CN106441153B - A kind of aperture aspherical element profile high-precision detecting method and device - Google Patents
A kind of aperture aspherical element profile high-precision detecting method and device Download PDFInfo
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- CN106441153B CN106441153B CN201610936001.6A CN201610936001A CN106441153B CN 106441153 B CN106441153 B CN 106441153B CN 201610936001 A CN201610936001 A CN 201610936001A CN 106441153 B CN106441153 B CN 106441153B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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Abstract
The invention belongs to optical precision the field of test technology, it is related to a kind of aperture aspherical precise detection device and method, can be used for the high-precision detection of the medium-and-large-sized non-spherical element profile of precision optical system.The present invention is based on straight line/rotative benchmark technologies etc. to realize the high-precision detection of the aperture aspherical element profile based on the accurate air bearing centre of gyration using the open contourgraph structure in revolution-linear datum cobasis face.The present invention is using revolution-linear datum system cobasis face design and turn back design and the open non-gantry structure design of measurement bay, reduce instrument Abbe error, the kinematic accuracy for having played accurate straight line air-float guide rail to greatest extent, is directly measured using the sensing measurement system moved synchronously with accurate straight line air-float guide rail to an aspherical bus outline parameter is tested；Technology is turned round using accurate air bearing, realizes the measurement for being tested aspherical a plurality of bus outline, is quickly detected by the high-precision that fitting realizes aperture aspherical profile.
Description
Technical field
The invention belongs to optical precision the field of test technology, it is related to a kind of heavy caliber precision Aspherical-surface testing method and dress
It sets, can be used for the high-precision detection of the medium-and-large-sized High-precision aspheric component side shape profile of precision optical system.
Technical background
Large-scale high-precision aspherical optical element plays pole in the precision optical systems such as camera space, astronomical telescope
Its important role.It is general to use in order to meet the design requirement of aspherical face shape and roughness in aspherical mirror machining
Processing-detection-reprocessing-such as detects at the manufacturing process again, and to a certain extent, the key for obtaining High-precision aspheric element is
Reliable, effective detection technique can be provided to instruct to process, especially in the aspherical milling of large-aperture optical and
Polishing stage, the high-acruracy survey of aspheric surface are the key that decision face shape convergence precision and convergence rate.Currently, aspheric
The high-precision detection in face has become the greatest problem faced in High-precision aspheric Optical element manufacturing.
Currently, common main measurement method has contact type probe scanning method, optical probe scanning method and Through Optical Interference Spectra,
Wherein contact type scanning mensuration is mainly used in detection of the large spherical surface aspherical mirror at the attrition process stage, and optics is non-to be connect
The characteristics of touch scanning method and Through Optical Interference Spectra are due to its non-cpntact measurement is applied to grinding later period and polishing stage, especially suitable
Together in the detection of the mirror surface after final molding is handled.
Through Optical Interference Spectra includes zero-bit interferometry and non-zero interferometry, mainly include aberration-free point, zero-compensation mirror method,
Calculate holography method, shearing interference method, stitching interferometry etc..Zero-bit interferometry be by the structure of design compensation device and position come
The normal aberration for being tested aspherical theoretical shape is fully compensated, realizes the zero testing of face shape error.This method detection accuracy height,
It is highly reliable, it is the basis of reference of current aspheric surface detection.But null test needs to design and is tested aspherical phase
Matched auxiliary element does not have versatility, thus testing cost is higher, and measurement period is longer, especially to large-caliber convex aspheric
Cost is higher when face is detected.Moreover, this method there is also the adjustment required precisions of system higher, compensating glass design and adjustment with
And it high-precision detection difficult, calculates the excessive introducing medium-high frequency error of holographic plate strain line frequency and is difficult to the problems such as making.
Non-zero interferometry does not need whole normal aberrations that tested surface is fully compensated, but detection system when detecting aspherical
There are intrinsic hysterisis error, interference pattern does not reflect the face shape error information of tested surface directly.
