CN103820765A - Composite coating equipment and manufacturing method for neodymium iron boron rare-earth permanent magnetic device - Google Patents
Composite coating equipment and manufacturing method for neodymium iron boron rare-earth permanent magnetic device Download PDFInfo
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- CN103820765A CN103820765A CN201410107511.3A CN201410107511A CN103820765A CN 103820765 A CN103820765 A CN 103820765A CN 201410107511 A CN201410107511 A CN 201410107511A CN 103820765 A CN103820765 A CN 103820765A
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Abstract
The invention discloses composite coating equipment and a manufacturing method for a neodymium iron boron rare-earth permanent magnetic device. The coating equipment comprises a vacuum chamber, a cylindrical rotary cathode magnetron target, a planar cathode magnetron target, a cylindrical or rectangular cathode multi-arc ion target, an anode layer linear ion source, a rotating stand and a charging basket. When the coating equipment works, the rotating stand revolves in the vacuum chamber, and rotating shafts at two ends of the netlike charging basket are arranged on the rotating stand, namely that the rotating stand rotates automatically along with revolution. The cylindrical rotary cathode magnetron target is arranged in the rotating stand in the vacuum chamber; the planar magnetron target, the multi-arc ion target, the anode layer linear ion source and a heating device are arranged around the rotating stand in the vacuum chamber; a composite coating is divided into three layers, wherein the first layer is a magnetron sputtering coating of which the thickness is 0.1-5mu m, the second layer is a magnetron sputtering and multi-arc mixed coating of which the thickness is 1-15mu m, and the third layer is a magnetron sputtering coating of which the thickness is 0.1-5mu m. The composite coating is used for a surface treatment procedure of the rare-earth permanent magnetic device, so that the corrosion resistance of the rare-earth permanent magnetic device is improved, and the magnetic performance of the rare-earth permanent magnetic device is also improved.
Description
Technical field
The invention belongs to permanent magnet devices field, particularly relate to a kind of vacuum coating film equipment and manufacture method of Nd-Fe-B rare-earth permanent magnet device.
Background technology
Nd-Fe-B rare earth permanent magnetic material, is more and more applied with its good magnetic property, is widely used in medical Magnetic resonance imaging, computer hard disc driver, sound equipment, mobile phone etc.; Along with energy-conservation and requirement low-carbon economy, Nd-Fe-B rare earth permanent magnetic material starts again at automobile component, household electrical appliance, energy-conservation and control motor, hybrid vehicle, field of wind power generation application.
The process of surface treatment of the rare earth permanent magnet device of prior art mainly contains electroplated Ni-Cu-Ni, electroplates the technology such as Zn, electrophoresis, spraying, also has and adopts vacuum aluminum-coated method, as Chinese patent ZL96192129.3, has disclosed the method for Vacuum Deposition Ti and AlN; Another Chinese patent ZL01111757.5 has disclosed and has adopted that vacuum-evaporation is zinc-plated, the method for aluminium, tin, magnesium.
Prior art as shown in Figure 1, has two strut members 7 to be arranged side by side in the inner Shang of vacuum chamber 1 district, can the rotating shaft 6 on a horizontal axis of rotation rotate.Six cylinders 5 that formed by Stainless Steel Cloth pack magnetic part 14 into, by rotating shaft 8 in the outer circumference direction of the rotating shaft 6 of strut member 7 and be supported for an annular, for 6 rotations around the shaft.Be arranged on a heating boat supporting base 4 rising as multiple heating boats 2 of the evaporator section of the material aluminium wire 9 for evaporating in the support platform 3 for the treatment of chamber 1 inferior segment.Aluminium wire 9 is fixed and is wrapped on a feed roller 10 under support platform 3.The front end of aluminium wire 9 is reached on heating boat 2 by thermal resistance protective tube 11 guiding of an internal surface towards heating boat 2; a recess 12 is arranged in a part for protective tube 11; and feed gear wheel 13 is installed corresponding to recess 12; and directly contact with aluminium wire 9; can be consistently aluminium wire be fed in heating boat 2 by feeding aluminium wire 9 like this, heating evaporation deposits to and on the magnetic part 14 in the barrel 5 of rotation, completes its surface and aluminize.
