CN103454249B - Based on optical glass homogeneity detection method and the device of white light interference - Google Patents
Based on optical glass homogeneity detection method and the device of white light interference Download PDFInfo
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- CN103454249B CN103454249B CN201310419697.1A CN201310419697A CN103454249B CN 103454249 B CN103454249 B CN 103454249B CN 201310419697 A CN201310419697 A CN 201310419697A CN 103454249 B CN103454249 B CN 103454249B
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Abstract
The invention discloses a kind of optical glass homogeneity detection method based on white light interference and device.Device comprises white light interferometer and two double-frequency laser displacement measuring systems, and two double-frequency laser displacement measuring systems and white light interferometer are serial verb construction, the formula structure that two double-frequency laser displacement measuring systems and white light interferometer is combined as a whole carries out motion scan.Detection method is: demarcate white light interferometer, obtain the scale-up factor of optical path difference and fringes shift amount; Obtain the optical path difference variable quantity that optical glass to be measured is introduced, and use displacement measurement system to record the thickness deviation of the same measured position of optical glass to be measured; The thickness deviation that the optical path difference obtained according to white light interferometer and displacement measurement system obtain, determines the refractive index deviation of optical glass to be measured; Scan whole optical glass to be measured, the homogeneity completing optical glass to be measured detects.The precision that the present invention detects optical glass homogeneity is high, cost is low, and test process is simple and convenient.
Description
Technical field
The invention belongs to interference of light field of measuring techniques, particularly a kind of optical glass homogeneity detection method based on white light interference and device.
Background technology
The homogeneity of optical glass refers to the refractive index inconsistency of material internal can affect the image quality of optical system, is one of important indicator weighing optical glass producing quality.Main employing interferometer measurement optical glass homogeneity at present, difference eliminates the means difference of optical glass face shape error:
One method utilizes to post plate raising measuring accuracy.Using a pair high precision parallel flat as posting plate, the impact that combined refractive index liquid note causes uniformity measurement in tested optical glass both sides with the face shape of eliminating tested glass.But due to large scale, to post plate processing cost too high, and handling difficulty is large, be not suitable for larger caliber flat glass homogeneity to detect, general use small size posts plate subregion stitching measure, but make to need in measuring process in this way constantly mobilely to post Board position to measure glass zones of different, cause measuring process loaded down with trivial details, precision is difficult to ensure.
Another kind method is the absolute method of measurement.Optical glass is placed between reference mirror, record the corrugated data comprising homogeneity information, optical glass face shape information and reference mirror shape information, the shape of independent measurement reference mirror again and optical glass face shape, the impact that the corrugated data elimination reference mirror shape obtained in conjunction with interferometry several times and optical glass face shape are caused uniformity measurement.The method needs to use high-precision reference mirror subsidiary, especially must use when measuring large-aperture optical glass the aperture interferometer being furnished with heavy caliber reference mirror, and aperture interferometer manufacturing cost is very high, causes this measuring method high cost.
Summary of the invention
The object of the present invention is to provide a kind of precision is high, cost is low the optical glass homogeneity detection method based on white light interference and device.
The technical scheme realizing the object of the invention is: a kind of optical glass homogeneity detection method based on white light interference, white light interferometer is used to measure the optical path difference variable quantity of optical glass to be measured introducing, and adopt double-frequency laser displacement measuring system to measure the thickness deviation of optical glass to be measured, in conjunction with the homogeneity of these two measurement test optical glass to be measured, concrete steps are as follows:
Step 1, demarcation white light interferometer: use the monochromatic LED compensating glass identical with two panels to demarcate white light interferometer, obtain the scale-up factor C of optical path difference and fringes shift amount, change monochromatic LED into white light source, center striped is adjusted to scale zero-bit x
0;
Step 2, obtain optical glass to be measured introduce optical path difference variable quantity: after the compensating glass in white light interferometer optical system for testing is replaced with optical glass to be measured, obtain the optical path difference Λ introduced optical glass measured position to be measured according to the offset Δ x of white light interferometer center striped, and use double-frequency laser displacement measuring system to record the thickness deviation Δ d of the same measured position of optical glass to be measured;
Step 3, determine the refractive index deviation of optical glass measured position to be measured: the thickness deviation Δ d that the optical path difference Λ obtained by same measured position white light interferometer and displacement measurement system are obtained, determine the refractive index deviation delta n of this measured position of optical glass to be measured
e;
Step 4, change the measured position of optical glass to be measured, repeat step 2 ~ 3, until scan whole optical glass to be measured, the homogeneity completing optical glass to be measured detects.