Probe scanning method is usually directly test tested surface shape to obtain the three-dimensional information of each sampled point, then pass through and analyze,
Fitting and the measurement for rebuilding realization aspheric surface error, principle simple, intuitive do not need auxiliary device and element, instrument mark
Measurement coordinate system can be established after fixed, the radius of curvature of aspherical mirror vertex can also be measured simultaneously.This method is suitable for any
The surface testing of bore non-spherical element, the disadvantage is that it is lower using simple scan, efficiency, due to the measurement original being based on of popping one's head in
Reason, response speed is limited, and time of measuring is longer, and the variation of environmental condition can introduce measurement error, and surface shape measurement precision is limited.
Currently, the measurement accuracy of existing aspheric surface contour measurement instrument is largely determined by spindle rotation accuracy, linear guide
Location error and sensing technology etc. between precision, benchmark, do not make full use of the compensability of space reference kinematic error.
In view of the above-mentioned problems, present invention proposition can be separated independently and be swept with the accurate aspherical profile of standard of compensation kinematic error
Measuring device and method are retouched, using the open contourgraph structural principle in revolution-linear datum cobasis face, realizes that heavy caliber is (straight
Diameter f400mm or more) aspherical profile high-precision rapid survey.
Summary of the invention
The purpose of the invention is to improve the precision and efficiency of detecting of large-scale precision aspherical profile, propose a kind of big
Bore non-spherical element profile high-precision detecting method and device.
The present invention is based on we invent space turn error single-turn position isolation technics, straight line/rotative benchmark technology and
Error separating technology etc. between benchmark realizes the high-precision of the aperture aspherical element profile based on the accurate air bearing centre of gyration
Detection.
The purpose of the present invention is what is be achieved through the following technical solutions.
The device for realizing aperture aspherical element profile high-precision detecting method of the invention, using revolution-straight line base
The open contourgraph structure in quasi- cobasis face, including pedestal, accurate straight line air-float guide rail, accurate air bearing rotary table, guide rail
Straight-line motion accuracy laser monitoring system, air-flotation workbench adjustment system, sensing measurement system and Measurement and Control System.
Wherein, accurate straight line air-float guide rail, accurate air bearing rotary table, guide rail straight-line motion accuracy laser monitoring system
It fixes on the base, accurate straight line air-float guide rail is located at the lower section of accurate air bearing rotary table side；Guide rail linear motion misses
Poor laser monitoring system is placed in parallel with accurate straight line air-float guide rail, straight-line motion accuracy detecting module and sensing measurement system
It is consolidated；Sensing measurement system is fixed on the cross measure arm being connected with the axle sleeve of accurate straight line air-float guide rail, and can
Axial direction with axle sleeve along accurate straight line air-float guide rail makees one-dimensional rectilinear scanning motion, sensing measurement system in motion process
Axial direction is vertical with the direction of motion of accurate straight line air-float guide rail.
Sensing measurement system includes non-contact sensor measuring system or contact-sensing measuring system
Aperture aspherical element profile high-precision detecting method is: utilizing the tested of accurate air bearing rotary table adjustment
Aspherical pose, using accurate straight line air-float guide rail drive sensing measurement system along be tested the generatrix direction at aspherical center into
Row scanning survey, while utilizing the separation of guide rail straight-line motion accuracy laser monitoring system, compensating the straight of accurate straight line air-float guide rail
Line kinematic error realizes nanoscale rectilinear scanning motion, obtains the profile of tested bus；Then, computer utilizes measurement control
System processed controls accurate air bearing rotary table and rotates different angles, obtains being tested by sensing measurement system aspherical more
The profile value of bus；It is tested aspherical integral face shape profile finally, being fitted by a plurality of bus outline, realizes tested aspheric
The high-precision of facial contour detects.
