ZA744165B - Electron beam pattern generator - Google Patents

Electron beam pattern generator

Info

Publication number
ZA744165B
ZA744165B ZA00744165A ZA744165A ZA744165B ZA 744165 B ZA744165 B ZA 744165B ZA 00744165 A ZA00744165 A ZA 00744165A ZA 744165 A ZA744165 A ZA 744165A ZA 744165 B ZA744165 B ZA 744165B
Authority
ZA
South Africa
Prior art keywords
electron beam
beam pattern
pattern generator
generator
electron
Prior art date
Application number
ZA00744165A
Other languages
English (en)
Inventor
W Livesay
Original Assignee
Radiant Energy Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US448283A external-priority patent/US3922546A/en
Application filed by Radiant Energy Systems filed Critical Radiant Energy Systems
Publication of ZA744165B publication Critical patent/ZA744165B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
ZA00744165A 1974-03-05 1974-06-28 Electron beam pattern generator ZA744165B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US448283A US3922546A (en) 1972-04-14 1974-03-05 Electron beam pattern generator

Publications (1)

Publication Number Publication Date
ZA744165B true ZA744165B (en) 1975-07-30

Family

ID=23779689

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA00744165A ZA744165B (en) 1974-03-05 1974-06-28 Electron beam pattern generator

Country Status (7)

Country Link
JP (1) JPS50120095A (enrdf_load_stackoverflow)
DE (1) DE2431496A1 (enrdf_load_stackoverflow)
FR (1) FR2263600A1 (enrdf_load_stackoverflow)
IT (1) IT1015575B (enrdf_load_stackoverflow)
NL (1) NL7408820A (enrdf_load_stackoverflow)
SE (1) SE7408231L (enrdf_load_stackoverflow)
ZA (1) ZA744165B (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4084095A (en) * 1977-02-14 1978-04-11 Burroughs Corporation Electron beam column generator for the fabrication of semiconductor devices

Also Published As

Publication number Publication date
DE2431496A1 (de) 1975-09-11
FR2263600B3 (enrdf_load_stackoverflow) 1977-05-06
FR2263600A1 (en) 1975-10-03
JPS50120095A (enrdf_load_stackoverflow) 1975-09-19
NL7408820A (nl) 1975-09-09
IT1015575B (it) 1977-05-20
SE7408231L (enrdf_load_stackoverflow) 1975-09-08

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