Based on an optical glass homogeneity pick-up unit for white light interference, comprise white light interferometer and two double-frequency laser displacement measuring systems, described white light interferometer adopts Michelson interferometer structure, comprise the light source along optical path direction successively coaxial setting, collimator objective, spectroscope, first compensating glass, first catoptron, optical glass to be measured, second catoptron, image-forming objective lens, CCD, signal processing system, wherein light source is positioned at the focal position of collimator objective, first compensating glass, first catoptron, optical glass to be measured, the optical axis of the second catoptron respectively with respective is orthogonal, signal processing system is connected with CCD, all optical elements are coaxially contour relative to substrate, namely relative to optical table or instrument base coaxially contour, described two double-frequency laser displacement measuring systems are coaxially arranged at the both sides of optical glass to be measured in opposite directions, and the utilizing emitted light of two double-frequency laser displacement measuring systems is all normally incident in optical glass surface to be measured.
Compared with prior art, its remarkable advantage is in the present invention: (1) interferometer adopts short relevant white light to be light source, effectively can reduce the interference of other surface reflections in light path system; (2) do not need to manufacture the high-precision high precision reference mirror posting plate or larger caliber, reduce testing requirement and testing cost; (3) test process is simple, easy to adjust, lower to the requirement of environment, and test is more easily realized.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the present invention's optical glass to be measured, and wherein (a) is circular optical glass to be measured, the optical glass to be measured that (b) is rectangle.
Fig. 2 is the optical glass homogeneity structure of the detecting device schematic diagram that the present invention is based on white light interference.
Fig. 3 is the schematic diagram of white light interferometer in the optical glass homogeneity pick-up unit that the present invention is based on white light interference.
Fig. 4 is that double-frequency laser displacement measuring system of the present invention measures optical glass local thickness to be measured deviation schematic diagram.
Fig. 5 is the optical interference circuit schematic diagram of white light interferometer in Fig. 3.
Fig. 6 demarcates the interferogram that in interferometer process, CCD gathers, and wherein (a) is interferogram when adopting monochromatic LED, and (b) is interferogram when adopting white light source.
Embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
Principle of the present invention is as follows: in optical glass homogeneity pick-up unit, the variable quantity of optical path difference is the concentrated expression of optical glass homogeneity and local thickness, meets the following conditions:
Λ＝(n
e+Δn
e)(d+Δd)
In formula, Λ is optical path difference, and d is the reference thickness of optical glass to be measured, n
efor white light source is by the refractive index of optical glass to be measured, Δ d is a certain position optical glass front and rear surfaces to be measured local thickness deviation, Δ n
efor the refractive index deviation of this position.Therefore, the reference thickness d of known optical glass to be measured and refractive index n
e, determining can realize the uniformity measurement of optical glass to be measured by the Simultaneously test local thickness deviation delta d of optical path difference Λ.
The present invention is based on the optical glass homogeneity detection method of white light interference, white light interferometer is used to measure the optical path difference variable quantity of optical glass to be measured introducing, and adopt double-frequency laser displacement measuring system to measure the thickness deviation of optical glass to be measured, in conjunction with the homogeneity of these two measurement test optical glass to be measured, concrete steps are as follows:
Step 1, demarcation white light interferometer: use the monochromatic LED compensating glass identical with two panels to demarcate white light interferometer, obtain the scale-up factor C of optical path difference and fringes shift amount, change monochromatic LED into white light source, center striped is adjusted to scale zero-bit x
0;
Step 2, obtain optical glass to be measured introduce optical path difference variable quantity: after the compensating glass in white light interferometer optical system for testing is replaced with optical glass to be measured, obtain the optical path difference Λ introduced optical glass measured position to be measured according to the offset Δ x of white light interferometer center striped, and use double-frequency laser displacement measuring system to record the thickness deviation Δ d of the same measured position of optical glass to be measured; The concrete formula of optical path difference Λ is as follows:
Λ＝Δx·C
Wherein, C is the scale-up factor that step 1 demarcates optical path difference and the fringes shift amount obtained, and Δ x is step 2 white light interferometer center fringe position x
1relative to scale zero-bit x
0side-play amount, i.e. Δ x=x
1-x
0;
Step 3, determine the refractive index deviation of optical glass measured position to be measured: the thickness deviation Δ d that the optical path difference Λ obtained by same measured position white light interferometer and displacement measurement system are obtained, determine the refractive index deviation delta n of this measured position of optical glass to be measured
e, formula is as follows:
Wherein, d is the reference thickness of optical glass to be measured, n
efor white light source is by the refractive index of optical glass to be measured.