Realize the high precision measurement of tested aspherical profile specifically includes the following steps:
Step 1: accurate air bearing rotary table is driven to carry out rotary motion, using sensing measurement system to accurate air bearing
The working surface profile of rotary table measures, and the pose parameter of accurate air bearing rotary table is obtained, according to the pose
Driving parameter air-flotation workbench adjustment system makes the work top of accurate air bearing rotary table without inclination；
Step 2: will be tested it is aspherical be placed on accurate air bearing rotary table, computer pass through Measurement and Control System drive
Dynamic precision air bearing rotary table carries out rotary motion, by being fixed on the vertical survey being connected with the axle sleeve of accurate straight line air-float guide rail
Radial sensor-based system on amount arm is detected to aspherical radial contour is tested, and is tested according to measurement result adjustment aspherical
Position makes itself and accurate air bearing rotary table coaxial placement；
Step 3: accurate straight line air-float guide rail edge is tested aspherical generatrix direction and moves as one-dimensional scanning, drives simultaneously
Sensing measurement system carries out one-dimensional profile scanning survey along aspherical generatrix direction is tested, measure be tested it is aspherical in this bus side
Upward profile information；For accurate straight line air-float guide rail during one-dimensional rectilinear scanning motion, straight-line motion accuracy is by guide rail
Straight-line motion accuracy laser monitoring system monitoring, compensation；
Step 4: computer controls accurate air bearing rotary table according to the scan path of planning and rotates an angle, weight
Multiple step 3, measurement obtains the profile information for being tested an aspherical bus again；
Step 5: duplicate measurements step 3 and step 4, until completing to be tested aspherical overall profile scanning, by a plurality of
Bus outline, which fits, is tested aspherical integral face shape profile, realizes and is tested aspherical high-accurate outline measurement.
Beneficial effect
The present invention, which compares prior art, has following remarkable advantage:
1) revolution-linear datum system cobasis face design and the design of turning back of measurement bay, reduce instrument to the maximum extent
Device Abbe error enables the kinematic accuracy for measuring guide rail farthest to play；
2) open non-gantry structure design, extension, detection system convenient for aperture aspherical element processing bore
Fusion and workpiece carrying and adjustment, Large components caliber size mainly determines by the motion range of basic rack；
3) meter level aperture aspherical element is convenient in the use of straight line air-supporting slide rail system kinematic error laser detection system
Processing and detection.
Feature of the present invention:
1. the linear motion guide rail in system is placed directly on workbench, is passed using open non-gantry structure design
Sensor is connected with guide rail, so that system motion width is most short, it is small to deform in measurement process, the inspection of aperture aspherical element can be improved
Survey precision；
2. using high-precision air bearing straight line technology, the disturbance of gas caused by the discharge because of exhaust gas is eliminated to measurement environment
Influence, be remarkably improved the measurement accuracy of measuring system；
3. turning round technology using high-precision air bearing, the rotating accuracy of rotary system is improved, measuring system is remarkably improved
Measurement accuracy；
4. using the eccentric adjustment workbench based on aerostatic bearing technology, realize the high-precision tune of system incline, aligning,
It is remarkably improved the measurement accuracy of measuring system；
5. using high-precision laser linear datum technology, system precision of rectilinear motion ensure that, systematic survey essence can be improved
Degree.
Detailed description of the invention
Fig. 1 is aperture aspherical element profile detection device of the present invention and its method schematic diagram；
Fig. 2 is that aperture aspherical element profile detection method of the present invention is illustrated based on the scan path of sequential scan principle
Figure；
Fig. 3 a) it is aperture aspherical element profile detection device implementation diagram of the present invention；
Fig. 3 b) be aperture aspherical element profile detection device of the present invention computer control connection schematic diagram；
Wherein: 1- pedestal, 2- precision straight line air-float guide rail, 3- precision air bearing rotary table, 4- guide rail linear motion miss
Poor laser monitoring system, 5- sensing measurement system, 6- straight-line motion accuracy detecting module, 7- Measurement and Control System, 8- axle sleeve, 9-
Cross measure arm, 10- aspherical mirror, 11- air-flotation workbench adjustment system, 12- computer, 13- vertical measurement arm, 14- are radial
Sensor-based system, 15- generatrix direction.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
The basic idea of the invention is that: it is set using revolution-linear datum system cobasis face design and turning back for measurement bay
Meter and the design of open non-gantry structure, reduce instrument Abbe error, have played accurate straight line air bearing to greatest extent and led
The kinematic accuracy of rail, using the sensing measurement system moved synchronously with accurate straight line air-float guide rail to being tested an aspherical mother
Line profile parameter directly measures；Technology is turned round using accurate air bearing, realizes the measurement for being tested aspherical a plurality of bus outline,
The profile parameters of entire aspheric surface are obtained using fitting, the high-precision for realizing aperture aspherical profile quickly detects.
