CN109520417A - Lathe geometric error and turntable corner position error calibrating installation and method - Google Patents

Lathe geometric error and turntable corner position error calibrating installation and method Download PDF

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Publication number
CN109520417A
CN109520417A CN201811194201.4A CN201811194201A CN109520417A CN 109520417 A CN109520417 A CN 109520417A CN 201811194201 A CN201811194201 A CN 201811194201A CN 109520417 A CN109520417 A CN 109520417A
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error
curved surface
axis
measuring head
lathe
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李杏华
杨晓唤
房丰洲
黄银国
张震楠
黄武
张冬
高凌妤
魏煊
吕泽奎
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Tianjin University
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Tianjin University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Abstract

The present invention relates to the calibratings of multi-axis NC Machine Tools geometric error and turntable corner position error, for the calibration method for proposing efficient, high-precision multi-axis NC Machine Tools geometric error.Thus, the technical solution adopted by the present invention is that, Geometric Error for Computerized Numerical Control Milling Machine and turntable corner position error calibrating installation, optical measuring head is installed on machine Z-axis moving component, combinatorial surface type standard is fixed on the platform vertical with machine Z-axis, curved array and planar array are equipped on the combinatorial surface type standard, positioned at the top of the combinatorial surface type standard；The optical measuring head includes laser, aperture diaphragm, reflecting mirror, Amici prism, imaging len, CCD camera and data processing module, and the collimated light beam that the laser issues shortens thin collimated optical beam into through the aperture diaphragm.Present invention is mainly applied to multi-axis NC Machine Tools geometric error and the calibrating occasions of turntable corner position error.

Description

Lathe geometric error and turntable corner position error calibrating installation and method
Technical field
The present invention relates to a kind of multi-axis NC Machine Tools geometric error and the calibration methods of turntable corner position error, especially It is the calibration method of a kind of multi-axis NC Machine Tools geometric error based on combinatorial surface type standard and turntable corner position error.
Background technique
The error testing of numerically-controlled machine tool includes error-detecting and error identification.Error-detecting and identification are not only error evaluation Basis, be the important content of machine tool accuracy evaluation work, and be carry out machine tool accuracy forecast and error compensation another pass Key technology.
In machine tool error detection field, there are laser interferometer and club using relatively broad machine tool error detecting instrument Instrument, due to the factor on itself testing principle, these instruments exist respective in the error-detecting for being applied to multi-axis NC Machine Tools Deficiency: if laser interferometer adjusts complicated, one-shot measurement can only obtain a parameter, high operation requirements, it is difficult to realize automatic Change, is rapid and expensive, general enterprises do not have；Ball bar can not arbitrarily planning survey path, for rotate axis error The measuring process design of identification and theoretical decoupling algorithm research increase difficulty, and ball bar is carried out with magnet base cooperation precision ball Contact type measurement needs to be moved under the low speed to guarantee measurement accuracy, is difficult to adapt to rapid trend.One dimension spherical column is suitble to each axis Straight line calibration, but do not have advantage to angle error-detecting, and the relative error between each axis of gang tool is to machining accuracy shadow Sound is very big.
For the processing of complicated abnormal shape part, multiaxis NC maching technology is obtained by its flexible, efficient, high-precision feature It is widely applied and promotes, for the needs for meeting regular precision calibration, efficient machine tool error detection just becomes with discrimination method Urgent problem to be solved.
The geometric error detection project of multi-axis NC Machine Tools mainly includes the angular error, position error, straight line of translation shaft Error and the error of perpendicularity and turntable corner etc. are spent, in order to detect the above-mentioned margin of error of kinematic axis, it is desirable to provide a kind of movement Axis multi-parameter detecting method, this method should be easy to operate, and detection efficiency is high.
Detect the important channel that final composition error is indirect estimation lathe geometric error.Displacement of the lines method is common method One of, but the detecting instrument of displacement of the lines method is laser interferometer, can not separate the error of perpendicularity and rolling angle error has original Rationality error, the disadvantages of shaft geometric error can not be recognized.
Multi-axis NC Machine Tools geometric error identification project mainly include establish the machine tool error identification model of accurate simplicity, if Count placement position and the error identification step etc. of combinatorial surface type standard, this method should principle it is accurate, meet engineering reality, and It is simple and easy to do.
Summary of the invention
In order to overcome the deficiencies of the prior art, the present invention is directed to propose efficiently, high-precision multi-axis NC Machine Tools geometric error Calibration method.For this reason, the technical scheme adopted by the present invention is that Geometric Error for Computerized Numerical Control Milling Machine and the inspection of turntable corner position error Determine device, optical measuring head is installed on machine Z-axis moving component, combinatorial surface type is fixed on the platform vertical with machine Z-axis Standard is equipped with curved array and planar array, positioned at the combinatorial surface type standard on the combinatorial surface type standard Top；The optical measuring head includes laser, aperture diaphragm, reflecting mirror, Amici prism, imaging len, CCD camera and data Processing module, the collimated light beam that the laser issues shorten thin collimated optical beam into through the aperture diaphragm, and thin collimated optical beam is through described anti- It is incident in the Amici prism after penetrating mirror, the energy for projecting the light at any point in curved surface and planar array accounts for gross energy 1/2, the light beam of the point reflection is imaged in the CCD camera after Amici prism transmission by the imaging len；It adopts With displacement of the moving component in X, Y both direction of the optical measuring head and combinatorial surface type standard measurement lathe and around X, the corner of Y both direction；The optical measuring head and combinatorial surface type standard collectively form multi-parameter detector device；On Z axis Differential optical gauge head is installed, primary standard of curved surface part is fixed on the turntable parallel or coaxial with Z axis, on the primary standard of curved surface part Equipped with multiple groups curved surface group arranged in pairs, every group of curved surface is equipped with a curved surface I and curved surface II, I He of curved surface in each curved surface group Diametrically the centerlines of two neighboring curved surface group are β to the setting of curved surface II same, and the differential optical gauge head is equipped with one Data processing module and the identical optical measuring head of two structures, two optical measuring heads are that optical measuring head I and optics are surveyed respectively First II, the optical axis of the optical measuring head is parallel with Z axis, and the differential optical gauge head is located at the top of the primary standard of curved surface part, and two Being equidistant between II center of the distance between a optical measuring head optical axis and curved surface I and curved surface；The optical measuring head includes swashing Light device, aperture diaphragm, reflecting mirror, Amici prism, imaging len and CCD camera, the collimated light beam that the laser issues is through institute State aperture diaphragm and shorten thin collimated optical beam into, thin collimated optical beam is incident in the Amici prism after the reflecting mirror, 1/2 energy it is anti- Irradiating light beam projects any point in curved surface, and the light beam of the point reflection passes through the imaging after Amici prism transmission Lens imaging is in the CCD camera；Turned using the differential optical gauge head and primary standard of curved surface part calibrating lathe turntable Angular positioning error.
Multi-axis NC Machine Tools geometric error and turntable corner position error calibration method, in the fortune being arranged along machine Z-axis Optical measuring head is installed on dynamic component, combinatorial surface type standard is fixed on the platform vertical with Z axis, in the combinatorial surface type benchmark Part is equipped with curved array and planar array, and moving component is located at the top of the combinatorial surface type standard；The optical measuring head Including laser, aperture diaphragm, reflecting mirror, Amici prism, imaging len, CCD camera and data processing module, the laser The collimated light beam that device issues shortens thin collimated optical beam into through the aperture diaphragm, and thin collimated optical beam is incident on described point after the reflecting mirror In light prism, the reflected beams of 1/2 energy project any point on curved array and planar array, the light beam of the point reflection After Amici prism transmission, it is imaged in the CCD camera by the imaging len；Using the optical measuring head and institute State measurement displacement of the moving component in X, Y both direction and corner around X, Y both direction of combinatorial surface type standard, X, Z and Y, Z-direction displacement and outer corner measurement and so on；Lathe shares 3 movable bodies X, Y, Z, when the movement of A movable body, will generate 6 Item error: TAX,TAY,TAZ,RAX,RAY,RAZ, wherein T indicates linearity error, and R indicates angular error；Lower target first letter Indicate movable body title, second letter indicates the title of the machine tool guideway influenced by error, and practical Y, X guide rail of lathe is not Exact vertical, there are error of perpendicularity SYX；Actual Z guide rail and two guide rail of X, Y also not exact vertical, there are two verticalities to miss Poor SZX,SZY, therefore lathe shares 21 geometric errors, using the optical measuring head and the combinatorial surface type standard, measures every time Two displacement errors and two angular errors are obtained, are repeatedly put by combinatorial surface type standard, direct detection angles error is hung down Straight degree error, comprehensive three-D displacement error；Geometric error model is established to numerically-controlled machine tool translation shaft, by the aforementioned angle measured Error is spent, is fitted to obtain angular error cubic polynomial by least square method, angular error cubic polynomial, verticality are missed Difference, comprehensive three-D displacement error are brought into geometric error model, and resolving obtains position error cubic polynomial, straightness error three Order polynomial, so far, all geometric error fitting of a polynomial forms of lathe geometric error model are it is known that lathe is worked empty Between middle any point coordinate value input geometric error model resolved to obtain corresponding geometric error predicted value, realize that space is appointed The prediction of some lathe geometric errors；Differential optical gauge head is installed on Z axis, is blocked on the turntable parallel or coaxial with Z axis Gu primary standard of curved surface part, is equipped with multiple groups curved surface group arranged in pairs on the primary standard of curved surface part, every group of curved surface is equipped with a curved surface I With curved surface II, curved surface I and the setting of curved surface II in each curved surface group it is same diametrically, the center wire clamp of two neighboring curved surface group Angle is β, and the differential optical gauge head is equipped with a data processing module and the identical optical measuring head of two structures, two light Learning gauge head is optical measuring head I and optical measuring head II respectively, and the optical axis of the optical measuring head is parallel with Z axis, and the differential optical is surveyed Between II center of distance and curved surface I and curved surface of the head between the top of the primary standard of curved surface part, two optical measuring head optical axises Be equidistant；The optical measuring head includes laser, aperture diaphragm, reflecting mirror, Amici prism, imaging len and CCD camera, The collimated light beam that the laser issues shortens thin collimated optical beam into through the aperture diaphragm, and thin collimated optical beam is incident after the reflecting mirror Into the Amici prism, the reflected beams of 1/2 energy project any point in curved surface, described in the light beam warp of the point reflection After Amici prism transmission, it is imaged in the CCD camera by the imaging len；Using the differential optical gauge head and described Primary standard of curved surface part examines and determine lathe turntable corner position error.