Step 4, change the measured position of optical glass to be measured, repeat step 2 ~ 3, until scan whole optical glass to be measured, the homogeneity completing optical glass to be measured detects.
Composition graphs 1, optical glass to be measured is that the optical glass of one piece of circle or rectangle is dull and stereotyped, and through corase grind, fine grinding, its surface is close to plane.
Composition graphs 2, the present invention is based on the optical glass homogeneity pick-up unit of white light interference, comprise white light interferometer and two double-frequency laser displacement measuring systems, and two double-frequency laser displacement measuring systems and white light interferometer are serial verb construction, the formula structure that two double-frequency laser displacement measuring systems and white light interferometer is combined as a whole carries out motion scan.Composition graphs 3, described white light interferometer adopts Michelson interferometer structure, comprise the light source 1 along optical path direction successively coaxial setting, collimator objective 2, spectroscope 3, first compensating glass 4, first catoptron 5, optical glass 6 to be measured, second catoptron 7, image-forming objective lens 8, CCD9, signal processing system 10, wherein light source 1 is positioned at the focal position of collimator objective 2, first compensating glass 4, first catoptron 5, optical glass 6 to be measured, the optical axis of the second catoptron 7 respectively with respective is orthogonal, signal processing system 10 is connected with CCD9, all optical elements are coaxially contour relative to substrate, namely relative to optical table or instrument base coaxially contour, composition graphs 4, described two double-frequency laser displacement measuring systems are coaxially arranged at the both sides of optical glass 6 to be measured in opposite directions, and the utilizing emitted light of two double-frequency laser displacement measuring systems is all normally incident in optical glass 6 to be measured surface.Tested glass plate in figure is optical glass 6 to be measured.
Composition graphs 5, the light path trend of described white light interferometer is: from the white light of light source 1 outgoing through collimator objective 2, incide spectroscope 3 with the form of directional light; Spectroscope 3 is divided into mutually perpendicular two-beam road light path: the road light reflecting back into spectroscope 3 through the first catoptron 5 after inciding the first compensating glass 4 calls reference path, and the road light reflecting back into spectroscope 3 through the second catoptron 7 after inciding optical glass 6 to be measured is called optical system for testing; The test light reflected by spectroscope 3 and the target surface being converged in CCD9 by the reference light of spectroscope 3 transmission through image-forming objective lens 8 interfere.When testing, the first described catoptron 5 and its optical axis normal surface angularly θ are arranged, and wherein θ meets following formula:
In formula, n is the number of interference fringes of whole optical glass surface to be measured and n=5 ~ 10, λ
efor the effective wavelength of white light source, D is diameter or the width of optical glass to be measured.
Below in conjunction with specific embodiment, the present invention is described in further detail.
Embodiment 1
The present invention, in conjunction with the method for glass plate homogeneity shown in White Light Interferometer and displacement sensor method Scanning Detction Fig. 1, comprises the following steps:
Step 1: first white light interferometer is demarcated.By each instrument according to install shown in Fig. 2 and adjust in place after, use monochromatic LED as interferometer light source, its wavelength is λ, and the position of tested glass plate is put into one piece of standard compensation mirror and demarcated in fig. 2; As shown in Figure 5, adjustment standard compensation mirror and the first compensating glass 4 front and back position in the optical path, make reflected light r
1with r
2'/r
3', r
2with r
1'/r
2'/r
3', r
3with r
1'/r
2'/r
3' optical path difference all non-vanishing, then r
1with r
2'/r
3', r
2with r
1'/r
2'/r
3', r
3with r
1'/r
2'/r
3' all can not interfere, now in CCD, obtain r
1with r
1' interferogram and scale reading, as shown in Fig. 6 (a).Index dial reads in Δ L length range, has N number of striped, then obtain the scale-up factor of optical path difference Λ and fringes shift amount Δ x:
Change white light source, in CCD, obtain new interferogram, as shown in Fig. 6 (b), now read center fringe position and scale zero-bit x from the scale monitor
0.
