CN109974579A - The caliberating device of optics paraboloid of revolution standard array center distance - Google Patents
The caliberating device of optics paraboloid of revolution standard array center distance Download PDFInfo
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- CN109974579A CN109974579A CN201910217091.7A CN201910217091A CN109974579A CN 109974579 A CN109974579 A CN 109974579A CN 201910217091 A CN201910217091 A CN 201910217091A CN 109974579 A CN109974579 A CN 109974579A
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- 238000005259 measurement Methods 0.000 claims abstract description 16
- 230000010287 polarization Effects 0.000 claims abstract description 13
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 8
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000009738 saturating Methods 0.000 claims 1
- 238000009434 installation Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 13
- 238000001514 detection method Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 5
- 230000001427 coherent effect Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- 238000005375 photometry Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/005—Testing of reflective surfaces, e.g. mirrors
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a kind of caliberating devices of optics paraboloid of revolution standard array center distance, including optics paraboloid of revolution standard array, angular transducer, three coordinate measuring machine, optics paraboloid of revolution standard array is placed on three-dimensional coordinates measurement machine worktable, multiple optics paraboloid of revolution standards including array pedestal and laying on the base, angle information of the angular transducer to measure the point on optics paraboloid of revolution standard, including laser, reflecting mirror, pinhole filter, plus lens, polarization splitting prism, quarter-wave plate, object lens and photodetector.Bring location error when the present invention can eliminate the installation of optics paraboloid of revolution standard.
Description
Technical field
The present invention relates to a kind of caliberating device of optical reference part, especially a kind of optics paraboloid of revolution standard array
The caliberating device of centre distance.
Background technique
Freeform optics surface has very big freedom of processing, and machining accuracy is high, may be used as the standard of measurement.Such as light
Learning the paraboloid of revolution has the characteristics that surface slope variation is linear with change in location, can be used for the measurement to position.
At present in mature processing technology, there is very high essence to the processing of the face type and surface roughness of the single optics paraboloid of revolution
Degree often uses in such a way that the arrangement of multiple paraboloids is combined into array when the optics paraboloid of revolution is used to measure, and current
Processing technology in it is not high to the center spacing positioning accuracy between each paraboloid or need pay very big processing cost.And
The raising of measuring system overall precision while the machining accuracy and multiple parabolic interplanar distances for depending on the single optics paraboloid of revolution
Positioning accuracy.
Motion detection in many applications, such as numerically-controlled machine tool, multiaxis displacement platform is needed using position reference and angle
Degree benchmark measures.A kind of optics that can provide position and angle reference is processed using the design of freeform optics surface processing technology
Standard is for measuring detection.Due in the arrangement process of each optics paraboloid of revolution type, each optics rotary parabolic
Deviation and standard will be present in long-term use by external environmental condition in the center in face and the theoretical position of design
Influence that micro-strain occurs, the spacing between each characteristic point also will and design value generates deviation, therefore only with optics rotary parabolic
Design spacing and angle between face the position of measured system and angle are measured as benchmark be it is incorrect, it is practical plus
The spacing of parabolic interplanar distance and Theoretical Design that work goes out has differences, it is therefore desirable to each on the standard gone out to actual processing
Paraboloid centre distance is demarcated, and then improves the accuracy and precision measured using the standard component system under test (SUT) position.
Summary of the invention
The object of the present invention is to provide a kind of caliberating devices of optics paraboloid of revolution standard array center distance.This hair
It is bright to go out the centre distance between each optics paraboloid of revolution using the face type feature Accurate Calibration of the optics paraboloid of revolution itself, disappear
Except the optics paraboloid of revolution installs bring error, reference data is provided for coherent detection.The present invention is to solve in well-known technique
It is adopted the technical scheme that:
A kind of caliberating device of optics paraboloid of revolution standard array center distance, including optics paraboloid of revolution benchmark
Part array, angular transducer, three coordinate measuring machine, optics paraboloid of revolution standard array are placed in three-dimensional coordinates measurement machine worktable
On, multiple optics paraboloid of revolution standards including array pedestal and laying on the base, the angular transducer is fixed
In the motive spindle of measuring machine, array pedestal is placed on the workbench of three coordinate measuring machine, which is characterized in that
Angle information of the angular transducer to measure the point on optics paraboloid of revolution standard, including laser
Device, reflecting mirror, pinhole filter, plus lens, polarization splitting prism, quarter-wave plate, object lens and photodetector；By
The laser emitting light of the reflection of reflecting mirror converges light by plus lens after pinhole filter filters, convergence
Light afterwards changes direction and the energy of light after polarization splitting prism；The light of reflection changes by quarter-wave plate
Optics paraboloid of revolution standard is irradiated to after the phase of light, via the optics paraboloid of revolution standard reflection light successively
Through being received by a photoelectric detector after polarization splitting prism and object lens；The photodetector is located on the focal plane of object lens；
Preferably, the laser is dot light spot laser device.The pinhole filter is aperture diaphragm.