Prior art adopts evaporation coating, and the bonding force of rete and matrix is poor, improves the resistance to corrosion Shortcomings of rare earth permanent magnet device; Also the prior art having has adopted magnetron sputtering plating, because the efficiency of magnetron sputtering is low, is not suitable for low cost and produces in enormous quantities, and what also have does not solve the technology that is installed, and is difficult for being installed, and produces trouble; Also the prior art having adopts multi-arc ion plating film, during due to multi-arc ion plating film, there is macrobead, can not reach the erosion resistance requirement of rare earth permanent magnet device, in order to solve the shortcoming of multi-arc ion coating, also someone has expected employing multi-arc ion coating and magnetron sputtering composite film coating to prior art, but all do not solve high-level efficiency, production technology low-costly and in high volume, device structure Shortcomings; The particularly electroplating chemical treatment process of the rare earth permanent magnet device of prior art, energy consumption is high pollution, require expensive water treating equipment, deal with improperly ecotope is had a strong impact on, because production process of the present invention is carried out in a vacuum, do not use environmental pollution material, can not pollute to ecotope, also eliminate " battery " in electroplating technology process simultaneously and act on the impact of the reduction on magnetic property.For this reason, the vacuum composite film coating equipment that the invention provides a kind of novel rare-earth permanent magnet devices has made up the deficiencies in the prior art; Adopt in addition the Nd-Fe-B rare-earth permanent magnet device of device fabrication of the present invention not only to improve the resistance to corrosion of rare earth permanent magnet device, also improve the magnetic property of rare earth permanent magnet device, obviously improve magnetic energy product and the coercive force of rare earth permanent magnet device, save rare rare earth resources, especially saved more rare heavy rare earths consumption.
Summary of the invention
The present invention is to provide a kind of composite coating equipment and manufacture method of Nd-Fe-B rare-earth permanent magnet device, is achieved through the following technical solutions and improves the magnetic property of rare earth permanent magnet device and the resistance to corrosion of raising:
A composite coating equipment for Nd-Fe-B rare-earth permanent magnet device, comprises vacuum film coating chamber, inflation system, cylinder negative electrode magnetic controlling target, planar cathode magnetic controlling target, cathodic multi arc ion plating target, anode-layer-linear ion source, pivoted frame and charging basket; Described vacuum film coating chamber is made up of horizontal vacuum housing, Qianmen and bonnet, Qianmen and vaccum case pass through rubber seal rings for seal, bonnet or be welded on horizontal vacuum housing or by web member connects, the transmission mechanism of pivoted frame is arranged on bonnet, and it is indoor that the motor transmission shaft outside vacuum chamber is sent to vacuum plating by dynamic sealing device; Pivoted frame design is indoor in vacuum plating, and by rotating shaft support, on framework, framework is fixed on vaccum case; The axis of pivoted frame is parallel with the axis of horizontal vacuum housing, and netted charging basket two ends have rotating shaft to be arranged on pivoted frame, and the axis of rotating shaft is parallel with the axis of pivoted frame, and pivoted frame is around the axis revolution of vaccum case, and netted charging basket revolves round the sun and rotation with pivoted frame.
Cylinder negative electrode magnetic controlling target is arranged on the indoor bonnet of vacuum plating, and power supply, water coolant and transmission mechanism are introduced by outside, and cylinder negative electrode magnetic controlling target is positioned at the inside of pivoted frame, axis and turret shaft line parallel.Described cylinder negative electrode magnetic controlling target is set to more than one.
The magnet ring that multiple axial chargings are housed in described cylinder negative electrode magnetic controlling target, has magnetic guiding loop between magnet ring, magnet ring moves with respect to cylinder negative electrode magnetic controlling target axial reciprocating.
In described cylinder negative electrode magnetic controlling target or the magnetic stripe of many radial magnetizings is housed, magnetic stripe along circle distribution, has interval in cylinder negative electrode magnetic controlling target between magnetic stripe, and the quantity of magnetic stripe is more than 3 or 3, and magnetic stripe is with respect to cylinder negative electrode magnetic controlling target coaxial rotation.
