ZA876029B - Laser beam machining device - Google Patents
Laser beam machining deviceInfo
- Publication number
- ZA876029B ZA876029B ZA876029A ZA876029A ZA876029B ZA 876029 B ZA876029 B ZA 876029B ZA 876029 A ZA876029 A ZA 876029A ZA 876029 A ZA876029 A ZA 876029A ZA 876029 B ZA876029 B ZA 876029B
- Authority
- ZA
- South Africa
- Prior art keywords
- laser beam
- machining device
- beam machining
- laser
- machining
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61191212A JPS6349387A (ja) | 1986-08-15 | 1986-08-15 | レ−ザ−加工装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
ZA876029B true ZA876029B (en) | 1988-02-26 |
Family
ID=16270770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ZA876029A ZA876029B (en) | 1986-08-15 | 1987-08-14 | Laser beam machining device |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS6349387A (ja) |
ZA (1) | ZA876029B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0857150B1 (en) | 1995-10-13 | 2002-03-27 | Empak, Inc. | 300 mm microenvironment pod with door on side and grounding electrical path |
KR101718102B1 (ko) * | 2014-12-12 | 2017-04-04 | 최상준 | 새로운 반사방지막(Bottom anti-reflective coating)용 고분자 및 이를 이용한 조성물 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0659555B2 (ja) * | 1984-11-28 | 1994-08-10 | 株式会社井上ジャパックス研究所 | レーザ加工装置 |
-
1986
- 1986-08-15 JP JP61191212A patent/JPS6349387A/ja active Granted
-
1987
- 1987-08-14 ZA ZA876029A patent/ZA876029B/xx unknown
Also Published As
Publication number | Publication date |
---|---|
JPS6349387A (ja) | 1988-03-02 |
JPH0453631B2 (ja) | 1992-08-27 |
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