Embodiment 1
As depicted in figs. 1 and 2, aperture aspherical element profile high-precision detecting method, detecting step are as follows:
It is tested aspherical 10 to be placed on accurate air bearing rotary table 3, sensing measurement system 5 is fixed on and accurate straight line
On the connected cross measure arm 9 of the axle sleeve 8 of air-float guide rail 2, and one-dimensional rectilinear scanning motion can be made with axle sleeve 8, in measurement process
Guarantee that sensing measurement system 5 is vertical with the direction of motion of accurate straight line air-float guide rail 2, sensing measurement system 5 is non-along being tested
10 generatrix direction 15 of spherical surface carries out one-dimensional scanning linear motion, while right using guide rail straight-line motion accuracy laser monitoring system 4
The straight-line motion accuracy of accurate straight line air-float guide rail 2 is monitored, separates, compensates, and realizes nanoscale rectilinear scanning motion, real
The now profile measurement on a generatrix direction.
As shown in Fig. 2, it is scanned measurement to being tested aspherical 10 using sensing measurement system 5 along generatrix direction 15, it can
Measure N number of profile measurement data on a bus.
Computer 12 controls accurate air bearing rotary table 3 by control system 7 and rotates an angle, repeats above-mentioned scanning
Measurement process can measure and obtain the outline data of a plurality of bus.
It is fitted processing according to profile measurement data, can obtain being tested aspherical 10 integral face shape profile, realizes quilt
Survey aspherical 10 high-accurate outline measurement.
Embodiment 2
In conjunction with shown in Fig. 1 and Fig. 3, aperture aspherical element profile high-precision detection device is mainly by pedestal 1, precise direct
Line air-float guide rail 2, accurate air bearing rotary table 3, guide rail straight-line motion accuracy laser monitoring system 4, air-flotation workbench adjustment
System 11, measurement sensor-based system 5, control system 7, computer 12 etc. are constituted, accurate straight line air-float guide rail 2, guide rail linear motion
Error laser monitoring system 4 is each attached on pedestal 1, and is distributed in around accurate air bearing rotary table 3.Wherein, sensing is surveyed
Amount system 5 is fixed on the cross measure arm 9 being connected with the axle sleeve 8 of accurate straight line air-float guide rail 2, and can be with axle sleeve 8 along precision
2 axial direction of straight line air-float guide rail makees one-dimensional rectilinear scanning motion；Radial sensor-based system 14 is fixed on and accurate straight line air bearing is led
On the connected vertical measurement arm 13 of the axle sleeve 8 of rail 2, and its measurement direction is consistent with aspherical 10 radial direction is tested；Precise direct
Line air-float guide rail 2 is located at the lower section of accurate 3 side of air bearing rotary table；Guide rail straight-line motion accuracy laser monitoring system 4 is put
The axis direction in accurate air bearing rotary table 3 is set, and is placed in parallel with accurate straight line air-float guide rail 2, guide rail linear motion
The straight-line motion accuracy detecting module 6 of error laser monitoring system 4 is fixedly arranged at cross measure arm 9 with sensing measurement system 5 together
On；Computer 12 realizes measurement, adjustment, scanning function in aperture aspherical detection device by control system.