Described magnet ring or magnetic stripe are manufactured by Nd-Fe-B rare-earth permanent magnet.
Planar cathode magnetic controlling target is arranged on vaccum case, is distributed in the periphery of pivoted frame, is provided with run-track shaped ring-type magnetic stripe in described planar cathode magnetic controlling target, and magnetic stripe is manufactured by Nd-Fe-B rare-earth permanent magnet, and by water quench, quantity is more than one.
Cathodic multi arc ion plating target is arranged on vaccum case, is distributed in the periphery of pivoted frame, and described cathodic multi arc ion plating target is square or circular, and inside is provided with magnet, and magnet is manufactured by Nd-Fe-B rare-earth permanent magnet, and by water quench, quantity is more than one.
Anode-layer-linear ion source is arranged on vaccum case, is distributed in the periphery of pivoted frame.
The indoor well heater that is provided with of described vacuum plating, Heating temperature scope is at 100-600 ℃.
Described plated film target is Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, Ni-Cr, Ti, Mo, Si, Al
2o
3, ZrO
2, more than one in AZO.
The film system of described Nd-Fe-B rare-earth permanent magnet device is more than one in Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe.
The film of described Nd-Fe-B rare-earth permanent magnet device is Al, Ni-Cr, Ti, Mo, Si, Al
2o
3, ZrO
2, more than one in AZO.
The film of described Nd-Fe-B rare-earth permanent magnet device is Al.
Described inflation system or be filled with a kind of gas or be filled with more than one gas.
The gas that described inflation system is filled with is more than one in argon gas, nitrogen, oxygen, hydrogen.
The gas that described inflation system is filled with is argon gas.
Described vacuum pump is more than one in oil-sealed rotary pump, Roots vaccum pump, oily vacuum diffusion pump, molecular pump.
Described magnetron sputtering plating condition is, 30 ~ 600 ℃ of temperature, and deposition pressure is 0.1 ~ 1Pa under argon gas condition, power density is 1 ~ 20w/cm
2; Sparking voltage 100 ~ the 3000V of linear ion source, ion energy 100 ~ 2000eV, operating air pressure 0.01 ~ 1Pa under argon gas condition.In described filming process, adopt magnetron sputtering plating and multi-arc ion plating film, magnetron sputtering plating and multi-arc ion plating film separately, alternately or carry out work simultaneously.
Rare earth permanent magnet device carries out composite film coating operation after mechanical workout operation, plated film is divided into 3 layers, the first layer is magnetron sputtering coating, thickness of coating is: 0.02-5 μ m, the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, thickness of coating is: 1-10 μ m, and the 3rd layer is magnetron sputtering coating, thickness of coating is: 0.1-5 μ m.
Described composite film coating operation, plated film is divided into 3 layers, and the first layer is magnetron sputtering coating, and coating is the one in Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, and coating is Al, Ni-Cr, Ti, Mo, Si, Al
2o
3, ZrO
2, more than one in AZO, the 3rd layer is magnetron sputtering coating, coating is Al, Ni-Cr, Ti, Mo, Si, Al
2o
3, ZrO
2, more than one in AZO.
Described composite film coating operation, plated film is divided into 3 layers, and the first layer is magnetron sputtering coating, and coating is the one in Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, and the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, coating is Al, Ni-Cr, Al
2o
3, ZrO
2, more than one in AZO, the 3rd layer is magnetron sputtering coating, coating is Al, Ni-Cr, Al
2o
3, ZrO
2, more than one in AZO.
Described composite film coating operation, plated film is divided into 3 layers, the first layer is magnetron sputtering coating, coating is one or more in Al, Ni-Cr, the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, coating is one or more in Al, Ni-Cr, and the 3rd layer is magnetron sputtering coating, and coating is one or more in Al, Ni-Cr.