Specific step is as follows for the prediction of realization space any point lathe geometric error:
Measuring displacement of the moving component on X, Y both direction, specific step is as follows:
1) make the light beam of the optical measuring head and center of surface line and plane normal on the combinatorial surface type standard In parallel；
2) initial time, the optical measuring head are located at position A0Place, the data processing module obtain at this time optical axis in CCD Magazine position coordinates O (x0, y0)；
3) moving component drives optical measuring head to be moved at the first position AI on curved array in left-right direction, bent at this time Corresponding measurement point is A on the array of face1(x1, y1, z1), the data processing module follows the steps below data processing:
3.1) imaging facula center position coordinates A ' in CCD camera is obtained1(x′1, y '1)；
3.2) by the spot center position coordinates A ' in step 3.1)1(x′1, y '1) spot center is converted to apart from optical axis X Direction distance S1x, Y-direction distance S1y；
3.3) the corresponding angle of measurement point A1 slope is calculated:
ξx=arctan (s1x/f)/2(1)
ξy=arctan (s1y/f)/2(2)
Wherein: ξxRepresent measurement point A1The angle of tangent line and X-direction in XOZ plane；
ξyRepresent measurement point A1The angle of tangent line and Y direction in YOZ plane；
F represents the focal length of imaging len；
3.4) measurement point A is calculated1(x1, y1, z1) coordinate:
x1=g (ξx)(3)
y1=g (ξy)(4)
Wherein: g (x) represents function of a single variable.
4) moving component drives optical measuring head to move to the second position A on curved array in left-right directionIIPlace, it is bent at this time Corresponding measurement point is A on the array of face2(x2, y2, z2), the same step 3) of data handling procedure, measurement point A2(x2, y2, z2) coordinate Are as follows:
x2=g (φx)(5)
y2=g (φy)(6)
Wherein: ΦxRepresent measurement point A2The angle of tangent line and X-direction in XOZ plane；
ΦyRepresent measurement point A2The angle of tangent line and Y direction in YOZ plane.
5) data processing module calculates displacement of the moving component in X, Y both direction:
M=g (φx)-g(ξx)+P(7)
N=g (φy)-g(ξy)+Q(8)
Wherein: M represents moving component in the displacement of X-direction；
N represents the displacement of moving component in the Y direction；
P represents distance of the center line in X-direction of k-th of curved surface and w-th of curved surface；
Q represents the distance of the center line of k-th of curved surface and w-th of curved surface in the Y direction.
Moving component is measured around X, specific step is as follows for Y both direction corner:
6) moving component drives optical measuring head to move to the third place A in planar array in left-right directionIIIPlace, at this time Corresponding measurement point is A in planar array3(x3, y3, z3), moving component is ε around the corner of X, Y both directionx、εy, the number Data processing is followed the steps below according to processing module:
6.1) imaging facula center position coordinates A ' in CCD camera is obtained3(x′3, y '3)；
6.2) by the spot center position coordinates A ' in step 6.1)3(x′3, y '3) spot center is converted to apart from optical axis light Axis X-direction distance S3x, S3Y；
6.3) moving component is calculated in position AIIITwo corners at place:
εx=arctan (s3x/f)/2(9)
εy=arctan (s3y/f)/2(10)
Wherein: εxMoving component is represented in position AIIICorner of the place around X-axis；
εyMoving component is represented in position AIIICorner of the place around Y-axis；
F represents the focal length of imaging len；
The combinatorial surface type standard shape is designed as " L " type, and standard has two orthogonal sides, each in each edge It is parallel to equidistant 4 groups of measurement characteristic faces on side；Moving component is located at the top of the combinatorial surface type standard；Three, lathe Translation shaft linkage drives the multi-parameter detector device movement, is repeatedly put by combinatorial surface type standard, detects lathe Angular error, the error of perpendicularity and comprehensive three-D displacement error, the specific steps are as follows:
1) the combinatorial surface type standard is made to be parallel to lathe X-axis according to a line, another a line is parallel to machine Z-axis Mode is put, and the detection direction of the multi-parameter detector device is Y-direction, obtains the error of perpendicularity by two included angle of straight line Szx；
1.1) lathe X translation shaft drives the multi-parameter detector device to move along the x-axis, when multi-parameter detector device moves respectively When moving above four paraboloids in face type array described in combinatorial surface type standard, more ginsengs are detected using multi-parameter detector device Position coordinates (X of the number detecting instrument under standard component coordinate systemWIi,YWIi,ZWIi) wherein i=1,2,3,4, when multi-parameter detects When instrument is moved respectively to above four planes in face type array described in combinatorial surface type standard, roll error R is detectedxxiWith Run-out error Rxzi, record the machine tool instructions position (X at detection error pointIi,YIi,ZIi)；
1.2) lathe Z translation shaft drives the multi-parameter detector device to move along Z axis, when multi-parameter detector device moves respectively When moving above four paraboloids in face type array described in combinatorial surface type standard, more ginsengs are detected using multi-parameter detector device Position coordinates (X of the number detecting instrument under standard component coordinate systemWIj, YWIj,ZWIj) wherein j=5,6,7,8, when multi-parameter detects When instrument is moved respectively to above four planes in face type array described in combinatorial surface type standard, the Run-out error R that bows is detectedzxi With roll error Rzzi, record the machine tool instructions position (X at detection error pointIj,YIj,ZIj)；
2) the combinatorial surface type standard is made to be parallel to lathe Y-axis according to a line, another a line is parallel to machine Z-axis Mode is put, and the detection direction of the multi-parameter detector device is X-direction, obtains the error of perpendicularity by two included angle of straight line Syz；
2.1) lathe Y translation shaft drives the multi-parameter detector device to move along Y-axis, when multi-parameter detector device moves respectively When moving above four paraboloids in face type array described in combinatorial surface type standard, more ginsengs are detected using multi-parameter detector device Position coordinates (X of the number detecting instrument under standard component coordinate systemWIIi,YWIIi,ZWIIi), when multi-parameter detector device moves respectively When above to four planes in face type array described in combinatorial surface type standard, roll error R is detectedyyiWith Run-out error Ryzi, Record the machine tool instructions position (X at detection error pointIIi,YIIi,ZIIi)；
2.2) lathe Z translation shaft drives the multi-parameter detector device to move along Z axis, when multi-parameter detector device moves respectively When moving above four paraboloids in face type array described in combinatorial surface type standard, more ginsengs are detected using multi-parameter detector device Position coordinates (X of the number detecting instrument under standard component coordinate systemWIIj,YWIIj,ZWIIj), when multi-parameter detector device moves respectively When above to four planes in face type array described in combinatorial surface type standard, roll error R is detectedzzjWith pitch error Rzyi, Record the machine tool instructions position (X at detection error pointIIj,YIIj,ZIIj)；
3) the combinatorial surface type standard is made to be parallel to lathe X-axis according to a line, another a line is parallel to lathe Y-axis Mode is put, and the detection direction of the multi-parameter detector device is Z-direction, obtains the error of perpendicularity by two included angle of straight line Sxy；
3.1) lathe X translation shaft drives the multi-parameter detector device to move along the x-axis, when multi-parameter detector device moves respectively When moving above four paraboloids in face type array described in combinatorial surface type standard, more ginsengs are detected using multi-parameter detector device Position coordinates (X of the number detecting instrument under standard component coordinate systemWIIIi,YWIIIi,ZWIIIi), when multi-parameter detector device moves respectively When moving above four planes in face type array described in combinatorial surface type standard, roll error R is detectedxxjAnd pitch error Rxyi, record the machine tool instructions position (X at detection error pointIIIi,YIIIi,ZIIIi)；
3.2) lathe Y translation shaft drives the multi-parameter detector device to move along Y-axis, when multi-parameter detector device moves respectively When moving above four paraboloids in face type array described in combinatorial surface type standard, more ginsengs are detected using multi-parameter detector device Position coordinates (X of the number detecting instrument under standard component coordinate systemWIIIj,YWIIIj,ZWIIIj), when multi-parameter detector device moves respectively When moving above four planes in face type array described in combinatorial surface type standard, roll error R is detectedyyjAnd pitch error Ryxi, record the machine tool instructions position (X at detection error pointIIIj,YIIIj,ZIIIj)；
The cutter translation shaft kinematic chain of gang tool and the topological structure of workpiece motion s chain are analyzed, theory of multi body system is based on Numerically-controlled machine tool translation shaft geometric error model is established for the structure feature of numerically-controlled machine tool:
Coordinate (X ', Y ', Z ') is measuring system actual position coordinate in lathe coordinate system, therefore three-dimensional position error
Wherein:It is machine tool instructions displacement；
Since in actual error modeling process, Geometric Error for Computerized Numerical Control Milling Machine very little is usually ignored all secondary in modeling With take leave error term product, only consider the influence of a section error term, by calculating above-mentioned matrix, obtain identification mathematical model such as Under:
Dx=Txx+Tyx+Tzx-y·(Sxy+Rxz)+z·(Szx+Ryy+Rxy)
Dy=Txy+Tyy+Tzy-z·(Szy+Ryx+Rxx)
Dz=Txz+Tyz+Tzz+y·Rxx。
It is specific as follows to resolve lathe geometric error fitting of a polynomial form step:
1) because geometric error is the function of movable body amount of exercise, and geometric error can be fitted with cubic polynomial. The angular displacement error R that will be measured in above-mentioned error detection stepxyi、Rxzi、Ryxi、Ryzi,Rzxi、Rzyi、Rxxi、Ryyi、Rzzi、Rzxj、 Rzyj、Rxxj、Ryyj、RzzjThe cubic polynomial fitting formula of every angular displacement error is obtained by computer fitting, shaped like:
F (A)=a3×A3+a2×A2+a1×A+a0
Wherein: a3,a2,a1,a0It is angular displacement error cubic polynomial fitting coefficient, A is the displacement of movable body；
2) position coordinates by the multi-parameter detector device measured in above-mentioned error detection step under standard component coordinate system (XWIi,YWIi,ZWIi)、(XWIIi,YWIIi,ZWIIi)、(XWIIIi,YWIIIi,ZWIIIi)、(XWIj,YWIj,ZWIj)、(XWIIj,YWIIj, ZWIIj)、(XWIIIj,YWIIIj,ZWIIIj) it is transformed into the reality that multi-parameter detector device is obtained under lathe coordinate system under lathe coordinate system Border position coordinates (X 'Ii,Y′Ii,Z′Ii)、(X′IIi,Y′IIi,Z′IIi)、(X′IIIi,Y′IIIi,Z′IIIi)、(X′Ij,Y′Ij,Z′Ij)、 (X′IIj,Y′IIj,Z′IIj)、(X′IIIj,Y′IIIj,Z′IIIj), this actual position coordinate and the multi-parameter of corresponding position point are detected Machine tool instructions position coordinates (X of the instrument in detection errorIi,YIi,ZIi)、(XIIi,YIIi,ZIIi)、(XIIIi,YIIIi,ZIIIi)、 (XIj,YIj,ZIj)、(XIIj,YIIj,ZIIj)、(XIIIj,YIIIj,ZIIIj) subtract each other, obtain comprehensive three-D displacement error (dxi,dyi, dzi)、(dxj,dyj,dzj)；
3) it brings the machine tool instructions position at each test point into angular displacement error cubic polynomial fitting formula, calculates to each The angle error value of measurement point misses angular displacement error amount, machine tool instructions position and comprehensive three-D displacement error, verticality Difference is brought into lathe geometric error model, is obtained only related with straightness error and position error cubic polynomial fitting coefficient System of linear equations, finally calculate straightness error and position error error fit parameter three times, the specific steps are as follows:
Detecting step 1) in " X " direction of motion identification formula:
It can finally recognize to obtain position error TXXWith straightness error TXZ；
Detecting step 1) in " Z " direction of motion identification formula:
It can finally recognize to obtain straightness error Tzx and position error Tzz；
Detecting step 2) in the direction " Y " identification formula:
It can finally recognize to obtain position error TyyWith straightness error Tyz；
Detecting step 2) in the direction " Z " identification formula:
It can finally recognize to obtain straightness error Tzy；
Detecting step 3) in the direction " X " identification formula:
It can finally recognize to obtain straightness error Txy；
Detecting step 3) in the direction " Y " identification formula:
It can finally recognize to obtain straightness error Tyx.
