CN203849171U - Precise measuring device for refractive index of optical material - Google Patents
Precise measuring device for refractive index of optical material Download PDFInfo
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- CN203849171U CN203849171U CN201420257867.0U CN201420257867U CN203849171U CN 203849171 U CN203849171 U CN 203849171U CN 201420257867 U CN201420257867 U CN 201420257867U CN 203849171 U CN203849171 U CN 203849171U
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Abstract
The utility model provides a precise measuring device for the refractive index of an optical material. The precise measuring device comprises a transmissive measuring device and a reflective measuring device, wherein the transmissive measuring device comprises a wide-spectrum light source, a first beam splitter, an optical power meter, a measured sample, a second beam splitter, a zero incident angle calibrating device, an optical lens, a spectrometer, a displacement device and a data acquisition card; the reflective measuring device comprises a wide-spectrum light source, a first beam splitter, an optical power meter, a first parabolic mirror, a measured sample, a second beam splitter, a third beam splitter, a zero incident angle calibrating device, a second parabolic mirror, a spectrometer, a displacement device and a data acquisition card. The precise measuring device is simple in operation, free of regulating an optical path or processing the optical material to be special-shaped and capable of realizing nondestructive measurement.
Description
Technical field
The utility model relates to optical material refractometry technical field, specifically a kind of precision measurement apparatus of optical material refractive index.
Background technology
Refractive index is to evaluate a kind of Basic Physical Properties of optical material.The measuring method of optical material refractive index has three classes substantially: the one, and utilize the refraction situation of light in thering is the optical material to be measured of given shape to measure optical material refractive index, as the method for minimum deviation angle and autocollimation method; The 2nd, utilize total reflection phenomenon to measure optical material refractive index, as critical angle method (claiming again Abbe refraction process); The 3rd, utilize principle of interference to measure optical material refractive index, as michelson interferometry, Fabry-Perot interferometry, Mach-Zehnder interferometric method and Rayleigh interfere method.
In first kind method, the method for minimum deviation angle is higher a kind of of precision in various measuring methods, can obtain ± 5 * 10
-6measuring accuracy.But, the measurement mechanism of the method for minimum deviation angle and autocollimation method has a shortcoming, be that optical material to be measured must be processed as specific shape (as wedge shape) and just can measure, the processing precision direct influence of this given shape, to the measuring accuracy of refractive index, also cannot realize the harmless on-line measurement of optical material to be measured simultaneously.In Equations of The Second Kind method, the measurement mechanism of critical angle method is used for the measurement of liquid, gas optical material refractive index, while measuring Solid–state Optics material, because optical material surface roughness to be measured is different with flatness machining state, cause the non-close contact of optical material to be measured and measuring prism, therefore can bring critical angle difference, thereby produce refractive index error.In the 3rd class methods, although treat the shape of photometry material, there is no special strict restriction, the measurement mechanism complex operation of michelson interferometry and Mach-Zehnder interferometric method, need to adjust repeatedly to testing sample and optical path during measurement.For simplified measurement process, some measurement mechanisms adopt single wavelength Fabry-Perot interferometry to measure optical material refractive index.Although such device has been simplified measuring process, due to the restriction of material thickness degree of accuracy, the refractive index degree of accuracy obtaining is not high, can only reach 10
-3.And, the refractive index obtaining by above-mentioned measurement mechanism, only for single specific wavelength incident light, application is very narrow.
Utility model content
The purpose of this utility model is to provide a kind of precision measurement apparatus of optical material refractive index, by this device, can access accurate optical material thickness and refractive index.
The technical solution of the utility model is:
A kind of precision measurement apparatus of optical material refractive index, this device comprises broad spectrum light source, the output light path of described broad spectrum light source is provided with the first spectroscope, and described first spectroscopical reflected light path is provided with light power meter, and described first spectroscopical transmitted light path is provided with sample; The reflected light path of described sample is provided with the second spectroscope, and described second spectroscopical reflected light path is provided with zero degree incident angle calibrating installation; On the transmitted light path of described sample, be provided with successively lens and spectrometer; Described sample is fixed on gearshift; Described broad spectrum light source, light power meter, zero degree incident angle calibrating installation, spectrometer and gearshift are all connected with data collecting card interactive signal.