Be tested aspherical 10 detection process it is as follows:
1) computer 12 drives accurate air bearing rotary table 3 to carry out rotary motion by Measurement and Control System 7, utilizes biography
Sensed quantity system 5 measures the surface profile parameters of accurate air bearing rotary table 3, and computer 12 analyzes it, and obtains essence
The pose parameter of close air bearing rotary table 3 is adjusted according to the pose parameter by air-flotation workbench adjustment system 11, is eliminated
The inclination of accurate air bearing rotary table 3；
2) aspherical 10 will be tested to be placed on accurate air bearing rotary table 3, Measurement and Control System 7 controls accurate air bearing and returns
Revolving worktable 3 is at the uniform velocity rotated, and is monitored by radial sensor-based system 14 to the radial contour for being tested aspherical 10, computer
12 are adjusted according to the measurement results of radial sensor-based systems 14 to aspherical 10 placement bias is tested, make to be tested aspherical 10 with
Accurate air bearing rotary table 3 is coaxial；
3) accurate straight line air-float guide rail 2 is driven to make one-dimensional scanning movement, sensing measurement system 5 is moved synchronously with it, to quilt
It surveys aspherical 10 and carries out one-dimensional scanning along generatrix direction 15, measure and be tested the aspherical 10 face shape profile on generatrix direction 15；
Accurate straight line air-float guide rail 2 is in one-dimensional scanning motion process, and straightness is by guide rail straight-line motion accuracy laser monitoring system 4
Monitoring realizes nanoscale rectilinear scanning motion by straight-line motion accuracy separation, compensation；
4) computer 12 controls one set angle of the accurate rotation of air bearing rotary table 3, repeats step 3, is tested
Outline data on aspherical 10 generatrix direction；
5) step 4 is repeated, can get and be tested aspherical 10 profile measurement data on a plurality of generatrix direction；
6) computer 12 is fitted according to the outline data on a plurality of generatrix direction measured, obtains being tested aspherical 10
Complete face shape profile, realize heavy caliber be tested aspheric surface profile high-acruracy survey.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (1)
1. aperture aspherical profile high-precision detecting method, it is characterised in that: realize that the device of this method is straight using revolution-
The open contourgraph structure in line benchmark cobasis face, including pedestal (1), accurate straight line air-float guide rail (2), accurate air bearing revolution work
Make platform (3), guide rail straight-line motion accuracy laser monitoring system (4), air-flotation workbench adjustment system (11), sensing measurement system
(5) and Measurement and Control System (7)；
Wherein, accurate straight line air-float guide rail (2), accurate air bearing rotary table (3), guide rail straight-line motion accuracy laser monitoring system
System (4) is fixed on pedestal (1), and accurate straight line air-float guide rail (2) is located at the lower section of accurate air bearing rotary table (3) side；
Guide rail straight-line motion accuracy laser monitoring system (4) is placed in parallel with accurate straight line air-float guide rail (2), and straight-line motion accuracy is visited
Module (6) are surveyed to be consolidated with sensing measurement system (5)；Sensing measurement system (5) is fixed on and accurate straight line air-float guide rail
(2) on the connected cross measure arm (9) of axle sleeve (8), and can be with axle sleeve (8) along the axial direction side of accurate straight line air-float guide rail (2)
To making one-dimensional rectilinear scanning motion, the axial direction of sensing measurement system (5) and accurate straight line air-float guide rail (2) in motion process
The direction of motion it is vertical；Sensing measurement system (5) includes non-contact sensor measuring system or contact-sensing measuring system；
Aperture aspherical profile high-precision detecting method is: the tested aspheric adjusted using accurate air bearing rotary table (3)
The pose in face (10) drives sensing measurement system (5) along being tested aspherical (10) center using accurate straight line air-float guide rail (2)
Generatrix direction (15) is scanned measurement, while accurate using guide rail straight-line motion accuracy laser monitoring system (4) separation, compensation
The straight-line motion accuracy of straight line air-float guide rail (2) realizes nanoscale rectilinear scanning motion, obtains the profile of tested bus；So
Afterwards, computer (12) controls accurate air bearing rotary table (3) using Measurement and Control System (7) and rotates different angles, passes through
Sensing measurement system (5) obtains the profile value for being tested a plurality of bus of aspherical (10)；Finally, being fitted by a plurality of bus outline