It is specifically walked using the differential optical gauge head and primary standard of curved surface part calibrating lathe turntable corner position error It is rapid as follows:
1) position coordinates of the optical axis of I 1-1 of optical measuring head in the CCD camera of I 1-1 of optical measuring head are obtained by calibration O'1(x'O1,y'O1), by demarcating position of the optical axis for obtaining II 1-2 of optical measuring head in the CCD camera of II 1-2 of optical measuring head Coordinate O'2(x'O2,y'O2)；
2) adjustment lathe turntable is in starting zero-bit, sets the design zero-bit and lathe turntable of primary standard of curved surface part 2 It originates zero-bit to be overlapped, adjusts the primary standard of curved surface part 2, make the corresponding 1st curved surface group of I 2-1 of curved surface and II 2-2 of curved surface, make the song I 2-1 of face is located in the measurement range of I 1-1 of optical measuring head, and II 2-2 of curved surface is located at the measurement model of II 1-2 of optical measuring head In enclosing, and the center line of I 2-1 of the curved surface is parallel with the optical axis of I 1-1 of optical measuring head, the center line of II 2-2 of curved surface It is parallel with the optical axis of II 1-2 of optical measuring head, first position AI of this position as primary standard of curved surface part 2；
3) corresponding measurement point is A on I 2-1 of curved surface at this time1(x1,y1), corresponding measurement point is A on II 2-2 of curved surface2(x2, y2), the data processing module follows the steps below data processing:
3.1) measurement point A is obtained1(x1,y1) coordinate, specific steps are as follows:
3.1.1 imaging facula center position coordinates A' in the CCD camera of I 1-1 of optical measuring head) is obtained1(x'1,y'1)；
3.1.2) by the spot center position coordinates A' in step 3.1)1(x'1,y'1) spot center is converted to apart from optical axis Distance s1x、s1y；
3.1.3 measurement point A) is calculated1The corresponding angle of slope:
ξx1=arctan (s1x/f)/2(1)
ξy1=arctan (s1y/f)/2(2)
Wherein: ξx1Represent measurement point A1The angle of tangent line and X-direction in XOZ plane；
ξy1Represent measurement point A1The angle of tangent line and Y direction in YOZ plane；
s1xRepresent distance of the center in X-direction system of distance optical axis of the imaging facula of first measurement point；
s1yRepresent distance of the center in Y direction system of distance optical axis of the imaging facula of first measurement point；
F represents the focal length of imaging len 7；
3.1.4 measurement point A) is calculated1(x1,y1) coordinate:
x1=g (ξx1)(3)
y1=g (ξy1)(4)
Wherein: g (x) represents function of a single variable；
3.2) data processing module obtains measurement point A according to the step identical as step 3.1)2(x2,y2) coordinate Are as follows:
x2=g (ξx2) (5)
y2=g (ξy2) (6)
Wherein: ξx2Represent measurement point A2The angle of tangent line and X-direction in XOZ plane；
ξy2Represent measurement point A2The angle of tangent line and Y direction in YOZ plane；
4) data processing module is obtained in the measurement point A surveyed on I 2-1 of curved surface1With the measurement on survey II 2-2 of curved surface Point A2Between line A1A2With the center line O in survey curved surface group1O2Angle, the specific steps are as follows:
4.1) measurement point A is calculated1(x1,y1) and surveying I center 2-1 O of curved surface1The distance between (0,0):
4.2) measurement point A is calculated2(x2,y2) and surveying II center 2-2 O of curved surface2The distance between (0,0):
4.3) it calculates in the measurement point A surveyed on I 2-1 of curved surface1With the measurement point A on survey II 2-2 of curved surface2Between line A1A2With survey curved surface group center line O1O2Angle:
γ=arctan ((d1+d2)/d0)(9)
Wherein: d0Represent the spacing of II 1-2 optical axis of I 1-1 optical axis of optical measuring head and optical measuring head；
5) so that turntable is done step-by-step movement rotation, calculate the deflection angle that primary standard of curved surface part 2 designs zero-bit with respect to it:
αi=γ+i β (10)
Wherein: i represents the stepping number of turntable rotation instruction angle；
β represents every step rotation instruction angle of turntable；
6) the current accumulation of primary standard of curved surface part 2 instruction rotation angle, θ is recordediAnd primary standard of curved surface part 2 designs zero-bit with respect to it Deflection angle αi；
7) step 3)~step 6) is repeated until primary standard of curved surface part 2 rotates a circle；
8) angle error value of turntable is calculated:
Ei=θi-αi(11)
9) discretization error value E obtained to step 8)iFrequency analysis is carried out, each harmonic function is obtained；
10) it is superimposed each harmonic function, obtains the fitting function of turntable angular error, the angular error at rotational angle theta EθAre as follows:
Wherein: a0For 0 subharmonic amplitude；
K is overtone order；
akFor k subharmonic amplitude；
akFor harmonic phase；
N is the number of samples for rotating angle error, the i.e. number of curved surface group；
11) turntable rotation angle error is compensated, specific steps are as follows:
11.1) instruction for obtaining lathe turntable rotates angle, θ；
11.2) the rotation angle error E under the rotation angle is calculatedθ；
11.3) machine tool instructions rotation angle is compensated, obtains compensated instruction rotation angle λ:
λ=θ-Eθ(13)
Wherein: θ is instruction rotation angle；
EθFor the angular error at rotational angle theta；
λ is that compensated instruction rotates angle.
The features of the present invention and beneficial effect are:
Based on optical surface manufacturing technology, using the curved array on optical touchless gauge head measurement combinatorial surface type standard And planar array, one-shot measurement can get 4 parameters, compare laser interferometer, greatly improve detection efficiency, operation letter It is single；Combinatorial surface type standard can be spliced according to actual measurement, have wider detection range；Number proposed by the present invention Control lathe turntable corner position error calibration method, using primary standard of curved surface part cooperation differential optical gauge head to turntable error into Rower is fixed, has quickly, and non-contact, precision is high, at low cost, installs simple operation and other advantages, complies with machine tool error and detect to fast The trend of speedization development.
Detailed description of the invention:
Fig. 1 is the structural schematic diagram that the present invention examines and determine part using translation shaft geometric error；
Fig. 2 is the index path that the present invention examines and determine part using translation shaft geometric error.
In Fig. 1: 1, optical measuring head；1-1, laser；1-2, aperture diaphragm；1-3, reflecting mirror；1-4, Amici prism；1-5, Imaging len；1-6, CCD camera；2, combinatorial surface type standard, 2-1, curved surface, 2-2 plane.
Fig. 3 is the overall structure diagram that the present invention examines and determine part using turntable corner position error；
Fig. 4 is the structural schematic diagram for the differential optical gauge head that turntable corner position error of the present invention calibrating part uses；
Fig. 5 is the structural schematic diagram for the optical measuring head that turntable corner position error of the present invention calibrating part uses；
Fig. 6 is the optical path schematic diagram that the present invention examines and determine part using turntable corner position error；
Fig. 7 is the measuring principle schematic diagram that the present invention examines and determine part using turntable corner position error；
Fig. 8 is the structural schematic diagram for the primary standard of curved surface part that the present invention examines and determine part using turntable corner position error.
In Fig. 3-5: 1, differential optical gauge head；1-1, optical measuring head I；1-2, optical measuring head II；2, primary standard of curved surface part；2-1, Curved surface I；2-2, curved surface II；3, laser；4, aperture diaphragm；5, reflecting mirror；6, Amici prism；7, imaging len；8, CCD phase Machine.
Specific embodiment
The technical scheme adopted by the present invention to solve the technical problems existing in the known art is that a kind of be based on combinatorial surface The calibration method of the gang tool translation shaft multi-parameter calibrating geometric error of type standard, in the movement portion being arranged along machine Z-axis Optical measuring head is installed on part, combinatorial surface type standard is fixed on the platform vertical with Z axis, on the combinatorial surface type standard Equipped with curved array and planar array, moving component is located at the top of the combinatorial surface type standard；The optical measuring head includes Laser, aperture diaphragm, reflecting mirror, Amici prism, imaging len, CCD camera and data processing module, the laser hair Collimated light beam out shortens thin collimated optical beam into through the aperture diaphragm, and thin collimated optical beam is incident on the light splitting rib after the reflecting mirror In mirror, the reflected beams of 1/2 energy project any point on curved array and planar array, and the light beam of the point reflection is through institute After stating Amici prism transmission, it is imaged in the CCD camera by the imaging len；Using the optical measuring head and described group Conjunction face type standard measures displacement of the moving component in X, Y both direction and the corner around X, Y both direction.Lathe shares 3 A movable body X, Y, Z.When the movement of A movable body, 6 errors: T will be generatedAX,TAY,TAZ,RAX,RAY,RAZ.Wherein T indicates linear Error is spent, R indicates angular error；Lower target first letter indicates movable body title, and second letter expression is influenced by error Machine tool guideway title.Practical Y, X guide rail of lathe is not exact vertical, and there are error of perpendicularity SYX；Actual Z guide rail with X, two guide rail of Y also not exact vertical, there are two error of perpendicularity SZX,SZY.Therefore lathe shares 21 geometric errors.Using institute Optical measuring head and the combinatorial surface type standard are stated, can measure obtain two displacement errors and two angular errors every time.Pass through Combinatorial surface type standard is repeatedly put, can direct detection angles error, the error of perpendicularity, comprehensive three-D displacement error.It is based on Theory of multi body system establishes geometric error model to numerically-controlled machine tool translation shaft.By the aforementioned angular error measured, by most Small square law is fitted to obtain angular error cubic polynomial.By angular error cubic polynomial, the error of perpendicularity, comprehensive three-dimensional position Shift error is brought into geometric error model, and resolving obtains position error cubic polynomial, straightness error cubic polynomial.Extremely This, all geometric error fitting of a polynomial forms of lathe geometric error model are it is known that by any one in machine work space Point coordinate value input geometric error model is resolved to obtain corresponding geometric error predicted value, realizes that any point lathe in space is several The prediction of what error.