A kind of precision measurement apparatus of optical material refractive index, this device comprises broad spectrum light source, the output light path of described broad spectrum light source is provided with the first spectroscope, described first spectroscopical reflected light path is provided with light power meter, on described first spectroscopical transmitted light path, is provided with successively the first parabolic mirror and sample; On the reflected light path of described sample, be provided with successively described the first parabolic mirror and the second spectroscope, described second spectroscopical reflected light path is provided with the 3rd spectroscope; Described the 3rd spectroscopical reflected light path is provided with zero degree incident angle calibrating installation, on described the 3rd spectroscopical transmitted light path, is provided with successively the second parabolic mirror and spectrometer; Described sample is fixed on gearshift; Described broad spectrum light source, light power meter, zero degree incident angle calibrating installation, spectrometer and gearshift are all connected with data collecting card interactive signal.
The precision measurement apparatus of described optical material refractive index, the light path between described the first spectroscope and sample is provided with the first high reflection mirror, and the light path between described sample and lens is provided with the second high reflection mirror; Described the first high reflection mirror is also located in the light path between sample and the second spectroscope.
The precision measurement apparatus of described optical material refractive index, described the first parabolic mirror is identical with the focal length of the second parabolic mirror.
The precision measurement apparatus of described optical material refractive index, described zero degree incident angle calibrating installation is two-dimensional position-sensitive detector.
The precision measurement apparatus of described optical material refractive index, described data collecting card is selected the data collecting card that grinds magnificent PCI-1712 series.
The precision measurement apparatus of described optical material refractive index, described gearshift is comprised of the accurate movable object-carrying stage of two dimension, angular displacement platform and automatically controlled platform, and the accurate movable object-carrying stage of described two dimension is connected with data collecting card interactive signal by automatically controlled platform respectively with angular displacement platform; Described sample is fixed on two-dimentional accurate movable object-carrying stage, and the accurate movable object-carrying stage of described two dimension is fixed on angular displacement platform.
The precision measurement apparatus of described optical material refractive index, described automatically controlled platform is selected the automatically controlled platform of Zolix SC300 series.
The utility model adopts broad spectrum light source incident, can obtain the dispersion of refractive index curve of sample in certain wave band, thereby can utilize the residual error function of different wave length incident light in the characteristic of the actual unique convergence in optical material thickness place, obtain accurate optical material thickness, improve the measuring accuracy of refractive index.The utility model adopts automatically controlled platform to control respectively two-dimension displacement coordinate and the angular displacement coordinate of sample, after sample has been placed, does not need sample and optical path repeatedly to adjust, and has simplified measuring process.The utility model, by zero degree incident angle calibrating installation is set, can complete doing compared with odd-job of sample surface incident angle automatically.The utility model is without optical material being processed as to special shape (as wedge shape), can utilize the parallel plate structure of most optical materials self to form stable interference cavity, thereby reduce the impact of air turbulence on interference signal stability, realize the nondestructive measurement to optical material.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model (transmission-type);
Fig. 2 is structural representation of the present utility model (reflection-type).
In upper figure: 1-broad spectrum light source, 21-the first spectroscope, 22-the second spectroscope, 23-the 3rd spectroscope, 3-light power meter, 41-the first high reflection mirror, 42-the second high reflection mirror, 5-sample, 6-Two-dimensional PSD, the accurate movable object-carrying stage of 7-two dimension, 8-angular displacement platform, 91-the first parabolic mirror, 92-the second parabolic mirror, 10-lens, 11-spectrometer, the automatically controlled platform of 12-, 13-data collecting card.
Embodiment
Below in conjunction with the drawings and specific embodiments, further illustrate the utility model.
As shown in Figure 1, a precision measurement apparatus for the optical material refractive index of transmission-type, comprises broad spectrum light source 1, the first spectroscope 21, the second spectroscope 22, light power meter 3, the first high reflection mirror 41, the second high reflection mirror 42, sample 5, two-dimensional position-sensitive detector (Two-dimensional PSD) 6, two-dimentional accurate movable object-carrying stage 7, angular displacement platform 8, lens 10, spectrometer 11, automatically controlled platform 12 and data collecting card 13.Automatically controlled platform 12 is selected the automatically controlled platform of Zolix SC300 series, and data collecting card 13 is selected the data collecting card that grinds magnificent PCI-1712 series.
The output light path of broad spectrum light source 1 is provided with the first spectroscope 21, the reflected light path of the first spectroscope 21 is provided with light power meter 3, on the transmitted light path of the first spectroscope 21, be provided with successively the second spectroscope 22, the first high reflection mirror 41 and sample 5, on the reflected light path of sample 5, be provided with successively the first high reflection mirror 41 and the second spectroscope 22, the reflected light path of the second spectroscope 22 is provided with two-dimensional position-sensitive detector (Two-dimensional PSD) 6, is provided with successively the second high reflection mirror 42, lens 10 and spectrometer 11 on the transmitted light path of sample 5; Sample 5 is placed on two-dimentional accurate movable object-carrying stage 7, and two-dimentional accurate movable object-carrying stage 7 is placed on angular displacement platform 8.The accurate movable object-carrying stage 7 of two dimension is all connected with automatically controlled platform 12 interactive signals with angular displacement platform 8; Broad spectrum light source 1, light power meter 3, two-dimensional position-sensitive detector (Two-dimensional PSD) 6, spectrometer 11, automatically controlled platform 12 are all connected with data collecting card 13 interactive signals.