The advantages and positive effects of the present invention are: being completed by three coordinate measuring machine fit angle sensor to optics
The calibration of each optics paraboloid of revolution central point transverse and longitudinal spacing on paraboloid of revolution standard array eliminates optics rotation and throws
Bring location error when object plane standard is installed, provides reference data for coherent detection, to the utilization optics paraboloid of revolution
Standard array realizes that the measurement of large scale and high accuracy position is of great significance.
Detailed description of the invention
Fig. 1 is the caliberating device schematic diagram that the present invention applies
In figure: 1, optics paraboloid of revolution standard array, 2, angular transducer, 3, three coordinate measuring machine
Fig. 2 is the optics paraboloid of revolution standard array schematic diagram that the present invention applies
In figure: 1-1, optics paraboloid of revolution standard；1-2, array pedestal
Fig. 3 is the angular transducer light channel structure schematic diagram that the present invention applies
In figure: 2-1, laser；2-2, reflecting mirror；2-3, pinhole filter；2-4, plus lens；2-5, polarization spectro rib
Mirror；2-6, quarter-wave plate；1-1, optics paraboloid of revolution standard；2-7, object lens；2-8, photodetector
Specific embodiment
In order to further understand the content, features and effects of the present invention, the following examples are hereby given, and cooperate attached drawing
Detailed description are as follows:
The present invention is to solve technical problem present in well-known technique and provide a kind of optics paraboloid of revolution standard battle array
Scaling method, the device of column centre distance, this method are each out using the face type feature Accurate Calibration of the optics paraboloid of revolution itself
Centre distance between a optics paraboloid of revolution eliminates the optics paraboloid of revolution and installs bring error, provides for coherent detection
Reference data.
The technical scheme adopted by the present invention to solve the technical problems existing in the known art is that a kind of optics rotation is thrown
Scaling method, the device of object plane standard array center distance, a kind of optics paraboloid of revolution standard array center away from
From scaling method, device include optics paraboloid of revolution standard array 1, angular transducer 2 and three coordinate measuring machine 3.
The optics paraboloid of revolution standard array 1 is placed on the workbench of the three coordinate measuring machine 3, by multiple
Optics paraboloid of revolution standard 1-1 and array pedestal 1-2 composition.Optics paraboloid of revolution standard is brass material, in base
The surface of quasi- part processes the optics paraboloid of revolution.Standard bottom is equipped with threaded hole, is connected by bolt with array pedestal,
Centre distance needs further to be demarcated between standard.The single optics paraboloid of revolution on optics paraboloid of revolution standard array
It is row with the direction x by position No., is column with the direction y, the i-th row jth column number is P (i, j).
As shown in Fig. 2, a kind of angular transducer suitable for the detection of freeform optics surface face type, the angular transducer 2
By laser 2-1, reflecting mirror 2-2, pinhole filter 2-3, plus lens 2-4, polarization splitting prism 2-5, quarter-wave plate
The composition such as 2-6, optics paraboloid of revolution standard 1-1, object lens 2-7, photodetector 2-8, can measure optics rotary parabolic
The angle information of point on the standard of face.
The laser is dot light spot laser device, and laser emitting light is vertical light；The reflecting mirror is located at
The underface of laser, from the horizontal by 45° angle, the oblique upper left side of mirror surface；The pinhole filter is aperture diaphragm, hole
Diameter size is 200um, hole heart face laser beam；The plus lens is located on the right side of pinhole filter, converges to light,
Its focal length should not select larger；The polarization splitting prism is semi-transparent semi-reflecting lens, thus it is possible to vary the direction of light and energy；It is described
Quarter-wave plate is located at the underface of polarization splitting prism, thus it is possible to vary the phase of light；The photometry rotation to be checked is thrown
Object plane standard is connected on three-dimensional coordinates measurement machine worktable by connector；The object lens be convex lens, to imaging beam into
Row convergence, improves image quality；The photodetector is located on the focal plane of object lens, generally industry CMOS camera.
