able to realize the automatic detection of optical grid line displacement sensor, and without looking for a little not only easy to detect manually, and
Influence of the human factor to measurement result is eliminated, the degree of accuracy of the detection of linear grating chi is improved.
And the utility model provides displacement datum using three optical axis laser interferometer, it is ensured that detection means has higher
Precision, so as to ensure that the precision of detection method.Three optical axis laser interferometer can monitor detection means in real time and be moved through
Posture in journey, line position of going forward side by side moves compensation deals, so that eliminate detection means deflects what is brought with pitching in motion process
Error, further ensures accuracy of detection.Compared to the measuring system each built of existing full accuracy, the utility model is utilized
Detected, accuracy of detection improves more than 50%.
Embodiment two：
The three beams of laser that the optical axis laser interferometer 16 of present embodiment three is projected is designated as the first light beam 16a, the second light respectively
Beam 16b and the 3rd light beam 16c, the plane that the second light beam 16b and the 3rd light beam 16c are formed and the plane of ball slider 10 are put down
OK.
Other structures and parameter are identical with embodiment one.
Embodiment three：
The guide groove of slide block guide rail seat 8 is V guide grooves described in present embodiment.
Other structures and parameter are identical with embodiment one or two.
Embodiment four：
Motor 15 is fixed on base station 1 by motor fixing seat 14 described in present embodiment..
Other steps and parameter are identical with one of embodiment one to three.
Embodiment five：
Bearing block 9 is arranged on base station 1 described in present embodiment.
Other steps and parameter are identical with one of embodiment one to four.
Claims (5)
1. the detection means of one-dimensional linear grating chi, it is characterised in that including base station (1), displacement datum mechanism, displacement transmission machine
Structure and three optical axis laser interferometer (16)；
The displacement datum mechanism includes the first clamping slider (2), the first clamping device (3), the second clamping slider (7), second
Clamping device (6) and slide block guide rail seat (8)；
The displacement transmission mechanism includes motor (15), ball-screw (13), spherical guide seat (12), ball slider (10), light
Grid reading head (5), bearing block (9)；
Described slide block guide rail seat (8) and spherical guide seat (12) are arranged on base station (1)；Slide block guide rail seat (8) is led with ball
Rail chair (12) be arranged in parallel, that is, slide block guide rail seat (8) and the diameter parallel in the guide direction of spherical guide seat (12)；
First clamping slider (2) and the second clamping slider (7) are arranged on slide block guide rail seat (8), and can be along slide block guide rail
Seat (8) motion；First clamping device (3) is arranged on the first clamping slider (2), and the second clamping device (6) is arranged on the second folder
Hold on sliding block (7)；First clamping device (3) and the second clamping device (6) clamp the two of detected linear grating chi (4) respectively
End；
Set on spherical guide seat (12) and guide screw movement screw, ball-screw are set on ball slider (10), ball slider (10)
(13) guide screw movement screw is passed through, and the axis of ball-screw (13) is put down with the axis in spherical guide seat (12) guide direction
OK, axis direction motion of ball-screw (13) the driving ball slider (10) along ball-screw (13)；
Ball slider (10) is provided with grating reading head (5), and grating reading head (5) is perpendicularly oriented to be detected linear grating chi
(4) grating face, grating reading head (5) reads the grating range data being detected on linear grating chi (4)；Speculum (11) is set
Put the upper surface in ball slider (10)；
One end connection motor (15) of ball-screw (13), the other end is arranged on bearing block (9)；
Three optical axis laser interferometer (16) are arranged on base station (1), the laser of three optical axis laser interferometer (16) project direction with
The diameter parallel of ball-screw (13), and can vertically be mapped on speculum (11).
2. the detection means of one-dimensional linear grating chi according to claim 1, it is characterised in that three optical axis laser interferometer
(16) three beams of laser projected is designated as the first light beam (16a), the second light beam (16b) and the 3rd light beam (16c), the second light beam respectively
The plane that (16b) and the 3rd light beam (16c) are formed is parallel with the plane of ball slider (10).
3. the detection means of one-dimensional linear grating chi according to claim 1 or 2, it is characterised in that the slide block guide rail
The guide groove of seat (8) is V guide grooves.
4. the detection means of one-dimensional linear grating chi according to claim 3, it is characterised in that the motor (15) passes through
Motor fixing seat (14) is fixed on base station (1).
5. the detection means of one-dimensional linear grating chi according to claim 4, it is characterised in that the bearing block (9) sets
Put on base station (1).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720260704.1U CN206523141U (en) | 2017-03-16 | 2017-03-16 | The detection means of one-dimensional linear grating chi |
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| CN201720260704.1U CN206523141U (en) | 2017-03-16 | 2017-03-16 | The detection means of one-dimensional linear grating chi |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107655410A (en) * | 2017-10-31 | 2018-02-02 | 合肥工业大学 | Accurate measurement instruments used for education based on abbe's principle |
| CN108106542A (en) * | 2017-12-22 | 2018-06-01 | 苏州欧鹏自动化设备有限公司 | The automatic detection device of linear grating ruler |
| CN109238189A (en) * | 2018-09-28 | 2019-01-18 | 天津理工大学 | A kind of production line automatic zero set system and method |
| CN113776439A (en) * | 2021-09-07 | 2021-12-10 | 中国科学院长春光学精密机械与物理研究所 | Method for reducing Abbe error of grating ruler |
| CN114526678A (en) * | 2022-02-24 | 2022-05-24 | 长光（沧州）光栅传感技术有限公司 | Quick detection device of grating ruler reading head signal |
| CN115632516A (en) * | 2022-12-01 | 2023-01-20 | 普达迪泰(成都)智造研究院有限公司 | High-precision servo linear driving device |
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2017
- 2017-03-16 CN CN201720260704.1U patent/CN206523141U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107655410A (en) * | 2017-10-31 | 2018-02-02 | 合肥工业大学 | Accurate measurement instruments used for education based on abbe's principle |
| CN107655410B (en) * | 2017-10-31 | 2023-08-22 | 合肥工业大学 | Abbe principle-based precise measurement teaching instrument |
| CN108106542A (en) * | 2017-12-22 | 2018-06-01 | 苏州欧鹏自动化设备有限公司 | The automatic detection device of linear grating ruler |
| CN109238189A (en) * | 2018-09-28 | 2019-01-18 | 天津理工大学 | A kind of production line automatic zero set system and method |
| CN113776439A (en) * | 2021-09-07 | 2021-12-10 | 中国科学院长春光学精密机械与物理研究所 | Method for reducing Abbe error of grating ruler |
| CN114526678A (en) * | 2022-02-24 | 2022-05-24 | 长光（沧州）光栅传感技术有限公司 | Quick detection device of grating ruler reading head signal |
| CN114526678B (en) * | 2022-02-24 | 2023-09-22 | 长光（沧州）光栅传感技术有限公司 | Quick detection device for grating ruler reading head signals |
| CN115632516A (en) * | 2022-12-01 | 2023-01-20 | 普达迪泰(成都)智造研究院有限公司 | High-precision servo linear driving device |
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Granted publication date: 20170926 |