ZA925597B - Method for selctive CVD diamond deposition. - Google Patents

Method for selctive CVD diamond deposition.

Info

Publication number
ZA925597B
ZA925597B ZA925597A ZA925597A ZA925597B ZA 925597 B ZA925597 B ZA 925597B ZA 925597 A ZA925597 A ZA 925597A ZA 925597 A ZA925597 A ZA 925597A ZA 925597 B ZA925597 B ZA 925597B
Authority
ZA
South Africa
Prior art keywords
selctive
cvd diamond
diamond deposition
deposition
cvd
Prior art date
Application number
ZA925597A
Other languages
English (en)
Inventor
Charles Dominic Iocavangelo
Original Assignee
Gen Electric
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Electric filed Critical Gen Electric
Publication of ZA925597B publication Critical patent/ZA925597B/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • C23C16/27Diamond only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B51/00Tools for drilling machines
    • B23B51/02Twist drills
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04Coating on selected surface areas, e.g. using masks
    • C23C16/042Coating on selected surface areas, e.g. using masks using masks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2226/00Materials of tools or workpieces not comprising a metal
    • B23B2226/31Diamond
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2228/00Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/04Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner applied by chemical vapour deposition [CVD]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
ZA925597A 1991-08-08 1992-07-24 Method for selctive CVD diamond deposition. ZA925597B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74277391A 1991-08-08 1991-08-08

Publications (1)

Publication Number Publication Date
ZA925597B true ZA925597B (en) 1993-04-26

Family

ID=24986161

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA925597A ZA925597B (en) 1991-08-08 1992-07-24 Method for selctive CVD diamond deposition.

Country Status (5)

Country Link
EP (1) EP0528592A1 (ko)
JP (1) JPH05209270A (ko)
KR (1) KR930004496A (ko)
CA (1) CA2072326A1 (ko)
ZA (1) ZA925597B (ko)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0613963A1 (en) * 1993-03-05 1994-09-07 General Electric Company Production of crack-free CVD diamond articles
DE4437053A1 (de) * 1994-10-18 1996-02-08 Widia Gmbh WC-Hartlegierung, Verfahren zu seiner Herstellung und seiner Verwendung
US5653812A (en) * 1995-09-26 1997-08-05 Monsanto Company Method and apparatus for deposition of diamond-like carbon coatings on drills
KR0151165B1 (ko) * 1996-04-12 1998-10-15 문정환 다이아몬드 미세가공 방법
GB0207375D0 (en) * 2002-03-28 2002-05-08 Hardide Ltd Cutting tool with hard coating
KR20030081573A (ko) * 2002-04-12 2003-10-22 홍종오 다이아몬드상 카본이 코팅된 스퀴즈 블레이드
JP4846303B2 (ja) 2005-08-30 2011-12-28 マニー株式会社 歯科用研磨器具
CA2746048C (en) 2008-12-18 2014-07-08 Bell Helicopter Textron Inc. Method and apparatus for improved vibration isolation
EP2204470A1 (en) 2008-12-19 2010-07-07 Sandvik Intellectual Property AB A method of making a coated cutting tool and a coated cutting tool
CA2754205C (en) 2009-03-12 2015-05-19 Bell Helicopter Textron Inc. Method and apparatus for improved vibration isolation
US8882091B2 (en) 2011-11-11 2014-11-11 Textron Innovations Inc. Vibration isolation system
CN106795627B (zh) * 2014-08-01 2019-06-21 哈利伯顿能源服务公司 化学气相沉积改性的多晶金刚石
CN116583622A (zh) * 2020-12-14 2023-08-11 欧瑞康表面解决方案股份公司,普费菲孔 选择性沉积金刚石涂层的方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2228745B (en) * 1989-01-10 1993-09-08 Kobe Steel Ltd Process for the selective deposition of thin diamond film by gas phase synthesis
US5022801A (en) * 1990-07-18 1991-06-11 The General Electric Company CVD diamond coated twist drills

Also Published As

Publication number Publication date
CA2072326A1 (en) 1993-02-09
JPH05209270A (ja) 1993-08-20
KR930004496A (ko) 1993-03-22
EP0528592A1 (en) 1993-02-24

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