Step 2: the standard compensation mirror in optical system for testing is replaced with optical glass to be measured as tested glass plate, interference fringe misalignment initial point position, reads the position x of now center striped
1, fringes shift amount Δ x=x
1-x
0, then optical path difference Λ is:
Λ＝Δx·C
Simultaneously, double-frequency laser displacement measuring system is used to obtain same position optical glass front and rear surfaces local thickness deviation delta d to be measured: composition graphs 4, each double-frequency laser displacement measuring system all uses two detectors, detect the light intensity of two frequency laser respectively, its light intensity magnitude interferes superposition to determine by inner chamber laser and external cavity laser.Its mutually orthogonal double-frequency laser sent is through tested glass plate surface reflection, and return laser light device is inner, thus establishes inside and outside two resonator cavitys, utilizes light feedback effect change in displacement to be converted into light intensity change.Measured target often moves half wavelength corresponding light intensity change one-period.It uses non-contact measurement method, and accurately can obtain the radial displacement of measured point and local thickness's deviation of tested glass plate fast, precision is better than 20nm.
Step 3: the refractive index deviation determining optical glass measured position to be measured: the thickness deviation Δ d that the optical path difference Λ obtained by same measured position white light interferometer and displacement measurement system are obtained, determines the refractive index deviation delta n of this measured position of optical glass to be measured
e, formula is as follows:
Wherein, d is the reference thickness of optical glass to be measured, n
efor white light source is by the refractive index of optical glass to be measured.
Step 4: scan arm drives whole system scanning, change the measured position of optical glass to be measured, in scanning process, real-time sampling is measured, continuous repetition step 2 and step 3, until whole measurement terminates, so just obtain the refractive index deviation of all measured points of parallel plate glass, thus obtain glass homogeneity information.
In sum, the present invention is based on optical glass homogeneity detection method and the device of white light interference, wherein interferometer adopts short relevant white light to be light source, effectively can reduce the interference of other surface reflections in light path system; And do not need to manufacture the high-precision high precision reference mirror posting plate or larger caliber, reduce testing requirement and testing cost; Test process is simple, easy to adjust, lower to the requirement of environment, and test is more easily realized.
Claims (6)
1. the optical glass homogeneity detection method based on white light interference, it is characterized in that: use white light interferometer to measure the optical path difference variable quantity of optical glass to be measured introducing, and adopt double-frequency laser displacement measuring system to measure the thickness deviation of optical glass to be measured, in conjunction with the homogeneity of these two measurement test optical glass to be measured, concrete steps are as follows:
Step 1, demarcation white light interferometer: use the monochromatic LED compensating glass identical with two panels to demarcate white light interferometer, obtain the scale-up factor C of optical path difference and fringes shift amount, change monochromatic LED into white light source, center striped is adjusted to scale zero-bit x
0;
Step 2, obtain optical glass to be measured introduce optical path difference variable quantity: after the compensating glass in white light interferometer optical system for testing is replaced with optical glass to be measured, obtain the optical path difference Λ introduced optical glass measured position to be measured according to the offset Δ x of white light interferometer center striped, and use double-frequency laser displacement measuring system to record the thickness deviation Δ d of the same measured position of optical glass to be measured;
Step 3, determine the refractive index deviation of optical glass measured position to be measured: the thickness deviation Δ d that the optical path difference Λ obtained by same measured position white light interferometer and displacement measurement system are obtained, determine the refractive index deviation delta n of this measured position of optical glass to be measured
e;
Step 4, change the measured position of optical glass to be measured, repeat step 2 ~ 3, until scan whole optical glass to be measured, the homogeneity completing optical glass to be measured detects.
2. the optical glass homogeneity detection method based on white light interference according to claim 1, it is characterized in that: obtain the optical path difference Λ introduced optical glass measured position to be measured described in step 2 according to the side-play amount of white light interferometer center striped, concrete formula is as follows:
Λ＝Δx·C
Wherein, C is the scale-up factor that step 1 demarcates optical path difference and the fringes shift amount obtained, and Δ x is step 2 white light interferometer center fringe position x
1relative to scale zero-bit x
0side-play amount, i.e. Δ x=x
1-x
0.