Further, the laser emitting laser is reflected by a reflector that vertical thick light beam is made to become horizontal thick light
Beam, horizontal thick light beam becomes the light pencil that diameter is 200um after being limited by pinhole filter, after the convergence of plus lens
By polarization splitting prism, at this moment the p light in light beam passes through completely, s light be reflected through quarter-wave plate go directly it is to be detected
Optics paraboloid of revolution standard, reflection light successively image in after quarter-wave plate, polarization splitting prism, object lens again
On photodetector.The face type information of free form surface to be measured can be obtained according to the facula position information on photodetector.
Assuming that freeform optics surface to be detected is the small-bore optics paraboloid of revolution, and point on the known optical paraboloid of revolution
Slope it is directly proportional to its horizontal distance apart from optics rotary parabolic vertex of surface.For the optics rotary parabolic completed the process
Face is fixed on three-dimensional coordinates measurement machine worktable；Make it in horizontal plane X-direction with one by adjusting three coordinate measuring machine
Determine step pitch to move in a straight line, measures n point；Make it in the mobile certain step of horizontal plane Y-direction by adjusting three coordinate measuring machine again
Away from repeating the above steps and measure m point；And so on, until measurement point is covered substantially to the photometry paraboloid of revolution.It is theoretical
On, facula position distribution of the measurement point on photodetector meets n × m array of certain rule such as equidistantly distributed, practical
Testing result shows that the optics paraboloid of revolution processed is undesirable if not being inconsistent with expection, and there are face type errors, and can
It is otherwise qualified converted products to be corrected targeted specifically according to detection information.
The kinematic axis and horizontal workbench for mutually orthogonal direction that there are three the tools of three coordinate measuring machine 3, and angle
Sensor 2 is mounted on the main shaft of three coordinate measuring machine vertical movement, and the column of optics paraboloid of revolution standard battle array 1 are placed in three seats
On the workbench of co-ordinate measuring machine.
The scaling method uses following steps:
1) calibration carries out sampling site by the way of line by line, first measures the first row first row optics paraboloid of revolution benchmark
The coordinate in part P (1,1) direction x, three coordinate measuring machine main axis drive angular transducer to measure n point in P (1,1) in X direction
Angle information α11、α12···α1n, while three coordinate measuring machine is recorded in the feedback value X of X-direction11、X12···X1n。
2) coordinate in the first row first row the optics paraboloid of revolution standard P (1, the 1) direction y, three-dimensional coordinates measurement are measured again
Owner's axis drives angular transducer to measure the angle information β of n point in P (1,1) along Y-direction11、β12···β1n, record simultaneously
The value of feedback Y of three coordinate measuring machine in the Y direction11、Y12···Y1n。
3) feedback value X that measuring machine is obtained11、X12···X1nWith angle information α11、α12···α1nIt carries out minimum
Two multiply linear fit, the intercept b of obtained fitting a straight line equation11The coordinate in the direction x of as P (1,1)；Similarly measuring machine is obtained
The value of feedback Y arrived11、Y12···Y1nWith angle information β11、β12···β1nLeast square linear fit is carried out, what is obtained is quasi-
Close the intercept B of linear equation11The coordinate in the direction y of as P (1,1)；Then seat of the P (1,1) under three coordinate measuring machine coordinate system
It is designated as (b11,B11)。
4) coordinate to the direction x for the optics paraboloid of revolution standard that the i-th row jth column number is P (i, j) and the direction y
Coordinate can pass through repeat step 1) -3) measurement obtain, be (bij,Bij)；It is the optics of P (m, n) to the n-th column number of m row
The coordinate in the direction x of paraboloid of revolution standard and the coordinate in the direction y, which can also pass through, repeats step 1) -3) measurement obtains, be
(bmn,Bmn)；Then the centre distance of P (i, j) and P (m, n) are (bij-bmn,Bij-Bmn)。
5) it repeats the above steps, the single optics paraboloid of revolution in optics paraboloid of revolution standard array can be calibrated
The relative distance at center between any two.
The principle of the present invention:
The sensitivity of the alignment collimated optical beam of freeform optics surface known to and face type changing rule smaller present invention utilizes area
Characteristic devises a set of simple light channel structure, under the premise of known optical free-curved-surface-type changing rule, can pass through
This light channel structure detects the freeform optics surface face type that processes, screens out that there are the products of larger mismachining tolerance.