Specific step is as follows:
Measuring displacement of the moving component on X, Y both direction, specific step is as follows:
1) make the light beam of the optical measuring head and center of surface line and plane normal on the combinatorial surface type standard In parallel；
2) initial time, the optical measuring head are located at position A0Place, the data processing module obtain at this time optical axis in CCD Magazine position coordinates O (x0, y0)；
3) moving component drives optical measuring head to be moved at the first position AI on curved array in left-right direction, bent at this time Corresponding measurement point is A on the array of face1(x1, y1, z1), the data processing module follows the steps below data processing:
3.1) imaging facula center position coordinates A ' in CCD camera is obtained1(x′1, y '1)；
3.2) by the spot center position coordinates A ' in step 3.1)1(x′1, y '1) spot center is converted to apart from optical axis X Direction distance S1x, Y-direction distance S1y；
3.3) calculate the corresponding angle of measurement point A1 slope:
ξx=arctan (s1x/f)/2(1)
ξy=arctan (s1y/f)/2(2)
Wherein: ξxRepresent measurement point A1The angle of tangent line and X-direction in XOZ plane；
ξyRepresent measurement point A1The angle of tangent line and Y direction in YOZ plane；
F represents the focal length of imaging len；
3.4) measurement point A is calculated1(x1, y1, z1) coordinate:
x1=g (ξx)(3)
y1=g (ξy)(4)
Wherein: g (x) represents function of a single variable.
4) moving component drives optical measuring head to move to the second position A on curved array in left-right directionIIPlace, it is bent at this time Corresponding measurement point is A on the array of face2(x2, y2, z2), the same step 3) of data handling procedure, measurement point A2(x2, y2, z2) coordinate Are as follows:
x2=g (φx)(5)
y2=g (φy)(6)
Wherein: ΦxRepresent measurement point A2The angle of tangent line and X-direction in XOZ plane；
ΦyRepresent measurement point A2The angle of tangent line and Y direction in YOZ plane.
5) data processing module calculates displacement of the moving component in X, Y both direction:
M=g (φx)-g(ξx)+P(7)
N=g (φy)-g(ξy)+Q(8)
Wherein: M represents moving component in the displacement of X-direction；
N represents the displacement of moving component in the Y direction；
P represents distance of the center line in X-direction of k-th of curved surface and w-th of curved surface；
Q represents the distance of the center line of k-th of curved surface and w-th of curved surface in the Y direction.
Moving component is measured around X, specific step is as follows for Y both direction corner:
6) moving component drives optical measuring head to move to the third place A in planar array in left-right directionIIIPlace, at this time Corresponding measurement point is A in planar array3(x3, y3, z3), moving component is ε around the corner of X, Y both directionx、εy, the number Data processing is followed the steps below according to processing module:
6.1) imaging facula center position coordinates A ' in CCD camera is obtained3(x′3, y '3)；
6.2) by the spot center position coordinates A ' in step 6.1)3(x′3, y '3) spot center is converted to apart from optical axis light Axis X-direction distance S3x, S3Y；
6.3) moving component is calculated in position AIIITwo corners at place:
εx=arctan (s3x/f)/2(9)
εy=arctan (s3y/f)/2(10)
Wherein: εxMoving component is represented in position AIIICorner of the place around X-axis；
εyMoving component is represented in position AIIICorner of the place around Y-axis；
F represents the focal length of imaging len；
The combinatorial surface type standard shape is designed as " L " type, and standard has two orthogonal sides, each in each edge It is parallel to equidistant 4 groups of measurement characteristic faces (curved surface and plane) on side；Moving component is located at the combinatorial surface type standard Top；Three translation shaft linkages of lathe drive the multi-parameter detector device movement, are repeatedly put by combinatorial surface type standard, It can be detected out the angular error, the error of perpendicularity and comprehensive three-D displacement error of lathe, the specific steps are as follows:
1) the combinatorial surface type standard is made to be parallel to lathe X-axis according to a line, another a line is parallel to machine Z-axis Mode is put, and the detection direction of the multi-parameter detector device is Y-direction, obtains the error of perpendicularity by two included angle of straight line Szx；
1.1) lathe X translation shaft drives the multi-parameter detector device to move along the x-axis, when multi-parameter detector device moves respectively When moving above four paraboloids in face type array described in combinatorial surface type standard, more ginsengs are detected using multi-parameter detector device Position coordinates (X of the number detecting instrument under standard component coordinate systemWIi,YWIi,ZWIi) wherein i=1,2,3,4.When multi-parameter detects When instrument is moved respectively to above four planes in face type array described in combinatorial surface type standard, roll error R is detectedxxi(i =1,2,3,4) and Run-out error Rxzi(i=1,2,3,4) records the machine tool instructions position (X at detection error pointIi,YIi, ZIi) (i=1,2,3,4)；
1.2) lathe Z translation shaft drives the multi-parameter detector device to move along Z axis, when multi-parameter detector device moves respectively When moving above four paraboloids in face type array described in combinatorial surface type standard, more ginsengs are detected using multi-parameter detector device Position coordinates (X of the number detecting instrument under standard component coordinate systemWIj,YWIj,ZWIj) wherein j=5,6,7,8.When multi-parameter detects When instrument is moved respectively to above four planes in face type array described in combinatorial surface type standard, the Run-out error R that bows is detectedzxi (i=1,2,3,4) and roll error Rzzi(i=1,2,3,4) records the machine tool instructions position (X at detection error pointIj, YIj,ZIj) (j=5,6,7,8)；
2) the combinatorial surface type standard is made to be parallel to lathe Y-axis according to a line, another a line is parallel to machine Z-axis Mode is put, and the detection direction of the multi-parameter detector device is X-direction, obtains the error of perpendicularity by two included angle of straight line Syz；
2.1) lathe Y translation shaft drives the multi-parameter detector device to move along Y-axis, when multi-parameter detector device moves respectively When moving above four paraboloids in face type array described in combinatorial surface type standard, more ginsengs are detected using multi-parameter detector device Position coordinates (X of the number detecting instrument under standard component coordinate systemWIIi,YWIIi,ZWIIi) wherein i=1,2,3,4.When multi-parameter is examined When survey instrument is moved respectively to above four planes in face type array described in combinatorial surface type standard, roll error R is detectedyyi (i=1,2,3,4) and Run-out error Ryzi(i=1,2,3,4) records the machine tool instructions position (X at detection error pointIIi, YIIi,ZIIi) (i=1,2,3,4)；
2.2) lathe Z translation shaft drives the multi-parameter detector device to move along Z axis, when multi-parameter detector device moves respectively When moving above four paraboloids in face type array described in combinatorial surface type standard, more ginsengs are detected using multi-parameter detector device Position coordinates (X of the number detecting instrument under standard component coordinate systemWIIj,YWIIj,ZWIIj) wherein j=5,6,7,8.When multi-parameter is examined When survey instrument is moved respectively to above four planes in face type array described in combinatorial surface type standard, roll error R is detectedzzj (j=5,6,7,8) and pitch error Rzyi(i=1,2,3,4) records the machine tool instructions position (X at detection error pointIIj, YIIj,ZIIj) (j=5,6,7,8)；
3) the combinatorial surface type standard is made to be parallel to lathe X-axis according to a line, another a line is parallel to lathe Y-axis Mode is put, and the detection direction of the multi-parameter detector device is Z-direction, obtains the error of perpendicularity by two included angle of straight line Sxy；
3.1) lathe X translation shaft drives the multi-parameter detector device to move along the x-axis, when multi-parameter detector device moves respectively When moving above four paraboloids in face type array described in combinatorial surface type standard, more ginsengs are detected using multi-parameter detector device Position coordinates (X of the number detecting instrument under standard component coordinate systemWIIIi,YWIIIi,ZWIIIi) wherein i=1,2,3,4.Work as multi-parameter When detecting instrument is moved respectively to above four planes in face type array described in combinatorial surface type standard, roll error is detected Rxxj(j=5,6,7,8) and pitch error Rxyi(i=1,2,3,4) records the machine tool instructions position at detection error point (XIIIi,YIIIi,ZIIIi) (i=1,2,3,4)；
3.2) lathe Y translation shaft drives the multi-parameter detector device to move along Y-axis, when multi-parameter detector device moves respectively When moving above four paraboloids in face type array described in combinatorial surface type standard, more ginsengs are detected using multi-parameter detector device Position coordinates (X of the number detecting instrument under standard component coordinate systemWIIIj,YWIIIj,ZWIIIj) wherein j=5,6,7,8.Work as multi-parameter When detecting instrument is moved respectively to above four planes in face type array described in combinatorial surface type standard, roll error is detected Ryyj(j=5,6,7,8) and pitch error Ryxi(i=1,2,3,4) records the machine tool instructions position at detection error point (XIIIj,YIIIj,ZIIIj) (j=5,6,7,8)；
The cutter translation shaft kinematic chain of gang tool and the topological structure of workpiece motion s chain are analyzed, theory of multi body system is based on Numerically-controlled machine tool translation shaft geometric error model is established for the structure feature of numerically-controlled machine tool:
Coordinate (X ', Y ', Z ') is measuring system actual position coordinate in lathe coordinate system.Therefore three-dimensional position error
Wherein:It is machine tool instructions displacement.ThereforeIt can ask.