3. the optical glass homogeneity detection method based on white light interference according to claim 1, is characterized in that: the refractive index deviation delta n determining this measured position of optical glass to be measured described in step 3
e, formula is as follows:
Wherein, d is the reference thickness of optical glass to be measured, n
efor white light source is by the refractive index of optical glass to be measured.
4. based on an optical glass homogeneity pick-up unit for white light interference, it is characterized in that: comprise white light interferometer and two double-frequency laser displacement measuring systems, described white light interferometer adopts Michelson interferometer structure, comprise light source (1), collimator objective (2), spectroscope (3), first compensating glass (4), first catoptron (5), optical glass to be measured (6), second catoptron (7), image-forming objective lens (8), CCD (9), signal processing system (10), wherein light source (1) is positioned at the focal position of collimator objective (2), first compensating glass (4), first catoptron (5), optical glass to be measured (6), second catoptron (7) optical axis respectively with respective is orthogonal, signal processing system (10) is connected with CCD (9), all optical elements are coaxially contour relative to substrate, namely relative to optical table or instrument base coaxially contour, described two double-frequency laser displacement measuring systems are coaxially arranged at the both sides of optical glass to be measured (6) in opposite directions, and the utilizing emitted light of two double-frequency laser displacement measuring systems is all normally incident in optical glass to be measured (6) surface.
5. the optical glass homogeneity pick-up unit based on white light interference according to claim 4, it is characterized in that: the light path of described white light interferometer trend is: from the white light of light source (1) outgoing through collimator objective (2), incide spectroscope (3) with the form of directional light; Spectroscope (3) is divided into mutually perpendicular two-beam road light path: incide the road light that the first compensating glass (4) reflects back into spectroscope (3) by the first catoptron (5) and call reference path, incides the road light that optical glass to be measured (6) reflects back into spectroscope (3) by the second catoptron (7) and is called optical system for testing; The test light reflected by spectroscope (3) and the target surface being converged in CCD (9) by the reference light of spectroscope (3) transmission through image-forming objective lens (8) interfere.
6. the optical glass homogeneity pick-up unit based on white light interference according to claim 4, it is characterized in that: two described double-frequency laser displacement measuring systems and white light interferometer are serial verb construction, the formula structure that two double-frequency laser displacement measuring systems and white light interferometer is combined as a whole carries out motion scan.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105092530B (en) * | 2015-05-21 | 2018-01-05 | 南京理工大学 | The absolute method of measurement of optical parallel optical heterogeneity |
| CN106546178B (en) * | 2016-10-27 | 2018-12-28 | 华中科技大学 | The multi-layer transparent dielectric thickness measuring apparatus and method of confocal white light polarization interference |
| CN106501216B (en) * | 2016-12-27 | 2019-04-16 | 南京理工大学 | A kind of uniformity absolute method of measurement of optical flat |
| CN108872153B (en) * | 2018-08-20 | 2020-12-11 | 南京理工大学 | Method for measuring optical uniformity of parallel flat plate based on non-uniform Fourier transform |
| CN109406106B (en) * | 2018-10-19 | 2020-06-30 | 中国兵器工业标准化研究所 | Method for evaluating uniformity of refractive index of optical material |
| CN109709072B (en) * | 2018-12-29 | 2022-08-16 | 北京信息科技大学 | Method for measuring liquid refractive index |
| CN111609997B (en) * | 2020-05-07 | 2022-04-19 | 中国科学院光电技术研究所 | Detection apparatus suitable for transmission-type optical element optical path uniformity measurement |
| CN112964200A (en) * | 2021-02-02 | 2021-06-15 | 西安工业大学 | Method for quickly measuring included angle of transparent flat plate |
| CN114414530B (en) * | 2022-01-28 | 2023-07-28 | 福州大学 | Biomolecule self-reference detection method and device |
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| JP2001066122A (en) * | 1999-08-27 | 2001-03-16 | Rikogaku Shinkokai | Surface shape measuring method and its device |
| TWI333059B (en) * | 2007-04-24 | 2010-11-11 | Univ Minghsin Sci & Tech |
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