Rare earth permanent magnet device will carry out sandblast operation before filming process, the material that sandblast adopts be quartz, glass microballon, aluminum oxide, cerium oxide, lanthanum trioxide, cerium oxide and lanthanum trioxide mixture, zirconic one or more.
Before filming process or to have spraying process, spray material be aluminium or containing the one in compound, the electrocoating paint of aluminium.
In filming process or have the permanent magnet devices heating process of coating process of control, temperature range is at 100-600 ℃.
After filming process or have a heat treatment step.
The thermal treatment temp of described heat treatment step is at 110-890 ℃.
The thermal treatment of described heat treatment step is carried out under vacuum or protective atmosphere.
Horizontal Nd-Fe-B rare-earth permanent magnet device composite coating equipment or be arranged in clean room, the cleanliness factor of factory building is more than 10,000 grades.
Metallurgical analysis shows, described a kind of Nd-Fe-B rare-earth permanent magnet device extends internally the content of the heavy rare earths main phase grain within the scope of 1mm higher than the content of heavy rare earths in device main phase grain from device surface, and the heavy rare earths that content is high is distributed in principal phase R
2t
14the periphery of B, forms RH
2t
14b surrounds R
2t
14the new principal phase structure of B, RH
2t
14b phase and R
2t
14b is alternate with Grain-Boundary Phase; Wherein, R representative rare earth in principal phase in Fe-B rare-earth permanent magnet structure, T representative element Fe and Co, RH represents that the content of heavy rare earths in principal phase is higher than the rare earth of mean value.
Beneficial effect of the present invention: the vacuum coating film equipment and the manufacture method that have found a kind of Nd-Fe-B rare-earth permanent magnet device to produce in enormous quantities, obviously improve the corrosion resistance nature of Nd-Fe-B rare-earth permanent magnet device, make Nd-Fe-B rare-earth permanent magnet device can be used for the field of the high anti-corrosion such as offshore wind farm, hybrid vehicle requirement, expanded the purposes of Nd-Fe-B rare-earth permanent magnet; Generally; the top coat of Nd-Fe-B rare-earth permanent magnet all can reduce magnetic property; the present invention finds the magnetic property of the Nd-Fe-B rare-earth permanent magnet device that adopts equipment and process production of the present invention; especially magnetic energy product and coercive force are improved significantly; for the magnetic property that improves Nd-Fe-B rare-earth permanent magnet has found novel method; to reducing rare earth consumption, protect rare natural resources significant.
Accompanying drawing explanation
Further illustrate the present invention below by accompanying drawing:
Fig. 1 be prior art vacuum plating schematic diagram
Fig. 2 is vacuum plating schematic diagram of the present invention
In figure: 1, vacuum chamber; 2, heating boat; 3, support platform; 4, heating boat supporting base; 5, charging cylinder; 6, around the shaft; 7, strut member; 8, rotating shaft; 9, aluminium wire; 10, roller; 11, thermal resistance protective tube; 12, recess; 13, feed gear wheel; 14, magnetic part; 15, vaccum case; 16, anode-layer-linear ion source; 17, multi sphere ion source; 18, vacuum pump; 19, plane magnetic control target; 20, heating unit; 21, I level is from moving gear; 22, I level follower gear; 23, II level driving toothed gear; 24, II level follower gear; 25, pivoted frame; 26, charging basket; 27, permanent magnet devices; 28, cylinder magnetic controlling target; 29, rotating shaft I; 30, rotating shaft II; 31, vacuum-pumping pipeline.