Since in actual error modeling process, Geometric Error for Computerized Numerical Control Milling Machine very little is usually ignored all secondary in modeling With take leave error term product,
Only consider the influence of a section error term.By the above-mentioned matrix of calculating, it is as follows mathematical model can must to be recognized:
Dx=Txx+Tyx+Tzx-y·(Sxy+Rxz)+z·(Szx+Ryy+Rxy)
Dy=Txy+Tyy+Tzy-z·(Szy+Ryx+Rxx)
Dz=Txz+Tyz+Tzz+y·Rxx
Lathe shares 3 movable bodies X, Y, Z.When the movement of A movable body, 6 errors: T will be generatedAX,TAY,TAZ,RAX, RAY,RAZ.Wherein T indicates linearity error, and R indicates angular error；Lower target first letter expression movable body title, second A letter indicates the title of the machine tool guideway influenced by error.Practical Y, X guide rail of lathe is not exact vertical, and there are verticalities Error SYX；Actual Z guide rail and two guide rail of X, Y also not exact vertical, there are two error of perpendicularity SZX,SZY, in machine tool motion It is constant in the process.DX, dY, dZ indicate that machine tool motion position moves the synthesis three-D displacement error generated, i.e. measuring system is practical The difference of position and the location of instruction；
It is specific as follows to resolve lathe geometric error fitting of a polynomial form step:
1) because geometric error is the function of movable body amount of exercise, and geometric error can be fitted with cubic polynomial. The angular displacement error R that will be measured in above-mentioned error detection stepxyi、Rxzi、Ryxi、Ryzi(i=1,2,3,4), Rzxi、Rzyi、Rxxi、 Ryyi、Rzzi(i=1,2,3,4), Rzxj、Rzyj、Rxxj、Ryyj、Rzzj(j=5,6,7,8) obtains every angle position by computer fitting The cubic polynomial fitting formula of shift error, shaped like:
F (A)=a3×A3+a2×A2+a1×A+a0
Wherein: a3,a2,a1,a0It is angular displacement error cubic polynomial fitting coefficient, A is the displacement of movable body；
2) position coordinates by the multi-parameter detector device measured in above-mentioned error detection step under standard component coordinate system (XWIi,YWIi,ZWIi)、(XWIIi,YWIIi,ZWIIi)、(XWIIIi,YWIIIi,ZWIIIi) (i=1,2,3,4), (XWIj,YWIj,ZWIj)、 (XWIIj,YWIIj,ZWIIj)、(XWIIIj,YWIIIj,ZWIIIj) (j=5,6,7,8) be transformed under lathe coordinate system obtain multi-parameter detection Actual position coordinate (X ' of the instrument under lathe coordinate systemIi,Y′Ii,Z′Ii)、(X′IIi,Y′IIi,Z′IIi)、(X′IIIi,Y′IIIi, Z′IIIi) (i=1,2,3,4), (X 'Ij,Y′Ij,Z′Ij)、(X′IIj,Y′IIj,Z′IIj)、(X′IIIj,Y′IIIj,Z′IIIj) (j=5,6, 7,8), the machine tool instructions position by the multi-parameter detector device of this actual position coordinate and corresponding position point in detection error is sat Mark (XIi,YIi,ZIi)、(XIIi,YIIi,ZIIi)、(XIIIi,YIIIi,ZIIIi) (i=1,2,3,4), (XIj,YIj,ZIj)、(XIIj,YIIj, ZIIj)、(XIIIj,YIIIj,ZIIIj) (j=5,6,7,8) subtract each other, obtain comprehensive three-D displacement error (dxi,dyi,dzi)、(dxj,dyj, dzj)；
3) it brings the machine tool instructions position at each test point into angular displacement error cubic polynomial fitting formula, calculates to each The angle error value of measurement point misses angular displacement error amount, machine tool instructions position and comprehensive three-D displacement error, verticality Difference is brought into lathe geometric error model, is obtained only related with straightness error and position error cubic polynomial fitting coefficient System of linear equations, finally calculate straightness error and position error error fit parameter three times, the specific steps are as follows:
Detecting step 1) in " X " direction of motion identification formula:
It can finally recognize to obtain position error TXXWith straightness error TXZ；
Detecting step 1) in " Z " direction of motion identification formula:
It can finally recognize to obtain straightness error TzxWith position error Tzz；
Detecting step 2) in the direction " Y " identification formula:
It can finally recognize to obtain position error TyyWith straightness error Tyz；
Detecting step 2) in the direction " Z " identification formula:
It can finally recognize to obtain straightness error Tzy；
Detecting step 3) in the direction " X " identification formula:
It can finally recognize to obtain straightness error Txy；
Detecting step 3) in the direction " Y " identification formula:
It can finally recognize to obtain straightness error Tyx.
In order to further understand the content, features and effects of the present invention, the following examples are hereby given, and cooperate attached drawing Detailed description are as follows:
Please refer to Fig. 1 and Fig. 2, a kind of moving component multi-parameter detecting method based on combinatorial surface type standard, along Z axis Optical measuring head 1 is installed on the moving component of setting, combinatorial surface type standard 2 is fixed on the platform vertical with Z axis, at described group Conjunction face type standard 2 is equipped with curved surface 2-1 array and plane 2-2 array, and moving component is located at the combinatorial surface type standard 2 Top.
The optical measuring head 1 includes laser 1-1, aperture diaphragm 1-2, reflecting mirror 1-3, Amici prism 1-4, imaging len 1-5, CCD camera 1-6 and data processing module, the collimated light beam that the laser 1-1 is issued contract through the aperture diaphragm 1-2 At thin collimated optical beam, thin collimated optical beam is incident in the Amici prism 1-4 after the reflecting mirror 1-3, the reflected beams of 1/2 energy Any point on curved array and planar array is projected, the light beam of the point reflection leads to after Amici prism 1-4 transmission The imaging len 1-5 is crossed to be imaged on the CCD camera 1-6.
Using the position of the optical measuring head 1 and the combinatorial surface type standard 2 measurement moving component in X, Y both direction Move and around X, Y both direction corner, the specific steps are as follows:
1) make the light beam of the optical measuring head 1 and curved surface 2-1 center line and plane on the combinatorial surface type standard 2 2-2 normal parallel；
2) initial time, the optical measuring head 1 are located at position A0Place, the data processing module obtain optical axis at this time and exist Position coordinates O (x in CCD camera 1-60, y0)；
3) moving component drives optical measuring head 1 to move to the first position A on curved surface 2-1 array in left-right directionIPlace, this When curved surface 2-1 array on corresponding measurement point be A1(x1, y1, z1), the data processing module follows the steps below data Processing:
3.1) imaging facula center position coordinates A ' in CCD camera is obtained1(x′1, y '1)；
3.2) by the spot center position coordinates A ' in step 3.1)1(x′1, y '1) spot center is converted to apart from optical axis Distance S1x、S1y；
3.3) measurement point A is calculated1The corresponding angle of slope:
ξx=arctan (s1x/f)/2(1)
ξy=arctan (s1y/f)/2(2)
Wherein: ξxRepresent measurement point A1The angle of tangent line and X-direction in XOZ plane；
ξyRepresent measurement point A1The angle of tangent line and Y direction in YOZ plane；
F represents the focal length of imaging len；
3.4) measurement point A is calculated1(x1, y1, z1) coordinate:
x1=g (ξx)(3)
y1=g (ξy)(4)
Wherein: g (x) represents function of a single variable.
4) moving component drives optical measuring head to move to the second position A on curved surface 2-1 array in left-right directionIIPlace, this When curved surface 2-1 array on corresponding measurement point be A2(x2, y2, z2), the same step 3) of data handling procedure, measurement point A2(x2, y2, z2) coordinate are as follows:
x2=g (φx)(5)
y2=g (φy)(6)
Wherein: ΦxRepresent measurement point A2The angle of tangent line and X-direction in XOZ plane；
ΦyRepresent measurement point A2The angle of tangent line and Y direction in YOZ plane.
5) data processing module calculates displacement of the moving component in X, Y both direction:
M=g (φx)-g(ξx)+P(7)
N=g (φy)-g(ξy)+Q(8)
Wherein: M represents moving component in the displacement of X-direction；
N represents the displacement of moving component in the Y direction；
P represents distance of the center line in X-direction of k-th of curved surface and w-th of curved surface；
Q represents the distance of the center line of k-th of curved surface and w-th of curved surface in the Y direction.
6) moving component drives optical measuring head to move to the third place A in planar array in left-right directionIIIPlace, at this time Corresponding measurement point is A on plane 2-2 array3(x3, y3, z3), moving component is ε around the corner of X, Y both directionx、εy, described Data processing module follows the steps below data processing:
6.1) imaging facula center position coordinates A ' in CCD camera 1-6 is obtained3(x′3, y '3)；
6.2) by the spot center position coordinates A ' in step 6.1)3(x′3, y '3) spot center is converted to apart from optical axis Distance S3x、S3y；
6.3) moving component is calculated in position AIIITwo corners at place:
εx=arctan (s3x/f)/2(1)
εy=arctan (s3y/f)/2(2)
Wherein: εxMoving component is represented in position AIIICorner of the place around X-axis；
εyMoving component is represented in position AIIICorner of the place around Y-axis；
F represents the focal length of imaging len；
Fig. 3 to Fig. 8 is please referred to, a kind of calibration method of multi-axis NC Machine Tools turntable angular errors, it is poor to install on Z axis Spectroscopy gauge head 1 fixes primary standard of curved surface part 2 on the turntable parallel or coaxial with Z axis, sets on the primary standard of curved surface part 2 There is multiple groups curved surface group arranged in pairs, every group of curved surface is equipped with II 2-2 of I 2-1 of curved surface and curved surface, the curved surface in each curved surface group Diametrically the centerlines of two neighboring curved surface group are β same for I 2-1 and II 2-2 of curved surface setting, and the differential optical is surveyed First 1 is equipped with a data processing module and the identical optical measuring head of two structures, and two optical measuring heads are that optics is surveyed respectively II 1-2 of first I 1-1 and optical measuring head, the optical axis of the optical measuring head is parallel with Z axis, and the differential optical gauge head 1 is located at the song The top of face standard 2, distance between two optical measuring head optical axises between II center 2-2 I 2-1 of curved surface and curved surface at a distance from It is equal.
The optical measuring head includes laser 3, aperture diaphragm 4, reflecting mirror 5, Amici prism 6, imaging len 7 and CCD phase Machine 8, the collimated light beam that the laser 3 issues shorten thin collimated optical beam into through the aperture diaphragm 4, and thin collimated optical beam is through the reflecting mirror It is incident on after 5 in the Amici prism 6, the reflected beams of 1/2 energy project any point in curved surface, the light of the point reflection After the transmission of Amici prism 6 described in Shu Jing, it is imaged in the CCD camera 8 by the imaging len 7.
