ZA914759B - A method and apparatus for treating a surface - Google Patents
A method and apparatus for treating a surfaceInfo
- Publication number
- ZA914759B ZA914759B ZA914759A ZA914759A ZA914759B ZA 914759 B ZA914759 B ZA 914759B ZA 914759 A ZA914759 A ZA 914759A ZA 914759 A ZA914759 A ZA 914759A ZA 914759 B ZA914759 B ZA 914759B
- Authority
- ZA
- South Africa
- Prior art keywords
- treating
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/025—Continuous growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AUPK087990 | 1990-06-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
ZA914759B true ZA914759B (en) | 1992-06-24 |
Family
ID=3774786
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ZA914759A ZA914759B (en) | 1990-06-29 | 1991-06-20 | A method and apparatus for treating a surface |
Country Status (6)
Country | Link |
---|---|
CN (1) | CN1050158C (hu) |
IL (1) | IL98627A (hu) |
IN (1) | IN177541B (hu) |
MY (1) | MY110504A (hu) |
WO (1) | WO1992000406A1 (hu) |
ZA (1) | ZA914759B (hu) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004056170A1 (de) * | 2004-08-06 | 2006-03-16 | Aixtron Ag | Vorrichtung und Verfahren zur chemischen Gasphasenabscheidung mit hohem Durchsatz |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57132543A (en) * | 1981-02-09 | 1982-08-16 | Nec Corp | Horizontal type reaction tube with rotary type sample holding and heating table |
JPS59193131A (ja) * | 1983-04-19 | 1984-11-01 | Agency Of Ind Science & Technol | 薄膜連続成長装置 |
FR2591616A1 (fr) * | 1985-12-17 | 1987-06-19 | Labo Electronique Physique | Chambre de reacteur pour croissance epitaxiale en phase vapeur des materiaux semiconducteurs. |
GB2196019A (en) * | 1986-10-07 | 1988-04-20 | Cambridge Instr Ltd | Metalorganic chemical vapour deposition |
JPH0226893A (ja) * | 1988-07-15 | 1990-01-29 | Fujitsu Ltd | 気相成長装置 |
GB8824104D0 (en) * | 1988-10-14 | 1988-11-23 | Pilkington Plc | Process for coating glass |
GB8824102D0 (en) * | 1988-10-14 | 1988-11-23 | Pilkington Plc | Apparatus for coating glass |
JPH0344470A (ja) * | 1989-07-12 | 1991-02-26 | Toshiba Corp | 半導体基板の薄膜形成装置 |
-
1991
- 1991-06-19 IN IN466CA1991 patent/IN177541B/en unknown
- 1991-06-20 ZA ZA914759A patent/ZA914759B/xx unknown
- 1991-06-20 WO PCT/AU1991/000262 patent/WO1992000406A1/en unknown
- 1991-06-21 MY MYPI91001123A patent/MY110504A/en unknown
- 1991-06-26 IL IL9862791A patent/IL98627A/en not_active IP Right Cessation
- 1991-06-28 CN CN91105094A patent/CN1050158C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
IL98627A (en) | 1996-10-31 |
CN1050158C (zh) | 2000-03-08 |
CN1059763A (zh) | 1992-03-25 |
MY110504A (en) | 1998-07-31 |
WO1992000406A1 (en) | 1992-01-09 |
IN177541B (hu) | 1997-02-08 |
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