As shown in Figure 2, the present invention is the vacuum coating film equipment of magnetron sputtering plating and multi-arc ion plating film work in combination.On the medullary ray of a horizontal vacuum housing 15 that is connected with vacuum pump 18, be provided with a cylinder shape rotary magnetron target 28, on the circumference of pivoted frame 25, be furnished with multiple (in figure being 8) stainless (steel) wire finish mix basket 26, permanent magnet devices 27 is housed in charging basket 26.Drive-motor (not marking) outside vacuum chamber connects I level driving toothed gear 21 by dynamic seal transmission shaft, drive the I level follower gear 22 being fixed on pivoted frame 25 complete pivoted frame 25 around the shaft I 29 revolve round the sun.The II level driving toothed gear 23 being fixed on vaccum case 15 drives 24 II 30 rotations around the shaft of II level follower gear by the revolution of pivoted frame 25, the two ends of charging basket 26 are provided with rotating shaft and connect with rotating shaft II 30, therefore charging basket 26 can reach revolution add rotation object, make permanent magnet devices 27 in charging basket 26, stir-fry by uniform deposition on target material.Be provided with anode-layer-linear ion source 16 in circular vaccum case 15 outsides, multiple multi sphere ion sources 17, the vacuum-pumping pipeline 31 of connection vacuum pump 18, multiple plane magnetic control targets 19 and heating unit 20.
Chamber, filming process initial vacuum vacuumizes and reaches E-4Pa magnitude, recharges argon gas, operating air pressure 0.01 ~ 1Pa, and charging basket 26 revolution add rotation, starting cathode layer linear ion source, sparking voltage 100 ~ 3000V, ion bombardment permanent magnet devices 27, stopped bombarding through 5 ~ 10 minutes.Charging basket 26 insulate, and also can meet negative pressure-50 ~-200V.The object of icon bombardment cleaning in advance, be clean the oxide compound on permanent magnet devices 27 surfaces, containing hydrocarbons, make its surface coarsening increase surface can and the effect such as ion assisted deposition.Heating unit 20 is heated to 120 ~ 600 ℃ to charging basket 26 and the interior permanent magnet devices 27 of charging basket 26, plays and removes steam, improves film adhesion effect.Filming process is in the time being heated to 200 ℃, charging basket 26 revolution adds rotation and after high-pressure ion cleans, vacuum chamber 15 again vacuumizes and reaches E-4Pa magnitude, recharge argon gas, operating air pressure 0.1 ~ 1Pa, start respectively or simultaneously plane magnetic control target 19, cylinder shape magnetron sputtering target 28 and multi sphere ion source 17, it is worked independently respectively or alternation or simultaneously work, target material is deposited to the coating that forms simple substance film and deielectric-coating on permanent magnet devices 27.
Embodiment
Further illustrate unusual effect of the present invention below by the contrast of embodiment.
Embodiment 1
Press following technique manufacture:
1, press respectively table one A1, A2, A3, A4 composition is chosen alloy 600Kg melting, under molten state by alloy casting to being with cooling formation alloy slice on water-cooled rotation copper roller, then carry out hydrogen fragmentation, after hydrogen fragmentation, carry out batch mixing, the laggard row airflow milling of batch mixing, afterwards under nitrogen protection with delivering to nitrogen protection magnetic field orientating press-molding after mixer batch mixing, oxygen level 150ppm in guard box, alignment magnetic field 1.8T, 2 ℃ of mould cavity temperatures, magnetic patch size 62 × 52 × 42mm, differently-oriented directivity is 42 dimensional directions, after shaping, in guard box, encapsulate, then take out and wait static pressure, hydrostatic pressure 200MPa, send into afterwards agglomerating plant sintering and timeliness.
2, after timeliness, carry out mechanical workout, be processed into square piece 30 × 20 × 10 mm sizes, workpiece selectivity is carried out to chamfering, sandblast, aluminium-plated, electrophoresis, spraying, carry out afterwards vacuum plating, the first layer adopts magnetron sputtering plating, the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, the 3rd layer is magnetron sputtering coating, thickness of coating is respectively: 0.02-5 μ m, 0.1-15 μ m, 1-5 μ m, the 4th layer of plating also carried out in some experiments, the 4th layer is magnetron sputtering coating, thickness 0.1-5 μ m, the 4th layer do not mark the symbol of element for only having triple-layer coating, the each layer of material of selecting, the measuring result of magnetic property and corrosion resistance nature is listed table two in.