Adopt above-mentioned measurement mechanism to carry out surveying work principle to optical material refractive index as follows:
Sample 5 is placed on two-dimentional accurate movable object-carrying stage 7, the light beam of broad spectrum light source 1 output, a part is received by light power meter 3 after the first spectroscope 21 reflections, be used for surveying incident intensity, another part arrives sample 5 surfaces after the first spectroscope 21 transmissions and the first high reflection mirror 41 reflections; The folded light beam on sample 5 surfaces is received by two-dimensional position-sensitive detector (Two-dimensional PSD) 6 after the first high reflection mirror 41 reflections and the second spectroscope 22 reflections, for calibrating zero degree incident angle; The transmitted light beam on sample 5 surfaces is received by spectrometer 11 after the second high reflection mirror 42 reflections and lens 10 focusing, for surveying transmitted light intensity; Fixed beam, at the incoming position on sample 5 surfaces, is adjusted angular displacement platform 8, by two-dimensional position-sensitive detector (Two-dimensional PSD) 6 calibration zero degree incident angles; By the accurate movable object-carrying stage 7 of two dimension and angular displacement platform 8, change light beam in incoming position and the incident angle on sample 5 surfaces, simultaneous data-collecting card 13 gathers broad spectrum light source 1(output wave bands), light power meter 3, two-dimensional position-sensitive detector (PSD) 6, the detection data of spectrometer 11 and the displacement data of automatically controlled platform 12, obtain sample refractive index and the dispersion of refractive index curve of sample in certain wave band under each single wavelength.
As shown in Figure 2, a precision measurement apparatus for the optical material refractive index of reflection-type, comprises broad spectrum light source 1, the first spectroscope 21, the second spectroscope 22, the 3rd spectroscope 23, light power meter 3, sample 5, two-dimensional position-sensitive detector (PSD) 6, two-dimentional accurate movable object-carrying stage 7, angular displacement platform 8, the first parabolic mirror 91, the second parabolic mirror 92, spectrometer 11, automatically controlled platform 12 and data collecting card 13.Automatically controlled platform 12 is selected the automatically controlled platform of Zolix SC300 series, and data collecting card 13 is selected the data collecting card that grinds magnificent PCI-1712 series.
The output light path of broad spectrum light source 1 is provided with the first spectroscope 21, the reflected light path of the first spectroscope 21 is provided with light power meter 3, on the transmitted light path of the first spectroscope 21, be provided with successively the second spectroscope 22, the first parabolic mirror 91 and sample 5, on the reflected light path of sample 5, be provided with successively the first parabolic mirror 91 and the second spectroscope 22, the reflected light path of the second spectroscope 22 is provided with the 3rd spectroscope 23, the reflected light path of the 3rd spectroscope 23 is provided with two-dimensional position-sensitive detector (Two-dimensional PSD) 6, on the transmitted light path of the 3rd spectroscope 23, be provided with successively the second parabolic mirror 92 and spectrometer 11, sample 5 is placed on two-dimentional accurate movable object-carrying stage 7, and two-dimentional accurate movable object-carrying stage 7 is placed on angular displacement platform 8.
The accurate movable object-carrying stage 7 of two dimension is all connected with automatically controlled platform 12 interactive signals with angular displacement platform 8; Broad spectrum light source 1, light power meter 3, two-dimensional position-sensitive detector (Two-dimensional PSD) 6, spectrometer 11, automatically controlled platform 12 are all connected with data collecting card 13 interactive signals.The first parabolic mirror 91 is identical with the focal length of the second parabolic mirror 92.