Using the rotation angle of the differential optical gauge head 1 and the primary standard of curved surface part 2 calibration turntable, specific steps are such as Under:
1) position coordinates of the optical axis of I 1-1 of optical measuring head in the CCD camera of I 1-1 of optical measuring head are obtained by calibration O'1(x'O1,y'O1), by demarcating position of the optical axis for obtaining II 1-2 of optical measuring head in the CCD camera of II 1-2 of optical measuring head Coordinate O'2(x'O2,y'O2)；
2) adjustment lathe turntable is in starting zero-bit, sets the design zero-bit and lathe turntable of primary standard of curved surface part 2 It originates zero-bit to be overlapped, adjusts the primary standard of curved surface part 2, make the corresponding 1st curved surface group of I 2-1 of curved surface and II 2-2 of curved surface, make the song I 2-1 of face is located in the measurement range of I 1-1 of optical measuring head, and II 2-2 of curved surface is located at the measurement model of II 1-2 of optical measuring head In enclosing, and the center line of I 2-1 of the curved surface is parallel with the optical axis of I 1-1 of optical measuring head, the center line of II 2-2 of curved surface It is parallel with the optical axis of II 1-2 of optical measuring head, first position AI of this position as primary standard of curved surface part 2；
3) corresponding measurement point is A on I 2-1 of curved surface at this time1(x1,y1), corresponding measurement point is A on II 2-2 of curved surface2(x2, y2), the data processing module follows the steps below data processing:
3.1) measurement point A is obtained1(x1,y1) coordinate, specific steps are as follows:
3.1.1 imaging facula center position coordinates A' in the CCD camera of I 1-1 of optical measuring head) is obtained1(x'1,y'1)；
3.1.2) by the spot center position coordinates A' in step 3.1)1(x'1,y'1) spot center is converted to apart from optical axis Distance s1x、s1y；
3.1.3 measurement point A) is calculated1The corresponding angle of slope:
ξx1=arctan (s1x/f)/2 (1)
ξy1=arctan (s1y/f)/2 (2)
Wherein: ξx1Represent measurement point A1The angle of tangent line and X-direction in XOZ plane；
ξy1Represent measurement point A1The angle of tangent line and Y direction in YOZ plane；
s1xRepresent distance of the center in X-direction system of distance optical axis of the imaging facula of first measurement point；
s1yRepresent distance of the center in Y direction system of distance optical axis of the imaging facula of first measurement point；
s1yRepresent the focal length of imaging len 7；
3.1.4 measurement point A) is calculated1(x1,y1) coordinate:
x1=g (ξx1) (3)
y1=g (ξy1) (4)
Wherein: g (x) represents function of a single variable；
3.2) data processing module obtains measurement point A according to the step identical as step 3.1)2(x2,y2) coordinate Are as follows:
x2=g (ξx2) (5)
y2=g (ξy2) (6)
Wherein: ξx2Represent measurement point A2The angle of tangent line and X-direction in XOZ plane；
ξy2Represent measurement point A2The angle of tangent line and Y direction in YOZ plane；
4) data processing module is obtained in the measurement point A surveyed on I 2-1 of curved surface1With the measurement on survey II 2-2 of curved surface Point A2Between line A1A2With the center line O in survey curved surface group1O2Angle, the specific steps are as follows:
4.1) measurement point A is calculated1(x1,y1) and surveying I center 2-1 O of curved surface1The distance between (0,0):
4.2) measurement point A is calculated2(x2,y2) and surveying II center 2-2 O of curved surface2The distance between (0,0):
4.3) it calculates in the measurement point A surveyed on I 2-1 of curved surface1With the measurement point A on survey II 2-2 of curved surface2Between line A1A2With survey curved surface group center line O1O2Angle:
γ=arctan ((d1+d2)/d0) (9)
Wherein: d0Represent the spacing of II 1-2 optical axis of I 1-1 optical axis of optical measuring head and optical measuring head；
5) so that turntable is done step-by-step movement rotation, calculate the deflection angle that primary standard of curved surface part 2 designs zero-bit with respect to it:
αi=γ+i β (10)
Wherein: i represents the stepping number of turntable rotation instruction angle；
β represents every step rotation instruction angle of turntable；
6) the current accumulation of primary standard of curved surface part 2 instruction rotation angle, θ is recordediAnd primary standard of curved surface part 2 designs zero-bit with respect to it Deflection angle αi；
7) step 3)~step 6) is repeated until primary standard of curved surface part 2 rotates a circle；
8) angle error value of turntable is calculated:
Ei=θi-αi (11)
9) discretization error value E obtained to step 8)iFrequency analysis is carried out, each harmonic function is obtained；
10) it is superimposed each harmonic function, obtains the fitting function of turntable angular error, the angular error at rotational angle theta EθAre as follows:
Wherein: a0For 0 subharmonic amplitude；
K is overtone order；
akFor k subharmonic amplitude；
akFor harmonic phase；
N is the number of samples for rotating angle error, the i.e. number of curved surface group；
11) turntable rotation angle error is compensated, specific steps are as follows:
11.1) instruction for obtaining lathe turntable rotates angle, θ；
11.2) the rotation angle error E under the rotation angle is calculatedθ；
11.3) machine tool instructions rotation angle is compensated, obtains compensated instruction rotation angle λ:
λ=θ-Eθ (13)
Wherein: θ is instruction rotation angle；
EθFor the angular error at rotational angle theta；
λ is that compensated instruction rotates angle.
The working principle of the invention is summarized are as follows:
The calibrating of numerically-controlled machine tool translation shaft geometric error: it such as Fig. 2, is projected with the light beam of paraboloid of revolution centerline axis parallel On curved surface when any point, the tangent line of each point at vertex position is removed on curved surface with XOY plane there are angle, and different location The angle value at place is different, therefore position of the different measurement points in CCD camera is different, i.e., in the coordinate points and CCD camera on curved surface There is one-to-one relationship in the position of hot spot, therefore can find out the coordinate put on the paraboloid of revolution according to the position of hot spot, into And find out displacement of the moving component for carrying optical measuring head in X, Y both direction.Similarly, for plane, according to the reflection of light Law is it is found that when incidence angle changes, and reflection light can change relative to the angle of combinatorial surface type standard, therefore CCD The position of imaging facula can change in camera, according to the facula position changes in coordinates in CCD camera can seek moving component around X, the corner of Y both direction.
The calibrating of numerically-controlled machine tool turntable corner position error: circular manner is equidistantly spaced from multiple groups song on primary standard of curved surface part Face group, primary standard of curved surface part is with turntable rotary motion to be calibrated, and differential optical gauge head is under different curve group to the rotation of turntable Angle carries out error sampling, obtains each harmonic function using the method for frequency analysis to obtained discretization error sampled value, finally Error fit function is obtained, the error amount at any rotation angle can be obtained according to obtained fitting function.
Although the preferred embodiment of the present invention is described above in conjunction with attached drawing, the invention is not limited to upper The specific embodiment stated, the above mentioned embodiment is only schematical, be not it is restrictive, this field it is common Technical staff under the inspiration of the present invention, in the case where not departing from present inventive concept and scope of the claimed protection, goes back Many forms can be made, within these are all belonged to the scope of protection of the present invention.

Claims (5)

1. a kind of Geometric Error for Computerized Numerical Control Milling Machine and turntable corner position error calibrating installation, characterized in that moved in machine Z-axis Optical measuring head is installed on component, combinatorial surface type standard is fixed on the platform vertical with machine Z-axis, in the combinatorial surface type Standard is equipped with curved array and planar array, positioned at the top of the combinatorial surface type standard；The optical measuring head includes Laser, aperture diaphragm, reflecting mirror, Amici prism, imaging len, CCD camera and data processing module, the laser hair Collimated light beam out shortens thin collimated optical beam into through the aperture diaphragm, and thin collimated optical beam is incident on the light splitting rib after the reflecting mirror In mirror, the energy for projecting the light at any point in curved surface and planar array accounts for the 1/2 of gross energy, and the light beam of the point reflection is through institute After stating Amici prism transmission, it is imaged in the CCD camera by the imaging len；Using the optical measuring head and described group Displacement of the moving component in X, Y both direction and the corner around X, Y both direction that conjunction face type standard measures lathe；It is described Optical measuring head and combinatorial surface type standard collectively form multi-parameter detector device；On Z axis install differential optical gauge head, with Z Primary standard of curved surface part is fixed on the parallel or coaxial turntable of axis, and multiple groups curved surface arranged in pairs is equipped on the primary standard of curved surface part Group, every group of curved surface are equipped with a curved surface I and curved surface II, the curved surface I and the setting of curved surface II in each curved surface group it is same diametrically, The centerlines of two neighboring curved surface group are β, and the differential optical gauge head is equipped with a data processing module and two structures Identical optical measuring head, two optical measuring heads are optical measuring head I and optical measuring head II, the optical axis of the optical measuring head respectively Parallel with Z axis, the differential optical gauge head is located at the top of the primary standard of curved surface part, between two optical measuring head optical axises away from From being equidistant between II center of curved surface I and curved surface；The optical measuring head includes laser, aperture diaphragm, reflecting mirror, light splitting Prism, imaging len and CCD camera, the collimated light beam that the laser issues shorten thin collimated optical beam into through the aperture diaphragm, carefully Collimated optical beam is incident in the Amici prism after the reflecting mirror, and the reflected beams of 1/2 energy project any in curved surface A bit, the light beam of the point reflection is imaged in the CCD camera after Amici prism transmission by the imaging len； Lathe turntable corner position error is examined and determine using the differential optical gauge head and the primary standard of curved surface part.
2. a kind of Geometric Error for Computerized Numerical Control Milling Machine and turntable corner position error calibration method, characterized in that set along machine Z-axis Optical measuring head is installed on the moving component set, combinatorial surface type standard is fixed on the platform vertical with Z axis, in the combinatorial surface Type standard is equipped with curved array and planar array, and moving component is located at the top of the combinatorial surface type standard；The light Learning gauge head includes laser, aperture diaphragm, reflecting mirror, Amici prism, imaging len, CCD camera and data processing module, institute The collimated light beam for stating laser sending shortens thin collimated optical beam into through the aperture diaphragm, and thin collimated optical beam is incident on after the reflecting mirror In the Amici prism, the reflected beams of 1/2 energy project any point on curved array and planar array, the point reflection Light beam through the Amici prism transmission after, be imaged in the CCD camera by the imaging len；It is surveyed using the optics Head and combinatorial surface type standard measurement displacement of the moving component in X, Y both direction and the corner around X, Y both direction, X, Z and Y, Z-direction displacement and outer corner measurement and so on；Lathe shares 3 movable bodies X, Y, Z, will when the movement of A movable body Generate 6 errors: TAX,TAY,TAZ,RAX,RAY,RAZ, wherein T indicates linearity error, and R indicates angular error；Lower target first A letter indicates movable body title, and second letter indicates the title of the machine tool guideway influenced by error, and practical Y, X of lathe are led Rail is not exact vertical, and there are error of perpendicularity SYX；Actual Z guide rail and two guide rail of X, Y also not exact vertical, there are two to hang down Straight degree error SZX,SZY, therefore lathe shares 21 geometric errors, using the optical measuring head and the combinatorial surface type standard, often Secondary measurement obtains two displacement errors and two angular errors, is repeatedly put by combinatorial surface type standard, direct detection angles Error, the error of perpendicularity, comprehensive three-D displacement error；Geometric error model is established to numerically-controlled machine tool translation shaft, by it is aforementioned The angular error measured is fitted to obtain angular error cubic polynomial by least square method, by angular error cubic polynomial, The error of perpendicularity, comprehensive three-D displacement error are brought into geometric error model, and resolving obtains position error cubic polynomial, straight line Error cubic polynomial is spent, so far, all geometric error fitting of a polynomial forms of lathe geometric error model are it is known that by machine Any point coordinate value input geometric error model is resolved to obtain corresponding geometric error predicted value in bed working space, real The prediction of existing space any point lathe geometric error；Differential optical gauge head is installed on Z axis, in the rotation parallel or coaxial with Z axis Primary standard of curved surface part is fixed on turntable, multiple groups curved surface group arranged in pairs is equipped on the primary standard of curved surface part, and every group of curved surface is equipped with One curved surface I and curved surface II, curved surface I and the setting of curved surface II in each curved surface group it is same diametrically, two neighboring curved surface group Centerlines be β, the differential optical gauge head be equipped with a data processing module and the identical optical measuring head of two structures, Two optical measuring heads are optical measuring head I and optical measuring head II respectively, and the optical axis of the optical measuring head is parallel with Z axis, described Differential optical gauge head is located at the top of the primary standard of curved surface part, the distance between two optical measuring head optical axises and curved surface I and song Being equidistant between II center of face；The optical measuring head includes laser, aperture diaphragm, reflecting mirror, Amici prism, imaging len And CCD camera, the collimated light beam that the laser issues shorten thin collimated optical beam into through the aperture diaphragm, thin collimated optical beam is through described anti- It is incident in the Amici prism after penetrating mirror, the reflected beams of 1/2 energy project any point in curved surface, the point reflection Light beam is imaged in the CCD camera after Amici prism transmission by the imaging len；Using the differential optical Gauge head and the primary standard of curved surface part examine and determine lathe turntable corner position error.