The composition of the RE permanent magnetic alloy of table one, embodiment and comparative example
The measuring result of table two, coating material of the present invention, magnetic property and corrosion resistance nature
Comparative example 1
Press respectively the A1 of table one, A2, A3, A4 composition is chosen alloy 600Kg melting, under molten state by alloy casting to cooling formation alloy slice on the cooling roller with water-cooled rotation, then use the involutory gold plaque of vacuum hydrogen crushing furnace to carry out coarse breaking, the broken laggard row airflow milling of hydrogen, under nitrogen protection with delivering to nitrogen protection magnetic field orientating press-molding after mixer batch mixing, alignment magnetic field 1.8T, magnetic patch size 62 × 52 × 42mm, differently-oriented directivity is 42 dimensional directions, after shaping, in guard box, encapsulate, then take out and wait static pressure, hydrostatic pressure 200MPa, send into afterwards vacuum sintering furnace sintering and timeliness, carry out again mechanical workout, be processed into square piece 30 × 20 × 10 mm sizes, workpiece selectivity is carried out to chamfering or sandblast, carry out afterwards electroplated Ni-Cu-Ni, the measuring result of magnetic property and corrosion resistance nature is listed table three in.
The magnetic property of table three, comparative example and the measuring result of corrosion resistance nature
Embodiment 2
The composition of choosing in embodiment 1 is made Nd-Fe-B rare-earth permanent magnet device, coating is selected the first layer plating Dy-Al alloy, second layer plating Al+ Al, the coating of the 3rd layer of plating Al is made temperature experiment, result is listed table four in, sequence number 1 does not heat the comparative example of yet not heat-treating while being plated film, can find out by table four, thermal treatment temp after coating temperature and plated film has impact to the magnetic property of material, obviously improve the coercive force of magnet, namely improved the use temperature of magnet, under equal use temperature, can reduce the consumption of heavy rare earths, save scarce resource.
The impact on magnetic property and corrosion resistance nature of table four, coating temperature and thermal treatment temp
Note: 1, solidity to corrosion (PCT test)
Experiment condition: sample 10X10X10mm, 2 standard atmospheric pressures, 120 ℃, 100% humidity, 48 hours, weightless <5mg/cm
2.
2, salt-fog test:
Experiment condition: 5%NaCl solution, within 25 ℃ >=48 hours, to test, surface does not change.
In embodiment, before vacuum plating operation, to there is sandblast operation: because rare earth permanent magnet device is in the course of processing, all can there is a certain amount of grease and dirty on its surface, and these dirts have a great impact the corrosion resistance nature of technique for vacuum coating stability and coated product, therefore configuring rational cleaning equipment and technique is the basic guarantee of rare earth permanent magnet component vacuum coating quality performance, only has rational cleaning guarantee coating to have good sticking power.Sandblast operation adopt material be quartz, glass microballon, aluminum oxide, cerium oxide, lanthanum trioxide, cerium oxide and lanthanum trioxide mixture, zirconic more than one.Before vacuum plating operation or to also have spraying process, spray material be aluminium or containing the one in compound, the electrocoating paint of aluminium.
In embodiment, in filming process mesohigh Ion Cleaning operation: vacuum chamber vacuumizes the order of magnitude higher than E-4Pa, applying argon gas, operating air pressure 0.01 ~ 1Pa, charging basket revolution adds rotation, starting cathode layer linear ion source, sparking voltage 100 ~ 3000V, ion bombardment rare earth permanent magnet device 5 ~ 10 minutes.Charging basket insulate, and also can meet negative pressure-50 ~-200V.
In embodiment, coating process configuration: reasonably Process configuration comprises single, double magnetron cathode configuration (comprising plane, cylinder rotary magnetron cathode arrangement), multi sphere cathode arrangement, anode-layer-linear ion source, heating unit and vacuum pump etc.Different coating process configurations cause the variation such as throughput rate, ion energy, and coated product performance is had to material impact.Vacuum chamber vacuumizes the order of magnitude higher than E-4Pa, recharges argon gas, operating air pressure 3E-1Pa, and charging basket revolution adds rotation, and magnetron sputtering deposition and arc evaporation deposition work independently respectively or alternation or simultaneously work separately; Magnetron sputtering deposition and arc evaporation deposition work independently with ion bombardment respectively or alternation separately.