When carrying out position measurement as position reference using optics paraboloid of revolution standard array, since optics rotates
Paraboloid standard is usually present certain position error in installation, it is therefore desirable to each optics paraboloid of revolution standard
Centre distance is demarcated, and the exact position between them is obtained.The present invention is special using the face type of the optics paraboloid of revolution itself
Point obtains the angle information of measurement point by angular transducer using the location information of three coordinate measuring machine record measurement point, leads to
The centre coordinate that least square method linear fit accurately obtains optics paraboloid of revolution standard is crossed, and then Accurate Calibration is each out
Centre distance between the optics paraboloid of revolution eliminates the optics paraboloid of revolution and installs bring error, provides base for coherent detection
Quasi- data.
Although the preferred embodiment of the present invention is described above in conjunction with attached drawing, the invention is not limited to upper
The specific embodiment stated, the above mentioned embodiment is only schematical, be not it is restrictive, this field it is common
Technical staff under the inspiration of the present invention, in the case where not departing from present inventive concept and scope of the claimed protection, goes back
Many forms can be made, within these are all belonged to the scope of protection of the present invention.
Claims (3)
1. a kind of caliberating device of optics paraboloid of revolution standard array center distance, including optics paraboloid of revolution standard
Array, angular transducer, three coordinate measuring machine, optics paraboloid of revolution standard array are placed in three-dimensional coordinates measurement machine worktable
On, multiple optics paraboloid of revolution standards including array pedestal and laying on the base, the angular transducer is fixed
In the motive spindle of measuring machine, array pedestal is placed on the workbench of three coordinate measuring machine, which is characterized in that
Angle information of the angular transducer to measure the point on optics paraboloid of revolution standard, including laser,
Reflecting mirror, pinhole filter, plus lens, polarization splitting prism, quarter-wave plate, object lens and photodetector；By anti-
The laser emitting light for penetrating the reflection of mirror converges light by plus lens after pinhole filter filters, after convergence
Light change direction and the energy of light after polarization splitting prism；The light of reflection changes light by quarter-wave plate
Optics paraboloid of revolution standard is irradiated to after the phase of line, the light reflected via optics paraboloid of revolution standard is successively saturating
It is received by a photoelectric detector after crossing polarization splitting prism and object lens；The photodetector is located on the focal plane of object lens.
2. the apparatus according to claim 1, which is characterized in that the laser is dot light spot laser device.
3. the apparatus according to claim 1, which is characterized in that the pinhole filter is aperture diaphragm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910217091.7A CN109974579A (en) | 2019-03-21 | 2019-03-21 | The caliberating device of optics paraboloid of revolution standard array center distance |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910217091.7A CN109974579A (en) | 2019-03-21 | 2019-03-21 | The caliberating device of optics paraboloid of revolution standard array center distance |
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| CN109974579A true CN109974579A (en) | 2019-07-05 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110666591A (en) * | 2019-09-17 | 2020-01-10 | 天津大学 | Numerical control machine tool straight error identification method based on combined surface type |
| CN115338691A (en) * | 2022-06-17 | 2022-11-15 | 中航西安飞机工业集团股份有限公司 | Method for measuring error of feeding shaft of numerical control machine tool |
| CN115628816A (en) * | 2022-12-19 | 2023-01-20 | 中国科学院合肥物质科学研究院 | Calibration system and method of laser parameter measuring device |
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| CN209541665U (en) * | 2019-03-21 | 2019-10-25 | 天津大学 | The caliberating device of optics paraboloid of revolution standard array center distance |
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2019
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Patent Citations (5)
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| CN103528519A (en) * | 2013-10-21 | 2014-01-22 | 中国航空工业集团公司北京航空精密机械研究所 | Method for measuring and calibrating spatial position vector of point projection optical measuring head |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110666591A (en) * | 2019-09-17 | 2020-01-10 | 天津大学 | Numerical control machine tool straight error identification method based on combined surface type |
| CN115338691A (en) * | 2022-06-17 | 2022-11-15 | 中航西安飞机工业集团股份有限公司 | Method for measuring error of feeding shaft of numerical control machine tool |
| CN115628816A (en) * | 2022-12-19 | 2023-01-20 | 中国科学院合肥物质科学研究院 | Calibration system and method of laser parameter measuring device |
| CN115628816B (en) * | 2022-12-19 | 2023-03-10 | 中国科学院合肥物质科学研究院 | Calibration system and method of laser parameter measuring device |
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