The principle of work that adopts above-mentioned measurement mechanism to measure optical material refractive index is as follows:
Sample 5 is placed on two-dimentional accurate movable object-carrying stage 7, the light beam of broad spectrum light source 1 output, a part is received by light power meter 3 after the first spectroscope 21 reflections, be used for surveying incident intensity, another part arrives sample 5 surfaces after the first spectroscope 21 transmissions and the first parabolic mirror 91 reflections; The folded light beam on sample 5 surfaces arrives the 3rd spectroscope 23 after the first parabolic mirror 91 reflections and the second spectroscope 22 reflections, part light beam is received by two-dimensional position-sensitive detector (Two-dimensional PSD) 6 after the 3rd spectroscope 23 reflections, be used for calibrating zero degree incident angle, another part light beam is received by spectrometer 11 after the 3rd spectroscope 23 transmissions and the second parabolic mirror 92 reflections, for surveying reflective light intensity; Fixed beam, at the incoming position on sample 5 surfaces, is adjusted angular displacement platform 8, by two-dimensional position-sensitive detector (Two-dimensional PSD) 6 calibration zero degree incident angles; By the accurate movable object-carrying stage 7 of two dimension and angular displacement platform 8, change light beam in incoming position and the incident angle on sample 5 surfaces, simultaneous data-collecting card 13 gathers broad spectrum light source 1(output wave bands), light power meter 3, two-dimensional position-sensitive detector (Two-dimensional PSD) 6, the detection data of spectrometer 11 and the displacement data of automatically controlled platform 12, obtain sample refractive index and the dispersion of refractive index curve of sample in certain wave band under each single wavelength.
The above embodiment is only that preferred implementation of the present utility model is described; not scope of the present utility model is limited; do not departing under the prerequisite of the utility model design spirit; various distortion and improvement that those of ordinary skills make the technical solution of the utility model, all should fall in the definite protection domain of claims of the present utility model.
Claims (8)
1. the precision measurement apparatus of an optical material refractive index, it is characterized in that: this device comprises broad spectrum light source, the output light path of described broad spectrum light source is provided with the first spectroscope, described first spectroscopical reflected light path is provided with light power meter, and described first spectroscopical transmitted light path is provided with sample; The reflected light path of described sample is provided with the second spectroscope, and described second spectroscopical reflected light path is provided with zero degree incident angle calibrating installation; On the transmitted light path of described sample, be provided with successively lens and spectrometer; Described sample is fixed on gearshift; Described broad spectrum light source, light power meter, zero degree incident angle calibrating installation, spectrometer and gearshift are all connected with data collecting card interactive signal.
2. the precision measurement apparatus of an optical material refractive index, it is characterized in that: this device comprises broad spectrum light source, the output light path of described broad spectrum light source is provided with the first spectroscope, described first spectroscopical reflected light path is provided with light power meter, on described first spectroscopical transmitted light path, is provided with successively the first parabolic mirror and sample; On the reflected light path of described sample, be provided with successively described the first parabolic mirror and the second spectroscope, described second spectroscopical reflected light path is provided with the 3rd spectroscope; Described the 3rd spectroscopical reflected light path is provided with zero degree incident angle calibrating installation, on described the 3rd spectroscopical transmitted light path, is provided with successively the second parabolic mirror and spectrometer; Described sample is fixed on gearshift; Described broad spectrum light source, light power meter, zero degree incident angle calibrating installation, spectrometer and gearshift are all connected with data collecting card interactive signal.
3. the precision measurement apparatus of optical material refractive index according to claim 1, it is characterized in that: the light path between described the first spectroscope and sample is provided with the first high reflection mirror, and the light path between described sample and lens is provided with the second high reflection mirror; Described the first high reflection mirror is also located in the light path between sample and the second spectroscope.
4. the precision measurement apparatus of optical material refractive index according to claim 2, is characterized in that: described the first parabolic mirror is identical with the focal length of the second parabolic mirror.
5. the precision measurement apparatus of optical material refractive index according to claim 1 and 2, is characterized in that: described zero degree incident angle calibrating installation is two-dimensional position-sensitive detector.
6. the precision measurement apparatus of optical material refractive index according to claim 1 and 2, is characterized in that: described data collecting card is selected the data collecting card that grinds magnificent PCI-1712 series.
7. the precision measurement apparatus of optical material refractive index according to claim 1 and 2, it is characterized in that: described gearshift is comprised of the accurate movable object-carrying stage of two dimension, angular displacement platform and automatically controlled platform, the accurate movable object-carrying stage of described two dimension is connected with data collecting card interactive signal by automatically controlled platform respectively with angular displacement platform; Described sample is fixed on two-dimentional accurate movable object-carrying stage, and the accurate movable object-carrying stage of described two dimension is fixed on angular displacement platform.
8. the precision measurement apparatus of optical material refractive index according to claim 7, is characterized in that: described automatically controlled platform is selected the automatically controlled platform of Zolix SC300 series.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103954589A (en) * | 2014-05-20 | 2014-07-30 | 合肥知常光电科技有限公司 | Precision measurement device and method for optical material refractive index |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103954589A (en) * | 2014-05-20 | 2014-07-30 | 合肥知常光电科技有限公司 | Precision measurement device and method for optical material refractive index |
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