3. Geometric Error for Computerized Numerical Control Milling Machine as claimed in claim 2 and turntable corner position error calibration method, characterized in that Specific step is as follows for the prediction of realization space any point lathe geometric error:
Measuring displacement of the moving component on X, Y both direction, specific step is as follows:
1) make the light beam of the optical measuring head on the combinatorial surface type standard center of surface line and plane normal it is parallel；
2) initial time, the optical measuring head are located at position A0Place, the data processing module obtain at this time optical axis in CCD camera In position coordinates O (x0, y0)；
3) moving component drives optical measuring head to be moved at the first position AI on curved array in left-right direction, at this time curved surface battle array Corresponding measurement point is A on column1(x1, y1, z1), the data processing module follows the steps below data processing:
3.1) imaging facula center position coordinates A in CCD camera is obtained1′(x1', y1′)；
3.2) by the spot center position coordinates A in step 3.1)1′(x1', y1') spot center is converted to apart from optical axis X-direction Distance S1x, Y-direction distance S1y；
3.3) the corresponding angle of measurement point A1 slope is calculated:
ξx=arctan (s1x/f)/2 (1)
ξy=arctan (s1y/f)/2 (2)
Wherein: ξxRepresent measurement point A1The angle of tangent line and X-direction in XOZ plane；
ξyRepresent measurement point A1The angle of tangent line and Y direction in YOZ plane；
F represents the focal length of imaging len；
3.4) measurement point A is calculated1(x1, y1, z1) coordinate:
x1=g (ξx) (3)
y1=g (ξy) (4)
Wherein: g (x) represents function of a single variable.
4) moving component drives optical measuring head to move to the second position A on curved array in left-right directionIILocate, at this time curved surface battle array Corresponding measurement point is A on column2(x2, y2, z2), the same step 3) of data handling procedure, measurement point A2(x2, y2, z2) coordinate are as follows:
x2=g (φx) (5)
y2=g (φy) (6)
Wherein: ΦxRepresent measurement point A2The angle of tangent line and X-direction in XOZ plane；
ΦyRepresent measurement point A2The angle of tangent line and Y direction in YOZ plane.
5) data processing module calculates displacement of the moving component in X, Y both direction:
M=g (φx)-g(ξx)+P (7)
N=g (φy)-g(ξy)+Q (8)
Wherein: M represents moving component in the displacement of X-direction；
N represents the displacement of moving component in the Y direction；
P represents distance of the center line in X-direction of k-th of curved surface and w-th of curved surface；
Q represents the distance of the center line of k-th of curved surface and w-th of curved surface in the Y direction.
Moving component is measured around X, specific step is as follows for Y both direction corner:
6) moving component drives optical measuring head to move to the third place A in planar array in left-right directionIIILocate, at this time plane Corresponding measurement point is A on array3(x3, y3, z3), moving component is ε around the corner of X, Y both directionx、εy, at the data Reason module follows the steps below data processing:
6.1) imaging facula center position coordinates A in CCD camera is obtained3′(x3', y3′)；
6.2) by the spot center position coordinates A in step 6.1)3′(x3', y3') spot center is converted to apart from optical axis optical axis X Direction distance S3x, S3Y；
6.3) moving component is calculated in position AIIITwo corners at place:
εx=arctan (s3x/f)/2 (9)
εy=arctan (s3y/f)/2 (10)
Wherein: εxMoving component is represented in position AIIICorner of the place around X-axis；
εyMoving component is represented in position AIIICorner of the place around Y-axis；
F represents the focal length of imaging len；
The combinatorial surface type standard shape is designed as " L " type, and standard has two orthogonal sides, respectively has in each edge flat Row is in equidistant 4 groups of measurement characteristic faces on side；Moving component is located at the top of the combinatorial surface type standard；Three, lathe translations Axis linkage drives the multi-parameter detector device movement, is repeatedly put by combinatorial surface type standard, detects the angle of lathe Error, the error of perpendicularity and comprehensive three-D displacement error, the specific steps are as follows:
1) the combinatorial surface type standard is made to be parallel to lathe X-axis according to a line, another a line is parallel to the mode of machine Z-axis It puts, the detection direction of the multi-parameter detector device is Y-direction, obtains error of perpendicularity S by two included angle of straight linezx；
1.1) lathe X translation shaft drives the multi-parameter detector device to move along the x-axis, when multi-parameter detector device is moved respectively to When above four paraboloids in face type array described in combinatorial surface type standard, examined using multi-parameter detector device detection multi-parameter Survey position coordinates (X of the instrument under standard component coordinate systemWIi,YWIi,ZWIi) wherein i=1,2,3,4, when multi-parameter detector device When being moved respectively to above four planes in face type array described in combinatorial surface type standard, roll error R is detectedxxiAnd beat Error Rxzi, record the machine tool instructions position (X at detection error pointIi,YIi,ZIi)；
1.2) lathe Z translation shaft drives the multi-parameter detector device to move along Z axis, when multi-parameter detector device is moved respectively to When above four paraboloids in face type array described in combinatorial surface type standard, examined using multi-parameter detector device detection multi-parameter Survey position coordinates (X of the instrument under standard component coordinate systemWIj,YWIj,ZWIj) wherein j=5,6,7,8, when multi-parameter detector device When being moved respectively to above four planes in face type array described in combinatorial surface type standard, the Run-out error R that bows is detectedzxiAnd rolling Turn error Rzzi, record the machine tool instructions position (X at detection error pointIj,YIj,ZIj)；
2) the combinatorial surface type standard is made to be parallel to lathe Y-axis according to a line, another a line is parallel to the mode of machine Z-axis It puts, the detection direction of the multi-parameter detector device is X-direction, obtains error of perpendicularity S by two included angle of straight lineyz；
2.1) lathe Y translation shaft drives the multi-parameter detector device to move along Y-axis, when multi-parameter detector device is moved respectively to When above four paraboloids in face type array described in combinatorial surface type standard, examined using multi-parameter detector device detection multi-parameter Survey position coordinates (X of the instrument under standard component coordinate systemWIIi,YWIIi,ZWIIi), when multi-parameter detector device is moved respectively to group When above four planes in face type array described in the type standard of conjunction face, roll error R is detectedyyiWith Run-out error Ryzi, record Machine tool instructions position (X at lower detection error pointIIi,YIIi,ZIIi)；
2.2) lathe Z translation shaft drives the multi-parameter detector device to move along Z axis, when multi-parameter detector device is moved respectively to When above four paraboloids in face type array described in combinatorial surface type standard, examined using multi-parameter detector device detection multi-parameter Survey position coordinates (X of the instrument under standard component coordinate systemWIIj,YWIIj,ZWIIj), when multi-parameter detector device is moved respectively to group When above four planes in face type array described in the type standard of conjunction face, roll error R is detectedzzjWith pitch error Rzyi, record Machine tool instructions position (X at lower detection error pointIIj,YIIj,ZIIj)；
3) the combinatorial surface type standard is made to be parallel to lathe X-axis according to a line, another a line is parallel to the mode of lathe Y-axis It puts, the detection direction of the multi-parameter detector device is Z-direction, obtains error of perpendicularity S by two included angle of straight linexy；
3.1) lathe X translation shaft drives the multi-parameter detector device to move along the x-axis, when multi-parameter detector device is moved respectively to When above four paraboloids in face type array described in combinatorial surface type standard, examined using multi-parameter detector device detection multi-parameter Survey position coordinates (X of the instrument under standard component coordinate systemWIIIi,YWIIIi,ZWIIIi), when multi-parameter detector device is moved respectively to When above four planes in face type array described in combinatorial surface type standard, roll error R is detectedxxjWith pitch error Rxyi, note Record the machine tool instructions position (X at lower detection error pointIIIi,YIIIi,ZIIIi)；
3.2) lathe Y translation shaft drives the multi-parameter detector device to move along Y-axis, when multi-parameter detector device is moved respectively to When above four paraboloids in face type array described in combinatorial surface type standard, examined using multi-parameter detector device detection multi-parameter Survey position coordinates (X of the instrument under standard component coordinate systemWIIIj,YWIIIj,ZWIIIj), when multi-parameter detector device is moved respectively to When above four planes in face type array described in combinatorial surface type standard, roll error R is detectedyyjWith pitch error Ryxi, note Record the machine tool instructions position (X at lower detection error pointIIIj,YIIIj,ZIIIj)；
The cutter translation shaft kinematic chain of gang tool and the topological structure of workpiece motion s chain are analyzed, is directed to based on theory of multi body system The structure feature of numerically-controlled machine tool establishes numerically-controlled machine tool translation shaft geometric error model:
Coordinate (X ', Y ', Z ') is measuring system actual position coordinate in lathe coordinate system, therefore three-dimensional position error
Wherein:It is machine tool instructions displacement；
Since in actual error modeling process, Geometric Error for Computerized Numerical Control Milling Machine very little is usually ignored all secondary and is accused in modeling Error term product is taken leave, only considers the influence of a section error term, by the above-mentioned matrix of calculating, it is as follows to obtain identification mathematical model:
Dx=Txx+Tyx+Tzx-y·(Sxy+Rxz)+z·(Szx+Ryy+Rxy)
Dy=Txy+Tyy+Tzy-z·(Szy+Ryx+Rxx)
Dz=Txz+Tyz+Tzz+y·Rxx。
4. Geometric Error for Computerized Numerical Control Milling Machine as claimed in claim 2 and turntable corner position error calibration method, characterized in that It is specific as follows to resolve lathe geometric error fitting of a polynomial form step:
1) because geometric error is the function of movable body amount of exercise, and geometric error can be fitted with cubic polynomial.It will be upper State the angular displacement error R measured in error detection stepxyi、Rxzi、Ryxi、Ryzi,Rzxi、Rzyi、Rxxi、Ryyi、Rzzi、Rzxj、Rzyj、 Rxxj、Ryyj、RzzjThe cubic polynomial fitting formula of every angular displacement error is obtained by computer fitting, shaped like:
F (A)=a3×A3+a2×A2+a1×A+a0
Wherein: a3,a2,a1,a0It is angular displacement error cubic polynomial fitting coefficient, A is the displacement of movable body；
2) position coordinates (X by the multi-parameter detector device measured in above-mentioned error detection step under standard component coordinate systemWIi, YWIi,ZWIi)、(XWIIi,YWIIi,ZWIIi)、(XWIIIi,YWIIIi,ZWIIIi)、(XWIj,YWIj,ZWIj)、(XWIIj,YWIIj,ZWIIj)、 (XWIIIj,YWIIIj,ZWIIIj) it is transformed into the physical location that multi-parameter detector device is obtained under lathe coordinate system under lathe coordinate system Coordinate (X 'Ii,Y′Ii,Z′Ii)、(X′IIi,Y′IIi,Z′IIi)、(X′IIIi,Y′IIIi,Z′IIIi)、(X′Ij,Y′Ij,Z′Ij)、(X′IIj, Y′IIj,Z′IIj)、(X′IIIj,Y′IIIj,Z′IIIj), the multi-parameter detector device of this actual position coordinate and corresponding position point is existed Machine tool instructions position coordinates (X when detection errorIi,YIi,ZIi)、(XIIi,YIIi,ZIIi)、(XIIIi,YIIIi,ZIIIi)、(XIj, YIj,ZIj)、(XIIj,YIIj,ZIIj)、(XIIIj,YIIIj,ZIIIj) subtract each other, obtain comprehensive three-D displacement error (dxi, dyi, dzi), (dxj,dyj,dzj)；
3) it brings the machine tool instructions position at each test point into angular displacement error cubic polynomial fitting formula, calculates to each measurement Angle error value at point, by angular displacement error amount, machine tool instructions position and comprehensive three-D displacement error, the error of perpendicularity, band Enter in lathe geometric error model, obtains only related with straightness error and position error cubic polynomial fitting coefficient linear Equation group finally calculates straightness error and position error error fit parameter three times, the specific steps are as follows:
Detecting step 1) in " X " direction of motion identification formula:
It can finally recognize to obtain position error TXXWith straightness error TXZ；
Detecting step 1) in " Z " direction of motion identification formula:
dzj-dz0=(Zj 3-Z0 3)·TZZ3+(Zj 2-Z0 2)·TZZ2+(Zj-Z0)·TZZ1
It can finally recognize to obtain straightness error Tzx and position error Tzz；
Detecting step 2) in the direction " Y " identification formula:
dyi-dy0=(Yi 3-Y0 3)·TYY3+(Yi 2-Y0 2)·TYY2+(Yi-Y0)·TYY1
dzi-dz0=(Yi 3-Y0 3)·TYZ3+(Yi 2-Y0 2)·TYZ2+(Yi-Y0)·TYZ1
It can finally recognize to obtain position error TyyWith straightness error Tyz；
Detecting step 2) in the direction " Z " identification formula:
dyj-dy0=(Zj 3-Z0 3)·TZY3+(Zj 2-Z0 2)·TZY2+(Zj-Z0)·TZY1
It can finally recognize to obtain straightness error Tzy；
Detecting step 3) in the direction " X " identification formula:
dyi-dy0=(Xi 3-X0 3)·TXY3+(Xi 2-X0 2)·TXY2+(Xi-X0)·TXY1
It can finally recognize to obtain straightness error Txy；
Detecting step 3) in the direction " Y " identification formula:
dxj-dx0=(Yj 3-Y0 3)·TYX3+(Yj 2-Y0 2)·TYX2+(Yj-Y0)·TYX1
It can finally recognize to obtain straightness error Tyx.