In embodiment, coating process charging: the structure of charging basket has considerable influence to coated product outward appearance and coating quality, should avoid occurring surface tear and other physical damnifications.Charging basket is round tube type or the Polygons columnar structure that stainless (steel) wire is made, and centre has dividing plate to form multiple insulating spaces, and one or a few permanent magnet devices is placed in each space.
In embodiment, after vacuum plating operation or have a heat treatment step, thermal treatment temp 100-900 ℃.
By relatively further illustrating of embodiment and comparative example, adopt technology of the present invention obviously to improve magnetic property and the corrosion resistance nature of magnet, be the technology and equipment technology that has very much development.
Claims (14)
1. a composite coating equipment for Nd-Fe-B rare-earth permanent magnet device, is characterized in that: described composite coating equipment comprises vacuum film coating chamber, cylinder negative electrode magnetic controlling target, planar cathode magnetic controlling target, cathodic multi arc ion plating target, anode-layer-linear ion source, pivoted frame and charging basket; Described vacuum film coating chamber is made up of vaccum case, Qianmen and bonnet, and Qianmen and vaccum case be by rubber seal rings for seal, and bonnet or be welded on vaccum case or by web member connects; Pivoted frame design is indoor in vacuum plating, and by rotating shaft support, on framework, framework is fixed on vaccum case; The axis of pivoted frame is parallel with the axis of vaccum case, and netted charging basket two ends have rotating shaft to be arranged on pivoted frame, and the axis of rotating shaft is parallel with the axis of pivoted frame, and pivoted frame is around the axis revolution of vaccum case, and netted charging basket revolves round the sun and rotation with pivoted frame; Described cylinder negative electrode magnetic controlling target is arranged on the indoor bonnet of vacuum plating, and power supply, water coolant and transmission mechanism are introduced by outside, and cylinder negative electrode magnetic controlling target is positioned at the inside of pivoted frame, axis and turret shaft line parallel; Cylinder negative electrode magnetic controlling target is set to more than one.
2. the composite coating equipment of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 1, it is characterized in that: the magnet ring that multiple axial chargings are housed in described cylinder negative electrode magnetic controlling target, between magnet ring, there is magnetic guiding loop, magnet ring moves with respect to cylinder negative electrode magnetic controlling target axial reciprocating, and described magnet ring is manufactured by Nd-Fe-B rare-earth permanent magnet.
3. the composite coating equipment of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 1, it is characterized in that: in described cylinder negative electrode magnetic controlling target or the magnetic stripe of many radial magnetizings is housed, magnetic stripe in cylinder negative electrode magnetic controlling target along circle distribution, between magnetic stripe, there is interval, the quantity of magnetic stripe is more than 3 or 3, magnetic stripe is with respect to cylinder negative electrode magnetic control target sleeve pipe coaxial rotation, and described magnetic stripe is manufactured by Nd-Fe-B rare-earth permanent magnet.
4. the composite coating equipment of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 1, it is characterized in that: described planar cathode magnetic controlling target is arranged on vaccum case, be distributed in the periphery of pivoted frame, in described planar cathode magnetic controlling target, be provided with run-track shaped annular magnetic stripe, magnetic stripe is manufactured by Nd-Fe-B rare-earth permanent magnet, by water quench, quantity is more than one.
5. the composite coating equipment of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 1, it is characterized in that: described cathodic multi arc ion plating target is arranged on vaccum case, be distributed in the periphery of pivoted frame, described cathodic multi arc ion plating target is square or circular, inside is provided with magnet, magnet is manufactured by Nd-Fe-B rare-earth permanent magnet, and by water quench, quantity is more than one.
6. the composite coating equipment of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 1, is characterized in that: described anode-layer-linear ion source is arranged on vaccum case, is distributed in the periphery of pivoted frame.