It is tested the integral face shape profile of aspherical (10), realizes the high-precision detection for being tested aspherical (10) profile；Realize tested aspheric
The feature of the high precision measurement of face (10) profile the following steps are included:
Step 1: accurate air bearing rotary table (3) is driven to carry out rotary motion, using sensing measurement system (5) to accurate gas
The working surface profile for floating back into revolving worktable (3) measures, and obtains the pose parameter of accurate air bearing rotary table (3), according to
Make the work top of accurate air bearing rotary table (3) without inclining according to pose parameter driving air-flotation workbench adjustment system (11)
Tiltedly；
Step 2: will be tested aspherical (10) and be placed on accurate air bearing rotary table (3), and computer (12) passes through measurement control
System (7) drives accurate air bearing rotary table (3) to carry out rotary motion, by being fixed on and accurate straight line air-float guide rail (2)
Radial sensor-based system (14) on the connected vertical measurement arm (13) of axle sleeve (8) carries out the radial contour for being tested aspherical (10)
Detection, being tested aspherical (10) position according to measurement result adjustment makes itself and accurate air bearing rotary table (3) coaxial placement；
Step 3: accurate straight line air-float guide rail (2) makees one-dimensional scanning movement along the generatrix direction (15) for being tested aspherical (10), together
When drive sensing measurement system (5) to carry out one-dimensional profile scanning survey along aspherical (10) generatrix direction (15) is tested, measure by
Survey the profile information of aspherical (10) on this generatrix direction (15)；Accurate straight line air-float guide rail (2) is transported in one-dimensional linear scanning
During dynamic, straight-line motion accuracy is monitored by guide rail straight-line motion accuracy laser monitoring system (4), is compensated；
Step 4: computer (12) controls accurate air bearing rotary table (3) according to the scan path of planning and rotates an angle,
Step 3 is repeated, measurement obtains the profile information for being tested aspherical (10) buses again；
Step 5: duplicate measurements step 3 and step 4, until the overall profile scanning for being tested aspherical (10) is completed, by a plurality of
Bus outline fits the integral face shape profile for being tested aspherical (10), realizes that the high-accurate outline for being tested aspherical (10) is surveyed
Amount.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107121116A (en) * | 2017-05-25 | 2017-09-01 | 重庆大学 | Screw type face combination property detection platform |
| CN107796320A (en) * | 2017-11-07 | 2018-03-13 | 安徽博流体传动股份有限公司 | The small radius of spherical crown detecting system of oil distribution casing, cylinder body |
| CN108225213B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | free-form surface non-contact dimensionality reduction error separation detection method and device |
| CN108362221B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Method and device for detecting nanometer precision of free-form surface morphology |
| CN108267095B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Bilateral dislocation differential confocal detection method and device for free-form surface morphology |
| CN109759953B (en) * | 2018-12-26 | 2020-12-01 | 中国科学院长春光学精密机械与物理研究所 | Contour detection device and method for large-caliber plane mirror |
| CN109955148B (en) * | 2019-03-18 | 2023-09-22 | 中国工程物理研究院激光聚变研究中心 | In-situ detection device and method for medium-frequency ripple error of aspheric optical element |
| CN110345859B (en) * | 2019-07-10 | 2024-02-20 | 杭州电子科技大学 | Aspheric surface shape swinging arm type detection device and method for realizing self-adjustment of measuring head pose |
| CN111023971B (en) * | 2019-12-19 | 2021-06-01 | 中国科学院光电技术研究所 | Method for non-contact measurement of surface shape of large-aperture optical element based on laser tracker |
| CN113587845B (en) * | 2021-07-29 | 2022-07-26 | 中国科学院长春光学精密机械与物理研究所 | Large-aperture lens contour detection device and detection method |
| CN114383532B (en) * | 2021-12-24 | 2023-02-17 | 上海交通大学 | Three-dimensional contour detection device for spherical optical lens |
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| CN102426001A (en) * | 2011-10-18 | 2012-04-25 | 北京理工大学 | Axial circular runout and total runout single displacement error separation device and method |
| CN102997864A (en) * | 2012-12-17 | 2013-03-27 | 北京理工大学 | Detection system of large-aperture optical aspherical mirror |
| CN103105141A (en) * | 2012-12-30 | 2013-05-15 | 北京理工大学 | Outline scanning measuring method and device of large-scale sphere and aspheric surface |
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| CN102426001A (en) * | 2011-10-18 | 2012-04-25 | 北京理工大学 | Axial circular runout and total runout single displacement error separation device and method |
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