5. Geometric Error for Computerized Numerical Control Milling Machine as claimed in claim 2 and turntable corner position error calibration method, characterized in that Using the differential optical gauge head and primary standard of curved surface part calibrating lathe turntable corner position error, specific step is as follows:
1) position coordinates O' of the optical axis of I 1-1 of optical measuring head in the CCD camera of I 1-1 of optical measuring head is obtained by calibration1 (x'O1,y'O1), it is sat by demarcating position of the optical axis for obtaining II 1-2 of optical measuring head in the CCD camera of II 1-2 of optical measuring head Mark O'2(x'O2,y'O2)；
2) adjustment lathe turntable is in starting zero-bit, sets the design zero-bit of primary standard of curved surface part 2 and the starting of lathe turntable Zero-bit is overlapped, and adjusts the primary standard of curved surface part 2, is made the corresponding 1st curved surface group of I 2-1 of curved surface and II 2-2 of curved surface, is made I 2- of curved surface 1 in the measurement range of I 1-1 of optical measuring head, and II 2-2 of curved surface is located in the measurement range of II 1-2 of optical measuring head, And the center line of I 2-1 of curved surface is parallel with the optical axis of I 1-1 of optical measuring head, the center line of II 2-2 of curved surface and institute The optical axis for stating II 1-2 of optical measuring head is parallel, first position AI of this position as primary standard of curved surface part 2；
3) corresponding measurement point is A on I 2-1 of curved surface at this time1(x1,y1), corresponding measurement point is A on II 2-2 of curved surface2(x2,y2), The data processing module follows the steps below data processing:
3.1) measurement point A is obtained1(x1,y1) coordinate, specific steps are as follows:
3.1.1 imaging facula center position coordinates A' in the CCD camera of I 1-1 of optical measuring head) is obtained1(x'1,y'1)；
3.1.2) by the spot center position coordinates A' in step 3.1)1(x'1,y'1) be converted to spot center apart from optical axis away from From s1x、s1y；
3.1.3 measurement point A) is calculated1The corresponding angle of slope:
ξx1=arctan (s1x/f)/2 (1)
ξy1=arctan (s1y/f)/2 (2)
Wherein: ξx1Represent measurement point A1The angle of tangent line and X-direction in XOZ plane；
ξy1Represent measurement point A1The angle of tangent line and Y direction in YOZ plane；
s1xRepresent distance of the center in X-direction system of distance optical axis of the imaging facula of first measurement point；
s1yRepresent distance of the center in Y direction system of distance optical axis of the imaging facula of first measurement point；
F represents the focal length of imaging len 7；
3.1.4 measurement point A) is calculated1(x1,y1) coordinate:
x1=g (ξx1) (3)
y1=g (ξy1) (4)
Wherein: g (x) represents function of a single variable；
3.2) data processing module obtains measurement point A according to the step identical as step 3.1)2(x2,y2) coordinate are as follows:
x2=g (ξx2) (5)
y2=g (ξy2) (6)
Wherein: ξx2Represent measurement point A2The angle of tangent line and X-direction in XOZ plane；
ξy2Represent measurement point A2The angle of tangent line and Y direction in YOZ plane；
4) data processing module is obtained in the measurement point A surveyed on I 2-1 of curved surface1With the measurement point A on survey II 2-2 of curved surface2 Between line A1A2With the center line O in survey curved surface group1O2Angle, the specific steps are as follows:
4.1) measurement point A is calculated1(x1,y1) and surveying I center 2-1 O of curved surface1The distance between (0,0):
4.2) measurement point A is calculated2(x2,y2) and surveying II center 2-2 O of curved surface2The distance between (0,0):
4.3) it calculates in the measurement point A surveyed on I 2-1 of curved surface1With the measurement point A on survey II 2-2 of curved surface2Between line A1A2With Survey curved surface group center line O1O2Angle:
γ=arctan ((d1+d2)/d0)(9)
Wherein: d0Represent the spacing of II 1-2 optical axis of I 1-1 optical axis of optical measuring head and optical measuring head；
5) so that turntable is done step-by-step movement rotation, calculate the deflection angle that primary standard of curved surface part 2 designs zero-bit with respect to it:
αi=γ+i β (10)
Wherein: i represents the stepping number of turntable rotation instruction angle；
β represents every step rotation instruction angle of turntable；
6) the current accumulation of primary standard of curved surface part 2 instruction rotation angle, θ is recordediAnd primary standard of curved surface part 2 designs the deflection of zero-bit with respect to it Angle [alpha]i；
7) step 3)~step 6) is repeated until primary standard of curved surface part 2 rotates a circle；
8) angle error value of turntable is calculated:
Ei=θi-αi(11)
9) discretization error value E obtained to step 8)iFrequency analysis is carried out, each harmonic function is obtained；
10) it is superimposed each harmonic function, obtains the fitting function of turntable angular error, the angular error E at rotational angle thetaθAre as follows:
Wherein: a0For 0 subharmonic amplitude；
K is overtone order；
akFor k subharmonic amplitude；
akFor harmonic phase；
N is the number of samples for rotating angle error, the i.e. number of curved surface group；
11) turntable rotation angle error is compensated, specific steps are as follows:
11.1) instruction for obtaining lathe turntable rotates angle, θ；
11.2) the rotation angle error E under the rotation angle is calculatedθ；
11.3) machine tool instructions rotation angle is compensated, obtains compensated instruction rotation angle λ:
λ=θ-Eθ(13)
Wherein: θ is instruction rotation angle；
EθFor the angular error at rotational angle theta；
λ is that compensated instruction rotates angle.
CN201811194201.4A 2018-10-15 2018-10-15 Lathe geometric error and turntable corner position error calibrating installation and method Pending CN109520417A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111857043A (en) * 2020-07-03 2020-10-30 天津大学 Synchronous acquisition system and acquisition method for three-axis five-degree-of-freedom measuring head data of machine tool
CN113175893A (en) * 2021-04-15 2021-07-27 中国工程物理研究院激光聚变研究中心 Optical free-form surface full-aperture detection method based on multi-error real-time compensation
CN113658266A (en) * 2021-07-27 2021-11-16 中航西安飞机工业集团股份有限公司 Moving axis rotation angle visual measurement method based on fixed camera and single target
CN114674227A (en) * 2022-03-25 2022-06-28 华中科技大学 Method and device for calibrating axis error of rotary table

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103411545A (en) * 2013-08-13 2013-11-27 天津大学 Multi-axis system error modeling and measuring device and method based on optical free-form surface
JP2017061011A (en) * 2015-09-24 2017-03-30 オークマ株式会社 Machine tool geometrical error identification method and geometrical error identification program
CN107091608A (en) * 2017-05-31 2017-08-25 天津大学 A kind of five degree of freedom measurement method of parameters based on primary standard of curved surface part
CN107101597A (en) * 2017-05-31 2017-08-29 天津大学 A kind of error calibrating method for rotating angle measuring system
CN107144248A (en) * 2017-05-31 2017-09-08 天津大学 A kind of scaling method of Digit Control Machine Tool turntable error
CN107234487A (en) * 2017-05-31 2017-10-10 天津大学 Moving component multi-parameter detecting method based on combinatorial surface type standard

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103411545A (en) * 2013-08-13 2013-11-27 天津大学 Multi-axis system error modeling and measuring device and method based on optical free-form surface
JP2017061011A (en) * 2015-09-24 2017-03-30 オークマ株式会社 Machine tool geometrical error identification method and geometrical error identification program
CN107091608A (en) * 2017-05-31 2017-08-25 天津大学 A kind of five degree of freedom measurement method of parameters based on primary standard of curved surface part
CN107101597A (en) * 2017-05-31 2017-08-29 天津大学 A kind of error calibrating method for rotating angle measuring system
CN107144248A (en) * 2017-05-31 2017-09-08 天津大学 A kind of scaling method of Digit Control Machine Tool turntable error
CN107234487A (en) * 2017-05-31 2017-10-10 天津大学 Moving component multi-parameter detecting method based on combinatorial surface type standard

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111857043A (en) * 2020-07-03 2020-10-30 天津大学 Synchronous acquisition system and acquisition method for three-axis five-degree-of-freedom measuring head data of machine tool
CN113175893A (en) * 2021-04-15 2021-07-27 中国工程物理研究院激光聚变研究中心 Optical free-form surface full-aperture detection method based on multi-error real-time compensation
CN113175893B (en) * 2021-04-15 2022-02-11 中国工程物理研究院激光聚变研究中心 Optical free-form surface full-aperture detection method based on multi-error real-time compensation
CN113658266A (en) * 2021-07-27 2021-11-16 中航西安飞机工业集团股份有限公司 Moving axis rotation angle visual measurement method based on fixed camera and single target
CN113658266B (en) * 2021-07-27 2023-10-20 中航西安飞机工业集团股份有限公司 Visual measurement method for rotation angle of moving shaft based on fixed camera and single target
CN114674227A (en) * 2022-03-25 2022-06-28 华中科技大学 Method and device for calibrating axis error of rotary table

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