7. the manufacture method of a Nd-Fe-B rare-earth permanent magnet device, it is characterized in that: first carry out alloy melting, under molten state by alloy casting to being with cooling formation alloy slice on water-cooled rotation copper roller, then carry out hydrogen fragmentation, after hydrogen fragmentation, carry out batch mixing, the laggard row airflow milling of batch mixing, afterwards under nitrogen protection with delivering to nitrogen protection magnetic field orientating press-molding after mixer batch mixing, after shaping, in guard box, encapsulate, then take out and wait static pressure, send into afterwards agglomerating plant sintering and timeliness and make Nd-Fe-B rare-earth permanent magnet magnet, carry out afterwards mechanical workout and make Nd-Fe-B rare-earth permanent magnet device, afterwards at the indoor composite film coating that Nd-Fe-B rare-earth permanent magnet device is carried out to magnetron sputtering plating and multi-arc ion coating of vacuum plating, plated film is divided into 3 layers, the first layer is magnetron sputtering coating, thickness of coating is: 0.02-5 μ m, the second layer is the composite deposite of magnetron sputtering and multi-arc ion coating, thickness of coating is: 1-10 μ m, the 3rd layer is magnetron sputtering coating, thickness of coating is: 0.1-5 μ m.
8. the manufacture method of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 7, is characterized in that: the indoor well heater that is provided with of described vacuum plating, Heating temperature scope is at 30-600 ℃.
9. the manufacture method of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 7, is characterized in that: after described filming process, also have heat treatment step, thermal treatment temp 60-900 ℃.
10. the manufacture method of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 7, it is characterized in that: the indoor anode-layer-linear ion source that is provided with of described vacuum plating, described magnetron sputtering plating condition is, 30 ~ 600 ℃ of temperature, deposition pressure is 0.1 ~ 1Pa under argon gas condition, power density is 1 ~ 20w/cm2, sparking voltage 100 ~ the 3000V of linear ion source, ion energy 100 ~ 2000eV, operating air pressure 0.01 ~ 1Pa under argon gas condition adopts magnetron sputtering plating and multi-arc ion plating film separately, alternately or carry out work simultaneously in described filming process.
The manufacture method of 11. a kind of Nd-Fe-B rare-earth permanent magnet devices according to claim 7, it is characterized in that: described composite film coating belongs to physical vapor deposition, magnetic control film coating material is Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, Ti, Mo, Si, stainless steel, Al
2o
3, one in ZrO, AZO, described magnetron sputtering and the composite deposite of multi-arc ion coating, Coating Materials is Al, Ti, Mo, Si, stainless steel, Al
2o
3, more than one in ZrO, ITO, AZO.
The manufacture method of 12. a kind of Nd-Fe-B rare-earth permanent magnet devices according to claim 7, it is characterized in that: before described filming process, also have sandblast operation, sandblast adopt material be quartz, glass microballon, aluminum oxide, cerium oxide, lanthanum trioxide, cerium oxide and lanthanum trioxide mixture, zirconic more than one, before filming process or to also have spraying process, spray material be aluminium or containing the one in compound, the electrocoating paint of aluminium.
The manufacture method of 13. a kind of Nd-Fe-B rare-earth permanent magnet devices according to claim 7, it is characterized in that: described composite film coating operation, plated film is divided into 3 layers, the first layer is magnetron sputtering coating, coating is the one in Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, and coating is Al, Ni-Cr, Ti, Mo, Si, Al
2o
3, ZrO
2, more than one in AZO, the 3rd layer is magnetron sputtering coating, coating is Al, Ni-Cr, Ti, Mo, Si, Al
2o
3, ZrO
2, more than one in AZO.
The manufacture method of 14. a kind of Nd-Fe-B rare-earth permanent magnet devices according to claim 7, it is characterized in that: described a kind of Nd-Fe-B rare-earth permanent magnet device extends within the scope of 0.5mm outside to inside from device surface, in main phase grain, the content of heavy rare earths is higher than the content of heavy rare earths in crystal grain principal phase, and the heavy rare earths that content is high is distributed in principal phase R
2t
14the periphery of B, forms RH
2t
14b surrounds R
2t
14the new principal phase structure of B, RH
2t
14b phase and R
2t
14b is alternate with Grain-Boundary Phase.
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Application publication date: 20140528 |